JP2003318319A - High frequency module - Google Patents
High frequency moduleInfo
- Publication number
- JP2003318319A JP2003318319A JP2002120812A JP2002120812A JP2003318319A JP 2003318319 A JP2003318319 A JP 2003318319A JP 2002120812 A JP2002120812 A JP 2002120812A JP 2002120812 A JP2002120812 A JP 2002120812A JP 2003318319 A JP2003318319 A JP 2003318319A
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- mounting portion
- filter component
- frequency module
- power amplification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10W72/884—
-
- H10W90/724—
-
- H10W90/734—
-
- H10W90/754—
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
(57)【要約】
【課題】電力増幅素子による発熱に影響されずにフィル
タ部品の電気的特性を維持できる小型で高性能な高周波
モジュールを提供する。
【解決手段】誘電体基板2の主面に電力増幅素子実装部
2aとフィルタ部品実装部2bを形成し、電力増幅素子
実装部2a下部に誘電体基板2を他方の主面まで貫通す
る第1の貫通導体6を形成し、少なくとも電力増幅素子
実装部2aとフィルタ部品実装部2bとの間に、誘電体
基板2の他方の主面まで延びた第2の貫通導体11を形
成するとともに、第1の貫通導体6および第2の貫通導
体11を、ロウ材13を介して外部電気回路基板7の上
面に実装する。
(57) Abstract: Provided is a small, high-performance, high-frequency module that can maintain the electrical characteristics of a filter component without being affected by heat generated by a power amplification element. A power amplification element mounting portion and a filter component mounting portion are formed on a main surface of a dielectric substrate, and a first substrate penetrates the dielectric substrate to the other main surface below the power amplification element mounting portion. And a second through conductor 11 extending to at least the other main surface of the dielectric substrate 2 between at least the power amplification element mounting portion 2a and the filter component mounting portion 2b. The first through conductor 6 and the second through conductor 11 are mounted on the upper surface of the external electric circuit board 7 via the brazing material 13.
Description
【0001】[0001]
【発明の属する技術分野】本発明は携帯型情報端末機、
無線LAN、WLL(Wireless Local
Loop)等の電子機器・電子装置等に用いられる、高
周波電力増幅装置、高周波フィルタ装置および高周波分
波器装置を一体構成した小型・高性能かつ低価格な高周
波モジュールに関するものである。TECHNICAL FIELD The present invention relates to a portable information terminal,
Wireless LAN, WLL (Wireless Local)
The present invention relates to a small-sized, high-performance and low-cost high-frequency module that is integrally configured with a high-frequency power amplification device, a high-frequency filter device, and a high-frequency demultiplexer device, which are used in electronic devices and electronic devices such as Loop).
【0002】[0002]
【従来技術】高周波モジュールにおいて高周波電力増幅
装置を構成する高周波電力増幅素子は、現在の移動体通
信システムにおける伝送容量の増加や伝送スピードの高
速化に伴い大きな高周波電力を取り扱うため、高周波電
力増幅素子自身の発熱量が増加している。その放熱対策
として、放熱フィンを取り付ける方法や、高周波電力増
幅素子が搭載される誘電体基板に熱伝導率が大きな高熱
伝導セラミックスである窒化アルミニウム等を用いる方
法があり、良好な放熱性を得ることが出来る。さらに特
開2000−31331号公報では、高周波電力増幅素
子を配線基板の背面に配置し外部電気回路基板に半田付
けすることで放熱性を向上する技術が提案されている。2. Description of the Related Art In a high frequency module, a high frequency power amplifying element which constitutes a high frequency power amplifying apparatus handles a large amount of high frequency power as the transmission capacity and transmission speed of a current mobile communication system increase. The amount of heat generated by oneself is increasing. As a heat dissipation measure, there is a method of attaching a heat dissipation fin, and a method of using aluminum nitride, which is a high thermal conductivity ceramic with high thermal conductivity, on the dielectric substrate on which the high frequency power amplification element is mounted. Can be done. Further, Japanese Patent Application Laid-Open No. 2000-31331 proposes a technique for improving heat dissipation by disposing a high frequency power amplifier element on the back surface of a wiring board and soldering it to an external electric circuit board.
【0003】また、高周波モジュールにおいて高周波電
力増幅装置の近傍に構成される高周波フィルタ素子に用
いられる弾性表面波素子は、一般的にリチウムタンタレ
ート等の圧電体基板に弾性表面波を伝播させるための櫛
形電極が形成されたものであるが、圧電体基板自身の電
気的特性が温度変化による影響を大きく受けるため、モ
ジュール内で高周波電力増幅素子等の発熱体から離れた
位置に配置することが必要不可欠となっている。このた
め、従来の高周波電力増幅装置と高周波フィルタ素子等
とを一体に形成した高周波モジュールは、近年の移動体
通信用情報端末機等の小型化・軽量化・高密度化・低価
格化のための要求に十分に応えることができないという
問題点があった。A surface acoustic wave element used in a high frequency filter element formed in the vicinity of a high frequency power amplifier in a high frequency module is generally used to propagate a surface acoustic wave to a piezoelectric substrate such as lithium tantalate. Although the comb-shaped electrodes are formed, the electrical characteristics of the piezoelectric substrate itself are greatly affected by temperature changes, so it is necessary to place it in a position away from heating elements such as high-frequency power amplifier elements in the module. Has become essential. For this reason, a high-frequency module in which a conventional high-frequency power amplifier device and a high-frequency filter element are integrally formed is used to reduce the size, weight, density and cost of mobile communication information terminals in recent years. However, there was a problem that it was not possible to fully meet the demand of.
【0004】これに対し、例えば特開平7−58586
号公報には、高周波電力増幅素子である能動回路素子
を、弾性表面波素子である受動回路素子を形成した一個
の圧電体基板上に搭載することにより、小型で低価格な
高周波回路装置を構成することが提案されている。On the other hand, for example, Japanese Unexamined Patent Publication No. 7-58586.
In the publication, an active circuit element, which is a high-frequency power amplifier element, is mounted on a single piezoelectric substrate on which a passive circuit element, which is a surface acoustic wave element, is mounted, thereby forming a compact and low-cost high-frequency circuit device. It is suggested to do so.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、特開平
7−58586号公報に開示された高周波回路装置で
は、近年の移動体通信システムにおける伝送容量の増加
や伝送スピードの高速化に伴い大きな高周波電力を取り
扱う必要がある場合に、高周波電力増幅素子である能動
回路素子を弾性表面波素子である受動回路素子を形成し
た一個の圧電体基板上に搭載すると、高周波電力増幅素
子自身が大きく発熱することから、圧電体基板に形成さ
れた高周波フィルタにおけるその熱によるフィルタ特性
の劣化が問題となり、大きな高周波電力を取り扱う移動
体通信システムで使用される小型の情報端末機器には使
用できないという問題点があった。However, in the high frequency circuit device disclosed in Japanese Unexamined Patent Publication No. 7-58586, a large amount of high frequency power is required as the transmission capacity and the transmission speed increase in the mobile communication system in recent years. When it is necessary to handle it, if an active circuit element that is a high-frequency power amplification element is mounted on a single piezoelectric substrate on which a passive circuit element that is a surface acoustic wave element is formed, the high-frequency power amplification element itself will generate large heat. The deterioration of the filter characteristics due to the heat in the high frequency filter formed on the piezoelectric substrate poses a problem that it cannot be used for a small information terminal device used in a mobile communication system handling a large amount of high frequency power. .
【0006】本発明は上記従来技術における問題点に鑑
みてなされたものであり、その目的は、大電力の高周波
用等の電力増幅素子による発熱に影響されることなく、
その近傍に配置された弾性表面波素子などのフィルタ部
品の高周波フィルタ特性等の電気的特性を維持すること
ができ、かつ小型で高性能であり、しかも低価格な、携
帯型情報端末機、無線LAN、WLL等の電子機器・電
子装置等に好適な高周波モジュールを提供することにあ
る。The present invention has been made in view of the above-mentioned problems in the prior art, and its object is to be free from the influence of heat generated by a power amplification element for high-power high-frequency waves.
