JP2003165038A - Machining device and temperature control method in machining device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique effective for swiftly and accurately controlling temperature of a heating part in a machining device having a machining means of machining a work and the heating part generating heat when the work is machined by the machining means. <P>SOLUTION: A grinder 100 grinding the work W has a cooling device 200 controlling temperature of a spindle motor 146 by cooling it. The cooling device 200 has a refrigerant housing 210, a heat exchanger 250, a control part 260 or the like. When a refrigerant C filled in the refrigerant housing 210 is in a boiling state, the control part 260 controls a pressure of a gaseous phase part 216 to a predetermined value by controlling a heat exchange amount by the heat exchanger 250 in response to the pressure of the gaseous phase part 216. Consequently, a boiling point of the refrigerant C is determined, temperature of the refrigerant C is maintained constant, and the spindle motor 146 is controlled so that it is a desired temperature. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machining apparatus for machining a workpiece, and more particularly to a technique for controlling the temperature of a heat generating portion that generates heat when machining a workpiece in the machining apparatus.

[0002]

2. Description of the Related Art A grinding machine such as a grinder is known as a machining apparatus for machining a workpiece. Such a grinding machine is provided with a main shaft and a tailstock shaft for holding the work when processing the work, a main shaft motor for rotating the main shaft to rotate the work, and the like. The heat generated from this spindle motor (heat generating part) causes thermal displacement of the spindle and affects the machining accuracy of the workpiece, so this type of grinding machine conventionally has a cooling mechanism that cools the spindle motor. It is provided. In this cooling mechanism, a cooling pipe is provided in a spindle housing that houses the spindle motor, and a medium such as oil is forced to flow through the cooling pipe to cool the spindle motor. Further, this medium is controlled to a predetermined temperature by a dedicated cooling device. For example, the temperature of the medium flowing through the cooling pipe is detected using a thermometer, and the cooling device is feedback-controlled so that the medium is maintained at a predetermined temperature based on the value detected by the thermometer. The conventional grinding machine has such a structure that the temperature of the medium is controlled and the spindle motor, which is the heat generating portion, is adjusted to a desired temperature.

[0003]

However, since the above-mentioned conventional grinding machine uses the detected value detected by the thermometer for controlling the cooling mechanism, the time constant is large and the response is poor, and the detection accuracy is limited. There is. Therefore, in such a cooling mechanism, it is difficult to accurately adjust the temperature of the spindle motor, which is the heat generating portion, to a desired temperature. Therefore, the present invention has been made in view of the above points, and an object of the present invention is to provide a processing device having a processing means for processing a work and a heat generating portion that generates heat when processing the work by the processing means. That is, it is to provide an effective technique for quickly and accurately controlling the temperature of the heat generating portion.

[0004]

In order to solve the above problems, the processing apparatus of the present invention is configured as described in claims 1 to 4. The temperature control method in the processing apparatus of the present invention is as described in claims 5 to 7. Incidentally, the invention described in each of these claims is a processing device having a processing means for processing a work and a heat generating part that generates heat when processing the work by the processing means, and a medium and a heat generating part filled in a hermetically sealed area. While the heat is exchanged between the medium and the medium, the information about the pressure of the medium is detected, and the amount of heat exchange between the medium and the heat exchange means is controlled based on the pressure information, thereby quickly and quickly controlling the temperature of the heat generating portion. It is a technology that enables accurate operation. That is, in the present invention, under the condition that a saturated liquid and vapor of the medium are present, even if heat is newly added to the medium under constant pressure, the temperature of the medium is simply increased by violent boiling. Is characterized by utilizing that it is kept constant.

