JP2003112031A - Liquid mixing method and liquid release valve - Google Patents
Liquid mixing method and liquid release valveInfo
- Publication number
- JP2003112031A JP2003112031A JP2001310437A JP2001310437A JP2003112031A JP 2003112031 A JP2003112031 A JP 2003112031A JP 2001310437 A JP2001310437 A JP 2001310437A JP 2001310437 A JP2001310437 A JP 2001310437A JP 2003112031 A JP2003112031 A JP 2003112031A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- repellent
- lyophilic
- release valve
- partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 166
- 238000000034 method Methods 0.000 title claims description 16
- 239000005871 repellent Substances 0.000 claims abstract description 50
- 230000002940 repellent Effects 0.000 claims abstract description 38
- 239000011347 resin Substances 0.000 claims abstract description 13
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 238000005192 partition Methods 0.000 claims description 29
- 239000011800 void material Substances 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 238000004334 fluoridation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 27
- 239000011521 glass Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 11
- 230000000903 blocking effect Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 238000011282 treatment Methods 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Mixers With Rotating Receptacles And Mixers With Vibration Mechanisms (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Abstract
(57)【要約】
【課題】 微小領域内の2種類の液体を任意のタイミン
グで混合できるようにする。
【解決手段】 透明な枝管18の内面には、透明な樹脂
膜22が設けてある。樹脂膜22の所定位置には、フッ
化などにより形成した撥液部24a〜24cが設けてあ
る。撥液部24aと撥液部24bとの間、および撥液部
24bと撥液部24cとの間には、2液形接着剤の第1
の液体26と第2の液体28とが配置してある。第1の
液体26と第2の液体28との間に存在している撥液部
24bに紫外線32を照射すると、撥液部28が親液化
されて第1の液体26と第2の液体28とが混合して硬
化し、枝管18内の流路36を遮断する。
(57) [Summary] [PROBLEMS] To enable two kinds of liquids in a micro area to be mixed at an arbitrary timing. SOLUTION: A transparent resin film 22 is provided on an inner surface of a transparent branch pipe 18. At predetermined positions of the resin film 22, liquid-repellent portions 24a to 24c formed by fluoridation or the like are provided. Between the liquid-repellent portions 24a and 24b and between the liquid-repellent portions 24b and 24c, a first liquid-liquid adhesive is used.
Of the liquid 26 and the second liquid 28 are arranged. When the liquid repellent portion 24b existing between the first liquid 26 and the second liquid 28 is irradiated with the ultraviolet light 32, the liquid repellent portion 28 is made lyophilic and the first liquid 26 and the second liquid 28 are lyophilized. Are mixed and hardened, and block the flow path 36 in the branch pipe 18.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、2種類以上の液体
を混合する方法に係り、特に微小領域に存在する2種類
の液体を混合するのに好適な液体混合方法および液体開
放弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for mixing two or more kinds of liquids, and more particularly to a liquid mixing method and a liquid release valve suitable for mixing two kinds of liquids existing in a minute area.
【0002】[0002]
【従来の技術】液体やガスなどの流体の流れ制御する場
合、一般に電磁弁等の弁装置を用いて行なわれる。とこ
ろが、直径1mm以下のような微小流路を流れる流体を
制御する場合、流路(管路)に弁装置等を設けることは
非常に困難である。2. Description of the Related Art When controlling the flow of a fluid such as a liquid or a gas, a valve device such as a solenoid valve is generally used. However, when controlling a fluid flowing through a minute flow path having a diameter of 1 mm or less, it is very difficult to provide a valve device or the like in the flow path (pipe).
【0003】例えば、微小な試料を気化させたり反応さ
せたりして得た微量のガスを、分析や液体に溶解させる
等のために複数の分析処理部や反応処理部に供給し、そ
れぞれの処理部への供給量を変えたいような場合、従来
は、各処理部のそれぞれに別々に試料ガスを供給するよ
うにしていた。For example, a minute amount of gas obtained by vaporizing or reacting a minute sample is supplied to a plurality of analysis processing units or reaction processing units for analysis or dissolution in a liquid, and the respective treatments are performed. Conventionally, when it is desired to change the amount of gas supplied to each unit, the sample gas is supplied to each processing unit separately.
