JP2003114358A - Joint structure between planar optical waveguide and metal member, and optical waveguide module using the joint structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a highly reliable bonding structure of a planar optical waveguide and a metal member without accompanying deformation of a bonding member and an optical waveguide module using the bonding structure. SOLUTION: For example, as shown in FIGS. 1C and 1D, a metal film 11b is formed on a joint surface of a planar optical waveguide 20 such as an arrayed waveguide diffraction grating, and A metal film 11a is formed, and the metal film 11a and the metal film 11 are formed.
The planar optical waveguide and the metal member 7 are joined by diffusion joining with the b. The slide moving member 17 is joined to the metal member 7. As shown in FIG. 1A, the waveguide forming region 10 of the arrayed waveguide diffraction grating is separated into first and second waveguide forming regions 10a and 10b, and the slide moving member 17 guides the waveguide forming region 10a. Along the crossing separation plane 8 to reduce the temperature dependence of the light transmission center wavelength of the arrayed waveguide diffraction grating.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joining structure between a planar optical waveguide such as an arrayed waveguide diffraction grating used for optical communication and a metal member, and an optical waveguide module using the joining structure.

[0002]

BACKGROUND ART In recent years, in optical communication, as a method of dramatically increasing the transmission capacity, optical wavelength division multiplexing (WD) is used.
M) is actively researched and developed, and is being put to practical use. The optical wavelength division multiplexing transmission is, for example, wavelength division multiplexing of a plurality of lights having different wavelengths and transmission.

In such an optical wavelength division multiplexing system, it is necessary to extract light of each wavelength from the transmitted multiplexed light at the optical receiving side. Therefore, the optical wavelength division multiplexing communication system is provided with a light transmission device or the like that transmits only light of a predetermined wavelength.

As an example of the light transmitting device, there is a flat optical waveguide (flat optical waveguide circuit). This planar optical waveguide circuit (PLC; Planar Lightwave Cir)
is a silica-based glass waveguide formation region formed on a substrate such as silicon, and is an arrayed waveguide diffraction grating (AWG; Arrayed Wavegu).
Various circuits such as a side-to-side demultiplexer and a Mach-Zehnder optical interference type demultiplexer are known.

The arrayed waveguide diffraction grating is a planar optical waveguide 20 constructed as shown in FIG. 8, for example. In the drawing of FIG. 8, reference numeral 1 is a substrate made of silicon or the like, and a waveguide structure as shown in FIG. 8 is formed by a core in a waveguide forming region 10 formed on this substrate.

The waveguide structure of the arrayed waveguide diffraction grating has at least one optical input waveguide 2, a first slab waveguide 3 connected to the output side of the optical input waveguide 2, and the first slab waveguide 3. Array waveguide 4 connected to the output side of the slab waveguide 3 of
A second slab waveguide 5 connected to the output side of the arrayed waveguide 4 and a plurality of optical output waveguides 6 connected in parallel to the output side of the second slab waveguide 5 Have

The arrayed waveguide 4 propagates the light derived from the first slab waveguide 3, and is formed by arranging a plurality of channel waveguides 4a in parallel, and the adjacent channel waveguides 4a are formed. The lengths of 4a are set by each other (ΔL)
Is different.

The channel waveguides 4a constituting the arrayed waveguide 4 are usually provided in a large number such as 100. The optical output waveguides 6 are provided in correspondence with the numbers of signal lights having different wavelengths, which are demultiplexed or combined by the arrayed waveguide diffraction grating, for example. However, in FIG. 8, for simplification of the drawing, the numbers of the channel waveguides 4a, the optical output waveguides 6, and the optical input waveguides 2 are simply shown.

An optical fiber (not shown) on the transmission side, for example, is connected to the optical input waveguide 2 so that wavelength-multiplexed light can be introduced. For example, one optical input waveguide 2 is used. The wavelength-multiplexed light that has been introduced into the first slab waveguide 3 spreads by the diffraction effect thereof, enters the array waveguide 4, and propagates in the array waveguide 4.

The light propagated through the arrayed waveguide 4 is
Of the channel waveguides 4a that reach the slab waveguide 5 and are condensed and output to the optical output waveguide 6. However, since the lengths of all the channel waveguides 4a forming the array waveguide 4 are different from each other, After propagating through 4, the phase of each light is shifted, the wavefront of the focused light is tilted according to this shift amount, and the tilt angle determines the position where light is focused.

Array waveguide 4 to second slab waveguide 5
When the light is incident on the
Then, there is a relationship as shown in (Equation 1) between this angle φ and the wavelength (light transmission center wavelength) λ of the condensed light.

[0012]

[Equation 1]

N _s is the equivalent refractive index of the first and second slab waveguides, d is the distance between the channel waveguides on the first and second slab waveguide sides, φ is the diffraction angle, and n _c Is the equivalent refractive index of the arrayed waveguide, ΔL is the difference in length between adjacent channel waveguides, and m is the diffraction order.

Here, when the wavelength when the diffraction angle φ = 0 is λ ₀ , this wavelength λ ₀ is expressed by (Equation 2). The wavelength λ ₀ is generally called the center wavelength of the arrayed waveguide diffraction grating.

[0015]

[Equation 2]

Further, as shown in FIG. 9, when the point O is the converging position of the arrayed waveguide diffraction grating having the diffraction angle φ = 0,
The light having the diffraction angle φ _p is condensed at a point P (a position shifted from the point O in the X direction) different from the point O. Here, when the distance between the O and P in the X direction is x, (Equation 3) is established between the distance x and the wavelength λ.

[0017]

[Equation 3]

In (Equation 3), L _f is the focal length of the second slab waveguide, and n _g is the group index of the arrayed waveguide. Incidentally, the group index n _g of the arrayed waveguide, the effective refractive index n _c of the arrayed waveguide, is given by equation (4).

[0019]

[Equation 4]

In the above (Formula 3), the input end of the optical output waveguide is arranged at a position away from the focal point O of the second slab waveguide by the distance dx in the X direction, so that the light whose wavelength is different by dλ is formed. Means that it is possible to take out.

That is, for example, as shown in FIG. 8, different wavelengths λ1, λ2, λ from one optical input waveguide 2 are obtained.
When wavelength-multiplexed light having 3, ... λn (n is an integer of 2 or more) is input, these lights are output from the optical output waveguides 6 different for each wavelength.

Since the arrayed-waveguide diffraction grating uses the principle of reciprocity (reversibility) of an optical circuit, it has a function as an optical demultiplexer as well as an optical multiplexer. . Therefore, contrary to FIG. 8, when lights having different wavelengths are made incident from the respective optical output waveguides 6, these lights pass through the propagation paths opposite to the above, and the arrayed waveguides 4 and the first slabs are made. The light is combined with the waveguide 3 and emitted from one optical input waveguide 2.

