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JP2002337004A - Abrasive-resistant coating coated tool - Google Patents

Abrasive-resistant coating coated tool

Info

Publication number
JP2002337004A
JP2002337004A JP2001140906A JP2001140906A JP2002337004A JP 2002337004 A JP2002337004 A JP 2002337004A JP 2001140906 A JP2001140906 A JP 2001140906A JP 2001140906 A JP2001140906 A JP 2001140906A JP 2002337004 A JP2002337004 A JP 2002337004A
Authority
JP
Japan
Prior art keywords
coating
layer
cutting
coated tool
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001140906A
Other languages
Japanese (ja)
Other versions
JP3481216B2 (en
Inventor
Takashi Ishikawa
剛史 石川
Nobuhiko Shima
順彦 島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP2001140906A priority Critical patent/JP3481216B2/en
Publication of JP2002337004A publication Critical patent/JP2002337004A/en
Application granted granted Critical
Publication of JP3481216B2 publication Critical patent/JP3481216B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a hard coating coated tool capable of simultaneously attaining significantly high oxidation resistance, wear resistance, lubricity, and adhesion for the accommodation of drying and high speed in cutting highly hard steel, and a complex hard coating coated tool capable of attaining further high adhesion by a combination with a conventional coating. SOLUTION: In this abrasive-resistant coating coated tool formed by coating a base surface with a hard coating, the coating is formed by applying coating of at least one layer A, which consists of chemical composition expressed by (Cra Si1-a )(Nx B1-x ), where 0.5<=a<1, 0.5<=x<=1 and which is composed of phases relatively rich in Si and poor in Si. In the layer A, an amolphous microcrystal (Cra Si1-a )(Nx B1-x ) is interposed. The abrasive-resistant coating coated tool is also constituted by alternately performing the coating of at least one layer of chemical composition generally expressed by (TiAl)N with each other.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、高硬度鋼の高速切
削加工に使用される硬質皮膜被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for high-speed cutting of high hardness steel.

【0002】[0002]

【従来の技術】金属加工の高能率化を目的とした調質鋼
の直切削においては、特開昭62−56565号公報、
特開平2−194159号公報に代表されるTiAlN
皮膜が開発され切削工具に適用されている。TiAlN
皮膜は、TiN、TiCNに比べ耐酸化性が優れるた
め、刃先が高温に達する調質鋼の切削においては、切削
工具の性能を著しく向上させるものである。
2. Description of the Related Art Japanese Patent Application Laid-Open No. Sho 62-56565 discloses the direct cutting of tempered steel for the purpose of improving the efficiency of metal working.
TiAlN represented by JP-A-2-194159
Coatings have been developed and applied to cutting tools. TiAlN
Since the coating has better oxidation resistance than TiN and TiCN, the performance of the cutting tool is remarkably improved in cutting of tempered steel whose cutting edge reaches a high temperature.

【0003】しかしながら、近年では更なる加工の高能
率、高精度化の要求を満たす為、切削速度の高速化に加
え、環境問題及び加工コスト低減の観点から乾式での切
削加工が重要視されている。こうような切削環境下にお
いては、切削工具表面に被覆される耐摩耗皮膜と切削さ
れる材料(以下、被削材と称す。)との溶着現象が切削
性能に大きな影響を及ぼすとともに、切削温度がより高
温になりTiAlN系皮膜でも耐酸化が十分ではない状
況にある。すなわち、従来までの前記TiN、TiCN
およびTiAlN皮膜はこのような苛酷な切削環境下に
おいては、被削材との溶着現象等に起因した摩擦抵抗の
増加及び酸化の進行により、十分な切削性能を得られな
く、また酸化による摩耗進行を十分に抑制できていなく
なったのが現状である。
However, in recent years, in order to meet the demand for higher efficiency and higher precision of processing, dry cutting has been regarded as important in view of environmental problems and reduction of processing cost in addition to increasing the cutting speed. I have. In such a cutting environment, the welding phenomenon between the wear-resistant film coated on the cutting tool surface and the material to be cut (hereinafter referred to as a work material) has a great effect on the cutting performance, and the cutting temperature also increases. Has become even higher temperature and oxidation resistance is not sufficient even with a TiAlN-based film. That is, the conventional TiN, TiCN
In such a severe cutting environment, the TiAlN film cannot obtain sufficient cutting performance due to an increase in frictional resistance and the progress of oxidation caused by a welding phenomenon with a work material and the like, and wear progresses due to oxidation. The current situation is that it has not been possible to sufficiently control the situation.

