JP2003060292A - Wavelength stabilized light source, wavelength control device and wavelength measurement device - Google Patents
Wavelength stabilized light source, wavelength control device and wavelength measurement deviceInfo
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- JP2003060292A JP2003060292A JP2001245348A JP2001245348A JP2003060292A JP 2003060292 A JP2003060292 A JP 2003060292A JP 2001245348 A JP2001245348 A JP 2001245348A JP 2001245348 A JP2001245348 A JP 2001245348A JP 2003060292 A JP2003060292 A JP 2003060292A
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- birefringent
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- polarization
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Abstract
(57)【要約】
【課題】 安価な構成で、高精度の波長安定化を実現す
る。
【解決手段】 コリメータレンズ12は、DBR−LD
10の後方出力光はコリメータレンズ12、平面ビーム
スプリッタ14及び複屈折板18を介して偏光プリズム
20に入射する。偏光プリズム20は、複屈折板18の
出力光を2つの偏光成分に分離し、一方の偏光成分をフ
ォトダイオード(PD)22に、他方の偏光成分をPD
24に入射する。複屈折板18は、平面ビームスプリッ
タ14からのレーザビームの偏光方向に対してスロー軸
及びファースト軸が45゜傾くように配置され、偏光プ
リズム20の光学軸は、複屈折板18に入射するレーザ
ビームの偏光方向に一致する。出力比算出回路26は、
PD22,24の出力比を算出し、算出結果を制御回路
28に印加する。制御回路28は、出力比算出回路26
の出力に従い、出力比算出回路26の出力が所定値に等
しくなるようにDBR−LD10のDBRへの注入電流
を、即ちDBRの反射波長を制御する。
(57) [Summary] [PROBLEMS] To realize highly accurate wavelength stabilization with an inexpensive configuration. SOLUTION: The collimator lens 12 is a DBR-LD.
The rear output light of 10 enters the polarizing prism 20 via the collimator lens 12, the plane beam splitter 14, and the birefringent plate 18. The polarizing prism 20 separates the output light from the birefringent plate 18 into two polarized light components, one polarized light component is supplied to a photodiode (PD) 22, and the other polarized light component is supplied to a PD.
24. The birefringent plate 18 is arranged so that the slow axis and the fast axis are inclined by 45 ° with respect to the polarization direction of the laser beam from the plane beam splitter 14. Matches the polarization direction of the beam. The output ratio calculation circuit 26
The output ratio of the PDs 22 and 24 is calculated, and the calculation result is applied to the control circuit 28. The control circuit 28 includes an output ratio calculation circuit 26
, The current injected into the DBR of the DBR-LD 10, that is, the reflection wavelength of the DBR is controlled so that the output of the output ratio calculation circuit 26 becomes equal to a predetermined value.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、発振波長を安定化
した波長安定化光源、波長可変光源の発振波長を制御す
る波長制御装置、及び、光源の波長を計測する波長計測
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wavelength stabilizing light source that stabilizes an oscillation wavelength, a wavelength control device that controls the oscillation wavelength of a variable wavelength light source, and a wavelength measuring device that measures the wavelength of the light source.
【0002】[0002]
【従来の技術】近年の光通信分野では、一本のファイバ
中に多数の異なる波長の信号を同時に伝送させる波長多
重化技術が、通信容量の拡大に極めて大きな貢献を果た
している。一般的には、信号波長間隔を狭くすればする
ほど、スペクトル利用効率が高くなり、通信容量が増加
する。2. Description of the Related Art In the field of optical communication in recent years, a wavelength multiplexing technique for simultaneously transmitting a large number of signals having different wavelengths in one fiber has made a great contribution to the expansion of communication capacity. In general, the narrower the signal wavelength interval, the higher the spectrum utilization efficiency and the communication capacity.
【0003】信号波長間隔を狭くするには、波長合分波
技術の進歩とコヒーレント光源のレーザ発振波長の安定
化が必要である。信号光源には、その故障に備えて、同
一波長のレーザ光を出力する光源(バックアップ光源)
を用意しておく必要がある。各信号波長にバックアップ
光源を用意するのは非効率であるので、バックアップ光
源として波長可変光源を使用すれば、信号波長数に比べ
て少ない数のバックアップ光源で済むが、その場合、レ
ーザ発振波長を所望値に制御する波長安定化技術が極め
て重要になる。In order to narrow the signal wavelength interval, it is necessary to advance the wavelength multiplexing / demultiplexing technology and stabilize the laser oscillation wavelength of the coherent light source. The signal light source is a light source (backup light source) that outputs laser light of the same wavelength in case of failure.
Need to be prepared. Since it is inefficient to prepare a backup light source for each signal wavelength, if a wavelength tunable light source is used as the backup light source, a smaller number of backup light sources than the number of signal wavelengths will suffice. The wavelength stabilization technique for controlling to a desired value becomes extremely important.
【0004】勿論、光通信用途以外に光情報処理及び光
計測等の用途でも、波長可変光源とその波長を安定化す
る技術は極めて重要である。Of course, the wavelength tunable light source and the technology for stabilizing the wavelength are extremely important not only for optical communication applications but also for optical information processing and optical measurement.
【0005】通常の光通信、光情報処理及び光計測用の
光源には、単一波長でレーザ発振し、その発振波長を変
更自在なコヒーレント光源が用いられる。構造的には、
ファブリペロー共振器内にレーザダイオードを配置する
外部共振器型LDと、レーザダイオード内に回折格子を
埋め込む分布帰還型レーザ(DFB−LD)及び分布ブ
ラッグ反射器型レーザ(DBR−LD)がある。発振波
長を変化させるためには、反射器の反射波長を変えれば
よい。具体的には、外部共振器型LDでは、外部の一方
の反射器を回折格子とし、その角度を変化させること
で、反射波長を変化させる。DFB−LD及びDBR−
LDでは、注入電流又は温度により内部屈折率を変化さ
せることで、分布する回折格子の反射波長を調節する。As a light source for ordinary optical communication, optical information processing and optical measurement, a coherent light source that oscillates a laser with a single wavelength and can change the oscillation wavelength is used. Structurally,
There are an external resonator type LD in which a laser diode is arranged in a Fabry-Perot resonator, a distributed feedback laser (DFB-LD) and a distributed Bragg reflector type laser (DBR-LD) in which a diffraction grating is embedded in the laser diode. In order to change the oscillation wavelength, the reflection wavelength of the reflector may be changed. Specifically, in the external resonator type LD, one of the external reflectors is used as a diffraction grating and its angle is changed to change the reflection wavelength. DFB-LD and DBR-
In the LD, the reflection wavelength of the distributed diffraction grating is adjusted by changing the internal refractive index according to the injection current or the temperature.
【0006】外部共振器型LDは、回折格子の選択波長
範囲が広いので、LDが十分な利得を有する比較的広い
波長帯域にわたって発振波長を連続的に変化させること
ができるという利点を有している。一方、大きな寸法の
回折格子が必要であるので、種々の欠点がある。即ち、
共振器長自体が長いので、寸法が大きくなる。回折格子
とLDとの光結合のためにレンズ等の光学結合系が必要
であり、構造が複雑になる。共振器長が長いので、外部
振動及び温度変化などの環境変化に影響されやすい。Since the external resonator type LD has a wide selection wavelength range of the diffraction grating, it has an advantage that the oscillation wavelength can be continuously changed over a relatively wide wavelength band in which the LD has a sufficient gain. There is. On the other hand, since a diffraction grating having a large size is required, there are various drawbacks. That is,
Since the resonator length itself is long, the size becomes large. An optical coupling system such as a lens is required for optical coupling between the diffraction grating and the LD, which complicates the structure. Since the resonator length is long, it is easily affected by external vibration and environmental changes such as temperature changes.
【0007】DFB−LDでは、分布する回折格子を2
分割し、それぞれに個別に電流を流し、その注入電流値
を調節することで内部屈折率を変化させ、回折格子の反
射波長を変化させる。LD自体の温度を変えることで内
部屈折率を変化させ、回折格子の反射波長を変化させる
こともできる。DFB−LDは、実質的にLDの寸法と
同じになるので、小型であり、発振波長が安定であると
いう利点がある。一方、DFB−LDでは、十分なレー
ザ出力を得るために必要な注入電流と、波長を変えるた
めの注入電流を独立に制御することが難しい。また、温
度で波長を制御する場合、温度に対する屈折率変化が大
きくないので、波長可変帯域が狭い。In the DFB-LD, two distributed diffraction gratings are used.
It is divided, and an electric current is separately passed to each of them, and the injection current value is adjusted to change the internal refractive index, thereby changing the reflection wavelength of the diffraction grating. It is also possible to change the internal refractive index by changing the temperature of the LD itself and change the reflection wavelength of the diffraction grating. Since the DFB-LD has substantially the same size as the LD, it has advantages that it is small and the oscillation wavelength is stable. On the other hand, in the DFB-LD, it is difficult to independently control the injection current required to obtain a sufficient laser output and the injection current for changing the wavelength. Further, when the wavelength is controlled by temperature, the change in the refractive index with respect to temperature is not so large that the wavelength tunable band is narrow.
【0008】DBR−LDの場合、反射器が受動導波路
領域に配置されているので、出力(利得)を調整するた
めの注入電流と反射波長を変化させるための注入電流を
独立に制御可能であり、反射波長を変化させるための注
入電流の可変範囲を大きく取ることができ、DFB−L
Dと比較して波長可変帯域が拡大できる。DBR−LD
の場合、波長可変帯域の拡大と制御性の改善のために、
スーパーストラクチャ分布反射器、又はサンプルド回折
格子反射器などを利用した構造も提案されている。In the case of the DBR-LD, since the reflector is arranged in the passive waveguide region, the injection current for adjusting the output (gain) and the injection current for changing the reflection wavelength can be controlled independently. Yes, the variable range of the injection current for changing the reflection wavelength can be made large, and the DFB-L
The wavelength variable band can be expanded as compared with D. DBR-LD
In the case of, in order to expand the wavelength variable band and improve controllability,
A structure using a superstructure distributed reflector, a sampled diffraction grating reflector, or the like has also been proposed.
