JP2003029158A - Illuminating system and microscope using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an illuminating system which enables obtaining of a bright microscopic image at all times to objective lenses from low magnification to high magnification and an inexpensive microscope, using the same. SOLUTION: This illuminating system has a plurality of light sources 1a, 1b and 1c, photoconductive member 2a, 2b and 2c which have incident surfaces facing each of a plurality of the light sources and an optical fiber bundle 13, which aligns light rays from a plurality of the light sources and emits light by bundling these photoconductive members.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an illuminating device used for positioning, measuring and observing a fine structure of an observation object, and a microscope using the same.

[0002]

2. Description of the Related Art Conventionally, since an illuminating device using a halogen light source or a mercury light source is directly connected to a microscope main body, heat from the light source is directly transferred to the microscope main body. Therefore, the material of the microscope main body is thermally deformed, and there is a problem that the sample surface is out of focus during long-term observation. Also,
It was difficult to make the brightness unevenness and the brightness distribution uniform with an ordinary light source. Conventionally, in order to improve this, a microscope has been proposed in which a light source is separated from the main body of the microscope and a uniform illumination light is applied to a sample by using an optical fiber (see Japanese Patent Laid-Open No. 54-300061).

FIG. 5 shows an example of the configuration of a microscope apparatus using this type of optical fiber. In this microscope apparatus, a condenser lens 3, a lens 4 and a polarization beam splitter 5 are arranged on the optical path of light emitted from a light source 1 such as a halogen light source and guided through an optical fiber 2, and a polarization beam splitter 5 The objective lens 6a is disposed on the reflection optical path of the. When an objective lens having a large magnification is used, the objective lens 6b can be arranged on the optical path by a revolver (not shown).
The light reflected from the sample 7 is transmitted through the polarization beam splitter 5 through the objective lens 6a or 6b, and the imaging lens 8
An image is formed on the image pickup surface of the CCD camera 9 via. C
A monitor 10 is connected to the image output terminal of the CD camera 9 and displays an image. Further, a prism P is arranged between the polarization beam splitter 5 and the imaging lens 8 so that the sample image can be visually observed through the eyepiece lens 11. In this configuration, the optical fiber 2 is used to make the luminance distribution of the illumination light uniform, but the diffuser plate 12 may be provided near the condenser lens 3.

[0004]

By the way, in recent years, the number of samples, that is, observation and measurement objects, has become low-reflection and fine, and the microscope main body has various characteristics. Various devices have come to be mounted in order to enable easy observation and measurement. In this way, when various devices are mounted, various optical elements are accordingly inserted between the light source and the objective lens or between the objective lens and the eyepiece lens,
As a result, the amount of illumination light from the light source often becomes insufficient. Therefore, when a CCD camera is used to capture an image, the amount of illumination light from the light source is insufficient, so that a clear digital image cannot be obtained and sufficient image information cannot be obtained.

On the other hand, a high-magnification objective lens is often used for observing a fine structure. However, since a high-magnification lens has a small pupil, the amount of light is insufficient even when the light source is at maximum brightness. I have something to do. Conventionally, in order to solve the insufficient light amount, there is an illumination device using a laser light source or the like as an illumination device with high illumination intensity, but this is expensive or the entire microscope device becomes large due to a long optical path length. There was a problem that it got lost.

Conventionally, as an illuminating device for a microscope, there has been used an illuminating device for a light source in which light from one light source is branched into two by an optical fiber so that either or both epi-illumination and transmitted illumination can be performed on a sample. Yes (Japanese Patent Laid-Open No. 5-3412)
No. 00). In this illuminating device, one light source has a sufficient illumination light amount for a low-magnification objective lens, but the illumination light amount becomes insufficient when a high-magnification objective lens is used. The reason will be described below. Generally, the brightness L of the image plane formed by the objective lens is proportional to the solid angle NA ′ of the light flux reaching the objective lens and the brightness of the light source. That is, when the same light source is used, NA ′ = NA / m (2) where L (NA ′) ² (1) is the magnification of the objective lens and NA is the numerical aperture of the objective lens. By design, the numerical aperture of a 10 × objective lens is about 0.3. Therefore, from the above equations (1) and (2), NA ′ = 0.03 and (NA ′) ² = 0.0009. Become.
On the other hand, with a 100 × objective lens, NA = 0.95 is the limit, so from equations (1) and (2) above, (NA ′) ² =
It becomes 0.00009025.