【0004】このような問題を解決する為に、耐溶着性
を改善する観点より特表平11−502775号公報に
示される二硫化モリブデンや、特開平7−164211
号公報に示される炭化タングステンおよびダイヤモンド
ライクカーボンからなる潤滑性皮膜を硬質皮膜最表面に
積層した切削工具が開発されているが、いずれも硬質皮
膜との密着性が悪く、皮膜そのものが非常に脆い上耐酸
化性に乏しく、切削時に剥離または破壊、酸化摩滅など
により上記切削環境下においては十分対応できてはいな
い。
In order to solve such a problem, molybdenum disulfide disclosed in JP-A-11-502775 and JP-A-7-164211 are disclosed from the viewpoint of improving the welding resistance.
The cutting tool has been developed in which a lubricating film consisting of tungsten carbide and diamond-like carbon is laminated on the outermost surface of the hard film, but the adhesion of the hard film is poor and the film itself is very brittle. It is poor in oxidation resistance, and cannot be adequately treated in the above cutting environment due to peeling or destruction during cutting, oxidative wear and the like.

【0005】また、耐酸化性を改善する観点から特開平
7−237010号公報や特開平10−130620号
公報に代表されるようにTiAlNに第3成分を添加す
る事例があるものの、第3成分の添加によるだけでは十
分に満足される耐酸化性の向上は実現されていないのが
実状である。また特開平8−118106号公報にはT
iSiNの事例も提案されているが、単なるTiSiN
では耐酸化性を改善するには至っていない。
From the viewpoint of improving oxidation resistance, there is a case where a third component is added to TiAlN as typified by JP-A-7-237010 and JP-A-10-130620. In fact, a satisfactory improvement in oxidation resistance has not yet been realized by merely adding chromium. Japanese Patent Application Laid-Open No. Hei 8-118106 discloses T
The case of iSiN has also been proposed, but only TiSiN
Thus, the oxidation resistance has not been improved.

【0006】また特開平11−138038号公報にみ
られるように硬質皮膜内部にSi 粒等を介在させ
る事例もみられるがSi粒界を介して酸化が進行
するため十分な耐酸化性を付与するに至っていない。
Further, Japanese Patent Application Laid-Open No. 11-138038 discloses
Si inside the hard coating so that3N 4With particles
In some cases, Si3N4Oxidation proceeds via grain boundaries
Therefore, sufficient oxidation resistance has not been imparted.

【0007】[0007]

【発明が解決しようとする課題】本発明はこうした事情
に鑑み、切削加工の乾式化、高速化に対応可能な、即
ち、耐酸化性に優れるとともに被削材との溶着性が少な
い硬質層を提案し、耐酸化及び耐溶着性を同時に実現
し、高硬度鋼を乾式で高速切削出来うる耐摩耗皮膜被覆
工具を提供することを課題とする。
In view of these circumstances, the present invention provides a hard layer which can cope with dry and high-speed cutting, that is, which has excellent oxidation resistance and low adhesion to a work material. It is an object of the present invention to provide a wear-resistant film-coated tool capable of simultaneously realizing oxidation resistance and welding resistance and capable of cutting high-hardness steel dry at high speed.

【0008】[0008]