【0009】上述した従来例を含み、従来の波長可変L
Dは何れも、その発振波長を安定化させるために出力光
の一部を取り出して発振波長を計測し、発振波長を所望
値に制御する。このような波長制御には、何らかの波長
感受性を持った光学的素子を用いて、発振波長を検出す
る必要がある。The conventional variable wavelength L including the above-mentioned conventional example
In order to stabilize the oscillation wavelength, each D takes out a part of the output light, measures the oscillation wavelength, and controls the oscillation wavelength to a desired value. For such wavelength control, it is necessary to detect the oscillation wavelength by using an optical element having some wavelength sensitivity.
【0010】例えば、所望の波長間隔(例えば約2n
m)の自由スペクトル幅(FSR)を具備するファブリ
ペローエタロン(FPエタロン)を介して、DBR−L
Dのレーザ出力光を受光素子に入力し、その受光素子の
出力電流が最大になるようにDBR−LDのDBRの注
入電流を制御する構成がある。このような注入電流の制
御により、DBR−LDの発振波長は、FPエタロンの
何れかの波長グリッドに一致する。注入電流と発振波長
との対応関係を別途、調べておき、その対応表に現在の
注入電流を当てはめることで、絶対発振波長を精度良く
推定できる。For example, a desired wavelength interval (for example, about 2n)
m) via a Fabry-Perot etalon (FP etalon) with a free spectral width (FSR) of DBR-L
There is a configuration in which the laser output light of D is input to the light receiving element and the injection current of the DBR of the DBR-LD is controlled so that the output current of the light receiving element becomes maximum. By controlling the injection current as described above, the oscillation wavelength of the DBR-LD matches any wavelength grid of the FP etalon. The absolute oscillation wavelength can be accurately estimated by checking the correspondence between the injection current and the oscillation wavelength separately and applying the current injection current to the correspondence table.
【0011】また、波長可変レーザの出力光を干渉光フ
ィルタに入射し、その透過光と反射光の出力パワー比に
より波長可変レーザの発振波長を制御する構成も提案さ
れている(例えば、特開2000−12968号公報及
び特開2000−22259号公報)。A configuration has also been proposed in which the output light of the wavelength tunable laser is made incident on the interference light filter and the oscillation wavelength of the wavelength tunable laser is controlled by the output power ratio of the transmitted light and the reflected light thereof (for example, Japanese Patent Laid-Open No. 2000-242242). 2000-12968 and JP-A-2000-22259).
【0012】[0012]
【発明が解決しようとする課題】FPエタロンを使用す
る従来例では、DBR−LDの発振波長を、FPエタロ
ンの透過率が最大の極致になる離散的な波長に安定化で
きる。透過光量が最大となっていることを検出するため
には、ディザをかけて発振波長を変化させなければなら
ず、波長の安定度はディザ範囲で決まってしまう。更
に、注入電流量と発振波長の相関関係は、LDの経時的
変化及び環境変動によって逐次、変化する可能性がある
ので、万一、電気的サージ等の雑音で発振波長が別のピ
ークにホップした時には、その絶対波長を確定すること
が不可能になってしまう。In the conventional example using the FP etalon, the oscillation wavelength of the DBR-LD can be stabilized at a discrete wavelength at which the transmittance of the FP etalon is maximized. In order to detect that the amount of transmitted light is maximum, it is necessary to apply dither to change the oscillation wavelength, and the stability of the wavelength is determined by the dither range. Furthermore, the correlation between the injected current amount and the oscillation wavelength may change sequentially due to changes in the LD over time and environmental changes, so in the unlikely event that noise such as electrical surge causes the oscillation wavelength to hop to another peak. When it does, it becomes impossible to determine the absolute wavelength.
【0013】また、干渉光フィルタの透過光と反射光の
出力比を使用する従来例でも、予め注入電流と発振波長
との相関関係を調べておくことで、絶対波長を推定でき
る。透過光と反射光の両方の出力比により、連続的に波
長を安定化できるので、光フィルタの透過ピークが所望
の波長グリッドからずれていても問題はない。光フィル
タの透過特性に全くピークがない場合、透過光と反射光
の出力比が発振波長と完全に1対1に対応するので、絶
対波長そのものを検出することが可能になる。干渉光フ
ィルタは共振器であるので、その透過・反射特性は、透
過ピーク部分付近で急峻に変化し、ヴァレー付近でなだ
らかに変化する。Also in the conventional example using the output ratio of the transmitted light and the reflected light of the interference light filter, the absolute wavelength can be estimated by examining the correlation between the injection current and the oscillation wavelength in advance. Since the wavelength can be continuously stabilized by the output ratio of both the transmitted light and the reflected light, there is no problem even if the transmission peak of the optical filter deviates from the desired wavelength grid. When the transmission characteristics of the optical filter have no peak, the output ratio of the transmitted light and the reflected light has a one-to-one correspondence with the oscillation wavelength, so that the absolute wavelength itself can be detected. Since the interference light filter is a resonator, its transmission / reflection characteristics change sharply near the transmission peak and change gently near the valley.
【0014】一般的なFPエタロンの入射光パワー、透
過光パワー及び反射光パワーをそれぞれP0、Pt及びP
rとすると、
Pt=P0/(1+Ksin2x)
Pr=P0Ksin2x/(1+Ksin2x)
但し、
K=4R/(1−R)2
x=(2πnd/λ)cosθ
であり、Rは両端ミラーの反射率、nはエタロンの屈折
率、dはファブリペロー共振器長(即ち、エタロンの厚
さ)、θは入射角である。Incident light power and transmission of a general FP etalon
Overlight power and reflected light power P0, PtAnd P
rThen,
Pt= P0/ (1 + KsinTwox)
Pr= P0KsinTwox / (1 + KsinTwox)
However,
K = 4R / (1-R)Two
x = (2πnd / λ) cos θ
Where R is the reflectance of the mirrors on both ends and n is the refraction of the etalon.
Where d is the Fabry-Perot cavity length (ie the thickness of the etalon)
And θ is the angle of incidence.
【0015】従って、両者の差をその和で割った出力比
は、
(Pt−Pr)/(Pt+Pr)
=(1−Ksin2x)/(1+Ksin2x) (1)
となる。[0015] Therefore, the output ratio obtained by dividing the difference between the two in the sum, and (P t -P r) / ( P t + P r) = (1-Ksin 2 x) / (1 + Ksin 2 x) (1) Become.
【0016】一例として、中心波長を1.55μm、透
過波長間隔を20nm、nをSiO 2ガラスの屈折率で
ある1.45、Rを90%、入射角を0゜(垂直入射)
とした時の透過・反射特性及び出力比を図9に示す。縦
軸は、式(1)に示す出力比を示し、横軸は波長を示
す。このように、FPエタロンを用いた場合は特に透過
光のヴァレー付近で波長検出感度が劣化してしまう。よ
り線形に近い応答を得ようとすると、コントラスト比が
下がって全体的に波長検出感度が悪くなり、一方、コン
トラスト比を大きく保とうとすると、波長によって波長
検出感度が大きく変化してしまう。これを改善するため
には複数のFPエタロンフィルタを組み合わせてもよい
が、それにより構造が複雑になり、また損失が増加す
る。As an example, the center wavelength is 1.55 μm, and the transmission
Overwavelength spacing is 20 nm, n is SiO TwoWith the refractive index of glass
1.45, R 90%, incident angle 0 ° (normal incidence)
FIG. 9 shows the transmission / reflection characteristics and the output ratio in such a case. Vertical
The axis shows the output ratio shown in equation (1), and the horizontal axis shows the wavelength.
You Thus, especially when using FP etalon
The wavelength detection sensitivity deteriorates near the light valley. Yo
If you try to obtain a response that is closer to linear, the contrast ratio
As a result, the wavelength detection sensitivity deteriorates overall, while
To maintain a large trust ratio,
The detection sensitivity will change significantly. To improve this
May combine a plurality of FP etalon filters
However, this complicates the structure and increases the loss.
It
【0017】この他、FPエタロンフィルタは透過ピー
クの損失を低減するために通常誘電体多層膜ミラーを用
いるが、各多層膜の厚さを非常に精密に制御する必要が
ある。In addition, the FP etalon filter usually uses a dielectric multilayer mirror to reduce the loss of the transmission peak, but it is necessary to control the thickness of each multilayer very precisely.
【0018】本発明は、上記の従来の技術の問題点を解
決するためになされたものであり、簡易な構成で、低損
失、高コントラスト比且つ線形に近い応答性を具備する
波長安定化コヒーレント光源、波長安定化装置及び波長
計測装置を提示することを目的とする。The present invention has been made in order to solve the above-mentioned problems of the prior art, and is a wavelength-stabilized coherent with a simple structure, low loss, high contrast ratio and nearly linear response. It is intended to provide a light source, a wavelength stabilizing device, and a wavelength measuring device.
