JP2003174078A - Holder - Google Patents
HolderInfo
- Publication number
- JP2003174078A JP2003174078A JP2001370790A JP2001370790A JP2003174078A JP 2003174078 A JP2003174078 A JP 2003174078A JP 2001370790 A JP2001370790 A JP 2001370790A JP 2001370790 A JP2001370790 A JP 2001370790A JP 2003174078 A JP2003174078 A JP 2003174078A
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction port
- cylinder
- port
- pressure chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 238000004891 communication Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、保持装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holding device.
【０００２】[0002]
【従来の技術】半導体やプリント回路基板を製造する際
に、フォトレジストなどの感光材料を塗布したウエーハ
や基板等の対象物表面に所定のパターンを露光装置によ
り感光焼き付けし、その後エッチング工程により基板上
にパターンを形成するフォトリソグラフィ法が種々の分
野で広く応用されている。このような製造工程において
は、対象物を正確に位置合わせする必要あり、しかも位
置合わせした位置を維持する必要があるため、吸引式の
保持装置を用いて対象物を保持固定するのが普通であ
る。この保持装置は吸着テーブルや吸着パッドに複数の
吸引口を配置し、該吸引口により対象物を全体的に吸着
するのが普通である。しかし、対象物の大きさがまちま
ちで変化する場合、対象物から外れる吸引口は塞がれる
ことがなく、開のままであるため、吸引口が並列に同一
の負圧源に接続されている構成では、他の吸引口から負
圧のリークが生じて、対象物に接触している吸引口の吸
引力が減じる問題がある。2. Description of the Related Art When manufacturing a semiconductor or a printed circuit board, a predetermined pattern is exposed on a surface of an object such as a wafer or a substrate coated with a photosensitive material such as photoresist by an exposure device, and then a substrate is formed by an etching process. The photolithography method for forming a pattern on it has been widely applied in various fields. In such a manufacturing process, since it is necessary to accurately align the object and to maintain the aligned position, it is common to hold and fix the object using a suction type holding device. is there. In this holding device, a plurality of suction ports are arranged on a suction table or a suction pad, and the target is generally sucked by the suction ports. However, when the size of the object varies, the suction ports that come off the object are not blocked and remain open, so the suction ports are connected in parallel to the same negative pressure source. In the configuration, there is a problem that negative pressure leaks from the other suction port, and the suction force of the suction port in contact with the object is reduced.
【０００３】[0003]
【発明が解決しようとする課題】そのため、従来は吸引
口をエリアに分けて、エリア毎に開閉弁を設け、対象物
の大きさに合わせて、エリアの吸引口のオンオフを行う
構成が採用されていた。しかし、この構成のばあい、オ
ンオフを行うために電磁弁や制御装置が必要である等、
装置の複雑化とコスト高を招く欠点があった。また、エ
リアの大きさに適合しない大きさの対象物の場合、吸引
口のリークが生じて吸着力の低下は避けられない問題が
あった。本発明は上記従来技術の問題を解決することを
目的とする。Therefore, conventionally, a structure has been adopted in which the suction port is divided into areas, an opening / closing valve is provided for each area, and the suction port of the area is turned on / off according to the size of the object. Was there. However, in the case of this configuration, a solenoid valve or control device is required to turn on / off, etc.
There are drawbacks that increase the complexity of the device and increase the cost. Further, in the case of an object of a size that does not fit the size of the area, there is a problem that the suction port leaks and the suction force is unavoidably reduced. The present invention aims to solve the above problems of the prior art.
