JP2003164861A - Ozone water deozone system - Google Patents

Abstract

(57) [Problem] To provide a novel ozone water deozone system which has high ozone removal efficiency, removes ozone from ozone water at a small size and at low cost. The ozone water deozoning system includes a gas-liquid separation tank containing an alkaline liquid and a sealed ozone water storage tank containing ozone water, an ejector for sucking ozone water in the ozone water storage tank, A gas supply device for supplying an ozone stripping gas containing fluorine gas to an ejector, a recycling line for recycling a mixed fluid of ozone water and ozone stripping gas containing fluorine gas to a gas-liquid separation tank by an ejector, and a gas-liquid separation Since an ozone decomposer that introduces ozone-containing gas generated in the tank and an exhaust gas pipe that emits ozone decomposed exhaust gas decomposed by the ozone decomposer are provided, most ozone is decomposed in an alkaline liquid, The ozone-containing gas that is not decomposed here is decomposed by the ozone decomposer and released from the exhaust gas pipe as ozone decomposed exhaust gas. It can be easily removed all of the ozone from the water.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel ozone water deozone system for removing ozone from a liquid containing ozone, particularly a liquid containing highly concentrated ozone water.

[0002]

2. Description of the Related Art In recent years, highly concentrated ozone water has been used in a semiconductor manufacturing line having a semiconductor wafer oxide film process and a liquid crystal manufacturing line having a glass substrate cleaning process. Since such a semiconductor production line and a liquid crystal production line are used in a clean room, ozone generated by decomposing high-concentration ozone water adversely affects the production line, and thus needs to be removed.

Generally, as a conventional technique for removing ozone from highly concentrated ozone water, a method of removing ozone by performing aeration in a tank, a method of decomposing and removing ozone by irradiation of ultraviolet rays, or a method of adsorbing ozone with activated carbon There were methods such as disassembling and removing.

[0004]

However, all of these conventional techniques have problems to be solved as described below. That is, the method of removing ozone by aeration in the tank requires a wide space and a lot of energy because the dissolution efficiency is only about 10%, and moreover, a large space is taken in a clean room where the place for removing ozone is expensive. There was a problem that it was difficult. In addition, the method of decomposing and removing ozone by ultraviolet irradiation uses an ultraviolet lamp, and lamp performance is liable to deteriorate, so periodic replacement is required. Since hydrofluoric acid is generally mixed in and is attacked by quartz glass, there is a problem that expensive sapphire glass must be used. Furthermore, the method of removing ozone by adsorbing and decomposing ozone with activated carbon raises the running cost because activated carbon is frequently replaced, and also has the problem that a part of the production line must be stopped each time it is replaced. there were.

On the other hand, at present, there is no ozone water deozone system suitable for use in an expensive clean room, which is small in size, low in cost, and high in ozone removal efficiency, and therefore, urgent development thereof has been desired.

The present invention has been made to cope with the above situation, and its object is to provide a novel ozone water deozone system for removing ozone from ozone water with a very high ozone removal efficiency, small size, and low cost. To do.

[0007]

In order to solve the above problems, the invention of an ozone water deozone system according to claim 1 is a hermetically sealed gas-liquid separation tank containing an alkaline liquid and ozone water. Type ozone water storage tank, ejector for pushing ozone water in this ozone water storage tank, gas supply device for supplying ozone stripping gas mixed with fluorine gas to this ejector, ozone water and fluorine gas mixed by said ejector A recycling line for recycling the mixed fluid of ozone stripping gas to the gas-liquid separation tank, an ozone decomposing device for introducing the ozone-containing gas generated in the gas-liquid separating tank, and an ozone decomposing device An exhaust gas pipe for discharging the ozone decomposition exhaust gas is provided.

According to the first aspect of the present invention, the ozone stripping gas mixed with fluorine gas and the ozone water are mixed and introduced into the alkaline solution through the recycling line, so most of the ozone is in the alkaline solution. Be disassembled. Further, since the ozone-containing gas which is not decomposed here is decomposed by the ozone decomposing device and released from the exhaust gas pipe as ozone-decomposing exhaust gas, all ozone can be easily removed from the ozone water.

