JP2003074554A - Static pressure slider, non-contact chuck and chuck device - Google Patents

Abstract

(57) [Problem] To provide a static pressure slider having a simple structure and high bearing rigidity. SOLUTION: On a bottom surface 3 of a slider body 2 of a static pressure slider 1, a porous body 6 for generating a static pressure is provided, and a suction groove 10 for vacuum evacuation is provided. Pressurized air is blown from the port 4 from the lower surface of the porous body 6 to generate a static pressure between the porous body 6 and the reference surface R. On the other hand, since the air on the lower surface of the suction groove 10 is sucked through the port 9, a force (negative pressure) for pulling the slider body 2 toward the reference surface R is generated. The bearing rigidity is enhanced by the balance between the static pressure and the negative pressure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a static pressure slider, a non-contact chuck and a chuck device.

[0002]

2. Description of the Related Art As shown in FIG. 11, a conventional static pressure slider 61 is provided with a quadrangular prism-shaped guide shaft 62 and a cylindrical slider body 63 formed so as to surround the outer periphery thereof from four sides. . Four porous bodies 64 are provided on the inner peripheral surface of the slider body 63 so as to correspond to the outer peripheral surfaces of the guide shaft 62. A port 65 is provided on a part of the outer peripheral surface of the slider body 63, and the port 65 is communicated with the porous body 64 via a passage (not shown) formed inside the slider body 63.

When pressurized air is supplied from a pressure supply source (not shown) connected to the port 65, the porous body 6
Pressurized air is evenly ejected from the surface of No. 4. As a result, a static pressure based on the pressurized air layer is generated between the outer peripheral surface of the guide shaft 62 and the inner peripheral surface of the slider body 63, and the slider body 63 maintains a slight gap with the guide shaft 62. It will be possible to move along 62.

[0004]

However, in the above-mentioned conventional static pressure slider, since the entire outer periphery of the guide shaft 62 is surrounded by the slider body 63, the number of parts is large, the structure is complicated, and the static pressure is low. There is a problem that the pressure slider as a whole becomes large. Further, as the number of parts to be assembled with respect to the slider body 63 is increased, the problem that the assembling accuracy is deteriorated may occur.

Further, when the conventional static pressure slider is used to perform work in a vacuum atmosphere, the entire chamber must be in a vacuum atmosphere, so that a vacuum generator with a large capacity is required. There is also the problem of being exaggerated.

There is a non-contact type chuck as an apparatus using the same principle as the above static pressure slider, that is, static pressure. In this, the work is levitated by the action of static pressure, and in this state, the work is slid and conveyed, for example. In this non-contact chuck, since the static pressure is simply applied to hold the work in a non-contact manner, the work is lifted too much and the work holding rigidity is lowered, or the work vibrates due to static pressure. There is. A similar problem occurs in a chuck device using a plurality of such non-contact chucks.

The present invention is a static pressure slider utilizing static pressure,
It is an object of the present invention to solve the above problems in a non-contact chuck and a chuck device.

[0008]

[Means for Solving the Problems and Effects of the Invention]
The means etc. capable of solving the above problems will be enumerated separately. In addition, the action, effect, specific means, and the like will be additionally described as necessary.

Means 1. In a static pressure slider for generating static pressure by providing a static pressure generating portion on a static pressure generating surface side of a slider body and ejecting a pressurized fluid from the static pressure generating portion,
A static pressure slider characterized in that the slider body is provided with a suction portion for vacuuming on the side of the static pressure generating surface so as to suck fluid around the suction portion.

According to the means 1, on the static pressure generating surface side of the slider body, the static pressure is generated between the other side by the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a non-contact state with the other side. The static pressure slider is configured not only to generate static pressure but also to suck the fluid from the suction portion. Due to this suction action, a force is drawn to the other side on the static pressure generating surface side of the slider body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the static pressure bearing rigidity of the static pressure slider is increased,
The static pressure slider stabilizes. Also, since the suction unit is provided independently of the static pressure generation unit, unlike the case of negative pressure generation using Bernoulli's principle, the degree of pressurization for static pressure generation and the suction degree in the suction unit are different. Can be adjusted individually, and it is possible to easily adjust the balance between static pressure and negative pressure to further enhance bearing rigidity, adjust the clearance between the other side, and suppress vibration of the static pressure slider. Becomes In addition, this eliminates the need for a shaft that guides the slider body as in the past, or the need to enclose it from at least four sides, so that it is possible to reduce the number of parts and assembly man-hours, and reduce the accuracy associated with assembly. Can also be prevented.

Although a gas such as air is generally assumed as the fluid, it changes depending on the working atmosphere of the static pressure slider. The same applies to the fluids described in the following means.

Means 2. A static pressure generating portion is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating portion is provided, and a pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating portion. In the static pressure slider that generates static pressure by means of the above, the slider body is provided with a suction portion for vacuuming on the static pressure generating surface side, and a vacuum suction port communicating with the suction portion is provided. The static pressure slider is characterized in that the fluid is sucked through a vacuuming port.

According to the means 2, in use, a pressure pump or the like is connected to the pressurizing port and a suction pump or the like is connected to the vacuuming port. Then, on the side of the static pressure generating surface of the slider body, static pressure is generated between the other side by the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a non-contact state with the other side. The static pressure slider is configured not only to generate static pressure but also to suck the fluid from the suction portion. By this suction action,
On the static pressure generating surface side of the slider body, a force is drawn which is attracted to the other side. Therefore, since static pressure and suction are simultaneously generated on the static pressure generating surface side, the static pressure bearing rigidity of the static pressure slider is increased, and the static pressure slider is stabilized. Also, since the suction unit is provided independently of the static pressure generation unit, unlike the case of negative pressure generation using Bernoulli's principle, the degree of pressurization for static pressure generation and the suction degree in the suction unit are different. Can be adjusted individually, and it is possible to easily adjust the balance between static pressure and negative pressure to further enhance bearing rigidity, adjust the clearance between the other side, and suppress vibration of the static pressure slider. Becomes Also, this makes it unnecessary to use a shaft for guiding the slider body as in the conventional case,
Since it is not necessary to enclose it from at least four sides, it is possible to reduce the number of parts and the number of assembling steps, and it is also possible to prevent a decrease in accuracy due to assembling.

Means 3. In the means 1 or 2, a static pressure slider, wherein the static pressure generating portion is made of a porous body.

According to the means 3, since the porous body is used for the static pressure generating portion, the static pressure can be suitably generated by restricting the fluid when passing through the porous body, and The static pressure can be generated between the other side more uniformly than the mere throttle passage. As a result, the static pressure slider becomes more stable.