【０００４】[0004]
【課題を解決するための手段】上記目的を達成するため
に、本発明は吸引力で対象物を保持する保持装置におい
て、複数の吸引口と、該吸引口に接続する吸引装置と、
前記各吸引口と吸引装置との間に介在し、各吸引口と吸
引装置の間を開閉する開閉装置と、前記吸引口の少なく
とも１が前記対象物に当接し、該吸引口が塞がっている
ことを検出する検出手段と、該検出手段による検出によ
り、前記吸引口の中前記対象物に当接せず、吸引口が塞
がっていない吸引口の前記開閉装置を閉とする制御手段
と、を備えたことを特徴とする。上記構成においては、
対象物に当接していない吸引口が閉となるため、吸引口
からのリークが生ずることがなく、効果的な吸着が実現
できる。前記検出手段は、対象物により塞がった吸引口
の圧力変化を検出するものであっても良いし、或いは他
のセンサなどの手段であっても良い。更に請求項２の発
明においては、前記吸引口の少なくとも１が前記対象物
に当接して該吸引口が塞がることによって圧力が変化す
る圧力室と、を備え、該圧力室の圧力が前記開閉装置の
吸引口側の圧力よりも小さくなった時、該開閉装置が閉
となる、ように構成している。この構成によれば、１の
吸引口が対象物に当接して塞がると、圧力室の圧力が変
化し、この変化により開閉装置が閉となるため、同様に
吸引口からのリークが生ずることがない。なお、好適な
実施態様では、前記開閉装置がシリンダを備え、該シリ
ンダの移動により前記吸引口を開閉し、前記圧力室が前
記シリンダの一方側に設けられ、前記シリンダの他方側
には前記吸引口に連通する他の圧力室が設けられ、前記
１の吸引口が対象物に当接し、該圧力室の圧力が他の圧
力室の圧力より下がると、前記シリンダが移動して該吸
引口を閉じる、ように構成している。この構成により、
簡単な構成で吸引口の開閉を行え、効率的な吸引保持が
実現できる。前記シリンダには吸引口と吸引装置との間
を連通する透孔を設け、この透孔が前記シリンダの移動
により遮蔽されて吸引口を閉じるように構成することが
可能である。或いは前記開閉装置に吸引口と吸引装置と
の間を連通する連通路を設け、前記シリンダの移動によ
り該連通路が遮蔽されて吸引口を閉じるように構成する
ことも可能である。In order to achieve the above object, the present invention provides a holding device for holding an object by a suction force, a plurality of suction ports, and a suction device connected to the suction ports.
An opening / closing device that is interposed between each of the suction ports and the suction device to open and close between each of the suction ports and the suction device, and at least one of the suction ports is in contact with the object, and the suction port is closed. A detection means for detecting that the suction opening / closing device is closed for the suction port that is not blocked by the detection means and does not contact the object in the suction port. It is characterized by having. In the above configuration,
Since the suction port that is not in contact with the object is closed, there is no leakage from the suction port, and effective suction can be realized. The detection means may be one that detects a pressure change in the suction port blocked by the object, or may be another sensor or other means. Further, according to the invention of claim 2, a pressure chamber in which at least one of the suction ports abuts on the object and the pressure is changed by closing the suction port, the pressure of the pressure chamber is the opening / closing device. When the pressure becomes smaller than the suction port side pressure, the opening / closing device is closed. According to this configuration, when one suction port comes into contact with an object and is closed, the pressure in the pressure chamber changes, and the change causes the opening / closing device to close. Therefore, similarly, leakage from the suction port may occur. Absent. In a preferred embodiment, the opening / closing device includes a cylinder, the suction port is opened / closed by the movement of the cylinder, the pressure chamber is provided on one side of the cylinder, and the suction side is provided on the other side of the cylinder. Another pressure chamber communicating with the mouth is provided, and when the suction port of the one comes into contact with an object and the pressure of the pressure chamber falls below the pressure of the other pressure chamber, the cylinder moves to move the suction port. It is configured to close. With this configuration,
The suction port can be opened and closed with a simple structure, and efficient suction holding can be realized. It is possible that the cylinder is provided with a through hole that communicates between the suction port and the suction device, and the through hole is blocked by the movement of the cylinder to close the suction port. Alternatively, the opening / closing device may be provided with a communication passage communicating between the suction port and the suction device, and the movement of the cylinder may block the communication passage to close the suction port.
