JP2003060017A - Ceramic member with built-in electrode and method of manufacturing the same - Google Patents

Abstract

(57) [Problem] To provide a ceramic body in which a film-like electrode layer is embedded, when performing external processing, thickness processing, or drilling processing, the position of the film-like electrode layer due to deformation during press molding or shrinkage during firing. Changes, and when various processes are performed, the membrane electrode layer is exposed, the distance from the membrane electrode layer to the surface of the ceramic body becomes uneven, or the membrane electrode layer penetrates when drilling. To prevent them from getting lost. Kind Code: A1 A plurality of ceramic green sheets are laminated, and a membrane electrode layer is interposed between two ceramic green sheets.
And a ceramic laminate in which the film-like reference layer 4 disposed around the film-like electrode layer 3 is interposed therebetween, and a ceramic laminated body is manufactured by firing and integrated to embed the film-like electrode layer 3 and the film-like reference layer 4. An electrode-containing ceramic body 1 made of the body 2 is manufactured, and then the ceramic body 2 is subjected to outer shape processing, thickness processing, with reference to the film-like reference layer 4 in the ceramic body 2.
At least one of drilling is performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic member with a built-in electrode in which a film electrode layer is embedded in a ceramic body such as a ceramic electrostatic chuck or a ceramic heater, and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 10, a ceramic heater used in a semiconductor wafer heating apparatus or the like has a semiconductor body (not shown) formed on the upper surface of a ceramic body 41 made of an aluminum nitride sintered body or the like. And a film-like electrode layer 43 made of a metal such as tungsten or molybdenum is embedded as a heater electrode in the ceramic body 41. The lower surface of the ceramic body 41 is Power supply terminal hole 4 for inserting and fixing a power supply terminal (not shown) for energizing the film electrode layer 43
4 had been formed.

Further, in this type of ceramic heater, since it is necessary to accurately measure the temperature of the semiconductor wafer on the mounting surface 48, a temperature detecting means such as a thermocouple is installed on the lower surface of the ceramic body 41. Therefore, the temperature detecting hole 45 is formed.

Furthermore, since it is necessary to separate the processed semiconductor wafer from the mounting surface 48 by lift pins (not shown), the ceramic body 41 is provided with lift pin insertion holes 46 penetrating from the lower surface to the upper surface. Was there.

If necessary, a gas such as He is supplied into the gap between the semiconductor wafer and the mounting surface 48 to uniformly heat the semiconductor wafer on the mounting surface 48. In some cases, a gas introduction hole 47 was formed to penetrate from the lower surface to the upper surface.

Further, such a ceramic heater has been manufactured by the following method.

[0007] A plurality of ceramic green sheets formed by a tape molding method or a press molding method are laminated, and a ceramic laminated sheet in which a film electrode layer 43 having a desired pattern shape is sandwiched between two ceramic green sheets. The ceramic body 31 in which the film-like electrode layer 43 is embedded is manufactured by manufacturing the body and firing and integrating it, and thereafter, the ceramic body 41 is ground to have a predetermined size and shape. The mounting surface 48 is formed by polishing the upper surface of the body 41, and further drilling processing is performed on the lower surface of the ceramic body 41 to form a power supply terminal hole 44, a temperature detection hole 45, a lift pin insertion hole 46, and a gas. Introduction hole 4
7 were to be perforated respectively.

[0008]

By the way, in the case of forming the above-mentioned ceramic heater, in the thickness processing and the outer shape processing of the ceramic body 41, the distance from the mounting surface 48 to the film electrode layer 43 and the side surface of the ceramic body 41. It is necessary to process the distance from the film electrode layer 43 to a predetermined size,
When forming the hole 44 for the power supply terminal, the ceramic body 4
It is necessary to perform a drilling process from the lower surface of No. 1 to the electrode extraction portion of the film electrode layer 43, and in forming the temperature detection hole 45, the lift pin insertion hole 46, and the gas introduction hole 47, the film electrode It is necessary to form the layer 43 across the layer 43. However, the ceramic laminate may undergo shrinkage during firing, and the film electrode layer 43 may be deformed by the pressing pressure during formation of the ceramic laminate. Due to the deformation of the film electrode layer 43 due to the press pressure, desired thickness processing, outer shape processing, and hole processing cannot be performed, and in the thickness processing, the distance from the mounting surface 48 to the film electrode layer 43 varies for each product. In the outer shape processing, a part of the film-like electrode layer 43 may be exposed from the side surface of the ceramic body 41, and in the hole forming processing of the power supply terminal hole 44, it is displaced from a predetermined position. As a result, electrical continuity is lost with the electrode extraction portion of the film electrode layer 43, and the film electrode layer 43 is penetrated when the temperature detection hole 45, the lift pin insertion hole 46, and the gas introduction hole 47 are drilled. However, there is a problem in that the membrane electrode layer 43 is broken due to the perforation of the film electrode, and the yield is very poor.