Further, the relation of the above (Equation 3) is similarly established for the first slab waveguide 3. That is, FIG.
In, for example, when the center of the focal point of the first slab waveguide 3 is defined as a point O ′ and a point at a position deviated from the point O ′ in the X direction by a distance dx ′ is defined as a point P ′, light is emitted at this point P ′. When incident, the wavelength of the output shifts by dλ '. If this relationship is expressed by an equation, it becomes as shown in (Equation 5).

[0024]

[Equation 5]

In the equation (5), L _f 'is the focal length of the first slab waveguide. This (Equation 5) is the first
By forming the output end of the optical input waveguide at a position away from the focal point O ′ of the slab waveguide by the distance dx ′ in the X direction, dλ ′ in the optical output waveguide formed at the focal point O.
It means that it is possible to extract lights with different wavelengths.

By the way, since the arrayed-waveguide diffraction grating is originally composed mainly of a silica-based glass material, the optical transmission center wavelength of the arrayed-waveguide diffraction grating is caused by the temperature dependence of the silica-based glass material. Shifts depending on the temperature. This temperature dependence is represented by λ as the transmission center wavelength of the light output from one optical output waveguide 6, n _c as the equivalent refractive index of the core forming the arrayed waveguide 4, and the substrate (for example, a silicon substrate) 1 Where α _s is the linear expansion coefficient of and the temperature change amount of the arrayed-waveguide diffraction grating is T.

[0027]

[Equation 6]

Here, in the conventional general arrayed-waveguide diffraction grating, the temperature dependence of the light transmission center wavelength will be calculated from (Equation 6). In the conventional general arrayed-waveguide diffraction grating, dn _c / dT = 1 × 10
⁻⁵ (° C. ⁻¹ ), α _s = 3.0 × 10 ⁻⁶ (1 / K),
Since n _c = 1.451 (value at wavelength 1.55 μm), these values are substituted into (Equation 6).

The wavelength λ is different for each optical output waveguide 6, but the temperature dependence of each wavelength λ is equal.
And the arrayed waveguide grating currently used is
Since it is often used for demultiplexing or multiplexing the wavelength-multiplexed light in the wavelength band centering on the wavelength of 1550 nm, here, λ = 1550 nm is substituted into (Equation 6). Then, the temperature dependence dλ / dT of the light transmission center wavelength of the conventional general arrayed waveguide diffraction grating is dλ
/DT=0.011 (nm / ° C.).

Here, it is assumed that the optical transmission center wavelength output from the optical output waveguide of the arrayed waveguide diffraction grating deviates by Δλ due to the temperature variation of the arrayed waveguide diffraction grating. From the above discussion, if the output end position of the optical input waveguide is shifted by the distance dx ′ in the X direction so that dλ ′ = Δλ, there will be no wavelength shift in the optical output waveguide formed at the focus O, for example. The light can be extracted. Further, since the same action occurs with respect to other optical output waveguides, it is possible to correct (eliminate) the optical transmission center wavelength shift Δλ.

Here, the relationship between the temperature change amount and the position correction amount of the optical input waveguide will be derived. Since the temperature dependence of the light transmission center wavelength (the shift amount of the light transmission center wavelength due to temperature) is expressed by dλ / dT = 0.011 (nm / ° C.) as described above, the temperature change amount T is used. Deviation of center wavelength of light transmission Δ
λ can be represented by (Equation 7).

[0032]

[Equation 7]

From the equations (5) and (7), the temperature change amount T and the position correction amount dx 'of the optical input waveguide are calculated (equation 8).
Is guided.

[0034]

[Equation 8]

Based on the above discussion, at least one of the first slab waveguide 3 and the second slab waveguide 5 of the arrayed-waveguide diffraction grating is separated and separated at the surface intersecting the path of light passing through the slab waveguide. A configuration has been proposed in which a slab waveguide is formed, and at least one side of the separation slab waveguide is slid along the separation surface depending on the temperature. The details of this proposal are described in Japanese Patent Application No. 2000-283806.

The configuration proposed above is, for example, as shown in FIG. That is, first, the first slab waveguide 3 of the arrayed waveguide diffraction grating is separated by the cross separation surface 8 that intersects the path of light passing through the first slab waveguide 3. The cross separation surface 8 is located on one end side of the waveguide formation region 10 (see FIG. 6).
(A) (the left end side of (a)) to a midway portion of the waveguide formation region 10, and is communicated with the crossing separation surface 8 so as not to cross the first slab waveguide 3 and the non-crossing separation surface 1
8 is formed.

Then, the crossing separation surface 8 and the non-crossing separation surface 18
By this, the waveguide forming region 10 is divided into a first waveguide forming region 10a including the separation slab waveguide 3a on one side and a second waveguide forming region 10b including the separation slab waveguide 3b on the other side. Separated. In addition, in (a) of FIG.
Although the non-crossing separation surface 18 is shown to be provided orthogonal to the crossing separation surface 8, the non-crossing separation surface 18 may not be orthogonal to the cross separation surface 8.

Further, a slide moving member 17 having a linear expansion coefficient larger than that of the waveguide forming region 10 is provided so as to extend over the first waveguide forming region 10a and the second waveguide forming region 10b. The slide moving member 17 is configured to slide the first waveguide formation region 10a with respect to the second waveguide formation region 10b along the intersecting separation surface 8. The slide moving member 17 is made of metal or the like.

In FIG. 6, by the slide moving member 17, only the position correction amount dx 'represented by (Equation 8),
The separation slab waveguide 3a of the first slab waveguide 3 and the optical input waveguide 2 along the separation surface (the cross separation surface 8 in FIG. 6).
It is possible to eliminate the shift of the light transmission center wavelength by sliding the lens.

In order to exert the above effect, in the above proposal, the amount of movement of the first waveguide forming region 10a by the slide moving member 17 depends on the temperature of each light transmission center wavelength of the arrayed waveguide diffraction grating. 6B, that is, between the joining members 13 for joining the slide moving member 17 and the arrayed-waveguide diffraction grating so that the movement amount can compensate the property. The length is designed.

Further, in FIG. 6, in order to prevent the optical axes of the separation slab waveguide 3a on one side and the separation slab waveguide 3b on the other side from deviating in the Z direction, a positional deviation suppressing member 19 is provided. There is. The position shift suppressing member 19 can be omitted.

