JP2003045025A - Magnetic transfer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic transfer device for carrying out accurate magnetic transfer in order to manufacture a high-quality disk where the size of a very small projection formed during magnetic transfer is reduced so as not to cause no problems, and no errors occur during recording/reproducing. SOLUTION: By executing the step of magnetic transfer for a magnetic disk after the operation of bonding and pressure-feeding between a dummy disk and a magnetic transfer master, the abnormal projection on the surface of the magnetic transfer master is smoothed, and a foreign object is removed.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard disk drive
Used for storage and floppy (registered trademark) disk drives
Magnetic transfer that performs magnetic transfer during the manufacturing process of a magnetic disk
Equipment related. 2. Description of the Related Art At present, a typical magnetic disk drive is used.
Hard disk drives already have an areal recording density of 1 Gb
A device exceeding it / sqin has been commercialized, and a few years later
10Gbit / sqin is so fast that practical application is discussed
Intense technological progress is recognized. [0003] The technical issues that make such a high recording density possible
Behind the linear recording density,
A magnetic resistor capable of reproducing a signal having a track width of several μm with good SN.
This is largely due to the anti-element type head. [0004] In addition, due to the high recording density, the
The flying height of floating magnetic sliders has also been required to be reduced.
During flying, the disk / slider
The likelihood of contact occurring is increasing. This situation
In the following, more smoothness is required for recording media
I have. Here, the head scans a narrow track accurately.
Tracking servo technology is important for
Plays a role. Such tracking servo technique
In today's hard disk drives that use
Servo for tracking at regular angular intervals during one round of
Signals, address information signals, reproduced clock signals, etc.
Have been. The drive device moves from the head at regular intervals.
The head position is detected and corrected based on these reproduced signals.
Correct and allow the head to scan the track accurately
I'm working. The above-mentioned servo signal and address information signal
Signal, playback clock signal, etc.
Since it serves as a reference signal for scanning,
High position for embedding (hereinafter referred to as formatting)
Decision accuracy is required. Current hard disk drive
Incorporates a high-precision position detection device using optical interference
Recording using a dedicated servo device (servo writer)
The head is positioned and formatting is performed.
You. [0007] However, the servo writer
The following issues exist for formatting. First, while positioning the head with high precision,
To write a signal over many tracks
take time. Many servo writers to increase productivity
Must be running at the same time. Second, introduction and maintenance of many servo writers
Management costs a lot of money. These challenges are
As the track density increases and the number of tracks increases, the
You. Therefore, formatting is not a servo writer.
Called a master in which all servo information is written in advance
Disks to be formatted and magnetic disks to be formatted
Applying transfer energy from outside
More master information is transferred to the magnetic disk at once
Proposed. [0010] As one example, Japanese Patent Application Laid-Open No. H10-45544
The magnetic transfer device disclosed in Japanese Unexamined Patent Publication (Kokai) No. H10-26095 is known. [0011] The publication discloses that information signals are provided on the surface of a substrate.
Magnetic part made of ferromagnetic material
The magnetic transfer master, and the surface of this magnetic transfer master
The ferromagnetic thin film or ferromagnetic powder coating layer
Contact the surface of a magnetic or disk-shaped magnetic recording medium.
By applying a predetermined magnetic field to the master for magnetic transfer.
Pattern of magnetized pattern corresponding to the information signal formed in
There is disclosed a method of recording a pattern on a magnetic recording medium. [0012] However, the disk rotates.
The clearance between the head and the disk surface when rotating
Usually, it is about 30 nm.
It is necessary to keep it to about 20 nm at the maximum. Magnetic recording
If there are more protrusions on the medium, data recording / reproduction
Sometimes, the magnetic head comes into contact with the magnetic recording medium.
In such a case, the magnetic head and magnetic
The clearance of the disc is large and the signal recording / reproducing performance is low.
And the magnetic head makes physical contact with the magnetic disk.
Cause a reduction in the life of the magnetic head.
Was. That is, Japanese Patent Application Laid-Open No.
The magnetic transfer device disclosed in
Although it is possible in an instant, the master for magnetic transfer and the magnetic disk
The head contacts the entire surface,
It is strict that the clearance between disks can withstand actual use.
Heavy surface management is required. In recent years, magnetic disks and magneto-optical disks
Disk-shaped recording media such as disks and optical disks
Although high performance such as molding and high capacity is progressing,
As described above, the demand for high-density recording media is increasing.
You. To meet such demands, high precision and high reliability are required.
A reliable disk-shaped recording medium is required, and flatness
It has excellent smoothness and fine dust when recording information.
There is an urgent need to manufacture disc-shaped recording media without adhesion
Has become. On the other hand, the conventional magnetic transfer apparatus described above
However, no matter how strict the management,
It is impossible to avoid, master and formatting
At the moment when the magnetic disk to be
Foreign matter on the surface of the master or magnetic disk
Abnormal projections had occurred. Usually, the material of the master is silicon
The magnetic disk is made of a material with a lower hardness,
For example, in the case of aluminum,
The convex part is transferred as a depression on the magnetic disk side,
Conversely, if the magnetic disk is made of a hard material, such as glass,
In such a case, foreign matter on the magnetic disk
There was a defect on the star side. If this is the case,
All defects are reflected on the magnetic disk to be transferred,
It is difficult to manufacture high quality magnetic disks efficiently and stably.
It was difficult. Therefore, the present invention provides a method for controlling the size of the minute projection.
