JP2003132790A - Method of manufacturing gas discharge panel - Google Patents

Abstract

(57) [Problem] To provide a method in which force can be applied to a ventilation pipe when attaching a ventilation pipe to a ventilation hole part of a gas discharge panel, so that an exhausting step etc. following a mounting step is performed as a series of steps. Be able to process. A ventilation tube is provided in which a ventilation tube (60) and a bonding member (75) for the ventilation tube (60) are fixed at predetermined positions on a pair of substrates disposed to face each other so as to form a gas discharge space by clip means (80).
The substrate assembly 200 is placed in a furnace for heating and cooling, and the end of the ventilation pipe is connected to a pipe 220 for evacuation. In this state, the ventilation pipe 60 is welded with the bonding member 75. A method for manufacturing a gas discharge panel, comprising: performing a heating / cooling process described above, and evacuating a gas discharge space of a vent pipe / substrate assembly in a heated state of the process.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a gas discharge panel, and more particularly, to an improvement in a method for attaching a ventilation pipe used for exhausting a gas discharge panel or gas filling, and further for an exhaust following a step of attaching the ventilation pipe. It relates to improvement of the process and the gas filling process.

There are two types of gas discharge panels, AC type and DC type.
There are various types, and any of them can realize a large-sized flat display device capable of color display, and therefore, they are attracting attention as a display device that replaces a CRT. In particular, the surface discharge type AC gas discharge panel suitable for full-color display due to the emission of phosphor is expanding its application to the field of television display including high vision.

For these gas discharge panels, it is desired to improve the manufacturing method and the like in relation to the method of attaching the ventilation tube, the exhausting step and the gas filling step.

[0004]

2. Description of the Related Art An airtight sealing portion for maintaining the airtightness of a gas discharge panel when it is evacuated to a vacuum and for keeping the discharge gas sealed in the inner space airtight.
Basically, there are two places, the peripheral portion of the substrate and the ventilation pipe portion, and the structure thereof is as shown in FIG. This structure is
The same applies to both the AC type and DC type gas discharge panels.

In the drawing, 111 is a front side glass substrate, and 121 is a rear side glass substrate. (Hereinafter, the former is referred to as an A substrate, and the latter is referred to as a B substrate.) These substrates are combined with a gap of about 100 μm therebetween, and their peripheral portions are hermetically sealed with a sealing material 140. Further, there is a ventilation hole 125 in one corner of the B substrate, and a ventilation pipe 160a whose outer end is sealed is attached to the back side thereof. This ventilation pipe 160a
The outer end of the is initially in an open state as shown by the ventilation pipe 160, and this ventilation pipe 160 is connected to a predetermined pipe of the exhaust / gas filling device to first evacuate the internal space 130 to a vacuum. Then, the internal space 130 is filled with a predetermined discharge gas. Vent pipe 1 after the gas filling is completed
The gas discharge panel 100 is chipped off by heating and has its tip closed as shown by the ventilation pipe in FIG. 160a, and is filled with a predetermined discharge gas.

Reference numeral EH indicates a display area for actual display. In order to realize this display, members such as an electrode, a dielectric layer, a partition, and a phosphor are appropriately disposed inside the two substrates 111 and 121. Although not shown in the drawings, specifically, for example, in the case of an AC type gas discharge panel capable of full-color display, JP-A-6-2 is used.
It is disclosed in Japanese Patent Publication No. 67431 (for example, refer to Patent Document 1).

The ventilation pipe 160 of the gas discharge panel 100
Was conventionally attached as follows.

As shown in FIG. 12A, the ventilation pipe 160
The connection side end of the skirt is provided with a skirt portion 161 formed in a wide skirt so as to increase the connection area with the glass substrate in order to increase the attachment strength, and the lower surface (connection surface) of the skirt portion 161 is connected to the glass substrate. Has been flattened for that reason. The glass paste 170a for fusing is applied to the peripheral portion including the lower surface of the skirt portion 161. This fusion glass paste 170
a is made of a low melting point glass frit, a binder, an organic solvent, and the like.

