JP2003238180A - Dividing method of work - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dividing method of work capable of dividing a large-sized work into small pieces of work in a short time. <P>SOLUTION: In the method surface crack lines 11, 12 having directions of X and Y are formed on one surface of a large-sized work 10, the other surface on which the surface crack lines 11, 12 is not formed is heated on a heating plate 20, a cooling plate 30 that has a liquid layer 40 on the bottom surface of it, i.e., on a touching surface of it, is touched to the surface of the large-sized work 10 on which the surface crack lines 11, 12 are formed, thus a temperature difference is caused between both surfaces of the large-sized work 10. The large-sized work 10 is divided into small pieces of work by the tensile stress working to widen the surface crack lines 11, 12 of the large-sized work 10 only in the direction to cross at right angles by preventing that the side of the heating plate 20 of the large-sized work 10 (the other surface) is apt to convexly bend and that the side of the cooling plate 30 of the large-sized work 10 (the one surface) is apt to concavely bend due to the temperature difference by maintaining the large-sized work 10 in a state restricting the bending of it in the thickness direction. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of dividing a work, and more particularly to a method of dividing a work suitable for manufacturing a glass plate for electronic parts by dividing it from a large glass plate into a small glass plate. .

[0002]

2. Description of the Related Art As shown in FIG. 8, a glass plate 1 for electronic parts is, for example, a square having a side length length w of 3 to 15 mm and a thickness t of about 0.1 to 1.0 mm. Has a size of. When manufacturing such a glass plate 1, FIG.
As shown in (a), one rectangular large-sized glass plate 10
Is manufactured along the planned dividing lines 11a and 12a in the X and Y directions.

When the large glass plate 10 is divided,
Along the dividing lines 11a and 12a of the large-sized glass plate 10, the starting point of cutting is a diamond cutter or the like. Particularly preferably, as shown in FIGS. 9 (b) and 10 (a), laser irradiation and water spraying are used. After the surface crack lines 11 and 12 are formed in the X and Y directions by cooling or the like, the surface crack lines 11 and 12 are divided.

When dividing along the surface crack lines 11 and 12, as shown in FIG. 10 (b), the large glass plate 10 is formed so that one surface provided with the surface crack lines 11 and 12 is convex. Bend the surface crack line 11,1
2 is applied with a tensile stress, a sharp pressing member 110 is arranged on the opposite side of the surface crack lines 11 and 12, and a pressing force is applied to both sides of the surface crack lines 11 and 12, as shown in FIG. 10D, the pressing member 120 having a circular cross section is arranged on the side opposite to the surface crack lines 11 and 12, and the cross sections are formed on both sides of the surface crack lines 11 and 12. Circular pressing members 130, 1
40 is arranged to push up the pushing member 120, push down the pushing members 130 and 140, or push up the pushing member 120 and press the pushing members 130 and 14 together.
For example, a method of pushing down 0 is implemented.

[0005]

However, the above-mentioned FIG.
In any of the methods 0 (b) to (d), the surface crack lines 11 and 12 are divided by breaking by applying a mechanical external force, and thus the end faces of the divided portions have fine irregularities. There is a problem that not only glass breaks are easily formed due to the division, but also the broken cross sections are rubbed with each other and glass scraps are easily generated. Also, the surface crack lines 11 and 12 in the X direction and the Y direction at the same time
Is difficult to divide along the surface crack line 11 (or 12) in the X direction (or Y direction), and then the surface crack line 1 in the Y direction (or X direction).
Since the division is performed along 2 (or 11), there is a problem in productivity that the throughput is small.

Therefore, the present invention provides a work dividing method capable of dividing a large-sized work into small pieces without applying a mechanical external force as in the conventional case, and further shortening the time required for the division. It is intended.

[0007]

In order to solve the above-mentioned problems, a method for dividing a work according to the present invention is a method for dividing a large-sized work made of a brittle material into a large number of small-piece works. A step of introducing a cutting start line along the planned dividing line on one surface, and a state in which the large-size work is restrained from curving deformation in the plate thickness direction, and one surface provided with the cutting start line of the large-size work is at a low temperature. Dividing the work into a plurality of small pieces from the cutting starting line by giving a temperature difference so that the surface becomes a high temperature (claim 1).

Here, the term "introducing a cutting starting line along a planned dividing line into a large-sized work" as used above means that when a flaw is mechanically formed by a diamond cutter or the like, the flaw is formed by laser irradiation. In this case, it is meant to include both cases of forming a surface crack line by laser irradiation and cooling.

The above-mentioned "surface crack line" means a crack line extending along the cutting direction on the surface of a large-sized work. This surface crack line is, for example, after irradiating the surface of a large-sized workpiece with a laser along a planned cutting line to heat it, and then spraying cooling water onto at least a part of the heated planned cutting line surface, Preferably, it can be formed by irradiating a laser along a planned cutting line and heating it to spray cooling water along the surface of the heated planned cutting line to quench the surface of the large-sized work. Such a surface crack line has a narrow width dimension as compared with a flaw mechanically formed by a diamond cutter or the like, and a flaw formed by laser irradiation.
There is an advantage that the effective area of the small piece work obtained by the division can be increased.