Is reduced to a level that does not cause any problems, and errors occur during recording and playback.
To produce high quality discs
With the aim of realizing a magnetic transfer device that performs
I do. Means for Solving the Problems The above conventional problems are solved.
In order for the magnetic transfer apparatus of the present invention to have a magnetic film formed thereon,
A magnetic transfer master to a disk with a ferromagnetic layer
Magnetic transfer master using an external magnetic field
Method for magnetically transferring a magnetic film pattern on a disk surface
First, press the master using a dummy disk.
When mounting, absorb gas between the master and the disc.
After repeatedly drawing and pumping, attach a regular disc and
It is a thing to transfer, and by taking such a method,
The master surface during magnetic transfer is smooth without burrs
About disks that can always be kept and magnetically transferred
Has high quality magnetics with almost no problematic microprojections
Discs can be manufactured. Further, the magnetic transfer device of the present invention is a magnetic transfer device.
It has defect detection means for detecting defects on the disk surface.
More than a predetermined number of defects on the magnetic disk surface by the defect detection means
Is detected, the magnetic transfer master is
After repeating the operation of contacting / separating with the disc a predetermined number of times,
Replace the dummy disk with a magnetic disk before magnetic transfer,
By bringing it into close contact with the magnetic transfer master and performing magnetic transfer,
It is necessary to periodically remove dirt and foreign matter from the magnetic transfer master.
Maintenance can be performed.
Magnetic transfer capable of magnetically transferring high quality magnetic disks
Can provide a method. Further, the magnetic transfer device of the present invention is a magnetic transfer device.
Area for contacting / separating from the dummy disk on the copying master
The area is not read from the magnetic transfer master during magnetic transfer.
The magnetic transfer area to the disk
As a result, the servo signal is also applied to the outer peripheral edge of the magnetic disk.
Producing high quality magnetic disks that are accurately transferred
Can be done. Further, the magnetic transfer apparatus of the present invention can
A predetermined number of operations for bringing the star into and out of contact with the magnetic disk
After repeating, replace the dummy master with a magnetic transfer master
Then, magnetic transfer is performed in close contact with the magnetic disk.
Foreign matter on the magnetic disk can be removed.
While ensuring a smooth and smooth surface and high reliability.
A magnetic disk can be manufactured. Embodiments of the present invention will be described below.
And will be described with reference to the drawings. (Embodiment 1) FIG. 1 to FIG.
Manufacture of magnetic recording medium and magnetic recording medium in embodiment
Is described. FIG. 1 is a flow chart showing the steps of the present embodiment.
It is a chart. In FIG. 1, first, a legitimate disk
For example, a ferromagnetic thin film made of Co
As a magnetic layer, a known method such as
It is formed on the disk surface. On the other hand, a dummy disk is mounted on the device and
The suction / pressure feed is repeated after the
After replacing the disc, replace it with a regular disc and perform magnetic transfer.
U. Next, the magnetic transfer step of FIG. 1 will be described with reference to FIG.
This will be described in detail with reference to FIGS. FIG. 2 shows a magnetic transfer apparatus according to the present embodiment.
FIG. 3 is a cross-sectional view of the magnetic transfer master and the magnetic disk.
This shows the state when the camera is in the middle. Figure 3 shows a magnetic transfer master
2 shows a state when the magnetic disk is in close contact with the magnetic disk. FIG.
Indicates contact between the magnetic transfer master 2 and the magnetic disk 1
FIG. 4 is a view showing a surface 3, and a groove 4 is formed in the magnetic transfer master 2.
Spread radially from the heart. In the present embodiment, the groove
The depth is set to about 5 μm. In FIG. 2, reference numeral 1 denotes a dummy disk.
After the suction / pumping process, the
You. The material used was aluminum. 2 is a magnetic transfer mask
The material used was silicon. 3 is a magnetic transfer mass
The contact surface with the dummy disk 1 on the
A groove radially extending from the center of the magnetic transfer master 2
4 are provided. 5 is fixed to the center of the magnetic transfer master 2
6 is for supporting the dummy disk 1
And a ventilation hole 7 for flowing air to the center.
It is provided. 8 is a magnetic transfer master 2 and a dummy disk
A passage for discharging and pumping the gas between 1 and 9;
Gas outlet for discharging gas from
A suction pump connected to the mouth, 11 controls the discharge of gas.
Exhaust valve. Also, 12 pumps gas into the passage 8.
Air supply pump, 13 is an air supply valve for controlling gas supply
It is. Here, 0.01 μm is supplied to the air supply pump 12.
m air filter is provided.
It is configured such that the upper foreign matter is not sent to the passage 8 by pressure.
You. 14 is a holding device for holding the magnetic transfer master 2.
An arm is fixed to the magnetic transfer master 2. As a fixing method, there is also a method such as bonding.
Is a through-hole provided in the holding arm 14 as shown in FIG.
The magnetic transfer master 2 by sucking gas from the
It may be adsorbed. The holding arm 14 is further attached to the guide member 16.
Vertically slidable position via upper boss
Have been However, the method of positioning the magnetic transfer master 2
The law is not limited to the one with the holding arm 14,
For example, the outer periphery of the boss 5 is placed on a magnetic disk (here, a dummy).
It is also performed by fitting into the inner peripheral hole of the disc 1).
I can do it. In such a case, the shape of the boss 5 is
The master 2 for magnetic transfer and the dummy disk
The gas in the space 1 is formed by a notch 5 provided on the outer periphery of the boss 5.