The processing apparatus described in claim 1 comprises a processing means, a heat generating portion, and a temperature adjusting means. The “processing device” in the present invention is intended to broadly include a grinding machine such as a grinding machine and a honing machine, and a cutting machine such as a lathe and a milling machine. Therefore, as the "processing means" here,
There are grinding wheels, cutting blades, milling cutters, etc. for processing workpieces. The heat generating portion indicates a location where heat is generated during processing by the processing means, and the processing means may have this heat generating portion, or a heat generating portion may be formed separately from the processing means. The heat generating portion includes, for example, motors that apply a driving force to the processing means, motor coils that configure the motor, bearings and ball screws that operate in association with the processing means. The temperature control means controls the temperature of the heat generating portion, and in the present invention, it comprises a closed area, a medium filled in the closed area, heat exchange means, pressure information detection means, control section and the like. A medium is filled in the hermetically sealed area, and the heat generating portion exchanges heat with the medium. The heat generating portion may be configured to directly transfer heat between the refrigerant and the medium by coming into contact with the medium, or may be configured to indirectly transfer heat via a partition wall such as a housing. May be. A cooling medium (refrigerant) for cooling the heat generating portion is preferably used. When the heat generating portion is cooled by the cooling medium, the heat generated in the heat generating portion moves to the medium side. In this case, when the heat of the heat generating portion moves to the medium side and the temperature of the medium reaches the boiling point, a part thereof is vaporized, and a liquid phase portion (saturated liquid) and a vapor phase portion (vapor) are formed in the sealed region. The ratio occupied by the liquid phase portion and the gas phase portion is determined based on the amount of heat exchange between the heat generating portion and the medium, the amount of heat exchange between the medium and the heat exchange means, and the like. At this time, the amount of heat added from the heat generating portion is used as vaporization latent heat to generate steam. This latent heat of vaporization is larger than the sensible heat when simply cooling the medium in the liquid phase portion, and therefore, by using the latent heat of vaporization, more heat exchange can be performed in a shorter time. As the medium to be filled in the sealed area, fluorine-based inert liquids, CFCs, water,
Various substances such as ketones, alcohols, ethers, hydrocarbons, ammonia and halogen compounds can be used. A medium having a boiling point near room temperature is preferably used. Thereby, the boiling state of the medium can be formed at a low temperature, and the temperature of the heat generating portion can be controlled from a low temperature. The heat exchange means is configured to actively exchange heat with the medium, and preferably has a configuration to exchange heat with the gas phase portion of the medium. As the heat exchange means, for example, a radiation fin that radiates heat through a plurality of fins, a Peltier element that moves heat by passing an electric current, a waste heat fan that drives a fan to remove heat, and the like are combined in various combinations. Can be configured. The pressure information detecting means detects information about the pressure of the medium, and is preferably configured by using a pressure gauge provided corresponding to the gas phase portion formed in the sealed region. The term "pressure information" as used herein is intended to broadly include not only the pressure of the medium itself but also various information indicating the pressure. The control means controls the heat exchange amount (heat load) by the heat exchange means based on the pressure information detected by the pressure information detection means. For example, when heat is removed from the medium, if the amount of heat generated by the heat generating part increases and the pressure in the sealed area becomes higher than a predetermined value, the amount of heat exchange in the heat exchange means is increased to increase the amount of heat removed from the gas phase part. This increases the liquefaction amount of the medium and lowers the pressure in the sealed area. As a result, the cooling effect is improved by lowering the boiling point of the medium and increasing the evaporation amount. On the other hand, when the amount of heat generated in the heat generating part decreases and the pressure in the sealed area becomes lower than the predetermined value, the amount of heat exchanged in the heat exchange means is reduced to reduce the amount of heat removed from the gas phase part, thereby reducing the liquefaction amount of the medium And increase the pressure in the sealed area. Thereby, the cooling effect is lowered by raising the boiling point of the medium and decreasing the evaporation amount. By such control, the pressure in the closed area is controlled to a predetermined value. When the pressure in the closed area is controlled, the boiling point of the medium is determined, and even if heat is newly applied to the medium from the heat generating portion, boiling is intensified and the temperature of the medium is maintained constant. Therefore, it is possible to control the heat generating portion to a desired temperature. In particular, since the control is performed based on the pressure of the medium, it is particularly effective to reduce the time constant and improve the responsiveness as compared with the control based on the temperature, for example, and rapid control is possible. As described above, according to the first aspect of the invention, the temperature control of the heat generating portion can be performed quickly and accurately.

Here, the heat exchange means according to claim 1 is
As described in claim 2, it is preferable that at least one of the Peltier element and the waste heat fan is used. The control unit controls the electric power for driving the Peltier device and the waste heat fan based on the pressure information obtained by the pressure detection means. By controlling this electric power, the amount of heat exchange by the heat exchange means is made variable. For example, the amount of heat absorption changes by changing the power for driving the Peltier element, and the amount of waste heat changes by changing the power for driving the waste heat fan. Therefore, by controlling the drive power of the heat exchange means, it becomes possible to control the amount of heat exchange by the heat exchange means in accordance with the pressure of the medium. With such a configuration, it is possible to realize a simple heat exchange means using a Peltier element or a waste heat fan.