It is possible to maintain electrical characteristics such as high frequency filter characteristics of filter components such as surface acoustic wave elements arranged in the vicinity thereof, and is small in size, high in performance, and low in price. An object of the present invention is to provide a high-frequency module suitable for electronic devices and devices such as LAN and WLL.
【0007】[0007]
【課題を解決するための手段】本発明の高周波モジュー
ルは、複数の誘電体層を積層して成る誘電体基板の一方
の主面に、電力増幅素子およびフィルタ部品を主面上に
実装してなり、前記電力増幅素子実装部の下部に誘電体
基板を他方の主面まで貫通する第1の貫通導体を形成
し、少なくとも前記電力増幅素子実装部と前記フィルタ
部品実装部との間に、前記誘電体基板の前記他方の主面
まで延びた第2の貫通導体を形成するとともに、前記第
1の貫通導体および第2の貫通導体を、ロウ材を介して
外部電気回路基板の上面に実装することを特徴とするも
のである。In a high frequency module of the present invention, a power amplifying element and a filter component are mounted on one main surface of a dielectric substrate formed by laminating a plurality of dielectric layers. And forming a first penetrating conductor that penetrates the dielectric substrate to the other main surface below the power amplification element mounting section, and at least between the power amplification element mounting section and the filter component mounting section. A second penetrating conductor extending to the other main surface of the dielectric substrate is formed, and the first penetrating conductor and the second penetrating conductor are mounted on the upper surface of the external electric circuit board via a brazing material. It is characterized by that.
【0008】本発明の上記構成によれば、電力増幅素子
から発生した熱は、電力増幅素子実装部の下部に形成さ
れた第1の貫通導体およびロウ材を介して外部電気回路
基板の上面の放熱用導体に効率良く熱放散させることが
可能となる。また、電力増幅素子からその近傍に配置さ
れたフィルタ部品への熱伝達は、第2の貫通導体によっ
て遮断され、フィルタ部品への熱伝達を極めて低減させ
ることができる。その結果、フィルタ部品の高周波フィ
ルタ特性等の電気的特性を劣化させることなく、小型で
高性能な高周波モジュールを提供することができる。し
かも、かかる構成によれば、高周波モジュールに対して
放熱フィン等の放熱用部材を別途設ける必要がなく、小
型化を図ることができる。According to the above configuration of the present invention, the heat generated from the power amplification element is transferred to the upper surface of the external electric circuit board through the first through conductor and the brazing material formed in the lower portion of the power amplification element mounting portion. It is possible to dissipate heat efficiently to the heat dissipation conductor. Further, the heat transfer from the power amplification element to the filter component arranged in the vicinity thereof is blocked by the second penetrating conductor, and the heat transfer to the filter component can be extremely reduced. As a result, it is possible to provide a small-sized high-performance high-frequency module without deteriorating electrical characteristics such as high-frequency filter characteristics of the filter component. Moreover, with this configuration, it is not necessary to separately provide a heat dissipation member such as a heat dissipation fin for the high frequency module, and it is possible to reduce the size.
【0009】なお、複数の誘電体層を積層して成る誘電
体基板の一方の主面に電力増幅素子実装用凹部及びまた
はフィルタ部品実装用凹部を形成し、該凹部内に電力増
幅素子および/またはフィルタ部品を蓋体または絶縁性
樹脂によって封止してなることが信頼性を高める上で望
ましい。It should be noted that a power amplifying device mounting recess and / or a filter component mounting recess is formed in one main surface of a dielectric substrate formed by laminating a plurality of dielectric layers, and the power amplifying device and / or the power amplifying device are mounted in the recess. Alternatively, it is desirable to enhance reliability by sealing the filter component with a lid or an insulating resin.
【0010】また、複数の誘電体層を積層して成る誘電
体基板の一方の主面に実装されたフィルタ部品実装部の
下部に誘電体基板を他方の主面まで貫通する第3の貫通
導体を形成したり、前記電力増幅素子実装部の底面に導
体層を形成するとともに、該導体層を平面方向に延設し
て前記第2の貫通導体と接続することによって、さらに
フィルタ部品の熱による影響を低減することができる。A third through conductor which penetrates the dielectric substrate to the other main surface under the filter component mounting portion mounted on one main surface of the dielectric substrate formed by laminating a plurality of dielectric layers. Or by forming a conductor layer on the bottom surface of the power amplification element mounting portion and extending the conductor layer in the planar direction to connect with the second penetrating conductor, The influence can be reduced.
【0011】さらには、前記誘電体層の熱伝導率が20
W/m・K以下であること、前記電力増幅素子搭載用凹
部の周囲の誘電体層を、前記フィルタ部品搭載用凹部の
周囲の誘電体層よりも熱伝導率の小さい誘電体層によっ
て形成すること、前記電力増幅素子実装部と前記フィル
タ部品実装部とが0.8mm以上離間すること、前記フ
ィルタ部品実装部の下部に導体層を形成するとともに、
該導体層を前記電力増幅素子実装部の下部の導体層とは
異なる誘電体層に形成することによって、フィルタ部品
の高周波フィルタ特性、高周波分波器特性等の電気的特
性を劣化させることなく、小型で高性能な高周波モジュ
ールを提供することができる。Further, the thermal conductivity of the dielectric layer is 20.
W / m · K or less, and the dielectric layer around the power amplifier element mounting recess is formed of a dielectric layer having a lower thermal conductivity than the dielectric layer around the filter component mounting recess. That the power amplification element mounting portion and the filter component mounting portion are separated from each other by 0.8 mm or more, and a conductor layer is formed below the filter component mounting portion,
By forming the conductor layer in a dielectric layer different from the conductor layer below the power amplification element mounting portion, without deteriorating the electrical characteristics such as high frequency filter characteristics and high frequency duplexer characteristics of the filter component, It is possible to provide a compact and high-performance high-frequency module.
【0012】[0012]
【発明の実施の形態】以下、図面に基づいて本発明の高
周波モジュールを詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION The high frequency module of the present invention will be described below in detail with reference to the drawings.
【0013】図1は、本発明の高周波モジュールの実施
の形態を示す断面図であり、この例において、高周波モ
ジュール1はマザーボード等の外部電気回路基板7に搭
載され実装されている。FIG. 1 is a sectional view showing an embodiment of a high frequency module of the present invention. In this example, the high frequency module 1 is mounted and mounted on an external electric circuit board 7 such as a mother board.
【0014】高周波モジュール1における誘電体基板2
は、複数の誘電体層を積層して成るものであり、誘電体
層には、例えばアルミナセラミックス、ムライトセラミ
ックス、ガラスセラミックスなどの低温焼成セラミック
スや、有機樹脂材料とセラミック材料との混合材料を用
いることができる。とりわけ、導体としてCu、Agを
使用し同時焼成にて形成する上では、ガラスセラミック
スなどの低温焼成セラミックス、有機樹脂材料とセラミ
ック材料との混合材料が挙げられ、熱的安定性に優れる
点で、ガラスセラミックスなどの低温焼成セラミックス
が最も望ましい。Dielectric substrate 2 in high frequency module 1
Is formed by laminating a plurality of dielectric layers. For the dielectric layers, low-temperature fired ceramics such as alumina ceramics, mullite ceramics, glass ceramics, or a mixed material of an organic resin material and a ceramic material is used. be able to. In particular, when Cu and Ag are used as the conductor by simultaneous firing, low-temperature firing ceramics such as glass ceramics and a mixed material of an organic resin material and a ceramic material are mentioned, and they are excellent in thermal stability. Low temperature fired ceramics such as glass ceramics are most desirable.
【0015】誘電体基板2を構成する誘電体層の熱伝導
率は、用いるセラミック材料とその混合比とにより、熱
伝導率を制御することが可能であり、20W/m・K以
下、特に10W/m・K以下、さらには5W/m・K以
下、さらに望ましくは3W/m・K以下とするのがよ
い。The thermal conductivity of the dielectric layer constituting the dielectric substrate 2 can be controlled by the ceramic material used and the mixing ratio thereof, and is 20 W / m · K or less, particularly 10 W. / M · K or less, more preferably 5 W / m · K or less, and even more preferably 3 W / m · K or less.