Further, in the above-mentioned "large size work is restrained by the bending deformation in the plate thickness direction, a temperature difference is given so that one surface provided with a cutting origin line of the large size work has a low temperature and the other surface has a high temperature. The term "not only means" after the bending deformation is restrained ", but also" while the bending deformation is restrained "or" the bending deformation is restrained immediately after the temperature difference is given ". Including the case of "making it into a state", the point means that a state in which a temperature difference is given under the state in which the large-sized work is restrained from being curved and deformed in the plate thickness direction is realized. It is a thing.

Further, the term "giving a temperature difference such that one surface provided with a cutting starting line of a large-sized workpiece has a low temperature and the other surface has a high temperature", the one surface of the large-sized workpiece is cooled and then When heating the other surface, the other surface of the large work is heated, then when cooling one surface, the one surface of the large work is cooled, and when the other surface of the large work is heated, the other surface of the large work It is meant to include both cases where only one side is heated and cases where only one side of a large-sized work is cooled.

According to the above-described work dividing method, the starting point line for cutting is provided on one surface of the large-sized work along the planned dividing line, and the starting point for cutting the large-size work is restrained in the bending deformation in the plate thickness direction. By providing a temperature difference so that one surface with a line is low temperature and the other surface is high temperature, the other surface (high temperature side) of the large-format work expands and one surface (low temperature side) contracts, which occurs on both front and back surfaces. As a result of keeping the large work in a restrained state and preventing the bending deformation due to the stress difference, the stress difference becomes tensile stress in the direction orthogonal to the cutting start line introduction part. Since it acts and is divided from this cutting start line introduction part, compared with the method of applying a mechanical external force along the conventional surface crack line,
It can be divided into small pieces without applying excessive bending stress to large-format works. Further, since the division is carried out by utilizing the tensile stress acting on the cutting starting line of the large-sized work, there is no rubbing between the cut surfaces, and it is possible to suppress the amount of glass scrap generated by the division on the divided surfaces.
In addition, if the cutting starting lines are introduced in both the X direction and the Y direction in the large size work, the X direction and the Y direction can be simultaneously divided in one step, and the large size work can be divided in a significantly short time. Therefore, productivity can be significantly improved.

The present invention is also characterized in that a surface crack line is provided as the cutting start line (claim 2).

According to the above-described work dividing method, by providing the surface crack line, it is possible to divide a large-sized work into small piece works from the surface crack line portion. Moreover, since the surface crack line having almost no width is divided as the origin, the effective area of the small piece work can be increased as compared with the case where a wide scratch is introduced. It is possible to increase the number of small-piece work pieces obtained from large-format work pieces.

According to the present invention, a strip-shaped work is obtained by cutting the large-sized work in a direction orthogonal to a cutting starting line provided on one surface, and the strip-shaped work is restrained from bending deformation in the plate thickness direction. The strip-shaped workpiece is divided into a plurality of small-piece workpieces by providing a temperature difference such that one surface provided with a cutting starting line has a low temperature and the other surface has a high temperature. (Claim 3).

According to the above-described work dividing method, since a large-sized work is once divided into strip-shaped works and then the strip-shaped work is divided, a comparison is made with a method in which the large-sized work is divided into small-piece works at once. The time required to divide a large-format work into small pieces is long, but the division time is much shorter than that of the conventional method of sequentially dividing each surface crack line in the X and Y directions. be able to.

When a large-sized work is divided into small pieces at once, cracks that propagate along the X and Y directions join at the corners of the small pieces. At this time, there is a case where the crack progresses in a wrong direction, and the shape accuracy is deteriorated. However, in the method of dividing a strip-shaped work into small pieces, cracks propagate independently only in the width direction of the strip-shaped work, so the shape accuracy as described above is not deteriorated, and high accuracy is particularly required. This is effective when manufacturing small piece workpieces.

According to the present invention, the cooling work plate is brought into contact with one surface of the large-sized work or the strip-shaped work provided with the starting line for cutting, and the heating plate is brought into contact with the other surface of the large-sized work or the strip-shaped work, so that the large-sized work or the strip-shaped work is It is characterized in that the bending deformation in the plate thickness direction is restrained and a temperature difference is given (claim 4).

Here, the term "cooling plate" is used to cool one surface of a large-sized work or a strip-shaped work on which the cutting starting line is formed, and to give a temperature difference to this one surface and the other surface. For example, when a plate member having a large heat capacity such as an aluminum thick plate having a high thermal conductivity is used as it is, or a plate member having a small heat capacity such as an aluminum thin plate and a forced cooling means such as air cooling, water cooling or electronic cooling are used. It is meant to include cases such as combined use.

The term "heating plate" may be any one as long as it heats the other surface of the large-sized work or the strip-shaped work on which the cutting starting line is not formed. For example, a heater is provided inside the aluminum plate. It is meant to include those with a built-in one, those with a built-in electronic heating body, those with a heater placed on the back of an aluminum plate, and those with an electronic heating body placed.

