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JP2003119035A - Method for producing porous glass base material - Google Patents

Method for producing porous glass base material

Info

Publication number
JP2003119035A
JP2003119035A JP2002233144A JP2002233144A JP2003119035A JP 2003119035 A JP2003119035 A JP 2003119035A JP 2002233144 A JP2002233144 A JP 2002233144A JP 2002233144 A JP2002233144 A JP 2002233144A JP 2003119035 A JP2003119035 A JP 2003119035A
Authority
JP
Japan
Prior art keywords
burner
base material
ventilation port
gas
porous glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002233144A
Other languages
Japanese (ja)
Other versions
JP2003119035A5 (en
JP3521903B2 (en
Inventor
Toshihiro Oishi
敏弘 大石
Motonori Nakamura
元宣 中村
Taku Yamazaki
卓 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2002233144A priority Critical patent/JP3521903B2/en
Publication of JP2003119035A publication Critical patent/JP2003119035A/en
Application granted granted Critical
Publication of JP3521903B2 publication Critical patent/JP3521903B2/en
Publication of JP2003119035A5 publication Critical patent/JP2003119035A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01406Deposition reactors therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/42Assembly details; Material or dimensions of burner; Manifolds or supports

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

(57)【要約】 【課題】 出発ロッドとガラス微粒子合成用バーナとを
平行に相対的に往復運動させながらガラス微粒子を出発
ロッドの表面に一層ずつ堆積させて多孔質ガラス母材を
製造する方法において、より単純な装置構成で母材長さ
方向の外径変動を抑制できる多孔質ガラス母材の製造方
法を提供すること。 【解決手段】 前記方法において、バーナを反応容器に
セットした状態において、反応容器のバーナ取り込み箇
所の近傍に通風口を設け、該通風口から母材に向け、空
気や不活性ガスなどの気体を供給することを特徴とする
多孔質ガラス母材の製造方法。
PROBLEM TO BE SOLVED: To produce a porous glass base material by depositing glass particles one by one on a surface of a starting rod while relatively reciprocating a starting rod and a burner for synthesizing glass particles in parallel. A method of manufacturing a porous glass base material capable of suppressing variation in outer diameter in the base material length direction with a simpler device configuration. SOLUTION: In the method, in a state where a burner is set in a reaction vessel, a ventilation port is provided near a burner intake point of the reaction vessel, and a gas such as air or an inert gas is directed from the ventilation port toward a base material. A method for producing a porous glass base material, characterized by supplying.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、出発ロッドとガラ
ス微粒子合成用バーナとを相対的に往復運動させなが
ら、バーナで合成されるガラス微粒子を出発ロッドの表
面に一層ずつ堆積させる多孔質ガラス母材の製造方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a porous glass matrix for depositing glass fine particles synthesized by a burner one by one on the surface of a starting rod while relatively reciprocating a starting rod and a burner for synthesizing glass fine particles. The present invention relates to a method for manufacturing a material.

【0002】[0002]

【従来の技術】大型の多孔質ガラス母材を高速で製造す
る方法として、反応容器内の出発ロッドに対向させて複
数のガラス微粒子合成用バーナを一定間隔で配置し、回
転する出発ロッドと前記バーナの列を相対的に往復移動
させ、出発ロッドの表面にガラス微粒子を層状に堆積さ
せて多孔質ガラス母材を得る方法(多層付け法)があ
る。このような方法の場合、各バーナの特性の違い、折
り返し位置や端部における堆積条件の変動などにより多
孔質ガラス母材は外径変動を生じ、該多孔質ガラス母材
から得られるガラスの特性変動の原因となる。
2. Description of the Related Art As a method for producing a large-sized porous glass preform at a high speed, a plurality of burners for synthesizing glass particles are arranged at regular intervals so as to face a starting rod in a reaction vessel, and a rotating starting rod and There is a method (multi-layering method) in which a row of burners is relatively reciprocally moved and glass particles are deposited in layers on the surface of a starting rod to obtain a porous glass preform. In the case of such a method, the outer diameter of the porous glass base material fluctuates due to the difference in the characteristics of each burner, the variation of the folding position and the deposition condition at the end, and the characteristics of the glass obtained from the porous glass base material. It causes fluctuation.

【0003】特開平4−260618号公報には、複数
本のバーナを使用する多孔質ガラス母材の製造方法にお
いて、迅速にかつ端部効果による損耗を最小限に抑え
て、実質的に均一な特性を有する多孔質ガラス母材を得
る方法として、多孔質ガラス母材の全長にわたって均一
な流量の空気流を形成させる手段を設ける方法が開示さ
れており、バーナアレイと多孔質ガラス母材が垂直方向
に配向されている場合には、多孔質ガラス母材の長さに
沿った熱勾配の効果を最小限に抑えるために母材の底の
領域に高出力のエンドヒータ設置すること、水平方向の
空気流の大きさは母材の長さに沿った対流の空気流によ
る母材内の不均一性を最小限に抑えるように選択(増
加)させなければならないことが記載されている。
Japanese Laid-Open Patent Publication No. 4-260618 discloses a method for producing a porous glass preform using a plurality of burners, which rapidly and minimally wears due to an end effect, and which is substantially uniform. As a method of obtaining a porous glass base material having characteristics, a method of providing a means for forming an air flow of a uniform flow rate over the entire length of the porous glass base material is disclosed, and the burner array and the porous glass base material are arranged in the vertical direction. When oriented in the horizontal direction, a high-power end heater should be installed in the region of the bottom of the matrix to minimize the effect of thermal gradients along the length of the porous glass matrix. It is stated that the size of the air flow should be selected (increased) to minimize non-uniformities in the base material due to convective air flow along the length of the base material.

【0004】この方法では、装置構成が複雑となり、さ
らに反応容器内は強度の酸性雰囲気であり、ヒータの構
成素材が高価なものとなるだけでなく、母材に堆積でき
なかったガラス微粒子がヒータ上に堆積し、ヒータの熱
で透明化が進み、ヒータからガラス微粒子を取り除くこ
とが難しくなるなどのメンテナンス上の問題も発生す
る。設備メンテナンスに手間がかかる構成では、母材の
合成速度が早くなっても次の母材の製造を行うまでの準
備時間が長くなり、結果的に合成速度向上に見合う母材
製造の効率化効果が得られないことになる。
According to this method, the apparatus structure becomes complicated, and the reaction vessel has a strong acidic atmosphere, so that the constituent material of the heater is not only expensive, but also glass fine particles that cannot be deposited on the base material are heated. There is also a problem in maintenance such that it is deposited on the surface of the heater and the heat of the heater makes it transparent, which makes it difficult to remove the glass particles from the heater. With a configuration that requires time and effort for equipment maintenance, the preparation time until the next base metal is manufactured becomes longer even if the base metal synthesis rate becomes faster, and as a result, the efficiency of base material production increases in proportion to the improvement in the synthesis rate. Will not be obtained.

