JP2003124269A - Bonding device and bonding tool for electronic components - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic component bonding apparatus and a bonding tool which can secure stable shape accuracy without requiring a crimping element to be subjected to screw processing for fastening a crimping element in a bonding tool configuration. The purpose is to do. SOLUTION: In a bonding tool for crimping an electronic component by load and vibration, a crimping member 30 having a tapered side surface and a divergent shape is detachably fastened to a horn 15 by using a tapered surface on a crimping side of the horn 15. With the crimping member 30 in contact with the groove, the fitting members 34A and 36A are fastened by the bolt member 33A, and the fitting members 34B and 36B are fastened by the bolt member 33B. Is fixed via a tapered surface. Thus, the crimping device 30 can be fastened with stable shape accuracy without providing the crimping device 30 with a screw.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component bonding apparatus and a bonding tool for bonding an electronic component such as an electronic component with a bump such as a flip chip to a surface to be joined such as an electrode of a substrate.

[0002]

2. Description of the Related Art As a method of bonding an electronic component to a surface to be bonded such as an electrode of a substrate, a method using ultrasonic pressure welding is known. In this method, ultrasonic vibration is applied to the electronic component while pressing the electronic component against the surfaces to be joined, and the joint surfaces are caused to vibrate slightly to generate friction, thereby bringing the joint surfaces into close contact with each other. The bonding tool used in this method has a horn, which is an elongated rod body that transmits the vibration of an ultrasonic oscillator, which is a vibration source, to electronic components. Electronic components are bonded to the surfaces to be joined by pressure bonding while applying load and vibration to the components.

Since a load (load and vibration) upon bonding acts on the crimping element, its lower surface (adsorption surface of electronic parts) is easily worn by repeated use. If this wear becomes severe, normal bonding cannot be performed, so the crimps must be replaced regularly. Therefore, in a bonding tool for ultrasonic bonding, it is generally used to avoid waste of replacing the entire horn and replace the crimping member with another part that is detachable from the horn body. There is.

As an example of a structure in which such a crimping member is provided as a separate component, a concave tapered surface is provided on the horn, and the crimping member having a convex tapered surface that fits into this tapered surface is fastened to the horn body with a screw. It is known how to do it. In this method, conventionally, the crimping member is provided with an internal screw portion, and the crimping member is fixed to the horn body by the internal screw portion and the bolt member.

[0005]

However, in the method of providing the internal threaded portion on the crimping member, there is a restriction on the material selection such that a material such as a ceramic material which is not suitable for screw processing cannot be adopted as the material of the crimping member. There is a problem that it is difficult to secure the shape accuracy of the crimping element in the fastening state with respect to the horn due to restrictions on the processing accuracy of the tapered surface.

Therefore, the present invention provides a bonding apparatus and a bonding tool for an electronic component which can secure stable shape accuracy without requiring the crimping member to be threaded for fastening the crimping member in the structure of the bonding tool. The purpose is to

[0007]

According to a first aspect of the present invention, there is provided an electronic component bonding apparatus for crimping an electronic component onto a surface to be joined while applying load and vibration to the electronic component. A bonding tool that comes into contact with the electronic component, and a pressing unit that presses the bonding tool against the electronic component, the bonding tool includes a horizontally long horn, a vibrator that applies vibration to the horn, and a horn of the horn. A groove provided in the surface on the crimping side in a position corresponding to the antinode of the standing wave vibration induced by the vibrator in a symmetrical shape and orthogonal to the vibration propagation direction, and on both the left and right inner side surfaces of this groove. The first and second surfaces are provided, and a contact surface that contacts the bottom surface of the groove is provided. And crimping element that is, the first being in contact with the concave-convex portion for positioning is provided an uneven portion provided on the abutting surface is provided on the crimping element on the bottom of the groove
A third tapered surface facing the first surface, a fourth tapered surface facing the second surface, a first fitting member abutting the first surface and the third tapered surface, and 2nd fitting member which contacts the 2nd surface and 4th taper surface, 1st fastening means and 2nd fastening which fasten the said 1st fitting member and 2nd fitting member to a horn, respectively. And means.

An electronic component bonding apparatus according to a second aspect of the invention is the electronic component bonding apparatus according to the first aspect, wherein the first fastening means and the second fastening means are provided in the groove of the horn. They are an open through hole, a bolt member that is inserted through the through hole, and a nut member that is screwed with the bolt member to fasten the first fitting member and the second fitting member to the horn.

An electronic component bonding apparatus according to a third aspect is the electronic component bonding apparatus according to the second aspect, wherein the bolt member is screwed to the first fitting member and the second fitting member. An inner thread portion is formed to
The fitting member and the second fitting member also serve as the nut member.

An electronic component bonding apparatus according to a fourth aspect is the electronic component bonding apparatus according to the first aspect, wherein the first fastening means and the second fastening means are provided in the groove of the horn. An inner threaded portion provided with an opening, and a bolt member that is screwed into the inner threaded portion and fastens the first fitting member and the second fitting member to the horn.