According to the above-described work dividing method, the cooling plate is brought into contact with one surface of the large-sized work or the strip-shaped work provided with the cutting start line, and the heating plate is brought into contact with the other surface thereof.
The curved deformation in the plate thickness direction which is caused due to the temperature difference between both surfaces of the large-sized work or the strip-shaped work is prevented by keeping the large-sized work or the strip-shaped work in a restrained state, and the large-sized work is structured with a simple structure. Alternatively, the strip-shaped work can be divided.

According to the present invention, a large-sized work or a strip-shaped work is placed on the heating plate by bringing the other surface into contact with the other surface, and then a cooling plate is provided on one surface provided with a starting line for cutting the large-sized work or the strip-shaped work. Is brought into contact with. (Claim 5) According to the above-mentioned work dividing method, a large-sized work or a strip-shaped work is placed by contacting the other surface not provided with the cutting starting line on the heating plate, and the cutting starting line is drawn. For a large-sized work or a strip-shaped work in a state where the other surface not provided is heated and expanded, since the cooling plate is brought into contact with one surface provided with the cutting start line, the one surface is rapidly cooled, The large-size work or strip-shaped work is prevented from being curved and deformed due to the temperature difference on both sides of the large-size work or strip-shaped work. It is possible to divide along the cutting starting line.

The present invention is also characterized in that a layer of liquid is previously attached to the surface of the cooling plate which comes into contact with the large-sized work or the strip-shaped work. (Claim 6)
Here, the term "liquid" means that it can adhere to the cooling plate to form a layer by the adhesion force due to the surface tension, and includes water, oil, alcohols and the like. In particular, water is desirable because it can be obtained easily and inexpensively, and the washing of large pieces or strip-shaped pieces after division into small pieces is unnecessary or extremely simple.

According to the above-described work dividing method, a liquid, for example, water is sprayed in advance on the surface of the cooling plate to be brought into contact with the large-sized work or the strip-shaped work so that a layer of water is attached to the cooling plate. When is contacted with a large-sized work or a strip-shaped work, a cooling promotion effect due to the latent heat of water evaporation can be obtained. Further, this water penetrates into the surface crack line of the large-sized work or the strip-shaped work, and in addition, it rapidly expands by heating, so that there is a kind of wedge action that spreads the surface crack line only in the direction orthogonal to it, so that there is an effect of promoting division. can get. Further, in order to divide a large-sized work or a strip-shaped work, it is necessary that the contact surface between the large-sized work or the strip-shaped work and the cooling plate relatively slides. The layer of water between the cooling plate acts as a lubricant. Due to the overall effects such as these, compared to the case where a cooling plate that does not adhere liquid such as water is pressed against a large format work,
A smoother dividing operation can be obtained. Further, the presence of water under heating can be expected to have an effect of lowering the binding energy of a large-sized work or a strip-shaped work and promoting division.

According to the present invention, the cooling plate is held in contact with one surface of the large-sized work or the strip-shaped work provided with the cutting start line, and the other surface of the large-sized work or the strip-shaped work is brought into contact with the heating plate. It is characterized in that (Claim 7).

Here, the term "holding" means various holding such as holding by a mechanical mechanism, holding by vacuum suction, holding by electrostatic attraction, holding by an adhesive, etc. It is meant to include means by means.

According to the above-described work dividing method, one surface provided with the cutting starting line is brought into contact with the cooling plate to bring the other surface of the held large-sized work or strip-shaped work into contact with the heating plate. A large-sized work or strip-shaped work can be divided with a simple structure because a temperature difference is applied to both sides of the large-size work or strip-shaped work and the curved deformation in the plate thickness direction of the large-size work or strip-shaped work is restrained. You can Moreover, as compared with the above-described method in which the cooling plate is brought into contact with one surface of the large-sized work or the strip-shaped work, the other surface of which is heated on the heating plate, the division can be performed stably over a wide temperature range.

The present invention is also characterized in that a large-sized work or a strip-shaped work is held on the cooling plate by the adhesive force of the liquid layer (claim 8).

According to the above-described work dividing method, not only does the function of holding a large-sized work on the cooling plate merely by the adhesion of water, but also the cooling promotion effect based on the latent heat of water evaporation and , The water in the surface crack line formed on a large-sized work or a strip-shaped work is heated and rapidly expands to generate a stress that spreads the surface crack line only in the orthogonal direction. Moreover, in order to divide a large-sized work or a strip-shaped work, it is necessary that the contact surface between the cooling plate and the large-sized work or the strip-shaped work can be relatively moved. The water existing between the work piece and the work piece also acts as a lubricant, and the total effect of these makes it possible to divide the water even more effectively. Further, the presence of water under heating can be expected to have an effect of lowering the binding energy of the large-sized work or the strip-shaped work and promoting the division.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments in which the method of dividing a work according to the present invention is applied to division of a glass plate for electronic parts will be described below with reference to FIGS.

