JP2003262661A - Suction pad, suction hand and IC test handler equipped with these - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a suction pad capable of surely sucking an object to be sucked (for example, an IC) whose surface to be sucked is inclined, and a suction hand and an IC provided with the same.
The purpose is to get a test handler. SOLUTION: An adsorption surface for adsorbing an object to be adsorbed is tiltably or elastically supported. In other words, the surface copying mechanism includes a suction unit provided with a suction surface, a surface imitation mechanism for elastically supporting the suction unit in a tiltable manner, and a connecting unit for installing the surface imitation mechanism on the suction hand. As bellows. Further, a suction portion provided with a suction surface, and a connecting portion for tiltably supporting the suction portion and for setting the suction portion to the suction hand are provided, and a male lock provided on the connection portion is provided. The female locking part provided on the suction part is slidably mounted on the part.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction pad, a suction hand, and an IC test handler, and more particularly, to a suction pad which surely sucks an IC placed on a tilt and prevents mis-suction of a tray, The suction hand with this installed,
And an IC test handler having the same.

[0002]

2. Description of the Related Art (Horizontal transfer type test handler) FIG.
FIG. 4 is a plan view showing a configuration of a conventional horizontal transfer type test handler disclosed in Japanese Patent Laid-Open No. 2000-117676. In FIG. 12, 1A is a supply unit, 1B is a preheating unit, 1C is a measuring unit, and 1D is a containing unit. Also, 1E
Is a supply hand, 1F is a storage hand, 1G is a loader, 1H
Is an unloader. The horizontal transfer type test handler 1
By moving an IC carrier (not shown) horizontally
Carry C. The supply hand 1E includes a plurality of suction mechanisms 6 for supply described later. The storage hand 1F includes a plurality of suction mechanisms 6 for storage. The loader 1G is the IC 5 under test.
The trays containing the are loaded. Unloader 1H
You are loading an empty tray.

FIG. 13 is a perspective view of a tray used in the loader 1G and unloader 1H of FIG. As shown in FIG. 13, the tray 4 has a recess 4 for accommodating the IC 5.
a is formed in plural vertically and horizontally (here, five in the vertical direction and four in the horizontal direction). Next, the operation of the horizontal transfer type test handler 1 of FIG. 12 will be described. The tray 4 loaded with the untested ICs 5 is placed on the loader 1G by the operator.
The supply hand 1E sequentially transfers the IC 5 from the uppermost tray 4 of the loader 1G to the IC carrier located in the supply unit 1A. The IC carrier, which accommodates a predetermined number of ICs 5, is the supply unit 1.
Move from A to preheat section 1B. Preheat part 1B
When the IC5 reaches a constant temperature at, the IC carrier moves to the measuring unit 1C.

After the IC5 is tested by the measuring section 1C, the IC
The carrier moves to the accommodation unit 1D. In the accommodation unit 1D, the accommodation hand 1F loads the IC 5 into the unloader 1 based on the measurement result.
Sort and transfer to tray 4 of H. The IC carrier emptied in the accommodation section 1F returns to the supply section 1A. In this way, the IC carrier is composed of the supply unit 1A, the preheat unit 1B, the measuring unit 1C, and the like.
The test handler 1 is circulated in the order of the accommodation section 1D and the supply section 1A.

(IC suction mechanism) FIG.
1 shows a conventional IC suction mechanism disclosed in Japanese Patent Application Laid-Open No. 0-117676, (a) is a front view thereof, and (b) is a longitudinal sectional view thereof. In FIG. 14, 6 is an IC suction mechanism,
6A is a suction pad, 6B is a shaft (hollow shaft),
6C is a compression coil spring, 6D is a linear motion bearing, 6E is a holder, and 6F is a stopper. The IC suction mechanism 6
Supply hand 1 of horizontal transfer type test handler 1 of FIG.
It is provided in E or the accommodation hand 1F.

At the lower end of the hollow shaft 6B, a suction pad 6A of a hollow cone formed of an elastic material such as rubber is attached. A stopper 6F having a step 6T projecting downward so as to cover the side of the suction pad 6A is attached to the lower end of the shaft 6B. The shaft portion of the shaft 6B is slidably held by the linear motion bearing 6D contained in the holder 6E. The compression coil spring 6C wound around the shaft portion of the shaft 6B includes a stopper 6F and a holder 6E.
It is arranged in between and urges the stopper 6F and the holder 6E to separate from each other. A flange 6U is formed on the upper end of the shaft 6B to restrict the movement of the shaft 6B.

Further, the lower surface 6S of the stopper 6F has at least a width that does not bury it in the recess 4a (FIG. 13) of the tray 4. From the lower surface 6S of the stopper 6F to the suction surface (IC contact surface) of the suction pad 6A. ) Is shorter than the depth of the concave portion 4a of the tray 4. In addition, the stopper 6
The lower end 6T of the stepped portion of F is the suction surface (IC
The lower end 6T of the step is located above the contact surface).
It is configured not to contact C5. A tube (not shown) is attached to the shaft 6B in a state of communicating with the hollow portion 6W, and a vacuum pump (not shown) is connected to the end of the tube as suction means. That is, with the suction pad 6A in contact with the IC 5, the vacuum pump reduces the pressure inside the suction pad 6A, so that the IC
5 is adsorbed on the adsorption pad 6A.

Further, a pressure sensor capable of detecting the height of the air pressure in the suction passage of the vacuum pump (suction means) (for example, the hollow portion 6W of the shaft 6B, the tube, etc.),
IC detection means for detecting the presence or absence of the IC 5 in the recess 4a of the tray 4 based on the detection of the pressure sensor is provided. The pressure sensor is installed at a position capable of detecting the height of the air pressure in the suction passage of the vacuum pump, and the pressure sensor outputs the detection result to the IC detection means.

Therefore, when the holder is lowered with no IC in the recess of the tray, the stopper 6F attached to the hollow shaft contacts the upper end surface of the tray,
Since the downward movement of the hollow shaft is stopped, the suction pad is prevented from coming into contact with the bottom surface of the concave portion of the tray.
Therefore, even when the holder is lowered without the IC in the recess of the tray, the suction pad does not contact the bottom surface of the recess of the tray, and the suction pad does not suck the tray.

Therefore, it is possible to eliminate a problem such as erroneous recognition caused by the suction pad sucking the tray,
The efficiency of running the test handler is improved. Further, since the pressure sensor for detecting the height of the air pressure in the suction passage of the suction means is provided, the presence or absence of the IC in the concave portion of the tray can be detected based on the detection of the pressure sensor.

[0011]

The IC suction mechanism in the conventional horizontal transfer type test handler as described above has a suction pad 6A (an elastic body such as rubber) attached to the lower end of the hollow shaft 6B which vertically moves up and down. Since the hollow cone formed in 1) is directly attached, there are the following problems.

When the upper surface of the IC to be adsorbed is tilted (when the IC is slightly floating due to being locked to the side wall of the pocket portion of the tray, when the tray itself is placed while tilted, When the tray itself is deformed (warping, bending, etc.), the entire circumference of the tip of the suction pad 6A is IC.
Since it does not come into contact with the upper surface of the suction pad 6A, even if an attempt is made to reduce the pressure inside the suction pad 6A, air invades and the IC cannot be sucked.

When the upper surface of the IC to be sucked is tilted, air is sucked into the suction pad non-uniformly (at a portion where the air enters in the circumferential direction and a portion where the air does not enter when sucking). Therefore, the IC rotates and collides with the tray to damage the IC, and the impact or vibration of the collision causes the ICs stored in other pockets to dissipate (jump out). In addition, the installation position of the tray is displaced.

Further, when the upper surface of the IC to be sucked is inclined, the entire circumference of the tip edge of the suction pad 6A is the IC.
Since it does not come into contact with the upper surface of the suction pad 6A, even if an attempt is made to create a negative pressure in the suction pad 6A, air invades and the pressure measured by the pressure sensor does not drop to a predetermined negative pressure.
The problem of erroneously recognizing that C is not stored.

Further, a stopper 6F which contacts the upper end surface of the tray is pressed downward by a compression coil spring 6C. Therefore, the stopper 6F includes the repulsive force of the compression coil spring 6C, the weight of the suction pad 6A, and the stopper 6F.
The function as a shock absorber is lacking because it is the first to rise when it is pushed up by a force that overcomes the combined force of F's own weight and the shaft (hollow shaft) 6B's own weight. Therefore, there are the following problems.

