JP2002303560A - Method for testing airtightness performance - Google Patents
Method for testing airtightness performanceInfo
- Publication number
- JP2002303560A JP2002303560A JP2001106683A JP2001106683A JP2002303560A JP 2002303560 A JP2002303560 A JP 2002303560A JP 2001106683 A JP2001106683 A JP 2001106683A JP 2001106683 A JP2001106683 A JP 2001106683A JP 2002303560 A JP2002303560 A JP 2002303560A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- test
- differential pressure
- leak
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title abstract description 14
- 238000001514 detection method Methods 0.000 claims description 29
- 238000010998 test method Methods 0.000 claims description 9
- 230000000630 rising effect Effects 0.000 claims description 2
- 238000011056 performance test Methods 0.000 abstract description 4
- 230000007704 transition Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000013101 initial test Methods 0.000 description 5
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、通気弁等のよう
に、微圧条件下において漏れ量が大きく、テスト圧が降
下するようなワーク(供試品)の気密性を測定する気密
性能試験方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtightness test for measuring the airtightness of a work (test sample) such as a vent valve, which has a large amount of leakage under a small pressure and a test pressure is lowered. About the method.
【0002】[0002]
【従来の技術】従来より、この種の供試品の気密性を測
定する気密性能試験を行う場合には、エアリークテスト
による気密性能試験の一般原理として、ボイル・シャル
ルの法則により、基準品と供試品との差圧からリーク量
を求めている。このときのリーク量は時間とともに比例
するというハーゲン・ポアズイユの法則を適用し、リー
ク量の算出方法としては、時間当たりのリーク量をほぼ
一定とした上で算出するようにしている。2. Description of the Related Art Conventionally, when performing an airtightness test for measuring the airtightness of a sample of this type, a general principle of the airtightness test by an air leak test is based on Boyle-Charle's law and a standard product. The amount of leak is determined from the differential pressure from the sample. At this time, Hagen-Poiseuille's law that the leak amount is proportional to the time is applied, and the leak amount is calculated with the leak amount per time being substantially constant.
【0003】リークの検出方式の代表的なものとして
は、封入したテスト圧に対して内圧の差圧を検出する内
圧検出方式と、圧力を供給しつつ漏れ出た外圧の差圧を
検出する外圧検出方式とがある。前者の内圧検出方式
は、供試品内を加圧封入し、圧力降下を検出する方法で
あり、リーク量が微少であってリニア特性に近似可能な
場合に有効である。また、この検出方式は、加圧するテ
スト圧が高い場合には圧力が平衡するまでに時間を必要
とする、テスト圧が低い場合の圧力検出方式として有効
である。[0003] Representative examples of the leak detection method include an internal pressure detection method for detecting a differential pressure of an internal pressure with respect to a sealed test pressure, and an external pressure detection method for detecting a differential pressure of an leaked external pressure while supplying pressure. There is a detection method. The former method of detecting the internal pressure is a method of detecting the pressure drop by pressurizing and sealing the inside of the sample, and is effective when the leak amount is small and can be approximated to linear characteristics. Further, this detection method is effective as a pressure detection method when the test pressure to be applied requires a long time to equilibrate when the test pressure is high, and when the test pressure is low.
【0004】一方、後者の外圧検出方式は、供試品を密
閉容器内に取付け、この供試品内を一定加圧して密閉容
器内の圧力上昇を検出する方法で、層流を条件下とすれ
ばリーク量が多い場合においてもリニア特性として扱う
ことができ、また、圧力が平衡するまでの時間が短いた
め、内圧検出方式と比べてテスト圧が高い場合に有効で
ある。[0004] On the other hand, the latter method of detecting external pressure is a method in which a test sample is mounted in a closed container, and a constant pressure is applied to the test sample to detect a pressure rise in the closed container. In this case, even when the leak amount is large, it can be treated as a linear characteristic, and since the time until the pressure is equilibrated is short, it is effective when the test pressure is higher than the internal pressure detection method.
【0005】[0005]
【発明が解決しようとする課題】内圧検出方式では、加
圧するテスト圧が大きく降下する程の影響を受けないよ
うな、供試品からのリーク量が微量である場合に限って
時間当たりのリーク量をほぼ一定として算出することが
できるが、例えば、テスト圧が微圧であるときにこの圧
力に比べてリーク量が大きくなる場合や、或は、バルブ
の内容積が小さく、その内容積に比較してリーク量の割
合が大きくなる場合には、リーク量がテスト圧に与える
影響を無視出来なくなるという問題があった。In the internal pressure detecting method, the leak per hour is limited only when the amount of leak from the test sample is small so as not to be affected by a large drop in the test pressure to be applied. The amount can be calculated as substantially constant.For example, when the test pressure is a small pressure, the leak amount becomes larger than this pressure, or the internal volume of the valve is small, When the ratio of the leak amount becomes large in comparison, there is a problem that the influence of the leak amount on the test pressure cannot be ignored.