The invention of the ozone water deozone system according to claim 2 is a closed ozone water storage tank for storing waste water containing ozone, and the ozone water in the ozone water storage tank is pressurized to join with pressurized air. Gas-liquid merging pipe that serves as a gas-liquid merging fluid, a static mixing device that mixes the fluid that flows out from this gas-liquid merging pipe, and a bubble separation cyclone that flows in the fluid that contains the microbubbles generated by this mixing device And a feedback line for feeding back the ozone water discharged from the bubble separation cyclone to the closed ozone water storage tank again, and an ozone decomposing device for introducing the ozone-containing gas generated in the closed ozone water storage tank. It is characterized by being provided.

According to a third aspect of the present invention, in the ozone water deozone system according to the second aspect, the static mixing device is hollow inside a cylindrical filter having a columnar filter in the center or a plurality of holes on the surface. A filter provided with a thread film is arranged, a pipe for supplying pressurized water and air is attached to the upper part, and a mixing container main body having an outflow port at the lower part and a lower part of the filter are provided to flow downstream. And a plurality of baffles arranged so that the path becomes narrow.

According to the second and third aspects of the present invention, the ozone-containing gas stripped by mixing oxygen or nitrogen gas generated by a high-efficiency mixing device into ozone water is used as ozone decomposing device gas. Most of the ozone can be treated by introducing it into.

Next, the principle of the present invention will be briefly described. In ozone water, dissolved oxygen dissolved in water replaces ozone of ozone gas. If you mix other gases into ozone water with a highly efficient mixing device,
The ozone gas is thinned and stripped from the liquid. Further, most ozone can be decomposed and treated by introducing the stripped ozone-containing gas into the alkaline water. Therefore, it is possible to significantly reduce the scale and cost as compared with the related art.

According to the ozone water deozone system of the present invention, since the novel highly efficient mixing device is used, the dissolution efficiency of 99% or more can be achieved. Further, if the gas is introduced 10 times as much as the dissolved ozone, the ozone concentration of the ozone water becomes almost 1/10.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram of an ozone water deozone system that is a first embodiment of the present invention.

As shown in the figure, in the ozone water deozone system of this embodiment, a gas-liquid separation tank 2 containing an alkaline liquid and a sealed ozone water storage tank 1 containing ozone water are provided.
A pump 3 for sucking the ozone water in the ozone water storage tank, an ejector 4 into which the ozone water pushed by the pump 3 flows, and an ozone stripping gas mixed with fluorine gas is supplied to the ejector 4. A valve 5 and a gas pipe 6, a recycling line 7 for recycling a gas-liquid mixed fluid in which ozone water and ozone stripping gas mixed with fluorine gas are mixed by the ejector 4 to the gas-liquid separation tank 2, An ozone decomposing device 8 for introducing an ozone-containing gas not treated in the gas-liquid separation tank 2 through a pipe 10, an exhaust gas pipe 11 for discharging the ozone decomposing exhaust gas decomposed by the ozone decomposing device 8 to the outside, and a closed type It is composed of a level meter 9 for measuring the level of ozone water stored in the ozone water storage tank 1.

Since the ozone water deozone system of this embodiment is configured as described above, the gas-liquid mixed fluid in which the ozone stripping gas mixed with the fluorine gas and the ozone water are mixed is passed through the recycle line 7. And is recycled to the gas-liquid separation tank 2. Since the gas-liquid separation tank 2 contains an alkaline liquid, ozone is almost decomposed into a gas by the alkaline liquid, and this decomposed gas is absorbed by the alkaline liquid. Further, ozone that is not absorbed by the alkaline liquid is decomposed by the ozone decomposing device 8 and the exhaust gas pipe 11
Since it is released from the outside, all ozone can be easily removed from ozone water.

Although the present embodiment describes a liquid containing ozone water, when it is applied to a liquid containing high-concentration ozone water, the effect is very large, and a large scale down and cost reduction are possible. .

FIG. 2 is a schematic configuration diagram of an ozone water deozone system according to a second embodiment of the present invention. As shown in the figure, the ozone water deozone system of the present embodiment is a closed ozone water storage tank 12 into which waste water containing ozone flows from a water distribution pipe 20, and a pump for ozone water in the ozone water storage tank 12. A gas-liquid merging pipe 14 which is sucked by 13 and merges with pressurized air or generated hydrogen gas to form a gas-liquid merging fluid; a regulator 17 and a valve 18 for adjusting the amount of the pressurized air or generated hydrogen gas; A static mixing device 15 that mixes the fluid that has passed through the gas-liquid merging pipe 14, a bubble separation cyclone 16 that flows in a fluid containing microbubbles generated by the mixing device 15, and ozone is decomposed by the bubble separation cyclone 16. A discharge pipe 21 for discharging the ozone decomposing wastewater to the outside and a bubble containing the ozone gas decomposed by the bubble separation cyclone 16 are enclosed in the ozone water accumulating tank 12 Feedback line 19 to feedback
And an ozone decomposing tank 8 into which the ozone gas stored in the ozone water accumulating tank 12 is introduced via the gas pipe 10, and an exhaust pipe for decomposing ozone in the ozone decomposing tank 8 and discharging it as ozone decomposing exhaust gas to the outside. 21 and a level meter 9 that measures the level of ozone waste water stored in the sealed ozone water storage tank 12.

