JP2003222761A - Optical transmitting / receiving module and method of manufacturing the same - Google Patents

Abstract

(57) Abstract: A light emitting element and a light receiving element are easily mounted on a single flat substrate, and the light emitting element and the light receiving element are optically coupled to the optical fiber without using a lens. SOLUTION: A light emitting element 22 and a light receiving element 23 are arranged on the same substrate 21, an optical fiber 24 is arranged on the upper surface of the light emitting element and the light receiving element, and the light emitted from the light emitting element is totally reflected by the optical fiber. A reflection mirror 25 serving as a first optical system for entering the optical fiber and a half mirror 26 serving as a second optical system for allowing light incident from the optical fiber to enter the light receiving element are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical transceiver module capable of transmitting and receiving an optical signal by connecting to an optical fiber transmission line and a method of manufacturing the same.

[0002]

2. Description of the Related Art Generally, in an optical transmission system, when bidirectional transmission is performed using one optical fiber, an optical signal from a surface emitting element for transmission is guided to the optical fiber,
In order to guide an optical signal from the optical fiber to the light receiving element for reception, the surface emitting element and the light receiving element are optically coupled to the optical fiber. Various methods have been devised as the connecting method.

As an example thereof, in the past, Japanese Patent Laid-Open No. 10-1
There is an optical transceiver module disclosed in Japanese Patent No. 15732. This conventional example will be described with reference to FIG.
FIG. 21 is a cross-sectional view showing the configuration of an optical transceiver module in a conventional optical signal transmission system.

As shown in FIG. 21, a conventional optical transceiver module has a silicon substrate 1 in which a recess having a 45 ° slope (hereinafter referred to as a micromirror) 1a is formed at the center of the axis.
And a semiconductor laser (hereinafter, referred to as an LD) 2 which is disposed on the bottom surface of the recess and emits light toward the micromirror 1a.
A PIN photodiode (hereinafter referred to as PD) 3 arranged on the upper surface of the silicon substrate 1, a package 4 in which the silicon substrate 1 is fixed, a transparent protective glass 5 covering the upper surface of the package 4, and a half mirror. 6 and a reflection mirror 7, and a quadrilateral prism 8 fixed on the protective glass 5 through a transparent position fixing member, and reflected light from the quadrilateral prism 8 and incident light to the quadrilateral prism 8. A lens 9 for condensing light and a case cover 10 that is joined to the package 4 to cover the quadrilateral prism 8 and the lens 9.
A transparent joint plate 11 for closing the opening surface of the case cover 10, a precision capillary 13 in which an optical fiber 12 is inserted and fixed in a thin tube, an adjustment ring 14 for fixing the precision capillary 13, and an adjustment ring 14 And a transparent fixing plate 15 that closes the end surface of the. A glass plate 16 for protecting the reflection mirror 7 is arranged behind the reflection mirror 7.

In the optical transmission / reception module constructed as described above, the light output from the LD 2 is reflected by the micro mirror 1a inclined by 45 degrees and the traveling direction is changed upward. This light is reflected by the half mirror 6 of the quadrilateral prism 8 fixed to the protective glass 5, condensed by the lens 9, passes through the joining plate 11 and the fixing plate 15, and then is fed to the precision capillary 13.
It is incident on the optical fiber 12 fixed to.

On the other hand, the light output from the optical fiber 12 passes through the fixed plate 15 and the joining plate 11, is condensed by the lens 9, passes through the half mirror 6, is reflected by the reflection mirror 7, and enters the PD 3. To do.

[0007]

However, in the above-mentioned conventional optical transmitter / receiver module, the silicon substrate 1 on which the respective elements are mounted is required to have a highly precise shape, and in order to perform optical coupling with high precision, a lens is used. Since there are a plurality of optical fine adjustment points using, for example, it is difficult to adjust, and when mounting a plurality of transmission / reception ports, integration and miniaturization are difficult.

The present invention solves the above-mentioned problems of the prior art by easily mounting a light emitting element and a light receiving element on a flat substrate, and without using a lens, the light emitting element and the light receiving element and the optical fiber. It is an object of the present invention to provide an optical transmission / reception module which can be optically coupled to each other and can be easily integrated and miniaturized.

Another object of the present invention is to provide a method of manufacturing an optical transceiver module which can be assembled by simple adjustment.

[0010]

In order to achieve the above object, the invention according to claim 1 guides light emitted from a light emitting element to an optical fiber, while receiving light from the optical fiber by a light receiving element. In the optical transceiver module, the light emitting element and the light receiving element are arranged on the same substrate with the light emitting surface of the light emitting element and the light incident surface of the light receiving element facing up, and the light is emitted on the upper surface of the light emitting element and the light receiving element. A first optical system in which a fiber is arranged, and the light emitted from the light emitting element is totally reflected by the optical fiber and is incident on the optical fiber;
It is characterized in that a second optical system for making the light incident from the optical fiber incident on the light receiving element is provided.

With the above structure, by disposing the light emitting element and the light receiving element on the same substrate, the light emitting element and the light receiving element can be easily mounted on one substrate, and the light emitting element and the light receiving element are Without using a lens
Since it is directly coupled to the optical fiber provided with the first and second optical systems, the number of parts can be reduced.

According to a second aspect of the present invention, in the optical transceiver module according to the first aspect, the light emitting element and the light receiving element are arranged in the order of the light receiving element and the light emitting element in a light transmitting direction, Arranged so that the light incident from the optical fiber is totally reflected by the first optical system and is incident on the light receiving element, while the light emitted from the light emitting element is incident on the optical fiber by the second optical system. It is characterized by having done.

With the above structure, since the light emitted from the light emitting element does not pass through the filter, the loss of the light emitted from the light emitting element due to the filter can be reduced.

The invention according to claim 3 is the invention according to claim 1 or 2.
The optical transmitter / receiver module according to the aspect 1, wherein the light emitting element and the light receiving element have the same thickness.

With the above structure, since the light emitting element and the light receiving element have the same thickness, the distance between the light emitting surface of the light emitting element and the light receiving surface of the light receiving element and the optical fiber is minimized to couple the optical fiber with the optical fiber. The rate can be increased.

The invention according to claim 4 is the invention according to claim 1 or 2.
The optical transmission / reception module according to claim 2, wherein the first optical system is a reflection mirror that totally reflects on a light incident surface,
The optical system is a half mirror that reflects half of the light and transmits the other half of the light.

With the above structure, the first optical system is a reflecting mirror that totally reflects the light incident surface, and the second optical system is a half mirror that reflects half of the light and transmits the remaining half of the light. It can be applied to a transceiver module for time-division communication at the same wavelength.

According to a fifth aspect of the present invention, in the optical transceiver module according to the first aspect, the first optical system is
It is characterized in that the optical fiber is formed into an obliquely polished surface which is cut at a predetermined angle and whose surface is polished.

With the above construction, since the first optical system is an obliquely polished surface in which the optical fiber is cut at a predetermined angle and the surface is polished, the number of parts can be reduced and the processing operation can be simplified. .

The invention according to claim 6 is the invention according to claim 1 or 2.
In the optical transmitter / receiver module according to the item (1), the second optical system is a first wavelength filter, and the first wavelength filter outputs only one of transmission and reception wavelengths when the transmission wavelength and the reception wavelength are different from each other. It is characterized by transmitting and totally reflecting the other wavelength.

With the above structure, the second optical system is the first wavelength filter, and the first wavelength filter transmits only one of the transmission wavelength and the transmission wavelength that is different from the reception wavelength, and the other wavelength. By total reflection of the wavelength of, the loss of the emitted light of the light emitting element and the incident light of the light receiving element can be reduced, and the transmission wavelength and the reception wavelength are different, and the transmission speed is approximately doubled by transmitting and receiving at the same time. It can be applied to a transceiver module for wavelength division multiplexing.

According to a seventh aspect of the present invention, in the optical transceiver module according to the sixth aspect, a second wavelength filter for transmitting only a reception wavelength is provided between the light incident surface of the light receiving element and the optical fiber. It is characterized by being inserted.

With the above structure, by inserting the second wavelength filter for transmitting only the reception wavelength between the light incident surface of the light receiving element and the optical fiber, the light emitted from the light emitting element leaks into the light emitting element. It can be blocked, and optical crosstalk can be improved.

According to an eighth aspect of the present invention, in the optical transceiver module according to the seventh aspect, the thickness of the surface emitting element and the thickness when the light receiving element and the second wavelength filter are overlapped are It is characterized by being the same.

With the above structure, the coupling ratio with the optical fiber can be increased by minimizing the distance between the light emitting surface of the light emitting element and the light receiving surface of the light receiving element and the optical fiber.

According to a ninth aspect of the present invention, in the optical transceiver module according to the seventh aspect, a surface other than the light incident surface of the light receiving element and a side surface of the second wavelength filter are covered with a light-shielding material. The optical transceiver module according to claim 7, wherein:

With the above structure, it is possible to prevent the light emitted from the light emitting surface of the light emitting element from leaking from the surface other than the light incident surface of the light receiving element and the side surface of the second wavelength filter, and the optical cross is performed. Talk can be improved.

