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JP2002355518A - Equipment for recovering specified gas - Google Patents

Equipment for recovering specified gas

Info

Publication number
JP2002355518A
JP2002355518A JP2001164310A JP2001164310A JP2002355518A JP 2002355518 A JP2002355518 A JP 2002355518A JP 2001164310 A JP2001164310 A JP 2001164310A JP 2001164310 A JP2001164310 A JP 2001164310A JP 2002355518 A JP2002355518 A JP 2002355518A
Authority
JP
Japan
Prior art keywords
gas
recovered
specific
container
separation unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001164310A
Other languages
Japanese (ja)
Inventor
Kazukiyo Takano
和潔 高野
Koichi Okuma
光一 大熊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electronic Industries Co Ltd
Original Assignee
Sanyo Electronic Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electronic Industries Co Ltd filed Critical Sanyo Electronic Industries Co Ltd
Priority to JP2001164310A priority Critical patent/JP2002355518A/en
Publication of JP2002355518A publication Critical patent/JP2002355518A/en
Pending legal-status Critical Current

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  • Separation Of Gases By Adsorption (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an equipment for recovering a specified gas from which any of the specified gas is not released to the atmosphere even when some specified gas is not yet separated at a step to separate the specified gas from other mixed gas in a gas separating part when the specified gas is recovered in a vessel 26 to be collected. SOLUTION: At the step to separate the specified gas from other mixed gases in the gas separating part 21, exhaust gas in which a little specified gas is mixed together with other mixed gas such as nitrogen gas is stored temporarily in an exhaust gas tank 6 in the part 21 through an exhaust gas inlet 20, which is then made to flow to another vessel 26 through an exhaust gas outlet 2 again.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は特定ガスの分離回収
に関する。特定ガスとは、地球温暖化防止やオゾン層の
破壊防止、あるいはそのガスの毒性、又は悪臭等の理由
で大気中に放出規制の対象となるガスをいい、このガス
の分離回収に関する。
The present invention relates to the separation and recovery of a specific gas. The specific gas refers to a gas that is subject to emission control into the atmosphere due to prevention of global warming and destruction of the ozone layer, or toxicity or odor of the gas, and relates to separation and recovery of this gas.

【0002】[0002]

【従来の技術】特定ガス中の有毒ガス、悪臭ガス等生物
に悪影響を及ぼすガスは放出の無いよう回収又は、無害
化、無臭化等をする処理が行われる。しかし最近まで無
害や無臭であるために大気中に放出されていたガスが、
環境的な立場から放出規制ガスとなるものが出てきた。
2. Description of the Related Art Toxic gases, odorous gases, and other gases that have an adverse effect on living organisms in specific gases are collected or detoxified or deodorized so as not to be released. However, gas that was released into the atmosphere until recently because it was harmless and odorless,
From the environmental point of view, some of them have become emission control gases.

【0003】即ち、地球温暖化防止京都会議で放出規制
の対象となったものに次のガスがある。
That is, the following gases have been subject to emission control at the Kyoto Conference on Global Warming Prevention.

【0004】[0004]

【化1】 Embedded image

【0005】又、オゾン層の破壊防止のために放出規制
の対象となったものに次のガスがある。
The following gases have been subject to emission control to prevent the destruction of the ozone layer.

【0006】[0006]

【化2】 Embedded image

【0007】これらのガスの中には、その持っている特
性から目的の効果が大であり、代替の見つからない物、
又は代替が見つかっても同様な環境への影響を及ぼすと
考えられる物があり、同様な放出規制の取り扱いが必要
となると思われるものが多い。近年になってから規制に
なったのであるから、これらのガスを大気中に放出する
ことなく分離回収する技術は今はなく、これが確立出来
れば技術的役割は大きい。
[0007] Among these gases, the desired effects are great due to the properties of these gases, and there are no alternatives that can be found.
Or, even if alternatives are found, there are many that are likely to have similar environmental impacts, and many would require similar release controls. Since the regulation has been set in recent years, there is no technology for separating and recovering these gases without releasing them into the atmosphere. If this technology can be established, the technical role will be significant.

