JP2003273165A - Electronic component mounting apparatus and electronic component mounting method - Google Patents
Electronic component mounting apparatus and electronic component mounting methodInfo
- Publication number
- JP2003273165A JP2003273165A JP2002075757A JP2002075757A JP2003273165A JP 2003273165 A JP2003273165 A JP 2003273165A JP 2002075757 A JP2002075757 A JP 2002075757A JP 2002075757 A JP2002075757 A JP 2002075757A JP 2003273165 A JP2003273165 A JP 2003273165A
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- substrate
- mounting
- bonding material
- pressing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10W72/01215—
-
- H10W72/073—
Landscapes
- Supply And Installment Of Electrical Components (AREA)
- Wire Bonding (AREA)
Abstract
(57)【要約】
【課題】 搭載後の部品位置精度を確保することができ
る電子部品実装装置および電子部品実装方法を提供する
ことを目的とする。
【解決手段】 基板3の回路電極3aに電子部品15の
半田バンプ15aを補強樹脂27を介して着地させるこ
とによりこの電子部品15を基板3に実装する電子部品
実装において、基板3上に補強樹脂27を塗布した後
に、電子部品15を基板3に搭載する。この部品搭載に
引き続いて電子部品15の上にこの電子部品15を自重
により基板3に対して押し付ける押付部材16を載置す
る。これにより、補強樹脂27の塗布状態が不均一であ
っても、表面張力による位置ずれを押し付け力によって
防止して、搭載後の部品位置精度を確保することができ
る。
(57) [Summary] An object of the present invention is to provide an electronic component mounting apparatus and an electronic component mounting method capable of securing component positional accuracy after mounting. SOLUTION: In mounting the electronic component 15 on the substrate 3 by mounting the solder bump 15a of the electronic component 15 on the circuit electrode 3a of the substrate 3 via a reinforcing resin 27, the reinforcing resin is mounted on the substrate 3. After applying 27, the electronic component 15 is mounted on the substrate 3. Subsequent to the component mounting, a pressing member 16 for pressing the electronic component 15 against the substrate 3 by its own weight is placed on the electronic component 15. Thus, even if the application state of the reinforcing resin 27 is not uniform, the displacement due to the surface tension can be prevented by the pressing force, and the positional accuracy of the component after mounting can be secured.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、基板の回路電極に
電子部品の接続用電極を液状接合材を介して着地させる
ことによりこの電子部品を基板に実装する電子部品実装
装置および電子部品実装方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component mounting apparatus and an electronic component mounting method for mounting an electronic component on a substrate by landing a connecting electrode of the electronic component on a circuit electrode of the substrate via a liquid bonding material. It is about.
【0002】[0002]
【従来の技術】半導体チップなどの電子部品を基板に実
装する方法として、電子部品の接続用電極と基板の回路
電極を半田接合や導電性接着材によって接合する方法が
広く用いられている。これらの実装方法においては、い
ずれも電子部品の接続用電極と基板の回路電極との接合
部にクリーム半田、フラックス、導電性樹脂などの液状
接合材が供給される。これらの液状接合材の供給は電子
部品の基板への搭載に先立って予め行われ、例えば基板
の回路電極に予め液状接合材を塗布しておく方法や、電
子部品の接続用電極に液状接合材を転写する方法などが
用いられる。2. Description of the Related Art As a method of mounting an electronic component such as a semiconductor chip on a substrate, a method of joining a connecting electrode of the electronic component and a circuit electrode of the substrate by soldering or a conductive adhesive is widely used. In any of these mounting methods, a liquid bonding material such as cream solder, flux, or conductive resin is supplied to the bonding portion between the connection electrode of the electronic component and the circuit electrode of the substrate. The supply of these liquid bonding materials is performed in advance before mounting the electronic component on the substrate. For example, a method of applying the liquid bonding material to the circuit electrodes of the substrate in advance or the liquid bonding material for the connecting electrodes of the electronic components. Is used.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、電子機
器の小型化に伴って電子部品の部品サイズが微小化する
に伴い、上記電子部品の実装において部品位置ずれの不
具合が多発するようになっている。すなわち、部品搭載
動作においては電子部品の接続用電極は液状接合材を介
して着地することから、着地直後の電子部品はフローテ
ィング状態にあり、横方向の滑りを生じやすい。However, with the miniaturization of electronic devices and the miniaturization of the component size of electronic components, the problem of component misalignment frequently occurs in the mounting of the electronic components. . That is, in the component mounting operation, since the connecting electrode of the electronic component lands via the liquid bonding material, the electronic component immediately after landing is in a floating state and is likely to slide laterally.
【0004】このとき、液状接合材の塗布が不均一で塗
布量が部分的に偏っているような場合には、電子部品に
は液状接合材の表面張力によって横方向の力が作用す
る。そして、この力が電子部品の自重による移動抵抗よ
りも大きい場合には、電子部品が搭載時の着地位置から
横方向へスライド移動することによる位置ずれが生じ
る。前述のように近年電子部品の微細化によって部品の
自重が小さくなっていることから、搭載時の位置認識な
どの方法によって搭載位置精度を向上させても、液状接
合材の塗布状態のばらつきに起因する電子部品の位置ず
れによって搭載後の部品位置精度が確保されず、リフロ
ーなどの後工程において接合不良などの不具合を誘発す
る要因となっていた。At this time, if the application of the liquid bonding material is uneven and the application amount is partially uneven, a lateral force acts on the electronic component due to the surface tension of the liquid bonding material. If this force is larger than the movement resistance of the electronic component due to its own weight, the electronic component slides laterally from the landing position during mounting, resulting in positional displacement. As described above, the weight of electronic parts has become smaller due to the miniaturization of electronic parts in recent years.Therefore, even if the mounting position accuracy is improved by a method such as position recognition at the time of mounting, the variation in the coating state of the liquid bonding material Due to the displacement of the electronic components, the positional accuracy of the components after mounting cannot be ensured, which causes a defect such as a defective joint in a subsequent process such as reflow.
【0005】そこで本発明は、搭載後の部品位置精度を
確保することができる電子部品実装装置および電子部品
実装方法を提供することを目的とする。Therefore, an object of the present invention is to provide an electronic component mounting apparatus and an electronic component mounting method capable of ensuring the positional accuracy of components after mounting.