【0004】[0004]
【発明が解決しようとする課題】しかし、上記のように
各処理部に微少の試料ガスを別々に供給したのでは、配
管等が微小であるために取扱いが面倒で、作業性も悪
い。このため、微量なガスを複数の箇所に同時に供給
し、任意のタイミングで任意の箇所へのガスの供給を停
止できるような方法の開発が望まれる。このような方法
として、微小な配管内に2液形接着剤のそれぞれの液を
微小配管内に配置しておき、所望のタイミングで2液を
混合できれば便利である。However, if a small amount of sample gas is separately supplied to each processing section as described above, the piping is so small that the handling is troublesome and the workability is poor. Therefore, it is desired to develop a method capable of simultaneously supplying a small amount of gas to a plurality of locations and stopping the gas supply to any location at any timing. As such a method, it is convenient if the respective liquids of the two-component adhesive are arranged in the minute pipes and the two liquids can be mixed at a desired timing.
【0005】また、微小な領域に配置した2種類の微量
な液体を任意のタイミングで混合したり、微小な領域に
配置した液体に所定のタイミングで試薬を添加できれば
便利であるが、従来は、そのような方法が存在しなかっ
た。さらに、微小な領域に貯溜してる液体を放出したい
場合もある。Further, it would be convenient if two kinds of trace amounts of liquids arranged in a minute region can be mixed at an arbitrary timing, or a reagent can be added to a liquid arranged in a minute region at a predetermined timing. There was no such method. Furthermore, there are cases where it is desired to discharge the liquid stored in a minute area.
【0006】本発明は、上記の要請に鑑みてなされたも
ので、微小領域内の2種類の液体を任意のタイミングで
混合できるようにすることを目的としている。The present invention has been made in view of the above demands, and an object of the present invention is to make it possible to mix two kinds of liquids in a minute region at an arbitrary timing.
【0007】[0007]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明に係る液体混合方法は、撥液性の仕切部材
の両側に第1の液体と第2の液体とを配置し、前記仕切
部材に光を照射して仕切部材を親液化して前記第1の液
体と前記第2の液体とを混合することを特徴としてい
る。In order to achieve the above object, a liquid mixing method according to the present invention comprises a first liquid and a second liquid arranged on both sides of a liquid-repellent partition member, It is characterized in that the partition member is irradiated with light to make the partition member lyophilic so as to mix the first liquid and the second liquid.
【0008】このように構成した本発明は、プラスチッ
クなどからなる撥液性の仕切部材に紫外線などの光を照
射すると、仕切部材が撥液性を失って親液化して濡れ性
を示すように変化する。このため、仕切部材の両側に存
在する第1の液体と第2の液体とが仕切部材を越えて移
動し、相互に混じり合う。従って、微小な管路内に配置
した例えば2液性接着剤のそれぞれの液体を、所望のタ
イミングで混合して微小な管路を閉塞したり、微小領域
に配置した液体に試薬を添加したりすることができる。In the present invention thus constructed, when a liquid repellent partition member made of plastic or the like is irradiated with light such as ultraviolet rays, the partition member loses liquid repellency and becomes lyophilic so that it exhibits wettability. Change. Therefore, the first liquid and the second liquid existing on both sides of the partition member move over the partition member and are mixed with each other. Therefore, for example, the respective liquids of the two-component adhesive placed in the minute duct are mixed at desired timing to block the minute duct, or the reagent is added to the liquid placed in the minute region. can do.
【0009】そして、上記の液体混合方法を実施するた
めの本発明に係る液体開放弁は、液体の境界部に配置さ
れて液体が通流可能な空隙を有し、光の照射によって親
液化される撥液性部材からなることを特徴としている。
この液体開放弁は、透明な微細な管の内部や、微小間隙
を隔てて配置した2枚のガラス板の間などに形成するこ
とができる。The liquid opening valve according to the present invention for carrying out the above liquid mixing method has a void which is arranged at the boundary of the liquid and through which the liquid can flow, and is made lyophilic by irradiation of light. It is characterized by comprising a liquid repellent member.
The liquid release valve can be formed inside a transparent fine tube or between two glass plates arranged with a minute gap.
【0010】そして、本発明は、撥液性部材に紫外線や
レーザ光などの光を照射して親液化することにより、液
体が親液化された部分を介して移動可能となる、このた
め、撥液性部材によって閉じ込めた(貯溜した)液体を
任意のタイミングで放出したり、2液の境界部に配置す
ることにより、この2液を任意のタイミングで混合する
ことができる。According to the present invention, the liquid repellent member is irradiated with light such as ultraviolet rays or laser light to be lyophilic, so that the liquid can move through the lyophilic portion. The two liquids can be mixed at an arbitrary timing by discharging the liquid confined (stored) by the liquid member at an arbitrary timing or by arranging the liquid at the boundary between the two liquids.