Therefore, as a means for solving such a problem, an X-ray transmission photograph of the fired ceramic body is taken,
The pattern shape, orientation, center, etc. of the film electrode layer are confirmed based on this X-ray transmission photograph, and holes for power supply terminals, temperature detection holes, lift pin insertion holes, gas introduction holes, etc. are drilled. Has been proposed (JP-A-6-7692).
(See Japanese Patent Publication No. 5).

However, even when an X-ray radiograph is used, it cannot be accurately detected at the embedded depth of the film electrode layer in the ceramic body, and there is still a problem in reliability in the processing in the depth direction. was there.

Further, in the method using the X-ray transmission photograph, X
As a property of the X-ray, the area directly under the X-ray light source can be measured accurately, but the X-ray is obliquely irradiated on the outer peripheral portion of the ceramic body away from the X-ray light source. There is also a problem that the shape cannot be measured accurately. This problem becomes more remarkable as the outer shape of the ceramic body increases, and in the case of a large structure having a diameter of more than 200 mm, the pattern shape of the membrane electrode layer,
It was difficult to measure the orientation, center, etc. accurately.

Further, when the thickness of the ceramic body is as large as 10 mm or more, it becomes difficult to confirm the film-like electrode layer, which causes a problem that the measurement accuracy further deteriorates.

As described above, it is difficult to manufacture a ceramic member with a film-shaped electrode layer embedded in a ceramic body without subjecting a defective product to a thickness process, an outer shape process, a drilling process, etc. In particular, no means has yet been obtained for producing a large-sized ceramic member with a built-in electrode with an outer diameter of 200 mm or more and a thickness of more than 10 mm with a good yield.

[0014]

In view of the above-mentioned problems, the present invention is directed to a ceramic member with a built-in electrode in which a film-shaped electrode layer is embedded in a ceramic body. It is characterized in that a film-like reference layer for confirming at least one of the orientation, the center, and the depth is provided.

The film electrode layer can be used as an electrostatic attraction electrode or a heater electrode.

Further, in manufacturing the ceramic member with a built-in electrode, the first method of the present invention is that a plurality of ceramic green sheets are laminated, and a film-like electrode layer is provided between at least two ceramic green sheets, Ceramic laminates each having a film-like reference layer arranged around the film-like electrode layer are fired and integrated to produce a ceramic body in which the film-like electrode layer and the film-like reference layer are embedded. It is characterized in that at least one of external processing, thickness processing, and drilling processing is performed on the ceramic body with the film-shaped reference layer as a reference.

In the second method of the present invention, a plurality of ceramic green sheets are laminated, and a film electrode layer is provided between at least two ceramic green sheets, and between the other two ceramic green sheets. To produce a ceramic body in which the membrane electrode layer and the membrane reference layer are embedded, and then the membrane reference layer in the ceramic body is used as a reference. It is characterized in that the ceramic body is subjected to at least one of outer shape processing, thickness processing, and drilling processing.

Furthermore, the third method of the present invention is to produce a ceramic laminate having a plurality of ceramic green sheets laminated and having a film-like electrode layer between two ceramic green sheets. By laying a film-like reference layer on the body surface and then firing and integrating, a ceramic body having the film-like electrode layer and the film-like reference layer is produced, and then the film-like reference layer on the surface of the ceramic body is taken as a reference, At least one or more of outer shape processing, thickness processing, and drilling processing is performed on the ceramic body.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

FIG. 1 is a sectional view showing an example of a ceramic member with a built-in electrode according to the present invention.

The ceramic member 1 with a built-in electrode is formed by embedding a film-like electrode layer 3 and a film-like reference layer 4 inside a ceramic body 2. The film-like electrode layer 3 is, for example, as shown in FIG. The two electrode layers 3a and 3b each have a substantially semicircular shape and are arranged so as to form a circle. Further, the membranous reference layer 4 is embedded in the same depth as the membranous electrode layer 3, and one end of the membranous reference layer 4 is exposed from the side surface of the ceramic body 2. In FIG. Four linear film-like reference layers 4 are arranged at equal intervals on the outer periphery.

