JP2002367445A - Outgas suppression wire / cable - Google Patents
Outgas suppression wire / cableInfo
- Publication number
- JP2002367445A JP2002367445A JP2001170887A JP2001170887A JP2002367445A JP 2002367445 A JP2002367445 A JP 2002367445A JP 2001170887 A JP2001170887 A JP 2001170887A JP 2001170887 A JP2001170887 A JP 2001170887A JP 2002367445 A JP2002367445 A JP 2002367445A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- outgas
- parts
- flame
- retardant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000001629 suppression Effects 0.000 title claims description 8
- 239000003063 flame retardant Substances 0.000 claims abstract description 26
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000011342 resin composition Substances 0.000 claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- 239000004020 conductor Substances 0.000 claims abstract description 6
- 229920005672 polyolefin resin Polymers 0.000 claims description 17
- 229910052736 halogen Inorganic materials 0.000 claims description 13
- 150000002367 halogens Chemical class 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 13
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 229920005989 resin Polymers 0.000 abstract description 8
- 239000011347 resin Substances 0.000 abstract description 8
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 6
- -1 flame-retardant olefin Chemical class 0.000 abstract description 5
- 150000001336 alkenes Chemical class 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 16
- 239000012212 insulator Substances 0.000 description 9
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 6
- 239000003963 antioxidant agent Substances 0.000 description 5
- 230000003078 antioxidant effect Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- JZZIHCLFHIXETF-UHFFFAOYSA-N dimethylsilicon Chemical compound C[Si]C JZZIHCLFHIXETF-UHFFFAOYSA-N 0.000 description 3
- 239000005038 ethylene vinyl acetate Substances 0.000 description 3
- 239000000314 lubricant Substances 0.000 description 3
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 3
- 150000003018 phosphorus compounds Chemical class 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 3
- 239000000779 smoke Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 229920006244 ethylene-ethyl acrylate Polymers 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000347 magnesium hydroxide Substances 0.000 description 2
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000005042 ethylene-ethyl acrylate Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-N o-dicarboxybenzene Natural products OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002903 organophosphorus compounds Chemical class 0.000 description 1
- 125000005498 phthalate group Chemical class 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000000341 volatile oil Substances 0.000 description 1
Landscapes
- Insulated Conductors (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
(57)【要約】
【課題】 特に半導体製造装置のクリーンルーム用設備
配線に好適であり、有機ガスなどのアウトガスの発生量
を抑えて汚染防止に有効で、半導体の製造効率を高める
ようにする。
【解決手段】 導体上に、オレフィン系樹脂１００重量
部をベースにして難燃化剤を４０〜２００重量部の範囲
で好ましくは８０重量部配合した難燃性オレフィン系樹
脂組成物を材料とする絶縁被覆を押出し成形してなって
いる電線・ケーブルであり、特にクリーンルーム設備配
線として使用すると、有機ガスなどのアウトガス量（μ
ｇ／ｍ２ｈ）の発生を塩化ビニル樹脂をベースにした従
来の絶縁被覆と比べて少なくとも１／１０に抑制するこ
とができる。PROBLEM TO BE SOLVED: To be particularly suitable for equipment wiring for a clean room of a semiconductor manufacturing apparatus, to suppress generation of an outgas such as an organic gas, to be effective in preventing pollution, and to increase semiconductor manufacturing efficiency. SOLUTION: A flame-retardant olefin-based resin composition in which a flame retardant is mixed in a range of 40 to 200 parts by weight, preferably 80 parts by weight, based on 100 parts by weight of an olefin-based resin on a conductor is used as a material. Wires and cables made by extruding insulation coatings, especially when used as clean room equipment wiring.
g / m 2 h) can be suppressed to at least 1/10 compared to a conventional insulating coating based on a vinyl chloride resin.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、特に半導体製造装
置のクリーンルーム設備配線として、分子状汚染物質に
よる汚染防止に有効で製造効率を高めることができるア
ウトガス抑制電線・ケーブルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an outgas-suppressing electric wire / cable which is effective for preventing contamination by molecular contaminants and can improve production efficiency, particularly as a wiring for a clean room facility of a semiconductor manufacturing apparatus.