The ventilation pipe 160 thus prepared is
As shown in FIG. 12B, the operator aligns the positions of the holes on the outer surface of the glass substrate 121 and presses them substantially vertically. After that, the operator further applies the glass paste 170b around the lower part of the skirt portion so that there is no insufficient application. The ventilation pipe 160 thus arranged holds the state in which it is arranged on the glass substrate 121 arranged in the horizontal direction by the adhesive force of the glass pastes 170a and 170b and its own weight.

As described above, the heat treatment of heating and cooling is performed with the ventilation pipe 160 arranged on the glass substrate 121.
The glass pastes 170a and 170b for fusing are melted by a heat treatment and solidified by a subsequent temperature lowering treatment, and the ventilation pipe 160 and the glass substrate 121 are fixed (glass fusion).
To be done.

It should be noted that there is a technique for fusing a gas pipe to which a solid glass frit is fixed and fusing the substrate at the same time as sealing the substrate, or fusing the glass hat-shaped body for accommodating the getter with a clip. A technique for simultaneously sealing a substrate has already been developed (see Patent Document 2 for the former and Patent Document 3 for the latter).

[0012]

[Patent Document 1] Japanese Patent Laid-Open No. 06-267431 (FIG. 2)

[0013]

[Patent Document 2] Japanese Patent Laid-Open No. 07-105848 (paragraphs 0025 to 0026)

[0014]

[Patent Document 3] Japanese Patent Application Laid-Open No. 01-235125 (3rd
(Upper right column, line 18 to lower left column, line 4).

[0015]

When the ventilation pipe 160 is attached in this manner, the following problems occur.

(1) Glass paste 170 on the ventilation pipe 160
The process of applying a, arranging the ventilation pipe 160 thereof on the glass substrate 121, and further applying the glass paste 170b is mainly a manual process, and therefore the amount of application, the state of application, and the arrangement are performed. There are variations in the state and the like, which causes defective products.

(2) Therefore, it is a labor-intensive process that requires experience. (3) The ventilation pipe 160 has no means for holding it until the glass fusion is completed after the ventilation pipe 160 is disposed on the glass substrate 121 as shown in FIG.
You can't do anything that adds power to. Further, the glass substrates 121 and 111 cannot be set upright. (In this case, the vent pipe 1 that was turned sideways
60 is dropped by its own weight when the glass pastes 170a and 170b are heated and melted. ) Therefore, the exhaust process and the like following the ventilation pipe attaching process cannot be processed as a series of processes. That is, after the process of attaching the ventilation pipe is completed and the temperature is returned to room temperature, it is finally sent to the next exhaust process or the like.

The present invention solves these problems, has a small variation in the coating amount, coating state, arrangement state, etc., does not require the operator's labor, and places the glass substrate in the vertical direction to form the ventilation pipe. It is an object of the present invention to provide a method for attaching a ventilation pipe, which can be attached, and which has few defective products.

Further, it is an object of the present invention to provide a method for treating the exhausting step and the like subsequent to the attaching step of the ventilation pipe as a series of steps by adopting a method in which a force may be applied to the ventilation pipe during the attaching step of the ventilation pipe. .

[0020]

In order to solve the above-mentioned problems, a method of manufacturing a gas discharge panel according to a first aspect of the present invention is to provide a ventilation pipe at a predetermined position of a pair of substrates arranged to face each other so as to form a gas discharge space. And a ventilation pipe / substrate assembly in which the bonding member of the ventilation pipe is fixed by a clip means,
The heating pipe is placed in a furnace for heating and cooling, the end of the ventilation pipe is connected to a pipe for vacuum exhaust, and in that state, heating and cooling treatment for welding the ventilation pipe with a bonding member is performed. The gas discharge space of the ventilation pipe / substrate assembly is evacuated in the heated state of the process.