【0008】これら特定ガスが100%純粋な状態で使
用されておれば、これを抜取り、そのまま保存し再利用
することが出来るので問題は少ない。しかしこれらのガ
スが他のガスと混合している場合、分離回収に難しい問
題が生ずる。混合ガスの分離は、その物理的、科学的、
あるいは電気的性質を用いて分離するいろいろな方法が
考えられる。
If these specific gases are used in a 100% pure state, there is little problem since they can be extracted, stored and reused as they are. However, when these gases are mixed with other gases, a difficult problem arises in separation and recovery. Separation of gas mixtures depends on their physical, scientific,
Alternatively, various methods for separating using electric properties can be considered.

【0009】例えば高圧冷却液化後気化温度の違いによ
り分離する深冷分離法、分子の大きさ等、あるいは溶解
度を利用した分離膜法、吸着剤を用いるPSA分離法、
液化温度の違いを用いる液化法がある。更にこれらを組
み合わせて分離する方法もある。しかし通常、複数の混
合ガスをそれぞれ100%の純粋な二つのガスに分離す
ることは難しい。A,B混合ガスを分離する場合、Aが
濃いガス、Bが濃いガスに分離出来るが、そのAの中に
Bが含まれ、濃いBの中にAが含まれる。一方のAを濃
くすると(Bの成分を少なくする)他方のBの方にAが多
くなる。反対の場合もまたしかりである。放出規制ガス
を大気中に放出する場合この僅かに含まれるガスが問題
になる。従来この大気に放出する微量ガス濃度を低く抑
える方に多大なエネルギーを費やしており、高度な技術
が求められた。
For example, a cryogenic separation method in which separation is performed according to a difference in vaporization temperature after high-pressure cooling and liquefaction, a separation membrane method using molecular size or the like, or a solubility, a PSA separation method using an adsorbent,
There is a liquefaction method using a difference in liquefaction temperature. Further, there is also a method of separating them by combining them. However, it is usually difficult to separate a plurality of mixed gases into two 100% pure gases. When the mixed gas of A and B is separated, A can be separated into a dense gas and B can be separated into a rich gas. However, B is contained in A and A is contained in dense B. When one A is darkened (the component of B is reduced), the A increases in the other B. The opposite is also true. When the emission control gas is released into the atmosphere, this slightly contained gas becomes a problem. Conventionally, a great deal of energy has been spent on keeping the concentration of the trace gas released into the atmosphere low, and advanced technology has been required.

【0010】[0010]

【発明が解決しようとする課題】特定ガスを大気中に漏
出することなく回収すること。
SUMMARY OF THE INVENTION To recover a specific gas without leaking into the atmosphere.

【課題を解決するための手段】[Means for Solving the Problems]

【0011】特定ガスを分離回収するためのガス分離技
術は例えば吸着剤を用いるPSA法、液化温度の違いに
よる液化法がある。これらの分離手段であっても被分離
ガス中に含まれる対象ガス濃度により分離手段中の一つ
あるいは二つのパラメータの変更が必要になってくる。
その濃度に対応した最適で効率的な値が存在する。濃度
が変わってもその濃度に応じたパラメータ値に制御を行
なえばある濃度の範囲であればA,Bの混合ガスをA,
Bに最適に分離できる。しかし前述の如くAの中にB
が、Bの中にAが多少含まれる。このBを放出するので
はなく、被回収容器に戻す。
Gas separation techniques for separating and recovering a specific gas include, for example, a PSA method using an adsorbent and a liquefaction method based on a difference in liquefaction temperature. Even with these separation means, it is necessary to change one or two parameters in the separation means depending on the concentration of the target gas contained in the gas to be separated.
There is an optimal and efficient value corresponding to that concentration. Even if the concentration changes, if a parameter value corresponding to the concentration is controlled, the mixed gas of A and B can be changed to A and B within a certain concentration range.
B can be optimally separated. However, as mentioned above, B in A
However, A is somewhat contained in B. Instead of releasing this B, it is returned to the collection container.

