JP2003038933A - Discharge plasma generating apparatus - Google Patents
Discharge plasma generating apparatusInfo
- Publication number
- JP2003038933A JP2003038933A JP2001260483A JP2001260483A JP2003038933A JP 2003038933 A JP2003038933 A JP 2003038933A JP 2001260483 A JP2001260483 A JP 2001260483A JP 2001260483 A JP2001260483 A JP 2001260483A JP 2003038933 A JP2003038933 A JP 2003038933A
- Authority
- JP
- Japan
- Prior art keywords
- discharge plasma
- electrode
- oil
- high voltage
- ground electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015556 catabolic process Effects 0.000 claims description 4
- 239000003921 oil Substances 0.000 abstract description 16
- 239000007789 gas Substances 0.000 abstract description 11
- 239000004071 soot Substances 0.000 abstract description 7
- 239000010705 motor oil Substances 0.000 abstract description 3
- 229920002545 silicone oil Polymers 0.000 abstract description 3
- 239000012855 volatile organic compound Substances 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 1
- 239000002912 waste gas Substances 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 150000002430 hydrocarbons Chemical class 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012717 electrostatic precipitator Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Exhaust Gas After Treatment (AREA)
- Processes For Solid Components From Exhaust (AREA)
- Treating Waste Gases (AREA)
- Electrostatic Separation (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、燃焼機関や燃焼
装置で発生した煤煙、揮発性有機化合物などの有害ガス
の処理に用いる放電プラズマ発生装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge plasma generator used for treating harmful gases such as soot and volatile organic compounds generated in a combustion engine or a combustion device.
【０００２】[0002]
【従来の技術】従来、放電プラズマ発生装置の高電圧電
極と接地電極の間にセラミックスあるいはガラスなどの
絶縁物を挟むことで、火花破壊を抑制し、安定した放電
プラズマを形成している。2. Description of the Related Art Conventionally, by sandwiching an insulator such as ceramics or glass between a high voltage electrode and a ground electrode of a discharge plasma generator, spark destruction is suppressed and stable discharge plasma is formed.
【０００３】放電プラズマは、燃焼排ガス中のＮＯの酸
化に有効であり、酸化を促進するためにエチレン等の低
級炭化水素が添加剤として利用されている。The discharge plasma is effective for the oxidation of NO in combustion exhaust gas, and lower hydrocarbons such as ethylene are used as an additive to accelerate the oxidation.
【０００４】また、電気集塵は、コロナ放電プラズマに
より、浮遊粒子状物質（以下ＳＰＭ）を荷電し、電気力
でガスから高効率で分離している。In the electrostatic precipitator, suspended particulate matter (hereinafter referred to as SPM) is charged by corona discharge plasma and separated from gas with high efficiency by electric force.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、安定な
放電プラズマを発生するために用いられる絶縁物は高価
であり、また、機械的強度など、長期の使用に対する耐
久性にも問題がある。However, the insulator used for generating stable discharge plasma is expensive, and there is a problem in durability such as mechanical strength for long-term use.
【０００６】また、すすや水分の多い排ガスを浄化する
にあたり、これらがプラズマ発生用の高電圧導入部に付
着することで、絶縁破壊が発生し、安定に電圧が印加で
きなくなる。また、ＮＯ酸化にエチレン等の低級炭化水
素を用いるためには、これを容器に保管する付帯設備が
必要である。Further, in purifying exhaust gas having a large amount of soot and moisture, these adhere to the high voltage introducing portion for plasma generation, causing dielectric breakdown and making it impossible to stably apply voltage. Further, in order to use a lower hydrocarbon such as ethylene for NO oxidation, an auxiliary facility for storing it in a container is required.
【０００７】すすは、電気抵抗率が小さいため、電気集
塵装置では異常再飛散が発生する。これは、一旦、接地
電極に捕集した粒子が再度飛び出す現象であり、すすの
電気集塵を困難にしている。Since soot has a low electrical resistivity, abnormal re-scattering occurs in the electrostatic precipitator. This is a phenomenon in which particles once trapped in the ground electrode jump out again, which makes it difficult to collect soot particles.