Further, in the manufacturing method according to the second aspect, after the paste-like or solid first bonding member is arranged between the substrates in the peripheral portion of the pair of substrates arranged to face each other so as to form the gas discharge space. After the step of fixing the adhesive member and the pair of substrates by the first clip means, and arranging the solid second adhesive member and the vent pipe in alignment with the vent holes of the substrate having the vent holes. Fixing the ventilation pipe and the bonding member to the substrate by using the second clip means, connecting the end of the ventilation pipe to the pipe for vacuum exhaust, and the first and second bonding members. Heating and melting in a heating furnace and then solidifying by cooling to simultaneously seal a pair of substrates and fix the ventilation pipe, and perform vacuum exhaust through the ventilation pipe in the heated state of the process. It is characterized by including.

Further, in the manufacturing method according to claim 3, after the vacuum exhaust according to claim 1 or 2, after filling the discharge gas into the gas discharge space of the ventilation pipe / substrate assembly through the ventilation pipe. The tip of the ventilation pipe is cut off in the furnace.

In the manufacturing method according to the first aspect of the present invention, since the ventilation pipe is fixed to the glass substrate by the clip means, it does not come off even if some force is applied from the outside in this state, and the connection in the fusion process is performed. Can also be done reliably. Therefore, after the clip means is installed, the exhaust pipe can be connected in advance by using a connecting means such as a mounting head, etc., prior to the fusing step. (This is not possible with the conventional technology.) If a heat-resistant material is used as this connecting means, the heating / cooling process for fusing the ventilation pipe and the internal structure held between the two glass substrates The process of evacuating the space can be processed as a series of processes. Furthermore, it becomes possible to keep the internal space clean, which is likely to be contaminated with impurities.

According to the manufacturing method of the second aspect, it is possible to perform airtight sealing of the peripheral portion of the substrate, airtight adhesion between the ventilation tube and the glass substrate, and vacuum exhaust of the internal space in a series of steps. Become. Furthermore, it becomes possible to keep the internal space clean, which is likely to be contaminated with impurities.

According to the manufacturing method of the third aspect, it is possible to include a step of filling the discharge gas with gas after evacuation, and a step of cutting off the vent pipe thereafter.
This not only simplifies the process, but also eliminates the process of temporarily leaving it in the air after attaching the ventilation pipe, so that it is possible to keep the internal space more susceptible to contamination by impurities more clean.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] A first embodiment of the present invention will be described with reference to FIGS.

FIG. 1 shows a front glass substrate (A substrate) 1
1 and the glass substrate (B substrate) 21 on the back side are combined in a form in which the sealing material 40 is provided in the peripheral portion, and the ventilation pipe 60 is set on the back portion of the ventilation hole 25 in the B substrate. Shows. The ventilation pipe 60 has a skirt-shaped base end portion (hereinafter referred to as a skirt portion 61) and a B substrate 21.
Preform 7 as an adhesive member solidified between
5, and a clip 80 as a clip means is set as shown in FIG.

By performing heat treatment such as heating and cooling in this state, the preform 75 can be vitrified and the ventilation pipe 60 can be fixed to the B substrate 21 (glass fusion) by using it as an adhesive.

The method of setting the ventilation pipe 60 as shown in FIG. 1 is as follows. (A) The A substrate 11 is so held that the encapsulating material 40 is held in the peripheral portion.
And the B substrate 21 are combined into a B with a vent hole 25.
The substrate 21 is prepared so that it is on the upper side.

(B) The preform 75 is placed in the vent hole 25 portion of the B substrate 21, and the vent pipe 60 is further placed on the preform 75, and the preforms 75 are aligned so that the central portions of the respective holes are aligned.

(C) In that state, the clip 80 is set so as to press the skirt portion 61 of the ventilation pipe 60 against the B substrate.

Here, the glass substrates 11 and 21 have a thickness of 2 to 3 mm and a vent hole diameter of about 2 mm. The ventilation pipe 60 is made of glass, and as shown in FIG. 2, a hollow pipe portion 60b having a diameter of about 5 mm and a length of about 5 cm,
It has a skirt portion 61 having a diameter of about 9.5 mm, which is flattened at the end face connected to the glass substrate 21 and formed wide.