According to a tenth aspect of the present invention, in the optical transceiver module according to the seventh aspect, the light receiving element is flip-chip mounted, and the sealing material used for this mounting is a material having a light shielding property. And

With the above structure, the sealing material can block the emission light of the light emitting element from leaking from the surface other than the light incident surface of the light receiving element, and realize the sealing and the light shielding with one material. It will be possible.

The invention described in claim 11 is the optical transceiver module according to claim 9 or 10, wherein the encapsulant covers a surface other than the light incident surface of the light receiving element and a side surface of the second wavelength filter. It is characterized by covering.

With the above structure, it is possible to prevent the light emitted from the light emitting element from leaking from the side surface of the second wavelength filter, and to improve the optical crosstalk.

According to a twelfth aspect of the present invention, in the optical transmission / reception module according to the first or second aspect, the light emitting element is an array light emitting element, and the light receiving element is an array light receiving element. An array of light emitting elements and light receiving elements are arranged on the same substrate, the optical fiber is an array fiber, and the optical transmission direction of each optical fiber in the array fiber is an array of light emitting element and light receiving element. Each optical fiber is orthogonal to the array direction, and each optical fiber is arranged on the upper surface of the corresponding light emitting element and light receiving element, and the first and second optical systems can input and output all fibers of the arrayed fiber. It is a common optical system.

With the above structure, the light emitting element, the light receiving element, and the optical fiber are arrayed and integrated, so that the size can be reduced and the number of parts can be reduced.

According to a thirteenth aspect of the present invention, in the optical transmission / reception module according to the first aspect, the light is emitted from the light emitting element into the optical fiber between the first optical system and the second optical system. A third optical system for emitting a part of the emitted light to the substrate side is arranged, and an output light monitor light receiving element for receiving the light and controlling the output light level from the light emitting element is provided as the light emitting element and the light emitting element. It is characterized in that it is arranged on the same substrate as the light receiving element.

With the above structure, the light receiving element for output monitoring can be easily mounted on one flat substrate similarly to the light emitting element and the light receiving element, and the light emitting element and the light receiving element do not use a lens or the like. Since it is directly coupled to the optical fiber provided with the optical system, the number of parts can be reduced.

According to a fourteenth aspect of the present invention, in the optical transceiver module according to the thirteenth aspect, the third optical system is a beam splitter that reflects a part of light and transmits the remaining light. It is characterized by

With the above structure, since the third optical system is the beam splitter, the output light monitoring light receiving element can be coupled to the optical fiber with a simple structure.

According to a fifteenth aspect of the present invention, in the optical transceiver module according to the thirteenth aspect, the first optical system is an obliquely polished surface, and part of the light emitted from the light emitting element is the output light. The angle of the polishing surface including a part of the core portion of the optical fiber with respect to the emission angle of the light emitting element so as to be incident on the light receiving element for monitoring is formed larger than the remaining surface.

With the above arrangement, a part of the output light of the light emitting element can be made incident on the output light monitoring light receiving element without mounting the third optical system.

According to a sixteenth aspect of the present invention, in the optical transceiver module according to the thirteenth aspect, the first optical system is an obliquely polished surface, and among the light emitted from the light emitting element,
The polishing surface of a part of the clad part of the optical fiber is such that the light incident on the clad part of the optical fiber is incident on the output light monitoring light-receiving element, and the angle with respect to the emission angle of the light-emitting element is the remaining surface. It is characterized in that it is formed larger.

With the above-described structure, by using the light that has not been coupled to the core portion of the light emitted from the light emitting element for monitoring the output light, it is possible to reduce the loss of the transmitted light.

According to a seventeenth aspect of the present invention, in the optical transmitter-receiver module according to the thirteenth aspect, the second optical system is a third wavelength filter that transmits the reception wavelength and totally reflects the transmission wavelength. The third optical system is a fourth wavelength filter that transmits the reception wavelength, reflects a part of the transmission wavelength, and transmits the remaining wavelength, and the third optical system is the second optical system. The light receiving element, the light emitting element, and the output light monitoring light receiving element are arranged in this order on the substrate in the transmission direction.

With the above structure, the light emitted from the light emitting element does not pass through the filter for coupling the light receiving element for reception, so that the loss of the light emitted from the light emitting element can be reduced.

The invention described in Item 18 is the optical transmission / reception module according to Item 13, wherein the second optical system is a first wavelength filter that transmits the transmission wavelength and totally reflects the reception wavelength. The third optical system is a fourth wavelength filter that transmits the reception wavelength, reflects a part of the transmission wavelength, and transmits the remaining wavelength, and the third optical system is the second optical system. And the light emitting element, the receiving light receiving element, and the output light monitoring light receiving element in this order on the substrate in the transmission direction.

With the above arrangement, the output including the filter characteristic of the second optical system can be monitored.

According to a nineteenth aspect of the present invention, in the optical transceiver module according to the seventeenth or eighteenth aspect, the fourth aspect
In the wavelength filter of, the transmission wavelength matches the wavelength corresponding to a certain constant transmittance in the wavelength range in which the transmittance with respect to the wavelength changes, the reception wavelength is completely transmitted, and only the transmission wavelength is fixed. It is characterized by transmitting at a transmittance.

With the above structure, the functions of the wavelength selection filter and the beam splitter such that the reception wavelength is totally transmitted, the transmission wavelength is partially reflected, and the remaining wavelength is transmitted can be realized by one filter.

According to a twentieth aspect of the present invention, in the optical transceiver module according to any one of the thirteenth to eighteenth aspects, the light emitting element is an array light emitting element, and the light receiving element and the output are provided. The light receiving element for monitoring is an array light receiving element, and these are arranged on the same substrate.
The optical fiber is an array fiber, the optical transmission direction of each optical fiber in the array fiber is orthogonal to the array direction of each element of the array, and each optical fiber emits light corresponding to the array direction. An element, a light receiving element, and an output light monitoring light receiving element, the first,
The second and third optical systems are optical systems capable of entering and exiting all the fibers of the arrayed fiber.

With the above structure, the light emitting element, the light receiving element for reception, the light receiving element for output monitoring and the optical fiber are integrated so that the size can be reduced and the number of parts can be reduced.

According to a twenty-first aspect of the invention, there is provided a method of manufacturing an optical transceiver module, wherein light emitted from a light emitting element is guided to an optical fiber while light from the optical fiber is received by a light receiving element. When mounting the light emitting element and the light receiving element on the same substrate with the light emitting surface and the light incident surface of the light receiving element facing upward, and mounting an optical fiber on the upper surface of the light emitting element and the light receiving element, When the light transmission direction is the X-axis direction and the direction orthogonal to the X-axis on the substrate is the Y-axis direction, the light-emitting region of the light-emitting element and the center point of the light-receiving region of the light-receiving element are constant in the Y-axis direction. Markers are attached to the substrate at respective positions separated by a distance, light is incident from the transmission path side of the optical fiber, and the scattered light in the optical system inserted in the optical fiber is monitored, and this scattering is performed. After arranging so that the center of each of the markers is located on each of the markers, the optical fiber is moved in parallel in the Y-axis direction by the certain distance so that the optical system is positioned at the center points of the light emitting area and the light receiving area. It is characterized by implementing.

With the above structure, light is incident from the transmission path side, the scattered light is adjusted to the marker attached beforehand, and the optical fiber is moved in parallel.
Passive alignment that adjusts without sending and receiving is possible,
By using the scattered light of the light incident from the transmission line as a marker without directly attaching a marker to the optical system,
It is possible to assemble with simple adjustment. Therefore, the optical fiber can be easily mounted.

According to a twenty-second aspect of the present invention, in the method of manufacturing an optical transceiver module according to the twenty-first aspect, in addition to the light emitting element and the light receiving element mounted on the same substrate, When mounting an optical fiber on the top surface of the output monitor light receiving element that controls the output light level,
Arbitrary 2 out of 3 central points of the light emitting area of the light emitting element, the light receiving element and the light receiving area of the output monitoring light receiving element.
A marker is attached on the substrate at a position apart from a point or more by a certain distance in the Y-axis direction, and the center of the scattered light is arranged so as to be located on the marker, and then the optical fiber is translated. It is characterized by

With the above structure, the number of markers is two or more by making light incident from the transmission line side, aligning the scattered light with the markers attached in advance, and moving the optical fiber in parallel. The positioning of the mounting can be made clearer.

According to a twenty-third aspect of the present invention, in the method of manufacturing the optical transceiver module according to the twenty-first or twenty-second aspect, the optical fiber is moved in parallel after the scattered light is arranged on the marker. At this time, the light emitting element is caused to emit light, and the emitted light of the light emitting element is monitored from above the substrate, and the emitted light is totally reflected by the optical system inserted into the optical fiber, and the light is at a position where the light amount is reduced most. It is characterized by fixing the fiber.

With the above structure, after the optical fiber is arranged on the marker, the emitted light of the light emitting element is monitored and moved in parallel to the position where the light amount is reduced most, so that the distance of parallel movement can be accurately measured. Can be implemented.