An electronic component bonding apparatus according to a fifth aspect of the present invention is the electronic component bonding apparatus according to any one of the first to fourth aspects, in which the crimping member is penetrated from the joining action portion to the contact surface with the groove. The horn has a suction hole provided, and in a state where the contact surface is in contact with the bottom surface of the groove, the horn is provided with a seal member interposed between the bottom surface and the contact surface. It communicates with the suction hole provided inside.

According to a sixth aspect of the present invention, there is provided a bonding tool for an electronic component, which is a bonding tool for crimping the electronic component onto a surface to be joined while applying load and vibration to the electronic component. And a groove provided in a surface corresponding to the antinode of standing wave vibration induced by the vibrator on the surface of the horn on the crimping side in a symmetrical shape and orthogonal to the vibration propagation direction. And a contact surface contacting the bottom surface of the groove, and a contact surface contacting the bottom surface of the groove. In the state where the crimping member provided in a divergent shape toward the surface and the uneven portion provided on the contact surface provided on the crimping member are brought into contact with the positioning unevenness portion provided on the bottom surface of the groove. A third table facing the first surface. A fourth tapered surface facing the surface and the second surface, a first fitting member that abuts the first surface and the third tapered surface, the second surface and the fourth tapered surface A second fitting member that comes into contact with the first fitting member and a second fitting member that fastens the first fitting member and the second fitting member to the horn, respectively.

An electronic component bonding tool according to a seventh aspect is the electronic component bonding tool according to the sixth aspect, wherein the first fastening means and the second fastening means are provided in the groove of the horn. Through hole opened,
The bolt member is inserted through the through hole, and the nut member is screwed with the bolt member to fasten the first fitting member and the second fitting member to the horn.

An electronic part bonding tool according to an eighth aspect is the electronic part bonding tool according to the seventh aspect, wherein the bolt member is screwed to the first fitting member and the second fitting member. The inner thread part is formed,
The first fitting member and the second fitting member also serve as the nut member.

An electronic component bonding tool according to a ninth aspect is the electronic component bonding tool according to the sixth aspect, wherein the first fastening means and the second fastening means are provided in the groove of the horn. An inner threaded portion provided with an opening, and a bolt member that is screwed into the inner threaded portion and fastens the first fitting member and the second fitting member to the horn.

An electronic component bonding tool according to a tenth aspect of the present invention is the electronic component bonding tool according to any one of the sixth through ninth aspects, wherein the crimping member penetrates from the joining action portion to the contact surface with the groove. The horn has a suction hole provided, and in a state where the contact surface is in contact with the bottom surface of the groove, the horn is provided with a seal member interposed between the bottom surface and the contact surface. It communicates with the suction hole provided inside.

An electronic component bonding apparatus according to an eleventh aspect of the present invention is an electronic component bonding apparatus for crimping an electronic component to a surface to be joined while applying a load and vibration to the electronic component, and abutting the electronic component. A bonding tool and a pressing unit that presses the bonding tool against the electronic component are provided, and the bonding tool includes a horizontally long horn, a vibrator that applies vibration to the horn, and a surface on the crimping side of the horn. A groove that is symmetrically formed at a position corresponding to the antinode of standing wave vibration induced by the vibrator and that is orthogonal to the vibration propagation direction, and a first groove provided on both left and right inner side surfaces of the groove. And a second surface and a contact surface that abuts on the bottom surface of the groove, and a crimping element that is provided in a divergent shape from the joining action portion that abuts the electronic component toward the abutting surface. A third tapered surface facing the first surface in a state where the uneven portion provided on the contact surface provided on the pressure contactor is brought into contact with the uneven portion for positioning provided on the bottom surface of the groove. And a fourth taper surface facing the second surface, and a symmetrical shape with respect to the vibration propagation direction on the surface of the horn opposite to the groove, the position being the antinode of the standing wave vibration. First sub-grooves and second sub-grooves provided orthogonally to each other, a first fitting member that abuts the first surface and the third tapered surface, the second surface and the fourth surface. A second fitting member that comes into contact with the tapered surface, a third fitting member and a fourth fitting member that fit into the first sub groove and the second sub groove, respectively, and a first sub groove. A first through hole that is open to the groove and penetrates to the groove; and a second through hole that opens to the second sub-groove and penetrates to the groove; A first bolt member that is inserted through the through hole of the first nut member and is screwed with the first nut member to fasten the first fitting member and the third fitting member to the horn, and the second through hole is inserted. Then, the second nut member is screwed into the second nut member
Second fastening member for fastening the fourth fitting member and the fourth fitting member to the horn
And a bolt member.

An electronic component bonding apparatus according to a twelfth aspect is the electronic component bonding apparatus according to the eleventh aspect, wherein any one of the first fitting member and the third fitting member is used. Is formed with an inner threaded portion that is screwed with the first bolt member, and the fitting member having the inner threaded portion also serves as the first nut member, and the second fitting member and the fourth fitting member are formed. An inner threaded portion that is screwed with the second bolt member is formed on any one of the fitting members, and the fitting member with the inner threaded portion also serves as the second nut member.