【0006】一方、外圧検出方式は、密閉容器内の初期
圧力すなわち大気圧からの圧力上昇分が小さい場合にの
み検出結果として利用でき、一方、テスト圧が微圧での
圧力上昇が大きい場合には、密閉容器内圧力がテスト圧
に一様となる変化を測定していることになり、大気圧下
に圧力を放出するという実際の条件下におけるリーク量
を正確に測定できなくなることから、内圧方式の場合と
同様に時間当たりのリーク量をほぼ一定であることとし
て考えることが難しくなっていた。また、この検出方式
は、安定した密閉度を有する容器等の試験装置である必
要性があったり、或は、ワークの取付時の工数が多くな
るなどの問題がある。On the other hand, the external pressure detection system can be used as a detection result only when the initial pressure in the closed vessel, that is, the pressure rise from the atmospheric pressure is small. On the other hand, when the test pressure is a small pressure and the pressure rise is large, Means that the change in the pressure inside the closed vessel is uniform to the test pressure, and it is impossible to accurately measure the leak amount under the actual condition of releasing the pressure under the atmospheric pressure. As in the case of the system, it has been difficult to consider that the amount of leak per time is almost constant. In addition, this detection method has a problem that it needs to be a test device for a container or the like having a stable degree of sealing, or that the number of steps for mounting a work increases.
【0007】ところで、通気弁等の気密性能試験を行う
場合には、実際の圧力変化が微圧であることから供給す
るテスト圧は微圧であることが望ましく、このため一般
的には内圧検出方式が適している。しかし、内圧検出方
式では、前述のとおり、リーク量が多い場合にはリニア
特性になり難く、一方、外圧検出方式では上述の問題を
生じていた。When an airtightness test of a vent valve or the like is performed, the test pressure to be supplied is desirably a slight pressure because the actual pressure change is a slight pressure. The method is suitable. However, in the internal pressure detection method, as described above, it is difficult to obtain a linear characteristic when the leak amount is large, while the external pressure detection method has the above-described problem.
【0008】本発明は、従来の課題点を解決するため鋭
意研究の結果、開発したものであり、微圧条件下で漏れ
量が大きくなりテスト圧が大きく降下するような場合で
も正確な気密性能試験を行うことが可能であり、加え
て、内容積、検出時間、テスト圧等の条件が変わったと
しても迅速にかつ確実に試験結果を得ることのできる気
密性能測定方法を提供することを目的とする。The present invention has been developed as a result of intensive research to solve the conventional problems. Even when the test pressure drops greatly due to a large amount of leakage under a small pressure condition, the airtight performance can be accurately determined. It is intended to provide a method for measuring airtight performance that can perform tests and that can quickly and reliably obtain test results even when conditions such as internal volume, detection time, and test pressure change. And
【0009】[0009]
【課題を解決するための手段】上記の目的を達成するた
め、請求項1に係る発明は、テスト圧変化を考慮した発
生差圧の時間変移データから、対象供試品固有のリーク
する隙間に関する係数を求め、この係数を用いて気密性
能の試験を行うようにした気密性試験方法である。In order to achieve the above object, the invention according to claim 1 relates to a leak gap specific to a target specimen from time variation data of a generated differential pressure in consideration of a change in test pressure. This is an airtightness test method in which a coefficient is obtained and a test of airtightness is performed using the coefficient.
【0010】請求項2における発明は、検出時間におけ
る発生差圧データから、テスト圧変化を考慮した、対象
供試品固有のリークする隙間に関する係数を求め、この
係数を用いて気密性能の試験を行うようにした気密性能
試験方法である。According to the second aspect of the present invention, a coefficient relating to a leak gap peculiar to a target test sample is determined from the differential pressure data generated during the detection time in consideration of a change in test pressure, and a test for airtight performance is performed using this coefficient. This is an airtight performance test method to be performed.
【0011】請求項3における発明は、上記の係数によ
り、一定圧力供給時の時間当たり一定リーク量を求めて
判断基準との比較を行うことにより微圧条件下で測定す
るようにした。According to the third aspect of the present invention, a constant leak amount per time at the time of supplying a constant pressure is obtained by the above coefficient, and the leak amount is measured under a micro pressure condition by comparing with a judgment reference.
【0012】請求項4における発明は、発生差圧の時間
変移データ又は検出時間における発生差圧データが、内
圧検出方式における内圧降下の差圧データである気密性
能試験方法である。The invention according to claim 4 is an airtightness test method in which the time variation data of the generated differential pressure or the generated differential pressure data at the detection time is the differential pressure data of the internal pressure drop in the internal pressure detection method.
【0013】請求項5における発明は、発生差圧の時間
変移データ又は検出時間における発生差圧データが、外
圧検出方式における容器内上昇圧の差圧データである気
密性能試験方法である。The invention according to claim 5 is an airtight performance test method in which the time difference data of the generated differential pressure or the generated differential pressure data at the detection time is the differential pressure data of the rising pressure in the container in the external pressure detection method.