【課題を解決するための手段】本発明者は、硬質皮膜の
耐摩耗性と様々な被削材と摩擦抵抗の低減に及ぼす影響
および皮膜の層構造について詳細な検討を行った結果、
耐溶着性を付与する(CrSi)(N
)、但し、0.5≦a<1.0、0.5≦x≦1.0
で示される化学組成からなるA層を被覆することにより
耐溶着性を改善し、さらにその結晶形態を制御すること
により、耐酸化性及び耐摩耗性を同時に付与された硬質
皮膜被覆工具とする事により、高硬度鋼の乾式高速切削
加工において切削工具の性能が極めて良好となることを
見出し本発明に到達した。また、A層は一般的なTiA
lN系硬質皮膜等との組み合わせにより、より密着性の
優れた被覆工具を実現するものである。また上記耐摩耗
皮膜は、物理蒸着法により被覆されることが望ましい。
The inventor of the present invention has conducted detailed studies on the wear resistance of a hard coating, its effect on various work materials and reduction of frictional resistance, and the layer structure of the coating.
Imparting adhesion resistance (Cr a Si 1 - a) (N x B 1 -
x ), provided that 0.5 ≦ a <1.0 and 0.5 ≦ x ≦ 1.0
Improve the welding resistance by coating the layer A consisting of the chemical composition shown in the above, and further control the crystal morphology to obtain a hard film coated tool with both oxidation resistance and wear resistance. As a result, the present inventors have found that the performance of a cutting tool is extremely excellent in dry high-speed cutting of high hardness steel, and have reached the present invention. The A layer is made of general TiA.
By combining with a 1N-based hard coating or the like, a coated tool having more excellent adhesion can be realized. It is desirable that the abrasion resistant film is coated by a physical vapor deposition method.

【0009】[0009]

【作用】はじめにA層に関して、その各構成の作用につ
いて詳しく述べる。元来CrNは潤滑性を有する皮膜と
して知られており、その摩擦係数は0.6前後である。
(CrSi)(N)、但し、0.5
≦a<1.0、0.5≦x≦1.0、で示される化学組
成からなるCrとSiより構成される窒化物もしく窒硼
化物は、大気中、室温における鋼との摩擦係数が従来の
TiAl窒化物皮膜の0.8、CrNの0.6に比べ、
0.4と低摩擦を示すが、特に高温下ではその数値がさ
らに0.2前後に激減する。これは高温下で皮膜内のS
iが切粉との間の反応により皮膜表面に内部拡散し、皮
膜表面で低融点のSi酸化物を形成することに起因する
ことが確認された。
[Function] First, the function of each component of the layer A will be described in detail. CrN is originally known as a film having lubricity, and its coefficient of friction is around 0.6.
(Cr a Si 1 - a) (N x B 1 - x), where 0.5
A nitride or boride composed of Cr and Si having a chemical composition represented by ≦ a <1.0 and 0.5 ≦ x ≦ 1.0 has a coefficient of friction with steel at room temperature in the air. Compared to 0.8 for the conventional TiAl nitride coating and 0.6 for CrN
It shows a low friction of 0.4, but especially at high temperatures, its value drops further to around 0.2. This is because S
It was confirmed that i was diffused into the surface of the film due to the reaction with the swarf to form a low-melting-point Si oxide on the surface of the film.

【0010】この低融点のSi酸化物により(Cr
)(N)皮膜はCrNそのものが有
する潤滑特性にさらに潤滑性が付与され、著しく特性の
優れた潤滑皮膜として機能し、溶着による切削抵抗の増
大を抑制する作用を有するものであることが確認され
た。さらに硼素の添加により、硼素が皮膜内部でBN相
を形成し、このBN相の有する潤滑性の作用により、よ
り一層潤滑性が向上することが明らかとなった。
The low melting point Si oxide makes the (Cr a S
i 1 - a) (N x B 1 - x) film is further lubricity imparted to the lubricating characteristic of the CrN itself, acts as an excellent lubricating film significantly characteristics, suppresses the increase in the cutting resistance due to the welding action Has been confirmed. Furthermore, it has been clarified that the addition of boron causes boron to form a BN phase inside the film, and the lubricating action of the BN phase further improves the lubricity.