【0011】撥液性部材は、フッ素樹脂であってよい。
フッ素樹脂は、高い撥液性と耐液性とを有しており、各
種の液体に適用することが可能となる。また、撥液性部
材は、フッ化処理した樹脂を用いることができる。撥液
性部材を一般的な樹脂をフッ化処理して形成することに
より、取り扱う液体に適した樹脂を用いることがばかり
でなく、パイプないなどにも容易に形成することができ
る。The liquid repellent member may be a fluororesin.
The fluororesin has high liquid repellency and liquid resistance, and can be applied to various liquids. Further, as the liquid repellent member, a fluorinated resin can be used. By forming the liquid-repellent member by fluorinating a general resin, not only a resin suitable for a liquid to be handled can be used but also a pipe can be easily formed.
【0012】[0012]
【発明の実施の形態】本発明に係る液体混合方法および
液体開放弁の好ましい実施の形態を、添付図面に従って
詳細に説明する。図1は本発明の第1実施の形態に係る
液体混合方法の説明図であり、図2は本発明に係る液体
混合方法を利用した流路遮断機構を有する微量ガス供給
システムの模式図である。図2において、微量ガス供給
システム10は、微量ガス供給部12と複数のガス処理
部14(14a、14b、14c、………)とを有す
る。ガス処理部14は、例えば微量ガス供給部12から
送られた試料ガスを分析したり、他のガスを添加したり
他のガスや液体と反応させたりする。BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a liquid mixing method and a liquid opening valve according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is an explanatory diagram of a liquid mixing method according to a first embodiment of the present invention, and FIG. 2 is a schematic diagram of a trace gas supply system having a flow path blocking mechanism using the liquid mixing method of the present invention. . In FIG. 2, the trace gas supply system 10 includes a trace gas supply unit 12 and a plurality of gas processing units 14 (14a, 14b, 14c, ...). The gas processing unit 14 analyzes, for example, the sample gas sent from the trace gas supply unit 12, adds another gas, or reacts with another gas or liquid.
【0013】微量ガス供給部12には、主供給配管16
の一端が接続してある。そして、主供給配管16には、
枝管18(18a、18b、18c、………)を介して
各ガス処理部14が接続してある。これらの枝管18
は、内径が例えば1mm以下の微細管から形成してあ
る。また、各枝管18には、図1に詳細を示したような
流路遮断機構20(20a、20b、20c、………)
が設けてある。The trace gas supply unit 12 has a main supply pipe 16
One end of is connected. And, in the main supply pipe 16,
Each gas processing unit 14 is connected via a branch pipe 18 (18a, 18b, 18c, ...). These branch pipes 18
Is formed of a fine tube having an inner diameter of, for example, 1 mm or less. Each branch pipe 18 has a flow path blocking mechanism 20 (20a, 20b, 20c, ...) As shown in detail in FIG.
Is provided.
【0014】枝管18は、紫外線を透過可能な透光性の
ガラスまたはプラスチックなどから形成してあり、図1
(1)に示したように、内周面に親液性のレジストなど
から形成した樹脂膜22が設けてある。この樹脂膜22
も、枝管18と同様に、紫外線を透過可能な透明樹脂か
ら形成してある。また、樹脂膜22の所定位置には、詳
細を後述するようにして形成したリング状の撥液部24
a、24b、24cが設けてある。そして、枝管18内
の流路36の、第1の撥液部24aと第2の撥液部24
bとの間には、2液形接着剤を構成している第1の液体
26が配置してある。さらに、第2の撥液部24bと第
3の撥液部24cとの間の流路36には、2液形接着剤
を構成する第2の液体28が配置してある。そして、第
1の液体26と第2の液体28との境界部に設けた撥液
部24bが、後述するように液体開放弁として作用す
る。The branch pipe 18 is formed of a transparent glass or plastic which can transmit ultraviolet rays.
As shown in (1), a resin film 22 formed of a lyophilic resist or the like is provided on the inner peripheral surface. This resin film 22
Similarly to the branch pipe 18, is also formed of a transparent resin capable of transmitting ultraviolet rays. Further, at a predetermined position of the resin film 22, a ring-shaped liquid-repellent portion 24 formed as described later in detail.
a, 24b and 24c are provided. Then, the first liquid repellent portion 24a and the second liquid repellent portion 24 of the flow path 36 in the branch pipe 18 are provided.