【0014】[0014]
【発明の実施の形態】以下に、本発明における気密性能
試験方法を微圧条件下において行った場合の実施形態を
通気弁の気密性能試験を例にフローチャート並びに実験
データに基づいて詳細に説明する。本例における通気弁
(供試品)13は、図11に示す構造を有しており、微
圧条件下において漏れ量が大きくなりテスト圧が大きく
降下する場合でも正確な測定を可能としている。同図に
おいて、通気弁13は、通気管末端に取付けられ、管内
圧力が通常の大気圧時には、本体20内に設けたジスク
22がシール部材23を介して弁座24を閉止し、また
排水時には、管内に生じる負圧によってジスク22が開
き、一方、正圧発生時には、ジスク22が押さえ付けら
れ、臭気が排出されないような構造を有している。この
ように、通気弁は、所定の気密性能を有する必要があ
る。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment in which the airtightness test method according to the present invention is performed under a small pressure condition will be described in detail based on a flow chart and experimental data, taking an airtightness test of a vent valve as an example. . The vent valve (test sample) 13 in this example has the structure shown in FIG. 11, and enables accurate measurement even when the amount of leakage increases under a small pressure condition and the test pressure drops significantly. In this figure, a vent valve 13 is attached to the end of a vent pipe, and when the pressure in the pipe is normal atmospheric pressure, a disc 22 provided in the main body 20 closes a valve seat 24 via a seal member 23, and when draining, The disc 22 is opened by a negative pressure generated in the pipe, and when a positive pressure is generated, the disc 22 is pressed down so that the odor is not discharged. Thus, the vent valve needs to have a predetermined airtight performance.
【0015】図1は、本発明における気密性試験装置の
構成を示した概略図、図2は同上のシステム構成の説明
図であり、本実施形態においては、内圧検出方式を基に
した通気弁の気密性能試験の実施形態を示す。本発明
は、テスト圧変化を考慮した発生差圧の時間変移データ
から、対象供試品固有のリークする隙間に関する係数を
求めるようにし、この係数により、一定圧力供給時の時
間当たりの一定リーク量を求めるようにするテスト方法
である。先ず、エアリークテスタ15の初期設定として
設定値入力手段1に各種の設定値を入力する。このとき
の設定値としては、供試品であるワーク13内の容積
値、図示しないコンプレッサ等の圧力供給源より供給さ
れる供給圧力値、加圧時間、差圧測定時間、及び製品と
しての可否となるリーク量であり、独自に算出して得ら
れるリーク量判定値についてそれぞれ入力し、これらの
値は記憶手段2に記憶される。FIG. 1 is a schematic diagram showing the configuration of an airtightness test apparatus according to the present invention, and FIG. 2 is an explanatory view of the system configuration of the same. In this embodiment, a vent valve based on an internal pressure detection system is used. 1 shows an embodiment of an airtightness test of the present invention. According to the present invention, a coefficient relating to a leak gap peculiar to a target specimen is obtained from time change data of a generated differential pressure in consideration of a test pressure change, and the coefficient is used to determine a constant leak amount per time at a constant pressure supply. It is a test method to ask for. First, various setting values are input to the setting value input means 1 as initial settings of the air leak tester 15. The set values at this time include a volume value in the work 13 as a test sample, a supply pressure value supplied from a pressure supply source such as a compressor (not shown), a pressurization time, a differential pressure measurement time, and whether the product can be used. The leak amount determination values obtained by calculating independently are input, and these values are stored in the storage means 2.
【0016】また、基準品となるマスタ12と供試品と
なるワーク13とを据付けると共に、レギュレータ14
の設定を行っておく。測定時には、制御手段3から信号
が送られ、この信号に基づいて圧力供給手段4が作動し
て圧力供給が始まる。なお、圧力供給手段4としては、
マスタ12側の流路に開閉用のバルブ4a、また、ワー
ク13側の流路にバルブ4bを設けている。A master 12 serving as a reference product and a work 13 serving as a test sample are installed.
Make the settings for At the time of measurement, a signal is sent from the control means 3, and based on this signal, the pressure supply means 4 operates to start pressure supply. In addition, as the pressure supply means 4,
An opening / closing valve 4a is provided in the flow path on the master 12 side, and a valve 4b is provided in the flow path on the work 13 side.
【0017】圧力供給源から圧縮エアの供給が行われ、
バルブ4a、4bをそれぞれ開状態にすると、マスタ1
2、及びワーク13の各通気弁に圧力が供給され、この
圧力供給源からレギュレータ14によって予め設定され
た適宜の圧力による圧縮エアが供給される。The compressed air is supplied from a pressure supply source,
When the valves 4a and 4b are opened, the master 1
2, and a pressure is supplied to each ventilation valve of the work 13, and compressed air is supplied from this pressure supply source by an appropriate pressure set in advance by the regulator 14.
【0018】圧力供給は、所定時間の間継続して行わ
れ、このときの圧力値は、圧力センサである圧力測定手
段6によって測定され、ディスプレイ等の表示手段18
に表示される。加圧する時間は、計時手段5によって計
時され、加圧時間が所定の時間に達すると、このときの
圧力値が圧力測定手段によって測定される。The pressure supply is continuously performed for a predetermined time, and the pressure value at this time is measured by the pressure measuring means 6 which is a pressure sensor, and is displayed on a display means 18 such as a display.