【0019】本発明はまた、誘電体多層膜ミラーのよう
な精密な薄膜の生成過程が不要で、安価に製造できる波
長安定化コヒーレント光源、波長安定化装置及び波長計
測装置を提示することを目的とする。Another object of the present invention is to provide a wavelength-stabilized coherent light source, a wavelength stabilizer and a wavelength measuring device which can be manufactured at low cost without the need for a precise thin film forming process such as a dielectric multilayer mirror. And
【0020】[0020]
【課題を解決するための手段】本発明に係る波長安定化
光源は、反射波長を変更自在な反射器を有する共振器及
び当該共振器内に配置されるレーザ媒質からなる波長可
変光源と、当該波長可変光源の出力光が入力し、当該出
力光の偏光方向に対して所定角度傾いた光軸を有する複
屈折板と、当該複屈折板の出力光を互いに直交する2つ
の偏光方向に分離する偏光分離器と、当該偏光分離器に
より分離される一方の偏光成分を受光する第1の受光素
子と、当該偏光分離器により分離される他方の偏光成分
を受光する第2の受光素子と、当該第1及び第2の受光
素子の出力から所定の出力比を算出する出力比算出回路
と、当該出力比算出回路の算出結果に従い当該反射器の
反射波長を所定値に制御する制御回路とを具備すること
を特徴とする。A wavelength-stabilized light source according to the present invention comprises a resonator having a reflector whose reflection wavelength can be changed, and a tunable light source composed of a laser medium arranged in the resonator. The output light of the variable wavelength light source is input, and the birefringent plate having an optical axis inclined by a predetermined angle with respect to the polarization direction of the output light and the output light of the birefringence plate are separated into two polarization directions orthogonal to each other. A polarization separator, a first light receiving element that receives one polarization component separated by the polarization separator, a second light receiving element that receives the other polarization component separated by the polarization separator, An output ratio calculation circuit that calculates a predetermined output ratio from the outputs of the first and second light receiving elements, and a control circuit that controls the reflection wavelength of the reflector to a predetermined value according to the calculation result of the output ratio calculation circuit. It is characterized by doing.
【0021】本発明に係る波長制御装置は、波長可変光
源の出力波長を制御する波長制御装置であって、当該波
長可変光源の出力光が入力し、当該出力光の偏光方向に
対して所定角度傾いた光軸を有する複屈折板と、当該複
屈折板の出力光を互いに直交する2つの偏光方向に分離
する偏光分離器と、当該偏光分離器により分離される一
方の偏光成分を受光する第1の受光素子と、当該偏光分
離器により分離される他方の偏光成分を受光する第2の
受光素子と、当該第1及び第2の受光素子の出力から所
定の出力比を算出する出力比算出回路と、当該出力比算
出回路の算出結果に従い当該反射器の反射波長を所定値
に制御する制御回路とを具備することを特徴とする。The wavelength control device according to the present invention is a wavelength control device for controlling the output wavelength of a wavelength tunable light source, wherein the output light of the wavelength tunable light source is input and a predetermined angle is formed with respect to the polarization direction of the output light. A birefringent plate having an inclined optical axis, a polarization separator that separates the output light of the birefringent plate into two polarization directions orthogonal to each other, and one polarization component that is separated by the polarization separator One light receiving element, a second light receiving element that receives the other polarization component separated by the polarization separator, and an output ratio calculation that calculates a predetermined output ratio from the outputs of the first and second light receiving elements. It is characterized by comprising a circuit and a control circuit for controlling the reflection wavelength of the reflector to a predetermined value according to the calculation result of the output ratio calculation circuit.
【0022】本発明に係る波長計測装置は、光源の波長
を計測する波長計測装置であって、当該光源の出力光が
入力し、当該出力光の偏光方向に対して所定角度傾いた
光軸を有する複屈折板と、当該複屈折板の出力光を互い
に直交する2つの偏光方向に分離する偏光分離器と、当
該偏光分離器により分離される一方の偏光成分を受光す
る第1の受光素子と、当該偏光分離器により分離される
他方の偏光成分を受光する第2の受光素子と、当該第1
及び第2の受光素子の出力から所定の出力比を算出する
出力比算出回路と、当該出力比算出回路の算出結果を、
予め計測した、当該出力比と波長との関係に照合する照
合回路とを具備することを特徴とする。A wavelength measuring device according to the present invention is a wavelength measuring device for measuring a wavelength of a light source, wherein an output light of the light source is inputted, and an optical axis tilted by a predetermined angle with respect to a polarization direction of the output light is set. A birefringent plate having, a polarization separator for separating output light of the birefringent plate into two polarization directions orthogonal to each other, and a first light receiving element for receiving one polarization component separated by the polarization separator. A second light receiving element for receiving the other polarization component separated by the polarization separator, and the first light receiving element
And an output ratio calculation circuit that calculates a predetermined output ratio from the output of the second light receiving element, and a calculation result of the output ratio calculation circuit.
It is characterized by comprising a collation circuit that collates with the relationship between the output ratio and the wavelength measured in advance.
【0023】このような構成により、安価な構成で精度
良く、波長を計測でき、制御でき、安定化できる。With such a structure, the wavelength can be measured, controlled, and stabilized with high accuracy and with a low cost structure.
【0024】更に温度センサを設け、当該複屈折板が、
第1の複屈折材と、当該温度センサの検出温度に従い複
屈折量を調節される第2の複屈折材とからなることで、
温度に対して安定になる。Further, a temperature sensor is provided, and the birefringent plate is
By comprising the first birefringent material and the second birefringent material whose birefringence amount is adjusted according to the temperature detected by the temperature sensor,
Be stable with temperature.
【0025】好ましくは、当該複屈折板が、第1の複屈
折材と、当該第1の複屈折材の複屈折量の温度変化を相
殺する温度変化の複屈折量を具備する第2の複屈折材と
からなる。又は、当該複屈折板が、温度変化に対して同
符号の複屈折量の変化を示す第1の複屈折材及び第2の
複屈折材からなり、当該第1の複屈折材の常光線軸及び
異常光線軸が当該第2の複屈折材の異常光線軸及び常光
線軸と一致するように当該第1及び第2の複屈折材が配
置される。このような構成により、温度変化量を低減で
き、波長計測、波長制御及び波長安定化の精度が向上す
る。Preferably, the birefringent plate comprises a first birefringent material and a second birefringent material having a temperature change that cancels a temperature change of the birefringent quantity of the first birefringent material. It consists of a refraction material. Alternatively, the birefringent plate is composed of a first birefringent material and a second birefringent material showing a change in birefringence amount having the same sign with respect to a temperature change, and an ordinary ray axis of the first birefringent material. And the first and second birefringent materials are arranged so that the extraordinary ray axis coincides with the extraordinary ray axis and the ordinary ray axis of the second birefringent material. With such a configuration, the amount of temperature change can be reduced, and the accuracy of wavelength measurement, wavelength control, and wavelength stabilization is improved.
【0026】[0026]
【実施例】以下、図面を参照して、本発明の実施例を詳
細に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【0027】図1は、本発明の一実施例の概略構成ブロ
ック図を示す。10は波長を変更自在なLD、例えばD
BR−LDであり、前方と後方にレーザ光を出力する。
前方に出力されるレーザ光が、主たる用途に利用され
る。コリメータレンズ12は、DBR−LD10の後方
出力光を平行ビームにして、平面ビームスプリッタ14
に入射する。平面ビームスプリッタ14は、コリメータ
レンズ12からのレーザビームを1:9に分割し、前者
をフォトダイオード(PD)16に、後者を複屈折板1
8に入射する。フォトダイオード16は、後述するよう
に、DBR−LD10の出力パワーのモニタに使用され
る。FIG. 1 shows a schematic block diagram of an embodiment of the present invention. 10 is an LD whose wavelength can be changed, for example D
BR-LD, which outputs laser light to the front and the rear.
The laser light output to the front is used for main purposes. The collimator lens 12 collimates the rear output light of the DBR-LD 10 into a parallel beam, and the plane beam splitter 14
Incident on. The plane beam splitter 14 splits the laser beam from the collimator lens 12 into 1: 9, and the former is a photodiode (PD) 16 and the latter is a birefringent plate 1.
It is incident on 8. The photodiode 16 is used to monitor the output power of the DBR-LD 10, as described later.
【0028】複屈折板18の出力光は、偏光プリズム2
0に入射する。複屈折板18は、例えばヴァナジウム酸
イットリウム(YVO4)からなり、所定の厚さ(例え
ば、556.9μm)に研磨されている。偏光プリズム
20は、例えば、ウォラストン偏光プリズムからなる。
偏光プリズム20は、複屈折板18の出力光を2つの偏
光成分に分離し、一方の偏光成分をフォトダイオード2
2に、他方の偏光成分をフォトダイオード24に入射す
る。The output light from the birefringent plate 18 is used as the polarization prism 2
It is incident on 0. The birefringent plate 18 is made of, for example, yttrium vanadate (YVO 4 ), and is polished to have a predetermined thickness (for example, 556.9 μm). The polarization prism 20 is, for example, a Wollaston polarization prism.
The polarization prism 20 separates the output light of the birefringent plate 18 into two polarization components, and one polarization component is input to the photodiode 2
2, the other polarization component is incident on the photodiode 24.
【0029】複屈折板18に入射するレーザビームの偏
光方向、複屈折板18のスロー軸及びファースト軸、並
びに、偏光プリズム20の光学軸の関係を図2に示す。
図2(a)は、複屈折板18に入射するレーザビームの
偏光方向を示し、図2(b)は複屈折板18の常光軸及
び異常光線軸の方向を示し、図2(c)は偏光プリズム
の光学軸を示す。YVO4の場合、常光軸がスロー軸に
なり異常光線軸がファースト軸になる。図2から分かる
ように、複屈折板18は、平面ビームスプリッタ14か
らのレーザビームの偏光方向に対してスロー軸及びファ
ースト軸が45゜傾くように配置され、偏光プリズム2
0の光学軸は、複屈折板18に入射するレーザビームの
偏光方向に一致する。即ち、本実施例では、DBR−L
Dのモニタ光を2つの直交偏光成分に均等に分離し、各
偏光成分は、波長に応じた位相差を与えられてから、再
度、合成される。FIG. 2 shows the relationship between the polarization direction of the laser beam incident on the birefringent plate 18, the slow axis and the fast axis of the birefringent plate 18, and the optical axis of the polarization prism 20.
2A shows the polarization direction of the laser beam incident on the birefringent plate 18, FIG. 2B shows the directions of the ordinary and extraordinary ray axes of the birefringent plate 18, and FIG. The optical axis of the polarizing prism is shown. In the case of YVO 4 , the ordinary optical axis is the slow axis and the extraordinary ray axis is the fast axis. As can be seen from FIG. 2, the birefringent plate 18 is arranged such that the slow axis and the fast axis are inclined by 45 ° with respect to the polarization direction of the laser beam from the plane beam splitter 14, and
The optical axis of 0 coincides with the polarization direction of the laser beam incident on the birefringent plate 18. That is, in this embodiment, DBR-L
The monitor light of D is equally divided into two orthogonal polarization components, and each polarization component is given a phase difference according to the wavelength, and is then combined again.