As the medium described in claims 1 and 2, it is preferable to use a fluorine-based inert liquid as described in claim 3. The fluorine-based inert liquid has excellent thermal characteristics and a large heat transfer coefficient, so that heat can be quickly transferred. By using such a medium, it is possible to realize a compact temperature control means having high heat exchange efficiency with the heat generating portion.

Further, the processing apparatus according to a fourth aspect further has a main spindle and a main spindle motor for rotationally driving the main spindle. This spindle holds a work or a tool for machining the work. Examples of this tool include a drill, a boring bar, and a reamer. Then, the temperature control of the spindle motor is performed using the temperature control means. Since the spindle motor generates a large amount of heat and causes thermal displacement of the spindle, etc., the thermal displacement of the spindle can be suppressed by actively controlling the temperature of the spindle motor, and the idling time during use can be reduced. It becomes possible to shorten.

According to the temperature control method of the fifth aspect,
The temperature of the heat generating part can be controlled quickly and accurately.

According to the temperature control method of the sixth aspect, a simple heat exchange technique using a Peltier element or a waste heat fan can be realized.

Further, according to the temperature control method of the seventh aspect, it is possible to realize a heat exchange technique having a high heat exchange efficiency with the heat generating portion.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings in order to specifically describe the present invention.
First, regarding the processing apparatus of the present embodiment, a mechanism for controlling the temperature of the heat generating portion will be described with reference to FIG. here,
FIG. 1 is a diagram schematically showing a mechanism for controlling the temperature of a heat generating part in the processing apparatus of this embodiment. In this embodiment, under the condition that a saturated liquid and vapor of a cooling medium (hereinafter, referred to as “refrigerant”), which is a medium in the present invention, exists, the refrigerant is newly added to the refrigerant under a constant pressure. It is characterized in that the temperature of the refrigerant is kept constant only by violent boiling even when heat is applied. By maintaining the temperature of the refrigerant constant, it becomes possible to stably control the temperature of the heat generating portion. In the present embodiment, as shown in FIG. 1, a configuration is used in which a refrigerant that boils at a predetermined temperature is filled in a sealed area in advance and heat of a heat generating portion is applied to this refrigerant. When heat is applied to the refrigerant in the closed area and the temperature of the refrigerant reaches the boiling point, the refrigerant enters a boiling state, and a liquid phase part that is a saturated liquid and a vapor phase part that is vapor are formed in the closed area. At this time, the amount of heat added from the heat generating portion is used as the latent heat of vaporization to generate steam,
The heat of the heat generating portion is moved to the refrigerant side, so that the heat generating portion itself is cooled.

Further, a heat exchange means for positively removing (waste heat) the heat of the gas phase portion is used. The vapor refrigerant in the vapor phase part is condensed by being cooled by the heat exchange means and becomes a liquefied refrigerant. Further, a pressure gauge and control means for detecting the pressure of the gas phase portion are used. The control section feedback-controls the heat exchange amount by the heat exchange means based on the pressure information detected by the pressure gauge. That is, the heat load of the heat exchanging means is controlled so that the pressure of the gas phase portion in the sealed region becomes a predetermined value. For example, when the amount of heat generated in the heat generating part increases and the amount of steam increases, and the pressure in the closed area becomes higher than a predetermined value, the capacity of the heat removal means is increased to increase the amount of heat removed from the gas phase part to liquefy the refrigerant. Increase the volume and lower the pressure in the enclosed area. Thereby, the cooling effect is enhanced by lowering the boiling point of the refrigerant and increasing the evaporation amount. On the other hand, when the amount of heat generated in the heat generating part is reduced and the amount of steam is decreased, and the pressure in the closed area becomes lower than the predetermined value, the liquefaction amount of the refrigerant is reduced by lowering the capacity of the heat removal means to reduce the amount of heat removed from the gas phase part. And increase the pressure in the enclosed area. This lowers the cooling effect by raising the boiling point of the refrigerant and decreasing the evaporation amount. By performing such pressure control, the pressure of the gas phase portion in the sealed region is controlled to a predetermined value. When the pressure of the vapor phase portion is controlled, the boiling point of the refrigerant is determined, and even if heat is newly added to the refrigerant from the heat generating portion, boiling is intensified and the temperature of the refrigerant is maintained constant. Thus, it becomes possible to maintain the heat generating portion at a constant temperature in response to the change in the heat generation amount of the heat generating portion. In particular, since the control is performed using the pressure information detected by the pressure gauge, the time constant can be made smaller than that when the thermometer is used, and the control with good responsiveness can be performed.