Will be displayed. The time for pressurization is measured by the time measuring means 5, and when the pressurizing time reaches a predetermined time, the pressure value at this time is measured by the pressure measuring means.
【0019】次に、圧力判定手段7において、測定した
圧力値と、差圧を測定する際に必要な供給圧力であり、
記憶手段2に記憶されている供給圧力設定値(設定圧力
値)と比較するようにしている。このときの比較結果
が、「測定した圧力値<設定圧力値」の場合には、マス
タ12及びワーク13に測定に必要な圧力が供給されて
いないことになるので、差圧の測定を中止する。この場
合、制御手段3からの信号に基づいて表示手段18に測
定が中止される旨の表示が表示されるので、バルブ4a
とバルブ4bとの分岐前の流路に設けたバルブ4cを操
作してエアリークテスタ15全体の圧力を大気に開放す
る。その後、一旦ワーク13を取り外し、ワーク13を
取付け直し、再び測定に移る。Next, the pressure determination means 7 indicates the measured pressure value and the supply pressure required for measuring the differential pressure.
The supply pressure set value (set pressure value) stored in the storage means 2 is compared. If the comparison result at this time is “measured pressure value <set pressure value”, it means that the pressure required for measurement has not been supplied to the master 12 and the work 13, and the measurement of the differential pressure is stopped. . In this case, a display indicating that the measurement is stopped is displayed on the display means 18 based on the signal from the control means 3, so that the valve 4a
The entire pressure of the air leak tester 15 is released to the atmosphere by operating the valve 4c provided in the flow path before the branch between the valve and the valve 4b. Thereafter, the work 13 is once removed, the work 13 is mounted again, and the measurement is started again.
【0020】供給圧力の比較結果が「測定した圧力値=
設定圧力値」である場合には、マスタ12とワーク13
との間に生じた差圧を測定する差圧測定工程に進み、測
定した差圧からリーク隙間係数Cを算出するようにして
いる。先ずバルブ4a、4bを閉状態にしてマスタ1
2、ワーク13間にそれぞれ圧力を内封した状態にす
る。この状態で差圧センサである差圧測定手段8によっ
てマスタ12とワーク13との間の所定の差圧測定時間
であるt秒後の差圧値ΔP (t)を測定し、この差圧値
ΔP(t)は、表示手段18に表示される。The result of the comparison of the supply pressure is “measured pressure value =
If it is “set pressure value”, the master 12 and the work 13
Proceed to the differential pressure measurement process to measure the differential pressure generated between
The leak gap coefficient C is calculated from the determined differential pressure.
I have. First, the master 4 is closed by closing the valves 4a and 4b.
2. Keep the pressure between the workpieces 13
You. In this state, the differential pressure measuring means 8 which is a differential pressure sensor is used.
The predetermined differential pressure measurement time between the master 12 and the work 13
Differential pressure value ΔP after t seconds (T)And the differential pressure value
ΔP(T)Is displayed on the display means 18.
【0021】次に、この確定した差圧値ΔP(t)を用
いて、演算手段9によってリーク隙間係数C及びリーク
量Qaを算出する。このときの演算式を、以下に説明す
る。テスト圧(絶対圧)をP(Pa),ワーク13の内
容積をV(ml)、テスト圧下に生じたエアのリーク量
をΔVとすると、ボイルの法則より、PV=(P−Δ
P)(V+ΔV)が成り立ち、 ΔV≒(ΔP・V)/P となる。上式を大気圧下における圧力Patmのリーク
量ΔVに換算すると、ΔV≒(ΔP・V)/Patmで
あり、従って、 ΔP≒(ΔV・Patm)/V −−−(1) となる。Next, using the determined differential pressure value ΔP (t) , the calculating means 9 calculates a leak gap coefficient C and a leak amount Qa. The operation formula at this time will be described below. Assuming that the test pressure (absolute pressure) is P (Pa), the internal volume of the work 13 is V (ml), and the amount of air leak generated under the test pressure is ΔV, from the Boyle's law, PV = (P−Δ
P) (V + ΔV), and ΔV ≒ (ΔP · V) / P. When the above equation is converted into the leak amount ΔV of the pressure Patm under the atmospheric pressure, ΔV ≒ (ΔP ・ V) / Patm , and thus ΔP ≒ (≒ V ・Patm ) / V --- (1) Become.
