JP2003020112A - Conveyance roller in uv cleaning device - Google Patents
Conveyance roller in uv cleaning deviceInfo
- Publication number
- JP2003020112A JP2003020112A JP2001210917A JP2001210917A JP2003020112A JP 2003020112 A JP2003020112 A JP 2003020112A JP 2001210917 A JP2001210917 A JP 2001210917A JP 2001210917 A JP2001210917 A JP 2001210917A JP 2003020112 A JP2003020112 A JP 2003020112A
- Authority
- JP
- Japan
- Prior art keywords
- ptfe
- resin portion
- roller
- resin
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 155
- 239000011347 resin Substances 0.000 claims abstract description 174
- 229920005989 resin Polymers 0.000 claims abstract description 174
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 117
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 117
- 239000000945 filler Substances 0.000 claims abstract description 71
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 69
- 239000000463 material Substances 0.000 claims description 43
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 33
- -1 polytetrafluoroethylene Polymers 0.000 claims description 30
- 230000002093 peripheral effect Effects 0.000 claims description 21
- 239000007787 solid Substances 0.000 claims description 16
- 235000012489 doughnuts Nutrition 0.000 claims description 15
- 238000005452 bending Methods 0.000 claims description 11
- 230000006835 compression Effects 0.000 claims description 11
- 238000007906 compression Methods 0.000 claims description 11
- 238000005299 abrasion Methods 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 9
- 239000005416 organic matter Substances 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 238000000354 decomposition reaction Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 230000006750 UV protection Effects 0.000 abstract description 28
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 24
- 230000006866 deterioration Effects 0.000 description 18
- 239000011521 glass Substances 0.000 description 17
- 239000010445 mica Substances 0.000 description 16
- 229910052618 mica group Inorganic materials 0.000 description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 14
- 230000000694 effects Effects 0.000 description 14
- 239000000758 substrate Substances 0.000 description 14
- 229910004298 SiO 2 Inorganic materials 0.000 description 10
- 238000005336 cracking Methods 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- 230000008602 contraction Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 4
- 238000005108 dry cleaning Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 230000007723 transport mechanism Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 238000000638 solvent extraction Methods 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- 101100321304 Bacillus subtilis (strain 168) yxdM gene Proteins 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 239000010730 cutting oil Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011086 high cleaning Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 101100321669 Fagopyrum esculentum FA02 gene Proteins 0.000 description 1
- 101001078143 Homo sapiens Integrin alpha-IIb Proteins 0.000 description 1
- 102100025306 Integrin alpha-IIb Human genes 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C13/00—Rolls, drums, discs, or the like; Bearings or mountings therefor
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/10—Ultraviolet radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/99—Conveyor systems not otherwise provided for
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2208/00—Plastics; Synthetic resins, e.g. rubbers
- F16C2208/20—Thermoplastic resins
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2326/00—Articles relating to transporting
- F16C2326/58—Conveyor systems, e.g. rollers or bearings therefor
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば液晶，カラ
ーフィルタ，ＰＤＰなどの基盤を洗浄するＵＶ洗浄装置
における搬送用ローラに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer roller in a UV cleaning device for cleaning substrates such as liquid crystal, color filter, PDP and the like.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】電子機
器部品などでは非常に高い洗浄度が要求されている。汚
れを大別すると塵，切粉などの無機質と、切削油，フラ
ックス，指紋などの有機質とに分けられ、この無機質の
汚れは、主に水洗浄によって取り除くことができるが、
有機質の汚れは、水洗浄では完全に取り除けないため、
水，溶剤などで事前に洗浄してから紫外線洗浄による精
密洗浄が行われている。2. Description of the Related Art A very high degree of cleaning is required for electronic equipment parts and the like. When dirt is roughly classified, it is divided into inorganic matter such as dust and chips, and organic matter such as cutting oil, flux, and fingerprints. This inorganic dirt can be removed mainly by washing with water.
Since organic stains cannot be completely removed by washing with water,
Precise cleaning by UV cleaning is performed after cleaning with water, solvent, etc. in advance.
【０００３】即ち、この紫外線洗浄を行うＵＶ洗浄装置
を、例えば製作ラインに配置し、精密洗浄を行ってい
る。That is, a UV cleaning device for carrying out this ultraviolet cleaning is arranged in, for example, a production line to perform precision cleaning.
【０００４】この紫外線洗浄は、簡単に説明すると、こ
の紫外線ランプの紫外線（ＵＶ）照射によって有機物の
分子鎖を分断し、ついでこの紫外線ランプの紫外線（Ｕ
Ｖ）照射によって洗浄室内にオゾンを発生させ、このオ
ゾンの分解・生成反応過程の酸化力の強い発生期の酸素
（Ｏ）と有機物との反応により被洗浄物の表面有機物を
蒸発気化させて洗浄するもので、乾式洗浄とも称されて
いる。Briefly explaining this ultraviolet cleaning, the molecular chain of an organic substance is divided by the ultraviolet (UV) irradiation of this ultraviolet lamp, and then the ultraviolet (U) of this ultraviolet lamp is cut.
V) Ozone is generated in the cleaning chamber by irradiation, and the surface organic substances of the object to be cleaned are vaporized and vaporized by the reaction of oxygen (O) and organic substances in the oxidative generation stage of the ozone decomposition / generation reaction process. It is also called dry cleaning.
【０００５】従来のこのようなＵＶ洗浄装置は、例えば
図１に示すように、被洗浄物１（例えばカラーフィルタ
などの基板）を搬入口16から紫外線ランプ３を複数並設
したＵＶ洗浄室２内に搬入し、洗浄後反対側の搬出口17
より搬出する構成で、順次搬送機構により被洗浄物１た
る基板１を送り込み紫外線洗浄するように構成してい
る。In such a conventional UV cleaning apparatus, as shown in FIG. 1, for example, a UV cleaning chamber 2 in which a plurality of ultraviolet lamps 3 are arranged side by side from an inlet 16 of an object to be cleaned 1 (for example, a substrate such as a color filter). Carrying in the inside, and after cleaning, carry-out port 17 on the opposite side
The substrate 1 which is the object to be cleaned 1 is sequentially fed by the transport mechanism and is cleaned by ultraviolet light.
【０００６】従来のこのようなＵＶ洗浄装置は、一般に
被洗浄物１の搬送方向に沿って多数の支軸４を回転自在
に並設架設し、この支軸４に前記被洗浄物１を支承する
多数の搬送用ローラ11を取り付けて前記搬送機構を構成
している。In such a conventional UV cleaning apparatus, generally, a large number of support shafts 4 are rotatably arranged side by side along the conveying direction of the object to be cleaned 1, and the object to be cleaned 1 is supported on the shaft 4. The transport mechanism is configured by attaching a large number of transport rollers 11 to the above.
【０００７】この搬送用ローラは、紫外線の照射を受
け、またオゾン雰囲気中に配されるために、この紫外線
照射を長時間受けても劣化しにくいものを採用する必要
がある。Since the carrying roller is irradiated with ultraviolet rays and is arranged in an ozone atmosphere, it is necessary to adopt a roller which is not easily deteriorated even if it is irradiated with the ultraviolet rays for a long time.
【０００８】しかし、例えば、搬送用ローラを単にステ
ンレスなどのオール金属製とすると、金属製のローラ外
周部で被洗浄物を支承することになり、この外周面にゴ
ミや塵などの異物が介在すると被洗浄物を傷つけるおそ
れがある。However, for example, if the conveying roller is simply made of all metal such as stainless steel, the object to be cleaned is supported by the outer peripheral portion of the metal roller, and foreign matters such as dust and dust are present on the outer peripheral surface. Then, there is a risk of damaging the object to be cleaned.
【０００９】即ち、例えば、被洗浄物としてガラス基板
を支承搬送する場合に、ガラス粉がローラ外周面に付着
していると、基板裏面をこのローラによって傷つけるお
それがある。That is, for example, when a glass substrate is supported and conveyed as an object to be cleaned, if the glass powder adheres to the outer peripheral surface of the roller, the rear surface of the substrate may be damaged by the roller.
【００１０】そこで、本出願人は、金属製のローラ体の
外周面の周方向に係合溝を形成し、この係合溝に外周部
がやや突出するように断面円形のＯリング状の樹脂製支
承部材を係合してローラ体に樹脂部を設けた構成の搬送
用ローラを開発した。Therefore, the present applicant has formed an engaging groove in the circumferential direction of the outer peripheral surface of a metal roller body, and an O-ring-shaped resin having a circular cross section so that the outer peripheral portion slightly projects into the engaging groove. We have developed a transport roller with a resin member on the roller body that engages the bearing members.
【００１１】そして更に耐久性を向上させるため、この
樹脂部を板厚より半径方向に長い板長を有するドーナツ
板形状とし、これを金属製の挟持部で外周よりやや突出
した状態で挟持する構成とした搬送用ローラ（特願平10
-186939)を開発した。In order to further improve the durability, the resin portion is formed into a donut plate shape having a plate length that is longer in the radial direction than the plate thickness, and is sandwiched by a metal sandwiching portion in a state of slightly protruding from the outer periphery. Transport roller (Japanese Patent Application No. 10
-186939) was developed.
【００１２】このように構成することで本体（ローラ
体)は金属製であるため、剛性や耐久性（耐ＵＶ性能）
に秀れると共に、被搬送物はローラ体の外周部よりやや
突出した樹脂部により支承されるため、被搬送物に傷を
付けにくい構成となる。With this structure, the main body (roller body) is made of metal, so that rigidity and durability (UV resistance) are improved.
In addition, since the transported object is supported by the resin portion slightly protruding from the outer peripheral portion of the roller body, the transported object is hardly scratched.
【００１３】また、この樹脂部は紫外線照射を受けても
改質・変質が少なく耐ＵＶ性能の高いポリ四フッ化エチ
レン（ＰＴＦＥ）（例えば商品名テフロンと称されて市
販されている樹脂）を採用している。Further, this resin part is made of polytetrafluoroethylene (PTFE) (for example, a resin which is commercially available under the trade name of Teflon) which is highly resistant to UV-irradiation and has little modification / deterioration even when it is irradiated with ultraviolet rays. It is adopted.
【００１４】しかしながら、耐ＵＶ性能に秀れたＰＴＦ
Ｅを採用しても、また、更に耐久性に秀れたドーナツ板
形状としても、長時間のＵＶ照射とオゾン雰囲気の下で
は、変質はやむをえなかった。即ち、使用限界時間を超
えて長時間使用すると、ひびが入ったり、割れたり、硬
度や弾性が失われた状態（ぼろぼろ質状態）に変質して
しまう問題があった。However, PTF excellent in UV resistance
Even if E was adopted, or even if the donut plate shape was further excellent in durability, deterioration was unavoidable under long-time UV irradiation and an ozone atmosphere. That is, when used for a long time beyond the usage limit time, there is a problem that cracks, cracks, and deterioration (roughness) of hardness and elasticity are lost.
【００１５】そのため、頻繁にこのローラを交換する必
要があり、メンテナンスを要すると共に、この交換が遅
れると被洗浄物を傷めたり、搬送に支承をきたす場合も
生じ得る。Therefore, it is necessary to frequently replace the roller, maintenance is required, and if the replacement is delayed, the object to be cleaned may be damaged or the carrier may be supported.
【００１６】そこで、本発明は、紫外線（ＵＶ）に強い
とされているポリ四フッ化エチレン（ＰＴＦＥ）製の樹
脂部を採用した従来構成にこのような問題点があること
を見い出し、この問題点に着目し、試作実験，研究を繰
り返し、試行錯誤の末解決したもので、これまで使用し
てきた樹脂材であるポリ四フッ化エチレン（ＰＴＦＥ）
をベースに、これに所定の充填材を加えた樹脂材により
樹脂部を形成することで、被洗浄物を傷つけにくく、し
かも耐ＵＶ性能が高くこれまでの使用時間（寿命）を飛
躍的に向上させた画期的且つ実用的なＵＶ洗浄装置にお
ける搬送用ローラを提供することを目的としている。Therefore, the present invention finds out that such a problem exists in the conventional structure employing the resin portion made of polytetrafluoroethylene (PTFE), which is said to be strong against ultraviolet rays (UV), and has found such a problem. By paying attention to the points, trial production and research were repeated, and it was solved through trial and error. Polytetrafluoroethylene (PTFE), a resin material that has been used so far
The base is made of a resin material with a specified filler added to it to form a resin part, which makes it difficult to damage the object to be cleaned, and has high UV resistance, dramatically improving the usage time (life) up to now. It is an object of the present invention to provide a conveyance roller in an epoch-making and practical UV cleaning device.
【００１７】[0017]
【課題を解決するための手段】添付図面を参照して本発
明の要旨を説明する。The gist of the present invention will be described with reference to the accompanying drawings.
【００１８】被洗浄物１を搬入する洗浄室２内に紫外線
ランプ３を設け、この紫外線ランプ３の紫外線（ＵＶ）
照射によって有機物の分子鎖を分断し、ついでこの紫外
線ランプ３の紫外線（ＵＶ）照射によって洗浄室２内に
オゾンを発生させ、このオゾンの分解・生成反応過程の
酸化力の強い発生期の酸素（Ｏ）と有機物との反応によ
り被洗浄物１の表面有機物を除去するように構成したＵ
Ｖ洗浄装置ａの前記洗浄室２内に前記被洗浄物１を搬入
若しくは搬出するため支軸４に設ける搬送用ローラであ
って、前記支軸４に設けるローラ体５に前記被洗浄物１
を支承する樹脂部６を外周に突出状態に設け、若しくは
前記支軸４に設けるローラ体５自体を樹脂材で構成し
て、このローラ体５自体を前記被洗浄物１を支承する樹
脂部６とし、前記樹脂部６をポリ四フッ化エチレン（Ｐ
ＴＦＥ）をベースに充填材７を所定量含有した樹脂材で
構成したことを特徴とするＵＶ洗浄装置における搬送用
ローラに係るものである。An ultraviolet lamp 3 is provided in a cleaning chamber 2 into which the object to be cleaned 1 is loaded, and ultraviolet rays (UV) from the ultraviolet lamp 3 are provided.
The molecular chain of the organic substance is cut off by irradiation, and then ozone is generated in the cleaning chamber 2 by irradiation of the ultraviolet ray (UV) of the ultraviolet lamp 3, and oxygen in the nascent stage of strong oxidative power of the decomposition and generation reaction process of ozone ( U) configured to remove the surface organic matter of the object to be cleaned 1 by the reaction of O) with the organic matter.
A conveyance roller provided on a support shaft 4 for loading or unloading the cleaning target 1 into or from the cleaning chamber 2 of the V cleaning device a, wherein the cleaning target 1 is mounted on a roller body 5 provided on the supporting shaft 4.
The resin portion 6 for supporting the cleaning object 1 is provided on the outer periphery in a protruding state, or the roller body 5 itself provided on the support shaft 4 is made of a resin material, and the roller portion 5 itself supports the cleaning target 1. And the resin portion 6 is made of polytetrafluoroethylene (P
The present invention relates to a transport roller in a UV cleaning device, which is made of a resin material containing a predetermined amount of the filler 7 based on TFE).
【００１９】また、前記樹脂部６は、ポリ四フッ化エチ
レン（ＰＴＦＥ）に磨耗，曲げ，圧縮などの耐久性を向
上するための充填材７を所定量含有した樹脂材で構成し
たことを特徴とする請求項１記載のＵＶ洗浄装置におけ
る搬送用ローラに係るものである。The resin portion 6 is made of polytetrafluoroethylene (PTFE) containing a predetermined amount of a filler 7 for improving durability against abrasion, bending, compression and the like. The present invention relates to the transport roller in the UV cleaning device according to claim 1.
【００２０】また、前記樹脂部６は、ポリ四フッ化エチ
レン（ＰＴＦＥ）の組織に微細な空隙８を周囲に多数形
成する充填材７を所定量含有した樹脂材で構成したこと
を特徴とする請求項１，２のいずれか１項に記載のＵＶ
洗浄装置における搬送用ローラに係るものである。Further, the resin portion 6 is characterized in that it is made of a resin material containing a predetermined amount of a filler 7 which forms a large number of fine voids 8 in the periphery of the structure of polytetrafluoroethylene (PTFE). UV according to any one of claims 1 and 2.
The present invention relates to a conveyance roller in a cleaning device.