【0016】図1の高周波モジュールにおいては、誘電
体基板2の上面において、凹部からなる電力増幅素子実
装部2aと、平面部のフィルタ部品実装部2bとが所定
の間隔をおいて形成されている。In the high frequency module shown in FIG. 1, a power amplification element mounting portion 2a composed of a concave portion and a flat filter component mounting portion 2b are formed on the upper surface of the dielectric substrate 2 at a predetermined interval. .
【0017】電力増幅素子実装部2aの下面には、導体
層2a1が形成されており、電力増幅素子4がワイヤボ
ンディング3aを介して電気的に接続し搭載されてい
る。A conductor layer 2a1 is formed on the lower surface of the power amplification element mounting portion 2a, and the power amplification element 4 is electrically connected and mounted via wire bonding 3a.
【0018】電力増幅素子4としては、例えばpn接合
ゲート型電界効果型トランジスタやショットキー障壁ゲ
ート型電界効果型トランジスタ、ヘテロ接合型電界効果
型トランジスタ、pn接合ゲート型へテロ接合型電界効
果型トランジスタ等が用いられるまた、電力増幅素子4
と導体層2a1との間には、その接続部や素子面を保護
する目的で封止樹脂5が注入される。封止樹脂5は、エ
ポキシ樹脂やシリコーン樹脂等の熱を加えることにより
硬化するものを用いることができる。また、封止樹脂5
は、本発明の高周波モジュール1においては熱伝導率が
20W/m・K以下のものを用いることが望ましく、約
10W/m・K以下のエポキシ樹脂製のものを用いるこ
とが好ましい。これにより、電力増幅素子4による発熱
の誘電体基板2自身への伝達を抑制することが可能とな
る。As the power amplification element 4, for example, a pn junction gate type field effect transistor, a Schottky barrier gate type field effect transistor, a heterojunction type field effect transistor, a pn junction gate type heterojunction field effect transistor. Also, the power amplification element 4 is used.
The sealing resin 5 is injected between the conductor layer 2a1 and the conductor layer 2a1 for the purpose of protecting the connection portion and the element surface. As the sealing resin 5, a resin such as an epoxy resin or a silicone resin that cures when heat is applied can be used. Also, the sealing resin 5
In the high frequency module 1 of the present invention, it is desirable to use one having a thermal conductivity of 20 W / m · K or less, and preferably an epoxy resin one having a thermal conductivity of about 10 W / m · K or less. This makes it possible to suppress the heat generated by the power amplification element 4 from being transmitted to the dielectric substrate 2 itself.
【0019】また、電力増幅素子実装部2aの下部に
は、誘電体基板2を他方の主面まで貫通する第1の貫通
導体6が形成されている。この第1の貫通導体6は、外
部電気回路基板7へと熱を伝達しやすくする上で、誘電
体基板2の熱伝導率よりも5倍以上大きくすることが望
ましく、さらには熱伝導率が100W/m・K以上のも
のを用いることが好ましい。さらに第1の貫通導体6は
直径(短径)が0.1〜0.5mmであることが望まし
い。また、この貫通導体6は、必ずしも円形である必要
はなく、長円形状、スリット形状であってもよい。A first penetrating conductor 6 that penetrates the dielectric substrate 2 to the other main surface is formed below the power amplification element mounting portion 2a. In order to easily transfer heat to the external electric circuit board 7, the first penetrating conductor 6 is preferably made to have a thermal conductivity five times or more higher than that of the dielectric substrate 2, and further, the thermal conductivity is higher. It is preferable to use one having a power of 100 W / m · K or more. Furthermore, it is desirable that the first through conductor 6 has a diameter (minor axis) of 0.1 to 0.5 mm. The penetrating conductor 6 does not necessarily have to be circular, but may have an elliptical shape or a slit shape.
【0020】そして、この第1の貫通導体6は、ロウ材
13を介して外部電気回路基板7の上面の放熱用導体1
5に取着されている。これによって、電力増幅素子4か
ら発生した熱は、第1の貫通導体6およびロウ材13を
介して、外部電気回路基板7の表面に形成された放熱用
導体15に効率的に伝達され、電力増幅素子4から発生
した熱が、モジュール内のフィルタ部品8に熱的影響が
及ぶのを防止することができる。The first penetrating conductor 6 is provided on the upper surface of the external electric circuit board 7 via the brazing material 13 for heat dissipation.
It is attached to 5. As a result, the heat generated from the power amplification element 4 is efficiently transferred to the heat dissipation conductor 15 formed on the surface of the external electric circuit board 7 via the first penetrating conductor 6 and the brazing material 13, and the power is transmitted. It is possible to prevent the heat generated from the amplification element 4 from exerting a thermal influence on the filter component 8 in the module.
【0021】一方、フィルタ部品実装部2bには、フィ
ルタ部品8が、導体バンプ3bを介してフィルタ部品実
装部2bの下面に形成された導体層2b1から成る電極
部に電気的に接続して搭載されている。ここで、導体バ
ンプ3bには金や半田、熱硬化型Agペースト等を用い
ることができる。On the other hand, on the filter component mounting portion 2b, the filter component 8 is mounted by being electrically connected to the electrode portion formed of the conductor layer 2b1 formed on the lower surface of the filter component mounting portion 2b via the conductor bump 3b. Has been done. Here, gold, solder, thermosetting Ag paste, or the like can be used for the conductor bump 3b.
【0022】フィルタ部品8としては、例えば共振器型
フィルタ・共振子ラダー型および格子型接続フィルタ・
マルチIDT(Inter Digital Tran
sducer)型フィルタ等の表面弾性波素子や、FB
AR(Film BulkAcoustic Reso
nator)フィルタ素子、BAW(Bulk Aco
ustic Wave)フィルタ素子等が用いられる。
その他、上記のような各種フィルタ素子を収納し気密に
封止したパッケージであってもよい。このフィルタ部品
8が例えば共振器型フィルタの場合には、圧電体基板と
して、36°Yカット−X伝搬のLiTaO3結晶、6
4°Yカット−X伝搬のLiNbO3結晶、45°Xカ
ット−Z伝搬のLiB4O7結晶等が、電気機械結合係数
が大きくかつ群遅延時間温度係数が小さいことから、好
適に使用される。また、フィルタ部品8には、圧電体基
板表面上を弾性表面波を励起させ、伝播・共振させるた
め、その表面に、互いに噛み合うように形成された少な
くとも一対の櫛歯状電極のIDT(Inter Dig
ital Transducer)電極(図示せず)を
設ける。このIDT電極は、所望のフィルタ特性を得る
ために、複数対の櫛歯状電極を直列接続や並列接続等の
方式で接続して構成される。このようなIDT電極は、
圧電体基板上に蒸着法・スパッタリング法またはCVD
法等の薄膜形成法により所望の形状・寸法に形成するこ
とができる。Examples of the filter component 8 include a resonator type filter, a resonator ladder type and a lattice type connection filter,
Multi IDT (Inter Digital Tran)
surface acoustic wave device such as a sducer type filter or FB
AR (Film Bulk Acoustic Reso
filter element, BAW (Bulk Aco)
A rusty wave) filter element or the like is used.
In addition, a package in which the above various filter elements are housed and hermetically sealed may be used. When the filter component 8 is, for example, a resonator type filter, a 36 ° Y-cut-X propagation LiTaO 3 crystal, 6 is used as the piezoelectric substrate.
A 4 ° Y-cut-X propagation LiNbO 3 crystal, a 45 ° X-cut-Z propagation LiB 4 O 7 crystal and the like are preferably used because they have a large electromechanical coupling coefficient and a small group delay time temperature coefficient. . Further, in the filter component 8, in order to excite, propagate and resonate a surface acoustic wave on the surface of the piezoelectric substrate, at least a pair of IDTs (Inter Dig) of comb-teeth-shaped electrodes formed so as to mesh with each other are formed on the surface.