Since the impact of the stopper coming into contact with the tray is not relieved, the impact or vibration at this time causes the IC stored in the other pocket to dissipate (jump out) from the pocket. Furthermore, there is the problem that the posture shifts (tilts or rotates) in the pocket even if it does not dissipate (do not jump out). In particular, since the number of small and thin ICs has recently increased, the dissipation (jumping out) has become remarkable.

Furthermore, in order to reduce the impact, when the lowering speed of the suction pad is reduced or the pressing amount is reduced, the stability of the suction is lowered, and the processing of the horizontal transfer test handler is performed. The problem of reduced ability.

The present invention has been made in order to solve such a problem, and is a suction pad which supports the suction surface of a suction pad installed in a suction hand so as to be tiltable and shock-absorbable, and the suction pad. It is an object to obtain an installed suction hand and an IC test handler equipped with the suction hand.

[0019]

The suction pad according to the present invention is as follows. (1) The adsorption surface for adsorbing an object to be adsorbed is configured to be tiltable. Therefore, even if the attracted surface of the attracted object (for example, the upper surface of the IC) is inclined, the adsorption pad itself is inclined (so-called swinging) following the inclined surface, so that the adsorption can be reliably performed. . Therefore, for example, when an IC is stored in a pocket portion of the tray in an inclined manner (when it is locked to the side surface of the pocket portion), when the tray storing the attracted object is deformed (warping, bending, etc.), Alternatively, even when the tray itself is not installed horizontally, the IC can be surely adsorbed.

(2) The adsorption surface for adsorbing the object to be adsorbed is elastically supported. Therefore, when the suction surface comes into contact with the suction surface of the suction object (for example, the upper surface of the IC), the impact of the collision is mitigated, so that the suction object moves or the suction object stored in another tray is sucked. There is no dissipation (jumping out). Therefore, it is possible to accelerate the descending speed of the suction pad or to shorten the deceleration time when descending (increasing the deceleration acceleration). For example, in an IC test handler equipped with a suction hand equipped with the suction pad, the efficiency of IC inspection can be improved. In particular, it is effective in the inspection of small and thin ICs.

(3) An adsorption pad characterized in that an adsorption surface for adsorbing an object to be adsorbed is elastically supported by a member having an impact absorption performance. Therefore, when the suction surface comes into contact with the suction surface of the suction object (for example, the upper surface of the IC), the impact of the collision is mitigated, and the impact of the collision is quickly attenuated.

(4) In order to install a suction portion on which a suction surface for sucking an object to be sucked is installed, a surface copying mechanism for elastically supporting the suction portion so as to be tiltable, and the surface copying mechanism on the suction pad support means. And the connecting portion, the suction portion, the surface copying mechanism, and the connecting portion are separately formed and joined to each other. Therefore, since each part can be manufactured separately, the material can be selected for each part, and the mold for manufacturing can be simplified, so that the manufacturing cost can be reduced. it can. Further, if the joint is made detachable, when the suction surface of the suction portion is worn, only the suction portion can be replaced, so the response when such wear occurs is speeded up, and the suction pad is installed. It is possible to improve the efficiency of IC inspection in an IC test handler equipped with a suction hand. Further, since the amount of spare parts can be adjusted according to the degree of wear of each part, the stockpile cost of spare parts can be kept low.

(5) In (4), the surface copying mechanism is a bellows. Therefore, since the surface copying mechanism has a bellows shape (it can be folded in an accordion shape), the weight can be reduced. Also,
A predetermined tilting performance and shock absorbing performance can be provided.

(6) In (5), the bellows is
It is characterized in that the diameter is increased toward the suction portion. Therefore, the surface copying mechanism (bellows, bellows, that is, foldable in an accordion shape) has a predetermined tilting performance, and more stable suction is possible.

(7) In the above (5) or (6),
A constricted portion is provided on an outer surface of the suction portion, and the bellows is fitted to the constricted portion. Therefore, since the structure of the suction part is simple and it is not necessary to provide a special locking means for the surface copying mechanism (bellows) (only the bellows are covered on the outside), the structure of the suction pad can be simplified. . Further, since the suction part can be quickly replaced, the efficiency of the IC inspection in the IC test handler including the suction hand having the suction pad can be improved.

(8) In the above (5) or (6),
A recess having an enlarged bottom is provided on the upper surface of the suction unit, and the bellows is fitted in the recess. Therefore, the structure of the suction part is simple, and it is not necessary to provide a special locking means for the surface copying mechanism (bellows) (just insert the bellows inside), so that the structure of the suction pad can be simplified. . Further, the outer diameter of the surface copying mechanism can be reduced. Furthermore, since the suction unit can be quickly replaced, the efficiency of IC inspection in the IC test handler including the suction hand in which the suction pad is installed can be improved.

(9) In any one of the above (4) to (8), the surface copying mechanism is formed of a flexible material having airtightness. Therefore, it is not necessary to separately install an air tube (supplying a predetermined internal pressure to the suction surface) for sending air from the connecting portion to the suction portion, so that the number of parts can be suppressed and the structure of the suction pad is simple. become. That is, the surface copying mechanism exhibits an air tube, a shock absorber, and a swing function.

(10) In any one of the above (4) to (8), the surface copying mechanism is formed by a combination of an airtight tube having flexibility and an elastic material. is there. Therefore, the range of selection of materials and mechanisms for forming the surface copying mechanism is widened, and more reliable suction, shock absorption, and weight reduction can be achieved. The airtight tube is a film material having airtightness and flexibility, and may be attached to or coated on the inner surface or outer surface of an elastic material (lacking airtightness).

(11) The suction pad supports the suction portion on which a suction surface for adsorbing an object to be adsorbed and the suction portion are tiltably supported, and the suction portion is installed on the suction pad support means. A connecting portion, and a male locking portion whose upper end is a spherical surface is provided on the connecting portion, and a lower end portion of the protruding portion has an enlarged diameter. A female locking portion, which is a diametrical concave portion and whose ceiling surface is a part of a spherical surface, is provided, and the female locking portion is slidably mounted on the male locking portion. It is a feature. Therefore, it is possible to tilt the suction portion without using a flexible member (such as the bellows). Therefore,
Since there is no deterioration due to repeated deformation as in a member having flexibility, the frequency of replacement of members due to the deterioration is reduced, and continuous operation for a long time becomes possible. For this reason, I equipped with a suction hand in which the suction pad is installed
It is possible to improve the efficiency of IC inspection in the C test handler. Also, since the suction part floats easily,
The suction unit does not press the IC or tray with an excessive force, and the impact at the time of contact can be reduced. Furthermore, if the male locking portion and the female locking portion are brought into airtight contact with each other, it is not necessary to separately install an air tube, and an increase in the number of parts can be prevented.

(12) In (11), an elastic body is installed between the suction section and the connecting section, and the female locking section is pressed against the male locking section by the repulsive force of the elastic body. It is characterized by being formed. Therefore,
The airtightness of the sliding portion between the female locking portion and the male locking portion is increased, and air leakage is eliminated when the object to be attracted is separated. Therefore, since the inside of the adsorption unit is surely negative pressure, the adsorption of the object to be adsorbed becomes more reliable. Further, since the suction portion does not rise inadvertently, the inside of the suction portion surely becomes positive pressure, so that the object to be sucked is surely detached. Furthermore, by adjusting the repulsive force of the elastic body, it becomes possible to absorb the impact at the time of contact.

(13) In order to install a suction portion on which a suction surface for sucking an object to be sucked, a surface copying mechanism for elastically supporting the suction surface in a tiltable manner, and the surface copying mechanism for the suction pad supporting means. And a connecting portion, and the suction portion and the surface copying mechanism are integrally formed. Therefore, the number of parts can be reduced and the weight of the entire suction pad can be reduced. Therefore, since the movement inertia of the suction pad when moving / stopping becomes small, the moving speed can be increased, acceleration / deceleration at the time of movement can be sharpened, and stop accuracy can be improved. In an IC test handler equipped with a suction hand, it is possible to improve the efficiency and accuracy of IC inspection.

(14) In the above item (13), the surface copying mechanism is a bellows. Therefore, since the surface copying mechanism has a bellows shape (it can be folded in an accordion shape), the weight can be reduced. Further, it is possible to have a predetermined tilting performance and shock absorbing performance.

(15) In the above (14), the bellows are enlarged in diameter toward the suction portion. Therefore, the surface copying mechanism (bellows, bellows, that is, foldable in an accordion shape) has a predetermined tilting performance, and more stable suction is possible.

(16) In any one of the above (4) to (15), the suction part and the connecting part are connected by an airtight tube having flexibility. Therefore, since airtightness is not required in the sliding portion between the female locking portion and the male locking portion, it is possible to employ a mechanism and material with less friction. Further, since the function is achieved even if the manufacturing accuracy of the sliding portion is loosened, the manufacturing cost of the suction pad is reduced.