According to a twenty-fourth aspect of the present invention, in the method of manufacturing an optical transceiver module according to the twenty-first aspect, the light emitting element is an array light emitting element, and the light receiving element is an array light receiving element. The array-shaped light emitting elements and the light receiving elements are arranged on the same substrate, the optical fibers are array fibers, and the array-shaped light emitting elements mounted on the same substrate so as to be arranged in the Y-axis direction, When the arrayed fibers are mounted on the upper surface of the arrayed light receiving element, a marker is attached on the substrate at a position apart from the center point of the light emitting area and the light receiving area of an arbitrary port in the Y-axis direction by a certain distance. , Incident light from the transmission line side of the arbitrary port of the arrayed fiber, and monitor the scattered light of the light in the optical system of the arbitrary port, and the center of this scattered light is the mar. After placement so as to be positioned on over,
The arrayed fibers are translated.

With the above structure, markers are attached to the light emitting elements of the array, the light emitting areas of the light receiving elements, and the positions at a certain distance in the Y axis direction from the center of the light receiving area, and the reference fiber is set in the Y axis direction from the markers. By parallel translation of a fixed distance, the mounting of the arrayed fibers can be adjusted at once.

According to a twenty-fifth aspect of the present invention, in the method for manufacturing an optical transceiver module according to the twenty-fourth aspect, in addition to the array of light emitting elements and light receiving elements mounted on the same substrate, the array of When the arrayed fiber is mounted on the upper surface of the array-shaped output monitor light-receiving element for controlling the output light level from the light-emitting element, any two of the three center points of the light-emitting area and the light-receiving area of any port From the above, a marker is attached on the substrate at a position moved a certain distance in the Y-axis direction, the scattered light of the light incident from the transmission path side of the arbitrary port is monitored, and the center of this scattered light is on the marker. And the arrayed fibers are moved in parallel.

With the above structure, the number of markers is two or more, so that the mounting positioning can be made clearer.

According to a twenty-sixth aspect of the present invention, in the method of manufacturing the optical transceiver module according to the twenty-first aspect, the array-shaped light emitting elements mounted on the same substrate so as to be arranged in the Y-axis direction, When the array-shaped fiber is mounted on the upper surface of the element and the light receiving element for output monitoring, a marker is attached on the substrate at a position moved in the X axis direction by a certain distance from the center point of the light emitting region of any two or more ports. Monitoring the scattered light of the light incident from the transmission path side of the arbitrary two or more ports, arranging so that the center of this scattered light is located on the marker, and then translating the light in parallel in the X-axis direction for a certain distance. Is characterized by.

With the above structure, the light emitting elements 31 in an array form.
A marker is attached at a position distant from the center of the light emitting region in the X-axis direction, and the position of the reference fiber is moved in the X-axis direction from the marker by a constant distance L ₁ to obtain a light emitting element and a light receiving element. The position of the marker can be specified regardless of the distance between and.

The invention described in Item 27 is the method for manufacturing an optical transceiver module according to any one of Items 24 to 26, wherein after the scattered light is arranged so as to be located on the marker. When the array-shaped fiber is moved in parallel, the light-emitting element of the port that is the reference of the array-shaped light-emitting element is caused to emit light, and the light emitted from the light-emitting element is monitored from above the substrate. The optical fiber inserted into the optical fiber is fixed at a position where the optical system is totally reflected and the amount of light is reduced most.

With the above structure, after the arrayed fibers are arranged on the marker, the emitted light from the light emitting element of the reference port is monitored, and the parallel movement is performed to the position where the light amount is reduced most, whereby the parallel movement distance is changed. It can be implemented accurately without measuring.

According to a twenty-eighth aspect of the present invention, in the method of manufacturing the optical transceiver module according to the twenty-first aspect, the array-shaped light emitting elements, light receiving elements and output monitoring light receiving elements mounted on the same substrate are provided. When mounting the array-shaped fiber on the upper surface, only two or more arbitrary light-emitting elements among the array-shaped light-emitting elements are caused to emit light, and the light emitted from the light-emitting elements is adjusted while finely adjusting the position of the array-shaped fiber. Monitored from the upper part of the substrate, the light emitted from the arbitrary two or more light emitting elements is totally reflected by the optical system inserted into the corresponding fiber of the array fiber, and the array fiber is placed at a position where the light amount is reduced most. It is characterized by fixing.

With the above structure, only two or more arbitrary light emitting elements of the array of light emitting elements are caused to emit light, and the array fibers are finely adjusted to a position where the amount of light is most attenuated. Without making it incident
Arrayed fibers can be implemented.

[0066]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

<First Embodiment> The first embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. FIG. 1 is a configuration diagram showing a first embodiment of an optical transceiver module according to the present invention.

As shown in FIG. 1, on a rectangular flat substrate 21, a surface emitting element 22 for transmission and a light receiving element 23 for reception, which are mounted in a flat plate shape having the same thickness, are arranged at predetermined intervals. Optical fibers 24 are arranged on the surface emitting element 22 and the light receiving element 23, respectively.

Further, the surface emitting element 22 and the light receiving element 23
Are arranged in the order of the surface emitting element 22 and the light receiving element 23 in the light transmitting direction. In the optical fiber 24, two slits are formed obliquely with respect to the optical axis together with the fixing material such as the V groove and the resin in a state of being fixed with the fixing V groove and the resin (not shown). ing. The slit is located above the surface emitting element and the light receiving element. Inside these slits, a reflection mirror 25 as a first optical system that totally reflects the emitted light of the surface light emitting element 22 and makes it enter the optical fiber 24, and the light made incident from the optical fiber 24 to the light receiving element 23. Half mirrors 26 as a second optical system for making incident light are respectively inserted obliquely with respect to the optical axis of the optical fiber 24.

That is, the reflection mirror 25 has a vertical line passing through the center of the light emitting region of the surface light emitting element 22 and the optical fiber 24.
The light is emitted from the surface emitting element 22 so as to be coupled to the optical fiber 24, passing through a point where the center of the core intersects with the vertical line and forming a predetermined angle with the vertical line. Further, the half mirror 26 passes through a point where a vertical line passing through the center of the light receiving area of the light receiving element 23 and the center of the core of the optical fiber 24 cross each other and forms a predetermined angle with respect to the vertical line. It is arranged so that received light that is more incident is incident on the light receiving element 23.

In the optical transmission / reception module configured as described above, the transmitted light is emitted from the surface emitting element 22, reflected by the reflection mirror 25, and incident on the optical fiber 24 on the transmission path side, and further, is kept constant in the half mirror 26. Of the transmitted light is transmitted through.

On the other hand, the received light is transmitted through the optical fiber 24 on the transmission line side.
The incident light is further incident, and a certain proportion of transmitted light is reflected by the half mirror 26 toward the light receiving element 23.
Light is received at 3.

As described above, according to the present embodiment, the surface emitting element 22 and the light receiving element 23 are arranged on the same plane substrate 21, and the reflecting mirror 25 and the half mirror are provided on the surface emitting element 22 and the light receiving element 23. By arranging the optical fibers 24 in which 26 are respectively inserted, the surface emitting element 22 and the light receiving element 23 are provided with the reflection mirror 25 and the half mirror 26 without using lenses or the like.
Since it is directly connected to 4, the configuration can be simplified,
It can be easily implemented.

Further, according to the present embodiment, since the surface light emitting element 22 and the light receiving element 23 are formed to have the same thickness, the light emitting surface of the surface light emitting element 22, the light receiving surface of the light receiving element 23 and the optical fiber 24. Can be the shortest distance to
The coupling rate with the optical fiber 24 can be increased.

Further, according to the present embodiment, the first optical system is the reflecting mirror 25 which totally reflects the light on the light incident surface, and the second optical system reflects half of the light and transmits the other half of the light. Since it is the half mirror 26, it can be applied to a transceiver module for time-division communication with the same wavelength.

<Second Embodiment> The second embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG.

FIG. 2 is a block diagram showing a second embodiment of the optical transceiver module according to the present invention. In each of the following embodiments, the same parts as those in the first embodiment will be described with the same reference numerals, and the same configurations as those in the first embodiment will be omitted.

As shown in FIG. 2, in this embodiment, the main structure is the same as that of the first embodiment, but
The surface light emitting element 22 and the light receiving element 23 are arranged at opposite positions.

That is, in this embodiment, the surface emitting element 22 and the light receiving element 23 are arranged in this order in the transmission direction, and the light incident from the optical fiber 24 is reflected by the reflection mirror. The light emitted from the surface emitting element 22 is incident on the optical fiber 24 by the half mirror 26 while being totally reflected by 25 and incident on the light receiving element 23.

In the optical transmission / reception module configured as described above, the transmission light is emitted from the surface emitting element 22, reflected by the half mirror 26, and incident on the optical fiber 24 on the transmission path side for transmission.

On the other hand, the received light is transmitted through the optical fiber 24 on the transmission line side.
The light is further incident, passes through the half mirror 26 at a certain ratio, is reflected by the reflection mirror 25 toward the light receiving element 23, and is received by the light receiving element 23.

As described above, according to this embodiment, the surface emitting element 22 and the light receiving element 23 are arranged in the order of the light receiving element 23 and the surface emitting element 22 in the transmission direction.
The light incident from the light source 4 is totally reflected by the reflection mirror 25 and is incident on the light receiving element 23, while the light emitted from the surface light emitting element 22 is incident on the optical fiber 24 by the half mirror 26. Since the emitted light of 22 is transmitted only through the half mirror 26, the loss can be reduced.