【0012】即ち、ガス分離部とポンプを有する特定ガ
ス回収装置において、被回収容器より特定ガスを含む被
回収ガスを該ガス分離部に導入し、特定ガスと他の混合
ガスとに分離せしめて特定ガスを回収すると共に、該混
合ガスを該ポンプにて被回収容器に戻すように構成した
特定ガス回収装置とする。こうすることにより被回収容
器中の特定ガスAの濃度は下がるがその濃度に対応した
ガス分離部の制御を行なうことにより、濃縮した特定ガ
スAを回収する。
That is, in a specific gas recovery device having a gas separation unit and a pump, a gas to be recovered containing a specific gas is introduced into the gas separation unit from a recovery container and separated into a specific gas and another mixed gas. A specific gas recovery apparatus configured to recover the specific gas and return the mixed gas to the container to be recovered by the pump. By doing so, the concentration of the specific gas A in the container to be recovered decreases, but by controlling the gas separation unit corresponding to the concentration, the concentrated specific gas A is recovered.

【0013】即ち、ガス分離部とポンプを有する特定ガ
ス回収装置において、被回収容器より特定ガスを含む被
回収ガスを該ガス分離部に導入し、特定ガスと他の混合
ガスとに分離せしめて特定ガスを回収すると共に、該混
合ガスを該ポンプにて被回収容器に戻すように構成し、
当該被回収ガス濃度を測定し該ガス分離部の制御を当該
濃度値により変更するようにした特定ガス回収装置とす
る。
That is, in a specific gas recovery apparatus having a gas separation section and a pump, a gas to be recovered containing a specific gas is introduced into the gas separation section from a recovery container and separated into a specific gas and another mixed gas. While recovering the specific gas, configured to return the mixed gas to the container to be recovered by the pump,
The specific gas recovery device is configured such that the concentration of the gas to be recovered is measured and the control of the gas separation unit is changed according to the concentration value.

【0014】被回収容器中の特定ガスを回収する場合、
当容器内のガスを大気圧まで回収してもまだその中に特
定ガスが残っている。その為容器内を真空引きして特定
ガスを汲み出さなければならないが、この真空引きは時
間が長く掛かる。更に真空引きに耐える容器構造をして
いないと容器が破損することがある。このため特定ガス
に混合する混合ガスが窒素などの自然界に存在するガス
である場合、このガスを供給し、真空引きする代わりに
ガス供給部より希釈ガスを供給して濃度を薄めて取出し
その後ガス分離部で分離濃縮して回収する。
When recovering a specific gas in a container to be recovered,
Even if the gas in this container is recovered to atmospheric pressure, the specific gas still remains in it. Therefore, it is necessary to evacuate the inside of the container to pump out a specific gas, but this evacuation takes a long time. Further, the container may be damaged if the container is not constructed to withstand vacuum evacuation. For this reason, if the mixed gas to be mixed with the specific gas is a gas such as nitrogen that exists in the natural world, this gas is supplied, and instead of vacuuming, a diluent gas is supplied from the gas supply unit to reduce the concentration, then the gas is extracted. Separate and concentrate in the separation section and collect.

【0015】即ち、ガス分離部とポンプとガス供給部を
有する特定ガス回収装置において、被回収容器より特定
ガスを含む被回収ガスを該ガス分離部に導入し、特定ガ
スと他の混合ガス(希釈ガス)とに分離せしめて特定ガス
を回収し、更に該混合ガスを該ポンプにて被回収容器に
戻すと共に、前記のガス分離部へ導入する被回収ガスの
圧力が一定圧力値よりも低くなった場合には該ガス供給
部内のガスを該被回収容器に導入するように構成した特
定ガス回収装置。一定圧力値とは、ガス分離部で必要な
圧力値である場合、大気圧以下の場合又は装置の真空耐
圧値等で決められる一定の圧力値で、技術上で決められ
る一定圧力値である。
That is, in a specific gas recovery device having a gas separation unit, a pump, and a gas supply unit, a gas to be recovered including a specific gas is introduced from a recovery container into the gas separation unit, and the specific gas and another mixed gas ( (Diluent gas) to collect the specific gas, and further return the mixed gas to the container to be recovered by the pump, and the pressure of the gas to be recovered introduced into the gas separation unit is lower than a predetermined pressure value. A specific gas recovery device configured to introduce the gas in the gas supply unit to the container to be recovered in the event of the occurrence. The constant pressure value is a pressure value required in the gas separation unit, a constant pressure value determined at a pressure equal to or lower than the atmospheric pressure or a vacuum pressure resistance value of the apparatus, and is a constant pressure value determined technically.