1A, 1B and 1C are schematic perspective sectional views showing a method of dividing a work according to the first embodiment of the present invention. In FIG. 1 (a), 10 is a large-sized glass in which surface crack lines 11 and 12 are formed in the X direction and the Y direction as starting points for cutting along the planned dividing line. Heating is performed by the heating plate 20 with one surface on which the lines 11 and 12 are formed facing upward. As shown in FIG. 1 (b), one surface of the large-sized glass 10 having the other surface heated on the heating plate 20 is a liquid, for example, water sprayed on the lower surface which is the pressing surface to the large-sized glass 10. The cooling plate 30 having the layer 40 attached thereto is brought into contact with the cooling plate 30 to keep the curved deformation in the plate thickness direction restrained.

Then, the side surface (other surface) of the heating plate 20 of the large-sized glass 10 expands at a high temperature, while the cooling plate 30
The side surface (one surface) is cooled by the contact of the cooling plate 30 and contracts, and the large-sized glass 10 tends to be curved and deformed into a convex shape on the heating plate 20 side and a concave shape on the cooling plate 30 side. However,
The large glass 10 is kept in a state in which the curved deformation in the plate thickness direction is restrained by the contact of the cooling plate 30, so that the curved deformation is prevented. Therefore, tensile stress is generated on the cooling plate 30 side of the large-sized glass 10. On the large-sized glass 10, the surface crack line 11, which is the starting line for cutting,
12 are formed, the surface crack lines 11, 1
As a result of a tensile stress that spreads 2 in a direction orthogonal to each other, the large-sized glass 10 is simultaneously divided in the X direction and the Y direction with the surface crack lines 11 and 12 as the origin, and
As shown in (c), a large number of small glass plates 1 are obtained. In addition, in FIG.1 (c), only some small glass plates 1 are shown.

Here, as described above, when the water layer 40 is attached to the lower surface of the cooling plate 30, when the cooling plate 30 is brought into contact with the heated large-sized glass 10, the water is evaporated. A cooling promotion effect due to latent heat, a kind of wedge effect due to rapid expansion of water in the surface crack lines 11 and 12 formed on the large-sized glass 10, a cooling plate 30 and a large-sized glass 1
The large-sized glass 10 can be more easily divided by the total effect such as the effect of water as a lubricant interposed between the large-sized glass 10 and 0.

2A, 2B and 2C show a second embodiment of the present invention.
The schematic perspective sectional view of the method of dividing a work according to the embodiment is shown. In FIG. 2 (a), 10 is a large-sized glass in which surface crack lines 11 and 12 are formed in the X direction and the Y direction as cutting start lines along the planned dividing line as described above. With one surface on which the surface crack lines 11 and 12 are formed facing upward, a liquid is placed on the cooling plate 30,
For example, it is held by the adhesion force due to the surface tension of the water layer 40. Below that, the heating plate 2
0 is heated to a predetermined temperature. From this state, the lower surface (other surface) of the large-sized glass 10 held by the cooling plate 30 is brought into contact with the heating plate 20 heated to a predetermined temperature to keep the curved deformation of the large-sized glass 10 restrained. .

Then, the side surface (one surface) of the cooling plate 30 of the large-sized glass 10 is cooled by the cooling plate 30, while the side surface (other surface) of the heating plate 20 is heated to cause a temperature difference. Due to the temperature difference, 10 tends to be curved and deformed into a convex shape on the heating plate 20 side and a concave shape on the cooling plate 30 side. However, the large-sized glass 10 has the cooling plate 3
Since the bending deformation is restrained by the contact of 0, the bending deformation is prevented. Therefore, tensile stress is generated on the cooling plate 30 side of the large-sized glass 10. On the large-sized glass 10, the surface crack line 11, which is the starting line for cutting,
12 are formed, the surface crack lines 11, 1
The tensile stress that spreads in the direction orthogonal to 2 acts, and the large-sized glass 10 is simultaneously divided in the X direction and the Y direction by using the surface crack lines 11 and 12 as the origins.
As shown in (c), a large number of small glass plates 1 are obtained. In addition, in FIG.2 (c), only a part of small glass plate 1 is shown.

Here, as described above, the large glass 10
When the water layer 40 and the cooling plate 30 are held by the adhesion force due to the surface tension of the water layer 40, the cooling promotion effect by the water layer 40 and the rapid expansion of the water in the surface crack lines 11 and 12 are achieved. Easy to use due to the overall effect such as the effect of wedges that promotes division and the effect of water as a lubricant, and
Can be divided into clean cut surfaces.

In both the first and second embodiments, the surface crack line 1 is formed in the X and Y directions of the large glass 10.
Although the case where 1 and 12 are formed and the X direction and the Y direction are divided at the same time has been described, the following dividing method can also be adopted.