An electronic component bonding apparatus according to a thirteenth aspect is the electronic component bonding apparatus according to any one of the eleventh aspect and the twelfth aspect, wherein the contact surface of the crimping member is in contact with the groove from the joining action portion. With a suction hole that penetrates up to, with the contact surface in contact with the bottom surface of the groove,
The suction hole communicates with a suction hole provided inside the horn via a seal member interposed between the bottom surface and the contact surface.

A bonding tool for an electronic component according to a fourteenth aspect is a bonding tool for crimping an electronic component onto a surface to be bonded while applying a load and a vibration to the electronic component. And a groove provided in a surface corresponding to the antinode of standing wave vibration induced by the vibrator on the surface of the horn on the crimping side in a symmetrical shape and orthogonal to the vibration propagation direction. And a contact surface contacting the bottom surface of the groove, and a contact surface contacting the bottom surface of the groove. In the state where the crimping member provided in a divergent shape toward the surface and the uneven portion provided on the contact surface provided on the crimping member are brought into contact with the positioning unevenness portion provided on the bottom surface of the groove. A third te facing the first surface. A fourth taper surface facing the first surface and the second surface, and a symmetrical shape in the vibration propagation direction on the surface opposite to the groove of the horn, with a position corresponding to the antinode of the standing wave vibration being the center. A first sub-groove and a second sub-groove that are provided orthogonal to each other, a first fitting member that comes into contact with the first surface and the third tapered surface, the second surface and the second A second fitting member that comes into contact with the tapered surface of No. 4, a third fitting member and a fourth fitting member that fit into the first sub-groove and the second sub-groove, respectively; A first through hole that opens to the sub groove and penetrates to the groove, a second through hole that opens to the second sub groove and penetrates to the groove, and a first nut that passes through the first through hole. A first bolt member that is screwed to the member to fasten the first fitting member and the third fitting member to the horn; and the second through hole. Screwed and 2 of the nut member the second engagement member and a fourth engaging member and a second bolt member for fastening the horn.

A bonding tool for an electronic component according to a fifteenth aspect is the bonding tool for an electronic component according to the fourteenth aspect, wherein any one of the first fitting member and the third fitting member is used. Is formed with an inner threaded portion that is screwed with the first bolt member, and the fitting member having the inner threaded portion also serves as the first nut member, and the second fitting member and the fourth fitting member are formed. An inner threaded portion that is screwed with the second bolt member is formed on any one of the fitting members, and the fitting member with the inner threaded portion also serves as the second nut member.

A bonding tool for an electronic component according to a sixteenth aspect is the bonding tool for an electronic component according to any one of the fourteenth and fifteenth aspects, wherein the contact surface of the crimping member from the joining action portion to the groove is contacted. A sealing member having a suction hole penetrating to the bottom surface of the groove and the suction hole being interposed between the bottom surface and the contact surface. Through a suction hole provided inside the horn.

According to the present invention, the bottom end of the groove having the taper surface which is open to the outside on both sides is brought into contact with the crimping member having a diverging shape in which both side surfaces are tapered, and the taper surface of the groove and the crimping member are By fitting the fitting member between the side surface and the taper surface and fastening it to the horn, it is possible to secure the stable shape accuracy and fasten the crimping tool without screwing the crimping tool.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIG. 1 is a front view of a bonding apparatus for electronic parts according to Embodiment 1 of the present invention.
2 is a vertically inverted perspective view of an electronic component bonding tool according to the first embodiment of the present invention, and FIG. 3 is a first embodiment of the present invention.
FIG. 4, FIG. 5, and FIG. 6 are partial cross-sectional views of the bonding tool for electronic components according to Embodiment 1 of the present invention.

First, the overall structure of the electronic device bonding apparatus will be described with reference to FIG. Reference numeral 1 denotes a support frame, on the front surface of which a first elevating plate 2 and a second elevating plate 3 are vertically movable. A cylinder 4 is mounted on the first lifting plate 2, and a rod 5 of the cylinder 4 is connected to the second lifting plate 3. A bonding head 10 is attached to the second lift plate 3. A Z-axis motor 6 is provided on the upper surface of the support frame 1. Z-axis motor 6 has vertical feed screw 7
To rotate. The feed screw 7 is screwed into a nut 8 provided on the back surface of the first elevating plate 2. Therefore, when the Z-axis motor 6 is driven and the feed screw 7 rotates, the nut 8 moves up and down along the feed screw 7, and the first lifting plate 2 and the second lifting plate 3 are moved.
Also moves up and down.

In FIG. 1, the substrate 46 whose upper surface is the surface to be joined of the electronic component is placed on the substrate holder 47,
The substrate holder 47 is placed on the table 48. The table 48 is a movable table, and horizontally moves the substrate 46 in the X direction and the Y direction to position the substrate 46 at a predetermined position. The table 48 is the substrate 4 for the electronic component 40.
It is a positioning means for moving the 6 relatively.