【0016】分離した特定ガスを回収する場合、加圧冷
却し液化して回収する工程をつけくわえることが多い、
この液化の段階で特定ガスが液化して分離するぶんだけ
混合ガス濃度が高まるのでこの処理を次のように行な
う。即ち、ガス分離部と加圧部及び液化部を有する特定
ガス回収装置において、該ガス分離部で特定ガスと他の
混合ガスとに分離する過程、並びに該液化部で特定ガス
を液化する過程で特定ガス濃度が下がるのでこの希釈さ
れた特定ガスを被回収容器に戻すように構成した特定ガ
ス回収装置。
In the case of recovering the separated specific gas, a step of cooling under pressure, liquefying and recovering is often added.
In this liquefaction stage, the concentration of the mixed gas is increased as much as the specific gas is liquefied and separated, so this processing is performed as follows. That is, in a specific gas recovery device having a gas separation unit, a pressurization unit, and a liquefaction unit, in the process of separating the specific gas and another mixed gas in the gas separation unit, and in the process of liquefying the specific gas in the liquefaction unit The specific gas recovery device is configured to return the diluted specific gas to the container to be recovered because the specific gas concentration decreases.

【0017】[0017]

【発明の実施の形態】本実施例では、特定ガスの一例と
してSF6ガスを取り上げる。そしてガス分離部はPS
A式ガス分離法を用いる場合を示す。
In this embodiment, SF6 gas is taken as an example of a specific gas. And the gas separation part is PS
The case where the A-type gas separation method is used will be described.

【0018】SF6ガスは高電圧電力用トランスや電力
回路の遮断器に充填し、その熱的安定性,電気的安定性,
高絶縁耐圧性を生かして装置の小型化を可能にし、都市
の変電所の小容積化でその貢献は大きい。トランスや遮
断器に充填されているSF6ガスはその純度100%の
ものや窒素ガスにより適度にうすめて充填されるものが
ある。それ等が用いられている機器の点検保守,修理の
ときはこれらのガスを抜き出さなければならないが、従
来はこれ等のガスによる人体等への該は少ないので大気
中に放出していた。
SF6 gas is charged into a high-voltage power transformer or a circuit breaker of a power circuit, and its thermal stability, electrical stability,
Utilizing the high insulation pressure resistance, it is possible to reduce the size of the equipment, and its contribution is significant in reducing the volume of substations in cities. The SF6 gas filled in the transformer or the circuit breaker may be one having a purity of 100% or one which is appropriately diluted with nitrogen gas. These gases must be extracted at the time of inspection, maintenance and repair of the equipment in which they are used. However, conventionally, these gases are released to the atmosphere because there is little influence on the human body and the like by these gases.

【0019】しかし、SF6ガスはほとんど純度100
%で充填され、高価なガスであるため経費的に容易に回
収再利用できる範囲の回収装置は従来よりあり、回収し
て再利用していた。即ち、抜取って加圧と圧縮冷却によ
って液化回収する装置はあったが、被回収容器内を高真
空域まで吸引して回収したり、他のガスが混合している
混合ガスを分離してSF6ガスのみを回収する装置など
はなかった。
However, SF6 gas is almost 100% pure.
%, And since it is an expensive gas, there has been a recovery apparatus in a range where it can be easily recovered and reused cost-effectively, and has been recovered and reused. In other words, there was a device that withdrawn and liquefied and recovered by pressurization and compression cooling.However, the inside of the container to be recovered was suctioned and recovered to a high vacuum range, or a mixed gas containing other gases was separated. There was no device for collecting only SF6 gas.