【０００５】[0005]
【発明の実施の形態】以下本発明の実施の形態を図面に
基づいて説明する。図１はプリント配線基板を製造する
ための露光装置に用いる吸着プレートＡを示している。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a suction plate A used in an exposure apparatus for manufacturing a printed wiring board.
【０００６】吸着プレートＡ上には複数の吸引口１が設
けられており、それぞれの吸引口１は開閉制御ユニット
Ｂに設けられた各吸引通路１０を介して吸引ポンプ３に
接続され、吸引ポンプ３の駆動により吸引口１から吸引
を行い、吸着プレートＡ上のワークＷを吸着するように
構成されている。A plurality of suction ports 1 are provided on the suction plate A, and each suction port 1 is connected to the suction pump 3 through each suction passage 10 provided in the opening / closing control unit B, and the suction pump 3 is provided. 3 is driven to suck the workpiece W on the suction plate A by suction.
【０００７】吸引口１の中の少なくとも１つはワーク検
出口４となっており、吸引通路１１を介して移動用ポン
プ５と接続している。At least one of the suction ports 1 is a work detection port 4 and is connected to a moving pump 5 via a suction passage 11.
【０００８】前記開閉制御ユニットＢには、シリンダ２
が設けられており、シリンダ２には吸引通路１０と連通
する透孔２０が形成されている。シリンダ２は左右方向
に移動可能に構成され、常態位置では透孔２０が吸引通
路１０の位置と一致し、吸引通路１０を開いて導通状態
とし、右方向に移動したときに透孔２０の位置が吸引通
路１０の位置とずれて吸引通路１０を閉じて非導通状態
とするように構成されている。The opening / closing control unit B includes a cylinder 2
And a through hole 20 communicating with the suction passage 10 is formed in the cylinder 2. The cylinder 2 is configured to be movable in the left-right direction. In the normal position, the through hole 20 coincides with the position of the suction passage 10, and the suction passage 10 is opened to bring it into a conducting state. Is displaced from the position of the suction passage 10 to close the suction passage 10 and bring it into a non-conductive state.
【０００９】シリンダ２の右側には負圧室５０が設けら
れており、シリンダ２が負圧室５０内を右方向に移動し
て吸引通路１０を閉じることができるようになってい
る。シリンダ２の左側には吸引口１側と連通する連通室
５１が設けられており、シリンダ２の左端部を押して、
シリンダ２を移動させるようになっている。A negative pressure chamber 50 is provided on the right side of the cylinder 2, and the cylinder 2 can move rightward in the negative pressure chamber 50 to close the suction passage 10. A communication chamber 51 that communicates with the suction port 1 side is provided on the left side of the cylinder 2, and pushes the left end of the cylinder 2 to
The cylinder 2 is moved.
【００１０】負圧室５０にはバネ２２が設けられてお
り、常態ではシリンダ２を左側に押して透孔２０を吸引
通路１０の位置と一致させて吸引通路１０を開とするよ
うに構成されている。なお、シリンダ２にはパッキン２
１が設けられ、摺動面をシールするようになっている。A spring 22 is provided in the negative pressure chamber 50, and in a normal state, the cylinder 2 is pushed to the left side to align the through hole 20 with the position of the suction passage 10 to open the suction passage 10. There is. The cylinder 2 has packing 2
1 is provided to seal the sliding surface.
【００１１】負圧室５０は前記した吸引通路１１と接続
されており、ワーク検出口４がワークＷにより塞がれた
時、移動用ポンプ５により吸引されて負圧になるように
構成されている。The negative pressure chamber 50 is connected to the suction passage 11 described above, and is constructed so that when the work detection port 4 is blocked by the work W, it is sucked by the moving pump 5 to be a negative pressure. There is.
