JP2003094369A - Work suction transfer device - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To provide a work suction and conveyance device capable of stably removing a work. SOLUTION: In a suction transfer device for picking up an electronic component 3 by vacuum suction and transferring it to a predetermined position, a suction hole 8b communicating with a suction hole 9c opened in a suction surface 9b which abuts on the electronic component 3 and suctions by vacuum. Is provided with a check valve 30 which is provided in communication with the suction hole 8b to allow gas flow to the outside, and is provided with a compressed air for releasing the suction-held electronic component 3 from the suction surface 9b. When the compressed air is supplied into the suction hole 8b by the supply means 24, a predetermined ratio of the compressed air is discharged to the outside of the suction hole 8b by the check valve 30. Thus, it is possible to always release an appropriate amount of air from the suction hole 9c and stably release the vacuum suction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction and transfer device for a work such as a semiconductor chip that picks up and transfers the work by vacuum suction.

[0002]

2. Description of the Related Art In a manufacturing process of a semiconductor device, a carrier device for picking up a work such as a semiconductor chip and carrying it to a predetermined position is often used. In this transfer apparatus, a method of holding a work by vacuum suction using a suction nozzle is widely used. When the suction nozzle holding the work is moved to a predetermined position and then released from the suction nozzle, the vacuum suction is stopped for the purpose of releasing the suction state of the work, and an appropriate pressure is applied to the suction nozzle. Providing air is common.

For this reason, the suction transfer device for transferring a work by vacuum suction is equipped with a switching mechanism so that vacuum suction and compressed air supply can be selectively performed by the same suction nozzle. When releasing the vacuum suction, a valve for supplying compressed air provided in the switching mechanism is opened for a predetermined time to supply an appropriate amount of compressed air for separating the work into the suction nozzle. It was

[0004]

However, in the conventional suction / conveyance apparatus, it is difficult to release the vacuum suction of the work and to stably remove the work for the following reasons. Generally, since the suction hole of the suction nozzle used for vacuum suctioning a work such as a semiconductor chip has a small diameter, a small amount of air is required to release the vacuum suction. However, with the conventional method of adjusting the air amount by controlling the opening time of the compressed air supply valve, it has been difficult to stably adjust the minute air amount with the required accuracy.

That is, if the opening time of the valve is set to be short in order to obtain a minute amount of air, the amount of air supplied as the operating characteristic of the valve tends to vary, and therefore the behavior at the time of vacuum suction release is not stable. For example, if the amount of air is too small, the work may not be removed normally, and a malfunction may occur in which the work moves to the next operation while being adsorbed by the suction nozzle. A transfer error occurs in which the air is blown away and the position shifts. As described above, the conventional suction-conveying apparatus has a problem that it is difficult to stably remove the work when releasing the vacuum suction.

[0006] Therefore, an object of the present invention is to provide a work suction / conveyance device capable of stably separating a work.

[0007]

According to a first aspect of the present invention, there is provided a work suction and conveyance device which picks up a work by vacuum suction and conveys the work to a predetermined position. A suction tool provided with a suction surface for vacuum-sucking a workpiece, a suction tool provided with a suction hole opened in the suction surface, a nozzle main body provided with a suction hole communicating with the suction hole, and the nozzle main body are moved. A nozzle moving mechanism, a connection switching means for selectively connecting the suction hole to a vacuum suction means or a compressed air supply means, and a direction provided from the inside of the suction hole to the outside provided in communication with the suction hole in the nozzle body. A check valve that allows a gas flow, and when supplying compressed air into the suction hole by the compressed air supply means in order to separate the workpiece suction-held on the suction surface from the suction surface, Discharging the compressed air in a predetermined ratio to the outside of the suction hole by Kigyakutomeben.

According to a second aspect of the present invention, there is provided a suction / conveyance device for a work.
The suction / conveyance device for a work according to claim 1, wherein a diameter of the suction hole is larger than a diameter of the suction hole.

According to a third aspect of the present invention, there is provided a workpiece suction and conveyance device.
3. The workpiece suction and conveyance device according to claim 2, wherein the suction tool is detachably provided on the nozzle body.