【０００８】[0008]
【課題を解決するための手段】この発明は、上記の課題
を解決するものであり、放電プラズマ発生装置におい
て、高電圧電極と接地電極の一方または両方の表面にエ
ンジンオイルやシリコーン油などの油膜を形成し、これ
を絶縁膜とすることで、安定した放電場を形成するこ
と、を特徴とする。SUMMARY OF THE INVENTION The present invention is to solve the above problems, and in an electric discharge plasma generator, an oil film such as engine oil or silicone oil is formed on the surface of one or both of the high voltage electrode and the ground electrode. Is formed, and a stable discharge field is formed by using this as an insulating film.
【０００９】また、高電圧導入部を油で洗浄し、絶縁耐
力を保持すること、を特徴とする。Further, the high voltage introducing portion is washed with oil to maintain dielectric strength.
【００１０】接地電極表面に油膜を形成することで異常
再飛散を抑制すること、を特徴とする。It is characterized by forming an oil film on the surface of the ground electrode to suppress abnormal re-scattering.
【００１１】また、ＮＯ酸化促進のための添加剤とし
て、蒸気圧の高い軽油やガソリン等のを上記エンジンオ
イルやシリコーン油に混入して用いること、を特徴とす
る。Further, as an additive for accelerating NO oxidation, light oil or gasoline having a high vapor pressure is mixed with the engine oil or silicone oil for use.
【００１２】[0012]
【発明の実施の形態】次に、この発明の実施の形態を図
面にしたがって説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.
【００１３】図１は、この発明による放電プラズマ発生
装置の一例を示す。放電プラズマ発生装置は、高電圧電
極１１、接地電極１２、フィルター１３、電極支持部１
４、絶縁油１５とから成る。FIG. 1 shows an example of a discharge plasma generator according to the present invention. The discharge plasma generator includes a high voltage electrode 11, a ground electrode 12, a filter 13, and an electrode supporting portion 1.
4 and insulating oil 15.
【００１４】高電圧電極１１は、例えば、金属製ブラシ
である。接地電極１２は、例えば、金属製パイプであ
る。フィルターは、不燃性フィルターである。この他、
高電圧電極としては、ワイヤー、角線、刃形など、不平
等電界を形成できる形状のものが使用できる。接地電極
は、円筒の他、平板など滑らかな形状のものが使用でき
る。The high voltage electrode 11 is, for example, a metal brush. The ground electrode 12 is, for example, a metal pipe. The filter is a nonflammable filter. Besides this,
As the high voltage electrode, a wire, a square wire, a blade shape, or the like having a shape capable of forming an uneven electric field can be used. The ground electrode may have a flat shape such as a flat plate as well as a cylindrical shape.
【００１５】接地電極１２内面は、滑らかでも良いが、
油膜をより均一に形成するために、ガラスクロスなど油
を吸収する層を設けてもよい。The inner surface of the ground electrode 12 may be smooth,
In order to form the oil film more uniformly, a layer that absorbs oil such as glass cloth may be provided.
【００１６】絶縁油１５は、ポンプ１６により放電プラ
ズマ発生装置に循環される。The insulating oil 15 is circulated to the discharge plasma generator by the pump 16.
【００１７】高電圧パルス電源１７は、高電圧電極１１
と接地電極１２の間にパルス電圧を印加していることに
より、パルスストリーマ放電を発生させ、放電プラズマ
場１８をつくっている。この他、交番電圧、直流電圧を
使用してもよい。The high-voltage pulse power supply 17 includes the high-voltage electrode 11
By applying a pulse voltage between the ground electrode 12 and the ground electrode 12, a pulse streamer discharge is generated and a discharge plasma field 18 is created. Alternatively, an alternating voltage or a DC voltage may be used.
【００１８】ＮＯｘ、ＳＰＭなどを含んだガスは、放電
プラズマ発生装置に導入される。The gas containing NOx, SPM, etc. is introduced into the discharge plasma generator.