A first liquid 26 forming a two-component adhesive is arranged between the two and b. Further, in the flow path 36 between the second liquid repellent portion 24b and the third liquid repellent portion 24c, the second liquid 28 constituting the two-liquid type adhesive is arranged. Then, the liquid repellent portion 24b provided at the boundary between the first liquid 26 and the second liquid 28 acts as a liquid release valve as described later.
【0015】このようになっている流路遮断機構20に
おいては、第1の液体26は、両側に撥液部24a、2
4bが存在しているため、枝管18内を移動することな
く撥液部24a、24b間に定置される。また、第2の
液体28も同様に撥液部24b、24c間に定置され
る。そして、枝管18内の流路36に流入した試料ガス
30は、試料ガス30に与える圧力を適宜に調整するこ
とにより、第1の液体26および第2の液体28を通過
して前記した処理部14に流入する。In the flow path blocking mechanism 20 having such a structure, the first liquid 26 has liquid repellent portions 24a, 2a on both sides thereof.
Since 4b is present, it is placed between the liquid repellent portions 24a and 24b without moving in the branch pipe 18. Similarly, the second liquid 28 is also placed between the liquid repellent portions 24b and 24c. Then, the sample gas 30 flowing into the flow path 36 in the branch pipe 18 passes through the first liquid 26 and the second liquid 28 by appropriately adjusting the pressure applied to the sample gas 30, and the above-described processing is performed. Flows into the section 14.
【0016】ところで、任意の1つの処理部14(例え
ば、処理部14a)への試料ガス30の供給を停止し、
他の処理部14b、14c、………への試料ガス30の
供給を続行したい場合、図1(2)に示したように、第
1の液体26と第2の液体28との間に存在する撥液部
24bに、枝管18の外部から紫外線32を照射して撥
液部24bを親液化する。これにより、撥液部24bは
濡れ性を示し、第1の液体26が撥液部24bを越えて
第2の液体28側に移動を開始し、第2の液体28が第
1の液体26側に移動を開始し、符号34に示したよう
に、両者は混合する。このため、第1の液体26と第2
の液体28とが混じり合って硬化が始まり、枝管18内
の流路36が遮断される。By the way, the supply of the sample gas 30 to any one processing unit 14 (for example, the processing unit 14a) is stopped,
When it is desired to continue supplying the sample gas 30 to the other processing units 14b, 14c, ..., As shown in FIG. 1 (2), it exists between the first liquid 26 and the second liquid 28. The liquid repellent portion 24b is irradiated with ultraviolet rays 32 from the outside of the branch pipe 18 to make the liquid repellent portion 24b lyophilic. As a result, the liquid repellent portion 24b exhibits wettability, the first liquid 26 starts to move beyond the liquid repellent portion 24b to the second liquid 28 side, and the second liquid 28 side becomes the first liquid 26 side. , And the two are mixed as indicated by reference numeral 34. Therefore, the first liquid 26 and the second liquid 26
The liquid 28 of FIG.
【0017】図3は、流路遮断機構20の製造方法の説
明図である。まず、図3(1)に示したように、ガラス
管などの透明な細管40に液状の親液性レジスト42を
注入し、細管40の内面に付着させる。そして、親液性
レジスト42を乾燥、固化させ、同図(2)に示したよ
うに、細管40の内面に親液性レジスト42による透明
な樹脂膜22を形成する。FIG. 3 is an explanatory view of a method of manufacturing the flow path blocking mechanism 20. First, as shown in FIG. 3A, a liquid lyophilic resist 42 is injected into a transparent thin tube 40 such as a glass tube and attached to the inner surface of the thin tube 40. Then, the lyophilic resist 42 is dried and solidified to form the transparent resin film 22 of the lyophilic resist 42 on the inner surface of the thin tube 40, as shown in FIG.