Now, assuming that NA ′ of the 10 × objective lens is 1, the brightness of the image of the 100 × objective lens is about 0.1, which means that it is very dark. Therefore, when using a high-magnification objective lens, the voltage of the light source is increased before use. However, increasing the voltage of the light source lamp causes a problem that the life of the filament of the light source lamp is shortened. As is clear from the table shown in FIG. 6, the life of a halogen light source lamp is generally said to be the ratio of the applied voltage to the rated voltage to the power of −10 to −14. The life of the light source lamp at the rated voltage V ₀ is T ₀ , and the applied voltage V
When the life at time is T, (T / T ₀ ) = (V / V ₀ ) ^-10 to ^-14 (3). For example, if a voltage of 110% of the rated voltage is applied to the light source lamp, from the above formula (3), (1.1) ^-10 ~
^-14 = 0.38 to 0.26, about 1/3 of the normal life
End of life.

Further, depending on the observation method, the transmittance is low.
ND filters, polarization filters, prisms, etc. may be installed on the optical path, but in that case, the amount of light incident on the observation measurement object will drop, and when capturing images with a CCD camera, etc., dark images will appear. Will be imaged. Therefore, in order to capture a bright image, the voltage applied to the light source lamp is further increased, but in that case, the temperature of the filament of the light source lamp rises and the life of the power lamp is shortened. Occurs.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an illuminating device capable of always obtaining a bright microscope image for low-to-high magnification objective lenses. And to provide an inexpensive microscope using the same.

[0010]

In order to achieve the above object, an illuminating device according to the present invention comprises a plurality of light sources and a light guide member having an incident surface facing each of the plurality of light sources. In addition, it is characterized in that it has an emission surface through which light from the plurality of light sources is combined and emitted. According to the present invention, the lighting device includes a plurality of the light guide members, and has a mechanism for guiding the light from the light source to any one of the plurality of light guide members. A microscope according to the present invention is an illumination device including a plurality of light sources and a light guide member having an entrance surface facing each of the plurality of light sources, and emits light from the plurality of light sources together. An illumination device having an exit surface is provided. Thereby, the illumination intensity of the light source can be increased according to the magnification of the objective lens, and a clear microscope image can always be obtained. Further, since the voltage applied to the filament of each light source lamp can be lowered, the life of the filament can be extended, and as a result, an inexpensive microscope can be obtained.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of the present invention will be described based on illustrated examples. FIG. 1 shows a basic configuration of a microscope including a first embodiment of an illumination device according to the present invention. In the figure, members that are substantially the same as those described in the related art are denoted by the same reference numerals, and detailed description thereof is omitted. In this embodiment, the light sources 1a, 1b and 1c, such as halogen light sources, are optical fibers 2a and 2b, respectively.
And 2c, and these optical fibers 2a,
The exit ends of 2b and 2c are bundled together as shown in FIG. 2 to form an optical fiber bundle 13 in which the fiber ends are randomly arranged. A condenser lens 3, a lens 4, and a polarization beam splitter 5 are sequentially arranged on the optical path of the optical fiber bundle 13, and an objective lens 6a or 6b is provided on the reflection optical path of the polarization beam splitter 5.
The sample 7 is arranged via the. A CCD camera 9 is arranged on the transmission optical path of the polarization beam splitter 5 via an imaging lens 8. The CCD camera 9 has a CC
A monitor 10 for observing an image captured by the D camera 9 is connected.

The optical fiber bundle 13 is made up of nearly 1 million optical fibers including the optical fibers 2a, 2b and 2c, and these 1 million optical fibers should be bonded in a highly random arrangement. Is formed as a single optical fiber bundle. That is, it is possible to make the luminance distribution of the light emitted from the optical fiber bundle 13 uniform.

Since this embodiment is constructed as described above, the light emitted from the light sources 1a, 1b and 1c passes through the optical fibers 2a, 2b and 2c, respectively, and the optical fiber bundle 13 is formed.
Becomes one luminous flux. The light emitted from the optical fiber bundle 13 passes through the condenser lens 3, becomes parallel light at the lens 4, and enters the polarization beam splitter 5. The light reflected by the polarization beam splitter 5 is the objective lens 6a.
Alternatively, it is imaged by 6b and irradiated on the sample 7. Here, when the objective lens 6a is a low-magnification objective lens, in order to observe and measure the fine structure of the sample 7, it is sufficient to switch to the high-magnification objective lens 6b by a revolver (not shown). The light reflected from the sample 7 passes through the objective lens 6a (or 6b), the polarization beam splitter 5, and
A sample image is formed on the imaging surface of the CCD camera 9 via the imaging lens 8.