【０００２】[0002]
【従来の技術】半導体製造装置、高エネルギー実験装置
およびプラズマ実験装置などでは有機材料から発生する
分解ガスを嫌うが、なかでも半導体製造装置のクリーン
ルームの場合、設備配線の電線・ケーブルの絶縁被覆か
ら有機分子が微小に揮発したり、分解した有機ガスが発
生してアウトガスとして汚染する。その結果、半導体ウ
エハなどに吸着汚染などしてデバイス製造にダメージを
与え、品質の歩留まりを悪化させる要因となる。2. Description of the Related Art Semiconductor manufacturing equipment, high-energy experiment equipment, plasma experiment equipment, and the like dislike decomposition gases generated from organic materials. Organic molecules are volatilized minutely or decomposed organic gas is generated and contaminated as outgas. As a result, adsorption and contamination of a semiconductor wafer or the like causes damage to device manufacture, which is a factor of deteriorating the yield of quality.
【０００３】[0003]
【発明が解決しようとする課題】一般に、電線・ケーブ
ルは、銅撚り線などの導体上に押出し成形される絶縁体
やシースの絶縁被覆の材料としてこれまで塩化ビニル樹
脂組成物が多用されてきた。しかしながら、塩化ビニル
樹脂組成物を材料とする絶縁体やシースの場合、燃焼し
てハロゲンガスや大量の煙を発生するという問題があ
る。また、柔軟性をもたせるために親和性の有機溶剤で
ある特にフタル酸エステル類のＤＯＰ（ジ−２−エチル
ヘキシル）が可塑剤として添加されるが、このＤＯＰの
場合揮発性を有し、有機分子ガスを発生して汚染するの
でクリーンルーム用配線には適さない。In general, vinyl chloride resin compositions have been widely used for electric wires and cables as a material for an insulating coating of an insulator or a sheath extruded on a conductor such as a copper stranded wire. . However, in the case of an insulator or a sheath made of a vinyl chloride resin composition, there is a problem that it burns to generate halogen gas or a large amount of smoke. Further, in order to impart flexibility, DOP (di-2-ethylhexyl), which is an organic solvent having an affinity, particularly a phthalic acid ester is added as a plasticizer. It is not suitable for clean room wiring because it generates gas and contaminates it.
【０００４】以上から、本発明の目的は、絶縁体やシー
スの材料としてノンハロゲン難燃性オレフィン系樹脂組
成物に着目し、特に半導体製造装置のクリーンルーム設
備配線として、分子状汚染物質による汚染防止に有効で
製造効率を高めることができるアウトガス抑制電線・ケ
ーブルを提供することにある。[0004] In view of the above, the object of the present invention is to focus on non-halogen flame-retardant olefin resin compositions as materials for insulators and sheaths, and particularly for the prevention of contamination by molecular contaminants as clean room equipment wiring for semiconductor manufacturing equipment. An object of the present invention is to provide an outgas suppression wire / cable that is effective and can increase production efficiency.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明にかかる請求項１に記載のアウトガス抑制電
線・ケーブルは、導体上に、オレフィン系樹脂をベース
にして難燃化剤を配合した難燃性オレフィン系樹脂組成
物を材料とする絶縁被覆を押出し成形してなっているこ
とを特徴とする。According to a first aspect of the present invention, there is provided an outgas suppression wire / cable according to the present invention, wherein a flame retardant is provided on a conductor based on an olefin resin. It is characterized in that an insulating coating made of the compounded flame-retardant olefin resin composition is extruded.
