JP2003121574A - Table equipment - Google Patents

Abstract

(57) [Problem] To provide a table device which can be moved in multiple directions, and which is easily reduced in size and thickness. An XYθ table device 100 includes a fixed support 101, an X table 102, and a Y table 10.
3 is a configuration in which the components are stacked and arranged. X table 102
Is provided so as to be movable in the X-axis direction with respect to the fixed support 101, and the Y table 103 is provided so as to be movable in the Y-axis direction with respect to the X table 102. The Y table 103 holds a rotation motor 104, and the rotor 151 of the rotation motor 104 is driven to rotate by supplying a current to a coil 160 provided on the upper surface of the X table 102.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a table device for mounting an alignment device, an inspection device and the like.

[0002]

2. Description of the Related Art Conventionally, as a table device equipped with an alignment device, an inspection device, etc., it is required to move the installed device with a high degree of freedom. An XYθ table device is known as a table device that meets such a request.

As an XYθ table device of this type, an X-direction drive mechanism for driving the table in one direction (X-axis direction) by a system such as a linear motor or a ball screw, and a direction (Y direction) which is orthogonal to the one direction of the table. There is known a structure in which a mechanism for driving a table in two orthogonal directions, such as a Y-direction drive mechanism for driving in the axial direction) is superposed and a rotary motor is arranged on the table.

However, it is difficult to reduce the size and thickness of the structure in which the mechanisms for driving the tables in the two orthogonal directions are superposed on each other and the rotary motor is arranged on the tables. For this reason, the power consumption and so on will increase.

An XYθ table device having a structure as shown in FIG. 1 has also been proposed. As shown in the figure, this X
The Yθ table device includes a fixed support 1 having a substantially square plate shape,
X table 2 and Y stacked on the fixed support 1
And a table 3. The X table 2 is a plate-shaped member having substantially the same shape as the fixed support body 1, and is supported so as to be movable in the X axis direction along a drive guide mechanism 1 a provided on the fixed support body 1 along the X axis direction. Has been done. The Y table 3 is also a plate-shaped member having substantially the same shape as the fixed support 1,
It is movably supported in the Y-axis direction along a drive guide mechanism 2a provided on the X-table 2 along the Y-axis direction.

On the surface of the Y-table 3, fixed supports 1,
A rotary motor 5 having a rotor 4 that is rotatable about the stacking direction of the X table 2 and the Y table 3 (Z-axis direction) is arranged. Here, linear driving means for moving the X table 2 in the X axis direction with respect to the fixed support 1 and driving means for moving the Y table 3 in the Y axis direction with respect to the X table 2 are A method such as a motor or a ball screw is used, and the rotary motor 5 is also an ordinary general electric motor.

Under this structure, by controlling the position of the X table 2 with respect to the fixed support 1 in the X axis direction and the position of the Y table 3 with respect to the X table 2 in the Y axis direction, the X table 2 is placed on the XY plane. It can be moved to any position. In this way, by controlling the rotation angle θ of the rotor 4 in the rotary motor 5 that can be positioned at any position on the XY plane, the position of the alignment device or the like mounted on the rotor 4 can be further adjusted within the XY plane. It can be moved in the θ direction (rotation).

[0008]

The fixed support 1, the X table 2 and the Y table 3 described above are stacked and arranged on the X side.
The Yθ table device can reduce the installation area occupied in the XY plane. However, since the XYθ table device described above has a structure in which the above three members are stacked and the rotary motor 5 is arranged on the upper surface of the Y table 3 which is the uppermost layer, the size H in the height direction is It gets bigger. That is, it is difficult to reduce the thickness of the conventional XYθ table device due to its structure.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a table device which can be moved in multiple directions and which can be easily reduced in size and thickness.

[0010]

In order to solve the above-mentioned problems, a table device according to the present invention includes a plate-shaped table having a flat surface portion, and one side of the table along the flat surface portion with respect to the table. A table device including a rotating body support table movably supported in a first direction, and a rotating body rotatably supported by the rotating body support table with an axis perpendicular to the plane portion as an axial direction. It is arranged on the flat part of the one side of the table,
First direction driving means for moving the rotating body supporting table along the first direction, and the first direction driving means arranged between the one side flat portion of the table member and the rotating body supporting table. And a driving force applying means for applying a rotational driving force to the rotating body.

In this structure, the driving force applying means for applying the driving force to the rotating body is at a position different from the first direction driving means for driving the rotating body supporting table on the plane of the table in the first direction. Since it is arranged at, the driving force applying means can be arranged between the rotating body supporting table and the table. Therefore, it is possible to reduce the number of parts or the like that project to the opposite side of the rotary body support table from the table, and it is easy to make the apparatus small and thin.