【0006】[0006]
【課題を解決するための手段】請求項1記載の電子部品
実装装置は、基板の回路電極に電子部品の接続用電極を
液状接合材を介して着地させることによりこの電子部品
を基板に実装する電子部品実装装置であって、電子部品
を供給する部品供給部と、この部品供給部から電子部品
を取り出し前記基板へ移送搭載する部品搭載手段と、基
板に搭載された電子部品の上にこの電子部品を自重によ
り基板に対して押し付ける押付部材を載置する押付部材
搭載手段と、この押付部材搭載手段に押付部材を供給す
る押付部材供給部とを備えた。According to another aspect of the present invention, there is provided an electronic component mounting apparatus for mounting an electronic component on a substrate by landing a connecting electrode of the electronic component on a circuit electrode of the substrate via a liquid bonding material. An electronic component mounting apparatus, which is a component supply unit for supplying an electronic component, a component mounting means for picking up an electronic component from the component supply unit and transferring and mounting the electronic component on the substrate, and the electronic component mounted on the substrate. The pressing member mounting means mounts a pressing member for pressing the component against the substrate by its own weight, and the pressing member supply unit that supplies the pressing member to the pressing member mounting means.
【0007】請求項2記載の電子部品実装装置は、請求
項1記載の電子部品実装装置であって、前記液状接合材
を前記電子部品の接続用電極に転写により供給する液状
接合材転写手段を備えた。An electronic component mounting apparatus according to a second aspect is the electronic component mounting apparatus according to the first aspect, further comprising liquid bonding material transfer means for supplying the liquid bonding material to the connection electrodes of the electronic component by transfer. Prepared
【0008】請求項3記載の電子部品実装装置は、請求
項1記載の電子部品実装装置であって、前記液状接合材
を前記基板の回路電極に塗布する液状接合材塗布手段を
備えた。An electronic component mounting apparatus according to a third aspect of the invention is the electronic component mounting apparatus according to the first aspect, further comprising a liquid bonding material applying means for applying the liquid bonding material to the circuit electrodes of the substrate.
【0009】請求項4記載の電子部品実装方法は、基板
の回路電極に電子部品の接続用電極を液状接合材を介し
て着地させることによりこの電子部品を基板に実装する
電子部品実装方法であって、部品供給部から電子部品を
取り出し基板へ移送搭載する部品搭載工程と、部品搭載
に引き続いて基板に搭載された電子部品の上にこの電子
部品を自重により基板に対して押し付ける押付部材を載
置する押付部材載置工程とを含む。An electronic component mounting method according to a fourth aspect is an electronic component mounting method for mounting an electronic component on a substrate by landing a connecting electrode of the electronic component on a circuit electrode of the substrate via a liquid bonding material. Then, the electronic component is taken out from the component supply unit and transferred to the substrate and mounted, and subsequently, after the component mounting, the pressing member for pressing the electronic component against the substrate by its own weight is mounted on the electronic component mounted on the substrate. And a pressing member placing step of placing.
【0010】請求項5記載の電子部品実装方法は、請求
項4記載の電子部品実装方法であって、前記搭載ヘッド
による基板への電子部品の搭載に先立って、前記液状接
合材を前記電子部品の接続用電極に転写により供給す
る。An electronic component mounting method according to a fifth aspect is the electronic component mounting method according to the fourth aspect, wherein the liquid bonding material is applied to the electronic component prior to mounting the electronic component on the substrate by the mounting head. It is supplied by transfer to the connection electrode of.
【0011】請求項6記載の電子部品実装方法は、請求
項4記載の電子部品実装方法であって、前記搭載ヘッド
による基板への電子部品の搭載に先立って、前記液状接
合材を前記基板の回路電極に塗布する。An electronic component mounting method according to a sixth aspect is the electronic component mounting method according to the fourth aspect, wherein the liquid bonding material is applied to the substrate prior to mounting the electronic component on the substrate by the mounting head. Apply to circuit electrodes.
【0012】本発明によれば、基板に搭載された電子部
品の上にこの電子部品を自重により基板に対して押し付
ける押付部材を載置することにより、液状接合材の塗布
状態の不均一に起因する位置ずれを防止して、搭載後の
部品位置精度を確保することができる。According to the present invention, a pressing member for pressing the electronic component against the substrate by its own weight is placed on the electronic component mounted on the substrate, which results in uneven application of the liquid bonding material. It is possible to prevent the positional deviation of the components, and to ensure the positional accuracy of the components after mounting.
【0013】[0013]
【発明の実施の形態】(実施の形態1)図1は本発明の
実施の形態1の電子部品実装システムの構成図、図2は
本発明の実施の形態1の電子部品実装装置の平面図、図
3は本発明の実施の形態1の電子部品実装装置の押付部
材供給部の機能説明図、図4、図5、図6は本発明の実
施の形態1の電子部品実装方法の工程説明図である。1 is a block diagram of an electronic component mounting system according to a first embodiment of the present invention, and FIG. 2 is a plan view of an electronic component mounting apparatus according to a first embodiment of the present invention. 3 is a functional explanatory view of a pressing member supply unit of the electronic component mounting apparatus according to the first embodiment of the present invention, and FIGS. 4, 5, and 6 are process explanations of the electronic component mounting method according to the first embodiment of the present invention. It is a figure.
【0014】まず図1を参照して、基板に電子部品を半
田接合により実装して実装基板を製造する電子部品実装
システムについて説明する。図1において電子部品実装
システムは、電子部品実装装置M1、リフロー装置M2
より構成される。電子部品実装装置M1は、回路電極が
形成された基板を搬送路上で搬送し、搬送路に設けられ
た実装ステージにてこの基板に電子部品を搭載する。リ
フロー装置M2には電子部品実装装置M1の搬送路と連
結された搬送機構が設けられており、リフロー炉内で電
子部品が搭載された基板を搬送しながら加熱することに
より、電子部品の接続用電極と基板の回路電極との接合
部の半田を溶融させて半田接合する。First, referring to FIG. 1, an electronic component mounting system for manufacturing a mounting substrate by mounting electronic components on a substrate by soldering will be described. In FIG. 1, the electronic component mounting system includes an electronic component mounting apparatus M1 and a reflow apparatus M2.