[0042]

By the way, the above-mentioned Japanese Patent Application No. 2
000-283806, slide moving member 1
The joining structure for joining 7 to the arrayed waveguide diffraction grating is not particularly limited, and although an example in which the joining member 13 is used as an adhesive is not shown in the embodiment example, for example, as the joining member 13 described above, In the case where the adhesive is applied, if the optical waveguide module is placed under severe conditions of high temperature and high humidity, there may be a problem that the center wavelength of light transmission is greatly shifted.

That is, the present inventor uses the optical waveguide module having the bonding member 13 in the configuration shown in FIG.
As a result of performing a high temperature and high humidity test in which the temperature is kept at 85 ° C. and a humidity of 85% for 336 hours, and measuring the fluctuation amount of the light transmission center wavelength of the optical waveguide module before and after the test, the characteristic line b in FIG.
As shown in b ′ and b ″, the fluctuation amount of the above optical waveguide module after the high temperature and high humidity test was about 0.1 nm to 0.15 nm, which was a large fluctuation amount in some cases.

In order to use the arrayed waveguide diffraction grating having a frequency spacing of 100 GHz in an actual system, the light transmission center wavelength shift amount is ±.
It is necessary to suppress the thickness to about 0.03 nm, and in order to satisfy this condition, it is desired that the shift amount of the light transmission center wavelength is small even under severe conditions such as the high temperature and high humidity test.

As described above, when an adhesive is applied as the joining member 13 in the configuration of FIG. 6 and the optical module is placed under high temperature and high humidity conditions, the cause of the large center wavelength of light transmission is: It is considered to be due to the following phenomenon.

That is, since the adhesive may undergo creep deformation due to changes in the environment (temperature, humidity) of the arrayed-waveguide diffraction grating, as shown in FIG. The length between the adhesive disposing portions for joining the lattice is as shown in B ',
It is considered that this is because the value becomes shorter than the design value shown in B.

Therefore, in consideration of accurately compensating the temperature dependence of the light transmission center wavelength of the arrayed waveguide diffraction grating for a long period of time, applying an adhesive as the joining member 13 may be a problem. In the above proposal, in order to accurately compensate the temperature dependence of the optical transmission center wavelength of the arrayed waveguide diffraction grating for a long period of time, it is important to optimize the configuration in which the slide moving member 17 is fixed to the arrayed waveguide diffraction grating. The present inventor thought that such a problem would occur.

Further, as described above, the slide moving member 17
Is formed of a metal member or the like, the inventor of the present invention, in order to optimize the configuration for fixing the slide moving member 17 to the arrayed waveguide diffraction grating, a planar light guide such as an arrayed waveguide diffraction grating is used. It was considered to be an important task to optimize the joint structure between the waveguide 20 and the metal member.

The present invention has been made in order to solve the above-mentioned problems, and its purpose is to prevent the deformation of the joining member provided on the joining surface between the planar optical waveguide and the metal member, and to provide the reliability. (EN) Provided is a highly bonded structure of a planar optical waveguide and a metal member, and an optical waveguide module using the bonded structure.

[0050]

The present invention has the following constitution as means for solving the problems. That is, the joining structure of the planar optical waveguide and the metal member of the first invention is a joining structure for joining the planar optical waveguide and the metal member, and the joining surface of the metallic member and the joining surface of the planar optical waveguide are The means for solving the problem is configured such that the planar optical waveguide and the metal member are joined by diffusion joining of the provided metal film.

In addition, in the joint structure of the planar optical waveguide and the metal member of the second invention, in addition to the structure of the first invention, the linear expansion coefficient of the metal member is substantially equal to the linear expansion coefficient of the planar optical waveguide. The formed structure is used as a means for solving the problem.

Further, in the joint structure of the planar optical waveguide and the metal member of the third invention, in addition to the structure of the first or second invention, the metal member is made of Kovar or Invar alloy to solve the problem. It is a means to do.

Further, in the joint structure of the flat optical waveguide and the metal member of the fourth invention, in addition to the structure of any one of the first to third inventions, the metal film is provided on the flat optical waveguide side and the metal member. Between the diffusion bonding surface of the metal film on the side of the planar optical waveguide and the diffusion bonding surface of the metal film on the side of the metal member. In order to solve the problem, a soft metal interposing member having a recrystallization temperature of about 70 ° C. to about 500 ° C. is provided.

Furthermore, in the joint structure of the flat optical waveguide and the metal member of the fifth invention, in addition to the structure of the first invention, the metal member is a first metal arranged with a space from the flat optical waveguide. And a second metal member interposed between the first metal member and the planar optical waveguide and having a linear expansion coefficient smaller than that of the first metal member, and a joint surface of the second metal member. The structure joined to the planar optical waveguide is used as a means for solving the problem.

Further, in the joint structure of the planar optical waveguide and the metal member of the sixth invention, in addition to the configuration of the fifth invention, the linear expansion coefficient of the second metal member is the linear expansion coefficient of the planar optical waveguide. Almost the same structure is used as a means for solving the problem.

Further, the joint structure of the planar optical waveguide and the metal member of the seventh invention has a structure in which the second metal member is a Kovar or Invar alloy in addition to the structure of the fifth or sixth invention. As a means to solve.

Furthermore, in the joint structure of the flat optical waveguide and the metal member of the eighth invention, in addition to the structure of the fifth, sixth or seventh invention, the first metal member is a flat surface depending on temperature. A member that expands and contracts more than the optical waveguide is used as means for solving the problem.

Further, in the joint structure of the flat optical waveguide and the metal member of the ninth invention, in addition to the structure of the eighth invention, the first metal member is made of copper or aluminum. I am trying.

Further, in the joint structure of the flat optical waveguide and the metal member of the tenth invention, in addition to the structure of any one of the fifth to ninth inventions, the metal film is formed on the flat optical waveguide side and the metal member. And a diffusion bonding surface is formed on the surface side of each metal film.
Between the diffusion bonding surface of the metal film on the side of the planar optical waveguide and the diffusion bonding surface of the metal film on the side of the second metal member, a metal intervening member of a soft metal having a recrystallization temperature of about 70 ° C to about 500 ° C is provided. The provided structure is used as a means for solving the problem.

Furthermore, the optical waveguide module of the eleventh aspect of the invention solves the problem by a structure formed by applying the joining structure of the flat optical waveguide and the metal member of any one of the first to tenth aspects of the invention. It is a means to do.

