JP2002371954A - Fluid transferring method, and fluid transferring device for micro fluid element - Google Patents
Fluid transferring method, and fluid transferring device for micro fluid elementInfo
- Publication number
- JP2002371954A JP2002371954A JP2001177021A JP2001177021A JP2002371954A JP 2002371954 A JP2002371954 A JP 2002371954A JP 2001177021 A JP2001177021 A JP 2001177021A JP 2001177021 A JP2001177021 A JP 2001177021A JP 2002371954 A JP2002371954 A JP 2002371954A
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- Prior art keywords
- fluid
- flow path
- magnetic
- microfluidic device
- capillary
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- 239000012530 fluid Substances 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 40
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 54
- 230000007246 mechanism Effects 0.000 claims abstract description 39
- 230000005291 magnetic effect Effects 0.000 claims abstract description 25
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- 238000004519 manufacturing process Methods 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 6
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- 238000006243 chemical reaction Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
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- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
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- RBTBFTRPCNLSDE-UHFFFAOYSA-N 3,7-bis(dimethylamino)phenothiazin-5-ium Chemical compound C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 RBTBFTRPCNLSDE-UHFFFAOYSA-N 0.000 description 2
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
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- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000000502 dialysis Methods 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
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- 238000005370 electroosmosis Methods 0.000 description 2
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- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 1
- GMAPHLQQWWDCHP-UHFFFAOYSA-N (4-methyl-1-phenylpent-1-enyl)benzene Chemical compound C=1C=CC=CC=1C(=CCC(C)C)C1=CC=CC=C1 GMAPHLQQWWDCHP-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
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- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
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- 238000001962 electrophoresis Methods 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000001900 immune effect Effects 0.000 description 1
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Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Sampling And Sample Adjustment (AREA)
- Micromachines (AREA)
- Electromagnetic Pumps, Or The Like (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、マイクロ流体素子
中に形成された毛細管状の流路中を流体を移送する方法
に関し、磁性流体を用いることによって、非接触で簡便
に移送すべき対象流体(以後、移送対象流体と称する)
を移送する方法に関する。本発明はまた、本発明の流体
移送方法によってマイクロ流体素子中で流体を移送する
ことの出来るマイクロ流体素子の流体移送装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for transferring a fluid through a capillary channel formed in a microfluidic device. (Hereafter referred to as transfer target fluid)
And a method for transferring the same. The present invention also relates to a fluid transfer device for a microfluidic device capable of transferring a fluid in a microfluidic device by the fluid transfer method of the present invention.
【0002】本発明は、例えば微小ケミカルデバイス、
即ち、微小な流路、反応槽などの構造が形成された、化
学・生化学反応用微小デバイス(マイクロ・リアクタ
ー);膜濾過デバイス、透析デバイス、脱気・吸気デバ
イス、抽出デバイスなどの化学的・物理化学的処理デバ
イス;DNA分析デバイス、免疫分析デバイス、電気泳
動デバイス、クロマトグラフィー、ガス分析デバイス、
水質分析デバイスなどの微小分析デバイスに使用でき
る。本発明は又、例えばDNAチップなどのマイクロア
レイ製造用のノズルやそれを組み込んだ装置に利用でき
る。The present invention relates to, for example, microchemical devices,
That is, micro devices for chemical and biochemical reactions (micro-reactors) in which structures such as micro channels and reaction vessels are formed; chemical devices such as membrane filtration devices, dialysis devices, degassing / aspiration devices, and extraction devices・ Physicochemical processing device; DNA analysis device, immunoanalysis device, electrophoresis device, chromatography, gas analysis device,
It can be used for microanalysis devices such as water quality analysis devices. The present invention can also be applied to a nozzle for manufacturing a microarray such as a DNA chip and an apparatus incorporating the nozzle.
【0003】[0003]
【従来の技術】マイクロ流体素子中に形成された毛細管
状の流路に流体を流す方法として、圧力差による方法
と、流体が水系液体の場合には電気浸透流による方法が
知られている。しかし圧力差方式は加圧あるいは減圧す
るための配管を接続する必要があり、電気浸透流方式は
駆動電圧用の配線を接続する必要がある。2. Description of the Related Art As a method of flowing a fluid through a capillary channel formed in a microfluidic device, a method using a pressure difference and a method using an electroosmotic flow when the fluid is an aqueous liquid are known. However, in the pressure difference method, it is necessary to connect a pipe for increasing or decreasing the pressure, and in the electroosmotic flow method, it is necessary to connect a wiring for driving voltage.
【0004】そのため、毛細管が形成されたマイクロ流
体素子が微小なデバイスである場合には、配管や配線を
接続するための構造形成が困難であったり、接続するた
めにデバイスに強度を持たせる必要があったり、そのた
めにデバイスの寸法を小さくすることが困難になるなど
の不都合があった。また、超多数並列処理が困難である
という不都合があった。[0004] Therefore, when the microfluidic device in which the capillary is formed is a minute device, it is difficult to form a structure for connecting pipes and wiring, or the device needs to have strength for connection. And it is difficult to reduce the size of the device. In addition, there is an inconvenience that a very large number of parallel processes are difficult.
【0005】[0005]
【発明が解決しようとする課題】本発明が解決しようと
する課題は、配管や配線の接続を必要とせず、非接触で
毛細管中の流体を簡便に移送する方法、及び該移送方法
を用いたマイクロ流体素子の流体移送装置を提供するこ
とにある。An object of the present invention is to provide a method for easily transferring a fluid in a capillary without contacting pipes and wirings, and using the transfer method. An object of the present invention is to provide a fluid transfer device for a microfluidic device.
【0006】[0006]
【課題を解決するための手段】本発明者は、上記の課題
を解決すべく鋭意研究を重ねた結果、磁性流体を毛細管
状の流路に充填し、これを磁気により移動させること
で、該磁性流体の移動を駆動力として、毛細管状の流路
内の移送対象流体を移動させることが可能であることを
見いだし、本発明を完成するに至った。Means for Solving the Problems As a result of intensive studies to solve the above-mentioned problems, the present inventor has filled a capillary channel with a magnetic fluid and moved it by magnetism. The inventors have found that it is possible to move the fluid to be transferred in the capillary channel using the movement of the magnetic fluid as a driving force, and have completed the present invention.