It is composed of The electronic component mounting apparatus M1 transports the substrate on which the circuit electrodes are formed on the transport path, and mounts the electronic component on the substrate by the mounting stage provided on the transport path. The reflow device M2 is provided with a transfer mechanism that is connected to the transfer path of the electronic component mounting device M1. The reflow device M2 is used for connecting electronic components by heating the substrate on which the electronic components are mounted while heating the substrate. The solder at the joint between the electrode and the circuit electrode on the substrate is melted and soldered.
【0015】次に、図2を参照して電子部品実装装置M
1について説明する。図2において、基台1の中央部に
はX方向に搬送路2が配設されている。搬送路2は上流
側装置(図示省略)から受け渡された基板3を装置内に
おいて搬送し、搬送路2の途中に設けられた実装ステー
ジにこの基板3を位置決めする。搬送路2の両側には、
上流側(図2において左側)から部品供給部4、押付部
材供給部6がそれぞれ配設されている。Next, referring to FIG. 2, an electronic component mounting apparatus M
1 will be described. In FIG. 2, a transport path 2 is arranged in the X direction at the center of the base 1. The transport path 2 transports a substrate 3 delivered from an upstream device (not shown) in the device, and positions the substrate 3 on a mounting stage provided in the transport path 2. On both sides of the transport path 2,
The component supply unit 4 and the pressing member supply unit 6 are arranged from the upstream side (left side in FIG. 2).
【0016】基台1のX方向の両端部には2つのY軸テ
ーブル8が配設されており、Y軸テーブル8にはX軸テ
ーブル9が架設されている。X軸テーブル9には移載ヘ
ッド10が装着されており、X軸テーブル9およびY軸
テーブル8を駆動することにより、移載ヘッド10はX
方向、Y方向に水平移動する。Two Y-axis tables 8 are arranged at both ends of the base 1 in the X direction, and an X-axis table 9 is installed on the Y-axis table 8. A transfer head 10 is attached to the X-axis table 9, and the transfer head 10 is moved to the X-axis table 9 by driving the X-axis table 9 and the Y-axis table 8.
Move horizontally in the Y direction.
【0017】部品供給部4には複数のテープフィーダ5
が並設されている。テープフィーダ5はテープに保持さ
れた電子部品を収納し、このテープをピッチ送りするこ
とにより移載ヘッド10によるピックアップ位置5aに
電子部品を供給する。電子部品15には、下面に接続用
電極としての半田バンプ15aが形成されており、移載
ヘッド10は吸着ノズル10aによりテープフィーダ5
のピックアップ位置5aから電子部品15を真空吸着し
てピックアップし、基板3上に移載搭載する。X軸テー
ブル9、Y軸テーブル8および移載ヘッド10は、部品
供給部4から電子部品を取り出して基板3へ移送搭載す
る部品搭載手段となっている。The component supply unit 4 has a plurality of tape feeders 5.
Are juxtaposed. The tape feeder 5 stores the electronic components held on the tape, and feeds the electronic components to the pickup position 5a by the transfer head 10 by pitch-feeding the tape. The electronic component 15 has solder bumps 15a as connecting electrodes formed on the lower surface thereof, and the transfer head 10 uses the suction nozzle 10a to feed the tape feeder 5 to the tape feeder 5.
The electronic component 15 is vacuum-sucked and picked up from the pickup position 5a, and transferred and mounted on the substrate 3. The X-axis table 9, the Y-axis table 8 and the transfer head 10 are component mounting means for taking out electronic components from the component supply unit 4 and transferring and mounting them on the substrate 3.
【0018】部品供給部4の下流に配置された押付部材
供給部6には、複数のバルクフィーダ7が並設されてい
る。図3に示すように、バルクフィーダ7は、バルク状
の押付部材16をホッパー状の収納容器7b内に収納
し、これらの押付部材16を搬送部7cによって順送り
することにより移載ヘッドによるピックアップ位置7a
に供給する。押付部材16は後述するように、基板3に
搭載された電子部品15の上に載置して用いる重り部材
であり、電子部品15上に載置することによりこの電子
部品15を自重により基板3に対して押し付ける機能を
有する。A plurality of bulk feeders 7 are arranged side by side in the pressing member supply section 6 arranged downstream of the component supply section 4. As shown in FIG. 3, the bulk feeder 7 stores the pressing members 16 in a bulk shape in a storage container 7b in a hopper shape, and sequentially feeds these pressing members 16 by a transfer unit 7c to pick up a pickup position by a transfer head. 7a
Supply to. As will be described later, the pressing member 16 is a weight member that is used by placing it on the electronic component 15 mounted on the substrate 3, and by placing the electronic component 15 on the electronic component 15 by its own weight. It has the function of pressing against.
【0019】移載ヘッド10はバルクフィーダ7のピッ
クアップ位置7aから吸着ノズル10aによりこの押付
部材16を真空吸着してピックアップし、基板3に搭載
された電子部品15上に押付部材16を載置する。X軸
テーブル9、Y軸テーブル8および移載ヘッド10は、
押付部材供給部6から押付部材16を取り出して、基板
3に搭載された電子部品15上に載置する押付部材載置
手段となっている。The transfer head 10 picks up the pressing member 16 by vacuum suction from the pickup position 7a of the bulk feeder 7 by the suction nozzle 10a, and mounts the pressing member 16 on the electronic component 15 mounted on the substrate 3. . The X-axis table 9, the Y-axis table 8 and the transfer head 10 are
The pressing member 16 is taken out from the pressing member supply unit 6 and serves as a pressing member mounting means for mounting the pressing member 16 on the electronic component 15 mounted on the substrate 3.