【０００６】以上から、導体上に押出し成形される絶縁
被覆の絶縁体やシースの材料に難燃性オレフィン系樹脂
組成物を用いることで、特にクリーンルーム設備配線と
して使用すると、有機ガスなどのアウトガスの発生を抑
制して汚染防止に有効である。[0006] As described above, by using a flame-retardant olefin resin composition as the material of the insulator or sheath of an insulating coating extruded on a conductor, particularly when used as a wiring for a clean room facility, the use of an outgas such as an organic gas can be reduced. It is effective for preventing pollution by suppressing generation.
【０００７】また、請求項２に記載のアウトガス抑制電
線・ケーブルは、前記難燃性オレフィン系樹脂組成物
が、ハロゲン元素を含まないノンハロゲンのものである
ことを特徴とする。Further, the outgas suppressing wire / cable according to claim 2 is characterized in that the flame-retardant olefin resin composition is a non-halogen containing no halogen element.
【０００８】ハロゲン元素を含む従来の塩化ビニル系樹
脂組成物の場合、燃焼してハロゲンガスや大量の煙を発
生するので、そうしたハロゲン元素を含まないノンハロ
ゲン難燃性オレフィン系樹脂組成物が絶縁体やシースな
どの絶縁被覆として好ましい。In the case of a conventional vinyl chloride resin composition containing a halogen element, it burns to generate a halogen gas or a large amount of smoke. Therefore, such a halogen-free flame-retardant olefin resin composition containing no halogen element is used as an insulator. It is preferable as an insulating coating such as a sheath or a sheath.
【０００９】また、請求項３に記載のアウトガス抑制電
線・ケーブルは、前記オレフィン系樹脂の１００重量部
に対して、難燃化剤を４０〜２００重量部の範囲で、好
ましくは８０重量部配合してなっていることを特徴とす
る。Further, the outgas suppressing wire / cable according to claim 3 is characterized in that a flame retardant is added in a range of 40 to 200 parts by weight, preferably 80 parts by weight, based on 100 parts by weight of the olefin resin. It is characterized by having done.
【００１０】以上から、ベースのオレフィン系樹脂１０
０重量部に対して難燃化剤を例えば８０重量部配合した
絶縁被覆にすると、塩化ビニル樹脂をベースにした従来
の絶縁被覆と比べてアウトガス量（μｇ／ｍ２ｈ）を例
えば少なくとも１／１０に抑制することができる。[0010] From the above, the base olefin resin 10
When the insulating coating is prepared by blending, for example, 80 parts by weight of a flame retardant with respect to 0 parts by weight, the outgas amount (μg / m 2 h) can be reduced by at least 1 / compared to a conventional insulating coating based on a vinyl chloride resin. It can be suppressed to 10.
【００１１】[0011]
【発明の実施の形態】以下、本発明にかかるアウトガス
抑制電線・ケーブルの実施の形態について、図面を参照
して詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of an outgas suppression wire / cable according to the present invention will be described in detail with reference to the drawings.
【００１２】本実施の形態にかかる電線・ケーブルで
は、絶縁被覆としての絶縁体やシースの材料にオレフィ
ン系樹脂組成物が使用されている。オレフィン系樹脂と
してはポリエチレン（ＰＥ），エチレン−エチルアクリ
レート共重合体（ＥＥＡ），エチレン−酢酸ビニル共重
合体（ＥＶＡ）などを使用できる。これらのオレフィン
系樹脂を用いる場合、ポリマー製造時にジブチルパラク
レゾール（ＢＨＴ）など比較的揮発性の高い酸化防止剤
を用いていないもの、さらにはリン（有機リン化合物）
やシリコン（有機シリコン）を含んでいないことが好ま
しく、さらにまた低分子ポリマーの使用量を極力抑えた
ものが好ましい。In the electric wires and cables according to the present embodiment, an olefin resin composition is used as a material of an insulator or a sheath as an insulating coating. As the olefin resin, polyethylene (PE), ethylene-ethyl acrylate copolymer (EEA), ethylene-vinyl acetate copolymer (EVA) and the like can be used. When these olefin resins are used, those which do not use a relatively volatile antioxidant such as dibutyl paracresol (BHT) at the time of polymer production, and phosphorus (organic phosphorus compound)
Preferably, it does not contain silicon or silicon (organic silicon), and more preferably, the amount of low molecular polymer used is minimized.