【0030】出力比算出回路26は、後述するようにフ
ォトダイオード22,24の出力比を算出し、算出結果
を制御回路28に印加する。制御回路28には、フォト
ダイオード16の出力も印加される。制御回路28はフ
ォトダイオード16の出力に従いDBR−LD10の出
力パワーを所定値に制御し、出力比算出回路26の出力
に従い、出力比算出回路26の出力が所定値に等しくな
るようにDBR−LD10のDBRへの注入電流を、即
ちDBRの反射波長を制御する。The output ratio calculation circuit 26 calculates the output ratio of the photodiodes 22 and 24, as described later, and applies the calculation result to the control circuit 28. The output of the photodiode 16 is also applied to the control circuit 28. The control circuit 28 controls the output power of the DBR-LD 10 to a predetermined value according to the output of the photodiode 16, and the DBR-LD 10 according to the output of the output ratio calculation circuit 26 so that the output of the output ratio calculation circuit 26 becomes equal to the predetermined value. Control the injection current into the DBR, that is, the reflection wavelength of the DBR.
【0031】出力光算出回路26の算出結果(出力比)
と、DBR−LD10の波長との関係が種々の要因、例
えば、経過時間及び周囲温度等により変動することを考
慮すると、次のようにするのが好ましい。即ち、出力光
算出回路26の算出結果(出力比)と、DBR−LD1
0の波長との関係を予め計測し、その計測結果を対応表
としてルックアップテーブル30に格納しておく。そし
て、制御回路28は、出力比算出回路26の出力をルッ
クアップテーブル30に当てはめて現在の波長を確認
し、その結果に従いDBR−LD10のDBRへの注入
電流、即ち、DBRの反射波長を制御する。Calculation result of the output light calculation circuit 26 (output ratio)
In view of the fact that the relationship between the wavelength and the wavelength of the DBR-LD 10 varies depending on various factors such as elapsed time and ambient temperature, the following is preferable. That is, the calculation result (output ratio) of the output light calculation circuit 26 and the DBR-LD1
The relationship with the wavelength of 0 is measured in advance, and the measurement result is stored in the lookup table 30 as a correspondence table. Then, the control circuit 28 applies the output of the output ratio calculation circuit 26 to the look-up table 30 to confirm the current wavelength, and controls the injection current into the DBR of the DBR-LD 10, that is, the reflection wavelength of the DBR according to the result. To do.
【0032】本実施例の波長計測原理を説明する。図2
に示すように、複屈折板18は、DBR−LD10の後
方出力光の偏光方向に対して、光学軸(スロー軸及びフ
ァースト軸)が45゜傾くように設置され、偏光プリズ
ム20の偏光軸は、複屈折板18の光学軸に対して45
゜傾けて設置されている。The wavelength measuring principle of this embodiment will be described. Figure 2
As shown in, the birefringent plate 18 is installed such that the optical axes (slow axis and fast axis) are inclined by 45 ° with respect to the polarization direction of the backward output light of the DBR-LD 10, and the polarization axis of the polarization prism 20 is , 45 with respect to the optical axis of the birefringent plate 18.
It is installed at an angle.
【0033】平面ビームスプリッタ14から複屈折板1
8に入射するレーザ光は、複屈折板18内でスロー軸に
沿った偏光成分(スロー成分)とファースト軸に沿った
偏光成分(ファースト成分)に分離され、それぞれ異な
る速度で伝搬する。スロー成分とファースト成分の間に
は、その速度差に応じた位相差が発生する。偏光プリズ
ム20の偏光軸が、複屈折板18の光学軸に対して45
゜傾いているので、偏光プリズム20は、複屈折板18
のスロー成分とファースト成分を、45゜傾いた2つの
直交軸方向に合成し、一方の方向成分をフォトダイオー
ド22に、他方の方向成分をフォトダイオード24に供
給する。From the plane beam splitter 14 to the birefringent plate 1
The laser light entering 8 is separated into a polarized component along the slow axis (slow component) and a polarized component along the fast axis (fast component) in the birefringent plate 18, and propagates at different speeds. A phase difference corresponding to the speed difference occurs between the slow component and the fast component. The polarization axis of the polarizing prism 20 is 45 with respect to the optical axis of the birefringent plate 18.
Because of the inclination, the polarizing prism 20 has a birefringent plate 18
The slow component and the fast component of are combined in two orthogonal axis directions inclined at 45 °, and one directional component is supplied to the photodiode 22 and the other directional component is supplied to the photodiode 24.
【0034】一般に、複屈折板は、その材料によって決
定される屈折率の波長分散を有しており、しかも、スロ
ー軸の屈折率波長分散とファースト軸の屈折率波長分散
が異なる。しかし、材料を適切に選択することで、所望
の波長範囲内では複屈折率波長分散が波長に対し連続且
つ単調であるような複屈折板18を入手できる。その場
合、スロー成分とファースト成分の間に発生する位相差
も、波長に対して連続的且つ単調に変化する。このよう
な複屈折板18を採用すると、偏光プリズム20の2つ
の異なる偏光成分のパワー比は波長に従い単調に変化す
る。フォトダイオード22,24及び出力比算出回路2
6により、そのパワー比を算出でき、制御回路28が、
出力比算出回路26の算出結果に従い、DBR−LD1
0のDBRの反射波長を所望値に制御する。In general, the birefringent plate has wavelength dispersion of the refractive index determined by its material, and the refractive index wavelength dispersion of the slow axis and the refractive index wavelength dispersion of the fast axis are different. However, by appropriately selecting the material, it is possible to obtain the birefringent plate 18 whose wavelength dispersion of birefringence is continuous and monotonic with respect to the wavelength within a desired wavelength range. In that case, the phase difference generated between the slow component and the fast component also changes continuously and monotonically with respect to the wavelength. When such a birefringent plate 18 is adopted, the power ratio of two different polarization components of the polarization prism 20 changes monotonously with wavelength. Photodiodes 22 and 24 and output ratio calculation circuit 2
6, the power ratio can be calculated, and the control circuit 28
According to the calculation result of the output ratio calculation circuit 26, DBR-LD1
The reflection wavelength of the DBR of 0 is controlled to a desired value.
【0035】複屈折板18がYVO4からなる場合、常
光線及び異常光線に対する屈折率n o及びneは、セル
マイヤーの経験式により、
no(λ)=3.77834+0.069736/(λ2−0.04724)−0.0108133λ2
ne(λ)=4.59905+0.110534/(λ2−0.04813)−0.01226762λ2
で与えられる。λは、μmを単位とした波長である。上
式から複屈折率△n=n e−noを求めることができ
る。The birefringent plate 18 is YVOFourAlways consists of
Refractive index n for rays and extraordinary rays oAnd neIs a cell
According to Meyer's empirical formula,
no(λ) = 3.77834 + 0.069736 / (λTwo−0.04724) −0.0108133λTwo
ne(λ) = 4.59905 + 0.110534 / (λTwo-0.04813) -0.01226762λTwo
Given in. λ is a wavelength in μm. Up
From the formula, birefringence Δn = n e-NoCan ask
It
【0036】複屈折板18に入射する光の強度をI、偏
光方向をy方向、伝搬方向をz方向とする。z方向の伝
搬を表す項を省略して記すと、この入射光強度のx成分
Ix及びy方向成分Iyは、
Ix=0
Iy=Iexp(jωt)
と表される。但し、ωは入射光の角周波数である。The intensity of light incident on the birefringent plate 18 is I, the polarization direction is the y direction, and the propagation direction is the z direction. If the term representing the propagation in the z direction is omitted, the x component of this incident light intensity
The I x and y direction component I y is expressed as I x = 0 I y = I exp (jωt). However, ω is the angular frequency of the incident light.
【0037】複屈折板18のファースト軸がy方向から
x方向に向かってθだけ傾いているとすると、複屈折板
18への入射光のファースト成分Ifast及びスロー成分I
slowはそれぞれ、
Ifast=Icosθ・exp(jωt)
Islow=Isinθ・exp(jωt)
となる。If the fast axis of the birefringent plate 18 is inclined by θ from the y direction to the x direction, the fast component I fast and the slow component I of the incident light on the birefringent plate 18 will be described.
Each of slow is I fast = I cos θ · exp (jωt) I slow = I sin θ · exp (jωt).
【0038】複屈折板18のμm単位での厚さをtとす
ると、複屈折板18を出射する時のファースト成分とス
ロー成分の位相差△φは、
△φ=2π・Δn・t/λ
=2π{no(λ)−ne(λ)}t/λ (2)
となる。複屈折板18の出射光のスロー成分の位相はフ
ァースト成分の位相に対して、Δφだけ遅れいているの
で、ファースト成分を基準に取ると、
Ifast=Icosθ・exp(jωt) (3)
Islow=Isinθ・exp{j(ωt+△φ)} (4)
と表わされる。Assuming that the thickness of the birefringent plate 18 in μm is t, the phase difference Δφ between the fast component and the slow component when exiting the birefringent plate 18 is Δφ = 2π · Δn · t / λ = 2π {n o (λ) -n e (λ)} t / λ (2). Since the phase of the slow component of the outgoing light of the birefringent plate 18 is delayed by Δφ with respect to the phase of the fast component, when the fast component is taken as a reference, I fast = I cos θ · exp (jωt) (3) I slow = Isin θ · exp {j (ωt + Δφ)} (4)
【0039】偏光プリズム20の光軸は、複屈折板18
の光軸に対してθだけ傾いているので、偏光プリズム2
0のx方向成分の出力光I'x及びy方向の出力光I'yは、
I'x=Icosθ・sinθ・exp(jωt)
−Icosθ・sinθ・exp{j(ωt+△φ)} (5)
I'y=Icos2θ・exp(jωt)+Isin2θ・exp{j(ωt+△φ)} (6)
となる。ここで、θを45゜(=π/4)とすると、
I'x=Iexp(jωt){1−exp(j△φ)}/2
=Iexp(jωt){1−cos(△φ)−jsin(△φ)}/2 (7)
I'y=Iexp(jωt){1+exp(j△φ)}/2
=Iexp(jωt){1+cos(△φ)+jsin(△φ)}/2 (8)
となる。The optical axis of the polarizing prism 20 is the birefringent plate 18
Since it is inclined by θ with respect to the optical axis of
Output light I 'x and the output light I in the y-direction' y in the x direction component of 0, I 'x = Icosθ · sinθ · exp (jωt) -Icosθ · sinθ · exp {j (ωt + △ φ)} (5 ) I 'y = Icos 2 θ · exp (jωt) + Isin 2 θ · exp {j (ωt + △ φ)} and comprising (6). Here, when θ is 45 ° (= π / 4), I ′ x = Iexp (jωt) {1-exp (jΔφ)} / 2 = Iexp (jωt) {1-cos (Δφ) − jsin (Δφ)} / 2 (7) I ′ y = Iexp (jωt) {1 + exp (jΔφ)} / 2 = Iexp (jωt) {1 + cos (Δφ) + jsin (Δφ)} / 2 (8 ).