【0011】耐酸化性の向上に対し、本発明者らは鋭意
検討した結果、(CrSi)(N
相の結晶形態が耐酸化性に大きく影響を及ぼし、結晶形
態を制御することにより、一般的に耐酸化性が優れると
言われる(TiAl)N系皮膜より優れる耐酸化性を持
たせることができるという驚くべき知見を得るに至っ
た。(CrSi)(N)相は被覆時
のイオンエネルギーにより結晶形態が異なり、イオンエ
ネルギーが低い場合は全体的に柱状結晶を呈し、その中
にSi粒子が介在した形態となる。イオンエネル
ギーが高い場合は、全体的にアモルファス状に近い状態
となり、CrNBの中にSiとNの結合が確認される状
態となる。イオンエネルギーが中程度であり、かつ被覆
温度が550℃以上の場合は完全アモルファスのCrS
iBN相が微細結晶で存在し、このCrSiBN相のS
i含有量は、マトリックスとなるCrSiBN相のSi
量より富む形態となることが確認された。温度が低いと
イオンエネルギーが高い場合と同様の結晶形態を呈する
ことが確認された。温度、イオンエネルギーと結晶形態
との相関理由は今後の物理学的研究が必要である。
[0011] For improving the oxidation resistance, the present inventors have a result of intensive studies, (Cr a Si 1 - a ) (N x B 1 - x)
The crystal morphology of the phase has a great influence on the oxidation resistance, and by controlling the crystal morphology, it is possible to impart oxidation resistance superior to (TiAl) N-based coatings, which are generally said to have excellent oxidation resistance. That led to the surprising finding. (Cr a Si 1 - a) (N x B 1 - x) phase have different crystal form by ion energy during coating, if a low ion energy exhibited an overall columnar crystals, Si 3 N 4 therein It is in the form of intervening particles. When the ion energy is high, the overall state is close to an amorphous state, and the state of bonding of Si and N is confirmed in CrNB. When the ion energy is moderate and the coating temperature is 550 ° C or higher, completely amorphous CrS
The iBN phase exists in the form of fine crystals, and the SSi of the CrSiBN phase
The i content is determined by the amount of Si in the CrSiBN phase serving as the matrix.
It was confirmed that the form became richer than the amount. It was confirmed that when the temperature was low, a crystal form similar to that when the ion energy was high was exhibited. The reason for the correlation between temperature, ion energy and crystal morphology requires future physical studies.

【0012】中でも完全アモルファスCrSiBN相が
微細結晶で存在する場合結晶粒界が非常に整合した粒界
となり、欠陥が少なく、酸素の粒界での拡散を著しく抑
制し、非常に優れた耐酸化性を有することが確認され
た。同時に微細結晶で介在することにより、マトリック
スを格子歪強化し、硬度が向上し結果耐摩耗性をも向上
することになった。さらに最表面には1〜5nmのCr
の安定酸化層が形成されより一層優れた耐酸化性を有す
る結果となった。
In particular, when the completely amorphous CrSiBN phase exists as fine crystals, the crystal grain boundaries become very aligned grain boundaries, have few defects, remarkably suppress diffusion of oxygen at the grain boundaries, and have excellent oxidation resistance. It was confirmed to have. At the same time, by interposing fine crystals, the matrix was strengthened in lattice strain, the hardness was improved, and as a result, the wear resistance was also improved. Further, the outermost surface has a Cr of 1 to 5 nm.
Was formed, resulting in even more excellent oxidation resistance.

【0013】被覆条件としては比較的イオンエネルギー
が中程度となる、−100V〜−150Vの印荷バイア
ス、反応圧力は1Pa〜5Pa程度、被覆温度は550
℃以上が好ましい範囲である。
The coating conditions are such that the ion energy is relatively moderate, the applied bias is -100 V to -150 V, the reaction pressure is about 1 Pa to 5 Pa, and the coating temperature is 550.
C. or higher is a preferable range.

【0014】本発明の硬質皮膜を構成するA層の金属元
素の組成は、(CrSi)において、aの値が
0.5≦a<1.0という式を満足させることが必要で
ある。aの値が0.5未満の場合、Si含有量が多くな
りすぎて、皮膜そのものの靭性が劣化し、乾式高速切削
において皮膜の内部破壊や破壊にともなう皮膜の剥離が
顕著となり、十分な性能を発揮できない。
The composition of the metal element of the layer A constituting the hard coating of the present invention is such that, in (Cr a Si 1 - a ), the value of a satisfies the expression 0.5 ≦ a <1.0. is necessary. When the value of a is less than 0.5, the Si content becomes too large, the toughness of the film itself is deteriorated, and the internal destruction of the film and the peeling of the film accompanying the destruction become remarkable in dry high-speed cutting, and sufficient performance is obtained. Can not be demonstrated.

【0015】また、上記A層に係る窒化物もしくは窒硼
化物の場合、Nで0.5≦x≦1.0を満足
することが必要であり、xの値が0.5未満の場合は、
皮膜の硬度が著しく上昇し、残留圧縮応力が増大し、皮
膜の密着性が劣化するため十分な切削性能を示さない。
[0015] In the case of nitrides or窒硼product according to the A layer, N x B 1 - and must be able to satisfy 0.5 ≦ x ≦ 1.0 in x, the value of x is 0. If less than 5,
The hardness of the coating is significantly increased, the residual compressive stress is increased, and the adhesion of the coating is deteriorated, so that sufficient cutting performance is not exhibited.