Since the ozone water deozone system of this embodiment is constructed as described above, the gas-liquid combined fluid containing ozone gas is decomposed by the bubble separation cyclone 16, and the bubbles containing ozone gas are fed back to the feedback line 19.
It is fed back to the sealed ozone water storage tank 12 via. The ozone gas stored in the sealed ozone water storage tank 12 is introduced into the ozone decomposing tank 8 through the pipe 10, and the ozone is decomposed in the ozone decomposing tank 8 to be discharged outside through the exhaust gas pipe 11 as ozone decomposing exhaust gas. It

Further, although the present embodiment describes the liquid containing ozone water, when it is applied to the liquid containing high-concentration ozone water, the effect is very large, and a large scale down and cost reduction are possible. .

FIG. 3 is a block diagram of a static mixing device used in the ozone water deozone system according to the second embodiment of FIG. 2. FIG. 3A is a sectional view of the static mixing device. FIG. 1B is a perspective view of the upper part of the container body, and FIG. 1C is a perspective view of the cross plate.

As shown in the figure, in the mixing device, a filter 23 is arranged in the center, a pipe 28 for supplying pressurized air and a pipe 29 for supplying pressurized water are attached to the upper part, and an outlet 27 is provided in the lower part. Also, the mixing container body 22 with the lid 26 attached thereto, a plurality of baffle plates 24 arranged at the lower part of the filter 23 such that the flow path becomes narrower toward the downstream side, the outlet of the baffle plate 24 and the mixing container body 2
Cross plate 25 arranged between the two outlets 27
It consists of and. Further, as the filter 23, a cylindrical ceramic filter or a filter in which a hollow fiber membrane is arranged in a hollow cylindrical tube is used.

The operation of the static mixing apparatus will be described. Water is introduced from the circumferential direction of the container main body through a pipe 29 provided on the upper portion of the cylindrical mixing container main body 22 and is not shown at the container main body inlet portion. Through the orifice,
It becomes pressurized and becomes a high-speed cyclone flow. A cylindrical ceramic filter or a filter 23 such as a filter in which a hollow fiber membrane is placed in a cylindrical tube and formed by punching is used in the center of the container body.
It is configured so as to blow out from the film surface of the filter 23 via Therefore, the water flow rotates around it at high speed by the cyclone flow, and gas-liquid mixing is performed. The cyclone flow hits the baffle plate 24 and is rapidly mixed as it is narrowed in the latter half of the tube. The baffle plate 24 may be a hollow or a patching plate. The water flow further hits the cross plate plate 25 partitioned by the partition plate 25a at the outlet portion, and gas-liquid mixing further proceeds.

By the way, since the static mixing apparatus shown in FIG. 3 performs sufficient gas-liquid mixing as described above, if this principle is utilized, a dissolved oxygen removing system for removing dissolved oxygen dissolved in the liquid can be obtained. Can be used. Here, an example in which this static mixing device is used in a dissolved oxygen removing system will be described with reference to FIG.

As shown in FIG. 4, the dissolved oxygen removal system to which the present static mixing device is applied has a closed drainage storage tank 3 in which drainage containing dissolved oxygen flows in through a water pipe 40.
0 and the liquid in the closed drainage storage tank 30 is pumped by the pump 31
A gas-liquid merging pipe 32 that pressurizes with the air and joins with the pressurized air to form a gas-liquid merging fluid; and a regulator 35 that adjusts the amount of the pressurized air or pressurized nitrogen gas by flowing through a pipe 37. A valve 36, a static mixing device 33 for mixing the gas-liquid confluent fluid, and the mixing device 33.
Bubble separation cyclone 34 into which a fluid containing microbubbles generated in 1 is discharged, a discharge pipe 39 that discharges degassed water separated in the bubble separation cyclone 34 to the outside, and oxygen gas decomposed in the bubble separation cyclone 34 The main components are a feedback line 38 that feeds back bubbles containing air bubbles to the sealed ozone water storage tank 30 and a level meter 41 that measures the level of the liquid stored in the sealed ozone water storage tank 30.