【0040】フォトダイオード22にx方向成分の光I'
xが入射し、フォトダイオード24にはy方向成分の光
I'yが入射したとする。フォトダイオード22,24
は、入射光のパワーを検出するので、フォトダイオード
22,24の出力をPx,Pyとすると、
Px=P0{(1−cos(△φ))2+sin2(△φ)}/4
=P0(1−cos(△φ)/2 (9)
Py=P0{(1+cos(△φ))2+sin2(△φ)}/4
=P0(1+cos(△φ)/2 (10)
となる。P0=I2である。The light I'of the x-direction component is input to the photodiode 22.
When x is incident, the photodiode 24 receives light of y-direction component.
Suppose I'y is incident. Photodiodes 22, 24
Since the power of the incident light is detected, when the outputs of the photodiodes 22 and 24 are P x and P y , P x = P 0 {(1-cos (Δφ)) 2 + sin 2 (Δφ)} / 4 = P 0 (1-cos (△ φ) / 2 (9) P y = P 0 {(1 + cos (△ φ)) 2 + sin 2 (△ φ)} / 4 = P 0 (1 + cos (△ φ) / 2 (10) P 0 = I 2 .
【0041】従って、フォトダイオード22,24の出
力の差を和で割った出力比は、
(Px−Py)/(Px+Py)=−cos(△φ) (11)
となる。出力比算出回路26は、フォトダイオード2
2,24の出力から、式(11)に示す(Px−Py)/
(Px+Py)を算出する。[0041] Therefore, the output ratio obtained by dividing the difference between the output of the photodiode 22, 24 in sum, (P x -P y) / (P x + P y) = - a cos (△ φ) (11) . The output ratio calculation circuit 26 uses the photodiode 2
From the outputs of 2 and 24, (P x −P y ) /
Calculate (P x + P y ).
【0042】複屈折板18の厚さtを適当に選ぶと、所
望の波長域内で高コントラストの波長検出が可能であ
る。例えば、1.545μmから1.555μmの間で
波長可変なDBR−LDの発振波長を安定化する場合を
考えると、t=556.9μmとすればよい。図3は、
t=556.9μmの、波長と偏光間位相差Δφの関係
を示す。横軸が波長を示し、縦軸が偏光間位相差Δφを
示す。図3から分かるように、偏光間位相差△φは、波
長に対してほぼ線形に変化する。従って、式(11)に
示す出力比は、波長に対してほぼ三角関数に従って変化
する。図4は、本実施例による式(9)に示す出力比
と、式(1)に示す従来例での出力比の、波長に対する
変化例を示す。When the thickness t of the birefringent plate 18 is appropriately selected, it is possible to detect a wavelength of high contrast within a desired wavelength range. For example, considering the case of stabilizing the oscillation wavelength of the DBR-LD whose wavelength is variable between 1.545 μm and 1.555 μm, t = 556.9 μm may be set. Figure 3
The relationship between the wavelength and the phase difference between polarizations Δφ at t = 556.9 μm is shown. The horizontal axis represents wavelength and the vertical axis represents the phase difference Δφ between polarized lights. As can be seen from FIG. 3, the phase difference Δφ between polarized lights changes almost linearly with wavelength. Therefore, the output ratio shown in Expression (11) changes substantially according to the trigonometric function with respect to the wavelength. FIG. 4 shows an example of changes in the output ratio shown in Expression (9) according to the present embodiment and the output ratio in the conventional example shown in Expression (1) with respect to wavelength.
【0043】図4から分かるように、本実施例の出力比
は、従来例の出力比に比べ、同じ可変帯域内で線形に近
く、且つ、大きなコントラスト比(ピークとバレーの
差)を得ることができる。これは、従来例よりも広い波
長範囲で、従来例よりも高い精度で波長を計測でき、D
BR−LD10の発振波長を制御できることを意味す
る。更には、複屈折板18は、単一の材料(YVO4)
の板からなるので、切断・研磨により容易に所望特性の
ものを形成できる。即ち、誘電体多層膜ミラーのように
精密な薄膜生成過程を必要としないので、所望の特性の
複屈折板18を安価且つ容易に製造できる。As can be seen from FIG. 4, the output ratio of this embodiment is closer to linear in the same variable band than the output ratio of the conventional example, and a large contrast ratio (difference between peak and valley) can be obtained. You can This is because the wavelength can be measured with higher accuracy than the conventional example in a wider wavelength range than the conventional example, and
This means that the oscillation wavelength of the BR-LD 10 can be controlled. Furthermore, the birefringent plate 18 is made of a single material (YVO 4 ).
Since it is made of a plate, it is possible to easily form a plate having desired characteristics by cutting and polishing. That is, since a precise thin film forming process is not required unlike the dielectric multilayer mirror, the birefringent plate 18 having desired characteristics can be manufactured inexpensively and easily.
【0044】出力比算出回路26により算出される出力
比と、DBR−LD10のレーザ発振波長との関係を予
め計測して、その対応関係を制御回路28にルックアッ
プテーブル又は関数として格納しておく。制御回路28
は、出力比算出回路26により算出される出力比をその
テーブル又は関数に適用して現在の波長を確認し、それ
が所望値になるように、DBR−LD10のDBRの反
射波長を制御する。波長計測の用途では、単に、出力比
算出回路26により算出される出力比をそのテーブル又
は関数に適用して現在の波長を確認するだけでよい。The relationship between the output ratio calculated by the output ratio calculating circuit 26 and the laser oscillation wavelength of the DBR-LD 10 is measured in advance, and the corresponding relationship is stored in the control circuit 28 as a look-up table or a function. . Control circuit 28
Applies the output ratio calculated by the output ratio calculation circuit 26 to the table or function to confirm the current wavelength, and controls the reflection wavelength of the DBR of the DBR-LD 10 so that it becomes a desired value. For wavelength measurement applications, the output ratio calculated by the output ratio calculating circuit 26 may simply be applied to the table or function to confirm the current wavelength.
【0045】複屈折板18の材料としてYVO4を使用
したが、本発明は、この材料に限定されない。例えば、
ルチル(TiO2)結晶でも、水晶(SiO2)でもよ
い。ルチル結晶は、複屈折量が大きいので、より薄くす
ることができる。例えば、図4に示すのと同等の帯域を
得たい場合、ルチル結晶の厚さを494.6μmとすれ
ばよい。一方、水晶は、複屈折量が小さいので、厚くす
る必要がある。同様に、図4に示すのと同等の帯域を得
たい場合、水晶の厚さを12.28mmにしなければな
らない。YVO4及びルチル結晶に比べて厚くなるが、
研磨による厚みの誤差が及ぼす影響を低減できること、
及び、温度による屈折率変化が他の材料に比べて小さい
ので、より温度安定性の良い波長検出器を実現できる。Although YVO 4 is used as the material of the birefringent plate 18, the present invention is not limited to this material. For example,
Either rutile (TiO 2 ) crystal or quartz (SiO 2 ) may be used. Since the rutile crystal has a large amount of birefringence, it can be made thinner. For example, in order to obtain a band equivalent to that shown in FIG. 4, the thickness of the rutile crystal may be 494.6 μm. On the other hand, quartz has a small amount of birefringence, and thus needs to be thick. Similarly, if one wants to obtain a band equivalent to that shown in FIG. 4, the thickness of the crystal must be 12.28 mm. Thicker than YVO 4 and rutile crystals,
The effect of thickness error due to polishing can be reduced,
Moreover, since the change in refractive index due to temperature is smaller than that of other materials, it is possible to realize a wavelength detector with better temperature stability.
【0046】理解を容易にするために、図1に示す実施
例では省略したが、実用上の多くの場合、温度変化によ
り屈折率が変化し、その屈折率変化により検出波長が揺
らぐことが、計測精度、延いては波長安定化の精度とし
て問題になる。そのためには、温度変化に対する補償機
構を設ければよい。例えば、複屈折板18の各温度にお
ける屈折率を予め測定して記憶しておき、複屈折板18
の現在の温度の測定結果により出力比と波長との対応関
係を修正すればよい。但し、この構成は、大量のデータ
及び/又は複雑な計算を必要とする。Although it is omitted in the embodiment shown in FIG. 1 for easy understanding, in many cases in practice, the refractive index changes due to temperature change, and the detection wavelength fluctuates due to the refractive index change. There is a problem in measurement accuracy, and eventually in wavelength stabilization accuracy. For that purpose, a compensation mechanism for temperature change may be provided. For example, the refractive index of the birefringent plate 18 at each temperature is measured and stored in advance, and the birefringent plate 18 is
The correspondence relationship between the output ratio and the wavelength may be corrected based on the measurement result of the current temperature. However, this configuration requires a large amount of data and / or complex calculations.