Ital Transducer) electrodes (not shown) are provided. This IDT electrode is configured by connecting a plurality of pairs of comb-teeth electrodes by a method such as serial connection or parallel connection in order to obtain desired filter characteristics. Such an IDT electrode is
Vapor deposition / sputtering or CVD on a piezoelectric substrate
It can be formed into a desired shape and size by a thin film forming method such as a method.
【0023】また、フィルタ部品実装部2bは、図1の
例では、シリコン樹脂やエポキシ樹脂などの封止樹脂5
を塗布することによって封止されているが、フィルタ部
品を凹部に実装し、封止樹脂5によって封止することも
可能である。In the example of FIG. 1, the filter component mounting portion 2b has a sealing resin 5 such as silicone resin or epoxy resin.
However, it is also possible to mount the filter component in the recess and seal with the sealing resin 5.
【0024】本発明によれば、上記の電力増幅素子実装
部2aとフィルタ部品実装部2bとの間に、前記誘電体
基板2の他方の主面まで延びた第2の貫通導体11が形
成されており、この第2の貫通導体11も第1の貫通導
体6と同様に、ロウ材13を介して外部電気回路基板7
の上面の放熱用導体15に取着されている。According to the present invention, the second through conductor 11 extending to the other main surface of the dielectric substrate 2 is formed between the power amplification element mounting portion 2a and the filter component mounting portion 2b. Similarly to the first through conductor 6, the second through conductor 11 also includes the external electrical circuit board 7 through the brazing material 13.
Is attached to the heat dissipation conductor 15 on the upper surface of the.
【0025】このような第2の貫通導体11を形成する
ことによって、電力増幅素子4による発熱のうち電力増
幅素子実装部2a方向に伝わった熱および両実装部2
a、2b間の誘電体層に伝わってきた熱を第2の貫通導
体11で吸収し、ロウ材13を介して外部電気回路基板
7の表面に形成された放熱用導体15に効率的に伝達す
ることができる。By forming the second penetrating conductor 11 as described above, of the heat generated by the power amplification element 4, the heat transferred to the power amplification element mounting section 2a and both mounting sections 2
The heat transmitted to the dielectric layer between a and 2b is absorbed by the second penetrating conductor 11, and is efficiently transmitted to the heat radiating conductor 15 formed on the surface of the external electric circuit board 7 via the brazing material 13. can do.
【0026】また、本発明によれば、電力増幅素子実装
部2aの下部に導体層2a1が形成されており、この導
体層2a1は水平方向に延設されており、前記第2の貫
通導体11と接続されている。かかる構造によって、導
体層2a1が、周辺の熱を吸収し、第2の貫通導体11
に熱を誘導し、外部電気回路基板7表面の放熱用導体1
5にまで効率的に放熱させることができる。Further, according to the present invention, the conductor layer 2a1 is formed below the power amplification element mounting portion 2a, and the conductor layer 2a1 is extended in the horizontal direction, and the second through conductor 11 is formed. Connected with. With this structure, the conductor layer 2a1 absorbs heat from the surroundings, and the second through conductor 11
Heat is introduced to the surface of the external electric circuit board 7 for heat dissipation 1
It is possible to efficiently radiate heat up to 5.
【0027】また、本発明によれば、フィルタ素子実装
部2bの下部に、第3の貫通導体23を形成することが
望ましい。この第3の貫通導体23も、第1の貫通導体
6、第2の貫通導体11と同様に、誘電体基板2の他方
の主面まで延びるように形成されており、ロウ材13を
介して外部電気回路基板7の上面の放熱用導体15に取
着されている。この第3の貫通導体23を形成すること
によって、フィルタ素子8自身の温度上昇を低減させる
ことが出来る。Further, according to the present invention, it is desirable to form the third penetrating conductor 23 under the filter element mounting portion 2b. Like the first through conductor 6 and the second through conductor 11, the third through conductor 23 is also formed so as to extend to the other main surface of the dielectric substrate 2, and via the brazing material 13. It is attached to the heat dissipation conductor 15 on the upper surface of the external electric circuit board 7. By forming the third penetrating conductor 23, the temperature rise of the filter element 8 itself can be reduced.
【0028】第2の貫通導体11は、電力増幅素子実装
部2aとフィルタ素子実装部2bとの間において、1本
のみならず、2本以上設けることにより、さらに上記効
果を高めることができる。By providing not only one second penetrating conductor 11 but also two or more between the power amplification element mounting portion 2a and the filter element mounting portion 2b, the above effect can be further enhanced.
【0029】その具体例を図2〜図4に示す。図2は、
図1の高周波モジュールを上側からみた平面図であり、
フィルタ部品および電力増幅素子を省略したものであ
り、図3、図4はさらに他の例を示す平面図である。Specific examples thereof are shown in FIGS. Figure 2
It is the top view which looked at the high frequency module of FIG. 1 from the upper side,
The filter component and the power amplification element are omitted, and FIGS. 3 and 4 are plan views showing still another example.
【0030】図2の例によれば、平面的にみて斜めに配
置された電力増幅素子実装部2aとフィルター素子実装
部2bとの略中間部に第2の貫通導体11を2本形成し
たものである。図3では、第2の貫通導体11を電力増
幅素子実装部2aを囲うように直線的に複数本配置した
ものである。さらに図4は第2の貫通導体11を千鳥状
に複数本配置させた例である。According to the example of FIG. 2, two second penetrating conductors 11 are formed in a substantially intermediate portion between the power amplification element mounting portion 2a and the filter element mounting portion 2b which are obliquely arranged in a plan view. Is. In FIG. 3, a plurality of second penetrating conductors 11 are linearly arranged so as to surround the power amplification element mounting portion 2a. Further, FIG. 4 shows an example in which a plurality of second through conductors 11 are arranged in a zigzag pattern.
【0031】上記の電力増幅素子実装部2aとフィルタ
部品実装部2bとの間には0.8mm以上の間隔を設け
ることが好ましく、より好ましくは1.0mm以上の間
隔を設けることにより、電力増幅素子4による発熱が実
装部2a、2b間の誘電体層を介してフィルタ部品8に
伝達されることを十分に低減させることが可能となる。
電力増幅素子実装部2aとフィルタ部品実装部2bとの
距離とは、実装された電力増幅素子とフィルタ部品とを
実装した時の平面的にみた場合に最短距離である。It is preferable to provide a space of 0.8 mm or more between the power amplifying element mounting portion 2a and the filter component mounting portion 2b, and more preferably 1.0 mm or more. It is possible to sufficiently reduce the heat generated by the element 4 being transmitted to the filter component 8 via the dielectric layer between the mounting portions 2a and 2b.
The distance between the power amplification element mounting portion 2a and the filter component mounting portion 2b is the shortest distance in a plan view when the mounted power amplification element and the filter component are mounted.
【0032】本発明における第1、第2、第3の貫通導
体6、11、23は、その機能から、熱伝導性の優れた
金属によって形成することが望ましく、特に、Cu、C
uO、Ag、Ag−Pd、Ag−Pt、Auの群から選
ばれる少なくとも1種を主成分とする金属を主成分とす
る導体によって形成することが望ましい。とりわけ、少
なくとも貫通導体11は、電力増幅素子4による発熱が
誘電体基板2へ伝達され、さらにフィルタ8へと伝達さ
れにくくする上では、誘電体基板2の熱伝導率よりも5
倍以上大きくすることが望ましく、さらには熱伝導率が
100W/m・K以上のものを用いることが好ましい。
なお、これら貫通導体6、11、23は、誘電体基板2
と同時焼成によって形成されることが望ましく、そのた
めに誘電体基板との焼成焼成時の焼成収縮などを整合さ
せるために、金属酸化物やガラスなどの無機物が含まれ
ていてもよい。The first, second, and third penetrating conductors 6, 11, and 23 in the present invention are preferably formed of a metal having excellent thermal conductivity because of their functions, and particularly Cu and C are used.
It is desirable to use a conductor whose main component is a metal whose main component is at least one selected from the group consisting of uO, Ag, Ag-Pd, Ag-Pt, and Au. In particular, at least the through conductor 11 has a heat conductivity of 5 or higher than that of the dielectric substrate 2 in order to prevent heat generated by the power amplification element 4 from being transferred to the dielectric substrate 2 and further to the filter 8.