<Third Embodiment> The third embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. FIG. 3 is a configuration diagram showing a third embodiment of the optical transceiver module according to the present invention.

As shown in FIG. 3, in this embodiment, the main structure is the same as that of the first embodiment, but
The optical fiber 24 is cut at a predetermined angle at the mounting position of the reflection mirror 25 as the first optical system in FIG. 1, and the surface is polished to form an obliquely polished surface 27.

In the present embodiment, the operation when the light receiving element 23 is arranged with respect to the surface light emitting element 22 in the light transmission path direction will be described. That is, the transmitted light is the surface emitting element 22.
Is emitted from the optical fiber 24, is reflected by the obliquely polished surface 27, is incident on the optical fiber 24 on the transmission path side, and is further transmitted through the half mirror 26 at a certain ratio. On the other hand, the received light is transmitted through the same route as in the first embodiment.

It should be noted that the surface emitting element 2 is different from the light receiving element 23.
Since the operation when 2 is arranged in the transmission path direction is the same as that of the second embodiment, it is omitted here.

As described above, according to the present embodiment, the end face of the optical fiber 24 is obliquely polished to form the oblique polishing surface 27, and the reflection mirror 25 is removed, so that the number of parts can be reduced. Also, the processing work can be simplified.

<Fourth Embodiment> The fourth embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. FIG. 4 is a configuration diagram showing a fourth embodiment of the optical transceiver module according to the present invention.

As shown in FIG. 4, in the present embodiment, the main structure is the same as that of the third embodiment, but
A first wavelength filter 28 is inserted at the mounting position of the half mirror 26 of the optical fiber 24 in FIG. 3, and the first wavelength filter 28 transmits only one of the transmitting and receiving wavelengths and totally reflects the other wavelength. It has characteristics.

In this embodiment, the operation when the light receiving element 23 is arranged in the light transmission path direction with respect to the surface light emitting element 22 will be described. In addition, in FIG. 4, the solid line indicates the transmitted light and the broken line indicates the received light. The same applies to the drawings in the following respective embodiments. The first wavelength filter 28 in the present embodiment has a characteristic that the transmission wavelength and the reception wavelength are different from each other, so that the transmission wavelength is transmitted while the reception wavelength is reflected.

Therefore, the transmitted light is emitted from the surface emitting element 22, is reflected by the obliquely polished surface 27, is incident on the optical fiber 24 on the transmission path side, and is further transmitted through the first wavelength filter 28. On the other hand, the received light enters from the optical fiber 24 on the transmission path side, is reflected by the first wavelength filter 28 toward the light receiving element 23, and is received by the light receiving element 23.

The surface emitting element 2 is different from the light receiving element 23.
The operation when 2 is arranged in the transmission path direction is the same as the above except that the first wavelength filter 28 has a characteristic of transmitting the reception wavelength while reflecting the transmission wavelength.

As described above, according to the present embodiment, by using the first wavelength filter 28 that transmits only one of the transmitting and receiving wavelengths having different transmission wavelengths and reception wavelengths and totally reflects the other wavelength. In addition, it is possible to reduce the loss of the emitted light of the surface light emitting element 22 and the incident light of the light receiving element 23, and by transmitting and receiving different transmission wavelengths and reception wavelengths at the same time, the transmission speed is approximately doubled. It can be applied to the optical transceiver module for.

<Fifth Embodiment> The fifth embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. FIG. 5 is a configuration diagram showing a fifth embodiment of an optical transceiver module according to the present invention.

As shown in FIG. 5, in this embodiment, the main structure is the same as that of the fourth embodiment, but
A second wavelength filter 29 is inserted between the light receiving element 23 and the optical fiber 24. Further, in the present embodiment, the thickness of the surface emitting element 22 is the same as the thickness when the light receiving element 23 and the second wavelength filter 29 are stacked.

The present embodiment configured as described above is
Although the main operation is the same as that of the fourth embodiment,
The second wavelength filter 29 allows only the received light to pass therethrough so that the light emitted from the surface light emitting element 22 is reflected by the optical system and other reflecting surfaces and does not enter the light receiving element 23 for reception. There is.

As described above, according to the present embodiment, by disposing the second wavelength filter 29 so as to cover the light incident surface of the light receiving element 23, optical crosstalk can be reduced.

Further, according to the present embodiment, the thickness of the surface emitting element 22, the light receiving element 23 and the second wavelength filter 29.
Since the same thickness is obtained when the and are overlapped, the distance between the light emitting surface of the surface light emitting element 22 and the light receiving surface of the light receiving element 23 and the optical fiber 24 can be minimized, respectively. The binding rate with 24 can be increased.

<Sixth Embodiment> The sixth embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. FIG. 6 is a configuration diagram showing a sixth embodiment of an optical transceiver module according to the present invention.

As shown in FIG. 6, in this embodiment, the main structure is the same as that of the fifth embodiment, but
The light receiving element 23 is flip-chip mounted, and the sealing material 30 on the mounting surface has a light blocking property. That is, the sealing material 30 covers the surfaces other than the light incident surface of the light receiving element 23 and the side surface of the second wavelength filter 29. Here, the light incident surface of the light receiving element 23 is covered with the second wavelength filter 29.

In the present embodiment configured as described above, the surface of the surface light emitting element 22 of the surface light emitting element 22 is covered by the sealing material 30 covering the surface other than the light incident surface of the light receiving element 23 and the side surface of the second wavelength filter 29. It is possible to prevent the emitted light from being reflected by the optical system or other reflecting surface and entering the light receiving element 23 for reception.

As described above, according to the present embodiment, the light incident surface of the light receiving element 23 for reception has the second wavelength filter 29.
And the other surface is covered with the sealing material 30 having a light shielding property, so that the sealing and the light shielding can be realized by one material.

Further, according to the present embodiment, the light receiving element 2
3 is flip-chip mounted, and since the sealing material 30 is a material having a light-shielding property,
Leakage from a surface other than the light incident surface of the light receiving element 23 can be blocked by the sealing material 30, and optical crosstalk can be further reduced.

<Seventh Embodiment> The seventh embodiment of the present invention will be described below.
The embodiment will be described with reference to FIGS. 7 and 8. FIG. 7 is a perspective view showing a seventh embodiment of the optical transceiver module according to the present invention.

As shown in FIG. 7, in the present embodiment, an array-shaped transmitting surface emitting element 31 and an array-receiving light receiving element 32 are arranged in parallel on the same plane substrate 21. ing. An optical array fiber 33 is arranged on the arrayed surface emitting element 31 and the light receiving element 32 such that the optical transmission direction is orthogonal to the element arrangement direction of the arrayed surface emitting element 31 and the light receiving element 32. ing.

Here, the spacing between the cores of the arrayed fiber 33 and the spacing between the light emitting areas of the arrayed surface emitting elements 31 and the light receiving elements 32 and the centers of the light receiving areas are the same. The array-shaped fibers 33 are arranged so that the cores of the respective ports pass above the center of the light-emitting region of the array-shaped surface light-emitting element 31 and the center of the light-receiving region of the array-shaped light-receiving element 32, respectively. There is.

That is, the arrayed fibers 33 are the surface emitting elements 31 in which the optical transmission directions of the respective optical fibers are arrayed.
Also, the optical fibers are arranged orthogonal to the element array direction of the light receiving element 32, and each optical fiber is arranged on the corresponding surface emitting element and light receiving element.

FIG. 8 is a sectional view showing the upper portion of the light receiving element 32 of the arrayed optical fiber 33. As shown in FIG. 8, in order to prevent damage to the array-shaped optical fiber 33, the array-shaped optical fiber 33 is provided above the array-shaped light receiving element 32.
Each fiber of the fixture is a fixture 35 that transmits light such as glass.
And a resin material 36, and a slit is formed from under the fixture 35, and a first length as one rectangular optical system capable of entering and exiting all the fibers of the arrayed fiber 33 is formed in the slit. The long wavelength filter 34 is inserted.
The long wavelength filter 34 performs optical branching and optical multiplexing of all ports as in the fourth embodiment.

The end face of each fiber of the arrayed optical fiber 33 is obliquely polished on the light emitting region of the arrayed surface light emitting element 31 as in the third embodiment.
The operation of each port of the arrayed optical fiber 33 is the same as that of the first, third and fourth embodiments, and will be omitted here.

In FIG. 7, the arrayed light receiving elements 32 are located on the transmission line side of the surface light emitting element 31, but the same function as in the second embodiment can be obtained even if the arrayed light receiving elements 32 are arranged in reverse. . Thus, according to the present embodiment, the surface emitting element,
By arraying the light receiving element and the optical fiber, the surface emitting element, the light receiving element and the optical fiber can be integrated, downsizing can be achieved, and the number of parts can be reduced.

<Eighth Embodiment> The eighth embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. FIG. 9 is a configuration diagram showing an eighth embodiment of the optical transceiver module according to the present invention.