【0020】搬送路2と部品供給部4の間の移載ヘッド
10の移動経路には、ペースト供給部11、部品認識カ
メラ12が配設されている。ペースト供給部11は、回
転テーブル状のペースト貯溜容器を備えており、回転テ
ーブルの底面に所定膜厚のペースト塗膜を形成する。こ
こで用いられる液状接合材であるペーストは、熱硬化性
樹脂中に活性成分を含有させ、半田酸化膜の除去能力を
付与したものが用いられる。このペースト塗膜に対し
て、移載ヘッド10に保持された電子部品15を下降さ
せることにより、電子部品15の半田バンプ15aには
ペースト14(図4参照)が転写塗布により供給され
る。A paste supply unit 11 and a component recognition camera 12 are arranged on the moving path of the transfer head 10 between the transport path 2 and the component supply unit 4. The paste supply unit 11 includes a rotary table-shaped paste storage container, and forms a paste coating film having a predetermined thickness on the bottom surface of the rotary table. As the paste which is a liquid bonding material used here, a paste in which an active component is contained in a thermosetting resin and which has a capability of removing a solder oxide film is used. By lowering the electronic component 15 held by the transfer head 10 with respect to this paste coating film, the paste 14 (see FIG. 4) is supplied to the solder bumps 15a of the electronic component 15 by transfer coating.
【0021】従って、ペースト供給部11は、移載ヘッ
ド10による基板3への電子部品15の搭載に先立っ
て、電子部品15の接続用電極である半田バンプ15a
に液状接合材であるペースト14を転写により供給する
液状接合材転写手段となっている。なお、半田バンプ1
5aと基板3の回路電極3aとの接合部にペースト14
を供給する方法として、ペースト14を吐出するディス
ペンサ(図示省略)を用い、電子部品15の搭載に先立
って基板3の回路電極3a上に予めペースト14を塗布
するようにしても良い。この場合には、ディスペンサが
液状接合材塗布手段となる。Therefore, the paste supply unit 11 has the solder bumps 15a, which are the connecting electrodes of the electronic component 15, prior to the mounting of the electronic component 15 on the substrate 3 by the transfer head 10.
It serves as a liquid bonding material transfer means for supplying the paste 14 which is a liquid bonding material by transfer. Solder bump 1
5a to the circuit electrode 3a of the substrate 3 with a paste 14
As a method of supplying the paste, a dispenser (not shown) that discharges the paste 14 may be used, and the paste 14 may be applied in advance on the circuit electrode 3a of the substrate 3 prior to mounting the electronic component 15. In this case, the dispenser serves as the liquid bonding material applying means.
【0022】部品認識カメラ12は、部品供給部4から
電子部品15をピックアップした移載ヘッド10が上方
を通過する際に、吸着ノズル10aに保持された状態の
電子部品15を下方から撮像する。そして撮像結果を認
識処理することにより電子部品15の識別や位置検出が
行われる。The component recognition camera 12 takes an image of the electronic component 15 held by the suction nozzle 10a from below when the transfer head 10 picking up the electronic component 15 from the component supply unit 4 passes above. Then, the image pickup result is subjected to recognition processing to identify the electronic component 15 and detect the position thereof.
【0023】この電子部品実装装置は上記のように構成
されており、以下この電子部品実装装置を用いた電子部
品実装方法について、図4、図5、図6を参照して説明
する。移載ヘッド10は部品供給部4から吸着ノズル1
0aによって電子部品15をピックアップして取り出
し、図4(a)に示すように、ペースト供給部11上に
位置している。ペースト供給部11のペースト貯溜容器
11aの底面には、ペースト14が貯溜されている。ス
キージ11bに対してペースト貯溜容器11aが相対回
転することにより、ペースト貯溜容器11aの底面に
は、ペースト14の塗膜が形成されている。This electronic component mounting apparatus is configured as described above, and an electronic component mounting method using this electronic component mounting apparatus will be described below with reference to FIGS. 4, 5 and 6. The transfer head 10 moves from the component supply unit 4 to the suction nozzle 1
The electronic component 15 is picked up and taken out by 0a, and is positioned on the paste supply unit 11, as shown in FIG. The paste 14 is stored on the bottom surface of the paste storage container 11 a of the paste supply unit 11. By the relative rotation of the paste storage container 11a with respect to the squeegee 11b, a coating film of the paste 14 is formed on the bottom surface of the paste storage container 11a.
【0024】吸着ノズル10aをペースト貯溜容器11
aに対して上下動させることにより、図4(b)に示す
ように、電子部品15の半田バンプ15aの下面には液
状接合材であるペースト14が転写塗布により供給され
る(液状接合材供給工程)。なお、ペースト14の供給
において、ペースト14を吐出するディスペンサを用
い、電子部品15の搭載に先立って、基板3の回路電極
3a上に予めペースト14を供給するようにしても良
い。The suction nozzle 10a is connected to the paste storage container 11
By vertically moving with respect to a, as shown in FIG. 4B, the paste 14 which is a liquid bonding material is supplied by transfer coating to the lower surface of the solder bump 15a of the electronic component 15 (liquid bonding material supply). Process). In addition, when supplying the paste 14, a dispenser that discharges the paste 14 may be used, and the paste 14 may be supplied in advance onto the circuit electrodes 3 a of the substrate 3 before mounting the electronic component 15.
【0025】この後、ペースト塗布後の電子部品15を
基板3へ移送搭載する(部品搭載工程)。すなわち、移
載ヘッド10は部品認識カメラ12の上方を通過してこ
こで電子部品15の認識を行った後、基板3上に移動す
る。そして図4(c)に示すように、半田バンプ15a
を基板3に形成された回路電極3aに位置合わせした上
で、基板3に対して吸着ノズル10aを昇降させる。こ
れにより、半田バンプ15aは回路電極3aに着地す
る。After that, the electronic component 15 after the paste application is transferred and mounted on the substrate 3 (component mounting step). That is, the transfer head 10 passes above the component recognition camera 12, recognizes the electronic component 15 there, and then moves onto the substrate 3. Then, as shown in FIG. 4C, the solder bump 15a
Is aligned with the circuit electrode 3a formed on the substrate 3, and then the suction nozzle 10a is moved up and down with respect to the substrate 3. As a result, the solder bumps 15a land on the circuit electrodes 3a.