Since the present dissolved oxygen removing system is constructed as described above, the dissolved oxygen can be efficiently degassed from the liquid containing the dissolved oxygen.

[0027]

As described above, according to the present invention,
Since ozone stripping gas mixed with fluorine gas and ozone water are mixed and introduced into the alkaline solution through the recycling line, most ozone is decomposed in the alkaline solution, but it is not decomposed here. Since it is decomposed by the ozone decomposing device and released as ozone decomposing exhaust gas, all ozone can be easily removed from the ozone water, and the oxygen or nitrogen gas generated by the high-efficiency mixing device can be used as ozone. By introducing the ozone-containing gas stripped by mixing in water into the ozone decomposing apparatus gas, most ozone can be treated.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an ozone water deozone system according to a first embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of an ozone water deozone system according to a second embodiment of the present invention.

3 is a block diagram of the static mixing apparatus of FIG.
The figure (A) is a cross-sectional view of the static mixing device, the figure (B) is a perspective view of the upper part of the container body, and the figure (C) is a perspective view of the cross plate.

4 is a schematic configuration diagram of a dissolved oxygen removal system using the static mixing device of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Sealed ozone water storage tank, 2 ... Gas-liquid separation tank, 3 ... Pump, 4 ... Ejector, 5 ... Valve, 6 ... Gas pipe, 7 ... Recycle line, 8 ... Ozone decomposition apparatus, 9 ... Level meter, 10
... Piping, 11 ... Exhaust gas pipe, 12 ... Closed ozone water storage tank, 13 ... Pump, 14 ... Gas-liquid confluent pipe, 15 ... Static mixing device, 16 ... Bubble separation cyclone, 17 ... Regulator, 18 ... Valve, 19 … Feedback line, 2
0 ... Water distribution pipe, 21 ... Discharge pipe, 22 ... Mixing container body, 23 ... Filter, 24 ... Baffle plate, 25 ... Cross plate, 25a ... Partition plate, 26 ... Lid, 27 ... Outflow port,
28, 29 ... Tube.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) B01F 5/04 B01F 5/04 5/06 5/06 C02F 1/38 C02F 1/38 F term (reference) 4D011 AA15 AD03 4D037 AA11 AB11 BA23 BA28 BB05 CA14 4G035 AB04 AC23 AC26 AE13

Claims (3)

[Claims] 1. A closed type ozone water storage tank containing a gas-liquid separation tank containing an alkaline liquid and ozone water, an ejector for pushing the ozone water in the ozone water storage tank, and fluorine for the ejector. A gas supply device for supplying a gas-mixed ozone stripping gas, a recycle line for recycling a fluid in which ozone water and a fluorine gas-mixed ozone stripping gas are mixed by the ejector to the gas-liquid separation tank, and the gas-liquid separation An ozone water deozone system comprising an ozone decomposing device for introducing an ozone-containing gas generated in a tank and an exhaust gas pipe for discharging ozone decomposing exhaust gas decomposed by the ozone decomposing device. 2. A closed type ozone water storage tank for storing waste water containing ozone, and a gas-liquid merging pipe for pressurizing the ozone water in the ozone water storage tank to join with pressurized air to form a gas-liquid merging fluid. , A static mixing device that mixes the fluid that flows out from the gas-liquid confluence pipe, a bubble separation cyclone that flows in the fluid containing the micro bubbles generated by the mixing device, and ozone water that is discharged from the bubble separation cyclone The ozone water deozone system is provided with a feedback line for feeding back to the closed ozone water storage tank again, and an ozone decomposing device for introducing the ozone-containing gas generated in the closed ozone water storage tank. . 3. The ozone water deozone system according to claim 2, wherein the stationary mixing device is provided with a hollow fiber membrane inside a cylindrical filter having a columnar filter in the center or a plurality of holes on the surface. A filter is arranged, a pipe for supplying pressurized water and air is attached to the upper part, and a mixing container body having an outlet at the lower part, and a flow path becomes narrower at the lower part of the filter as it goes downstream. An ozone water deozone system having a plurality of baffles arranged.