【００１２】次に動作を説明する。図１に示すように吸
着プレートＡ上にワークＷがない状態では、シリンダ２
はバネ２２に押されて左端の位置にあり、透孔２０は吸
引通路１０の位置にあり、吸引通路１０は開となって、
吸引ポンプ３により吸引口１から吸引されている状態に
ある。ワーク検出口４もワークＷに塞がれていないの
で、移動用ポンプ５により吸引されている。Next, the operation will be described. As shown in FIG. 1, when there is no work W on the suction plate A, the cylinder 2
Is pushed to the left end position by the spring 22, the through hole 20 is at the position of the suction passage 10, the suction passage 10 is open,
It is in a state of being sucked from the suction port 1 by the suction pump 3. Since the work detection port 4 is not blocked by the work W, it is sucked by the moving pump 5.
【００１３】図２に示すように吸着プレートＡ上にワー
クＷが置かれ、ワーク検出口４が塞がれると、負圧室５
０ａ、ｂ、ｃ、ｄが吸引されて負圧となる。図２の例で
は吸引口１ａ、ｂはワークＷにより塞がれており、吸引
口１ｃ、ｄはワークＷにより塞がれていない。As shown in FIG. 2, when the work W is placed on the suction plate A and the work detection port 4 is closed, the negative pressure chamber 5 is formed.
0a, b, c, d are sucked and become negative pressure. In the example of FIG. 2, the suction ports 1a and 1b are blocked by the work W, and the suction ports 1c and d are not blocked by the work W.
【００１４】ワークＷにより塞がれた吸引口１ａ、ｂの
吸引通路１０ａ、ｂは吸引ポンプ３に吸引されて、同時
に負圧となり、連通室５１ａ、ｂを介してシリンダ２
ａ、ｂの左端も負圧となる。そのため、負圧室５０ａ、
ｂが負圧となっても、シリンダ２ａ、ｂの左右端では圧
力差が生じないため、シリンダ２ａ、ｂは移動せず、吸
引通路１０ａ、ｂは開状態を維持し、吸引口１ａ、ｂは
ワークＷの吸引を維持する。The suction passages 10a and 10b of the suction ports 1a and 1b, which are blocked by the work W, are sucked by the suction pump 3 and at the same time have a negative pressure, and the cylinder 2 via the communication chambers 51a and 51b.
The left ends of a and b also have negative pressure. Therefore, the negative pressure chamber 50a,
Even if b becomes a negative pressure, a pressure difference does not occur between the left and right ends of the cylinders 2a, b, so that the cylinders 2a, b do not move and the suction passages 10a, 10b remain open and the suction ports 1a, 1b are kept. Maintains the suction of the work W.
【００１５】一方、ワークＷにより塞がれていない吸引
口１ｃ、ｄの吸引通路１０ｃ、ｄは大気圧を保つため、
連通室５１ｃ、ｄも大気圧となり、シリンダ２ｃ、ｄの
左端は負圧室５０ｃ、ｄよりも圧力大となり、この圧力
がバネ２２の押圧力よりも大きくなれば、シリンダ２
ｃ、ｄは右方向に移動する。これにより透孔２０ｃ、ｄ
の位置が吸引通路１０ｃ、ｄの位置と一致しなくなり、
吸引通路１０ｃ、ｄは閉となる。On the other hand, since the suction passages 10c and 10d of the suction ports 1c and 1d not blocked by the work W maintain the atmospheric pressure,
The communication chambers 51c and 51d also become atmospheric pressure, the left ends of the cylinders 2c and d become higher in pressure than the negative pressure chambers 50c and 50d, and if this pressure becomes larger than the pressing force of the spring 22, the cylinder 2
c and d move to the right. Thereby, the through holes 20c, d
Position does not match the position of the suction passages 10c and 10d,
The suction passages 10c and 10d are closed.
