JP2003173379A - Parts ordering system and method - Google Patents

Abstract

An improved system and method for ordering parts of equipment in a factory online to a parts supplier outside the factory. The system includes a device mediation unit, a supplier mediation unit, a list management unit, a search unit, a numbering unit, an order note management unit, and an order unit. The list management unit 26 stores a correspondence list indicating a correspondence relationship between device information including a plurality of information units and names and quantities of required components. The search unit 28 searches for the name and quantity of the required component corresponding to the information unit of the device information with reference to the correspondence list. The order note management unit 34 stores an order note indicating the correspondence between the information unit of the device information, the name and quantity of the required parts, and the order number assigned by the number assigning unit 32. The ordering section 36 selects the name and quantity of the required parts and the order number and outputs them to the parts supplier 60.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is for ordering parts of a manufacturing apparatus installed in a factory, for example, a semiconductor device factory, to a parts supplier outside the factory, such as a manufacturing apparatus maker, online. System and method

[0002]

2. Description of the Related Art Japanese Unexamined Patent Publication No. 11-15520 discloses a remote maintenance system for industrial equipment. In this system, each factory is provided with a host computer for monitoring industrial equipment. The host computer is connected to the management host computer on the vendor side via the Internet. The host computer on the factory side detects the trouble of the industrial equipment, notifies the vendor side of the status information indicating the symptom, and in response to this, the host computer on the vendor side responds indicating the countermeasure corresponding to the symptom. Notify the factory of information.

On the other hand, a system is also used in which a manufacturing apparatus installed in a semiconductor device factory and a manufacturing apparatus maker outside the factory are connected online to supply necessary parts based on the state of the manufacturing apparatus. There is. FIG. 7 is a block diagram showing a conventional component supply system in a semiconductor device factory. As shown in FIG. 7, the semiconductor device factory 110
Manufacturing devices 112a, 112b, 112c disposed inside
Each control unit 114 of is connected to the communication unit 122 of the external manufacturing apparatus maker 120 online. From the control unit 114, device information relating to regular maintenance, troubles, etc. of the manufacturing devices 112a, 112b, 112c is transmitted to the communication unit 122 of the manufacturing device manufacturer 120 in real time.
From the device information, the name and quantity of parts required for regular maintenance, troubles, etc. are determined by the manufacturing device maker 120. The required number of required parts thus determined have been confirmed, and the semiconductor device factory 11
Delivered to 0.

[0004]

In the case of the parts supply system shown in FIG. 7, the name of the manufacturing apparatus, the processing amount, the periodic maintenance cycle, etc. of the manufacturing apparatus maker 120 are attached to the apparatus information such as the periodic maintenance and troubles. It is transmitted to the communication unit 122. Therefore, the manufacturing apparatus maker 120 can know confidential items such as the production scale and the situation of the semiconductor device factory 110 based on the apparatus information. Such a problem similarly occurs in the system disclosed in Japanese Patent Laid-Open No. 11-15520.

The parts required for regular maintenance and troubles are indexed by the manufacturing equipment manufacturer 120. Therefore, regardless of the type of parts required, all parts are ordered under the initiative of the manufacturing equipment manufacturer 120.

The present invention has been made in view of the above problems of the prior art, and an improved system for ordering the parts of the device in the factory online to the parts supplier outside the factory and The purpose is to provide a method.

[0007]

The first aspect of the present invention is as follows.
A system for ordering parts of equipment in a factory online to a parts supplier outside the factory,
A device mediation unit connected to the communication unit of the device, a supplier mediation unit connected to the communication unit of the component supplier, and device information including a plurality of information units representing the state of the device. And a list management unit that stores a correspondence list indicating a correspondence relationship between the name and the quantity of parts required depending on the state of the device, and the communication unit of the device via the device intermediation unit. In response to the input of the information unit, a search unit for searching the name and quantity of the necessary parts corresponding to the information unit by referring to the correspondence list, and an order number for the name and quantity of the necessary parts. From the information shown in the order note, the numbering section to give, the order note management section that stores the order note indicating the correspondence between the information unit, the name and quantity of the necessary parts, and the order number Of parts And a quantity and the order number, and an ordering section for ordering the necessary parts by outputting the selected parts to the parts supplier via the supplier mediation section. .