【0026】液状接合材供給工程における半田バンプ1
5aへのペースト14の供給状態は、必ずしも半田バン
プ15aの下端部にペースト14が均一に付着するとは
限らない。このため図6(a)に示すように、半田バン
プ15aが回路電極3aの上面に着地した状態における
ペースト14の量が片側に偏る場合がある。このように
ペースト14が偏在している場合には、半田バンプ15
aに対して作用する表面張力が均一とはならず、半田バ
ンプ15aに対して水平方向の力が働く。そしてファイ
ンピッチ部品のようにサイズが微小で重量が軽い電子部
品の場合には、この水平方向の力によって電子部品の位
置ずれが発生しやすい。そこで、本実施の形態では、以
下に説明する方法によってこの電子部品の位置ずれを防
止するようにしている。Solder bump 1 in the liquid bonding material supplying step
The state of supply of the paste 14 to the 5a does not always mean that the paste 14 is evenly attached to the lower ends of the solder bumps 15a. Therefore, as shown in FIG. 6A, the amount of the paste 14 in the state where the solder bump 15a lands on the upper surface of the circuit electrode 3a may be biased to one side. When the paste 14 is unevenly distributed in this way, the solder bump 15
The surface tension acting on a is not uniform, and a horizontal force acts on the solder bump 15a. In the case of an electronic component such as a fine pitch component having a small size and a light weight, the displacement of the electronic component is likely to occur due to the horizontal force. Therefore, in the present embodiment, the displacement of the electronic component is prevented by the method described below.
【0027】図5(a)に示すように、基板3に搭載さ
れた電子部品15の上方には、搭載後速やかに押付部材
供給部6から吸着ノズル10aによって押付部材16を
取り出した移載ヘッド10が移動する。そして吸着ノズ
ル10aが昇降することにより、図5(b)に示すよう
に、電子部品15上に押付部材16を載置する(押付部
材載置工程)。この押付部材載置は、部品搭載後極力速
やかに(例えば60秒以内)行われる。As shown in FIG. 5A, above the electronic component 15 mounted on the substrate 3, a transfer head is provided in which the pressing member 16 is taken out from the pressing member supply section 6 by the suction nozzle 10a immediately after mounting. 10 moves. Then, as the suction nozzle 10a moves up and down, as shown in FIG. 5B, the pressing member 16 is mounted on the electronic component 15 (pressing member mounting step). The placing of the pressing member is performed as quickly as possible after the components are mounted (for example, within 60 seconds).
【0028】これにより、電子部品15は押付部材16
の自重Wにより基板3に対して押し付けられる。この押
し付けにより、図6(b)に示すように半田バンプ15
aには、回路電極3aの表面に対して押し付ける力fが
作用し、ペースト14の偏在によって水平方向の力が働
いている場合にあっても、この押し付け力fにより半田
バンプ15aの位置ずれが防止される。As a result, the electronic component 15 is pressed by the pressing member 16
It is pressed against the substrate 3 by its own weight W. As a result of this pressing, as shown in FIG.
A force f pressing against the surface of the circuit electrode 3a acts on a, and even when a horizontal force is exerted due to uneven distribution of the paste 14, the pressing force f causes the displacement of the solder bump 15a. To be prevented.
【0029】このようにして電子部品15が搭載されさ
らにこの電子部品15上に押付部材16が載置された基
板3は、リフロー装置M2に送られる。そしてこの基板
3をを加熱することにより、図5(c)に示すように、
電子部品15の半田バンプ15aと基板3の回路電極3
aとの接合部の半田を溶融させて半田接合する(リフロ
ー工程)。The substrate 3 on which the electronic component 15 is mounted and the pressing member 16 is mounted on the electronic component 15 in this manner is sent to the reflow device M2. Then, by heating this substrate 3, as shown in FIG.
The solder bumps 15a of the electronic component 15 and the circuit electrodes 3 of the substrate 3
The solder at the joint with a is melted and soldered (reflow process).
【0030】このリフロー工程においては、半田バンプ
15aが溶融した後に冷却されて固化することにより、
図6(c)に示すように、回路電極3aの上面と半田接
合された半田接合部15a*が形成されるとともに、回
路電極3aとの接合部の周囲は、ペースト14が熱硬化
した補強樹脂部14*が形成される。このリフロー過程
において、電子部品15は押付部材16の自重によって
押し付けられていることから、半田バンプ15aの位置
ずれが防止され、良好な半田接合が実現される。In this reflow process, the solder bumps 15a are melted and then cooled and solidified,
As shown in FIG. 6C, a solder joint portion 15a * soldered to the upper surface of the circuit electrode 3a is formed, and the periphery of the joint portion to the circuit electrode 3a is surrounded by a reinforcing resin in which the paste 14 is thermoset. The part 14 * is formed. In this reflow process, the electronic component 15 is pressed by the weight of the pressing member 16, so that the displacement of the solder bumps 15a is prevented and good soldering is realized.
【0031】この後、リフロー装置M2から排出されて
常温に冷却された基板3は、押付部材回収部(図示省
略)に送られ、ここで図5(d)に示すように基板3を
傾斜させることにより、押付部材16を電子部品15の
上から落下させ回収する。回収された押付部材16は、
再び電子部品実装装置M1の押付部材供給部6に送ら
れ、再使用される。これにより、押付部材16の数に限
りがある場合でもそれを有効利用することができ、経済
的である。なお、押付部材回収部においては、基板3を
傾斜させる代わりに、エアブローによって押付部材16
を電子部品15上から除去する方法を用いても良い。After that, the substrate 3 discharged from the reflow device M2 and cooled to room temperature is sent to a pressing member collecting section (not shown), where the substrate 3 is tilted as shown in FIG. 5 (d). As a result, the pressing member 16 is dropped from the top of the electronic component 15 and collected. The pressing member 16 collected is
It is sent again to the pressing member supply unit 6 of the electronic component mounting apparatus M1 and is reused. As a result, even if the number of pressing members 16 is limited, they can be effectively used, which is economical. In the pressing member collecting section, instead of tilting the substrate 3, the pressing member 16 is blown by air blow.
It is also possible to use a method of removing the above from the electronic component 15.
【0032】(実施の形態2)図7(a)は本発明の実
施の形態2の電子部品実装装置の部分平面図、図7
(b)は本発明の実施の形態2の電子部品実装装置の樹
脂塗布部の正面図、図8は本発明の実施の形態2の電子
部品実装方法の工程説明図である。本実施の形態2は、
実施の形態1に示す電子部品実装装置M1の上流側に、
樹脂塗布部を付設し、電子部品の搭載に先立って基板に
補強樹脂を塗布するようにしたものである。(Second Embodiment) FIG. 7A is a partial plan view of an electronic component mounting apparatus according to a second embodiment of the present invention.