Means 4. In any one of the means 1 to 3, the static pressure slider is characterized in that the suction portion is formed by a concave portion that opens to the static pressure generating surface side.

According to the means 4, since the suction portion is constituted by the concave portion, it becomes clear that the region where the suction force of the fluid acts on the side of the static pressure generating surface becomes the region facing the concave portion, and the constitution thereof. Is also simple.

Means 5. 4. The static pressure slider according to any one of means 1 to 4, wherein the static pressure generating portion is provided in a peripheral portion of the static pressure generating surface.

According to the means 5, the static pressure generating portion is provided in the peripheral portion of the static pressure generating surface, so that the static pressure slider can be held in a more stable state with respect to the other side. This is because even if the static pressure slider tries to tilt with respect to the other side, the tilt can be suppressed because the pressurized fluid is jetted from the peripheral portion of the static pressure generating surface of the static pressure slider.

Means 6. In the means 5, the static pressure slider is characterized in that the suction portion is provided on a portion of the static pressure generating surface that is inside the static pressure generating portion.

According to the means 6, since the suction portion is provided on the inner side of the static pressure generating portion of the static pressure generating surface,
It is possible to form the negative pressure region while being blocked by the static pressure region on the outside thereof.

Means 7. A static pressure generating portion is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating portion is provided, and a pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating portion. In the static pressure slider that generates static pressure, the static pressure generating portion is annularly provided in the peripheral portion of the static pressure generating surface, and the static pressure generating surface of the slider body is closer to the static pressure generating surface than the static pressure generating portion. A suction part for vacuuming is provided inside, and a vacuuming port communicating with the suctioning part is provided so that the fluid around the suction part is sucked through the vacuuming port. A static pressure slider characterized in that a working recess is provided on the pressure generating surface side inside the suction portion, and a working port communicating with the working recess is provided.

According to the means 7, in use, a pressure pump or the like is connected to the pressurizing port and a suction pump or the like is connected to the vacuuming port. Then, on the side of the static pressure generating surface of the slider body, static pressure is generated between the other side by the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a non-contact state with the other side. The static pressure slider is configured not only to generate static pressure but also to suck the fluid from the suction portion. By this suction action,
On the static pressure generating surface side of the slider body, a force is drawn which is attracted to the other side. Therefore, since static pressure and suction are simultaneously generated on the static pressure generating surface side, the static pressure bearing rigidity of the static pressure slider is increased, and the static pressure slider is stabilized. Also, since the suction unit is provided independently of the static pressure generation unit, unlike the case of negative pressure generation using Bernoulli's principle, the degree of pressurization for static pressure generation and the suction degree in the suction unit are different. Can be adjusted individually, and it is possible to easily adjust the balance between static pressure and negative pressure to further enhance bearing rigidity, adjust the clearance between the other side, and suppress vibration of the static pressure slider. Becomes Also, this makes it unnecessary to use a shaft for guiding the slider body as in the conventional case,
Since it is not necessary to enclose it from at least four sides, it is possible to reduce the number of parts and the number of assembling steps, and it is also possible to prevent a decrease in accuracy due to assembling.

Further, by providing the static pressure generating portion on the peripheral portion of the static pressure generating surface, the static pressure slider can be held in a more stable state with respect to the other side. This is because even if the static pressure slider tries to tilt with respect to the other side, the tilt can be suppressed because the pressurized fluid is jetted from the peripheral portion of the static pressure generating surface of the static pressure slider.

Further, since the suction portion is provided on the inner side of the static pressure generating portion of the static pressure generating surface, it is possible to form the negative pressure area while being blocked by the static pressure area outside thereof. it can. Further, since a working recess is provided further inside the working recess and a working port communicating with the working recess is provided, the region between the working recess and the mating side is the negative pressure region. When the surrounding environment is an air environment, the negative pressure region functions like an air curtain, and the working recess region becomes an independent chamber. As a result, by supplying a pressurized fluid from the working port or evacuating it, only the region corresponding to the working recess can have the required pressurized atmosphere or vacuum atmosphere. Therefore, for example, even when performing a work requiring a vacuum atmosphere, it is not necessary to make the entire room in which the static pressure slider is installed a vacuum atmosphere, and it is sufficient to perform vacuuming from the work port. This eliminates the need to prepare extensive equipment to create a work environment. Furthermore,
Since the negative pressure area is created around the work recess by the suction part, when vacuuming the work recess via the work port, the space between the work recess and the other side must be high. A vacuum can be applied.

Means 8. In the means 7, the static pressure generating portion and the suction portion are each in the form of a continuous annular shape.

According to the means 8, since the static pressure generating portion and the suction portion are each formed into a continuous annular shape, the working recess is surrounded by the suction portion, and the suction portion is surrounded by the static pressure generating portion. Therefore, the independence of each of the static pressure region, the negative pressure region, and the work region (positive pressure or negative pressure region) is enhanced. This allows
For example, when it is desired to make the work area a vacuum atmosphere, the degree of vacuum is further increased.

Means 9. In the means 7 or 8, the static pressure generating portion is composed of a porous body.

According to the means 9, since the porous body is used for the static pressure generating portion, the static pressure can be suitably generated by restricting the fluid when passing through the porous body, and The static pressure can be generated between the other side more uniformly than the mere throttle passage. As a result, the static pressure slider becomes more stable.

Means 10. In any one of the means 7 to 9, the static pressure slider is characterized in that the suction part is constituted by a concave part that opens to the static pressure generating surface side.

According to the means 10, since the suction portion is constituted by the concave portion, it becomes clear that the region where the suction force of the fluid acts on the side of the static pressure generating surface is the region facing the concave portion, and the constitution thereof. Is also simple.

Means 11. In a static pressure slider including a guide rail and a slider body that slides along the guide rail in a non-contact state, the guide rail is configured to include two surfaces extending in a longitudinal direction and intersecting each other. Two surfaces of the slider body facing the surfaces are static pressure generating surfaces, a static pressure generating portion is provided on the static pressure generating surface side of the slider body, and a pressurizing port communicating with each static pressure generating portion is provided. A static pressure is generated by ejecting a pressurized fluid supplied through a pressure port from each static pressure generating portion toward a guide rail, and the static pressure generating surface side of the slider body is provided with the above-mentioned A suction unit for vacuuming is provided inside the static pressure generating unit, a vacuuming port communicating with the suctioning unit is provided, and a fluid around the suction unit is sucked through the vacuuming port. Featuring Static pressure slider that.