Further, the optical waveguide module according to the twelfth invention comprises at least one optical input waveguide, a first slab waveguide connected to the output side of the optical input waveguide, and the first slab waveguide.
Array slab waveguide connected to the output side of the slab waveguide, the array waveguide including a plurality of side-by-side channel waveguides having different set amounts from each other, and a second slab waveguide connected to the output side of the array waveguide. And a waveguide forming region having a plurality of optical output waveguides connected to the output side of the second slab waveguide and arranged in parallel, are formed on the substrate, and the first slab waveguide and the second slab waveguide are formed. At least one of the slab waveguides is separated at an intersecting surface that intersects a path of light passing through the slab waveguide to form a separated slab waveguide, and the waveguide forming region includes the separated slab waveguide on one side by the separated surface. In a mode of straddling the first and second waveguide forming regions of the planar optical waveguide separated into the first waveguide forming region and the second waveguide forming region including the separated slab waveguide on the other side, The first waveguide formation region and the second waveguide At least one side of the formation region are sliding member is provided to move along the separation surface, the supporting member for supporting the sliding member on the planar optical waveguide is fixed to the sliding member,
The support member is formed of a metal member, and the metal member is bonded to the planar optical waveguide by the bonding structure of the planar optical waveguide and the metal member according to any one of the first to fourth inventions. It is a means to solve.

Furthermore, the optical waveguide module of the thirteenth invention has a problem in that, in addition to the configuration of the twelfth invention, the slide moving member is a member that expands and contracts more than the planar optical waveguide depending on temperature. It is a means to solve.

Furthermore, in the optical waveguide module according to the fourteenth invention, in addition to the structure of the thirteenth invention, the slide moving member is formed of copper or aluminum as means for solving the problem.

Furthermore, the optical waveguide module of the fifteenth invention comprises at least one optical input waveguide, a first slab waveguide connected to the output side of the optical input waveguide, and the first slab waveguide.
Array slab waveguide connected to the output side of the slab waveguide, the array waveguide including a plurality of side-by-side channel waveguides having different set amounts from each other, and a second slab waveguide connected to the output side of the array waveguide. And a waveguide forming region having a plurality of optical output waveguides connected to the output side of the second slab waveguide and arranged in parallel, are formed on the substrate, and the first slab waveguide and the second slab waveguide are formed. At least one of the slab waveguides is separated at an intersecting surface that intersects a path of light passing through the slab waveguide to form a separated slab waveguide, and the waveguide forming region includes the separated slab waveguide on one side by the separated surface. In a mode of straddling the first and second waveguide forming regions of the planar optical waveguide separated into the first waveguide forming region and the second waveguide forming region including the separated slab waveguide on the other side, The first waveguide formation region and the second waveguide At least one side of the formation region are sliding member is provided to move along the separation surface, the supporting member for supporting the sliding member on the planar optical waveguide is fixed to the sliding member,
A metal member including a first metal member forming the slide moving member and a second metal member forming the support member is formed by the joining structure of the flat optical waveguide and the metal member according to any one of the fifth to tenth aspects of the invention. The structure joined to the planar optical waveguide serves as means for solving the problem.

[0065]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. In the description of the example of the present embodiment, the same reference numerals are given to the same names as those in the conventional example and the proposed example, and the duplicated description will be omitted. 1 (a), (b)
Shows the configuration of the main part of the first embodiment of the optical waveguide module according to the present invention.

Incidentally, FIG. 1 (a) is a plan view thereof, and FIG. 1 (b) is a sectional view taken along the line AA '. In addition, FIG. 1C shows an enlarged cross-sectional view in the chain line frame D of FIG. 1B, and FIG. 1D shows a plane applied to this embodiment example. A joint structure of the optical waveguide and the metal member is schematically shown by a sectional view.

The optical waveguide module of this embodiment has a planar optical waveguide 20 having the following structure. That is, in the planar optical waveguide 20, as shown in FIG. 1A, the waveguide formation region 10 having the waveguide configuration of the arrayed waveguide diffraction grating is formed on the substrate 1. Further, in the planar optical waveguide 20, at least one of the first slab waveguide 3 and the second slab waveguide 5 (here, the first slab waveguide 3) intersects a path of light passing through the slab waveguide. Separated slab waveguide 3 separated at the intersecting surface (intersecting separating surface 8)
a and 3b.

Due to the crossing separation surface 8 and the non-crossing separation surface 18, the first waveguide formation region 10a in which the waveguide formation region 10 includes the separation slab waveguide 3a on one side and the separation slab waveguide on the other side. Second waveguide formation region 1 including 3b
It is separated into 0b.

Further, in the optical waveguide module of the present embodiment, the first waveguide formation region 10a is formed so as to extend over the first and second waveguide formation regions 10a and 10b of the planar optical waveguide 20. A slide moving member 17 is provided to move at least one side of the second waveguide formation region 10b (here, the first waveguide formation region 10a side) along the intersecting separation surface 8.

The slide moving member 17 is a member that expands and contracts more greatly than the planar optical waveguide 20 depending on the temperature, and the slide moving member 17 has, for example, a linear expansion coefficient of 1.7 × 10.
^{It is formed of −5} (1 / K) copper (Cu).

The slide moving member 17 has a supporting member 9 for supporting the slide moving member 17 on the planar optical waveguide 20.
Are fixed, and the support member 9 is formed of a metal member 7. The metal member 7 has a linear expansion coefficient substantially equal to that of the planar optical waveguide 20. The metal member 7 has, for example, a linear expansion coefficient of 4.0 × 10 ⁻⁶ (1 / K).
Is formed by Kovar.

As shown in FIGS. 1A and 1C, the slide moving member 17 has a fitting hole 12 for the metal member 7.
Is formed, and the support member 9 for the metal member 7 is formed in the fitting hole 12.
The slide moving member 17 and the metal member 7 are joined by shrink fit in a manner fitted together.

The optical waveguide module of the present embodiment is formed by joining the metal member 7 to the plane optical waveguide 20 of the arrayed waveguide diffraction grating by the following joining structure of the plane optical waveguide 20 and the metal member. Has been done.

As shown in FIG. 1D, the joining structure of the planar optical waveguide and the metal member applied to the present embodiment has a joining surface of the planar optical waveguide 20 (here, an arrayed waveguide diffraction grating). The planar optical waveguide 20 and the metal member 7 are joined by diffusion joining of the metal film 11 provided at the joining portion between the waveguide forming region surface) and the joining surface of the metal member 7.

That is, in the optical waveguide module of this embodiment, the metal film 11a formed on the lower surface of the metal member 7 which is the bonding surface of the metal member 7 and the arrayed waveguide which is the bonding surface of the planar optical waveguide 20. The planar optical waveguide 20 and the metal member 7 are joined by diffusion joining with the metal film 11b formed on the surface of the waveguide forming region 10 of the diffraction grating.

The diffusion bonding is a kind of solid phase bonding method, and is performed by applying a pressure at a temperature equal to or higher than the recrystallization temperature of the metal film. Diffusion bonding is a bonding method in which heating and pressurization are held without melting the metal part, the atoms on the bonding surface are diffused, and bonds between the atoms are caused to obtain a completely metal-bonded part. is there. Diffusion bonding enables precise bonding depending on the metal forming the metal film and the bonding conditions, and also provides good mechanical strength equivalent to that of the metal film.