[0012]

DETAILED DESCRIPTION OF THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. A. Embodiment First, FIG. 2 is an exploded perspective view showing an XYθ table device according to an embodiment of the present invention, and FIG. 3 is a side view thereof. As shown in FIGS. 2 and 3, this XYθ table device 100 includes a substantially square plate-shaped fixed support member 101, an X
Table 102, Y table 103, and rotary motor 1
04 and. Fixed support 101, X table 1
02 and Y table (rotating body support table) 103
Are stacked in this order from the lower side.

The fixed support 101 is formed with a substantially circular through hole 101a penetrating in the vertical direction centering on the central portion thereof, and the side portion along the X axis direction on the upper surface of the fixed support 101 with the through hole 101a interposed therebetween. An X-axis direction guide drive mechanism 110 is provided near each of 101b and 101c. The X-axis direction guide drive mechanism 110 has a rail member 110a extending along the X-axis direction.
a is a guide portion 120 provided on the lower surface of the X table 102 near the side portions 121a and 121b along the X-axis direction.
a (see FIG. 3) is slidably engaged. As a result, the X table 102 is movably supported along the rail member 110a.

The X-axis direction guide drive mechanism 110 has a drive mechanism 110b for driving the X-table 102 movably supported along the rail member 110a as described above in the X-axis direction. In this embodiment, a linear motor is used as such a drive mechanism 110b. Therefore, the drive mechanism 110b is a coil arranged along the X-axis direction, and the coil and the X-table 102 are arranged.
A magnetic field is generated between the core member 115b (see FIG. 3) provided on the lower surface side of the X table 102.
Generates a thrust force that moves the X axis direction. A driving method other than the linear motor method as described above may be adopted as long as it can generate thrust for moving the X table 102 along the X axis direction. For example, the X axis direction guide driving mechanism 110. Is a ball screw type X table 102
May be driven.

The X-table 102 is formed with a substantially circular through hole 102a penetrating in the vertical direction centering on the central portion thereof. Here, the through hole 102a and the through hole 10
1a is substantially coaxial, and the fixed support 101 and the through hole 101a and the through hole 102a formed in the X table 102 are connected to each other.

Further, in the vicinity of the side portions 121a and 121b on the lower surface of the X table 102, the above-mentioned guide portion 12 is provided.
0a, the core member 115b, and the like, the Y-axis direction guide drive mechanism (first direction drive means) 12 is provided near the side portions 122a and 122b along the Y-axis direction on the upper surface thereof.
3 is provided. The Y-axis direction guide drive mechanism 123 is
The rail member 123a extends along the Y-axis direction, and the rail member 123a is provided on the lower surface of the Y table 103 near the side portions 131a and 131b along the Y-axis direction. Slidably engaged). This makes the Y table 10
3 is movably supported along the rail member 123a.

The Y-axis direction guide drive mechanism 123 has a drive mechanism 123b for driving the Y-table 103, which is movably supported along the rail member 123a as described above, in the Y-axis direction. In the present embodiment, a linear motor is adopted as the drive mechanism 123b as in the drive mechanism 110b. Therefore, the drive mechanism 12
3b is a coil arranged along the Y-axis direction. Then, by generating a magnetic field between this coil and a core member (not shown) provided on the lower surface side of the Y table 103, a thrust force for moving the Y table 103 in the Y axis direction is generated. A drive system other than the linear motor system as described above may be adopted as long as it can generate a thrust force for moving the Y table 103 along the Y-axis direction. For example, the Y-axis direction guide drive mechanism 123. May drive the Y table 103 by a ball screw method.

The Y table 103 is formed with a substantially circular through hole 103a penetrating through the Y table 103 in the vertical direction centering on the central portion thereof. Here, the through hole 103a and the through hole 1
02a and the through hole 101a are substantially coaxial with each other, and the fixed support 101, the through hole 101a, the through hole 102a, and the through hole 103a formed in the X table 102 and the Y table 103, which are stacked, communicate with each other. There is. Cables for supplying electric power and control signals to the alignment device and inspection device (not shown) mounted on the rotor portion of the rotary motor 104, and pipes for supplying / discharging gas or fluid are fixedly supported. Through hole 101a, through hole 102a, and through hole 103 from the lower side of body 1
It is inserted through a and is connected to the above device.

Further, in the vicinity of the side portions 131a and 131b on the lower surface of the Y table 103, the above-mentioned guide portion 13 is provided.
0a and a core member are provided, whereby the Y table 103 is driven in the Y axis direction by the Y axis direction guide drive mechanism 123 provided on the upper surface of the X table 102.

A rotary motor 104 is inserted in the through hole 103a of the Y table 103. Figure 4
FIG. 3 is a view of the XYθ table device 100 seen from above,
FIG. 5 is a view of the XYθ table device 100 viewed from the side portion 122b side. As shown in FIGS. 4 and 5, the rotary motor 104 has a substantially cylindrical rotor 151. The rotor 151 is rotatable with respect to the Y table 103 through an annular bearing 150 arranged along the through hole 103a of the Y table 103 in the vertical direction (direction orthogonal to the X axis and the Y axis). Supported by.