【0020】電力業界は、電気共同研究会により「電力
用SF6ガス取扱い基準」を平成10年12月に自主制
定し、その排出を規制することとした。即ち、修理点検
時は0.015MPa・abs(回収率97vol%以
上)、解体撤去時は0.005MPa・abs(回収率9
9vol%以上)の真空域まで吸引する自主基準を作成
した。高真空域まで回収すると回収に長時間を要すると
いう欠点が生ずる。点検時の回収率が低いのは装置停止
による停電の時間を可能な限り短くするための妥協値で
あり、撤去時は十分に時間をとって真空引きするように
なっている。即ち、高真空域まで吸引回収し、大気中へ
の漏出量を少なくおさえている。
The electric power industry voluntarily enacted the "Standards for Handling SF6 Gas for Electric Power" in December 1998 by the Joint Research Institute of Electricity, and decided to regulate its emission. That is, at the time of repair and inspection, 0.015 MPa · abs (recovery rate of 97 vol% or more), and at the time of dismantling and removal, 0.005 MPa · abs (recovery rate of 9 vol.
A voluntary standard for suctioning up to a vacuum region of 9 vol% or more was created. Recovering to a high vacuum region has the disadvantage of requiring a long time for recovery. The low recovery rate at the time of inspection is a compromise value for minimizing the time of the power failure due to the stoppage of the apparatus, and sufficient time is taken for evacuation at the time of removal. That is, the liquid is suctioned and collected up to a high vacuum region, and the amount of leakage into the atmosphere is reduced.

【0021】SF6ガスは、臨界温度45.64℃,臨
界圧力3.66MPa・G,融点−50.8℃,昇華点
−63.8℃の特徴を考慮し、これを加圧する加圧部と
冷却液化する液化部を設け、被回収ガス中のSF6ガス
の濃度が高い範囲においては液化ガスの液化温度と圧力
の関係から加圧する圧力が比較的低い範囲、そして液化
温度の比較的高い範囲で容易に液化回収できる。
The SF6 gas is characterized by a critical temperature of 45.64 ° C., a critical pressure of 3.66 MPa · G, a melting point of −50.8 ° C., and a sublimation point of −63.8 ° C. A liquefaction unit for cooling and liquefaction is provided. In the range where the concentration of SF6 gas in the gas to be recovered is high, the pressure to be applied is relatively low due to the relationship between the liquefaction temperature and pressure of the liquefied gas, and the liquefaction temperature is relatively high. It can be easily liquefied and recovered.

【0022】まず、かかる方法により被回収容器内の内
圧が吸引ポンプにより液化部で液化可能な圧力範囲とな
るまで回収する。前述のように被回収ガスはSF6ガス
100%の場合のものと窒素ガス等によりうすめられて
いる場合がある。この混合ガスが存在してもこれをSF
6ガスと他の分離ガスとに分離するガス分離部を設け
る。
First, by the above method, the internal pressure in the container to be recovered is recovered by the suction pump until the internal pressure becomes within a pressure range in which the liquid can be liquefied in the liquefaction unit. As described above, the gas to be recovered may be a gas in which SF6 gas is 100% or a gas diluted with nitrogen gas. Even if this mixed gas exists,
A gas separation unit for separating the six gases from other separated gases is provided.

【0023】ガス分離部は、特定ガスを吸着する吸着剤
を用いるPSA法により行なう。このPSA法とは、特
定ガスを含む混合ガスを該吸着剤を充填した吸着筒に圧
力を加えながら送りこむとこの吸着剤に特定ガスが吸着
して除かれ、吸着されないガスが吸着筒の他端から分離
されて取り出される。この工程を吸着工程という。そし
て、吸着剤に吸着ガスが吸着されていっばいになる少し
前に混合(原料)ガスの送入を止め、その吸着筒の入口よ
り該吸着筒の圧力を減じてやると、吸着剤に吸着してい
た吸着ガスが吸着剤より離脱して排出され、吸着剤の吸
着能力が再生する。この工程を再生工程という。この吸
着工程と再生工程とを繰り返しながら、即ち、吸着筒に
圧力を加えたり、減じたりしながらガスを分離するので
Pressure Swing Adsorption「圧力変動吸着」法とい
う。
The gas separation section is performed by a PSA method using an adsorbent for adsorbing a specific gas. In the PSA method, when a mixed gas containing a specific gas is sent while applying pressure to an adsorption column filled with the adsorbent, the specific gas is adsorbed and removed by the adsorbent, and the non-adsorbed gas is removed from the other end of the adsorption column. Is separated and taken out. This step is called an adsorption step. Then, shortly before the adsorbent adsorbs the adsorbed gas, the supply of the mixed (raw material) gas is stopped, and the pressure of the adsorbent is reduced from the inlet of the adsorbent. The adsorbed gas released from the adsorbent is discharged and the adsorbent's adsorption capacity is regenerated. This step is called a regeneration step. Since the gas is separated while repeating the adsorption step and the regeneration step, that is, applying or decreasing pressure to the adsorption column.
Pressure Swing Adsorption "Pressure fluctuation adsorption" method.