【0018】その後、同図(3)に示したように、細管
40内に、フッ化水素(HF)などの光分解性のフッ素
系ガス44を流すとともに、細管40の所定位置に紫外
線46を照射する。これにより、紫外線46が照射され
ている部分においてフッ素系ガス44が分解され、活性
なフッ素(F)が生成される。この活性なフッ素は、樹
脂膜22の表面に付着してリング状の撥液部24を形成
する。このようにして撥液部24a、24b、24cを
形成したならば、細管40内にさらに細い管(図示せ
ず)を挿入し、各撥液部24間に2液形接着剤の第1の
液体と第2の液体とを配置することにより、流路遮断機
構を形成することができる。Thereafter, as shown in FIG. 3C, a photodecomposable fluorine-based gas 44 such as hydrogen fluoride (HF) is flown into the thin tube 40, and an ultraviolet ray 46 is applied to a predetermined position of the thin tube 40. Irradiate. As a result, the fluorine-based gas 44 is decomposed in the portion irradiated with the ultraviolet rays 46, and active fluorine (F) is generated. This active fluorine adheres to the surface of the resin film 22 to form the ring-shaped liquid repellent portion 24. After the liquid repellent portions 24a, 24b, and 24c are formed in this manner, a thinner tube (not shown) is inserted into the thin tube 40, and the first portion of the two-component adhesive is inserted between the liquid repellent portions 24. By disposing the liquid and the second liquid, it is possible to form the flow path blocking mechanism.
【0019】図4は、第2実施形態の説明図である。図
4において、透明な2枚のガラス板50、52は、微小
間隙dを隔てて対向させて配置してある。これらのガラ
ス板50、52には、対向面の対応位置に、フッ素樹脂
などの撥液性部材からなる額縁状の仕切部54(54
a、54b)が設けてある。また、仕切部54aと仕切
部54bとは、液体開放弁を形成していて、両者間に間
隙を有し、後述するように、液体が両者間を通流できる
ようになっている。これらの仕切部材54は、液状の撥
液性部材を薄く塗布したのち、不要部をエッチングして
除去することにより容易に形成することができる。FIG. 4 is an explanatory diagram of the second embodiment. In FIG. 4, two transparent glass plates 50 and 52 are arranged to face each other with a minute gap d therebetween. These glass plates 50, 52 have a frame-shaped partition 54 (54) made of a liquid-repellent member such as fluororesin at corresponding positions on the opposing surfaces.
a, 54b) are provided. Further, the partition part 54a and the partition part 54b form a liquid opening valve and have a gap between them so that liquid can flow between them as will be described later. These partition members 54 can be easily formed by thinly applying a liquid repellent member and then etching and removing unnecessary portions.
【0020】仕切部54の内側と外側とのそれぞれに
は、混合させたい第1の液体56と第2の液体58とが
配置してある。第1の液体56は、ガラス板52に形成
した仕切部54bの内部に第1の液体56を適量滴下し
たのち、ガラス板52の上に間隙dを隔ててガラス板5
0を配置することにより、仕切部54の内部に位置させ
ることができる。A first liquid 56 and a second liquid 58 to be mixed are arranged inside and outside the partition portion 54, respectively. The first liquid 56 drops an appropriate amount of the first liquid 56 inside the partition portion 54b formed on the glass plate 52, and then the glass plate 5 is separated on the glass plate 52 with a gap d.
By arranging 0, it can be positioned inside the partition 54.
【0021】そして、第1の液体56と第2の液体58
とを混合したい場合、仕切部54に紫外線を照射する。
これにより、仕切部材54が親液化され濡れ性を示すた
め、第1の液体56と第2の液体58とが仕切部材54
を越えて移動し、両者が混合する。従って、第1の液体
56と第2の液体58とを所望のタイミングで混合する
ことができる。Then, the first liquid 56 and the second liquid 58
When it is desired to mix and, the partition 54 is irradiated with ultraviolet rays.
As a result, the partition member 54 becomes lyophilic and exhibits wettability, so that the first liquid 56 and the second liquid 58 are separated from each other by the partition member 54.
Move over and both mix. Therefore, the first liquid 56 and the second liquid 58 can be mixed at a desired timing.
【0022】なお、図4(1)の符号60に示したよう
に、仕切部54の一部に紫外線を照射することにより、
仕切部54の一部のみを親液化することができ、第1の
液体56と第2の液体58との混合速度を任意に調節す
ることができる。As shown by reference numeral 60 in FIG. 4A, by irradiating a part of the partition 54 with ultraviolet rays,
Only a part of the partition 54 can be made lyophilic, and the mixing speed of the first liquid 56 and the second liquid 58 can be adjusted arbitrarily.
