JP2004061868A - Laser focusing position measuring method, optical module assembling method, and optical fiber alignment fixing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for directly and highly accurately detecting the laser beam-converged position of an optical module, and realizing shortening of the time for peak search. <P>SOLUTION: The laser beam propagating in the core parts and clad parts of the optical fibers 2 is detected. The laser beam-converged position is measured by determining the total quantity of the light entering the entire part of the optical fibers 2 and the optical fibers are center aligned and positioned. Further, the laser beam-converged position is measured from the quantity of the light entering the cores or the quantity of the light entering the clads and the optical fibers are aligned and positioned. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a laser focusing position measuring method, an optical module assembling method, and an optical fiber alignment fixing device used for optical communication and the like, and particularly to an optical fiber alignment fixing device.
[0002]
[Prior art]
In optical communication, an optical module is used in which an optical semiconductor element such as a laser diode and an optical fiber are optically coupled. In the optical module assembling process, an error in the focusing position of the laser diode occurs due to a mounting error of the laser diode in the die bonding process, a manufacturing error of the package body, and the like. For example, as shown in FIG. 17, the laser diode 1a is deviated by ΔX in the X-axis direction and ΔY in the Y-axis direction from the mounting reference position determined by the outer shape standard of the package body of the optical module, and further, with respect to the optical axis. If it is tilted by Δθ, the actual laser focal point will be greatly deviated from the position of the designed focal point. Therefore, even if the optical fiber core 2a is placed at the designed focal point, if the laser focal point is displaced more than the allowable value, it will be defective. For this reason, in the fiber alignment fixing step, the optical fiber or the optical module package is moved spatially (X, Y, Z directions) while detecting the amount of laser light entering the core 2a of the optical fiber, and the core is searched by a peak search. The maximum point of the amount of light incident on 2a is detected, and the optical fiber is fixed to the package by laser welding or the like.
[0003]
[Problems to be solved by the invention]
However, in the conventional assembling method, it is necessary to absorb and adjust all the focusing position deviation errors in the final fiber alignment fixing step, so that if the laser focusing position deviation error is too large, the position adjustment becomes impossible. This may cause overall rework or failure. In the case of a single mode optical fiber, the diameter of the cladding 2b of the optical fiber is usually 100 μm or more, but the diameter of the core 2a is extremely small, about 10 μm. Therefore, the conventional method of aligning and fixing the fiber has a problem that, when the error of the laser focusing position is large, the peak search time for searching for the maximum position of the amount of laser light entering the fine core 2a is prolonged. In addition, when a plurality of die bonding apparatuses are used, laser diode mounting position deviation occurs for each equipment, and equipment management becomes complicated. As described above, insufficient die bonding position accuracy and insufficient uniformity of the laser diode attachment cause a longer peak search time, which is a factor of lowering productivity.
[0004]
A proposal for shortening the peak search time is disclosed in Japanese Patent Laid-Open No. 8-297229. In this proposal, a charge-coupled device (CCD) camera, an optical system, and an image processing device are provided on an optical fiber alignment fixing device. The light beam of the laser diode is measured by the CCD camera at two points at different distances from the light emitting portion of the laser diode, and the current focused position is calculated from the size and position information of the light beam at these two points. In this method, the amount of deviation from the position where light should be originally collected is determined. However, the proposal disclosed in Japanese Patent Application Laid-Open No. 8-297229 is based on estimating the condensing position by calculation without directly detecting the condensing position itself, and increases the detection error of the laser condensing position. In addition, there is a problem in that measures for improving the production quality, ie, improving the die bonding accuracy based on the laser focus position deviation data, and measures for improving the productivity are not considered at all.
[0005]
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-described problems and to provide a laser focusing position measuring method which shortens a peak search time and improves the productivity of an optical fiber alignment fixing device.
[0006]
Another object of the present invention is to provide an optical module assembling method capable of realizing a reduction in assembling defects by improving the accuracy of a die bonding position.
[0007]
It is still another object of the present invention to provide an optical fiber alignment fixing device which shortens a peak search time and improves productivity.
[0008]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, a first feature of the present invention is that (a) a laser diode and (b) an optical fiber having a core portion and a cladding portion surrounding the core portion, and one end of the optical fiber is formed into a laser diode. Opposing and arranging in the direction along the optical axis of the laser diode; (c) entering the laser light of the laser diode into the optical fiber; and (d) entering the core where the laser light enters the core. A laser collection including a step of detecting the amount of light and the amount of clad incident on the clad portion, respectively, and (e) a step of aligning the condensing position of the laser light and the core portion from the core incident light and the amount of clad incident. The gist is that it is an optical position measurement method.
[0009]
According to the first aspect of the present invention, the laser focus position of the optical module can be measured in a short time, the peak search time can be reduced, and the productivity of the optical fiber alignment and fixing device can be improved.
[0010]
In the first aspect of the present invention, it is preferable that the alignment is adjusted based on the total incident light amount of the core incident light amount and the clad incident light amount. By using the total incident light amount, an initial laser focusing position shift can be detected in a short time. Further, by further performing the step of aligning the alignment based on each of the incident light quantity of the core and the incident light quantity of the clad, the core center of the optical fiber can be accurately measured. A step of measuring the total incident light amount by scanning the laser diode so that the laser light is sequentially incident from one end to the other end of the optical fiber; Calculating the coordinates and calculating the center coordinates of the core. A step of scanning the laser diode so that the laser light sequentially enters from one end of the core to the other end to measure the amount of light entering the core and the amount of light entering the clad; And calculating the center coordinates of the core by obtaining coordinates in the scanning direction where each of the threshold values becomes a threshold value. In this way, the center position of the optical fiber can be easily calculated. Further scanning is performed in a direction orthogonal to the scanning in the plane of the optical fiber facing the laser diode, and the center coordinates in the plane of the core can be calculated.
[0011]
A second feature of the present invention is that (a) a step of die-bonding a laser diode to an optical module, (b) a step of arranging the laser diode so as to face the optical fiber, and (c) laser light of the laser diode. (A) calculating the position of the laser diode from the reference position of the die bonding of the laser diode based on the measured position of the light, and (e) calculating the position shift. The present invention is directed to an optical module assembling method including a step of calculating a die bonding position deviation from the above, and a step of correcting a die bonding attachment position of a laser diode from the die bonding position deviation.
[0012]
According to the second feature of the present invention, the accuracy of the die bonding position is improved by collecting and managing the laser focusing position deviation data and performing the die bonding position deviation deviation, thereby making it possible to reduce optical module assembly defects. .