The metal film 11a has an intermediate layer 21 and a bonding layer 22, and the metal film 11b has a bonding layer 23 and an intermediate layer 24. The contact surface between the bonding layer 22 and the bonding layer 23 is a diffusion bonding surface. Bonding layers 22 and 23 are each 0.5 μ
The intermediate layers 21 and 24 are each made of, for example, 0.1 μm thick Cr.

As described above, the thicknesses of the bonding layers 22 and 23 are both about 1 μm, and even if the thicknesses of the intermediate layers 21 and 24 are added, for example, when the metal member and the planar optical waveguide are bonded with an adhesive. It is much smaller than the thickness (50 to 100 μm). 1C and 1D schematically show the structure of the metal film 11, and the film thickness of each layer is not necessarily shown to a thickness corresponding to the above film thickness.

The bonding layers 22 and 23 are preferably formed of a metal capable of diffusion bonding at a temperature as low as possible. However, when a metal whose recrystallization temperature is near room temperature is selected, creep deformation or superplastic deformation can occur. There is a nature.

Therefore, the bonding layers 22 and 23 are formed in the optical waveguide module.
Higher than the temperature range (0 ℃ -70 ℃) where Joule is used
Temperature that does not affect the refractive index of the waveguide
Formed by a metal that has a recrystallization temperature near (500 ° C or less)
Is desirable. Gold forming the bonding layers 22 and 23
In addition to Cu, the genus has, for example, a linear expansion coefficient of 2.5 × 10.
^-5(1 / K) aluminum (Al), etc. are considered
It

By selecting the metal as described above for the bonding layers 22 and 23, it is possible to reduce the influence on the refractive index of the optical waveguide of the arrayed waveguide diffraction grating during diffusion bonding.
The intermediate layers 21 and 24 are provided to improve the adhesion between the bonding layers 22 and 23 and the metal member 7 or the waveguide forming region 10.

In this embodiment, the metal member 7
Is lap-polished until the average roughness of the surface on the metal film 11a side (that is, the surface facing the intermediate layer 21) becomes about 0.02 μm. The intermediate layers 21 and 24 may be multilayer films, or may be omitted when the above-mentioned adhesion is good.

In this embodiment, the diffusion bonding of the metal film 11 is carried out by forming the metal films 11a and 11b and then forming the arrayed waveguide diffraction grating and the metal member 7 in a high temperature inert atmosphere (N.
₂ : 10 ppm, 500 ° C.) 5 at 50 Kfg / cm ²
By applying pressure for 000 seconds, the bonding layers 22, 23
In addition, pressure was applied above the recrystallization temperature.

It is generally known that the recrystallization temperature of Cu forming the bonding layers 22 and 23 is around 200 to 220 ° C. By performing the above-mentioned pressurization at a temperature not lower than the recrystallization temperature and not higher than the melting point of Cu, the diffusion bonding can be favorably performed and the bonding layers 22 and 23 are hardly deformed. It can be closely joined.

According to the present embodiment, as described above, the arrayed waveguide diffraction grating and the metal member 7 are formed by diffusion bonding of the metal film 11, and the metal forming the metal film 11 and the bonding conditions are set as described above. By appropriately setting as described above, it is possible to perform precise bonding, and it is possible to bond the arrayed waveguide diffraction grating and the metal member 7 with good mechanical strength equivalent to that of the metal film 11.

Therefore, in the optical waveguide module of the present embodiment, by applying this joining structure, the joining of the planar optical waveguide 20 and the metal member can be made highly reliable, and the yield is improved. Can be planned.

Further, the waveguide forming region 10 of the arrayed waveguide diffraction grating is made of Si, glass or the like, and the linear expansion coefficient of the slide moving member 17 is larger than those materials. Therefore, for example, when a metal film is formed on the lower surface of the slide moving member 17 and the metal film formed on the bonding surface of the metal member 7 is diffusion-bonded, the planar optical waveguide 20 of the planar optical waveguide 20 is cooled in the diffusion bonding cooling process. Optical waveguide forming region 10
There is a possibility that a large residual stress will be applied to.

However, in this embodiment, a configuration is adopted in which the metal member 7 having a linear expansion coefficient substantially equal to the linear expansion coefficient of the waveguide forming region 10 and the planar optical waveguide 20 are joined by diffusion bonding of the metal film 11. By doing so, the metal film 11
Of the metal member 7 and the planar optical waveguide 2 with almost no residual stress applied to the optical waveguide forming region 10 during cooling during the diffusion bonding of
Can be joined with 0.

Then, the metal member 7 and the slide moving member 1
7 and 7 are joined by shrink fitting or the like, it is possible to form an excellent optical module capable of appropriately compensating for the temperature dependence of the light transmission center wavelength of the arrayed waveguide diffraction grating by the function of the slide moving member 17.

Regarding the optical waveguide module of the present embodiment, the present inventor has set the ambient temperature around the optical waveguide module to 8
A high temperature and high humidity test was performed in which the temperature was kept at 5 ° C. and the humidity was 85% for 336 hours. Then, before and after this test, the fluctuation amount of the light transmission center wavelength of the optical waveguide module was measured.

As a result, in the optical waveguide module of this embodiment, as shown by the characteristic lines a, a ′, and a ″ in FIG. 2, the variation amount after the high temperature and high humidity test is 0.01 nm to 0. 0
It is very small at 2 nm, and even in the above-mentioned severe tests, the light transmission center wavelength shift amount is within the light transmission center wavelength shift amount allowable range (± 0.03) for use in an actual system.
nm).

As is clear from the results of this examination, the optical waveguide module of the present embodiment does not involve deformation of the metal film 11 even if the above-mentioned extremely severe environmental change occurs. It is possible to realize an excellent optical waveguide module having extremely high reliability, which can favorably maintain the light transmission center wavelength compensation function of the arrayed waveguide diffraction grating for a long period of time.

FIGS. 3 (a) and 3 (b) show the essential structure of the second embodiment of the optical waveguide module according to the present invention. The plan view of FIG.
(B) shows the AA 'sectional view. Further, FIG. 3C shows an enlarged cross-sectional view within the chain line frame D of FIG. 3B.

The optical waveguide module of the second embodiment is
The slide moving member 17 having the same configuration as that of the first embodiment and having the same function as the slide moving member 17 provided in the first embodiment and its supporting member. Have nine.