【0023】図5は、第3実施形態の説明図である。こ
の第3実施形態は、図5(1)に示したように、ガラス
またはシリコンなどからなる平板状の基板60の上面
に、フッ素樹脂などからなる撥液膜62によって2つの
領域64(64a、64b)が隣接して区画してある。
そして、各領域64a、64bの境界に存在している撥
液膜62からなる仕切部66が、後述するように液体開
放弁の役割をなしている。また、各領域64のそれぞれ
には、同図(2)に示したように、異なる種類の液体7
0a、70bが貯溜してある。FIG. 5 is an explanatory diagram of the third embodiment. In the third embodiment, as shown in FIG. 5A, two regions 64 (64a, 64a, 64a, 64a, 64a) are formed on the upper surface of a flat substrate 60 made of glass or silicon by a liquid repellent film 62 made of fluororesin. 64b) is partitioned adjacently.
The partition portion 66 formed of the liquid repellent film 62 existing at the boundary between the regions 64a and 64b serves as a liquid release valve as described later. Further, in each of the regions 64, as shown in FIG.
0a and 70b are stored.
【0024】このようになっている第3実施形態におい
ては、液体70aと液体70bとを混合させたい場合、
例えば図5(1)の斜線で示した開放部68に紫外線や
レーザ光を照射する。これにより、開放部68のフッ素
樹脂が分解されて親液化され、領域64aの液体70a
と、領域64bの液体70bとが開放部68を介して混
合される。In the third embodiment having such a configuration, when it is desired to mix the liquid 70a and the liquid 70b,
For example, ultraviolet rays or laser light is applied to the open portion 68 shown by hatching in FIG. As a result, the fluororesin in the open portion 68 is decomposed and made lyophilic, and the liquid 70a in the area 64a is formed.
And the liquid 70b in the region 64b are mixed via the opening 68.
【0025】図6は、第4実施形態の平面図である。こ
の第4実施形態においては、基板60の上面に撥液膜7
2によって4つの領域74(74a〜74d)が形成し
てある。これらの領域74は、マトリックス状に配置し
てあって、それぞれに異なった液体(図示せず)が貯溜
してある。このようになっている第4実施形態において
は、各領域74a〜74d間の仕切部を、紫外線やレー
ザ光を照射して親液処理をすることにより、4種類の液
体を混合することができる。FIG. 6 is a plan view of the fourth embodiment. In the fourth embodiment, the liquid repellent film 7 is formed on the upper surface of the substrate 60.
Four regions 74 (74a to 74d) are formed by 2. These regions 74 are arranged in a matrix, and different liquids (not shown) are stored in each region. In the fourth embodiment configured as described above, four kinds of liquids can be mixed by irradiating the partition between the regions 74a to 74d with ultraviolet rays or laser light to perform lyophilic treatment. .
【0026】なお、必要に応じて任意の2液または3液
を混合することもできる。そして、撥液膜によって形成
する領域は、3つでも5つ以上であってもよい。また、
隣接させた複数の領域は、図4に示したように、対向さ
せて配置した一対のガラス板間に形成してもよい。If desired, any two or three liquids can be mixed. The number of regions formed by the liquid repellent film may be three or five or more. Also,
The plurality of adjacent regions may be formed between a pair of glass plates facing each other, as shown in FIG.
【0027】図7は、第5実施形態の説明図である。図
7(1)に示した実施形態は、基板60の上面に、撥液
膜80によって額縁状の領域82が区画してあり、この
領域82に図示しない液体が貯溜してある。そして、撥
液膜80の任意の位置、例えば斜線によって示した開放
部84に紫外線またはレーザ光を照射すると、開放部8
4の撥液膜が分解されて親液化し、領域82内の液体が
開放部85を介して領域82の外部に放出される。従っ
て、任意のタイミングで領域82内の液体を流出させる
ことができる。FIG. 7 is an explanatory diagram of the fifth embodiment. In the embodiment shown in FIG. 7A, a frame-shaped region 82 is defined by the liquid repellent film 80 on the upper surface of the substrate 60, and a liquid (not shown) is stored in this region 82. Then, when an ultraviolet ray or a laser beam is applied to an arbitrary position of the liquid repellent film 80, for example, the opening portion 84 indicated by the diagonal lines, the opening portion 8
The liquid repellent film of No. 4 is decomposed to become lyophilic, and the liquid in the area 82 is discharged to the outside of the area 82 through the opening 85. Therefore, the liquid in the area 82 can be caused to flow out at an arbitrary timing.