【００２１】また、前記樹脂部６は、ポリ四フッ化エチ
レン（ＰＴＦＥ）に無機質の微細な粒状若しくは微細な
棒状の固体を前記充填材７として所定量含有した樹脂材
で構成したことを特徴とする請求項１〜３のいずれか１
項に記載のＵＶ洗浄装置における搬送用ローラに係るも
のである。The resin portion 6 is made of a resin material containing a predetermined amount of inorganic fine granular or fine rod-shaped solid in polytetrafluoroethylene (PTFE) as the filler 7. Any one of claims 1 to 3
The present invention relates to the transfer roller in the UV cleaning device according to the item.
【００２２】また、前記充填材７は、前記ポリ四フッ化
エチレン（ＰＴＦＥ）をベースに15〜30重量％含有せし
めたことを特徴とする請求項１〜４のいずれか１項に記
載のＵＶ洗浄装置における搬送用ローラに係るものであ
る。Further, the filler 7 contains 15 to 30% by weight of the polytetrafluoroethylene (PTFE) as a base, and the UV according to any one of claims 1 to 4. The present invention relates to a conveyance roller in a cleaning device.
【００２３】また、前記ローラ体５は、軸受孔部９を有
する一対の金属製挟持部10で構成し、この金属製挟持部
10間にドーナツ板形状に形成した前記樹脂部６をこの樹
脂部６の外周部を前記金属製挟持部10間から突出状態と
なるように挟持配設してローラ体５に樹脂部６を外周に
突出状態に設けた構成としたことを特徴とする請求項１
〜５のいずれか１項に記載のＵＶ洗浄装置における搬送
用ローラに係るものである。The roller body 5 is composed of a pair of metal sandwiching portions 10 each having a bearing hole portion 9.
The resin portion 6 formed in the shape of a donut plate between 10 is arranged so as to sandwich the outer peripheral portion of the resin portion 6 so as to project from the space between the metal sandwiching portions 10, and the resin portion 6 is surrounded by the roller body 5. 2. A structure in which it is provided in a protruding state
Item 5 relates to the transport roller in the UV cleaning device according to any one of items 5 to 5.
【００２４】[0024]
【発明の実施の形態】好適と考える本発明の実施の形態
（発明をどのように実施するか）を、図面に基づいてそ
の作用効果を示して簡単に説明する。BEST MODE FOR CARRYING OUT THE INVENTION A preferred embodiment of the present invention (how to carry out the invention) will be briefly described with reference to the drawings and showing its function and effect.
【００２５】金属製のローラ体５の外周より突出状態に
して樹脂製の支承部となる樹脂部６を取り付けた構成の
搬送用ローラ11とし、あるいはローラ体５自体を樹脂製
としてこのローラ体５自体を樹脂部６とした構成の搬送
用ローラ11とし、この樹脂部６の突出外周部６Ａで被洗
浄物１を支承する。The metal roller body 5 is protruded from the outer periphery of the roller body 5 so as to have a resin portion 6 serving as a resin bearing portion, or the roller body 5 itself is made of resin. The conveyance roller 11 has a resin portion 6 itself, and the object 1 to be cleaned is supported by the protruding outer peripheral portion 6A of the resin portion 6.
【００２６】従って、例えばローラ体５を金属製とすれ
ば、耐久性（耐ＵＶ性能）、剛性に秀れると共に、被洗
浄物１は金属面で支承されるのではなく、樹脂製の樹脂
部６で支承されるため被洗浄物１を傷めにくい。Therefore, for example, if the roller body 5 is made of metal, the durability (UV resistance) and rigidity are excellent, and the object to be cleaned 1 is not supported by the metal surface, but is made of resin. Since it is supported by 6, the object to be cleaned 1 is not easily damaged.
【００２７】また、この樹脂部６はポリ四フッ化エチレ
ン（ＰＴＦＥ）を用いた樹脂材であるから、この樹脂部
６の耐ＵＶ性能も高い。Further, since the resin portion 6 is a resin material using polytetrafluoroethylene (PTFE), the resin portion 6 has high UV resistance.
【００２８】しかも、本発明はこの樹脂部６の素材を単
なるポリ四フッ化エチレン（ＰＴＦＥ）ではなく、この
ＰＴＦＥをベースに充填材７（例えばマイカ，ガラス，
カーボンなど）を所定量含有した樹脂材とし、充填材７
入りＰＴＦＥで樹脂部６を形成したため、従来のＰＴＦ
Ｅのみで樹脂部６を形成した場合に比べ、使用耐久限界
（寿命）が飛躍的に向上することとなる。Moreover, in the present invention, the material of the resin portion 6 is not merely polytetrafluoroethylene (PTFE), but the filler 7 (for example, mica, glass,
A resin material containing a predetermined amount of carbon, etc., and a filler 7
Since the resin part 6 is formed of PTFE containing, conventional PTFE
Compared to the case where the resin portion 6 is formed of only E, the use durability limit (life) is dramatically improved.
【００２９】即ち、ＰＴＦＥのみで樹脂部６を形成した
場合、この樹脂部６は例えば単位照度20ｍＷ／ｃｍ2の
場合でおよそ2000時間の使用に耐えられるが、これを超
えて使用すると著しく劣化し、ひび割れてしまったり、
硬度や弾性が失われたぼろぼろ質状態に劣化してしまう
が、同様の条件下で本発明は、およそ8000時間使用して
もその状態は使用前とほとんど変わらず（ひび割れも一
切生じず、変質も全く生じず）、紫外線（ＵＶ）による
劣化は極めて小さく、ほとんど使用前と変わらぬ状態を
維持することができることを出願人が繰り返し行った耐
久実験により確認している。That is, when the resin portion 6 is formed of only PTFE, the resin portion 6 can withstand use for about 2000 hours when the unit illuminance is 20 mW / cm 2 , but if it is used beyond this, the resin portion 6 deteriorates significantly. , Cracked,
Although it deteriorates to a shabby state in which hardness and elasticity are lost, under the same conditions, the present invention shows that the state is almost the same as that before use even if it is used for about 8000 hours (no cracking occurs at all, deterioration It has been confirmed through repeated endurance experiments conducted by the applicant that the deterioration due to ultraviolet rays (UV) is extremely small and that it can maintain almost the same state as before use.
【００３０】言いかえれば、磨耗，曲げ，圧縮などの耐
久性を向上するために充填材７を入れ強化した市販の充
填材７入りＰＴＦＥをこのＵＶ洗浄装置ａの搬送用ロー
ラ11の樹脂部６として採用することで、紫外線（ＵＶ）
照射及びオゾン雰囲気中で被洗浄物１を長時間搬入・搬
出のために使用しても、即ち、ＵＶ照射を長時間受けて
も、オゾン雰囲気中に長時間あっても、変質劣化せず亀
裂なども極めて生じ難い搬送用ローラを実現できたもの
である。In other words, the commercially available PTFE containing the filler 7 in which the filler 7 is reinforced in order to improve the durability against abrasion, bending, compression, etc. is used for the resin portion 6 of the transfer roller 11 of the UV cleaning device a. By adopting as, ultraviolet rays (UV)
Even if the object to be cleaned 1 is used for loading and unloading for a long time in the irradiation and ozone atmosphere, that is, even if it is subjected to UV irradiation for a long time or in the ozone atmosphere for a long time, it does not deteriorate and does not crack. It is possible to realize a transport roller that is extremely unlikely to occur.
【００３１】例えば、この充填材７を微細な粒状若しく
は微細な棒状の固体として無機質のマイカ，ガラス，あ
るいはカーボンなどをＰＴＦＥに混入して成形した樹脂
部６とすることで、この充填材７の周囲に多数（無数）
の微細な空隙８が形成され、ＰＴＦＥの組織にＰＴＦＥ
単独のときにはなかった数ミクロンオーダーの前記空隙
８が多数（無数）散在形成された組織構造とすることが
できる。For example, the filler 7 is formed by mixing inorganic mica, glass, carbon, or the like into PTFE as a fine granular or fine rod-shaped solid to form a resin portion 6, and Many around (innumerable)
Microscopic voids 8 are formed in the PTFE structure
It is possible to have a tissue structure in which a large number (innumerable) of the voids 8 of the order of several microns, which were not present when they were alone, were scattered and formed.
【００３２】従って、おそらくＵＶ照射を長時間受ける
ことで樹脂材が収縮するが、この多数（無数）の空隙８
の存在によりこの収縮をこの空隙８が許容すると推測さ
れる。即ち、この空隙８が収縮によって更に小さくなる
だけで、長時間ＵＶ照射を受けても変質しない。言いか
えれば、空隙８のない単なるＰＴＦＥの場合は、この収
縮によってぼろぼろ質に変質してしまい硬度と弾性が失
われ亀裂が生じることとなるが、本発明の充填材７入り
ＰＴＦＥではこの空隙８が組織に予め多数（無数）散在
形成されているため、長時間ＵＶ照射してもこの空隙８
が収縮するだけですみ、変質が生じないものと推測され
る。Therefore, the resin material will probably shrink due to the UV irradiation for a long time.
It is speculated that the presence of the void 8 allows the shrinkage. That is, the voids 8 only shrink due to contraction, and do not deteriorate even when subjected to UV irradiation for a long time. In other words, in the case of mere PTFE having no voids 8, this shrinkage causes the material to deteriorate to a rag and loses hardness and elasticity, resulting in cracking. Since a large number (innumerable) are formed in advance in the tissue, even if UV irradiation is performed for a long time, this void 8
It is assumed that only the contraction occurs and no alteration occurs.
【００３３】また例えば、ＰＴＦＥに含有する前記充填
材７の含有量を15〜30重量％とすることで、紫外線（Ｕ
Ｖ）に対する前記耐久性を良好に発揮でき、且つ樹脂部
６を成形することができる。Further, for example, when the content of the filler 7 contained in PTFE is set to 15 to 30% by weight, ultraviolet rays (U
The durability against V) can be exhibited well and the resin portion 6 can be molded.
【００３４】[0034]
【実施例】本発明の具体的な実施例について図面に基づ
いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００３５】被洗浄物１の搬送方向に沿って多数の支軸
４を回転自在に並設架設し、この支軸４に前記被洗浄物
１を支承する搬送用ローラ11を取り付け固定して搬送機
構を構成している。A large number of support shafts 4 are rotatably arranged side by side along the direction in which the article to be cleaned 1 is conveyed, and conveyance rollers 11 for supporting the article to be cleaned 1 are attached and fixed to the spindle 4 for conveyance. It constitutes the mechanism.
【００３６】この搬送用ローラ11は、紫外線（ＵＶ）の
照射を受け、またオゾン雰囲気中に配されるために、こ
の紫外線（ＵＶ）照射を長時間受けても劣化しないもの
を採用する必要があるが、本実施例では以下のように構
成している。The transfer roller 11 receives ultraviolet rays (UV) and is arranged in an ozone atmosphere. Therefore, it is necessary to adopt a roller which does not deteriorate even if it receives the ultraviolet rays (UV) for a long time. However, in this embodiment, the configuration is as follows.
【００３７】本実施例の搬送用ローラ11の本体であるロ
ーラ体５は、軸受孔部９を有する一対の金属製挟持部10
で構成し、この金属製の挟持部10間にドーナツ板形状に
形成した樹脂部６をこの樹脂部６の外周部を前記金属製
の挟持部10間から突出状態となるように挟持配設してロ
ーラ体５に樹脂部６を外周に突出状態に設けた構成とし
ている。The roller body 5, which is the main body of the carrying roller 11 of this embodiment, includes a pair of metal sandwiching portions 10 having bearing hole portions 9.
And a resin part 6 formed in the shape of a donut plate between the metal sandwiching parts 10 is disposed so as to sandwich the outer periphery of the resin part 6 from the space between the metal sandwiching parts 10. The roller body 5 is provided with a resin portion 6 on the outer periphery in a protruding state.
【００３８】即ち、このローラ体５の一方の挟持部10
は、板状基体の一方側に筒状の軸受孔部９を一体突出形
成した構成とし、この一方の挟持部10には軸受孔部９に
挿入した前記支軸４に締め付け固定する支軸４取付用締
め付け手段12（一方の挟持部10の軸受孔部９に形成する
螺子孔12Ａと取付用螺子12Ｂにより構成）を設け、この
支軸４に締め付け固定した一方の挟持部10に他方の板状
の挟持部10を前記樹脂部６を挟んで樹脂部６挟持用締め
付け手段13（一方の挟持部10に形成する挿入孔13Ａ，他
方の挟持部10に形成する螺子孔13Ｂ，挟持用螺子13Ｃに
より構成）により挟持固定するように構成し、一方、こ
の樹脂部６挟持用締め付け手段13を緩めることで他方の
挟持部10を支軸４に沿ってスライド移動可能に構成して
いる。That is, one holding portion 10 of the roller body 5
Has a structure in which a cylindrical bearing hole portion 9 is integrally formed on one side of the plate-shaped base body, and a supporting shaft 4 which is clamped and fixed to the supporting shaft 4 inserted in the bearing hole portion 9 in the one holding portion 10. Mounting tightening means 12 (consisting of a screw hole 12A formed in the bearing hole portion 9 of one holding portion 10 and a mounting screw 12B) is provided, and one holding portion 10 tightened and fixed to the support shaft 4 has the other plate. Clamping means 13 for sandwiching the resin part 6 with the resin-like sandwiching part 10 (insertion hole 13A formed in one sandwiching part 10, screw hole 13B formed in the other sandwiching part 10, sandwiching screw 13C) The holding means 10 is configured to be held and fixed by means of (1), and the other holding portion 10 can be slid along the support shaft 4 by loosening the holding means 13 for holding the resin portion 6.
【００３９】また、本実施例の樹脂部６は、その素材を
ポリ四フッ化エチレン（ＰＴＦＥ）を用いて形成してお
り、耐ＵＶ性能を高めている。Further, the resin portion 6 of this embodiment is made of polytetrafluoroethylene (PTFE) as its material, so that the UV resistance is enhanced.
【００４０】また、本実施例の樹脂部６は、ドーナツ板
形状に形成し、この板厚の二倍以上の板長を有するよう
に形成し、より確固に前記ローラ体５の挟持部10に挟持
されると共に、より良好な耐ＵＶ性能を発揮する構成と
している。Further, the resin portion 6 of this embodiment is formed in a donut plate shape, and is formed to have a plate length that is at least twice this plate thickness, so that the pinching portion 10 of the roller body 5 can be more firmly fixed. The structure is such that it is sandwiched and exhibits better UV resistance.
【００４１】即ち、Ｏリング状とせず肉厚より長い板長
を有するドーナツ板状とすることで耐ＵＶ性能が一層高
まると共に、被洗浄物１を支承する突出外周部６Ａ以外
はできるだけ紫外線（ＵＶ）照射を受けないように金属
製の挟持部10により隠蔽状態に挟持固定されているた
め、秀れた耐久性（耐ＵＶ性能）が発揮されるように構
成している。That is, the UV resistance performance is further enhanced by using a donut plate shape having a plate length longer than the wall thickness instead of the O-ring shape, and UV rays (UV) other than the protruding outer peripheral portion 6A for supporting the article to be cleaned 1 are provided as much as possible. ) Since it is sandwiched and fixed in a concealed state by the metal sandwiching portion 10 so as not to be irradiated, it is configured to exhibit excellent durability (UV resistance).
【００４２】また、更に本実施例では、樹脂部６を単に
ＰＴＦＥのみでなく、このＰＴＦＥをベースに所定量の
充填材７を含有する素材により樹脂部６を形成した構成
としている。Further, in the present embodiment, the resin portion 6 is not only made of PTFE, but the resin portion 6 is formed of a material containing a predetermined amount of the filler 7 based on this PTFE.
【００４３】即ち、磨耗，曲げ，圧縮，熱膨張などの耐
久性を向上するための充填材７を所定量含有した市販の
充填材７入りＰＴＦＥを本実施例の搬送用ローラ11の前
記樹脂部６に採用している。That is, commercially available PTFE containing the filler 7 containing a predetermined amount of the filler 7 for improving durability such as abrasion, bending, compression, thermal expansion and the like is used for the resin portion of the conveying roller 11 of this embodiment. It is adopted in 6.
【００４４】本実施例ではマイカ（ＳｉＯ2・Ｋ・Ａ
ｌ）あるいはガラス（ＳｉＯ2）あるいはカーボン
（Ｃ）をＰＴＦＥ中に所定量入れた市販の充填材７入り
ＰＴＦＥを採用した。In this embodiment, mica (SiO 2 · K · A)
1) or glass (SiO 2 ) or carbon (C) was used, and a commercially available PTFE containing filler 7 was used.