In the second embodiment, the metal member 7 is formed by the first metal member 7 (7a) and the second metal member 7 (7b), and the first and second metal members 7 (7a, 7a, 7b) are formed. 7
b) is joined to the planar optical waveguide 20 in a state where it is joined by welding or the like in advance. The first metal member 7a is disposed with a space from the plane optical waveguide 20 to form the slide moving member 17, and the second metal member 7 is formed with the first metal member 7a and the plane optical waveguide 20 (array waveguide. And a diffraction grating) to form the support member 9.

The first metal member 7a is formed of a copper member which is a member that expands and contracts more greatly than the planar optical waveguide 20 depending on the temperature, and the second metal member 7b is the first metal member 7a.
The linear expansion coefficient is smaller, and it is formed of a silicon substrate of the planar optical waveguide 20 or Kovar having a linear expansion coefficient substantially equal to the linear expansion coefficient of the waveguide forming region 10.

In the second embodiment, the metal member 7 including the first metal member 7a and the second metal member 7b is connected to the planar optical waveguide 2.
0 on the waveguide forming region 10 and the first metal member 7a
The metal film 11a formed on the joint surface of the metal member 7b.
Film 11 formed on the joint surface between the and array waveguide diffraction grating
The metal member 7 is bonded to the arrayed waveguide diffraction grating by diffusion bonding with b.

The second embodiment can also achieve the same effects as the first embodiment.

FIG. 4 shows a joint structure of a planar optical waveguide and a metal member applied to the third embodiment of the optical waveguide module according to the present invention. The optical waveguide module of the third embodiment has a planar optical waveguide 20 of an arrayed waveguide diffraction grating formed in the same manner as the first exemplary embodiment, and the planar optical waveguide 20 and the metal member 7 are joined together, It is formed by joining the slide moving member 17 to the metal member 7.

The third embodiment differs from the first embodiment in that the diffusion bonding surface of the metal film 11a on the metal member 7 side and the metal on the planar optical waveguide 20 side are different from each other as shown in FIG. The metal interposition member 25 is provided between the diffusion bonding surface of the film 11b. The contact surface between the bonding layer 22 and the bonding layer 23 is the diffusion bonding surface.

The metal interposition member 25 has a recrystallization temperature of about 70.
It is formed of a soft metal having a temperature of about 500 ° C to about 500 ° C. In the third embodiment, the metal interposition member 25 includes the bonding layer 22,
It is formed of Cu, which is the same metal as 23. In addition, in the third embodiment, the metal film 1 of the metal member 7b is used.
The flatness on the 1a side is 1 μm, and the average roughness is 0.8 μm.

If the recrystallization temperature is about 70 ° C. to about 500 ° C., the metal interposing member 25 is made of a soft metal.
It can also be formed of Al, which is a metal different from 23. Even if the metal interposition member 25 is Al, 500 ° C
Diffusion bonding is possible at a temperature around. Since both Cu and Al soften near the temperature at the time of joining, the adhesion between the joining surfaces is also good.

The metal interposition member 25 can be formed of a metal sheet, a metal plate, or the like, or can be formed and provided on the metal film 11b by means such as plating.

The third embodiment is constructed as described above, and the third embodiment can also achieve the same effects as the first embodiment.

Further, in the third embodiment, the metal interposition member 2 is used.
By providing 5, the metal member 7 and the planar optical waveguide 20 can be provided even if the flatness and the surface roughness of at least one of the surfaces of the metal member 7 and the planar optical waveguide 20 such as an arrayed waveguide diffraction grating are insufficient. Adjust the distance from the surface of
Good joining of the metal member 7 and the planar optical waveguide 20 can be performed.

Furthermore, by providing the metal interposition member 25, the residual stress generated between the metal member 7 and the planar optical waveguide 20 (array waveguide diffraction grating) can be relaxed.

FIG. 5 shows a joining structure of a planar optical waveguide and a metal member applied to the fourth embodiment of the optical waveguide module according to the present invention. The optical waveguide module of the fourth embodiment has a planar optical waveguide 20 of an arrayed waveguide diffraction grating formed in the same manner as the second embodiment, and the arrayed waveguide diffraction grating and the first and second It is formed by joining metal members 7 made of metal members 7a and 7b.

The fourth embodiment is different from the second embodiment in that the diffusion bonding surface of the metal film 11a on the metal member 7 side and the metal on the planar optical waveguide 20 side are different from each other as shown in FIG. The metal interposition member 25 is provided between the film 11b and the diffusion bonding surface, and the metal interposition member 25 and the arrangement configuration thereof are the same as those in the third embodiment.

Therefore, the fourth embodiment is the same as the second embodiment.
The same effect as that of the embodiment is obtained, and the metal interposition member 2 is provided.
It is possible to obtain the same effect as the third embodiment by the arrangement of No. 5.

The present invention is not limited to the above-mentioned embodiments, but can take various modes. For example, in each of the above-described embodiments, the slide moving member 17 is made of Cu, but the slide moving member 17 is made of a member that expands and contracts more greatly than the planar optical waveguide 20 such as an arrayed waveguide diffraction grating. The slide moving member 17 may be made of Al.

Further, in each of the above embodiments, the support member 9 is used.
(Metal member 7 in the first and third embodiments and second metal member 7 in the second and fourth embodiments.
Although b) is formed of Kovar, the support member 9 may be made of Invar alloy having a linear expansion coefficient of 1.0 × 10 ⁻⁶ (1 / K).

Further, in the above-mentioned first and third embodiments, the fitting hole 12 is formed in the slide moving member 17, but the fitting hole 12 is not formed in the slide moving member 17 and the slide moving member 17 is formed. The metal member 7 may be joined to the lower side by welding or the like.

Further, in the above embodiment, the first slab waveguide 3 of the arrayed waveguide diffraction grating is separated, but the second slab waveguide 5 may be separated, or the first slab waveguide 5 may be separated. Both the second slab waveguide 3 and the second slab waveguide 5 may be separated.

That is, the configuration for adjusting the light transmission center wavelength of the arrayed waveguide diffraction grating is described in the above-mentioned Japanese Patent Application 2000-283.
Various configurations as described in Japanese Patent No. 806 can be applied. The excellent effects as in the above-described embodiments can be obtained.

Furthermore, in the above example, the example in which the arrayed waveguide diffraction grating and the metal member 7 are bonded together has been described, but the bonding structure of the planar optical waveguide and the metal member of the present invention is various other than the arrayed waveguide diffraction grating. It is applied as a structure for joining the joining surface of the flat optical waveguide and the joining surface of the metal member, and various optical waveguide modules can be configured by applying the joining structure.

[0116]

According to the joining structure of the flat optical waveguide and the metal member of the present invention, the flat optical waveguide and the metal member are provided at the joining portion between the joining surface of the flat optical waveguide and the joining surface of the metal member. Since they are bonded by diffusion bonding of the metal film,
It is possible to realize a highly reliable joint structure between a planar optical waveguide and a metal member, which has very good mechanical strength and does not involve deformation like an adhesive.

