JP2003322859A - Method for manufacturing substrate with alignment film, liquid crystal device, projection display device - Google Patents

Abstract

(57) [Problem] To provide a method of manufacturing a substrate with an alignment film having excellent durability. SOLUTION: The method for producing a substrate with an alignment film of the present invention comprises:
This is performed using the ionization vapor deposition apparatus 100, and while irradiating the surface of the pre-substrate 202 installed on the predetermined base material installation section 200 with polarized ultraviolet light having a wavelength of 250 nm to 400 nm (for example, 350 nm), the deposition material container 102 is removed. A liquid crystal monomer having a photoreactive polymer group as an evaporation source is deposited via the ionization unit 103.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a substrate with an alignment film, a liquid crystal device, and a projection type display device, and more particularly to a method of manufacturing a substrate having an alignment film having excellent durability.

[0002]

2. Description of the Related Art A liquid crystal device used as a light modulating means mounted in a projection type display device such as a liquid crystal projector or a direct view type display device mounted in a mobile phone or the like is, for example, a pair of substrates arranged to face each other. A liquid crystal layer is sandwiched therebetween, and electrodes for applying a voltage to the liquid crystal layer are formed on the liquid crystal layer side of these substrates. In such a liquid crystal device, an alignment film for controlling the alignment of liquid crystal molecules when no voltage is applied is formed on the outermost surface of the pair of substrates on the liquid crystal layer side. The display is performed based on the change in the alignment of the liquid crystal molecules. As such an alignment film, a film obtained by rubbing the surface of an organic film made of polyimide or the like with a cloth or the like in a predetermined direction is widely used because of its excellent liquid crystal alignment ability.

[0003]

However, although the rubbing alignment film of polyimide has excellent liquid crystal alignment ability,
In the rubbing process, problems such as rubbing streaks, peeling of the alignment film, and element destruction due to static electricity in the rubbing process may occur, and improvement of display quality deterioration due to these problems is desired. Further, when the alignment film is mounted on a projection type display device or the like which is irradiated with light having a light flux density of about ² to 10 lm / mm ² , the alignment film is gradually decomposed by light or heat, and after long-term use. In some cases, the liquid crystal molecules cannot be aligned at a desired pretilt angle when no voltage is applied, and thus the liquid crystal alignment ability is deteriorated and the display quality is sometimes deteriorated. It is known that such a problem is because the rubbing alignment film of polyimide has an imide bond that is easily decomposed by light or heat.

An object of the present invention is to provide a method of manufacturing a substrate with an alignment film, which has high alignment properties and excellent durability, and further, a liquid crystal device and a projection type display equipped with the liquid crystal device. To provide a device.

[0005]

In order to solve the above problems, the method for producing a substrate with an alignment film of the present invention is a method for producing a substrate with an alignment film capable of orienting target molecules, the method comprising the steps of: A liquid crystalline monomer having a photoreactive polymerizing group is vapor-deposited on the base material while irradiating the surface of the material with polarized ultraviolet light having a wavelength of 250 to 400 nm.

According to such a manufacturing method, the liquid crystalline monomer having a photoreactive polymerizing group is polymerized by the above-mentioned polarizing ultraviolet light to be formed as a polymer alignment film on the above substrate. Further, in the present invention, since the irradiation of the polarizing ultraviolet ray having a relatively long wavelength as described above is performed, the polymerization initiation efficiency of the liquid crystalline monomer becomes relatively low, and the liquid crystalline monomer once deposited on the substrate has a migration effect. Thus, the polymerization is carried out while moving the surface of the base material in a predetermined orientation direction. That is, the photopolymerizable group starts polymerization from a molecule oriented in the direction most easily absorbing polarized ultraviolet light, and a molecule that has moved on the substrate is a molecule fixed by the polymerization (polymerized molecule). The polymer is oriented by being attracted by the interaction, and polymerization is initiated in that state, so that a polymer alignment film having an alignment along the direction of the polarized ultraviolet light can be obtained.