Next, a more specific structure of an embodiment of the processing apparatus of the present invention will be described with reference to FIGS. 2 and 3. Here, FIG. 2 is a plan view showing a main configuration of a grinding machine 100 which is an embodiment of a processing apparatus of the present invention.
FIG. 3 is a diagram showing a configuration of a cooling device 200 that cools the spindle motor 146 in FIG. In the present embodiment, in the grinder 100 that grinds the workpiece W, a spindle motor 146 that drives a spindle that supports the workpiece W.
A case in which the present invention is applied to the technique of performing temperature control will be described.

As shown in FIG. 2, a grinding machine 100, which is an embodiment of a processing apparatus of the present invention, has a processing section 120, a work holding section 130 and the like on a bed 110. The processing section 120 includes a grinding wheel 126 for grinding the work W held by the work holding section 130, and the grinding wheel 126 can be moved with respect to the work W. The grinding wheel 126 and the like constitute the processing means of the present invention. The grinding wheel 126 is attached to the table 125, and the table 125 moves in the left-right direction and the vertical direction in FIG.
Moves to the position shown by the chain double-dashed line in the figure, for example. The mechanism for moving the table 125 in the left-right direction uses a ball screw 120 whose both ends are rotatably supported by a support 122, and a nut 124 screwed with the ball screw 120 and connected to the table 125. That is, the ball screw 120 is rotated via a drive motor (not shown) to allow the nut 12 to rotate.
4 moves left and right. Although not shown, the mechanism for moving the table 125 in the vertical direction uses a ball screw like the mechanism for moving the table in the horizontal direction.

The work holding unit 130 includes a headstock 140, a tailstock 150, a cooling device 200 and the like. The headstock 140 has a spindle 14 having a turning center 144 at its tip.
2. A spindle motor 146 that drives the spindle 142 to rotate.
Is provided. The spindle motor 146 corresponds to the heat generating portion in the present invention, and a cooling device 200 that controls the temperature by cooling the spindle motor 146 is provided on the outer periphery of the spindle motor 146. Tailstock 150
Has a tailstock shaft 15 having a stop center 154 at its tip.
Two are provided. The work W is held by the swivel center 144 and the stop center 154, and the main shaft 142 is rotationally driven by the main shaft motor 146, so that the work W is rotated by a kelet (not shown). In this rotating state of the work W, the cutting blade 126 of the processing unit 120 contacts the work W, whereby the work W is ground.

Next, the structure, operation, etc. of the cooling device 200, which is a characteristic part of the present embodiment, will be described. As shown in FIG. 3, the cooling device 200 mainly includes a refrigerant housing 210, a heat exchanger 250, a controller 260, and the like. This cooling device 200 corresponds to the temperature control means in the present invention. The refrigerant housing 210 has a sealed area 212 therein, and the sealed area 212 includes:
The refrigerant C is filled. In the present embodiment, as the refrigerant C, a fluorine-based inert liquid (a fluorine-based inert liquid PF-5050 manufactured by Sumitomo 3M Limited (boiling point at 1 atm:
30 ° C.)) is used. Refrigerant housing 210 is arranged so as to surround main shaft motor 146. When the heat of the main shaft motor 146 moves to the refrigerant C side and the temperature of the refrigerant C reaches the boiling point, it becomes in a boiling state. As a result, when the refrigerant C evaporates, a liquid phase portion 214 in which the saturated liquid of the refrigerant C is present and a vapor phase portion 216 in which the vapor of the refrigerant C is present are formed in the sealed region 212 of the refrigerant housing 210. This sealed area 21
The second gas phase portion 216 is in communication with a heat exchange area 259 of the heat exchanger 250 described later via the first piping portion 257 and the second piping portion 258. Since the refrigerant C used in the present embodiment has a boiling point near room temperature, the boiling state of the refrigerant C can be formed at a low temperature, and the spindle motor 1
It is possible to control the temperature of 46 from a low temperature.