[0013]
In the second aspect of the present invention, the measurement of the light condensing position includes the step of causing the laser light of the laser diode to enter the optical fiber, and the amount of light incident on the core and the clad of the optical fiber. It is preferable to include a step of detecting the amount of light incident on the clad, and a step of measuring the focal position of the laser light from the amount of light incident on the core and the amount of light incident on the clad.
[0014]
A third feature of the present invention is that (a) a movable stage on which an optical module having a package in which a laser diode is disposed is installed, and (b) an optical fiber fixing collar abuts one end of the package. (C) an optical fiber feeder in which one end of an optical fiber fitted to an optical fiber fixing collar is opposed to a laser diode, and the optical fibers are arranged in a direction along the optical axis of the laser diode. Mechanism, (d) detecting the laser light emitted from the laser diode at the other end of the optical fiber, and calculating an optical fiber light quantity, and (e) acquiring the optical fiber light quantity. And an optical fiber alignment controller for controlling the movable stage and the optical fiber feed mechanism to align the laser beam condensing position at the center of the optical fiber. And summarized in that a location.
[0015]
According to the third feature of the present invention, it is possible to reduce the time required for the peak search and to improve the productivity.
[0016]
In the third aspect of the present invention, it is preferable to further include an optical fiber fixing section for fixing the optical fiber to the package according to an instruction from the optical fiber alignment control section. Even if the optical fiber fixing section only fixes the optical fiber and the collar for fixing the optical fiber, it also fixes the optical fiber and the collar for fixing the optical fiber, and also fixes the collar for fixing the optical fiber and the package. It may be something.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, first to third embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic and shapes and dimensions are different from actual ones. Therefore, specific shapes and dimensions should be determined in consideration of the following description. Also, it goes without saying that the drawings include portions having different dimensional relationships and ratios.
[0018]
First, an outline of an optical module which is an object of the optical fiber alignment and fixing device according to the first to third embodiments of the present invention will be described. As shown in FIG. 1, the optical module 1 includes a laser diode 1a, a mount 1g in which the laser diode 1a is die-bonded, and a laser beam emission of the laser diode 1a inside a package 1f hermetically sealed by a cap 1c. And a condenser lens 1b arranged to face the surface. An external electrode terminal 1e and an internal electrode terminal 1d are arranged on the package 1f, and the internal electrode terminal 1d and the laser diode 1a are wired by bonding wires (not shown). An optical fiber fixing collar 3 is fixed to one end of the package 1f, and an optical fiber 2 is fixed inside the optical fiber fixing collar 3 so as to face the condenser lens 1b. The optical fiber 2 includes a core 2a for transmitting laser light, and a clad 2b having a refractive index different from that of the core 2a for preventing leakage of the laser light to the outside of the core 2a. At the tip of the optical fiber 2, a metal ferrule 2 c for fixing the optical fiber 2 inside the optical fiber fixing collar 3 is bonded to the outer periphery of the clad 2 b.
[0019]
The optical module 1 has a configuration in which a laser diode 1a emits light by energizing an external electrode terminal 1e, and a light beam of a laser beam that is spatially spread is condensed by a lens 1b and made incident on an optical fiber 2. I have. Therefore, when assembling the optical fiber 2 and the collar 3 for fixing the optical fiber into the optical module 1, the laser light is effectively taken into the core 2 a of the optical fiber 2. Needs to be adjusted to match the laser focus position.
[0020]
(First Embodiment)
As shown in FIG. 2, the optical fiber alignment and fixing device according to the first embodiment of the present invention includes a movable stage 5 on which an optical module 1 having a package 1f in which a laser diode 1a is disposed is installed. The collar holding portion 7 for holding the optical fiber fixing collar 3 in contact with one end of the package 1f and the one end of the optical fiber 2 fitted to the optical fiber fixing collar 3 face the laser diode 1a. An optical fiber feed mechanism 8 for arranging the optical fibers 2 in a direction along the optical axis of the laser diode 1a, and detecting the laser light emitted from the laser diode 1a at the other end of the optical fiber 2 and detecting the amount of light entering the optical fiber. The optical fiber light quantity measuring unit 30 to be calculated and the optical fiber incident light quantity are acquired, and the movable stage 5 and the optical fiber feed mechanism 8 are controlled to set the focus position of the laser light. An optical fiber alignment control unit 12 that performs alignment at the center of the fiber 2, an optical fiber 2 and an optical fiber fixing collar 3, and an optical fiber fixing collar 3 and a package 1f are fixed according to an instruction from the optical fiber alignment control unit 12. And an optical fiber fixing portion 31 to be formed. The movable stage 5 and the color holding unit 7 are arranged on the machine base 4. On the movable stage 5, a package holder 6 for positioning and holding the outer shape of the package 1f of the optical module 1 is further mounted. An optical fiber feeding mechanism 8 having an optical fiber holding section 9 for positioning and fixing the optical fiber 2 is mounted on the collar holding section 7. The other end of the optical fiber 2 is positioned and fixed by the fiber positioning unit 10 and faces the television camera 15 of the optical fiber light quantity measuring unit 30 with the alignment lens 11 interposed therebetween.
[0021]
The movable stage 5 can scan in the X, Y, and Z directions. The movable stage controller 13 controls the spatial positioning operation of the optical module 1 and the optical fiber fixing collar 3. Here, in the movable stage 5, the direction perpendicular to the plane of FIG. 2 is the X axis, the horizontal direction is the Y axis, and the vertical direction, that is, the direction along the optical axis of the optical fiber 2, is the Z axis. The optical fiber feed mechanism 8 controls the positioning operation of the optical fiber 2 fixed to the optical fiber holding unit 9 in the Z-axis direction by the optical fiber feed controller 14. The laser diode 1a is energized by a laser diode drive power supply 17 connected to the external electrode terminal 1e, and emits laser light to one end of the optical fiber 2. At the other end of the optical fiber 2, the laser light propagating through the inside of the optical fiber 2 from one end of the optical fiber 2 is focused on the television camera 15 of the optical fiber light quantity measuring unit 30 via the alignment lens 11. That is, the surface image of the other end of the optical fiber 2 is enlarged and formed on the imaging surface of the television camera 15 via the alignment lens 11. The position and intensity of the laser light emitted from the optical fiber 2 are detected by the image recognition processing device 16 of the optical fiber light quantity measuring unit 30 based on the image of the television camera 15. Information such as the position and intensity of the detected laser light is output to the optical fiber alignment control unit 12. The optical fiber alignment control unit 12 executes the laser alignment by controlling the optical fiber feed controller 14 and the movable stage controller 13 based on information such as the position and intensity of the laser light obtained from the image recognition processing device 16. An instruction for welding fixing is output to the YAG laser controller 18 of the fixing unit 31. The optical fiber fixing YAG laser 19 of the optical fiber fixing unit 31 is activated by the YAG laser controller 18 according to the instruction of the optical fiber alignment control unit 12 after the positioning of the optical fiber 2 in the Z-axis direction. 2c and the collar 3 for fixing the optical fiber are fixed by laser welding. On the other hand, the color fixing YAG laser 20 of the optical fiber fixing unit 31 is activated by the YAG laser controller 18 according to the instruction of the optical fiber alignment control unit 12 after the positioning of the optical fiber 2 in the XY plane, and the optical fiber fixing color is fixed. 3 and the package 1f of the optical module 1 are fixed by laser welding.