【００４５】即ち、樹脂部６は、ＰＴＦＥに無機質の微
細な粒状若しくは微細な棒状の固体を前記充填材７とし
て所定量含有した構成としている。That is, the resin portion 6 is made of PTFE containing a predetermined amount of inorganic fine granular or fine rod-shaped solid as the filler 7.
【００４６】例えば、充填材７にマイカ（ＳｉＯ2・Ｋ
・Ａｌ）を採用し、このマイカ（ＳｉＯ2・Ｋ・Ａｌ）
をＰＴＦＥ中に30重量％含有させたものは、ＰＴＦＥの
みで形成したものが単位照度20ｍＷ／ｃｍ2でＵＶ照射
した場合、およそ2000時間の使用を超えると著しく劣化
し、ひび割れてしまったり、硬度や弾性が失われたぼろ
ぼろ質状態に劣化するのに対し、同様の条件下でおよそ
8000時間使用してもその状態は使用前とほとんど変わら
ず（ひび割れも一切生じず、変質も全く生じず）、紫外
線（ＵＶ）による劣化は極めて小さく、ほとんど使用前
と変わらぬ状態を維持することができることを出願人が
繰り返し行った耐久実験により確認している。For example, the filler 7 is made of mica (SiO 2 · K
・ Al) is adopted, and this mica (SiO 2 · K · Al)
In the case of containing 30% by weight of PTFE in PTFE, when it is UV-irradiated with a unit illuminance of 20 mW / cm 2 , the product formed of only PTFE is significantly deteriorated after being used for about 2000 hours, causing cracking or hardness. Under a similar condition, it deteriorates to a shabby state where elasticity and elasticity are lost.
Even after 8,000 hours of use, the condition is almost the same as before use (no cracking, no alteration at all), deterioration by ultraviolet rays (UV) is extremely small, and it should be maintained almost unchanged from before use. It has been confirmed by the applicant's repeated endurance experiments that this is possible.
【００４７】また、ガラス（ＳｉＯ2）をＰＴＦＥに20
重量％含有させたものは、同様に8000時間使用してもほ
とんど劣化を生じず、紫外線（ＵＶ）に対して秀れた耐
久性を発揮することを確認している。Further, glass (SiO 2 ) is added to the PTFE 20
It has been confirmed that the one containing wt% hardly deteriorates even after being used for 8,000 hours and exhibits excellent durability against ultraviolet rays (UV).
【００４８】また、カーボン（Ｃ）をＰＴＦＥに15重量
％含有させたものもまた、同様に8000時間の使用後もほ
とんど劣化を生じず、紫外線（ＵＶ）による劣化は極め
て小さく、秀れた耐ＵＶ性能を発揮することを確認して
いる。Also, the carbon (C) in which PTFE is contained in an amount of 15% by weight does not substantially deteriorate even after 8,000 hours of use, and the deterioration due to ultraviolet rays (UV) is extremely small, which is excellent. It has been confirmed that it exhibits UV performance.
【００４９】つまり、ＰＴＦＥに、無機質の微細な粒状
若しくは微細な棒状の固体を所定量入れることで、秀れ
た耐ＵＶ性能を発揮することを確認している。That is, it has been confirmed that by putting a predetermined amount of inorganic fine granular or fine rod-shaped solid into PTFE, excellent UV resistance performance is exhibited.
【００５０】この充填材７入りＰＴＦＥを顕微鏡写真で
確認したところ、ＰＴＦＥ中において充填材７の周囲
に、充填材７を含有しない時には見られない微細な空隙
８が多数（無数）散在形成されており、この微細な多数
（無数）の空隙８が耐ＵＶ性能を飛躍的に向上させる一
因となっているものと推測される。When the PTFE containing the filler 7 was confirmed by a micrograph, a large number (innumerable) of minute voids 8 which were not seen when the filler 7 was not contained were formed around the filler 7 in the PTFE. Therefore, it is presumed that the large number (innumerable) of the minute voids 8 is one of the factors that dramatically improve the UV resistance performance.
【００５１】即ち、例えば、この充填材７を微細な粒状
若しくは微細な棒状の固体として無機質のマイカ，ガラ
ス，あるいはカーボンなどをＰＴＦＥに混入して成形し
た樹脂部６とすることで、この充填材７の周囲に多数
（無数）の微細な空隙８が形成され、ＰＴＦＥの組織に
ＰＴＦＥ単独のときにはなかった数ミクロンオーダーの
前記空隙８が多数（無数）散在形成された組織構造とす
ることができる。That is, for example, by forming the filler 7 as a fine granular or fine rod-shaped solid, inorganic mica, glass, carbon or the like is mixed with PTFE to form the resin portion 6, and thus the filler is formed. A large number (innumerable) of minute voids 8 are formed around 7, and a plurality of (innumerable) voids 8 on the order of a few microns, which were not present in the case of PTFE alone, are scattered and formed in the tissue of PTFE. .
【００５２】従って、おそらくＵＶ照射を長時間受ける
ことで樹脂材が収縮するが、この多数の空隙８の存在に
よりこの収縮をこの空隙８が許容すると推測される。即
ち、この空隙８が収縮によって更に小さくなるだけで、
長時間ＵＶ照射を受けても変質しない。言いかえれば、
空隙８のない単なるＰＴＦＥの場合は、この収縮によっ
てぼろぼろ質に変質してしまい硬度と弾性が失われ亀裂
が生じることとなるが、本発明の充填材７入りＰＴＦＥ
ではこの空隙８が組織に予め多数形成されているため、
長時間ＵＶ照射してもこの空隙８が収縮するだけです
み、変質が生じないものと推測される。Therefore, the resin material probably shrinks due to the UV irradiation for a long time, but it is presumed that the presence of the numerous voids 8 allows the voids 8 to shrink. That is, the void 8 is only reduced by shrinkage,
It does not deteriorate even if it is exposed to UV irradiation for a long time. In other words,
In the case of mere PTFE having no voids 8, this shrinkage causes the material to become rags and loses hardness and elasticity, resulting in cracking.
Since many voids 8 are formed in the tissue in advance,
It is presumed that even if UV irradiation is performed for a long period of time, the voids 8 only contract and no alteration occurs.
【００５３】従って、本実施例の樹脂部６は、ＰＴＦＥ
中に数ミクロンオーダーの多数（無数）の空隙８を散在
形成し得る磨耗，曲げ，圧縮，熱膨張などの耐久性を向
上するための充填材７、具体的には無機質の微細な粒状
若しくは微細な棒状の固体の混入により、秀れた耐ＵＶ
性能を発揮する。Therefore, the resin portion 6 of this embodiment is made of PTFE.
Filler 7 for improving durability such as abrasion, bending, compression, thermal expansion, etc. capable of forming a large number (innumerable) of voids 8 on the order of several microns, specifically, inorganic fine particles or fine particles Excellent UV resistance by mixing solid rod-shaped solids
Demonstrate performance.
【００５４】即ち、本実施例での充填材７は、この空隙
８を形成し得るものであれば、前記の例示した充填材７
に限られない。言いかえれば、無機質の微細な粒状若し
くは棒状の固体ならば、前記例示した充填材７に限られ
ない。That is, if the filler 7 in this embodiment can form the voids 8, the filler 7 exemplified above is used.
Not limited to In other words, as long as it is an inorganic fine granular or rod-shaped solid, it is not limited to the filler 7 exemplified above.
【００５５】従って、充填材７としてはマイカ，ガラ
ス，カーボンの他、例えば酸化チタン，酸化ジルコニウ
ム，酸化アルミニウム，炭化ケイ素としても良く、同様
の作用効果を発揮する。Therefore, the filler 7 may be, for example, titanium oxide, zirconium oxide, aluminum oxide, or silicon carbide, in addition to mica, glass, and carbon, and the same action and effect are exhibited.
【００５６】また、ＰＴＦＥに混入する充填材７の含有
量は15〜30重量％とすることで前記作用効果が良好に発
揮される。即ち、充填材７の含有量を15％よりも少なく
すると、前記使用耐久時間が飛躍的に向上するという本
実施例の前記効果が十分でなくなる恐れがあり、また、
30重量％よりも多くすると樹脂部６の成形に支承をきた
す恐れがある。The content of the filler 7 mixed in the PTFE is 15 to 30% by weight, so that the above-mentioned effects can be exhibited well. That is, if the content of the filler 7 is less than 15%, there is a possibility that the effect of the present embodiment that the use durability time is drastically improved is not sufficient.
If it exceeds 30% by weight, the resin part 6 may be supported.
【００５７】また、本実施例では、環状形状の樹脂部６
に分断部14を一ヶ所設けた構成、若しくは分断部14を複
数ヵ所設けて複数の分断樹脂部６Ｃにより全体として環
状形状となるように構成して、架設固定されている前記
支軸４を取り外さなくてもこの分断部14を介して支軸４
から前記樹脂部６を着脱し得るように構成している。Further, in this embodiment, the annular resin portion 6 is used.
In the configuration in which the dividing portion 14 is provided at one place, or the dividing portion 14 is provided at a plurality of places so as to form an annular shape as a whole by the plurality of dividing resin portions 6C, the erected and fixed support shaft 4 is removed. Even if it is not provided, the support shaft 4 is provided through the dividing portion 14.
The resin part 6 can be attached and detached.
【００５８】具体的には、本実施例では前記環状の樹脂
部６の対向位置に二ヶ所の分断部14を設け、架設固定さ
れている前記支軸４を取り外さなくてもこの分断部14を
介して支軸４から樹脂部６を着脱し得るように構成して
いる。Specifically, in the present embodiment, two dividing portions 14 are provided at positions facing the annular resin portion 6, and the dividing portions 14 are fixed even if the supporting shaft 4 fixedly installed is not removed. The resin portion 6 can be attached to and detached from the support shaft 4 via the shaft.
【００５９】即ち、ローラ体５には、挟持部10間に挟持
配設するこの樹脂部６を締め付け挟持固定する樹脂部６
挟持用締め付け手段13を設け、この挟持用締め付け手段
13を緩めることで樹脂部６を前記分断部14を介して支軸
４から着脱し得るように構成している。That is, on the roller body 5, the resin portion 6 sandwiched between the sandwiching portions 10 is clamped and fixed.
The clamping means 13 for clamping is provided, and the clamping means for clamping is
The resin portion 6 can be attached to and detached from the support shaft 4 via the dividing portion 14 by loosening 13.
【００６０】具体的には、このローラ体５の少なくとも
一方の挟持部10に前記軸受孔部９に挿入した前記支軸４
に締め付け固定する支軸４取付用締め付け手段12を設
け、この支軸４に締め付け固定した一方の挟持部10に他
方の挟持部10を前記樹脂部６を挟持して樹脂部６挟持用
締め付け手段13で挟持固定するように構成し、この樹脂
部６挟持用締め付け手段13を緩めることで他方の挟持部
10を支軸４に沿ってスライド移動し、この挟持部10間か
ら樹脂部６を前記分断部14を介して支軸４から着脱し得
るように構成している。Specifically, the support shaft 4 inserted into the bearing hole 9 in at least one holding portion 10 of the roller body 5.
A fastening means 12 for mounting the support shaft 4 for fastening and fixing to the support shaft 4 is provided, and one holding portion 10 fastened and fixed to the support shaft 4 holds the other holding portion 10 for holding the resin portion 6 and tightening means for holding the resin portion 6. It is configured to be clamped and fixed by 13, and by loosening the resin portion 6 clamping means 13 for clamping, the other clamping portion
10 is slid along the support shaft 4, and the resin portion 6 can be attached to and detached from the support shaft 4 through the dividing portion 14 between the holding portions 10.
【００６１】従って、ローラ体５が支軸４に止着固定し
た状態であっても、つまり、挟持部10が支軸４に取り付
けられたままの状態であっても、その分断部14を介して
支軸４から取り外すことができ、長時間の紫外線（Ｕ
Ｖ）照射により劣化した樹脂部６のみを交換できること
となる。Therefore, even when the roller body 5 is fixedly fixed to the support shaft 4, that is, even when the holding portion 10 is still attached to the support shaft 4, the dividing portion 14 is interposed therebetween. It can be removed from the support shaft 4 by using the
V) Only the resin part 6 deteriorated by irradiation can be replaced.
【００６２】従って、本実施例の搬送用ローラ11は、極
めて秀れたメンテナンス性を発揮し得るＵＶ洗浄装置に
おける搬送用ローラとなる。Therefore, the carrying roller 11 of the present embodiment is a carrying roller in a UV cleaning device which can exhibit extremely excellent maintenance.
【００６３】尚、本実施例の図１，図２に示すＵＶ洗浄
装置の構成について説明する。The structure of the UV cleaning apparatus of this embodiment shown in FIGS. 1 and 2 will be described.
【００６４】本実施例のＵＶ洗浄装置ａは、紫外線ラン
プ３を多数並設した洗浄室２の両端に、（被洗浄物１と
しての）薄板状の大型基板１を多数並設した前記搬送用
ローラ11上に水平架設状態にして送り込み搬送する搬入
口14と搬出口15とを設け、この洗浄室２はこの搬入口14
と搬出口15を残して封止状態に構成している。The UV cleaning apparatus a of this embodiment has a large number of thin plate-like substrates 1 (as the objects to be cleaned 1) arranged in parallel at both ends of a cleaning chamber 2 in which a large number of ultraviolet lamps 3 are arranged in parallel. A carry-in port 14 and a carry-out port 15 are provided on the roller 11 for horizontally feeding and conveying the same.
And the carrying-out port 15 is left and is configured in a sealed state.
【００６５】この搬入口14と搬出口15とを覆う外装室16
を夫々搬送方向に沿って連設状態に設け、この外装室16
に夫々搬入口14Ａ，搬出口15Ａを設け、被洗浄物１が前
記洗浄室２に搬入される場合は、搬入口14Ａ，外装室1
6，搬入口14を順次通過して搬入され、紫外線洗浄後搬
出される場合は、搬出口15，外装室16，搬出口15Ａを順
次通過して搬出されるように構成している。Exterior chamber 16 covering the carry-in port 14 and the carry-out port 15
Are installed in a row along the transport direction, and the exterior chamber 16
14 A of carry-in ports and 15 A of carry-out ports are provided respectively, and when the article to be cleaned 1 is carried into the cleaning chamber 2, the carry-in port 14 A and the exterior chamber 1
6. When it is carried in after sequentially passing through the carry-in port 14 and carried out after the ultraviolet cleaning, it is structured so as to be carried out after sequentially passing through the carry-out port 15, the exterior chamber 16, and the carry-out port 15A.
【００６６】更に具体的に説明すれば、本実施例では、
搬入口14Ａと搬出口15Ａとを有する（開閉上蓋17によっ
て開放可能な）搬入収納部内に前記搬入口14と搬出口15
とを残して仕切区画する仕切部18を突設して、この搬入
収納部内に前記洗浄室２とその左右に夫々前記外装室16
とを設けた構成とし、いわば従来の洗浄室２の搬入口14
と搬出口15の夫々の外側に更に補助室として外装室16を
連設し、いわゆる全体として二重室構造に構成してい
る。More specifically, in the present embodiment,
The carry-in port 14 and the carry-out port 15 are provided in a carry-in / storing section having a carry-in port 14A and a carry-out port 15A (which can be opened by the opening / closing upper lid 17).
A partitioning part 18 for partitioning is provided so as to leave, and the cleaning chamber 2 and the exterior chambers 16 on the left and right sides of the cleaning chamber 2 are provided in the carrying-in and storing part.
With the configuration provided with, so to speak, the inlet 14 of the conventional cleaning chamber 2
An exterior chamber 16 is further provided as an auxiliary chamber on the outside of each of the carrying-out port 15 and a so-called double-chamber structure as a whole.
【００６７】そしてこのような二重室構造とした上で従
来例のように搬入搬出口14，15から外部へ多量に漏れる
ことを恐れて洗浄室２からオゾン雰囲気を直接強力に排
気する構成とせずに、洗浄室２はあくまでオゾン雰囲気
が十分に充満できる構成とし、この洗浄室２の搬入口1
4，搬出口15から一旦必ず外装室16に漏れ出るオゾン雰
囲気を排気するように外装室16に排気部19を設けてい
る。In addition to the dual chamber structure, the ozone atmosphere is strongly exhausted directly from the cleaning chamber 2 in the fear of a large amount of leakage from the carry-in / carry-out ports 14 and 15 to the outside as in the conventional example. Instead, the cleaning chamber 2 is configured so that the ozone atmosphere can be sufficiently filled, and the inlet 1 of the cleaning chamber 2
4. The exhaust chamber 19 is provided in the exterior chamber 16 so as to exhaust the ozone atmosphere that always leaks from the carry-out port 15 to the exterior chamber 16.