Discharged through 1 and pumped. Next, the suction / pressure feeding process will be described with reference to FIGS.
The process will be described in detail. First, using FIG.
The process will be described. Close the exhaust valve 11 and set the air supply valve 13
By operating the air supply pump 12 in the open state,
Then, gas flows into the passage 8. Then, the ventilation holes 7 are
As shown by arrow A, air is pumped upward. This
As a result, the air pumped to the ventilation holes 7 causes the boss 5
Push it up, and as shown by arrow B, the air
It is pumped into the groove 4. The air pumped into the groove 4 passes through the groove 4
Radially from the center of the magnetic transfer master 2 to the outer periphery
Spread. Then, the magnetic transfer master 2 is further moved from the groove 4.
Through the gap between the disk and the dummy disk 1 to the atmosphere.
The flow of air causes the magnetic transfer master 2 and the dummy
Fine foreign matter adhering to the surface of the disk 1
Will be discharged to the outside. The lapse of time at this time and the master 2 for magnetic transfer
(Hereinafter, referred to as space A)
FIG. 6 shows the relationship with the atmospheric pressure of FIG.
From around 3 seconds, the air pressure in space A instantly changes from 30 kpa.
Rise to about 130 kpa for about 1 second.
The period during which the pressure is maintained corresponds to the magnetic transfer mass shown above.
This corresponds to a state where the magnetic disk 2 and the magnetic disk 1 are separated from each other. At this time, the dummy disk 1 and the magnetic transfer
It is better to set the gap between Master 2 as small as possible
Is preferred. In this embodiment, it is set to about 0.5 mm.
I have. This allows the dummy disk 1 and the magnetic transfer
Gas flow between the master 2 and the
To ensure that minute foreign substances present between them are discharged to the outside
Can be. In this embodiment, the dummy disk 1 is
The magnetic transfer master 2 is brought into close contact with the magnetic transfer master.
2 at the time when it rises 0.5 mm integrally with the holding arm 14
The upper surface of the holding arm 14 contacts the lower surface of the guide member 16
By doing so, the dummy disk 1 and the magnetic transfer
The distance between nodes 2 is controlled. Next, the process of contact by suction will be described with reference to FIG.
This will be described with reference to FIG. The air supply pump 12 is stopped, and the air supply valve 13 is turned off.
close. Then, the holding arm to which the dummy disk 1 is fixed
14 moves downward by its own weight, and the boss 5 moves to the dummy disk.
Placed on the dummy disk 1 in a state fitted with the inner peripheral hole of the disk 1
Is done. Thereafter, the exhaust valve 11 is opened, and the exhaust pump 10 is
Activate. Then, as shown by arrow C in FIG.
Since the gas in the hole 7 is discharged downward, the inside of the groove 4, that is,
The gas in the space A is also between the inner peripheral hole of the dummy disk 1 and the boss 5.
It will be discharged through the gap. Here, as shown in FIG.
The shape does not extend to the outermost periphery of the transfer master 2
Therefore, the outermost donut-shaped portion is
It is in close contact with the dummy disk 1 over the entire circumference.
And the space A is closed.
The force will be lower than atmospheric pressure. Therefore, dummy disk 1
Is pressed against the magnetic transfer master 2 by the atmospheric pressure 15
The Rukoto. As a result, the data exists on the dummy disk 1.
Foreign matter between the dummy disk 1 and the magnetic transfer master 2
It will be sandwiched. Here, the dummy disk 1 and the magnetic disk
By comparing the hardness with the transfer master 2, a dummy disk
Is lower in hardness, so that foreign matter between
A dummy disk can be used without damaging the surface of the copying master 2.
Indentation or defect
You. Also, a slight abnormality existing on the magnetic transfer master 2
The protrusion is brought into close contact with the dummy disk 1.
It will be flattened. FIG. 6 shows a section where the pressure in the space A is about 30 kpa.
The interval corresponds to the above-mentioned close contact state. However, the shape of the groove 4 is not necessarily limited to the above shape.
However, the groove 4 extends to the outer periphery of the magnetic transfer master 2.
In the case of the shape missing in the above, the magnetic transfer master 2 and
The outer circumference of the magnetic disk (dummy disk 1) can be sealed
Such members may be provided. Next, the separating means shown in FIG. 2 is implemented again.
You. That is, the exhaust valve 11 is closed, the air supply valve 13 is opened,
The air supply pump 12 is operated. Then, arrows A and B show
The gas is pumped in such a way that the magnetic transfer master 2
It moves integrally with the holding arm 14 by the force of pumping,
When the upper surface of the holding arm 14 contacts the guide member 16
Stop. At this time, as shown by the arrow B, the gas is
Radially from the center of the magnetic transfer master 2 to the outer periphery
Is kept in a state of being pumped. By doing so,
Foreign matter that was present on the surface of
To be discharged to the outside together with the gas pumped from the pump 12
It becomes. After repeating the above suction and pressure feeding a predetermined number of times,
Replace the dummy disk 1 with a magnetic disk.
The above-mentioned suction process is performed on the magnetic disk,
With the magnetic transfer master 2 in close contact with the magnetic transfer master 2, as shown in FIG.
Is subjected to a step of applying a magnetic field. That is, as shown in FIG.
Move in the direction of arrow D and approach the magnetic transfer master 2.
And when the distance is about 1 mm,
Stop the movement, then move in the circumferential direction of the magnetic disk,
Rotate the magnet 17 one or more times in the direction of arrow E.