According to the means 11, in use, a pressure pump or the like is connected to the pressurizing port and a suction pump or the like is connected to the vacuuming port. Then, on the side of the static pressure generating surface of the slider body, static pressure is generated between the guide rail and the pressurized fluid ejected from the static pressure generating portion. As a result, the static pressure slider can be held in a state of not contacting the guide rail. The static pressure slider is configured not only to generate static pressure but also to suck the fluid from the suction portion. Due to this suction action, a force is drawn to the guide rail side on the static pressure generating surface side of the slider body. Therefore, static pressure and suction simultaneously occur on the static pressure generating surface side,
The static pressure bearing rigidity of the static pressure slider is increased, and the static pressure slider is stabilized. Also, since the suction unit is provided independently of the static pressure generation unit, unlike the case of negative pressure generation using Bernoulli's principle, the degree of pressurization for static pressure generation and the suction degree in the suction unit are different. Can be adjusted individually, and it is possible to easily adjust the balance between static pressure and negative pressure to further enhance bearing rigidity, adjust the gap with the guide rail, and suppress vibration of the static pressure slider. Becomes

Then, as described above, static pressure and suction (negative pressure)
By cooperating with the slider body, the slider body will not jump out of the guide rail even if the slider body or the guide rail is not surrounded by the other.
Since it is sufficient to form the static pressure generating surface only by the two surfaces of the slider body and the two guide rails, it is possible to reduce the number of parts and the number of assembling steps, and it is possible to prevent the accuracy from being reduced due to the assembling.

Further, by providing the suction portion inside the static pressure generating portion, it is possible to form the negative pressure region while being blocked by the static pressure region outside thereof.

Means 12. In the means 11, the static pressure generating portion is provided on at least both sides of the static pressure generating surface, and the suction portion is provided at a position sandwiched between them.

According to the means 12, since the static pressure generating portions are provided on both sides of the static pressure generating surface, the slider body can be held in a more stable state with respect to the guide rail. This is because even if the slider body tilts with respect to the guide rail, the pressurized fluid is jetted from both sides of the static pressure generating surface of the slider body, so that the tilt can be suppressed.

Means 13. In the means 11, the static pressure generating portion is provided on both sides of the static pressure generating surface along the sliding direction of the slider body so as to extend in the sliding direction, and the suction portion is located between them. A static pressure slider, wherein the static pressure slider is provided so as to extend in the sliding direction.

According to the means 13, since the static pressure generating portions are provided on both sides of the static pressure generating surface, the slider body can be held in a more stable state with respect to the guide rail. This is because even if the slider body tilts with respect to the guide rail, the pressurized fluid is jetted from both sides of the static pressure generating surface of the slider body, so that the tilt can be suppressed. Further, since the suction portion is provided at a position sandwiched between them, the negative pressure region can be formed in a state of being blocked by the static pressure regions on both sides of the suction portion. Further, since the static pressure generating portion and the suction portion are formed along the sliding direction of the slider body, the static pressure and the negative pressure can be less changed even when the slider body is sliding, and the slider body can be maintained in a stable state. can do.

Means 14. 14. The static pressure slider according to any one of means 11 to 13, wherein the static pressure generating portion is made of a porous body.

According to the means 14, since the porous body is used for the static pressure generating portion, the static pressure can be suitably generated by restricting the fluid when passing through the porous body, and The static pressure can be generated between the other side more uniformly than the mere throttle passage. As a result, the slider body becomes more stable.

Means 15. In any one of the means 11 to 14, the suction portion is configured by a suction groove that opens to the static pressure generating surface side, and both ends of the suction groove are closed by a slider body. Pressure slider.

According to the means 15, since the suction portion is constituted by the groove, it becomes clear that the region where the suction force of the fluid acts on the side of the static pressure generating surface is the region facing the groove, and the constitution thereof. Is also simple. Moreover,
Since both ends of the suction groove are not opened, the degree of negative pressure can be improved without waste.

Means 16. A static pressure generating portion is provided on the static pressure generating surface side of the chuck body, and a static pressure is generated between the static pressure generating portion and the work by ejecting a pressurized fluid from the static pressure generating portion. In a non-contact type chuck for holding in a closed state, the chuck body is provided with a suction part for vacuuming on the static pressure generating surface side, and a fluid around the suction part is sucked. Non-contact type chuck.

According to the means 16, the static pressure is generated between the chuck body and the work by the pressurized fluid jetted from the static pressure generating portion on the static pressure generating surface side. As a result, the work can be held in a non-contact state. And
In this non-contact chuck, not only static pressure is generated, but also a fluid is sucked from the suction portion.
Due to such a suction action, a force pulling the work is generated on the static pressure generating surface side of the chuck body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the work holding rigidity of the non-contact chuck is increased and the work is stabilized. Also, since the suction unit is provided independently of the static pressure generation unit, unlike the case of negative pressure generation using Bernoulli's principle, the degree of pressurization for static pressure generation and the suction degree in the suction unit are different. Therefore, it becomes possible to easily adjust the balance between static pressure and negative pressure to further enhance the work holding rigidity, adjust the clearance between the work, and suppress work vibration. .

Means 17. A static pressure generating portion is provided on the static pressure generating surface side of the chuck body, a pressurizing port communicating with the static pressure generating portion is provided, and a pressurized fluid supplied through the pressurizing port is ejected from the static pressure generating portion. A static pressure is generated between the static pressure generation surface and the work, and in the non-contact type chuck that holds the work at a predetermined distance from the static pressure generation surface, the chuck body is evacuated to the static pressure generation surface side. A non-contact chuck, characterized in that a suction part for the suction part is provided, a vacuuming port communicating with the suction part is provided, and a fluid around the suction part is sucked through the vacuuming port.

According to the means 17, in use, a pressure pump or the like is connected to the pressurizing port and a suction pump or the like is connected to the vacuuming port. Then, on the static pressure generating surface side of the chuck body, static pressure is generated between the workpiece and the workpiece by the pressurized fluid ejected from the static pressure generating portion. As a result, the work can be held in a non-contact state. The non-contact chuck is configured not only to generate static pressure but also to suck the fluid from the suction portion. Due to such a suction action, a force pulling the work is generated on the static pressure generating surface side of the chuck body. Therefore, the static pressure and the suction are simultaneously generated on the static pressure generating surface side, so that the work holding rigidity of the non-contact chuck is increased and the work is stabilized. Also, since the suction unit is provided independently of the static pressure generation unit, unlike the case of negative pressure generation using Bernoulli's principle, the degree of pressurization for static pressure generation and the suction degree in the suction unit are different. Therefore, it becomes possible to easily adjust the balance between static pressure and negative pressure to further enhance the work holding rigidity, adjust the clearance between the work, and suppress work vibration. .