【0022】ここで、ワーク13のリーク隙間の形状
を、一様な円形断面を有する毛細管と仮定し、また、流
体を層流(粘性流)と仮定すると、リーク量の代表的な
理論式であるハーゲン・ポアズイユの法則により次式が
成り立つ。空気(圧縮流体)での時間あたりのリーク量
Qa(m3/s)は、毛細管の穴の半径をR(m)、穴
の長さをL(m)、空気の粘度をμa{18.2×10
− 6(Pa・s)}とすると、 Qa=πR4(P2−Patm 2)/(16μa・L・Patm) −−−(2 ) となるが、本実施形態のように、微少なテスト圧Pに対
してリーク量が多く、テスト圧Pの変化が無視できない
場合、すなわち上式のテスト圧Pが変化してしまう場合
は、時間の経過とともに、時間あたりのリーク量Qaも
刻々変化することになる。そこで、このテスト圧Pの変
化を考慮したリーク量の算出が必要となる。そこで、リ
ーク隙間係数C=πR4/Lとすると、式(2)は、 Qa=C(P2−Patm 2)/(2.91×10−4・Patm) −−−( 3) となり、圧力検出に要する時間がtのとき、初期テスト
圧をPt0とすると、積算リーク量ΔV(t)は、次の
ように考えられる。 ΔV(t)=C∫{[(Pt0−ΔP(t−dt))2−Patm 2]/(2. 91×10−4 ・Patm)}dt −−−(4) 従って、発生差圧ΔP(t)については、圧力検出時間
tを考慮した式(1)ΔP(t)=(ΔV(t)・P
atm)/Vと、式(4)から次のような式が成り立
つ。 ΔP(t)=(Patm/V)・C∫{[(Pt0−ΔP(t−dt))2−P atm 2 ]/(2.91×10−4・Patm)}dt −−−(5) この式(5)におけるΔP(t)に、時間t(s)後の
差圧測定値を代入して、リーク隙間係数Cの値を逆算す
る。すなわちテスト圧変化を考慮した発生差圧の時間変
位データから、対象供試品固有のリークする隙間に関す
る係数Cを求める。Here, the shape of the leak gap of the work 13
Is assumed to be a capillary having a uniform circular cross section, and
Assuming that the body is laminar (viscous flow), the typical leakage
According to Hagen-Poiseuille's law, which is the theoretical formula,
Holds. Leakage per hour in air (compressed fluid)
Qa (m3/ S) is the radius of the capillary hole R (m), the hole
Is L (m) and the viscosity of air is μa {18.2 × 10
− 6(Pa · s)}, Qa = πR4(P2−Patm 2) / (16μa ・ L ・ Patm) (2), but as shown in the present embodiment, a small test pressure P
The amount of leak is large and the change in test pressure P cannot be ignored
Case, that is, the test pressure P in the above equation changes
Means that the amount of leak per hour Qa
It will change every moment. Therefore, this test pressure P change
It is necessary to calculate the amount of leakage in consideration of the formation of a leak. So,
Work gap coefficient C = πR4/ L, equation (2) is given by Qa = C (P2−Patm 2) / (2.91 × 10-4・ Patm−−− (3), and when the time required for pressure detection is t, the initial test
Pressure Pt0Then, the integrated leak amount ΔV(T)Is the following
It is thought to be. ΔV(T)= C∫ {[(Pt0−ΔP(T-dt))2−Patm 2] / (2.91 × 10-4 ・ Patm)} Dt −−− (4) Therefore, the generated differential pressure ΔP(T)About the pressure detection time
Equation (1) ΔP considering t(T)= (ΔV(T)・ P
atm) / V and equation (4) yields the following equation:
One. ΔP(T)= (Patm/ V) · C∫ {[(Pt0−ΔP(T-dt))2−P atm 2 ] / (2.91 × 10-4・ Patm)} Dt --- (5) ΔP in equation (5)(T)At time t (s)
Substitute the value of leak gap coefficient C by substituting the measured value of differential pressure
You. In other words, the time variation of the generated differential pressure considering the test pressure change
From the position data, the leak gap specific to the target
A coefficient C is obtained.
【0023】ここで、式(5)を用いて、任意のリーク
隙間係数Cにおける発生差圧の変化を計算すると、図5
に示したグラフのように表すことができる。このとき、
t=0のとき、ΔVt=0=0とし、ワーク内容積V=
767(ml)、テスト圧P t0=400(Pa)とし
ている。このグラフにおいて、同一ワーク13において
リーク隙間計数Cを変化させると、リーク隙間係数Cが
小さい場合は、発生差圧はリニア特性に近似している
が、リーク隙間係数Cが大きくなると、発生差圧は放物
線状に推移していく。本発明は、このように発生差圧が
放物線状に推移していく供試品に対して有効な気密性能
試験である。Here, using Equation (5), an arbitrary leak
When the change in the generated differential pressure at the clearance coefficient C is calculated, FIG.
Can be represented as shown in FIG. At this time,
When t = 0, ΔVt = 0= 0, and the work internal volume V =
767 (ml), test pressure P t0= 400 (Pa)
ing. In this graph, in the same work 13
When the leak gap count C is changed, the leak gap coefficient C becomes
When it is small, the generated differential pressure is close to the linear characteristic
However, when the leak gap coefficient C increases, the generated differential pressure becomes parabolic.
It changes linearly. In the present invention, the generated differential pressure is
Effective airtightness for parabolic specimens
It is a test.
【0024】なお、図6は、上述した数式の検証を行っ
たものであり、初期テスト圧がPt 0=400(Pa)
の場合の内容積の異なるワーク13においてリーク量
(発生差圧)を測定し、各ワークごとに時間t(s)に
対するリーク量の変化の実測値と理論値を比較可能にグ
ラフ上に示したものであり、本例においては、図に示す
ようにワーク13の内容積Vがそれぞれ524、76
7、1575(ml)の場合における発生差圧Paを実
測した実測値と、リーク隙間係数Cから計算した理論値
の比較を示したものである。測定した実測値におけるリ
ーク量と圧力変化の関係式を検討した結果、実測値は理
論値の線図にほぼ一致し、従って、上述した数式を用い
てリーク量を算出することができることが証明された。FIG. 6 is obtained by verifying the above-mentioned formula, and the initial test pressure is P t 0 = 400 (Pa).