Thus, a magnetic field required for transfer is applied. Here, the pattern shape formed on the master is
Transferring the corresponding information signal to a magnetic disk
This will be described in more detail with reference to FIGS. First, the magnet 15 is attached to the magnetic disk 1.
With the magnetic disk 1 close to the central axis,
7 by rotating the magnetic disk 1 in parallel with the magnetic disk 1.
The magnetic disk 1 is previously magnetized in one direction as indicated by the arrow.
(Initial magnetization). Next, as described above, the magnetic disk 1
With Master 2 positioned and superimposed, Master 2
And the magnetic disk 1 are evenly brought into close contact with each other.
As shown by mark E, a magnetic field is applied in a direction opposite to the initial magnetization.
As a result, the magnetic part 16 of the master 2 is magnetized,
Area of the magnetic disk 1 superimposed on the master 2
In FIG. 1b, as shown in FIG.
The corresponding information signal is recorded. The arrow shown in FIG.
Is the magnetization pattern transferred and recorded on the magnetic disk 1 at this time.
It shows the direction of the magnetic field of the magnetic field. FIG. 9 shows the state during the magnetization process.
As shown in FIG. 9, the magnetic transfer master 2 is
In a state where the magnetic transfer master 2 is in close contact with the
By applying a magnetic field to magnetize the magnetic part 16
To record an information signal on the ferromagnetic layer 1c of the magnetic disk 1.
Can be In other words, the non-magnetic base 2b
From ferromagnetic thin film with array pattern shape corresponding to information signal
Using the master 2 formed by forming the magnetic portion 11
As a result, as a magnetization pattern corresponding to the information signal
The data can be magnetically transferred and recorded on the magnetic disk 1. The pattern of the magnetic transfer master 2 is
As a method for transferring and recording to the disc 1,
The magnetic transfer master 2 was brought into contact with the magnetic disk 1
In addition to applying an external magnetic field in the
Magnetizing the magnetic part 16 of the
In this state, the magnetic transfer master 2 is brought into close contact with the magnetic disk 1.
Record information signals even when contacting
Can be. Here, the surface condition of the completed magnetic disk
10 and 11 are shown in FIG. 10, and FIG.
Transfer method, that is, the above-mentioned suction without using a dummy disk
/ Magnetic disk surface transferred without pressure feeding operation
The state of is shown. As can be seen from FIG. 11, the depth is on the surface of the magnetic disk.
24 defects of 40nm or more exist
It can be seen that a large amount is present particularly in the outer peripheral portion. On the other hand, FIG.
After performing the above suction / pumping operation 100,000 times using
Magnetic disk for which magnetic transfer has been performed
FIG. 4 is a diagram showing a state of a magnetic disk surface.
The defects (defects) of 40nm or more on the surface
It turns out that there are two pieces. From these figures, using a dummy disk
By repeating the suction / pressure feeding operation, it can be used for magnetic transfer.
The surface of the master 2 is smoothed, and conventionally the master for magnetic transfer
2 on the magnetic disk due to abnormal protrusions on
It can be seen that the fall is drastically reduced. Here, the relationship between FIG. 10 and FIG.
FIG. 12 is a graph, and FIG.
As the number of feeding operations increases, the number of defects decreases.
You can see that The initial state of the surface of the magnetic transfer master 2
State and the state after repeating the above suction / pressure feeding.
FIG. As shown in FIG. 3A, the magnetic transfer master 2 is
Burrs formed at the edge of the formed track pattern
It can be seen that it has become smooth by suction / pressure feeding. FIG. 3B shows that the initial
Protrusions are smoothed by suction / pumping to maximize the amount of protrusion
It can be seen that it has almost disappeared except for the tip of the projection that was
You. As described above, according to the present embodiment, the magnetic
Before the transfer process, use a dummy disk to
By performing the operation, the data on the surface of the magnetic transfer master 2 is
To remove existing foreign matter and flatten abnormal protrusions
High quality magnetic disk with extremely smooth surface
Can be manufactured, and accurate magnetic transfer can be performed.
Can be. The dummy disk has a surface stain
If the number of foreign substances on the
Shall be replaced with a disk. Further, as shown in this embodiment,
ー The hardness of the disk surface is higher than the hardness of the magnetic disk surface.
A smaller one is preferred. This is the dummy disk table
The surface hardness is higher than the magnetic disk surface hardness
And a dummy disk higher than the hardness of the magnetic disk surface
Foreign matter whose surface hardness is lower than that of the magnetic transfer master 2
If it exists between disk 1, dummy disk table
Since the hardness of the surface is higher than the hardness of the foreign matter,
No dents on the surface, ie on the dummy disk side
Foreign matter will not adhere. Therefore, foreign matter is magnetically transferred
Remains attached to the master 2
When the master 1 and the magnetic transfer master 2 come into close contact with each other,
Since the hardness is higher than the hardness of the surface of the magnetic disk 1,
A depression is generated on the surface of the disk 1, which causes a defect. On the contrary, as shown in this embodiment, the dummy disk
Make the surface hardness of the disk smaller than the hardness of the magnetic disk surface.
The magnetic disk 1 and the magnetic transfer master 2
When the magnetic disk
Can reliably prevent indentation
You. In this embodiment, the dummy disk
Was made of aluminum, but is not limited to this
Instead, for example, apply a plating layer on the surface of aluminum
You can use the disc as a dummy disc.