It is desirable to increase the thermal conductivity by a factor of two or more, and it is more preferable to use one having a thermal conductivity of 100 W / m · K or more.
In addition, these penetrating conductors 6, 11, and 23 are used for the dielectric substrate 2
It is desirable to form the film by co-firing, and for that purpose, an inorganic substance such as a metal oxide or glass may be contained in order to match the firing shrinkage during firing and firing with the dielectric substrate.
【0033】このような高熱伝導の貫通導体は、例えば
Ag粉末を80〜90質量%、ホウケイ酸鉛ガラスを1
〜4質量%、SiO2を5〜15質量%の配合比とする
ことで熱伝導率を約130W/m・K以上とすることが
できる。Such a high thermal conductivity through conductor is, for example, 80 to 90% by mass of Ag powder and 1% of lead borosilicate glass.
The thermal conductivity can be set to about 130 W / m · K or more by setting the compounding ratio of ˜4 mass% and SiO 2 to 5 to 15 mass%.
【0034】第1、第2、第3の貫通導体6、11、2
3は、いずれも直径(短径)が0.1〜0.5mmであ
ることが望ましく、複数本形成する場合には、隣接する
貫通導体同士の側面間の間隔が0.2〜1.0mmの間
隔で配置することによって、貫通導体間の誘電体へのク
ラックなどの発生を抑制しつつ、複数本の貫通導体によ
る熱伝達効率を高めることができる。また、これら貫通
導体6、11、23は、必ずしも円形である必要はな
く、長円形状、スリット形状であってもよい。The first, second and third through conductors 6, 11, 2
It is desirable that each of 3 has a diameter (minor axis) of 0.1 to 0.5 mm, and when a plurality of them are formed, the distance between the side surfaces of adjacent through conductors is 0.2 to 1.0 mm. By arranging the through conductors at intervals, it is possible to improve the heat transfer efficiency by the plurality of through conductors while suppressing the occurrence of cracks in the dielectric between the through conductors. Further, these penetrating conductors 6, 11, and 23 do not necessarily have to be circular, and may have an elliptical shape or a slit shape.
【0035】また、本発明の高周波モジュールにおいて
は、図1に示すように、電力増幅素子実装部2a、フィ
ルタ部品実装部2bを凹部等の形成によってそれぞれ異
なる深さで形成し、誘電体基板2に形成された電力増幅
素子実装部2aの底面に形成された導体層2a1と、フ
ィルタ部品実装部2bの底面に形成された導体層2b1
とを、それぞれ異なる誘電体層に形成することによっ
て、それらが同一の誘電体層上に形成される場合に比べ
て、電力増幅素子4から誘電体層や導体層を介してフィ
ルタ部品8に伝わる熱量をより効果的に低減させること
が可能となり、フィルタ部品8の熱的な影響による電気
的特性の劣化をより確実に防止しすることができる。Further, in the high frequency module of the present invention, as shown in FIG. 1, the power amplification element mounting portion 2a and the filter component mounting portion 2b are formed to have different depths by forming recesses and the like, and the dielectric substrate 2 is formed. Conductor layer 2a1 formed on the bottom surface of the power amplification element mounting portion 2a formed in the above, and conductor layer 2b1 formed on the bottom surface of the filter component mounting portion 2b.
Are formed in different dielectric layers, respectively, so that they are transmitted from the power amplification element 4 to the filter component 8 via the dielectric layer and the conductor layer, as compared with the case where they are formed on the same dielectric layer. It is possible to reduce the amount of heat more effectively, and it is possible to more reliably prevent the deterioration of the electrical characteristics due to the thermal influence of the filter component 8.
【0036】本発明の高周波モジュール1においては、
電力増幅素子4およびフィルタ部品8を電気的に機能さ
せるため、誘電体基板2の表面や内部に、内部導体配線
16および表層導体配線17ならびにビアホール導体1
8を形成して、誘電体基板2の上面に電子回路を構成す
るのに抵抗、コンデンサ、インダクタ、半導体素子、M
EMS(Micro Electro Mechnic
al Systems)等の電子部品12を搭載し、所
望の電子回路を構成する。また、必要に応じて、誘電体
基板2の内部には、導体配線を利用した、コンデンサ、
インダクタ等による高周波フィルタ(図示せず)等を内
蔵させることにより、さらに高機能で小型の高周波モジ
ュール1を構成することができる。In the high frequency module 1 of the present invention,
In order to make the power amplification element 4 and the filter component 8 electrically function, the inner conductor wiring 16, the surface conductor wiring 17, and the via-hole conductor 1 are formed on the surface or inside of the dielectric substrate 2.
8 to form an electronic circuit on the upper surface of the dielectric substrate 2, a resistor, a capacitor, an inductor, a semiconductor element, M
EMS (Micro Electro Mechanical)
An electronic component 12 such as an Al Systems) is mounted to form a desired electronic circuit. In addition, if necessary, inside the dielectric substrate 2, a capacitor using conductor wiring,
By incorporating a high-frequency filter (not shown) including an inductor or the like, it is possible to configure the high-performance and compact high-frequency module 1.
【0037】また、高周波モジュール1表面に実装され
た電子部品12や回路を保護する目的で、金属シールド
ケース14を取着することにより、外部からの機械的応
力や雰囲気の影響や電磁ノイズを遮断または抑制させる
ことも可能である。Further, by attaching the metal shield case 14 for the purpose of protecting the electronic parts 12 and the circuit mounted on the surface of the high frequency module 1, the external mechanical stress, the influence of the atmosphere and the electromagnetic noise are shielded. Alternatively, it can be suppressed.
【0038】さらに、高周波モジュール1表面にバリス
タやチップインダクタ等の電子部品12や、誘電体基板
2の内部にインダクタを内蔵させることにより、静電気
対策を施した高周波モジュール1を構成することができ
る。Furthermore, by incorporating an electronic component 12 such as a varistor or a chip inductor on the surface of the high frequency module 1 or an inductor inside the dielectric substrate 2, the high frequency module 1 against static electricity can be constructed.
【0039】また、この高周波モジュール1は、外部電
気回路基板7に対して、信号伝達用として、高周波モジ
ュール1に形成された電極パッド20をロウ材13を介
して外部電気回路基板7表面に形成された信号用配線層
21と接続される。In the high frequency module 1, the electrode pads 20 formed on the high frequency module 1 are formed on the surface of the external electric circuit board 7 via the brazing material 13 for signal transmission to the external electric circuit board 7. And the connected signal wiring layer 21.
【0040】図5は、本発明の高周波モジュールの他の
例を示す断面図である。図1の例では、フィルタ部品実
装部2bは、主面に表面実装されていたが、この図5で
は、凹部内にフィルタ部品実装部2bが形成されてお
り、図1と同様に、凹部内の底面に形成された導体層2
b1に実装されている。さらにワイヤボンディングでフ
ィルタ部品8を信号線路と接続してもよい。FIG. 5 is a sectional view showing another example of the high-frequency module of the present invention. In the example of FIG. 1, the filter component mounting portion 2b is surface-mounted on the main surface, but in FIG. 5, the filter component mounting portion 2b is formed in the concave portion, and as in FIG. Conductor layer 2 formed on the bottom surface of the
It is mounted on b1. Furthermore, the filter component 8 may be connected to the signal line by wire bonding.
【0041】図5の高周波モジュールにおいては、凹部
状のフィルタ部品実装部2bに、フィルタ部品8と離間
させて蓋体9が取着されている。蓋体9は、フィルタ部
品8の機械的保護およびIDT電極の酸化による劣化を
抑制する目的で、振動空間であるフィルタ部品実装部2
bの内部空間内に低湿度の空気等を封入し、エポキシ樹
脂やロウ材等を用いて取着され、フィルタ部品8を密閉
封止する。なお、空気の代わりに窒素ガスやアルゴンガ
ス等の不活性ガスや空気よりも低熱伝導の不活性ガス等
を封入して密閉しても、IDT電極の酸化による劣化を
防止することができる。In the high frequency module of FIG. 5, the lid 9 is attached to the recessed filter component mounting portion 2b so as to be separated from the filter component 8. The lid 9 is a vibration space for the filter component mounting portion 2 for the purpose of mechanical protection of the filter component 8 and suppression of deterioration due to oxidation of the IDT electrode.
