JP2003172612A - Light irradiation light receiving device and light irradiation light receiving method - Google Patents

Abstract

(57) [PROBLEMS] To provide a light irradiation and light receiving device for irradiating light emitted from a light emitting means to an object to be measured and receiving reflected light from the object to be imaged to eliminate an occlusion area;
In addition, the adjustment of the photographing range and the irradiation range is facilitated, and the loss of light emitted by the light emitting means is reduced. SOLUTION: A light emitting unit that emits light for irradiating an object to be measured, an imaging unit that receives light reflected by the object to be imaged and captures an image, an optical axis of the light that irradiates the object to be measured, and the imaging An optical axis matching unit that matches an optical axis of light received by the unit, and a light irradiation and light receiving device including a focus adjustment unit that adjusts a focus of an image captured by the imaging unit, wherein the light emitting unit is monochromatic and A light source that emits linearly polarized light; and an irradiation angle adjusting unit that adjusts an irradiation angle of the light emitted by the light source, wherein the optical axis matching unit is configured to emit light in accordance with a direction of a polarization plane of incident light. And a polarization beam splitter for reflecting or transmitting light, and a λ for rotating the polarization plane of the incident light by 45 degrees.
A λ / 4 wavelength plate, wherein the λ / 4 wavelength plate is a light irradiation light receiving device disposed between the polarization beam splitter and the object to be measured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light irradiation / light receiving device and a light irradiation / light receiving method for irradiating an object to be measured with light and receiving reflected light from the object to be measured. The present invention relates to a technique effectively applied to original shape measurement and pattern measurement.

[0002]

2. Description of the Related Art Conventionally, there are various methods for inputting a three-dimensional shape of a subject (object to be measured) using a camera, for example, an active measurement method is often used. In the active measurement method, for example, as shown in FIG. 11, the object to be measured 2 is irradiated with artificial light emitted from the light emitting means 3, and the reflected light from the object to be measured 2 is captured by a camera or the like. By receiving light by means 4 and processing,
This is a method for obtaining the three-dimensional shape of the measured object 2. At this time, the three-dimensional shape of the measured object 2 is obtained using, for example, the time of flight method.

In order to obtain a three-dimensional shape using the time-of-flight method, for example, the light emitting means 3 emits pulsed light to irradiate the object 2 to be measured, and the image pickup means 4 moves the shutter at high speed. The object 2 to be measured is photographed while cutting.
At this time, the light emitted from the light emitting means 3 is, for each part of the measured object 2, the distance from the light emitting means 3 to the measured object 2 and the measured object 2 to the imaging means 4.
Depending on the sum of the distances up to, the time (traveling time) varies until the image pickup unit 2 is reached. For example, in FIG.
As shown in FIG. 1, when the L-shaped object to be measured 2 is irradiated with light, the light reflected at the rear of the object to be measured 2, in other words, the part far from the light emitting means 3 and the imaging means 4, is The traveling time becomes longer than the light reflected in front of the measured object, in other words, in the portion near the light emitting means 3 and the imaging means 4. Therefore, the light reflected behind the measured object 2 has a delay in reaching the image pickup means 4, and the amount of light reaching the image pickup means 4 within the shutter time is reduced.

That is, in the image picked up by the image pickup means 4, the area where the light reflected by the light emitting means 3 and the portion far from the image pickup means 4 is received becomes dark and corresponds to the shape of the object 2 to be measured. The brightness value of the brightness is obtained. Therefore,
The shape of the object to be measured is obtained by calculating the distance between each part of the object to be measured and the imaging means from the gray value of the brightness of the captured image.

Since the active measuring method has high reliability and high accuracy, many techniques are put into practical use. However, in the conventional active measurement method, the light emitting means 3 and the imaging means 4 are spatially different positions, and the optical axis of the light emitted from the light emitting means 3 and the light received by the imaging means. The optical axes of are spatially different. Therefore, depending on the shape of the object to be measured 2, as shown in FIG. 12, even if the irradiation angle θ2 of the light emitting means 3 is set so as to irradiate the range θ1 imaged by the imaging means 4, the light emitting means 2 is set. There may occur a region (occlusion region) S3 where the light from 3 does not reach. Since the occlusion area S3 is not exposed to light, there is a problem that the shape in the occlusion area S3 cannot be measured.

In the case of the arrangement shown in FIG. 12,
A range θ1 in which the light emitting unit 3 captures an image with the image capturing unit 4
In order to irradiate, the light needs to be irradiated at an irradiation angle θ2, and at this time, the region S4 of the measured object 2 that is not imaged by the imaging unit 4 is also irradiated with light. The amount of light emitted from the light emitting unit 3 per unit area is inversely proportional to the irradiation area. Therefore, as shown in FIG. 12, when the region S4 that is not imaged by the image capturing unit 4 is also irradiated with light,
The amount of light emitted by the light emitting means 3 is wasted. Therefore, there is a problem that the limited output illumination light cannot be effectively used.

Further, the image pickup means 4 can change the photographing range by exchanging the lens or using a zoom lens. At this time, when a wide-angle image is taken by the image pickup means 4, even if the optical axis AX2 of the irradiation light is different from the optical axis AX1 of the light received by the image pickup means 4 as shown in FIG. The irradiation angle θ of the light emitting means 3 is adjusted according to the width of the photographing range θ1 of the image pickup means 4.
By making 2 wide, it is possible to irradiate the entire measured object 2 with light.

However, in the state shown in FIG. 13, for example, by narrowing the photographing range θ1 of the image pickup means 4,
4, when enlarging and photographing a part S5 of the measured object 2, the irradiation angle θ2 of the light emitting means 3 is also narrowed,
It is conceivable to increase the amount of light and reduce unnecessary light, but the optical axis AX1 of the light received by the optical axis AX2 of the irradiation light is considered.
If there is a deviation, as shown in FIG. 14, there is a problem that there is a deviation between the irradiation range and the shooting range, and a region S5 'where no light is shining is created within the shooting range.

Further, in order to eliminate the deviation between the irradiation range and the photographing range as shown in FIG. 14, it is necessary to adjust the optical axis of the light emitting means 3 in accordance with the change of the photographing range. There is a problem that it takes time. Further, when the light emitted from the light emitting means 3 is invisible light such as infrared light, there is a problem that adjustment work is difficult. Each problem in the active measuring method is caused by the light emitting means 3
This is a problem that occurs because the optical axis of the light emitted from the optical axis and the optical axis of the light received by the imaging unit 4 are different. Therefore, it is solved by making the optical axis of the emitted light and the optical axis of the received light coincide with each other. it can.

As a method of making the optical axis of the radiated light and the optical axis of the received light coincide with each other, a method using a half mirror 10 has been proposed as shown in FIG. When the half mirror 10 is used, for example, the light emitted by the light emitting unit 3 is incident on the half mirror 10 and the light reflected by the half mirror 10 is applied to the measured object 2.
Further, since the light reflected by the measured object 2 passes through the same optical axis as the light irradiated on the measured object 2 and is incident on the half mirror 10 again, the light transmitted through the half mirror 8 is Each of the above problems can be solved by receiving light by the image pickup device 4 and picking up an image.

However, the half mirror 10 is
Since half of the light amount of the incident light is transmitted and the other half is reflected, only the half of the light amount P of the light emitted by the light emitting means 3 is applied to the measured object 2. Also,
Only half of the light reflected by the measured object 2 passes through the half mirror 10 and is received by the imaging unit 4. Therefore, even if 100% of the light amount of the light irradiated to the measured object 2 is reflected, the light amount of the light received by the imaging unit 4 is the light amount P of the light emitted by the light emitting unit 3.
There was a problem that there was a lot of loss.

[0012]

As described in the above-mentioned prior art, when the optical axis of the emitted light and the optical axis of the received light are different from each other, as shown in FIGS. 12 and 14, occlusion occurs. There is a problem that a region is generated, and there is a problem that there is useless light that is emitted outside the photographing region. Also,
The method using the half mirror 10 as shown in FIG. 15 has a problem that a lot of light is lost.

An object of the present invention is to eliminate an occlusion area in a light irradiation / light receiving device that irradiates light to be measured by a light emitting means onto an object to be measured and receives reflected light from the object to be measured to capture an image. To provide various technologies. Another object of the present invention is to adjust an imaging range and an irradiation range in a light irradiation and reception device that irradiates light to be measured by a light emitting means to an object to be measured and receives reflected light from the object to be measured to capture an image. It is to provide a technology that can be facilitated. Another object of the present invention is to provide a light irradiation and reception device which irradiates light to be measured by the light emitting means onto a measured object, receives reflected light from the measured object, and picks up an image. It is to provide a technology capable of reducing the above. Another object of the present invention is to eliminate the occlusion area in a light irradiation and reception device that irradiates the light to be measured by the light emitting means to the object to be measured, receives the reflected light from the object to be measured, and captures the image. It is an object of the present invention to provide a technique capable of easily adjusting the range and the irradiation range and reducing the loss of the light emitted by the light emitting means. The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0014]

The outline of the invention disclosed in the present application is as follows. According to a first aspect of the present invention, a light emitting unit that emits light that irradiates an object to be measured, an imaging unit that receives and images the light reflected by the object to be measured, and an optical axis of light that irradiates the object to be measured. A light irradiation and reception device comprising: an optical axis matching means for matching the optical axis of light received by the image pickup means; and a focus adjustment means for adjusting the focus of an image picked up by the image pickup means, wherein the light emitting means comprises: A light source that emits monochromatic and linearly polarized light, and an irradiation angle adjusting means that adjusts the irradiation angle of the light emitted by the light source, the optical axis matching means, depending on the direction of the polarization plane of the incident light. , A polarizing beam splitter that reflects or transmits light, and λ / that rotates the plane of polarization of incident light by 45 degrees.
And a λ / 4 wavelength plate, which is a light irradiation and reception device disposed between the polarization beam splitter and the object to be measured.

A second invention is the same as the first invention,
The optical axis matching means and the focus adjusting means are arranged on the straight line connecting the object to be measured and the imaging means in the order of the focus adjusting means and the optical axis matching means from the object to be measured side, The light source is arranged such that the plane of polarization of the emitted light is in a direction to be reflected by the polarization beam splitter, and the light reflected by the polarization beam splitter is applied to the object to be measured. The angle adjusting means is a light emitting and receiving device arranged between the light source and the polarization beam splitter.

A third invention is the same as the first invention,
The optical axis matching means and the focus adjusting means are arranged in this order from the object to be measured on the straight line connecting the object to be measured and the light emitting means, the focus adjusting means and the optical axis matching means, The light source is arranged so that the plane of polarization of the emitted light is in a direction of passing through the polarization beam splitter, and the image pickup means is such that the reflected light from the measured object is
The irradiation angle adjusting means is a light irradiation and reception device which is arranged in a direction of being reflected by the polarization beam splitter and is arranged between the light source and the polarization beam splitter.