【0005】[0005]

【発明が解決しようとする課題】本発明はこのような従
来技術の実状に鑑み、より単純な装置構成で長さ方向の
外径変動を抑制することができる多孔質ガラス母材の製
造方法を提供することを目的とする。
SUMMARY OF THE INVENTION In view of the above-mentioned state of the art, the present invention provides a method for producing a porous glass preform capable of suppressing the variation of the outer diameter in the length direction with a simpler device structure. The purpose is to provide.

【0006】[0006]

【課題を解決するための手段】本発明は上記課題を解決
する手段として、次の(1)〜(11)に示す構成を採
る。 (1)反応容器内に支持され回転する出発ロッドに対向
させて複数本のガラス微粒子合成用バーナを配置し、前
記出発ロッドとガラス微粒子合成用バーナとを平行に相
対的に往復運動させながらバーナで合成されるガラス微
粒子を出発ロッドの表面に一層ずつ堆積させて多孔質ガ
ラス母材を製造する方法において、前記バーナを反応容
器にセットした状態において、反応容器のバーナ取り込
み箇所の近傍に通風口を設け、該通風口から母材に向
け、気体を供給することを特徴とする多孔質ガラス母材
の製造方法。 (2)前記通風口がバーナ周囲にあることを特徴とする
前記(1)の多孔質ガラス母材の製造方法。 (3)前記通風口から母材に向け、母材の長さ方向に異
なる流量で気体を供給することを特徴とする前記(1)
又は(2)の多孔質ガラス母材の製造方法。 (4)前記通風口から母材に向け、母材の長さ方向で温
度の異なる気体を供給することを特徴とする前記(1)
又は(2)の多孔質ガラス母材の製造方法。 (5)前記通風口から供給する気体の温度を、各通風口
ごとに変えることを特徴とする前記(3)の多孔質ガラ
ス母材の製造方法。
The present invention adopts the following constitutions (1) to (11) as means for solving the above problems. (1) A plurality of glass fine particle synthesizing burners are arranged in opposition to a rotating starting rod supported in a reaction vessel, and the burner is relatively reciprocally moved in parallel with the starting rod and the glass fine particle synthesizing burner. In the method for producing a porous glass preform by depositing the glass particles synthesized in step one by one on the surface of the starting rod, in the state where the burner is set in the reaction vessel, a ventilation port is provided near the burner intake part of the reaction vessel. And a gas is supplied from the ventilation port toward the base material, the method for producing a porous glass base material. (2) The method for producing a porous glass preform according to the above (1), characterized in that the ventilation port is provided around the burner. (3) The gas is supplied from the ventilation port toward the base material at different flow rates in the length direction of the base material.
Alternatively, the method for producing a porous glass base material according to (2). (4) The above-mentioned (1), characterized in that gases having different temperatures are supplied in the length direction of the base material from the ventilation port toward the base material.
Alternatively, the method for producing a porous glass base material according to (2). (5) The method for producing a porous glass preform according to (3), wherein the temperature of the gas supplied from the ventilation port is changed for each ventilation port.

【0007】(6)前記往復運動を、バーナを固定し出
発ロッドを往復運動させる方式とし、反応容器の外側に
バーナ列全体を囲む枠を設け、該枠にバーナ列全体を覆
う覆いを取り付けて空気溜を形成し、該空気溜内に清浄
気体を供給して該清浄気体を前記通風口から母材に向け
て供給することを特徴とする前記(1)〜(3)のいず
れか1つの多孔質ガラス母材の製造方法。 (7)各バーナごとにそれぞれのバーナで合成されるガ
ラス微粒子が堆積している堆積面の温度を測定し、各堆
積面の温度がほぼ均一に保たれるように通風口から供給
される気体の温度又は流量を調整することを特徴とする
前記(1)〜(6)のいずれか1つの多孔質ガラス母材
の製造方法。
(6) The reciprocating motion is a system in which the burner is fixed and the starting rod is reciprocating, a frame surrounding the entire burner array is provided outside the reaction vessel, and a cover covering the entire burner array is attached to the frame. An air reservoir is formed, a clean gas is supplied into the air reservoir, and the clean gas is supplied from the ventilation port toward the base material. A method for manufacturing a porous glass base material. (7) For each burner, the temperature of the deposition surface on which the glass particles synthesized by each burner are deposited is measured, and the gas supplied from the ventilation port so that the temperature of each deposition surface is kept substantially uniform. The method for producing a porous glass preform according to any one of the above (1) to (6), characterized in that the temperature or the flow rate is adjusted.

【0008】(8)通風口から母材に向けて供給される
気体の量の調整を、前記通風口の開口度を調整すること
によって行うことを特徴とする前記(3)、(5)、
(6)のいずれか1つの多孔質ガラス母材の製造方法。 (9)通風口から母材に向けて供給される気体の量の調
整を、前記通風口へ供給する気体の量を調整することに
よって行うことを特徴とする前記(3)、(5)、
(6)のいずれか1つの多孔質ガラス母材の製造方法。 (10)前記気体が空気又は不活性ガスであることを特
徴とする前記(1)〜(9)のいずれか1つの多孔質ガ
ラス母材の製造方法。 (11)前記ガラス微粒子合成用バーナとして、助燃性
ガス又は不活性ガスを噴出するポートのいずれかから噴
出するガスの流速が8m/秒以上のものを使用すること
を特徴とする(1)〜(10)のいずれか1つのの多孔
質ガラス母材の製造方法。
(8) The above-mentioned (3), (5), characterized in that the amount of gas supplied from the ventilation port toward the base material is adjusted by adjusting the opening degree of the ventilation port.
(6) The method for producing a porous glass preform according to any one of (6). (9) The above-mentioned (3), (5), characterized in that the amount of gas supplied from the ventilation port toward the base material is adjusted by adjusting the amount of gas supplied to the ventilation port.
(6) The method for producing a porous glass preform according to any one of (6). (10) The method for producing a porous glass preform according to any one of (1) to (9), wherein the gas is air or an inert gas. (11) As the burner for synthesizing glass fine particles, a burner having a flow velocity of gas of 8 m / sec or more ejected from any of ports for ejecting an auxiliary gas or an inert gas is used (1) to (10) The method for producing a porous glass preform according to any one of (10).

【0009】本発明者らは、大型の多孔質ガラス母材を
製造する際に生じる、母材の長さ方向で嵩密度が変化し
外径変動が生じるという問題は、本質的にガラス微粒子
堆積時の母材が包まれている熱雰囲気の長さ方向での違
いにあることから、先ず各バーナで発生する熱量を調整
する方法を検討した。これを実現するためには各バーナ
に供給される可燃性ガスや助燃性ガスの供給量を制御す
る必要が生じ、ガラス合成速度をさらに向上するためバ
ーナ本数を増やすと、制御を必要とするガス系統数が飛
躍的に増加していき、設備コストもそれに応じて上昇し
ていくため、この手段以外の方法を検討することとし
た。
The present inventors have found that the problem that the bulk density changes in the length direction of the base material and the outer diameter changes when the large-sized porous glass base material is produced is essentially caused by the deposition of glass fine particles. Since there is a difference in the lengthwise direction of the hot atmosphere in which the base material is wrapped, the method of adjusting the amount of heat generated by each burner was examined first. In order to achieve this, it is necessary to control the supply amount of combustible gas and auxiliary gas supplied to each burner, and if the number of burners is increased to further improve the glass synthesis rate, the gas that needs control Since the number of systems will dramatically increase and the equipment cost will rise accordingly, we decided to consider a method other than this method.