【0047】他に、圧電体のような、電界で複屈折量を
調整可能な媒体を複屈折板18として使用し、複屈折板
18の現在の温度に従い、複屈折量が所望量になるよう
に印加電界を制御することで、容易に温度の影響を排除
できる。図5は、その偏光実施例の概略構成ブロック図
を示す。図1に示す要素と同じ構成要素には同じ符号を
付してある。In addition, a medium such as a piezoelectric body whose birefringence amount can be adjusted by an electric field is used as the birefringence plate 18 so that the birefringence amount becomes a desired amount according to the current temperature of the birefringence plate 18. The influence of temperature can be easily eliminated by controlling the applied electric field. FIG. 5 shows a schematic block diagram of the polarization embodiment. The same components as those shown in FIG. 1 are designated by the same reference numerals.
【0048】複屈折板18として、水晶板32と、圧電
性セラミック板(PLZT板又はPZT板)34をシリ
アルに配置する。水晶板32と圧電性セラミック板34
は共に複屈折性を有するが、圧電性セラミック板34
は、単独では十分な複屈折量を有しないので、水晶板3
2を併用する。圧電性セラミック板34により、水晶板
32の複屈折の温度変動を補償する。36は、圧電性セ
ラミック板34に変更自在なバイアス電圧を印加するバ
イアス電源である。温度センサ38は、周囲の温度、具
体的には水晶板32及び圧電性セラミック板34の温度
を検出する。バイアス電源36は、温度センサ38の検
出温度に応じて、圧電性セラミック板34の複屈折が水
晶板32の複屈折の温度変動を補償するように、圧電性
セラミック板34への印加電圧を変更する。As the birefringent plate 18, a crystal plate 32 and a piezoelectric ceramic plate (PLZT plate or PZT plate) 34 are serially arranged. Crystal plate 32 and piezoelectric ceramic plate 34
Both have birefringence, but the piezoelectric ceramic plate 34
Does not have a sufficient amount of birefringence by itself, the crystal plate 3
Use 2 together. The piezoelectric ceramic plate 34 compensates for the temperature fluctuation of the birefringence of the crystal plate 32. Reference numeral 36 denotes a bias power source that applies a changeable bias voltage to the piezoelectric ceramic plate 34. The temperature sensor 38 detects the ambient temperature, specifically, the temperatures of the crystal plate 32 and the piezoelectric ceramic plate 34. The bias power supply 36 changes the voltage applied to the piezoelectric ceramic plate 34 according to the temperature detected by the temperature sensor 38 so that the birefringence of the piezoelectric ceramic plate 34 compensates for the temperature fluctuation of the birefringence of the crystal plate 32. To do.
【0049】温度変化の異なる複数の複屈折板を組み合
せることで、複屈折率の温度変化をゼロ又は極く小さく
することができる。例えば、図6に示すように、平面ビ
ームスプリッタ14と偏光プリズム20との間に、2つ
の複屈折板40,42を配置する。複屈折板40がアル
ファ・ホウ酸バリウム(α−BaB2O5)からなり、
複屈折板42がYVO4からなる。その他の構成要素
は、図1に示す実施例のそれと同じであり、同じ符号を
付してある。By combining a plurality of birefringent plates having different temperature changes, the temperature change of the birefringence can be made zero or extremely small. For example, as shown in FIG. 6, two birefringent plates 40 and 42 are arranged between the plane beam splitter 14 and the polarization prism 20. The birefringent plate 40 is made of alpha barium borate (α-BaB 2 O 5 ),
The birefringent plate 42 is made of YVO 4 . The other components are the same as those of the embodiment shown in FIG. 1 and are given the same reference numerals.
【0050】理解を容易にするために、α−BaB2O
5及びYVO4の複屈折率の波長分散は小さいので無視
し、温度変化に対する複屈折率の変化量は、用いる温度
範囲、例えば、0〜100゜Cの範囲で一定であるとす
る。To facilitate understanding, α-BaB 2 O
Since the wavelength dispersion of the birefringence of 5 and YVO 4 is small, it is neglected, and the change amount of the birefringence with respect to the temperature change is assumed to be constant in the temperature range used, for example, the range of 0 to 100 ° C.
【0051】α−BaB2O5の複屈折率ΔnB及びそ
の温度係数は、室温において、
ΔnB=−0.07328
dΔnB/dT=−7.3×10−6
であり、YVO4の複屈折率ΔnY及びその温度係数
は、室温において、
ΔnY=0.2039
dΔnY/dT=−5.5×10−6
である。複屈折板40の厚みをL1、複屈折板42の厚
みをL2として、
L2=−{(dΔnB/dT)/(dΔnY/dT)}L1 (12)
の関係を満たすように、L2とL1の比を決定する。実
際には、dΔnB/dTとdΔn Y/dTの符号が同じなので、式
(10)の右辺の絶対値をL2とし、且つ、複屈折板4
0の常光線軸(α−BaB2O5ではスロー軸)及び異
常光線軸(α−BaB2O5のではファースト軸)が複
屈折板42の異常光線軸(YVO4ではスロー軸)及び
常光線軸(YVO4ではファースト軸)にそれぞれ一致
するように、複屈折板40,42を配置する。Α-BaBTwoO5Birefringence of ΔnBAnd so
The temperature coefficient of is at room temperature,
ΔnB= -0.07328
dΔnB/ dT = -7.3 x 10-6
And YVOFourBirefringence of ΔnYAnd its temperature coefficient
At room temperature
ΔnY= 0.2039
dΔnY/ dT = -5.5 x 10-6
Is. The thickness of the birefringent plate 40 is L1, The thickness of the birefringent plate 42
Only LTwoAs
L2=-{(DΔnB/ dT) / (dΔnY/ dT)} L1 (12)
To satisfy the relationshipTwoAnd L1Determine the ratio of. Fruit
When dΔnB/ dT and dΔn YSince the sign of / dT is the same, the expression
The absolute value of the right side of (10) is LTwoAnd the birefringent plate 4
Ordinary ray axis of 0 (α-BaBTwoO5Then slow axis) and different
Ordinary ray axis (α-BaBTwoO5In the first axis)
Extraordinary ray axis of refraction plate 42 (YVOFourThen slow axis) and
Ordinary ray axis (YVOFourThen the first axis)
Thus, the birefringent plates 40 and 42 are arranged.
【0052】このようにすると、複屈折板40,42の
トータルの複屈折量は、
(ΔnL)total
=ΔnBL1−ΔnYL2 (13)
=ΔnBL1−ΔnY{(dΔnB/dT)/(dΔnY/dT)}L1
となる。式(13)の右辺で第1項から第2項を減算す
るのは、上述のように複屈折板40,42を互いに直交
させて配置したことによる。In this way, the birefringent plates 40 and 42 are
The total amount of birefringence is
(ΔnL)total
= ΔnBL1−ΔnYL2 (13)
= ΔnBL1−ΔnY{(dΔnB/ dT) / (dΔnY/ dT)} L1
Becomes Subtract the second term from the first term on the right side of equation (13)
That is, as described above, the birefringent plates 40 and 42 are orthogonal to each other.
It is due to the arrangement.
【0053】ここで、温度がΔTだけ上昇したとする
と、そのときのトータルの複屈折量の変化は、
(ΔnL)total ΔT
={ΔnB+(dΔnB/dT)ΔT}L1
−{ΔnY+(dΔnY/dT)ΔT}L2
=(ΔnL)total+(dΔnB/dT)ΔTL1
−(dΔnY/dT)ΔT{(dΔnB/dT)/(dΔnY/dT)}L1
=(ΔnL)total (14)
となる。従って、複屈折板40,42のトータルの複屈
折量は、温度にほとんど依存しない。Here, it is assumed that the temperature rises by ΔT.
And the change in total birefringence at that time is
(ΔnL)total ΔT
= {ΔnB+ (dΔnB/ dT) ΔT} L1
− (ΔnY+ (dΔnY/ dT) ΔT} L2
= (ΔnL)total+ (dΔnB/ dT) ΔTL1
− (DΔnY/ dT) ΔT {(dΔnB/ dT) / (dΔnY/ dT)} L1
= (ΔnL)total (14)
Becomes Therefore, the total birefringence of the birefringent plates 40 and 42
The folding amount hardly depends on the temperature.
【0054】複屈折板40,42のトータルの複屈折量
を所望値に設定し、それに従って複屈折板40,42の
厚みL1,L2を決定すればよい。例えば、L1を33
5μm、L2を442μmとすると、図7に示すような
出力比の波長特性が得られる。横軸は波長、縦軸は出力
比算出回路26で算出される出力比を示す。20゜Cで
YVO4のみを使用した場合と、0〜100゜Cの温度
範囲でα−BaB2O 5及びYVO4を図6に示すよう
に使用した場合とでは、ほとんど同じ特性が得られた。
その特性を実線で示す。破線は、80゜CでYVO4の
みを使用した場合の特性を示す。図7から、図6に示す
実施例では、温度に対して安定した複屈折量が得られて
いることが分かる。Total birefringence of birefringent plates 40 and 42
Is set to a desired value, and the birefringent plates 40, 42 are set accordingly.
Thickness L1, LTwoShould be decided. For example, L133
5 μm, LTwoIs 442 μm, as shown in FIG.
The wavelength characteristic of the output ratio can be obtained. Wavelength on the horizontal axis, output on the vertical axis
The output ratio calculated by the ratio calculation circuit 26 is shown. At 20 ° C
YVOFourOnly when used, and a temperature of 0 to 100 ° C
Α-BaB in the rangeTwoO 5And YVOFourAs shown in FIG.
Almost the same characteristics were obtained as when used for.
The characteristic is shown by a solid line. The broken line is YVO at 80 ° C.Fourof
Shows the characteristics when only using. From FIG. 7 to FIG.
In the example, a stable birefringence amount was obtained with respect to temperature.