According to the first invention, the second invention, and the third invention, by providing the optical axis matching means, the light emitted by the light emitting means, that is, the object to be measured is irradiated. The optical axis of the light to be reflected and the optical axis of the light reflected by the object to be measured and received by the imaging unit can be on the same axis. Therefore, it is possible to prevent a region (occlusion region) not irradiated with the light from being generated in the range captured by the image capturing unit.

Further, by providing the light emitting means with the irradiation angle adjusting means, it is possible to match the area of the object to be measured, which is irradiated with the light, with the range taken by the imaging means. Therefore, the light emitted by the light emitting unit is applied to the outside of the image capturing range of the image capturing unit, or the light shown in FIG.
As described above, it is possible to prevent the occurrence of a shift between the photographing range and the irradiation region, and it is possible to effectively use the light amount of the light emitted by the light emitting means. At this time, the optical axis of the light irradiating the measured object, and reflected by the measured object,
Since the optical axes of the light received by the image pickup means are on the same axis, it is only necessary to adjust the irradiation angle of the light to be emitted when the image pickup range is changed, and it is easy to adjust the light irradiation range. is there.

Further, the polarization beam splitter and the λ / 4 wavelength plate are used as the optical axis matching means, and the light emitted from the light source is reflected or transmitted by the polarization beam splitter to irradiate the object to be measured. As a result, almost 100% of the amount of light emitted from the light source can be applied to the measured object. At this time, the light radiated to the object to be measured has a polarization plane of 45 with the λ / 4 wavelength plate.
It is rotated once and is changed to circularly polarized light.

The light reflected by the object to be measured (reflected light) is generally a state in which unpolarized light is mixed in addition to circularly polarized light when the object to be measured is irradiated. The circularly polarized light included in the reflected light becomes linearly polarized light of the polarization plane orthogonal to the polarization plane of the light emitted from the light source in the λ / 4 wavelength plate, and thus is transmitted or reflected by the polarization beam splitter. The light is received by the imaging means. At this time, the light quantity of the light received by the imaging means depends on the ratio of the circularly polarized light and the non-polarized light, but is 50% of the light quantity of the light reflected by the measured object.
To 100%.

Since most of the emitted light is reflected by the object to be measured, the amount of light received by the image pickup means is 50% to 1% of the amount of light emitted by the light source.
It will be 00%. Therefore, the loss of light can be reduced and the light can be effectively used as compared with the conventional device using the half mirror. Further, the respective constituent elements of the light irradiation / reception device are arranged, for example, as shown in the second invention.

In the case of the arrangement of the second aspect of the invention, the linearly polarized light emitted from the light source is reflected by the polarization beam splitter, and the plane of polarization is rotated by 45 ° by the λ / 4 wavelength plate to change to circularly polarized light. The object to be measured is irradiated. The light reflected by the measured object is generally a mixture of circularly polarized light and non-polarized light, and the circularly polarized light has a polarization plane of 4 with the λ / 4 wavelength plate.
The light is rotated by 5 degrees and is converted into linearly polarized light having a polarization plane orthogonal to the polarization plane of the light emitted from the light source. Therefore, the light can be transmitted through the polarization beam splitter and received by the imaging unit. Further, each component of the light irradiation / reception device is not limited to the arrangement shown in the second invention, and may be arranged as shown in the third invention.

In the case of the arrangement shown in the third aspect, the linearly polarized light emitted from the light source passes through the polarization beam splitter, and the plane of polarization is rotated by 45 degrees by the λ / 4 wavelength plate to be changed to circularly polarized light. The object to be measured is irradiated. The light reflected by the measured object is generally a mixture of circularly polarized light and non-polarized light, and the circularly polarized light has a polarization plane of 4 with the λ / 4 wavelength plate.
It rotates 5 degrees and changes to the light of the polarization plane orthogonal to the polarization plane of the light emitted from the light source. Therefore, it can be reflected by the polarization beam splitter and received by the image pickup means.

A fourth invention is an infrared light emitting means for emitting infrared light to irradiate an object to be measured, and a first imaging means for receiving and imaging the infrared light reflected by the object to be measured, Optical axis matching means for matching the optical axis of infrared light with which the object to be measured is irradiated with the optical axis of infrared light received by the first imaging means,
Focus adjustment means for adjusting the focus of the image captured by the first imaging means, light separation means for separating the light reflected by the measured object into infrared light and visible light, and visible light separated by the light separation means. It is a light irradiation light-receiving device provided with a 2nd imaging means which light-receives and images light, Comprising: The said infrared-light emission means emitted the infrared light source which emits linearly polarized infrared light, and the said infrared light source. An irradiation angle adjusting means for adjusting an irradiation angle of infrared light is provided, and the optical axis matching means is a polarization beam splitter for reflecting or transmitting light according to a direction of a polarization plane of the incident light, and a polarization beam splitter for the incident light. A λ / 4 wavelength plate for rotating the plane of polarization by 45 degrees, wherein the light splitting means and the λ / 4 wavelength plate are located between the polarization beam splitter and the measured object from the measured object side, The light splitting means, the λ /
It is a light irradiation and reception device in which four wavelength plates are arranged in this order.

A fifth aspect of the invention is the same as the fourth aspect of the invention.
The light separating unit is a cold mirror that transmits infrared light and reflects visible light, and the focus adjusting unit, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are the object to be measured. On the straight line connecting the first image pickup means and the object to be measured from the focus adjusting means,
The cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are arranged in this order, and the infrared light source is such that the polarization plane of the emitted infrared light is reflected by the polarization beam splitter, and Arranged so that the light reflected by the beam splitter irradiates the measured object,
The second image pickup means is a light irradiation and reception device which is arranged in a direction in which visible light from the measured object is reflected by the cold mirror.

A sixth invention is the same as the fourth invention,
The light separating unit is a cold mirror that transmits infrared light and reflects visible light, and the focus adjusting unit, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are the object to be measured. The focus adjustment means, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are arranged in this order from the object to be measured on a straight line connecting the infrared light emitting means and the infrared light source. Is arranged such that the plane of polarization of the emitted infrared light is oriented to pass through the polarization beam splitter, and the first imaging means reflects the object to be measured, and the cold mirror and the λ / 4 wavelength The infrared light that has passed through the plate is arranged in a direction that is reflected by the polarization beam splitter, and the second imaging unit is arranged in a direction that visible light from the measured object is reflected by the cold mirror. A light irradiating the light receiving device are.

A seventh invention is the same as the fourth invention,
The light separating means is a hot mirror that reflects infrared light and transmits visible light, and the hot mirror and the focus adjusting means are on a straight line connecting the measured object and the second imaging means. The focus adjusting means and the hot mirror are arranged in this order from the measured object side, and the λ / 4 wavelength plate and the polarization beam splitter are arranged in a direction in which infrared light from the measured object is reflected by the hot mirror. And on a straight line connecting the hot mirror and the first imaging means,
The λ / 4 wavelength plate and the polarization beam splitter are arranged in this order, and the infrared light source has a polarization plane of the emitted infrared light reflected by the polarization beam splitter, and
It is a light irradiation and reception device arranged so as to irradiate the object to be measured.

An eighth aspect of the invention is the same as the fourth aspect of the invention.
The light separating means is a hot mirror that reflects infrared light and transmits visible light, and the hot mirror and the focus adjusting means are on a straight line connecting the measured object and the second imaging means. From the object side to be measured, the focus adjusting means and the hot mirror are arranged in this order, and the polarization beam splitter and the λ / 4 wave plate are provided between the hot mirror and the infrared light emitting means. The λ / 4 wavelength plate and the polarization beam splitter are arranged in this order from the mirror side, and the infrared light source is arranged so that the polarization plane of the emitted infrared light passes through the polarization beam splitter. The first imaging means is a light irradiation and reception device arranged in a direction in which infrared light reflected by the object to be measured and passing through the hot mirror and the λ / 4 wavelength plate is reflected by the polarization beam splitter. A.

According to the fourth invention, the fifth invention, the sixth invention, the seventh invention, and the eighth invention, the infrared light emitted from the infrared light source, that is, the The optical axis of infrared light that irradiates the object to be measured and the optical axis of infrared light that is reflected by the object to be measured and received by the imaging unit can be on the same axis. Therefore, it is possible to prevent a region (occlusion region) where the infrared light is not emitted from occurring in the range captured by the image capturing unit.

Further, by providing the irradiation angle adjusting means to the infrared light emitting means, it is possible to match the area of the object to be measured, which is irradiated with infrared light, with the range taken by the imaging means. . Therefore, it is possible to prevent the infrared light emitted from the infrared light source from being emitted to the outside of the range to be captured by the image capturing means, or the displacement between the capturing range and the irradiation region as shown in FIG. The amount of infrared light emitted from the infrared light source can be effectively used. At this time, since the optical axis of the infrared light that irradiates the measured object and the optical axis of the infrared light that is reflected by the measured object and received by the imaging unit are on the same axis, the imaging range When the above is changed, it is only necessary to adjust the irradiation angle of the infrared light to be irradiated, and it is easy to adjust the irradiation range of the infrared light.

The polarization beam splitter and the λ / 4 wavelength plate are used as the optical axis matching means, and the infrared light emitted from the infrared light source is reflected or transmitted by the polarization beam splitter to be measured. By irradiating the object, the amount of infrared light emitted from the infrared light source is about 10
The measured object can be irradiated with 0%. At this time, the infrared light radiated to the measured object is the λ / 4.
The plane of polarization is rotated by 45 degrees by the wave plate, and the light is changed to circularly polarized light for irradiation.

The infrared light (reflected light) reflected by the object to be measured is generally a state in which non-polarized light is mixed in addition to circularly polarized light when the object to be measured is irradiated. The circularly polarized light contained in the reflected light is linearly polarized in a polarization plane orthogonal to the polarization plane of the infrared light emitted from the infrared light source in the λ / 4 wavelength plate, and therefore is transmitted by the polarization beam splitter or It is reflected and received by the imaging means. At this time, the amount of infrared light received by the image pickup means is 50% to 100% of the amount of infrared light reflected by the object to be measured, although it depends on the ratio of circularly polarized light to non-polarized light.

Further, most of the irradiated infrared light is reflected by the object to be measured, so the amount of infrared light received by the imaging means is the amount of infrared light emitted by the infrared light source. From 50% to 100%. Therefore, the loss of light can be reduced and the light can be effectively used as compared with the conventional device using the half mirror. Further, when irradiating the measured object with the infrared light, the light reflected by the measured object also includes visible light (external light) in the space where the measured object exists, By providing the light separation means to separate infrared light and visible light, the first imaging means can capture an image of only infrared light.