According to a fourth aspect of the present invention, there is provided a suction and conveyance device for a work.
3. The work suction and conveyance device according to claim 2, wherein the suction tool is provided integrally with the nozzle body.

According to the present invention, there is provided a check valve which is provided in the nozzle main body and permits the flow of gas in the direction from the inside of the suction hole to the outside, and the suction hole is provided for separating the suction-held work from the suction surface. When supplying compressed air to the inside, the check valve discharges a certain proportion of compressed air to the outside of the suction hole, so that an appropriate amount of air is blown out from the suction hole, and the work can be stably released. it can.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings. 1 is a front view of an electronic component mounting apparatus according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of a transfer head of a suction transfer apparatus according to an embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. Partial cross-sectional view of the transfer head of the suction transfer device,
4 and 5 are cross-sectional views of the transfer head of the suction transfer device according to the embodiment of the present invention.

First, with reference to FIG. 1, the configuration of an electronic component mounting apparatus using a suction and conveyance device will be described. Figure 1
In FIG. 1, the component supply unit 1 includes a tray 2 for accommodating the electronic components 3 in a planar state, and the electronic components 3 are arranged with the bumps 4 facing upward.

A component take-out section 5 which is a suction conveyance device is arranged above the component supply section 1, and the component take-out section 5 is horizontally moved by a moving table 6 by a conveyance head 7.
Is equipped with. The transport head 7 includes a suction nozzle 8 that suctions and holds the electronic component 3 that is a work. The transport head 7 that suctions and holds the bump forming surface side of the electronic component 3 by the suction nozzle 8 is a moving table. By moving by 6, the electronic component 3 is transported to the component reversal position A.

Below the component reversing position A, a component reversing mechanism 10 having a revolving mechanism 11b for reciprocally revolving the component holding stage 11a is arranged. Parts holding stage 1
1a receives and holds the electronic component 3 from the suction nozzle 8 of the transport head 7 located at the component reversal position A. Then, the component holding stage 11a is turned in the direction of the arrow by the turning mechanism 11b, so that the held electronic component 3 is turned upside down into the posture with the bumps 4 facing downward.

A component transfer section 12 is disposed below the component reversing mechanism 10. The component transfer unit 12 includes a mounting stage 14 that horizontally moves by a moving table 13. The mounting stage 14 moves from the component holding stage 11a to
The bumps 4 receive and hold the electronic component 3 with the downward posture. Then, the mounting stage 14 is moved to the component supply position B by the moving table 13.

A board holding section 20 holding a board 21 is arranged beside the component transfer section 12, and the board holding section 2 is provided.
A component mounting portion 15 as a suction conveyance device is arranged above 0. The component mounting portion 15 includes a transport head 17 that horizontally moves by a moving table 16. The transport head 17 has the same configuration as the transport head 7 of the component take-out section 5, and includes a suction nozzle 18 similar to the suction nozzle 8. A conveyance head 17 that adsorbs and holds the side of the electronic component 3 opposite to the bump forming surface by the adsorption nozzle 18.
However, the moving table 16 causes the substrate 2 of the substrate holding unit 20 to move.
When the electronic component 3 is held, the held electronic component 3 is transported between the substrates 21 and mounted at a predetermined mounting position.

Next, referring to FIG. 2, the structure of the suction nozzle 8 of the component take-out section 5 will be described. Component mounting part 15
The suction nozzle 18 has the same structure. In FIG.
The suction nozzle 8 provided below the transport head 7 has a structure in which a suction tool 9 is held below a cylindrical nozzle body 8a. The transport head 7 to which the nozzle body 8a is coupled is moved by the moving table 6. Therefore, the moving table 6 serves as a nozzle moving mechanism that moves the nozzle body 8a.