FIGS. 3 (a) and 3 (b) are schematic explanatory views of the former step in the work dividing method according to the third embodiment of the present invention. In FIG. 3 (a), 10 ′ is a large-sized glass in which a surface crack line 11 (or 12) which is a starting point of cutting is formed along the X direction (or the Y direction) of the planned dividing line. 'The surface crack line 11
(Or 12) is cut by a dicer or laser irradiation along the direction 13 orthogonal to (or 12), and as shown in FIG. 3 (b), the surface crack line 11 (or 1
The strip-shaped work on which 2) is formed, that is, the strip-shaped glass 14 is obtained.

Next, this strip-shaped glass 14 is shown in FIG.
As shown in the schematic perspective sectional view of (a), one surface on which the surface crack line 11 (or 12) is formed is an upper side,
Heat on the heating plate 50. On the other hand, above the heating plate 50, a cooling plate 60 having a liquid, for example, water layer 70 attached to the lower surface which is the contact surface is arranged. Then, as shown in FIG. 4B, a water layer 70 is attached to the lower surface, which is the aforementioned contact surface, with respect to one surface of the strip-shaped glass 14 heated on the heating plate 50. Abut the cooling plate 60,
The state in which the bending deformation in the plate thickness direction is restrained is maintained.

Then, the side surface (other surface) of the heating plate 50 of the strip-shaped glass 14 is at a high temperature, while the side surface (one surface) of the cooling plate 60 is cooled by the contact of the cooling plate 60, resulting in a temperature difference. The strip glass 14 tends to be curved and deformed into a convex shape on the heating plate 50 side (other surface) and a concave shape on the cooling plate 60 side (one surface). However, the strip glass 14 has a cooling plate 60.
The curved deformation is prevented because the curved deformation in the plate thickness direction is restrained by the abutment of. for that reason,
Tensile stress is generated on the cooling plate 60 side (one surface) of the strip glass 14. Since the surface crack line 11 (or 12) is formed in the width direction of the strip glass 14 in advance, a tensile stress that spreads in a direction orthogonal to the surface crack line 11 (or 12) acts to cause the surface crack line 11 (or 12). Line 11 (or 1
The strip-shaped glass 14 is divided in the Y direction (or the X direction) using 2) as an origin to obtain a row of small glass plates 1 as shown in FIG. 4C.

Here, as described above, when the water layer 70 is attached to the lower surface of the cooling plate 60, when the cooling plate 60 is brought into contact with the heated strip-shaped glass 14, the water is evaporated. Between the cooling plate 60 and the strip-shaped glass 14, the effect of cooling promotion by latent heat, a kind of wedge effect caused by the rapid expansion of water in the surface crack line 11 (or 11) formed in the strip-shaped glass 14, The strip glass 14 can be more easily divided by the total effect such as the effect of the interposed water as a lubricant.

5 (a) and 5 (b) are schematic perspective sectional views of the former step in the work dividing method according to the fourth embodiment of the present invention. Similar to FIGS. 3A to 3C,
After dividing the large glass 10 'into strip glass 14,
As shown in FIG. 5A, one surface of the strip glass 14 on which the surface crack lines 11 (or 12) are formed is cooled plate 60.
A liquid, for example, a layer of water 70 is held on the lower surface of the substrate by the adhesive force. On the other hand, the heating plate 50 is heated below it to a predetermined temperature. From this state, the other surface of the strip-shaped glass 14 held by the cooling plate 60 is brought into contact with the heating plate 50 heated to a predetermined temperature to maintain the state in which the curved deformation of the strip-shaped glass 14 is restrained.

Then, the side surface (one surface) of the cooling plate 60 of the strip-shaped glass 14 is cooled by the cooling plate 60, while the side surface (other surface) of the heating plate 50 is heated to cause a temperature difference. The glass sheet 14 tends to be curved and deformed into a convex shape on the heating plate 50 side (other surface) and a concave shape on the cooling plate 60 side (one surface). However, the strip glass 14 is used for the cooling plate 6
Since the contact of 0 maintains the state in which the bending deformation in the plate thickness direction is restrained, the bending deformation is prevented. Therefore, tensile stress is generated on the cooling plate 60 side (one surface) of the strip glass 14. Since the surface crack line 11 (or 12) is formed in advance in the width direction of the strip glass 14,
Tensile stress spreading in a direction orthogonal to the surface crack line 11 (or 12) acts, and the surface crack line 11 (or 12) acts.
(Or 12) as the origin, the strip glass 14 is divided in the Y direction (or the X direction) to obtain the row of small glass plates 1 as shown in FIG. 5C.

Here, as described above, the strip glass 1
4 and the cooling plate 60 are held by the adhesive force due to the surface tension of the water layer 70 with the water layer 70 interposed therebetween, the cooling promotion effect by the latent heat of water evaporation and the surface crack line 1 of the strip glass 14
Due to the overall effect such as the effect of promoting the division due to the wedge action due to the rapid expansion of the water in 1 (or 12) and the effect of the water as a lubricant, the division can be performed more easily.