Further, according to the joint structure of the planar optical waveguide and the metallic member of the present invention, the linear expansion coefficient of the metallic member is made substantially equal to the linear expansion coefficient of the planar optical waveguide.
In the cooling process of the diffusion bonding of the metal film, the planar optical waveguide can be bonded with almost no stress, and a more reliable bonded structure between the planar optical waveguide and the metal member can be realized.

Further, in the joint structure of the planar optical waveguide and the metal member of the present invention, if the metal member is made of Kovar or Invar alloy, the above effects can be properly exhibited by using these metal members. it can.

Further, in the bonding structure of the planar optical waveguide and the metal member of the present invention, the recrystallization temperature is about 70 between the diffusion bonding surfaces on the metal film surface side provided on the planar optical waveguide side and the metal member side. According to the configuration in which the metal intervening member made of a soft metal having a temperature of ℃ to about 500 ℃ is provided, for example, even when the flatness or the surface roughness of at least one of the surface of the metal member and the surface of the planar optical waveguide is insufficient, By adjusting the distance between the metal member and the surface of the planar optical waveguide, the metal member and the planar optical waveguide can be bonded well.

Further, in this structure, by providing the metal interposition member, the residual stress generated between the metal member and the planar optical waveguide can be relaxed.

Further, in the joint structure of the planar optical waveguide and the metallic member of the present invention, according to the structure in which the metallic member has the first and second metallic members, for example, the linear expansion coefficient of the first metallic member and the planar optical waveguide are If the difference between the linear expansion coefficient and the linear expansion coefficient is large, the residual stress applied to the planar optical waveguide during the cooling process of the diffusion bonding becomes large. By doing
The residual stress can be reduced, and the effect of suppressing the temperature dependence of the planar optical waveguide can be achieved by using the first metal member having a large linear expansion coefficient.

Further, in the structure in which the metal member has the first and second metal members, if the second metal member is made of Kovar or Invar alloy, these materials can be applied to achieve the above effect accurately. can do.

Further, in the structure in which the metal member has the first and second metal members, the first metal member is a member which expands and contracts more greatly than the planar optical waveguide depending on the temperature. By utilizing the property that the member expands and contracts more greatly than the planar optical waveguide depending on the temperature, it is possible to realize the formation of an optical module that can suppress the temperature dependency of the planar optical waveguide.

Further, in the structure in which the metal member has the first and second metal members, the first metal member is made of copper or aluminum. By using these copper and aluminum, for example, a planar optical waveguide It is possible to easily realize the formation of an optical module which can suppress the temperature dependence.

Further, in the structure in which the metal member has the first and second metal members, the recrystallization temperature is provided between the diffusion bonding surfaces on the metal film surface side provided on the planar optical waveguide side and the second metal member side, respectively. According to the configuration in which the metal interposing member made of a soft metal having a temperature of about 70 ° C. to about 500 ° C. is provided, for example, the flatness or surface roughness of at least one of the surface of the second metal member and the surface of the planar optical waveguide is insufficient. Even in this case, the distance between the second metal member and the surface of the planar optical waveguide can be adjusted to achieve good bonding between the metal member and the planar optical waveguide. Also,
With this configuration, by providing the metal interposition member, the residual stress generated between the metal member and the planar optical waveguide can be relaxed.

Further, according to the optical waveguide module of the present invention, since it is formed by applying the above-mentioned joining structure of the planar optical waveguide and the metal member, the planar optical waveguide and the metal member are very good. The optical waveguide module can be formed with high mechanical strength and without deformation such as an adhesive, and a very reliable optical waveguide module can be formed.

Further, in the optical waveguide module of the present invention, the planar optical waveguide is configured to have a circuit of an arrayed waveguide diffraction grating including an arrayed waveguide and the like, and the metal member is used as a support member for the slide moving member. According to the configuration in which the member is bonded to the planar optical waveguide by the bonding structure of the planar optical waveguide and the metal member of the present invention, the supporting member has a very good mechanical strength and is a planar optical waveguide without deformation. Can be joined.

Therefore, by using the function of the slide moving member supported by the supporting member, it is possible to realize an excellent optical waveguide module capable of reducing the temperature dependence of the light transmission center wavelength of the arrayed waveguide diffraction grating.

Further, in the optical waveguide module of the present invention having the planar optical waveguide having the circuit of the arrayed waveguide diffraction grating and the supporting member of the metal member, the slide moving member expands and contracts more greatly than the planar optical waveguide depending on the temperature. According to the configuration of the member, the temperature dependence of the light transmission center wavelength of the arrayed waveguide diffraction grating can be easily and accurately reduced by using the function of the slide moving member.

Further, in the optical waveguide module of the present invention having the supporting member of the metal member for the planar optical waveguide having the circuit of the arrayed waveguide diffraction grating, the slide moving member is made of copper or aluminum. The slide moving member can be formed of these metals, and the above effects can be accurately exhibited.

Further, in the optical waveguide module of the present invention, the planar optical waveguide is configured to have the circuit of the arrayed waveguide diffraction grating, and the first metal member forming the slide moving member and the supporting member for the slide moving member are formed. According to the configuration in which the metal member formed of the second metal member is bonded to the planar optical waveguide by the bonding structure of the planar optical waveguide and the metallic member, it is possible to reduce the temperature dependence of the light transmission center wavelength of the arrayed waveguide diffraction grating. It is possible to realize a highly efficient optical waveguide module.

[Brief description of drawings]

FIG. 1 is a main part configuration diagram showing a first embodiment of an optical waveguide module according to the present invention and a joint structure of a planar optical waveguide and a metal member applied to the first embodiment.

FIG. 2 is a graph showing the amount of change in the central wavelength of light transmission before and after the high temperature and high humidity test in the first embodiment and the second embodiment of the optical waveguide module according to the present invention in comparison with a comparative example. Is.

FIG. 3 is a main part configuration diagram showing a second embodiment of an optical waveguide module according to the present invention and a joint structure of a planar optical waveguide and a metal member applied to the second embodiment.

FIG. 4 is an explanatory view showing a joint structure of a planar optical waveguide and a metal member applied to an optical waveguide module according to a third embodiment of the present invention.

FIG. 5 is an explanatory view showing a joint structure of a planar optical waveguide and a metal member applied to an optical waveguide module according to a fourth embodiment of the present invention.

FIG. 6 is an explanatory diagram showing a configuration of a proposal example of optical transmission center wavelength compensation of an arrayed waveguide diffraction grating.

