JP2003090304A - Compound actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compound actuator which can efficiently output the oscillation output to a rotary actuator. SOLUTION: In the compound actuator 1 to output the oscillation by the rotary actuator 2 and the translation by a piston cylinder device in a compound manner, an oscillation shaft 11 and an output shaft 4 of the rotary actuator 2 are concentrically disposed with each other, an oscillation transmission pin 12 provided on one of them is fitted in a long groove 13 in the axial direction formed in the other, a piston 21 and the output shaft 4 in the piston cylinder device 3 are concentrically disposed with each other, a translation transmission pin 22 provided on one of them is fitted in a circumferential groove 14 formed on the other, and the output shaft 4 is disposed in an atmospheric pressure in which no hydraulic pressure is applied to the entire circumference thereof.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a composite actuator which outputs a combination of swinging by a rotary actuator and linear motion by a piston cylinder device at an output shaft.

[0002]

2. Description of the Related Art Swinging by a rotary actuator,
2. Description of the Related Art A composite actuator that combines and outputs linear motion by a piston cylinder device on an output shaft has been conventionally known. However, in the above-mentioned compound actuator, since the rotary of the rotary actuator is applied to the piston itself in the piston cylinder device, the rotary actuator is driven against the frictional force of the seal material that seals the piston or its piston rod. As a result, not only the rotation output is wasted, but also the wear of the sealing material progresses more than necessary.

Under a special environment such as semiconductor manufacturing, if the space occupied by the equipment becomes large, the equipment cost increases significantly and the manufacturing cost becomes high. Therefore, downsizing and high output of the equipment are required. In the composite actuator, eliminate the frictional resistance due to the above sealing material,
Alternatively, reduction is an essential condition.

[0004]

The problem to be solved by the present invention is that the swing output of the rotary actuator in the above-mentioned compound actuator is independent of the friction of the seal material that seals the piston or the piston rod in the piston cylinder device. It is an object of the present invention to provide a composite actuator that can be efficiently transmitted to the output shaft, thereby efficiently outputting the swing output.

A further specific object of the present invention is to dispose the output shaft around the entire circumference thereof in an atmospheric pressure where no fluid pressure acts so that the swing output of the rotary actuator is independent of the piston cylinder device. So that it can be transmitted to the output shaft,
As a result, it is an object of the present invention to provide a composite actuator capable of effectively utilizing the swing output of the rotary actuator. Another object of the present invention is to provide a composite actuator capable of eliminating backlash in the swing direction of the output shaft and adjusting the stop position of the output shaft in the swing direction.

[0006]

A composite actuator of the present invention for solving the above-mentioned problems is a composite actuator which outputs a combination of swinging by a rotary actuator and linear motion by a piston cylinder device from an output shaft. , The rotary shaft of the rotary actuator and the output shaft are arranged coaxially, and the rocking transmission pin provided on one side is fitted into an axial long groove provided on the other side to form a piston in the piston cylinder device. The output shaft is arranged coaxially, and the linear motion transmission pin provided on one side thereof is fitted into the circumferential groove provided on the other side, and the output shaft is kept under atmospheric pressure in which fluid pressure does not act on the entire periphery thereof. It is characterized in that it is arranged in.

In a preferred embodiment of the present invention, a piston cylinder device is formed by inserting an annular piston into an annular cylinder chamber located around the output shaft so as to be drivable in the axial direction. Further, the swing transmission pin provided on the swing shaft of the rotary actuator is fitted into the axial long groove provided on the output shaft, and the linear motion transmission pin provided on the piston in the piston cylinder device is provided on the output shaft. Configured to fit in a circumferential groove.

Further, in another preferred embodiment of the present invention, it is suitable that a stop pin is fixed to one end of the output shaft and a stopper mechanism for restricting the rotational swing of the stop pin is provided at one end of the piston. The stopper mechanism has a pair of adjusting bolts with which the stop pin abuts due to rotational swing, and the pair of adjusting bolts are attached to the stopper mechanism so as to be able to move forward and backward to stop the rotational swing of the output shaft. And it is preferable to adjust the stop position. Further, in another preferred embodiment of the present invention, the stopper mechanism has a guide pin for preventing rotation, and the guide pin is provided in an axial guide pin hole provided in an outer cylinder tube of the piston cylinder device. It is suitable that it is slidably inserted.