On the other hand, conventionally, in order to increase the polymerization initiation efficiency of a monomer having a photoreactive polymerization group, for example, 200 nm
It is known to irradiate laser light of a certain degree,
Under such polymerization conditions, although high polymerization efficiency can be obtained, orientation disorder easily occurs, and deterioration of the film due to light irradiation cannot be ignored. Therefore, in the present invention, attention is paid to the migration effect of the liquid crystalline monomer, and irradiation with a polarized ultraviolet ray having a long wavelength (250 nm to 400 nm), which is low in efficiency as a polymerization condition and cannot be selected by those skilled in the art, is performed. In addition, it was possible to obtain a substrate with an alignment film, which has a high alignment ability and has little deterioration (substantially no deterioration occurs). Furthermore, in the method of the present invention, since the polymerization initiation efficiency is low and the polymerization rate is relatively slow, the molecular orientation becomes more uniform as the number of polymerized layers overlaps with two or three layers, which results in an oriented film. The characteristics could be further improved.

Therefore, according to the method of manufacturing a substrate with an alignment film of the present invention, compared with the conventional rubbing alignment film of polyimide, since the rubbing process is not performed, the display quality is deteriorated due to the occurrence of the rubbing streaks as described above. In addition, the stability against light and heat becomes excellent, and the conditions for irradiation of polarized ultraviolet light are mild, so that it is possible to provide a highly reliable substrate with an alignment film.

In the above manufacturing method, the surface of the base material is irradiated with polarized ultraviolet rays. However, irradiation of an ion beam, for example, also causes movement of the liquid crystalline monomer due to the migration effect as described above. It is possible to polymerize the monomer while not being present, and to obtain a polymer alignment film having a high alignment property. As the ion beam, for example, an inert gas ion such as argon or xenon, or an ion such as fluorine or chlorine can be used, but an inert gas ion such as argon or xenon, which is a mild condition considering the polymerization initiation efficiency. Is preferably used. Further, it is also possible to use a partially ionized deposition material itself.

The liquid crystalline monomer used in the present invention may have a liquid crystal phase by itself, or may not have a liquid crystal phase by itself, but may lose the liquid crystal state of the mixture when mixed in the liquid crystal phase. It means one that does not exist, or one that induces the alignment of the liquid crystal phase. Specifically, as the liquid crystal monomer, one composed mainly of one or more compounds represented by any one of the following general formulas (1), (2) and (3) can be used.

[0011]

[Chemical 4]

[0012]

[Chemical 5]

[0013]

[Chemical 6]

The compounds represented by the above general formulas (1), (2) and (3) all have a rod-shaped molecular structure and are similar to liquid crystal monomers or liquid crystal molecules which themselves form a liquid crystal phase. It is a monomer having properties. Further, when these monomers are vapor-deposited on the substrate while irradiating the substrate with polarized ultraviolet light, the polymerization reaction proceeds, and the polymer becomes a polymer alignment film having high orientation as described above. Further, since each of the above liquid crystalline monomers has optical anisotropy, the orientation of the polymer alignment film to be formed also becomes high by orienting itself along the anisotropy.

The vapor deposition of the liquid crystalline monomer may be accompanied by ionization vapor deposition. In this case, part of the liquid crystalline monomer is vaporized on the substrate in an ionized state,
The polymerization initiation efficiency can be increased to some extent within a range where the migration effect, which is a feature of the present invention, can be exhibited. In addition, since a bias voltage (ion acceleration voltage) is applied to the substrate in the ionization deposition, the orientation of film-forming molecules is promoted by the electric charge of the ions and the electric field induced by the bias voltage.

A liquid crystal device can be provided with a substrate with an alignment film manufactured by the method of the present invention as described above.
That is, the liquid crystal device of the present invention has a structure in which a liquid crystal layer is sandwiched between a pair of substrates facing each other, and at least one of the pair of substrates is a substrate with an alignment film manufactured by the above manufacturing method. It is characterized by being used. In this case, since the alignment film derived from the liquid crystalline monomer as described above is provided on the outermost surface of the substrate on the liquid crystal layer side, it is possible to provide a liquid crystal device having excellent stability against light and heat and having high liquid crystal alignment ability. .