Reference numeral 42 denotes a camera, which is a uniaxial table 43.
Is attached to. A lens barrel 44 extends forward from the camera 42. The camera 42 is moved forward along the uniaxial table 43, and the tip of the lens barrel 44 is adsorbed and held on the lower surface of the bonding tool 14 as shown by the chain line to hold the bumped electronic component 40 and the substrate 46. The position of the electronic component 40 and the substrate 46 is observed by the camera 42 in this state.

A recognition unit 53 recognizes the images of the electronic component 40 and the substrate 46 picked up by the camera 42 and detects their positions. Reference numeral 50 denotes a main control unit that controls the vertical movement of the Z-axis motor 6, that is, the bonding head 10 via a motor drive unit 51, and positions the table 48, that is, the substrate 46, via the table control unit 52. Further, the main control unit 50 calculates the positional deviation between the electronic component 40 and the substrate 46 in the horizontal plane from the positions detected by the recognition unit 53, and drives the table 48 so as to correct the positional deviation. Further, the load control unit 54 and the suction device 56 are connected to the main control unit 50.

The cylinder 4 as the pressing means is connected to the main control unit 50 via the load control unit 54, and the projection output of the rod 5 of the cylinder 4, that is, the bonding tool 1
At 4, the pressing load for pressing the bump of the electronic component 40 against the substrate 46 is controlled. The suction device 56 receives the command from the main control unit 50, and the electronic component 4 by the bonding tool 14
Performs suction / release of 0. The transducer 17, which is an ultrasonic transducer, is connected to the main controller 5 via the ultrasonic transducer driver 55.
0, and performs ultrasonic vibration according to a command from the main control unit 50.

A holder 12 is connected to the lower end of the main body 11 of the bonding head 10. A block 13 is attached to the holder 12, and a bonding tool 14 is fixed to the block 13. The protrusion 13 a on the side of the block 13 is connected to the suction device 56. The bonding tool 14 will be described below with reference to FIGS. 2 and 3.

As shown in FIGS. 2 and 3, the bonding tool 14 is mainly composed of a horizontally long horn 15. The horn 15 is an elongated rod-shaped body, and has a tapered surface 1 that gradually narrows from both sides toward the center in plan view.
5a. At the center of the horn 15, a taper-shaped crimping element 30 (suction portion) is attached so as to project downward and be detachable.

In FIG. 1, a suction pad 19 is attached to the protrusion 13a provided on the side surface of the block 13. The horn 15 is formed with vacuum suction holes 16a and 16b which communicate with the suction holes 32 of the crimp 30 and the suction pad 19 is in contact with the vacuum suction hole 16b on the upper surface of the horn 15. Therefore, by driving the suction device 56 (FIG. 1) connected to the suction pad 19 to suck air,
Vacuum suction can be performed from the suction holes 32 (FIG. 3B) opened in the crimping member 30, and the electronic component 40 with bumps can be vacuum-sucked and held on the lower surface of the crimping member 30.

The lower end portion of the crimping member 30 has a joining action portion 30a.
(See FIG. 4), the bending vibration of the crimping member 30 and the pressing load of the pressing means (cylinder 4) are applied to the electronic component 40. The crimping element 30 adsorbs and holds the electronic component 40, and at the time of bonding, the crimping surface 30b (see FIG. 4) of the joining action portion 30a contacts the upper surface of the electronic component 40 to press the electronic component 40 against the substrate 46. To do.

Ribs 15c are provided integrally with the horn 15 at four locations equidistant from the crimping piece 30. In order to improve the mounting balance on the block 13, the four ribs 15c are provided so as to project symmetrically with respect to the crimping piece 30 at the center of the horn 15 in a plan view. The bonding tool 14 is detachably mounted on the lower surface of the block 13 by screwing a bolt into the through hole 20 formed in the rib 15c.

In FIG. 2, a vibrator 17 which is a vibration applying means is attached to the side end of the horn 15. By driving the vibrator 17, longitudinal vibration (vibration in the longitudinal direction of the horn 15) is applied to the horn 15, and the crimping element 30 vibrates in the horizontal direction a (the longitudinal direction of the horn 15). Figure 3
As shown in (a) and (b), the horn 15 has a shape in which the width and height are sequentially reduced from both ends toward the center through the side tapered surface 15a and the upper and lower tapered surfaces 15b. Has become.

As a result, the amplitude of ultrasonic vibration is amplified in the path transmitted from the vibrator 17 to the crimp 30.
Vibration having an amplitude larger than that of the oscillator 17 is transmitted to the crimping member 30, and this vibration is transmitted through the crimping surface 30b to the electronic component 4
Transmitted to 0. In transmitting the vibration to the electronic component 40, not only the longitudinal vibration transmitted by the vibrator 17 via the horn 15, but also the bending vibration induced in the tapered crimp 30 by the longitudinal vibration of the horn 15 is superimposed. Be transmitted.