In the compound actuator having the above-mentioned structure, the output shaft is arranged around the entire circumference thereof in the atmospheric pressure where the fluid pressure does not act, and the swing output of the rotary actuator is applied to the output shaft regardless of the piston cylinder device. Since it can be transmitted, the swing output of the rotary actuator does not affect the friction of the seal material that seals the piston or the piston rod in the piston cylinder device, so that the swing output can be efficiently output. . Further, in the compound actuator, if a stop pin is fixed to one end of the output shaft and a stopper mechanism that restricts the rotation and swing of the stop pin is provided at one end of the piston, backlash in the swing direction of the output shaft can be eliminated. In addition, the stop position of the output shaft in the swinging direction can be adjusted.

[0010]

1 to 4 show an embodiment of a composite actuator of the present invention. FIG. 1 is a longitudinal sectional front view of a main part of the composite actuator 1, and FIG. 2 is a plan view thereof. 3 is a partially enlarged view thereof, and FIG. 4 is a sectional view taken along the line AA of FIG. As shown in FIG. 1, the compound actuator 1 is a compound actuator that outputs a combination of swinging by the rotary actuator 2 and linear motion by the piston cylinder device 3 from the output shaft 4, and the swinging of the rotary actuator 2 is performed. The moving shaft 11 is arranged coaxially with the output shaft 4, and is slidably inserted into an axially elongated hole 13 provided in a lower portion of the output shaft 4, as shown in FIG. A swing transmission pin 12 is press-fitted into a small hole 11a provided at the tip of the swing shaft 11 such that both ends of the swing transmission pin 12 project in the radial direction. It is fitted in two axial long grooves 15 provided on the peripheral wall of the hole 13.

Although not shown in the drawings, the rotary actuator 2 is provided with racks on a pair of pistons that slide in a pair of cylinders arranged in parallel in the body, and a pinion is meshed with the racks. A double rack / pinion mechanism is configured, and the swing shaft 1 is attached to the pinion.
1, the swing shaft 11 projects from the upper surface of the body of the rotary actuator 2, and is rotatably and swingably supported by the body via shaft sealing means and bearing means. Then, by supplying / discharging the pressure fluid to the opposite ends of the pair of pistons in synchronism with each other, the pair of pistons are synchronously driven in opposite directions, and the linear movement of the pair of pistons is performed in the rack. The swing shaft 11 is swung rotationally by converting it into the rotary swing motion of the pinion.

As shown in FIG. 1, the piston / cylinder device 3 has an annular piston 21 fitted in an annular cylinder chamber 25 located around the output shaft 4 so as to be axially drivable. It is formed by this. More specifically, the piston cylinder device 3 has a cylindrical inner cylinder tube 23 located around the output shaft 4 and a cylindrical outer cylinder tube 24 located around the inner cylinder tube 23. The annular cylinder chamber 25 is formed between the outer peripheral surface of the inner cylinder tube 23 and the inner peripheral surface of the outer cylinder tube 24. The piston 21 itself serves as a rod and the upper wall of the cylinder chamber 25 is formed. It is a piston that penetrates and can move up and down in the axial direction thereof. A part of the piston 21 is slidably fitted in the cylinder chamber 25, and the remaining part penetrates the upper wall of the cylinder chamber 25 and projects.

Further, the piston 21 has an enlarged diameter portion to which a piston packing 27 is attached, and the cylinder chamber 2
5 is divided into two chambers by the enlarged diameter portion, and the piston 21 is moved up and down by supplying and discharging a pressure fluid to and from the two chambers. Further, the inner cylinder tube 23 and the outer cylinder tube 24 are
Annular seal members 28 and 29 are mounted in annular grooves provided on the outer peripheral surface and the inner peripheral surface, respectively, and the piston 21 is axially sealed against atmospheric pressure by the annular seal members 28 and 29. .

The piston 21 is arranged coaxially with the output shaft 4, and the output shaft 4 has a circumferential groove 14, and the circumferential groove 14 has a linear motion transmission pin provided at the upper end portion of the piston 21. The output shaft 4 is rotatably supported by the piston 21 through the linear motion transmission pin 22. Further, the output shaft 4 is housed in the inner cylinder tube 23 so as to be vertically movable, and a swing shaft projecting from the upper surface of the body of the rotary actuator 2 is provided in an axially elongated hole 13 provided in a lower portion thereof. 11 is slidably inserted. The piston cylinder device 3 is detachably fixed to the upper surface of the body of the rotary actuator 2 by a tie rod. Therefore, the output shaft 4 has a structure in which the fluid pressure for driving the piston 21 and the fluid pressure for driving the rotary actuator 2 do not act, and the entire circumference of the output shaft 4 is arranged at atmospheric pressure.

When the swing shaft 11 of the rotary actuator 2 rotates and swings, the composite actuator 1 outputs because the swing transmission pin 12 at the tip of the swing shaft 11 is fitted in the long groove 15 of the output shaft 4. The shaft 4 also rotates and swings. When the piston 21 of the piston cylinder device 3 moves up and down, the linear motion transmission pin 22 provided on the piston 21 is fitted into the circumferential groove 14 provided on the output shaft 4, so that the output shaft 4 also Move up and down.