In the present embodiment, the skirt portion of the ventilation pipe is used as a holding portion (holding portion) by a clip, but a collar (flange) shape or the like can be adopted as the holding portion structure.

The preform 75 is a plan view (a) of FIG.
And a cross-sectional view (b) taken along the line AA of FIG.
The outer circumference is 1 to 1.5 mm thick and the center is about 7 m in diameter.
m has a hole portion 76, and a step portion 77 having a diameter of about 10 mm is provided on the upper portion of the hole portion 76. The diameter of the hole portion 76 is 5 mm larger than the diameter (about 2 mm) of the vent hole 25 of the B substrate.
It is assumed to be large, and there is a margin for variations in setting. Further, the diameter of the step portion 77 having a wall having a height of about 0.5 mm is set to be substantially the same as the diameter of the skirt portion 61 of the ventilation pipe 60 so that the accuracy of setting can be improved. The step portion 77 is a device for facilitating the setting work, and the skirt portion 61 of the ventilation pipe 60 is fitted therein to perform the setting work.

The preform 75 is manufactured by putting powder having low melting point glass as a main component in a molding jig and subjecting it to heat treatment. Since it is solidified so as to have such a shape, the setting work can be performed accurately and easily.

The preform 75 containing low melting point glass as a main component is melted by heat treatment at about 410 ° C., and solidified by lowering the temperature to about 370 ° C. or less. Therefore, the B substrate 21 and the ventilation pipe 60 can be fixed to each other by performing heat treatment such as heating and cooling in the state of being set as shown in FIG.

Next, the clip 80 for pressing and setting the ventilation pipe 60 and the B substrate 21 has a shape as shown in FIG. The figure (a) is a top view and the figure (b) has shown sectional drawing of the BB arrow. In FIG. 2B, a support plate 90 for setting the clip 80 is also shown in a form of being additionally shown. The clip 80 is formed of a metal material such as Inconel that has heat resistance and spring properties.

As shown in FIG. 7A, the clip 80 has a cutout portion 81 on one surface thereof, and the ventilation pipe 60 is inserted (inserted) into the cutout portion 81. Set the clip 80. Both sides of the cutout portion 81 serve as support portions 83 that hold down the skirt portion of the ventilation pipe 60.
This set is composed of the support plates 90a, 90 shown in FIG.
By sandwiching b inside the folded-back portion 82 of the clip 80, the outer sides of the pair of support plates 90a and 90b are pressed inwardly toward each other, the tip is opened by the principle of leverage, and the ventilation pipe 60 is provided between the cutouts 81. Are placed so that the two support plates 9
The force applied to 0a and 90b may be removed.

The operation of setting the clip 80 in this way is very easy, and this step can be mechanized. Further, by optimizing the size of the cutout portion 81, it is possible to increase the mounting accuracy of the ventilation pipe 60 as described below.

FIG. 5 shows a state after the attachment of the ventilation pipe 60 to the B board 21 is completed and the clip used for the work is removed. As shown in this figure, the ventilation pipe 60 has a connection portion 78 in which the preform is melted and solidified.
Must be completely airtight, stand vertically on the B substrate 21, and must have high finishing accuracy and little variation, which is one of the purposes of this embodiment.

Here, the fact that the connecting portion 78 is completely airtight and does not cause a leak failure is firstly realized by using the solidified preform 75.
The reason for this is that it is not a method with large variations, such as manual application. Secondly, by using the method of setting the clip 80 under appropriate conditions, the attachment accuracy (in particular, the inclination of the ventilation pipe 60) can be increased. Only when these two conditions are realized at the same time can the above purpose be realized.

Therefore, how to set the clip 80 under appropriate conditions and increase the mounting accuracy of the ventilation pipe 60 (in particular, the inclination of the ventilation pipe 60) will be described with reference to FIG.