No. Co-Re-P, Co-Ni-
P, Co-Ni-Re-P
Is preferred. Has magnetic properties on the surface of the dummy disk
The following effects can be obtained by applying a plated layer
Is obtained. That is, the master disk 2 for magnetic transfer
If abnormal protrusions exist on the magnetic film on the surface
In the case of repeated operation of close contact / separation with dummy disk 1
Therefore, the magnetic film will be peeled off.
The surface of 1 is coated with a plating layer having magnetic properties
Therefore, make sure that the magnetic film adheres to the dummy disk
And In this embodiment, the burnishing
Not implemented, but for example, tapes, heads, buff labs
After performing the burnishing process using abrasives etc.,
Abrasive powder or grinding remaining on the magnetic disk surface
Powder is removed by applying the suction / pumping process described above.
You can do it. In this case, at the time of pressure feeding in FIG.
While the pressure during suction is increased, for example, 6
By setting it to about 0 kpa, the removal effect is further enhanced
I can do it. Here, the magnetic transfer master 2 shown in FIG.
Will be described in detail. FIG. 14 is a plan view of an example of the magnetic transfer master 2.
Is schematically shown, and as shown in FIG.
Main surface of the magnetic master 2, that is, the ferromagnetic property of the magnetic disk 1.
On the surface in contact with the thin film surface, the signal area
2a is formed. 4 and 14 are schematically shown.
In practice, the signal region 2a in FIG.
This is configured on the contact surface 3 in FIG. FIG. 14 is an enlarged view of a portion A surrounded by a dotted line.
FIG. 15 schematically shows this. As shown in FIG.
2a is a digital information signal recorded on a magnetic recording medium.
Signal, for example, at the position corresponding to the preformat recording,
From a ferromagnetic thin film with a pattern shape corresponding to the information signal.
The magnetic information forms a master information pattern.
You. In FIG. 15, the hatched portion is ferromagnetic.
It is a magnetic part composed of a thin film. As shown in FIG.
Master information patterns are clock signals, tracking
Each area for the servo signal for addressing, address information signal, etc.
They are sequentially arranged in the rack length direction. FIG.
The master information pattern shown in FIG.
According to the digital information signal recorded on the medium, the master
-The structure and arrangement of information patterns must be determined as appropriate.
You. For example, like a hard disk drive
First, the reference signal on the magnetic film of the hard disk
And track based on the reference signal
When performing preformat recording of servo signals for
Is a hard drive using the master information carrier according to the invention.
For pre-format recording on the magnetic film
Transfer and record only the reference signal
The hard disk into the drive housing,
Preformat recording of servo signals for
Using the magnetic head of the hard disk drive
May be. A partial cross section of the region shown in FIGS.
As shown in FIG. As shown in FIG. 16, the magnetic transfer master 2
For non-silicon substrates, glass substrates, plastic substrates, etc.
One main surface of the disk-shaped substrate 2b made of a magnetic material,
An information signal is applied to the surface on the side where the surface of the magnetic disk 1 contacts.
Recesses 2c in a plurality of fine array pattern shapes corresponding to
The ferromagnetic material, which is a magnetic part, is formed in the concave portion 2c of the base 2b.
It is formed by forming the thin film 16 in an embedded form.
ing. Here, the ferromagnetic thin film 16 is made of a hard magnetic film.
Irrespective of conductive material, semi-hard magnetic material or soft magnetic material
Types of magnetic materials can be used,
Anything that can transfer and record digital information signals
No. For example, Fe, Co, an Fe—Co alloy, or the like is used.
be able to. In addition, the magnetic recording where the master information is recorded
To generate a sufficient recording magnetic field regardless of the type of recording medium
For this purpose, the larger the saturation magnetic flux density of the magnetic material, the better. Special
High-coercivity magnetic
For flexible disks with thick disks and magnetic layers
Therefore, it is sufficient if the saturation magnetic flux density becomes 0.8 Tesla or less.
Recording may not be possible,
Is at least 0.8 Tesla, preferably at least 1.0 Tesla
A magnetic material having a saturation magnetic flux density is used. The thickness of the ferromagnetic thin film 16 depends on the bit length.
It depends on the saturation magnetization of the magnetic recording medium and the thickness of the magnetic layer.
For example, the bit length is about 1 μm, and the saturation magnetization of the magnetic recording medium is about 50.
0 emu / cc, the thickness of the magnetic layer of the magnetic recording medium is about 20
In the case of nm, it should be about 50 nm to 500 nm.
No. Here, in such a recording method,
To obtain good recording signal quality, use a magnetic transfer master.
Soft magnetic thin film or semi-rigid as ferromagnetic thin film provided
Based on the pattern of the magnetic thin film
During recording, it is desirable to excite this to uniformly magnetize it.
Prior to signal recording using a magnetic transfer master
To uniformly remove DC from magnetic recording media such as hard disks.
It is desirable to leave it. Next, such a master for magnetic transfer is manufactured.
The method will be described. That is, the magnetic field used in the recording method of the present invention
The transfer master forms a resist film on the surface of the Si substrate
Laser beam or photolithography
Resist by lithography technology using electron beam
After exposing, developing and patterning the film, dry etching
Etching by etching, etc.
Form a fine uneven shape, and then make a thin ferromagnetic
Sputtering method, vacuum evaporation method, ion plating
After a film is formed by a plating method, a CVD method, a plating method, or the like,
To remove the resist film by loose lift-off method
The ferromagnetic thin film is embedded in the recess and the information
Obtain a magnetic transfer master with a magnetic part corresponding to the signal
be able to. The surface of the magnetic transfer master has an uneven shape.