[0022]
Next, a laser alignment fixing method according to the first embodiment of the present invention using the optical fiber alignment fixing device shown in FIG. 2 will be described with reference to FIGS.
[0023]
(A) As the initial setup work, first, the positioning and holding of the outer shape of the optical module 1 to the package holding portion 6, the positioning and holding of the outer shape of the optical fiber fixing collar 3 to the color holding portion 7, and the fixing of the optical fiber 2 to the fiber fixing portion 9 Is held. At this time, the lower end of the optical fiber fixing collar 3 is brought into contact with the upper end of the optical module 1 as shown in FIG. Next, the laser diode driving power supply 17 is connected to the external electrode terminal 1e of the optical module 1 to cause the laser diode 1a to emit light. As an initial position of the laser alignment, for example, as shown in FIG. 4A, the laser converging point and the light receiving surface (core 2a) of the optical fiber 2 are largely displaced, and the luminous flux of the light emitted from the laser diode 1a Is greatly spread on the surface portions of the core 2a and the cladding 2b.
[0024]
(B) In step S51 of FIG. 3, the optical fiber feed controller 14 drives the optical fiber feed mechanism 8 in accordance with an instruction from the optical fiber alignment controller 12, and performs a Z search which is a peak search of the optical fiber 2 in the optical axis direction. Move to detect a detectable area. In step S51, as shown in FIG. 4B, the optical fiber 2 is moved in the Z-axis direction to a position where a light beam can be effectively taken into the core 2a and the clad 2b, that is, a detectable region. The core 2a of the optical fiber 2 is extremely thin, having a diameter of about 10 μm, and the laser alignment accuracy is required to be 1 μm or less. In the conventional method of detecting only the amount of light incident on the core 2a, the peak search time is required. Becomes longer. Therefore, in step S51, a peak search is performed using the total sum of the amounts of light incident on the core 2a and the cladding 2b (hereinafter, referred to as "total amount of incident light"). The measurement of the amount of light incident on the core 2a and the cladding 2b is performed by imaging the end face of the optical fiber 2 with the television camera 15 and processing the images as shown in FIG. The television camera 15 simultaneously detects the images of both the core 2a and the clad 2b of the optical fiber 2, but the image recognition processing device 1 divides the image into the core 2a and the clad 2b, To separate. For example, when calculating the core incident light amount, the image of the clad 2b is masked, and when calculating the clad incident light, the image of the core 2a is masked. The total incident light amount may be the sum of the core incident light amount and the clad incident light amount. Further, since the detection sensitivity of the television camera 15 differs depending on the wavelength of the light of the laser diode 1a, for example, if the wavelength is in the infrared region, an infrared camera having a suitable sensitivity characteristic may be selected. In addition, the detection light intensity of the television camera 15 is calibrated in advance with laser light having a known laser light intensity and intensity distribution.
[0025]
(C) Next, in step S52, the movable stage controller 13 drives the movable stage 5 in accordance with an instruction from the optical fiber alignment controller 12, performs XY coarse scanning in the X-axis and Y-axis directions, and The optical axis XY center detection is performed so that the centers of the fibers 2 are substantially aligned. As shown in FIG. 4C, an optical module 1 having a laser diode 1a and a condenser lens 1b fixed is scanned in the X-axis and Y-axis directions. A change in the total amount of incident light is detected. Note that the scanning pitch is set to be larger than the required alignment accuracy (about 1 μm), for example, about 10 μm, and the number of times of image sampling by the television camera 15 is reduced. Interpolation between the sampling points can be obtained by calculation by interpolation, and as a result, the scanning time is greatly reduced.
[0026]
(D) In step S53, the optical fiber feed controller 14 drives the optical fiber feed mechanism 8 in accordance with an instruction from the optical fiber alignment controller 12 to perform Z step feed, and searches for a peak in the Z-axis direction in the range of the core 2a. I do. That is, the state shown in FIG. 4C is a state in which the optical axis and the center of the optical fiber 2 are substantially coincident with each other, but since the laser focal point has not been obtained yet, the Z-axis as shown in FIG. Is finely stepped to find the maximum position of the core incident light amount or the minimum position of the clad incident light amount in the range of the core 2a, and a peak on the Z axis is detected.
[0027]
(E) In step S54, the movable stage controller 13 drives the movable stage 5 according to an instruction from the optical fiber alignment controller 12, performs XY fine movement scanning, and performs a peak search in the X-axis and Y-axis directions. As shown in FIG. 4E, fine scanning is performed with the scanning pitch in the X and Y axis directions being about 1 μm, and the focal point of the laser beam is adjusted to the center of the core 2a.
[0028]
(F) In step S55, the optical fiber alignment control unit 12 detects a deviation between the core incident light maximum position and the center position of the core 2a by the image recognition processing device 16, and if the deviation is equal to or larger than a preset allowable value. For example, it instructs to repeat the peak search by the Z step feed in step 53 and the XY fine movement scan in step 54. If the difference between the core incident light maximum position and the center position of the core 2a is equal to or less than a preset allowable value, the optical fiber fixing collar 3 and the metal ferrule 2c are welded and fixed by the optical fiber fixing YAG laser 19 in step S56. Is done. Further, after confirming whether or not displacement has occurred due to this welding, the amount of light incident on the core, the optical fiber fixing collar 3 and the optical module 1 are welded and fixed by the color fixing YAG laser 20.