【００１９】放電プラズマ場１８内のＳＰＭは、電気集
塵効果により接地電極１２内壁に回収される。ディーゼ
ル排ガスをこの放電プラズマ発生装置で処理したときの
集塵効果を図２に示す。処理ガスをフィルターで濾過し
た比較である。The SPM in the discharge plasma field 18 is collected on the inner wall of the ground electrode 12 due to the electric dust collection effect. FIG. 2 shows the dust collection effect when diesel exhaust gas is treated by this discharge plasma generator. It is the comparison which processed gas was filtered with the filter.
【００２０】また、室内空気をこの放電プラズマ装置で
処理したとき、含まれる微粒子の測定結果を図３に示
す。高電圧印加により良好なＳＰＭ除去が可能である。Further, FIG. 3 shows the measurement results of fine particles contained when the room air was treated by this discharge plasma apparatus. Good SPM removal is possible by applying a high voltage.
【００２１】放電場１８内のＮＯを含んだ空気は、放電
プラズマによりＮＯが酸化される。The NO-containing air in the discharge field 18 is oxidized by discharge plasma.
【００２２】また、軽油を添加剤として用いることで、
ＮＯ酸化反応を促進できる。その結果を図４に示す。Further, by using light oil as an additive,
The NO oxidation reaction can be promoted. The result is shown in FIG.
【００２３】[0023]
【発明の効果】請求項１に係る発明によれば、電極間に
高価で、耐久性にも問題のある絶縁物を挟まずに、安定
した放電プラズマが得られる。また、低電気抵抗率であ
るすすなどの粒子の異常再飛散を抑制し、高効率で集塵
することが可能となる。According to the first aspect of the present invention, stable discharge plasma can be obtained without sandwiching an expensive insulator having a problem with durability between electrodes. In addition, it is possible to suppress abnormal re-scattering of particles such as soot having a low electric resistivity and to collect dust with high efficiency.
【００２４】また、放電プラズマによりＮＯを酸化で
き、ＮＯとＳＰＭの同時除去ができる。Further, NO can be oxidized by the discharge plasma, and NO and SPM can be removed simultaneously.
【００２５】請求項２に係る発明によれば、電極支持部
に付着したＳＰＭによる絶縁破壊を防ぐことができ、長
時間の安定した排ガス処理が可能である。According to the second aspect of the present invention, it is possible to prevent the dielectric breakdown due to the SPM attached to the electrode supporting portion, and it is possible to perform a stable exhaust gas treatment for a long time.
【００２６】請求項３に係る発明によれば、軽油等を放
電場で低級炭化水素へ軽質化することにより、ＮＯ酸化
反応の促進および消費電力の削減に有効な添加剤である
とされている低級炭化水素を供給でき、添加剤のコスト
を低減できる。According to the third aspect of the invention, it is said that by lightening light oil or the like to lower hydrocarbons in the discharge field, it is an additive effective for promoting the NO oxidation reaction and reducing power consumption. Lower hydrocarbons can be supplied, and the cost of additives can be reduced.
【図１】この発明によるプラズマ発生装置の概要構成図
である。FIG. 1 is a schematic configuration diagram of a plasma generator according to the present invention.
【図２】ディーゼル排ガス中のＳＰＭ除去を示す図。FIG. 2 is a diagram showing SPM removal in diesel exhaust gas.
【図３】室内空気中の微粒子除去を示すグラフ。FIG. 3 is a graph showing removal of fine particles from indoor air.
【図４】ディーゼル排ガス中のＮＯ除去を示すグラフ。FIG. 4 is a graph showing NO removal in diesel exhaust gas.