A second aspect of the present invention is a system for selectively ordering parts of a device in a factory online to a plurality of parts suppliers outside the factory, the system comprising: A device mediation unit connected to the communication unit, a supplier mediation unit connected to the communication units of the plurality of component suppliers, and device information composed of a plurality of information units representing the state of the device. , A list management unit that stores a correspondence list indicating a correspondence between a name, a quantity, and an ordering party of a component required depending on the state of the device, and the communication unit of the device via the device intermediation unit. In response to the input of each of the information units from, a search unit that refers to the correspondence list to search for the name, quantity, and order destination of the necessary parts corresponding to the information unit, and the name of the necessary parts, Quantity and order number for the supplier A numbering unit for giving, an ordering note management unit for storing an ordering note indicating the name and quantity of the information unit and the necessary parts, and the correspondence between the ordering party and the ordering number, and the ordering note shown in the ordering note. An ordering unit that selects the plurality of component suppliers according to the ordering party of the necessary components and orders the required components to the selected component suppliers via the supplier mediation unit. Is characterized by.

A third aspect of the present invention is to place an order for parts of a device in a factory on-line with a parts supplier outside the factory, so that a device intermediary connected to the communication part of the device is ordered. And a device intermediary unit connected to the communication unit of the component supplier, the device information comprising a plurality of information units representing the state of the device. A step of storing a correspondence list indicating a correspondence relationship between a name and a quantity of parts required depending on a state of the device, and each information unit from the communication unit of the device via the device mediation unit. Responding to the input, a step of referring to the correspondence list to retrieve the name and quantity of the necessary parts corresponding to the information unit, and a step of assigning an order number to the name and quantity of the necessary parts ,
Storing an order note indicating a correspondence relationship between the information unit, the name and quantity of the necessary parts, and the order number,
From the information shown in the order note, the name and quantity of the necessary parts and the order number are selected, and the necessary parts are ordered by outputting them to the parts supplier via the supplier mediation unit. And a step of performing.

According to a fourth aspect of the present invention, parts of equipment in a factory are selectively ordered online from a plurality of parts suppliers outside the factory, so that the communication section of the equipment is ordered. A method of using a system having a connected device intermediary unit and a supplier intermediary unit connected to the communication units of the plurality of component suppliers, wherein a plurality of representative device states are shown. Storing device information consisting of information units, a correspondence list showing a correspondence relationship between the name, quantity, and ordering party of parts required depending on the state of the device; In response to the input of each of the information units from the communication unit of the device, referring to the correspondence list, the name and quantity of necessary parts corresponding to the information unit,
And a step of retrieving an ordering party, a step of assigning a name and quantity of the necessary parts, and an ordering number to the ordering party, a name and quantity of the information unit and the necessary part, and an ordering party and the ordering number. And a step of storing an order note indicating a correspondence relationship with the order note, selecting the plurality of part suppliers according to the order destination of the necessary part indicated in the order note, and supplying the selected part supplier with the supply. And a step of placing an order for the necessary parts via a person intermediary unit.

Furthermore, the embodiments of the present invention include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, when the invention is extracted by omitting some of the constituent elements shown in the embodiment, when omitting the extracted invention, the omitted part is appropriately supplemented by a well-known conventional technique. It is something that will be done.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. In the following description, constituent elements having substantially the same functions and configurations are designated by the same reference numerals, and redundant description will be given only when necessary.

FIG. 1 is a block diagram showing a relationship between a parts ordering system according to an embodiment of the present invention, a manufacturing apparatus in a semiconductor device factory, and a parts supplier.

In this embodiment, the host server of the parts ordering system, that is, the host computer 20, is provided as a dedicated device in the semiconductor device factory 10. In the semiconductor device factory 10, a plurality of semiconductor device manufacturing apparatuses 12 (for example, a CVD apparatus 12a, a sputtering apparatus 1
2b, an etching device 12c), and a control unit (which also serves as a detection unit and a communication unit) 14 of these devices 12 is connected to a host server 20 via a dedicated line 16. The control unit 14 not only controls the operation of the manufacturing apparatus 12, but also functions as a detection unit that detects the state of the apparatus 12 and forms apparatus information representative of the state, and transmits the apparatus information to the host server 20. It has a function as a communication unit. Specifically, the device information is configured to represent the state of the device 12 related to regular maintenance, troubles, etc. by an information unit including an identification number as described later.