【００６８】従って、本装置ａの周囲に漏れ出ないよう
に洗浄室２の外側の外装室16から排気するため、紫外線
ランプ３によって生じるオゾン雰囲気が洗浄室２を充満
した上で洗浄室２外の外装室16へ漏れ出て、本装置ａ周
囲に漏らすことなくこの外装室16内で排気するため、本
装置ａの設置周囲に漏れ出ないように洗浄室２内から直
接強力に排気する従来例とは異なり、洗浄室２内のオゾ
ン濃度を高く保持することができることとなる。Therefore, since the exhaust air is exhausted from the exterior chamber 16 outside the cleaning chamber 2 so as not to leak to the periphery of the apparatus a, the ozone atmosphere generated by the ultraviolet lamp 3 fills the cleaning chamber 2 and then the outside of the cleaning chamber 2. Since it leaks to the exterior chamber 16 of the device and is exhausted inside the exterior chamber 16 without leaking to the surroundings of the device a, the exhaust is strongly exhausted directly from the inside of the cleaning chamber 2 so as not to leak to the periphery of the installation of the device a. Unlike the example, the ozone concentration in the cleaning chamber 2 can be kept high.
【００６９】即ち、本装置ａの設置周囲のオゾン雰囲気
漏れを従来例よりも完全に防止できる上、前記洗浄室２
内のオゾン濃度は、従来例に比して同じＵＶ照射量であ
っても高く保持できることとなる。That is, leakage of ozone atmosphere around the installation of the apparatus a can be completely prevented as compared with the conventional example, and the cleaning chamber 2
As compared with the conventional example, the ozone concentration in the inside can be kept high even with the same UV irradiation amount.
【００７０】本実施例においては、洗浄室２内にオゾン
濃度検知装置20（オゾンチェックポート）を所定間隔を
置いて多数並設し、このオゾン濃度検知装置20に基づ
き、洗浄室２内のオゾン濃度の微調整や不均一な場合の
濃度分布調整のために、外装室16だけでなく洗浄室２内
にもオゾン雰囲気を排気する濃度分布調整用の排気部21
を複数か所に配設し、この各排気部21を前記オゾン濃度
検知装置20に基づきコンピュータ制御作動させてオゾン
濃度が洗浄室２内で均一となるように構成している。In the present embodiment, a large number of ozone concentration detecting devices 20 (ozone check ports) are arranged side by side in the cleaning chamber 2 at predetermined intervals, and based on the ozone concentration detecting devices 20, ozone in the cleaning chamber 2 is discharged. An exhaust unit 21 for adjusting the concentration distribution that exhausts the ozone atmosphere not only in the exterior chamber 16 but also in the cleaning chamber 2 for the fine adjustment of the concentration and the concentration distribution adjustment in the case of non-uniformity.
Are arranged at a plurality of locations, and the respective exhaust portions 21 are computer-controlled based on the ozone concentration detecting device 20 so that the ozone concentration becomes uniform in the cleaning chamber 2.
【００７１】また、前記外装室16の前記排気部19からの
排気によって前記外装室16の搬入口14Ａ並びに搬出口15
Ａから外気が吸入されるため、いわゆるエアカーテンが
生じて、前記外装室16外の前記本装置ａの設置周囲へこ
の搬入口14Ａ並びに搬出口15Ａから外装室16内のオゾン
雰囲気が確実にシャットアウトされる。Further, the carry-in port 14A and the carry-out port 15 of the exterior chamber 16 are discharged by the exhaust air from the exhaust portion 19 of the exterior chamber 16.
Since the outside air is sucked in from A, a so-called air curtain is generated, and the ozone atmosphere in the exterior chamber 16 is surely shut out from the carry-in port 14A and the carry-out port 15A to the installation periphery of the device a outside the exterior chamber 16. Will be out.
【００７２】以上のように本実施例では、二重室構造ゆ
えにＵＶ洗浄装置ａの周囲へのオゾン雰囲気漏れを防止
でき周囲環境を悪化させることがない上、本実施例での
仕切部18を有しなく外装室16を有しない従来例では、洗
浄室２内のオゾン濃度が２０〜４０ＰＰＭでしかも不均
一であるのに対し、本実施例では同じ紫外線の累積照度
に対して１００〜１５０ＰＰＭと洗浄室２内を高いオゾ
ン濃度に保持でき、接触角を約１.５倍小さくでき、し
かも均一な濃度となり洗浄効果が飛躍的に向上したこと
が確認できた。しかも、前述のように本実施例ではオゾ
ン濃度検知装置20によって検知しつつ複数配設した洗浄
室２内の排気部21による排気調整によって一層洗浄室２
内のオゾン濃度分布を均一化できるため、極めて高い洗
浄能力が発揮されることとなる。As described above, in this embodiment, due to the double-chamber structure, it is possible to prevent the ozone atmosphere from leaking to the periphery of the UV cleaning device a and prevent the ambient environment from deteriorating, and the partition portion 18 in this embodiment is used. In the conventional example which does not have the exterior chamber 16 and does not have the exterior chamber 16, the ozone concentration in the cleaning chamber 2 is 20 to 40 PPM and is non-uniform, while in the present embodiment, it is 100 to 150 PPM for the same cumulative illuminance of ultraviolet rays. It was confirmed that the inside of the cleaning chamber 2 could be kept at a high ozone concentration, the contact angle could be reduced by about 1.5 times, and the concentration could be made uniform, resulting in a dramatic improvement in the cleaning effect. Moreover, as described above, in the present embodiment, the exhaust concentration is adjusted by the exhaust portions 21 in the plurality of cleaning chambers 2 which are detected by the ozone concentration detecting device 20, and the cleaning chamber 2 is further cleaned.
Since the ozone concentration distribution in the inside can be made uniform, an extremely high cleaning ability is exhibited.
【００７３】また、そのため高価な大出力ランプや紫外
線照射時間を長くする必要がないため、製作コストやラ
ンニングコストの削減を図ることも可能となる。Further, since it is not necessary to lengthen the expensive high-power lamp and the ultraviolet irradiation time, it is possible to reduce the manufacturing cost and running cost.
【００７４】また、本実施例の紫外線ランプ３は、低圧
水銀ランプを使用し、処理温度をＩＲヒータによって１
００〜２５０℃とし、洗浄室２内のオゾン濃度を５００
〜１０００ＰＰＭとし、例えば数百ｍｍ角の大型基板を
ＵＶ照射，高濃度オゾン，温度加熱の相乗効果によって
良好な乾式洗浄ができるように構成している。The ultraviolet lamp 3 of this embodiment uses a low-pressure mercury lamp, and the processing temperature is set to 1 by an IR heater.
The ozone concentration in the cleaning chamber 2 is 500
˜1000 PPM, for example, a large substrate of several hundreds mm square is configured to be able to perform good dry cleaning by the synergistic effect of UV irradiation, high-concentration ozone, and temperature heating.
【００７５】尚、図中符号24は温度検知装置（温度チェ
ックポート）である。Reference numeral 24 in the figure denotes a temperature detecting device (temperature check port).
【００７６】尚、本発明は、本実施例に限られるもので
はなく、各構成要件の具体的構成は適宜設計し得るもの
である。The present invention is not limited to this embodiment, and the specific constitution of each constituent element can be appropriately designed.
【００７７】[0077]
【発明の効果】本発明は上述のように構成したから、こ
れまで使用してきた樹脂材であるポリ四フッ化エチレン
（ＰＴＦＥ）をベースに、これに所定の充填材を加えた
樹脂材により樹脂部を形成することで、被洗浄物を傷つ
けにくく、これまでの使用時間（寿命）を飛躍的に向上
させた画期的且つ実用的なＵＶ洗浄装置における搬送用
ローラとなる。EFFECTS OF THE INVENTION Since the present invention is constructed as described above, a resin material is obtained by adding a predetermined filler to the base of polytetrafluoroethylene (PTFE), which is the resin material used so far. By forming the portion, it becomes a conveyance roller in an epoch-making and practical UV cleaning device in which the object to be cleaned is less likely to be damaged and the usage time (life) up to now is dramatically improved.
【００７８】即ち、例えば摩耗，曲げ，圧縮などの耐久
性を向上するために強化した充填材入りＰＴＦＥをこの
ＵＶ洗浄装置の搬送用ローラの樹脂部として採用するこ
とで、紫外線（ＵＶ）照射及びオゾン雰囲気中で被洗浄
物を長時間搬入・搬出のため使用しても、即ち、ＵＶ照
射を長時間受けても、オゾン雰囲気中に長時間あって
も、変質劣化せず亀裂なども一切生じないＵＶ洗浄装置
における搬送用ローラとなる。That is, by adopting the filler-containing PTFE reinforced to improve the durability against abrasion, bending, compression, etc. as the resin portion of the transport roller of this UV cleaning device, ultraviolet (UV) irradiation and Even if the object to be cleaned is used for loading and unloading for a long time in the ozone atmosphere, that is, even if it is exposed to UV irradiation for a long time, and even if it is in the ozone atmosphere for a long time, it does not deteriorate and does not cause any cracks. It becomes a transport roller in a UV cleaning device that does not have it.
【００７９】言いかえれば、ローラ体の樹脂部をＰＴＦ
Ｅだけでなく、例えばこのＰＴＦＥをベースに充填材
（例えばマイカ，ガラス，カーボンなど）を所定量含有
した素材で樹脂部を形成することで、被洗浄物を極めて
傷つけにくい構成でありながら、これまでの耐久使用限
界（寿命）を飛躍的に向上させることができるＵＶ洗浄
装置における搬送用ローラとなる。In other words, the resin portion of the roller body is
In addition to E, by forming the resin portion with a material containing a predetermined amount of a filler (for example, mica, glass, carbon, etc.) based on this PTFE, the structure to be cleaned is extremely hard to be damaged, It becomes a conveyance roller in a UV cleaning device that can dramatically improve the endurance use limit (life) up to.
【００８０】請求項２〜５記載の発明においては、前記
発明の作用・効果が確実に発揮されるＵＶ洗浄装置にお
ける搬送用ローラとなる。According to the second to fifth aspects of the invention, the roller is a carrying roller in the UV cleaning device in which the action and effect of the invention can be surely exhibited.
【００８１】請求項６記載の発明においては、Ｏリング
状とせず肉厚より長い板長を有するドーナツ板状とする
ことで耐ＵＶ性能が一層高まると共に、被洗浄物を支承
する突出外周部以外はできるだけ紫外線（ＵＶ）照射を
受けないように金属製の挟持部により隠蔽状態に挟持固
定されているため、一層秀れた耐久性（耐ＵＶ性能）を
発揮する極めて画期的なＵＶ洗浄装置における搬送用ロ
ーラとなる。According to the sixth aspect of the present invention, the UV resistance is further improved by forming the donut plate shape having a plate length longer than the wall thickness instead of the O ring shape, and at the same time, except for the protruding outer peripheral portion for supporting the object to be cleaned. Is a highly innovative UV cleaning device that exhibits superior durability (UV resistance) because it is sandwiched and fixed in a concealed state by a metal sandwiching unit so that it is not irradiated with ultraviolet rays (UV) as much as possible. It becomes a carrying roller.
【図１】本実施例のＵＶ洗浄装置の概略構成説明図であ
る。FIG. 1 is a schematic configuration explanatory view of a UV cleaning device of this embodiment.
【図２】本実施例のＵＶ洗浄装置の洗浄室並びに外装室
を蓋を持ち上げて開放した状態での説明斜視図である。FIG. 2 is an explanatory perspective view showing a state in which a cleaning chamber and an exterior chamber of the UV cleaning apparatus of this embodiment are lifted up and opened.
【図３】本実施例の分解説明斜視図である。FIG. 3 is an exploded perspective view of the present embodiment.
【図４】本実施例の使用状態を示す説明斜視図である。FIG. 4 is an explanatory perspective view showing a usage state of the present embodiment.
【図５】本実施例の使用状態を示す説明断面図である。FIG. 5 is an explanatory cross-sectional view showing a usage state of the present embodiment.
【図６】本実施例の一部を切欠いた説明拡大斜視図であ
る。FIG. 6 is an explanatory enlarged perspective view in which a part of the present embodiment is cut away.
【図７】本実施例の挟持用締め付け手段を緩めて一方の
挟持部に対して他方の挟持部を少しスライド移動させた
開放状態を示す（樹脂部を形成する二つの分断樹脂部を
取り外すことを示す）一部を切欠いた説明拡大斜視図で
ある。FIG. 7 shows an opened state in which the clamping means for clamping of the present embodiment is loosened and the other clamping part is slid with respect to one clamping part (removing the two divided resin parts forming the resin part). FIG. 4 is an explanatory enlarged perspective view with a part cut away.
１ 被洗浄物 ２ 洗浄室 ３ 紫外線ランプ ４ 支軸 ５ ローラ体 ６ 樹脂部 ７ 充填材 ８ 空隙 ９ 軸受孔部 10 挟持部 ａ ＵＶ洗浄装置 1 to-be-cleaned 2 washing room 3 UV lamp 4 spindles 5 roller body 6 Resin part 7 Filling material 8 voids 9 Bearing hole 10 clamping part a UV cleaning device
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１３年１２月１４日（２００１．１２．
１４）[Submission date] December 14, 2001 (2001.12.
14)
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】全文[Correction target item name] Full text
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【書類名】 明細書[Document name] Statement
【発明の名称】 ＵＶ洗浄装置における搬送用ローラ[Title of Invention] Conveying roller in UV cleaning device
【特許請求の範囲】[Claims]
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば液晶，カラ
ーフィルタ，ＰＤＰなどの基盤を洗浄するＵＶ洗浄装置
における搬送用ローラに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer roller in a UV cleaning device for cleaning substrates such as liquid crystal, color filter, PDP and the like.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】電子機
器部品などでは非常に高い洗浄度が要求されている。汚
れを大別すると塵，切粉などの無機質と、切削油，フラ
ックス，指紋などの有機質とに分けられ、この無機質の
汚れは、主に水洗浄によって取り除くことができるが、
有機質の汚れは、水洗浄では完全に取り除けないため、
水，溶剤などで事前に洗浄してから紫外線洗浄による精
密洗浄が行われている。2. Description of the Related Art A very high degree of cleaning is required for electronic equipment parts and the like. When dirt is roughly classified, it is divided into inorganic matter such as dust and chips, and organic matter such as cutting oil, flux, and fingerprints. This inorganic dirt can be removed mainly by washing with water.
Since organic stains cannot be completely removed by washing with water,
Precise cleaning by UV cleaning is performed after cleaning with water, solvent, etc. in advance.
【０００３】即ち、この紫外線洗浄を行うＵＶ洗浄装置
を、例えば製作ラインに配置し、精密洗浄を行ってい
る。That is, a UV cleaning device for carrying out this ultraviolet cleaning is arranged in, for example, a production line to perform precision cleaning.
【０００４】この紫外線洗浄は、簡単に説明すると、こ
の紫外線ランプの紫外線（ＵＶ）照射によって有機物の
分子鎖を分断し、ついでこの紫外線ランプの紫外線（Ｕ
Ｖ）照射によって洗浄室内にオゾンを発生させ、このオ
ゾンの分解・生成反応過程の酸化力の強い発生期の酸素
（Ｏ）と有機物との反応により被洗浄物の表面有機物を
蒸発気化させて洗浄するもので、乾式洗浄とも称されて
いる。Briefly explaining this ultraviolet cleaning, the molecular chain of an organic substance is divided by the ultraviolet (UV) irradiation of this ultraviolet lamp, and then the ultraviolet (U) of this ultraviolet lamp is cut.
V) Ozone is generated in the cleaning chamber by irradiation, and the surface organic substances of the object to be cleaned are vaporized and vaporized by the reaction of oxygen (O) and organic substances in the oxidative generation stage of the ozone decomposition / generation reaction process. It is also called dry cleaning.
【０００５】従来のこのようなＵＶ洗浄装置は、例えば
図１に示すように、被洗浄物１（例えばカラーフィルタ
などの基板）を搬入口16から紫外線ランプ３を複数並設
したＵＶ洗浄室２内に搬入し、洗浄後反対側の搬出口17
より搬出する構成で、順次搬送機構により被洗浄物１た
る基板１を送り込み紫外線洗浄するように構成してい
る。In such a conventional UV cleaning apparatus, as shown in FIG. 1, for example, a UV cleaning chamber 2 in which a plurality of ultraviolet lamps 3 are arranged side by side from an inlet 16 of an object to be cleaned 1 (for example, a substrate such as a color filter). Carrying in the inside, and after cleaning, carry-out port 17 on the opposite side
The substrate 1 which is the object to be cleaned 1 is sequentially fed by the transport mechanism and is cleaned by ultraviolet light.