１１ 高電圧電極 １２ 接地電極 １３ フィルター １４ 電極支持部 １５ 絶縁油 １６ ポンプ １７ 高電圧パルス電源 １８ 放電プラズマ場 11 High voltage electrode 12 Ground electrode 13 filters 14 Electrode support 15 insulating oil 16 pumps 17 High voltage pulse power supply 18 discharge plasma field
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｆ０１Ｎ 3/02 ３０１ Ｈ０５Ｈ 1/24 3/08 Ｂ０１Ｄ 53/34 １２９Ｃ Ｈ０５Ｈ 1/24 (72)発明者 松井 良彦 愛知県豊橋市芦原町芦原44−１ (72)発明者 橋本 昌幸 愛知県豊橋市天伯町字美吉11−１ Ｆターム(参考） 3G090 AA06 BA08 3G091 AA18 AB14 BA07 BA15 CA15 FB10 4D002 AA12 AA40 AC10 BA05 BA07 BA14 CA20 HA02 4D054 AA02 AA03 BA01 BB10 BC24 4G075 AA03 AA37 BA01 BA06 BD12 CA15 CA57 DA02 EA01 EB01 EB41 EC06 EC13 EC21 EE07 EE12 FC02 FC15 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) F01N 3/02 301 H05H 1/24 3/08 B01D 53/34 129C H05H 1/24 (72) Inventor Matsui Yoshihiko 44-1 Ashihara, Ashihara-cho, Toyohashi-shi, Aichi (72) Inventor Masayuki Hashimoto 11-1 Miyoshi, Tenhaku-cho, Toyohashi-shi, Aichi F-term (reference) 3G090 AA06 BA08 3G091 AA18 AB14 BA07 BA15 CA15 FB10 4D002 AA12 AA40 AC10 BA05 BA07 BA14 CA20 HA02 4D054 AA02 AA03 BA01 BB10 BC24 4G075 AA03 AA37 BA01 BA06 BD12 CA15 CA57 DA02 EA01 EB01 EB41 EC06 EC13 EC21 EE07 EE12 FC02 FC15
Claims (3)
ることで、電極間の絶縁破壊を防ぐことを特徴とする、
放電プラズマ発生装置。1. A dielectric breakdown between electrodes is prevented by forming an insulating oil film on the surfaces of the electrodes facing each other.
Discharge plasma generator.
に接触する表面を洗浄することで、電極支持部の絶縁破
壊を防止することを特徴とする、請求項１に記載の放電
プラズマ発生装置。2. The discharge plasma according to claim 1, wherein the insulating oil is used to clean the surface of the electrode supporting portion that comes into contact with the gas to prevent dielectric breakdown of the electrode supporting portion. Generator.
汚染ガス処理を促進することを特徴とする、請求項１ま
たは２に記載の放電プラズマ発生装置。3. By mixing light oil or the like into the insulating oil,
The discharge plasma generator according to claim 1 or 2, which promotes treatment of polluted gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001260483A JP2003038933A (en) | 2001-07-26 | 2001-07-26 | Discharge plasma generating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001260483A JP2003038933A (en) | 2001-07-26 | 2001-07-26 | Discharge plasma generating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003038933A true JP2003038933A (en) | 2003-02-12 |
Family
ID=19087676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001260483A Pending JP2003038933A (en) | 2001-07-26 | 2001-07-26 | Discharge plasma generating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003038933A (en) |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009511247A (en) * | 2005-10-10 | 2009-03-19 | コリア インスティテュート オブ マシネリー アンド マテリアルズ | Plasma reaction device, plasma reaction method using the same, plasma reaction method of hardly decomposable gas, and NOx reduction device of occlusion catalyst type |
| US8314749B2 (en) | 2004-08-18 | 2012-11-20 | Ruckus Wireless, Inc. | Dual band dual polarization antenna array |
| US8583183B2 (en) | 2004-08-18 | 2013-11-12 | Ruckus Wireless, Inc. | Transmission and reception parameter control |
| US8634402B2 (en) | 2004-11-05 | 2014-01-21 | Ruckus Wireless, Inc. | Distributed access point for IP based communications |
| US8780760B2 (en) | 2008-01-11 | 2014-07-15 | Ruckus Wireless, Inc. | Determining associations in a mesh network |
| US8824357B2 (en) | 2004-11-05 | 2014-09-02 | Ruckus Wireless, Inc. | Throughput enhancement by acknowledgment suppression |
| KR20150019642A (en) * | 2013-08-14 | 2015-02-25 | 주식회사 엘지화학 | Apparatus and method for producing polysilicon using streamer discharge |