The host server 20 includes a plurality of manufacturing apparatuses 12
It has a device intermediary unit 22 that serves as a window for exchanging information. The device mediation unit 22 is connected to the control unit (communication unit) 14 of the manufacturing apparatus 12 via the dedicated line 16. In addition, the host server 20 includes a plurality of external component suppliers 60.
(For example, the manufacturing equipment manufacturer 60a, the target manufacturer 6
0b, the gas maker 60c) has a supplier mediation section 24 which serves as a window for exchanging information. Supplier mediation section 24
Is the communication unit 6 of the component supplier 60 via the dedicated line 62.
4 is connected. The supplier mediation unit 24 has a security function so that the communication unit 64 of the component supplier 60 cannot arbitrarily access the internal data on the host server 20 side.

In order to place an order for the parts required by the semiconductor device factory 10 to the parts supplier 60 using the device mediation section 22 and the supplier mediation section 24, the host server 20 has a list management section 26, a search section 28, It has a numbering unit 32, an order note management unit 34, an ordering unit 36, and the like. In addition, the host server 20 includes a list management unit 26 and an order note management unit 3
4 is connected to a database 40 in which a list file 44, an order note file 46, etc., respectively, are formed.

The list management unit 26 includes the identification number included in the information unit of the device information formed by the manufacturing apparatus 12, the state of the apparatus 12 represented by the identification number, and the necessary parts depending on the state of the apparatus 12. A correspondence list indicating the name, quantity, and correspondence relationship with the ordering party is stored in the list file 44. The search unit 28 must respond to the information unit of the device information being input from the control unit 14 of the device 12 via the device intermediation unit 22, and refer to the above correspondence list to correspond to the identification number of the information unit. Search for the part name, quantity, and supplier.

The number assigning section 32 assigns an order number to the name, quantity, and supplier of the necessary parts retrieved by the retrieval section 28. The order note management unit 34 forms the order note by combining the name, quantity, and order destination of the retrieved necessary parts, the order number assigned to the necessary part, and the information unit of the corresponding device information. Stored in file 46.

The ordering unit 36 reads the ordering party of each required part from the ordering note stored in the ordering note file 46, and selects the part supplier 60 as the ordering party. Further, the ordering unit 36 extracts the name, quantity, ordering party and ordering number of each required part from the information shown in the ordering note, and sends it to the parts supplier 60 selected as the ordering party for each necessary part. The necessary parts are ordered by outputting through the supplier mediation unit 24. Here, the device information representing the device state is not output to the component supplier 60 even if it is the identification number.

FIG. 2 is a flow chart showing the system flow of the parts ordering method according to the embodiment of the present invention, which is performed using the system shown in FIG. Hereinafter, this part ordering method will be described with reference to FIG.

First, depending on the above correspondence list, that is, the identification number included in the information unit of the device information formed by the manufacturing apparatus 12, the state of the apparatus 12 represented by the identification number, and the state of the apparatus 12 are required. A correspondence list showing the name, quantity, and correspondence relationship with the ordering party is formed. Then, this correspondence list is stored in the list file 44 of the database 40 via the list management unit 26 of the host server 20 (step S1).

FIG. 3 shows one of the manufacturing apparatuses 12, Ti.
It is a figure which shows the part of the correspondence list regarding the / TiN sputtering apparatus 12b. As shown in FIG. 3, the first column (the leftmost side) of the correspondence list shows the state of the device 12b related to regular maintenance and trouble (only part of which is illustrated in FIG. 3). The second column (second from the left) of the correspondence list indicates the status related to regular maintenance as "M +" as device information.
An identification number of "i" (only M001 to M004 is illustrated in FIG. 3) and a state relating to a trouble is indicated by an identification number of "T + i" (only T001 to T003 are illustrated in FIG. 3). These identification numbers correspond to the control unit 14 of the manufacturing apparatus 12.
It is the same as that formed in.