[0029]
In this manner, the optical fiber alignment fixing work is completed. After the peak search in steps S51 to S54, if the core incident light amount is equal to or less than the specified value, the welding fixing work is not performed and it is determined to be defective. For example, there is a case where the optical axis cannot be aligned with the center of the optical fiber 2 because the die bonding position of the laser diode 1a or the fixing position of the condenser lens 1b is greatly shifted. If the displacement is caused by the die bonding position of the laser diode 1a, the laser diode 1a can be repaired using a die bonding apparatus, and the die bonding position can be corrected again.
[0030]
Next, the detection algorithm of the XY coarse scan (step S52) and the XY fine movement scan (step S54) of the peak search according to the first embodiment of the present invention will be described with reference to FIGS.
[0031]
In FIG. 5A, the horizontal direction is the X axis, and the vertical direction is the Y axis. First, the movable stage is driven so that the light beam of the laser diode 1a is once completely removed from the optical fiber 2, and scanning A is performed in the X direction from that position. At this time, the change of the total incident light amount becomes a trapezoidal shape as shown in FIG. In a region Ra of FIG. 5B, the total amount of incident light increases with an increase in the area where the light beam from the laser diode 1a enters the optical fiber 2, and when the entire light beam from the laser diode 1a enters the optical fiber 2. As shown in a region Rm in FIG. 5B, the total amount of incident light is substantially constant. Further, in the region Rb, as the light beam from the laser diode 1a deviates from the optical fiber 2, the total amount of incident light decreases. Here, a value at which the total amount of incident light is の of a constant value in the region Rm is set as a threshold value Th, and its X coordinates are set as Xa and Xb, respectively. In this case, the position indicating the threshold value Th substantially coincides with the edge point of the optical fiber 2 in the scan A. Therefore, the center coordinate of the optical fiber 2 in the X-axis direction can be obtained as (Xa + Xb) / 2 by scanning A.
[0032]
Next, as shown in scan B of FIG. 5A, the X coordinate is moved to the center coordinate (Xa + Xb) / 2 of the optical fiber 2 and the Y coordinate is moved to a position outside the optical fiber 2. Thereafter, scanning C is performed in the Y direction. As shown in FIG. 5C, the change in the total incident light amount of the scan C increases in the region Rc, becomes a constant value in the region Rn, and decreases in the region Rd. Here, by providing the threshold value Th in the same manner as in the scan A in the X-axis direction, an edge point in the Y-axis direction of the optical fiber 2 in the scan C can be detected. Assuming that the Y coordinates of the edge point are Yc and Yd, the Y center coordinate of the optical fiber 2 in the Y-axis direction can be obtained as (Yc + Yd) / 2.
[0033]
As described above, in the XY coarse scanning, the coarse detection of the center coordinates substantially corresponding to the center position of the core 2a of the optical fiber 2 can be performed by only three scans A, B, and C.
[0034]
Next, XY fine movement scanning will be described with reference to FIG. The scanning procedure is similar to the XY coarse scanning, but in FIG. 6A, unlike FIG. 5A, only the edge points Xe, Xf, Yg, Yh of the core 2a at the center of the optical fiber 2 are obtained. Therefore, the scanning range is small and narrow. Further, in order to accurately determine the center of the core 2a, both the amount of light entering the core 2a and the amount of light entering the clad 2b are individually detected. The horizontal direction in FIG. 6A is the X axis, and the vertical direction is the Y axis. First, the movable stage is driven so that the light beam of the laser diode 1a is once completely removed from the core 2a and enters the clad 2b, and scanning D is performed in the X direction from that position. At this time, as shown in FIG. 6B, the change in the core incident light amount (solid line) and the clad incident light amount (dashed line) are reversed. Here, assuming that the light amount at which the core incident light amount and the clad incident light amount become equal is the threshold value Th, the X coordinates Xe and Xf become the X-axis edge points of the core 2a in the scan D. Therefore, the X coordinate of the center of the core 2a is obtained as (Xe + Xf) / 2. Next, as shown in a scan E of FIG. 6A, the X coordinate is moved to the center coordinate (Xe + Xf) / 2 of the core 2a, the Y coordinate is moved to a position outside the core 2a, and the scan F is performed in the Y direction. Do. Also in this scan F, as shown in FIG. 6C, the Y coordinate of the center of the core 2a is (Yg + Yh) / 2 from the Y coordinates Yg and Yh at which the core incident light amount or the clad incident light amount becomes the threshold Th. Is obtained as In the measurement of the amount of incident light on the core, the amount of light is increased, the sensor is saturated, and the detection accuracy of the edge point of the core 2a may be reduced. Easy to measure as a part. As shown in FIGS. 6B and 6C, an accurate peak search can be performed by combining the incident light amount of the core and the incident light amount of the clad.
[0035]
Further, after the above-described two-stage peak search of the coarse detection and the fine detection, scanning is finally performed again in the X and Y directions at a fine pitch, for example, a 0.1 μm pitch at the maximum position of the core incident light amount or the minimum position of the clad incident light amount. However, the center of the optical fiber 2 can be detected with high accuracy.
[0036]
As described above, according to the laser focus position measuring method according to the first embodiment of the present invention, the laser focus position can be directly detected with high accuracy, and the peak search time can be reduced. Therefore, the alignment of the optical fiber in assembling the optical module can be performed with high precision and efficiency.
[0037]
(Application Example According to First Embodiment)
The system for improving the accuracy of die bonding position according to an application example of the first embodiment of the present invention performs die bonding position deviation deviation correction by applying the above-described laser focusing position measuring method. The description which overlaps with the embodiment is omitted.
[0038]
As shown in FIG. 7, in the die bonding accuracy improving system, a plurality of die bonding devices 22 and a plurality of optical fiber alignment fixing devices 23 are connected to a position accuracy management system 21. The plurality of optical fiber alignment fixing devices 23 each send positional information from a predetermined laser focusing position, and manufacturing information such as a manufacturing number, a manufacturing date and time, and a machine number to the position accuracy management system 21, The position accuracy management system 21 stores such information. Here, the predetermined focal point is a focal point when the laser diode 1a is die-bonded to an attachment reference position determined by the outer shape reference of the package 1f body of the optical module 1 (see FIG. 17). . Therefore, the difference (ΔX, ΔY, ΔZ) between the coordinates of the laser focus position obtained as a result of the laser focus position measurement and the predetermined laser focus position is the displacement of the die bonding. The plurality of die bonding apparatuses 22 also send manufacturing information such as a manufacturing number, a manufacturing date and time, and a machine number to the position accuracy management system 21, and the position accuracy management system 21 stores the information. The positional accuracy management system 21 stores the positional deviation amount (X, Y, Z directions) of each die bonding apparatus based on the positional deviation data and the manufacturing information of each optical fiber alignment fixing device 23, The position deviation correction information output to the die bonding apparatus 22 is calculated. When the average position deviation amount falls outside the position deviation allowable range, position deviation correction command information is individually output to each die bonding apparatus 22. The die bonding apparatus 22 receives the position deviation correction command, corrects the position at which the laser diode 1a is die-bonded to a normal position, and performs die bonding.