Means 18. In the means 16 or 17, the non-contact chuck, wherein the static pressure generating portion is made of a porous body.

According to the means 18, since the porous body is used for the static pressure generating portion, the static pressure can be suitably generated by restricting the fluid when passing through the porous body, and The static pressure can be generated between the work and the work evenly as compared with the mere throttle passage. As a result, the work becomes more stable.

Means 19. The non-contact chuck according to any one of means 16 to 18, characterized in that the suction portion is formed by a concave portion that opens toward the static pressure generating surface.

According to the means 19, since the suction portion is constituted by the concave portion, it becomes clear that the region where the suction force of the fluid acts on the static pressure generating surface side becomes the region facing the concave portion, and the constitution thereof. Is also simple.

Means 20. The non-contact chuck according to any one of means 16 to 19, wherein the static pressure generating portion is provided in a peripheral portion of the static pressure generating surface.

According to the means 20, since the static pressure generating portion is provided in the peripheral portion of the static pressure generating surface, the work can be held in a more stable state. This is because even if the work tends to tilt with respect to the static pressure generating surface of the non-contact chuck, the tilt can be suppressed because the pressurized fluid is jetted from the peripheral portion of the static pressure generating surface.

Means 21. In the means 20, the non-contact type chuck is characterized in that the suction part is provided on a part of the static pressure generating surface inside the static pressure generating part.

According to the means 21, since the suction portion is provided at the inner side of the static pressure generating portion, the negative pressure area can be formed in such a manner as to be blocked by the static pressure area outside thereof.

Means 22. A chuck device comprising a plurality of non-contact chucks according to any one of means 16 to 21 and fixing each non-contact chuck in a state in which each static pressure generating surface is arranged on one plane. .

According to the means 22, since each static pressure generating surface of each non-contact chuck is arranged on one plane, the plane is regarded as one static pressure generating surface and the workpiece is held in a non-contact manner. can do. As a result, a relatively large work can be held without making each non-contact chuck large.

The means 22 is not limited to the common chuck body, but the requirements may be limited. In this case, the number of parts can be reduced by making the chuck main body common, and the flatness of the static pressure generating surface can be increased. In addition, one or more ports for pressurized fluid for the static pressure generating unit of each non-contact chuck, or one or more ports for evacuation of each suction unit may be combined. It is possible.

[0059]

BEST MODE FOR CARRYING OUT THE INVENTION [First Embodiment] A first embodiment will be described below with reference to FIGS.

FIG. 1 is a sectional view of the static pressure slider, specifically, a sectional view taken along line AA of FIG. 2, FIG. 2 is a bottom view of the static pressure slider, and FIG. 3 is a sectional view of the static pressure slider. It is a graph figure and a table for showing a characteristic.

As shown in FIGS. 1 and 2, the slider body 2 of the static pressure slider 1 has, for example, a disk shape. The shape of the slider body 2 is not limited to the disk shape, and any shape such as a square plate shape can be selected. However, it is preferable that at least the bottom surface 3 which is the static pressure generating surface is a flat surface.

A port 4 is formed on the outer peripheral surface of the slider body 2. The port 4 may be formed in various forms, for example, as a female screw hole in which a female screw for connecting a pipe is formed, or by providing a one-touch joint. The same applies to each port described later in this specification. When using the static pressure slider 1, a pipe from a pressure supply source (not shown) is connected to the port 4. An annular storage groove 5 is formed on the outer peripheral portion of the bottom surface 3 of the slider body 2. A ring-shaped porous body 6 serving as a static pressure generating portion is fixed in the storage groove 5 in a stored state. The porous body 6 is fixed by being adhered to the inner and outer walls of the storage groove 5 with an adhesive, for example.

The porous body 6 is, for example, sintered aluminum,
It can be composed of metal materials such as sintered copper and sintered stainless steel, but other than that, it is also possible to synthesize sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, etc. It can also be made of a resin material, sintered carbon, sintered ceramics, or the like.

An annular circulation groove 7 communicating with the storage groove 4 is formed above the storage groove 5. The port 4 and the upper portion of the flow groove 7 are provided with a passage 8 formed in the slider body 2.
Is communicated by. When pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown), the pressurized air is supplied from the surface of the porous body 6, that is, the entire bottom surface, through the port 4, the passage 8 and the flow groove 7. Erupted.

The port 4 is formed on the outer peripheral surface of the slider body 2.
A port 9 for vacuuming is formed at a position different from that of. When the static pressure slider 1 is used, a pipe from a suction pump (not shown) is connected to the port 9. On the bottom surface 3 of the slider body 2, on the inner peripheral side of the storage groove 5,
An annular suction groove 10 as a suction portion is formed at a position spaced apart from the storage groove 5 by a predetermined distance.

The port 9 and the upper portion of the suction groove 10 are connected by a passage 11 formed in the slider body 2. Then, air is sucked through the port 9 and the passage 11 by the air suction of a suction pump (not shown), and the air suction force acts on the bottom surface side of the slider body 2 along the suction groove 10.

A working port 12 is formed on the upper surface of the slider body 2. In this embodiment, the port 12
Is formed at the center of the slider body 2. A pipe from a pressure supply source or a suction pump (not shown) is connected to the port 12 when the static pressure slider 1 is used to perform a predetermined work. A recess 13 as a working recess is formed in the center of the bottom surface 3 of the slider body 2. The port 12 and the recess 13 are communicated with each other via a passage 14. Then, for example, when a pressurized supply source is connected to the port 12, the inside of the concave portion 13 and a region below the concave portion 13 become a pressurized atmosphere via the port 12 and the passage 14. On the other hand, when a suction pump is connected to the port 12, the inside of the recess 13 and the region below the recess 13 become a vacuum atmosphere via the port 12 and the passage 14.

In the static pressure slider 1 configured as described above, the pressurized air is operated by the operation of the pressure supply source to pass through the port 4, the passage 8 and the flow groove 7 to the surface of the porous body 6, that is, the bottom surface 3. Erupted from the whole. Then, a ring-shaped pressure air layer is formed between the ring-shaped region that is the bottom surface of the porous body 6 and the reference plane R, and a static pressure is produced. As a result, the static pressure slider 1 floats above the reference plane R.

At the same time, air is sucked from the port 9 through the passage 11. Then, the inside of the suction groove 10 becomes negative pressure. As a result, a suction force acts between the annular region on the bottom opening side of the suction groove 10 and the reference surface R, and the static pressure slider 1 is pulled toward the reference surface R side.