For visual observation, a prism P may be inserted on the transmission optical path of the polarization beam splitter 5 to guide the reflected light from the sample to the eyepiece lens 11. Further, in order to obtain a predetermined color temperature, a color temperature conversion filter is attached to the light incident side from each light source 1a, 1b and 1c to each optical fiber 2a, 2b and 2c so that the voltage applied to each light source lamp is substantially You may use the same control system.

FIG. 3 shows the basic structure of a microscope equipped with a second embodiment of the illumination device according to the present invention. In the figure, members that are substantially the same as those described in the first embodiment are designated by the same reference numerals, and detailed description thereof is omitted.
This embodiment is different from the first embodiment in that it is configured to be capable of performing transillumination as well as epi-illumination. That is, in this embodiment, the light sources 1a, 1b and 1c are the disk 1 rotatably installed in the cubic lamp house 14.
5 is arranged on the upper surface of the lamp house 14 so that it can be positioned so as to face two adjacent side walls of the lamp house 14.
In addition, at positions adjacent to the two side walls in the lamp house 14, the light sources 1a, 1b and 1c are arranged so as to be aligned with the optical axes of the lights emitted from the respective light sources when facing any of the side walls. Installed condenser lenses 16a, 16b, 16c;
17a, 17b, 17c are arranged. The incident ends of the optical fibers 2a, 2b and 2c described in the first embodiment are connected to the side walls aligned with the condenser lenses 16a, 16b and 16c, respectively.

The optical fiber bundle 13 formed by bundling the respective output ends of the optical fibers 2a, 2b and 2c is a microscope main body 18.
Attached to the microscope main body 18 along its optical axis
The condenser lens 3, the lens 4 and the polarization beam splitter 5 are arranged in the same manner as described in the first embodiment, and the eyepiece lens 11, the imaging lens 8, the CCD camera 9 and the revolver 19 are used. Objective lenses 6a and 6b are attached respectively, and a monitor 10 is connected to the CCD camera 13. On the other hand, condenser lenses 17a and 17b
And the side wall aligned with 17c has an optical fiber 20
The respective incident ends of a, 20b and 20c are respectively connected,
An optical fiber bundle 21 formed by bundling the respective emitting ends is attached to the microscope body 18, and a condenser lens 22, a lens 23 and a mirror 24 are arranged in the microscope body 18 along the optical axis thereof.

The mirror 24 is arranged at such a position that the optical axis of the light beam emitted from the optical fiber bundle 21 coincides with the optical axis of the light beam emitted from the optical fiber bundle 13 and reflected by the polarization beam splitter 5. The sample 7 placed on 25 can be transmitted and illuminated by the light emitted from the optical fiber bundle 21. A light shielding plate 15a is provided on the disk 15 to prevent the light of the light source 1a from entering the condenser lens 16b when the disk rotates to switch from epi-illumination to transmitted illumination. .

When epi-illumination is performed in the second embodiment, the disc 15 may be set at the position shown in FIG.
That is, the light from the light sources 1a, 1b and 1c in the lamp house 14 passes through the optical fibers 2a, 2b and 2c via the condenser lenses 16a, 16b and 16c and is emitted from the emission end of the optical fiber bundle 13. After that, epi-illumination is performed via the same route as described in the first embodiment. In this case, the light shielding plate 15a shields the light from each light source so as not to go to the adjacent optical fiber, and particularly blocks the light from the light source 1c so as not to go to the condenser lens 17c.

Next, when switching from this state to transmitted illumination, the disk 15 is rotated 90 ° clockwise by a motor drive or manual operation so that the light sources 1a, 1b and 1c are condensed by the condenser lenses 17a, 17a.
17b and 17c may be matched respectively. At this set position, the shading plate 15a prevents the light of the light source 1a from entering the condenser lens 16c. Thus, the light from the light sources 1a, 1b and 1c is condensed by the condenser lenses 17a, 17b and 17c, passes through the optical fibers 20a, 20b and 20c, and becomes a single light flux in the optical fiber bundle 21. The light emitted from the optical fiber bundle 21 is imaged by the condenser lens 22, collimated by the lens 23, reflected by the mirror 24, passes through the hole of the stage 25, and enters the lower surface of the sample 7. Thus, the light emitted from the sample 7 is the objective lens 6
Imaged at a, transmitted through the polarization beam splitter 5,
An image is formed by the image forming lens 8 and taken by the CCD camera 9. C
The image data obtained by the CD camera 9 is displayed on the monitor 10.