Further, through holes 5 and 6 are formed in the central portion and the outer peripheral portion of the ceramic body 2 in the thickness direction thereof, respectively, and pilot holes 7a and 7b reaching the film electrode layer 3 from the lower surface of the ceramic body 2. Is perforated. In FIG. 2, reference numeral 3c is a hollow portion formed in the film electrode layer 3, and holes 5 and 6 are formed through the hollow portion 3c.

Next, a method for manufacturing the ceramic member 1 with a built-in electrode will be described.

First, a plurality of ceramic green sheets are prepared by a tape molding method or a press molding method. Then, these ceramic green sheets are laminated to manufacture a ceramic laminated body. At this time, the conductive paste to be the film electrode layer 3 and the film reference layer 4 are provided between the two ceramic green sheets. Each paste is printed so as to have a pattern shape as shown in FIG.

Next, the ceramic laminate 2 is embedded at the same depth with the film electrode layer 3 and the film reference layer 4 by firing and integrating the ceramic laminate at a temperature at which it can be sintered. To manufacture.

Thereafter, the upper and lower surfaces of the sintered ceramic body 2 are ground so that the distance from the upper surface of the ceramic body 2 to the membrane electrode layer 3 is within a predetermined range, and the ceramic is Membrane electrode layer 3 from the side of body 2
The outer shape is processed so that the distance to is within a predetermined range, and the through holes 5, 6 and the pilot hole 7a,
7b is perforated. At this time, the ceramic body 2 is subjected to outer shape processing, thickness processing, and drilling processing with the film-shaped reference layer 4 embedded in the ceramic body 2 as a reference.

That is, the electrode-embedded ceramic member 1 of the present invention
Since the film-like reference layer 4 is provided in the ceramic body 2 at the same depth as the film-like electrode layer 3 and these are formed at the same time as the firing of the ceramic body 2, the film-like reference layer is formed as the ceramic body 2. At the same time, the film can be shrunk and deformed in the same manner as the membranous electrode layer 3, so that the film can be embedded at substantially the same depth as the membranous electrode film 3 even after sintering.

Therefore, if the thickness of the film-like reference layer 4 is used as a reference, the film-like electrode layer 3 can be processed to a predetermined depth from the upper and lower surfaces of the ceramic body 2. Further, if the distance between the film-like reference layer 4 and the film-like electrode layer 3 shown in FIG. 2 is formed in consideration of the shrinkage amount during firing, the side surface of the ceramic body 2 until the film-like reference layer 4 disappears. By grinding, the outer diameter of the plate-shaped ceramic body 2 can be processed to a predetermined size.

Further, as shown in FIG. 2, the directions of the membranous electrode layers 3 can be grasped from the four linear membranous reference layers 4 and the opposing membranous reference layers 4 are connected to each other. Since the center position of the membranous electrode layer 3 can be grasped by obtaining the intersecting point, the hole drilling position is calculated from the center and the direction of the membranous electrode layer 3 and the ceramic body 2 is drilled at a predetermined position. If the holes are perforated, it is possible to form the through holes 5 and 6 so as to accurately penetrate the cut-out portion 3c of the membranous electrode layer 3, and the depth up to the membranous electrode layer 3 can be known. The pilot holes 7a and 7b reaching the electrode layer 3 can be accurately drilled.

In this embodiment, as the membranous reference layer 4, the linear ones are arranged at equal intervals around the membranous electrode layer 3, but the line width of the membranous reference layer 4 is shown. The number and the number are not particularly limited, and may be formed as needed.

Next, another ceramic member with a built-in electrode according to the present invention will be described with reference to FIGS.

This ceramic member 11 with a built-in electrode has a film-like electrode layer 13 and a film-like reference layer 14 inside a ceramic body 12.
The film-like electrode layer 13 has two substantially semicircular electrode layers 13 similar to FIG.
It consists of a and 13b and is arranged so as to form a circle. Further, the membranous reference layer 14 is the membranous electrode layer 13
4, the film-shaped reference layer 14 is formed in the vicinity of the surface of the ceramic body 12 and has a diameter larger than that of the film-shaped electrode layer 13 and has four arcs. Are arranged so as to form a ring.