[0039]
A method of correcting a deviation in a die bonding position deviation according to an application example of the first embodiment of the present invention will be described with reference to a flowchart shown in FIG.
[0040]
(A) In step S61, the position accuracy management system 21 acquires and stores device information such as manufacturing information of the plurality of optical fiber alignment fixing devices 23 and manufacturing information of the plurality of die bonding devices 22.
[0041]
(B) In step S62, the position accuracy management system 21 sets a position deviation allowable range for the die bonding position deviation.
[0042]
(C) In step S63, the die bonding apparatus 22 performs die bonding of the laser diode 1a on the mount 1g in the package 1f of the optical module 1 under conditions registered in the position accuracy management system 21 in advance.
[0043]
(D) In step S64, the optical module 1 to which the laser diode 1a is die-bonded carries out the alignment step of the optical fiber 2 in the optical fiber alignment fixing device 23 through the wiring step and the lens fixing step. The position accuracy management system 21 acquires the die bonding position deviation information (ΔX, ΔY, ΔZ) obtained by measuring the laser condensing position in the optical fiber alignment and fixing device 23, The positional deviation amounts are sequentially recorded in the X, Y, and Z directions independently. For example, the variation of the positional deviation amount ΔX in the X direction of the specific die bonding apparatus 22 in the order of the manufacturing date and time is shown by a solid line in FIG.
[0044]
(E) In step S65, for example, the average positional deviation amount is calculated by the moving average method, and the variation of the positional deviation in the order of the manufacturing date and time is calculated as shown by the broken line in FIG.
[0045]
(F) In step S66, the position accuracy management system 21 compares the position deviation with the position deviation allowable range. If the position deviation is within the position deviation allowable range, in step S68, the optical fiber alignment fixing device turns on the optical fiber. The step of welding and fixing the module 1 and the optical fiber 2 is performed.
[0046]
(G) For example, as shown in FIG. 9, it is assumed that the position deviation is out of the position deviation allowable range at the manufacturing date / time point A. In this case, the position accuracy management system 21 individually outputs the position deviation correction command information to the specific die bonding apparatus 22 in step S67. The specific die bonding apparatus 22 receives the position deviation correction command, corrects the position at which the laser diode is die-bonded to a normal position, and performs die bonding in step S63. The position accuracy management system 21 outputs the position deviation correction command information to the die bonding apparatus 22 again at the production date B point at which the position deviation falls outside the position deviation allowable range, and corrects the die bonding position.
[0047]
According to the die bonding position accuracy improving system according to the application example of the first embodiment of the present invention, the die bonding position accuracy of the laser diode 1a can be improved, and the assembly failure due to the die bonding position shift can be reduced.
[0048]
Further, the position accuracy management system 21 can manage not only the die bonding apparatuses 22 individually but also the die bonding apparatuses 22 as a group. That is, in addition to individually managing the above-described position correction information, it is also monitored whether the position deviation of the die bonding of the entire die bonding apparatus 22 group is within the allowable range of the position deviation. Position correction command information can be provided to the group of devices 22. Of course, the position accuracy management system 21 can also be used for quality control, such as statistical management of position deviation accuracy and abnormality detection of position deviation failure.
[0049]
(Second embodiment)
The optical module assembling method according to the second embodiment of the present invention differs from the first embodiment in that the optical fiber alignment and fixing step is performed in two stages. The other parts are the same as those of the first embodiment, and the duplicated description will be omitted. That is, in the first embodiment of the present invention, the Z-axis alignment fixing and the XY-axis alignment fixing are simultaneously performed by the same optical fiber alignment fixing device. However, in the second embodiment, the Z-axis alignment fixing is performed. By making the steps of center fixing and XY axis center fixing independent of each other, it is possible to greatly reduce the working time and improve the yield.
[0050]
The optical fiber alignment fixing device according to the second embodiment of the present invention specializes in Z-axis alignment fixing, and as shown in FIG. 10, the color fixing of the optical fiber alignment fixing device of FIG. This can be realized by a configuration excluding the YAG laser 20. The optical fiber alignment and fixing device measures the positional shift amount of the laser converging point on the Z axis and performs alignment, and then the YAG laser controller 18a of the optical fiber fixing unit 31a is activated by a command from the optical fiber alignment control unit 12a. Then, the metal ferrule 2c of the optical fiber 2 and the optical fiber fixing collar 3 are welded and fixed by the optical fiber fixing YAG laser 19a of the optical fiber fixing section 31a. The optical module 1 after completion of the measurement of the laser focusing position shift, the optical fiber 2 fixed by welding and the optical fiber fixing collar 3 are paired and sent to the optical fiber alignment fixing device shown in FIG. After the alignment in the Y direction, the YAG laser controller 18b of the optical fiber fixing section 31b is activated by the optical fiber alignment control section 12b, and the color fixing YAG laser 20b of the optical fiber fixing section 31b and the optical fiber fixing collar 3 and the light are fixed. The package 1f of the module 1 is fixed by welding. Here, as shown in FIG. 11, the optical fiber alignment fixing device has a configuration in which the optical fiber fixed YAG laser 19, the optical fiber feed controller 14, and the fiber feed mechanism 8 are removed from the configuration of FIG. Of course, the optical fiber alignment fixing device shown in FIG. 2 may be substituted.
[0051]
Comparing the XY axis alignment fixing work and the Z axis alignment fixing work time, it was found that the operation time of the XY axis alignment fixing work was 3.5 times as long as the Z axis alignment fixing work. Therefore, when the XY axis alignment fixing operation and the Z axis alignment fixing operation are performed by one optical fiber alignment fixing device, the XY axis alignment fixing operation is a rate-determining step, and the entire operation time is reduced. It is determined by the XY axis alignment fixed work time. However, as in the second embodiment of the present invention, by dividing the two operations into a flow operation, it is possible to greatly reduce the entire operation time.