| US9019886B2 (en) | 2004-11-05 | 2015-04-28 | Ruckus Wireless, Inc. | Unicast to multicast conversion |
| US9071942B2 (en) | 2004-11-05 | 2015-06-30 | Ruckus Wireless, Inc. | MAC based mapping in IP based communications |
| US9077071B2 (en) | 2004-08-18 | 2015-07-07 | Ruckus Wireless, Inc. | Antenna with polarization diversity |
| US9271327B2 (en) | 2007-07-28 | 2016-02-23 | Ruckus Wireless, Inc. | Wireless network throughput enhancement through channel aware scheduling |
| US9419344B2 (en) | 2009-05-12 | 2016-08-16 | Ruckus Wireless, Inc. | Mountable antenna elements for dual band antenna |
| US9570799B2 (en) | 2012-09-07 | 2017-02-14 | Ruckus Wireless, Inc. | Multiband monopole antenna apparatus with ground plane aperture |
| CN106582222A (en) * | 2017-02-14 | 2017-04-26 | 太仓联洲机械设备有限公司 | Low-temperature plasma filter |
| KR101755764B1 (en) * | 2014-06-13 | 2017-07-07 | 주식회사 엘지화학 | Apparatus for producing polysilicon and preparation of polysilicon using same |
| US9780813B2 (en) | 2006-08-18 | 2017-10-03 | Ruckus Wireless, Inc. | Closed-loop automatic channel selection |
| US9999087B2 (en) | 2009-11-16 | 2018-06-12 | Ruckus Wireless, Inc. | Determining role assignment in a hybrid mesh network |
| CN108514789A (en) * | 2018-04-28 | 2018-09-11 | 江苏灵氟隆环境工程有限公司 | A kind of plasma fume purifier of fume convenient for cleaning |
| US10230161B2 (en) | 2013-03-15 | 2019-03-12 | Arris Enterprises Llc | Low-band reflector for dual band directional antenna |
| US10863752B2 (en) | 2015-10-29 | 2020-12-15 | National Institute of Technology | Plasma sterilization device |
-
2001
- 2001-07-26 JP JP2001260483A patent/JP2003038933A/en active Pending
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8860629B2 (en) | 2004-08-18 | 2014-10-14 | Ruckus Wireless, Inc. | Dual band dual polarization antenna array |
| US8314749B2 (en) | 2004-08-18 | 2012-11-20 | Ruckus Wireless, Inc. | Dual band dual polarization antenna array |
| US8583183B2 (en) | 2004-08-18 | 2013-11-12 | Ruckus Wireless, Inc. | Transmission and reception parameter control |
| US9484638B2 (en) | 2004-08-18 | 2016-11-01 | Ruckus Wireless, Inc. | Transmission and reception parameter control |
| US9077071B2 (en) | 2004-08-18 | 2015-07-07 | Ruckus Wireless, Inc. | Antenna with polarization diversity |
| US10181655B2 (en) | 2004-08-18 | 2019-01-15 | Arris Enterprises Llc | Antenna with polarization diversity |
| US8634402B2 (en) | 2004-11-05 | 2014-01-21 | Ruckus Wireless, Inc. | Distributed access point for IP based communications |
| US8824357B2 (en) | 2004-11-05 | 2014-09-02 | Ruckus Wireless, Inc. | Throughput enhancement by acknowledgment suppression |
| US9019886B2 (en) | 2004-11-05 | 2015-04-28 | Ruckus Wireless, Inc. | Unicast to multicast conversion |
| US9066152B2 (en) | 2004-11-05 | 2015-06-23 | Ruckus Wireless, Inc. | Distributed access point for IP based communications |
| US9071942B2 (en) | 2004-11-05 | 2015-06-30 | Ruckus Wireless, Inc. | MAC based mapping in IP based communications |
| US9661475B2 (en) | 2004-11-05 | 2017-05-23 | Ruckus Wireless, Inc. | Distributed access point for IP based communications |
| US9794758B2 (en) | 2004-11-05 | 2017-10-17 | Ruckus Wireless, Inc. | Increasing reliable data throughput in a wireless network |
| JP2009511247A (en) * | 2005-10-10 | 2009-03-19 | コリア インスティテュート オブ マシネリー アンド マテリアルズ | Plasma reaction device, plasma reaction method using the same, plasma reaction method of hardly decomposable gas, and NOx reduction device of occlusion catalyst type |