Next, referring to FIGS. 4 and 5, the mounting of the crimping member 30 on the horn 15 will be described. At the center position of the lower surface side (crimping side) of the horn 15, that is, at the position corresponding to the antinode of the standing wave vibration induced in the horn 15 by the vibrator 17, a groove 18 having a symmetrical shape has a vibration propagation direction (the horn 15).
Direction (the direction perpendicular to the paper surface)
It is provided in. Both left and right inner side surfaces of the groove 18 have a tapered first tapered surface (first surface) 18a, which is open outward.
The second tapered surface (second surface) 18b is formed. Groove 1
In the center of the bottom surface 18c of No. 8, a positioning recess 18d is formed.
Is provided, and a vacuum suction hole 16a provided inside the horn 15 is opened in the recess 18d.

The crimp 30 mounted on the horn 15 has a divergent shape in which the width increases from the joining action portion 30a that abuts the electronic component 40 to the abutment surface 30f that abuts the bottom surface 18c of the groove 18. , The contact surface 30f has a groove 1
8 is provided with a convex portion 30e that fits into the concave portion 18d. Alternatively, the concave and convex directions of the concave portion 18d and the convex portion 30e may be reversed, and the convex portion may be provided on the groove 18 side and the concave portion may be provided on the crimping member 30 side for positioning.

The crimp 30 is provided with a suction hole 32 penetrating from the joining action portion 30a to the contact surface 30f.
In the state where the contact surface 30f is in contact with the bottom surface 18c of the groove 18, the suction holes 32 are located in the recess 18d of the bottom surface 18c and the contact surface 30.
A vacuum suction hole 16a provided inside the horn 15 via a seal member 31 interposed between the convex portion 30e of FIG.
It is designed to communicate with.

Both side surfaces of the crimping member 30 have a third taper surface 30.
c and the fourth taper surface 30d, the projection 30e is fitted into the positioning recess 18d, and the crimp 30 is inserted into the groove 1.
8 and the contact surface 30f is the bottom surface 18c of the groove 18.
The first taper surface 18a and the second taper surface 18b face the third taper surface 30c and the fourth taper surface 30d, respectively. At the central position of the upper surface of the horn 15, a convex portion 15d having a substantially symmetrical shape with the crimping member 30 is formed.
Is provided, and the mass distribution of the horn 15 is kept symmetrical with respect to the center line in the vibration propagation direction in the state where the crimp 30 is attached to the horn 15.

Next, a method of fastening the crimping member 30 to the horn 15 will be described. The horn 15 is provided with two vertical through holes 15e that are open at both ends of the groove 18, and when the crimping member 30 is fastened to the horn 15, as shown in FIG. 15e has a first bolt member 33
A, the second bolt member 33B is inserted from the upper side. Then, the first bolt member 33A and the second bolt member 33B
Of the first fitting member 34 having a tapered shape.
A, it is screwed into the inner threaded portion 34a of the second fitting member 34B.

As a result, the first fitting member 3 shown in FIG.
4A taper surface 34b, 34c, the first taper surface 18
a, the third taper surface 30c, respectively, and the second
The tapered surfaces 34d and 34e of the fitting member 34B come into contact with the second tapered surface 18b and the fourth tapered surface 30d, respectively. Then, by tightening the first bolt member 33A and the second bolt member 33B with a predetermined tightening torque,
The contact surface 30f of the crimping member 30 is pressed against the bottom surface 18c of the groove 18 with a predetermined surface pressure, and firm fastening is realized.

In this fastening state, the shape accuracy of the crimping member 30 with respect to the horn 15 is such that the contact surface 30f is in contact with the bottom surface 18c of the groove 18 and the convex portion 30e is fitted in the concave portion 18d. The crimping member 30 is fastened in a correct posture without causing a positional displacement in the horizontal direction and variation in parallelism of the crimping surface 30b with respect to the horn 15. Further, when the crimping piece 30 is fastened, the crimping piece 30 does not need to be threaded, so that the material of the crimping piece 30 can be selected from a wide range including materials such as ceramics that are not suitable for threading.

The first surface 18a and the second surface 18b
Does not have to be a tapered surface that is open to the outside,
It may be a vertical surface that is perpendicular to the crimp surface 30b. In this case, the first fitting member 34 that comes into contact with the first surface 18a
The taper surface 34b of A and the taper surface 34d of the second fitting member 34B that contacts the second surface 18b are also vertical surfaces.

A method shown in FIG. 6 may be used as a method of fastening the crimping member 30 to the horn 15.
In the example shown in FIG. 6A, instead of the first fitting member 34A and the second fitting member 34B provided with the inner screw portion 34a, the first fitting member 34 provided with a through hole. 'A, second
The fitting member 34'B is used. Then, the first bolt member 3 protruding downward through each of the through holes 15e, the first fitting member 34'A, and the second fitting member 34'B.
3'A, the screw portion of the second bolt member 33'B is screwed into the nut member 35 to be tightened, so that the crimp 3
Fasten 0 to horn 15.