FIG. 8B is a front view of the resin coating portion of the electronic component mounting apparatus according to the second embodiment of the present invention, and FIG. 8 is a process explanatory diagram of the electronic component mounting method according to the second embodiment of the present invention. In the second embodiment,
On the upstream side of the electronic component mounting apparatus M1 shown in the first embodiment,
A resin coating section is additionally provided, and the reinforcing resin is coated on the substrate before mounting the electronic component.
【0033】図7(a)、(b)において、電子部品実
装装置M1の上流には、基板3に補強樹脂を塗布する樹
脂塗布部20が連結されている。樹脂塗布部20の基台
21上には、基板3を搬送する搬送路22が設けられて
おり、搬送路22は電子部品実装装置M1の搬送路2と
連結されている。基台21上にはY軸テーブル24およ
びX軸テーブル25が設けられており、X軸テーブル2
5にはディスペンサ26が装着されている。Y軸テーブ
ル24およびX軸テーブル25を駆動することにより、
ディスペンサ26は水平移動し、内部に貯留された補強
樹脂を基板3上に塗布する。In FIGS. 7A and 7B, a resin coating section 20 for coating the substrate 3 with a reinforcing resin is connected upstream of the electronic component mounting apparatus M1. A transport path 22 for transporting the substrate 3 is provided on the base 21 of the resin coating section 20, and the transport path 22 is connected to the transport path 2 of the electronic component mounting apparatus M1. A Y-axis table 24 and an X-axis table 25 are provided on the base 21.
A dispenser 26 is attached to the device 5. By driving the Y-axis table 24 and the X-axis table 25,
The dispenser 26 horizontally moves to apply the reinforcing resin stored therein onto the substrate 3.
【0034】次に図8を参照して、本発明の一実施の形
態の電子部品実装方法について説明する。図8(a)に
おいて、基板3は実施の形態1に示す基板3と同様であ
り、上面には回路電極3aが形成されている。基板3に
は、回路電極3aを覆って樹脂塗布部20のディスペン
サ26によって液状接合材である補強樹脂27が塗布さ
れる。本実施の形態2においては、樹脂塗布部20が基
板3の回路電極3aに液状接合材を塗布する液状接合材
塗布手段となっている。この樹脂塗布において、基板3
に塗布された補強樹脂27の分布は必ずしも均一とはな
らず、ここに示す例では、矢印a側に偏って塗布されて
いる。Next, an electronic component mounting method according to an embodiment of the present invention will be described with reference to FIG. In FIG. 8A, the substrate 3 is the same as the substrate 3 shown in the first embodiment, and the circuit electrode 3a is formed on the upper surface. A reinforcing resin 27, which is a liquid bonding material, is applied to the substrate 3 by the dispenser 26 of the resin application unit 20 so as to cover the circuit electrodes 3a. In the second embodiment, the resin coating section 20 serves as a liquid bonding material coating means for coating the circuit electrode 3a of the substrate 3 with the liquid bonding material. In this resin application, the substrate 3
The distribution of the reinforcing resin 27 applied to the above is not necessarily uniform, and in the example shown here, the reinforcing resin 27 is applied to the arrow a side.
【0035】この後、図8(b)に示すように、補強樹
脂27が塗布された基板3には、実施の形態1と同様の
方法(図4(a)、(b)参照)で半田バンプ15aに
ペースト14が塗布された電子部品15が搭載され、図
8(c)に示すように、半田バンプ15aが回路電極3
a上に着地する。このとき上述のように、基板3上の補
強樹脂27の塗布量は矢印a側に偏っていることから、
図8(d)に示すように、電子部品15には補強樹脂2
7の表面張力によって水平方向の力が作用する。Thereafter, as shown in FIG. 8B, the substrate 3 coated with the reinforcing resin 27 is soldered by the same method as that of the first embodiment (see FIGS. 4A and 4B). The electronic component 15 in which the paste 14 is applied to the bump 15a is mounted, and the solder bump 15a is connected to the circuit electrode 3 as shown in FIG. 8C.
Land on a. At this time, as described above, since the coating amount of the reinforcing resin 27 on the substrate 3 is biased toward the arrow a side,
As shown in FIG. 8D, the electronic component 15 includes a reinforcing resin 2
The surface tension of 7 causes a horizontal force to act.
【0036】このような場合にあっても、実施の形態1
と同様に、搭載後の電子部品15の上面には、押付部材
16が速やかに載置されることから、電子部品15は押
付部材16の自重Wにより基板3に対して押し付けられ
る。そしてこの押し付けにより、電子部品15の位置ず
れが防止される。なお上記実施の形態2においては、ペ
ースト14の供給を省略してもよい。Even in such a case, the first embodiment
Similarly, since the pressing member 16 is quickly placed on the upper surface of the electronic component 15 after mounting, the electronic component 15 is pressed against the substrate 3 by the weight W of the pressing member 16. This pressing prevents the electronic component 15 from being displaced. In the second embodiment, the supply of paste 14 may be omitted.
【0037】このように、上記実施の形態1,2によれ
ば、自重の小さい微小部品を液状接合材を介して搭載す
る場合において、液状接合材の塗布状態が不均一であっ
ても、押付部材の押し付け力によって横方向の位置ずれ
を防止することができ、搭載後の部品位置精度を確保し
て、リフローなどの後工程における不具合を防止するこ
とができる。As described above, according to the first and second embodiments, when a minute component having a small weight is mounted via the liquid bonding material, even if the application state of the liquid bonding material is uneven, the pressing is performed. It is possible to prevent lateral displacement due to the pressing force of the member, ensure the positional accuracy of components after mounting, and prevent problems in post-processes such as reflow.
【0038】なお上記実施の形態では、接続用電極が電
子部品の下面に形成された半田バンプである例を示した
が、接続用電極の形態は半田バンプに限定されず、接続
用電極を液状接合材を介して搭載する形態であれば本発
明を適用することができる。In the above embodiment, the example in which the connecting electrode is the solder bump formed on the lower surface of the electronic component has been described, but the form of the connecting electrode is not limited to the solder bump, and the connecting electrode is a liquid. The present invention can be applied as long as it is mounted via a bonding material.