FIG. 7B shows the cutout portion 8 of the clip 80.
It is a figure which shows the positional relationship of 1 and the ventilation pipe 60. The width W of the cutout portion 81 is about 5 mm. Since the clip 80 is set so that the ventilation pipe 60 is brought into contact with the rear end portion 81a of the cutout portion 81 of the clip 80, by changing the length L thereof, the position of pressing the skirt portion 61 of the ventilation pipe 60 is changed. . Therefore, the inclination (tilt angle) after attachment of the ventilation pipe 60 changes accordingly.

Therefore, the length L of the cutout portion 81 is set to 3,
The data obtained by investigating how the tilt angle of the ventilation pipe 60 fluctuates in the case of 4, 5 and 6 mm is shown in the graph (a) of FIG. According to this graph, by setting the length L of the cutout portion 81 within the range of 4 to 5 mm, it is possible to attach the ventilation pipe with high accuracy (almost vertically).

As described above, the ventilation pipe 60 is set as shown in FIG. 1, the heat treatment for heating and cooling is performed, and the clip 80 is removed after the completion of the heat treatment to attach the ventilation pipe 60. As a result, the following effects can be obtained.

(1) The fusion bonding of the ventilation pipe and the ventilation hole portion of the glass substrate can be such that the variation in the finish is small and the number of defective products is small.

(2) The skill and labor of the operator are small,
The work can be simplified. (It is also easy to mechanize.) (3) Since it is possible to arrange the glass substrates in the vertical direction, it is possible to arrange many gas discharge panels in the heating furnace efficiently, and work efficiency is improved. Can be raised.

In the present embodiment, the material of the ventilation pipe 60 is glass, but a material other than glass (for example, ceramic or metal) may be used.

Although an example of a clip has been shown as the clip means, another form different from the clip may be used.
Any member that can be pressed may be used. The jig may be a plurality of jigs or a single jig. The shape is also not limited to this embodiment.

Further, regarding the "a combination of the A substrate 11 and the B substrate 21 so as to sandwich the sealing material 40 in the peripheral portion" described in the step (a), the sealing material 40 is
The fusion treatment may be completed by the heat treatment, or may be in a state before the heat treatment (not fused). Here, a specific example of the latter is shown in the third embodiment. On the other hand, in the former case, the softening temperature of the sealing material 40 is
What is higher than the fusion temperature of the preform 75 for fusion bonding the ventilation pipe 60 may be used.

[Second Embodiment] The second embodiment of the present invention
The embodiment will be described with reference to FIG. 7.

In this embodiment, the combination of the ventilation pipe 60 and the preform (75 in FIG. 3) is improved.

In the first embodiment, since these are separate, in order to set them as shown in FIG. 1, the ventilation pipe 60 and the plug should be attached to the glass substrates 11 and 21 which are combined in advance. Reform 75 and clip 80
It was necessary to align and set the three parts.

Therefore, in this embodiment, the preform (75 in FIG. 3) is heat-treated to use the ventilation pipe 60 which is fixed to the skirt portion 61 in advance as indicated by reference numeral 79. For this heat treatment, in a state where both are combined,
For example, there is a method of applying a flame of a gas burner and fusing. Alternatively, it may be placed in a heating furnace.

In this way, the preform (7 in FIG. 3) is
By using the ventilation assembly in which 5) and the ventilation pipe 60 are integrated, the ventilation pipe 60 and the clip 80 can be set on the glass substrate 21 more easily than in the case of the first embodiment.

[Third Embodiment] A third embodiment of the present invention.
The embodiment will be described with reference to FIGS. 8 to 10.

In this embodiment, another process is combined before and after the method of the first embodiment to form a series of processes, and it is possible to improve the rationalization of the whole process and the cleaning of the inner space. To do.

FIG. 8 shows a flow of the processing process in this embodiment, and FIG. 9 schematically shows the flow. The process is divided into 6 steps (A) to (F), as shown in FIG.
9 and FIG. 9, the corresponding steps are denoted by the same reference numerals.