I know that
【0055】一般的に、複屈折板18,40,42を所
望の厚みに研磨するのは難しい。複屈折板の厚みを微調
整する手段として、図8に示す構成が考えられる。片面
を同じ角度で傾斜させた台形状の複屈折結晶50及び楔
形状の複屈折結晶52を用意し、それぞれの斜面を対面
して配置する。複屈折結晶50,52の常光線軸及び異
常光線軸は、入射光の偏光方向に対して45゜傾いてい
る。マイクロメータ54により、複屈折結晶52を、光
軸56に直交する方向(x軸に平行な方向)に移動する
ことができる。複屈折結晶52は、図示しない機構によ
り、常時、複屈折結晶50に押し付けられている。複屈
折結晶50,52は全体として、平行な平面を具備する
複屈折板となり、マイクロメータ54で複屈折結晶52
を光軸56に直交する方向に移動することにより、その
厚みを微調整できる。Generally, it is difficult to polish the birefringent plates 18, 40 and 42 to a desired thickness. As a means for finely adjusting the thickness of the birefringent plate, the configuration shown in FIG. 8 can be considered. A trapezoidal birefringent crystal 50 and a wedge-shaped birefringent crystal 52 each having one surface inclined at the same angle are prepared, and the respective inclined surfaces are arranged to face each other. The ordinary ray axis and the extraordinary ray axis of the birefringent crystals 50 and 52 are inclined by 45 ° with respect to the polarization direction of the incident light. The birefringent crystal 52 can be moved by the micrometer 54 in a direction orthogonal to the optical axis 56 (direction parallel to the x axis). The birefringent crystal 52 is constantly pressed against the birefringent crystal 50 by a mechanism (not shown). The birefringent crystals 50 and 52 become a birefringent plate having parallel planes as a whole, and the birefringent crystal 52 is adjusted by the micrometer 54.
By moving in the direction orthogonal to the optical axis 56, the thickness can be finely adjusted.
【0056】[0056]
【発明の効果】以上の説明から容易に理解できるよう
に、本発明によれば、安価で簡単な構成で、光源の波長
を精度良く且つ広い波長域内で計測できる。従って、簡
易且つ安価な構成で、光源の波長を制御でき、安定化で
きる。As can be easily understood from the above description, according to the present invention, it is possible to measure the wavelength of the light source with high precision and in a wide wavelength range with a cheap and simple structure. Therefore, the wavelength of the light source can be controlled and stabilized with a simple and inexpensive structure.
【図1】 本発明の一実施例の概略構成ブロック図であ
る。FIG. 1 is a schematic block diagram of an embodiment of the present invention.
【図2】 複屈折板18の入力光の偏光方向、複屈折媒
体18の光軸及び偏光プリズム20の光軸の関係を示す
図である。FIG. 2 is a diagram showing a relationship between a polarization direction of input light of a birefringent plate 18, an optical axis of a birefringent medium 18 and an optical axis of a polarizing prism 20.
【図3】 複屈折板18の偏光間位相差Δφと波長との
関係を示す図である。FIG. 3 is a diagram showing the relationship between the polarization phase difference Δφ of the birefringent plate 18 and the wavelength.
【図4】 本実施例と従来例の出力比と波長との関係を
示す図である。FIG. 4 is a diagram showing a relationship between an output ratio and a wavelength in this example and a conventional example.
【図5】 圧電セラミック板による温度補償機能を有す
る実施例の概略構成ブロック図である。FIG. 5 is a schematic configuration block diagram of an embodiment having a temperature compensation function by a piezoelectric ceramic plate.
【図6】 複数の複屈折板を組み合せる実施例の概略構
成ブロック図である。FIG. 6 is a schematic block diagram of an embodiment in which a plurality of birefringent plates are combined.
【図7】 図6に示す実施例の特性図である。FIG. 7 is a characteristic diagram of the embodiment shown in FIG.
【図8】 複屈折板18,40,42の厚みを調節する
機構の斜視図である。FIG. 8 is a perspective view of a mechanism for adjusting the thickness of the birefringent plates 18, 40 and 42.
【図9】 ファブリペローエタロンの透過・反射特性及
び出力比を示す図である。FIG. 9 is a diagram showing transmission / reflection characteristics and output ratio of a Fabry-Perot etalon.
10:DBR−LD 12:コリメータレンズ 14:平面ビームスプリッタ 16:フォトダイオード 18:複屈折板 20:偏光プリズム 22,24:フォトダイオード(PD) 26:出力比算出回路 28:制御回路 30:ルックアップテーブル 32:水晶板 34:圧電性セラミック板 36:バイアス電源 38:温度センサ 40,42:複屈折板 50,52:複屈折結晶 54:マイクロメータ 56:光軸 10: DBR-LD 12: Collimator lens 14: Planar beam splitter 16: Photodiode 18: Birefringent plate 20: Polarizing prism 22, 24: Photodiode (PD) 26: Output ratio calculation circuit 28: Control circuit 30: Look-up table 32: Crystal plate 34: Piezoelectric ceramic plate 36: Bias power supply 38: Temperature sensor 40, 42: birefringent plate 50, 52: birefringent crystal 54: Micrometer 56: Optical axis
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01S 3/13 H01S 3/13 5/125 5/125 Fターム(参考) 2G065 AB09 AB10 BA09 BB31 2H042 CA09 CA14 CA17 2H049 BA05 BA06 BA42 BB03 BC21 5F072 AB13 HH02 JJ05 KK15 YY15 5F073 AA63 AA64 AA65 AB15 AB30 BA02 EA29 GA02 GA12 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) H01S 3/13 H01S 3/13 5/125 5/125 F term (reference) 2G065 AB09 AB10 BA09 BB31 2H042 CA09 CA14 CA17 2H049 BA05 BA06 BA42 BB03 BC21 5F072 AB13 HH02 JJ05 KK15 YY15 5F073 AA63 AA64 AA65 AB15 AB30 BA02 EA29 GA02 GA12
Claims (25)
振器及び当該共振器内に配置されるレーザ媒質からなる
波長可変光源と、 当該波長可変光源の出力光が入力し、当該出力光の偏光
方向に対して所定角度傾いた光軸を有する複屈折板と、 当該複屈折板の出力光を互いに直交する2つの偏光方向
に分離する偏光分離器と、 当該偏光分離器により分離される一方の偏光成分を受光
する第1の受光素子と、 当該偏光分離器により分離される他方の偏光成分を受光
する第2の受光素子と、 当該第1及び第2の受光素子の出力から所定の出力比を
算出する出力比算出回路と、 当該出力比算出回路の算出結果に従い当該反射器の反射
波長を所定値に制御する制御回路とを具備することを特
徴とする波長安定化光源。1. A wavelength tunable light source composed of a resonator having a reflector whose reflection wavelength can be changed and a laser medium arranged in the resonator, and output light of the wavelength tunable light source is input to the output light of the output light. A birefringent plate having an optical axis inclined at a predetermined angle with respect to the polarization direction, a polarization separator that separates the output light of the birefringent plate into two polarization directions orthogonal to each other, and one of the polarization separators A first light receiving element that receives the polarized light component of the second light receiving element, a second light receiving element that receives the other polarized light component separated by the polarization separator, and a predetermined output from the outputs of the first and second light receiving elements. A wavelength stabilized light source, comprising: an output ratio calculation circuit for calculating a ratio; and a control circuit for controlling the reflection wavelength of the reflector to a predetermined value according to the calculation result of the output ratio calculation circuit.
記載の波長安定化光源。2. The wavelength stabilized light source according to claim 1, wherein the predetermined angle is 45 °.
光を、当該波長可変光源の出力光の偏光方向と同方向の
偏光成分と、これに直交する偏光成分に分離する請求項
1又は2に記載の波長安定化光源。3. The polarization separator separates the output light of the birefringent plate into a polarization component in the same direction as the polarization direction of the output light of the wavelength tunable light source and a polarization component orthogonal thereto. Or the wavelength-stabilized light source described in 2.
が、第1の複屈折材と、当該温度センサの検出温度に従
い複屈折量を調節される第2の複屈折材とからなる請求
項1に記載の波長安定化光源。4. A temperature sensor is further provided, and the birefringent plate comprises a first birefringent material and a second birefringent material whose birefringence amount is adjusted according to the temperature detected by the temperature sensor. Item 1. A wavelength-stabilized light source according to item 1.
からなる請求項4に記載の波長安定化光源。5. The wavelength stabilized light source according to claim 4, wherein the second birefringent material is a piezoelectric ceramic material.
該第1の複屈折材の複屈折量の温度変化を相殺する温度
変化の複屈折量を具備する第2の複屈折材とからなる請
求項1に記載の波長安定化光源。6. A second birefringence in which the birefringent plate comprises a first birefringent material and a birefringence amount of a temperature change that cancels a temperature change of a birefringence amount of the first birefringent material. The wavelength-stabilized light source according to claim 1, comprising a material.
号の複屈折量の変化を示す第1の複屈折材及び第2の複
屈折材からなり、当該第1の複屈折材の常光線軸及び異
常光線軸が当該第2の複屈折材の異常光線軸及び常光線
軸と一致するように当該第1及び第2の複屈折材が配置
される請求項6に記載の波長安定化光源。7. The birefringent plate is composed of a first birefringent material and a second birefringent material showing a change in birefringence amount having the same sign with respect to a temperature change. 7. The wavelength stabilization according to claim 6, wherein the first and second birefringent materials are arranged so that the ordinary ray axis and the extraordinary ray axis coincide with the extraordinary ray axis and the ordinary ray axis of the second birefringent material. Light source.
素子の出力をPyとしたとき、当該出力比は、(Px−Py)
/(Px+Py)である請求項1に記載の波長安定化光源。8. When the output of the first light receiving element is P x and the output of the second light receiving element is P y , the output ratio is (P x −P y ).
The wavelength stabilized light source according to claim 1, wherein the wavelength stabilized light source is / (P x + P y ).
検出する第3の受光素子を具備し、当該制御回路は、当
該第3の受光素子の出力に従い、当該波長可変光源の出
力パワーを制御する請求項1に記載の波長安定化光源。9. A third light receiving element for detecting the output power of the wavelength tunable light source is further provided, and the control circuit controls the output power of the wavelength tunable light source according to the output of the third light receiving element. The wavelength stabilized light source according to claim 1.