【0007】即ち、本発明は、毛細管状の流路に磁性流
体を導入して、磁性流体が流路の断面全体を占める部分
が存在する状態とし、流路外部から磁気を与えることに
より磁性流体を流路方向に移動させ、これを駆動力とし
て、移送すべき対象流体を該毛細管状の流路中を移送さ
せることを特徴とする流体移送方法を提供する。That is, according to the present invention, a magnetic fluid is introduced into a capillary channel so that the magnetic fluid has a portion occupying the entire cross-section of the channel, and magnetism is applied from outside the channel to provide a magnetic fluid. A fluid to be transferred, which is moved in the capillary channel by using this as a driving force.
【0008】また本発明は、該流体移送方法を用いた、
マイクロ流体素子の流体移送装置、より具体的には、
(1)磁石、(2){磁石もしくは磁力線を毛細管の流
路方向に沿って移動させ得る機構、及び/又は、磁力線
の強度を変化させ得る機構}、及び(3)マイクロ流体
素子を保持する機構とを有する、マイクロ流体素子の流
体移送装置を提供する。[0008] The present invention also provides a method using the fluid transfer method,
Microfluidic device fluid transfer device, more specifically
(1) a magnet, (2) {a mechanism capable of moving a magnet or a line of magnetic force along the flow path of a capillary, and / or a mechanism capable of changing the intensity of a line of magnetic force}, and (3) holding a microfluidic device A fluid transfer device for a microfluidic device having a mechanism.
【0009】[0009]
【発明の実施の形態】本発明で言うマイクロ流体素子
は、内部に毛細管状の流路(以下、「毛細管状の流路」
を、単に「流路」と称する場合がある)を有するもので
ある。本発明で言う流路は、その中を或いはそれを経て
流体を移動させる空洞を言い、単なる移送用の流路の
他、反応流路、検出用流路、抽出その他の処理流路、バ
ルブやポンプ部の空洞等であり得る。流路内を移送させ
る移送対象流体は任意であり、液体、気体、超臨界流体
であり得る。勿論、流体は溶液や分散流体であり得る。BEST MODE FOR CARRYING OUT THE INVENTION A microfluidic device referred to in the present invention has a capillary channel inside (hereinafter referred to as a "capillary channel").
May be simply referred to as a “flow path”). The flow path referred to in the present invention refers to a cavity for moving a fluid in or through the flow path.In addition to a simple transfer flow path, a reaction flow path, a detection flow path, an extraction or other processing flow path, a valve, It may be a cavity of a pump section or the like. The transfer target fluid to be transferred in the flow path is arbitrary, and may be a liquid, a gas, or a supercritical fluid. Of course, the fluid can be a solution or a dispersion fluid.
【0010】流路の形状は任意である。流路の長さ方向
の形状は、例えば、直線、曲線、渦巻き、ジグザグ、そ
の他の線状;樹枝状、櫛型、放射状、網状などの分岐
状;円形や矩形などの面状;バルブ機構や膜分離機構な
どの機構の一部となる構造、これらの連結された形状、
等であり得る。流路はマイクロ流体素子の外部に開口し
ていても良く、配管や他のデバイスと接続されていても
良く、外部に開口せずに、マイクロ流体素子内に設けら
れた機構、例えば貯液槽や廃液溜め等に連絡していても
良い。[0010] The shape of the flow path is arbitrary. The shape in the length direction of the flow path is, for example, a straight line, a curve, a spiral, a zigzag, or another linear shape; a branch shape such as a dendritic shape, a comb shape, a radial shape, a mesh shape; a planar shape such as a circular or rectangular shape; Structures that become part of mechanisms such as membrane separation mechanisms, their connected shapes,
And so on. The channel may be open to the outside of the microfluidic device, may be connected to a pipe or another device, without opening to the outside, a mechanism provided in the microfluidic device, for example, a liquid storage tank Or to a waste liquid reservoir or the like.
【0011】流路の断面形状は任意であり、矩形(角の
丸められた矩形を含む)、台形、円形、半円形、スリッ
ト状、その他の複雑な形状であり得る。流路の断面寸法
は、幅と高さがそれぞれ好ましくは3μm〜3mm、更
に好ましくは10μm〜1mmである。また、断面積
は、好ましくは5×10−11m2〜5×10
−6m2、更に好ましくは1×10−10m2〜1×1
0−6m2であり、最も好ましくは1×10−10m2
〜1×10−7m2である。The cross-sectional shape of the channel is arbitrary, and may be rectangular (including a rounded rectangle), trapezoidal, circular, semi-circular, slit-like, or any other complicated shape. As for the cross-sectional dimension of the flow channel, the width and the height are each preferably 3 μm to 3 mm, more preferably 10 μm to 1 mm. Also, the cross-sectional area is preferably 5 × 10 −11 m 2 to 5 × 10
−6 m 2 , more preferably 1 × 10 −10 m 2 to 1 × 1
0 −6 m 2 , most preferably 1 × 10 −10 m 2
11 × 10 −7 m 2 .
【0012】これらの寸法未満では流体の移送が困難と
なる。また、これらの寸法を超えると駆動力が低下する
か、移送不能となる。なお、上記の断面形状や断面寸法
は、磁性流体が充填される部分の形状、寸法であり、そ
の他の部分、例えば移相すべき流体の通過する部分につ
いては任意であるが、上記と同様の寸法であることが好
ましい。[0012] If the size is smaller than these dimensions, the transfer of the fluid becomes difficult. In addition, when these dimensions are exceeded, the driving force is reduced or the transfer becomes impossible. The above cross-sectional shape and cross-sectional dimensions are the shape and dimensions of the portion to be filled with the magnetic fluid, and other portions, for example, the portion through which the fluid to be phase-shifted passes are arbitrary, but are the same as above. Preferably, it is a dimension.