[Experimental Example] Next, an experimental example for examining the effect of the work dividing method of the present invention will be described. this is,
Since a subtle difference was recognized in the division surface of the small piece glass plate 1 between the above-described first and second embodiments, and between the third and fourth embodiments, the cause of the difference is explained. This was carried out for confirmation, and for the experiment, one in which a surface crack line 11 extending in the width direction was formed at an intermediate position in the length direction of a rectangular glass plate 15 as shown in FIG. I was there. [Experimental Example 1] This experimental example 1 corresponds to the embodiment shown in FIG. 1 and was carried out under the following conditions.

Glass plate 15 Material: Borosilicate glass Physical properties Thermal conductivity: 1.10 w / mK Linear expansion coefficient: 66 × 10 ⁻⁷ / K Specific heat: 0.73 kJ / kgK Density: 2,440 kg / m ³ Size : 30 mm x 15 mm x 0.7 mm Surface crack line depth dimension: about 170 μm Heating plate 20 Material: Aluminum Size: 250 mm x 150 mm Set temperature: 150 ° C to 320 ° C (actual temperature ≒ set temperature x
0.95) Cooling plate 30 Material: Aluminum Size: 60 mm × 60 mm × 2 mm Under the above conditions, the glass plate 15 is heated as shown in FIG. 1 so that one surface on which the surface crack line 11 is formed faces upward. 20 is set on the glass plate 15 and heated to a predetermined temperature by the heating plate 20, and then the cooling plate 30 having the water layer 40 formed by wetting the lower surface, which is the contact surface, with a mist spray is brought into contact with one surface of the glass plate 15. Then, one side of the glass plate 15 was rapidly cooled. Then, the other surface of the glass plate 15 is at a high temperature and the other surface is at a low temperature to cause a temperature difference, and the glass plate 15 tries to be curved and deformed so as to be convex downward. As a result of being kept in a state in which the bending deformation is restrained, the glass plate 1
A large tensile stress was generated in the surface crack line 11 of No. 5, the crack propagated in the thickness direction of the surface crack line 11, and the glass plate 15 was divided into two small glass plates.

Table 1 shows the division result. The ◯ mark in Table 1 indicates that the small glass plate divided from the glass plate 15 is a “good” state in which there are no cracks in the direction orthogonal to the dividing plane, and the X mark indicates that the glass is not divisible or glass. A small glass plate divided from the plate 15 has a cracked state in a direction orthogonal to the division plane in a divided state of "poor". The dividing surface at this time is 100 μm.
There is a swell of about m.

[0048]

[Table 1]

From the results shown in Table 1, good division is possible when the heating temperature of the heating plate 20 is in the range of 210 ° C to 270 ° C.
If it exceeds 280 ° C., cracks (lateral cracks) in the direction perpendicular to the dividing direction are recognized, and the dividing state is poor. [Experimental Example 2] This Experimental Example 2 corresponds to the embodiment shown in FIG. 2 and was carried out under the following conditions.

Using the same glass plate 15 and cooling plate 30 as in Experimental Example 1, the heating temperature of the heating plate 20 was 200 ° C.
The glass plate 15 is heated to ˜400 ° C., on the other hand, the lower surface of the cooling plate 30 which is wetted with a mist to form a water layer 40.
Was held by the adhesive force due to the surface tension of the water layer 40 so that the surface on which the surface crack line 11 was formed faces upward. The glass plate 15 held by the cooling plate 30 was lowered together with the cooling plate 30 to the heating plate 20 heated to a predetermined temperature, and the other surface of the glass plate 15 was brought into contact with the heating plate 20. Then, one surface of the glass plate 15 has a low temperature and the other surface has a high temperature, which causes a temperature difference, and the glass plate 15 tries to be curved and deformed so that the other surface is convex and one surface is concave. As a result of maintaining the state in which the glass plate 15 is restrained, a large tensile stress that spreads only in the direction orthogonal to the surface crack line 11 of the glass plate 15 is generated, and the crack propagates in the thickness direction of the surface crack line 11, Fifteen were divided into pieces of glass. The results are shown in Table 2. In Table 2, the meanings of O and X are the same as those in the first embodiment.

[0051]

[Table 2]

From Table 2 above, from 220 ° C. to heating plate 20
It was possible to divide in a good state up to the limit temperature of 400 ° C. without lateral cracking in the direction orthogonal to the dividing surface. On the split surfaces at 220 ° C. and 240 ° C., as in Example 1, a pattern was observed in which cracks propagating in the thickness direction stopped or merged. However, at 260 ° C. or higher, the divided surface became considerably smooth, no unevenness was observed, and the variation was suppressed to about 30 μm. [Comparative Example] As a comparative example, a glass plate 15 similar to that shown in Experimental Example 1 was manually divided. In the case of this manual folding, unevenness is generated in the entire area in the vicinity of the back surface, and it is highly possible that glass scraps due to division are generated due to the rubbing of the unevenness. [Discussion] From Experimental Example 1 and Experimental Example 2 described above, Experimental Example 1
2 and Experimental Example 2 show a difference in the state of the split surface, and in Experimental Example 1, the split surface is disturbed due to the merging and branching of the cracks, but in Experimental Example 2, the splitting is due to the merging and branching of the cracks. Almost no surface irregularities are observed. The cause of such a difference is considered to be the difference in the temporal change of the stress acting on the surface crack.