【0010】次に母材全体の温度雰囲気を、嵩密度の変
化が許容範囲内となる±15℃の略均一な雰囲気とし、
長さ方向の温度傾斜を解消することを試みた。そして堆
積効率を低下させず、かつ、効率よく温度を調整できる
気体の供給方法について検討した結果、反応容器にバー
ナをセットした状態で反応容器のバーナ取り込み箇所の
近傍に通風口を設け、そこから母材に向けて気体を供給
するのが最も効率的に母材に気体を供給できることを見
出した。ここで、反応容器内にバーナを取り込んでいる
部分で、反応容器とバーナとの間に隙間を設けて通風口
としてもよい。
Next, the temperature atmosphere of the entire base material is set to a substantially uniform atmosphere of ± 15 ° C. in which the change in bulk density is within the allowable range,
An attempt was made to eliminate the temperature gradient in the length direction. As a result of studying a gas supply method that can efficiently control the temperature without lowering the deposition efficiency, a ventilation port is provided near the burner intake point of the reaction vessel with the burner set in the reaction vessel. It has been found that supplying gas toward the base material can supply gas to the base material most efficiently. Here, in the part where the burner is incorporated in the reaction container, a gap may be provided between the reaction container and the burner to serve as a ventilation port.

【0011】それ以外の位置から気体を供給すると反応
容器内の気流が乱され、多孔質ガラス母材へのガラス微
粒子付着効率を低下させるだけでなく、付着効率低下に
伴い反応容器内の浮遊ガラス微粒子量の増加を生み、反
応容器の壁面に付着するガラス微粒子量を増加させる結
果となった、それにより、掃除時間などの段取り時間を
増やしてしまうだけでなく、壁面からガラス微粒子が剥
がれ、多孔質ガラス母材へ落下する頻度を上げる結果と
なった。剥がれたガラス微粒子が多孔質ガラス母材に付
着することにより、焼結透明化後の母材に気泡を発生さ
せることとなった。
When gas is supplied from a position other than that, the air flow in the reaction vessel is disturbed, and not only the efficiency of adhering the glass particles to the porous glass base material is lowered, but also the floating glass in the reaction vessel is reduced as the adhering efficiency is lowered. As a result of increasing the amount of fine particles and increasing the amount of glass fine particles adhering to the wall surface of the reaction vessel, not only the setup time such as cleaning time is increased, but also the glass fine particles are peeled off from the wall surface and As a result, the frequency of falling onto the high quality glass base material was increased. The peeled glass fine particles adhered to the porous glass base material to generate air bubbles in the base material after sintering and transparency.

【0012】母材全体の温度傾斜を制御すべく、各バー
ナと反応容器との間から各バーナで合成されるガラス微
粒子が堆積している堆積面の温度を放射温度計によって
測定し、その測定結果を基に各通風口から供給する気体
の風量の調整を行った。この場合、供給される気体量が
異なることにより各通風口から供給される気体の流れど
うしが干渉してバーナ火炎を乱す現象が発生し、堆積効
率の低下を招き、堆積量が不安定となってしまったため
に堆積量が変化し、外径変動を誘発する結果となる場合
があった。
In order to control the temperature gradient of the whole base material, the temperature of the deposition surface on which the glass fine particles synthesized by each burner are deposited is measured between each burner and the reaction vessel by a radiation thermometer, and the measurement is performed. Based on the results, the air volume of the gas supplied from each ventilation port was adjusted. In this case, due to the difference in the amount of gas supplied, the flow of gas supplied from each ventilation port interferes with each other, causing a phenomenon that disturbs the burner flame, leading to a decrease in deposition efficiency and an unstable deposition amount. As a result, the amount of deposition changes, which may result in variation in outer diameter.

【0013】そこで火炎の乱れを抑えるべくバーナ構造
について検討を進めた結果、助燃性ガス又は不活性ガス
を噴出するポートからのガスの流速を8m/秒以上とす
るのが好ましいことがわかった。これにより、助燃性ガ
ス又は不活性ガスが火炎をガイドする形となり、バーナ
火炎の指向性が高まり、供給する気体の流れの乱れの影
響が低減されるので、火炎の乱れを抑えることができ
る。
Therefore, as a result of further studies on the burner structure in order to suppress the turbulence of the flame, it was found that it is preferable to set the flow velocity of the gas from the port for ejecting the auxiliary gas or the inert gas to 8 m / sec or more. As a result, the auxiliary gas or the inert gas guides the flame, the directivity of the burner flame is increased, and the influence of the turbulence of the flow of the supplied gas is reduced, so that the turbulence of the flame can be suppressed.

【0014】[0014]

【発明の実施の形態】以下、本発明の方法について図面
を参照して説明する。なお、以下、供給する気体を空気
として説明するが、本発明の方法においては空気に代え
て窒素などの不活性ガスを使用することができる。図1
及び図2は、それぞれ本発明の方法を実施するための装
置構成の1例を模式的に示す説明図である。本発明の方
法は、基本的には排気管3を設けた反応容器2内に、た
て方向に支持され回転する出発ロッドに対向させて複数
本のガラス微粒子合成用バーナ4を略均等間隔に配置
し、出発ロッド1とバーナ4とを平行に相対的に往復運
動させながら(図の例では出発ロッド1を上下方向に往
復運動させる)、バーナ4で合成されるガラス微粒子を
出発ロッド1の表面に一層ずつ堆積させて多孔質ガラス
母材5を製造する方法である。
DETAILED DESCRIPTION OF THE INVENTION The method of the present invention will be described below with reference to the drawings. In addition, although the gas to be supplied will be described below as air, in the method of the present invention, an inert gas such as nitrogen can be used instead of air. Figure 1
2 and 2 are explanatory views schematically showing one example of the apparatus configuration for carrying out the method of the present invention. According to the method of the present invention, basically, a plurality of glass fine particle synthesizing burners 4 are arranged at substantially equal intervals in a reaction vessel 2 provided with an exhaust pipe 3 so as to face a starting rod that is supported in the vertical direction and rotates. The starting rod 1 and the burner 4 are relatively reciprocally moved in parallel relative to each other (the starting rod 1 is reciprocated in the vertical direction in the example of the figure), while the glass fine particles synthesized by the burner 4 are moved in the starting rod 1. It is a method of manufacturing the porous glass base material 5 by depositing one layer on the surface.