【0013】本発明に用いる磁性流体は、強磁性を示す
液状物であり、具体的には酸化鉄などの強磁性固体の粉
末を安定的に液体中に分散した液状物である。この場合
の強磁性固体や分散媒は任意であり、流路が形成された
マイクロ流体素子の素材に応じて選択できる。例えば強
磁性固体は流路を閉塞しない粒径のものを選択して使用
できるし、分散媒はマイクロ流体素子を犯さない種類の
ものを選択して使用できる。The magnetic fluid used in the present invention is a liquid material exhibiting ferromagnetism, specifically, a liquid material in which powder of a ferromagnetic solid such as iron oxide is stably dispersed in the liquid. In this case, the ferromagnetic solid and the dispersion medium are arbitrary, and can be selected according to the material of the microfluidic device in which the flow path is formed. For example, a ferromagnetic solid having a particle size that does not block the flow path can be selected and used, and a dispersion medium having a particle size that does not violate the microfluidic device can be selected and used.
【0014】磁性流体の粘度は、流路の断面積や移送速
度によって好適なものを選択できる。例えば100〜1
0000mPa/sのものを好ましく用いることが出来
る。流路断面積が小さい場合には低粘度のものが好まし
く、流路断面積が大きい場合には高粘度のものが好まし
い。The suitable viscosity of the magnetic fluid can be selected according to the cross-sectional area of the flow path and the transfer speed. For example, 100-1
0000 mPa / s can be preferably used. When the flow path cross-sectional area is small, a low viscosity one is preferable, and when the flow path cross-sectional area is large, a high viscosity one is preferable.
【0015】本発明の方法に於いては、磁性流体を流路
に充填する。この際、磁性流体は、流路の少なくとも一
部に於いて流路の断面を完全に塞ぐように充填する必要
があるが、通常は特別な細工をしなくてもこの状態が実
現される。また、磁性流体は、流路の長さ方向に於いて
流路の一部に充填し、流路の残りの部分には移送対象流
体を充填する。In the method of the present invention, a magnetic fluid is filled in a flow channel. At this time, it is necessary to fill the magnetic fluid so as to completely block the cross section of the flow channel in at least a part of the flow channel, but this state is usually realized without special work. The magnetic fluid fills a part of the flow path in the length direction of the flow path, and fills the remaining part of the flow path with the fluid to be transferred.
【0016】この時、用いる磁性流体の全量が流路内に
充填されてもよいし、磁性流体の一部が流路内に充填さ
れていても良い。後者の場合、残量はマイクロ流体素子
外に存在していて、磁性流体の移動に伴い順次マイクロ
流体素子の流路中に導入されても良いし、磁性流体の移
動に伴い、順次マイクロ流体素子外へ流出しても良い。
勿論、流体移送の最初、最後、その他の一時期におい
て、磁性流体が流路中に無い状態であっても良い。At this time, the whole amount of the magnetic fluid to be used may be filled in the channel, or a part of the magnetic fluid may be filled in the channel. In the latter case, the remaining amount may exist outside the microfluidic device and may be sequentially introduced into the flow path of the microfluidic device with the movement of the magnetic fluid, or may be sequentially introduced with the movement of the magnetic fluid. May flow out.
Needless to say, the magnetic fluid may not be present in the flow path at the beginning, end, or another time of the fluid transfer.
【0017】流路には、移送すべき移送対象流体も充填
する。この時、移送対象流体の全量が流路内に充填され
てもよいし、その一部が流路内に充填され、残量は流路
が設けられたマイクロ流体素子外に存在しても良い。勿
論、流体移送の最初、最後、その他の一時期において、
移送対象流体が流路中に無い状態であっても良い。The flow path is also filled with a fluid to be transferred. At this time, the entire amount of the fluid to be transferred may be filled in the flow channel, or a part thereof may be filled in the flow channel, and the remaining amount may be outside the microfluidic device provided with the flow channel. . Of course, at the beginning of the fluid transfer, at the end, at other times,
The transfer target fluid may not be in the flow path.
【0018】移送対象流体と磁性流体の位置関係は、磁
性流体の移動が駆動力となって位相すべき流体が位相さ
れるものであれば任意であり、移送対象流体が磁性流体
により押されて移動する位置であっても、引かれて移動
する位置であっても、磁性流体に挟まれていても、逆に
磁性流体を挟んでいても良い。勿論、マイクロ流体素子
中に複数の移送対象流体の充填部分があって良いし、複
数の磁気流体充填部分があって良い。The positional relationship between the fluid to be transferred and the magnetic fluid is arbitrary as long as the fluid to be phased is phased by the movement of the magnetic fluid as the driving force, and the fluid to be transferred is pushed by the magnetic fluid. It may be a position where it moves, a position where it is pulled and moved, or may be sandwiched between magnetic fluids, or may be sandwiched between magnetic fluids. Needless to say, the microfluidic device may have a plurality of portions filled with the fluid to be transferred, or a plurality of magnetic fluid filled portions.
【0019】移送対象流体が、磁性流体と相溶する流体
である場合のように、磁性流体との接触を避ける必要が
ある場合や、移送対象流体の充填位置と磁性流体充填位
置とを離す必要がある場合などには、必要に応じて移送
対象流体と磁性流体との間に第3の流体(以下この流体
を「隔離用流体」と称する)を置いてもよい。隔離用流
体は任意であり、移送対象流体の種類によっても異なる
が、例えば空気、窒素、アルゴンなどの気体;水又は水
溶液;ミネラルオイル;シリコンオイル;水銀などが使
用できる。When it is necessary to avoid contact with the magnetic fluid, such as when the fluid to be transferred is a fluid compatible with the magnetic fluid, or when it is necessary to separate the filling position of the fluid to be transferred from the magnetic fluid filling position. In some cases, for example, a third fluid (hereinafter, this fluid is referred to as “separation fluid”) may be placed between the fluid to be transferred and the magnetic fluid. The sequestering fluid is optional, and varies depending on the type of the fluid to be transferred. For example, a gas such as air, nitrogen, or argon; water or an aqueous solution; mineral oil; silicone oil;
【0020】流路内に充填された磁性流体は、流路外か
ら磁気を与えることによって流路内を移動し、それにつ
れて、移送対象流体も移動する。流路外から磁気を与え
る方法は任意であり、例えば、電流により発生する磁気
(即ち、電磁石による磁気)や永久磁石による磁気であ
り得る。The magnetic fluid filled in the flow path moves in the flow path by applying magnetism from outside the flow path, and accordingly, the fluid to be transferred also moves. The method of applying magnetism from outside the flow path is arbitrary, and may be, for example, magnetism generated by electric current (that is, magnetism by an electromagnet) or magnetism by a permanent magnet.