That is, the thickness t of the glass plate 15 (=
2h) and the heating time (4κt /
Fig. 7 (a) shows the relationship between h ² ) and the stress field generated in the glass plate.
Shown in (b) and (c). Fig. 7 (a) shows heating time 4 κt / h
² = 0.01, and FIG. 7 (b) shows a heating time of 4κ.
t / h ² = 0.1, FIG. 7C shows a heating time of 4κt / h ² = 1 and FIGS. 7A and 7B.
FIG. 7B and FIG. 7C show the states when the heating time is long.

In the case of Experimental Example 1 in which one surface of the glass plate 15 on which the surface crack line 11 is formed is cooled, a large tensile stress is generated on the one surface side having the surface crack line 11 at the start of cooling. Therefore, since the surface crack starts to propagate at the moment when the cooling plate 30 contacts the glass plate 15,
If the cooling plate 30 does not contact the entire surface of the glass plate 15 at the same time, cracks will propagate from a plurality of locations. Further, it is considered that since the tensile stress rises sharply, excessive strain energy is generated and crack bifurcation occurs.

On the other hand, the surface crack line 11 of the glass plate 15
In Experimental Example 2 in which the other surface where the cracks are not formed is heated, tensile stress gradually occurs on the one surface side having the surface crack line 11 with the passage of time, and the crack progresses smoothly while satisfying the condition of crack growth. Therefore, the results of Experimental Examples 1 and 2 described above in which the divided surface is considered to be relatively smooth are
It corresponds well to the difference between the embodiment and the second embodiment and the difference between the third embodiment and the fourth embodiment, and the same reasoning can be made when the surface crack lines are formed in the X direction and the Y direction. It turns out that it holds.

Although the above embodiment has been described with respect to a particular one, the present invention is not limited to this embodiment and various modifications can be made.

For example, each of the above embodiments has described the dividing method for manufacturing the glass plate for electronic parts as the small piece work. However, the glass plate for the light emitting element or the light receiving element, the glass plate for the infrared sensor, or the ultraviolet erasable semiconductor is used. Equipment (EPRO
M) glass plates and other various glass plates, as well as when manufacturing small pieces from large-sized workpieces made of various brittle materials such as ceramic plates and semiconductor wafers, or once producing strip-shaped workpieces from large-sized workpieces, It can also be adopted for division of various works such as when manufacturing a small piece work from the strip work.

Further, the shape of the small piece work obtained by the division can be similarly used in the case of a shape such as a rectangle other than the square shown in the embodiment.

[0059]

The method for dividing a work according to the present invention is a method for dividing a large-sized work made of a brittle material into a large number of small-piece works, and a starting point line for cutting is formed on one surface of the large-size work along the dividing line. Introducing step and by applying a temperature difference so that the large-size workpiece is restrained from bending deformation in the plate thickness direction, and one surface provided with a cutting origin line of the large-size workpiece has a low temperature and the other surface has a high temperature. And a step of dividing the cutting start line into a plurality of small pieces, so that the large-sized work tends to be curved and deformed due to the temperature difference between the two surfaces, but the large-sized work is bent in the plate thickness direction. As a result of restraining the bending deformation by restraining the deformation, tensile stress acts in the direction orthogonal to the cutting starting line formed on the surface of the large-sized workpiece, and the cutting starts from the cutting starting line in the thickness direction. It can be divided into small pieces work on the line.

In particular, if the cutting starting line is formed in the X direction and the Y direction, it is possible to divide in the X direction and the Y direction at the same time, so that the dividing process can be remarkably speeded up.
Productivity is significantly improved.

Further, a starting point line for cutting is formed in the X direction (or Y direction) of a large-sized work and divided in a direction orthogonal to the starting point line for cutting to obtain a strip-shaped work. It is also possible to divide into small pieces by giving a temperature difference on both sides. Compared to the case of dividing into small pieces at the same time in the X direction and Y direction at the same time, there is less cracking in the direction orthogonal to the division surface, and the good rate of small pieces Can be improved.

[Brief description of drawings]

FIG. 1A is a schematic perspective sectional view of a state before a temperature difference is applied in the work dividing method according to the first embodiment of the present invention, and FIG. 1B is a temperature difference and a bending in a plate pressure direction. Schematic perspective sectional view keeping the deformation restrained, (c)
FIG. 4 is a partial plan view of the work after division.

FIG. 2 (a) is a schematic perspective sectional view of a state before a temperature difference is applied in the work dividing method according to the second embodiment of the present invention, and FIG. 2 (b) is a temperature difference and is curved in the plate pressure direction. Schematic perspective sectional view keeping the deformation restrained, (c)
FIG. 4 is a partial plan view of the work after division.

FIG. 3A is a plan view of a process of obtaining a strip-shaped work from a large-format work in the work dividing method according to the third embodiment of the present invention, and FIG. 3B is a plan view of a strip-shaped work obtained from the large-format work. Is.