At this time, the color information of the object to be measured can be obtained by capturing the image of the visible light separated by the light separating unit by the second image capturing unit. for that reason,
By making the range photographed by the second image pickup unit coincide with the range photographed by the first image pickup unit, the shape and color of the measured object can be measured, and the measured object can be easily recognized. Become. Further, as the light separating means,
A cold mirror that transmits infrared light and reflects visible light can be used. At this time, the respective constituent elements of the light irradiation / reception device are arranged as shown in the fifth invention.

In the case of the arrangement of the fifth invention, the infrared light emitted from the infrared light source is reflected by the polarization beam splitter, and the polarization plane is rotated by 45 degrees by the λ / 4 wavelength plate. It changes to circularly polarized light, passes through the cold mirror, and is irradiated onto the measured object. The circularly polarized infrared light reflected by the object to be measured passes through the cold mirror,
The polarization plane is further rotated by 45 degrees by the / 4 wavelength plate, and the polarization plane of the infrared light emitted from the infrared light source is changed to linear polarization. Therefore, the light passes through the polarization beam splitter and is received by the first imaging unit. On the other hand, the visible light reflected by the measured object is reflected by the cold mirror and is received by the second image pickup means. Further, when the cold mirror is used as the light separating means, each component of the light emitting and receiving device is not limited to the arrangement shown in the fifth invention, but the arrangement shown in the sixth invention. But it is okay.

In the case of the arrangement shown in the sixth aspect, the infrared light emitted from the infrared light source passes through the polarization beam splitter, and the polarization plane is rotated by 45 degrees by the λ / 4 wavelength plate. It changes to circularly polarized light, passes through the cold mirror, and is irradiated onto the measured object. The circularly polarized infrared light reflected by the object to be measured passes through the cold mirror,
The polarization plane is further rotated by 45 degrees by the / 4 wavelength plate, and the polarization plane of the infrared light emitted from the infrared light source is changed to the linear polarization plane orthogonal to the polarization plane. Therefore, the light is reflected by the polarization beam splitter and received by the first image pickup means. On the other hand, the visible light reflected by the measured object is reflected by the cold mirror and is received by the second image pickup means. Further, the light separating means is not limited to the cold mirror, and a hot mirror that reflects infrared light and transmits visible light may be used. When the hot mirror is used, the respective constituent elements of the light irradiation / reception device are arranged as shown in the seventh invention.

In the case of the arrangement of the seventh invention, the infrared light emitted from the infrared light source is reflected by the polarization beam splitter, and the polarization plane is rotated by 45 degrees by the λ / 4 wavelength plate. After being changed to circularly polarized light and reflected by the hot mirror, the object to be measured is irradiated. The circularly polarized infrared light reflected by the measured object is reflected by the hot mirror,
The polarization plane is further rotated by 45 degrees by the / 4 wavelength plate, and the polarization plane of the infrared light emitted from the infrared light source is changed to linear polarization. Therefore, the light passes through the polarization beam splitter and is received by the first imaging unit. On the other hand, the visible light reflected by the measured object passes through the hot mirror and is received by the second imaging means. Further, when the hot mirror is used as the light separating means, each component of the light emitting and receiving device is not limited to the arrangement shown in the seventh invention, but the arrangement as shown in the eighth invention. May be

In the case of the arrangement of the eighth invention, the infrared light emitted from the infrared light source passes through the polarization beam splitter and the polarization plane is rotated by 45 degrees by the λ / 4 wavelength plate. After being changed to circularly polarized light and reflected by the hot mirror, the object to be measured is irradiated. The circularly polarized infrared light reflected by the measured object is reflected by the hot mirror,
The polarization plane is further rotated by 45 degrees by the / 4 wavelength plate, and the polarization plane of the infrared light emitted from the infrared light source is changed to linear polarization. Therefore, the light is reflected by the polarization beam splitter and received by the first image pickup means. On the other hand, the visible light reflected by the measured object passes through the hot mirror and is received by the second imaging means.

A ninth aspect of the present invention emits irradiation light for irradiating an object to be measured, adjusts an irradiation angle of the irradiation light, irradiates the object with the irradiation light with the irradiation angle adjusted, and measures the object to be measured. In the light irradiation / reception method of receiving reflected light reflected by an object, monochromatic and linearly polarized irradiation light is emitted, and the irradiation light whose irradiation angle is adjusted is reflected by a polarizing beam splitter and reflected by the polarizing beam splitter. Light received by irradiating the object to be measured after rotating the plane of polarization of the irradiation light by 45 degrees, further rotating the plane of polarization of the reflected light reflected by the object to be measured by 45 degrees, and transmitting through the polarization beam splitter. This is an irradiation / light reception method.

According to the ninth aspect, the polarization plane of the light reflected by the polarization beam splitter is rotated by 45 degrees to irradiate the measured object, and the polarization plane of the light reflected by the measured object is further changed. By rotating it by 45 degrees, the light reflected by the measured object becomes a light having a polarization plane orthogonal to the polarization plane of the light reflected by the polarization beam splitter, and passes through the polarization beam splitter. Therefore, the irradiated light can be irradiated from the same direction as the received reflected light, and the light reflected by the measured object is received, and when the image is captured, the measured object is not exposed to light. (Occlusion area) can be prevented from occurring.

Further, by adjusting the irradiation angle of the irradiation light and irradiating the object to be measured, the light reflected by the object to be measured is received and the light is irradiated in accordance with the imaging range at the time of imaging. Therefore, the light can be effectively used. Further, by reflecting the emitted light and irradiating the measured object with the measured object, it is possible to irradiate the measured object with almost 100% of the amount of the emitted light. Further, the polarization beam splitter transmits 50% to 100% of the amount of light reflected by the object to be measured. Therefore, the amount of light transmitted through the polarization beam splitter is 50% to 100% of the amount of emitted light, and the loss of light is reduced.

A tenth aspect of the present invention emits irradiation light for irradiating an object to be measured, adjusts an irradiation angle of the irradiation light, irradiates the object to be measured with the irradiation light having the adjusted irradiation angle, and measures the object to be measured. In a light irradiation / reception method of receiving reflected light reflected by an object, a monochromatic and linearly polarized irradiation light is emitted, the irradiation light with the adjusted irradiation angle is transmitted through a polarization beam splitter, and the irradiation is transmitted through the polarization beam splitter. Set the polarization plane of light to 4
It is a light irradiation and light receiving method in which the object to be measured is irradiated with the light after being rotated by 5 degrees, the polarization plane of the reflected light reflected by the object to be measured is further rotated by 45 degrees, and is reflected by the polarization beam splitter to receive light.

According to the tenth aspect, the polarization plane of the light transmitted through the polarization beam splitter is rotated by 45 degrees to irradiate the measured object, and the polarization plane of the light reflected by the measured object is further changed. By rotating it by 45 degrees, the light reflected by the measured object becomes linearly polarized light having a polarization plane orthogonal to the polarization plane of the light passing through the polarization beam splitter, and is reflected by the polarization beam splitter. Therefore, the light reflected in the same direction as the irradiation light can be received, and the light reflected by the measured object is received, and when the image is captured, the area where the measured object is not exposed to light (occlusion area) ) Can be prevented.

By adjusting the irradiation angle of the irradiation light and irradiating the object to be measured, the light reflected by the object to be measured is received, and the light is irradiated in accordance with the imaging range at the time of imaging. Therefore, the light can be effectively used. Further, by transmitting the emitted light and irradiating the measured object, the measured object can be irradiated with almost 100% of the amount of the emitted light. Further, the polarization beam splitter reflects 50% to 100% of the amount of light reflected by the object to be measured. Therefore, the light amount of the light reflected by the polarization beam splitter is 50% to 100% of the light amount of the emitted light, and the light loss is reduced.

An eleventh aspect of the present invention emits linearly polarized infrared light, adjusts the irradiation angle of the infrared light, irradiates the measured object with the infrared light having the adjusted irradiation angle, and measures the measured object. In a light irradiation / reception method of receiving infrared light and visible light reflected by an object, the infrared light having the irradiation angle adjusted is reflected by a polarization beam splitter, and the polarization plane of the infrared light reflected by the polarization beam splitter Is rotated by 45 degrees and then irradiates the object to be measured, the light reflected by the object to be measured is separated into infrared light and visible light, and the polarization plane of the separated infrared light is further increased by 45 degrees.
It is a light irradiation and light receiving method in which the light beam is rotated by a degree and transmitted through the polarization beam splitter to receive light.

According to the eleventh aspect, the plane of polarization of the infrared light reflected by the polarization beam splitter is rotated by 45 degrees to irradiate the measured object, and the infrared light reflected by the measured object is rotated. By further rotating the polarization plane by 45 degrees, the infrared light reflected by the measured object becomes a linear polarization of a polarization plane orthogonal to the polarization plane of the infrared light reflected by the polarization beam splitter, and the polarization beam Transmit through the splitter. Therefore, the emitted infrared light can be emitted from the same direction as the received infrared light, and when the infrared light reflected by the measured object is received and imaged, the measured object is red It is possible to prevent the generation of an area (occlusion area) that is not exposed to external light.

Further, by adjusting the irradiation angle of the irradiation light and irradiating the object to be measured, the infrared light reflected by the object to be measured is received and the light is adjusted in accordance with the imaging range at the time of imaging. It is possible to irradiate, reduce the amount of light that is irradiated to a useless area outside the photographing range, and use the light effectively. Further, by reflecting the emitted infrared light and irradiating the measured object with the infrared light, the amount of the emitted infrared light is almost 1%.
The object to be measured can be irradiated with 00%. Further, the polarizing beam splitter transmits 50% to 100% of the amount of infrared light reflected by the measured object. Therefore, the amount of infrared light transmitted through the polarization beam splitter is 50% to 100% of the amount of emitted infrared light, and light loss is reduced. Further, in addition to infrared light, visible light is included in the light reflected by the measured object, so that by separating the light reflected by the measured object into infrared light and visible light, Infrared light and visible light can be received separately, an image of only the infrared light and an image of the visible light can be captured, and information on the shape and color of the measured object can be obtained.

A twelfth aspect of the present invention emits linearly polarized infrared light, adjusts the irradiation angle of the infrared light, irradiates the measured object with the infrared light having the adjusted irradiation angle, and measures the measured object. In a light irradiation / reception method of receiving infrared light and visible light reflected by an object, a polarization plane of infrared light transmitted through a polarization beam splitter and adjusted by the polarization beam splitter, the infrared light having the irradiation angle adjusted. Irradiate the object to be measured after rotating it by 45 degrees, separate the light reflected by the object to be measured into infrared light and visible light, and further rotate the polarization plane of the separated infrared light by 45 degrees, It is a light irradiation / reception method in which light is reflected and received by the polarization beam splitter.