【0024】そして、吸着剤には対象ガスであるSF6
ガスを吸着し、混合ガスを吸着しない吸着剤と、対象ガ
スであるSF6ガスを吸着せずに、混合している他の混
合(希釈)ガスを吸着する吸着剤とがある。その使用する
吸着剤により対象ガスを取り出す方法が少し異なる。例
えば、SF6ガスを対象とした場合、前者は活性炭に分
子篩機能を持たせた分子篩炭がある。後者にはゼオライ
トの5Aタイプ,4Aタイプ他がある。
The adsorbent is SF6, which is the target gas.
There are an adsorbent that adsorbs a gas and does not adsorb a mixed gas, and an adsorbent that adsorbs another mixed (diluted) gas that is mixed without adsorbing the SF6 gas as the target gas. The method of extracting the target gas differs slightly depending on the adsorbent used. For example, when targeting SF6 gas, the former includes molecular sieve charcoal in which activated carbon has a molecular sieve function. The latter includes zeolite 5A type, 4A type and others.

【0025】前者の場合はSF6ガスが吸着剤に吸着し
て分離されるのであるから、減圧再生工程で吸着剤より
離脱する工程でSF6ガスを回収する。後者では加圧吸
着工程でSF6ガスは吸着剤に吸着されないので吸着筒
の他端より分離されて出てくるので吸着工程で得られ
る。かかるPSA法によるSF6ガス分離では分離され
た希釈ガス、即ち、排出ガス側に僅かではあるがSF6
ガスが含まれるのでこれを大気中に廃棄することは問題
となる。この排出ガス中に含まれるSF6ガスをppm
オーダーに少なく抑えることは技術的にも困難である。
このため、微量ではあるがSF6ガスを含む分離排出ガ
スを大気中に放出するするのではなく、再び被回収容器
に戻すようにする。
In the former case, the SF6 gas is adsorbed and separated by the adsorbent, so that the SF6 gas is recovered in the step of separating from the adsorbent in the pressure reduction regeneration step. In the latter case, the SF6 gas is not adsorbed by the adsorbent in the pressure adsorption step, and is separated from the other end of the adsorption cylinder and comes out. In the SF6 gas separation by the PSA method, the separated diluent gas, that is, the SF6 gas is slightly present on the exhaust gas side.
Disposal into the atmosphere is a problem because it contains gases. The amount of SF6 gas contained in this exhaust gas is ppm
It is technically difficult to keep it low to order.
For this reason, a small amount of separated exhaust gas containing SF6 gas is not released to the atmosphere but returned to the container to be recovered.

【0026】なお、加圧冷却してSF6ガスを液化する
過程においても液化タンクの上部空間にはガス中に含ま
れる窒素等のガスが液化しないで、SF6ガスが液化し
て除かれるぶん、窒素ガス濃度が高まるのでこれを抜き
出して前記の分離排出ガス同様に被回収容器に戻すよう
にする。
In the process of liquefying SF6 gas by pressurizing and cooling, gas such as nitrogen contained in the gas is not liquefied in the upper space of the liquefaction tank. Since the gas concentration increases, the gas is extracted and returned to the container to be recovered in the same manner as in the case of the separated exhaust gas.

【0027】[0027]

【実施例】以下、図を参照して本発明を説明するが、こ
れは説明の為の一実施例であって、本発明はこの実施例
に限定されるものではない。図1は、SF6ガスを特定
ガスとしてPSAガス分離法を用いる場合で、加圧部2
2や液化部23を含む本実施例の構成を示すフローシー
トである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the drawings. However, this is one embodiment for explanation, and the present invention is not limited to this embodiment. FIG. 1 shows a case where a PSA gas separation method is used with SF6 gas as a specific gas.
2 is a flow sheet showing a configuration of the present example including a liquefier 2 and a liquefaction unit 23.