【0021】また、磁性流体の移動を制御する方法とし
ては、電磁石や永久磁石と流路内の磁性流体の距離を変
化させる方法;電磁石や永久磁石を磁性流体との距離を
ほぼ一定に保ったまま流路に沿って移動させる方法(逆
に、流路やマイクロ流体素子を移動する方法を含む);
磁力線遮蔽構造や磁力線のショートパス構造を移動させ
る方法、電磁石の電流を変化させる方法;異なる位置の
電線に順次電流を流すなどの方法で、連続的又は離散的
に磁力線を移動させる方法などであってよい。As a method for controlling the movement of the magnetic fluid, a method of changing the distance between the electromagnet or the permanent magnet and the magnetic fluid in the flow path; the distance between the electromagnet or the permanent magnet and the magnetic fluid is kept almost constant. A method of moving along a flow path as it is (including a method of moving a flow path or a microfluidic device);
A method of moving the magnetic field lines, such as a method of moving the magnetic field line shielding structure or the short path structure of the magnetic field lines, and a method of changing the current of the electromagnet; May be.
【0022】これらの中で、電流により磁気を発生する
方法が、制御が容易で好ましく、また、マイクロ流体素
子と磁気発生器の相対位置を変化させる必要がない方
法、例えば、電磁石の電流を変化させる方法;異なる位
置の電線に順次電流を流すなどの方法で、連続的又は離
散的に磁力線を移動させる方法が好ましい。また、マイ
クロ流体素子がノズルであるような場合には、パルス状
の電流により移送すべき流体をパルス状に移動させるこ
とによって、移送対象流体をパルス状に吐出させること
も出来る。Among them, a method of generating magnetism by an electric current is preferred because it is easy to control, and a method that does not require changing the relative position between the microfluidic device and the magnetic generator, for example, changing the current of the electromagnet A method of moving magnetic field lines continuously or discretely by, for example, passing a current through wires at different positions sequentially. If the microfluidic device is a nozzle, the fluid to be transferred can be pulsed by moving the fluid to be transferred in a pulsed manner with a pulsed current.
【0023】移送対象流体の移送は、通常、回分的であ
り、1回の移送は、例えば磁性流体が流路の出口等の最
もポテンシャルの低い位置に至ると終了するが、新たな
磁性流体を次々と流路に導入する方法や、例えばバルブ
や弁を使用して磁性流体を元の位置に戻す方法により、
連続的に流体を移送することも出来る。The transfer of the fluid to be transferred is usually batchwise, and one transfer ends when the magnetic fluid reaches a position with the lowest potential, such as the outlet of the flow path. By a method of successively introducing into the flow path, or a method of returning the magnetic fluid to the original position using, for example, a valve or a valve,
The fluid can be transferred continuously.
【0024】また、磁性流体が流路出口から流出するこ
とを避けるためのトラップの設置、磁性流体と移送対象
流体の分離機構、磁性流体をマイクロ流体素子内で往復
させて何度も使用するための帰還回路や弁の設置、など
の機構を設けることも可能である。電磁石をマイクロ流
体素子内に設置することも可能であるが、マイクロ流体
素子に電線を接続する必要が生じる。Also, a trap is provided to prevent the magnetic fluid from flowing out of the outlet of the flow path, a separating mechanism of the magnetic fluid and the fluid to be transferred is used, and the magnetic fluid is reciprocated in the microfluidic element and used repeatedly. It is also possible to provide a mechanism such as the installation of a feedback circuit and a valve. Although it is possible to install the electromagnet in the microfluidic device, it is necessary to connect an electric wire to the microfluidic device.
【0025】マイクロ流体素子の形状は任意であり、用
途、目的に応じた形状とすることが出来る。例えば、塊
状、板状、シート状(フィルム状、リボン状、ベルト状
を含む)、繊維状(中空繊維状)等であり得るし、これ
らの複合構造、例えば、移送対象流体の充填部が板状で
あり、磁性流体の充填部が中空糸状である構造などであ
り得る。マイクロ流体素子が微小ケミカルデバイスであ
る場合には、板状又はシート状であることが好ましい。The shape of the microfluidic device is arbitrary, and can be formed according to the application and purpose. For example, it may be in the form of a lump, a plate, a sheet (including a film, a ribbon, and a belt), a fiber (a hollow fiber), or the like. And the magnetic fluid filling portion may be a hollow fiber. When the microfluidic device is a microchemical device, it is preferably plate-shaped or sheet-shaped.
【0026】また、流路は、凹部を有する部材とその表
面に密着されたカバーでもって形成されたもの、或い
は、少なくとも2つの部材に挟まれた層の欠損部で形成
されたものであることが好ましい。The flow path is formed by a member having a concave portion and a cover adhered to the surface thereof, or is formed by a defective portion of a layer sandwiched between at least two members. Is preferred.
【0027】本発明のマイクロ流体素子の流体移送装置
は、本発明の液体移送方法を用いてマイクロ流体素子中
の流路に流体を移送させる装置であり、より具体的に
は、(1)磁石、(2){磁石もしくは磁力線を毛細管
の流路方向に沿って移動させ得る機構、及び/又は、磁
力線の強度を変化させ得る機構}、及び(3)前記
(1)の磁石が発生する磁力線でもって磁性流体を移動
させることの出来る位置にマイクロ流体素子を保持する
機構とを有する装置である。A fluid transfer device for a microfluidic device according to the present invention is a device for transferring a fluid to a flow path in a microfluidic device using the liquid transfer method according to the present invention. More specifically, (1) a magnet (2) {a mechanism capable of moving a magnet or a magnetic line of force along the flow path of the capillary tube and / or a mechanism capable of changing the intensity of the magnetic line of force}, and (3) a magnetic line of force generated by the magnet of (1). And a mechanism for holding the microfluidic element at a position where the magnetic fluid can be moved.