[0052]
In the second embodiment of the present invention, since the optical fiber 2 and the optical fiber fixing collar 3 are welded and fixed in advance, the optical fiber alignment and fixing device shown in FIG. This is unnecessary, and the peak search only needs to scan in the X and Y directions. The peak search time can be greatly reduced, which is very useful for improving the yield.
[0053]
Next, the procedure of the laser alignment fixing method according to the second embodiment of the present invention will be described with reference to FIG.
[0054]
(A) With the optical fiber alignment fixing device shown in FIG. 10, the positioning and holding of the outer shape of the optical module 1 to the package holding portion 6, the positioning and holding of the outer shape of the optical fiber fixing collar 3 to the color holding portion 7, and the holding of the optical fiber 2 The holding to the fiber fixing portion 9 is performed. At this time, as shown in FIG. 10, the lower end of the optical fiber fixing collar 3 is in contact with the upper end of the optical module 1. Next, the laser diode driving power supply 17 is connected to the external electrode terminal 1e of the optical module 1 to cause the laser diode 1a to emit light. Thereafter, in step S71 in FIG. 13, the optical fiber feed controller 14 drives the optical fiber feed mechanism 8 according to an instruction from the optical fiber alignment control unit 12a, and performs Z movement as a peak search of the optical fiber 2 in the Z-axis direction. Is performed to detect a detectable area with the total amount of incident light.
[0055]
(B) In step S72, the optical fiber feed controller 14 drives the optical fiber feed mechanism 8 in accordance with an instruction from the optical fiber alignment control unit 12a to perform Z step feed, and condenses laser light in the Z-axis direction with the total amount of incident light. Find points.
[0056]
(C) In step S73, the optical fiber alignment controller 12a determines whether the total amount of incident light is the maximum. When it is determined that the total incident light amount is not the maximum, the Z step feed of step S72 is repeated.
[0057]
(D) If it is determined that the total incident light amount is the maximum, in step S74, the optical fiber alignment controller 12a outputs an instruction to the YAG laser controller 18a, activates the optical fiber fixed YAG laser 19a, and activates the metal ferrule 2c. And the optical fiber fixing collar 3 are fixed by welding.
[0058]
(E) The optical module 1 after completion of the measurement of the laser focusing position shift, the optical fiber 2 fixed by welding and the optical fiber fixing collar 3 are paired and sent to the optical fiber alignment fixing device shown in FIG. . In step S75, the movable stage controller 13 drives the movable stage 5 in accordance with an instruction from the optical fiber alignment controller 12b to perform XY coarse scanning in the X-axis and Y-axis directions. Are detected so that the optical axis XY center is substantially matched.
[0059]
(F) In step S76, the movable stage controller 13 drives the movable stage 5 in accordance with an instruction from the optical fiber alignment controller 12b to perform XY fine movement scanning in the X-axis and Y-axis directions, and sets the focal point of the laser light. Align with the center of the core 2a.
[0060]
(G) In step S77, the optical fiber alignment control unit 12b detects a deviation between the core incident light maximum position and the center position of the core 2a by the image recognition processing device 16, and if the deviation is equal to or greater than a preset allowable value. If this is the case, the XY fine movement scanning of step 76 is repeated.
[0061]
(H) If the deviation between the maximum core incident light amount position and the center position of the core 2a is equal to or less than a preset allowable value, the optical fiber alignment control unit 12b outputs an instruction to the YAG laser controller 18b to output a color fixed YAG laser. 20b is started, and the optical fiber fixing collar 3 and the optical module 1 are fixed by welding.
[0062]
In this manner, the optical fiber alignment fixing work is completed.
[0063]
(Application Example according to Second Embodiment)
The die bonding accuracy improving system according to the application example of the second embodiment of the present invention is different from the application example of the first embodiment in that the optical fiber alignment and fixing step is performed in two stages. And different.
[0064]
As shown in FIG. 13, a die bonding accuracy improvement system according to an application example of the second embodiment of the present invention includes a position accuracy management system 21a, a die bonding device 22a connected to the position accuracy management system 21a, and an optical system. It comprises a fiber alignment and fixing device 23a and an optical fiber alignment and fixing device 23b. The optical fiber alignment fixing device 23a sends the positional deviation information and the manufacturing information to the position accuracy management system 21a. The position accuracy management system 21a sends the alignment initial position information to the optical fiber alignment and fixing device 23b, and the optical fiber alignment and fixing device 23b sends the initial positions of the optical fiber 2 and the optical module 1 based on the alignment initial position information. Correct the alignment position. Other points are the same as those of the application example of the first embodiment, and thus duplicated description will be omitted.
[0065]
A die bonding position deviation deviation correcting method according to an application example of the second embodiment of the present invention will be described with reference to FIG.
[0066]
(A) In step S81, the position accuracy management system 21a includes devices such as manufacturing information of the plurality of optical fiber alignment fixing devices 23a and the plurality of optical fiber alignment fixing devices 23b, and manufacturing information of the plurality of die bonding devices 22a. Obtain and store information.
[0067]
(B) In step S82, the position accuracy management system 21a sets a position deviation allowable range for the die bonding position deviation.
[0068]
(C) In step S83, the specific die bonding apparatus 22a performs die bonding of the laser diode 1a on the mount 1g in the package 1f of the optical module 1 under conditions registered in advance in the position accuracy management system 21a.
[0069]
(D) In step S84, after the initial setup work is performed by the optical fiber alignment fixing device 23a shown in FIG. 13, a peak search in the Z-axis direction is performed, and a detectable area is detected based on the total incident light amount. Subsequently, Z step feed is performed, and the laser converging point in the Z-axis direction is detected based on the total incident light amount. The position accuracy management system 21a obtains the positional deviation amount ΔZ in the Z direction of the die bonding obtained by measuring the laser focusing position in the specific optical fiber alignment fixing device 23a, The displacement is recorded in order.
[0070]
(E) In step S85, the positional accuracy management system 21a calculates the average positional deviation amount by, for example, the moving average method, and calculates the fluctuation of the positional deviation in the order of the manufacturing date and time.
[0071]
(F) In step S86, the position accuracy management system 21a compares the position deviation in the Z direction with the position deviation allowable range. If the position deviation is within the position deviation allowable range, in step S88, the optical fiber alignment is fixed. The device 23a fixes the metal ferrule 2c of the optical fiber 2 and the collar 3 for fixing the optical fiber by welding.