【００１３】また、オレフィン系樹脂は単独では難燃性
を備えていないため、難燃化剤や難燃化助剤を配合した
組成物とする必要がある。難燃化剤や難燃化助剤は、必
要な難燃性を備えるうえで必要な量だけが配合され、環
境を配慮してノンハロゲン系のたとえば水酸化マグネシ
ウムや水酸化アルミニウムなどの使用が好ましい。特
に、ノンハロゲン難燃性樹脂組成物であることは、汚染
ガス（アウトガス）の発生を抑制できる点で望ましい。
また、難燃化剤としてリン系やリン化合物の使用は避け
る。その他の添加剤についても、リン系やリン化合物，
シリコンやシリコン化合物，上記ＢＨＴのような比較的
に揮発性の高い酸化防止剤、そして可塑剤としてフタル
酸エステル類のＤＯＰのように低揮発性オイルの使用は
好ましいとはいえない。[0013] Further, since the olefin resin alone does not have flame retardancy, it is necessary to prepare a composition containing a flame retardant and a flame retardant aid. The flame retardant and the flame retardant aid are blended only in an amount necessary for providing the required flame retardancy, and it is preferable to use a non-halogen type such as magnesium hydroxide or aluminum hydroxide in consideration of the environment. . In particular, a non-halogen flame-retardant resin composition is desirable in that generation of polluting gas (outgas) can be suppressed.
Also, avoid using phosphorus-based compounds or phosphorus compounds as flame retardants. Other additives such as phosphorus compounds and phosphorus compounds,
It is not preferable to use silicon or a silicon compound, a relatively volatile antioxidant such as BHT, and a low volatile oil such as DOP of phthalates as a plasticizer.
【００１４】実施例：表１は、絶縁被覆としての絶縁体
やシースの材料にオレフィン系樹脂をベースとした実施
例１，２，３，４の各電線・ケーブルと、塩化ビニル系
樹脂組成物を用いた比較例の電線・ケーブルについて、
清浄度に影響を及ぼすアウトガスの測定を行った結果を
示す。 Examples : Table 1 shows each of the electric wires and cables of Examples 1, 2, 3 and 4 using an olefin resin as a material for an insulator or a sheath as an insulating coating, and a vinyl chloride resin composition. For the wires and cables of the comparative examples using
The result of having measured the outgas which affects cleanliness is shown.
【００１５】[0015]
【表１】 [Table 1]
【００１６】クリーンルームの清浄度の管理規定や指針
を示すものとして、社団法人日本空気清浄協会のシンポ
ジウム『クリーンルーム構成材料から発生する分子状汚
染物質の測定方法指針（案）：1999.2』（附属書２）で
は、クリーンルーム内装材・設備機械から発生する分子
状汚染物質の低減を目的とした材料選択を行うための発
生ガス評価法（スクリーニングテスト）について規定し
ている。その規定された評価用の設備・装置において、
上記実施例１〜４と比較例の電線・ケーブルから発生す
るアウトガスを測定した。As an indication of the management rules and guidelines for cleanroom cleanliness, a symposium of the Japan Air Purification Association, “Guidelines for the Method of Measuring Molecular Contaminants Generated from Clean Room Constituent Materials (Draft): 1999.2” (Annex 2) ) Specifies an evolved gas evaluation method (screening test) for selecting materials for the purpose of reducing molecular pollutants generated from clean room interior materials and equipment. In the specified evaluation facilities and equipment,
Outgas generated from the electric wires and cables of Examples 1 to 4 and Comparative Example was measured.