According to the twelfth aspect of the invention, the plane of polarization of the infrared light transmitted through the polarization beam splitter is rotated by 45 degrees to irradiate the measured object, and the infrared light reflected by the measured object is changed. By further rotating the plane of polarization by 45 degrees, the infrared light reflected by the object to be measured becomes a linear polarization of a plane of polarization orthogonal to the plane of polarization of the infrared light transmitted through the polarization beam splitter, and the polarization beam Reflect on the splitter. Therefore, it is possible to receive infrared light reflected in the same direction as the direction in which the infrared light is emitted, receive the infrared light reflected by the measured object, and when the image is taken, the measured object is Area not exposed to infrared light (occlusion area)
Can be prevented.

By adjusting the irradiation angle of the irradiation light to irradiate the object to be measured, the infrared light reflected by the object to be measured is received and the light is adjusted according to the imaging range at the time of imaging. It is possible to irradiate, reduce the amount of light that is irradiated to a useless area outside the photographing range, and use the light effectively. In addition, by transmitting the emitted infrared light and irradiating the object to be measured, the amount of the emitted infrared light is about 1
The object to be measured can be irradiated with 00%. Further, the polarization beam splitter reflects 50% to 100% of the amount of infrared light reflected by the measured object. Therefore, the amount of infrared light reflected and received by the polarization beam splitter is 50% to 1 of the amount of emitted infrared light.
The amount of light is 00%, and the loss of light is small. Further, in addition to infrared light, visible light is included in the light reflected by the measured object, so that by separating the light reflected by the measured object into infrared light and visible light, Infrared light and visible light can be received separately, an image of only the infrared light and an image of the visible light can be captured, and information on the shape and color of the measured object can be obtained.

In a thirteenth aspect of the present invention according to the eleventh aspect or the twelfth aspect, the light reflected by the object to be measured uses a cold mirror to transmit infrared light and reflect visible light. This is a light irradiation / reception method of separating. According to the thirteenth invention, infrared light is transmitted through the cold mirror and visible light is reflected, so that there is almost no loss of infrared light and visible light due to passing through the cold mirror. Can be effectively used.

In a fourteenth aspect of the invention according to the eleventh aspect or the twelfth aspect of the invention, the light reflected by the object to be measured uses a hot mirror to reflect infrared light and transmit visible light. This is a light irradiation / reception method of separating. The first
According to the invention of 4, the infrared light is reflected using the hot mirror and the visible light is transmitted, so that there is almost no loss of infrared light and visible light due to passing through the hot mirror, and the light is effective. Can be used for.

Hereinafter, the present invention will be described in detail with reference to the drawings together with the embodiments (embodiments). In all the drawings for explaining the embodiments, those having the same function are designated by the same reference numerals, and the repeated description thereof will be omitted.

[0054]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) FIG. 1 is a schematic diagram showing a schematic configuration of a light irradiation / reception device of Embodiment 1 according to the present invention. In FIG. 1, 1A is a light irradiation / reception device, 2 is an object to be measured, 3 is a light emitting means, 301 is a light source, 302 is an irradiation angle adjusting means, 4 is an imaging means, 5 is an optical axis matching means, 50.
1 is a polarization beam splitter, 502 is a λ / 4 wave plate, 6
Is a focus adjusting means. In addition, among the arrows shown in FIG. 1, solid arrows indicate the paths of the light that irradiates the object to be measured, and broken arrows indicate the paths of the light that is received. Further, s attached to the arrow of the solid line indicates that it is s-polarized light, and p attached to the arrow of the broken line indicates that it is p-polarized light.

As shown in FIG. 1, the light irradiation / reception device 1A according to the first embodiment receives a light emitting means 3 for emitting light to be irradiated onto the object to be measured 2 and a light reflected by the object to be measured 2. The image pickup means 4 for picking up an image, the optical axis matching means 5 for matching the optical axis of the light radiated to the object to be measured 2 with the optical axis of the light received by the image pickup means 4, and the image pickup means 4. The focus adjusting means 6 adjusts the focus of the image. The light emitting means 3 includes a light source 301 which emits monochromatic and linearly polarized light, and an irradiation angle adjusting means 302 which adjusts the irradiation angle of the light emitted by the light source 301.

Further, the optical axis matching means 5 has a polarization beam splitter 501 which reflects or transmits light depending on the direction of the polarization plane of the incident light, and λ / which rotates the polarization plane of the incident light by 45 degrees. A four-wave plate 502, and
The quarter wave plate 502 is the polarization beam splitter 501.
And the object 2 to be measured.

Further, the light irradiation / reception device 1A of the first embodiment
Then, as shown in FIG. 1, the optical axis matching means 5 and the focus adjusting means 6 are arranged on a straight line connecting the measured object 2 and the image pickup means 4 from the measured object 2 side, The focus adjusting means 6 and the optical axis matching means 5 are arranged in this order.

Further, in the light source 301, the plane of polarization of the emitted light is oriented so as to be reflected by the polarization beam splitter 501, and the light reflected by the polarization beam splitter 501 is applied to the object to be measured 2. The irradiation angle adjusting means 302 is arranged between the light source 301 and the polarization beam splitter 501.

In the light irradiation and reception device of the first embodiment, the monochromatic and linearly polarized light emitted from the light source 301 is incident on the polarization beam splitter 501 after the irradiation angle adjusting means 302 adjusts the irradiation angle. It At this time, the light incident on the polarization beam splitter 501 is s-polarized light, and thus is reflected by the polarization beam splitter 501. The irradiation light reflected by the polarization beam splitter 501 is rotated by the λ / 4 wavelength plate by 45 degrees so as to be circularly polarized light, and then is irradiated onto the measured object 2 through the focus adjusting means 6.

At this time, since the light emitted from the light source 301 is linearly polarized and reflected by the polarization beam splitter 501 by almost 100%, almost 100% of the light amount of the light emitted by the light source 301 is measured by the object to be measured. 2 can be irradiated. When irradiating the object to be measured 2 with light, at least the range to be photographed by the image pickup means 4 (photographing field angle)
However, if the area irradiated with the light is too wide, the light amount per unit area decreases, the light utilization efficiency decreases, and the accuracy of the captured image decreases. Therefore, the irradiation angle adjusting means adjusts the region of the measured object 2 to be irradiated with light so as to be equal to or slightly wider than the photographing field angle.

FIGS. 2 and 3 are schematic diagrams for explaining the operation of the light irradiation / reception device 1A of the first embodiment, and respectively explain the method of adjusting the irradiation angle of the light irradiated to the object to be measured. It is a schematic diagram for doing. The light irradiation / light receiving device 1
As shown in FIG. 2, using A, for example, when the focus adjustment unit 6 sets the range to be captured by the image capturing unit 4 in a narrow region S1 of a part of the measured object 2, It is sufficient that the light emitted in 301 illuminates the entire inside of the narrow region S1. Therefore, the irradiation angle adjusting means 302 adjusts the irradiation angle so as to irradiate the same region as the narrow region S1 or a region slightly wider than the narrow region S1.

Further, by using the light irradiation / reception device 1A,
For example, as shown in FIG. 3, when the focus adjusting unit 6 sets the range to be captured by the image capturing unit 4 to the wide region S2 of the measured object 2, the light emitted from the light source 301 The entire large area S2 must be illuminated. Therefore, the irradiation angle adjusting means 302 adjusts the irradiation angle so as to irradiate the same region as the wide region S2 or a region slightly wider than the wide region S2. Further, the image pickup range of the image pickup means 4 may be adjusted by the focus adjustment means 6 other than the cases shown in FIGS. 2 and 3, but in that case, according to the image pickup range of the image pickup means 4, The irradiation angle adjusting means 302 adjusts the irradiation range of light.

As described above, when the focal length of the focus adjusting means 6 is changed and the photographing range (photographing angle of view) of the image pickup means 4 is changed, the irradiation angle adjusting means 302 is adjusted according to the change. By changing the irradiation angle (irradiation area) of light, most of the light irradiated from the light irradiation and reception device 1A can be irradiated within the photographing field angle, and the light amount of the irradiated light can be used almost 100%. it can. Therefore, the light emitted by the light emitting means 3 can be effectively used.

The light applied to the object to be measured 2 is
Since the light reflected by the measured object 2 passes through the same optical path,
When changing the range to be photographed by the image pickup means 4, it is only necessary to adjust the irradiation angle by the irradiation angle adjusting means 302.
Therefore, control for efficiently irradiating the photographing range becomes easy. At this time, the irradiation angle adjusting means 302
By linking with the focus adjusting means 6, it is possible to irradiate the range to be photographed by the image pickup means 4, and to effectively use the light amount.

On the other hand, the light applied to the object to be measured 2 is reflected and again enters the λ / 4 wave plate 502 through the focus adjusting means 6 as shown in FIG. Rotate. The reflected light from the measured object 2 is generally in a mixed state of circularly polarized light and non-polarized light, and the circularly polarized light returns to linearly polarized light at the λ / 4 wavelength plate 502. Since the polarization plane at this time is 90 ° rotated with respect to the polarization plane of the light emitted from the light source 301, that is, p-polarized light, the polarization plane is transmitted through the polarization beam splitter 501 and is received by the imaging unit 4. .

On the other hand, the non-polarized light is a light whose polarization plane is random, and since each polarization plane is uniformly rotated by the λ / 4 wavelength plate 502, it is incident on the polarization beam splitter 501 without being polarized. . At this time, a part of the non-polarized light, that is, the plane of polarization is the polarization beam splitter 50.
Only the component in the direction of transmitting 1 is transmitted, and the remaining components are reflected. Therefore, the light amount of the light received by the imaging unit 4 depends on the mixing ratio of the circularly polarized light and the non-polarized light of the light reflected by the measured object 2, but the amount of the light reflected by the measured object 2 is: It will be approximately 50% to 100%.

In the light irradiation / reception device 1A of the first embodiment,
Since the optical axis of the light applied to the object to be measured 2 is made coincident with the optical axis of the light received by the image pickup means 4, an area (occlusion area) where light does not fall within the area taken by the image pickup means 4 ) Does not occur. Further, almost 100% of the amount of light emitted from the light source 301 can be applied to the measured object 2, and 50% of the amount of light reflected by the measured object 2 can be applied.
Since 100% to 100% can be received by the image pickup means 4, the amount of light that can be used for image pickup can be increased as compared with a device using a conventional half mirror.

FIG. 4 is a schematic view showing a concrete example of the structure of the light irradiation / reception device of the first embodiment. The light irradiation / reception device 1A of the first embodiment is mainly used as a three-dimensional shape measuring device used for measuring the three-dimensional shape of the measured object 2 and for pattern recognition. Three
As 01, a semiconductor laser oscillator 301 that emits pulsed laser light is used as shown in FIG.

The image pickup means 4 uses an image pickup camera 403 provided with a gated MCP 401 and a relay lens 402 for high-speed shutter operation and light amplification. The semiconductor laser oscillator 30 may be provided between the λ / 4 wave plate 502 and the image pickup camera 403 as needed.
A bandpass filter 404 for removing light having a wavelength other than the wavelength of the laser pulse light emitted in 1 is provided. The focus adjusting means 6 uses, for example, a C-mount lens 601 having a short focal length and a focal length extending lens 602 in combination.