Therefore, the static pressure generated by the porous body 6 causes the static pressure slider 1 to move away from the reference surface R, and the negative pressure generated by the suction groove 10 causes the static pressure slider 1 to move to the reference surface. By coordinating with the force of pulling to R, the static pressure bearing rigidity is increased, and the static pressure slider 1 secures a clearance in micron units with the reference surface R in a stable state. Although various mechanisms for moving the static pressure slider 1 in the horizontal direction with respect to the reference plane R are conceivable, they are not directly related to the present invention and will not be described.

Here, the bearing rigidity of the static pressure slider 1 is improved by generating a negative pressure in the static pressure slider 1 through the suction groove 10. The reason for this will be described. As shown in FIG. 1, the pressure of the pressurized air from the port 4 is Pa, and the pressure of vacuuming from the port 9 is Pb, and as shown in FIG. The area of the area is Sa, and the area of the annular area which is the lower surface opening portion of the suction groove 10 is Sb.

The relationship between the flying height (μm) of the static pressure slider 1 with respect to the reference plane R and the flying force (N) for floating the static pressure slider 1 from the reference plane R is shown in the graph of FIG. Like In the figure, if air is not sucked through the suction groove 10, that is, if the suction force (N) is set to 0 and negative pressure is not generated, the flying height is Ha (μ
m). In this state, in order to move the static pressure slider 1 by dH (μm), only a force of dFa (N) is required. Then, the bearing rigidity Ka (N / μm) when suction is not performed from the suction groove 10 is dFa /
It becomes dH. In this case, the flying height of the static pressure slider 1 changes significantly with a relatively small force, and the bearing rigidity Ka is low.

On the other hand, when air is sucked through the suction groove 10, Sb.Pb is generated as the suction force (N). Then, the flying height is Hb as shown in FIG.
It becomes as small as (μm). In this state, a relatively large force of dFb (N) is required to move the static pressure slider 1 by dH (μm) as in the above case. That is, dFb> dFa. Then, the bearing rigidity Kb (N / μm) when suction is performed becomes dFb / dH. In this case, unless a relatively large force is applied to the static pressure slider 1, the flying height of the static pressure slider 1 does not change much, and the bearing rigidity Kb is high.

For the above reasons, Ka <Kb, and when the vacuum is drawn through the suction groove 10, the bearing rigidity of the static pressure slider 1 becomes higher than that in the case where it is not vacuumed.

Further, in this static pressure slider 1, a static pressure generating mechanism consisting of the port 4, the housing groove 5, the porous body 6, the flow groove 7 and the passage 8, and the port 9, the suction groove 10 and the passage 11 are formed. Since the evacuation mechanism is independently configured, the static pressure adjustment and the evacuation adjustment can be performed independently. As a result, the degree of vacuuming can be increased and the bearing rigidity can be increased while the static pressure having a sufficient flow rate is generated. Further, the static pressure slider 1 may vibrate depending on the degree of evacuation, but the vibration can be easily suppressed by adjusting the degree of evacuation.

Further, the static pressure area is defined as the bottom surface 3 of the static pressure slider 1.
The static pressure slider 1 can be held in a more stable state with respect to the reference plane R by arranging the static pressure slider 1 on the outer peripheral portion. That is, even if the static pressure slider 1 tries to tilt with respect to the reference plane R, the tilt can be suppressed because the pressurized air is ejected from the outer peripheral portion of the bottom surface 3 of the static pressure slider 1. In addition, since the pressurized air for generating the static pressure is configured to be jetted from the porous body 6, the pressurized air is uniformly jetted to the reference surface R, so that the static pressure becomes uniform. Prevail. In addition,
The porous body 6 has a function of restricting pressurized air.

Further, the static pressure area is formed in an annular shape and that portion becomes a pressurized air layer, and the vacuum area is formed in an annular shape on the inner peripheral side thereof to become a vacuum air layer. As a result, on the bottom surface 3 of the static pressure slider 1, a pressurized air layer is formed on the outermost circumference, a vacuum air layer is formed on the inner circumference thereof, and a working air layer is further formed on the inner circumference thereof. Therefore, the working air layer is an independent chamber separated from the pressurized air layer by the presence of the vacuum air layer. That is,
The vacuum air layer functions as an air curtain.

If, for example, a pipe of a suction pump is connected to the port 12, the inside of the recess 13 becomes a vacuum atmosphere via the passage 14, and the reference surface R facing the recess 13 is surrounded by the vacuum air layer. A vacuum atmosphere is formed. Therefore, the work requiring the vacuum atmosphere can be performed in the region where the vacuum atmosphere is obtained. Further, when performing a work requiring a pressurized atmosphere, for example, a pipe of a pressure supply source may be connected to the port 12, and in this case, the reference surface R facing the recess 13 is surrounded by the vacuum air layer. A pressurized atmosphere is formed. In this way, only the region of the concave portion 13 which is the working region can be freely made into a pressurized atmosphere or a vacuum atmosphere. Considering that conventionally, when a vacuum atmosphere is required in the work space, the entire chamber in which the static pressure slider is provided is operated in a vacuum atmosphere, the local pressure is reduced as in the static pressure slider 1 of the present embodiment. Since it is possible to form a general atmosphere, the cost of the entire equipment is significantly reduced.

Further, when the suction pump is connected as described above to make the inside of the concave portion 13 have a negative pressure, the inside of the concave portion 13 is caused by the negative pressure formed in the suction groove 10 formed around the concave portion 13. It is possible to further increase the degree of vacuum.

[Second Embodiment] The second embodiment will be described below with reference to FIGS. 4 to 7.

FIG. 4 is a perspective view of the static pressure slider, and FIG.
6 is a bottom view of the static pressure slider, FIG. 6 is a sectional view taken along the line BB in FIG. 5, and FIG. 7 is a sectional view taken along the line CC in FIG.

As shown in FIG. 4, the guide rail 22 of the static pressure slider 21 includes a bottom guide portion 23 and a side guide portion 2.
4 and. Bottom guide 23 and side guide 2
4 are each formed in a long plate shape, and are integrally formed in an L shape.

The slider body 25 of the static pressure slider 21 is
In the present embodiment, it is formed in a quadrangular prism shape. The bottom surface 26 of the slider body 25 faces the bottom surface guide portion 23, and one side surface 27 of the slider body 25 faces the side surface guide portion 24.