(17) In any one of (4) to (16) above, an annular ring having a trapezoidal cross section is formed on the lower surface of the suction portion, and the suction surface is formed at a position corresponding to the upper side of the trapezoid. It is characterized by Therefore, compared with the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) adsorption surface, less elastic deformation at the time of contact, deterioration over time such as plastic deformation and wear due to repeated use. Slight adsorption and stable adsorption over a long period of time. For this reason, the adsorption error of the adsorbed material is eliminated. For example, I equipped with a suction hand on which the suction pad is installed
In the C test handler, trouble due to a suction error can be prevented. Moreover, continuous operation for a long time becomes possible, and the efficiency of IC inspection can be improved.

(18) In any one of the above (4) to (17), an annular ring having a trapezoidal cross section is formed on the lower surface of the adsorbing portion, and the object to be adsorbed has a distance corresponding to the height of the trapezoid. It is characterized in that it is smaller than the depth of the to-be-adsorbed material storage pocket portion of the accommodated tray, and that the outer diameter of the lower surface is larger than the inner diameter of the to-be-adsorbed material storage pocket portion. Therefore, even if the suction work of the suction target is performed in the pocket portion where the suction target (for example, IC) is not stored because the lower surface of the suction unit exhibits a stopper function, Abut the top of the tray,
Since the suction surface does not reach the bottom surface of the pocket portion, the tray itself is not sucked and lifted. Therefore, the installation position of the tray does not shift, and other objects to be adsorbed already stored in the pocket are not scattered. Furthermore, if the suction part can be tilted, the tray is not installed horizontally or the tray is deformed (sliding, bending, etc.).
, Evenly abuts on its upper surface. Further, when the suction portion is elastically supported by a member having a shock absorbing performance, the shock when the lower surface of the suction portion (which functions as a stopper) comes into contact with the upper surface of the tray is alleviated, It is possible to prevent the object to be adsorbed, which is stored in the other pockets, from scattering (jumping out) from the pockets or shifting the posture in the pockets even if it does not dissipate (jumps out). For this reason, in an IC test handler equipped with a suction hand having the suction pad, there is no suction error due to poor attitude of the IC, and stable continuous operation for a long time is possible, and IC inspection efficiency is improved. Can be improved. When the suction object storage pocket portion has a rectangular planar shape, the inner diameter of the suction object storage pocket portion means the short side of the rectangle. Further, the outer shape of the suction portion (corresponding to the outer shape of the stopper) may be a rectangle that is similar to the planar shape of the suction object storage pocket portion. At this time, the outer diameter of the lower surface of the suction portion means the short side of the rectangle.

(19) In any one of the above items (4) to (18), the adsorbing portion contains a conductive material. Therefore, since the adsorption portion itself has electrical conductivity, it is possible to prevent application of static electricity to the IC.

(20) In any one of the above items (4) to (10), the attraction portion, the surface copying mechanism, and the connecting portion include a conductive material. Therefore, it is not necessary to directly install the ground cable to the suction part, which simplifies the structure of the suction part.
Its replacement is easy and quick.

(21) In any one of the above items (11) to (15), the adsorbing portion and the connecting portion include a conductive material. Therefore, since it is not necessary to directly install the ground cable on the suction portion, the structure of the suction portion is simplified and the replacement thereof is easy and quick.

(22) In any one of the above items (1) to (21), the object to be adsorbed is an IC. Therefore, the IC can be surely adsorbed, and stable work can be continued. In particular, the suction work of a small and thin IC is stabilized.

Further, the suction hand according to the present invention is (23) characterized by including the suction pad according to any one of the above (1) to (22). Therefore, since the suction hand is provided with the moving means, the suction pad moves to the position of the IC placed at a predetermined position and surely sucks the IC, so that the work is stabilized.

Further, in the IC test handler according to the present invention, (24) the pre-inspection stage on which the pre-inspection tray in which the pre-inspection ICs are housed is placed, and the pre-inspection ICs are carried in for predetermined inspection. An inspection stage, a post-inspection stage on which an inspected tray in which the inspected ICs are stored is placed, a pre-inspection IC is conveyed from the pre-inspection stage to the inspection stage, and further from the inspection stage to the post-inspection stage. It has one or more suction hands for carrying the inspected ICs, and one or more suction hands are constituted by the suction hands in (23) above. Therefore, the IC can be surely adsorbed, and the IC inspection efficiency can be maintained at a predetermined level by a stable work.

[0043]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] (Suction Hand) FIGS. 1 and 2 show a first embodiment of the present invention.
It is a front view and a partial cross-sectional view showing a configuration of a suction hand according to the present invention. 1 and 2, 10 is an IC suction pad, 20 is a pad holder on which the suction pad 10 is installed, 30 is an air hose for sucking air for suction (to be precise, on the suction surface of the suction pad 10). 40 performs a pressure transmission function for adjusting the air pressure), and 40 is a lifting shaft that holds the pad holder 20 slidably in the vertical direction,
1 is a rack installed on the lifting shaft 40, 52 is a rack 51
A pinion (hereinafter, rack 51 and pinion 52)
The mechanism having the above is referred to as a lifting mechanism), 60 is a pinion 52
Is a traveling unit 70 in which the traveling unit 60 is movably supported, and 80 is a main body unit that rotatably supports the traveling unit 70.

The suction pad 10 includes a suction portion 11 formed of rubber or synthetic resin, a surface copying mechanism 12 for elastically supporting the suction portion 11 so as to be tiltable and upward, and a surface copying mechanism 1.
2 is configured by a connecting portion 13 for installing the pad holder 20. Then, the lower end surface 11B of the suction portion 11
The IC is adsorbed by bringing the (annular edge) into contact with the upper surface of the IC and depressurizing the inside of the adsorption pad 10 (the same in the air hose 30) in a state of being lightly pressed. At this time,
Since the surface copying mechanism 12 has flexibility, the suction portion 11
The lower end surface 11B of the IC follows the upper surface of the IC and closely adheres to the upper surface of the IC, and air is adsorbed inside the adsorbing portion 10 (same in the air hose 30).
Never infiltrate. Further, since the surface copying mechanism 12 is elastically supported so as to be able to rise, the impact at the time of the contact is absorbed.

On the other hand, when the adsorbed IC is placed (for example, stored in the pocket portion of the tray), the adsorbed I
C is its position (for example, the bottom of the tray pocket)
While lightly pressing the inside of the suction pad 10 (the same inside the air hose 30) to pressurize or return to normal pressure,
The suction pad 10 is pulled up. A stopper 11S having a flange-like diameter is formed on the side surface of the suction portion 11, and the suction surface 11 that contacts the IC is formed on the lower surface of the stopper 11S.
B is projected and installed.

The pad holder 20 has a suction pad 1 at the bottom.
0 is a hollow shaft, which is inserted into the lower inner surface 41 of the elevating shaft 40 and is slidable in the vertical direction while maintaining airtightness. Therefore, it also plays the role of an air tube for transmitting the air pressure in the air hose 30 to the suction pad 10 via the lifting shaft 40. Then, the upper surface of the flange 21 provided in the lower portion of the pad holder 20,
A compression spring 45 is installed between the lower ends 42 of the lifting shaft 40. Therefore, when a predetermined amount of pushing force is applied to the pad holder 20, the compression spring 45 contracts and the pad holder 20 rises, so that the suction pad 1
When the suction surface 11B of 0 comes into contact with the tray or the IC, they are not pressed by an excessive force. In the above description, the one pad holder 20 is provided with the only suction pad, but the present invention is not limited to this.
The air path may be branched in the pad holder and the suction pads may be installed in the respective air paths. Ie 1
Two or more suction pads may be installed in the pad holder 20.

The air hose 30 has such rigidity that it does not become flat and can follow the movement of the elevating shaft 40 (elevation and movement in the horizontal plane) even when the inside thereof becomes negative (negative pressure) with respect to the atmosphere. It has flexibility. One end of the air hose 30 is installed on the upper part 43 of the elevating shaft by the coupler 31, while the other end of the air hose 30 is connected to an air distribution valve (not shown) and further connected to a pressure reducing means and a pressure applying means. . Further, a pressure gauge (not shown) is installed to detect the pressure inside the air hose 30.

The elevating shaft 40 is movably supported by guides 61 and 62 installed on the traverse portion 60, and a rack 51 is installed. The lifting mechanism is rack 51 and rack 5.
It is formed by a pinion 52 (installed in the transverse portion 60) that meshes with the 1 and a driving means (not shown) that drives the pinion 52. That is, the lifting shaft 40 is lifted and lowered by the rotation of the pinion 51 and the linear movement of the rack 52 meshing with the rotation of the pinion 51.