【0015】これらの例では、反応容器2に6本のバー
ナ4がセットされている。それぞれのバーナ4と反応容
器2との間には隙間が設けられ、それぞれのバーナ4の
周囲を囲む形で通風口6を形成している。本発明の方法
では、これらの通風口6から異なる流量及び/又は温度
の空気を、多孔質ガラス母材5の方向へ空気の流れを形
成するように供給し、多孔質ガラス母材5の周囲の温度
雰囲気が、嵩密度の変化が許容範囲内となる±15℃の
略均一な雰囲気となるように制御する。供給する空気は
母材5への異物付着を防止するため、0.3μm以上の
ダストを99.97%以上集塵できるフィルタを通した
清浄空気(クリーンエア)とするのが好ましい。さらに
詳しくは本発明におけるバーナ周りの空気溜がクラス1
00の雰囲気となるようにするのが好ましい。
In these examples, six burners 4 are set in the reaction vessel 2. A gap is provided between each burner 4 and the reaction vessel 2, and a ventilation port 6 is formed so as to surround the periphery of each burner 4. In the method of the present invention, air having different flow rates and / or temperatures is supplied from these ventilation ports 6 so as to form an air flow in the direction of the porous glass base material 5, and the air around the porous glass base material 5 is supplied. The temperature atmosphere is controlled to be a substantially uniform atmosphere of ± 15 ° C. in which the change in bulk density is within the allowable range. In order to prevent foreign matter from adhering to the base material 5, the supplied air is preferably clean air (clean air) that has passed through a filter that can collect 99.97% or more of dust of 0.3 μm or more. More specifically, the air reservoir around the burner in the present invention is class 1
It is preferable that the atmosphere is 00.

【0016】図1の例における空気の供給方式は、反応
容器2の外側に各通風口6及びバーナ4の列全体を覆う
形で耐熱性の繊維で作製された覆い7を設けて空気溜8
を形成し、この空気溜8内にクリーンエア発生器9から
のクリーンエアを供給し、各通風口6から反応容器2内
へ供給する方法である。覆い7は反応容器2とは非接触
となるように隙間10を開けて設置し、外気が覆い7内
に入らないように隙間10からクリーンエアが漏れ出る
程度にクリーンエアの供給量を調整する。このような方
式としたのは反応容器2と覆い7とを接触させると、耐
熱繊維であってもガラス微粒子堆積中に劣化損傷して、
母材5への異物付着の原因となるおそれがあるためであ
る。通風口6は図7に示すように反応容器2のバーナ取
り込み箇所15の近傍に設けた開口であってもよい。こ
の通風口の形状は矩形であっても長円であってもよい。
通風口は各バーナ取り込み箇所の横に設けなくともよ
く、例えば一つ置きにバーナ取り込み箇所の横に設けて
もよい。また、複数のバーナ取り込み箇所の横に一つの
細長い通風口を設けてもよい。
In the air supply system in the example of FIG. 1, a cover 7 made of heat-resistant fiber is provided outside the reaction vessel 2 so as to cover each vent hole 6 and the entire row of burners 4, and an air reservoir 8 is provided.
Is formed, clean air from the clean air generator 9 is supplied into the air reservoir 8, and the clean air is supplied into the reaction container 2 from each ventilation port 6. The cover 7 is installed with a gap 10 so that it is not in contact with the reaction container 2, and the supply amount of clean air is adjusted so that clean air leaks from the gap 10 so that outside air does not enter the cover 7. . In this method, when the reaction vessel 2 and the cover 7 are brought into contact with each other, even heat-resistant fibers are deteriorated and damaged during the deposition of glass particles,
This is because it may cause foreign matter to adhere to the base material 5. The ventilation port 6 may be an opening provided in the vicinity of the burner intake portion 15 of the reaction vessel 2 as shown in FIG. 7. The shape of the ventilation port may be rectangular or oval.
The ventilation ports do not have to be provided beside each burner intake location, and for example, every other vent may be provided beside each burner intake location. Further, one elongated ventilation port may be provided beside the plurality of burner intake points.

【0017】反応容器2内への外気の混入を防ぐために
は隙間10はない方が好ましい。図2はこの隙間10の
ない構成の1例を示すもので、反応容器2の外側に各通
風口6及びバーナ4の列全体を囲む枠11を反応容器2
との間に隙間を設けることなく設置し、この枠11にこ
れも隙間のない形で覆い7を取り付けて空気溜8を形成
している。この方式による空気溜8の1例の詳細図を図
3に示す。ここで枠11は金属等の耐熱性の高い材料で
形成されており、フィン13を設けて熱の放散をよくし
ている。図1、2において供給する空気の流れを点線で
表示した。
In order to prevent the entry of outside air into the reaction container 2, it is preferable that the gap 10 is not provided. FIG. 2 shows an example of the structure without the gap 10. The reaction container 2 is provided with a frame 11 surrounding the entire row of the ventilation ports 6 and the burners 4 on the outside of the reaction container 2.
It is installed without providing a gap between and, and a cover 7 is also attached to this frame 11 in a form without a gap to form an air reservoir 8. A detailed view of an example of the air reservoir 8 of this system is shown in FIG. Here, the frame 11 is formed of a material having high heat resistance such as metal, and fins 13 are provided to improve heat dissipation. In FIGS. 1 and 2, the flow of the supplied air is indicated by a dotted line.

【0018】本発明の方法においては、各通風口から流
量もしくは温度又はその両方を変えた空気を供給する。
通常は流量は上にいくほど多くし、温度は上にいくほど
低くなるようにする。空気流量の調整手段は特に限定さ
れるものではないが、その1例を図4に示す。この例で
は図4(c)に示すような中央にバーナ4より径の大き
い穴を有する2分割された金属性の調整プレート14
を、バーナ4を挟んで通風口6の一部を覆うように取付
け、その間隔を調整することによって通風口14の開口
度を調整する。図4(a)はバーナ4に垂直な方向から
見た断面図、図4(b)は上方から見た断面図である。
この方法は図1、2のように空気溜8を設ける形式の場
合に好適である。他の空気流量の調整手段として、各通
風口ごとに空気の供給配管を設け、それぞれの通風口へ
の空気供給量を調整する方法もあるが、空気溜を設ける
方式に比べて装置が複雑化する。
In the method of the present invention, the air whose flow rate and / or temperature are changed is supplied from each ventilation port.
Usually, the higher the flow rate, the lower the temperature. The means for adjusting the air flow rate is not particularly limited, but one example thereof is shown in FIG. In this example, as shown in FIG. 4 (c), the metallic adjustment plate 14 is divided into two and has a hole with a diameter larger than that of the burner 4 in the center.
Are attached so as to cover a part of the ventilation port 6 with the burner 4 interposed therebetween, and the opening degree of the ventilation port 14 is adjusted by adjusting the interval. 4A is a sectional view seen from a direction perpendicular to the burner 4, and FIG. 4B is a sectional view seen from above.
This method is suitable for the case where the air reservoir 8 is provided as shown in FIGS. As another means of adjusting the air flow rate, there is also a method of providing an air supply pipe for each ventilation port and adjusting the amount of air supplied to each ventilation port, but the device is more complicated than the method of providing an air reservoir. To do.

