JP2002365387A - 2-axis positioning table - Google Patents

Abstract

(57) [Problem] To easily move an arbitrary amount of a table individually in the X direction by moving only the positioning means in the X direction and in the Y direction by moving only the positioning means in the Y direction. As well as lower overall height, higher rigidity,
Provided is a two-axis positioning table capable of accurate positioning. SOLUTION: A table 1 having one plane is regulated so as to move in one plane, and respective contact surfaces of two orthogonal blocks 2a, 3b among the table side surfaces are always in contact. The table 1 can be moved by an arbitrary amount in two directions orthogonal to each other in one plane by the contact surfaces 11a and 11b parallel to the moving direction of the table serving as guides for the movement. In addition, the overall height is reduced, the rigidity is high, and accurate positioning can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-axis positioning table for performing positioning on one plane, for example, for adjusting the head of an optical disk.

[0002]

2. Description of the Related Art In a conventional two-axis positioning table, FIG.
As shown in FIG. 2, an X table 22 having an X-direction linear guide 21 and a Y table 24 having a Y-direction linear guide 23 on the X table 22 are superimposed on each other. Driving is performed by a motor 26 fixed to 25 and movement in the Y direction is performed by a motor 27 fixed to the X table 22.

A configuration disclosed in Japanese Patent Laying-Open No. 53-99875 is known as another conventional example.

More specifically, as shown in FIGS. 6 and 7, a flat plate table 30 whose lower surface is held by a plurality of spheres 28 and is movable on a flat plate 29 in an arbitrary horizontal direction.
, At least two sides 31 and 32 of the periphery thereof are perpendicular to each other,
Drive motors 3 contacted or engaged at right angles
5, 36, and one drive motor 38 that makes the protruding / retracting shaft 37 contact or engage with the other side 32 at a right angle, and that the protruding / retracting shafts 33, 34, 37 move forward and backward. Move the table 30 by an arbitrary amount in the X and Y directions.

[0005]

However, in the configuration shown in FIG. 5, since the X table 22 and the Y table 24 that move in two orthogonal directions are superposed, the configuration is a two-stage configuration. There has been a disadvantage that the overall height of the positioning table is increased and rigidity is reduced.

In order to solve this problem, in the conventional example shown in FIGS. 6 and 7 of JP-A-53-99875, the table 30 and the motors 35, 36 and 38 for moving the table 30 are the same. Since the table 30 is arranged on the flat plate 29, the total height of the table 30 is reduced,
Although accurate positioning with high rigidity and low backlash can be performed, the two sides 31 of the table 30 itself in which the contact surface of the table 30 with the retractable shafts 33, 34, and 37 makes XYθ motion.
32, the direction is not fixed, and there is no guide function for moving in parallel to the XY orthogonal coordinate axis having the fixed direction. Therefore, when the table 30 is rotated by an arbitrary angle, Table 3 by motor 38
When 0 is moved in the X direction, a displacement occurs in the Y direction, and when the 0 is moved in the Y direction by the drive motors 35 and 36, a displacement occurs in the X direction. For this reason, when the table 30 is moved by a predetermined amount, the angle of rotation of the table 30 before movement is measured by some means, and based on the calculation, the retractable shaft 33,
There is a problem that it is not possible to move only the X or Y direction unless the 34 and 37 are moved at the same time.

The present invention has been made in view of the above problems, and has a table
It is possible to easily move any amount individually in the X direction by moving only the positioning means in the direction and in the Y direction by moving only the positioning means in the Y direction, while reducing the overall height and increasing the rigidity. And to provide a two-axis positioning table capable of accurate positioning.

[0008]

SUMMARY OF THE INVENTION In order to solve this problem, the present invention is directed to a table having a single flat surface which is restricted so as to move in one flat surface. The two applied blocks and positioning means for linearly moving the blocks in the respective contact surface directions are arranged so that the contact surface between the block and two orthogonal surfaces among the side surfaces of the table is always in contact. This is a two-axis positioning table having a configuration in which the table is moved by an arbitrary amount in two orthogonal directions within one plane while the table is biased.