The method of forming is not limited to the method described above.
For example, a laser, electron beam or ion beam
To form fine irregularities directly, or by machining.
Thus, a fine uneven shape may be directly formed. (Embodiment 2) Next, referring to FIG.
Second Embodiment A magnetic transfer device according to a second embodiment of the present invention will be described.
I do. FIG. 17 is a chart showing the steps of this embodiment.
Is shown. Each step is the same as in the first embodiment,
The difference is that magnetic transfer after magnetic transfer of magnetic disk
Measure the surface roughness of the
It is a point to click. That is, in FIG. 17, the regular magnetic disk
After performing magnetic transfer on the master, it exists on the master for magnetic transfer.
Using a foreign object inspection device using a backscattered light detection method
And measure. If no foreign matter is observed here,
Attach a regular magnetic disk and continue magnetic transfer. However, as the magnetic transfer is repeated, the magnetic transfer
The number of foreign substances on the surface of the
If it becomes the above value, the problem of head crash as mentioned above
In the case of the present embodiment,
When three or more are installed, insert a dummy disk
Then, the suction / pressure feeding operation is repeated. This allows the table
Suction / pressure is applied to the magnetic transfer master 2 whose surface properties have deteriorated.
It is possible to improve the surface properties by performing the feeding process.
To produce a magnetic disk with a smooth surface
Rukoto can. That is, the present embodiment is different from the magnetic transfer process in the present embodiment.
Periodically maintain the surface properties of the magnetic transfer master 2
By performing nonce, magnetic data with a smooth surface
Discs can be produced continuously. Note that the foreign matter inspection of the magnetic transfer master 2 is described below.
This is not always necessary every time one magnetic disk is magnetically transferred.
It was not necessary to perform this process every time a predetermined number of magnetic transfers were performed.
Or magnetic transfer after several times
Data indicating that the number of foreign objects on the master has exceeded a predetermined value
Next storage, the number of magnetic transfer processes less than that number
Each time the magnetic transfer master surface roughness is measured
Is also good. Measurement of foreign matter inspection of the magnetic transfer master
Takes a certain amount of time, so it is always necessary to measure foreign matter inspection
Magnetic transfer of a predetermined number of magnetic disks without performing
A dummy disk each time the
Similar results can be obtained by performing maintenance. The inspection after magnetic transfer is performed by using a disk.
If the amount of foreign matter on the disc after magnetic transfer is
If present, a process of suction / pressure feeding to the magnetic transfer master 2
The same effect can be obtained by adopting the method of applying. The same applies to the dummy disk 1.
Attraction of the magnetic transfer master 2 and the dummy disk 1
/ Measure the surface of the dummy disk 1 during pumping
Therefore, it is possible to detect foreign matter on the magnetic transfer master 2.
Can be done. That is, the dummy disk 1 made of aluminum
Has a lower hardness than the magnetic transfer master 2 made of silicon.
Foreign matter exists between the master and dummy disks for magnetic transfer
If so, the foreign matter will be pushed to the dummy disk 1 side during suction.
As a result, a depression occurs on the surface of the dummy disk 1
Will be done. Therefore, every time the suction / pumping is performed a predetermined number of times, the dust
-Detect fine dents on the surface of the disc 1
When the detection is stopped, the dummy disk 1 is
If you replace the disc with a magnetic disc and perform magnetic transfer,
A magnetic transfer master with a smooth surface condition,
Discs can be manufactured. Here, foreign substances on the surface of the dummy disk are
If attention is paid to the adsorptivity, it is desirable that the adsorptivity be high. That is, if the adsorptivity is low, the magnetic transfer
Even if foreign matter exists between the
ー Because it does not adhere to the disk surface, it is
Adhesion and the surface of the dummy disk are free of foreign matter.
Because of the clear state, foreign matter is not
When judging the presence or absence, the possibility of making the wrong judgment
There is. On the other hand, if the attraction is high, the magnetic transfer master
Foreign matter between the dummy disk and the dummy disk adheres to the dummy disk side.
Foreign matter on the magnetic transfer master can be efficiently removed.
And the presence of foreign matter even from the state of the dummy disk surface
It is possible to accurately judge nothing. From the above, as a dummy disk
Has a lower hardness than the magnetic transfer master,
It is preferable that the property of adsorbing a substance is high. In other words, the lubricant
Is preferably not applied. Here, a lubricant was applied as a dummy disk.
Cloth is used, and when no lubricant is applied.
If you use a new one on the magnetic transfer master,
FIG. 18 shows the relationship between the number of foreign matters and the number of defects, and the suction / pumping.
It is. In FIG. 18, the circles indicate the lubricant on the dummy disk.
A sample not coated (hereinafter, sample D) is shown,
Dots are dummy disks (hereinafter referred to as “lubricant”)
Below, sample E) is shown. As can be seen from FIG. 18, Sample D and Sample E
, The number of foreign particles and defects on the magnetic transfer master is
Initially identical, but for sample D
The star disk and dummy disk are repeatedly contacted and separated several times.
By returning the data on the master disk,
Tickle can be removed and almost zero
When sample E is used, close contact and separation are repeated 100 times
However, it can be seen that the number of foreign matters and defects has hardly decreased
You. FIG. 19 shows the magnetic data after the magnetic transfer.