The operation of the three-dimensional shape measuring apparatus shown in FIG. 4 will be briefly described. First, the semiconductor laser oscillator 30
At 1, the laser pulse light is emitted. The range of the irradiation angle of the laser pulse light captured by the imaging camera by the irradiation angle adjusting unit 302 (the imaging angle of view).
And is made to be slightly wider than the above, and enters the polarization beam splitter 501.

At this time, the semiconductor laser oscillator 301
Are arranged so that the laser pulse light is s-polarized light, reflected by the polarization beam splitter 501, circularly polarized by the λ / 4 wavelength plate 502, the focus extension lens 602 and the C-mount lens. The object 2 to be measured is irradiated through 601. The laser pulse light that is irradiated and reflected on the measured object 2 passes through the C mount lens 601 and the focal length extension lens 602 again and is incident on the λ / 4 wavelength plate 502.

At this time, circularly polarized light of the reflected laser pulse light becomes pulsed light having a polarization plane orthogonal to the polarization plane of the laser pulse light emitted from the semiconductor laser oscillator 301, so that the polarization beam splitter is used. 501 is transmitted. Further, as the non-polarized component of the reflected laser pulse light, a component close to the polarization plane transmitted by the polarization beam splitter 501 is transmitted.

The light transmitted through the polarization beam splitter 501 is incident on the bandpass filter 404 and external light components other than the wavelength of the laser pulse light emitted from the semiconductor laser light source 301 are removed. In addition, when the measurement using the three-dimensional shape measuring apparatus is performed in a dark room, or when the intensity of the laser pulse light is sufficiently higher than the intensity of the outside light, the bandpass filter 404 may not be provided. Good. The light that has passed through the bandpass filter 404 is captured by the imaging camera 403 through the relay lens 402 while performing a high-speed shutter operation using the gated MCP 401.

At this time, in the light reflected by each part of the measured object 2, the distance from the semiconductor laser oscillator 301 to the measured object 2 and the distance from the measured object 2 to the imaging camera 403. There is a time difference according to the sum of. Therefore, when an image is captured while a high-speed shutter operation is performed, the captured image shows shades corresponding to the amount of light reaching within a unit time. Therefore,
The shape of the measured object can be obtained by calculating the distance to the measured object with respect to each point of the captured image using the time-of-flight method based on the gray value of the captured image.

As described above, according to the light irradiation / reception device of the first embodiment, the optical axis of the light with which the measured object 2 is irradiated is made to coincide with the optical axis of the light received by the image pickup means 4. As a result, it is possible to prevent an occlusion area from being generated in the measured object 2. Further, at this time, by using the irradiation angle adjusting means 302, it is possible to irradiate light only on an area equal to or slightly wider than the imaging area (imaging angle of view) of the measured object 2, and the light quantity is effectively utilized. be able to. In addition, the polarization beam splitter 5
01 and the λ / 4 wave plate 502, the amount of light received by the image pickup unit 4 is 50% to 100% of the amount of light emitted by the light source 301, so that the conventional half mirror is used. The efficiency of light utilization can be increased as compared with the conventional device.

(Embodiment 2) FIG. 5 is a schematic diagram showing a schematic structure of a light irradiation / light receiving device of Embodiment 2 according to the present invention. In FIG. 5, 1B is a light irradiation / reception device, 2 is an object to be measured, 3 is a light emitting means, 301 is a light source, 302 is an irradiation angle adjusting means, 4 is an imaging means, 5 is an optical axis matching means, and 501 is a polarization beam splitter. 502 is a λ / 4 wave plate, and 6 is a focus adjusting means. In addition, among the arrows shown in FIG. 5, solid arrows indicate the paths of the light that illuminates the measured object, and broken arrows indicate the paths of the light that is received. Further, p attached to the solid arrow indicates p-polarized light, and s attached to the dashed arrow indicates s-polarized light.

The light irradiation / reception device 1B of the second embodiment has the same structure as the light irradiation / reception device 1A of the first embodiment, and includes the light source 301 and the irradiation angle adjusting means 302 as shown in FIG. The light emitting means 3, the imaging means 4,
An optical axis matching unit 5 including the polarization beam splitter 501 and the λ / 4 wavelength plate 502, and the focus adjusting unit 6
It is composed of and. Therefore, the description of each component is omitted.

The light irradiation / reception device 1B of the second embodiment differs from the light irradiation / reception device 1A of the first embodiment in the arrangement of the light emitting means 3 and the image pickup means 4. In the light irradiation and reception device 1B of the second embodiment, the light emitting means 3
The light source 301 is arranged so that the plane of polarization of the emitted light is oriented to pass through the polarization beam splitter 501. Further, the image pickup means 4 is arranged in a direction in which the reflected light from the measured object is reflected by the polarization beam splitter 501. In addition, the light source 301
Means that the polarization plane of the emitted light is the polarization beam splitter 5
The irradiation angle adjusting means 302 is arranged so that the light reflected by 01 and reflected by the polarization beam splitter 501 is irradiated on the measured object 2.
It is arranged between the light source 301 and the polarization beam splitter 501.

In the light irradiation / reception device 1B of the second embodiment,
The monochromatic and linearly polarized light emitted from the light source 301 is incident on the polarization beam splitter 501 after the irradiation angle is adjusted by the irradiation angle adjusting means 302. At this time, since the light incident on the polarization beam splitter 501 is p-polarized light, it passes through the polarization beam splitter 501. The irradiation light transmitted through the polarization beam splitter 501 is rotated by the λ / 4 wavelength plate 502 by 45 degrees to form circularly polarized light, and then is irradiated onto the measured object 2 through the focus adjusting means 6.

At this time, since the light emitted from the light source 301 is linearly polarized and reflected by the polarization beam splitter 501 by almost 100%, almost 100% of the light amount emitted by the light source 301 is measured by the object to be measured. 2 can be irradiated. Further, when irradiating the measured object 2 with light, as described in the first embodiment, the area of the measured object 2 irradiated with light by the irradiation angle adjusting unit 302 is the image capturing area. Adjust so that it is equal to or slightly wider than the shooting angle of view.

The light applied to the measured object 2 is reflected,
As shown in FIG. 5, it again enters the λ / 4 wave plate 502 through the focus adjusting means 6, and the plane of polarization is again rotated by 45 degrees. The reflected light from the measured object 2 is generally
This is a state in which circularly polarized light and non-polarized light are mixed, and the circularly polarized light returns to linearly polarized light at the λ / 4 wavelength plate 502. Since the polarization plane at this time is rotated by 90 degrees with respect to the polarization plane of the light emitted from the light source 301, that is, s-polarized light, the polarization plane is reflected by the polarization beam splitter 501 and the imaging unit 4
Is received by.

On the other hand, the non-polarized light is a light whose polarization plane is random, and since each polarization plane is uniformly rotated by the λ / 4 wavelength plate 502, it is incident on the polarization beam splitter 501 without polarization. . At this time, a part of the non-polarized light, that is, the plane of polarization is the polarization beam splitter 50.
Only the component in the direction of reflection at 1 is reflected, and the remaining components are transmitted. Therefore, the light amount of the light received by the imaging unit 4 depends on the mixing ratio of the circularly polarized light and the non-polarized light of the light reflected by the measured object 2, but the amount of the light reflected by the measured object 2 is: It will be approximately 50% to 100%.

In the light irradiation / reception device 1B of the second embodiment,
Since the optical axis of the light applied to the object to be measured 2 is made coincident with the optical axis of the light received by the image pickup means 4, an area (occlusion area) where light does not fall within the area taken by the image pickup means 4 ) Does not occur. Further, almost 100% of the amount of light emitted from the light source 301 can be applied to the measured object 2, and 50% of the amount of light reflected by the measured object 2 can be applied.
Since 100% to 100% can be received by the image pickup means 4, the amount of light that can be used for image pickup can be increased as compared with a device using a conventional half mirror. Similarly to the light irradiation / reception device 1A of the first embodiment, the light irradiation / reception device 1B of the second embodiment is mainly used for measuring the three-dimensional shape of the measured object or for pattern recognition. Although it is used as a three-dimensional shape measuring apparatus used, a description of its specific configuration and operation will be omitted.

As described above, according to the light irradiation / reception device of the second embodiment, the light reflected by the optical axis matching means 5 is reflected in the same direction as the direction of the light with which the measured object 2 is irradiated. By receiving the light by the imaging unit 4, it is possible to prevent an occlusion region from being generated in the measured object 2. Further, at this time, by using the irradiation angle adjusting means 302, it is possible to irradiate light only on an area equal to or slightly wider than the imaging area (imaging angle of view) of the measured object 2, and the light quantity is effectively utilized. be able to. Also,
The polarization beam splitter 501 and the λ / 4 wave plate 50
By using 2, the light quantity of the light received by the image pickup means 4 becomes 50% to 100% of the light quantity of the light emitted by the light source 301, so that the light quantity of the light is smaller than that of the apparatus using the conventional half mirror. Utilization efficiency can be increased.

(Embodiment 3) FIG. 6 is a schematic diagram showing a schematic structure of a light irradiation / reception device of Embodiment 3 according to the present invention. In FIG. 6, 1C is a light irradiation / receiving device, 2 is an object to be measured, 3 is a light emitting means, 302 is an irradiation angle adjusting means, and 303.
Is an infrared light source, 4 is a first imaging means, 5 is an optical axis matching means, 5
01 is a polarization beam splitter, 502 is a λ / 4 wave plate,
Reference numeral 6 is a focus adjusting means, 7A is a light separating means (cold mirror), and 8 is a second imaging means. Further, among the arrows shown in FIG. 6, the solid line arrow indicates the path of the light that illuminates the measured object, and the broken line arrow indicates the path of the light that is received. Also,
The s attached to the solid arrow indicates s-polarized light, and the p attached to the dashed arrow indicates p-polarized light.

As shown in FIG. 6, the light irradiation / reception device 1C of the third embodiment emits infrared light that irradiates the object 2 to be measured, and infrared light reflected by the object 2 to be measured. An optical axis that matches the optical axis of infrared light received by the first imaging unit 4 with the first imaging unit 4 that receives light and images Matching means 5, focus adjusting means 6 for adjusting the focus of the image captured by the first imaging means 4, and light separating means 7A for separating the light reflected by the measured object 2 into infrared light and visible light. , The light separating means 7
The second image pickup means 8 receives the visible light separated by A and picks up an image.