Next, by providing such a liquid crystal device, the following projection type display device of the present invention can be provided. That is, the projection type display device of the present invention includes a light source, a light modulation unit including the liquid crystal device of the present invention that modulates the light from the light source, and a projection unit that projects the light modulated by the light modulation unit. It is characterized by that. Since such a projection type display device is provided with the liquid crystal device of the present invention, a display defect due to deterioration of the alignment film due to light or heat is unlikely to occur, and display quality can be maintained for a long time. It will be excellent in durability.

In the present specification, "mainly"
The component means the component with the highest content among the constituent components.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION [Method for Manufacturing Substrate with Alignment Film] An embodiment of the method for manufacturing a substrate with an alignment film of the present invention will be described below. FIG. 1 is an explanatory diagram showing an example of an ionization vapor deposition apparatus used in the method for producing a substrate with an alignment film of the present invention. Ionization deposition apparatus 100 shown in FIG.
Is irradiated with polarized ultraviolet light having a wavelength of 250 nm to 400 nm (for example, 350 nm) on the surface of the pre-substrate (base material) 202 installed in the predetermined base material installation unit 200, and the following is used with the vapor deposition material container 102 as an evaporation source. The liquid crystal monomer having a photoreactive polymerizing group described in 1) is vapor-deposited.

Further, as a concrete structure, it is provided with a vapor deposition chamber 101 which is connected to a vacuum pump (not shown) and can bring the inside into a depressurized state (vacuum state).
A vapor deposition material container 1 in which a liquid crystalline monomer (vapor deposition material) 201 having a photoreactive polymerization group represented by the general formulas (1) to (3) shown in Chemical formulas 7 to 9 shown below is placed inside
02 is provided as an evaporation source. Also, the vapor deposition material container 1
02 is provided with a base material installation part 200 for installing the pre-substrate 202, and the vapor deposition material container 102 and the base material installation part 20 are provided.
0 is provided with an ionization part 103 capable of ionizing the vapor deposition material 201, and further to the side of the base material installation part 200 (20 to 70 ° from the substrate normal direction).
The pre-substrate 202 installed in the direction of (for example, 45 °)
A polarized UV irradiation unit 205 including a light source capable of irradiating the surface of the polarized UV with the polarized UV is provided. The polarizing ultraviolet ray irradiator 205 is composed of, for example, a black light and has a wavelength of 250 nm to 400 nm.
Can be provided with a light source capable of emitting ultraviolet rays having a relatively long wavelength.

[0021]

[Chemical 7]

[0022]

[Chemical 8]

[0023]

[Chemical 9]

On the other hand, the operating mechanism of the ionization vapor deposition apparatus 100 is as follows. First, the vapor deposition material container 102
The vapor deposition material 201 therein is heated and evaporated, the vaporized vapor deposition material 201 is guided to the pre-substrate 202 side in the upper part of the drawing, and when passing through the ionization section 103, a portion of the vapor deposition material 201 is ionized. In addition, the ionization unit 103 and the pre-substrate 2
An electric field is applied between the pre-substrate 202 and the ionized vapor deposition material 201.
It is configured to be vapor-deposited on. In the ionization unit 103, the vapor deposition material 201 can be ionized by irradiating the vapor deposition material 201 with electrons.

That is, the ionization vapor deposition method uses the vapor deposition material 2
This is a method of vaporizing 01 and then partially ionizing it to accelerate the ionized vapor deposition material 201 to deposit it on the pre-substrate 202. According to this method, it is possible to control the vapor deposition rate of the vapor deposition material 201 onto the pre-substrate 202 by controlling the ionization conditions in the ionization section 103 and the acceleration conditions of the ionized vapor deposition material 201. The pre-substrate 202 of the vapor deposition material 201 as compared with the vapor deposition method of
It becomes easy to control the vapor deposition conditions. Moreover, the orientation of the film-forming molecules is promoted by the electric field induced by the charge of the ions and the voltage applied to the substrate.