Further, through holes 15 and 16 are formed in the central portion and the outer peripheral portion of the ceramic body 12 in the thickness direction thereof, respectively, and pilot holes 17a and 17b reaching the film electrode layer 13 from the lower surface of the ceramic body 12. Is perforated.

Next, a method of manufacturing the ceramic member 11 having a built-in electrode will be described.

First, a plurality of ceramic green sheets are prepared by a tape molding method or a press molding method. Then, these ceramic green sheets are laminated to manufacture a ceramic laminated body. At this time, a conductive paste to be the film-like electrode layer 13 is formed between the two ceramic green sheets in a pattern shape as shown in FIG. And the paste serving as the film-shaped reference layer 14 is printed between two other ceramic green sheets so as to have a pattern shape as shown in FIG. At this time, the membranous reference layer 14 is arranged so as to be located in the vicinity of the surface of the ceramic laminated body, and when the membranous electrode layer 13 and the membranous reference layer 14 are projected onto the surface of the ceramic laminated body, The annular film-shaped reference layer 14 is positioned outside the circular film-shaped electrode layer 13 with a predetermined distance.

Next, the ceramic laminate is fired and integrated at a temperature at which it can be sintered, so that the film electrode layer 13 and the film reference layer 14 are embedded, and the film reference layer is formed on one surface. A ceramic body 12 is produced in which the pattern shape of the layer 14 appears transparent.

Thereafter, the upper and lower surfaces of the sintered ceramic body 12 are ground so that the distance from the upper and lower surfaces of the ceramic body 12 to the membranous electrode layer 13 is within a predetermined range. The outer shape is processed so that the distance from the side surface of the ceramic body 12 to the membrane electrode layer 13 is within a predetermined range, and the through hole 1 is provided at a predetermined position of the ceramic body 12.
5, 16 and the pilot holes 17a, 17b are drilled,
At this time, with the film-like reference layer 14 embedded in the ceramic body 12 as a reference, the ceramic body 12 is subjected to outer shape processing, thickness processing, and drilling processing.

That is, this ceramic member 11 with a built-in electrode
Since the film-shaped reference layer 14 is provided in the ceramic body 12 so as to have a specific positional relationship with the film-shaped electrode layer 13, and these are formed simultaneously with the firing of the ceramic body 12, the film-shaped reference layer is formed. Since 14 can be shrunk and deformed together with the ceramic body 12 in substantially the same manner as the membrane electrode layer 13, it can be embedded so as to have the same positional relationship as the membrane electrode film 13 even after sintering. Since the film-shaped reference layer 14 is embedded in the vicinity of the surface of the ceramic body 12, the film-shaped reference layer 14 can be transmitted to one main surface of the ceramic body 12 and its pattern shape can be confirmed.

Therefore, as shown in FIG. 4, the directions of the membranous electrode layers 13 can be grasped from the four arcuate membranous reference layers 14 and the opposing membranous reference layers 14 are connected to each other. Since the center position of the membranous electrode layer 13 can be grasped by finding the intersection point with, the perforation position of the hole is calculated from the center and the direction of the membranous electrode layer 13, and the ceramic body 1
If a hole is drilled at a predetermined position of 2, the through holes 15 and 16 can be drilled so as to accurately penetrate the cut-out portion 13c of the membranous electrode layer 13.

Further, if the shrinkage rate during firing of the ceramic laminated body is obtained, the distance from the film-like reference layer 14 to the film-like electrode layer 13 can be grasped, so that the film-like reference layer 14 is used as a reference. , If it is thickened, ceramic body 1
2 can be processed so that the depth of the membranous electrode layer 13 from the upper and lower surfaces becomes a predetermined depth, and the depth from the lower surface of the ceramic body 12 to the membranous electrode layer 13 can be obtained. Holes 17a, 1 reaching the electrode layer 13
7b can be accurately drilled.

Further, if the distance between the film-like reference layer 14 and the film-like electrode layer 13 in FIG. 4 is formed in consideration of the shrinkage amount at the time of firing, the film-like reference layer 14 is removed until the ceramic body 12 is removed. By grinding the side surface, the outer diameter of the plate-shaped ceramic body 12 can be processed to a predetermined size.

In this embodiment, the membranous reference layer 14 is used.
As an example, the strip-shaped electrodes are arranged at equal intervals around the film-shaped electrode layer 13, but the line width and the number of the film-shaped reference layer 14 are not particularly limited and may be formed as necessary. Just do it.