According to the above-mentioned two-axis positioning table, two of the side surfaces of one table pressed against two orthogonal surfaces are pressed.
Since the blocks are urged to always contact the respective side surfaces of the table, when the block moves linearly by one of the positioning means, the table moves linearly using the contact surface between the other table side surface and the block as a guide. Is moved by a predetermined amount in the direction of the selected block. Similarly, the other table is moved by a predetermined amount in the direction in which the block is linearly moved by the positioning means, using the contact surface between the other table side surface and the block as a guide. Therefore, the table can move by a predetermined amount in two orthogonal directions without rotating while being restricted to move in one plane. Thereby, the overall height of the positioning table is reduced, the rigidity is high, and accurate positioning can be performed.

In the above-mentioned two-axis positioning table, a roller held by a cage is inserted between two orthogonal surfaces of the table and each block, and a pressing direction of one of the blocks is carried out via the roller. On the other hand, by making the table movable in a direction orthogonal to the pressing direction of the other block, the frictional force by the urging means on each pressing surface is reduced, and the positioning accuracy is improved. be able to.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below.
This will be described with reference to FIGS. The embodiment described below is an example embodying the present invention, and does not limit the technical scope of the present invention.

FIGS. 1 and 2 show a two-axis positioning table according to a first embodiment of the present invention. FIG. 1 is a plan view, and FIG. 2 is a front view of a partial cross section of A1 to A4 in FIG. Reference numeral 1 denotes a moving table, and 2 denotes a base plate for regulating the moving table 1 so as to move in one plane. The pressing blocks 3a and 3b are pressed against two orthogonal surfaces among the side surfaces of the moving table 1 and move in a direction parallel to the plane.
Reference numerals a and 4b denote threaded portions formed on the pressing blocks 3a and 3b, and reference numerals 5a and 5b denote guide blocks fixed to the base plate 2 so that the pressing blocks 3a and 3b are slidably mounted via slide guides 6a and 6b. Have been. 7a and 7b are screw shafts that engage the pressing blocks 3a and 3b with the screw portions 4a and 4b and linearly move, 8a,
8b is a motor for driving the screw shafts 7a, 7b, 9a, 9b
Is a bracket for fixing the motors 8a and 8b to the base plate 2. 10a and 10b are a pair of tension springs and 12a for urging the moving table 1 so that the contact surfaces 11a and 11b of the pressing blocks 3a and 3b are always pressed against two orthogonal surfaces among the side surfaces of the moving table 1. , 1
2b is a pair of spring pins provided on the moving table 1, 13a and 13b are a pair of spring pins fixed to the base plate 2, 14a and 14b are spring pins 12
a and 12b are a pair of brackets to be attached to the moving table 1.

The operation of the two-axis positioning table configured as described above will be described below. First,
By rotating the motors 8a and 8b by a predetermined angle, the pressing blocks 3a and 3b can be linearly moved by a predetermined amount via the screw shafts 7a and 7b, respectively. At this time, the pair of extension springs 10a, 10
b, the contact surfaces 11a, 11b between the two orthogonal surfaces of the moving table 1 and the pressing blocks 3a, 3b.
Are pressed so that they are always in contact with each other, so that the moving amount of the moving table 1 in the X direction is limited by the pressing block 3a.
The moving table 1 moves in the X direction using the contact surface 11b with the other pressing block 3b as a guide. Similarly, the moving amount of the moving table 1 in the Y direction is the same as the moving amount of the pressing block 3b, and the moving table 1 moves in the Y direction using the contact surface 11a with the other pressing block 3a as a guide. Therefore, while being restricted by the base plate 2 to move in one plane, the moving table 1 can move by a predetermined amount in two orthogonal directions, ie, the X direction and the Y direction, without rotating.

A moving table 1 having a single flat surface
Only, the height of the alignment table is lower,
High rigidity and accurate positioning.