The lifting mechanism is not limited to the pinion / rack mechanism, and may be an air cylinder mechanism, a pulley / wire mechanism, a rotary link mechanism, or the like. Further, the present embodiment is not limited to the one in which the elevating mechanism (rack 51) is provided for each elevating shaft 40, but a pair or three or more elevating shafts are connected by a connecting member, and the connecting member is connected to the connecting member. It may be a mechanism formed by a unique rack (which is considered as a common rack) and a unique pinion that meshes with the unique rack.

The traverse section 60 is mounted on the traveling section 70 in a horse riding manner and traverses on the traveling section 70 by a traversing means (not shown). Further, a pinion 52 and a pinion drive means (not shown) are installed. In this embodiment, the pair of elevating shafts 40 is arranged for one traverse portion 60, but the present invention is not limited to this.
Any number of 1 or 3 or more elevating shafts may be arranged in the traverse portion of. Further, these arrangement forms are not limited to those symmetrically arranged on the same plane of the transverse portion, but are asymmetrical, and are a plurality of planes of the transverse portion (for example, front surface and back surface,
It may be arranged on both side surfaces).

The traveling section 70 is guided to travel on a traveling path 81 installed in the main body section 80 and travels on the main body section 80 by a traveling means (not shown).

The main body 80 rotatably supports the traveling unit 70 and includes a pair of parallel traveling paths 81.

Further, when the moving range of the suction pad 10 is limited, the suction pad 10 can be moved only within the limited range. For example, the transverse section 60 or the traveling section 7
One of 0 may be omitted, and the plane may be linearly reciprocated. Further, when the object to be adsorbed (for example, IC) is placed so as to be able to move up and down, the lifting mechanism and the like are omitted,
The elevating shaft 40 may be fixed to the transverse portion 60.

(Suction part) The suction part 11 has a communication hole 11H (to be exact, which is formed along the central axis) through which air passes.
A communication hole that functions to transmit the air pressure in the air hose 30 to the suction surface 11B), and the suction surface 1 that abuts the IC on the lower surface.
1B, a stopper 11S that contacts the upper surface of the tray on the outer surface, and a constricted portion 11N on which the surface copying mechanism 12 is fitted.

The attracting surface 11B is formed by the lower surface of an annular ring 11R having a rectangular cross section and projecting from the lower surface of the stopper 11S. Compared to the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) suction surface, less elastic deformation at the time of contact, less plastic deformation and repeated deterioration over time due to repeated use, Stable adsorption is possible over a long period of time.

The height of the ring 11R (height of rectangular section) is
The outer diameter of the stopper 11S is smaller than the depth of the IC storage pocket portion of the tray storing the IC to be sucked, and is larger than the diameter (passage of the mouth) of the pocket portion of the tray storing the IC to be sucked. Therefore, even when the IC suction operation is performed in the pocket portion where the IC is not housed, when the lower surface of the stopper 11S abuts the upper surface of the tray, the shock is mitigated and the suction surface 11B.
Does not reach the bottom of the pocket, so it does not pick up the tray itself and lift it. Therefore, it is possible to prevent the installation position of the tray from being displaced and the ICs already stored in the other pockets from being scattered.

The planar shape of the circular ring 11R is not limited to a perfect circle and may be an ellipse or a rectangle. Further, the outer shape of the stopper 11S is not limited to a perfect circle, and when the planar shape of the pocket portion is rectangular, it may be similar to the rectangular shape. At this time, the outer diameter of the stopper 11S means the length of the short side of the rectangular shape, and the diameter of the pocket portion (passage of the mouth) means the length of the short side of the rectangular shape.

The constricted portion 11N is formed in a drum shape near the upper end of the suction portion 11, and the lower end 12B of the bellows 11A of the bellows-shaped surface copying mechanism 12 is fitted from the outside. Therefore, the structure of the suction portion 11 is simple, and the surface copying mechanism 12
Since it is not necessary to provide any special locking means or airtight means (the bellows can be detachably attached and the airtightness is guaranteed), the structure of the suction pad 10 can be simplified.
Moreover, since the suction unit 11 can be quickly replaced,
It is possible to improve the efficiency of the IC inspection in the IC test handler including the suction hand in which the suction pad 10 is installed.

If the adsorbing portion 11 is formed so as to contain a conductive material, it has electrical conductivity, so that static electricity can be prevented from being applied to the IC. Furthermore, if all of the suction unit 11, the surface copying mechanism 12, and the connecting unit 13 are made of a conductive material, it is not necessary to directly install the ground cable on the suction unit 11, so the structure of the suction unit 11 is simplified. ,
Its replacement is easy and quick. Here, examples of the compound of the conductive material include resin containing carbon, resin containing graphite, resin containing metal powder, and the like. The mixing ratio may be arbitrary as long as it shows conductivity as a whole.

(Surface Copying Mechanism) The surface copying mechanism 12 is a bellows 12A made of a flexible material having airtightness, and expands downward, and a lower end 12B of the bellows 12A is of the suction portion 11. The constricted portion 11N and the upper end portion 12T thereof are fitted into the constricted portion 13N of the connecting portion 13 in an airtight manner. Therefore, the surface copying mechanism 12 exerts an air tube, a shock absorber, and a swing function. Further, due to the characteristic of the bellows, it is possible to reduce the weight of the surface copying mechanism 12 and to have a predetermined tilting performance and shock absorbing performance.

(Connecting Portion) The connecting portion 13 has a substantially cylindrical shape, and has a communicating hole 13H (accurately, the air pressure in the air hose 30 for adsorbing the air pressure inside the air hose 30) formed along the central axis through which air passes. (A communication hole that performs the function of transmitting to the inside), a constricted portion 13N for fitting the upper end portion 12T of the surface copying mechanism 12 to the lower outer surface, and a male screw 13T for installing the pad holder 20 on the upper outer surface. It is provided.

The joint portion 13 and the surface copying mechanism 12 are joined by fitting the constricted portion 13N of the joint portion 13 with the upper end 12T of the bellows 12A from the outside. Therefore, the surface copying mechanism 12 can be replaced easily and quickly. Instead of the constricted portion, the constricted portion may be formed into a substantially cylindrical shape and bonded by an adhesive, or bonded by binding from the outer surface.

The joining of the connecting portion 13 and the pad holder 20 is such that the male screw 13T of the connecting portion 13 is screwed into the female screw 20J provided on the inner circumference of the pad holder 20, and it is detachable. A screw locking mechanism may be installed for the screw. Further, instead of screw connection, they may be mechanically fitted to each other as a conical male taper surface and a female taper surface, or may be connected by a bolt or a cotter.

[Second Embodiment] (Suction state of suction hand) FIG. 3 shows a second embodiment of the present invention.
FIG. 6 is a vertical cross-sectional view for explaining an IC suction state of the suction hand according to FIG. The same parts as those in FIG. 1 or 2 are designated by the same reference numerals, and a part of the description is omitted.

(Abutting on Empty Tray) FIG.
The situation where the IC suction operation is performed in the pocket portion 91 of the tray 90 in which C is not stored is shown.
The height of the circular ring 11R (the height of the rectangular section) is smaller than the depth of the IC storage pocket portion 91 of the tray 90, and the stopper 1
The outer diameter of 1S is larger than the diameter of the pocket portion 91 of the tray 90 (passage of the mouth). When the pocket 91 has a rectangular planar shape, the outer diameter of the stopper 11S is larger than at least the length of its short side. The planar shape of the stopper 11S may be similar to the planar shape of the pocket portion 91.

Therefore, when the IC suction work is carried out in the pocket portion 91 in which the IC is not housed,
The stopper 11S is a surface copying mechanism 1 having shock absorbing performance.
Since it is elastically supported by 2, the stopper 11
The impact when the lower surface of S comes into contact with the upper surface 92 of the tray 90 is alleviated, and the ICs stored in the other pockets dissipate (jump out) from the pockets or do not dissipate (do not jump out). Also, the posture is prevented from shifting in the pocket. Further, even if the tray 90 is not installed horizontally, or even if the tray itself is deformed (warping, bending, etc.), the stopper 11S is tiltable, and thus evenly contacts the upper surface 92 of the tray 90. .