Further, by the polarized ultraviolet ray irradiation unit 205,
The surface of the pre-substrate 202 is irradiated with polarized ultraviolet light, and the vapor deposition material 201 vapor-deposited on the pre-substrate 202 starts polymerization. As shown in Chemical Formulas 7 to 9 above, the vapor deposition material 201 has a photoreactive polymerizing group, and polymerization is initiated by irradiation with ultraviolet rays of a predetermined wavelength. In this embodiment, however, 250 nm to 400 n
Since the polarized ultraviolet light having a relatively long wavelength of m (for example, 350 nm) is irradiated, the polymerization initiation efficiency is low and the polymerization rate is also relatively slow. Therefore, the pre-substrate 20
The vapor deposition material 201 vapor-deposited on 2 is polymerized while moving in the predetermined direction on the surface of the pre-substrate 202 due to the migration effect. That is, the photopolymerization group starts polymerization from a molecule oriented in a direction most likely to absorb polarized ultraviolet light, and a molecule that has moved on the pre-substrate 202 is a molecule fixed by polymerization (polymerized molecule). Are attracted and aligned by the interaction of the above, and polymerization is started in that state, so that the polymer alignment film formed becomes an alignment film along the irradiation direction of the polarized ultraviolet light.

The liquid crystalline monomers represented by the general formulas (1) to (3) shown in Chemical formulas 7 to 9 above exhibit a liquid crystal phase by themselves or are added to the liquid crystal phase to change the liquid crystal state. It is considered as a monomer that cannot be lost. Specific examples of the compound represented by the general formula (1) shown in Chemical Formula 7 include compounds M1 to M25 (UV cureable liquid crystal of Dainippon Ink and Chemicals, Inc.) shown in Table 1 or Table 2. It can be illustrated. Specific examples of the compound represented by the general formula (2) shown in Chemical Formula 8 include compounds M26 to M33 and M38 to M45 shown in Table 3 or Table 5. Specific examples of the compound represented by the general formula (3) shown in Chemical formula 9 above include compounds M34 to M37 and M46 to M51 shown in Table 4 or Table 6.

[0028]

[Table 1]

[0029]

[Table 2]

[0030]

[Table 3]

[0031]

[Table 4]

[0032]

[Table 5]

[0033]

[Table 6]

When the substrate with an alignment film obtained by the above-described method was shown to have a molecular alignment by an X-ray diffraction method, it has an alignment that can be applied as an alignment film for liquid crystal devices. I found out. In this example, the vapor deposition is performed while irradiating the polarized ultraviolet light having a relatively long wavelength, but for example, the polymer alignment film having a high alignment performance is initiated by irradiating the ion beam to start the polymerization. Can also be formed.

[Liquid Crystal Device] In the liquid crystal device of the present embodiment shown below, a TFT (Thin-Film Trn) is used as a switching element.
is an active matrix transmissive liquid crystal device using an ansistor element. Further, the liquid crystal device of this embodiment includes the substrate with an alignment film manufactured by the manufacturing method described above.

FIG. 2 shows a cross-sectional structure of the transmissive liquid crystal device of this embodiment, in which a liquid crystal layer 50 is sandwiched between a TFT array substrate 10 and a counter substrate 20 arranged to face the TFT array substrate 10. It is equipped with. In FIG. 2, the upper side in the figure is the light incident side, and the lower side in the figure is the viewing side (observer side). Further, in order to make each layer and each member recognizable in the drawings, the scale of each layer and each member is made different.

In the transmissive liquid crystal device of this embodiment, T
The FT array substrate 10 includes a substrate body 10A made of a translucent material such as quartz and a TF formed on the liquid crystal layer 50 side surface thereof.
The T-element 30, the pixel electrode 9, and the alignment film 40 are mainly constituted, and the counter substrate 20 is a common electrode formed on a substrate body 20A made of a translucent material such as glass or quartz and a liquid crystal layer 50 side surface thereof. 21 and the alignment film 60 as main components.