【0019】供給する空気の温度の調整手段も特に限定
されないが、各通風口ごとに空気の供給配管を設け、適
当な個所に冷却手段又は加熱手段を単独又は組み合わせ
て設置する方法が一般的である。
The means for adjusting the temperature of the air to be supplied is not particularly limited, but a method is generally used in which an air supply pipe is provided for each ventilation port and a cooling means or a heating means is installed alone or in combination at an appropriate place. is there.

【0020】本発明の方法において通風口から供給する
空気の流量や温度は、多孔質ガラス母材5の周囲の温度
雰囲気が、嵩密度の変化が許容範囲内となる±15℃の
略均一な雰囲気となるように制御する。各通風口への空
気の流量や温度の具体的な設定方法としては、例えば多
孔質ガラス母材の上端と下端の温度を測定しその温度差
に対応して、予め経験的に求めた設定値に準じて設定す
る方法が簡便である。また、適当な温度測定手段を設け
て各バーナごとにそれぞれのバーナで合成されるガラス
微粒子が堆積している堆積面の温度を測定し(図1、2
には放射温度計12を設ける例を示した)、各堆積面の
温度がほぼ均一に保たれるように通風口から供給する空
気の流量や温度を調整するようにすれば、より精密な制
御が可能である。
In the method of the present invention, the flow rate and temperature of the air supplied from the ventilation port are substantially uniform within ± 15 ° C. in which the temperature atmosphere around the porous glass base material 5 is within the allowable range of the change in bulk density. Control the atmosphere. As a concrete setting method of the flow rate and temperature of the air to each ventilation port, for example, the temperature at the upper end and the lower end of the porous glass base material is measured and corresponding to the temperature difference, a set value obtained empirically in advance. It is easy to set according to the above. Further, by providing an appropriate temperature measuring means, the temperature of the deposition surface on which the glass particles synthesized by each burner are deposited is measured for each burner (see FIGS. 1 and 2).
A radiation thermometer 12 is provided in the above), and if the flow rate and temperature of the air supplied from the ventilation port are adjusted so that the temperature of each deposition surface is kept substantially uniform, more precise control is possible. Is possible.

【0021】本発明の方法においては、ガラス微粒子合
成用バーナとしてできるだけ指向性の高いバーナ、例え
ば使用範囲において8m/秒以上の流速で助燃性ガス又
は不活性ガスを噴出させることができるポートを有する
バーナを使用し、助燃性ガス又は不活性ガスを噴出する
ポートのいずれかから噴出するガスの流速が8m/秒以
上となるようにするのが望ましい。これによって通風口
から供給する空気の流れによる火炎の乱れが抑制され堆
積量が安定する効果がある。
In the method of the present invention, as a burner for synthesizing glass fine particles, a burner having as high directivity as possible, for example, a port capable of ejecting a combustion-supporting gas or an inert gas at a flow rate of 8 m / sec or more in a use range. It is desirable to use a burner so that the flow velocity of the gas ejected from either the combustion gas or the port ejecting the inert gas is 8 m / sec or more. This has the effect of suppressing turbulence of the flame due to the flow of air supplied from the ventilation port and stabilizing the amount of accumulation.

【0022】上記の指向性の高いバーナとしては、例え
ば図5に示すような多重管中に中心側の多重管を取り囲
むように開口部の小さいガス噴出ポートを有するバーナ
がある。図5において17はSiCl4 などの原料ガス
のみ又は原料ガスとH2 などの可燃性ガスを噴出させる
原料ガス噴出ポート、18及び21はArやN2 などの
不活性ガスを噴出させる不活性ガス噴出ポート、19は
2 やメタンなどの炭化水素がすなどの可燃性ガスを噴
出させる可燃性ガス噴出ポート、20及び22はO2
どの助燃性ガスを噴出させる助燃性ガス噴出ポートであ
る。また、図6に示すような構造の多重管バーナも好適
に使用できる。図6において23は原料ガス噴出ポー
ト、24及び27は可燃性ガス噴出ポート、25及び2
8は不活性ガス噴出ポート、26及び29は助燃性ガス
噴出ポートであり、30は風防(ガイド)である。
As the burner having high directivity, for example, there is a burner having a gas ejection port with a small opening so as to surround the central multi-tube as shown in FIG. In FIG. 5, reference numeral 17 is a raw material gas ejection port for ejecting only a raw material gas such as SiCl 4 or a raw material gas and a combustible gas such as H 2 , and 18 and 21 are inert gases for ejecting an inert gas such as Ar or N 2. Ejection ports, 19 are combustible gas ejection ports for ejecting combustible gases such as hydrocarbons such as H 2 and methane, and 20 and 22 are auxiliary combustion gas ejection ports for ejecting auxiliary combustion gases such as O 2. . Also, a multi-tube burner having a structure as shown in FIG. 6 can be preferably used. In FIG. 6, 23 is a raw material gas ejection port, 24 and 27 are combustible gas ejection ports, and 25 and 2.
8 is an inert gas ejection port, 26 and 29 are auxiliary combustion gas ejection ports, and 30 is a windshield (guide).

【0023】このような形式のバーナにおいては、各ポ
ートから噴出するガスの流速は図5の形式のバーナでは
1〜40m/秒程度であるが、助燃性ガス噴出ポート2
0から噴出するガスの流速は10〜40m/秒程度であ
る。また、ず6の形式のバーナにおいては、助燃性ガス
噴出ポート26又は29のいずれかから噴出するガスの
流速が8m/秒以上である。別のタイプのバーナにおい
ては、各ポートのうちの助燃性ガス噴出ポート又は不活
性ガス噴出ポート、特に最外側の助燃性ガス噴出ポート
からのガスの流速を8m/秒以上とするのが好ましい。
In the burner of this type, the flow velocity of the gas ejected from each port is about 1 to 40 m / sec in the burner of the type shown in FIG.
The flow velocity of the gas ejected from 0 is about 10 to 40 m / sec. Further, in the burner of the type 6, the flow velocity of the gas ejected from either the auxiliary combustion gas ejection port 26 or 29 is 8 m / sec or more. In another type of burner, it is preferable that the gas flow rate from the auxiliary gas injection port or the inert gas injection port among the ports, particularly the outermost auxiliary gas injection port, is 8 m / sec or more.

【0024】上記のようにバーナの周囲に設けた通風口
から流量や温度を調整した空気を供給して、多孔質ガラ
ス母材の周囲の温度雰囲気を略均一に保持することによ
り、母材の嵩密度を均一化し、外径変動を抑制する効果
がある。それに加えて、ガラス微粒子の堆積中に母材に
堆積できなかったガラス微粒子の反応容器からの排出効
率が向上するという効果もあり、清掃の手間が減り、段
取り時間の減少という効果がある。
As described above, by supplying the air whose flow rate and temperature are adjusted from the ventilation port provided around the burner to maintain the temperature atmosphere around the porous glass base material substantially uniform, It has the effect of making the bulk density uniform and suppressing fluctuations in the outer diameter. In addition to that, there is an effect that the efficiency of discharging the glass particles, which could not be deposited on the base material during the deposition of the glass particles, from the reaction container is improved, so that the labor for cleaning is reduced and the setup time is reduced.