【００１７】材料から発生するガス量に影響を与える因
子としては、「試料サイズ」，「温度」，「湿度」，
「時間」，「流速」，「キャリヤガス種」，「換気回
数」，「ローティングファクタ」などがあるが、これら
の各因子を実験パラメータにしてデータ解析を行った。
測定データは、バックグランドで得られたデータ値から
判断される定量下限界をもとにして評価する。発生ガス
速度は、発生ガス量を測定したデータを用い、次式
（１）によって発生ガス速度を算出する。 Ｒ＝Ｃ／Ａｔ ・・・・・（１） Ｒ：発生ガス速度〔μｇ／ｍ２ｈ〕または〔μｇ／ｋｇ
ｈ〕 Ｃ：発生ガス量〔μｇ〕 Ａ：試料表面積〔ｍ２〕または試料重量〔ｋｇ〕 ｔ：時間〔ｈ〕Factors affecting the amount of gas generated from the material include “sample size”, “temperature”, “humidity”,
There were "time", "flow velocity", "carrier gas type", "ventilation frequency", "rotating factor", etc., and data analysis was performed using these factors as experimental parameters.
The measurement data is evaluated based on the lower limit of quantification determined from the data value obtained in the background. The generated gas velocity is calculated by the following equation (1) using data obtained by measuring the amount of generated gas. R = C / At (1) R: generated gas velocity [μg / m 2 h] or [μg / kg
h] C: Generated gas amount [μg] A: Sample surface area [m 2 ] or sample weight [kg] t: Time [h]
【００１８】表１中の評価欄で「アウトガス量」とある
のは、上記（１）式において発生ガス速度：Ｒ〔μｇ／
ｍ２ｈ〕の単位で示したものである。また、表１におい
て、実施例１〜４のベース材料であるオレフィン系樹脂
には、柔軟性に富むエチレン−酢酸ビニル共重合体（Ｅ
ＶＡ）を成分とするＮＵＣ−３７６５Ｄ（日本ユニカー
製）を用いた。この１００重量部に対して、難燃化剤に
は水酸化マグネシウム成分のキスマ５Ａ（協和化学製）
を用いて４０〜２００重量部の範囲で８０重量部配合し
た。The "outgas amount" in the evaluation column in Table 1 means the generated gas velocity: R [μg /
m 2 h]. Further, in Table 1, the olefin-based resin as the base material of Examples 1 to 4 includes an ethylene-vinyl acetate copolymer (E
NUC-3765D (manufactured by Nippon Unicar) containing VA) as a component was used. Kisuma 5A (manufactured by Kyowa Chemical Co., Ltd.), a magnesium hydroxide component, is used as the flame retardant for this 100 parts by weight.
And 80 parts by weight in the range of 40 to 200 parts by weight.
【００１９】実施例３，４については、酸化防止剤とし
て比較的揮発性の高いＢＨＴの微量０．２重量部を配合
し、それを配合しない実施例１，２の場合と対比してア
ウトガス量を測定した。また、実施例２，４について
は、滑剤にジメチルシリコンを０．５重量部ずつ配合
し、配合しない実施例１，３の場合と対比してアウトガ
ス量を測定した。In Examples 3 and 4, a small amount of 0.2 parts by weight of a relatively volatile BHT was added as an antioxidant, and the amount of outgas was smaller than in Examples 1 and 2 where no BHT was added. Was measured. In Examples 2 and 4, dimethyl silicon was added to the lubricant in an amount of 0.5 part by weight, and the amount of outgas was measured in comparison with Examples 1 and 3 in which dimethyl silicon was not added.
【００２０】一方、比較例については、ベース材料であ
る塩化ビニル樹脂１００重量部に対して、可塑剤（ＤＯ
Ｐ）を５０重量部、Ｐｂ（鉛）系安定剤を４重量部、物
性改良目的などの充填材として炭酸カルシウム４０重量
部をそれぞれ配合した。On the other hand, in the comparative example, a plasticizer (DO) was added to 100 parts by weight of vinyl chloride resin as a base material.