A port 28 is formed on the other side surface of the slider body 25. When using the static pressure slider 21, a pipe from a pressure supply source (not shown) is connected to the port 28. A storage groove 29 extending in the longitudinal direction of the slider body 25 is formed on each of the left and right sides of the bottom surface 26 and one side surface 27 of the slider body 25. Each of the storage grooves 29 has a plate-shaped porous body 3 as a static pressure generating portion.
It is fixed with 0 stored. The porous body 30 is fixed, for example, by being adhered to the wall surface of the storage groove 29 with an adhesive.

The porous body 30 can be made of, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel. In addition to this, a sintered trifluoride resin or a sintered tetrafluoride can be used. It is also possible to use a synthetic resin material such as resin, sintered nylon resin, or sintered polyacetal resin, or sintered carbon or sintered ceramics.

A distribution groove 31 communicating with the storage groove 29 is formed above the storage groove 29 along the storage groove 29. The distribution groove 31 does not penetrate in the longitudinal direction of the slider body 25 like the storage groove 29, but rather the slider body 2
It is only formed to the front of the longitudinal end portion of 5. This prevents the air from leaking directly from the circulation groove 31 to the outside.

As shown in FIG. 6, the port 28 and the total of four flow channels 31 are formed in the passage 3 formed in the slider body 25.
It is connected by two. Then, pressurized air as pressurized fluid is supplied from a pressure supply source (not shown), and the pressurized air is ejected from the entire surface of each porous body 30 via the port 28, the passage 32, and each circulation groove 31. . The corner portion formed by the bottom surface 26 and one side surface 27 of the slider body 25 is chamfered.

On the other side surface of the slider body 25, a port 3 for vacuuming is provided at a position different from the port 28.
3 is formed. When the static pressure slider 21 is used, a pipe from a suction pump (not shown) is connected to the port 33. A suction groove 34 as a suction portion extending in the longitudinal direction of the slider body 25 is formed in the central portion of each of the bottom surface 26 and one side surface 27 of the slider body 25, that is, a portion sandwiched between the porous bodies 30. There is. Suction groove 3
4 does not penetrate the slider body 25 in the longitudinal direction, but is formed up to a position closer to the longitudinal end of the slider body 25, like the circulation groove 31.

The port 33 and the upper portion of each suction groove 34 are communicated with each other by a passage 35 formed in the slider body 25. Then, air is sucked through the port 33 and the passage 35 by the air suction of a suction pump (not shown), and the bottom surface 26 of the slider body 25 along the suction groove 34.
Side and one side face 27 side act on the air suction force.

The static pressure slider 21 constructed as described above.
Then, by the operation of the pressure supply source, the pressurized air is jetted from the entire surface of each porous body 30 through the port 28, the passage 32, and the flow groove 31.

Then, a pair of pressure air layers are formed between the area of the surface of the porous body 30 on the side of the bottom surface 26 and the bottom surface guide portion 23, and a static pressure is produced. At the same time, one side 27
A pair of pressure air layers are formed between the region of the surface of the porous body 30 on the side and the side surface guide portion 24, and a static pressure is provided.
As a result, the static pressure slider 21 floats above the guide rail 22.

At the same time, air is sucked from the port 33 through the passage 35. Then, the pair of suction grooves 34
The inside becomes negative pressure. As a result, a suction force acts between the bottom surface opening side area of the suction groove 34 on the bottom surface 26 side and the bottom surface guide portion 23, and at the same time as the side surface opening side area of the suction groove 34 on one side surface 27 side. A suction force acts between the static pressure slider 1 and the side surface guide portion 24, and the static pressure slider 1 is drawn toward the bottom surface guide portion 23 and the side surface guide portion 24.

Therefore, the static pressure generated through the porous body 30 causes the static pressure slider 21 to separate from the bottom surface guide portion 23 and the side surface guide portion 24, and the negative pressure generated through the suction groove 34 causes static pressure. The static pressure bearing rigidity is enhanced by the harmony with the force of the pressure slider 21 trying to draw it toward the bottom surface guide portion 23 and the side surface guide portion 24. It will ensure the gap between.

When an external force is applied to the slider body 25 in this state, the slider body 25 slides along the guide rail 22 in a non-contact state.

If vacuuming is not performed through the port 33, the static pressure slider 21 may be detached from the guide rail 22 to the right side in FIG. 4, for example, by the slight external force. However, due to the cooperation between the static pressure and the evacuation, the guide rail 22 will not be disengaged with a slight external force. As a result, the static pressure slider 21 having high bearing rigidity can be obtained without surrounding the slider body 25 with the guide rails 22 from all sides.
It is possible to reduce the number of parts and contribute to downsizing and cost reduction of the entire device.

In the static pressure slider 21, the static pressure generating mechanism from the port 28 to the porous body 30 and the port 3 are used.
Since the vacuum evacuation mechanism from 3 to the suction groove 34 is independently configured, the static pressure adjustment and the vacuum evacuation adjustment can be performed independently. As a result, the degree of vacuuming can be increased and the bearing rigidity can be increased while the static pressure having a sufficient flow rate is generated. The static pressure slider 21 may vibrate depending on the degree of evacuation, but the vibration can be easily suppressed by adjusting the degree of evacuation.

Further, by disposing the static pressure region on the outer side of each of the bottom surface 26 and the side surface 27 of the static pressure slider 21, the static pressure slider 21 can be held in a more stable state with respect to the guide rail 22. . That is, even if the static pressure slider 21 tilts with respect to the guide rail 22, the tilted air can be suppressed because the pressurized air is jetted from the extended portions of the bottom surface 26 and the side surface 27 of the static pressure slider 21.

[Third Embodiment] A third embodiment will be described below with reference to FIGS. 8 to 10.

FIG. 8 is a plan view showing a state in which an upper work is held in a non-contact state by the chuck device, and FIG. 9 is a sectional view of the non-contact chuck constituting the chuck device (see FIG. 10). FIG. 10 is a plan view of the non-contact chuck.

In the present embodiment, the non-contact means that the work W and the non-contact chuck 41 can be held in a non-contact state, and the chuck means that the non-contact chuck 41 positions the work W. It does not mean that the work W is fixed, but means that the work W acts on the non-contact chuck 41 so as to be maintained at a constant interval.

As shown in FIG. 8, the non-contact chuck 41
Are arranged in front, back, left and right. In this embodiment, a total of 20 non-contact chucks 41 are used.
Each of these non-contact chucks 41 constitutes one chuck device. The chuck body 42 of each non-contact chuck 41 is positioned such that the upper surface 43 of each chuck body 42 is arranged on one plane. Then, as will be described later, each non-contact chuck 41 holds the flat plate-shaped work W at a minute interval from each upper surface 43. The plurality of non-contact chucks 41 are integrally held by a holding device (not shown) that constitutes a part of the chuck device.