【0025】一般に母材に付着できなかったガラス微粒
子は、反応容器に設けられた排気管から排出するように
しているが、反応容器の壁面に堆積することがある。特
に反応容器の上部に付着したガラス微粒子は影響が大き
く、これが自重により剥がれて母材に再付着し、焼結透
明化後に気泡発生の要因となる。本発明の方法によれ
ば、通風口からの空気の流れは、通風口付近では多少乱
れるものの、母材に近づくにつれ噴流型バーナの火炎の
流れに乗り、スムースな流れを形成するようになる。こ
の流れは排気管にスムースに吸い込まれていき、その結
果、母材に付着し切れなかったガラス微粒子が排出され
やすくなる。これにより、容器壁から剥がれた微粒子が
再付着するおそれは少なくなる。
Generally, the glass fine particles which cannot be adhered to the base material are discharged from the exhaust pipe provided in the reaction container, but they may be deposited on the wall surface of the reaction container. In particular, the glass fine particles attached to the upper part of the reaction vessel have a great influence, and they are peeled off due to their own weight and redeposited on the base material, which causes bubbles to be generated after the sinter is made transparent. According to the method of the present invention, although the air flow from the ventilation port is somewhat disturbed near the ventilation port, it gets on the flame flow of the jet-type burner as it approaches the base metal and forms a smooth flow. This flow is smoothly sucked into the exhaust pipe, and as a result, the glass fine particles not completely attached to the base material are easily discharged. This reduces the risk that the fine particles peeled off from the container wall will reattach.

【0026】[0026]

【実施例】以下、実施例により本発明の方法をさらに具
体的に説明するが、本発明はこれに限定されるものでは
ない。図1の構成の装置により、多孔質ガラス母材の製
造試験を行った。ただし、バーナ4の本数は4本とし、
隙間10の間隔は5mmとした。使用したバーナ4は図
5に示した構造の多重管バーナであり、外径は60mm
のものである。反応容器2のバーナ4を取り付ける部分
の穴の径を75mmとし、バーナ4の周囲に隙間を形成
させて通風口6とした。
EXAMPLES The method of the present invention will be described in more detail below with reference to examples, but the present invention is not limited thereto. A manufacturing test of a porous glass base material was conducted by using the apparatus having the configuration shown in FIG. However, the number of burners 4 is 4,
The gap 10 was 5 mm. The burner 4 used is a multi-tube burner having the structure shown in FIG. 5, and the outer diameter is 60 mm.
belongs to. The diameter of the hole of the reaction vessel 2 where the burner 4 is attached was set to 75 mm, and a gap was formed around the burner 4 to form the ventilation port 6.

【0027】(実施例1)出発ロッド1(直径36m
m、長さ1500mm)に対向させて4本のバーナ4を
200mm間隔で配置し、出発ロッド1を軸回りに回転
させながら往復運動させる方式でガラス微粒子の堆積を
行った。通風口6は四つとも75mmの外径とした。堆
積工程の間、クリーンエア発生器9の平均吹き出し流量
を20m3 /minで、常温のクリーンエア(大きさ
0.5μm以上のダスト数が40個/m 3 :レーザパー
ティクルカウンタを用いて散乱光強度の検出により測
定)を空気溜8に供給するようにした。その結果、得ら
れた多孔質ガラス母材5の形状は、外径が有効部(長さ
600mm)の最上部で245mm、最下部で260m
mであった。多孔質ガラス母材5の全長にクリーンエア
を与えることで、多孔質ガラス母材5の長さ方向の温度
差が緩和され、得られた多孔質ガラス母材は使用可能な
ものであった。
(Example 1) Starting rod 1 (diameter 36 m
m, length 1500 mm) and four burners 4 facing each other.
Arranged at 200 mm intervals, starting rod 1 is rotated around the axis
The glass particles are deposited by the method of reciprocating while
went. All the ventilation ports 6 had an outer diameter of 75 mm. Stack
Average blowing flow rate of the clean air generator 9 during the loading process
20m3/ Min, normal temperature clean air (size
The number of dust particles of 0.5 μm or more is 40 / m 3: Laser par
Measured by detecting the scattered light intensity using a tickle counter
Constant) was supplied to the air reservoir 8. As a result
As for the shape of the porous glass base material 5 that has been formed, the outer diameter has an effective portion (length
600mm) 245mm at the top and 260m at the bottom
It was m. Clean air over the entire length of the porous glass base material 5.
By giving the temperature of the porous glass base material 5 in the longitudinal direction.
The difference is relaxed and the obtained porous glass base material is usable
It was a thing.

【0028】(実施例2)図4に示したような金属製の
調整プレート14を使用して各バーナ4の周囲の通風口
6の大きさを調整した他は実施例1と同じ条件で多孔質
ガラス母材5を作製した。通風口6の大きさは外径が上
から順に75mm、73mm、70mm、65mm程度
となるようにした。その結果、母材5の外径は有効部
(長さ600mm)の最上部で252mm、最下部で2
60mmであり、外径の均一化効果が顕著に認められ
た。
(Embodiment 2) Porous metal under the same conditions as in Embodiment 1 except that the size of the ventilation port 6 around each burner 4 was adjusted by using the metal adjustment plate 14 as shown in FIG. The quality glass base material 5 was produced. The size of the ventilation port 6 was such that the outer diameter was about 75 mm, 73 mm, 70 mm, and 65 mm in order from the top. As a result, the outer diameter of the base material 5 is 252 mm at the uppermost part of the effective portion (length 600 mm) and 2 at the lowermost part.
It was 60 mm, and the effect of making the outer diameter uniform was noticeable.

【0029】(実施例3)図7に示したように各バーナ
横にバーナ取り込み箇所15から10cm離れた位置に
通風口6を設けた。各通風口の縦の長さは60mmで一
定とし、横幅をそれぞれ13、11、9、4mmとし、
上に位置する通風口ほど横幅が大きくなるようにした。
通風口の形状以外は実施例2と同じ条件とした。得られ
た母材の外径は最上部で258mm、最下部で262m
mであり、実施例2と同等の効果が得られた。
(Embodiment 3) As shown in FIG. 7, a ventilation port 6 was provided beside each burner at a position 10 cm away from the burner intake point 15. The vertical length of each ventilation port is constant at 60 mm, and the width is 13, 11, 9, 4 mm, respectively.
The width of the ventilation opening is higher at the top.
The conditions were the same as in Example 2 except for the shape of the ventilation port. The outer diameter of the obtained base metal is 258 mm at the top and 262 m at the bottom.
m, and an effect equivalent to that of Example 2 was obtained.