The light emitting means 3 includes an infrared light source 303 for emitting linearly polarized infrared light and an irradiation angle adjusting means 30 for adjusting the irradiation angle of the infrared light emitted by the infrared light source 303.
2 and. The optical axis matching means 5 includes a polarization beam splitter 501 that reflects or transmits light depending on the direction of the polarization plane of incident light, and a λ / 4 wavelength plate 502 that rotates the polarization plane of incident light by 45 degrees. With. Further, the light separating means 7A and the λ / 4 wave plate 502 are
Between the polarization beam splitter 501 and the measured object 2, from the measured object 2 side, the light splitting means 7,
The λ / 4 wave plate 502 is arranged in this order.

Further, the light irradiation / reception device 1C of the third embodiment.
In the above, the light separating means 7A is a cold mirror that transmits infrared light and reflects visible light, and the focus adjusting means 6, the cold mirror 7A, and the λ / 4 wavelength plate 50.
2. The polarization beam splitter 501 is, as shown in FIG. 6, on the straight line connecting the measured object 2 and the first imaging means 4, from the measured object 2 side, the focus adjusting means 6, The cold mirror 7A and the λ / 4 wave plate 50
2. The polarization beam splitter 501 is arranged in this order.

In the infrared light source 303, the polarization plane of the emitted infrared light is oriented so as to be reflected by the polarization beam splitter 501, and the polarization beam splitter 50
It is arranged so that the infrared light reflected at 1 is irradiated onto the measured object 2. In addition, the second imaging unit 8 causes the visible light from the measured object 2 to be reflected by the cold mirror 7A.
It is arranged in the direction of reflection.

In the light irradiation / reception device 1C of the third embodiment,
The linearly polarized infrared light emitted from the infrared light source 303 is incident on the polarization beam splitter 501 after the irradiation angle is adjusted by the irradiation angle adjusting means 302. At this time, since the infrared light incident on the polarization beam splitter 501 is s-polarized light, it is reflected by the polarization beam splitter 501. The infrared irradiation light reflected by the polarization beam splitter 501 is rotated by the λ / 4 wavelength plate 502 by 45 degrees to form circularly polarized light, and then transmitted through the cold mirror 7A and passed through the focus adjusting means 6. The object to be measured 2 is irradiated.

At this time, the infrared light emitted from the infrared light source 303 is linearly polarized light, and the polarization beam splitter 5
01 reflects almost 100%. Further, since the infrared light passes through the cold mirror 7A by almost 100%, almost 100% of the amount of infrared light emitted by the infrared light source 301 is transmitted.
Can be applied to the measured object 2. Further, when irradiating the measured object 2 with light, as described in the first embodiment, the area of the measured object 2 irradiated with light by the irradiation angle adjusting unit 302 is the image capturing area. Adjust so that it is equal to or slightly wider than the shooting angle of view.

The light applied to the measured object 2 is reflected,
As shown in FIG. 6, the light enters the cold mirror 7A through the focus adjusting means 6 again. At this time, the light reflected by the measured object 2 includes the infrared light and external light (visible light), but the infrared light is the cold mirror 7.
Visible light passes through A and is reflected by the cold mirror 7A. The infrared light transmitted through the cold mirror 7A again enters the λ / 4 wave plate 502, and the polarization plane is rotated by 45 degrees again.

The infrared light reflected by the object to be measured 2 is generally in a mixed state of circularly polarized light and non-polarized light, and the circularly polarized light returns to linearly polarized light at the λ / 4 wavelength plate 502. The polarization plane at this time is 90 ° rotated with respect to the polarization plane of the light emitted from the light source 301, that is, it is p-polarized light, so it is reflected by the polarization beam splitter 501 and received by the imaging means 4. .

On the other hand, the non-polarized light is a light whose polarization plane is random, and since each polarization plane is uniformly rotated by the λ / 4 wavelength plate 502, it is incident on the polarization beam splitter 501 without polarization. . At this time, a part of the non-polarized light, that is, the plane of polarization is the polarization beam splitter 50.
Only the component in the direction of reflection at 1 is reflected, and the remaining components are transmitted. Further, since the cold mirror 7A transmits almost 100% of infrared light, the amount of light received by the image pickup means 4 depends on the mixing ratio of circularly polarized light and unpolarized light of the light reflected by the measured object 2. However, the light amount of the light reflected by the measured object 2 is about 50% to 100%.

The visible light reflected by the cold mirror 7A is received by the second image pickup means 8 and picked up as shown in FIG. At this time, the second image pickup means 8 adjusts the optical distance so that the same range as the range photographed by the first image pickup means 4 can be photographed.

In the light irradiation / reception device 1C of the third embodiment,
The optical axis of the infrared light irradiating the measured object 2 is set to the first
Since the optical axis of the infrared light received by the image pickup means 4 is matched, there is no area (occlusion area) where the infrared light does not fall within the area taken by the first image pickup means 4.

Almost 100% of the amount of light emitted from the infrared light source 301 can be applied to the measured object 2, and 50% to 1% of the amount of infrared light reflected by the measured object 2 can be applied.
Since 00% can be received by the image pickup means 4,
It is possible to increase the amount of light that can be used for imaging, as compared with a device using a conventional half mirror.

Using the cold mirror 7A,
By separating visible light from the light reflected by the object 2 to be measured, receiving the light by the second image pickup means 8, and picking up an image, it is possible to obtain the color information of the range picked up by the first image pickup means 4. . Therefore, the shape and color information of the measured object 2 can be measured, and the measured object 2 can be easily recognized.

FIG. 7 is a schematic diagram showing a specific structural example of the light irradiation / reception device of the third embodiment. The light irradiation / reception device 1C of the third embodiment is mainly used as a three-dimensional shape measuring device used for measuring the three-dimensional shape of the object to be measured and for pattern recognition. As the light source 303, as shown in FIG. 4, a semiconductor laser oscillator 303 that emits pulsed laser light is used.

The image pickup means 4 uses an image pickup camera 403 which is sensitive to infrared light and is provided with a gated MCP 401 and a relay lens 402 for performing high-speed shutter operation and amplification. If necessary, the λ / 4
Between the wave plate 502 and the imaging camera 403, the bandpass filter 40 for removing light having a wavelength other than the wavelength of the laser pulse light emitted from the infrared semiconductor laser oscillator 303.
4 is provided. The focus adjusting means 6 uses, for example, a C-mount lens 601 having a short focal length and a focal length extending lens 602 in combination.

The operation of the three-dimensional shape measuring apparatus shown in FIG. 7 will be briefly described. First, the infrared semiconductor laser oscillator 303 emits laser pulse light. The polarization beam splitter 501 adjusts the laser pulse light by the irradiation angle adjusting means 302 so that the irradiation angle of the laser pulse light becomes equal to or slightly wider than the range (image pickup angle of view) captured by the image pickup camera. Incident on.

At this time, the infrared semiconductor laser oscillator 3
03 is arranged so that the laser pulse light is s-polarized light, reflected by the polarization beam splitter 501, circularly polarized by the λ / 4 wave plate 502, transmitted through the cold mirror 7A, and The object to be measured 2 is irradiated through the focus extension lens 602 and the C-mount lens 601.

The laser pulse light which is irradiated to and reflected from the object to be measured 2 passes through the C-mount lens 601 and the focal length extension lens 602 again and is incident on the cold mirror 7A. At this time, the circularly polarized infrared light of the reflected laser pulse light is transmitted through the cold mirror 7A, and the laser pulse light emitted by the infrared semiconductor laser oscillator 303 is emitted by the λ / 4 wavelength plate 502. It becomes pulsed light of a polarization plane orthogonal to the polarization plane, that is, p-polarized light. Therefore, the light passes through the polarization beam splitter 501.
Further, as the non-polarized component of the reflected laser pulse light, a component close to the polarization plane transmitted by the polarization beam splitter 501 is transmitted.

The light transmitted through the polarization beam splitter 501 is incident on the bandpass filter 404 and external light components other than the wavelength of the laser pulse light emitted from the infrared semiconductor laser light source 303 are removed. The light passing through the bandpass filter 404 is converted into the MCP with gate.
A high-speed shutter operation is performed using 401, and a light image is captured by the imaging camera 403 through the relay lens 402.

At this time, the light reflected by each part of the object 2 to be measured depends on the sum of the distance from the semiconductor laser oscillator to the object to be measured and the distance from the object to be measured to the imaging camera. There is a time difference. Therefore, when an image is captured while a high-speed shutter operation is performed, the captured image shows shades corresponding to the amount of light reaching within a unit time. Therefore, the shape of the measured object can be obtained by calculating the distance to the measured object with respect to each point of the captured image using the time-of-flight method based on the gray value of the captured image.

On the other hand, the visible light incident on the cold mirror 7A is reflected by the cold mirror 7A, but since the left and right of the captured image are interchanged as it is, the mirror 9
After that, the image is reflected again and the left and right of the image are returned to the original state, and then the second image pickup means 8 receives the light and picks up the image.

As described above, according to the light irradiation / reception device of the third embodiment, the optical axis coincidence means 5 is used, and the optical axis of the light irradiated to the measured object 2 is measured by the first image pickup means 4.
By making it coincide with the optical axis of the light received by, it is possible to prevent an occlusion region from occurring in the measured object 2. Further, at this time, by using the irradiation angle adjusting means 302, it is possible to irradiate light only on an area equal to or slightly wider than the imaging area (imaging angle of view) of the measured object 2, and the light quantity is effectively utilized. be able to. Further, by using the polarization beam splitter 501 and the λ / 4 wavelength plate 502, the light amount of the light received by the imaging unit 4 is 50 times the light amount of the light emitted by the light source 301.
% To 100%, the light utilization efficiency can be improved as compared with the conventional device using the half mirror.
Further, by using the light separating means (cold mirror) 7A, the visible light reflected by the measured object can be photographed by the second imaging means 8, and the measured object 2
The amount of information for recognizing is increased, which makes it easier to recognize.

FIG. 8 is a schematic diagram showing a modification of the light irradiation / reception device of the third embodiment. In the light irradiation / reception device 1C of the third embodiment, as shown in FIG. 6, the focus adjusting means 6, the cold mirror 7A, and the λ / 4 wave plate 5 are provided.
02, the polarization beam splitter 501 on the straight line connecting the measured object 2 and the first imaging means 4, from the measured object 2 side, the focus adjusting means 6, the cold mirror 7A, the λ / Although the four-wave plate 502 and the polarization beam splitter 501 are arranged in this order, the present invention is not limited to this, and as shown in FIG. 8, on a straight line connecting the measured object 2 and the infrared light emitting means 3. From the side of the measured object 2, the focus adjusting means 6, the cold mirror 7A, the λ / 4 wave plate 502, and the polarization beam splitter 50.
You may arrange in the order of 1.