Further, the third column onward of the correspondence list (third column onward from the left side) shows the names, quantities, and ordering destinations of parts required depending on the state of the apparatus 12b. From the third column onward in the correspondence list shown in FIG. 3, the O-ring and the screw are ordered from the manufacturing equipment manufacturer X (60a), the sputter target is ordered from the target manufacturer Y (60b), and the processing gas is the gas manufacturer Z (60c). It is designed to be ordered to. It should be noted that mechanical parts such as O-rings and screws can be ordered directly from the parts manufacturer if the specifications are clear.

On the other hand, the control unit 14 of the manufacturing apparatus 12 detects these states when periodical maintenance of the apparatus 12 is necessary or when trouble occurs, and as information representative of the states, An identification number as shown in the second column of FIG. 3 is formed (step S2). The control unit 14 combines the formed identification number with the name of the corresponding device 12 and inputs it to the host server 20 via the device intermediation unit 22 as an information unit of the device information (step S3). At this time, the host server 20 is already in a state of having the above correspondence list.

When the information unit of the device information is input, in response to this, the search unit 28 refers to the above correspondence list and the name, quantity, and order of the necessary parts corresponding to the identification number of the information unit. The destination is searched (step S4). Next, the numbering unit 32 causes the name of the necessary component searched by the search unit 28,
Assign the order number to the quantity and the supplier (process S
5). Then, the order note management unit 34 causes the name, quantity, and order destination of the searched necessary parts, the order number assigned to the necessary parts, and the information unit of the corresponding device information (for example, device name, identification number, and device). (State) to form an order note and store it in the order note file 46 (step S6).

FIG. 4 shows a Ti / TiN sputtering apparatus 12b.
FIG. 4 is a diagram showing a part of an order note stored in an order note file 46 which is formed for regular maintenance 1 (identification number M001 in FIG. 3) of FIG. As shown in FIG. 4, the order note includes a first part N1 indicating the device name, identification number, and device status, and a second part N2 indicating the order number, order destination, part name, and quantity.

The ordering unit 36 reads the ordering party of each required part from the information shown in the ordering note, and selects the part supplier 60 as the ordering party (step S7). In the case of the order note shown in FIG. 4, the manufacturing apparatus manufacturer X (60a) is the ordering party for the O-ring A and the O-ring B, and the target manufacturer Y (60b) is the ordering party for the Ti target.

Next, the ordering unit 36 extracts the name, quantity, ordering party and ordering number (the second part N2 of the ordering note shown in FIG. 4) of each required part from the information shown in the ordering note ( Step S8). Then, the necessary parts are ordered by outputting this information to the parts supplier 60 selected as the order destination of the respective necessary parts through the supplier mediation unit 24 (step S9). Here, the device information representing the device state such as the device name and the identification number of the device state (the first part N1 of the order note shown in FIG. 4) is not output to the parts supplier 60. If a special product name or product number of a component is set in advance between the semiconductor device factory 10 and the component supplier 60, these can be used instead of the name of the required component. .

Host server 2 of semiconductor device factory 10
The component supplier 60, which has received the above-mentioned order of the necessary components (in the communication unit 64) from the ordering unit 36 of 0, prepares the components based on this. Then, a predetermined number of necessary parts are delivered to the semiconductor device factory 10 with the order number sent from the ordering unit 36 (step S10). In the semiconductor device factory 10, the corresponding device is searched from the order note file 46 based on the order number attached to the part, and the delivered part is allocated to the corresponding device (step S11).

As described above, according to the parts ordering system and method according to the embodiment of the present invention described with reference to FIGS. 1 to 4, the parts sent to the parts supplier 60 such as the manufacturing apparatus maker The order includes the name and quantity of the parts with the order number attached, but does not include the device information representing the device status. Therefore, the parts supplier 60
Cannot estimate confidential matters such as the production scale and situation of the semiconductor device factory 10 from the order contents of the parts. Moreover, since the semiconductor device factory 10 can take the initiative in allocating the ordering party of the parts, it is possible to widen the scope of selection of the ordering party of the parts.

FIG. 5 shows a parts ordering system according to another embodiment of the present invention, a manufacturing apparatus in a semiconductor device factory,
It is a block diagram which shows the relationship with a component supplier. In this embodiment, the parts supplier is the manufacturing equipment manufacturer 60a.
Consists of only. In this case, since there is only one supplier, it is not necessary to indicate the supplier of the necessary parts in the correspondence list (see FIG. 3) or the order note (see FIG. 4).