(Suction of inclined IC) FIG. 3B shows a state in which the IC99 which is mounted at an inclination is sucked. That is, even when the upper surface of the IC 99 to be sucked is inclined, the suction surface 11 is imitated along the inclined upper surface.
Since B tilts (so-called swinging), the suction surface 11B
Contact the suction pad 10 evenly over the entire circumference.
It is possible to reliably suck the IC without air entering inside. Therefore, in addition to the case where the IC to be adsorbed is tilted and stored in the pocket portion of the tray (when locked to the side surface of the pocket portion, etc.), the tray itself in which the IC to be adsorbed is deformed (warping, bending, etc.). ) Or when the tray itself is not installed horizontally,
It is valid.

[Embodiment 3] (Suction pad-bellows exterior type) FIG. 4 is a longitudinal sectional view showing a suction pad according to a third embodiment of the present invention. In FIG. 4, the suction pad 100 includes a suction portion 111 formed of rubber or synthetic resin, and a bellows-like (bellow-shaped or accordion-shaped foldable) surface-supporting surface that elastically supports the suction portion 111 in a tiltable and ascendable manner. Mechanism 112 and surface copying mechanism 1
It is composed of a connecting portion 113 for installing 12 in a pad holder (not shown).

(Suction part) The suction part 111 has a communication hole 111H (accurately, a communication hole which serves to transmit a change in air pressure) through which air is formed along the central axis and IC is formed on the lower surface. A suction surface 111B that abuts, a stopper 111S that projects like a flange on the outer surface and abuts on the top surface of the tray,
It has a constricted portion 111N into which the surface copying mechanism 112 is fitted.

The suction surface 111B is formed by a portion corresponding to the upper side of the trapezoid of the circular ring 111R having a trapezoidal cross section and projecting from the lower surface of the stopper 111S. Compared to the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) adsorption surface, less elastic deformation at the time of contact,
There is little deterioration over time such as plastic deformation and wear due to repeated use, and stable adsorption is possible for a long period of time. The planar shape of the suction surface 111B (the same as the planar shape of the circular ring 111R) is not limited to a perfect circle, and may be an ellipse or a rectangle.

Height of ring 111R (height of trapezoid in cross section)
Is smaller than the depth of the IC storage pocket portion of the tray in which the sucked IC is stored, and the stopper 111S is larger than the diameter (passage of the mouth) of the tray pocket portion in which the sucked IC is stored. When the pocket has a rectangular planar shape, the outer diameter of the stopper 111S is larger than at least the length of its short side. In addition, the stopper 111S
The planar shape of 1 may be similar to the planar shape of the pocket portion. Therefore, even when the IC suction work is performed in the pocket portion where the IC is not housed, when the lower surface of the stopper 111S comes into contact with the upper surface of the tray, the shock is relieved and the suction surface 111B becomes the pocket portion. Since it does not reach the bottom, it does not pick up the tray itself and lift it. Therefore, the installation position of the tray is displaced, and ICs already stored in other pockets
Are prevented from being scattered.

The constricted portion 111N is formed like a drum near the upper end of the suction portion 111, and has a bellows-shaped surface copying mechanism 112.
The lower end 112B of the bellows 112A is fitted from the outside. Therefore, the structure of the suction part 111 is simple,
Since it is not necessary to provide a special locking means or an airtight means to the surface copying mechanism 112 (it can be fitted in the bellows as it is).
The structure of the suction pad 100 can be simplified. Further, since the suction unit 111 can be quickly replaced,
IC equipped with suction hand with suction pad 100 installed
The efficiency of IC inspection in the test handler can be improved.

If the adsorbing portion 111 is made of a conductive material, it has electrical conductivity, so that it is possible to prevent application of static electricity to the IC. Furthermore, if all of the suction portion 111, the surface copying mechanism 112, and the connecting portion 113 are made of a conductive material, there is no need to directly install a ground cable on the suction portion 111, so that the structure of the suction portion 111 is simplified. , Its replacement will be easy and quick.

(Surface Copying Mechanism) The surface copying mechanism 112 is a bellows (bellow-shaped, bellows-shaped, made of a flexible material having airtightness).
It is accordion-like foldable), expands downward, and an upper end 112T is airtightly joined to a constricted portion 113N at a lower end of the connecting portion 113. Therefore, the surface copying mechanism 112 exerts an air tube, a shock absorber, and a swing function. Further, due to the characteristics of the bellows, it is possible to reduce the weight of the surface copying mechanism 112 and to have a predetermined tilting performance and shock absorbing performance. When the bellows 111A is made of a flexible material lacking airtightness, an airtight film may be attached to the inner surface or the outer surface, or an airtight coating may be applied.

(Connecting Portion) The connecting portion 113 has a substantially cylindrical shape, and has a communication hole 113H (accurately, a communication function for transmitting a variation in air pressure) through which air provided along the central axis passes. Hole), a constricted portion 113N for fitting the upper end portion 112T of the surface copying mechanism 112 to the lower portion of the outer surface, and a male screw 1 for installation in a pad holder (not shown) on the upper portion of the outer surface.
It has 13T.

Therefore, the connecting portion 113 and the surface copying mechanism 11
In the second joining, the upper end 112T of the bellows 112A of the surface copying mechanism 112 is airtightly fitted to the constricted portion 113N of the connecting portion 113 from the outside. Therefore, the surface copying mechanism 112 can be replaced easily and quickly. Instead of the constricted portion 113N, the constricted portion 113N may be formed into a substantially cylindrical shape and bonded by an adhesive, or bonded by binding from the outer surface.

The joint between the connecting portion 113 and the pad holder (not shown) can be attached and detached with screws. A screw locking mechanism may be installed for the screw. Further, instead of screw connection, they may be mechanically fitted to each other as a conical male taper surface and a female taper surface, or may be connected by a bolt or a cotter.

[Embodiment 4] (Suction pad-bellows interior type) FIG. 5 is a longitudinal sectional view showing a suction pad according to a fourth embodiment of the present invention. 5, the suction pad 200 includes a suction portion 211 formed of rubber or synthetic resin, a bellows-shaped surface copying mechanism 212 that elastically supports the suction portion 211 so as to be tiltable and upward, and a surface copying mechanism 212. It is composed of a connecting portion 213 for installation in the pad holder.

(Suction portion) The suction portion 211 has a communication hole 211H (accurately, a communication hole that serves to transmit a change in air pressure) through which air is formed along the central axis and IC is formed on the lower surface. A suction surface 211B that abuts, a stopper 211S that protrudes like a flange on the outer surface and abuts on the tray upper surface, and a recess 211J whose bottom expands on the upper surface 211T, and the recess 211J has a lower end 212B of the bellows 212A of the surface copying mechanism 212. Are fitted. Therefore, the suction unit 2
This is because the structure of 11 is simple, and it is not necessary to provide special locking means and airtight means on the bellows of the surface copying mechanism 212, and the bellows mechanism can be installed simply by inserting the bellows. The structure of the suction pad 200 can be simplified. Further, the outer diameter of the surface copying mechanism 212 can be reduced. Therefore, since the suction unit 211 can be quickly replaced, the efficiency of IC inspection in the IC test handler including the suction hand in which the suction pad 200 is installed can be improved.

The suction surface 211B is formed by a portion corresponding to the upper side of the trapezoid of the circular ring 211R having a trapezoidal cross section, which is installed so as to project from the lower surface of the stopper 211S. Compared to the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) suction surface, less elastic deformation at the time of contact, less plastic deformation and repeated deterioration over time due to repeated use, Stable adsorption is possible over a long period of time. In addition,
The planar shape of the suction surface 211B (the same as the planar shape of the circular ring 211R) is not limited to a perfect circle, and may be an ellipse or a rectangle.

Height of ring 211R (height of trapezoid in cross section)
Is smaller than the depth of the IC storage pocket portion of the tray storing the IC to be sucked, and the stopper 211S is larger than the diameter (passage of the mouth) of the pocket portion of the tray storing the IC to be sucked. When the pocket portion has a rectangular planar shape, the outer diameter of the stopper 211S is larger than at least the length of its short side. In addition, the stopper 211S
The planar shape of 1 may be similar to the planar shape of the pocket portion. Therefore, even when the IC suction operation is performed in the pocket portion where the IC is not housed, when the lower surface of the stopper 211S comes into contact with the upper surface of the tray, the shock is relieved and the suction surface 211B becomes the pocket portion. Since it does not reach the bottom, it does not pick up the tray itself and lift it. Therefore, it is possible to prevent the installation position of the tray from being displaced and the ICs already stored in the other pockets from being scattered.

The concave portion 211J is the upper surface 21 of the suction portion 211.
It is dug into 1T to form a substantially conical cavity whose inner diameter increases from the mouth toward the inside. The lower end portion 212B of the bellows 212A of the bellows-shaped surface copying mechanism 212 is
It is inserted and fitted from the inside. Therefore, the suction unit 2
The structure of 11 is simple, and it is not necessary to provide a special locking means and airtight means in the surface copying mechanism 212, and the bellows 212
A can be installed as it is. Therefore, since the suction unit 211 can be quickly replaced, the efficiency of the IC inspection in the IC test handler including the suction hand in which the suction pad 200 is installed can be improved.