【０００６】従来のこのようなＵＶ洗浄装置は、一般に
被洗浄物１の搬送方向に沿って多数の支軸４を回転自在
に並設架設し、この支軸４に前記被洗浄物１を支承する
多数の搬送用ローラ11を取り付けて前記搬送機構を構成
している。In such a conventional UV cleaning apparatus, generally, a large number of support shafts 4 are rotatably arranged side by side along the conveying direction of the object to be cleaned 1, and the object to be cleaned 1 is supported on the shaft 4. The transport mechanism is configured by attaching a large number of transport rollers 11 to the above.
【０００７】この搬送用ローラは、紫外線の照射を受
け、またオゾン雰囲気中に配されるために、この紫外線
照射を長時間受けても劣化しにくいものを採用する必要
がある。Since the carrying roller is irradiated with ultraviolet rays and is arranged in an ozone atmosphere, it is necessary to adopt a roller which is not easily deteriorated even if it is irradiated with the ultraviolet rays for a long time.
【０００８】しかし、例えば、搬送用ローラを単にステ
ンレスなどのオール金属製とすると、金属製のローラ外
周部で被洗浄物を支承することになり、この外周面にゴ
ミや塵などの異物が介在すると被洗浄物を傷つけるおそ
れがある。However, for example, if the conveying roller is simply made of all metal such as stainless steel, the object to be cleaned is supported by the outer peripheral portion of the metal roller, and foreign matters such as dust and dust are present on the outer peripheral surface. Then, there is a risk of damaging the object to be cleaned.
【０００９】即ち、例えば、被洗浄物としてガラス基板
を支承搬送する場合に、ガラス粉がローラ外周面に付着
していると、基板裏面をこのローラによって傷つけるお
それがある。That is, for example, when a glass substrate is supported and conveyed as an object to be cleaned, if the glass powder adheres to the outer peripheral surface of the roller, the rear surface of the substrate may be damaged by the roller.
【００１０】そこで、本出願人は、金属製のローラ体の
外周面の周方向に係合溝を形成し、この係合溝に外周部
がやや突出するように断面円形のＯリング状の樹脂製支
承部材を係合してローラ体に樹脂部を設けた構成の搬送
用ローラを開発した。Therefore, the present applicant has formed an engaging groove in the circumferential direction of the outer peripheral surface of a metal roller body, and an O-ring-shaped resin having a circular cross section so that the outer peripheral portion slightly projects into the engaging groove. We have developed a transport roller with a resin member on the roller body that engages the bearing members.
【００１１】そして更に耐久性を向上させるため、この
樹脂部を板厚より半径方向に長い板長を有するドーナツ
板形状とし、これを金属製の挟持部で外周よりやや突出
した状態で挟持する構成とした搬送用ローラ（特願平10
-186939号)を開発した。In order to further improve the durability, the resin portion is formed into a donut plate shape having a plate length that is longer in the radial direction than the plate thickness, and is sandwiched by a metal sandwiching portion in a state of slightly protruding from the outer periphery. Transport roller (Japanese Patent Application No. 10
-186,939 No.) was developed.
【００１２】このように構成することで本体（ローラ
体)は金属製であるため、剛性や耐久性（耐ＵＶ性能）
に秀れると共に、被搬送物はローラ体の外周部よりやや
突出した樹脂部により支承されるため、被搬送物に傷を
付けにくい構成となる。With this structure, the main body (roller body) is made of metal, so that rigidity and durability (UV resistance) are improved.
In addition, since the transported object is supported by the resin portion slightly protruding from the outer peripheral portion of the roller body, the transported object is hardly scratched.
【００１３】また、この樹脂部は紫外線照射を受けても
改質・変質が少なく耐ＵＶ性能の高いポリ四フッ化エチ
レン（ＰＴＦＥ）（例えば商品名テフロンと称されて市
販されている樹脂）を採用している。Further, this resin part is made of polytetrafluoroethylene (PTFE) (for example, a resin which is commercially available under the trade name of Teflon) which is highly resistant to UV-irradiation and has little modification / deterioration even when it is irradiated with ultraviolet rays. It is adopted.
【００１４】しかしながら、耐ＵＶ性能に秀れたＰＴＦ
Ｅを採用しても、また、更に耐久性に秀れたドーナツ板
形状としても、長時間のＵＶ照射とオゾン雰囲気の下で
は、変質はやむをえなかった。即ち、使用限界時間を超
えて長時間使用すると、ひびが入ったり、割れたり、硬
度や弾性が失われた状態（ぼろぼろ質状態）に変質して
しまう問題があった。However, PTF excellent in UV resistance
Even if E was adopted, or even if the donut plate shape was further excellent in durability, deterioration was unavoidable under long-time UV irradiation and an ozone atmosphere. That is, when used for a long time beyond the usage limit time, there is a problem that cracks, cracks, and deterioration (roughness) of hardness and elasticity are lost.
【００１５】そのため、頻繁にこのローラを交換する必
要があり、メンテナンスを要すると共に、この交換が遅
れると被洗浄物を傷めたり、搬送に支承をきたす場合も
生じ得る。Therefore, it is necessary to frequently replace the roller, maintenance is required, and if the replacement is delayed, the object to be cleaned may be damaged or the carrier may be supported.
【００１６】そこで、本発明は、紫外線（ＵＶ）に強い
とされているポリ四フッ化エチレン（ＰＴＦＥ）製の樹
脂部を採用した従来構成にこのような問題点があること
を見い出し、この問題点に着目し、試作実験，研究を繰
り返し、試行錯誤の末解決したもので、これまで使用し
てきた樹脂材であるポリ四フッ化エチレン（ＰＴＦＥ）
をベースに、これに所定の充填材を加えた樹脂材により
樹脂部を形成することで、被洗浄物を傷つけにくく、し
かも耐ＵＶ性能が高くこれまでの使用時間（寿命）を飛
躍的に向上させた画期的且つ実用的なＵＶ洗浄装置にお
ける搬送用ローラを提供することを目的としている。Therefore, the present invention finds out that such a problem exists in the conventional structure employing the resin portion made of polytetrafluoroethylene (PTFE), which is said to be strong against ultraviolet rays (UV), and has found such a problem. By paying attention to the points, trial production and research were repeated, and it was solved through trial and error. Polytetrafluoroethylene (PTFE), a resin material that has been used so far
By forming a resin part with a resin material in which a predetermined filler is added to the base, it is difficult to damage the object to be cleaned, and the UV resistance is high and the usage time (life) up to now is dramatically improved. It is an object of the present invention to provide a conveyance roller in an epoch-making and practical UV cleaning device.
【００１７】[0017]
【課題を解決するための手段】添付図面を参照して本発
明の要旨を説明する。The gist of the present invention will be described with reference to the accompanying drawings.
【００１８】被洗浄物１を搬入する洗浄室２内に紫外線
ランプ３を設け、この紫外線ランプ３の紫外線（ＵＶ）
照射によって有機物の分子鎖を分断し、ついでこの紫外
線ランプ３の紫外線（ＵＶ）照射によって洗浄室２内に
オゾンを発生させ、このオゾンの分解・生成反応過程の
酸化力の強い発生期の酸素（Ｏ）と有機物との反応によ
り被洗浄物１の表面有機物を除去するように構成したＵ
Ｖ洗浄装置ａの前記洗浄室２内に前記被洗浄物１を搬入
若しくは搬出するため支軸４に設ける搬送用ローラであ
って、前記支軸４に設けるローラ体５に前記被洗浄物１
を支承する樹脂部６を外周に突出状態に設け、若しくは
前記支軸４に設けるローラ体５自体を樹脂材で構成し
て、このローラ体５自体を前記被洗浄物１を支承する樹
脂部６とし、前記樹脂部６をポリ四フッ化エチレン（Ｐ
ＴＦＥ）をベースに充填材を所定量含有した樹脂材で構
成したことを特徴とするＵＶ洗浄装置における搬送用ロ
ーラに係るものである。An ultraviolet lamp 3 is provided in a cleaning chamber 2 into which the object to be cleaned 1 is loaded, and ultraviolet rays (UV) from the ultraviolet lamp 3
The molecular chain of the organic substance is cut off by irradiation, and then ozone is generated in the cleaning chamber 2 by irradiation of the ultraviolet ray (UV) of the ultraviolet lamp 3, and oxygen in the nascent stage of strong oxidative power of the decomposition and generation reaction process of ozone ( U) configured to remove the surface organic matter of the object to be cleaned 1 by the reaction of O) with the organic matter.
A conveyance roller provided on a support shaft 4 for loading or unloading the cleaning target 1 into or from the cleaning chamber 2 of the V cleaning device a, wherein the cleaning target 1 is mounted on a roller body 5 provided on the supporting shaft 4.
The resin portion 6 for supporting the cleaning object 1 is provided on the outer periphery in a protruding state, or the roller body 5 itself provided on the support shaft 4 is made of a resin material, and the roller portion 5 itself supports the cleaning target 1. And the resin portion 6 is made of polytetrafluoroethylene (P
Those of the conveying roller in the UV cleaning device, characterized in that the TFE) composed of a resin material that contains a predetermined amount of filler in the base.
【００１９】また、前記樹脂部６は、ポリ四フッ化エチ
レン（ＰＴＦＥ）に磨耗，曲げ，圧縮などの耐久性を向
上するための充填材を所定量含有した樹脂材で構成した
ことを特徴とする請求項１記載のＵＶ洗浄装置における
搬送用ローラに係るものである。The resin portion 6 is made of a resin material containing polytetrafluoroethylene (PTFE) with a predetermined amount of a filler for improving durability against abrasion, bending, compression and the like. The present invention relates to the transport roller in the UV cleaning device according to claim 1.
【００２０】また、前記樹脂部６は、ポリ四フッ化エチ
レン（ＰＴＦＥ）の組織に微細な空隙を周囲に多数形成
する充填材を所定量含有した樹脂材で構成したことを特
徴とする請求項１，２のいずれか１項に記載のＵＶ洗浄
装置における搬送用ローラに係るものである。Further, the resin portion 6, claims, characterized by being configured tissue filler to form a large number of fine air gap around the polytetrafluoroethylene (PTFE) in a predetermined amount containing resin material Item 1 relates to the transport roller in the UV cleaning device according to any one of items 1 and 2.
【００２１】また、前記樹脂部６は、ポリ四フッ化エチ
レン（ＰＴＦＥ）に無機質の微細な粒状若しくは微細な
棒状の固体を前記充填材として所定量含有した樹脂材で
構成したことを特徴とする請求項１〜３のいずれか１項
に記載のＵＶ洗浄装置における搬送用ローラに係るもの
である。Further, the resin portion 6, characterized by being configured with polytetrafluoroethylene resin material which mineral fine granular or fine rod-like solid (PTFE) and said filler contains a predetermined amount The present invention relates to the transport roller in the UV cleaning device according to any one of claims 1 to 3.
【００２２】また、前記充填材は、前記ポリ四フッ化エ
チレン（ＰＴＦＥ）をベースに15〜30重量％含有せしめ
たことを特徴とする請求項１〜４のいずれか１項に記載
のＵＶ洗浄装置における搬送用ローラに係るものであ
る。Further, the filler, UV cleaning according to any one of claims 1 to 4, characterized in that the additional inclusion 15-30% by weight of the polytetrafluoroethylene (PTFE) based The present invention relates to a carrying roller in the apparatus.
【００２３】また、前記ローラ体５は、軸受孔部９を有
する一対の金属製挟持部10で構成し、この金属製挟持部
10間にドーナツ板形状に形成した前記樹脂部６をこの樹
脂部６の外周部を前記金属製挟持部10間から突出状態と
なるように挟持配設してローラ体５に樹脂部６を外周に
突出状態に設けた構成としたことを特徴とする請求項１
〜５のいずれか１項に記載のＵＶ洗浄装置における搬送
用ローラに係るものである。The roller body 5 is composed of a pair of metal sandwiching portions 10 each having a bearing hole portion 9.
The resin portion 6 formed in the shape of a donut plate between 10 is arranged so as to sandwich the outer peripheral portion of the resin portion 6 between the metal sandwiching portions 10 so that the resin portion 6 surrounds the roller body 5. 2. A structure in which it is provided in a protruding state
Item 5 relates to the transport roller in the UV cleaning device according to any one of items 5 to 5.
【００２４】[0024]
【発明の実施の形態】好適と考える本発明の実施の形態
（発明をどのように実施するか）を、図面に基づいてそ
の作用効果を示して簡単に説明する。BEST MODE FOR CARRYING OUT THE INVENTION A preferred embodiment of the present invention (how to carry out the invention) will be briefly described with reference to the drawings and showing its function and effect.
【００２５】金属製のローラ体５の外周より突出状態に
して樹脂製の支承部となる樹脂部６を取り付けた構成の
搬送用ローラ11とし、あるいはローラ体５自体を樹脂製
としてこのローラ体５自体を樹脂部６とした構成の搬送
用ローラ11とし、この樹脂部６の突出外周部６Ａで被洗
浄物１を支承する。The metal roller body 5 is protruded from the outer periphery of the roller body 5 so as to have a resin portion 6 serving as a resin bearing portion, or the roller body 5 itself is made of resin. The conveyance roller 11 has a resin portion 6 itself, and the object 1 to be cleaned is supported by the protruding outer peripheral portion 6A of the resin portion 6.
【００２６】従って、例えばローラ体５を金属製とすれ
ば、耐久性（耐ＵＶ性能）、剛性に秀れると共に、被洗
浄物１は金属面で支承されるのではなく、樹脂製の樹脂
部６で支承されるため被洗浄物１を傷めにくい。Therefore, for example, if the roller body 5 is made of metal, the durability (UV resistance) and rigidity are excellent, and the object to be cleaned 1 is not supported by the metal surface, but is made of resin. Since it is supported by 6, the object to be cleaned 1 is not easily damaged.
【００２７】また、この樹脂部６はポリ四フッ化エチレ
ン（ＰＴＦＥ）を用いた樹脂材であるから、この樹脂部
６の耐ＵＶ性能も高い。Further, since the resin portion 6 is a resin material using polytetrafluoroethylene (PTFE), the resin portion 6 has high UV resistance.
【００２８】しかも、本発明はこの樹脂部６の素材を単
なるポリ四フッ化エチレン（ＰＴＦＥ）ではなく、この
ＰＴＦＥをベースに充填材（例えばマイカ，ガラス，カ
ーボンなど）を所定量含有した樹脂材とし、充填材入り
ＰＴＦＥで樹脂部６を形成したため、従来のＰＴＦＥの
みで樹脂部６を形成した場合に比べ、使用耐久限界（寿
命）が飛躍的に向上することとなる。Furthermore, the present invention is not limited to the case where the material of the resin portion 6 is simply polytetrafluoroethylene (PTFE), but a resin material containing a predetermined amount of a filler ( for example, mica, glass, carbon) based on this PTFE. and then, because the formation of the resin portion 6 with a filler inlet Ri PTFE, compared with the case of forming the resin portion 6 only in conventional PTFE, use endurance limit (life) is to be dramatically improved.
【００２９】即ち、ＰＴＦＥのみで樹脂部６を形成した
場合、この樹脂部６は例えば単位照度20ｍＷ／ｃｍ2の
場合でおよそ2000時間の使用に耐えられるが、これを超
えて使用すると著しく劣化し、ひび割れてしまったり、
硬度や弾性が失われたぼろぼろ質状態に劣化してしまう
が、同様の条件下で本発明は、およそ8000時間使用して
もその状態は使用前とほとんど変わらず（ひび割れも一
切生じず、変質も全く生じず）、紫外線（ＵＶ）による
劣化は極めて小さく、ほとんど使用前と変わらぬ状態を
維持することができることを出願人が繰り返し行った耐
久実験により確認している。That is, when the resin portion 6 is formed of only PTFE, the resin portion 6 can withstand use for about 2000 hours when the unit illuminance is 20 mW / cm 2 , but if it is used beyond this, the resin portion 6 deteriorates significantly. , Cracked,
Although it deteriorates to a shabby state in which hardness and elasticity are lost, under the same conditions, the present invention shows that the state is almost the same as that before use even if it is used for about 8000 hours (no cracking occurs at all, deterioration It has been confirmed through repeated endurance experiments by the applicant that the deterioration due to ultraviolet rays (UV) is extremely small and that it can maintain almost the same state as before use.