In this example, the through hole 15e, the first bolt member 33'A, the second bolt member 33'B, and the nut member 35 are connected to the first fitting member 34'A and the second fitting member. It serves as a first fastening means and a second fastening means for fastening the coupling member 34'B to the horn 15. In addition, in the example shown in FIGS. 4 and 5, the first fitting member 34A and the second fitting member 34B are formed with the inner threaded portion 34a, and the first fitting member 34A and the second fitting member 34A are formed. 34B has a shape that also serves as the nut member 35.

In the example shown in FIG. 6B, the horn 15
In place of the through hole 15e, the inner screw portion 15′e is provided, and the first bolt member 33 ″ A and the second bolt member 33 ″ are provided.
B is the first fitting member 34'A, the second fitting member 34 '
The internal threaded portion 1 is inserted through the through hole provided in B from below.
5'e is screwed together. In this example, the inner threaded portion 15′e, the first bolt member 33 ″ A, and the second bolt member 33 ″ B are the first fitting member 34′A and the second fitting member 34. It serves as a first fastening means and a second fastening means for fastening the B to the horn 15.

(Second Embodiment) FIGS. 7 and 8 are partial sectional views of a bonding tool for an electronic component according to a second embodiment of the present invention. In FIG. 7, the groove 18 provided on the lower surface side of the horn 15, the crimp 30, the seal member 31, the first fitting member 34A, the second fitting member 34B, the first bolt member 33A, and the second bolt member 33A. Bolt member 33B is similar to that shown in FIG. 4 in the first embodiment.

On the upper surface side of the horn 15 (opposite to the surface on which the groove 18 is formed), the first sub groove 15f and the second auxiliary groove 15f are formed on both sides of the convex portion 15d with the positions corresponding to the antinodes of standing wave vibration as the center. Sub groove 1
5g is provided. Each of the first sub-groove 15f and the second sub-groove 15g has a bilaterally symmetrical shape and is provided orthogonally to the vibration propagation direction, and has a pair of tapered surfaces 15h opened to the outside. The bottom surface of the first sub-groove 15f and the second sub-groove 15g extends to the bottom surface groove 18 through the first sub-groove.
Through holes 15i and second through holes 15j are provided.

The first sub-groove 15f and the second sub-groove 15g are fitted with the tapered third fitting member 36A and the fourth fitting member 36B having the through holes 36a. In this state, as shown in FIG. 8, the first bolt member 33A is attached to the third fitting member 36A and the first through hole 15 from the upper side.
The first fitting member 34A and the third fitting member 36A are fastened to the horn 15 by inserting i and screwing it into the first fitting member 34A and tightening it. In addition, the second fitting member 36B is inserted from the upper side through the fourth fitting member 36B and the second through hole 15j, and is screwed and tightened with the second fitting member 34B, whereby the second fitting member 34
B and the third fitting member 36A are fastened to the horn 15.

In the second embodiment, similar to the first embodiment, a strong fastening having excellent shape accuracy is realized, and two tapered fitting members are provided on the upper surface side and the lower surface side of the horn 15. Since they are arranged and fastened to each other, the tightening force acting on the horn 15 becomes uniform in the vertical direction, and the deformation of the horn 15 due to the tightening can be reduced as much as possible.

In the above-described embodiment, the first screw member 33A and the second screw member 33B are screwed into the first screw member 34A and the second screw member 34B.
The inner screw is provided on the third fitting member 36A and the fourth fitting member 36B, and the first bolt member 33A and the second bolt member 33B are inserted from below and fixed. You may do it. Further, FIG. 6 of the first embodiment.
Similar to the example shown in (a), the first bolt member 33A and the second bolt member 33B may be screwed into the nut member 35 and tightened. In the example shown in FIGS. 7 and 8,
The first fitting member 34A and the second fitting member 34B have a shape that doubles as a nut member.

Further, as in the first embodiment, the first surface 1
8a and the second surface 18b may be vertical surfaces. In this case, the taper surface 15h of the first sub-groove 15f located symmetrically to the first surface 18a and the taper surface 15h of the second sub-groove 15g located symmetrically to the second surface 18b may be vertical surfaces. desirable.

[0054]

According to the present invention, a divergent crimping member having tapered surfaces on both sides is brought into contact with the bottom surface of a groove having tapered surfaces open on both sides to crimp the taper surface of the groove. Since the fitting member is fitted between the side surface of the child and the taper surface and fastened to the horn, the crimping terminal is fastened with stable shape accuracy without screwing the crimping terminal. be able to.

[Brief description of drawings]

FIG. 1 is a front view of an electronic component bonding apparatus according to a first embodiment of the present invention.

FIG. 2 is an upside-down perspective view of the bonding tool for electronic components according to the first embodiment of the present invention.

FIG. 3 is a front view of the bonding tool for electronic components according to the first embodiment of the present invention.

FIG. 4 is a partial cross-sectional view of a bonding tool for electronic components according to the first embodiment of the present invention.

FIG. 5 is a partial cross-sectional view of a bonding tool for electronic components according to the first embodiment of the present invention.

FIG. 6 is a partial cross-sectional view of a bonding tool for an electronic component according to the first embodiment of the present invention.

FIG. 7 is a partial sectional view of a bonding tool for an electronic component according to a second embodiment of the present invention.