(A) An A substrate on which a sealing material (first adhesive member) is printed in advance on the peripheral portion, and a B substrate having a vent hole,
The sealing material is positioned and combined so as to be held, and a clip (first clip means) 85 for pressing the substrate is set on the peripheral portion so as to press a portion having the sealing material.

(B) The ventilation pipe 60 and the preform (second adhesive member) are set in the ventilation hole portion of the B substrate by the clip (second clip means) 80 for pressing the ventilation pipe. The assembly thus set is called a ventilation tube / substrate assembly. (This vent tube / substrate assembly is referred to as the vent tube / substrate assembly, including the ones to which the processes of each step have been added, until the subsequent series of processes is completed.) Corresponds to the method of the first embodiment.

(C) The thus-assembled vent pipe / substrate assembly is placed in the sealing / exhaust furnace 260, and the heat-resistant vacuum head 210 for vacuum exhaust is installed in the vent pipe portion. 10), and the door of the sealing / exhaust furnace 260 is closed. Here, the sealing and exhaust furnace 2
The number of the ventilation pipe / substrate assembly that is carried into the unit 60 and set is one, but this is a schematic illustration, and usually a plurality of ventilation pipe / substrate assemblies are set.

This step is important in this embodiment. By using the step (B) corresponding to the first embodiment, the vacuum head 210 can be attached in this way, and further the series of steps after (D) are possible. This content will be described in detail after the description of the process flow and its effect (see FIG. 10).

(D) In this state, the sealing material (first adhesive member) and the preform (second adhesive member) are melted by heating to about 410 ° C. Each of these bonding members is a material whose main component is low-melting glass, and is adjusted to melt at this temperature.

Next, the temperature is lowered to about 350 ° C. and held. In this process, the two bonding members are solidified into glass, and the sealing of the peripheral portion of the substrate and the sealing of the ventilation pipe (glass fusion) are performed simultaneously.

Since the airtight tube / substrate assembly is now hermetically sealed and the vacuum head 210 is already mounted, the exhaust device connected to the vacuum head 210 (see FIG. 9).
The internal space of the ventilation tube / substrate assembly can be evacuated to a vacuum by activating (not shown in FIG. 10, but shown in FIG. 10). The sealing / exhaust furnace 260 has about 350 inside.
Since the temperature is kept at ° C, vacuum evacuation processing can be performed in a heated state. (The emission of impurities and impure gas adhering to the inner surface can be accelerated by heating to raise the degree of vacuum in the inner space.) After sufficient exhaust treatment, the temperature in the furnace is lowered to room temperature. Then, the discharge gas is introduced into the inner space of the ventilation tube / substrate assembly. For this reason, the exhaust device (not shown in FIG. 9 but shown in FIG. 10) is configured to have a gas cylinder for introducing the discharge gas, a predetermined pipe, and the like.

(E) After the completion of this process, the sealing / exhaust furnace 26
Open the 0 door and tip off the ventilation pipe with a gas burner.

(F) The vent pipe / substrate assembly that has completed this chip-off process is taken out of the sealing / exhaust furnace 260, and the two types of clips 85 and 80 are all removed to complete the series of steps.

The ventilation pipe / substrate assembly thus completed is transported to the next step (aging, characteristic test, etc.).

Conventionally, unlike the above-described series of steps, after the ventilation pipe is attached in the sealing furnace, the temperature is returned to room temperature, and the ventilation pipe / substrate assembly is taken out from the sealing furnace.
Next, a method of attaching to an exhaust device having a heating furnace and exhausting in a heated state was used. Compared with such a conventional method, the effect of performing a series of steps as shown in this embodiment is as follows.

(1) In the present embodiment, the step of returning the vent tube / substrate assembly with the attached vent tube to room temperature while leaving the outer end of the vent tube open and temporarily leaving it in the air There is no. This is a highly effective improvement in cleaning the interior space.