A low humidity air or the like is enclosed in the inner space of b and is attached using an epoxy resin, a brazing material or the like to hermetically seal the filter component 8. Even if an inert gas such as nitrogen gas or argon gas or an inert gas having a lower thermal conductivity than air is sealed instead of air, the deterioration of the IDT electrode due to oxidation can be prevented.
【0042】蓋体9に用いられる材質としては、SU
S、銅、洋白等の金属や、ガラスエポキシ樹脂等の樹脂
を用いることができる。The material used for the lid 9 is SU
Metals such as S, copper, nickel silver, and resins such as glass epoxy resin can be used.
【0043】図5の実施例においても、フィルタ部品実
装部2bと電力増幅素子実装部2aとの中間に位置する
部分には、図1と同様に第2の貫通導体11が形成され
ている。このとき、貫通導体11の一端は、図1と同様
に、モジュール1の下面に露出し、ロウ材13を介して
放熱用導体15にロウ付けされているが、他方は、導体
層2a1の延設部と接続され、さらに上面側に延設され
ていてもよい。Also in the embodiment of FIG. 5, the second penetrating conductor 11 is formed in the portion located between the filter component mounting portion 2b and the power amplification element mounting portion 2a, as in FIG. At this time, one end of the penetrating conductor 11 is exposed on the lower surface of the module 1 and is brazed to the heat dissipation conductor 15 via the brazing material 13, as in FIG. 1, but the other end is extended from the conductor layer 2a1. It may be connected to the installation portion and further extended to the upper surface side.
【0044】図6は、本発明の高周波モジュールのさら
に他の例を示す概略断面図である。図1、図5の例で
は、誘電体基板2は、同一材質によって形成されたもの
であるが、図6においては、電力増幅素子実装部2aの
周囲を他の部分よりも低熱伝導性の誘電体材料によって
形成することによって、この実装部2aの周囲の低熱伝
導性の誘電体材料が断熱材として機能し、電力増幅素子
4から発生する熱が周囲に拡散、伝達されるのを防止す
ることができる。FIG. 6 is a schematic cross-sectional view showing still another example of the high frequency module of the present invention. In the examples of FIGS. 1 and 5, the dielectric substrate 2 is formed of the same material, but in FIG. 6, the dielectric substrate 2 having a lower thermal conductivity than the other portions is provided around the power amplification element mounting portion 2a. By being formed of a body material, the low thermal conductive dielectric material around the mounting portion 2a functions as a heat insulating material and prevents heat generated from the power amplification element 4 from being diffused and transferred to the surroundings. You can
【0045】本発明の上記高周波モジュールは、従来の
周知の方法で作製することができる。ここでは、好適な
例として、誘電体基板がガラスセラミックスなどの低温
焼成が可能な組成物からなる場合について、以下に簡単
に説明する。The high-frequency module of the present invention can be manufactured by a conventionally known method. Here, as a preferred example, a case where the dielectric substrate is made of a composition capable of low temperature firing such as glass ceramics will be briefly described below.
【0046】まず、誘電体基板2における各誘電体層を
形成するために各誘電体層となるガラスセラミック組成
物からなるセラミックグリーンシートを作製する。誘電
体層となるセラミックグリーンシートは、ホウ珪酸ガラ
ス、ホウ珪酸亜鉛系ガラス、SiO2−Al2O3−アル
カリ土類酸化物などの周知のガラス30〜90質量%
に、アルミナ、クオーツ、ムライト、AlN、フォルス
テライトなどの無機フィラーを10〜70質量%の割合
で混合した混合物に、アルキルメタクリレート等の有機
バインダ、DBP(ジブチルフタレート)等の可塑剤と
トルエン等の有機溶剤を混合し、ボールミルで4〜8時
間混練してスラリーを作製し、このスラリーを用いてド
クターブレード法等によりテープ成形を行ない、これを
所定の寸法に切断して作製する。First, in order to form each dielectric layer on the dielectric substrate 2, a ceramic green sheet made of a glass ceramic composition to be each dielectric layer is prepared. The ceramic green sheet to be the dielectric layer is a known glass such as borosilicate glass, borosilicate zinc glass, SiO 2 —Al 2 O 3 -alkaline earth oxide, 30 to 90% by mass.
A mixture of inorganic fillers such as alumina, quartz, mullite, AlN, and forsterite in a proportion of 10 to 70% by mass, an organic binder such as alkyl methacrylate, a plasticizer such as DBP (dibutyl phthalate), and toluene such as toluene. An organic solvent is mixed and kneaded with a ball mill for 4 to 8 hours to prepare a slurry. Using this slurry, tape molding is performed by a doctor blade method or the like, and the tape is cut into a predetermined size.
【0047】そして、所定のセラミックグリーンシート
に、貫通導体11、内部導体配線16と表層導体配線1
7とを接続するためのビアホール導体18、電力増幅素
子やフィルタ部品を実装のための凹部、貫通導体用の貫
通穴を形成するために、マイクロドリル、パンチングで
形成したり、さらには感光性樹脂を含むグリーンシート
に露光、現像処理を施すなどの処理によって凹部やそれ
ぞれの様々な円形、楕円形、長孔などの様々な形状の貫
通穴を形成することができる。Then, the through conductor 11, the internal conductor wiring 16 and the surface conductor wiring 1 are provided on a predetermined ceramic green sheet.
Via hole 18 for connecting with 7, a recess for mounting a power amplifying element or a filter component, a through hole for a through conductor, a micro drill, punching, or a photosensitive resin. It is possible to form recesses and through holes having various shapes such as various circular shapes, elliptical shapes, and long holes by performing processing such as exposure and development processing on the green sheet including.
【0048】そして、このうち、貫通導体11やビアホ
ール導体18用の貫通穴にCuあるいはAg系導体ペー
ストを充填する。また、同時に、各グリーンシートに内
層導体配線16、表層導体配線17、導体層2a1、2
b1となるパターンをCuあるいはAg系導体ペースト
を用いてスクリーン印刷法や、グラビア印刷法などによ
って印刷形成する。Then, of these, the through holes for the through conductor 11 and the via-hole conductor 18 are filled with Cu or Ag-based conductor paste. At the same time, the inner layer conductor wiring 16, the surface layer conductor wiring 17, the conductor layers 2a1 and 2 are provided on each green sheet.
The pattern b1 is formed by printing using a Cu or Ag-based conductor paste by a screen printing method, a gravure printing method, or the like.
【0049】ここで、CuあるいはAg系導体ペースト
には、例えばCu粉末、CuO粉末、Ag粉末の他、A
g合金であるAg−Pd粉末、Ag−Pt粉末が使用可
能であり、必要に応じて例えば所定量のホウケイ酸系の
低融点ガラスや、SiO2、Al2O3、MgO、CaO
などのアルカリ土類金属酸化物、Bi2O3等の金属酸化
物を加え、さらにエチルセルロース等の有機バインダ
と、例えば2,4−トリメチル−1,3−ペンタンジオ
ールモノイソブチレート等の有機溶剤とを混合して均質
混練したものが用いられる。Here, the Cu or Ag-based conductor paste includes, for example, Cu powder, CuO powder, Ag powder, and A
Ag-Pd powder and Ag-Pt powder, which are g-alloys, can be used, and if necessary, for example, a predetermined amount of borosilicate low-melting glass, SiO 2 , Al 2 O 3 , MgO, CaO.
Alkaline earth metal oxides such as, and metal oxides such as Bi 2 O 3 are further added, an organic binder such as ethyl cellulose, and an organic solvent such as 2,4-trimethyl-1,3-pentanediol monoisobutyrate. A material obtained by mixing and homogeneously kneading is used.