As shown in FIG. 9, in the present embodiment, the main structure is the same as in the first and third embodiments, but in addition to these embodiments, a surface emitting light for transmission is used. An output light monitoring light receiving element 37 is arranged between the element 22 and the receiving light receiving element 23, and the output light monitoring light receiving element 37 passes through the center of the light receiving region similarly to the surface light emitting element 22 and the light receiving element 23. It is arranged so that the center of the core of the optical fiber passes on the vertical line.

A beam splitter 38 as a third optical system for reflecting a part of the light and transmitting the remaining light is inserted in the optical fiber 24. The beam splitter 38 outputs the output light. The light emitted from the surface light-emitting element 22 is oblique, passing through a point where a vertical line passing through the center of the light-receiving region of the monitor light-receiving element 37 and the center of the core of the optical fiber intersect with each other and forming a predetermined angle with respect to the vertical line. It is arranged so that it is incident on the beam splitter 38 via the polishing surface 27 and the optical fiber 24, and part of this incident light is incident on the output light monitoring light receiving element 37.

Explaining the operation of this embodiment, the emitted light from the surface emitting element 22 is the same as in the third embodiment.
The light is reflected by the oblique reflection surface 37 and is incident on the optical fiber 24, but a part of the incident light is reflected by the beam splitter 38 and is incident on the output light monitoring light receiving element 37. The light passing through the beam splitter 38 is transmitted as in the third embodiment. The action of the received light is the same as that in the third embodiment, and will be omitted here.

Since the light incident on the output light monitoring light receiving element 37 is proportional to the optical output level of the transmitted light, the surface emitting element 2 is arranged so that the output current of the light receiving element 37 becomes constant.
By controlling the bias current of 2, the output light level is controlled to be constant.

As described above, according to the present embodiment, the output light monitoring light receiving element 37 used for controlling the level of the output light is also a flat surface like the surface emitting element 22 for transmitting and the light receiving element 23 for receiving. An optical fiber 24 that can be easily mounted on the substrate 21 and that has a reflection mirror 25 and a half mirror 26 that are optical systems provided on the output light monitoring light receiving element 37, the surface light emitting element 22, and the light receiving element 23 is provided. By arranging them, the surface emitting element 22 and the light receiving element 23 are directly coupled to the optical fiber 24 provided with the above optical system without using a lens or the like, so that the configuration can be simplified and easily mounted. It becomes possible.

Further, according to the present embodiment, the beam splitter 38 for reflecting a part of the light and transmitting the rest of the light is inserted in the optical fiber 24, so that the output optical monitor has a simple structure. The light receiving element 37 can be coupled to the optical fiber 24.

<Ninth Embodiment> The ninth embodiment of the present invention will be described below.
The embodiment will be described with reference to FIG. Figure 1
Reference numeral 0 is a block diagram showing a transmitter of the optical transceiver module according to the ninth embodiment of the present invention.

As shown in FIG. 10, the polishing surface 39 as the first optical system of the optical fiber 24 is obliquely polished as in the third embodiment, and the core portion 24a of the optical fiber 24 is formed. The angle of the polished surface including a part thereof with respect to the emission direction of the surface light emitting element 22 is larger than the angles of the remaining surfaces. That is, the polishing surface 39 including a part of the core portion 24a of the optical fiber 24 is formed to be inclined with respect to the remaining surface.

Therefore, a part of the light emitted from the surface light emitting element 22 is reflected by the polishing surface 39, and the output light monitoring light receiving element 37 is arranged so that the reflected light enters the output light monitoring light receiving element 37. ing.

As described above, according to the present embodiment, the polishing surface 39 including a part of the core portion 24a of the optical fiber 24 is inclined with respect to the remaining surface, so that the third optical system is not mounted. A part of the output light of the surface light emitting element 22 can be incident on the output light monitoring light receiving element 37.

<Tenth Embodiment> The tenth embodiment of the present invention will be described below with reference to FIG.
FIG. 11 is a configuration diagram showing a transmitter of the optical transceiver module according to the tenth embodiment of the present invention.

As shown in FIG. 11, the end face of the optical fiber 24 is obliquely polished in the same manner as in the third embodiment. The polishing surface 40, which is an optical system, has an angle with respect to the emission direction of the surface light emitting element 22 that is larger than the angles of the remaining surfaces. That is, a part of the clad portion 24b of the optical fiber 24 has a polishing surface 40 that is inclined with respect to the other polishing surfaces.

Therefore, of the light emitted from the surface light emitting element 22, the light which is not coupled to the core portion 24a of the optical fiber 24 but is incident on the cladding portion 24b is reflected by the polishing surface 40, and this reflected light is used for output light monitoring. The output light monitoring light receiving element 37 is arranged so as to enter the light receiving element 37.

As described above, according to the present embodiment, since the polishing surface 40 inclined with respect to the other polishing surface is formed in a part of the clad portion 24b of the optical fiber 24, the surface emitting element 22 has The loss of the transmitted light can be reduced by using the light that has not been coupled to the core portion 24a out of the emitted light for monitoring the output light.

<Eleventh Embodiment> The eleventh embodiment of the present invention will be described below with reference to FIGS. FIG. 12 is a configuration diagram showing an eleventh embodiment of an optical transceiver module according to the present invention.

As shown in FIG. 12, in the present embodiment, as in the case of the eighth embodiment, a surface emitting element 22 for transmission, a light receiving element 23 for reception, and an output light monitor are provided on a flat substrate 21. Each of the light receiving elements 37 is arranged, and the optical fiber 24 is arranged thereon. The mounting positions of the respective elements are arranged in the order of the light receiving element 23 for reception, the surface light emitting element 22 for transmission, and the light receiving element 37 for output light monitoring in the transmission direction.

The optical fiber 24 has an obliquely polished surface above the receiving light-receiving element 23, and above the transmitting surface emitting element 22 and the output-light monitoring light-receiving element 37, the wavelength characteristics of which differ from each other. The third wavelength filter 41 and the fourth wavelength filter 42 are respectively inserted.

The third wavelength filter 41 totally reflects transmitted light and totally transmits received light. The fourth wavelength filter 42 has a wavelength characteristic shown in FIG. 13, the received light is totally transmitted, the transmitted light is transmitted through a transmission rate r _t in FIG. 13, (1-r _t) Is reflected at a rate of.

For example, in the fourth wavelength filter 42, the transmission wavelength matches the wavelength corresponding to a certain constant transmittance in the wavelength region where the transmittance with respect to the wavelength changes significantly, and the reception wavelength Corresponds to a filter or the like having the characteristic of transmitting all light and transmitting only the transmission wavelength with the above-mentioned constant transmittance.

In the present embodiment configured as described above, the received light is incident on the transmission line as shown by the broken line in FIG. 12, passes through the two wavelength filters 42 and 41, and is received by the oblique polishing surface 27. The light is totally reflected and enters the light receiving element 23 for reception. On the other hand, the transmission light is emitted from the surface emitting element 22 for transmission as shown by the solid line in FIG.
The light is totally reflected at 1, and is incident on the optical fiber 24, and then the fourth
The light reflected by the fourth wavelength filter 42 is incident on the output light monitoring light receiving element 37 while being transmitted and transmitted at a ratio of r _t by the wavelength filter 42. The other operations are the same as those in the eighth embodiment, and therefore will be omitted.

As described above, according to the present embodiment, the receiving light receiving element 23, the transmitting surface emitting element 22, and the output light monitoring light receiving element 37 are arranged in this order in the transmission direction,
By coupling these to the optical fiber 24 having an optical system, it is possible to reduce the loss of the emitted light of the surface light emitting element 22 in the filter.

<Twelfth Embodiment> The twelfth embodiment of the present invention will be described below with reference to FIG.
FIG. 14 is a configuration diagram showing a twelfth embodiment of an optical transceiver module according to the present invention.

As shown in FIG. 14, in the present embodiment,
Although the main configuration is similar to that of the fourth embodiment, an output light monitor light-receiving element 37 is provided on the transmission path side of the light-receiving element 23 for reception, and a fourth wavelength filter is provided in the optical fiber 24 above it. 42 is inserted, and the mounting position and the characteristics of the fourth wavelength filter 42 are the same as those in the eleventh embodiment.

Next, the operation of this embodiment will be described. First, the transmitted light is emitted from the surface emitting element 22 for transmission, is totally reflected by the obliquely polished surface 27, is transmitted through the first wavelength filter 28, and then is transmitted by the fourth wavelength filter 42 at a ratio of r _t . While being transmitted through, the fourth wavelength filter 42
The light reflected by is incident on the output light monitoring light receiving element 37. On the other hand, the received light enters through the transmission path, passes through the fourth wavelength filter 42, is totally reflected by the first wavelength filter 28, and enters the light receiving element 23 for reception.

As described above, according to this embodiment, the surface emitting element 22 for transmission, the light receiving element 23 for reception, and the light receiving element 37 for output light monitoring are coupled to the optical fiber 24 in this order in the direction of the transmission path. By doing so, the loss of received light can be reduced, and the output light including the characteristics of the second wavelength filter can be monitored.