A pressure gauge 220, an air vent device 230, and a safety valve 240 are connected to the refrigerant housing 210. The pressure gauge 220 is provided at a position corresponding to the vapor phase portion 216 in the closed region 212.
16 pressures are detected. This pressure gauge 220 corresponds to the pressure information detecting means in the present invention. This pressure gauge 22
The pressure information detected at 0 is output to the control unit 260 described later. The air vent device 230 includes a sealing valve 232,
The vacuum pump 234 is used to set the environment before the refrigerant is filled in the refrigerant housing 210. Specifically, using the vacuum pump 234, the refrigerant housing 21
The air inside 0 is sucked and drawn out of the refrigerant housing 210. Then, the sealing valve 232 maintains the inside of the refrigerant housing 210 in a vacuum or a state close to a vacuum. After that, by filling the refrigerant C in the refrigerant housing 210, the sealed region 212 is set to an environment in which only the liquid refrigerant C exists or an environment in which the liquid refrigerant C and a partial gas phase part exist. Becomes The safety valve 240 is designed to prevent the sealed region 212 from having an excessive pressure exceeding the pressure resistance of the refrigerant housing 210. That is,
The safety valve 240 is opened when the closed region 212 reaches a preset pressure, and operates so that the closed region 212 communicates with the outside of the refrigerant housing 210.

The heat exchanger 250 includes a Peltier element 252 installed at a position facing the heat exchange area 259, a radiation fin 254 installed on the Peltier element 252,
The waste heat fan 2 installed above the radiating fins 254
It is composed of 56 and the like. This heat exchanger 250 corresponds to the heat exchange means in the present invention. The Peltier element 252 is configured to use a phenomenon in which heat is absorbed by drive power input from the control unit 260, that is, a so-called Peltier effect. As a result, the vapor refrigerant that has moved to the heat exchange area 259 through the first pipe 257 is cooled and liquefied when passing through the heat exchange area 259, and becomes a liquefied refrigerant to return to the closed area 212 through the second pipe 258. A large number of fins that are in contact with the Peltier element 252 are formed on the heat radiation fin 254, and the heat absorbed by the Peltier element 252 is radiated through this fin. Further, the waste heat fan 256 can adjust the heat radiation amount by the radiation fins 254.
That is, the waste heat fan 256 has a rotary fan that is rotated by, for example, an electric motor, and a predetermined amount of heat is forcibly discharged from the heat radiation fins 254 when the rotary fan rotates.

The control section 260 is composed of an A / D converter 262, a signal processing section 264, a D / A converter 266, a drive section 268 and the like. The pressure information detected by the pressure gauge 220 is sequentially output to the A / D converter 262 and the signal processing unit 26.
4. Signal processing is performed via the D / A converter 266. Then, the drive unit 268 applies drive power corresponding to the pressure information detected by the pressure gauge 220 to the Peltier element 252. The drive unit 268 can be configured by using, for example, a DC amplification power relay. Thereby, the amount of heat removed from the vapor refrigerant by the entire heat exchanger 250 is
It is variable according to the pressure of the gas phase portion 216.

Next, a method of controlling the temperature of the spindle motor 146 by the cooling device 200 having the above structure will be described. When processing the work W, after the work W is held by the work holding unit 130, the operation of the spindle motor 146 is started.
At this time, the heat of the spindle motor 146 is transferred to the refrigerant C with which the hermetically sealed area 212 is filled, due to the temperature rise of the spindle motor 146. After the operation of the spindle motor 146, the temperature of the refrigerant C in the sealed area 212 gradually rises. When the temperature of the coolant C reaches the boiling point, the coolant C becomes in a boiling state, and the sealed region 2
A liquid phase portion 214 and a gas phase portion 216 of the refrigerant C are formed in the column 12. At this time, the amount of heat added from the main shaft motor 146 is all used to generate the vapor of the refrigerant C as latent heat of vaporization.