【0016】アモルファスCrSiBN相の微細結晶粒
径は500nmを越えると格子歪の効果が少なく、皮膜
の硬度向上寄与が低下するため、500nm以下である
方がより好ましい。A層は、静的および動的条件下にお
いて優れた密着性、低摩擦、高耐酸化性を有すものの、
HRCが60を越えるような高硬度鋼の乾式高速切削加
工には、単一皮膜では密着性が十分でなく剥離が発生す
る場合がある。そこで、優れた耐密着性並びに耐摩耗性
を有した(TiAl)N層等と積層することが、このよ
うな高硬度鋼切削ではより好ましい結果となる。
If the fine crystal grain size of the amorphous CrSiBN phase exceeds 500 nm, the effect of lattice distortion is small and the contribution to improving the hardness of the film is reduced, so that it is more preferably 500 nm or less. The A layer has excellent adhesion, low friction and high oxidation resistance under static and dynamic conditions,
In dry high-speed cutting of high-hardness steel having an HRC of more than 60, a single coating may not have sufficient adhesion and may cause peeling. Therefore, lamination with a (TiAl) N layer or the like having excellent adhesion resistance and abrasion resistance is a more preferable result in such high-hardness steel cutting.

【0017】ここで用いられる(TiAl)N層は場合
によっては第3の金属成分を添加されたものでも同様の
作用が期待されることは、言うまでもないことである。
It goes without saying that the (TiAl) N layer used here may have the same effect even if the third metal component is added in some cases.

【0018】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性等を考慮
した場合、比較的低温で被覆でき、被覆した皮膜に圧縮
応力が残留するアーク放電方式イオンプレーティング、
もしくはスパッタリング等の被覆基体側にバイアス電圧
を印加する物理蒸着法であることが望ましい。
The method of coating the hard film-coated tool of the present invention is not particularly limited, but in consideration of the thermal effect on the coated base material, the fatigue strength of the tool, the adhesion of the film, etc. Arc discharge ion plating that can be coated at a relatively low temperature and compressive stress remains in the coated film,
Alternatively, a physical vapor deposition method of applying a bias voltage to the coated substrate side such as sputtering is preferable.

【0019】[0019]

【実施例】以下本発明を実施例に基づいて説明する。ア
ークイオンプレーティング装置を用い、金属成分の蒸発
源である各種合金製ターゲット、ならびに反応ガスであ
るN ガスから目的の皮膜が得られるものを選択し、被
覆基体温度600℃、反応ガス圧力3.0Paの条件下
にて、被覆基体である外径10mmの超硬合金製2枚刃
エンドミル、および超硬合金製インサートに−130V
の電位を印加し、全皮膜総厚みが3μmとなるように成
膜した。また硼素、Siは蒸発源であるターゲットに必
要量添加した。試作した本発明例並びに比較例を表1に
示す。尚多層の場合はA層の総厚1.5μ、他層の総厚
1.5μとなるよう均等に被覆した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments. A
Evaporation of metal components using the ion plating system
The source is a target made of various alloys and a reaction gas.
N 2Select a gas that provides the desired film from the gas,
Conditions of 600 ° C. substrate temperature and 3.0 Pa reaction gas pressure
, 2 blades made of cemented carbide with an outer diameter of 10 mm, which is the coated substrate
-130V for end mills and cemented carbide inserts
Voltage to form a total film thickness of 3 μm.
Filmed. In addition, boron and Si are necessary for the target, which is the evaporation source.
The required amount was added. Table 1 shows the prototypes of the present invention and comparative examples.
Show. In the case of a multilayer, the total thickness of the A layer is 1.5 μm, and the total thickness of the other layers is
The coating was evenly applied to 1.5 μm.