Further, according to the present embodiment, as the fourth wavelength filter 42, the transmission wavelength matches the wavelength corresponding to a certain constant transmittance in the wavelength region in which the transmittance with respect to the wavelength greatly changes. Therefore, since a filter having the characteristics of transmitting all the reception wavelengths and transmitting only the transmission wavelengths with the above-mentioned constant transmittance is used, one filter completely transmits the reception wavelengths and the transmission wavelengths It is possible to realize the functions of the wavelength selection filter and the beam splitter, such as reflecting only a part and transmitting the rest.

<Thirteenth Embodiment> The thirteenth embodiment of the present invention will be described below with reference to FIG.
FIG. 15 is a perspective view showing a thirteenth embodiment of the optical transceiver module according to the present invention.

As shown in FIG. 15, in the present embodiment, the array-shaped surface emitting element 31 for transmission and the array-shaped light receiving element 43 for monitoring the output light are arranged similarly to the seventh embodiment.
And the light receiving elements 32 for reception in an array form are arranged in parallel to each other on the same plane substrate 21. The array-shaped optical fiber 33 is arranged on the array-shaped elements 31, 43 and 32 so that the transmission direction is orthogonal to the array direction of the array-shaped elements 31, 43 and 32.

Here, the arrayed surface emitting device 3 for transmission is used.
1. Output light monitor light receiving element 43 and light receiving element 32 are
Array-shaped elements 31, 43, and 32 are arranged in this order in the optical fiber transmission direction of the array-shaped optical fiber 33. The mounting position of each port of the arrayed fiber 33 is the same as that of the eighth embodiment.

However, the second long-wavelength filter 44 and the first long-wavelength filter 34 can perform optical branching and optical multiplexing of all ports with a single filter as in the sixth embodiment. Implemented in.

As described above, according to the present embodiment, two light-receiving elements, a surface-emitting element and an optical fiber are respectively arrayed to form an array-shaped surface-emitting element 31 for transmission and an array-shaped output light-monitoring light-receiving element. 43, the arrayed light receiving element 32 for reception and the arrayed optical fiber 33 are used to integrate the surface emitting element, the light receiving element and the optical fiber,
The size can be reduced and the number of parts can be reduced.

<First Embodiment of Manufacturing Method> The first embodiment of the manufacturing method according to the present invention will be described below with reference to FIG.
Will be described with reference to. FIG. 16 is a plan view showing an optical transceiver module according to the first embodiment of the manufacturing method of the present invention. In FIG. 16, the cylinder shown by the solid line is the optical fiber and its cross section and the slit, and the circles shown by the broken line are the light emitting region and the light receiving region. The present embodiment relates to a procedure of mounting the optical fiber 24 on the surface emitting element 22 and the light receiving element 23.

As shown in FIG. 16, first, the optical fiber 2
The light transmission direction of 4 is the X-axis direction, and X is on the flat substrate 21.
The direction orthogonal to the axis is the Y-axis direction. Next, the flat substrate 2
Emitting area 4 of surface emitting element 22 for transmission mounted on 1
5 and the first marker 47 and the second marker 48 are attached on the flat substrate 21 at positions moved from the center point of the light receiving area 46 of the light receiving element 23 for reception by a constant distance L _{1 in the} Y-axis direction. Keep it.

When the optical fiber 24 is mounted, the first optical system receives light from the transmission path side of the optical fiber 24 and causes the light emitted from the surface emitting element 22 to enter the optical fiber 24. The scattered light on the obliquely polished surface 27 as a light source and on the half mirror 26 as a second optical system for making the light incident from the optical fiber 24 incident on the light receiving element 23 is monitored, and the center of this scattered light is the first. The marker 47 and the second marker 48 are arranged so as to overlap with each other, and then a predetermined distance L
_The optical fiber 24 is mounted so that it is translated by _{1 in the} Y-axis direction and the obliquely polished surface 27 and the half mirror 26 are located at the center points of the light emitting region 45 and the light receiving region 46.

As described above, according to the present embodiment, light is incident from the transmission line side, and the scattered light is adjusted to the first marker 47 and the second marker 48 to which the light is previously attached, and then the optical fiber is used. By moving 24 in parallel, it is possible to perform passive alignment in which adjustment is performed without transmission / reception. Further, without directly attaching a marker to the oblique polishing surface 27 or the half mirror 26, scattered light of light incident from the transmission path is used as a marker. By using it, it is possible to assemble with simple adjustment. Therefore, the optical fiber 24 can be easily mounted.

<Second Embodiment of Manufacturing Method> Hereinafter, a second embodiment of the manufacturing method according to the present invention will be described with reference to FIG.
Will be described with reference to. FIG. 17 is a plan view showing an optical transceiver module according to the second embodiment of the manufacturing method of the present invention. This embodiment also relates to a procedure for mounting the optical fiber 24 on the surface emitting element 22 and the light receiving element 23.

As shown in FIG. 17, in the present embodiment,
In addition to the first marker 47 and the second marker 48 in the first embodiment of the manufacturing method, the fixed distance L _{1 is} moved in the Y-axis direction from the center point of the light receiving region of the output light monitoring light receiving element 37. The third marker 49 is placed on the substrate 2
I put it on 1.

Then, when the optical fiber 24 is mounted, as in the first embodiment of the manufacturing method, any two or more of the three markers 47, 48, and 49 are applied to the first manufacturing method. The optical fiber 24 is mounted by aligning the centers of scattered light in the above form and then translating it by L _{1 in the} Y-axis direction.

As described above, according to this embodiment, light is incident from the transmission path side, the scattered light is adjusted to two or more markers attached in advance, and the optical fiber 24 is moved in parallel. The optical fiber 24 can be positioned more accurately.

<Third Embodiment of Manufacturing Method> Hereinafter, a third embodiment of the manufacturing method according to the present invention will be described with reference to FIG.
And FIG. 17 will be described.

This embodiment also relates to a procedure for mounting the optical fiber 24 on the surface emitting element 22 and the light receiving element 23.

First, when the markers 47, 48, and 49 in the first and second embodiments of the manufacturing method are aligned with the centers of scattered light incident from the transmission path side, and subsequently moved in parallel, they are used for transmission. The surface light emitting element 22 is emitted, and the light emitted from the surface light emitting element 22 is monitored from above the flat substrate 21. The optical fiber 24 is fixed.

As described above, according to the present embodiment, after the optical fiber 24 is arranged on the markers 47, 48 and 49, the emitted light of the surface emitting element 22 is monitored and the parallel movement is performed to the position where the light amount is reduced most. By doing so, the mounting can be performed accurately without measuring the distance of parallel movement.

<Fourth Embodiment of Manufacturing Method> The fourth embodiment of the manufacturing method according to the present invention will be described below with reference to FIG.
Will be described with reference to. FIG. 18 is a plan view showing an optical transceiver module according to the fourth embodiment of the manufacturing method of the present invention. This embodiment also relates to a procedure for mounting an optical fiber on the surface emitting element and the light receiving element.

As shown in FIG. 18, in the present embodiment,
The array-shaped surface light-emitting elements 31 and the array-shaped light-receiving elements 32 are mounted on the same plane substrate 21 so as to be arranged in the Y-axis direction, so that they are arranged on the same plane substrate 21 in the Y-axis direction. When the arrayed fiber 33 is mounted on the upper surfaces of the arrayed surface emitting element 31 and the arrayed light receiving element 32 mounted, Y from the center point of the light emitting area of the surface emitting element of any port and the light receiving area of the light receiving element The first marker 47 and the second marker 48 are located at a position separated by a constant distance L _{1 in the} axial direction.
Is attached.

After that, light is incident on the reference port only from the transmission line side, the scattered light on the obliquely polished surface 27 and the half mirror 26 is monitored, and the center of the scattered light is set to the marker 4.
After adjusting to 7 and 48, the optical array fiber 33 is translated in the Y-axis direction by a constant distance L ₁ .

As described above, according to the present embodiment, the markers 47 and 48 are attached to the light emitting areas of the array-shaped surface light emitting elements 31 and the light receiving elements 32, and at the positions distant from the center of the light receiving areas by a certain distance in the Y-axis direction. The mounting of the optical array fibers 33 can be collectively adjusted by translating the reference fiber from the markers 47 and 48 in the Y-axis direction by a predetermined distance.

In the present embodiment, the arrayed surface emitting elements 31, the arrayed light receiving elements 32, and the arrayed output monitor are mounted on the same flat substrate 21 so as to be arranged in the Y-axis direction. When the optical array fiber 33 is mounted on the upper surface of the light receiving element 43, from two or more arbitrary points out of three central points of the light emitting area and the light receiving area of an arbitrary port, Y
The markers 47, 48 are moved to a position moved by a certain distance in the axial direction,
After attaching 49 to the flat substrate 21, monitoring the scattered light of the light incident from the transmission path side of an arbitrary port, and arranging so that the center of the scattered light is located on the markers 47, 48, 49 Alternatively, the optical array fibers 33 may be moved in parallel.

Therefore, when the number of markers is two or more, the mounting can be positioned more clearly.

<Fifth Embodiment of Manufacturing Method> Hereinafter, a fifth embodiment of the manufacturing method according to the present invention will be described with reference to FIG.
Will be described with reference to. FIG. 19 is a plan view showing an optical transceiver module according to the fifth embodiment of the manufacturing method of the present invention. This embodiment also relates to a procedure for mounting an optical fiber on the surface emitting element and the light receiving element.