After recording a signal on a disk, the signal
Figure 2 schematically shows the envelope of the signal. FIG. 19A shows a dummy coated with a lubricant.
Suction / pressure transfer with magnetic transfer master using disk
After repeating 000 times, magnetic transfer from the magnetic transfer master
Envelope of magnetic disk (sample G), same figure
(B) is a magnetic disk using a dummy disk without lubricant.
After repeating the suction / pressure feeding with the copying master 1000 times,
The end of the magnetic disk magnetically transferred from the magnetic transfer master
2 shows a bellow (sample H). Looking at sample G, at the center of the envelope
Whereas the signal output is reduced,
In the sample H, such a reduced portion of the signal is not recognized. This is for the sample G with respect to the magnetic disk.
Even if no defects are found on the surface, it can be used as a master for magnetic transfer.
Because foreign matter remains, the magnetic transfer master
Spacing loss occurs during transfer and servo signal is normal
It is considered that it is not recorded in. On the other hand, for sample H, the magnetic
Use a dummy disk without lubricant against the copying master.
Because the pulling / pressing process has been performed, the magnetic transfer master
Foreign matter is completely removed, and magnetic transfer to the magnetic disk
No spacing loss due to normal operation
it is conceivable that. (Embodiment 3) Next, FIGS.
The magnetic transfer device according to the third embodiment of the present invention
Will be described. This embodiment is different from the first and second embodiments.
Is the suction / pressure between the master for magnetic transfer and the dummy disk.
The contact area on the magnetic transfer master during transfer is
Completely includes the magnetic transfer area when performing magnetic transfer on disks
It is a point that is. FIG. 20 shows the magnetic transfer master 2 and the dummy data.
FIG. 4 is a diagram schematically showing a relationship between the disk 1 and suction / pressure feeding.
is there. In FIG. 3A, the magnetic transfer master 2 and the dummy
-Foreign matter in the area A is removed by suction / pressure feeding with the disc 1.
Removed. Next, the dummy disk 1 is inserted into a regular magnetic disk.
If you perform magnetic transfer after replacing the disk,
If Disk 1 and the regular magnetic disk are the same size,
As shown in FIG.
When the edge of the magnetic disk contacts foreign matter
There is. In such a case, the
And the degree of adhesion between the magnetic disk and the magnetic transfer master 2 is reduced.
As a result, there is a spacing loss, which is transferred to the magnetic disk.
The output of the servo signal decreases. As a result, a reading error occurs,
The rotation of the disk will be disturbed. Therefore, in the present embodiment, the dummy
Disk 1 has a size larger than that of a regular magnetic disk.
By using a large one, the area A in FIG.
Widen the mounting position of the magnetic disk and dummy disk 1
Even if the misalignment occurs, the normal magnetic
Air transfer can be performed, resulting in a decrease in servo signal output.
Can produce high quality magnetic disks.
You. Normally, the dummy disk 1
Use a product that is in the middle of a regular magnetic disk manufacturing process.
Often have the same size,
In order to attract / detach the dummy disk 1 and the magnetic transfer master 2
At the time of pressure feeding, the dummy disk 1 may be eccentric. Immediately
That is, as shown in FIG.
Position of the dummy disk 1 with respect to the master 2
If it is shifted sequentially like X, Y, Z ...
Suction / pumping should be performed on the area completely containing the disk.
Can be. (Embodiment 4) Next, FIGS.
The magnetic transfer device according to the fourth embodiment of the present invention
Will be described. The difference from Embodiments 1 to 3 is that
Glass is used as the disk material and it is made of silicon
Hardness higher than the magnetic transfer master 2 of
For the magnetic transfer master, not the disk,
The point is to exchange it with Me Master / Regular Master. Further, FIG. 22 shows the process of this embodiment.
The chart is shown. Each step is the same as in the first embodiment.
It is like. In FIG. 22, first, it was made of silicon.
Attach the dummy master to the device and form a regular
Attach the magnetic disk to the device. Next, a dummy master and a regular magnetic disk
In the same manner as in the first embodiment, the suction / pumping process is repeated.
After replacing the dummy master, replace the dummy master with a
Transfer is performed. At this time, the material of the magnetic disk is glass.
Therefore, when the dummy master and the magnetic disk are
Foreign matter trapped on the dummy master side
However, no defect occurs on the magnetic disk side. one
On the other hand, fine foreign substances on the magnetic disk surface
Removed by the star. FIGS. 23 and 24 show the present embodiment.
The results of observation of the magnetic disk surface are shown. FIG.
Surface condition of magnetic disk in initial state before pumping
The figure shows that there are six defects with a depth of 30 nm or more.
And there are countless smaller defects on the disc.
You can see that FIG. 23 shows one suction /
After performing the pressure feeding, the magnetic transfer
This figure shows the surface state of the air disk, and shows that the depth is 30 nm.
The above defects were not found, and there were almost no smaller defects.
It can be seen that they have extremely smooth surface properties. In this embodiment, the magnetic disk material
Harder than the master material for magnetic transfer
Is used, so the surface of the magnetic disk
The uneven shape of the magnetic disk is not transferred.
Small protrusions or small foreign matter
-Removed by master contact and suction / pumping process
It is thought that it is done. As described above, according to the present embodiment,
In the transfer device, a dummy mask having a lower hardness than the magnetic disk
First, the suction / pressure feeding process is performed using a
Remove any foreign matter on the magnetic disk and remove the surface of the magnetic disk.