【００３０】言いかえれば、磨耗，曲げ，圧縮などの耐
久性を向上するために充填材を入れ強化した市販の充填
材入りＰＴＦＥをこのＵＶ洗浄装置ａの搬送用ローラ11
の樹脂部６として採用することで、紫外線（ＵＶ）照射
及びオゾン雰囲気中で被洗浄物１を長時間搬入・搬出の
ために使用しても、即ち、ＵＶ照射を長時間受けても、
オゾン雰囲気中に長時間あっても、変質劣化せず亀裂な
ども極めて生じ難い搬送用ローラを実現できたものであ
る。In other words, a commercially available filling in which a filler is added and reinforced in order to improve durability such as abrasion, bending and compression.
Transport roller 11 of the UV cleaning device a the timber inlet Ri PTFE
By adopting it as the resin part 6 of, even if the article to be cleaned 1 is used for loading and unloading for a long time in ultraviolet (UV) irradiation and ozone atmosphere, that is, even if it is subjected to UV irradiation for a long time,
The present invention has made it possible to realize a conveyance roller that does not deteriorate and deteriorates even when it is in an ozone atmosphere for a long time, and that cracks are hardly generated.
【００３１】例えば、この充填材を微細な粒状若しくは
微細な棒状の固体として無機質のマイカ，ガラス，ある
いはカーボンなどをＰＴＦＥに混入して成形した樹脂部
６とすることで、この充填材の周囲に多数（無数）の微
細な空隙が形成され、ＰＴＦＥの組織にＰＴＦＥ単独の
ときにはなかった数ミクロンオーダーの前記空隙が多数
（無数）散在形成された組織構造とすることができる。[0031] For example, by this mica inorganic filler as a fine granular or fine rod-like solid, glass resin section 6 or carbon and the like was formed by mixing the PTFE,, around the filler number (countless) of fine air gap is formed, it is possible to the air gap of the order of several microns were not at PTFE alone PTFE organizations and multiple (countless) interspersed formed tissue structure.
【００３２】従って、おそらくＵＶ照射を長時間受ける
ことで樹脂材が収縮するが、この多数（無数）の空隙の
存在によりこの収縮をこの空隙が許容すると推測され
る。即ち、この空隙が収縮によって更に小さくなるだけ
で、長時間ＵＶ照射を受けても変質しない。言いかえれ
ば、空隙のない単なるＰＴＦＥの場合は、この収縮によ
ってぼろぼろ質に変質してしまい硬度と弾性が失われ亀
裂が生じることとなるが、本発明の充填材入りＰＴＦＥ
ではこの空隙が組織に予め多数（無数）散在形成されて
いるため、長時間ＵＶ照射してもこの空隙が収縮するだ
けですみ、変質が生じないものと推測される。[0032] Thus, perhaps the resin material by receiving long UV irradiation is contracted by <br/> presence of an empty gap of the multiple (countless) the contraction this air gap is presumed allowed. That is, the only air gap is further reduced by the contraction, no deterioration even long subjected to UV irradiation. In other words, in the case of mere PTFE without air gap, although the hardness and elasticity will be changed into shabby quality by this shrinkage is that a crack is lost occurs, the filler inlet Ri PTFE of the present invention
In order that this air gap has been previously many (countless) interspersed formed tissue, need only longer time to UV irradiation The air gap shrinks, it is presumed that deterioration does not occur.
【００３３】また例えば、ＰＴＦＥに含有する前記充填
材の含有量を15〜30重量％とすることで、紫外線（Ｕ
Ｖ）に対する前記耐久性を良好に発揮でき、且つ樹脂部
６を成形することができる。Further, for example, the filling contained in PTFE
By setting the content of the material to 15 to 30% by weight, the ultraviolet ray (U
The durability against V) can be exhibited well and the resin portion 6 can be molded.
【００３４】[0034]
【実施例】本発明の具体的な実施例について図面に基づ
いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００３５】被洗浄物１の搬送方向に沿って多数の支軸
４を回転自在に並設架設し、この支軸４に前記被洗浄物
１を支承する搬送用ローラ11を取り付け固定して搬送機
構を構成している。A large number of support shafts 4 are rotatably arranged side by side along the direction in which the article to be cleaned 1 is conveyed, and conveyance rollers 11 for supporting the article to be cleaned 1 are attached and fixed to the spindle 4 for conveyance. It constitutes the mechanism.
【００３６】この搬送用ローラ11は、紫外線（ＵＶ）の
照射を受け、またオゾン雰囲気中に配されるために、こ
の紫外線（ＵＶ）照射を長時間受けても劣化しないもの
を採用する必要があるが、本実施例では以下のように構
成している。The transfer roller 11 receives ultraviolet rays (UV) and is arranged in an ozone atmosphere. Therefore, it is necessary to employ a roller which does not deteriorate even if it receives the ultraviolet rays (UV) for a long time. However, in this embodiment, the configuration is as follows.
【００３７】本実施例の搬送用ローラ11の本体であるロ
ーラ体５は、軸受孔部９を有する一対の金属製挟持部10
で構成し、この金属製の挟持部10間にドーナツ板形状に
形成した樹脂部６をこの樹脂部６の外周部を前記金属製
の挟持部10間から突出状態となるように挟持配設してロ
ーラ体５に樹脂部６を外周に突出状態に設けた構成とし
ている。The roller body 5, which is the main body of the carrying roller 11 of this embodiment, includes a pair of metal sandwiching portions 10 having bearing hole portions 9.
And a resin part 6 formed in the shape of a donut plate between the metal sandwiching parts 10 is disposed so as to sandwich the outer periphery of the resin part 6 from the space between the metal sandwiching parts 10. The roller body 5 is provided with a resin portion 6 on the outer periphery in a protruding state.
【００３８】即ち、このローラ体５の一方の挟持部10
は、板状基体の一方側に筒状の軸受孔部９を一体突出形
成した構成とし、この一方の挟持部10には軸受孔部９に
挿入した前記支軸４に締め付け固定する支軸４取付用締
め付け手段12（一方の挟持部10の軸受孔部９に形成する
螺子孔12Ａと取付用螺子12Ｂにより構成）を設け、この
支軸４に締め付け固定した一方の挟持部10に他方の板状
の挟持部10を前記樹脂部６を挟んで樹脂部６挟持用締め
付け手段13（一方の挟持部10に形成する挿入孔13Ａ，他
方の挟持部10に形成する螺子孔13Ｂ，挟持用螺子13Ｃに
より構成）により挟持固定するように構成し、一方、こ
の樹脂部６挟持用締め付け手段13を緩めることで他方の
挟持部10を支軸４に沿ってスライド移動可能に構成して
いる。That is, one holding portion 10 of the roller body 5
Has a structure in which a cylindrical bearing hole portion 9 is integrally formed on one side of the plate-shaped base body, and the holding shaft 10 of this one holding portion 10 is clamped and fixed to the support shaft 4 inserted in the bearing hole portion 9. A mounting tightening means 12 (consisting of a screw hole 12A formed in the bearing hole 9 of one holding portion 10 and a mounting screw 12B) is provided, and one holding portion 10 tightened and fixed to the support shaft 4 has the other plate. Clamping means 13 for sandwiching the resin portion 6 with the resin-like sandwiching portion 10 (insertion hole 13A formed in one sandwiching portion 10, screw hole 13B formed in the other sandwiching portion 10, sandwiching screw 13C) By means of the above), the resin portion 6 is clamped and clamped by loosening, and the other clamping portion 10 is configured to be slidable along the support shaft 4.
【００３９】また、本実施例の樹脂部６は、その素材を
ポリ四フッ化エチレン（ＰＴＦＥ）を用いて形成してお
り、耐ＵＶ性能を高めている。Further, the resin portion 6 of this embodiment is made of polytetrafluoroethylene (PTFE) as its material, so that the UV resistance is enhanced.
【００４０】また、本実施例の樹脂部６は、ドーナツ板
形状に形成し、この板厚の二倍以上の板長を有するよう
に形成し、より確固に前記ローラ体５の挟持部10に挟持
されると共に、より良好な耐ＵＶ性能を発揮する構成と
している。Further, the resin portion 6 of this embodiment is formed in a donut plate shape, and is formed to have a plate length that is at least twice this plate thickness, so that the pinching portion 10 of the roller body 5 can be more firmly fixed. The structure is such that it is sandwiched and exhibits better UV resistance.
【００４１】即ち、Ｏリング状とせず肉厚より長い板長
を有するドーナツ板状とすることで耐ＵＶ性能が一層高
まると共に、被洗浄物１を支承する突出外周部６Ａ以外
はできるだけ紫外線（ＵＶ）照射を受けないように金属
製の挟持部10により隠蔽状態に挟持固定されているた
め、秀れた耐久性（耐ＵＶ性能）が発揮されるように構
成している。That is, the UV resistance performance is further enhanced by using a donut plate shape having a plate length longer than the wall thickness instead of the O-ring shape, and UV rays (UV) other than the protruding outer peripheral portion 6A for supporting the article to be cleaned 1 are provided as much as possible. ) Since it is sandwiched and fixed in a concealed state by the metal sandwiching portion 10 so as not to be irradiated, it is configured to exhibit excellent durability (UV resistance).
【００４２】また、更に本実施例では、樹脂部６を単に
ＰＴＦＥのみでなく、このＰＴＦＥをベースに所定量の
充填材を含有する素材により樹脂部６を形成した構成と
している。Further, in the present embodiment, the resin portion 6 is not only made of PTFE, but the resin portion 6 is made of a material containing a predetermined amount of filler based on this PTFE.
【００４３】即ち、磨耗，曲げ，圧縮，熱膨張などの耐
久性を向上するための充填材を所定量含有した市販の充
填材入りＰＴＦＥを本実施例の搬送用ローラ11の前記樹
脂部６に採用している。[0043] That is, abrasion, bending, compression, the resin portion 6 of the transport roller 11 of this embodiment a commercially available filler inlet Ri PTFE which a filler containing a predetermined amount for improving the durability of thermal expansion Has been adopted.
【００４４】本実施例ではマイカ（ＳｉＯ2・Ｋ・Ａ
ｌ）あるいはガラス（ＳｉＯ2）あるいはカーボン
（Ｃ）をＰＴＦＥ中に所定量入れた市販の充填材入りＰ
ＴＦＥを採用した。In this embodiment, mica (SiO 2 · K · A)
l) or glass (SiO 2) or carbon (C) the Ri commercial filler inlet which takes a predetermined amount in a PTFE P
Adopted TFE.
【００４５】即ち、樹脂部６は、ＰＴＦＥに無機質の微
細な粒状若しくは微細な棒状の固体を前記充填材として
所定量含有した構成としている。[0045] That is, the resin portion 6, minerals fine granular or fine rod-like solid and the filler has a configuration containing a predetermined amount of PTFE.
【００４６】例えば、充填材にマイカ（ＳｉＯ2・Ｋ・
Ａｌ）を採用し、このマイカ（ＳｉＯ2・Ｋ・Ａｌ）を
ＰＴＦＥ中に30重量％含有させたものは、ＰＴＦＥのみ
で形成したものが単位照度20ｍＷ／ｃｍ2でＵＶ照射し
た場合、およそ2000時間の使用を超えると著しく劣化
し、ひび割れてしまったり、硬度や弾性が失われたぼろ
ぼろ質状態に劣化するのに対し、同様の条件下でおよそ
8000時間使用してもその状態は使用前とほとんど変わら
ず（ひび割れも一切生じず、変質も全く生じず）、紫外
線（ＵＶ）による劣化は極めて小さく、ほとんど使用前
と変わらぬ状態を維持することができることを出願人が
繰り返し行った耐久実験により確認している。For example, the filler may be mica (SiO 2 · K ·
Al) is used, and this mica (SiO 2 · K · Al) is contained in PTFE in an amount of 30% by weight. When it is irradiated with UV at a unit illuminance of 20 mW / cm 2 , it is about 2000 It deteriorates significantly over time, cracks, and deteriorates to a shabby state in which hardness and elasticity are lost.
Even after 8,000 hours of use, the condition is almost the same as before use (no cracking, no alteration at all), deterioration by ultraviolet rays (UV) is extremely small, and it should be maintained almost unchanged from before use. It has been confirmed by the applicant's repeated endurance experiments that this is possible.
【００４７】また、ガラス（ＳｉＯ2）をＰＴＦＥに20
重量％含有させたものは、同様に8000時間使用してもほ
とんど劣化を生じず、紫外線（ＵＶ）に対して秀れた耐
久性を発揮することを確認している。Further, glass (SiO 2 ) is added to the PTFE 20
It has been confirmed that the one containing wt% hardly deteriorates even after being used for 8,000 hours and exhibits excellent durability against ultraviolet rays (UV).
【００４８】また、カーボン（Ｃ）をＰＴＦＥに15重量
％含有させたものもまた、同様に8000時間の使用後もほ
とんど劣化を生じず、紫外線（ＵＶ）による劣化は極め
て小さく、秀れた耐ＵＶ性能を発揮することを確認して
いる。Also, the carbon (C) in which PTFE is contained in an amount of 15% by weight does not substantially deteriorate even after 8,000 hours of use, and the deterioration due to ultraviolet rays (UV) is extremely small, which is excellent. It has been confirmed that it exhibits UV performance.
【００４９】つまり、ＰＴＦＥに、無機質の微細な粒状
若しくは微細な棒状の固体を所定量入れることで、秀れ
た耐ＵＶ性能を発揮することを確認している。That is, it has been confirmed that by putting a predetermined amount of inorganic fine granular or fine rod-shaped solid into PTFE, excellent UV resistance performance is exhibited.
【００５０】この充填材入りＰＴＦＥを顕微鏡写真で確
認したところ、ＰＴＦＥ中において充填材の周囲に、充
填材を含有しない時には見られない微細な空隙が多数
（無数）散在形成されており、この微細な多数（無数）
の空隙が耐ＵＶ性能を飛躍的に向上させる一因となって
いるものと推測される。[0050] When checking this filling material input Ri PTFE micrographs, around the filler in a PTFE, are provided not fine air gap which viewed many (countless) interspersed formed when containing no filler, This fine number (innumerable)
Empty gap of it is presumed that have contributed to significantly improve the resistance to UV performance.
【００５１】即ち、例えば、この充填材を微細な粒状若
しくは微細な棒状の固体として無機質のマイカ，ガラ
ス，あるいはカーボンなどをＰＴＦＥに混入して成形し
た樹脂部６とすることで、この充填材の周囲に多数（無
数）の微細な空隙が形成され、ＰＴＦＥの組織にＰＴＦ
Ｅ単独のときにはなかった数ミクロンオーダーの前記空
隙が多数（無数）散在形成された組織構造とすることが
できる。[0051] That is, for example, inorganic this filler as a fine granular or fine rod-like solid mica, glass or by a resin section 6 and the like is molded by mixing the PTFE carbon, the filler fine air gap of a number (countless) is formed around, PTF to PTFE tissue
The empty space on the order of several microns, which was not available when E was used alone
Gap can be a large number (countless) interspersed formed tissue structure.
【００５２】従って、おそらくＵＶ照射を長時間受ける
ことで樹脂材が収縮するが、この多数の空隙の存在によ
りこの収縮をこの空隙が許容すると推測される。即ち、
この空隙が収縮によって更に小さくなるだけで、長時間
ＵＶ照射を受けても変質しない。言いかえれば、空隙の
ない単なるＰＴＦＥの場合は、この収縮によってぼろぼ
ろ質に変質してしまい硬度と弾性が失われ亀裂が生じる
こととなるが、本発明の充填材入りＰＴＦＥではこの空
隙が組織に予め多数形成されているため、長時間ＵＶ照
射してもこの空隙が収縮するだけですみ、変質が生じな
いものと推測される。[0052] Thus, perhaps the resin material by receiving long UV irradiation is contracted, the presence of the large number of air gap the contraction this air gap is presumed allowed. That is,
Only the air gap is further reduced by the contraction, no deterioration even long subjected to UV irradiation. In other words, in the case of mere PTFE without <br/> empty gap, but hardness and elasticity will be changed into shabby quality by this shrinkage is that a crack is lost occurs, the filler inlet Ri PTFE of the present invention Then this sky
Since gap is previously formed in a large number in the tissue, only it needs a long period of time even if UV irradiation The air gap shrinks, it is presumed that deterioration does not occur.