【0028】図7(2)は、対面させて平行に配置した
2枚のガラス板86a、86b間に液体88を貯溜し、
この液体88を任意のタイミングで放出できるようにし
たものである。各ガラス板86(86a、86b)のそ
れぞれには、対応位置に液体開放弁となる撥液膜90
(90a、90b)が設けてあり、これらの撥液膜90
によって液体88が一対のガラス板86間に貯溜されて
いる。そして、液体88を放出したい場合には、撥液膜
90に紫外線などを照射して撥液膜90の親液処理を行
なう。In FIG. 7 (2), the liquid 88 is stored between two glass plates 86a and 86b arranged facing each other in parallel,
The liquid 88 can be discharged at any timing. Each of the glass plates 86 (86a, 86b) has a liquid-repellent film 90 serving as a liquid release valve at a corresponding position.
(90a, 90b) are provided, and these liquid repellent films 90 are provided.
Thus, the liquid 88 is stored between the pair of glass plates 86. When the liquid 88 is desired to be discharged, the liquid-repellent film 90 is irradiated with ultraviolet rays or the like to perform the lyophilic treatment on the liquid-repellent film 90.
【0029】なお、透明なガラスパイプなどにおいて
も、前記したように内周面に撥液部を形成することによ
って液体を貯溜することができ、さらに撥液部を紫外線
などによって親液化することにより、任意のタイミング
で貯溜させた液体を放出することができる。Even in a transparent glass pipe or the like, the liquid can be stored by forming the liquid repellent portion on the inner peripheral surface as described above, and by making the liquid repellent portion lyophilic by ultraviolet rays or the like. The stored liquid can be discharged at any timing.
【0030】[0030]
【発明の効果】以上に説明したように、本発明によれ
ば、プラスチックなどからなる撥液性の仕切部材に紫外
線などの光を照射すると、仕切部材が撥液性を失って親
液性に変化する。このため、仕切部材の両側に存在する
第1の液体と第2の液体とが仕切部材を越えて移動し、
相互に混じり合う。As described above, according to the present invention, when a liquid repellent partition member made of plastic or the like is irradiated with light such as ultraviolet rays, the partition member loses liquid repellency and becomes lyophilic. Change. Therefore, the first liquid and the second liquid existing on both sides of the partition member move over the partition member,
Mix with each other.
【図1】 本発明の第1実施の形態に係る液体混合方法
の説明図である。FIG. 1 is an explanatory diagram of a liquid mixing method according to a first embodiment of the present invention.
【図2】 実施の形態に係る液体混合方法を適用した流
路遮断機構を備えた微量ガス供給システムの説明図であ
る。FIG. 2 is an explanatory diagram of a trace gas supply system including a flow path blocking mechanism to which the liquid mixing method according to the embodiment is applied.
【図3】 実施の形態に係る液体混合方法を利用した流
路遮断機構の形成方法の説明図である。FIG. 3 is an explanatory diagram of a method of forming a flow path blocking mechanism using the liquid mixing method according to the embodiment.
【図4】 本発明に係る第2実施の形態の説明図であ
る。FIG. 4 is an explanatory diagram of a second embodiment according to the present invention.
【図5】 本発明に係る第3実施形態の説明図であって
(1)は平面図、(2)は(1)のA−A線に沿った断
面図である。5A and 5B are explanatory views of a third embodiment according to the present invention, in which (1) is a plan view and (2) is a cross-sectional view taken along line AA of (1).
【図6】 本発明に係る第4実施形態を説明する平面図
である。FIG. 6 is a plan view illustrating a fourth embodiment according to the present invention.
【図7】 本発明に係る第5実施形態の説明図であっ
て、(1)は平板状の基板の上に貯溜した液体を放出さ
せる実施形態の説明図であり、(2)は2枚のガラス板
間に貯溜した液体を放出する実施形態の説明図である。FIG. 7 is an explanatory diagram of a fifth embodiment according to the present invention, (1) is an explanatory diagram of an embodiment in which a liquid stored on a flat substrate is discharged, and (2) is two sheets. It is explanatory drawing of embodiment which discharges the liquid stored between the glass plates.
10………微量ガス供給システム、18………枝管、2
0………流路遮断機構、22………樹脂膜、24b、5
4………液体開放弁(撥液部、仕切部)、26、56…
……第1の液体、28、58………第2の液体、30…
……試料ガス、32、46………光(紫外線)、36…
……流路、60………基板、62、72、80、90
a、90b………撥液膜、68、84………開放部、7
0a、70b、88………液体、86a、86b………
ガラス板。10 ………… Trace gas supply system, 18 ………… Branch pipe, 2
0 ......... Flow path blocking mechanism, 22 ......... Resin film, 24b, 5
4 ... Liquid release valve (liquid repellent part, partition part), 26, 56 ...