Each of the non-contact chucks 41 will be described with reference to FIGS. 9 and 10. The chuck body 42 of the non-contact chuck 41 has, for example, a disc shape. However, the shape of the chuck body 42 is not limited to the disk shape, and any shape can be selected. Even in this case, it is preferable that at least the upper surface 43, which is the static pressure generating surface, has a planar shape.

A port 44 is formed on the lower surface of the chuck body 42. When the non-contact chuck 41 is used, a pipe from a pressure supply source (not shown) is connected to the port 44. An annular storage groove 45 is formed on the outer peripheral portion of the upper surface 43 of the chuck body 42. A ring-shaped porous body 46 as a static pressure generating portion is fixed in the storage groove 45 in a stored state. The porous body 46 is fixed by being bonded to the inner and outer walls of the storage groove 45 with, for example, an adhesive.

The porous body 46 can be made of, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel. In addition to this, a sintered trifluoride resin or a sintered tetrafluoride can be used. It is also possible to use a synthetic resin material such as resin, sintered nylon resin, or sintered polyacetal resin, or sintered carbon or sintered ceramics.

An annular circulation groove 47 communicating with the storage groove 45 is formed in the lower portion of the storage groove 45. The port 44 and the lower portion of the flow groove 47 are connected by a passage 48 formed in the chuck body 42. When pressurized air as pressurized fluid is supplied from a pressure supply source (not shown), the pressurized air is supplied from the surface of the porous body 46, that is, the entire upper surface, through the port 44, the passage 48, and the flow groove 47. Erupted.

A port 49 for vacuuming is formed at the center of the lower surface of the chuck body 2. Non-contact chuck 4
When 1 is used, a pipe from a suction pump (not shown) is connected to the port 49. Upper surface 43 of chuck body 2
In the center portion of the storage groove 45 on the inner peripheral side, a circular suction recess 50 as a suction portion is formed at a predetermined distance from the storage groove 45.

The port 49 and the lower portion of the suction recess 50 are connected by a passage 51 formed in the chuck body 42. Then, when the air is sucked through the port 49 and the passage 51 by the air suction of a suction pump (not shown), the air suction force acts on the region where the suction recess 50 is formed.

In each of the non-contact chucks 41 configured as described above, the pressurized air is generated by the operation of the pressure supply source.
Porous body 4 through port 44, passage 48, and circulation groove 47
6 is ejected from the surface, that is, the entire upper surface. Then, a ring-shaped pressure air layer is formed between the ring-shaped region which is the upper surface of the porous body 46 and the work W, and a static pressure is provided. As a result, the work W floats with respect to the upper surface 43 of the non-contact chuck 41.

At the same time, air is sucked from the port 49 through the passage 51. Then, the inside of the suction recess 50 becomes negative pressure. As a result, a suction force acts between the circular area on the upper surface opening side of the suction recess 50 and the work W, and the work W is drawn toward the upper surface 43 side of the non-contact chuck 41.

Therefore, the static pressure generated through the porous body 46 causes the work W to move away from the non-contact chuck 41, and the negative pressure generated through the suction recess 50 causes the work W to contact the non-contact chuck. The work holding rigidity is enhanced by the harmony with the force of pulling the work W toward the upper surface 43 of the work piece 41, and the work W is stably held in each of the non-contact chucks 4.
It is possible to secure a gap in the unit of micron between the upper surface 43 and the upper surface 43. The principle of increasing the work holding rigidity is the same principle as described in the first embodiment with reference to FIG.

In the non-contact chuck 41, the static pressure generating mechanism including the port 44, the storage groove 45, the porous body 46, the flow groove 47, and the passage 48, the port 49, the suction groove 50, and the passage 51. Since the vacuum evacuation mechanism is independently configured, the static pressure adjustment and the vacuum evacuation adjustment can be performed independently. As a result, the degree of vacuuming can be increased and the work holding rigidity can be increased while the static pressure having a sufficient flow rate is generated.
Although the work W may vibrate depending on the degree of evacuation, the vibration can be easily suppressed by adjusting the degree of evacuation.

Further, by disposing the static pressure region on the outer peripheral portion of the upper surface 43 of the non-contact chuck 41, the work W can be held in a more stable state. That is, even if the work W is inclined with respect to the non-contact type chuck 41, since the pressurized air is ejected from the outer peripheral portion of the upper surface 43 of the non-contact type chuck 41, the inclination is changed.
It can be suppressed in 1.

In this embodiment, the positional relationship between the non-contact chuck 41 and the work W can be reversed upside down. Further, similarly to the first embodiment, a working area may be formed in the non-contact chuck 41 to generate a vacuum atmosphere.

Further, the chuck bodies 42 of the non-contact chucks 41 are not individually provided, but the porous body 46 and the suction recess 50 are exposed from various places as one chuck body on the upper surface 43 side. May be. By doing so, it is possible to reduce the number of parts by sharing the chuck main body, and it is possible to increase the flatness of the static pressure generating surface.

Further, one or a plurality of ports 44 for each static pressure generation of each non-contact type chuck 41 may be configured, or a port 49 for each evacuation of each non-contact type chuck 41 may be formed. It is also possible to collectively configure one or more.

[Brief description of drawings]

FIG. 1 is a sectional view of a hydrostatic slider according to a first embodiment (a sectional view taken along the line AA of FIG. 2).

FIG. 2 is a bottom view of the static pressure slider.

FIG. 3 is a graph diagram (a) and a table (b) showing the characteristics of the static pressure slider.

FIG. 4 is a perspective view of a static pressure slider according to a second embodiment.

FIG. 5 is a bottom view of the static pressure slider.

6 is a cross-sectional view taken along the line BB of FIG.

7 is a cross-sectional view taken along the line CC of FIG.

FIG. 8 is a plan view showing a state where a work is held by a plurality of non-contact chucks (chuck devices) according to the third embodiment.

9 is a cross-sectional view of the non-contact chuck (cross-sectional view taken along the line DD of FIG. 10).

FIG. 10 is a plan view of a non-contact chuck.