That is, about 4 times in the atmosphere as in the conventional case.
The process of returning the temperature from 10 ° C to room temperature causes the impurities in the atmosphere to be adsorbed to the internal space. Therefore, in the process of evacuating to a vacuum after that, the cleaning process should be performed in a heated state for a long time. Will be required. In particular, in the case of an AC type gas discharge panel, this effect is great because the internal space is provided with a MgO film that is easily contaminated with impurities. The effect becomes more significant when the time for leaving to the exhaust process is long.

On the other hand, in the case of this embodiment, after the step of sealing the peripheral portion of the substrate and the ventilation pipe portion, the temperature is maintained at a level of about 350 ° C. without returning to room temperature, and the state is maintained. The internal space is exhausted at. Therefore, adsorption of impurities in the air to the internal space is suppressed by application of heat at about 350 ° C., and vacuum exhaust is performed in that state, so that the effect of cleaning the internal space becomes great. In particular, this effect is remarkable in the AC type gas discharge panel having the MgO film in the internal space.

(2) In the present embodiment, since the heat treatment process of heating / cooling in the sealing process and the exhaust process is conventionally two, it is combined into one process. The time required to complete the process and the evacuation process can be reduced to almost half. That is, the time required for the sealing step and the evacuation step occupies most of the time required for each heat step. Therefore, if the heat step is halved, the total processing time is also halved.

In this embodiment, the three steps of sealing the peripheral portion of the substrate, attaching the ventilation pipe, and exhausting the gas are performed in one heat step. Conventionally, these three steps may be performed in three heat treatment steps, and the time required for all the steps is about 1/3 as compared with such a case.

As described above, the three steps of sealing the peripheral portion of the substrate, attaching the ventilation pipe, and exhausting are processed as a series of steps (in one heat step), thereby significantly reducing the manufacturing steps. Will be possible.

Here, the series of steps as in this embodiment is made possible by realizing the steps (C) and (D). The contents will be described with reference to FIG.

In FIG. 10, the ventilation tube / substrate assembly 200 is carried into the sealing / exhaust furnace 260 and the vacuum head 21 is inserted.
The figure shows a state in which 0 is set when viewed from the side.
(On the other hand, FIG. 9 is shown from above.) The glass substrate 1 of the ventilation pipe / substrate assembly 200.
The vacuum heads 210 are attached to the outer ends of the ventilation pipes 60, which are placed horizontally and vertically. The vacuum head 210 is provided with a pipe 220 for vacuum exhaust, which is connected to an exhaust / gas filling device 250. In addition, in order to facilitate the attachment of the vacuum head 210 to the ventilation pipe 60, it is desirable to dispose a cushioning means 230 such as a bellows in the middle of the pipe.

What is important here is, in the present embodiment, firstly, the vent pipe 60 is prevented from coming off even if a force is applied when the vacuum head 210 is attached.
Secondly, even if the preform 75 is melted by being heated to about 410 ° C. in this state and an external force is applied by the vacuum head 210, the state in which the ventilation pipe 60 is in contact with the B substrate 21 is surely maintained. Is to be able to.

The fact that these two points are possible is shown in FIG.
It is clear from the composition of. Regarding the first point, a force is applied to the ventilation pipe 60 when the vacuum head 210 is attached, and regarding the second point, a force is applied to the ventilation pipe 60 when the preform 75 is heated and melted. In both cases, the main problem of external force is the vacuum head 2.
It is due to 10. Against such external force,
Since the ventilation pipe 60 is firmly fixed by the pressing of the clip 80, the position of the ventilation pipe 60 does not shift and the fusion failure does not occur. On the other hand, in the conventional method, since there is no means for holding the ventilation pipe 60 in this way, it is impossible to realize such a process.

After all, the reason why such a series of steps is made possible is that the method of the first embodiment is used.

Instead of using the vacuum head 210 as shown in FIG. 10, a vacuum exhaust pipe 220 may be a glass pipe, and the glass pipe may be directly welded to the ventilation pipe 60 by a gas burner or the like.

In FIG. 9 and FIG. 10, the glass substrates 11 and 21 of the ventilation pipe / substrate assembly 200 are installed horizontally for processing, but they can also be installed vertically for processing.