The suction tool 9 has a suction surface 9b which comes into contact with the electronic component 3 and is vacuum-sucked, and the suction surface 9b has a suction hole 9c vertically penetrating therethrough. An upper portion of the suction tool 9 is a cylindrical mounting portion 9a that fits into a suction hole 8b provided inside the nozzle body portion 8a.
By inserting the mounting portion 9a into the suction hole 8b, the suction tool 9 is detachably held by the ball plunger 25 on the nozzle body 8a. When the suction tool 9 is attached to the nozzle body 8a, the suction hole 9c communicates with the suction hole 8b. Here, the diameter D of the suction hole 8b is larger than the diameter d of the suction hole 9c.

The suction hole 8b is connected to the switching valve 22 through the internal hole of the transport head 7, and the switching valve 22 is connected to the vacuum suction means 23 and the compressed air supply means 24. By switching the switching valve 22, the suction hole 8b can be selectively connected to the vacuum suction means 23 or the compressed air supply means 24. Therefore, the switching valve 22 serves as a connection switching unit that selectively connects the suction hole 8b to the vacuum suction unit 23 or the compressed air supply unit 24.

The compressed air supply means 24 is equipped with a regulator for adjusting the pressure of compressed air supplied from an air source and an electromagnetic opening / closing valve for connecting and disconnecting a circuit for supplying compressed air with the adjusted pressure to the suction hole 8b. By adjusting the set pressure and the opening time of the solenoid valve, the suction hole 8
The pressure and the supply time of the air supplied into b can be set arbitrarily. Then, by this setting, the amount of air supplied into the suction hole 8b is adjusted.

A check valve 30 communicating with the suction hole 8b is attached to the nozzle body 8a in a direction that allows a gas flow from the inside of the suction hole 8b to the outside. The structure and operation of the check valve 30 will be described with reference to FIG. As shown in FIG. 3, the check valve 30 has a configuration in which a valve body 32 that is slidable in the axial direction (direction of arrow a) is mounted in a cylindrical outer cylinder portion 31.

A seal portion 34 mounted on the head of the valve body 32
Is pressed against the valve seat portion 33 provided inside the outer cylindrical portion 31 by the urging force of the spring 36, so that the flow of air in the direction from the outside to the inside of the suction hole 8b is blocked. Therefore, as shown in FIG. 3A, the suction hole 8 b is moved to the vacuum suction means 23 by operating the switching valve 22.
The check valve 30 is closed in the state of being connected to the valve, and vacuum leak does not occur when the inside of the suction hole 8b is vacuum-sucked.

As shown in FIG. 3 (b), when the switching valve 22 is operated, the compressed air supply means 24 is connected to the suction hole 8b and a positive pressure is applied to the suction hole 8b.
When the pressure in the suction hole 8b reaches the cracking pressure defined by the urging force of the spring 36, the valve body 32 slides outward against the urging force by this pressure, and the seal portion 34 causes the valve seat portion 33 to move. Get away from. As a result, the air in the suction hole 8b is allowed to flow through the valve seat hole 33a and the valve body 32.
Flows out to the outside through the opening 35 provided in the.

Next, the function of the check valve 30 in the adsorption nozzle 8 will be described with reference to FIG. FIG. 4 shows a normal state when the electronic component 3 is detached from the suction surface 9b after the suction nozzle 8 that holds the electronic component 3 on the suction surface 9b by vacuum suction inside the suction hole 8b moves to the transport position. The pressure application operation is shown. During this positive pressure applying operation, a predetermined amount of compressed air is supplied from the compressed air supply means 24 through the switching valve 22 into the suction hole 8b.

At this time, the diameter d of the suction hole 9c is equal to the suction hole 8
Since the flow path of air into the suction hole 9c is smaller than the hole diameter D of b, the air in the suction hole 8b tends to move to a flow path that is easier to flow. As a result, a predetermined proportion of the total amount of air supplied into the suction hole 8b is discharged to the outside of the suction hole 8b via the check valve 30. Therefore, only a part of the total amount of air is blown out from the suction holes 9c to the suction surface 9b, and an excessive amount of air is not discharged. As a result, when the electronic component 3 is detached, the positional deviation and the posture defect due to the blown-out electronic component do not occur.