Further, another ceramic member 21 with a built-in electrode according to the present invention will be described with reference to FIGS. 5 and 6.

The ceramic member 21 with a built-in electrode is obtained by burying a film electrode layer 23 inside a ceramic body 22 and laying a film reference layer 24 on the surface of the ceramic body 22. For example, as in FIG. 2, 23 is composed of two substantially semicircular electrode layers 23a and 23b, which are arranged so as to form a circle. Further, the membranous reference layer 24 is embedded at a depth different from that of the membranous electrode layer 23, and its pattern shape is a shape in which a cross-shaped cross line is drawn in a ring as shown in FIG. .

Further, through holes 25 and 26 are bored in the central portion and the outer peripheral portion of the ceramic body 22 in the thickness direction thereof, respectively, and the pilot holes 27a and 17b reaching the film electrode layer 23 from the lower surface of the ceramic body 22. Is perforated.

Next, a method for manufacturing the ceramic member 21 with a built-in electrode will be described.

First, a plurality of ceramic green sheets are prepared by a tape molding method or a press molding method. Then, these ceramic green sheets are laminated to manufacture a ceramic laminated body. At this time, the conductive paste to be the film-like electrode layer 23 is formed between the two ceramic green sheets in a pattern shape as shown in FIG. To print.

Further, the surface of the ceramic laminate is shown in FIG.
So that the pattern shape as shown in FIG.
Print the paste that becomes 4.

Next, the ceramic laminated body is provided with the film electrode layer 23 and the film reference layer 24 by firing and integrating the ceramic laminate at a temperature at which it can be sintered.

Thereafter, the upper and lower surfaces of the sintered ceramic body 22 are ground so that the distance from the upper surface of the ceramic body 22 to the membranous electrode layer 23 is within a predetermined range and the ceramic is The outer shape is processed so that the distance from the side surface of the body 22 to the membrane electrode layer 23 is within a predetermined range, and the through hole 25,
26 and the pilot holes 27a and 27b are drilled. At this time, the membranous reference layer 2 embedded in the ceramic body 22 is formed.
On the basis of 4, the ceramic body 22 is subjected to outer shape processing, thickness processing, and drilling processing.

That is, this electrode-embedded ceramic member 21
The film-shaped reference layer 24 is provided on the surface of the ceramic body 22 so as to have a specific positional relationship with the film-shaped electrode layer 23, and these are formed simultaneously with the firing of the ceramic body 12. Since the reference layer 24 can be shrunk and deformed in the same manner as the membrane electrode layer 23 together with the ceramic body 22, the reference layer 24 can be embedded so as to have the same positional relationship as the membrane electrode film 23 even after sintering. it can.

Therefore, since the direction and the center of the film electrode layer 13 can be grasped from the pattern shape of the film reference layer 24 shown in FIG. 6, the punching position of the hole is determined from the center and the direction of the film electrode layer 13. Then, if a hole is drilled at a predetermined position of the ceramic body 22, the through holes 25 and 26 can be drilled so as to accurately penetrate the hollow portion 23c of the membrane electrode layer 23.

Further, if the shrinkage rate during firing of the ceramic laminated body is obtained, the distance from the film-like reference layer 24 to the film-like electrode layer 23 can be grasped, so that the film-like reference layer 24 is used as a reference. , If it is thickened, ceramic body 2
2 can be processed so that the depth of the membranous electrode layer 23 from the upper and lower surfaces becomes a predetermined depth, and the depth from the lower surface of the ceramic body 22 to the membranous electrode layer 23 can be obtained. Holes 27a, 2 reaching the electrode layer 23
7b can be accurately drilled.

Further, if the distance between the film-like reference layer 24 and the film-like electrode layer 23 in FIG. 6 is formed in consideration of the shrinkage amount at the time of firing, the ceramic body 22 of the ceramic body 22 is removed until the film-like reference layer 24 disappears. By grinding the side surface, the outer diameter of the plate-shaped ceramic body 22 can be processed to a predetermined size.

By the way, the above ceramic bodies 2, 12, 2
As a material for forming 2, a ceramic sintered body containing aluminum nitride, alumina, silicon carbide, boron nitride or the like as a main component can be used, and may be appropriately selected and used according to required characteristics.