Therefore, the composite actuator 1 described above
Is a composite actuator capable of compositely outputting the swing by the rotary actuator 2 and the linear motion by the piston cylinder device 3 at the output shaft 4, but the swing transmission pin at the tip of the swing shaft 11 12 is inserted into the long groove 15 of the output shaft 4 to transmit the rotational swing to the output shaft 4, and the linear motion transmission pin 22 provided on the piston 21 is inserted into the circumferential groove 14 provided on the output shaft 4 to output. Since the linear motion is transmitted to the shaft 4, the output shaft 4 can be arranged in the surroundings in the atmospheric pressure where the fluid pressure does not act, and the swing output of the rotary actuator 2 is different from that of the piston cylinder device 3. It can be transmitted to the output shaft 4 independently. Therefore, the swing output of the rotary actuator 2 causes the sealing material 28 for sealing the piston 21 in the piston cylinder device 3,
Since it does not affect the friction of 29 and the piston packing 27, the swing output can be efficiently output.

5 to 9 show another embodiment of the composite actuator of the present invention. FIG. 5 is a front view of the composite actuator 1, FIG. 6 is a plan view thereof, and FIG. 7 is a main part thereof. 8 is a front view in vertical section, FIG. 8 is a partially cutaway side view, and FIG. 9 is FIG.
FIG. 6 is a sectional view taken along line BB of FIG. The composite actuator 1 of the embodiment shown in FIGS. 5 to 9 is shown in FIGS.
Since it has basically the same configuration as the compound actuator 1 of the embodiment shown in (1), only different points will be described and common points will be omitted.

The composite actuator 1 according to the embodiment shown in FIGS. 5 to 9 is different from the composite actuator 1 according to the embodiment shown in FIGS. 1 to 4 in that the backlash in the swinging direction of the output shaft 4 can be eliminated. A means for adjusting the stop position of the output shaft 4 in the swinging direction is added. That is, as shown in FIG. 8, the stop pin 41 is fixed to one end of the output shaft 4 on the side opposite to the long groove 15, and the stopper mechanism 30 for restricting the rotational swing of the stop pin 41 is provided on the atmosphere side of the piston 21. Stuck to one end of. As shown in FIGS. 8 and 9, the stop pin 41 has a fan-shaped plate shape, and a bolt 42 is provided on the lower surface of the enlarged diameter portion 16 provided at one end of the output shaft 4 so as to be concentric with the output shaft 4. Is fixed by the stop surface 4 on which the adjusting bolts 33 abut on the two radial side surfaces.
1a and 41b.

As shown in FIGS. 8 and 9, the stopper mechanism 30 has a stepped rectangular plate-shaped stopper main body 31, two guide pins 32 fixed to the stopper main body 31, and a screw on the stopper main body 31. The stopper main body 31 has a pair of adjusting bolts 33 that project from the side surface of the stopper body 31 so as to be able to move forward and backward. The guide pin 32 is slidably inserted into an axial guide pin hole 26 provided in the outer cylinder tube 24 of the piston cylinder device 3, and thus the guide pin 32 functions as a rotation stopper. The output shaft 4 moves up and down together with the piston 21, and the stop pin 41 and the stopper mechanism 30 move the output shaft 4 together.
And, because they are fixed to the piston 21 respectively,
The stop surfaces 41a and 41b of the stop pin 41 are on the same plane as the pair of adjustment bolts 33 provided on the stopper mechanism 30 no matter where the output shaft 4 moves vertically.

When the stop pin 41 rotates and swings due to the rotation and swing of the output shaft 4, the stop faces 41a and 41b of the stop pin 41 come into contact with the pair of adjusting bolts 33, respectively. The rotation swing of is forcibly stopped. Therefore, the composite actuator 1 of the embodiment shown in FIGS. 5 to 9 has a backlash in the swinging direction of the output shaft 4 (that is, a slight clearance between the long groove 15 and the swing transmission pin 12 fitted in the long groove 15). Backlash caused by the above) can be eliminated. The stop position of the output shaft in the swinging direction can be adjusted by changing the protrusion amount of the pair of adjustment bolts 33 protruding from the side surface of the stopper body 31.

In the embodiment shown in FIG. 1, the piston 21 is axially sealed against the atmospheric pressure by the annular seal members 28 and 29 provided on the inner cylinder tube 23 and the outer cylinder tube 24. In the embodiment shown in 7,
Instead of providing an annular seal material 28 on the inner cylinder tube 23, the piston packing 4 is provided on the inner peripheral surface of the piston 21.
5 is provided, and the piston 21 is axially sealed with respect to atmospheric pressure by the piston packing 45 and an annular seal material 29 provided on the inner peripheral surface of the outer cylinder tube 24.