【００１６】以上の構成により、ワークＷのあるワーク
検出口４、吸引口１ａ、ｂのみが吸引され、ワークＷの
ない吸引口１ｃ、ｄは吸引通路１０ｃ、ｄが閉となっ
て、吸引されず、吸引ポンプ３による吸引のリークがな
くなり、吸引口１ａ、ｂにおける吸引力が維持され、良
好な吸着が実現できる。With the above construction, only the work detection port 4 with the work W and the suction ports 1a, 1b are sucked, and the suction ports 1c, d without the work W are suctioned by closing the suction passages 10c, 10d. Therefore, leakage of suction by the suction pump 3 is eliminated, the suction force at the suction ports 1a and 1b is maintained, and good suction can be realized.
【００１７】なお、上記実施形態ではワーク検出口４を
吸引通路１１により移動用ポンプ５と連結して、ワーク
Ｗの検出を行う構成としたが、ワークＷを他のセンサな
どにより検出し、該センサからの検出信号により移動用
ポンプ５と負圧室５０の間を開として負圧室５０を負圧
にする構成も可能である。図３はその一形態を示すもの
で、移動用ポンプ５と負圧室５０の間に開閉弁６０を設
け、ワーク検出センサからの信号により開閉弁６０の開
閉を行うようになっている。In the above embodiment, the work detection port 4 is connected to the moving pump 5 by the suction passage 11 to detect the work W. However, the work W is detected by another sensor or the like, It is also possible to open the gap between the moving pump 5 and the negative pressure chamber 50 by the detection signal from the sensor so that the negative pressure chamber 50 has a negative pressure. FIG. 3 shows one form thereof, and an opening / closing valve 60 is provided between the moving pump 5 and the negative pressure chamber 50, and the opening / closing valve 60 is opened / closed by a signal from a work detection sensor.
【００１８】以上説明した実施形態では、ワークＷのあ
る吸引口１の吸引のみが行われ、ワークＷのない吸引口
１の吸引は行われないため、吸引のリークがなく、良好
な吸着力を維持できる。また、ワークＷの大きさや形状
に対応して動作し、従来のエリア制御のような制約がな
い。更に、装置が簡単で小型化、低コスト化を図ること
が可能である。In the embodiment described above, only the suction port 1 with the work W is sucked, and the suction port 1 without the work W is not sucked, so that there is no suction leak and a good suction force is obtained. Can be maintained. In addition, it operates in accordance with the size and shape of the work W, and does not have the restrictions of the conventional area control. Further, the device is simple, and it is possible to reduce the size and cost.
【００１９】図４と図５に他の実施形態を示す。この実
施形態ではシリンダ２に透孔２０を形成せず、吸引通路
１０、１０の間に連通路３０を設け、この連通路３０を
シリンダ２’の移動により開閉するように構成されてい
る。即ち、シリンダ２’の左端部を径大とし、ここに遮
蔽パッド３１を設け、図５に示すようにこの遮蔽パッド
３１により連通路３０を塞いで、吸引通路１０を閉じる
ように構成されている。FIG. 4 and FIG. 5 show another embodiment. In this embodiment, the through hole 20 is not formed in the cylinder 2, a communication passage 30 is provided between the suction passages 10 and 10, and the communication passage 30 is opened and closed by the movement of the cylinder 2 '. That is, the cylinder 2'is configured such that the left end portion of the cylinder 2'has a large diameter, the shielding pad 31 is provided there, and the communication passage 30 is closed by the shielding pad 31 to close the suction passage 10 as shown in FIG. .
【００２０】[0020]
【発明の効果】以上説明したように本発明の保持装置に
よれば、ワークの大きさや形状に対応してリークのない
確実な吸着を行える効果がある。As described above, according to the holding device of the present invention, there is an effect that a leak-free and reliable suction can be performed according to the size and shape of the work.
【図１】本発明の一実施形態を示す概略側断面図。FIG. 1 is a schematic side sectional view showing an embodiment of the present invention.