【００５３】従って、本実施例の樹脂部６は、ＰＴＦＥ
中に数ミクロンオーダーの多数（無数）の空隙を散在形
成し得る磨耗，曲げ，圧縮，熱膨張などの耐久性を向上
するための充填材、具体的には無機質の微細な粒状若し
くは微細な棒状の固体の混入により、秀れた耐ＵＶ性能
を発揮する。Therefore, the resin portion 6 of this embodiment is made of PTFE.
Check gap may interspersed formation wear of many order of several microns (countless) during bending, compression, fillers for improving the durability such as thermal expansion, specifically, fine granular or fine inorganic Excellent UV resistance is achieved by mixing rod-shaped solids.
【００５４】即ち、本実施例での充填材は、この空隙を
形成し得るものであれば、前記の例示した充填材に限ら
れない。言いかえれば、無機質の微細な粒状若しくは棒
状の固体ならば、前記例示した充填材に限られない。[0054] That is, in the filler embodiment, as long as it is capable of this air gap the <br/> formation is not limited to the exemplified filler of the. In other words, if the inorganic fine granular or rod-like solid, but not limited to the illustrated filler.
【００５５】従って、充填材としてはマイカ，ガラス，
カーボンの他、例えば酸化チタン，酸化ジルコニウム，
酸化アルミニウム，炭化ケイ素としても良く、同様の作
用効果を発揮する。[0055] Therefore, mica as a filler, glass,
Other than carbon, for example, titanium oxide, zirconium oxide,
Aluminum oxide or silicon carbide may be used, and the same action and effect are exhibited.
【００５６】また、ＰＴＦＥに混入する充填材の含有量
は15〜30重量％とすることで前記作用効果が良好に発揮
される。即ち、充填材の含有量を15％よりも少なくする
と、前記使用耐久時間が飛躍的に向上するという本実施
例の前記効果が十分でなくなる恐れがあり、また、30重
量％よりも多くすると樹脂部６の成形に支承をきたす恐
れがある。 The content of the filler mixed in the PTFE is 15 to 30% by weight, so that the above-mentioned effects can be exhibited well. That is, if the content of the filler is less than 15%, the effect of the present embodiment that the use durability time is dramatically improved may be insufficient, and if it is more than 30% by weight, the resin There is a risk that the molding of the part 6 will be supported.
【００５７】また、本実施例では、環状形状の樹脂部６
に分断部14を一ヶ所設けた構成、若しくは分断部14を複
数ヵ所設けて複数の分断樹脂部６Ｃにより全体として環
状形状となるように構成して、架設固定されている前記
支軸４を取り外さなくてもこの分断部14を介して支軸４
から前記樹脂部６を着脱し得るように構成している。Further, in this embodiment, the annular resin portion 6 is used.
In the configuration in which the dividing portion 14 is provided at one place, or the dividing portion 14 is provided at a plurality of places so as to form an annular shape as a whole by the plurality of dividing resin portions 6C, the erected and fixed support shaft 4 is removed. Even if it is not provided, the support shaft 4 is provided through the dividing portion 14.
The resin part 6 can be attached and detached.
【００５８】具体的には、本実施例では前記環状の樹脂
部６の対向位置に二ヶ所の分断部14を設け、架設固定さ
れている前記支軸４を取り外さなくてもこの分断部14を
介して支軸４から樹脂部６を着脱し得るように構成して
いる。Specifically, in the present embodiment, two dividing portions 14 are provided at positions facing the annular resin portion 6, and the dividing portions 14 are fixed even if the supporting shaft 4 fixedly installed is not removed. The resin portion 6 can be attached to and detached from the support shaft 4 via the shaft.
【００５９】即ち、ローラ体５には、挟持部10間に挟持
配設するこの樹脂部６を締め付け挟持固定する樹脂部６
挟持用締め付け手段13を設け、この挟持用締め付け手段
13を緩めることで樹脂部６を前記分断部14を介して支軸
４から着脱し得るように構成している。That is, on the roller body 5, the resin portion 6 sandwiched between the sandwiching portions 10 is clamped and fixed.
The clamping means 13 for clamping is provided, and the clamping means for clamping is
The resin portion 6 can be attached to and detached from the support shaft 4 via the dividing portion 14 by loosening 13.
【００６０】具体的には、このローラ体５の少なくとも
一方の挟持部10に前記軸受孔部９に挿入した前記支軸４
に締め付け固定する支軸４取付用締め付け手段12を設
け、この支軸４に締め付け固定した一方の挟持部10に他
方の挟持部10を前記樹脂部６を挟持して樹脂部６挟持用
締め付け手段13で挟持固定するように構成し、この樹脂
部６挟持用締め付け手段13を緩めることで他方の挟持部
10を支軸４に沿ってスライド移動し、この挟持部10間か
ら樹脂部６を前記分断部14を介して支軸４から着脱し得
るように構成している。Specifically, the support shaft 4 inserted into the bearing hole 9 in at least one holding portion 10 of the roller body 5.
A fastening means 12 for mounting the support shaft 4 for fastening and fixing to the support shaft 4 is provided, and one holding portion 10 fastened and fixed to the support shaft 4 holds the other holding portion 10 for holding the resin portion 6 and tightening means for holding the resin portion 6. It is configured to be clamped and fixed by 13, and by loosening the resin portion 6 clamping means 13 for clamping, the other clamping portion
10 is slid along the support shaft 4, and the resin portion 6 can be attached to and detached from the support shaft 4 through the dividing portion 14 between the holding portions 10.
【００６１】従って、ローラ体５が支軸４に止着固定し
た状態であっても、つまり、挟持部10が支軸４に取り付
けられたままの状態であっても、その分断部14を介して
支軸４から取り外すことができ、長時間の紫外線（Ｕ
Ｖ）照射により劣化した樹脂部６のみを交換できること
となる。Therefore, even when the roller body 5 is fixedly fixed to the support shaft 4, that is, even when the holding portion 10 is still attached to the support shaft 4, the dividing portion 14 is interposed therebetween. It can be removed from the support shaft 4 by using the
V) Only the resin part 6 deteriorated by irradiation can be replaced.
【００６２】従って、本実施例の搬送用ローラ11は、極
めて秀れたメンテナンス性を発揮し得るＵＶ洗浄装置に
おける搬送用ローラとなる。Therefore, the carrying roller 11 of the present embodiment is a carrying roller in a UV cleaning device which can exhibit extremely excellent maintenance.
【００６３】尚、本実施例の図１，図２に示すＵＶ洗浄
装置の構成について説明する。The structure of the UV cleaning apparatus of this embodiment shown in FIGS. 1 and 2 will be described.
【００６４】本実施例のＵＶ洗浄装置ａは、紫外線ラン
プ３を多数並設した洗浄室２の両端に、（被洗浄物１と
しての）薄板状の大型基板１を多数並設した前記搬送用
ローラ11上に水平架設状態にして送り込み搬送する搬入
口16と搬出口17とを設け、この洗浄室２はこの搬入口16
と搬出口17を残して封止状態に構成している。The UV cleaning apparatus a of this embodiment has a large number of thin plate-like substrates 1 (as the objects to be cleaned 1) arranged in parallel at both ends of a cleaning chamber 2 in which a large number of ultraviolet lamps 3 are arranged in parallel. A carry-in port 16 and a carry-out port 17 are provided on the roller 11 so as to be horizontally installed and fed, and the cleaning chamber 2 is provided with the carry-in port 16.
And the carrying-out port 17 is left to be configured in a sealed state.
【００６５】この搬入口16と搬出口17とを覆う外装室18
を夫々搬送方向に沿って連設状態に設け、この外装室18
に夫々搬入口16Ａ，搬出口17Ａを設け、被洗浄物１が前
記洗浄室２に搬入される場合は、搬入口16Ａ，外装室1
8，搬入口16を順次通過して搬入され、紫外線洗浄後搬
出される場合は、搬出口17，外装室18，搬出口17Ａを順
次通過して搬出されるように構成している。Exterior room 18 covering the carry-in port 16 and the carry-out port 17
Are installed in a row along the transport direction, and the exterior chamber 18
16A of carry-in ports and 17A of carry-out ports are provided respectively, and when the object to be cleaned 1 is carried into the cleaning chamber 2, the carry-in port 16A and the exterior chamber 1
8. When it is carried in sequentially through the carry-in port 16 and carried out after being cleaned with ultraviolet rays, it is carried out by successively passing through the carry-out port 17 , the exterior chamber 18 , and the carry-out port 17A .
【００６６】更に具体的に説明すれば、本実施例では、
搬入口16Ａと搬出口17Ａとを有する（開閉上蓋19によっ
て開放可能な）搬入収納部内に前記搬入口16と搬出口17
とを残して仕切区画する仕切部20を突設して、この搬入
収納部内に前記洗浄室２とその左右に夫々前記外装室18
とを設けた構成とし、いわば従来の洗浄室２の搬入口16
と搬出口17の夫々の外側に更に補助室として外装室18を
連設し、いわゆる全体として二重室構造に構成してい
る。More specifically, in the present embodiment,
Entrance 16A and outlet port 17A and to the carry-in port 16 in the carry-containing portion (openable by the opening and closing top cover 19) having an unloading port 17
A partition part 20 for partitioning is left behind, and the cleaning chamber 2 and the exterior chambers 18 on the left and right sides thereof are provided in the carry-in / storing part.
With the configuration provided with, so to speak, the carry-in port 16 of the conventional cleaning chamber 2
Further, an exterior chamber 18 is continuously provided as an auxiliary chamber outside each of the carry-out port 17 and has a so-called double-chamber structure as a whole.
【００６７】そしてこのような二重室構造とした上で従
来例のように搬入搬出口16，17から外部へ多量に漏れる
ことを恐れて洗浄室２からオゾン雰囲気を直接強力に排
気する構成とせずに、洗浄室２はあくまでオゾン雰囲気
が十分に充満できる構成とし、この洗浄室２の搬入口1
6，搬出口17から一旦必ず外装室18に漏れ出るオゾン雰
囲気を排気するように外装室18に排気部21を設けてい
る。In addition to such a double chamber structure, the ozone atmosphere is strongly exhausted directly from the cleaning chamber 2 in the fear of a large amount of leakage from the carry-in / carry-out ports 16 and 17 to the outside as in the conventional example. Instead, the cleaning chamber 2 is configured so that the ozone atmosphere can be sufficiently filled, and the inlet 1 of the cleaning chamber 2
6. An exhaust unit 21 is provided in the exterior chamber 18 so that the ozone atmosphere that leaks from the carry-out port 17 to the exterior chamber 18 is always exhausted.
【００６８】従って、本装置ａの周囲に漏れ出ないよう
に洗浄室２の外側の外装室18から排気するため、紫外線
ランプ３によって生じるオゾン雰囲気が洗浄室２を充満
した上で洗浄室２外の外装室18へ漏れ出て、本装置ａ周
囲に漏らすことなくこの外装室18内で排気するため、本
装置ａの設置周囲に漏れ出ないように洗浄室２内から直
接強力に排気する従来例とは異なり、洗浄室２内のオゾ
ン濃度を高く保持することができることとなる。Therefore, the exhaust gas is exhausted from the exterior chamber 18 outside the cleaning chamber 2 so as not to leak around the apparatus a, so that the ozone atmosphere generated by the ultraviolet lamp 3 fills the cleaning chamber 2 and then the outside of the cleaning chamber 2. It leaked to the exterior chamber 18, the apparatus a for exhausting in the exterior chamber 18 without leaking around, conventional strongly exhausted directly from the apparatus inside the washing chamber 2 so placed does not leak around the a Unlike the example, the ozone concentration in the cleaning chamber 2 can be kept high.
【００６９】即ち、本装置ａの設置周囲のオゾン雰囲気
漏れを従来例よりも完全に防止できる上、前記洗浄室２
内のオゾン濃度は、従来例に比して同じＵＶ照射量であ
っても高く保持できることとなる。That is, leakage of ozone atmosphere around the installation of the apparatus a can be completely prevented as compared with the conventional example, and the cleaning chamber 2
As compared with the conventional example, the ozone concentration in the inside can be kept high even with the same UV irradiation amount.
【００７０】本実施例においては、洗浄室２内にオゾン
濃度検知装置22（オゾンチェックポート）を所定間隔を
置いて多数並設し、このオゾン濃度検知装置22に基づ
き、洗浄室２内のオゾン濃度の微調整や不均一な場合の
濃度分布調整のために、外装室18だけでなく洗浄室２内
にもオゾン雰囲気を排気する濃度分布調整用の排気部23
を複数か所に配設し、この各排気部23を前記オゾン濃度
検知装置22に基づきコンピュータ制御作動させてオゾン
濃度が洗浄室２内で均一となるように構成している。In the present embodiment, a large number of ozone concentration detecting devices 22 (ozone check ports) are arranged side by side in the cleaning chamber 2 at predetermined intervals, and based on the ozone concentration detecting devices 22 , ozone in the cleaning chamber 2 is discharged. An exhaust unit 23 for adjusting the concentration distribution that exhausts the ozone atmosphere not only in the exterior chamber 18 but also in the cleaning chamber 2 for the fine adjustment of the concentration and the concentration distribution adjustment in the case of non-uniformity.
Are arranged in a plurality of places, and each of the exhaust portions 23 is computer-controlled based on the ozone concentration detecting device 22 so that the ozone concentration becomes uniform in the cleaning chamber 2.
【００７１】また、前記外装室18の前記排気部21からの
排気によって前記外装室18の搬入口16Ａ並びに搬出口17
Ａから外気が吸入されるため、いわゆるエアカーテンが
生じて、前記外装室18外の前記本装置ａの設置周囲へこ
の搬入口16Ａ並びに搬出口17Ａから外装室18内のオゾン
雰囲気が確実にシャットアウトされる。[0071] Further, inlet port 16A and carry-out port of the outer chamber 18 by the exhaust from the exhaust portion 21 of the outer chamber 18 17
Since the outside air from the A is sucked, caused a so-called air curtain, this entrance 16A and an ozone atmosphere reliably shut the exterior chamber 18 from the carry-out port 17A to the installation surroundings of the present device a outside the outer chamber 18 Will be out.
【００７２】以上のように本実施例では、二重室構造ゆ
えにＵＶ洗浄装置ａの周囲へのオゾン雰囲気漏れを防止
でき周囲環境を悪化させることがない上、本実施例での
仕切部20を有しなく外装室18を有しない従来例では、洗
浄室２内のオゾン濃度が２０〜４０ＰＰＭでしかも不均
一であるのに対し、本実施例では同じ紫外線の累積照度
に対して１００〜１５０ＰＰＭと洗浄室２内を高いオゾ
ン濃度に保持でき、接触角を約１.５倍小さくでき、し
かも均一な濃度となり洗浄効果が飛躍的に向上したこと
が確認できた。しかも、前述のように本実施例ではオゾ
ン濃度検知装置22によって検知しつつ複数配設した洗浄
室２内の排気部23による排気調整によって一層洗浄室２
内のオゾン濃度分布を均一化できるため、極めて高い洗
浄能力が発揮されることとなる。As described above, in this embodiment, due to the double-chamber structure, it is possible to prevent the ozone atmosphere from leaking to the periphery of the UV cleaning device a and prevent the ambient environment from deteriorating, and the partition 20 in this embodiment is used. In the conventional example that does not have the exterior chamber 18 and does not have the exterior chamber 18 , the ozone concentration in the cleaning chamber 2 is 20 to 40 PPM and is non-uniform, whereas in the present embodiment, it is 100 to 150 PPM for the same cumulative illuminance of ultraviolet rays. It was confirmed that the inside of the cleaning chamber 2 could be kept at a high ozone concentration, the contact angle could be reduced by about 1.5 times, and the concentration could be made uniform, resulting in a dramatic improvement in the cleaning effect. In addition, as described above, in the present embodiment, the exhaust gas is adjusted by the exhaust portions 23 in the cleaning chambers 2 which are arranged while being detected by the ozone concentration detecting device 22 , so that the cleaning chamber 2 can be further cleaned.
Since the ozone concentration distribution in the inside can be made uniform, an extremely high cleaning ability is exhibited.
【００７３】また、そのため高価な大出力ランプや紫外
線照射時間を長くする必要がないため、製作コストやラ
ンニングコストの削減を図ることも可能となる。Further, since it is not necessary to lengthen the expensive high-power lamp and the ultraviolet irradiation time, it is possible to reduce the manufacturing cost and running cost.