【0030】(実施例4)実施例2の方法において、各
バーナ4の周囲の隙間(通風口6)から、放射温度計1
2により堆積面温度を測定し、堆積面温度が700℃と
なるように調整プレート14を使用して通風口6の大き
さを微調整しながら多孔質ガラス母材5を作製した。そ
の結果、母材5の外径は有効部(長さ600mm)の最
上部で258mm、最下部で260mmであり、さらに
均一な母材5を得ることができた。
(Embodiment 4) In the method of Embodiment 2, the radiation thermometer 1 is passed through the gap (ventilation port 6) around each burner 4.
2, the deposition surface temperature was measured, and the porous glass base material 5 was produced while finely adjusting the size of the ventilation port 6 using the adjustment plate 14 so that the deposition surface temperature was 700 ° C. As a result, the outer diameter of the base material 5 was 258 mm at the uppermost part of the effective portion (length 600 mm) and 260 mm at the lowermost part, and a more uniform base material 5 could be obtained.

【0031】(実施例5)反応容器2、バーナ4、通風
口6の構成は実施例1と同じにし、各通風口6へは温度
の異なるクリーンエアを供給できるように配管した。供
給クリーンエアの温度を30℃、供給量をバーナ1本に
つき4m3 /minとして堆積を開始したところ、堆積
面の温度は有効部の最上部が720℃であったのに対
し、最下部は690℃で約30℃の温度差が認められ
た。均一な温度のクリーンエアを多孔質ガラス母材5の
全長に与えることで、多孔質ガラス母材5の長さ方向の
温度差が緩和され、堆積面の温度を中心値に対して±1
5℃以内の範囲に収めることができた。
(Embodiment 5) The reaction vessel 2, the burner 4, and the ventilation port 6 were constructed in the same manner as in Embodiment 1, and piping was provided so that clean air having different temperatures could be supplied to each ventilation port 6. When deposition was started with the supply of clean air at 30 ° C and the supply rate of 4 m 3 / min per burner, the temperature of the deposition surface was 720 ° C at the top of the effective part, At 690 ° C, a temperature difference of about 30 ° C was observed. By applying clean air of uniform temperature to the entire length of the porous glass base material 5, the temperature difference in the length direction of the porous glass base material 5 is relaxed, and the temperature of the deposition surface is ± 1 with respect to the center value.
It could be kept within the range of 5 ° C.

【0032】(実施例6)実施例5で上下の温度差が認
められたので、各通風口6の開口度はそのままとし、供
給するクリーンエアの温度を上から順に30℃、60
℃、90℃、120℃として多孔質ガラス母材5を作製
した。その結果、母材5の外径は有効部(長さ600m
m)の最上部で257mm、最下部で258mmであ
り、均一な母材5を得ることができた。また、堆積の
間、ガラス堆積面の温度も有効部の最上部が720℃、
最下部は716℃と均一化されていた。
(Embodiment 6) Since a difference in temperature between the upper and lower sides was observed in Embodiment 5, the opening degree of each ventilation port 6 was kept the same, and the temperature of the clean air to be supplied was 30 ° C. and 60 ° from the top.
A porous glass base material 5 was produced at a temperature of 90 ° C., 90 ° C. and 120 ° C. As a result, the outer diameter of the base material 5 is the effective portion (length 600 m
m) was 257 mm at the top and 258 mm at the bottom, and a uniform base material 5 could be obtained. Also, during the deposition, the temperature of the glass deposition surface was 720 ° C. at the top of the effective part.
The lowest part was uniformed at 716 ° C.

【0033】[0033]

【発明の効果】本発明の方法によれば、大型の多孔質ガ
ラス母材の製造において、より単純な装置構成で、母材
の長さ方向の嵩密度を均一化し、外径変動を抑制できる
効果がある。さらに、ガラス微粒子の堆積中に母材に堆
積できなかったガラス微粒子の反応容器からの排出効率
が向上するという効果もあり、清掃の手間が減り、段取
り時間の減少という効果がある。
According to the method of the present invention, in the production of a large-sized porous glass preform, the bulk density in the longitudinal direction of the preform can be made uniform and the outer diameter fluctuation can be suppressed with a simpler apparatus configuration. effective. Further, there is an effect that the efficiency of discharging the glass particles, which could not be deposited on the base material during the deposition of the glass particles, from the reaction container is improved, so that the labor of cleaning is reduced and the setup time is reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の方法を実施するための装置構成の1例
を模式的に示す説明図。
FIG. 1 is an explanatory view schematically showing an example of a device configuration for carrying out the method of the present invention.

【図2】本発明の方法を実施するための装置構成の他の
1例を模式的に示す説明図。
FIG. 2 is an explanatory view schematically showing another example of the apparatus configuration for carrying out the method of the present invention.

【図3】図2の方式による空気溜8の1例を示す詳細
図。
FIG. 3 is a detailed view showing an example of an air reservoir 8 according to the method of FIG.

【図4】通風口への空気流量の調整手段の1例を示す説
明図。
FIG. 4 is an explanatory view showing an example of a means for adjusting an air flow rate to a ventilation port.

【図5】本発明の方法において、好適に使用できるバー
ナ構造の1例を示す断面図。
FIG. 5 is a cross-sectional view showing an example of a burner structure that can be preferably used in the method of the present invention.

【図6】本発明の方法において、好適に使用できるバー
ナ構造の他の1例を示す説明図。
FIG. 6 is an explanatory view showing another example of a burner structure that can be preferably used in the method of the present invention.

【図7】通風口の設置方式の1例を示す説明図。FIG. 7 is an explanatory view showing an example of a ventilation port installation method.

【符号の説明】[Explanation of symbols]

1 出発ロッド 2 反応容器 3 排気管 4
バーナ 5 多孔質ガラス母材 6 通風口 7 覆い
8 空気溜 9 クリーンエア発生器 10 隙間 11 枠
12 放射温度計 13 フィン 14 調整プレート 15 バーナ
取り込み箇所 17 原料ガス噴出ポート 18、21 不活性ガ
ス噴出ポート 19 可燃性ガス噴出ポート 20、22 助燃性ガ
ス噴出ポート 23 原料ガス噴出ポート 24、27 可燃性ガス
噴出ポート 25、28 不活性ガス噴出ポート 26、29 助
燃性ガス噴出ポート 30 風防
1 Starting Rod 2 Reaction Vessel 3 Exhaust Pipe 4
Burner 5 Porous glass base material 6 Vent 7 Cover
8 Air Reservoir 9 Clean Air Generator 10 Gap 11 Frame
12 Radiation thermometer 13 Fin 14 Adjustment plate 15 Burner intake point 17 Raw material gas ejection port 18, 21 Inert gas ejection port 19 Combustible gas ejection port 20, 22 Combustible gas ejection port 23 Raw gas ejection port 24, 27 Flammability Gas ejection ports 25, 28 Inert gas ejection ports 26, 29 Combustible gas ejection port 30 Windshield

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山崎 卓 神奈川県横浜市栄区田谷町1番地 住友電 気工業株式会社横浜製作所内 Fターム(参考) 4G014 AH14    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takashi Yamazaki             Sumitomoden 1 Taya-cho, Sakae-ku, Yokohama-shi, Kanagawa             Ki Industry Co., Ltd. Yokohama Works F-term (reference) 4G014 AH14