【図２】本発明の一実施形態の動作を示す概略側断面
図。FIG. 2 is a schematic side sectional view showing the operation of the embodiment of the present invention.
【図３】本発明の他の実施形態を示す部分図。FIG. 3 is a partial view showing another embodiment of the present invention.
【図４】本発明の更に他の実施形態を示す概略側断面
図。FIG. 4 is a schematic side sectional view showing still another embodiment of the present invention.
【図５】本発明の更に他の実施形態の動作を示す概略側
断面図。FIG. 5 is a schematic side sectional view showing the operation of still another embodiment of the present invention.
１：吸引口、２：シリンダ、３：吸引ポンプ、４：ワー
ク検出口、５：移動用ポンプ、１０：吸引通路、１１：
吸引通路、２０：透孔、２１：パッキン、２２：バネ、
３０：連通路、３１：遮蔽パッド、５０：負圧室、５
１：連通室、６０：開閉弁。1: Suction port, 2: Cylinder, 3: Suction pump, 4: Workpiece detection port, 5: Moving pump, 10: Suction passage, 11:
Suction passage, 20: through hole, 21: packing, 22: spring,
30: communication passage, 31: shielding pad, 50: negative pressure chamber, 5
1: Communication room, 60: Open / close valve.
Claims (5)
いて、 複数の吸引口と、 該吸引口に接続する吸引装置と、 前記各吸引口と吸引装置との間に介在し、各吸引口と吸
引装置の間を開閉する装置と、 前記吸引口の少なくとも１が前記対象物に当接し、該吸
引口が塞がっていることを検出する検出手段と、 該検出手段による検出により、前記吸引口の中前記対象
物に当接せず、吸引口が塞がっていない吸引口の前記開
閉する装置を閉とする制御手段と、 を備えたことを特徴とする保持装置。1. A holding device for holding an object by a suction force, a plurality of suction ports, a suction device connected to the suction ports, and each suction port interposed between the suction ports. A device that opens and closes between the suction device and the suction device; a detection unit that detects that at least one of the suction ports is in contact with the object and that the suction port is closed; and the detection unit detects the suction port. A control device that closes the device that does not contact the object and that opens and closes the suction port where the suction port is not blocked.
いて、 複数の吸引口と、 該吸引口に接続する吸引装置と、 前記各吸引口と吸引装置との間に介在し、各吸引口と吸
引装置の間を開閉する装置と、 前記吸引口の少なくとも１が前記対象物に当接して該吸
引口が塞がることによって圧力が変化する圧力室と、を
備え、 前記開閉装置が、該圧力室の圧力が前記開閉装置の吸引
口側の圧力よりも小さくなった時、閉となる、 ことを特徴とする保持装置。2. A holding device for holding an object by a suction force, a plurality of suction ports, a suction device connected to the suction ports, and each suction port interposed between each suction port. A device that opens and closes between the suction device and a suction device; and a pressure chamber in which at least one of the suction ports is in contact with the object to close the suction port, the pressure changes. A holding device, which is closed when the pressure in the chamber becomes lower than the pressure on the suction port side of the opening / closing device.
ンダの移動により前記吸引口を開閉し、 前記圧力室が前記シリンダの一方側に設けられ、 前記シリンダの他方側には前記吸引口に連通する他の圧
力室が設けられ、 前記１の吸引口が対象物に当接し、該圧力室の圧力が他
の圧力室の圧力より下がると、前記シリンダが移動して
該吸引口を閉じる、 請求項２に記載の保持装置。3. The opening / closing device includes a cylinder, the movement of the cylinder opens and closes the suction port, the pressure chamber is provided on one side of the cylinder, and the suction port is provided on the other side of the cylinder. Another pressure chamber that communicates is provided, and the suction port of the one abuts an object, and when the pressure of the pressure chamber falls below the pressure of the other pressure chamber, the cylinder moves to close the suction port, The holding device according to claim 2.