FIG. 8 is a partial sectional view of a bonding tool for an electronic component according to a second embodiment of the present invention.

[Explanation of symbols]

14 Bonding tool 15 horn 16a suction hole 17 oscillators 18 grooves 18a First tapered surface (first surface) 18b Second tapered surface (second surface) 18c bottom 18d recess 30 Crimper (Suction part) 30a Joining action part 30c Third tapered surface 30d Fourth tapered surface 30e convex part 32 suction holes 33A First bolt member 33B Second bolt member 34A First fitting member 34B Second fitting member

Continued front page    (72) Inventor Masafumi Hinoki             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F term (reference) 5F044 PP16

Claims (16)

[Claims] 1. A bonding apparatus for an electronic component, wherein an electronic component is pressure-bonded to a surface to be joined while a load and vibration are applied to the electronic component, the bonding tool being in contact with the electronic component, and the bonding tool being the electronic component. And a pressing means for pressing the component, the bonding tool,
A horizontally long horn, a vibrator that imparts vibration to the horn, and a bilaterally symmetrical shape in the vibration propagation direction at a position corresponding to the antinode of standing wave vibration induced by the vibrator on the pressure-bonding side surface of the horn. The electronic component has a groove provided orthogonal to each other, a first surface and a second surface provided on both left and right inner side surfaces of the groove, and an abutting surface that abuts a bottom surface of the groove. A crimping member provided in a divergent shape toward the abutting surface from the abutting joining action portion, and a concavo-convex portion provided on the abutting surface and provided on the crimping member for positioning provided on the bottom surface of the groove. A third taper surface facing the first surface and a fourth taper surface facing the second surface in the state of being brought into contact with the uneven portion; the first surface and the third taper surface; A first fitting member that abuts, and a first fitting member that abuts the second surface and the fourth tapered surface. And a first tightening means and a second tightening means for respectively fastening the first fitting member and the second fitting member to the horn. apparatus. 2. The first tightening means and the second tightening means, a through hole opened in the groove of the horn, a bolt member inserted through the through hole, and screwed with the bolt member. 2. The electronic component bonding apparatus according to claim 1, wherein the first fitting member and the second fitting member are nut members for fastening the horn to the horn. 3. The first fitting member and the second fitting member are formed with an internal thread portion to be screwed with the bolt member, and the first fitting member and the second fitting member are The electronic component bonding apparatus according to claim 2, which also functions as the nut member. 4. The first tightening means and the second tightening means have an inner threaded portion provided in the groove of the horn, the inner threaded portion being threadedly engaged with the inner threaded portion. 2. The electronic component bonding apparatus according to claim 1, which is a bolt member for fastening the fitting member and the second fitting member to the horn. 5. The crimping member has a suction hole penetrating from a joining action portion to a contact surface with the groove, and the contact surface is in contact with a bottom surface of the groove, 5. The electronic component according to claim 1, wherein the suction hole communicates with a suction hole provided inside the horn via a seal member interposed between the bottom surface and the contact surface. Bonding equipment. 6. A bonding tool for crimping an electronic component to a surface to be joined while applying load and vibration to the electronic component, which is a horizontally long horn, a vibrator for imparting vibration to the horn, and a horn of the horn. A groove provided on the surface on the pressure-bonding side at a position corresponding to the antinode of standing wave vibration induced by the vibrator and having a symmetrical shape and orthogonal to the vibration propagation direction,
The first surface and the second surface provided on both the left and right inner side surfaces of this groove.
And a crimping member that has a contacting surface that contacts the bottom surface of the groove and is formed in a shape that widens toward the contacting surface from the joining action portion that contacts the electronic component. A third taper surface and a second surface that face the first surface in a state where the uneven portion provided on the contact surface is brought into contact with the uneven portion for positioning provided on the bottom surface of the groove; A fourth tapered surface facing each other, a first fitting member that abuts the first surface and a third tapered surface, and a second fitting that abuts the second surface and a fourth tapered surface. A bonding tool for an electronic component, comprising: a member; and a first fastening means and a second fastening means for fastening the first fitting member and the second fitting member to a horn, respectively. 7. The first tightening means and the second tightening means are a through hole opened in the groove of the horn, a bolt member inserted through the through hole, and screwed with the bolt member. 7. The electronic component bonding tool according to claim 6, wherein the nut member is a nut member for fastening the first fitting member and the second fitting member to a horn. 8. The first fitting member and the second fitting member are formed with an internal thread portion to be screwed with the bolt member, and the first fitting member and the second fitting member are The electronic component bonding tool according to claim 7, which also functions as the nut member. 9. The first tightening means and the second tightening means are provided with an inner threaded portion provided to open in the groove of the horn and the first threaded portion screwed into the inner threaded portion. The electronic component bonding tool according to claim 6, which is a bolt member for fastening the fitting member and the second fitting member to the horn. 10. The crimping member has a suction hole penetrating from a joining action portion to a contact surface with the groove, wherein the contact surface is in contact with the bottom surface of the groove. 