When the evaporation amount of the refrigerant C changes and the pressure of the gas phase portion 216 changes in this boiling state, the control portion 260 feedback-controls the pressure of the gas phase portion 216.
For example, when the amount of heat generated by the spindle motor 146 increases and the pressure in the gas phase portion 216 becomes higher than a predetermined value, the Peltier element 2
The liquefaction amount of the refrigerant C is increased by increasing the drive power of 52 to increase the amount of heat to be removed from the gas phase part 216.
Reduce the pressure of. As a result, the cooling effect is enhanced by lowering the boiling point of the refrigerant C and increasing the evaporation amount. On the other hand, when the amount of heat generated by the spindle motor 146 decreases and the pressure in the gas phase portion 216 becomes lower than a predetermined value, the driving power of the Peltier element 252 is reduced to reduce the amount of heat removed from the gas phase portion 216 to reduce the amount of the refrigerant C. The liquefaction amount is reduced and the pressure in the gas phase section 216 is increased. As a result, the cooling effect is lowered by raising the boiling point of the refrigerant C and decreasing the evaporation amount. By such feedback control, the pressure of the gas phase portion 216 is controlled to a predetermined value. By controlling the pressure of the vapor phase portion 216, the boiling point of the refrigerant C is determined, and even if heat is newly added to the refrigerant C from the main shaft motor 146, the temperature of the refrigerant C is maintained constant only by violent boiling. be able to. Therefore, the spindle motor 14
6 can be controlled to a desired temperature.

As described above, according to the present embodiment, the gas phase section 216 is provided via the heat exchanger 250, the control section 260 and the like.
By controlling the pressure of the refrigerant to a predetermined value, the boiling point of the refrigerant C can be determined and the temperature of the refrigerant C can be kept constant even if heat is newly added to the refrigerant C from the spindle motor 146.
This enables the spindle motor 146 to be accurately controlled to a desired temperature. In particular, since the control is performed based on the pressure of the gas phase portion 216, it is particularly effective in reducing the time constant and improving the responsiveness as compared with the control based on the temperature, for example, and quick control is possible. . Further, since the spindle motor 146 is cooled by using the latent heat of vaporization of the refrigerant C,
It is rational because more heat can be exchanged in a shorter time than in the case where cooling is performed using the sensible heat of the refrigerant C. Further, according to the present embodiment, it is possible to realize a simple heat exchanger 250 using the Peltier element 252, the radiation fins 254, and the waste heat fan 256. Further, according to the present embodiment, since a low boiling point fluorine-based inert liquid having excellent thermal characteristics is used as the refrigerant C, it is possible to realize a compact cooling device 200 having high heat exchange efficiency with the spindle motor 146. Is possible. Especially, since the refrigerant C having a boiling point near room temperature is used, the boiling state of the refrigerant C can be formed at a low temperature, which is effective for controlling the temperature of the spindle motor 146 from a low temperature. Further, according to the present embodiment, the thermal displacement of the spindle 142 and the like can be suppressed by positively controlling the temperature of the spindle motor 146,
It is possible to shorten the idling time during use.

The present invention is not limited to the above embodiment, and various applications and modifications are conceivable.
For example, each of the following modes to which the above-described embodiment is applied can be implemented.

(A) In this embodiment, the case where the temperature of the spindle motor 146, which is the heat generating portion, is controlled by the cooling device 200 has been described, but the control target is the spindle motor 146.
However, the present invention can be applied to heat generating parts other than the spindle motor 146. An example in which the present invention is applied to a heat generating portion other than the spindle motor 146 will be described with reference to FIGS. Here, FIG. 4 shows the bed 110.
It is a perspective view showing the composition of the cooling device 300 which cools.
FIG. 5 shows a cooling cover 16 usable for the grinder 100.
It is sectional drawing which shows the structure of the cooling device 400 which cools 0. FIG. 6 is a plan view showing the configuration of the cooling device 500 that cools the components of the processing unit 120. In these figures, the same elements as those in FIGS. 2 and 3 are designated by the same reference numerals.