FIG. 6 is a block diagram showing the relationship among a parts ordering system, a manufacturing apparatus in a semiconductor device factory, and a parts supplier according to still another embodiment of the present invention. In this embodiment, the parts ordering system (host server 20 and database 40) is arranged as a system common to a plurality of semiconductor device factories 10a, 10b, 10c. This configuration is usually applied when the parts ordering system and the plurality of semiconductor device factories 10a to 10c belong to the same corporation. However, this configuration has a parts ordering system and a plurality of semiconductor device factories 10a-10.
This can also be applied to the case where c respectively belong to different corporations, and in this case, the owner of the parts ordering system is obliged to keep the owners of the semiconductor device factories 10a to 10c confidential.

In addition, within the scope of the idea of the present invention, those skilled in the art can come up with various modifications and modifications, and those modifications and modifications are also within the scope of the present invention. Understood.

[0034]

As described above, according to the present invention,
An improved system and method for ordering parts of equipment within a factory online to a parts supplier outside the factory can be provided.

[Brief description of drawings]

FIG. 1 is a block diagram showing a relationship between a parts ordering system according to an embodiment of the present invention, a manufacturing apparatus in a semiconductor device factory, and a parts supplier.

FIG. 2 is a flowchart showing a system flow of a parts ordering method according to an embodiment of the present invention, which is performed using the system shown in FIG.

FIG. 3 is a view showing a part of a correspondence list regarding a Ti / TiN sputtering apparatus which is one of the manufacturing apparatuses.

FIG. 4 is a view showing a part of an order note stored in an order note file formed for regular maintenance 1 (identification number M001 in FIG. 3) of a Ti / TiN sputtering apparatus.

FIG. 5 is a block diagram showing a relationship between a parts ordering system according to another embodiment of the present invention, a manufacturing apparatus in a semiconductor device factory, and a parts supplier.

FIG. 6 is a block diagram showing a relationship between a parts ordering system according to still another embodiment of the present invention, a manufacturing apparatus in a semiconductor device factory, and a parts supplier.

FIG. 7 is a block diagram showing a conventional component supply system in a semiconductor device factory.

[Explanation of symbols]

10 ... Semiconductor device factory 12 ... Manufacturing equipment 14 ... Control unit (communication unit) 20 ... Host server 22 ... Device intermediary unit 24 ... Supplier Brokerage Department 26 ... List management unit 28 ... Search section 32 ... Numbering unit 34 ... Order note management section 36 ... Ordering Department 40 ... Database 44 ... List file 46 ... Order note file 60 ... Parts supplier 64 ... Communication unit

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G05B 19/418 G05B 19/418 Z (72) Inventor Hirokazu Ezawa 8 Shinsita-cho, Isogo-ku, Yokohama-shi, Kanagawa F-term in Toshiba Yokohama office of stock company (reference) 3C100 AA63 BB27 BB38 EE06

Claims (11)