【0028】従って、単に磁石或いは磁力線発生装置を
有していても、例えばモーター用の永久磁石や電磁石の
ように、その磁力線でマイクロ流体素子の流路に充填さ
れた磁性流体を移動させることが出来ないものは本発明
の装置に含まない。磁石の種類、形状、寸法、位置など
は、これにより発生する磁気によってマイクロ流体素子
の流路に充填された磁性流体を駆動することが出来るも
のであれば任意であるが、電磁石であることが好まし
い。Therefore, even if it has a magnet or a line of magnetic force, it is possible to move the magnetic fluid filled in the flow path of the microfluidic device by the line of magnetic force, such as a permanent magnet or an electromagnet for a motor. Those which cannot be performed are not included in the apparatus of the present invention. The type, shape, size, position, etc. of the magnet are not limited as long as they can drive the magnetic fluid filled in the flow path of the microfluidic device by the generated magnetism, but may be an electromagnet. preferable.
【0029】本装置が有する磁石は単数であっても複数
であっても良い。磁石が複数である場合、複数の電磁石
が異なる電磁流体のまとまりをそれぞれ駆動するもので
あっても、1つの電磁流体のまとまりを複数の磁石で駆
動するものであっても良い。The magnet of this apparatus may be singular or plural. When there are a plurality of magnets, a plurality of electromagnets may each drive a group of different electromagnetic fluids, or a group of one electromagnetic fluid may be driven by a plurality of magnets.
【0030】磁力線を空間的に移動させる機構及び/又
は時間的に磁力線の強度を変化させる機構は、例えば、
磁石の移動機構、磁力線遮蔽機構の駆動機構、磁力線の
ショートパス機構の駆動機構であり得るし、磁石が電磁
石の場合には、電流開閉器、半導体スイッチ、トラン
ス、半導体による電流制御回路、複数の電磁石に順次電
流を供給する機構などであり得る。The mechanism for spatially moving the magnetic field lines and / or the mechanism for changing the intensity of the magnetic field lines temporally include, for example,
It may be a magnet moving mechanism, a magnetic field line shielding mechanism driving mechanism, a magnetic field line short path mechanism driving mechanism, or when the magnet is an electromagnet, a current switch, a semiconductor switch, a transformer, a semiconductor current control circuit, a plurality of It may be a mechanism for sequentially supplying current to the electromagnet.
【0031】ここで言う磁力線の強度変化は、磁力線の
有無の変化を含む。配列された複数の電磁石に順次電流
を流すことで、磁力線を移動させる電気回路であっても
良い。これらの機構はコンピューター制御等により、シ
ーケンス制御やフィードバック制御されても良い。ま
た、磁力線の制御機構は、電磁石やマイクロ流体素子保
持機構と分離された筐体に納められたものであっても良
い。The change in the intensity of the magnetic field lines referred to here includes a change in the presence or absence of the magnetic field lines. An electric circuit that moves magnetic lines of force by sequentially passing a current through a plurality of arranged electromagnets may be used. These mechanisms may be sequence-controlled or feedback-controlled by computer control or the like. Further, the control mechanism for the magnetic field lines may be housed in a housing separated from the electromagnet and the microfluidic element holding mechanism.
【0032】マイクロ流体素子を保持する機構は、磁石
により発生する磁気によってマイクロ流体素子の流路に
充填された磁性流体を移動することが出来る位置にマイ
クロ流体素子を保持するものであれば任意である。電磁
石との位置関係を再現性良く保持するものであることが
好ましい。保持する機構は、装置内の一定位置に固定す
るものであっても、装置内で移動できるものであっても
良い。本機構は、マイクロ流体素子の位置決め機構とバ
ネを有し、1操作でマイクロ流体素子を保持できるもの
が好ましい。The mechanism for holding the microfluidic device is arbitrary as long as it holds the microfluidic device at a position where the magnetic fluid filled in the flow path of the microfluidic device can be moved by magnetism generated by a magnet. is there. It is preferable to maintain the positional relationship with the electromagnet with good reproducibility. The holding mechanism may be fixed at a fixed position in the apparatus or movable in the apparatus. It is preferable that the mechanism has a positioning mechanism and a spring for the microfluidic device, and can hold the microfluidic device by one operation.
【0033】本発明のマイクロ流体素子の流体移送装置
は、マイクロ流体素子の使用目的に応じて、その他の機
構、例えば、温度調節機構、光学的その他の検出機構、
試料注入機構、バルブ機構、洗浄機構、等を有していて
も良い。The fluid transfer device for a microfluidic device according to the present invention has other mechanisms, such as a temperature control mechanism, an optical and other detection mechanism, depending on the purpose of use of the microfluidic device.
It may have a sample injection mechanism, a valve mechanism, a washing mechanism, and the like.
【0034】本発明のマイクロ流体素子の流体移送装置
は、例えば、マイクロリアクター、ピー・シー・アール
(PCR;ポリメラーゼ連鎖反応)装置などの反応装
置;膜濾過装置、透析装置、電気透析装置、気体分離装
置、気体溶解装置、抽出装置などの、化学分析の前処理
装置;遺伝子分析装置、免疫分析装置、ガス分析装置、
水質分析装置などの化学又は生化学分析装置;DNAチ
ップや免疫チップなどのマイクロアレイ製造用スポッタ
等に好ましく用いることができる。The fluid transfer device of the microfluidic device of the present invention includes, for example, a reaction device such as a microreactor, a PCR (polymerase chain reaction) device; a membrane filtration device, a dialysis device, an electrodialysis device, and a gas. Pretreatment equipment for chemical analysis, such as separation equipment, gas dissolution equipment, and extraction equipment; gene analysis equipment, immunological analysis equipment, gas analysis equipment,
It can be preferably used for a chemical or biochemical analyzer such as a water quality analyzer; a spotter for producing a microarray such as a DNA chip or an immune chip.
【0035】[0035]
【実施例】以下、実施例及び比較例を用いて本発明を更
に詳しく説明するが、本発明は、以下の実施例の範囲に
限定されるものではない。なお、以下の実施例及び比較
例における「部」は「重量部」である。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples. In the following examples and comparative examples, "parts" is "parts by weight".