In the TFT array substrate 10, the pixel electrode 9 is provided on the surface of the substrate body 10A on the liquid crystal layer 50 side.
A pixel switching TFT element 30 that controls switching of each pixel electrode 9 is provided at a position adjacent to each pixel electrode 9. The pixel switching TFT element 30 is
It has an LDD (Lightly Doped Drain) structure and insulates the scanning line 3a, the channel region 1a ′ of the semiconductor layer 1a in which a channel is formed by the electric field from the scanning line 3a, the scanning line 3a and the semiconductor layer 1a. The gate insulating film 2, the data line 6a, the low concentration source region 1b and the low concentration drain region 1c of the semiconductor layer 1a, the high concentration source region 1d and the high concentration drain region 1e of the semiconductor layer 1a are provided.

The gate insulating film 2 is formed on the scanning line 3a.
The high-concentration source region 1d is formed on the substrate body 10A including the upper part.
A second interlayer insulating film 4 is formed in which a contact hole 5 leading to the high concentration drain region 1e and a contact hole 8 leading to the high-concentration drain region 1e are opened. That is, the data line 6a is electrically connected to the high-concentration source region 1d through the contact hole 5 penetrating the second interlayer insulating film 4. Further, on the data line 6a and the second interlayer insulating film 4, a third interlayer insulating film 7 having a contact hole 8 leading to the high concentration drain region 1e is formed. That is, the high-concentration drain region 1e is electrically connected to the pixel electrode 9 through the contact hole 8 penetrating the second interlayer insulating film 4 and the third interlayer insulating film 7.

Further, the liquid crystal layer 5 of the TFT array substrate 10
An alignment film 40 that controls the alignment of liquid crystal molecules in the liquid crystal layer 50 when no voltage is applied is formed on the 0-side outermost surface, that is, on the pixel electrode 9 and the third interlayer insulating film 7.

On the other hand, the counter substrate 20 has a substrate body 20A.
On the liquid crystal layer 50 side of the data line 6a and the scanning line 3
a, in a region facing the formation region of the pixel switching TFT element 30, that is, in a region other than the opening region of each pixel portion, the incident light has a channel region 1a ′ of the semiconductor layer 1a of the pixel switching TFT device 30 or a low concentration source. Area 1
b, the second light-shielding film 23 is provided to prevent the light-shielding drain region 1c from penetrating. Furthermore, the second
On the liquid crystal layer 50 side of the substrate body 20A on which the light shielding film 23 is formed, a common electrode 21 made of ITO or the like is formed over almost the entire surface thereof, and on the liquid crystal layer 50 side, the liquid crystal when no voltage is applied. An alignment film 60 that controls the alignment of the liquid crystal molecules in the layer 50 is formed.

As described above, in the transmissive liquid crystal device of this embodiment, the TFT array substrate 10 and the counter substrate 20 are the substrates with the alignment film manufactured by the manufacturing method of the above embodiment, that is, An alignment film different from a conventional rubbing alignment film of polyimide is provided. Therefore, the problem of deterioration of light resistance due to imide bond and the problem of deterioration of display quality due to rubbing treatment (occurrence of rubbing streak and element destruction due to static electricity) are less likely to occur, and further high alignment can be provided by irradiation with long wavelength ultraviolet light. Therefore, it was possible to realize a liquid crystal device provided with an extremely highly reliable alignment film in which the reliability of the film is not deteriorated due to photodegradation.

In the present embodiment, the alignment films 40 and 60 of both the TFT array substrate 10 and the counter substrate 20 are the substrates with the alignment film formed by the above manufacturing method.
The present invention is not limited to this, and by providing the alignment film of at least one of the substrates with the above-described configuration, it is possible to provide a liquid crystal device having excellent durability. However, it goes without saying that a liquid crystal device having more excellent durability can be provided by making the alignment films of both substrates have the above-described configurations.

Further, in the present embodiment, only the active matrix type liquid crystal device using the TFT element has been described, but the present invention is not limited to this, and the TFD is used.
It is also applicable to an active matrix type liquid crystal device using a (Thin-Film Diode) element, a passive matrix type liquid crystal device, and the like. Further, although only the transmissive liquid crystal device has been described in the present embodiment, the present invention is not limited to this, and is applicable to a reflective liquid crystal device or a transflective liquid crystal device.