【００７４】また、本実施例の紫外線ランプ３は、低圧
水銀ランプを使用し、処理温度をＩＲヒータによって１
００〜２５０℃とし、洗浄室２内のオゾン濃度を５００
〜１０００ＰＰＭとし、例えば数百ｍｍ角の大型基板を
ＵＶ照射，高濃度オゾン，温度加熱の相乗効果によって
良好な乾式洗浄ができるように構成している。The ultraviolet lamp 3 of this embodiment uses a low-pressure mercury lamp, and the processing temperature is set to 1 by an IR heater.
The ozone concentration in the cleaning chamber 2 is 500
˜1000 PPM, for example, a large substrate of several hundreds mm square is configured to be able to perform good dry cleaning by the synergistic effect of UV irradiation, high-concentration ozone, and temperature heating.
【００７５】尚、図中符号24は温度検知装置（温度チェ
ックポート）である。Reference numeral 24 in the figure denotes a temperature detecting device (temperature check port).
【００７６】尚、本発明は、本実施例に限られるもので
はなく、各構成要件の具体的構成は適宜設計し得るもの
である。The present invention is not limited to this embodiment, and the specific constitution of each constituent element can be appropriately designed.
【００７７】[0077]
【発明の効果】本発明は上述のように構成したから、こ
れまで使用してきた樹脂材であるポリ四フッ化エチレン
（ＰＴＦＥ）をベースに、これに所定の充填材を加えた
樹脂材により樹脂部を形成することで、被洗浄物を傷つ
けにくく、これまでの使用時間（寿命）を飛躍的に向上
させた画期的且つ実用的なＵＶ洗浄装置における搬送用
ローラとなる。EFFECTS OF THE INVENTION Since the present invention is constructed as described above, a resin material is obtained by adding a predetermined filler to the base of polytetrafluoroethylene (PTFE), which is the resin material used so far. By forming the portion, it becomes a conveyance roller in an epoch-making and practical UV cleaning device in which the object to be cleaned is less likely to be damaged and the usage time (life) up to now is dramatically improved.
【００７８】即ち、例えば摩耗，曲げ，圧縮などの耐久
性を向上するために強化した充填材入りＰＴＦＥをこの
ＵＶ洗浄装置の搬送用ローラの樹脂部として採用するこ
とで、紫外線（ＵＶ）照射及びオゾン雰囲気中で被洗浄
物を長時間搬入・搬出のため使用しても、即ち、ＵＶ照
射を長時間受けても、オゾン雰囲気中に長時間あって
も、変質劣化せず亀裂なども一切生じないＵＶ洗浄装置
における搬送用ローラとなる。That is, by adopting the filler-containing PTFE reinforced to improve the durability against abrasion, bending, compression, etc. as the resin portion of the transport roller of this UV cleaning device, ultraviolet (UV) irradiation and Even if the object to be cleaned is used for loading and unloading for a long time in the ozone atmosphere, that is, even if it is exposed to UV irradiation for a long time, and even if it is in the ozone atmosphere for a long time, it does not deteriorate and does not cause any cracks. It becomes a transport roller in a UV cleaning device that does not have it.
【００７９】言いかえれば、ローラ体の樹脂部をＰＴＦ
Ｅだけでなく、例えばこのＰＴＦＥをベースに充填材
（例えばマイカ，ガラス，カーボンなど）を所定量含有
した素材で樹脂部を形成することで、被洗浄物を極めて
傷つけにくい構成でありながら、これまでの耐久使用限
界（寿命）を飛躍的に向上させることができるＵＶ洗浄
装置における搬送用ローラとなる。In other words, the resin portion of the roller body is
In addition to E, by forming the resin portion with a material containing a predetermined amount of a filler (for example, mica, glass, carbon, etc.) based on this PTFE, the structure to be cleaned is extremely hard to be damaged, It becomes a conveyance roller in a UV cleaning device that can dramatically improve the endurance use limit (life) up to.
【００８０】請求項２〜５記載の発明においては、前記
発明の作用・効果が確実に発揮されるＵＶ洗浄装置にお
ける搬送用ローラとなる。According to the second to fifth aspects of the invention, the roller is a carrying roller in the UV cleaning device in which the action and effect of the invention can be surely exhibited.
【００８１】請求項６記載の発明においては、Ｏリング
状とせず肉厚より長い板長を有するドーナツ板状とする
ことで耐ＵＶ性能が一層高まると共に、被洗浄物を支承
する突出外周部以外はできるだけ紫外線（ＵＶ）照射を
受けないように金属製の挟持部により隠蔽状態に挟持固
定されているため、一層秀れた耐久性（耐ＵＶ性能）を
発揮する極めて画期的なＵＶ洗浄装置における搬送用ロ
ーラとなる。According to the sixth aspect of the present invention, the UV resistance is further improved by forming the donut plate shape having a plate length longer than the wall thickness instead of the O ring shape, and at the same time, except for the protruding outer peripheral portion for supporting the object to be cleaned. Is a highly innovative UV cleaning device that exhibits superior durability (UV resistance) because it is sandwiched and fixed in a concealed state by a metal sandwiching unit so that it is not irradiated with ultraviolet rays (UV) as much as possible. It becomes a carrying roller.
【図面の簡単な説明】[Brief description of drawings]
【図１】本実施例のＵＶ洗浄装置の概略構成説明図であ
る。FIG. 1 is a schematic configuration explanatory view of a UV cleaning device of this embodiment.
【図２】本実施例のＵＶ洗浄装置の洗浄室並びに外装室
を蓋を持ち上げて開放した状態での説明斜視図である。FIG. 2 is an explanatory perspective view showing a state in which a cleaning chamber and an exterior chamber of the UV cleaning apparatus of this embodiment are lifted up and opened.
【図３】本実施例の分解説明斜視図である。FIG. 3 is an exploded perspective view of the present embodiment.
【図４】本実施例の使用状態を示す説明斜視図である。FIG. 4 is an explanatory perspective view showing a usage state of the present embodiment.
【図５】本実施例の使用状態を示す説明断面図である。FIG. 5 is an explanatory cross-sectional view showing a usage state of the present embodiment.
【図６】本実施例の一部を切欠いた説明拡大斜視図であ
る。FIG. 6 is an explanatory enlarged perspective view in which a part of the present embodiment is cut away.
【図７】本実施例の挟持用締め付け手段を緩めて一方の
挟持部に対して他方の挟持部を少しスライド移動させた
開放状態を示す（樹脂部を形成する二つの分断樹脂部を
取り外すことを示す）一部を切欠いた説明拡大斜視図で
ある。FIG. 7 shows an opened state in which the clamping means for clamping of the present embodiment is loosened and the other clamping part is slid with respect to one clamping part (removing the two divided resin parts forming the resin part). FIG. 4 is an explanatory enlarged perspective view with a part cut away.
【符号の説明】 １ 被洗浄物 ２ 洗浄室 ３ 紫外線ランプ ４ 支軸 ５ ローラ体 ６ 樹脂部 ９ 軸受孔部 10 挟持部 ａ ＵＶ洗浄装置[Explanation of symbols] 1 to-be-cleaned 2 washing room 3 UV lamp 4 spindles 5 roller body 6 Resin part 9 Bearing hole 10 clamping part a UV cleaning device
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｈ０１Ｌ 21/304 ６４５ Ｈ０１Ｌ 21/304 ６４５Ｄ ６４８ ６４８Ｂ 21/68 21/68 Ａ // Ｂ６５Ｇ 49/07 Ｂ６５Ｇ 49/07 Ｂ (72)発明者 岸本 真一 新潟県長岡市高見１丁目６番地13 クリー ン・テクノロジー株式会社内 Ｆターム(参考） 3B116 AA01 AB14 AB47 BB82 BC01 CD11 CD41 3F033 GA06 GB02 GB08 GC04 GD07 GE01 5F031 CA05 FA02 GA53 HA02 HA57 HA60 JA01 JA45 MA23 NA01 NA07 NA11 PA23 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) H01L 21/304 645 H01L 21/304 645D 648 648B 21/68 21/68 A // B65G 49/07 B65G 49 / 07 B (72) Inventor Shinichi Kishimoto 1-6-6 Takami, Nagaoka City, Niigata 13 F-Term inside Clean Technology Co., Ltd. (reference) 3B116 AA01 AB14 AB47 BB82 BC01 CD11 CD41 3F033 GA06 GB02 GB08 GC04 GD07 GE01 5F031 CA05 FA02 GA53 HA02 HA57 HA60 JA01 JA45 MA23 NA01 NA07 NA11 PA23
Claims (6)
ンプを設け、この紫外線ランプの紫外線（ＵＶ）照射に
よって有機物の分子鎖を分断し、ついでこの紫外線ラン
プの紫外線（ＵＶ）照射によって洗浄室内にオゾンを発
生させ、このオゾンの分解・生成反応過程の酸化力の強
い発生期の酸素（Ｏ）と有機物との反応により被洗浄物
の表面有機物を除去するように構成したＵＶ洗浄装置の
前記洗浄室内に前記被洗浄物を搬入若しくは搬出するた
め支軸に設ける搬送用ローラであって、前記支軸に設け
るローラ体に前記被洗浄物を支承する樹脂部を外周に突
出状態に設け、若しくは前記支軸に設けるローラ体自体
を樹脂材で構成して、このローラ体自体を前記被洗浄物
を支承する樹脂部とし、前記樹脂部をポリ四フッ化エチ
レン（ＰＴＦＥ）をベースに充填材を所定量含有した樹
脂材で構成したことを特徴とするＵＶ洗浄装置における
搬送用ローラ。1. An ultraviolet lamp is provided in a cleaning chamber into which an object to be cleaned is loaded, the molecular chain of an organic substance is cut off by irradiation with ultraviolet rays (UV) of the ultraviolet lamp, and then the cleaning chamber is irradiated with ultraviolet rays (UV) of the ultraviolet lamp. Of the UV cleaning apparatus configured to generate ozone in the ozone and remove the surface organic matter of the object to be cleaned by the reaction of oxygen (O) and organic matter in the nascent period of strong oxidative power of the ozone decomposition / generation reaction process. A transport roller provided on a support shaft for loading or unloading the object to be cleaned into a cleaning chamber, wherein a roller body provided on the support shaft is provided with a resin portion for supporting the object to be cleaned in a protruding state on the outer periphery, or The roller body itself provided on the support shaft is made of a resin material, and the roller body itself serves as a resin portion for supporting the object to be cleaned, and the resin portion is made of polytetrafluoroethylene (PTFE). A conveyance roller in a UV cleaning device, characterized in that the base is made of a resin material containing a predetermined amount of a filler.
（ＰＴＦＥ）に磨耗，曲げ，圧縮などの耐久性を向上す
るための充填材を所定量含有した樹脂材で構成したこと
を特徴とする請求項１記載のＵＶ洗浄装置における搬送
用ローラ。2. The resin portion is made of a resin material containing a predetermined amount of a filler for improving durability against abrasion, bending, compression and the like in polytetrafluoroethylene (PTFE). The transport roller in the UV cleaning device according to claim 1.
（ＰＴＦＥ）の組織に微細な空隙を周囲に多数形成する
充填材を所定量含有した樹脂材で構成したことを特徴と
する請求項１，２のいずれか１項に記載のＵＶ洗浄装置
における搬送用ローラ。3. The resin portion is made of a resin material containing a predetermined amount of a filler that forms a large number of fine voids in the structure of polytetrafluoroethylene (PTFE). 2. The transfer roller in the UV cleaning device according to any one of 1.
（ＰＴＦＥ）に無機質の微細な粒状若しくは微細な棒状
の固体を前記充填材として所定量含有した樹脂材で構成
したことを特徴とする請求項１〜３のいずれか１項に記
載のＵＶ洗浄装置における搬送用ローラ。4. The resin portion is made of a resin material containing a predetermined amount of inorganic fine granular or fine rod-shaped solid in polytetrafluoroethylene (PTFE) as the filler. Item 4. A conveyance roller in the UV cleaning device according to any one of Items 1 to 3.
ン（ＰＴＦＥ）をベースに15〜30重量％含有せしめたこ
とを特徴とする請求項１〜４のいずれか１項に記載のＵ
Ｖ洗浄装置における搬送用ローラ。5. The U according to claim 1, wherein the filler contains 15 to 30% by weight of the polytetrafluoroethylene (PTFE) as a base.
Conveyor roller in V cleaning device.
の金属製挟持部で構成し、この金属製挟持部間にドーナ
ツ板形状に形成した前記樹脂部をこの樹脂部の外周部を
前記金属製挟持部間から突出状態となるように挟持配設
してローラ体に樹脂部を外周に突出状態に設けた構成と
したことを特徴とする請求項１〜５のいずれか１項に記
載のＵＶ洗浄装置における搬送用ローラ。6. The roller body comprises a pair of metal sandwiching portions having bearing hole portions, and the resin portion formed in a donut plate shape between the metal sandwiching portions has an outer peripheral portion of the resin portion. 6. The roller body is provided with a resin portion so as to project from the space between the metal sandwiching portions, and a resin portion is provided on the outer periphery in a projecting state. Conveying rollers in the UV cleaning device.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001210917A JP2003020112A (en) | 2001-07-11 | 2001-07-11 | Conveyance roller in uv cleaning device |
| TW090128702A TW500643B (en) | 2001-07-11 | 2001-11-20 | Conveyance roller for UV cleaning device |
| KR10-2001-0079245A KR100497582B1 (en) | 2001-07-11 | 2001-12-14 | Transport roller in UV cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001210917A JP2003020112A (en) | 2001-07-11 | 2001-07-11 | Conveyance roller in uv cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003020112A true JP2003020112A (en) | 2003-01-21 |
Family
ID=19046317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001210917A Pending JP2003020112A (en) | 2001-07-11 | 2001-07-11 | Conveyance roller in uv cleaning device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2003020112A (en) |
| KR (1) | KR100497582B1 (en) |
| TW (1) | TW500643B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003095341A1 (en) * | 2002-05-14 | 2003-11-20 | Japan Storage Battery Co., Ltd. | Conveying device |
| JP2007150128A (en) * | 2005-11-30 | 2007-06-14 | Air Water Inc | Surface treatment equipment |
| JP2014133615A (en) * | 2013-01-09 | 2014-07-24 | Ushio Inc | Transport roller |
| CN104495273A (en) * | 2014-12-04 | 2015-04-08 | 合肥京东方光电科技有限公司 | Roller component and conveying device |
| JP2015120129A (en) * | 2013-12-25 | 2015-07-02 | ウシオ電機株式会社 | Light irradiation device |
| EP2032473A4 (en) * | 2006-06-26 | 2017-01-11 | American Sterilizer Company | Self- adjusting conveyor system |
| JP7569661B2 (en) | 2020-10-26 | 2024-10-18 | ニデックインスツルメンツ株式会社 | Substrate transport device and inspection device |
-
2001
- 2001-07-11 JP JP2001210917A patent/JP2003020112A/en active Pending
- 2001-11-20 TW TW090128702A patent/TW500643B/en not_active IP Right Cessation
- 2001-12-14 KR KR10-2001-0079245A patent/KR100497582B1/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003095341A1 (en) * | 2002-05-14 | 2003-11-20 | Japan Storage Battery Co., Ltd. | Conveying device |
| JP2007150128A (en) * | 2005-11-30 | 2007-06-14 | Air Water Inc | Surface treatment equipment |
| EP2032473A4 (en) * | 2006-06-26 | 2017-01-11 | American Sterilizer Company | Self- adjusting conveyor system |
| JP2014133615A (en) * | 2013-01-09 | 2014-07-24 | Ushio Inc | Transport roller |
| JP2015120129A (en) * | 2013-12-25 | 2015-07-02 | ウシオ電機株式会社 | Light irradiation device |
| WO2015098387A1 (en) * | 2013-12-25 | 2015-07-02 | ウシオ電機株式会社 | Light irradiation device |
| CN104495273A (en) * | 2014-12-04 | 2015-04-08 | 合肥京东方光电科技有限公司 | Roller component and conveying device |
| US10087015B2 (en) | 2014-12-04 | 2018-10-02 | Boe Technology Group Co., Ltd. | Roller assembly and transmission device |
| JP7569661B2 (en) | 2020-10-26 | 2024-10-18 | ニデックインスツルメンツ株式会社 | Substrate transport device and inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100497582B1 (en) | 2005-07-01 |
| KR20030006899A (en) | 2003-01-23 |
| TW500643B (en) | 2002-09-01 |
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