Next, a two-axis positioning table according to a second embodiment will be described with reference to FIGS. FIG. 3 is a plan view, and FIG. 4 is a front view of a partial cross section B1 to B4 in FIG.
3 and 4, rollers 16a and 16b held by cages 15a and 15b are inserted between two orthogonal surfaces of the moving table 1 and the pressing blocks 3a and 3b, and the rollers 16a and 16b are inserted. , The side surfaces of the moving table 1 parallel to the moving direction of the moving table 1 and the respective pressing blocks 3a, 3b abutting portions 17a, 1a
The frictional force between 7b is reduced. Other components are:
This is common to the components of the first embodiment, and a description thereof will be omitted.

The operation of the two-axis positioning table configured as described above will be described below. Two orthogonal surfaces among the side surfaces of the moving table 1 and the pressing blocks 3a, 3b are connected via rollers 16a, 16b held by cages 15a, 15b to a pair of tension springs 10a,
By 10b, pressure is applied so that they are always in contact with each other. Then, when the motors 8a and 8b are rotated by a predetermined angle, and the pressing blocks 3a and 3b are linearly moved by a predetermined amount via the screw shafts 7a and 7b, respectively,
Moving table 1 parallel to the moving direction of moving table 1
Abutment portion 1 between the side surface of each member and each of pressing blocks 3a and 3b and rollers 16a and 16b inserted therebetween.
The moving table 1 can be moved by a predetermined amount in two orthogonal directions X and Y with the guides 7a and 17b as guides. At this time, the urging of the tension springs 10a and 10b generates a frictional force in the contact portion 17a or 17b serving as a guide parallel to the direction in which the moving table 1 moves. As a result, the frictional force becomes a rolling frictional force, and the frictional force is greatly reduced as compared with the sliding frictional force when the rollers 16a and 16b are not inserted. Can be.

In the first and second embodiments described above, the screw shafts 7a, 7b and the motor 8 are used as positioning means for linear movement of the pressing blocks 3a, 3b.
Although the rotations a and 8b are converted to linear motions, the linear motions may be manually driven by a linear motor or a micrometer head, and in other words, any configuration may be used as long as the pressing blocks 3a and 3b are linearly moved.

Further, the regulating means for causing the movement of the moving table 1 within one plane is a sliding bearing of the base plate 2, but may be a rolling bearing or a fluid bearing.

[0019]

As described above, according to the present invention, a table having one plane is regulated so as to move in one plane, and each of two orthogonal sides and two blocks of the table side faces is controlled. The contact surfaces are always urged to be in contact with each other, and each contact surface parallel to the moving direction of the table serves as a guide for movement, so that only the positioning means in the X direction can be moved to move the table in the X direction. In addition, by moving only the positioning means in the Y direction, it is possible to easily move an arbitrary amount individually in each of the two orthogonal directions in the Y direction, and reduce the overall height, increase rigidity, and perform accurate alignment. A two-axis positioning table is provided.

[Brief description of the drawings]

FIG. 1 is a plan view of a two-axis positioning table according to a first embodiment of the present invention.

FIG. 2 is a partial cross-sectional view of A1 to A4 in FIG. 1;

FIG. 3 is a plan view of a two-axis positioning table according to a second embodiment of the present invention.

FIG. 4 is a front view of a partial cross section B1 to B4 of FIG. 1;

FIG. 5 is a perspective view of a conventional two-axis positioning table.

FIG. 6 is a plan view of another conventional positioning table.

FIG. 7 is a side view of FIG. 6;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Moving table 2 Base plate 3a, 3b Press block 7a, 7b Screw shaft 8a, 8b Motor 10a, 10b Tension spring 11a, 11b Contact surface 16a, 16b Roller 17a, 17b Contact portion

Claims (2)

[Claims] 1. A table having a single plane, a restricting means for restricting the table to move in one plane, and pressed against two perpendicular sides of the side of the table, Two blocks for moving in a parallel direction, two positioning means provided with driving means for the blocks, and the table so that the two faces orthogonal to the side surfaces of the table are constantly pressed against the blocks. A two-axis positioning table comprising an urging means for urging. 2. A roller and a cage holding the roller are inserted between two orthogonal surfaces of the table and two blocks moved in a direction parallel to the plane,
2. The biaxial positioning table according to claim 1, wherein the table is movable in a direction orthogonal to a pressing direction of one block with respect to a pressing direction of the other block via the roller. 3. .