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】 反応容器内に支持され回転する出発ロッ
ドに対向させて複数本のガラス微粒子合成用バーナを配
置し、前記出発ロッドとガラス微粒子合成用バーナとを
平行に相対的に往復運動させながらバーナで合成される
ガラス微粒子を出発ロッドの表面に一層ずつ堆積させて
多孔質ガラス母材を製造する方法において、前記バーナ
を反応容器にセットした状態において、反応容器のバー
ナ取り込み箇所の近傍に通風口を設け、該通風口から母
材に向け、気体を供給することを特徴とする多孔質ガラ
ス母材の製造方法。
1. A plurality of burners for synthesizing glass fine particles are arranged so as to face a rotating starting rod supported in a reaction vessel, and the starting rod and the burner for synthesizing glass fine particles are relatively reciprocated in parallel. While a method for producing a porous glass preform by depositing glass fine particles synthesized by a burner on the surface of the starting rod one by one, in the state where the burner is set in the reaction vessel, near the burner intake point of the reaction vessel. A method for producing a porous glass preform, comprising providing a ventilation port, and supplying gas toward the preform from the ventilation port.
【請求項2】 前記通風口がバーナ周囲にあることを特
徴とする請求項1に記載の多孔質ガラス母材の製造方
法。
2. The method for producing a porous glass preform according to claim 1, wherein the ventilation port is provided around the burner.
【請求項3】 前記通風口から母材に向け、母材の長さ
方向に異なる流量で気体を供給することを特徴とする請
求項1又は2に記載の多孔質ガラス母材の製造方法。
3. The method for producing a porous glass base material according to claim 1, wherein the gas is supplied from the ventilation port toward the base material at different flow rates in the length direction of the base material.
【請求項4】 前記通風口から母材に向け、母材の長さ
方向で温度の異なる気体を供給することを特徴とする請
求項1又は2に記載の多孔質ガラス母材の製造方法。
4. The method for producing a porous glass preform according to claim 1, wherein gases having different temperatures are supplied in the length direction of the preform from the ventilation port toward the preform.
【請求項5】 前記通風口から供給する気体の温度を、
各通風口ごとに変えることを特徴とする請求項3に記載
の多孔質ガラス母材の製造方法。
5. The temperature of the gas supplied from the ventilation port,
The method for producing a porous glass preform according to claim 3, wherein the method is changed for each ventilation port.
【請求項6】 前記往復運動を、バーナを固定し出発ロ
ッドを往復運動させる方式とし、反応容器の外側にバー
ナ列全体を囲む枠を設け、該枠にバーナ列全体を覆う覆
いを取り付けて空気溜を形成し、該空気溜内に清浄気体
を供給して該清浄気体を前記通風口から母材に向けて供
給することを特徴とする請求項1〜3のいずれか1項に
記載の多孔質ガラス母材の製造方法。
6. The reciprocating motion is a system in which a burner is fixed and a starting rod is reciprocating motion, a frame surrounding the entire burner line is provided outside the reaction vessel, and a cover for covering the entire burner line is attached to the frame. 4. The porosity according to claim 1, wherein a reservoir is formed, a clean gas is supplied into the air reservoir, and the clean gas is supplied from the ventilation port toward the base material. Of manufacturing high quality glass base material.
【請求項7】 各バーナごとにそれぞれのバーナで合成
されるガラス微粒子が堆積している堆積面の温度を測定
し、各堆積面の温度がほぼ均一に保たれるように通風口
から供給される気体の温度又は流量を調整することを特
徴とする請求項1〜6のいずれか1項に記載の多孔質ガ
ラス母材の製造方法。
7. The temperature of a deposition surface on which glass particles synthesized by each burner are deposited is measured for each burner, and the temperature of each deposition surface is supplied from a ventilation port so that the temperature is kept substantially uniform. The method for producing a porous glass preform according to any one of claims 1 to 6, wherein the temperature or flow rate of the gas is adjusted.
【請求項8】 通風口から母材に向けて供給される気体
の量の調整を、前記通風口の開口度を調整することによ
って行うことを特徴とする請求項3、5、6のいずれか
1項に記載の多孔質ガラス母材の製造方法。
8. The method according to claim 3, wherein the amount of gas supplied from the ventilation port toward the base material is adjusted by adjusting the opening degree of the ventilation port. Item 1. A method for producing a porous glass preform according to item 1.
【請求項9】 通風口から母材に向けて供給される気体
の量の調整を、前記通風口へ供給する気体の量を調整す
ることによって行うことを特徴とする請求項3、5、6
のいずれか1項に記載の多孔質ガラス母材の製造方法。
9. The method according to claim 3, wherein the amount of gas supplied from the ventilation port toward the base material is adjusted by adjusting the amount of gas supplied to the ventilation port.
The method for producing a porous glass preform according to any one of 1.
【請求項10】 前記気体が空気又は不活性ガスである
ことを特徴とする請求項1〜9のいずれか1項に記載の
多孔質ガラス母材の製造方法。
10. The method for producing a porous glass preform according to claim 1, wherein the gas is air or an inert gas.
【請求項11】 前記ガラス微粒子合成用バーナとし
て、助燃性ガス又は不活性ガスを噴出するポートのいず
れかから噴出するガスの流速が8m/秒以上のものを使
用することを特徴とする請求項1〜10のいずれか1項
に記載の多孔質ガラス母材の製造方法。
11. A burner for synthesizing glass particles, wherein a gas flow velocity of 8 m / sec or more is used for jetting from either a port for jetting an auxiliary gas or an inert gas. The method for producing a porous glass preform according to any one of 1 to 10.
JP2002233144A 2001-08-09 2002-08-09 Method for producing porous glass base material Expired - Fee Related JP3521903B2 (en)

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JP2001-241775 2001-08-09
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JP2009126716A (en) * 2007-11-19 2009-06-11 Sumitomo Electric Ind Ltd Method for producing glass particulate deposit
JP2012006799A (en) * 2010-06-25 2012-01-12 Sumitomo Electric Ind Ltd Process for producing glass fine particle deposit
JP2013067561A (en) * 2012-12-12 2013-04-18 Sumitomo Electric Ind Ltd Method for producing glass fine particle deposited body
CN113165933A (en) * 2018-12-04 2021-07-23 住友电气工业株式会社 Burner for producing glass soot body, apparatus and method for producing glass soot body

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Publication number Priority date Publication date Assignee Title
JP2008266032A (en) * 2007-04-16 2008-11-06 Fujikura Ltd Apparatus and method for manufacturing glass preform for optical fiber
JP2009126716A (en) * 2007-11-19 2009-06-11 Sumitomo Electric Ind Ltd Method for producing glass particulate deposit
JP2012006799A (en) * 2010-06-25 2012-01-12 Sumitomo Electric Ind Ltd Process for producing glass fine particle deposit
JP2013067561A (en) * 2012-12-12 2013-04-18 Sumitomo Electric Ind Ltd Method for producing glass fine particle deposited body
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