【0050】これらの金属粉末と、必要に応じて例えば
所定量のホウケイ酸亜鉛系ガラス、ホウケイ酸鉛系ガラ
スなどのホウケイ酸系の低融点ガラス、Al2O3、Mg
O,CaO、SiO2、Bi2O3等の金属酸化物などの
無機物と、エチルセルロース等の有機バインダと、2,
4−トリメチル−1,3−ペンタンジオールモノイソブ
チレート等の有機溶剤とを混合して均質混練したものが
用いられ、金属粉末に対する低融点ガラスや金属酸化物
の添加量の割合によって熱伝導率が制御可能である。These metal powders and, if necessary, a predetermined amount of zinc borosilicate glass, borosilicate low melting glass such as lead borosilicate glass, Al 2 O 3 , Mg
Inorganic substances such as metal oxides such as O, CaO, SiO 2 , and Bi 2 O 3 ; organic binders such as ethyl cellulose;
A mixture obtained by homogeneously kneading with an organic solvent such as 4-trimethyl-1,3-pentanediol monoisobutyrate is used. The thermal conductivity depends on the ratio of the low melting point glass and the metal oxide added to the metal powder. Can be controlled.
【0051】上記のようにして得られたセラミックグリ
ーンシートを例えばビアホール導体18を基準に位置合
わせし、積層順序に応じて積層し、熱圧着することによ
り未焼成の積層体を形成する。The ceramic green sheets obtained as described above are aligned with, for example, the via-hole conductors 18 as a reference, laminated according to the laminating order, and thermocompression bonded to form an unfired laminated body.
【0052】次に、この未焼成状態の積層体を例えば酸
化雰囲気中で焼成し焼結一体化する。具体的には、酸素
雰囲気または大気雰囲気中において800〜1000℃
で焼成することにより、焼結基板を作製することができ
る。Next, the unfired laminate is fired in, for example, an oxidizing atmosphere to be sintered and integrated. Specifically, 800 to 1000 ° C. in an oxygen atmosphere or an air atmosphere
A sintered substrate can be manufactured by firing at.
【0053】その後、実装部2a、2c内に、フィルタ
部品8、電力増幅素子4などを実装し、蓋体9をロウ付
けしたり、封止用有機樹脂19を充填して封止する。After that, the filter component 8, the power amplification element 4 and the like are mounted in the mounting portions 2a and 2c, the lid 9 is brazed, and the sealing organic resin 19 is filled and sealed.
【0054】また、かかるモジュールを外部電気回路基
板7に実装する場合には、通常のモジュールの信号伝達
用の電極パッドをロウ付けすると同時に、第1の貫通導
体6、第2の貫通導体11、第3貫通導体23を外部電
気回路基板7の表面に形成された放熱用導体15にロウ
付けする。When the module is mounted on the external electric circuit board 7, the electrode pads for signal transmission of the normal module are brazed, and at the same time, the first through conductor 6, the second through conductor 11, The third penetrating conductor 23 is brazed to the heat dissipation conductor 15 formed on the surface of the external electric circuit board 7.
【0055】また、図6のように、電力増幅素子実装部
2aの周囲を断熱性を有する誘電体材料によって形成す
る場合には、通常の誘電体基板材料に感光性樹脂を配合
し、現像露光して所定の凹部を形成した後、その凹部内
に、断熱性誘電体材料を充填し、さらに、パンチング等
によって凹部を形成することによって未焼成状態の積層
体を作製した後、焼成すればよい。Further, as shown in FIG. 6, when the periphery of the power amplification element mounting portion 2a is formed of a dielectric material having a heat insulating property, a photosensitive resin is mixed with an ordinary dielectric substrate material, and development exposure is performed. After forming a predetermined recessed portion, a heat insulating dielectric material is filled into the recessed portion, and the recessed portion is formed by punching or the like to prepare an unfired laminated body, and then firing may be performed. .
【0056】[0056]
【実施例】誘電体材料として、ホウケイ酸ガラス70質
量%、アルミナ30質量%からなれる熱伝導率が2W/
m・Kのガラスセラミック系誘電体材料を用い、貫通導
体を150W/m・KのAg系導体材料を用い、高周波
モジュールを上記のようにして作製し、これをガラス織
布−エポキシ樹脂複合材料からなる絶縁基板上に、銅か
らなる放熱用導体や信号用配線層を形成したマザーボー
ド表面に、Cu−Ag系ロウ材を用いて実装した。EXAMPLE A dielectric material composed of 70% by mass of borosilicate glass and 30% by mass of alumina has a thermal conductivity of 2 W /
A high frequency module was manufactured as described above using a glass ceramic dielectric material of m · K and a through conductor of 150 W / m · K of Ag based conductive material. The glass woven fabric-epoxy resin composite material The heat-dissipating conductor and signal wiring layer made of copper were formed on the insulating substrate made of Cu, and the Cu-Ag brazing material was used for mounting on the mother board surface.
【0057】これに、電力増幅素子(PA)の電源ON
/OFF比(デュティ比)を1/8にした状態で、0d
Bの入力信号を入れ、33.5dBmの出力が得られる
ように条件設定し、電力増幅素子実装部ならびにフィル
タ部品実装部内の定常温度を測定した。In addition, the power of the power amplification element (PA) is turned on.
With the / OFF ratio (duty ratio) set to 1/8, 0d
The input signal of B was input and the conditions were set so that an output of 33.5 dBm was obtained, and the steady temperature in the power amplification element mounting portion and the filter component mounting portion was measured.
【0058】また、熱伝導解析シミュレーションプログ
ラムを用い、誘電体基板の熱伝導率を変化させたときの
それらの温度を計算した。Also, using a heat conduction analysis simulation program, the temperatures of the dielectric substrates when they were changed were calculated.
【0059】[0059]
【表1】 [Table 1]
【0060】表1の結果より、本発明の構造によれば、
第1の貫通導体や第2の貫通導体を設けることによっ
て、電力増幅素子の熱を効果的放熱し、フィルタ部品へ
の影響を低減できることがわかった。From the results of Table 1, according to the structure of the present invention,
It has been found that by providing the first through conductor and the second through conductor, it is possible to effectively dissipate the heat of the power amplification element and reduce the influence on the filter component.
【0061】また、かかる構成においては、第2の貫通
導体の本数が多いほど、また、誘電体基板の熱伝導率が
小さいほどその効果に優れることがわかる。また、誘電
体基板を2種の誘電体材料によって形成した場合におい
ても同様の結果が得られることがわかった。Further, in such a structure, it is understood that the larger the number of the second penetrating conductors and the smaller the thermal conductivity of the dielectric substrate, the more excellent the effect. It was also found that similar results can be obtained when the dielectric substrate is made of two kinds of dielectric materials.
【0062】[0062]
【発明の効果】以上詳述した通り、本発明によれば、電
力増幅素子による発熱は外部電気回路基板の放熱用導体
へと効率良く熱放散させることが可能となり、電力増幅
素子からその近傍に配置されたフィルタ部品への熱伝達
を極めて低減させることができるため、フィルタ部品の
高周波フィルタ特性、高周波分波器特性等の電気的特性
を劣化させることなく、小型で高性能な高周波モジュー
ルを提供することができる。しかも、放熱フィン等の放
熱用部材を別途必要とせず、低価格な携帯型情報端末機
等の電子機器・電子装置等に好適な高周波モジュールと
なる。As described above in detail, according to the present invention, the heat generated by the power amplifying element can be efficiently dissipated to the heat dissipation conductor of the external electric circuit board, and the power amplifying element can be provided in the vicinity thereof. Since it is possible to significantly reduce heat transfer to the placed filter components, a compact and high-performance high-frequency module is provided without deteriorating the electrical characteristics such as high-frequency filter characteristics and high-frequency duplexer characteristics of the filter components. can do. In addition, a high-frequency module suitable for electronic equipments / devices such as low-priced portable information terminals does not need a separate heat dissipation member such as a heat dissipation fin.
【図1】本発明の高周波モジュールの実施の形態の一例
を示す概略断面図である。FIG. 1 is a schematic sectional view showing an example of an embodiment of a high-frequency module of the present invention.