50 parts by weight of P), 4 parts by weight of a Pb (lead) -based stabilizer, and 40 parts by weight of calcium carbonate as a filler for improving physical properties.
【００２１】評価：表１から、実施例１，２，３，４の
それぞれアウトガスの発生量は、順番に４００，６５
０，８００，９００（μｇ／ｍ２ｈ）である。それに対
して、比較例のアウトガス量は７０００（μｇ／ｍ
２ｈ）で各実施例の１０倍もしくはそれ以上の倍率の量
を測定した。すなわち、オレフィン系樹脂をベースにし
た実施例１〜４の場合、塩化ビニル樹脂をベースにした
比較例と比べてアウトガスの発生量を少なくとも１／１
０に抑えることができる。 Evaluation : As shown in Table 1, the amounts of outgas generated in Examples 1, 2, 3, and 4 were 400, 65 in order.
0,800,900 (μg / m 2 h). On the other hand, the outgas amount of the comparative example is 7000 (μg / m
In 2 h), the amount of magnification of 10 times or more of each example was measured. That is, in the case of Examples 1 to 4 based on an olefin-based resin, the amount of outgas generated was at least 1/1 compared with the comparative example based on the vinyl chloride resin.
It can be suppressed to zero.
【００２２】また、実施例１，２，３，４を互いに対比
する意味で、添加剤の配合有無でアウトガス量がどのよ
うに変化するか測定を試みた、酸化防止剤としてＢＨＴ
を微量０．２重量部配合した実施例３，４の場合、アウ
トガス量は８００，９００（μｇ／ｍ２ｈ）であり、そ
れを配合しない例えば実施例１の４００（μｇ／ｍ
２ｈ）と比較すると、ほぼ２倍以上に増加することがわ
かる。また、酸化防止剤のＢＨＴを配合せず、滑剤とし
てジメチルシリコンの０．５重量部を配合した実施例２
の場合、アウトガス量は６５０（μｇ／ｍ２ｈ）であ
り、それを配合しない場合の実施例１の４００（μｇ／
ｍ２ｈ）と比べて２５０（μｇ／ｍ２ｈ）だけ増加す
る。Further, in order to compare Examples 1, 2, 3, and 4 with each other, an attempt was made to measure how the outgas amount changes depending on the presence or absence of an additive.
In the case of Examples 3 and 4 in which a very small amount of 0.2 part by weight was blended, the outgas amount was 800,900 (μg / m 2 h).
Compared to 2 h), it can be seen that increases above approximately double. Example 2 in which 0.5 parts by weight of dimethyl silicon was blended as a lubricant without blending BHT as an antioxidant.
, The outgas amount was 650 (μg / m 2 h), and 400 (μg / m 2
m 2 h) by 250 (μg / m 2 h).
【００２３】このように、実施例１〜４にあっても、添
加剤として酸化防止剤や滑剤を微量配合するとアウトガ
ス量の増加が見られ、その点に関して難燃化剤の８０重
量部だけを配合した実施例１がアウトガス量を最小に抑
えられる意味でも最適といえる。As described above, even in Examples 1 to 4, when a small amount of an antioxidant or a lubricant is added as an additive, the amount of outgas is increased. In this respect, only 80 parts by weight of the flame retardant is used. It can be said that the compounded Example 1 is optimal in the sense that the outgas amount can be minimized.
【００２４】[0024]
【発明の効果】以上説明したように、本発明にかかる請
求項１に記載のアウトガス抑制電線・ケーブルは、導体
上に押出し成形される絶縁被覆の絶縁体やシースの材料
に難燃性オレフィン系樹脂組成物を用いることで、特に
クリーンルーム設備配線として使用すると、有機ガスな
どのアウトガスの発生を抑制して汚染防止に有効であ
る。As described above, the outgas suppression wire and cable according to the first aspect of the present invention is a flame-retardant olefin-based material for an insulator or sheath of an insulating coating extruded on a conductor. The use of the resin composition is particularly effective in preventing pollution by suppressing the generation of outgas such as organic gas, especially when used as a wiring in a clean room facility.