The film-like electrode layers 3, 13, 23 embedded in the ceramic bodies 2, 12, 22 are made of tungsten, molybdenum, palladium, silver, gold, platinum and their compounds. In consideration of the adhesiveness with the ceramic bodies 2, 12, 22, it is possible to select and use one having a thermal expansion difference close to that of the ceramic sintered body forming the ceramic bodies 2, 12, 22.

Further, as the material for forming the film-form reference layers 4, 14 and 24, in order to have the adhesiveness with the ceramic bodies 2, 12 and 22 and the same firing shrinkage ratio as the film-like electrode layers 3, 13 and 23. It is preferable to use the same material as the film electrode layers 3, 13, 23. However, in addition to this, aluminum nitride, alumina, silicon carbide, which exhibits a color different from that of the ceramic sintered body forming the ceramic bodies 2, 12, 22,
It may be formed of any material of boron nitride.

The method for performing the outer shape processing, the thickness processing, and the hole processing on the ceramic bodies 2, 12 and 22 has been described above, but the present invention is not limited to the above-described embodiments, and the ceramic body 2 is not limited thereto. , 12, 22 are provided with film-like reference layers 4, 14, 24, and these film-like reference layers 4, 1, 4,
It is sufficient that at least one of the outer shape processing, the thickness processing, and the drilling processing is performed on the basis of 24.

Further, the pattern shapes of the film-like reference layers 4, 14 and 24 are not limited to those shown in FIGS. 2, 4 and 6, but are, for example, as shown in FIGS. 7 (a) to 7 (c). Anything is fine.

Next, a manufacturing method for manufacturing the ceramic electrostatic chuck shown in FIG. 8 from the electrode-embedded ceramic member of the present invention will be described with reference to FIGS. 9 (a) to 9 (d).

First, a ceramic green sheet is prepared. This ceramic green sheet is manufactured by a ceramics powder, an organic binder, a plasticizer, and a solvent placed in a ball mill, crushed and kneaded to prepare a slurry, and then a tape molding method such as a doctor blade method.

Here, as the ceramic powder, one having aluminum nitride, alumina, silicon carbide, boron nitride or the like as a main component, and a sintering aid or the like added as necessary is used. The thickness of the ceramic green sheet is 0.1
It is preferable to use one having a thickness of up to 1.0 mm.

Next, of the plurality of ceramic green sheets, a conductor paste to be the film electrode layer 3 for electrostatic attraction having the same pattern shape as in FIG. 2 is screen-printed between the two ceramic green sheets. In addition to the above, a paste serving as the linear film-shaped reference layer 4 is formed around the periphery by screen printing.

The conductor paste forming the film electrode layer 3 for electrostatic attraction includes tungsten, molybdenum, palladium,
A metal powder of silver, gold, platinum, or the like, to which an organic binder and a solvent have been added, is used, and the paste forming the film-form reference layer 4 is the same conductor paste as the film-form electrode layer 3 for electrostatic attraction. To use.

Then, a plurality of ceramic green sheets are laminated with a contact liquid interposed therebetween, and the laminated body is placed on a plate-shaped die of a pressing machine, and pressure is applied to bring them into close contact with each other to produce a ceramic laminated body.

At this time, if a slight temperature is applied, the adhesion can be enhanced. Further, when using a ceramic green sheet containing a thermoplastic binder, it is also possible to directly laminate the ceramic green sheets without applying a contact liquid and press the ceramic green sheets to each other under pressure and pressure.

The temperature at which the pressure is applied varies depending on the type of the organic binder and the properties of the contact liquid, but the temperature of the press, mold and punch of the press machine is raised to about 40 to 150 ° C. in advance. The pressure of the press machine is preferably changed depending on the properties of the ceramic green sheet and the like, but the pressure is usually about 2 to 15 MPa for pressure bonding.

Thereafter, the obtained ceramic laminated body is subjected to a cutting process to form a disc-shaped body.

The green ceramic sheet may be formed by press molding other than tape molding.

Next, after performing a degreasing process for removing the organic binder contained in the ceramic laminate, a firing process is performed.
Depending on the case, it is possible to perform the degreasing and firing steps at the same time.

The degreasing process includes oxygen degreasing in an oxidizing atmosphere, vacuum degreasing in vacuum, and nitrogen degreasing in nitrogen. Which degreasing step should be used may be appropriately determined depending on the oxidation temperature of the ceramics forming the ceramic laminate and the metal of the conductor paste.