The cooling device 300 (temperature control means) shown in FIG. 4 controls the temperature of the bed 110 as the heat generating portion in the present invention. The first pipe 312, the second pipe 314, the heat exchanger 250, etc. It is composed by. The first pipe 312 is embedded in the bed 110, one of which is connected to the heat exchanger 250 and the other is connected to the second pipe 314. One of the second pipes 314 has a heat exchanger 25.
0 and the other is connected to the first pipe 312.
The first pipe 312 and the second pipe 314 form a closed region of the present invention, and the closed region is filled with the refrigerant C. Although not shown, the cooling device 300 further includes a pressure gauge 220 and an air bleeding device 23 shown in FIG.
0, the safety valve 240, and the control unit 260 have the same configuration. Pressure gauge 220, air vent device 230, safety valve 240
Are connected to the first pipe 312. Bed 11
When the work W is processed, 0 generates heat due to heat conduction from various components. This heat moves from the first pipe 312 to the refrigerant C side, and the refrigerant C is cooled by the heat exchanger 250. At this time, the heat exchange amount (heat load) in the heat exchanger 250 is changed based on the pressure detection information by the pressure gauge 220. Thus, the bed 11 which is the heat generating portion
The bed 110 can be maintained at a constant temperature in response to a change in the calorific value of zero.

The cooling device 400 (temperature control means) shown in FIG. 5 controls the temperatures of the processing part 120 and the work holding part 130 as the heat generating parts of the present invention.
It is composed of a cover 160, a heat exchanger 250, and the like. In the cover 160, the cover main body 162 has a so-called double structure, and the closed region, which is a hollow portion, is filled with the refrigerant C. The cover 160 covers the processing part 120 and the work holding part 130 on the bed 110, and the inside and outside of the cover 160 are the cover body 162.
Shielded by. Although not shown, this cooling device 400 further has the same configuration as the pressure gauge 220, the air vent device 230, the safety valve 240, and the control unit 260 in FIG. The pressure gauge 220, the air vent device 230, and the safety valve 240 are all connected to the cover body 162. The processing part 120 and the work holding part 130 generate heat when the work W is processed by heat conduction from various components. This heat is shielded by the cover 160 and the cover body 162 itself is cooled by the refrigerant C, so that the heat is prevented from moving to the outside of the cover 160 as much as possible. Thus, it becomes possible to maintain the working portion 120 and the work holding portion 130 in the cover 160 at a constant temperature.

The cooling device 500 (temperature control means) shown in FIG. 6 has a support 122 as a heat generating portion in the present invention.
The temperature of the nut 124 is controlled, and is configured by the housing 510, the first pipe 512, the second pipe 514, the heat exchanger 250, and the like. Housing 51
0 has a sealed area filled with the refrigerant C. First pipe 5
12 and the second pipe 514 are both heat exchangers 250
And the housing 510 are connected. Although not shown, the cooling device 500 further includes the pressure gauge 22 shown in FIG.
0, air bleeding device 230, safety valve 240, control unit 260
It has the same configuration as. Pressure gauge 220, air vent device 2
The safety valve 240 and the safety valve 240 are both connected to the housing 510. The support 122 and the nut 124 generate heat when the work W is processed due to heat conduction from various components. This heat moves to the refrigerant C side in the housing 510, and the refrigerant C is cooled by the heat exchanger 250. At this time, the amount of heat exchange in the heat exchanger 250 is changed based on the pressure detection information by the pressure gauge 220. Thus, the support 122 and the nut 124 can be maintained at a constant temperature in response to the change in the heat generation amount of the heat generating portion. As described above, these cooling devices 300,
400 and 500 have the same effects as the cooling device 200 of the present embodiment. The grinder 100 shown in FIG.
Alternatively, a grinding machine having a cooling mechanism in which a plurality of cooling devices according to the embodiments shown in FIGS. 3 to 6 are combined can be used.

(B) In addition, in this embodiment, the case where a fluorine-based inert liquid (fluorine-based inert liquid PF-5050 manufactured by Sumitomo 3M Ltd.) is used as the refrigerant C has been described, but other fluorine-based inert liquids are used. A liquid, for example, a fluorine-based inert liquid FC-87 (boiling point at 1 atm: 30 ° C.) manufactured by Sumitomo 3M Limited can be used. Further, for example, CFCs (CFC, alternative CFCs), water, ketones (acetone, methyl ethyl ketone, etc.), alcohols (methanol, ethanol), ethers (dimethyl ether, diethyl ether, etc.), hydrocarbons (butane, isobutane, Cyclopentane, hexane, toluene, etc.),
Various media such as ammonia and halogen compounds (carbon tetrachloride, trichlorofluoromethane) can also be used as the refrigerant C.