[0072]
(G) When the position deviation is out of the position deviation allowable range, in step S87, the position accuracy management system 21a individually outputs position deviation correction command information to a specific die bonding apparatus 22a. The specific die bonding apparatus 22a receives the position deviation correction command, corrects the Z-direction position at which the laser diode 1a is die-bonded to a normal position, and returns to step S83.
[0073]
(H) The optical module 1 after completion of the measurement of the laser focusing position shift, the optical fiber 2 fixed by welding and the optical fiber fixing collar 3 are paired, and a specific optical fiber alignment fixing as shown in FIG. It is sent to the device 23b. Then, XY coarse scanning is performed in the X-axis and Y-axis directions, the XY center of the optical axis is detected so that the optical axis and the center of the optical fiber 2 are substantially aligned, and then XY in the X-axis and Y-axis directions is detected. Fine movement scanning is performed, and the focal point of the laser beam is adjusted to the center of the core 2a. In step S89, the position accuracy management system 21a obtains the positional deviation amounts ΔX and ΔY of the die bonding in the X and Y directions obtained by measuring the laser focusing position in the specific optical fiber alignment and fixing device 23b, and performs die bonding. The amount of displacement is recorded independently for each of the X and Y directions in the order of manufacturing date and time for each device of the device 22a.
[0074]
(I) In step S90, the positional accuracy management system 21a calculates the average positional deviation amount by, for example, the moving average method, and calculates the fluctuation of the positional deviation in the order of the manufacturing date.
[0075]
(V) In step S91, the position accuracy management system 21a compares the position deviation in the X and Y directions with the position deviation allowable range. If the position deviation is within the position deviation allowable range, in step S93, the specific light The fiber alignment fixing device 23b carries out a welding fixing step of the optical module 1 and the optical fiber 2.
[0076]
(V) If the positional deviation in the X and Y directions deviates from the allowable positional deviation range, in step S92, the positional accuracy management system 21a individually outputs positional deviation correction command information to a specific die bonding apparatus 22a. The specific die bonding apparatus 22a receives the position deviation correction command, corrects the position at which the laser diode 1a is die-bonded to a normal position, and performs die bonding again at step S83.
[0077]
According to the application example of the second embodiment of the present invention, it is possible to improve the die bonding accuracy and reduce assembly failure due to a die bonding position error.
[0078]
(Third embodiment)
An optical fiber alignment and fixing device according to a third embodiment of the present invention includes a photosensor 25 such as a photodiode or a phototransistor instead of a television camera 15 and an image recognition processing device 16 and an analog / digital (AD) converter 26 is different from the first and second embodiments described above.
[0079]
As shown in FIG. 15, in the optical fiber alignment fixing device according to the third embodiment of the present invention, the laser light propagating inside the optical fiber 2 is coupled to the optical fiber light quantity measuring unit 30a via the alignment lens 11. This is a system detected by the photo sensor 25 and the AD converter 26 of FIG. Here, the core 2a and the clad 2b of the optical fiber 2 are not divided into regions, and the total incident light amount is detected by the photosensor 25, and the total incident light amount re-digitized by the AD converter 26 is calculated by the optical fiber alignment controller 12c. Is output to As shown in the XY scan explanatory diagram of FIG. 16A, the laser focus point detection processing at this time is performed in three scans P, Q, and S, as in the first embodiment of the present invention. Scan completes. In the scan P, as shown in FIG. 16B, the total incident light amount increases in the region Rp, becomes a constant value in the region Rt, and changes so as to decrease in the region Rq. Similarly, in the scanning S, as shown in FIG. 16C, the total incident light amount increases in the region Rr, becomes a constant value in the region Ru, and changes so as to decrease in the region Rs. Here, by providing 1/2 of the constant total incident light amount of the region Rt or Ru as the threshold value Th, the edge points Xp, Xq, and Yr of the optical fiber 2 in the X and Y axes in the scans P and S are determined. Ys can be detected. The center coordinates of the optical fiber 2 in the X and Y axis directions can be obtained as [(Xp + Xq) / 2, (Yr + Ys) / 2]. The other parts are the same as those of the first and second embodiments, and the duplicated description will be omitted.
[0080]
The laser focusing position measuring method according to the third embodiment of the present invention can also be implemented by the following method. The total incident light amount measurement is performed at the minimum resolution of laser focus detection, for example, 0.1 μm or less, for both scans P and S in the X and Y directions. The scans P and S are turned green each time the optical fiber 2 is moved in the Z direction at a predetermined pitch interval of the minimum resolution for detecting the laser focal point in the Z direction. When moving in the Z direction, the widths of the regions Rp and Rq or the regions Rr and Rs in FIGS. 16B and 16C change, and the width of each region decreases as the distance from the laser focus point increases. The end of the laser focus point detection in the Z direction, that is, the end of the Z-direction focal position detection can be determined based on whether the width of the regions Rp and Rq or the regions Rr and Rs has become minimum. Then, the detection center X and Y coordinates of the optical fiber 2 at the Z position are set as the X and Y detection coordinates of the laser focal point. After that, the metal ferrule 2c and the optical fiber fixing collar 3 are welded and fixed by the optical fiber fixing YAG laser 19c.
[0081]
As described above, according to the laser condensing position measuring method according to the third embodiment of the present invention, the laser condensing position can be directly detected with high accuracy, and the peak search time can be reduced. .
[0082]
(Other embodiments)
As described above, the embodiments of the present invention have been described. However, it should not be understood that the description and drawings forming a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples, and operation techniques will be apparent to those skilled in the art.
[0083]
For example, in the first to third embodiments of the present invention, the fixing of the metal ferrule 2c of the optical fiber 2 and the collar 3 for fixing the optical fiber has been described using the example of YAG laser welding. Instead of laser welding, a method of temporarily fixing with an adhesive that can be adhered for a short time such as an ultraviolet (UV) adhesive may be used. In this case, this fixing is performed by YAG laser welding with an optical fiber alignment fixing device.
[0084]
As described above, the present invention naturally includes various embodiments and the like not described herein. Therefore, the technical scope of the present invention is defined only by the matters specifying the invention according to the claims that are appropriate from the above description.
[0085]
【The invention's effect】
According to the present invention, it is possible to provide a laser focusing position measuring method which shortens the peak search time and improves the productivity of the optical fiber alignment and fixing device.
[0086]
Further, according to the present invention, it is possible to provide an optical module assembling method capable of realizing a reduction in assembling defects by improving die bonding position accuracy.