After smoothing the
By performing the magnetic transfer process on the
Magnetic transfer to magnetic disk with almost no protrusion
And high quality with extremely good surface properties
A magnetic disk can be manufactured. As described above, according to the present invention, the magnetic switching
Magnetic transfer of the magnetic film pattern of the copying master onto the disk surface
Transfer to a legitimate magnetic disk
Prior to suction between the dummy disk and the magnetic transfer master.
By repeatedly pulling and pumping, the magnetic transfer master table
The surface can be kept smooth without burrs and high quality magnetic
A magnetic transfer device for manufacturing disks can be realized.
You. Further, according to the present invention, after the magnetic transfer,
By measuring the air transfer master surface,
When a foreign object is detected on the surface of the master,
Attach the disk and suck the disk between the dummy disk and the master for magnetic transfer.
The surface of the magnetic transfer master is
Durability that can reliably remove foreign substances adhering to the top
To produce high quality magnetic disks
A photographing device can be realized. Further, according to the present invention, the magnetic disk material
Use a material that is harder than the master material for magnetic transfer
Between the dummy master and the legitimate magnetic disk
Magnetic disk by repeating suction and pressure feeding
It can remove minute foreign matter existing on
To produce extremely smooth, high quality magnetic disks
An air transfer device can be realized.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a flowchart showing the steps of Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view of a magnetic transfer apparatus according to Embodiment 1 of the present invention. 4 is a diagram illustrating the surface of the magnetic transfer master. FIG. 5 is a diagram illustrating the boss shape of the magnetic transfer master according to the present invention. FIG. 6 is a diagram illustrating the time lapse of suction and pressure feeding in the magnetic transfer device according to the present invention. 7 is a view showing the initial magnetization of the magnetic disk. FIG. 8 is a view showing the magnetic disk after magnetic transfer. FIG. 9 is a cross-sectional view showing the magnetization processing of the magnetic disk. FIG. 10 is a magnetic transfer apparatus according to the present invention. FIG. 11 is a diagram showing the surface of a magnetic disk on which magnetic transfer is performed in FIG. 11. FIG. 11 is a diagram showing the surface of a magnetic disk on which magnetic transfer is performed by a conventional magnetic transfer device. FIG. FIG. 13 shows the relationship. FIG. 14 is a diagram showing the surface of the magnetic transfer master before and after the repetition of pressure feeding. FIG. 14 is a schematic diagram showing the surface of the magnetic transfer master. FIG. 15 is a diagram showing a master information pattern. FIG. 17 is a flowchart showing steps in the magnetic transfer apparatus according to the second embodiment of the present invention. FIG. 18 is a diagram showing the presence / absence of a lubricant on a dummy disk, the number of foreign substances on a magnetic transfer master, the number of defects, FIG. 19 is a diagram showing the relationship of the pressure transfer. FIG. 19 is a diagram showing the reproduction envelope of a signal recorded on the magnetic disk after the magnetic transfer. FIG. 20 is a diagram schematically showing the relationship between the magnetic transfer master and the dummy disk during suction / pressure transfer. FIG. 21 is a view showing a position where a dummy disk is brought into close contact with a magnetic transfer master. FIG. 22 is a flowchart showing steps in a magnetic transfer apparatus according to a fourth embodiment of the present invention. FIG. 23 is a diagram showing the surface of the magnetic transfer master in a state where the suction and pressure feeding processes are performed. FIG. 24 is a diagram showing the surface of the magnetic transfer master in a state where the suction and pressure feeding processes are not performed. DESCRIPTION OF SYMBOLS 1 Dummy disk 2 Magnetic transfer master 3 Transfer surface of magnetic transfer master 4 Groove 6 Support base 7 Vent 10 Suction pump 12 Air supply pump

   ────────────────────────────────────────────────── ─── Continuation of front page    (72) Inventor Toshio Makabe             Matsushita Electric, 1006 Kadoma, Kazuma, Osaka             Sangyo Co., Ltd. (72) Inventor Kiyokazu Toma             Matsushita Electric, 1006 Kadoma, Kazuma, Osaka             Sangyo Co., Ltd. (72) Inventor Tatsuro Ishida             Matsushita Electric, 1006 Kadoma, Kazuma, Osaka             Sangyo Co., Ltd. (72) Inventor Yasuaki Ban             Matsushita Electric, 1006 Kadoma, Kazuma, Osaka             Sangyo Co., Ltd. (72) Inventor Keizo Miyata             Matsushita Electric, 1006 Kadoma, Kazuma, Osaka             Sangyo Co., Ltd.

Claims (1)

Claims: 1. A master holding means for holding a master information carrier in which a magnetic portion made of a ferromagnetic thin film is formed on a disk-shaped substrate in an array pattern shape corresponding to a predetermined information signal. And a disk holding unit for holding a disk-shaped medium, and a magnetizing unit for applying a magnetic field to the magnetic unit, wherein the master holding unit and the disk holding unit are provided with the magnetic unit of the master information carrier and the magnetic unit. By superposing a magnetic recording medium and magnetizing the magnetic part by the magnetizing means, an array pattern of information signals formed on the master information carrier is transferred and recorded on the disk-shaped medium as a magnetization pattern of information signals. A transfer device, wherein the master holding unit or the disk holding unit is the master information carrier or the disk-shaped medium The magnetic transfer apparatus characterized by capable superimposed while sequentially shifting the relative position.