If the adsorbing portion 211 is made of a conductive material, it has electrical conductivity, so that static electricity can be prevented from being applied to the IC. Furthermore, if all of the suction portion 211, the surface copying mechanism 212, and the connecting portion 213 are made of a conductive material, it is not necessary to directly install the ground cable on the suction portion 211, so that the structure of the suction portion 211 is simplified. And its replacement becomes easy and quick.

(Surface copying mechanism) The surface copying mechanism 212 is a substantially cylindrical bellows (bellow-like or accordion-like foldable) formed of a flexible material having airtightness, and has a lower end 212B. The upper end 212T is airtightly fitted to the recess 211J of the suction portion 211 and the constricted portion 213N of the connecting portion 213. Therefore, the surface copying mechanism 212 exerts an air tube, a shock absorber, and a swing function. Further, due to the characteristics of the bellows, the surface copying mechanism 212
It is possible to reduce the weight and to provide a predetermined tilting performance and shock absorbing performance. In addition, the bellows 211A,
When formed of a flexible material that lacks airtightness, an airtight film may be attached to the inner surface or the outer surface, or an airtight coating may be applied.

(Connecting Portion) The connecting portion 213 has a substantially cylindrical shape, and has a communication hole 213H (accurately, a communication function for transmitting a variation in air pressure) through which air provided along the central axis passes. Hole), a constricted portion 213N to which the upper end portion 212T of the surface copying mechanism 212 is joined to the lower portion of the outer surface, and a male screw 213T for installation in a pad holder (not shown) on the upper portion of the outer surface.
have.

Therefore, the connecting portion 213 and the surface copying mechanism 21 are
In the joining of No. 2, the upper end 212T of the bellows 212A of the surface copying mechanism 212 is airtightly fitted to the constricted portion 213N of the connecting portion 213 from the outside. Therefore, the surface copying mechanism 212 can be replaced easily and quickly. Instead of the constricted portion 213N, the constricted portion 213N may be formed into a substantially cylindrical shape and bonded by an adhesive or bonded by binding from the outer surface.

The joint between the connecting portion 213 and the pad holder (not shown) can be attached and detached with screws. A screw locking mechanism may be installed for the screw. Further, instead of screw connection, they may be mechanically fitted to each other as a conical male taper surface and a female taper surface, or may be connected by a bolt or a cotter.

[Fifth Embodiment] (Suction pad-bellows integrated type) FIG. 6 is a vertical sectional view showing a suction pad according to a fifth embodiment of the present invention. In FIG. 6, the suction pad 300 has a suction portion 311 (molded of rubber or synthetic resin, which is equivalent to the suction portion 111 and the surface copying mechanism 112 integrally formed in the first embodiment, and is attached to the lower surface. And a connecting part 313 for installing the suction part 311 on a pad holder (not shown).

(Suction portion) The suction portion 311 has a communication hole 311H (accurately, a communication hole which functions to transmit a change in air pressure) through which air is provided along the central axis and IC is formed on the lower surface. A suction surface 311B that abuts, a stopper 311S that abuts the tray upper surface on the outer surface, a bellows 311A that tiltably supports the stopper 311S, and an upper end 311T for installing the suction portion 311 (the same as the bellows 311A) in the connecting portion 313. have.

The suction surface 311B is formed by a portion corresponding to the upper side of the trapezoid of the ring 311R having a trapezoidal cross section which is installed so as to project from the lower surface of the stopper 311S. Compared to the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) suction surface, less elastic deformation at the time of contact, less plastic deformation and repeated deterioration over time due to repeated use, Stable adsorption is possible over a long period of time. In addition,
The planar shape of the suction surface 311B (the same as the planar shape of the circular ring 311R) is not limited to a perfect circle, and may be an ellipse or a rectangle.

Height of ring 311R (height of trapezoid in cross section)
Is smaller than the depth of the pocket portion of the tray storing the IC to be adsorbed, and the stopper 311S is an IC to be adsorbed.
The diameter is larger than the diameter of the pocket part of the tray in which is stored. When the pocket portion has a rectangular planar shape, the stopper 31 is at least longer than the length of its short side.
The outer diameter of 1S is large. The planar shape of the stopper 311S may be similar to the planar shape of the pocket portion. Therefore, in the pocket where the IC is not stored,
Even when IC suction work is performed, the stopper 311S
When the lower surface of the tray comes into contact with the upper surface of the tray, the shock is alleviated, and since the suction surface 311B does not reach the bottom surface of the pocket portion, the tray itself is not sucked and lifted. Therefore, it is possible to prevent the installation position of the tray from being displaced and the ICs already stored in the other pockets from being scattered.

Further, the bellows 311A is made of a flexible material having airtightness, expands downward, and the upper end portion 311T is airtightly fitted to the constricted portion 313N of the connecting portion 313. Therefore, the bellows 311A exerts an air tube, a shock absorber, and a swing function. Further, due to the characteristics of the bellows, it is light in weight and can have a predetermined tilting performance and shock absorbing performance. When the bellows 311A is formed of a flexible material lacking airtightness, an airtight film may be attached to the inner surface or the outer surface, or an airtight coating may be applied. The upper end portion 311T has an inner flange protruding inward, and the inner flange is the constricted portion 31 of the connecting portion 313.
3N is airtightly fitted from the outside.

(Connecting Portion) The connecting portion 313 has a substantially cylindrical shape, and has a communication hole 313H (accurately, a communication function for transmitting fluctuations in air pressure) through which air provided along the central axis passes. Hole), and the upper end 31 of the suction part 311 on the lower part of the outer surface.
A constricted portion 313N into which 1T is fitted, and a male screw 313T for installing on a pad holder (not shown) are provided on the outer surface upper portion.

Therefore, the connecting portion 313 and the suction portion 311
Of the adsorbing part 31 to the constricted part 313N of the connecting part 313.
Since the upper end portion 312T of No. 1 is airtightly fitted from the outside, the suction portion 311 (same as the surface copying function) can be easily and quickly replaced. The constricted portion 313N
Instead of this, it may be formed into a substantially cylindrical shape and joined by an adhesive, or joined by binding from the outer surface.

The joint between the connecting portion 313 and the pad holder (not shown) can be attached and detached with screws. A screw locking mechanism may be installed for the screw. Further, instead of screw connection, they may be mechanically fitted to each other as a conical male taper surface and a female taper surface, or may be connected by a bolt or a cotter.

[Sixth Embodiment] (Suction Pad-Air Tube Type) FIG. 7 is a vertical sectional view showing a suction pad according to a sixth embodiment of the present invention. Figure 7
2, the suction pad 500 includes a suction portion 511 formed of rubber or synthetic resin, a coil-shaped spring 515 that elastically supports the suction portion 511 so that the suction portion 511 can be tilted and raised.
A connecting portion 513 installed in a pad holder (not shown),
The air tube 516 is configured to have a flexibility to airtightly connect the suction portion 511 and the connecting portion 513.

(Suction portion) The suction portion 511 has a communication hole 511H (accurately, a communication hole that serves to transmit a change in air pressure) through which air is formed along the central axis and IC is formed on the lower surface. It has a suction surface 511B that abuts, a stopper 511S that abuts on the upper surface of the tray on the outer surface, and an air tube fitting portion 511T that fits an air tube 516 on the upper end portion.

The suction surface 511B is formed by a portion corresponding to the upper side of the trapezoid of the circular ring 511R having a trapezoidal cross section and projecting from the lower surface of the stopper 511S. Compared to the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) suction surface, less elastic deformation at the time of contact, less plastic deformation and repeated deterioration over time due to repeated use, Stable adsorption is possible over a long period of time. In addition,
The planar shape of the suction surface 511B (the same as the planar shape of the circular ring 511R) is not limited to a perfect circle, and may be an ellipse or a rectangle.

Height of ring 511R (height of trapezoid in cross section)
Is smaller than the depth of the IC storage pocket of the tray storing the IC to be sucked, and the stopper 511S is larger than the diameter (passage of the mouth) of the pocket of the tray storing the IC to be sucked. When the pocket has a rectangular planar shape, the outer diameter of the stopper 511S is larger than at least the length of its short side. In addition, the stopper 511S
The planar shape of 1 may be similar to the planar shape of the pocket portion. Therefore, even when the IC suction operation is performed in the pocket portion where the IC is not housed, when the lower surface of the stopper 511S abuts the upper surface of the tray, the shock is relieved, and the suction surface 511B becomes the pocket portion. Since it does not reach the bottom, it does not pick up the tray itself and lift it. Therefore, it is possible to prevent the installation position of the tray from being displaced and the ICs already stored in other pockets from being scattered.