【0020】[0020]

【表1】 [Table 1]

【0021】得られた硬質皮膜被覆エンドミルおよび硬
質皮膜被覆インサートを用い切削試験を行った。工具寿
命は刃先の欠けないしは摩耗等により工具が切削不能と
なった時の切削長とした。得られた結果を表1に併記す
る。切削諸元を次に示す。
A cutting test was performed using the obtained hard-coated end mill and hard-coated insert. The tool life was defined as the cutting length when the tool could not be cut due to chipping or wear of the cutting edge. Table 1 also shows the obtained results. The cutting specifications are shown below.

【0022】2枚刃超硬エンドミルの切削条件は、側面
切削ダウンカット、被削材S50C(硬さHB22
0)、切り込みAd10mm×Rd1mm、切削速度2
50m/min、送り0.06mm/tooth、エア
ーブロー使用、とした。
The cutting conditions of the two-flute carbide end mill are side cutting down cut, work material S50C (hardness HB22).
0), incision Ad10mm × Rd1mm, cutting speed 2
50 m / min, feed 0.06 mm / tooth, and use of air blow.

【0023】インサート切削条件は、工具形状SEE4
2TN、巾100mm×長さ250mmの面取り加工、
被削材SKD61(硬さHRC45)、切り込み2.0
mm、切削速度150m/min、送り0.15mm/
rev、乾式切削とした。表1に試験結果を併記する。
The insert cutting conditions are as follows: Tool shape SEE4
2TN, 100mm width x 250mm length chamfering,
Work material SKD61 (hardness HRC45), depth of cut 2.0
mm, cutting speed 150m / min, feed 0.15mm /
rev, dry cutting. Table 1 also shows the test results.

【0024】耐酸化性はそれぞれ5μの皮膜を被覆し9
00℃大気中で1時間保持した時に形成される酸化層の
厚さで評価した。摩擦係数は600℃においてSKD6
1のボールを用い、一般的なボールオンディスク法によ
り測定した。それらの結果を表2に示す。
The oxidation resistance was 9 μm for each coating.
The evaluation was made based on the thickness of an oxide layer formed when the substrate was kept in the air at 00 ° C. for one hour. The coefficient of friction is SKD6 at 600 ° C.
Using one ball, the measurement was performed by a general ball-on-disk method. Table 2 shows the results.

【0025】[0025]

【表2】 [Table 2]

【0026】比較例16、17はSiもしくは硼素の量
が多すぎる場合の比較例であり、静的評価数値は満足す
るものの密着性が十分ではなく工具寿命が短い結果であ
る。比較例13、14、15は、TiAlN系皮膜に第
3成分を添加した事例であり、耐酸化性は改善はされる
ものの、本発明例と比べれば改善効果が少ない。
Comparative Examples 16 and 17 are comparative examples in which the amount of Si or boron is too large. Although the static evaluation values are satisfied, the adhesion is not sufficient and the tool life is short. Comparative Examples 13, 14, and 15 are examples in which the third component was added to the TiAlN-based coating, and although the oxidation resistance was improved, the improvement effect was less than that of the present invention.

【0027】これらに対し本発明例は、静的評価特性に
優れると同時に、密着性にも優れ、溶着現象に起因した
異常摩耗や皮膜の酸化摩耗、皮膜剥離が進行することも
なく、総合して工具寿命が著しく向上する。従って、本
発明は高硬度鋼の乾式高速切削加工に十分対応するもの
である。
On the other hand, the examples of the present invention are excellent in static evaluation characteristics and also excellent in adhesiveness, and are free from abnormal wear, film oxidative wear and film peeling due to the welding phenomenon. Tool life is significantly improved. Therefore, the present invention is sufficient for dry high-speed cutting of high hardness steel.

【0028】[0028]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた高密着性、低摩擦、高
耐酸化性を同時に有すことから、乾式高速切削加工にお
いて格段に長い工具寿命が得られ、切削加工における生
産性の向上に極めて有効であるものである。
As described above, the hard-coated tool of the present invention has excellent high adhesion, low friction and high oxidation resistance at the same time as the conventional coated tool. A long tool life can be obtained, which is extremely effective in improving productivity in cutting.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明例の(CrSi1−a)(N
1−x)マトリックス内に介在する微細アモルファ
ス結晶(CrSi1−a)(N1−x)のTEM
像を示す。
BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a diagram showing (Cr a Si 1-a ) (N
x B 1-x) fine amorphous crystals interposed in the matrix (Cr a Si 1-a) TEM of (N x B 1-x)
An image is shown.