(C) Further, in the present embodiment, the driving electric power input to the Peltier element 252 is changed to change the heat exchanger 2.
Although the case of changing the heat exchange amount in 50 has been described, for example, a configuration in which the heat exchange amount in the heat exchanger 250 is changed by changing the rotation speed of the rotating fan of the waste heat fan 256 may be used.

(D) In the present embodiment, the A / D converter 262, the signal processing section 264, the D / A converter 266,
Although the case where the control unit 260 including the drive unit 268 and the like is used has been described, the configuration of the control unit 260 can be variously changed as necessary. For example, a control unit configured to process the pressure information detected by the pressure gauge 220 only with an analog signal and set the drive power of the heat exchanger 250 can be used.

(E) In the present embodiment, the spindle 14
Although the case where 2 holds the work W has been described, the spindle 142 may be configured to hold a tool for machining the work, for example, a drill, a boring bar, a reamer or the like.

(F) Further, in the present embodiment, the case where the present invention is applied to the grinder 100 has been described, but the present invention can be applied to various processing devices other than the grinder.

[0034]

As described above, according to the present invention, in the processing apparatus having the processing means for processing the work and the heat generating portion for generating heat when the work is processed by the processing means,
It is possible to realize an effective technique for quickly and accurately adjusting the temperature of the heat generating portion.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing a mechanism for controlling the temperature of a heat generating portion in the processing apparatus according to the present embodiment.

FIG. 2 is a plan view showing a main configuration of a grinder 100 that is an embodiment of a processing apparatus of the present invention.

3 is a diagram showing a configuration of a cooling device 200 that cools a spindle motor 146 in FIG.

FIG. 4 is a perspective view showing a configuration of a cooling device 300 that cools a bed 110.

FIG. 5 is a cooling cover 16 usable for the grinder 100.
It is sectional drawing which shows the structure of the cooling device 400 which cools 0.

FIG. 6 is a cooling device 5 for cooling the constituent members of the processing section 120.
It is a top view which shows the structure of 00.

[Explanation of symbols]

100 ... Grinding machine (processing device) 110 ... bed 120 ... Processing department 126 ... Grinding wheel 130 ... Work holding part 140 ... Headstock 142 ... Spindle 146 ... Spindle motor 200 ... Cooling device (temperature control means) 210 ... Refrigerant housing 212 ... Sealed area 220 ... Pressure gauge (pressure information detection means) 250 ... Heat exchanger (heat exchange means) 252 ... Peltier element 254 ... Radiating fin 256 ... Waste heat fan 259 ... Heat exchange area 260 ... Control unit C ... Refrigerant (medium) W ... work

Claims (7)

[Claims] 1. A processing apparatus comprising: a processing means for processing a work; a heat generating part that generates heat when processing the work by the processing means; and a temperature control means for controlling the temperature of the heat generating part. The means detects a sealed area, a medium that is filled in the sealed area and exchanges heat with the heat generating portion, a heat exchange means that exchanges heat with the medium, and information about the pressure of the medium. And a control unit that controls the amount of heat exchange by the heat exchange unit based on the pressure information by the pressure information detection unit. 2. The processing apparatus according to claim 1, wherein the heat exchange means is configured by using at least one of a Peltier element and a waste heat fan. 3. The processing apparatus according to claim 1, wherein the medium is composed of a fluorine-based inert liquid. 4. The processing apparatus according to claim 1, further comprising a main spindle that holds the work or a tool that processes the work, and a main spindle motor that rotationally drives the main spindle.
A processing apparatus wherein the spindle motor is the heat generating portion. 5. A processing apparatus having a processing means for processing a work and a heat generating part for generating heat when processing the work by the processing means, wherein heat is exchanged between a medium filled in a sealed region and the heat generating part. On the other hand, a temperature characterized in that the temperature of the heat generating portion is controlled by detecting information regarding the pressure of the medium and controlling the amount of heat exchange between the medium and the heat exchange means based on this pressure information. Control method. 6. The temperature control method according to claim 5, wherein at least one of a Peltier element and a waste heat fan is used as the heat exchange means. 7. The temperature control method according to claim 5 or 6, wherein a fluorine-based inert liquid is used as the medium.