[0083]

According to the first aspect of the invention, the step of fusing the vent pipe and the step of evacuating the internal space can be processed as a series of steps. Therefore, not only can the process be simplified, but the process of temporarily leaving it in the air after attaching the ventilation pipe is eliminated, so that the internal space where impurities are easily adsorbed can be kept cleaner.

According to the second aspect of the invention, airtight sealing of the peripheral portion of the substrate and airtight adhesion between the ventilation tube and the glass substrate
Evacuation of the internal space can be performed in a series of steps.

According to the third aspect of the present invention, the series of steps can include a step of filling the discharge gas after evacuation, a step of cutting off the vent pipe after that, and the like. The whole process can be greatly simplified. Furthermore, it becomes possible to keep the internal space, which is apt to be contaminated with impurities, cleaner.

[Brief description of drawings]

FIG. 1 is a diagram showing a first embodiment.

FIG. 2 is a diagram showing the shape of a ventilation pipe.

FIG. 3 is a diagram showing the shape of a preform.

FIG. 4 is a diagram showing the shape of a clip.

FIG. 5 is a view showing a state after the attachment of the ventilation pipe is completed.

FIG. 6 is a diagram showing the relationship between the length of the cutout portion of the clip and the tilt angle of the ventilation pipe.

FIG. 7 is a diagram showing a second embodiment.

FIG. 8 is a flowchart showing a third embodiment.

FIG. 9 is a diagram showing a process of the third embodiment.

FIG. 10 is a diagram showing attachment of a vacuum head.

FIG. 11 is a diagram showing a gas discharge panel.

FIG. 12 is a view showing a conventional method for attaching a ventilation pipe.

[Explanation of symbols]

10,100 gas discharge panel 11,111 Glass substrate, A substrate 21,121 glass substrate, B substrate 25,125 ventilation holes 30,130 Internal space 40,140 sealing material 60,160,160a Vent pipe 60b pipe section 61,161 Skirt part 75 preform 76 hole 77 Step 80 clips 81 Notch 81a The rear end of the notch 82 Folding part 83 Support 90, 90a, 90b Support plate 170a, 170b Glass paste 200 Vent pipe / substrate assembly 210 vacuum head 220 piping 230 buffer means 250 Exhaust gas filling device 260 sealing and exhaust furnace EH display area

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 5C012 BC03 BC04 PP04 PP08                 5C040 HA05 MA22 MA26

Claims (3)

[Claims] 1. A heating / cooling method for a ventilation pipe / substrate assembly, comprising a ventilation pipe and a bonding member for the ventilation pipe fixed to a predetermined position of a pair of substrates opposed to each other so as to form a gas discharge space by a clip means. Arranged in a furnace for performing treatment, the end of the ventilation pipe is connected to a pipe for vacuum evacuation, and in that state, the heating and cooling treatment for welding the ventilation pipe with the bonding member is performed. A method for manufacturing a gas discharge panel, characterized in that the gas discharge space of the ventilation pipe / substrate assembly is evacuated in a heated state of the treatment. 2. A paste-like or solid first adhesive member is provided between the peripheral substrates of a pair of substrates arranged to face each other so as to form a gas discharge space. Fixing the substrate with the first clip means, and arranging the solid second bonding member and the ventilation pipe in alignment with the ventilation hole of the substrate having the ventilation hole, and then the second clip Fixing the ventilation pipe and the bonding member to the substrate using a means, connecting the end of the ventilation pipe to a pipe for vacuum exhaust, the first and second bonding members And heating and melting in a heating furnace and then solidifying by cooling to simultaneously seal a pair of substrates and fix the ventilation pipe, and perform vacuum exhaust through the ventilation pipe in the heated state of the treatment. A method of manufacturing a gas discharge panel, comprising: 3. Following the evacuation, after filling the discharge gas into the gas discharge space of the ventilation pipe / substrate assembly through the ventilation pipe, chip off the ventilation pipe in the furnace. The method for manufacturing a gas discharge panel according to claim 1 or 2, which is performed.