[Projection Display Device] Next, the configuration of a projection display device equipped with the liquid crystal device of the above embodiment as a light modulating means will be described with reference to FIG. FIG. 3 is a schematic configuration diagram showing a main part of a projection type display device using the liquid crystal device of the embodiment shown in FIG. 2 as a light modulation device. In FIG. 3, 810 is a light source, 813 and 814 are dichroic mirrors, 815, 816 and 817 are reflection mirrors, and 818.
Is an entrance lens, 819 is a relay lens, 820 is an exit lens, 822, 823 and 824 are liquid crystal light modulators, 82
Reference numeral 5 represents a cross dichroic prism, and 826 represents a projection lens.

The light source 810 is a lamp 8 such as a metal halide.
11 and a reflector 812 that reflects the light of the lamp. Dichroic mirror 813 that reflects blue light and green light
Transmits the red light of the light flux from the light source 810 and reflects the blue light and the green light. The transmitted red light is reflected by the reflection mirror 817 and is incident on the red light liquid crystal light modulator 822 including the above-described liquid crystal device. On the other hand, of the color light reflected by the dichroic mirror 813, the green light is reflected by the green light reflecting dichroic mirror 814 and is incident on the liquid crystal light modulator for green light 823 including the above-mentioned liquid crystal device. The blue light also passes through the second dichroic mirror 814. For blue light, in order to compensate for the fact that the optical path length is different from green light and red light, a light guide means 82 including a relay lens system including an entrance lens 818, a relay lens 819, and an exit lens 820.
1 is provided, and blue light is incident on the blue light liquid crystal light modulator 824 including the above-described liquid crystal device. The liquid crystal light modulators 822, 823, and 824 for each color are
Incident side polarization means 822a, 823a, 8
24a and output side polarization means 822b, 823b, 824
b is a liquid crystal light valve including a liquid crystal device arranged between them.

The three color lights modulated by the respective light modulators enter the cross dichroic prism 825. This prism is formed by laminating four right-angled prisms, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in a cross shape on the inner surface thereof. Three color lights are combined by these dielectric multilayer films to form light representing a color image. The combined light is projected on the screen 827 by the projection lens 826 which is a projection optical system, and the image is enlarged and displayed.

The projection type display device having the above structure is provided with the above-mentioned liquid crystal device as an example of the present invention.
The display device has excellent durability against light and heat and has high reliability.

[0049]

EXAMPLES Next, examples according to the present invention and comparative examples will be described. (Example 1) First, an ionization vapor deposition apparatus 10 shown in FIG. 1 is provided on a glass substrate (pre-substrate) on which necessary elements other than an alignment film such as electrodes and TFT elements are formed, and a counter substrate.
No. 0, the polarized ultraviolet light having a wavelength of 350 nm was irradiated from a direction inclined by 45 ° from the substrate normal direction, and the biphenyl-4,4′-dimethacrylate shown in M34 of Table 4 was used as the deposition material for ionization deposition. By the vapor deposition by the method, a substrate with an alignment film having a polymerized polymer alignment film with a film thickness of about 50 nm was prepared.

The two substrates thus formed are adhered to each other with a cell gap of 5 μm, and then a fluorine-based liquid crystal is injected between the substrates to seal the substrates, and an active matrix type transmissive liquid crystal device of the present invention is manufactured. did. The two substrates were attached by shifting the alignment directions of the respective formed alignment films by 90 ° to manufacture a TN (Twisted Nematic) mode liquid crystal display device.

(Comparative Example) Similar to Example 1, electrodes and TF were used.
A glass substrate (pre-substrate) on which necessary elements other than an alignment film such as a T element are formed, and a counter substrate are coated with polyimide dissolved in a solvent by spin coating, and pre-baked (8
After evaporating the solvent at 0 ° C. for 10 min), the solvent was baked at 180 ° C. for 1 hour to form a polyimide film having a film thickness of about 50 nm. Further, the obtained polyimide film was subjected to rubbing treatment to produce a substrate with an alignment film, which was provided with a rubbing alignment film of polyimide. Using each of the substrates thus obtained, a TN mode liquid crystal display device was produced in the same manner as in Example 1.