For example, when aluminum nitride is used as the ceramic and tungsten is used as the metal of the conductor paste, the oxygen degreasing at high temperature cannot be performed because the oxidation temperature of tungsten is around 400 ° C. Therefore, 5
After degreasing in a nitrogen atmosphere at a temperature of about 00 ° C. to remove many organic substances and carbonization, degreasing is performed in an oxygen atmosphere at about 350 ° C. to remove the carbides and the binder.

Thereafter, the degreased ceramic laminate is fired to produce a plate-shaped ceramic body in which the film electrode layer for electrostatic attraction and the film reference layer are embedded at the same depth.

When firing, it is preferable to sinter in a firing pot in order to uniformly fire the ceramic laminate. In this case, a base plate having a small flatness is placed in a baking pot, and a spreading powder or a torch for smoothing the firing shrinkage is laid on the base plate, and the ceramic laminate is placed thereon. At that time, in order to reduce the firing warpage, the ceramic laminate is placed with the surface serving as the placement surface facing down. In addition, when it is necessary to adjust the atmosphere at the time of firing, powder for atmosphere adjustment may be placed around, or buried and baked.

The ceramic laminated body set as described above is sintered to be sintered. The atmosphere and temperature of firing are different depending on the material of the ceramics, but in the case of aluminum nitride, the nitrogen pressure is 0.1-5.
It can be sintered by firing at about 0 MPa.

Thus, as shown in FIG. 9A, the film electrode layer 33 having the same pattern shape as that of FIG.
The ceramic body 32 including the and the film-shaped reference layer 34 is manufactured.

Next, the upper and lower surfaces of the obtained ceramic body 32 are ground using a surface grinder, a rotary grinder or the like to form a mounting surface 38 on which a wafer is placed, and side surfaces of the ceramic body 32. Then, a cylindrical grinder, a universal grinder, a rotary grinder, etc. are used to perform a grinding process to obtain a predetermined outer shape, and a lower surface of the ceramic body 32 is further machined with a lift pin insertion hole or a gas introduction hole. The through holes 35, 36 or the like, or the pilot holes 37a, 37b for the power supply terminal are drilled. To perform the grinding process or the drilling process, the film-like reference layer 34 exposed from the side surface of the ceramic body 32 is used. Based on this, the center and direction (X axis and Y axis) of the film electrode layer 33 are determined, and based on this data, thickness processing, outer shape processing, It opened for machining.

Specifically, first, in order to eliminate warpage during firing, the upper and lower surfaces of the ceramic body 32 are flattened using a rotary grinder.

Then, as shown in FIG. 9B, based on the film-shaped reference layer 34 exposed on the side surface of the ceramic body 2, X
A virtual line of the axis and the Y axis is drawn to determine the center and the direction.

Next, as shown in FIG. 9C, the X
A through hole 35, 36 such as a lift pin insertion hole and a gas introduction hole and a pilot hole 37 for a power supply terminal hole are drilled by a machining center based on imaginary lines of the axis and the Y axis, and as shown in FIG. As shown, the outer shape of the ceramic body 32 is processed using a cylindrical grinder based on the center.

Then, the membranous electrode layer 3 measured in advance was used.
Based on the distance from 3 to the surface of the ceramic body 32, thickness processing is performed so that the depth from the mounting surface 38 to the film electrode layer 33 for electrostatic attraction becomes uniform, and as shown in FIG. A ceramic electrostatic chuck can be manufactured.

[0082]

As described above, according to the present invention, a plurality of ceramic green sheets are laminated, and a membrane electrode layer is provided between at least two ceramic green sheets, and the periphery of the membrane electrode layer. The ceramic laminated body having the film-shaped reference layers arranged in each is fired and integrated to produce a ceramic body in which the film-shaped electrode layer and the film-shaped reference layer are embedded, or a plurality of ceramic green sheets are laminated, The film-like electrode layer and the film-like reference layer are formed by firing and integrating a ceramic laminate having a film-like electrode layer between at least two ceramic green sheets and a film-like reference layer between the other two ceramic green sheets. Or a ceramic laminate having a film-like electrode layer between two ceramic green sheets, which is formed by laminating a plurality of ceramic green sheets. By laying a film-like reference layer on the surface of the laminate and then firing and integrating the film-like electrode layer and the film-like reference layer, a ceramic body having the film-like reference layer is produced. Since a film-like reference layer for confirming at least one of the direction, center, and depth of the film-like electrode layer is provided inside or on the surface of the ceramic body, the position with respect to the film-like electrode layer is provided. If the relationship is clarified and the outer shape is processed with reference to the membranous reference layer, the required dimensional accuracy can be achieved, and if the perforation processing is performed, the membranous electrode layer can be cut at a predetermined position without cutting. Holes can be formed in the hole, and if the thickness is further processed, the distance from the upper and lower surfaces of the ceramic body to the membrane electrode layer can be made uniform.