At this time, the infrared light source 303 is arranged so that the plane of polarization of the emitted infrared light is oriented to pass through the polarization beam splitter 501. Further, the first imaging means 4 is arranged in a direction in which the infrared light reflected by the measured object 2 and passing through the cold mirror 7A and the λ / 4 wave plate 502 is reflected by the polarization beam splitter 501. . In the case of the configuration as shown in FIG. 8, the optical axis of the light received by the first image pickup means 4 coincides with the optical axis of the infrared light with which the object to be measured 2 is irradiated. The same effect as that of the irradiation / light receiving device 1C can be obtained.

(Embodiment 4) FIG. 9 is a schematic diagram showing a schematic structure of a light irradiation / reception device of Embodiment 4 according to the present invention. In FIG. 9, 1D is a light irradiation / reception device, 2 is an object to be measured, 3 is a light emitting means, 302 is an irradiation angle adjusting means, and 303.
Is an infrared light source, 4 is a first imaging means, 5 is an optical axis matching means, 5
01 is a polarization beam splitter, 502 is a λ / 4 wave plate,
6 is a focus adjusting means, 7B is a light separating means (hot mirror), and 8 is a second imaging means. In addition, among the arrows shown in FIG. 9, solid arrows indicate the paths of the light that illuminates the measured object, and broken arrows indicate the paths of the light that is received. Also,
The s attached to the solid arrow indicates s-polarized light, and the p attached to the dashed arrow indicates p-polarized light.

The light irradiation / reception device 1D of the fourth embodiment has the same structure as the light irradiation / reception device of the third embodiment, and as shown in FIG. 9, the infrared light source 303 and the irradiation angle adjusting means 30.
2, the first image pickup unit 4, the polarization beam splitter 501, and the λ / 4 wave plate 502.
The optical axis matching means 5 and the focus adjusting means 6
And the light separation means 7B and the second image pickup means 8. Therefore, description of each component is omitted.

The light irradiation / reception device 1D of the fourth embodiment is different from the light irradiation / reception device 1C of the third embodiment in that the light separating means 7B is a hot light reflecting infrared light and transmitting visible light. The point of using a mirror and the arrangement of each of the above-mentioned components. In the light irradiation / reception device 1D of the fourth embodiment, the hot mirror 7B and the focus adjustment means 6 are arranged on a straight line connecting the measured object 2 and the second imaging means 8 as shown in FIG. The focus adjusting means 6 and the hot mirror 7B are arranged in this order from the measured object 2 side.

Further, the λ / 4 wave plate 502 and the polarization beam splitter 501 are in a direction in which infrared light from the measured object 2 is reflected by the hot mirror 7B,
Further, the λ / 4 wave plate 502 and the polarization beam splitter 501 are arranged in this order on a straight line connecting the hot mirror 7B and the first image pickup means 4. Further, the infrared light source 303 is arranged so that the plane of polarization of the emitted infrared light is oriented to be reflected by the polarization beam splitter 501 and is irradiated onto the measured object 2.

In the light irradiation / reception device 1D of the fourth embodiment,
The linearly polarized infrared light emitted from the infrared light source 303 is incident on the polarization beam splitter 501 after the irradiation angle is adjusted by the irradiation angle adjusting means 302. At this time, since the infrared light incident on the polarization beam splitter 501 is s-polarized light, it is reflected by the polarization beam splitter 501. The infrared irradiation light reflected by the polarization beam splitter 501 is rotated by 45 ° in the λ / 4 wavelength plate 502 into circularly polarized light, reflected by the hot mirror 7B, and passed through the focus adjusting means 6. The object to be measured 2 is irradiated.

At this time, the infrared light emitted from the infrared light source 303 is linearly polarized light, and the polarization beam splitter 5
01 reflects almost 100%. Further, since the hot mirror 7B also reflects almost 100%, the infrared light source 303
It is possible to irradiate the measured object 2 with almost 100% of the amount of infrared light emitted in step 1. In addition, the measured object 2
In the case of irradiating light on the object, as described in the first embodiment, the area of the object to be measured 2 irradiated by the light by the irradiation angle adjusting means 302 is equal to or equal to the photographic field angle. Adjust so that it is slightly wider than the corner.

The light applied to the measured object 2 is reflected,
As shown in FIG. 6, the light enters the hot mirror 7B through the focus adjusting means 6 again. At this time, the light reflected by the measured object 2 is the infrared light and the external light (visible light).
However, infrared light is reflected by the hot mirror 7B and visible light is transmitted through the hot mirror 7B. The infrared light reflected by the hot mirror 7B is again reflected by the λ / 4.
It is incident on the wave plate 502, and the plane of polarization is again rotated by 45 degrees.

The infrared light reflected by the object to be measured 2 is generally in a mixed state of circularly polarized light and non-polarized light, and the circularly polarized light is returned to the linearly polarized light by the λ / 4 wavelength plate 502. Since the polarization plane at this time is 90 ° rotated with respect to the polarization plane of the light emitted from the infrared light source 303, that is, p-polarized light, the polarization plane is reflected by the polarization beam splitter 501 and received by the imaging unit 4. To be done.

On the other hand, the non-polarized light is a light whose polarization plane is random, and since each polarization plane is uniformly rotated by the λ / 4 wavelength plate 502, it is incident on the polarization beam splitter 501 without polarization. . At this time, a part of the non-polarized light, that is, the plane of polarization is the polarization beam splitter 50.
Only the component in the direction of reflection at 1 is reflected, and the remaining components are transmitted. Further, the hot mirror 7 emits almost 10 infrared rays.
Since it reflects 0%, the amount of light received by the imaging unit 4 depends on the mixing ratio of the circularly polarized light and the non-polarized light of the light reflected by the measured object 2, but the light reflected by the measured object 2 The light amount is about 50% to 100%.

The visible light transmitted through the hot mirror 7B is received and imaged by the second image pickup means 8 as shown in FIG. At this time, the second image pickup means 8 adjusts the optical distance so that the same range as the range photographed by the first image pickup means 4 can be photographed.

In the light irradiation / reception device 1D of the fourth embodiment,
The optical axis of the infrared light irradiating the measured object 2 is set to the first
Since the optical axis of the infrared light received by the image pickup means 4 is matched, there is no area (occlusion area) where the infrared light does not fall within the area taken by the first image pickup means 4.

Further, almost 100% of the amount of light emitted from the infrared light source 301 can be applied to the measured object 2, and 50% to 1% of the amount of infrared light reflected by the measured object 2 can be applied.
Since 00% can be received by the image pickup means 4,
It is possible to increase the amount of light that can be used for imaging, as compared with a device using a conventional half mirror.

Further, the visible light is separated from the light reflected by the object to be measured 2 by using the hot mirror 7B, the second image pickup means 8 receives the light, and the image is picked up, whereby the first image pickup means 4 is obtained. It is possible to acquire the color information of the range photographed in. Therefore, the shape and color information of the measured object 2 can be measured, and the measured object 2 can be easily recognized.

The light irradiation / reception device 1D of the fourth embodiment is mainly used as a three-dimensional shape measuring device used for measuring the three-dimensional shape of the object to be measured and for pattern recognition. Since its specific configuration and operation are the same as those of the device of the third embodiment, description thereof will be omitted.

As described above, according to the light irradiation / reception device of the fourth embodiment, the optical axis coincidence means 5 is used, and the optical axis of the light irradiated to the measured object 2 is measured by the first image pickup means 4.
By making it coincide with the optical axis of the light received by, it is possible to prevent an occlusion region from occurring in the measured object 2. Further, at this time, by using the irradiation angle adjusting means 302, it is possible to irradiate light only on an area equal to or slightly wider than the imaging area (imaging angle of view) of the measured object 2, and the light quantity is effectively utilized. be able to.

By using the polarization beam splitter 501 and the λ / 4 wavelength plate 502, the amount of light received by the image pickup means 4 is changed from 50% to 100% of the amount of light emitted by the light source 301. Therefore, the light utilization efficiency can be increased as compared with the conventional device using the half mirror. Also, the light separating means (hot mirror)
By using 7B, the visible light reflected by the measured object can be photographed by the second imaging means 8, the amount of information for recognizing the measured object 2 increases, and it becomes easy to recognize.

FIG. 10 is a schematic diagram showing a modification of the light irradiation / reception device of the fourth embodiment. In the light irradiation / reception device 1D of the fourth embodiment, as shown in FIG.
The wave plate 502 and the polarization beam splitter 501 are
The infrared light from the measured object 2 is the hot mirror 7B.
The λ / 4 wavelength plate 502 and the polarization beam splitter 501 are arranged in this order on a straight line which is in the direction of reflection at and which connects the hot mirror 7B and the first image pickup means 4. Without being limited to this, as shown in FIG. 10, the λ / 4 wavelength plate 502 and the polarization beam splitter 501 may be arranged between the hot mirror 7B and the light emitting means 3 in this order from the hot mirror 7B side. Good.

In the case of the arrangement shown in FIG. 10, the infrared light source 303 is arranged so that the plane of polarization of the emitted infrared light passes through the polarization beam splitter 501, and the first image pickup is performed. The means 4 is reflected by the measured object 2, and the hot mirror 7B and the λ / 4 wave plate 502 are included.
By arranging the infrared light that has passed through the polarization beam splitter 501 in a direction in which the infrared light is reflected, the same effect as that of the light irradiation and reception device 1D of the fourth embodiment can be obtained.

Although the present invention has been specifically described based on the above embodiment, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. Of course.

[0129]

The effects of the invention disclosed in the present application are as follows.
It is as follows. (1) The occlusion area can be eliminated in the light irradiation and reception device that irradiates the object to be measured with the light emitted by the light emitting means, receives the reflected light from the object to be measured, and captures the image. (2) In the light irradiation and reception device that irradiates the light to be measured by the light emitting means to the object to be measured and receives the reflected light from the object to be measured to capture an image, it is possible to easily adjust the imaging range and the irradiation range. it can. (3) In a light irradiation and reception device that irradiates the light to be measured by the light emitting means onto the object to be measured and receives and reflects the reflected light from the object to be measured, it is possible to reduce the loss of the light emitted from the light emitting means. it can. (4) In a light irradiation / light receiving device that irradiates light to be measured by the light emitting means to an object to be measured and receives reflected light from the object to be measured to capture an image, eliminating an occlusion area, and
It is possible to easily adjust the shooting range and the irradiation range and reduce the loss of the light emitted by the light emitting means.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a schematic configuration of a light irradiation / reception device according to a first embodiment of the present invention.

FIG. 2 is a schematic diagram for explaining the operation of the light irradiation / reception device of the first embodiment.

FIG. 3 is a schematic diagram for explaining the operation of the light irradiation / reception device of the first embodiment.

FIG. 4 is a schematic diagram showing a specific configuration example of the light irradiation / reception device of the first embodiment.

FIG. 5 is a schematic diagram showing a schematic configuration of a light irradiation / reception device according to a second embodiment of the present invention.

FIG. 6 is a schematic diagram showing a schematic configuration of a light irradiation / reception device of a third embodiment according to the present invention.