[Claims] 1. A system for ordering parts of a device in a factory online to a parts supplier outside the factory, comprising a device intermediary unit connected to a communication unit of the device. , A supplier mediation unit connected to the communication unit of the component supplier, device information consisting of a plurality of information units representing the state of the device, and a component required depending on the state of the device. A list management unit that stores a correspondence list indicating a correspondence relationship between a name and a quantity, and responds to each information unit being input from the communication unit of the device via the device mediation unit, and stores the correspondence list. A search unit that refers to and retrieves the name and quantity of the necessary parts corresponding to the information unit, a numbering unit that gives an ordering number to the name and quantity of the necessary parts, and the information unit and the necessary parts Name and quantity and before An order note management unit that stores an order note indicating the correspondence with the order number, and the name and quantity of the necessary parts and the order number are selected from the information shown in the order note, to the parts supplier. And an ordering section for ordering the necessary parts by outputting through the supplier mediation section. 2. The supplier intermediary unit is connected to a plurality of parts suppliers, and the correspondence list includes an order of parts in addition to the names and quantities of parts required depending on the state of the device. Indicating the destination, the search unit searching for the ordering party in addition to the name and quantity of the necessary parts, and the order note indicating the ordering party in addition to the name and quantity of the necessary parts, The parts ordering system according to claim 1, wherein the ordering unit selects the plurality of parts suppliers according to an orderer of the necessary parts indicated in the order note. 3. A system for selectively ordering parts of a device in a factory online to a plurality of parts suppliers outside the factory, the system being connected to a communication part of the device. Device intermediation unit, a supplier intermediation unit connected to the communication units of the plurality of component suppliers, device information composed of a plurality of information units representing the state of the device, and the device state depending on the state of the device. And a list management unit that stores a correspondence list indicating the correspondence between the name, quantity, and ordering party of the necessary parts, and each information unit is input from the communication unit of the device via the device mediation unit. In response to the request, a search unit that refers to the correspondence list and searches for the name, quantity, and supplier of the necessary parts corresponding to the information unit; and for the name, quantity, and supplier of the necessary parts Assigning a purchase order number And an order note management unit that stores an order note indicating the information unit, the name and quantity of the necessary part, and the correspondence relationship between the orderer and the order number, and the orderer of the necessary part indicated in the order note An ordering unit that selects the plurality of component suppliers according to the order, and orders the necessary components to the selected component supplier via the supplier mediation unit. Ordering system. 4. The parts ordering system according to claim 1, wherein the information unit of the device information includes an identification number formed by the device based on a state of the device. 5. The parts ordering system according to claim 4, wherein the identification number includes a number representing a state selected from the group consisting of regular maintenance and trouble. 6. A component intermediary unit connected to a communication unit of the device and the component supplier for ordering components of the device in the factory online to a component supplier outside the factory. And a supplier mediation section connected to the communication section of the apparatus, the method comprising: a plurality of information units representing the state of the apparatus; And storing a correspondence list indicating a correspondence relationship between the name and quantity of necessary parts, and in response to each information unit being input from the communication unit of the device via the device intermediation unit. A step of searching the name and quantity of the necessary parts corresponding to the information unit with reference to the correspondence list; a step of assigning an order number to the name and quantity of the necessary parts; Name and number of parts A step of storing an order note indicating the correspondence between the quantity and the order number, and the name and quantity of the necessary parts and the order number are selected from the information shown in the order note, and to the parts supplier. And a step of placing an order for the necessary parts by outputting through the supplier mediation section. 7. The supplier intermediary unit is connected to a plurality of parts suppliers, and the correspondence list includes an order of parts in addition to the names and quantities of parts required depending on the state of the device. Indicating the destination, the order note indicating the ordering party in addition to the name and quantity of the necessary parts, and the method searching for the ordering party in addition to the name and quantity of the necessary parts 7. The method according to claim 6, further comprising: selecting the plurality of component suppliers according to the ordering party of the necessary component indicated in the order note. 8. A device intermediary unit connected to the communication unit of the apparatus for selectively ordering parts of the apparatus in the factory online to a plurality of parts suppliers outside the factory. A device intermediary unit connected to a communication unit of the plurality of component suppliers, and a device information including a plurality of information units representing the state of the device, A step of storing a correspondence list showing a correspondence of a name, a quantity, and an ordering party of necessary parts depending on the state of the device, and each of the communication units of the device via the device mediation unit. Responding to the input of the information unit, referring to the correspondence list, searching for the name, quantity, and supplier of the necessary parts corresponding to the information unit, and the name, quantity, and Assign an order number to the supplier And a step of storing an order note indicating the correspondence between the information unit, the name and quantity of the necessary part, and the ordering party and the order number, and the ordering party of the necessary part indicated in the order note. A step of selecting the plurality of parts suppliers according to the order and ordering the necessary parts to the selected parts supplier via the supplier intermediary section. . 9. A step of forming the device information in the device based on a state of the device, and a step of inputting the device information from the communication part of the device to the system via the device mediation part. 9. The parts ordering method according to claim 6, further comprising: 10. The parts ordering method according to claim 6, wherein the information unit of the device information includes an identification number formed by the device based on a state of the device. 11. The parts ordering method according to claim 10, wherein the identification number includes a number representing a state selected from the group consisting of regular maintenance and trouble.