In the case of (1), the leak amount (developed differential pressure) was measured for the works 13 having different internal volumes, and the measured value and the theoretical value of the change of the leak amount with respect to the time t (s) for each work were shown on a graph so as to be comparable. In this example, the internal volume V of the work 13 is 524 and 76, respectively, as shown in FIG.
7 shows a comparison between an actually measured value of the generated differential pressure Pa in the case of 7, 1575 (ml) and a theoretical value calculated from the leak gap coefficient C. As a result of examining the relational expression between the leak amount and the pressure change in the measured actual value, it was proved that the actual measured value almost coincided with the theoretical value diagram, and therefore, the leak amount could be calculated using the above-described formula. Was.
【0025】次に、算出されたリーク隙間係数C、及び
テスト圧Pを式(3)に代入して、リーク量Qaを算出
する。このように、確定した差圧値ΔP(t)を用い
て、演算手段9によって算出されたリーク量Qaは、リ
ーク量判定手段10によって記憶手段2に記憶されてい
る基準値であるリーク量判定値と比較され、「実際の算
出リーク量≦リーク量判定値」である場合にはワーク1
3は、所定の気密性を有していると判断され、表示手段
8において合格である旨の表示内容が表示される。Next, the leak amount Qa is calculated by substituting the calculated leak gap coefficient C and test pressure P into equation (3). As described above, using the determined differential pressure value ΔP (t) , the leak amount Qa calculated by the calculating means 9 is determined by the leak amount determining means 10 as the leak amount determination reference value stored in the storage means 2. Is compared with the value, and when “the actual calculated leak amount ≦ the leak amount determination value”, the work 1
3 is determined to have the predetermined airtightness, and the display means 8 displays a display content indicating that the airtightness has passed.
【0026】また、「実際の算出リーク量>リーク量判
定値」である場合には、ワーク13は、所定の気密性を
有していないと判断され、表示手段8には不合格である
旨の表示内容が表示される。If "actual calculated leak amount> leak amount determination value", it is determined that the work 13 does not have the predetermined airtightness, and the display means 8 is rejected. Is displayed.
【0027】更に、次のワーク13について気密性試験
を行う場合には、バルブ4a、4bを開くと共に、バル
ブ4cを開状態になるように操作してマスタ12、ワー
ク13間に内封されている圧力を大気に排気した後に、
ワーク13を取り外し、新規に測定するワーク13を取
付け、同様に差圧値の測定を行う。Further, when performing an airtightness test on the next work 13, the valves 4 a and 4 b are opened, and the valve 4 c is operated so as to be in an open state. After venting the pressure to atmosphere,
The work 13 is removed, a work 13 to be newly measured is attached, and the differential pressure value is measured in the same manner.
【0028】図7は、式(5)をグラフ化したものであ
り、初期テスト圧をPt0=400(Pa)とし、差圧
測定時間をt=10(s)とした時の発生差圧とリーク
隙間係数Cとの関係を示したものである。リーク隙間係
数Cは、供試品固有の値であるから、具体的なリーク量
を算出しなくとも、供試品の気密性の合否判定ができ
る。例えば、リーク量判定基準値、すなわちリーク隙間
係数基準値を1.82×10−8と設定した場合、サイ
ズ50Aの供試品において差圧実測値が約70(Pa)
であれば隙間係数Cの値は約1.0×10−8であるか
ら合格と判定する。一方、得られた差圧が約220(P
a)であれば隙間係数Cの値は約4×10 −8であり、
不合格と判定する。FIG. 7 is a graph of equation (5).
The initial test pressure to Pt0= 400 (Pa) and differential pressure
Differential pressure and leak when measuring time is t = 10 (s)
This shows the relationship with the gap coefficient C. Leak gap clerk
Since the number C is a value specific to the sample, the specific leak amount
The pass / fail judgment of the test sample can be performed without calculating
You. For example, a leak amount determination reference value, that is, a leak gap
The coefficient reference value is 1.82 × 10-8If you set
The actual differential pressure of a 50A test sample is about 70 (Pa).
Then, the value of the gap coefficient C is about 1.0 × 10-8Is
Is judged as pass. On the other hand, the obtained differential pressure is about 220 (P
In the case of a), the value of the gap coefficient C is about 4 × 10 -8And
Judge as unacceptable.
【0029】図8は、図7を基に発生差圧とリーク量と
の関係を示したものである。なお、このグラフは圧力供
給時において常時400(Pa)を加えた時のものであ
る。あらかじめリーク量判定基準値を0.05(ml/
s)と設定した場合、サイズ50Aの供試品において差
圧実測値が約100(Pa)であればリーク量は約0.