FIG. 7 is a schematic diagram showing a specific configuration example of the light irradiation / reception device of the third embodiment.

FIG. 8 is a schematic diagram showing a modified example of the light irradiation / reception device of the third embodiment.

FIG. 9 is a schematic diagram showing a schematic configuration of a light irradiation / reception device of a fourth embodiment according to the present invention.

FIG. 10 is a schematic diagram showing a modified example of the light irradiation / reception device of the fourth embodiment.

FIG. 11 is a schematic diagram for explaining a conventional active measurement method.

FIG. 12 is a schematic diagram for explaining the problems of the conventional active measurement method.

FIG. 13 is a schematic diagram for explaining a problem of a conventional active measurement method.

FIG. 14 is a schematic diagram for explaining a problem of a conventional active measurement method.

FIG. 15 is a schematic diagram for explaining the problems of the conventional active measurement method.

[Explanation of symbols]

1A, 1B, 1C, 1D ... Light irradiation / receiving device, 2 ... Object to be measured, 3 ... Light emitting means, 301 ... Light source, 302 ... Irradiation angle adjusting means, 303 ... Infrared light source, 4 ... Imaging means (first imaging means) ), 401 ... MCP with gate, 402 ... Relay lens, 403 ... Imaging camera, 404 ... Bandpass filter, 5 ... Optical axis matching means, 501 ... Change beam splitter, 502 ... λ / 4 wavelength plate, 6 ... Focus adjusting means , 7A ...
Cold mirror, 7B ... Hot mirror, 8 ... Second imaging means, 9 ... Mirror, 10 ... Half mirror.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F065 AA53 BB05 DD00 DD05 FF04                       FF32 FF49 GG06 GG22 HH02                       HH09 HH12 JJ03 JJ05 JJ26                       LL04 LL20 LL22 LL30 LL33                       LL36 LL37 MM22 PP22 QQ24                       QQ25 UU01 UU02 UU07                 2H099 AA00 BA09 BA17 CA07

Claims (14)

[Claims] 1. A light emitting means for emitting light for irradiating an object to be measured, an image pickup means for receiving and imaging light reflected by the object to be measured, an optical axis of light applied to the object to be measured, and the A light irradiation and light receiving device comprising: an optical axis matching means for matching an optical axis of light received by the image pickup means; and a focus adjustment means for adjusting the focus of an image picked up by the image pickup means, wherein the light emitting means comprises: A light source that emits monochromatic and linearly polarized light, and an irradiation angle adjusting means that adjusts the irradiation angle of the light emitted by the light source, the optical axis matching means, depending on the direction of the polarization plane of the incident light. A polarization beam splitter that reflects or transmits light, and a λ / 4 wavelength plate that rotates a polarization plane of incident light by 45 degrees, and the λ / 4 wavelength plate includes the polarization beam splitter and the object to be measured. Characterized by being placed between Light irradiating the light-receiving device. 2. The optical axis matching means and the focus adjusting means are on a straight line connecting the object to be measured and the imaging means,
The focus adjusting means and the optical axis matching means are arranged in this order from the measured object side, and the light source is oriented such that the polarization plane of the emitted light is reflected by the polarization beam splitter, and the polarization beam. The light reflected by the splitter is arranged so as to be irradiated onto the object to be measured, and the irradiation angle adjusting means is arranged between the light source and the polarization beam splitter. Light irradiation and light receiving device. 3. The optical axis matching means and the focus adjusting means are on a straight line connecting the object to be measured and the light emitting means,
The focus adjusting unit and the optical axis matching unit are arranged in this order from the measured object side, and the light source is arranged such that the polarization plane of the emitted light is in a direction of passing through the polarization beam splitter. The imaging means is arranged in a direction in which the reflected light from the object to be measured is reflected by the polarization beam splitter, and the irradiation angle adjusting means is arranged between the light source and the polarization beam splitter. The light irradiation / reception device according to claim 1. 4. An infrared light emitting means for emitting infrared light for irradiating an object to be measured, a first image pickup means for receiving and imaging infrared light reflected by the object to be measured, and the object to be measured. Optical axis matching means for matching the optical axis of infrared light irradiating the same with the optical axis of infrared light received by the first imaging means, and focus adjustment for adjusting the focus of the image captured by the first imaging means. Light irradiation / reception including: a light separation unit that separates the light reflected by the object to be measured into infrared light and visible light; and a second imaging unit that receives and images the visible light separated by the light separation unit. In the device, the infrared light emitting means includes an infrared light source for emitting linearly polarized infrared light, and an irradiation angle adjusting means for adjusting an irradiation angle of the infrared light emitted by the infrared light source. , The optical axis matching means reflects or transmits light depending on the direction of the plane of polarization of the incident light. And a λ / 4 wavelength plate for rotating the plane of polarization of incident light by 45 degrees, wherein the light splitting means and the λ / 4 wavelength plate are provided between the polarization beam splitter and the object to be measured. A light irradiation / reception device characterized in that the light separating means and the λ / 4 wavelength plate are arranged in this order from the side of the measured object. 5. The light splitting means is a cold mirror that transmits infrared light and reflects visible light, and the focus adjusting means, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are A focus adjustment means, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are arranged in this order from the measured object side on a straight line connecting the measured object and the first imaging means, The infrared light source is arranged such that the plane of polarization of the emitted infrared light is oriented to be reflected by the polarization beam splitter, and the infrared light reflected by the polarization beam splitter is applied to the measured object. The light irradiation / reception device according to claim 4, wherein the second imaging unit is arranged in a direction in which visible light from the measured object is reflected by the cold mirror. 6. The light separating means is a cold mirror that transmits infrared light and reflects visible light, and the focus adjusting means, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are The focus adjustment means, the cold mirror, the λ / 4 wavelength plate, and the polarization beam splitter are arranged in this order from the measured object side on a straight line connecting the measured object and the infrared light emitting means. The infrared light source is arranged such that the plane of polarization of the emitted infrared light is oriented to pass through the polarization beam splitter, the first imaging means is reflected by the measured object, and the cold mirror and The infrared light that has passed through the λ / 4 wave plate is arranged in a direction in which it is reflected by the polarization beam splitter, and the second imaging unit reflects visible light from the measured object by the cold mirror. The light irradiation and reception device according to claim 4, wherein the light irradiation and reception device is arranged in a direction. 7. The light separating means is a hot mirror that reflects infrared light and transmits visible light, and the hot mirror and the focus adjusting means connect the measured object and the second imaging means. On the connecting straight line, the focus adjusting means and the hot mirror are arranged in this order from the measured object side, and the λ /
The four-wave plate and the polarization beam splitter are in a direction in which infrared light from the object to be measured is reflected by the hot mirror, and on the straight line connecting the hot mirror and the first imaging means, the λ The / 4 wavelength plate and the polarization beam splitter are arranged in this order, and the infrared light source is oriented such that the polarization plane of the emitted infrared light is reflected by the polarization beam splitter and is irradiated to the object to be measured. The light irradiation / reception device according to claim 4, wherein the light irradiation / reception device is arranged as follows. 8. The light separating means is a hot mirror that reflects infrared light and transmits visible light, and the hot mirror and the focus adjusting means connect the measured object and the second imaging means. The focus adjusting means and the hot mirror are arranged in this order on the connecting straight line from the side of the object to be measured, and the polarization beam splitter and the λ / 4 wavelength plate are arranged between the hot mirror and the infrared light emitting means. The λ / 4 wavelength plate and the polarization beam splitter are arranged in this order from the hot mirror side, and the infrared light source is oriented so that the polarization plane of the emitted infrared light passes through the polarization beam splitter. And the first imaging means is arranged in a direction in which the infrared light reflected by the object to be measured and passing through the hot mirror and the λ / 4 wavelength plate is reflected by the polarization beam splitter. The light irradiation / reception device according to claim 4, wherein 9. An irradiation light for irradiating an object to be measured is emitted,
In the light irradiation and receiving method of adjusting the irradiation angle of the irradiation light, irradiating the irradiation light with the irradiation angle adjusted to the object to be measured, and receiving the reflected light reflected by the object to be measured, irradiation of monochromatic and linearly polarized light Light is emitted, the irradiation light whose irradiation angle is adjusted is reflected by a polarization beam splitter, the polarization plane of the irradiation light reflected by the polarization beam splitter is rotated by 45 degrees, and then the object to be measured is irradiated, A light irradiation / reception method characterized in that the plane of polarization of the reflected light reflected by the object to be measured is further rotated by 45 degrees, and is transmitted through the polarization beam splitter to receive light. 10. Irradiation light for irradiating an object to be measured is emitted, the irradiation angle of the irradiation light is adjusted, and the irradiation light with the adjusted irradiation angle is applied to the object to be measured and reflected by the object to be measured. In the light irradiation / reception method of receiving reflected light, a monochromatic and linearly polarized irradiation light is emitted, the irradiation light whose irradiation angle is adjusted is transmitted by a polarization beam splitter, and the polarization plane of the irradiation light transmitted by the polarization beam splitter is transmitted. Is rotated by 45 degrees and then irradiates the measured object, the polarization plane of the reflected light reflected by the measured object is further rotated by 45 degrees, and is reflected by the polarization beam splitter to receive light. Irradiation method. 11. The linearly polarized infrared light is emitted, the irradiation angle of the infrared light is adjusted, the infrared light with the adjusted irradiation angle is irradiated to the object to be measured, and reflected by the object to be measured. In a light irradiation / reception method of receiving infrared light and visible light, the infrared light whose irradiation angle is adjusted is reflected by a polarization beam splitter, and the polarization plane of the infrared light reflected by the polarization beam splitter is rotated by 45 degrees. After irradiating the measured object,
The light reflected by the measured object is separated into infrared light and visible light, the polarization plane of the separated infrared light is further rotated by 45 degrees, and the light is transmitted through the polarization beam splitter and received. Light irradiation and light receiving method. 12. Linearly polarized infrared light is emitted, the irradiation angle of the infrared light is adjusted, the infrared light with the adjusted irradiation angle is irradiated to the object to be measured, and reflected by the object to be measured. In the light irradiation receiving method of receiving infrared light and visible light, the infrared light adjusted the irradiation angle is transmitted by a polarization beam splitter,
The polarization plane of the infrared light reflected by the polarization beam splitter is rotated by 45 degrees, and then the measured object is irradiated with the light, and the light reflected by the measured object is separated into infrared light and visible light. The method for irradiating and receiving light, characterized in that the polarization plane of the infrared light is further rotated by 45 degrees, and the infrared light is reflected and received by the polarization beam splitter. 13. The light reflected by the object to be measured is transmitted through infrared light using a cold mirror, and is reflected by visible light to be separated. Light irradiation and light receiving method. 14. The light reflected by the object to be measured is separated by separating it by reflecting infrared light and transmitting visible light using a hot mirror.
2. The light irradiation / reception method described in 2.