FIG. 11 is a perspective view showing a conventional static pressure slider.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Static pressure slider, 2 ... Slider main body, 3 ... Bottom surface as static pressure generation surface, 4 ... Port, 5 ... Storage groove, 6 ... Porous body as static pressure generation part, 7 ... Flow groove, 8 ... Passage , 9 ... Port, 10 ... Suction groove as a suction part, 11 ... Passage, 12
Ports, 13 ... Recesses for working, 14 ... Passages, R ... Reference plane, 21 ... Static pressure slider, 22 ... Guide rails, 23 ... Bottom guide section, 24 ... Side guide section, 25
... Slider body, 26 ... Bottom surface as static pressure generating surface, 27
... One side surface as a static pressure generating surface, 28 ... Port, 29
... Storage groove, 30 ... Porous body as static pressure generating portion, 31 ...
Flow grooves, 32 ... Passages, 33 ... Ports, 34 ... Suction grooves as suction portions, 35 ... Passages, W ... Work, 41 ... Non-contact chuck, 42 ... Chuck body, 43 ... Upper surface as static pressure generating surface , 44 ... Port, 45 ... Storage groove, 46 ... Porous body as static pressure generating portion, 47 ... Flow groove, 48 ... Passage,
49 ... Port, 50 ... Suction recess as a suction unit, 51
…aisle.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Seiji Nakamura             250 Ojiki 2-chome, Komaki City, Aichi Prefecture             Hardy Co., Ltd. F term (reference) 3J102 AA02 BA05 CA11 EA02 EA07                       EA13 EA18 EB16 GA07

Claims (22)

[Claims] 1. A static pressure slider, wherein a static pressure generating portion is provided on a static pressure generating surface side of a slider body, and static pressure is generated by ejecting a pressurized fluid from the static pressure generating portion. A static pressure slider characterized in that a suction part for vacuuming is provided on the static pressure generating surface side to suck the fluid around the suction part. 2. A static pressure generating part is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating part is provided, and a pressurized fluid supplied through the pressurizing port is statically pressurized. In a static pressure slider that generates static pressure by ejecting from a generation unit, a suction unit for vacuuming is provided on the static pressure generation surface side of the slider main body, and a vacuum suction port communicating with the suction unit is provided. A static pressure slider, characterized in that a fluid around the suction portion is sucked through a vacuuming port. 3. The static pressure slider according to claim 1, wherein the static pressure generating portion is made of a porous body. 4. The static pressure slider according to claim 1, wherein the suction portion is formed by a concave portion that opens toward the static pressure generating surface. 5. The static pressure slider according to claim 1, wherein the static pressure generating portion is provided in a peripheral portion of the static pressure generating surface. 6. The static pressure slider according to claim 5, wherein the suction portion is provided on a portion of the static pressure generation surface that is inside the static pressure generation portion. 7. A static pressure generating portion is provided on the static pressure generating surface side of the slider body, a pressurizing port communicating with the static pressure generating portion is provided, and a pressurized fluid supplied through the pressurizing port is statically pressurized. In a static pressure slider that generates static pressure by ejecting from a generation unit, the static pressure generation unit is provided in a ring shape in a peripheral portion of the static pressure generation surface, and the static pressure generation surface side of the slider main body has the static pressure. A suction unit for vacuuming is provided inside the pressure generating unit, a vacuuming port communicating with the suctioning unit is provided, and the fluid around the suction unit is sucked through the vacuuming port. A static pressure slider characterized in that a working recess is provided inside the suction part on the static pressure generating surface side of the slider body, and a working port communicating with the working recess is provided. 8. The static pressure slider according to claim 7, wherein the static pressure generating portion and the suction portion each have a continuous annular shape. 9. The static pressure slider according to claim 7, wherein the static pressure generating portion is made of a porous body. 10. The suction portion is formed by a recessed portion that opens toward the static pressure generating surface.
10. The static pressure slider according to any one of 1 to 9. 11. A static pressure slider comprising a guide rail and a slider body that slides along the guide rail in a non-contact state, wherein the guide rail has two surfaces extending in the longitudinal direction and intersecting each other. The two surfaces of the slider body facing the two surfaces are static pressure generating surfaces, and a static pressure generating portion is provided on the static pressure generating surface side of the slider body.
A pressurizing port communicating with each static pressure generating unit is provided, and a static pressure is generated by ejecting a pressurized fluid supplied through the pressurizing port from each static pressure generating unit toward a guide rail. A suction part for vacuuming is provided inside the static pressure generating part on each static pressure generating surface side of the slider body, and a vacuuming port communicating with the suction part is provided, and the suction part periphery The static pressure slider is characterized in that the fluid is sucked through a vacuuming port. 12. The static pressure generating portion is provided on at least both sides of the static pressure generating surface, and the suction portion is provided at a position sandwiched between them. Static pressure slider as described. 13. The static pressure generating portion is provided on both sides of the static pressure generating surface along the sliding direction of the slider body so as to extend in the sliding direction, and the suction portion is sandwiched between them. The static pressure slider according to claim 11, wherein the static pressure slider is provided at a position so as to extend in the sliding direction. 14. The static pressure slider according to claim 11, wherein the static pressure generating portion is made of a porous body. 15. The suction unit is configured by a suction groove that opens toward the static pressure generating surface side, and both ends of the suction groove are closed by a slider body. The static pressure slider according to any one of 1. 16. A static pressure generating section is provided on the static pressure generating surface side of the chuck body, and a static pressure is generated between the static pressure generating section and the work by ejecting a pressurized fluid from the static pressure generating section. In a non-contact type chuck that holds a predetermined distance from the generating surface, the chuck body is provided with a suction portion for drawing a vacuum on the static pressure generating surface side, and sucks fluid around the suction portion. A non-contact type chuck characterized in that 17. A static pressure generating part is provided on the static pressure generating surface side of the chuck body, a pressurizing port communicating with the static pressure generating part is provided, and a pressurized fluid supplied through the pressurizing port is statically pressurized. A non-contact chuck that generates static pressure between a workpiece and a static pressure generating surface by ejecting the static pressure from the generating portion, and holds the workpiece at a predetermined distance from the static pressure generating surface. A non-contact, characterized in that a suction part for vacuuming is provided on the side, a vacuuming port communicating with the suctioning part is provided, and the fluid around the suctioning part is sucked through the vacuuming port. Type chuck. 18. The non-contact chuck according to claim 16 or 17, wherein the static pressure generating portion is made of a porous body. 19. The suction section is formed of a recess opening to the static pressure generating surface side.
The non-contact chuck according to any one of 6 to 18. 20. The static pressure generating portion is provided in a peripheral portion of the static pressure generating surface.
20. The non-contact chuck according to any one of 1 to 19. 21. The non-contact chuck according to claim 20, wherein the suction portion is provided on a portion of the static pressure generating surface that is inside the static pressure generating portion. 22. A plurality of non-contact chucks according to any one of claims 16 to 21 are provided, and each non-contact chuck is fixed in a state in which each static pressure generating surface is arranged on one plane. A chuck device.