【図2】図2は、図1中のスポット1に対応する(Cr
Si1−a)(N1−x)マトリックスの極微電
子線回折像を示す。
FIG. 2 is a diagram corresponding to spot 1 in FIG.
1 shows a microelectron diffraction image of a Si 1-a ) (N x B 1-x ) matrix.

【図3】図3は、図1中のスポット2に対応する(Cr
Si1−a)(N1−x)微細アモルファス結晶
(TiSi1−a)(N1−x)の極微電子線回
折像を示す。
FIG. 3 is a view corresponding to the spot 2 in FIG. 1 (Cr
shows the a Si 1-a) (N x B 1-x) fine amorphous crystal (Ti a Si 1-a) (N x nanobeam electron diffraction image of B 1-x).

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】基体表面に硬質皮膜、(CrSi
)(N)、但し、0.5≦a<1、
0.5≦x≦1、で示される化学組成からなるA層を少
なくとも1層被覆された耐摩耗皮膜被覆工具において、
該A層が相対的にSiに富むCrSi(N
相と、相対的にSiの少ないCrSi(N
相とから構成されることを特徴とする耐摩耗皮膜被覆工
具。
1. A hard film, (CraSi
1a) (NxB1x), Provided that 0.5 ≦ a <1,
A layer having a chemical composition represented by 0.5 ≦ x ≦ 1
At least one layer of wear-resistant film-coated tool,
The A layer is made of CrSi (NxB1x)
Phase and CrSi (NxB1 x)
Abrasion resistant coatings characterized by comprising a phase
Utensils.
【請求項2】請求項1記載の耐摩耗皮膜被覆工具におい
て、該相対的にSiに富むCrSi(N)相
がアモルファス相であることを特徴とする耐摩耗皮膜被
覆工具。
2. A wear-resistant coating coated tool according to claim 1, CrSi-rich the relatively Si - wear coating coated tool, wherein the (N x B 1 x) phase is an amorphous phase.
【請求項3】請求項1乃至2記載の耐摩耗皮膜被覆工具
において、該相対的にSiに富むCrSi(N
)相の結晶粒径が500nm以下であることを特徴と
する耐摩耗皮膜被覆工具。
3. The tool according to claim 1, wherein said relatively Si-rich CrSi (N x B 1-
x ) A tool coated with a wear-resistant coating, wherein the phase has a crystal grain size of 500 nm or less.
【請求項4】請求項1乃至3記載の耐摩耗皮膜被覆工具
において、該A層とTiとAlを主成分とする窒化物、
炭窒化物、窒酸化物、窒硼化物層が2層以上積層された
ことを特徴とする耐摩耗皮膜被覆工具。
4. The tool according to claim 1, wherein said A layer and a nitride containing Ti and Al as main components;
A tool having a wear-resistant coating, wherein two or more layers of carbonitride, nitride oxide and boride are laminated.
JP2001140906A 2001-05-11 2001-05-11 Wear-resistant film-coated tools Expired - Lifetime JP3481216B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7294416B2 (en) 2003-03-25 2007-11-13 Kobe Steel, Ltd. Hard film
JP2008214154A (en) * 2007-03-06 2008-09-18 Kobe Steel Ltd Forming mold
WO2023136212A1 (en) * 2022-01-11 2023-07-20 三菱マテリアル株式会社 Surface-coated cutting tool

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3388267B2 (en) 2000-05-23 2003-03-17 日立ツール株式会社 Wear-resistant film-coated tools
JP3586217B2 (en) 2001-05-11 2004-11-10 日立ツール株式会社 Wear-resistant film-coated tools

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7294416B2 (en) 2003-03-25 2007-11-13 Kobe Steel, Ltd. Hard film
US7758974B2 (en) 2003-03-25 2010-07-20 Kobe Steel, Ltd. Hard film
JP2008214154A (en) * 2007-03-06 2008-09-18 Kobe Steel Ltd Forming mold
WO2023136212A1 (en) * 2022-01-11 2023-07-20 三菱マテリアル株式会社 Surface-coated cutting tool
JPWO2023136212A1 (en) * 2022-01-11 2023-07-20
EP4464441A4 (en) * 2022-01-11 2025-12-03 Mitsubishi Materials Corp SURFACE-COATED CUTTING TOOL

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