If the adsorbing portion 511 is made of a conductive material, it has electrical conductivity, so that static electricity can be prevented from being applied to the IC. Furthermore, if the attracting portion 511 and the connecting portion 513 are made of a conductive material and the coil spring 515 is made of a material having electrical conductivity such as metal, it is not necessary to directly install the ground cable on the attracting portion 511. The structure of the suction unit 511 is simplified.

(Connecting Portion) The connecting portion 513 has a substantially cylindrical shape, and has a communicating hole 513H through which the air bored along the central axis passes. Hole), a male screw 513T for joining to a pad holder (not shown) protrudingly installed on the upper side, a flange 513F having a coiled spring 515 installed on the outer surface, and an air protrudingly installed on the lower side. It has an air tube fitting portion 513B into which the tube 515 is fitted.

The joint between the connecting portion 513 and the pad holder (not shown) can be attached and detached with screws. A screw locking mechanism may be installed for the screw. Further, instead of screw connection, they may be mechanically fitted to each other as a conical male taper surface and a female taper surface, or may be connected by a bolt or a cotter.

(Air Tube) Air Tube 516
Is formed of a flexible material having rigidity and airtightness that does not flatten or expand when the inside becomes negative (negative pressure) with respect to the atmosphere. The air tube fitting portion 511T and the air tube fitting portion 513B of the connecting portion 513 are fitted in an airtight manner. Therefore, the air tube 516
Allows the free tilting of the suction portion 511 and can transmit the pressure fluctuation in the air hose (not shown) connected via a pad holder (not shown) to the suction portion. It enables adsorption and desorption.

The shapes of the air tube fitting portion 511T and the air tube fitting portion 513B may be cylindrical, barrel-shaped, or drum-shaped. In addition, instead of fitting, it may be adhered with an adhesive after being inserted or bound with a clip or the like.

(Coiled Spring) Both ends of the coiled spring 515 are installed on the upper surface of the stopper 511S of the suction portion 511 and the lower surface of the flange 513F of the connection portion 513, respectively, and the suction portion 511 is connected to the connection portion 513 (a pad holder not shown). The same) is tilted and elastically supported. Therefore, when the upper surface of the IC to be sucked is tilted, the suction surface 511B that is in contact with the upper surface of the IC is easily tilted following the tilt. Further, when an excessive upward force is applied to the suction portion 511, the coil spring 515 contracts, so that the tray and the IC are not damaged by excessive pressing.

Even when the IC suction operation is carried out in the pocket portion in which the IC is not housed, when the lower surface of the stopper 511S abuts on the upper surface of the tray, the coil spring 515 contracts and an impact is generated. Since it is alleviated, the ICs stored in the other pockets are prevented from scattering.

[Embodiment 7] (Suction Pad-Sponge Type) FIG. 8 is a longitudinal sectional view showing a suction pad according to a seventh embodiment of the present invention. In FIG. 8, a suction pad 600 is a surface copying mechanism 612 including a suction portion 611 formed of rubber or synthetic resin, a sponge-like elastic body 615 elastically supporting the suction portion 611 to be tiltable and upward, and an airtight sheet 616. And a connecting portion 613 for installing the surface copying mechanism 612 on a pad holder (not shown).

(Suction portion) The suction portion 611 has a communication hole 611H (accurately, a communication hole which functions to transmit fluctuations in air pressure) formed through the central axis and through which air passes.
It has a suction surface 611B that comes into contact with the IC that projects to the lower surface, a stopper 611S that projects into a flange shape from the outer surface and comes into contact with the upper surface of the tray, and a projection portion 611T that has the surface copying mechanism 612 fitted therein.

The suction surface 611B is formed by a portion of the circular ring 611R installed on the lower surface of the stopper 611S and having a rectangular cross section, which corresponds to the upper side of the rectangle. Compared to the conventional lip-shaped (opening into a trumpet shape with decreasing thickness toward the tip) suction surface, less elastic deformation at the time of contact, less plastic deformation and repeated deterioration over time due to repeated use,
Stable adsorption is possible over a long period of time. The suction surface 61
The planar shape of 1B (the same as the planar shape of the ring 611R) is not limited to a perfect circle, and may be an ellipse or a rectangle.

Height of ring 611R (height of trapezoid in cross section)
Is smaller than the depth of the IC storage pocket of the tray storing the IC to be adsorbed, and the outer diameter of the stopper 611S is larger than the diameter (passage of the mouth) of the pocket of the tray storing the IC to be adsorbed. Therefore, IC
Even when the IC suction operation is performed in the pocket portion in which is not stored, when the lower surface of the stopper 611S abuts the upper surface of the tray, the shock is moderated and the suction surface 611B does not reach the bottom surface of the pocket portion. Therefore, it does not pick up the tray itself and lift it. Therefore, it is possible to prevent the installation position of the tray from being displaced and the ICs already stored in other pockets from being scattered. When the pocket has a rectangular planar shape, the outer diameter of the stopper 611S is larger than at least the length of its short side. The planar shape of the stopper 611S may be similar to the planar shape of the pocket portion.

The protrusion 611T has a cylindrical shape, the airtight sheet 616 of the surface copying mechanism 612 is airtightly adhered, and the sponge-like elastic body 615 is fitted. The shape is not limited to a cylindrical shape, and may be a barrel shape or a drum shape.

The surface copying mechanism 61 is provided on the upper surface of the stopper 611S.
The end surface of the second sponge-like elastic body 615 is directly bonded. The upper surface of the stopper 611S is not limited to a flat surface, and can be selected according to the end surface shape of the sponge-like elastic body 615 (for example, an annular concave portion or an annular convex portion having an arc-shaped cross section). Therefore, the suction unit 611
The structure is simple, and the surface copying mechanism 612 can be easily installed.

If the adsorbing portion 611 is made of a conductive material, it has electrical conductivity, so that static electricity can be prevented from being applied to the IC. Furthermore, if all of the suction portion 611, the surface copying mechanism 612, and the connecting portion 613 are made of a conductive material, it is not necessary to directly install a ground cable on the suction portion 611, so the structure of the suction portion 611 is simplified. .

(Plane Copying Mechanism) The plane copying mechanism 612 includes a suction unit 6
It is composed of a substantially cylindrical sponge-like elastic body 615 that elastically supports tiltably and upwardly the 11 and an airtight sheet 616 attached to the inner surface of the sponge-like elastic body 615.

The sponge-like elastic body 615 has its lower end joined to the upper surface of the stopper 611S of the suction portion 611, and its upper end joined to the lower surface of the flange 613F of the connecting portion 613.
It exerts a shock absorber and swing function. The sponge-like elastic body 615 may be rubber or synthetic resin having a three-dimensional lattice shape in addition to the porous synthetic resin.

The lower edge of the airtight sheet 616 is airtightly joined to the protrusion 611T of the suction portion 611 and the upper edge is airtightly joined to the protrusion 613B of the connecting portion 613 to form a flexible airtight air tube. ing. Therefore, the pressure fluctuation in the air hose (not shown) (which is connected via a pad holder (not shown)) can be transmitted to the suction portion, so that the IC can be sucked and released.

(Connecting Portion) The connecting portion 613 has a substantially cylindrical shape, and has a communication hole 613H (accurately, a communication function for transmitting a variation in air pressure) through which air provided along the central axis passes. Hole), a flange 613F protruding to the outer surface,
On the lower surface of the flange 616F, a protrusion 613B for adhering the airtight sheet 616 of the surface copying mechanism 612 and a male screw 613T projecting on the upper surface for mounting on a pad holder (not shown) are provided.

The lower surface of the flange 613F and the surface copying mechanism 612.
The sponge-like elastic body 615 is bonded with an adhesive.
Further, the protrusion 613B may be bound from the outer surface. The shape of the protrusion 613B may be cylindrical, barrel-shaped, or drum-shaped. In addition, they may be constricted or flanged.

The joint between the connecting portion 613 and the pad holder (not shown) can be attached and detached with screws. A screw locking mechanism may be installed for the screw. Further, instead of screw connection, they may be mechanically fitted to each other as a conical male taper surface and a female taper surface, or may be connected by a bolt or a cotter.