When it is desired to observe and measure at a high magnification, the revolver 19 may be rotated to put the objective lens 6b on the optical path. When it is desired to visually check, the eyepiece lens 11 may be used. If you want to observe it again with epi-illumination, change the disk 15 to 9
It suffices to rotate it counterclockwise by 0 ° and return it to the position shown in FIG.

FIG. 4 shows the construction of the essential parts of a third embodiment of the illuminating device according to the present invention. In the figure, substantially the same members as those used in the second embodiment are designated by the same reference numerals. This embodiment differs from the second embodiment in that epi-illumination and transmitted illumination can be used at the same time. That is, in this embodiment, as shown in FIG. 4, the light shielding plate 26 is provided on the light sources 1a, 1b and 1c installed in the lamp house 14,
Condensing lenses 16a, 16b and 16 sandwiching these light sources
Condensing lenses 17a, 17b and 1 at the matching position facing c
7c is arranged and these condenser lenses 17a, 17b and 1
Optical fibers 17a, 17b and 17c facing 7c respectively
Is provided. Since the operation and effect of this embodiment are obvious from the described embodiment, the description thereof will be omitted.

In the third embodiment, two lamp houses are provided, one light source is provided with a light source dedicated to epi-illumination and an optical fiber, and the other lamp house is provided with a light source dedicated to transmitted illumination and an optical fiber. May be. In addition, in the first and second embodiments, the illuminating device was mainly shown for observation, but the present invention can be applied to a measuring microscope used for measuring the shape of a sample or the like. Needless to say.

As described above, the lighting device of the present invention has the following features in addition to the features described in the claims. (1) The lighting device according to claim 1, wherein the exit surface is formed at one end of the light guide member. (2) The lighting device according to claim 1, wherein the emission surface is formed at one end of a second light guide member different from the light guide member. (3) The lighting device according to claim 1, wherein the plurality of light sources are used at a rated voltage or less.

[0024]

As described above, according to the present invention, by using a plurality of light sources at once, a bright microscope image can be visually observed by the low-to-high magnification objective lens or taken by the image pickup means. It is possible to provide an illuminating device and a microscope that can be used. Also, because multiple light sources are used to obtain a given amount of light, each light source can be used at a voltage below its rating, which can extend the life of the filament of the light source lamp, resulting in low cost. It is possible to provide an illuminating device and a microscope.

[Brief description of drawings]

FIG. 1 is a diagram showing a basic configuration of a microscope including a first embodiment of an illumination device according to the present invention.

FIG. 2 is a perspective view showing a structure of an emitting end portion of an optical fiber bundle used in the first embodiment and an arrangement state of fibers at the emitting end.

FIG. 3 is a diagram showing a basic configuration of a microscope including a second embodiment of an illumination device according to the present invention.

FIG. 4 is a diagram showing a main configuration of a third embodiment of an illumination device according to the present invention.

FIG. 5 is a diagram showing a basic configuration of a microscope including a conventional illumination device.

FIG. 6 is a characteristic diagram showing a relationship between applied voltage and change in life of a halogen light source lamp.

[Explanation of symbols]

1a, 1b, 1c Light source 2a, 2b, 2c, 20a, 20b, 20c Optical fiber 3,22 Condenser lens 4,23 Lens 5 Polarizing beam splitter 6a, 6b Objective lens 7 Sample 8 Imaging lens 9 CCD camera 10 Monitor 11 Eyepiece lens 12 Diffusers 13 and 21 Optical fiber bundle 14 Lamp house 15 Discs 15a and 26 Light-shielding plates 16a, 16b, 16c, 17a, 17b and 17c Condensing lens 18 Microscope body 19 Revolver 24 Mirror 25 Stage

Claims (3)

[Claims] 1. An illuminating device comprising a plurality of light sources and a light guide member having an entrance surface facing each of the plurality of light sources, the exit surface emitting light from the plurality of light sources together. Lighting device having. 2. The illumination device according to claim 1, further comprising a plurality of the light guide members, and a mechanism for guiding light from the light source to any one of the plurality of light guide members. 3. An illumination device comprising a plurality of light sources and a light guide member having an incident surface facing each of the plurality of light sources, wherein an emission surface for emitting light from the plurality of light sources together. A microscope provided with an illuminating device having.