As shown in FIG. 19, in the present embodiment,
The first marker 50 and the second marker 51 are attached to the position, which is moved a predetermined distance L _{1 in the} X-axis direction from the center point of the light emitting region of any two or more ports in the arrayed surface light emitting element 31. deep. After that, light is incident on the reference port only from the transmission line side, the scattered light on the obliquely polished surface 27 is monitored, and the center of the scattered light is set to the marker 50 as in the fourth embodiment of the manufacturing method. , 51, the optical array fiber 33 is translated in the X direction by a constant distance L ₁ .

As described above, according to the present embodiment, the markers 50 and 51 are attached at positions apart from the center of the light emitting area of the arrayed surface light emitting element 31 in the X axis direction by a predetermined distance.
By moving the position of the reference fiber from the markers 50 and 51 in the X-axis direction by a constant distance L ₁ , regardless of the distance between the arrayed surface emitting element 31 and the light receiving element 32,
The positions of the markers 50 and 51 can be specified, and the mounting of the optical array fibers 33 can be collectively adjusted.

<Sixth Embodiment of Manufacturing Method> A sixth embodiment of the manufacturing method according to the present invention will be described below with reference to FIG.
And FIG. 19 will be described. This embodiment also relates to a procedure for mounting an optical fiber on the surface emitting element and the light receiving element.

First, when the centers of the scattered light of the light incident from the transmission path side are aligned with the markers 47 and 48 in the fourth and fifth embodiments of the manufacturing method, and then the parallel movement is performed, an array-shaped surface is formed. Among the light emitting elements 31, only the surface emitting element for transmission of the reference port is made to emit light, and the emitted light of the surface emitting element is monitored from above the flat substrate 21, and the emitted light is used as a reference for the obliquely polished surface of the optical fiber. The optical array fiber 33 is placed at a position where the light amount is most reduced by total reflection at 27.
To fix.

As described above, according to the present embodiment, after arranging the optical array fibers 33 on the markers 47 and 48, the emitted light from the surface emitting element of the reference port is monitored, and the light quantity is reduced most. By moving to the position in parallel, it is possible to mount accurately without measuring the distance to move in parallel.

<Seventh Embodiment of Manufacturing Method> Hereinafter, a seventh embodiment of the manufacturing method according to the present invention will be described with reference to FIG.
Will be described with reference to. FIG. 20 is a plan view showing an optical transceiver module according to the seventh embodiment of the manufacturing method of the present invention. This embodiment also relates to a procedure for mounting an optical fiber on the surface emitting element and the light receiving element.

As shown in FIG. 20, first, only two or more arbitrary surface emitting elements among the arrayed surface emitting elements 31 are made to emit light. While finely adjusting the position of the arrayed fibers 33, the light emitted from the surface emitting element is monitored from above the flat substrate 21, and the obliquely polished surface 5 of the fiber to which the emitted light corresponds.
The arrayed fiber 33 is fixed at a position where the amount of light is most reduced by total reflection at 2, 53.

As described above, according to this embodiment, only two or more arbitrary surface emitting elements among the arrayed surface emitting elements 31 are made to emit light, and the arrayed fiber 33 is placed at the position where the light amount is most attenuated. By finely adjusting, the arrayed fibers 33 can be mounted without making light incident from the transmission path side.

[0170]

As described above, according to the optical transceiver module of the present invention, the light emitting element and the light receiving element are arranged on the same substrate, so that the light emitting element and the light receiving element can be easily provided on one substrate. The light emitting element and the light receiving element are directly coupled to the optical fiber provided with the first and second optical systems without using a lens or the like, so that the number of parts can be reduced. As a result, integration and miniaturization are facilitated. Further, according to the method for manufacturing an optical transceiver module according to the present invention, passive alignment is possible, without directly attaching a marker to the optical system,
By using the scattered light of the light incident from the transmission line as a marker, it is possible to assemble with simple adjustment. Therefore, the optical fiber can be easily mounted.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a first embodiment of an optical transceiver module according to the present invention.

FIG. 2 is a configuration diagram showing a second embodiment of an optical transceiver module according to the present invention.

FIG. 3 is a configuration diagram showing a third embodiment of an optical transceiver module according to the present invention.

FIG. 4 is a configuration diagram showing a fourth embodiment of an optical transceiver module according to the present invention.

FIG. 5 is a configuration diagram showing a fifth embodiment of an optical transceiver module according to the present invention.

FIG. 6 is a configuration diagram showing a sixth embodiment of an optical transceiver module according to the present invention.

FIG. 7 is a perspective view showing a seventh embodiment of an optical transceiver module according to the present invention.

FIG. 8 is a sectional view showing an arrayed optical fiber according to a seventh embodiment.

FIG. 9 is a configuration diagram showing an eighth embodiment of an optical transceiver module according to the present invention.

FIG. 10 is a configuration diagram showing a transmitter in a ninth embodiment of an optical transceiver module according to the present invention.

FIG. 11 is a configuration diagram showing a transmitter in a tenth embodiment of an optical transceiver module according to the present invention.

FIG. 12 is a configuration diagram showing an eleventh embodiment of an optical transceiver module according to the present invention.

FIG. 13 is an explanatory diagram showing transmittance wavelength dependency of a third wavelength filter according to the eleventh embodiment of the present invention.

FIG. 14 is a configuration diagram showing a twelfth embodiment of an optical transceiver module according to the present invention.

FIG. 15 is a perspective view showing a thirteenth embodiment of an optical transceiver module according to the present invention.

FIG. 16 is a plan view showing an optical transceiver module according to first and third embodiments of the manufacturing method of the present invention.

FIG. 17 is a plan view showing an optical transceiver module according to second and third embodiments of the manufacturing method of the present invention.

FIG. 18 is a plan view showing an optical transceiver module according to fourth and sixth embodiments of the manufacturing method of the present invention.

FIG. 19 is a plan view showing an optical transceiver module according to fifth and sixth embodiments of the manufacturing method of the present invention.

FIG. 20 is a plan view showing an optical transceiver module according to a seventh embodiment of the manufacturing method of the present invention.

FIG. 21 is a sectional view showing the configuration of a conventional optical transceiver module.

[Explanation of symbols]

21 flat substrate 22 surface emitting element 23 Light receiving element 24 optical fiber 25 Reflecting mirror (first optical system) 26 Half mirror (second optical system) 27, 39, 40 Diagonal polished surface (first optical system) 28 First wavelength filter 29 Second wavelength filter 30 Flip chip mounting encapsulant 31 array-shaped surface emitting device 32 Array-shaped light receiving element 33 Optical array fiber 34 First Long Wavelength Filter 35 Fixture 36 resin material 37 Photodetector for output light monitor 38 Beam splitter (3rd optical system) 41 Third Wavelength Filter 42 Fourth wavelength filter 43 Array-shaped output light monitor light receiving element 44 Second Long Wavelength Filter 45 Light emitting area of light emitting element 46 Light receiving area of light receiving element 47,50 First marker 48,51 second marker 49 Third Marker 52, 53 Diagonal polishing surface

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Claims (28)