を連通する透孔を有し、前記シリンダの移動により前記
透孔が遮蔽されて吸引口を閉じる、 請求項３に記載の保持装置。4. The holding device according to claim 3, wherein the cylinder has a through hole that communicates between the suction port and the suction device, and the movement of the cylinder shields the through hole to close the suction port. .
を連通する連通路を有し、前記シリンダの移動により該
連通路が遮蔽されて吸引口を閉じる、 請求項３に記載の保持装置。5. The holding device according to claim 3, wherein the opening / closing device has a communication passage communicating between the suction port and the suction device, and the movement of the cylinder shields the communication passage to close the suction port. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001370790A JP3966720B2 (en) | 2001-12-05 | 2001-12-05 | Holding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001370790A JP3966720B2 (en) | 2001-12-05 | 2001-12-05 | Holding device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003174078A true JP2003174078A (en) | 2003-06-20 |
| JP3966720B2 JP3966720B2 (en) | 2007-08-29 |
Family
ID=19179954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001370790A Expired - Lifetime JP3966720B2 (en) | 2001-12-05 | 2001-12-05 | Holding device |
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| Country | Link |
|---|---|
| JP (1) | JP3966720B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006263747A (en) * | 2005-03-22 | 2006-10-05 | Toppan Forms Co Ltd | Laser processing equipment |
| JP2007511781A (en) * | 2004-01-16 | 2007-05-10 | シャープ株式会社 | Substrate adsorption device and substrate bonding device |
| JP2014059541A (en) * | 2012-09-18 | 2014-04-03 | Samsung Display Co Ltd | Substrate fixing device using air pressure |
| JP2015103682A (en) * | 2013-11-26 | 2015-06-04 | コマツＮｔｃ株式会社 | Universal chuck device |
| JP2019125755A (en) * | 2018-01-19 | 2019-07-25 | 株式会社ディスコ | Holding device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013232466A (en) * | 2012-04-27 | 2013-11-14 | Mitsuboshi Diamond Industrial Co Ltd | Substrate suction apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62186430U (en) * | 1986-05-17 | 1987-11-27 | ||
| JPH0562045U (en) * | 1992-01-24 | 1993-08-13 | 関西日本電気株式会社 | Semiconductor wafer suction device |
| JPH081464A (en) * | 1992-06-17 | 1996-01-09 | Shibayama Kikai Kk | Automatic change-over device for universal chuck mechanism |
-
2001
- 2001-12-05 JP JP2001370790A patent/JP3966720B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62186430U (en) * | 1986-05-17 | 1987-11-27 | ||
| JPH0562045U (en) * | 1992-01-24 | 1993-08-13 | 関西日本電気株式会社 | Semiconductor wafer suction device |
| JPH081464A (en) * | 1992-06-17 | 1996-01-09 | Shibayama Kikai Kk | Automatic change-over device for universal chuck mechanism |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007511781A (en) * | 2004-01-16 | 2007-05-10 | シャープ株式会社 | Substrate adsorption device and substrate bonding device |
| JP2006263747A (en) * | 2005-03-22 | 2006-10-05 | Toppan Forms Co Ltd | Laser processing equipment |
| JP2014059541A (en) * | 2012-09-18 | 2014-04-03 | Samsung Display Co Ltd | Substrate fixing device using air pressure |
| JP2015103682A (en) * | 2013-11-26 | 2015-06-04 | コマツＮｔｃ株式会社 | Universal chuck device |
| JP2019125755A (en) * | 2018-01-19 | 2019-07-25 | 株式会社ディスコ | Holding device |
| JP7108414B2 (en) | 2018-01-19 | 2022-07-28 | 株式会社ディスコ | holding device |
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| Publication number | Publication date |
|---|---|
| JP3966720B2 (en) | 2007-08-29 |
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