FIG. 4A is a schematic perspective sectional view showing a state before a temperature difference is applied in the strip-shaped work dividing method according to the third embodiment of the present invention, and FIG. 4B is a temperature difference-imparting plate pressure direction. Schematic perspective cross-sectional view keeping the curved deformation of the
(C) is a top view of the small piece work obtained from the strip-shaped work.

FIG. 5 (a) is a schematic perspective sectional view of a state before a temperature difference is applied in the strip-shaped work dividing method according to the fourth embodiment of the present invention, and FIG. 5 (b) is a temperature difference and a plate pressure direction. Schematic perspective cross-sectional view keeping the curved deformation of the
(C) is a top view of the small piece work obtained from the strip-shaped work.

FIG. 6 is a perspective view of a glass plate used for an effect confirmation experiment of the present invention.

7A is a diagram of a stress field in a plate pressure direction in a heating time of 4 κt / h ² = 0.01 in Experimental Example 1 and Experimental Example 2 of the present invention, and FIG. 7B is an experimental example of the present invention. 1 and Experimental Example 2 are diagrams of stress fields in the plate pressure direction in the state of heating time 4κt / h ² = 0.1, (c) is heating time 4κt / h ² = in Experimental Example 1 and Experimental Example 2 of the present invention. 1
FIG. 7 is a diagram of a stress field in the plate pressure direction in the state of FIG.

FIG. 8 is a perspective view of a glass plate for electronic parts.

9A is a perspective view of large-sized glass for explaining a method for manufacturing the glass plate for electronic parts of FIG. 8, and FIG. 9B is a large-sized glass in which surface crack lines are formed along the planned dividing line of FIG. It is a front view of glass.

FIG. 10 (a) is an enlarged view of a main part for explaining the conventional method of manufacturing the glass plate for electronic parts of FIG. 8 by dividing it into a small piece glass plate from a large-sized glass plate having surface crack lines along the dividing lines. Sectional view, (b) is an enlarged cross-sectional view of an essential part for explaining the first conventional method, (c) is an enlarged cross-sectional view of an essential part for the second conventional method, (d) is an explanation of the third conventional method FIG.

[Explanation of symbols]

1 small piece work (small piece glass plate) 10,10 'large format work (large format glass) 11, 12 Cutting start line (surface crack line) 14 Strip work (Strip glass) 15 Glass plate used for effect confirmation experiment 20,50 heating plate 30,60 Cooling plate 40,70 Liquid layer (water layer)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Daisuke Okawa             2-7-1, Harashira, Otsu City, Shiga Prefecture             Air Glass Co., Ltd. (72) Inventor Hiroshi Sawada             85 Nawatesaki, Minamiyamada Town, Kusatsu City, Shiga Prefecture             NUC machinery Co., Ltd. F-term (reference) 4G015 FA06 FB02 FC01

Claims (8)

[Claims] 1. A method for dividing a large-sized work made of a brittle material into a large number of small-piece works, the method comprising the step of introducing a cutting starting line along a predetermined dividing line on one surface of the large-size work, and the large-sized work. A plurality of small pieces are cut from the cutting starting line by giving a temperature difference such that one surface provided with the cutting starting line of the large-sized work has a low temperature and the other surface has a high temperature while restraining the bending deformation in the plate thickness direction. A method of dividing a work, the method comprising: dividing the work. 2. The method of dividing a work according to claim 1, wherein a surface crack line is provided as the cutting start line. 3. A strip-shaped work is obtained by cutting the large-sized work in a direction orthogonal to a cutting start line provided on one surface, and the strip-shaped work is restrained from bending deformation in the plate thickness direction, The strip-shaped workpiece is divided into a plurality of small-piece workpieces by providing a temperature difference such that one surface provided with a cutting starting line has a low temperature and the other surface has a high temperature, and the cutting starting line provides a plurality of small pieces. The method of dividing the work described in 2. 4. A large-sized work or strip-shaped work is brought into contact with a cooling plate on one surface provided with a cutting start line of the large-size work or strip-shaped work and a heating plate on the other surface of the large-size work or strip-shaped work so that the large-size work or the strip-shaped work is cut in the plate thickness direction. The method for dividing a work according to any one of claims 1 to 3, wherein the bending deformation is restrained and a temperature difference is applied. 5. A large-sized work or a strip-shaped work is placed by bringing the other surface into contact with the heating plate, and then a cooling plate is brought into contact with one surface of the large-sized work or the strip-shaped work provided with a cutting start line. The method for dividing a work according to claim 4, wherein the work is divided. 6. The method of dividing a work according to claim 5, wherein a layer of liquid is attached in advance to the surface of the cooling plate that comes into contact with the large-sized work or the strip-shaped work. 7. The cooling plate is held by abutting and holding one surface of the large-sized work or the strip-shaped work provided with a cutting start line, and the other surface of the large-sized work is abutted on the heating plate. Item 4. The method of dividing a work according to item 4. 8. The method of dividing a work according to claim 7, wherein the large-sized work or the strip-shaped work is held on the cooling plate by the adhesive force of the liquid layer.