【００２５】また、請求項２に記載のアウトガス抑制電
線・ケーブルは、ハロゲン元素を含む従来の塩化ビニル
系樹脂組成物の場合、燃焼してハロゲンガスや大量の煙
を発生するので、そうしたハロゲン元素を含まないノン
ハロゲン難燃性オレフィン系樹脂組成物が絶縁体やシー
スなどの絶縁被覆として好ましい。In the case of a conventional vinyl chloride resin composition containing a halogen element, the outgas suppressing wire / cable according to the second aspect burns to generate a halogen gas or a large amount of smoke. A halogen-free flame-retardant olefin-based resin composition containing no is preferably used as an insulating coating such as an insulator or a sheath.
【００２６】また、請求項３に記載のアウトガス抑制電
線・ケーブルは、ベースのオレフィン系樹脂１００重量
部に対して難燃化剤を例えば８０重量部配合した絶縁被
覆にすると、塩化ビニル樹脂をベースにした従来の絶縁
被覆と比べてアウトガス量（μｇ／ｍ２ｈ）を例えば少
なくとも１／１０に抑制することができる。The outgas suppressing wire / cable according to the third aspect of the present invention has a flame retardant, for example, in which 80 parts by weight of a flame retardant is blended with 100 parts by weight of the base olefin-based resin. The outgas amount (μg / m 2 h) can be suppressed to, for example, at least 1/10 as compared with the conventional insulating coating described above.
Claims (3)
して難燃化剤を配合した難燃性オレフィン系樹脂組成物
を材料とする絶縁被覆を押出し成形してなっていること
を特徴とするアウトガス抑制電線・ケーブル。1. An insulating coating made of a flame-retardant olefin resin composition containing a flame retardant based on an olefin resin and extruded on a conductor. Outgas suppression wires and cables.
ハロゲン元素を含まないノンハロゲンのものであること
を特徴とする請求項１に記載のアウトガス抑制電線・ケ
ーブル。2. The flame-retardant olefin resin composition,
The outgas suppression wire / cable according to claim 1, wherein the wire / cable is non-halogen free of a halogen element.
対して、難燃化剤を４０〜２００重量部の範囲で、好ま
しくは８０重量部配合してなっていることを特徴とする
請求項１または２に記載のアウトガス抑制電線・ケーブ
ル。3. The composition according to claim 1, wherein the flame retardant is added in an amount of 40 to 200 parts by weight, preferably 80 parts by weight, based on 100 parts by weight of the olefin resin. Or the outgas suppression wire or cable according to 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001170887A JP2002367445A (en) | 2001-06-06 | 2001-06-06 | Outgas suppression wire / cable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001170887A JP2002367445A (en) | 2001-06-06 | 2001-06-06 | Outgas suppression wire / cable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002367445A true JP2002367445A (en) | 2002-12-20 |
Family
ID=19012737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001170887A Abandoned JP2002367445A (en) | 2001-06-06 | 2001-06-06 | Outgas suppression wire / cable |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002367445A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006147236A (en) * | 2004-11-17 | 2006-06-08 | Shimizu Corp | Low outgas cable |
| CN102097186A (en) * | 2011-03-07 | 2011-06-15 | 无锡市长城电线电缆有限公司 | Manufacturing clean room for insulation of 500KV ultra-high voltage power cable |
-
2001
- 2001-06-06 JP JP2001170887A patent/JP2002367445A/en not_active Abandoned
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006147236A (en) * | 2004-11-17 | 2006-06-08 | Shimizu Corp | Low outgas cable |
| CN102097186A (en) * | 2011-03-07 | 2011-06-15 | 无锡市长城电线电缆有限公司 | Manufacturing clean room for insulation of 500KV ultra-high voltage power cable |
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