| US9780813B2 (en) | 2006-08-18 | 2017-10-03 | Ruckus Wireless, Inc. | Closed-loop automatic channel selection |
| US9271327B2 (en) | 2007-07-28 | 2016-02-23 | Ruckus Wireless, Inc. | Wireless network throughput enhancement through channel aware scheduling |
| US8780760B2 (en) | 2008-01-11 | 2014-07-15 | Ruckus Wireless, Inc. | Determining associations in a mesh network |
| US9419344B2 (en) | 2009-05-12 | 2016-08-16 | Ruckus Wireless, Inc. | Mountable antenna elements for dual band antenna |
| US10224621B2 (en) | 2009-05-12 | 2019-03-05 | Arris Enterprises Llc | Mountable antenna elements for dual band antenna |
| US9999087B2 (en) | 2009-11-16 | 2018-06-12 | Ruckus Wireless, Inc. | Determining role assignment in a hybrid mesh network |
| US9570799B2 (en) | 2012-09-07 | 2017-02-14 | Ruckus Wireless, Inc. | Multiband monopole antenna apparatus with ground plane aperture |
| US10230161B2 (en) | 2013-03-15 | 2019-03-12 | Arris Enterprises Llc | Low-band reflector for dual band directional antenna |
| KR101640286B1 (en) * | 2013-08-14 | 2016-07-15 | 주식회사 엘지화학 | Apparatus and method for producing polysilicon using streamer discharge |
| KR20150019642A (en) * | 2013-08-14 | 2015-02-25 | 주식회사 엘지화학 | Apparatus and method for producing polysilicon using streamer discharge |
| KR101755764B1 (en) * | 2014-06-13 | 2017-07-07 | 주식회사 엘지화학 | Apparatus for producing polysilicon and preparation of polysilicon using same |
| US10863752B2 (en) | 2015-10-29 | 2020-12-15 | National Institute of Technology | Plasma sterilization device |
| CN106582222A (en) * | 2017-02-14 | 2017-04-26 | 太仓联洲机械设备有限公司 | Low-temperature plasma filter |
| CN108514789A (en) * | 2018-04-28 | 2018-09-11 | 江苏灵氟隆环境工程有限公司 | A kind of plasma fume purifier of fume convenient for cleaning |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003038933A (en) | Discharge plasma generating apparatus | |
| CN100419226C (en) | Gas purification device | |
| DE60034350D1 (en) | DEVICE FOR TREATING COMBUSTION GASES FROM AN INTERNAL COMBUSTION ENGINE | |
| EP2131017B1 (en) | Exhaust gas cleaning device | |
| JP4016134B2 (en) | Gas processing equipment | |
| JP2002095996A (en) | Air purification equipment | |
| WO2014174609A1 (en) | Exhaust gas treatment device and method for controlling same | |
| WO2006132103A1 (en) | Exhaust emission control method and exhaust emission control system | |
| JP2003181278A (en) | Deodorizing device | |
| JPH05332128A (en) | Exhaust emission control device | |
| JPH1193644A (en) | Corona generating device | |
| JP2013087696A (en) | Exhaust gas processing device and control method thereof | |
| JP2002213228A (en) | Exhaust emission control device for internal combustion engine | |
| JPH067904B2 (en) | Exhaust purification device | |
| JP2002346334A (en) | Plasma gas purifier | |
| JP2003301711A (en) | Exhaust gas purification device | |
| JP2005106022A (en) | Exhaust gas purification device | |
| US20050199408A1 (en) | Arcing electron stream apparatus and method | |
| JP2006026483A (en) | Exhaust gas purification device | |
| JP2002336645A (en) | Plasma catalytic reactor, air purification device, nitrogen oxide purification device, and combustion exhaust gas purification device | |
| RU40013U1 (en) | GAS CLEANING UNIT AND GAS DISCHARGE UNIT FOR GAS CLEANING | |
| RU91009U1 (en) | GAS DISCHARGE UNIT FOR GAS CLEANING | |
| JP4269768B2 (en) | PM purification reactor | |
| JP2003236335A (en) | Exhaust gas treatment apparatus and exhaust gas treatment method | |
| KR100339102B1 (en) | Apparatus for purifying waste-gas for diesel engine |