[0087]
Further, according to the present invention, it is possible to provide an optical fiber alignment fixing device which shortens a peak search time and realizes an improvement in productivity.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of an optical module to which an optical fiber alignment and fixing device according to first to third embodiments of the present invention is applied.
FIG. 2 is a block diagram illustrating a configuration of an optical fiber alignment and fixing device according to a first embodiment of the present invention.
FIG. 3 is a flowchart of a laser focusing position measuring method according to the first embodiment of the present invention.
FIG. 4 is a schematic diagram of a peak search in the laser focusing position measuring method according to the first embodiment of the present invention.
FIG. 5 is a diagram illustrating XY coarse scanning in the laser focus position measuring method according to the first embodiment of the present invention.
FIG. 6 is a diagram illustrating XY fine movement scanning in the laser focus position measuring method according to the first embodiment of the present invention.
FIG. 7 is a block diagram illustrating a configuration of a die bonding accuracy improvement system according to an application example of the first embodiment of the present invention.
FIG. 8 is a flowchart of a die bonding position deviation deviation correcting method according to an application example of the first embodiment of the present invention.
FIG. 9 is a diagram illustrating a variation in the order of manufacturing date and time of the displacement amount in the die bonding displacement deviation correction method according to the application example of the first embodiment of the present invention.
FIG. 10 is a block diagram illustrating a configuration of an example of an optical fiber alignment and fixing device according to a second embodiment of the present invention.
FIG. 11 is a block diagram showing a configuration of another example of the optical fiber alignment and fixing device according to the second embodiment of the present invention.
FIG. 12 is a flowchart of XY axis alignment fixing and Z axis alignment fixing in the optical fiber alignment fixing device according to the second embodiment of the present invention.
FIG. 13 is a block diagram illustrating a configuration of a die bonding accuracy improvement system according to an application example of the second embodiment of the present invention.
FIG. 14 is a flowchart of a die bonding position deviation deviation correcting method according to an application example of the second embodiment of the present invention.
FIG. 15 is a block diagram showing a configuration of an optical fiber alignment and fixing device according to a third embodiment of the present invention.
FIG. 16 is a diagram illustrating XY scanning of an optical fiber alignment and fixing device according to a third embodiment of the present invention.
FIG. 17 is a diagram showing a displacement of a laser diode of the optical module.
[Explanation of symbols]
1 Optical module
1a Laser diode
1b Condensing lens
1c cap
1d Internal electrode terminal
1e External electrode terminal
1f package
1g mount
2 Optical fiber
2a core
2b clad
2c metal ferrule
3 Optical fiber fixing collar
4 Machine base
5 movable stage
6 Package holder
7 Color holder
8 Optical fiber feed mechanism
9 Optical fiber holder
10 Optical fiber positioning unit
11 Alignment lens
12, 12a-12c Optical fiber alignment controller
13 Movable stage controller
14 Optical fiber re-controller
15 TV camera
16 Image recognition processing device
17 Laser diode drive power supply
18, 18a-18c YAG laser controller
19, 19a, 19c Optical fiber fixed YAG laser
20, 20b Fixed color YAG laser
21, 21a Position accuracy management system
22, 22a Die bonding apparatus
23, 23a, 23b Optical fiber alignment fixing device
24 Laser focus position measuring device
25 Photo sensor
26 AD converter
30, 30a Optical fiber light quantity measuring unit
31, 31a to 31c Optical fiber fixing part

Claims (8)

Laser diode, an optical fiber having a core portion and a cladding portion surrounding the core portion, with one end of the optical fiber facing the laser diode, and arranging in a direction along the optical axis of the laser diode,
The laser light of the laser diode to enter the optical fiber,
The laser light is a step of detecting the amount of light incident on the core and the amount of light incident on the clad and the clad, respectively.
A method of measuring the laser light condensing position, comprising: aligning the converging position of the laser light with the core portion based on the core incident light amount and the cladding incident light amount. 2. The laser focusing position measuring method according to claim 1, wherein the alignment is adjusted based on a total incident light amount of a total of the core incident light amount and the clad incident light amount. 2. The laser focusing position measuring method according to claim 1, wherein the alignment is performed based on each of the core incident light amount and the clad incident light amount. Scanning the laser diode, measuring the total amount of incident light so that the laser light sequentially enters from one end of the optical fiber toward the other end,
3. The method according to claim 2, further comprising: calculating coordinates in the scanning direction at which the total incident light amount becomes a threshold, and calculating center coordinates of the core. Scanning the laser diode, measuring each of the core incident light amount and the clad incident light amount so that the laser light sequentially enters from one end of the core toward the other end,
The method according to claim 1, further comprising: obtaining coordinates in the scanning direction in which each of the core incident light amount and the clad incident light amount becomes a threshold to calculate center coordinates of the core. Laser focusing position measurement method. Die bonding a laser diode to the optical module;
Arranging the laser diode so as to face the optical fiber;
A step of measuring the focusing position by entering the laser light of the laser diode into the optical fiber,
Calculating a displacement from the reference position of the die bonding of the laser diode from the measured condensing position,
Calculating a die bonding position deviation from the position deviation amount,
Correcting the mounting position of the die bonding of the laser diode from the die bonding position deviation. The step of measuring the light condensing position, the step of causing the laser light of the laser diode to enter the optical fiber,
A step of detecting the core incident light amount and the clad incident light amount, respectively, in which the laser light enters the core part and the clad part of the optical fiber,
7. The method of assembling an optical module according to claim 6, further comprising the step of: measuring a focusing position of the laser beam from the core incident light amount and the clad incident light amount. A movable stage on which an optical module having a package in which a laser diode is disposed is installed,
A collar holding portion that is held so that the optical fiber fixing collar is in contact with one end of the package,
An optical fiber feeding mechanism for causing one end of an optical fiber fitted to the optical fiber fixing collar to face the laser diode, and arranging the optical fiber in a direction along an optical axis of the laser diode;
An optical fiber light amount measuring unit that detects laser light emitted from the laser diode at the other end of the optical fiber, and calculates the amount of light incident on the optical fiber separately in a core part and a clad part of the optical fiber,
An optical fiber alignment control unit that obtains the amount of light incident on the optical fiber, controls the movable stage and the optical fiber feed mechanism, and adjusts the condensing position of the laser light to the center of the optical fiber. An optical fiber alignment fixing device characterized by the above-mentioned.

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