【0036】[エネルギー線照射装置]200wメタル
ハライドランプが組み込まれたウシオ電機株式会社製の
マルチライト200型露光装置用光源ユニットを用い
た。紫外線強度は、記載の無い限り50mw/cm2で
ある。[Energy Beam Irradiation Apparatus] A light source unit for a multi-light 200 type exposure apparatus manufactured by Ushio Inc. incorporating a 200 w metal halide lamp was used. The UV intensity is 50 mw / cm 2 unless otherwise stated.
【0037】[粘度測定方法]山一電機(株)製のVM
−100A型振動式粘度計を用い、室温(24±2℃)
にて測定した。[Viscosity measuring method] VM manufactured by Yamaichi Electric Co., Ltd.
Room temperature (24 ± 2 ° C) using a -100A type viscometer
Was measured.
【0038】[製造例1] 〔エネルギー線硬化性組成物(i)の調製〕活性エネル
ギー線架橋重合性化合物として、平均分子量約2000
の3官能ウレタンアクリレートオリゴマー(大日本イン
キ化学工業株式会社製の「ユニディックV−426
3」)を60部、及び1,6−ヘキサンジオールジアク
リレート(第一工業製薬株式会社製の「ニューフロンテ
ィアHDDA」)を20部、ノニルフェノキシポリエチ
レングリコール(n=17)アクリレート(第一工業製
薬株式会社製の「N−177E」;両親媒性の単量体)
を20部、光重合開始剤として1−ヒドロキシシクロヘ
キシルフェニルケトン(チバガイギー社製の「イルガキ
ュア184」)を5部、及び重合遅延剤として2,4−
ジフェニル−4−メチル−1−ペンテン(関東化学株式
会社製)0.1部を均一に混合して組成物(i)を調製
した。[Production Example 1] [Preparation of energy ray-curable composition (i)] The active energy ray-crosslinkable polymerizable compound has an average molecular weight of about 2,000.
Trifunctional urethane acrylate oligomer ("Unidick V-426" manufactured by Dainippon Ink and Chemicals, Inc.)
3 "), 20 parts of 1,6-hexanediol diacrylate (" New Frontier HDDA "manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), and nonylphenoxypolyethylene glycol (n = 17) acrylate (Daiichi Kogyo Seiyaku) "N-177E" manufactured by Co., Ltd .; an amphipathic monomer)
, 20 parts of 1-hydroxycyclohexyl phenyl ketone (“Irgacure 184” manufactured by Ciba Geigy) as a photopolymerization initiator, and 2,4-
0.1 parts of diphenyl-4-methyl-1-pentene (manufactured by Kanto Chemical Co., Ltd.) was uniformly mixed to prepare composition (i).
【0039】〔マイクロ流体素子の作製〕基材(1)と
してポリスチレン(大日本インキ化学工業社製の「ディ
ックスチレン XC−520」)製の5cm×5cm×
1mmの板を用い、これに127μmのバーコーターを
用いて組成物(i)を塗布し、50mw/cm2の紫外
線を窒素雰囲気中で3秒間照射して、塗膜(2)を半硬
化させた。[Preparation of microfluidic device] 5 cm x 5 cm x polystyrene ("Dick Styrene XC-520" manufactured by Dainippon Ink and Chemicals, Inc.) was used as the substrate (1).
Using a 1 mm plate, the composition (i) was applied thereto using a 127 μm bar coater, and irradiated with 50 mw / cm 2 ultraviolet rays for 3 seconds in a nitrogen atmosphere to semi-cure the coating film (2). Was.
【0040】この半硬化塗膜(2)の上に、127μm
のバーコーターを用いて組成物(i)を塗布し、フォト
マスクを使用して、図1に示された、折りたたまれた形
状の流路(4)となる部分以外の部分に、50mw/c
m2の紫外線を窒素雰囲気で3秒間照射して、照射部分
の塗膜(3)を半硬化させた後、エタノールにて塗膜
(3)の未照射部の未硬化の組成物(i)を洗浄除去
し、図1に示された形状の、幅200μm、深さ140
m、長さ1.5m(流路断面積3×10−8m2、流路
の全容積4.5×10−8m3)の流路(4)となる樹
脂欠損部が形成された塗膜(3)を形成し、部材(A)
とした。On this semi-cured coating film (2), 127 μm
The composition (i) is applied using a bar coater of the type described above, and a photomask is used to apply 50 mw / c to a portion other than the portion that becomes the folded flow path (4) shown in FIG.
m 2 ultraviolet rays are irradiated in a nitrogen atmosphere for 3 seconds to semi-cure the irradiated portion of the coating (3), and then the uncured composition (i) of the unirradiated portion of the coating (3) with ethanol. Was washed away, and the shape shown in FIG.
m and a length of 1.5 m (flow channel cross-sectional area 3 × 10 −8 m 2 , total flow volume of the flow channel 4.5 × 10 −8 m 3 ), and a resin-deficient portion to be a flow channel (4) was formed. Forming a coating film (3) and forming a member (A)
And
【0041】カバー(6)としてポリスチレン(大日本
インキ化学工業社製の「ディックスチレン XC−52
0」)製の5cm×5cm×1mmの板を使用し、これ
に127μmのバーコーターを用いて、組成物(i)を
塗布し、上で用いたと同じ紫外線を窒素雰囲気中でフォ
トマスク無しで3秒間照射し、塗膜(5)を半硬化さ
せ、部材(B)とした。次いで、部材(B)の半硬化状
態の塗膜(5)を部材(A)の塗膜(3)と密着させ
て、紫外線を更に30秒間照射し、塗膜(3)の上に塗
膜(5)及びポリスチレン板製のカバー(6)を接着
し、塗膜(樹枝層)(3)の樹脂欠損部を毛細管状の流
路(4)と成した。As the cover (6), polystyrene (Dick Styrene XC-52 manufactured by Dainippon Ink and Chemicals, Inc.) was used.