【図2】本発明の高周波モジュールにおける貫通導体の
配置の例を示す概略平面図である。FIG. 2 is a schematic plan view showing an example of arrangement of through conductors in the high-frequency module of the present invention.
【図3】本発明の高周波モジュールにおける貫通導体の
配置の他の例を示す概略平面図である。FIG. 3 is a schematic plan view showing another example of arrangement of through conductors in the high-frequency module of the present invention.
【図4】本発明の高周波モジュールにおける貫通導体の
配置のさらに他の例を示す概略平面図である。FIG. 4 is a schematic plan view showing still another example of arrangement of through conductors in the high-frequency module of the present invention.
【図5】本発明の高周波モジュールの実施の形態の他の
例を示す概略断面図である。FIG. 5 is a schematic cross-sectional view showing another example of the embodiment of the high-frequency module of the present invention.
【図6】本発明の高周波モジュールの実施の形態のさら
に他の例を示す概略断面図である。FIG. 6 is a schematic sectional view showing still another example of the embodiment of the high-frequency module of the present invention.
1・・・・・・・高周波モジュール 2・・・・・・・誘電体基板 2a・・・・・・電力増幅素子実装部 2b・・・・・・フィルタ部品実装部 2a1,2b1・導体層 3a・・・・・・ワイヤボンディング 3b・・・・・・導体バンプ 4・・・・・・・電力増幅素子 6・・・・・・・第1の貫通導体 7・・・・・・・外部電気回路基板 8・・・・・・・フィルタ部品 9・・・・・・・蓋体 11・・・・・・第2の貫通導体 13・・・・・・ロウ材 15、24・・・放熱用導体 23・・・・・・第3の貫通導体 1 ... High-frequency module 2 ... Dielectric substrate 2a --- Power amplifier element mounting part 2b ・ ・ ・ ・ ・ ・ Filter component mounting part 2a1, 2b1 and conductor layer 3a ... Wire bonding 3b ··· Conductor bump 4 ... Power amplification element 6 ... First through conductor 7 ... External electric circuit board 8 ... Filter parts 9 ... Lid 11 ... Second through conductor 13 --- Brazil material 15, 24 ... Heat dissipation conductor 23 ... Third through conductor
Claims (8)
の一方の主面に、電力増幅素子およびフィルタ部品を主
面上に実装してなり、前記電力増幅素子実装部の下部に
誘電体基板を他方の主面まで貫通する第1の貫通導体を
形成し、少なくとも前記電力増幅素子実装部と前記フィ
ルタ部品実装部との間に、前記誘電体基板の前記他方の
主面まで延びた第2の貫通導体を形成するとともに、前
記第1の貫通導体および第2の貫通導体を、ロウ材を介
して外部電気回路基板の上面に実装することを特徴とす
る高周波モジュール。1. A power amplification device and a filter component are mounted on one main surface of a dielectric substrate formed by laminating a plurality of dielectric layers, and the power amplification device and the filter component are mounted on the lower surface of the power amplification device mounting portion. A first penetrating conductor that penetrates the dielectric substrate to the other main surface is formed, and extends to at least the other main surface of the dielectric substrate between at least the power amplification element mounting portion and the filter component mounting portion. A high-frequency module, wherein the second through conductor is formed, and the first through conductor and the second through conductor are mounted on the upper surface of the external electric circuit board via a brazing material.
の一方の主面に電力増幅素子実装用凹部及びまたはフィ
ルタ部品実装用凹部を形成し、該凹部内に電力増幅素子
および/またはフィルタ部品を蓋体または絶縁性樹脂に
よって封止してなることを特徴とする請求項1記載の高
周波モジュール。2. A power amplifying device mounting recess and / or a filter component mounting recess is formed in one main surface of a dielectric substrate formed by laminating a plurality of dielectric layers, and the power amplifying device and / or The high frequency module according to claim 1, wherein the filter component is sealed with a lid or an insulating resin.
の一方の主面に実装されたフィルタ部品実装部の下部に
誘電体基板を他方の主面まで貫通する第3の貫通導体を
形成したことを特徴とする請求項1または請求項2記載
の高周波モジュール。3. A third through conductor which penetrates the dielectric substrate to the other main surface below the filter component mounting portion mounted on one main surface of the dielectric substrate formed by laminating a plurality of dielectric layers. The high frequency module according to claim 1 or 2, wherein the high frequency module is formed.
形成するとともに、該導体層を平面方向に延設して前記
第2の貫通導体と接続したことを特徴とする請求項1乃
至請求項3のいずれか記載の高周波モジュール。4. A conductor layer is formed on a bottom surface of the power amplification element mounting portion, and the conductor layer is extended in a plane direction and connected to the second penetrating conductor. The high frequency module according to claim 3.
以下であることを特徴とする請求項1乃至請求項4のい
ずれか記載の高周波モジュール。5. The thermal conductivity of the dielectric layer is 20 W / m · K.
It is the following, The high frequency module in any one of Claim 1 thru | or 4.
体層を、前記フィルタ部品搭載用凹部の周囲の誘電体層
よりも熱伝導率の小さい誘電体層によって形成したこと
を特徴とする請求項1乃至請求項5のいずれか記載の高
周波モジュール。6. The dielectric layer around the power amplifier element mounting recess is formed of a dielectric layer having a lower thermal conductivity than the dielectric layer around the filter component mounting recess. The high frequency module according to any one of claims 1 to 5.
品実装部とが0.8mm以上離間していることを特徴と
する請求項1乃至請求項6のいずれかに記載の高周波モ
ジュール。7. The high frequency module according to claim 1, wherein the power amplification element mounting portion and the filter component mounting portion are separated from each other by 0.8 mm or more.
形成するとともに、該導体層を前記電力増幅素子実装部
の下部の導体層とは異なる誘電体層に形成したことを特
徴とする請求項1乃至請求項7のいずれか記載の高周波
モジュール。8. A conductor layer is formed below the filter component mounting portion, and the conductor layer is formed on a dielectric layer different from the conductor layer below the power amplification element mounting portion. The high frequency module according to any one of claims 1 to 7.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002120812A JP3796192B2 (en) | 2002-04-23 | 2002-04-23 | High frequency module |
| US10/371,997 US6873529B2 (en) | 2002-02-26 | 2003-02-21 | High frequency module |
| DE10308448A DE10308448B4 (en) | 2002-02-26 | 2003-02-24 | RF module |
| CNB031060897A CN1236641C (en) | 2002-02-26 | 2003-02-24 | High frequency module |
| US11/059,256 US6961245B2 (en) | 2002-02-26 | 2005-02-15 | High frequency module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002120812A JP3796192B2 (en) | 2002-04-23 | 2002-04-23 | High frequency module |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003318319A true JP2003318319A (en) | 2003-11-07 |
| JP3796192B2 JP3796192B2 (en) | 2006-07-12 |
Family
ID=29536930
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|---|---|---|---|
| JP2002120812A Expired - Fee Related JP3796192B2 (en) | 2002-02-26 | 2002-04-23 | High frequency module |
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| JP2008288250A (en) * | 2007-05-15 | 2008-11-27 | Nec Electronics Corp | Multi-chip package |
| JP2010206502A (en) * | 2009-03-03 | 2010-09-16 | Murata Mfg Co Ltd | High frequency module |
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| CN111029320A (en) * | 2019-11-22 | 2020-04-17 | 中国电子科技集团公司第十三研究所 | A kind of radio frequency microwave circuit board and preparation method thereof |
| CN112738994A (en) * | 2020-11-24 | 2021-04-30 | 鹤山市世拓电子科技有限公司 | Printed circuit board with embedded power device |
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| US9532475B2 (en) | 2013-03-18 | 2016-12-27 | Fujitsu Limited | High-frequency module |
| CN111029320A (en) * | 2019-11-22 | 2020-04-17 | 中国电子科技集团公司第十三研究所 | A kind of radio frequency microwave circuit board and preparation method thereof |
| CN112738994A (en) * | 2020-11-24 | 2021-04-30 | 鹤山市世拓电子科技有限公司 | Printed circuit board with embedded power device |
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