長制御装置であって、 当該波長可変光源の出力光が入力し、当該出力光の偏光
方向に対して所定角度傾いた光軸を有する複屈折板と、 当該複屈折板の出力光を互いに直交する2つの偏光方向
に分離する偏光分離器と、 当該偏光分離器により分離される一方の偏光成分を受光
する第1の受光素子と、 当該偏光分離器により分離される他方の偏光成分を受光
する第2の受光素子と、 当該第1及び第2の受光素子の出力から所定の出力比を
算出する出力比算出回路と、 当該出力比算出回路の算出結果に従い当該反射器の反射
波長を所定値に制御する制御回路とを具備することを特
徴とする波長制御装置。10. A wavelength control device for controlling an output wavelength of a wavelength tunable light source, comprising: a wavelength control device that receives an output light of the wavelength tunable light source and has an optical axis inclined at a predetermined angle with respect to a polarization direction of the output light. A refraction plate, a polarization separator for separating output light of the birefringence plate into two polarization directions orthogonal to each other, a first light receiving element for receiving one polarization component separated by the polarization separator, A second light receiving element that receives the other polarization component separated by the polarization separator, an output ratio calculation circuit that calculates a predetermined output ratio from the outputs of the first and second light receiving elements, and the output ratio calculation A wavelength control device, comprising: a control circuit that controls the reflection wavelength of the reflector to a predetermined value according to the calculation result of the circuit.
0に記載の波長制御装置。11. The predetermined angle is 45 °.
The wavelength control device according to 0.
力光を、当該波長可変光源の出力光の偏光方向と同方向
の偏光成分と、これに直交する偏光成分に分離する請求
項10又は11に記載の波長制御装置。12. The polarization splitter separates the output light of the birefringent plate into a polarization component in the same direction as the polarization direction of the output light of the wavelength tunable light source and a polarization component orthogonal thereto. Alternatively, the wavelength control device according to item 11.
板が、第1の複屈折材と、当該温度センサの検出温度に
従い複屈折量を調節される第2の複屈折材とからなる請
求項10に記載の波長制御装置。13. A temperature sensor is further provided, and the birefringent plate comprises a first birefringent material and a second birefringent material whose birefringence amount is adjusted according to the temperature detected by the temperature sensor. Item 11. The wavelength control device according to item 10.
材からなる請求項13に記載の波長制御装置。14. The wavelength control device according to claim 13, wherein the second birefringent material is a piezoelectric ceramic material.
当該第1の複屈折材の複屈折量の温度変化を相殺する温
度変化の複屈折量を具備する第2の複屈折材とからなる
請求項10に記載の波長制御装置。15. The birefringent plate comprises a first birefringent material,
The wavelength control device according to claim 10, comprising a second birefringent material having a temperature change birefringence amount that cancels a temperature change of the birefringence amount of the first birefringent material.
符号の複屈折量の変化を示す第1の複屈折材及び第2の
複屈折材からなり、当該第1の複屈折材の常光線軸及び
異常光線軸が当該第2の複屈折材の異常光線軸及び常光
線軸と一致するように当該第1及び第2の複屈折材が配
置される請求項15に記載の波長制御装置。16. The birefringent plate is composed of a first birefringent material and a second birefringent material showing a change in birefringence amount having the same sign with respect to a temperature change. 16. The wavelength control according to claim 15, wherein the first and second birefringent materials are arranged so that the ordinary ray axis and the extraordinary ray axis coincide with the extraordinary ray axis and the ordinary ray axis of the second birefringent material. apparatus.
光素子の出力をPyとしたとき、当該出力比は、(Px−
Py)/(Px+Py)である請求項10に記載の波長制御装
置。17. When the output of the first light receiving element is P x and the output of the second light receiving element is P y , the output ratio is (P x −
The wavelength control device according to claim 10, wherein P y ) / (P x + P y ).
あって、 当該光源の出力光が入力し、当該出力光の偏光方向に対
して所定角度傾いた光軸を有する複屈折板と、 当該複屈折板の出力光を互いに直交する2つの偏光方向
に分離する偏光分離器と、 当該偏光分離器により分離される一方の偏光成分を受光
する第1の受光素子と、 当該偏光分離器により分離される他方の偏光成分を受光
する第2の受光素子と、 当該第1及び第2の受光素子の出力から所定の出力比を
算出する出力比算出回路と、 当該出力比算出回路の算出結果を、予め計測した、当該
出力比と波長との関係に照合する照合回路とを具備する
ことを特徴とする波長計測装置。18. A wavelength measuring device for measuring a wavelength of a light source, comprising: a birefringent plate having an optical axis to which output light of the light source is input and which is inclined at a predetermined angle with respect to a polarization direction of the output light. A polarization separator for separating the output light of the birefringent plate into two polarization directions orthogonal to each other, a first light receiving element for receiving one polarization component separated by the polarization separator, and a separation for the polarization separator. The second light receiving element that receives the other polarized light component, the output ratio calculation circuit that calculates a predetermined output ratio from the outputs of the first and second light receiving elements, and the calculation result of the output ratio calculation circuit A wavelength measuring device, comprising: a matching circuit for matching the relationship between the output ratio and the wavelength, which is measured in advance.
8に記載の波長計測装置。19. The predetermined angle is 45 °.
8. The wavelength measuring device according to 8.
力光を、当該光源の出力光の偏光方向と同方向の偏光成
分と、これに直交する偏光成分に分離する請求項18又
は19に記載の波長計測装置。20. The polarization splitter separates the output light from the birefringent plate into a polarization component in the same direction as the polarization direction of the output light from the light source and a polarization component orthogonal to the polarization component. The wavelength measuring device described in.
板が、第1の複屈折材と、当該温度センサの検出温度に
従い複屈折量を調節される第2の複屈折材とからなる請
求項18に記載の波長計測装置。21. A temperature sensor is further provided, and the birefringent plate comprises a first birefringent material and a second birefringent material whose birefringence amount is adjusted according to the temperature detected by the temperature sensor. Item 18. The wavelength measuring device according to item 18.
材からなる請求項21に記載の波長計測装置。22. The wavelength measuring device according to claim 21, wherein the second birefringent material is a piezoelectric ceramic material.
当該第1の複屈折材の複屈折量の温度変化を相殺する温
度変化の複屈折量を具備する第2の複屈折材とからなる
請求項18に記載の波長計測装置。23. The birefringent plate comprises a first birefringent material,
19. The wavelength measuring device according to claim 18, comprising a second birefringent material having a temperature change birefringence amount that cancels a temperature change of the birefringence amount of the first birefringence material.
符号の複屈折量の変化を示す第1の複屈折材及び第2の
複屈折材からなり、当該第1の複屈折材の常光線軸及び
異常光線軸が当該第2の複屈折材の異常光線軸及び常光
線軸と一致するように当該第1及び第2の複屈折材が配
置される請求項23に記載の波長計測装置。24. The birefringent plate is composed of a first birefringent material and a second birefringent material showing a change in birefringence amount having the same sign with respect to a temperature change. 24. The wavelength measurement according to claim 23, wherein the first and second birefringent materials are arranged so that the ordinary ray axis and the extraordinary ray axis coincide with the extraordinary ray axis and the ordinary ray axis of the second birefringent material. apparatus.
光素子の出力をPyとしたとき、当該出力比は、(Px−
Py)/(Px+Py)である請求項18に記載の波長計測装
置。25. When the output of the first light receiving element is P x and the output of the second light receiving element is P y , the output ratio is (P x −
19. The wavelength measuring device according to claim 18, wherein P y ) / (P x + P y ).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001245348A JP2003060292A (en) | 2001-08-13 | 2001-08-13 | Wavelength stabilized light source, wavelength control device and wavelength measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001245348A JP2003060292A (en) | 2001-08-13 | 2001-08-13 | Wavelength stabilized light source, wavelength control device and wavelength measurement device |
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| Publication Number | Publication Date |
|---|---|
| JP2003060292A true JP2003060292A (en) | 2003-02-28 |
Family
ID=19075116
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001245348A Withdrawn JP2003060292A (en) | 2001-08-13 | 2001-08-13 | Wavelength stabilized light source, wavelength control device and wavelength measurement device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2013105733A1 (en) * | 2012-01-13 | 2013-07-18 | 주식회사 포벨 | Wavelength-tunable laser apparatus having wavelength measuring function |
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| CN108801466A (en) * | 2017-04-28 | 2018-11-13 | 富士通光器件株式会社 | Wavelength monitoring device, light supply apparatus and optical module |
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2001
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| WO2013105733A1 (en) * | 2012-01-13 | 2013-07-18 | 주식회사 포벨 | Wavelength-tunable laser apparatus having wavelength measuring function |
| US9325154B2 (en) | 2012-01-13 | 2016-04-26 | Phovel. Co. Ltd | Wavelength-tunable laser apparatus having wavelength measuring function |
| CN102938534A (en) * | 2012-11-09 | 2013-02-20 | 维林光电(苏州)有限公司 | Semiconductor laser and method for generating high-quality and high-stability light beams by semiconductor laser |
| CN108801466A (en) * | 2017-04-28 | 2018-11-13 | 富士通光器件株式会社 | Wavelength monitoring device, light supply apparatus and optical module |
| JP2018190778A (en) * | 2017-04-28 | 2018-11-29 | 富士通オプティカルコンポーネンツ株式会社 | Wavelength monitoring device, light source device and optical module |
| CN108801466B (en) * | 2017-04-28 | 2020-08-18 | 富士通光器件株式会社 | Wavelength monitoring device, light source device, and optical module |
| JP7062882B2 (en) | 2017-04-28 | 2022-05-09 | 富士通オプティカルコンポーネンツ株式会社 | Wavelength monitor device, light source device and optical module |
| CN113097842A (en) * | 2021-03-29 | 2021-07-09 | 中国科学院上海光学精密机械研究所 | Polarization maintaining fiber-based ultrastable laser system |
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