0 "), a composition (i) was applied thereto using a 127 μm bar coater, and the same ultraviolet ray as used above was used in a nitrogen atmosphere without a photomask. The coating film (5) was semi-cured by irradiating for 3 seconds to obtain a member (B). Next, the coating film (5) in the semi-cured state of the member (B) is brought into close contact with the coating film (3) of the member (A), and is further irradiated with ultraviolet rays for 30 seconds to form a coating film on the coating film (3). (5) and a cover (6) made of a polystyrene plate were adhered, and the resin-deficient portion of the coating film (dendritic layer) (3) was formed as a capillary channel (4).
【0042】〔接続口の形成〕部材(B)の、流路
(4)の両端部に相当する位置に、3mmのドリルにて
それぞれ穴を穿ち、その部分に内径3mm、高さ5mm
のポリスチレン管を接着して、導入口(7)及び流出口
(8)を形成し、マイクロ流体素子を得た。[Formation of Connection Port] Holes are drilled in the member (B) at positions corresponding to both ends of the flow path (4) with a 3 mm drill, and the inside diameter is 3 mm and the height is 5 mm.
Was bonded to form an inlet (7) and an outlet (8) to obtain a microfluidic device.
【0043】[実施例1]製造例1で得られたマイクロ
流体素子の導入口(7)から20μl(2×10 −8m
3)のメチレンブルーで着色した蒸留水を流路(4)に
導入した。次いで、約1μl(1×10−9m3)の磁
性流体(リティルマネジメント社、粘度400mPa・
s)を導入口(7)から流路(4)に導入した。この
時、磁性流体と着色水は混合しなかった。永久磁石をマ
イクロ流体素子の外側から流路に沿って、導入口(7)
から流出口(8)まで移動させると、磁性流体は流路
(4)内を移動し、それに押されて着色水も移動して流
出口(8)から流出した。[Example 1] Micros obtained in Production Example 1
20 μl (2 × 10 5) from the inlet (7) of the fluidic element -8m
3) Of distilled water colored with methylene blue to channel (4)
Introduced. Then, about 1 μl (1 × 10-9m3) Magnetism
Fluid (Ritile Management, viscosity 400 mPa.
s) was introduced from the inlet (7) into the flow path (4). this
At that time, the magnetic fluid and the colored water were not mixed. Permanent magnet
Inlet (7) from outside the microfluidic device along the flow path
From the outlet to the outlet (8), the magnetic fluid
(4) It moves inside and the colored water is pushed by it and moves
Outflow from exit (8).
【0044】[実施例2]製造例1で得られたマイクロ
流体素子の導入口(7)から磁性流体(リティルマネジ
メント社、粘度400mPa・s)を導入して流路全体
に充填し、導入口(7)にメチレンブルーで着色した蒸
留水を置いた。電磁石をマイクロ流体素子の流出口
(8)に近づけて設置し、電流を流すと、磁性流体は流
路内を流出口(8)に向かって移動し、電流を切ると磁
性流体は停止した。この時、着色水も磁性流体に引かれ
て同様の動きを示した。また、電磁石に流す電流を変化
させることによって、磁性流体と着色水の移動速度を制
御することが可能であった。更に、電磁石に流す電流を
一定とした場合には、流路中の磁性流体残量が少なくな
ると流体移送速度が増加したが、電磁石に流す電流を制
御することにより、移送速度を一定にすることが出来
た。Example 2 A magnetic fluid (Ritile Management, viscosity 400 mPa · s) was introduced from the inlet (7) of the microfluidic device obtained in Production Example 1 and filled into the entire flow channel. In (7), distilled water colored with methylene blue was placed. When the electromagnet was placed close to the outlet (8) of the microfluidic device and a current was applied, the magnetic fluid moved in the flow path toward the outlet (8), and when the current was turned off, the magnetic fluid stopped. At this time, the colored water also was drawn by the magnetic fluid and showed a similar movement. Further, by changing the current flowing through the electromagnet, it was possible to control the moving speed of the magnetic fluid and the colored water. Furthermore, when the current flowing through the electromagnet was kept constant, the fluid transfer speed increased when the remaining amount of the magnetic fluid in the flow path became small.However, by controlling the current flowing through the electromagnet, the transfer speed should be kept constant. Was completed.
【0045】[0045]
【発明の効果】本発明の流体移送方法は、マイクロ流体
素子に送液のための配管や配線を接続する必要がないた
め、寸法的や強度的にこれらを接続することが困難な微
小なデバイスに適用することが可能であり、接続部を作
製する必要がないため、構造を単純化できる。また、減
圧条件や特殊ガス雰囲気、恒温又は低温条件などの、隔
離された雰囲気での使用が容易である。また、電流的に
磁気を制御することで、移送速度や駆動力の制御が容易
に行える。更に、例えば(生)化学合成用や(生)化学
分析用の微小ケミカルデバイスなどに適用した場合に、
超多数並列処理が容易であり、マイクロアレイ製造用ノ
ズルに適用した場合には、液体の吐出機構を単純化する
ことができる。According to the fluid transfer method of the present invention, since it is not necessary to connect a pipe or a wiring for liquid supply to the microfluidic device, it is difficult to connect these devices in terms of dimensions and strength. The structure can be simplified because it is not necessary to form a connection part. Further, it is easy to use in an isolated atmosphere such as a reduced pressure condition, a special gas atmosphere, and a constant temperature or low temperature condition. Further, by controlling the magnetism in terms of current, the transfer speed and the driving force can be easily controlled. Furthermore, for example, when applied to a microchemical device for (bio) chemical synthesis or (bio) chemical analysis,
Very large parallel processing is easy, and when applied to a microarray manufacturing nozzle, the liquid discharge mechanism can be simplified.
【図1】製造例1で作製し、実施例1と2で用いたマイ
クロ流体素子の平面図の模式図である。FIG. 1 is a schematic plan view of a microfluidic device manufactured in Production Example 1 and used in Examples 1 and 2.
【図2】製造例1で作製し、実施例1と2で用いたマイ
クロ流体素子の立面図の模式図である。FIG. 2 is a schematic view of an elevation view of a microfluidic device manufactured in Production Example 1 and used in Examples 1 and 2.