04(ml/s)であるから、合格と判定する。一方、
得られた差圧が約210(Pa)であれば、リーク量は
約0.1(ml/s)であり、不合格と判定する。FIG. 8 shows the relationship between the generated differential pressure and the leak amount based on FIG. This graph is obtained when 400 (Pa) is constantly applied during pressure supply. In advance, set the leak amount determination reference value to 0.05 (ml /
s), if the measured differential pressure value is about 100 (Pa) in a sample of size 50A, the leak amount is about 0.
Since it is 04 (ml / s), it is determined to be acceptable. on the other hand,
If the obtained differential pressure is about 210 (Pa), the leak amount is about 0.1 (ml / s), and it is determined to be unacceptable.
【0030】なお、供試品が通気弁である場合、サイズ
によって内容積値が異なるが、内容積値が異なっても、
リーク量Qaとリーク隙間係数Cとは、図9に示すよう
なリニア関係にあり、リーク隙間係数Cよりリーク量Q
aを容易に算出することができる。また、発生差圧と、
前述のリーク隙間係数Cとワーク内容積値の比率C/V
との関係をグラフに示すと、内容積値が異なっても、図
10に示すような一定の関係を示し、差圧からリーク隙
間係数Cが逆算できることを裏付けている。図9、10
は、初期テスト圧Pt0=400(Pa)のものであ
り、図10における差圧値は、10秒経過後のものであ
る。When the sample is a vent valve, the internal volume differs depending on the size.
The leak amount Qa and the leak gap coefficient C have a linear relationship as shown in FIG.
a can be easily calculated. Also, the generated differential pressure,
The ratio C / V of the aforementioned leak gap coefficient C to the volume value in the work
The graph shows a constant relationship as shown in FIG. 10 even if the internal volume value is different, which confirms that the leak gap coefficient C can be calculated back from the differential pressure. 9 and 10
Is an initial test pressure P t0 = 400 (Pa), and the differential pressure value in FIG. 10 is a value after a lapse of 10 seconds.
【0031】このように、本発明においては、発生差圧
のデータより対象となるワーク13がもつ固有の隙間に
関するリーク隙間係数Cを求めることができ、この係数
Cから一定圧力を供給した時の時間当たりの一定リーク
量を求めて、判定基準との比較を行うことができる。本
発明においては、あらかじめ検出した発生差圧からリー
ク隙間係数Cの値を特定することができるので、このリ
ーク隙間係数Cを利用してほぼ正確なリーク量Qaをも
とめることができる。As described above, in the present invention, the leak gap coefficient C relating to the inherent gap of the target work 13 can be obtained from the generated differential pressure data. It is possible to obtain a constant leak amount per time and compare it with a criterion. In the present invention, since the value of the leak gap coefficient C can be specified from the generated differential pressure detected in advance, a substantially accurate leak amount Qa can be obtained using the leak gap coefficient C.
【0032】また、他の発明は、検出時間における発生
差圧データから、テスト圧変化を考慮しつつ、対象供試
品固有のリークする隙間に関する係数を求め、この係数
から、一定圧力供給時の時間当たりの一定リーク量を求
めて判断基準との比較を行うことにより微圧条件下で気
密性能の試験を行うようにしたものである。これは、図
5を用いて説明すると、例えば時間t=20(s)の時
の発生差圧ΔP(t=20)の値が実測により得られれ
ば、式(5)に基づき、リーク隙間係数Cを一義的に求
められ、この係数Cを用いて判断基準との比較を行うこ
とを意味している。Further, another invention obtains a coefficient relating to a leak gap specific to a target test sample from the generated differential pressure data at the detection time while taking into account the change in test pressure, and from this coefficient, a constant pressure supply when a constant pressure is supplied. The airtightness test is performed under a slight pressure condition by obtaining a constant amount of leak per time and comparing it with a criterion. This will be described with reference to FIG. 5. For example, if the value of the generated differential pressure ΔP (t = 20) at the time t = 20 (s) is obtained by actual measurement, the leak gap coefficient is calculated based on Expression (5). This means that C is unambiguously determined, and a comparison with a criterion is performed using this coefficient C.
【0033】なお、本実施形態以外にも、エアリークテ
スタ15自体に演算機能を設けることにより、テスト
圧、内容積データ、及び検出時間等の設定条件が変更と
なった場合においても即座に対応できる。また、図7、
図8のグラフを数値としてあらかじめ演算手段9に入力
しておいてもよい。In addition to the present embodiment, by providing the air leak tester 15 with an arithmetic function, even if the setting conditions such as the test pressure, the internal volume data, and the detection time are changed, it is possible to immediately respond. . Also, FIG.
The graph in FIG. 8 may be input as a numerical value to the calculating means 9 in advance.
【0034】[0034]
【発明の効果】以上のことから明らかなように、本発明
によると、微圧条件下において漏れ量が大きくなりテス
ト圧が大きく降下するような場合でも正確な気密性能試
験を行うことが可能であり、特に、通気弁の気密性能試
験には好適であり、発生差圧からリーク隙間係数をもと
めることによってリーク量が算出できるので、例えば、
内容積、検出時間、テスト圧等の設定条件が変わったと
しても迅速に試験結果を得ることのできる気密性能測定
方法である。As is clear from the above, according to the present invention, it is possible to perform an accurate airtightness test even when the amount of leakage increases under a small pressure condition and the test pressure drops significantly. Yes, it is particularly suitable for the airtightness test of the ventilation valve, and the leak amount can be calculated by obtaining the leak gap coefficient from the generated differential pressure.