A plate-shaped mounting member 151a that closes the upper side thereof is attached to the rotor 151, and the alignment device, the inspection device, and the like are installed on this mounting member 151a.

Further, the side surface portion 15 of the cylindrical rotor 151
An annular core member 155 having tooth portions 155a formed at equal intervals on the outer side is attached to the lower side of 1b. On the other hand, in the vicinity of the side portions 121a and 121b along the X axis direction on the upper surface of the X table 102, the rotor 1
A drive force applying means for rotating and driving 51 is arranged. In the present embodiment, three coils 160 are respectively arranged at positions on the upper surface of the X table 102 in the vicinity of each of the side portions 121a and 121b, and at positions facing the tooth portions 155a of the core member 155 described above. There is. That is, in the present embodiment, the rotary motor 104
Is a well-known three-phase, three-coil electric motor, X
Two sets of three coils 16 arranged on the table 102
By supplying an electric current to 0, a magnetic field is generated between the coil 160 and the core member 155 to generate a driving force for rotating the rotor 151.

The above is the configuration of the XYθ table device 100 according to the present embodiment. Under such a configuration, by controlling the power supply to the coils of the linear motor type X-axis direction guide drive mechanism 110 and the Y-axis direction guide drive mechanism 123, the rotary motor 104 is moved in the XY plane within a predetermined range. The rotor 1 can be arbitrarily positioned and the power supply to the coil 160 is controlled to control the rotor 1
The rotation amount of 51 can be controlled. Therefore, it is possible to move the alignment device, the inspection device, and the like installed on the mounting member 151a to an arbitrary position on the XY plane and further rotate them.

As described above, the XY according to this embodiment
In the θ table device 100, like the conventional XY θ table device (see, for example, FIG. 1), the alignment device, the inspection device, and the like can be moved to an arbitrary position on the XY plane and further rotated. An advantage is that it is easier to reduce the thickness as compared with the XYθ table device.
That is, as clearly shown in FIGS. 3 and 5, in the XYθ table device 100 according to the present embodiment, the coil 160, which is a component for rotationally driving the rotor 151 of the rotary motor 104, is provided on the upper surface of the X table 102. Y
It is provided at a position different from that of the axial guide drive mechanism 123. That is, the coil 160 for rotationally driving the rotor 151 is provided at a position between the Y table 103 and the X table 102. On the other hand, the conventional X
In the Yθ table device (see FIG. 1), a rotary motor 5 including a stator coil, a rotor 4 and the like is provided on the upper surface of the Y table 3.
Of the Y table 3
The number of parts projecting upward from the upper surface of is increased, and as a result, the size in the height direction is increased. On the other hand, in the XYθ table device 100 according to the present embodiment, as described above, the components for applying the rotational driving force to the rotor 151 such as the coil 160 are arranged between the Y table 103 and the X table 102. , Y table 10
It is possible to reduce the protrusion of the parts above the upper surface of 3 and thereby suppress the increase in size in the height direction.

Further, in the XYθ table device 100 according to the present embodiment, by disposing the coil 160 as described above, an increase in size in the height direction is suppressed and the rotor is provided in the through hole 103a of the Y table 103. 15
By inserting and arranging 1, the protrusion amount of the rotor 151 to the upper side from the upper surface of the Y table 103 can be suppressed, and thus the increase in size in the height direction can be further suppressed.

B. Modifications The present invention is not limited to the above-described embodiment, and various modifications as exemplified below are possible.

(Modification 1) In the above-described embodiment, the rotary motor 104 is an electric motor having a three-phase, three-coil configuration. However, the present invention is not limited to this, and other types of motors may be used. Good. Also in this case, by arranging the components that generate the driving force for rotationally driving the rotor between the X table 102 and the Y table 103, and by preventing the parts from protruding from the upper surface of the Y table 103 as much as possible, Similar to the above-described embodiment, it is possible to obtain the effect of suppressing an increase in size in the height direction.

(Modification 2) Further, in the above-described embodiment, the side portion 121 on the upper surface of the X table 102.
Although the coil 160 is arranged in the vicinity of a and b, it may be arranged in a position between the X table 102 and the Y table 103, and may be configured as shown in FIG. 6, for example. As shown in the figure, in the XYθ table device 100 ′, the X table 102 and the Y table 10 are
The plane area of 3 is the X table 102 in the above embodiment.
And larger than the Y table 103. Then, in the modified example, a large number of coils 160 are
It is arranged on the upper surface of the table 102 so as to cover the entire outer periphery of the core member 155. In this way, the rail member 123 is provided at a position near the side portions 122a and 122b on the outer side of the coil 160 which is arranged so as to cover the entire outer peripheral side of the rotor 151.
a and a drive mechanism 123b are provided.