...... First liquid, 28, 58 ...... Second liquid, 30 ...
…… Sample gas, 32,46 …… Light (ultraviolet), 36 ・ ・ ・
...... Flow path, 60 ………… Substrate, 62, 72, 80, 90
a, 90b ......... Liquid-repellent film, 68, 84 ...
0a, 70b, 88 ... Liquid, 86a, 86b ...
Glass plate.
Claims (4)
第2の液体とを配置し、前記仕切部材に光を照射して仕
切部材を親液化して前記第1の液体と前記第2の液体と
を混合することを特徴とする液体混合方法。1. A first liquid and a second liquid are disposed on both sides of a liquid-repellent partition member, and the partition member is irradiated with light to render the partition member lyophilic to form the first liquid. A liquid mixing method, which comprises mixing with the second liquid.
能な空隙を有し、光の照射によって親液化される撥液性
部材からなることを特徴とする液体開放弁。2. A liquid release valve comprising a liquid repellent member which is disposed at a boundary portion of the liquid and has a void through which the liquid can flow, and which is made lyophilic by irradiation of light.
とを特徴とする請求項2に記載の液体開放弁。3. The liquid release valve according to claim 2, wherein the liquid repellent member is a fluororesin.
脂であることを特徴とする請求項2に記載の液体開放
弁。4. The liquid release valve according to claim 2, wherein the liquid repellent member is a fluorinated resin.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001310437A JP3876674B2 (en) | 2001-10-05 | 2001-10-05 | Liquid mixing method and liquid release valve |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001310437A JP3876674B2 (en) | 2001-10-05 | 2001-10-05 | Liquid mixing method and liquid release valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003112031A true JP2003112031A (en) | 2003-04-15 |
| JP3876674B2 JP3876674B2 (en) | 2007-02-07 |
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| JP2001310437A Expired - Fee Related JP3876674B2 (en) | 2001-10-05 | 2001-10-05 | Liquid mixing method and liquid release valve |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006109583A1 (en) * | 2005-04-12 | 2006-10-19 | The Furukawa Electric Co., Ltd. | Liquid actuator |
| WO2009076414A3 (en) * | 2007-12-10 | 2009-07-30 | Advanced Liquid Logic Inc | Droplet actuator configurations and methods |
| US8460528B2 (en) | 2007-10-17 | 2013-06-11 | Advanced Liquid Logic Inc. | Reagent storage and reconstitution for a droplet actuator |
| JP2013139004A (en) * | 2012-01-05 | 2013-07-18 | Hitoshi Ishida | Apparatus and method for mixing material |
| US9631244B2 (en) | 2007-10-17 | 2017-04-25 | Advanced Liquid Logic, Inc. | Reagent storage on a droplet actuator |
-
2001
- 2001-10-05 JP JP2001310437A patent/JP3876674B2/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006109583A1 (en) * | 2005-04-12 | 2006-10-19 | The Furukawa Electric Co., Ltd. | Liquid actuator |
| JPWO2006109583A1 (en) * | 2005-04-12 | 2008-10-30 | 古河電気工業株式会社 | Liquid actuator |
| US7632388B2 (en) | 2005-04-12 | 2009-12-15 | The Furukawa Electric Co., Ltd. | Liquid actuator |
| US8460528B2 (en) | 2007-10-17 | 2013-06-11 | Advanced Liquid Logic Inc. | Reagent storage and reconstitution for a droplet actuator |
| US9631244B2 (en) | 2007-10-17 | 2017-04-25 | Advanced Liquid Logic, Inc. | Reagent storage on a droplet actuator |
| WO2009076414A3 (en) * | 2007-12-10 | 2009-07-30 | Advanced Liquid Logic Inc | Droplet actuator configurations and methods |
| US8562807B2 (en) | 2007-12-10 | 2013-10-22 | Advanced Liquid Logic Inc. | Droplet actuator configurations and methods |
| JP2013139004A (en) * | 2012-01-05 | 2013-07-18 | Hitoshi Ishida | Apparatus and method for mixing material |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3876674B2 (en) | 2007-02-07 |
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