FIG. 7 is an explanatory diagram showing a problem when an adhesive is applied as a joining member for joining a metal member and a planar optical waveguide.

FIG. 8 is an explanatory diagram showing an example of an arrayed waveguide diffraction grating.

FIG. 9 is an explanatory diagram showing the relationship between the light transmission center wavelength shift in the arrayed waveguide diffraction grating and the positions of the optical input waveguide and the optical output waveguide.

[Explanation of symbols]

1 substrate 2 Optical input waveguide 3 Input side slab waveguide 3a, 3b separate slab waveguide 4 Array waveguide 4a channel waveguide 5 Output side slab waveguide 6 Optical output waveguide 7 Metal members 7a First metal member 7b Second metal member 9 Support members 10 Waveguide formation area 11a First waveguide formation region 11b Second waveguide formation region 11, 11a, 11b Metal film 17 Slide moving member 22,23 Bonding layer 25 Metal interposition member

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Masanobu Nekkaku             2-6-1, Marunouchi, Chiyoda-ku, Tokyo             Kawa Electric Industry Co., Ltd. (72) Inventor Kanji Tanaka             2-6-1, Marunouchi, Chiyoda-ku, Tokyo             Kawa Electric Industry Co., Ltd. F-term (reference) 2H037 AA01 BA24 DA02 DA06                 2H047 KA03 KA12 LA18 NA10                 2H049 AA02 AA12 AA59 AA62 AA65

Claims (15)

[Claims] 1. A joint structure for joining a planar optical waveguide and a metal member, wherein the planar optical waveguide and the planar optical waveguide are joined by diffusion bonding of a metal film provided on the joint surface of the metallic member and the joint surface of the planar optical waveguide. A joining structure of a planar optical waveguide and a metal member, characterized in that a metal member is joined. 2. The joint structure of a flat optical waveguide and a metal member according to claim 1, wherein the linear expansion coefficient of the metal member is formed to be substantially equal to the linear expansion coefficient of the flat optical waveguide. 3. The joint structure between a planar optical waveguide and a metal member according to claim 1, wherein the metal member is Kovar or Invar alloy. 4. The diffusion bonding surface of the metal film is provided on the flat optical waveguide side and the metal member side, and a diffusion bonding surface is formed on the front surface side of each metal film. 5. A soft metal intervening member having a recrystallization temperature of about 70 ° C. to about 500 ° C. is provided between and the diffusion bonding surface of the metal film on the side of the metal member. Item 4. A joint structure between the planar optical waveguide according to any one of items 3 and a metal member. 5. The first metal member is disposed between the first metal member and the plane optical waveguide, and the metal member is linearly expanded from the first metal member. The second metal member having a small coefficient,
The joint structure of a planar optical waveguide and a metal member according to claim 1, wherein the joint surface of the metallic member is joined to the planar optical waveguide. 6. The linear expansion coefficient of the second metal member is substantially equal to the linear expansion coefficient of the planar optical waveguide.
A structure for joining the described planar optical waveguide and a metal member. 7. The joint structure of a planar optical waveguide and a metal member according to claim 5, wherein the second metal member is Kovar or Invar alloy. 8. The flat optical waveguide and the metal member according to claim 5, wherein the first metal member is a member which expands and contracts more greatly than the flat optical waveguide depending on temperature. Joint structure. 9. The joint structure of a planar optical waveguide and a metal member according to claim 8, wherein the first metal member is copper or aluminum. 10. A metal film is provided on each of the flat optical waveguide side and the second metal member side of the metal member, and a diffusion bonding surface is formed on the front surface side of each metal film. A soft metal metal interposing member having a recrystallization temperature of about 70 ° C. to about 500 ° C. is provided between the diffusion bonding surface of the metal film and the diffusion bonding surface of the metal film on the second metal member side. The joining structure of the planar optical waveguide and the metal member according to any one of claims 5 to 9. 11. An optical waveguide module, which is formed by applying the joining structure of the planar optical waveguide according to any one of claims 1 to 10 and a metal member. 12. At least one optical input waveguide, a first slab waveguide connected to an output side of the optical input waveguide, and an output side of the first slab waveguide, which are connected to each other. An array waveguide composed of a plurality of channel waveguides of different lengths set in parallel, a second slab waveguide connected to the output side of the array waveguide, and an output side of the second slab waveguide A waveguide formation region having a plurality of optical output waveguides connected in parallel to each other is formed on the substrate, and at least one of the first slab waveguide and the second slab waveguide passes through the slab waveguide. A separation slab waveguide is formed by being separated at a crossing surface that intersects a light path, and the separation surface separates the first waveguide formation region including the separation slab waveguide on one side from the first formation region on the other side. Separated into the second waveguide formation region including the slab waveguide The first of the planar optical waveguides
And a slide moving member that moves at least one side of the first waveguide forming region and the second waveguide forming region along the separation surface in a manner to extend over the first waveguide forming region and the second waveguide forming region. A support member for supporting the slide moving member on the planar optical waveguide is fixed to the slide moving member, the support member is formed of a metal member, and the metal member is any one of claims 1 to 4. An optical waveguide module, characterized in that the planar optical waveguide is bonded to the planar optical waveguide by a bonding structure of the planar optical waveguide and the metal member according to any one of the above. 13. The optical waveguide module according to claim 12, wherein the slide moving member is a member that expands and contracts more than the planar optical waveguide depending on temperature. 14. The slide moving member is formed of copper or aluminum.
The optical waveguide module described. 15. At least one optical input waveguide, a first slab waveguide connected to an output side of the optical input waveguide, and an output side of the first slab waveguide, which are mutually connected to each other. An array waveguide composed of a plurality of channel waveguides having different lengths set in parallel, a second slab waveguide connected to the output side of the array waveguide, and an output side of the second slab waveguide A waveguide formation region having a plurality of optical output waveguides connected in parallel to each other is formed on the substrate, and at least one of the first slab waveguide and the second slab waveguide passes through the slab waveguide. A first slab waveguide is formed by separating the slab waveguide at a crossing surface that intersects the optical path, and the waveguide forming region includes the first slab waveguide on one side and the second slab waveguide on the other side. Separated into the second waveguide formation region including the slab waveguide The first of the planar optical waveguides
And a slide moving member that moves at least one side of the first waveguide forming region and the second waveguide forming region along the separation surface in a manner to extend over the first waveguide forming region and the second waveguide forming region. A supporting member for supporting the slide moving member on the planar optical waveguide is fixed to the slide moving member, and includes a first metal member forming the slide moving member and a second metal member forming the supporting member. An optical waveguide module, wherein the metal member is bonded to the planar optical waveguide by the bonding structure of the planar optical waveguide and the metal member according to any one of claims 5 to 10.