[Embodiment 8] (IC Test Handler) FIG. 9, FIG. 10 and FIG.
It is the top view, front view, and side view which show the structure of the IC test handler which concerns on Embodiment 8 of this invention. 9 and 1
0 and FIG. 11, IC test handler 4000
Is a pre-inspection stage 5000, a preheating stage 5500,
The inspection stage 7000 and the post-inspection stage 8000 are arranged in a substantially U-shape.
00, second suction hand 2000, third suction hand 3
000, the first carrier 6100 and the second carrier 6200 carry ICs.

Then, the first suction hand 1000 or the third suction hand 3000 is the suction hand shown in the first embodiment, and the suction pad installed on the suction hand is the same as in the second embodiment. 7 is the adsorption pad shown in any one of FIG. Therefore, since the suction hand provided with the suction pad reliably sucks and conveys the IC, the test handler can continue a stable inspection and can secure a certain inspection efficiency. .

[0122]

As described above, the present invention has the following remarkable effects. Since the suction surface of the suction pad can be tilted, even if the upper surface of the IC to be sucked is tilted, the IC can be surely sucked. Further, since the IC is reliably adsorbed, the IC does not rotate due to the adsorption. Further, since the ICs are surely sucked, it is possible to make a correct judgment that the IC is not stored even though the IC is stored in the pocket. Further, since the suction surface of the suction pad is elastically supported by the member having the shock absorbing performance, the shock when the stopper comes into contact with the tray is alleviated, and the suction hand can be lowered at a high speed. Further, since the impact when the stopper contacts the IC is alleviated, the suction is stabilized and the suction hand can be lowered at a high speed. Further, the suction hand provided with the suction pad performs stable suction work. Furthermore, the IC test handler equipped with the suction hand on which the suction pad is installed is
A certain inspection efficiency can be secured. Even if the holder is lowered without the IC in the recess of the tray, the suction pad does not contact the bottom surface of the recess of the tray, and the suction pad does not accidentally suck the tray.

[Brief description of drawings]

FIG. 1 is a front view showing a configuration of a suction hand according to a first embodiment of the present invention.

FIG. 2 is a partial cross-sectional view showing the structure of the suction hand according to the first embodiment of the present invention.

FIG. 3 is an IC of a suction hand according to the second embodiment of the present invention.
It is a longitudinal cross-sectional view explaining a suction state.

FIG. 4 is a vertical cross-sectional view showing a suction pad according to a third embodiment of the present invention, showing a bellows exterior type.

FIG. 5 is a vertical sectional view showing a suction pad according to a fourth embodiment of the present invention, showing a bellows interior type.

FIG. 6 is a vertical cross-sectional view showing a suction pad according to a fifth embodiment of the present invention, showing a bellows-integrated type.

FIG. 7 is a vertical cross-sectional view showing a suction pad according to a sixth embodiment of the present invention, which is a sliding type view.

FIG. 8 is a vertical cross-sectional view showing a suction pad according to a seventh embodiment of the present invention, showing a sponge type.

FIG. 9 is a plan view showing the structure of an IC test handler according to an eighth embodiment of the present invention.

FIG. 10 is a front view showing the configuration of an IC test handler according to an eighth embodiment of the present invention.

FIG. 11 is a side view showing a configuration of an IC test handler according to an eighth embodiment of the present invention.

FIG. 12 is a plan view showing a configuration of a conventional horizontal transfer type test handler.

FIG. 13 is a perspective view of a tray used in a conventional loader and unloader.

FIG. 14 is a view showing a conventional IC suction mechanism, (a)
Is a front view and (b) is a vertical sectional view.

[Explanation of symbols]

1 Adsorption pad 11 Adsorption part 11
B suction surface 12 surface copying mechanism 12A bellows 1
3 Connection part 20 Pad holder 30 Air hose 4
0 Lifting shaft 51 Rack 52 Pinion 6
0 Traversing part 70 Running part 80 Main body 11
1 Adsorption part 111R Circular ring 111B Adsorption surface 1
12A Bellows 515 Coil spring 516 Air tube 615 Sponge elastic 1000 First test handler 2000 Second test handler 3000 Third test handler

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2G003 AA07 AG10 AG11 AG16 AH00                 3C007 AS24 DS01 FS01 FT15 FU00                       FU10 NS17                 5E313 AA02 AA23 CC03 CC07 DD13                       DD23 EE02 EE24 EE33 EE50                       FG10

Claims (24)

[Claims] 1. An adsorption pad, wherein an adsorption surface for adsorbing an object to be adsorbed is configured to be tiltable. 2. An adsorption pad, wherein an adsorption surface for adsorbing an object to be adsorbed is elastically supported. 3. An adsorption pad characterized in that an adsorption surface for adsorbing an object to be adsorbed is elastically supported by a member having an impact absorption performance. 4. A suction part provided with a suction surface for sucking an object to be sucked, a surface copying mechanism for elastically supporting the suction part in a tiltable manner, and a surface copying mechanism for mounting the surface copying mechanism on a suction pad supporting means. A suction pad having a connecting portion, wherein the suction portion, the surface copying mechanism, and the connecting portion are separately formed and joined to each other. 5. The suction pad according to claim 4, wherein the surface copying mechanism is a bellows. 6. The suction pad according to claim 5, wherein the bellows are expanded in diameter toward the suction portion. 7. A constricted portion is provided on an outer surface of the suction portion,
The suction pad according to claim 5 or 6, wherein the bellows is fitted in the constricted portion. 8. The suction pad according to claim 5 or 6, wherein a concave portion whose bottom portion is expanded in diameter is provided on the upper surface of the suction portion, and the bellows is fitted in the concave portion. 9. The surface copying mechanism is formed of a flexible material having airtightness.
9. The adsorption pad according to any one of 8 to 8. 10. The suction pad according to claim 4, wherein the surface copying mechanism is formed by a combination of a flexible airtight tube and an elastic material. 11. A suction part, wherein the suction pad is provided with a suction surface for adsorbing an object to be adsorbed, and a connection for tiltably supporting the suction part and installing the suction part on a suction pad support means. And a male locking portion having a lower end portion having an enlarged diameter, the upper surface of the protrusion being a part of a spherical surface, is provided in the connecting portion, and the suction portion has a bottom portion having an enlarged diameter. And a female locking portion whose ceiling surface is a part of a spherical surface is provided, and the female locking portion is slidably mounted on the male locking portion. Adsorption pad to be. 12. An elastic body is installed between the suction portion and the connecting portion, and the female locking portion is pressed against the male locking portion by the repulsive force of the elastic body. The adsorption pad according to claim 11. 13. A suction unit provided with a suction surface for sucking an object to be sucked, a surface copying mechanism for elastically supporting the suction surface so as to be tiltable, and a surface copying mechanism for installing the surface copying mechanism on a suction pad supporting means. A suction pad having a connecting portion, wherein the suction portion and the surface copying mechanism are integrally formed. 14. The suction pad according to claim 13, wherein the surface copying mechanism is a bellows. 15. The suction pad according to claim 14, wherein the bellows is expanded in diameter toward the suction portion. 16. The suction pad according to claim 4, wherein the suction portion and the connecting portion are connected by a flexible airtight tube. 17. The ring-shaped trapezoidal cross section is formed on the lower surface of the suction portion, and the suction surface is formed at a position corresponding to the upper side of the trapezoid. Crab adsorption pad. 18. A ring having a trapezoidal cross section is formed on the lower surface of the suction portion, and the distance corresponding to the height of the trapezoid is the depth of the suction target object storage pocket portion of the tray in which the suction target object is stored. 18. The suction pad according to any one of claims 4 to 17, wherein the suction pad is smaller than the outer diameter, and the outer diameter of the lower surface is larger than the inner diameter of the suction object storage pocket portion. 19. The adsorption pad according to claim 4, wherein the adsorption portion contains an electrically conductive material. 20. The suction pad according to any one of claims 4 to 10, wherein the suction portion, the surface copying mechanism, and the connecting portion include a conductive material. 21. The adsorbing portion and the connecting portion are made of a conductive material.
5. The adsorption pad according to any one of 5 above. 22. The adsorption pad according to claim 1, wherein the object to be adsorbed is an IC. 23. A suction hand comprising the suction pad according to any one of claims 1 to 22. 24. A pre-inspection stage on which a pre-inspection tray in which pre-inspection ICs are stored is placed, an inspection stage in which the pre-inspection ICs are carried in to perform a predetermined inspection, and an inspection in which the inspected ICs are stored. A post-inspection stage on which a completed tray is placed, and a pre-inspection IC from the pre-inspection stage to the inspection stage
The suction hand according to claim 23, further comprising: one or more suction hands for transporting the inspected ICs from the inspection stage to the post-inspection stage, wherein one or more suction hands are provided. An IC test handler characterized in that