【0039】[0039]
【発明の効果】本発明によれば、基板に搭載された電子
部品の上にこの電子部品を自重により基板に対して押し
付ける押付部材を載置することにより、液状接合材の塗
布状態の不均一に起因する位置ずれを防止して、搭載後
の部品位置精度を確保することができる。According to the present invention, a pressing member for pressing the electronic component against the substrate by its own weight is placed on the electronic component mounted on the substrate, so that the application state of the liquid bonding material is non-uniform. It is possible to prevent the positional deviation due to, and to ensure the positional accuracy of components after mounting.
【図1】本発明の実施の形態1の電子部品実装システム
の構成図FIG. 1 is a configuration diagram of an electronic component mounting system according to a first embodiment of the present invention.
【図2】本発明の実施の形態1の電子部品実装装置の平
面図FIG. 2 is a plan view of the electronic component mounting apparatus according to the first embodiment of the present invention.
【図3】本発明の実施の形態1の電子部品実装装置の押
付部材供給部の機能説明図FIG. 3 is a functional explanatory diagram of a pressing member supply unit of the electronic component mounting apparatus according to the first embodiment of the present invention.
【図4】本発明の実施の形態1の電子部品実装方法の工
程説明図FIG. 4 is a process explanatory view of the electronic component mounting method according to the first embodiment of the present invention.
【図5】本発明の実施の形態1の電子部品実装方法の工
程説明図FIG. 5 is a process explanatory diagram of the electronic component mounting method according to the first embodiment of the present invention.
【図6】本発明の実施の形態1の電子部品実装方法の工
程説明図FIG. 6 is a process explanatory diagram of the electronic component mounting method according to the first embodiment of the present invention.
【図7】(a)本発明の実施の形態2の電子部品実装装
置の部分平面図
(b)本発明の実施の形態2の電子部品実装装置の樹脂
塗布部の正面図FIG. 7A is a partial plan view of the electronic component mounting apparatus according to the second embodiment of the present invention. FIG. 7B is a front view of the resin coating section of the electronic component mounting apparatus according to the second embodiment of the present invention.
【図8】本発明の実施の形態2の電子部品実装方法の工
程説明図FIG. 8 is a process explanatory diagram of an electronic component mounting method according to a second embodiment of the present invention.
M1 電子部品実装装置 M2 リフロー装置 3 基板 4 部品供給部 6 押付部材供給部 10 移載ヘッド 11 ペースト供給部 14 ペースト 15 電子部品 15a 半田バンプ 16 押付部材 20 樹脂塗布部 M1 electronic component mounting device M2 reflow equipment 3 substrates 4 Parts supply department 6 Pressing member supply section 10 Transfer head 11 Paste supply section 14 paste 15 Electronic components 15a Solder bump 16 Pressing member 20 Resin coating part
フロントページの続き (72)発明者 前田 憲 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 5E313 AA03 AA11 CC03 EE24 EE38 FF24 FF28 FG05 5F044 KK02 LL01 PP17 Continued front page (72) Inventor Ken Maeda 1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric Sangyo Co., Ltd. F term (reference) 5E313 AA03 AA11 CC03 EE24 EE38 FF24 FF28 FG05 5F044 KK02 LL01 PP17
Claims (6)
液状接合材を介して着地させることによりこの電子部品
を基板に実装する電子部品実装装置であって、電子部品
を供給する部品供給部と、この部品供給部から電子部品
を取り出し前記基板へ移送搭載する部品搭載手段と、基
板に搭載された電子部品の上にこの電子部品を自重によ
り基板に対して押し付ける押付部材を載置する押付部材
搭載手段と、この押付部材搭載手段に押付部材を供給す
る押付部材供給部とを備えたことを特徴とする電子部品
実装装置。1. An electronic component mounting apparatus for mounting an electronic component on a substrate by landing a connecting electrode of the electronic component on a circuit electrode of the substrate via a liquid bonding material, and supplying the electronic component. Part, component mounting means for picking up an electronic component from the component supply part and transferring and mounting it on the substrate, and a pressing member for pressing the electronic component against the substrate by its own weight on the electronic component mounted on the substrate. An electronic component mounting apparatus comprising: a pressing member mounting means; and a pressing member supply section that supplies the pressing member to the pressing member mounting means.
極に転写により供給する液状接合材転写手段を備えたこ
とを特徴とする請求項1記載の電子部品実装装置。2. The electronic component mounting apparatus according to claim 1, further comprising liquid bonding material transfer means for supplying the liquid bonding material to the connection electrode of the electronic component by transfer.
布する液状接合材塗布手段を備えたことを特徴とする請
求項1記載の電子部品実装装置。3. The electronic component mounting apparatus according to claim 1, further comprising a liquid bonding material applying unit that applies the liquid bonding material to the circuit electrodes of the substrate.
液状接合材を介して着地させることによりこの電子部品
を基板に実装する電子部品実装方法であって、部品供給
部から電子部品を取り出し基板へ移送搭載する部品搭載
工程と、部品搭載に引き続いて基板に搭載された電子部
品の上にこの電子部品を自重により基板に対して押し付
ける押付部材を載置する押付部材載置工程とを含むこと
を特徴とする電子部品実装方法。4. An electronic component mounting method for mounting an electronic component on a substrate by landing a connecting electrode of the electronic component on a circuit electrode of the substrate via a liquid bonding material, wherein the electronic component is mounted on the substrate. A component mounting process of transferring and mounting to a substrate, and a mounting member mounting process of mounting a pressing member for pressing the electronic component against the substrate by its own weight on the electronic component mounted on the substrate subsequent to the component mounting. An electronic component mounting method comprising:
搭載に先立って、前記液状接合材を前記電子部品の接続
用電極に転写により供給することを特徴とする請求項4
記載の電子部品実装方法。5. The liquid bonding material is transferred and supplied to a connecting electrode of the electronic component before the mounting of the electronic component on the substrate by the mounting head.
Electronic component mounting method described.