(Durability Test) Durability tests of the liquid crystal devices produced in the respective examples and comparative examples were conducted as follows. The relationship between the applied voltage (V) and the light transmittance (T) when the liquid crystal devices of Examples and Comparative Examples were irradiated with visible light having a luminous flux density of 40 lm / mm ² at a temperature of 60 ° C. That is, the V / T curve was measured over time, and the endurance time until the light transmittance greatly fluctuates when the applied voltage was low and the V / T curve fluctuated significantly was measured.

(Evaluation Results) The durability time of the liquid crystal device of the example is about twice as long as that of the liquid crystal device of the comparative example, and according to the manufacturing method of the present invention, the durability of the alignment film is improved. It turns out that it can be greatly improved. In addition, the display characteristics of the liquid crystal device obtained in the example have no display unevenness as compared with the liquid crystal device obtained in the comparative example, and it is confirmed that the contrast is improved, and the alignment film of this example (the substrate with the alignment film) is It was found to have a sufficient liquid crystal alignment ability.

[0054]

As described in detail above, according to the present invention, a substrate with an alignment film, which is excellent in durability and has a high alignment ability with respect to target molecules such as liquid crystal molecules, can be mildly treated without causing photodegradation. It is possible to manufacture under various conditions. Further, by providing the substrate with an alignment film manufactured according to the present invention, it is possible to provide a liquid crystal device which is excellent in durability and is less likely to cause liquid crystal alignment defects. Further, by providing the liquid crystal device of the present invention, it is possible to provide a projection display device having excellent durability and display characteristics.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing the configuration of an ionization vapor deposition device.

FIG. 2 is a sectional view showing a structure of a main part of a liquid crystal device according to an embodiment of the present invention.

FIG. 3 is a diagram showing an example of a projection type display device including the liquid crystal device of FIG.

[Explanation of symbols]

10 TFT array substrate 20 Counter substrate 50 liquid crystal layer 40,60 Alignment film 100 Ionization vapor deposition equipment 102 evaporation material container (evaporation source) 202 Pre substrate (base material) 205 Polarizing UV irradiation part

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2H088 EA14 EA15 HA03 HA13 HA24                       HA28 MA18 MA20                 2H090 HB16Y HC01 HD15 KA05                       MA02 MB12

Claims (6)

[Claims] 1. A method for producing a substrate with an alignment film capable of orienting target molecules, comprising 250 n on a surface of a base material.
A method for producing a substrate with an alignment film, which comprises depositing a liquid crystalline monomer having a photoreactive polymerizing group on the base material while irradiating it with polarized ultraviolet light of m to 400 nm. 2. A method for producing a substrate with an alignment film capable of orienting target molecules, comprising irradiating an ion beam on the surface of a base material and adding a liquid crystalline monomer having a photoreactive polymerizing group to the group. A method for producing a substrate with an alignment film, which comprises vapor-depositing a material. 3. The liquid crystal monomer is mainly composed of one or more compounds represented by any one of the following general formulas (1), (2) and (3). The method for producing a substrate with an alignment film according to claim 1 or 2. [Chemical 1] [Chemical 2] [Chemical 3] 4. The method of manufacturing a substrate with an alignment film according to claim 1, wherein the vapor deposition of the liquid crystalline monomer on the base material is accompanied by ionization vapor deposition. 5. A liquid crystal device having a structure in which a liquid crystal layer is sandwiched between a pair of substrates facing each other, and at least one of the pair of substrates is at least one substrate.
A liquid crystal device using the substrate with an alignment film manufactured by the method described in any one of 1. 6. A light source, a light modulating means comprising the liquid crystal device according to claim 5 for modulating the light from said light source, and a projection means for projecting the light modulated by said light modulating means. A projection type display device characterized by.