[Claims] 1. A light transmitting / receiving module in which light emitted from a light emitting element is guided to an optical fiber while light from the optical fiber is received by a light receiving element, wherein a light emitting surface of the light emitting element and light incident on the light receiving element. The light emitting element and the light receiving element are arranged on the same substrate with the surface facing upward, an optical fiber is arranged on the upper surfaces of the light emitting element and the light receiving element, and the light emitted from the light emitting element is totally reflected by the optical fiber. An optical transmission / reception module, comprising: a first optical system for making the optical fiber incident and a second optical system for making the light incident from the optical fiber incident on the light receiving element. 2. The light emitting element and the light receiving element are arranged in the order of the light receiving element and the light emitting element in a light transmitting direction,
The light incident from the optical fiber is totally reflected by the first optical system and is incident on the light receiving element, while the light emitted from the light emitting element is incident on the optical fiber by the second optical system. The optical transceiver module according to claim 1, wherein the optical transceiver module is arranged. 3. The optical transceiver module according to claim 1, wherein the light emitting element and the light receiving element have the same thickness. 4. The first optical system is a reflection mirror that totally reflects on a light incident surface, and the second optical system is a half mirror that reflects half of the light and transmits the remaining half of the light. The optical transceiver module according to claim 1 or 2, wherein 5. The optical transceiver module according to claim 1, wherein the first optical system is formed by an obliquely polished surface in which an optical fiber is cut at a predetermined angle and the surface is polished. 6. The second optical system is a first wavelength filter, and the first wavelength filter transmits only one of transmission and reception wavelengths when the transmission wavelength and the reception wavelength are different from each other, The optical transceiver module according to claim 1 or 2, wherein the other wavelength is totally reflected. 7. The optical transceiver module according to claim 6, further comprising a second wavelength filter inserted between the light incident surface of the light receiving element and the optical fiber, the second wavelength filter transmitting only a reception wavelength. 8. The optical transceiver module according to claim 7, wherein a thickness of the light emitting element and a thickness of the light receiving element and the second wavelength filter when the light emitting element and the second wavelength filter are overlapped with each other are the same. 9. The optical transceiver module according to claim 7, wherein a surface other than the light incident surface of the light receiving element and a side surface of the second wavelength filter are covered with a material having a light shielding property. 10. The optical transceiver module according to claim 7, wherein the light receiving element is flip-chip mounted, and a sealing material used for this mounting is a material having a light shielding property. 11. The optical transceiver module according to claim 9, wherein the sealing material covers a surface other than the light incident surface of the light receiving element and a side surface of the second wavelength filter. 12. The light emitting element is an array light emitting element, the light receiving element is an array light receiving element, the array light emitting element and the light receiving element are arranged on the same substrate, and the optical fiber is An array fiber, the optical transmission direction of each optical fiber in the array fiber is orthogonal to the element array direction of the light emitting element and the light receiving element in the array, and each optical fiber has a corresponding light emitting element and The optical system arranged on the upper surface of a light receiving element, wherein the first and second optical systems are common optical systems capable of entering and exiting all the fibers of the arrayed fiber. Optical transceiver module. 13. A third optical system between the first optical system and the second optical system, which emits a part of the light incident on the optical fiber from the light emitting element to the substrate side. The light receiving element for output light monitoring, which is arranged and receives the light and controls the output light level from the light emitting element, is arranged on the same substrate as the light emitting element and the light receiving element. The optical transceiver module described. 14. The optical transceiver module according to claim 13, wherein the third optical system is a beam splitter that reflects a part of light and transmits the remaining light. 15. The first optical system is an obliquely polished surface, and a part of the core part of the optical fiber is arranged so that a part of the light emitted from the light emitting element is incident on the output light monitoring light receiving element. 14. The optical transceiver module according to claim 13, wherein an angle of a polishing surface including the above is larger than that of the remaining surface with respect to the emission angle of the light emitting element. 16. The first optical system is an obliquely polished surface, and light of the light emitted from the light emitting element, which is incident on the clad portion of the optical fiber, is incident on the output light monitoring light receiving element. 14. The optical transceiver module according to claim 13, wherein a part of the polished surface of the clad portion of the optical fiber is formed such that the angle with respect to the emission angle of the light emitting element is larger than that of the remaining surface. 17. A third wavelength filter, wherein the second optical system transmits the reception wavelength and totally reflects the transmission wavelength, and the third optical system transmits the reception wavelength and the transmission wavelength. Is a fourth wavelength filter that reflects a part of the light and transmits the remaining light. The third optical system is arranged on the transmission path side of the second optical system, and the third optical system is arranged on the substrate in the transmission direction. 14. The optical transceiver module according to claim 13, wherein a light receiving element, the light emitting element, and the output light monitoring light receiving element are arranged in this order. 18. The first wavelength filter, wherein the second optical system transmits the transmission wavelength and totally reflects the reception wavelength, and the third optical system transmits the reception wavelength and the transmission wavelength. Is a fourth wavelength filter which reflects a part of the light and transmits the rest, wherein the third optical system is arranged on the transmission path side of the second optical system, and on the substrate in the transmission direction, 14. The optical transceiver module according to claim 13, wherein the light emitting element, the receiving light receiving element, and the output light monitoring light receiving element are arranged in this order. 19. The fourth wavelength filter has a transmission wavelength that matches a wavelength corresponding to a certain transmittance in the wavelength region in which the transmittance with respect to the wavelength changes, and the reception wavelength is totally transmitted. 19. The optical transceiver module according to claim 17, wherein only the transmission wavelength is transmitted with the constant transmittance. 20. The light emitting element is an array light emitting element, the light receiving element and the output monitoring light receiving element are array light receiving elements, and these are arranged on the same substrate, and the optical fiber is an array. Optical fiber, the optical transmission direction of each optical fiber in the array fiber is orthogonal to the array direction of each element of the array, and each optical fiber has a corresponding light emitting element, light receiving element and 14. The optical system disposed on the light receiving element for output light monitoring, wherein the first, second and third optical systems are optical systems capable of entering and exiting all fibers of the arrayed fiber. The optical transceiver module according to claim 18. 21. A method for manufacturing an optical transceiver module, wherein light emitted from a light emitting element is guided to an optical fiber, and light from the optical fiber is received by a light receiving element, wherein the light emitting surface of the light emitting element and the light receiving element. Mounting the light emitting element and the light receiving element on the same substrate with the light incident surface of
When mounting an optical fiber on the upper surface of the light emitting element and the light receiving element, when the light transmission direction of the optical fiber is the X axis direction and the direction orthogonal to the X axis on the substrate is the Y axis direction,
Markers are attached to the substrate at positions separated by a certain distance in the Y-axis direction from the center points of the light emitting area of the light emitting element and the light receiving area of the light receiving element, and light is incident from the transmission path side of the optical fiber. Then, the scattered light in the optical system inserted in the optical fiber of the light is monitored, and after the center of the scattered light is arranged so as to be located on each of the markers,
A method of manufacturing an optical transceiver module, wherein the optical fiber is mounted such that the optical system is moved in parallel in the Y-axis direction by the certain distance and the optical system is located at the center point of each of the light emitting region and the light receiving region. 22. In mounting an optical fiber on the upper surface of an output monitor light receiving element for controlling an output light level from the light emitting element, in addition to the light emitting element and the light receiving element mounted on the same substrate, A marker is placed on the substrate at a position apart from the arbitrary two or more of three central points of the light emitting area of the light emitting element, the light receiving element and the light receiving area of the output monitoring light receiving element in the Y-axis direction by a predetermined distance. Be attached
22. The method of manufacturing an optical transceiver module according to claim 21, wherein the optical fiber is moved in parallel after being arranged such that the center of the scattered light is located on the marker. 23. When the optical fiber is moved in parallel after the scattered light is arranged on the marker, the light emitting element is caused to emit light, and the light emitted from the light emitting element is monitored from above the substrate, 23. The method for manufacturing an optical transceiver module according to claim 21, wherein the emitted light is totally reflected by the optical system inserted into the optical fiber, and the optical fiber is fixed at a position where the amount of light is reduced most. . 24. The light emitting element is an array light emitting element, the light receiving element is an array light receiving element, the array light emitting element and the light receiving element are arranged on the same substrate, and the optical fiber is When arrayed fibers are arrayed fibers and are mounted on the upper surface of the arrayed light emitting elements and arrayed light receiving elements that are mounted so as to be arranged in the Y-axis direction on the same substrate, at the time of mounting an arbitrary port, A marker is attached on the substrate at a position apart from the center point of the light emitting region and the light receiving region in the Y-axis direction, and light is made incident from the transmission path side of the arbitrary port of the array fiber, and the light is emitted. Of the scattered light in the optical system of the arbitrary port of, and after arranging so that the center of the scattered light is located on the marker, the arrayed fibers are translated. 22. The method for manufacturing an optical transceiver module according to claim 21. 25. In addition to the array of light emitting elements and the light receiving elements mounted on the same substrate, the upper surface of an array of output monitoring light receiving elements for controlling the output light level from the array of light emitting elements. When the arrayed fiber is mounted on the substrate, a marker is attached on the substrate at a position moved by a certain distance in the Y-axis direction from any two or more of the three central points of the light emitting region and the light receiving region of the arbitrary port. Every other time, the scattered light of the light incident from the transmission path side of the arbitrary port is monitored, the center of the scattered light is arranged so as to be located on the marker, and then the arrayed fiber is moved in parallel. The method of manufacturing the optical transceiver module according to claim 24. 26. When mounting an arrayed fiber on the upper surface of the arrayed light emitting element, light receiving element and output monitoring light receiving element which are mounted on the same substrate so as to be arranged in the Y-axis direction, any 2 A marker is attached on the substrate at a position that is moved in the X-axis direction by a certain distance from the center point of the light emitting region of the ports or more, and the scattered light of the light incident from the transmission path side of the arbitrary two or more ports is monitored, The device is arranged such that the center of the scattered light is located on the marker, and then translated in the X-axis direction by a predetermined distance.
1. The method for manufacturing the optical transceiver module according to 1. 27. When the arrayed fibers are moved in parallel after the scattered light is positioned on the marker, a light emitting element of a port serving as a reference of the arrayed light emitting element is caused to emit light, and the emitted light is emitted. The emitted light of the element is monitored from above the substrate, and the emitted light is fixed at a position where the emitted light is totally reflected by the optical system inserted into the optical fiber of the arrayed fiber and the light amount is reduced most. The method for manufacturing an optical transceiver module according to any one of claims 24 to 26. 28. When mounting an array fiber on the upper surfaces of the array of light emitting elements, the light receiving elements and the output monitoring light receiving elements mounted on the same substrate, any one of the array of light emitting elements is mounted. Only the two or more light emitting elements are caused to emit light, and the light emitted from the light emitting elements is monitored from above the substrate while finely adjusting the position of the arrayed fibers, and the light emitted from the arbitrary two or more light emitting elements corresponds. 22. The method of manufacturing an optical transceiver module according to claim 21, wherein the array fiber is fixed at a position where the amount of light is reduced most by total reflection by the optical system inserted in the fiber of the array fiber.