With the above-described structure, the driving torque for rotationally driving the rotor 151 in the rotary motor 104 can be increased and the Y table 10 can be used.
It is possible to increase the stroke of movement of 3 in the Y-axis direction.

(Modification 3) Further, in the above-described embodiment, the side portions 122a, 122b on the upper surface of the X table 102 are provided.
Although the rail member 123a and the drive mechanism 123b are arranged on both sides, the rail member 123a and the drive mechanism 123b may be arranged only near one of the side portions 122a and 122b. For example, when the rail member 123a and the driving mechanism 123b are arranged only near the side portion 122a, the rotor 151 is replaced with the driving mechanism 123b at the position where the driving mechanism 123b is arranged near the side portion 122b in the above embodiment. You may make it arrange | position the coil 160 for rotationally driving. In this way, the rotor 151 does not increase in size of the device on the XY plane as in the above modification.
It is possible to increase the driving torque for rotationally driving.

(Modification 4) In addition, in the above-described embodiment, the coil 160, which is the driving means, is connected to the X table 10.
The coil 160, which is the driving means, is arranged on the upper surface of the X table 102 and the Y table 103.
7 and 8 as long as they are arranged between
As shown in, the coil 160 may be attached to and held on the Y table 103 on the lower surface side of the Y table 103. In this case as well, similar to the above-described embodiment, the coil 160 may be arranged at a position where it does not interfere with the drive mechanism 123b or the like arranged on the X table 102 as shown.

(Fifth Modification) Further, in the above-described embodiment, the case where the present invention is applied to the XYθ table device capable of moving in the X-axis direction, the Y-axis direction and the rotation direction has been described. Is not limited to this, and can be applied to, for example, a table device that can be moved in the Y-axis direction and the rotation direction.

[0033]

As described above, according to the present invention,
Although it can move in multiple directions, it is easy to make the device small and thin.

[Brief description of drawings]

FIG. 1 is a perspective view showing an appearance of a conventional XYθ table device.

FIG. 2 is an exploded perspective view showing an XYθ table device according to an embodiment of the present invention.

FIG. 3 is a side view showing the XYθ table device according to the embodiment.

FIG. 4 is a plan view showing an XYθ table device according to the embodiment.

FIG. 5 is a side sectional view showing the vicinity of a rotary motor of the XYθ table device according to the embodiment.

FIG. 6 is a plan view showing a modified example of the XYθ table device according to the embodiment.

FIG. 7 is an exploded perspective view showing another modification of the XYθ table device.

FIG. 8 is a side sectional view showing the vicinity of a rotary motor of another modification of the XYθ table device.

[Explanation of symbols]

100 ... XYθ table device, 101 ... Fixed support, 102 ... X table, 103 ... Y table, 1
03a ... through hole, 104 ... rotary motor, 110 ...
X-axis direction guide drive mechanism, 110a ... Rail member, 11
0b ... Drive mechanism, 123 ... Y-axis direction guide drive mechanism,
123a ... rail member, 123b ... driving mechanism, 15
0 ... Bearing, 151 ... Rotor, 151a ... Mounting member, 151b ... Side part, 155a ... Tooth part, 15
5 ... Core member, 160 ... Coil.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yosuke Muraguchi             100 Shintake Electric Co., Ltd. Takegahana Town, Ise City, Mie Prefecture             Company Ise office F term (reference) 2F078 CA08 CB09 CB12 CB13 CC02                       CC20                 5F031 CA02 HA01 HA57 LA07 MA33                       PA30

Claims (5)

[Claims] 1. A plate-shaped table having a flat surface portion, a rotator support table movably supported on one side of the table in a first direction along the flat surface portion with respect to the table, A table device comprising a rotating body rotatably supported by the rotating body supporting table with an axis orthogonal to a plane portion as an axial direction, the table device being disposed on the one side flat portion of the table, First direction drive means for moving the body support table along the first direction, and the first direction drive means between the flat portion on one side of the table member and the rotary body support table are arranged. A table device, which is provided at a position different from the position, and includes a driving force applying unit that applies a rotational driving force to the rotating body. 2. The table device according to claim 1, further comprising a support body that supports the table so as to be movable in a second direction orthogonal to the first direction. 3. The rotating body supporting member is formed with a through hole penetrating in the axial direction, and the rotating body is rotatably supported in the through hole.
Table device described in. 4. The rotation driving force applying means generates a magnetic field between itself and the rotating body and rotates the rotating body by the magnetic field. Table device. 5. The table is a substantially rectangular plate-shaped member, the first direction driving means is arranged near a side portion of the table along the first direction, and the driving force is The table device according to any one of claims 1 to 4, wherein the applying means is arranged in the vicinity of a side part different from the side part along the first direction of the table.