In the conventional suction-conveying apparatus, the amount of air for releasing vacuum suction is controlled only by controlling the opening time of the valve for supplying compressed air. It was difficult to carry out the adjustment stably with the required accuracy. On the other hand, in the suction nozzle 8 of the suction conveyance device described in the above embodiment, most of the amount of air supplied from the compressed air supply means 24 is discharged to the outside by the check valve 30 located immediately before the suction hole 9c. Therefore, even when only a small amount of air is blown out from the suction holes 9c, the amount of air supplied by the compressed air supply unit 24 can be set to a large value.

Therefore, the opening time of the electromagnetic opening / closing valve of the compressed air supply means 24 can be set to a time with a margin that ensures stable operation in terms of operating characteristics, and always provides a stable air amount to the adsorption nozzle 8. Can be supplied. As a result, when the vacuum suction is released and the electronic component 3 is detached, an appropriate amount of air is constantly blown out from the suction holes 9c,
The detachment of the electronic component 3 can be performed stably.

In the above example, the suction tool 9 is configured to be attachable to and detachable from the nozzle body 8a, but as shown in FIG. 5, the electronic component 3 and the electronic component 3 are provided in the lower portion (tip portion) of the nozzle body 8'a. The suction surface 8'c that abuts and suction-holds is directly provided, and the suction hole 8'd opened in the suction surface 8'c is suction hole 8 '.
It may be provided in communication with b. Also in this case, the hole diameter D of the suction hole 8'b is set to be larger than the hole diameter d of the suction hole 8'd. In this example, the suction tool is provided integrally with the nozzle body 8'a.

[0030]

According to the present invention, a check valve provided in the nozzle main body for allowing the flow of gas in the direction from the inside of the suction hole to the outside is provided, and the work held by suction is released from the suction surface. When supplying compressed air into the suction hole, a check valve discharges a predetermined proportion of compressed air to the outside of the suction hole, so that an appropriate amount of air is blown out from the suction hole and the work is stably released. be able to.

[Brief description of drawings]

FIG. 1 is a front view of an electronic component mounting apparatus according to an embodiment of the present invention.

FIG. 2 is a sectional view of a transfer head of the suction transfer device according to the embodiment of the present invention.

FIG. 3 is a partial cross-sectional view of a transfer head of the suction transfer device according to the embodiment of the present invention.

FIG. 4 is a sectional view of a transfer head of the suction transfer device according to the embodiment of the present invention.

FIG. 5 is a sectional view of a transfer head of the suction transfer device according to the embodiment of the present invention.

[Explanation of symbols]

3 electronic components 5 Parts removal section 7 Transport head 8, 18 suction nozzle 8a Nozzle body 8b suction hole 9 Suction tool 9c Adsorption hole 22 Switching valve 23 Vacuum suction means 24 Pneumatic supply means 30 check valve

Claims (4)

[Claims] 1. A work suction suction transfer device for picking up a work by vacuum suction and transferring it to a predetermined position.
A suction tool provided with a suction surface for contacting the work with vacuum suction of the work; a suction tool provided with a suction hole opened in the suction surface; and a nozzle main body provided with a suction hole communicating with the suction hole. A nozzle moving mechanism for moving the nozzle body, a connection switching means for selectively connecting the suction hole to a vacuum suction means or a compressed air supply means, and a suction hole provided in the nozzle body for communicating with the suction hole. With a check valve that allows gas flow in the direction from the inside to the outside,
When the compressed air is supplied into the suction hole by the compressed air supply means in order to separate the work sucked and held on the suction surface from the suction surface, the check valve discharges a predetermined proportion of the compressed air to the outside of the suction hole. A suction and conveyance device for workpieces. 2. The work suction / conveyance apparatus according to claim 1, wherein the suction hole has a diameter larger than that of the suction hole. 3. The work suction / conveyance apparatus according to claim 2, wherein the suction tool is detachably provided on the nozzle body. 4. The work suction / conveyance device according to claim 2, wherein the suction tool is provided integrally with the nozzle body.