1:基材(ポリスチレン板) 2:塗膜、樹脂層 3:塗膜、樹脂層 4:流路 5:塗膜、樹脂層 6:カバー(ポリスチレン板) 7:導入口 8:流出口 1: base material (polystyrene plate) 2: coating film, resin layer 3: coating film, resin layer 4: flow path 5: coating film, resin layer 6: cover (polystyrene plate) 7: inlet 8: outlet
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G01N 37/00 101 G01N 37/00 101 Fターム(参考) 2G052 AA28 AB27 AD02 AD06 AD22 AD26 CA04 HC28 JA07 JA09 3H069 AA01 BB11 CC04 DD42 EE05 EE07 EE32 EE37 EE45 3H075 AA09 CC35 DB08 DB49 EE12 4G075 AA02 AA70 CA42 CA51 DA01 EB23 FB12 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) G01N 37/00 101 G01N 37/00 101 F term (Reference) 2G052 AA28 AB27 AD02 AD06 AD22 AD26 CA04 HC28 JA07 JA09 3H069 AA01 BB11 CC04 DD42 EE05 EE07 EE32 EE37 EE45 3H075 AA09 CC35 DB08 DB49 EE12 4G075 AA02 AA70 CA42 CA51 DA01 EB23 FB12
Claims (6)
磁性流体が流路の断面全体を占める部分が存在する状態
とし、流路外部から磁気を与えることにより磁性流体を
流路方向に移動させ、これを駆動力として、移送すべき
対象流体を該毛細管状の流路中を移送させることを特徴
とする流体移送方法。1. A magnetic fluid is introduced into a capillary channel,
A state where there is a portion where the magnetic fluid occupies the entire cross section of the flow path is present, and the magnetic fluid is moved in the flow path direction by applying magnetism from outside the flow path, and the target fluid to be transferred is used as a driving force by the capillary. A fluid transfer method, wherein the fluid is transferred in a flow path in a shape of a circle.
−12m2〜5×10−6m2である請求項1に記載の
流体移送方法。2. A capillary channel having a cross-sectional area of 5 × 10
The fluid transfer method according to claim 1, wherein the flow rate is −12 m 2 to 5 × 10 −6 m 2 .
る、請求項1又は2に記載の流体移送方法。3. The fluid transfer method according to claim 1, wherein the magnetism is provided by an electromagnet.
及び/又は、時間的にその強度が変化するものである、
請求項3に記載の流体移送方法。4. A method in which magnetism moves with time in magnetic field lines,
And / or whose intensity changes over time,
The fluid transfer method according to claim 3.
体移送方法を用いた、マイクロ流体素子の流体移送装
置。5. A fluid transfer device for a microfluidic device, using the fluid transfer method according to claim 1.
線を毛細管の流路方向に沿って移動させ得る機構、及び
/又は、磁力線の強度を変化させ得る機構}、及び
(3)マイクロ流体素子を保持する機構とを有する、マ
イクロ流体素子の流体移送装置。6. A mechanism for moving a magnet or a magnetic field line along a flow path of a capillary and / or a mechanism for changing the intensity of a magnetic field line, and (3) a micro unit. A fluid transfer device for a microfluidic device, comprising: a mechanism for holding a fluidic device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001177021A JP2002371954A (en) | 2001-06-12 | 2001-06-12 | Fluid transferring method, and fluid transferring device for micro fluid element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001177021A JP2002371954A (en) | 2001-06-12 | 2001-06-12 | Fluid transferring method, and fluid transferring device for micro fluid element |
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| Publication Number | Publication Date |
|---|---|
| JP2002371954A true JP2002371954A (en) | 2002-12-26 |
Family
ID=19017927
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001177021A Pending JP2002371954A (en) | 2001-06-12 | 2001-06-12 | Fluid transferring method, and fluid transferring device for micro fluid element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002371954A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004018350A1 (en) * | 2002-08-23 | 2004-03-04 | Yuichi Shibata | Method and apparatus for controlling minute amount of fluid |
| WO2005009605A1 (en) * | 2003-07-24 | 2005-02-03 | Ryoichi Aogaki | Microreactor including magnetic barrier |
| JP2005045891A (en) * | 2003-07-25 | 2005-02-17 | Yusaku Sakata | Fluid moving device |
| WO2006106885A1 (en) * | 2005-03-30 | 2006-10-12 | Nano Fusion Technologies, Inc. | Liquid-transport device and system |
| JP2009509741A (en) * | 2005-09-28 | 2009-03-12 | シーメンス アクチエンゲゼルシヤフト | Method for conducting a reaction in a micro reaction chamber |
| US8329027B2 (en) | 2006-12-06 | 2012-12-11 | Canon Kabushiki Kaisha | Treatment apparatus, solution stirring method and solution transfer method |
| CN119223684A (en) * | 2024-12-02 | 2024-12-31 | 合肥市远博给排水工程有限责任公司 | Integrated sewage sampling device and sewage treatment equipment |
-
2001
- 2001-06-12 JP JP2001177021A patent/JP2002371954A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004018350A1 (en) * | 2002-08-23 | 2004-03-04 | Yuichi Shibata | Method and apparatus for controlling minute amount of fluid |
| WO2005009605A1 (en) * | 2003-07-24 | 2005-02-03 | Ryoichi Aogaki | Microreactor including magnetic barrier |
| US7527741B2 (en) | 2003-07-24 | 2009-05-05 | Ryoichi Aogaki | Microreactor including magnetic barrier |
| JP2005045891A (en) * | 2003-07-25 | 2005-02-17 | Yusaku Sakata | Fluid moving device |
| WO2006106885A1 (en) * | 2005-03-30 | 2006-10-12 | Nano Fusion Technologies, Inc. | Liquid-transport device and system |
| JP2009509741A (en) * | 2005-09-28 | 2009-03-12 | シーメンス アクチエンゲゼルシヤフト | Method for conducting a reaction in a micro reaction chamber |
| US8329027B2 (en) | 2006-12-06 | 2012-12-11 | Canon Kabushiki Kaisha | Treatment apparatus, solution stirring method and solution transfer method |
| CN119223684A (en) * | 2024-12-02 | 2024-12-31 | 合肥市远博给排水工程有限责任公司 | Integrated sewage sampling device and sewage treatment equipment |
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