This is a method for measuring airtight performance that can quickly obtain test results even when setting conditions such as the internal volume, detection time, and test pressure change.
【図1】本発明における気密性能試験装置の構成を示し
た概略図である。FIG. 1 is a schematic diagram showing a configuration of an airtight performance test apparatus according to the present invention.
【図2】本発明の気密性能試験のシステム構成を示す説
明図である。FIG. 2 is an explanatory diagram showing a system configuration of an airtightness test of the present invention.
【図3】本発明の気密性能試験の作業工程を示したフロ
ーチャートである。FIG. 3 is a flowchart showing the working steps of the airtightness test of the present invention.
【図4】本発明の気密性能試験の作業工程を示したフロ
ーチャートである。FIG. 4 is a flowchart showing the working steps of an airtightness test according to the present invention.
【図5】理論式における任意のリーク隙間係数Cの発生
差圧変化を示したグラフである。FIG. 5 is a graph showing a change in generated differential pressure of an arbitrary leak gap coefficient C in a theoretical formula.
【図6】内容積の異なるワークの発生差圧変化実測値と
理論上の線図を示すグラフである。FIG. 6 is a graph showing measured values of change in generated differential pressure of works having different internal volumes and theoretical diagrams.
【図7】発生差圧からリーク隙間係数を換算した際にこ
れらの関係を示したグラフである。FIG. 7 is a graph showing these relationships when a leak gap coefficient is converted from a generated differential pressure.
【図8】発生差圧からリーク量を換算した際にこれらの
関係を示したグラフである。FIG. 8 is a graph showing these relationships when the leak amount is converted from the generated differential pressure.
【図9】一定圧力供給時のリーク量とリーク隙間係数と
の関係を示したグラフである。FIG. 9 is a graph showing a relationship between a leak amount and a leak gap coefficient when a constant pressure is supplied.
【図10】発生差圧とリーク隙間係数/内容積との関係
を示したグラフである。FIG. 10 is a graph showing a relationship between a generated differential pressure and a leak gap coefficient / internal volume.
【図11】本発明において試験を行う通気弁(供試品)
の一例を示す半截断面図である。FIG. 11 is a vent valve for testing in the present invention (sample).
FIG. 3 is a half sectional view showing one example.
13 供試品(ワーク) 15 エアリークテスタ C リーク隙間係数 Qa リーク量 ΔPt 差圧値 Pt0 初期テスト圧13 Sample (workpiece) 15 Air leak tester C Leak gap coefficient Qa Leakage ΔP t Differential pressure value P t0 Initial test pressure
Claims (5)
変移データから、対象供試品固有のリークする隙間に関
する係数を求め、この係数を用いて気密性能の試験を行
うようにしたことを特徴とする気密性試験方法。1. A coefficient relating to a leak gap specific to a target specimen is obtained from time change data of a generated differential pressure in consideration of a change in test pressure, and a test of airtightness is performed using the coefficient. Characteristic airtightness test method.
テスト圧変化を考慮した対象供試品固有のリークする隙
間に関する係数を求め、この係数を用いて気密性能の試
験を行うようにしたことを特徴とする気密性能試験方
法。2. From the generated differential pressure data at the detection time,
An airtightness test method characterized in that a coefficient relating to a leak gap inherent to a target sample in consideration of a change in test pressure is obtained, and a test of airtightness is performed using the coefficient.
間当たり一定リーク量を求めて判断基準との比較を行う
ようにしたことを特徴とする請求項1又は2に記載の気
密性能試験方法。3. The airtightness test method according to claim 1, wherein a constant leakage amount per unit time at the time of supplying a constant pressure is obtained from the coefficient and compared with a criterion. .
における発生差圧データが、内圧検出方式における内圧
降下の差圧データである請求項1又は2に記載の気密性
能試験方法。4. The airtightness test method according to claim 1, wherein the time difference data of the generated differential pressure or the generated differential pressure data at the detection time is differential pressure data of an internal pressure drop in an internal pressure detection method.
における発生差圧データが、外圧検出方式における容器
内上昇圧の差圧データである請求項1又は2に記載の気
密性能試験方法。5. The airtightness test method according to claim 1, wherein the time difference data of the generated differential pressure or the generated differential pressure data at the detection time is differential pressure data of an in-vessel rising pressure in an external pressure detection method.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001106683A JP3715543B2 (en) | 2001-04-05 | 2001-04-05 | Airtight performance test method |
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|---|---|
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| CN117782439A (en) * | 2024-02-23 | 2024-03-29 | 潍柴动力股份有限公司 | Air tightness test method and test production line |
| CN118408696A (en) * | 2024-07-02 | 2024-07-30 | 南通华隆微电子股份有限公司 | Semiconductor package air tightness detection method |
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