In the above embodiment, the swing transmission pin 12 is provided at the tip of the swing shaft 11 of the rotary actuator 2, and the swing transmission pin 12 is fitted in the long groove 15 of the output shaft 4. The compound actuator of the present invention is not necessarily limited to this embodiment, and a long groove may be provided in the rocking shaft 11 and a rocking transmission pin fitted in the long groove may be provided in the output shaft 4. In the above embodiment, the piston 2
Although the linear motion transmission pin 22 provided in No. 1 is fitted in the circumferential groove 14 provided in the output shaft 4, the linear motion transmission pin 22 provided in the output shaft 4 is fitted in the circumferential groove provided in the piston 21. May be. Further, in the above embodiment, the piston 21 also serves as the piston rod, but a piston rod may be provided separately from the piston and the linear motion transmission pin 22 may be provided on the piston rod.

[0023]

As described above in detail, in the compound actuator of the present invention, the swing output of the rotary actuator is output to the output shaft regardless of the friction of the seal material that seals the piston or the piston rod in the piston cylinder device. Since it can be transmitted, it becomes possible to provide a composite actuator that can efficiently output the swing output. Further, in the composite actuator of the present invention, the stop pin is fixed to one end of the output shaft, and the stopper mechanism for restricting the rotational swing of the stop pin is provided at one end of the piston. The rush can be eliminated and the stop position of the output shaft in the swinging direction can be adjusted.

[Brief description of drawings]

FIG. 1 is a vertical sectional front view of an essential part showing an embodiment of a compound actuator of the present invention.

FIG. 2 is a plan view of the same.

FIG. 3 is a partially enlarged view of the same.

4 is a cross-sectional view taken along the line AA of FIG.

FIG. 5 is a front view showing another embodiment of the composite actuator of the present invention.

FIG. 6 is a plan view of the same.

FIG. 7 is a vertical cross-sectional front view of relevant parts.

FIG. 8 is a partially cutaway side view of the same.

9 is a cross-sectional view taken along the line BB of FIG.

[Explanation of symbols]

1 compound actuator 2 Rotary actuator 3 Piston cylinder device 4 output shafts 11 swing axis 12 Oscillation transmission pin 13 long groove 14 circumferential groove 22 Linear motion transmission pin

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hama Naoki             4-2-2 Kinnodai, Taniwahara Village, Tsukuba-gun, Ibaraki Prefecture             SMC Corporation Tsukuba Technology Center F-term (reference) 3H081 AA02 AA03 AA23 AA33 CC23                       DD02 DD12

Claims (6)

[Claims] 1. A composite actuator which outputs a combination of a swing by a rotary actuator and a linear motion by a piston cylinder device from an output shaft, wherein the swing shaft of the rotary actuator and the output shaft are coaxially arranged. Then, the swing transmission pin provided on one side is fitted into the axially long groove provided on the other side, the piston in the piston cylinder device and the output shaft are coaxially arranged, and A composite actuator characterized in that a motion transmission pin is fitted in a circumferential groove provided on the other side, and the output shaft is arranged in an atmospheric pressure where fluid pressure does not act on the entire circumference thereof. 2. A piston / cylinder device is formed by inserting an annular piston into an annular cylinder chamber located around an output shaft so as to be drivable in the axial direction thereof.
The composite actuator according to claim 1, wherein: 3. A swing transmission pin provided on a swing shaft of a rotary actuator is fitted into an axially long groove provided on an output shaft, and a linear motion transmission pin provided on a piston in a piston cylinder device is fitted to the output shaft. The compound actuator according to claim 2, wherein the compound actuator is fitted in a circumferential groove provided in the. 4. A stopper mechanism is fixed to one end of the output shaft, and a stopper mechanism for restricting rotational swing of the stop pin is provided at one end of the piston. 7. The composite actuator according to any one of 1. 5. The stopper mechanism has a pair of adjusting bolts with which the stop pin abuts due to rotational swing, the pair of adjusting bolts being attached to the stopper mechanism so as to be able to move forward and backward, and the output shaft rotates and swings. 5. The compound actuator according to claim 4, wherein the compound actuator is stopped and the stop position is adjusted. 6. The stopper mechanism has a guide pin for preventing rotation, and the guide pin is slidably inserted into an axial guide pin hole provided in an outer cylinder tube of the piston cylinder device. The composite actuator according to claim 4 or 5, characterized in that.