搭載に先立って、前記液状接合材を前記基板の回路電極
に塗布することを特徴とする請求項4記載の電子部品実
装方法。6. The electronic component mounting method according to claim 4, wherein the liquid bonding material is applied to the circuit electrodes of the substrate prior to mounting the electronic component on the substrate by the mounting head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002075757A JP3666468B2 (en) | 2002-03-19 | 2002-03-19 | Electronic component mounting apparatus and electronic component mounting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002075757A JP3666468B2 (en) | 2002-03-19 | 2002-03-19 | Electronic component mounting apparatus and electronic component mounting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003273165A true JP2003273165A (en) | 2003-09-26 |
| JP3666468B2 JP3666468B2 (en) | 2005-06-29 |
Family
ID=29204748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002075757A Expired - Fee Related JP3666468B2 (en) | 2002-03-19 | 2002-03-19 | Electronic component mounting apparatus and electronic component mounting method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3666468B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013084399A1 (en) * | 2011-12-08 | 2013-06-13 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| WO2013084398A1 (en) * | 2011-12-08 | 2013-06-13 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| WO2013094098A1 (en) * | 2011-12-22 | 2013-06-27 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| WO2014030222A1 (en) * | 2012-08-22 | 2014-02-27 | 富士機械製造株式会社 | Electronic component mounting machine |
| JP2015220353A (en) * | 2014-05-19 | 2015-12-07 | 富士通株式会社 | Electronic component mounting method, solder paste transfer method, and electronic component mounting apparatus |
| DE112018001741T5 (en) | 2017-03-30 | 2019-12-19 | Mitsubishi Electric Corporation | Semiconductor device Method for its production and power converter device |
| US11398447B2 (en) | 2017-12-13 | 2022-07-26 | Mitsubishi Electric Corporation | Semiconductor device and method for producing semiconductor device |
-
2002
- 2002-03-19 JP JP2002075757A patent/JP3666468B2/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103329645B (en) * | 2011-12-08 | 2016-04-06 | 松下知识产权经营株式会社 | Electronic component hookup wire and electronic component mounting method |
| WO2013084399A1 (en) * | 2011-12-08 | 2013-06-13 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| CN103329645A (en) * | 2011-12-08 | 2013-09-25 | 松下电器产业株式会社 | Electronic component mounting line and electronic component mounting method |
| US9439335B2 (en) | 2011-12-08 | 2016-09-06 | Panasonic Intellectual Property Management Co., Ltd. | Electronic component mounting line and electronic component mounting method |
| WO2013084398A1 (en) * | 2011-12-08 | 2013-06-13 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| US9125329B2 (en) | 2011-12-08 | 2015-09-01 | Panasonic Intellectual Property Management Co., Ltd. | Electronic component mounting line and electronic component mounting method |
| WO2013094098A1 (en) * | 2011-12-22 | 2013-06-27 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| US8673685B1 (en) | 2011-12-22 | 2014-03-18 | Panasonic Corporation | Electronic component mounting line and electronic component mounting method |
| JP5519866B2 (en) * | 2011-12-22 | 2014-06-11 | パナソニック株式会社 | Electronic component mounting line and electronic component mounting method |
| WO2014030222A1 (en) * | 2012-08-22 | 2014-02-27 | 富士機械製造株式会社 | Electronic component mounting machine |
| JPWO2014030222A1 (en) * | 2012-08-22 | 2016-07-28 | 富士機械製造株式会社 | Electronic component mounting machine |
| JP2015220353A (en) * | 2014-05-19 | 2015-12-07 | 富士通株式会社 | Electronic component mounting method, solder paste transfer method, and electronic component mounting apparatus |
| DE112018001741T5 (en) | 2017-03-30 | 2019-12-19 | Mitsubishi Electric Corporation | Semiconductor device Method for its production and power converter device |
| US11183479B2 (en) | 2017-03-30 | 2021-11-23 | Mitsubishi Electric Corporation | Semiconductor device, method for manufacturing the same, and power conversion device |
| US11398447B2 (en) | 2017-12-13 | 2022-07-26 | Mitsubishi Electric Corporation | Semiconductor device and method for producing semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3666468B2 (en) | 2005-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7712652B2 (en) | Component mounting apparatus and component mounting method | |
| US6193136B1 (en) | Component mounting method and apparatus | |
| CN102388687B (en) | Electronic component mounting system and electronic component mounting method | |
| JP4998503B2 (en) | Electronic component mounting system and electronic component mounting method | |
| KR101053091B1 (en) | Manufacturing Method of Mounting Board | |
| US7281322B2 (en) | Component mounting method | |
| JP2003273165A (en) | Electronic component mounting apparatus and electronic component mounting method | |
| US7290331B2 (en) | Component mounting apparatus and component mounting method | |
| JP3196596B2 (en) | Electronic component manufacturing method and electronic component mounting method | |
| JP3121971B2 (en) | Adhesive application method and apparatus and component mounting method | |
| JP2003060396A (en) | Electronic component mounting apparatus and electronic component mounting method | |
| JPH0964521A (en) | Solder supply device and solder supply method | |
| JP7462151B2 (en) | Component mounting device, component mounting system, and component mounting method | |
| JP3925252B2 (en) | Electronic component mounting method | |
| JP2019067991A (en) | Ball arranging mask, ball mounting device, and ball mounting method | |
| JP3552574B2 (en) | Apparatus and method for mounting conductive ball | |
| JP4702237B2 (en) | Electronic component mounting apparatus and electronic component mounting method | |
| JP4743059B2 (en) | Electronic component mounting system and electronic component mounting method | |
| US20240314939A1 (en) | Method of bonding column type deposits | |
| JPH11145193A (en) | Solder bump formation method | |
| JPH07212015A (en) | Electronic component mounting method and electronic component mounting machine | |
| JPH11214569A (en) | Bump forming method and apparatus | |
| JPH09260825A (en) | Solder feeder | |
| JPH1154554A (en) | Processing method for mounting electronic components on board | |
| JP2002026510A (en) | Device and method for mounting electronic parts |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040217 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20041208 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20041221 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050217 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20050315 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20050328 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080415 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090415 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100415 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110415 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120415 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130415 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130415 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140415 Year of fee payment: 9 |
|
| LAPS | Cancellation because of no payment of annual fees |