Therefore, if a ceramic electrostatic chuck is manufactured using the ceramic member with a built-in electrode of the present invention, a stable chucking force can be obtained, and an electrostatic chuck free from dielectric breakdown and insulation failure can be manufactured with high yield. Moreover, when the ceramic heater is manufactured, the object to be heated can be heated uniformly, and the ceramic heater without dielectric breakdown or insulation failure can be manufactured with high yield.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an example of a ceramic member with a built-in electrode according to the present invention.

FIG. 2 is a sectional view taken along line XX of FIG.

FIG. 3 is a cross-sectional view showing another example of the electrode-embedded ceramic member of the present invention.

FIG. 4 is a sectional view taken along line YY of FIG.

FIG. 5 is a sectional view showing still another example of the ceramic member with a built-in electrode of the present invention.

6 is a plan view showing the pattern shape of the film-shaped reference layer of FIG.

7A to 7C are plan views showing various pattern shapes of the film-shaped reference layer.

FIG. 8 is a cross-sectional view showing a ceramic electrostatic chuck formed from the electrode-embedded ceramic member of the present invention.

9A to 9D are views for explaining a method of manufacturing the ceramic electrostatic chuck shown in FIG.

FIG. 10 is a cross-sectional view showing an example of a conventional ceramic heater.

[Explanation of symbols]

1,11,21: Ceramic member with built-in electrode 2,12,22: Ceramic body 3, 13, 23: Membrane electrode layer 4, 14, 24: Membrane reference layer 5, 6, 15, 16, 25, 26: Through holes 7, 17, 27: Pilot hole

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H05B 3/74 H01L 21/30 567 503C F term (reference) 3K034 AA16 AA19 AA34 AA37 BA06 BB06 BB14 BC04 BC17 BC22 CA02 CA22 HA10 JA01 JA10 3K092 PP09 QA05 QB03 QB32 QB75 QC02 QC07 QC21 RF03 RF11 RF27 TT30 VV03 VV22 5F031 HA02 HA03 HA16 HA37 5F046 CC08 KA04

Claims (5)

[Claims] 1. In a ceramic member with a built-in electrode in which a film electrode layer is embedded in a ceramic body, at least one of the direction, center, and depth of the film electrode layer is confirmed in or on the surface of the ceramic body. A ceramic member with a built-in electrode, comprising: 2. The ceramic member with a built-in electrode according to claim 1, wherein the film-like electrode layer is an electrostatic attraction electrode or a heater electrode. 3. A ceramic formed by laminating a plurality of ceramic green sheets, each having a film electrode layer between at least two ceramic green sheets, and a film reference layer arranged around the film electrode layers. The laminated body is fired and integrated to produce a ceramic body in which the film electrode layer and the film reference layer are embedded,
Next, with reference to the film-like reference layer in the ceramic body as a reference, the ceramic body is subjected to at least one of outer shape processing, thickness processing, and hole processing, and a method for manufacturing a ceramic member with a built-in electrode. . 4. A ceramic comprising a plurality of ceramic green sheets laminated, and a film electrode layer between at least two ceramic green sheets and a film reference layer between the other two ceramic green sheets. The laminated body is fired and integrated to produce a ceramic body in which the film electrode layer and the film reference layer are embedded, and then, using the film reference layer in the ceramic body as a reference, the ceramic body is subjected to outer shape processing, thickness processing, A method for manufacturing a ceramic member with a built-in electrode, which is characterized in that at least one of drilling is performed. 5. A ceramic laminate comprising a plurality of ceramic green sheets laminated to each other and having a film-like electrode layer between at least two ceramic green sheets, and a film-like reference layer on the surface of the ceramic laminate. Is laid and integrated by firing to produce a ceramic body having the film-like electrode layer and the film-like reference layer, and then the film-like reference layer on the surface of the ceramic body is taken as a reference, and the ceramic body is subjected to outer shape processing, thickness processing, A method for manufacturing a ceramic member with a built-in electrode, which is characterized in that at least one of drilling is performed.