10. The electronic component according to claim 6, wherein the suction hole communicates with a suction hole provided inside the horn through a seal member interposed between the bottom surface and the contact surface. Bonding tool. 11. A bonding apparatus for an electronic component, wherein an electronic component is pressure-bonded to a surface to be joined while applying load and vibration to the electronic component, the bonding tool being in contact with the electronic component, and the bonding tool being the electronic component. The bonding tool includes a pressing means for pressing a component, the bonding tool includes a horizontally long horn, a vibrator that imparts vibration to the horn, and a standing wave vibration induced by the vibrator on a pressure-bonding side surface of the horn. A groove that is symmetrically formed at a position corresponding to the antinode of the groove and that is orthogonal to the vibration propagation direction; a first surface and a second surface that are provided on both left and right inner side surfaces of the groove; A crimping member that has a contacting surface that abuts the bottom surface of the crimping member and that is formed in a shape that spreads toward the abutting surface from a joining action portion that abuts the electronic component; Be A third taper surface facing the first surface and a fourth taper surface facing the second surface in a state where the uneven portion is brought into contact with the uneven portion for positioning provided on the bottom surface of the groove; A first sub-groove and a second sub-groove, which are symmetrically formed on the surface of the horn opposite to the groove on the side corresponding to the antinode of the standing wave vibration and are orthogonal to the vibration propagation direction. A sub-groove, a first fitting member that comes into contact with the first surface and the third tapered surface, a second fitting member that comes into contact with the second surface and the fourth tapered surface, and 1
A third fitting member and a fourth fitting member respectively fitted in the sub groove and the second sub groove, and a first through hole and a second through hole which are opened in the first sub groove and penetrate to the groove. A second through hole that opens in the sub groove and penetrates to the groove, and a first fitting member and a third fitting member that are inserted through the first through hole and screwed together with the first nut member. And a first bolt member that fastens to the horn, and a second nut member that is inserted through the second through hole and screwed into the second nut member to fasten the second fitting member and the fourth fitting member to the horn. And a second bolt member for the electronic component bonding apparatus. 12. An inner threaded portion that is screwed into the first bolt member is formed on any one of the first fitting member and the third fitting member, and the inner threaded portion is formed. The fitted fitting member also serves as the first nut member, and an inner threaded portion for screwing the second bolt member into any one of the second fitting member and the fourth fitting member. The electronic component bonding apparatus according to claim 11, wherein the fitting member having the inner threaded portion also serves as the second nut member. 13. The crimping member has a suction hole penetrating from a joining action portion to a contact surface with the groove, wherein the contact surface is in contact with the bottom surface of the groove. 13. The suction hole communicates with a suction hole provided inside the horn via a seal member interposed between the bottom surface and the contact surface, according to claim 11. Electronic component bonding equipment. 14. A bonding tool for crimping an electronic component to a surface to be joined while applying load and vibration to the electronic component, which is a horizontally long horn, a vibrator for imparting vibration to the horn, and a horn of the horn. A groove provided in the surface on the crimping side in a position corresponding to the antinode of the standing wave vibration induced by the vibrator in a symmetrical shape and orthogonal to the vibration propagation direction, and on both the left and right inner side surfaces of this groove. The first and second surfaces are provided, and a contact surface that abuts the bottom surface of the groove is provided. The crimping piece and the first concave and convex portion provided on the abutting surface of the crimping piece are brought into contact with the concave and convex portion for positioning provided on the bottom surface of the groove.
With a third taper surface facing the surface and a fourth taper surface facing the second surface, and a position corresponding to the antinode of the standing wave vibration on the surface of the horn opposite to the groove. A first sub-groove and a second sub-groove that are symmetrically formed and are orthogonal to the vibration propagation direction; and a first fitting member that comes into contact with the first surface and the third tapered surface. A second fitting member that comes into contact with the second surface and the fourth tapered surface,
A third fitting member and a fourth fitting member which are fitted into the first sub-groove and the second sub-groove, respectively, and a first through hole which is opened in the first sub-groove and penetrates to the groove. And a second through hole that opens in the second sub-groove and penetrates to the groove;
A first bolt member that is inserted through the through hole of the first nut member and is screwed with the first nut member to fasten the first fitting member and the third fitting member to the horn, and the second through hole is inserted. And a second bolt member for screwing together with the second nut member to fasten the second fitting member and the fourth fitting member to the horn. 15. An inner threaded portion that is screwed with the first bolt member is formed on any one of the first fitting member and the third fitting member, and the inner threaded portion is formed. The fitted fitting member also serves as the first nut member, and an inner threaded portion for screwing the second bolt member into any one of the second fitting member and the fourth fitting member. 15. The electronic component bonding tool according to claim 14, wherein the fitting member having the internal threaded portion also serves as the second nut member. 16. The crimping member has a suction hole penetrating from a joining action portion to a contact surface with the groove, wherein the contact surface is in contact with the bottom surface of the groove. The suction hole communicates with a suction hole provided inside the horn through a seal member interposed between the bottom surface and the contact surface. Electronic component bonding tool.