【0028】この図中のガス分離部21の詳細は、図2
(A)あるいは図2(B)にフローシートで示す。被回収容
器26の取出口より被回収ガスをガス分離部21の被回
収ガス入口1と接続し、ガス分離部21で濃縮したSF
6ガスを出口3より加圧部22に導入し、該加圧部はバ
ッファタンク30と加圧ポンプ31及び一定圧以上に過
加圧しないように戻り回路を減圧弁32により構成して
いる。
The details of the gas separation unit 21 in FIG.
(A) or FIG. 2 (B) shows a flow sheet. The recovered gas is connected to the recovered gas inlet 1 of the gas separation unit 21 from the outlet of the recovered container 26, and the SF concentrated in the gas separation unit 21.
Six gases are introduced into the pressurizing section 22 from the outlet 3, and the pressurizing section includes a buffer tank 30, a pressurizing pump 31, and a pressure reducing valve 32 as a return circuit so as not to overpressurize to a certain pressure or more.

【0029】加圧されたSF6ガスは液化部23に送
り、冷却液化して貯留タンク24に貯留する。液化部2
3は冷却器33,電磁弁34,36,37,液化タンク35
より構成して、冷却器33で冷却し、液化タンク35に
送り冷却する。液化部23に入ってくるSF6ガスが純
度100%でない限り、液化タンク35内で暫時SF6
ガスが液化し、貯留タンク24に取り出されると該液化
タンク内の不純ガス濃度が高くなり、液化温度や圧力が
高くなるのでその不純ガスを電磁弁36を開いて取出
し、ガス分離部以前に戻してやる必要があり、ガス分離
部21内の排ガスタンク6に排ガス入口20よりいれて
ポンプ7により、被回収容器26に戻すように構成して
いる。
The pressurized SF6 gas is sent to a liquefaction unit 23 where it is cooled and liquefied and stored in a storage tank 24. Liquefaction unit 2
3 is a cooler 33, solenoid valves 34, 36, 37, liquefaction tank 35
It is cooled by a cooler 33 and sent to a liquefaction tank 35 for cooling. As long as the SF6 gas entering the liquefaction unit 23 is not 100% pure, the SF6 gas is temporarily stored in the liquefaction tank 35.
When the gas is liquefied and taken out to the storage tank 24, the concentration of the impurity gas in the liquefaction tank increases, and the liquefaction temperature and pressure increase. Therefore, the impurity gas is taken out by opening the solenoid valve 36 and returned to the gas separation part. It is necessary to put the waste gas into the exhaust gas tank 6 in the gas separation unit 21 through the exhaust gas inlet 20 and return the waste gas to the collection container 26 by the pump 7.

【0030】なお、SF6ガスが液化されて取り出され
るに従い被回収容器の圧力が低下するのでその値が一定
値以下になるとガス供給部25より電磁弁29を開にし
てガスを導入し、ガス分離部の動作に支障のないガス圧
を保つように構成する。ガス供給部25は例えば窒素ボ
ンベと減圧弁で構成することが好ましい。図2(A)は、
吸着剤に対象ガス(SF6ガス)を強く吸着し、混合ガス
(窒素ガス)を少ししか吸着しない分子篩炭を用いるガス
分離部のフローシートを示す。
Since the pressure of the container to be recovered decreases as the SF6 gas is liquefied and taken out, when the pressure becomes lower than a certain value, the solenoid valve 29 is opened from the gas supply unit 25 to introduce the gas, and the gas is separated. The gas pressure is maintained so as not to affect the operation of the unit. It is preferable that the gas supply unit 25 be constituted by, for example, a nitrogen cylinder and a pressure reducing valve. FIG. 2 (A)
The target gas (SF6 gas) is strongly adsorbed on the adsorbent and mixed gas
2 shows a flow sheet of a gas separation unit using molecular sieve charcoal that only slightly adsorbs (nitrogen gas).

【0031】これはトランス等の被回収容器よりのガス
を被回収ガス入口1より導入し、電磁弁8,10を開と
して吸着筒4にSF6ガスを吸着させ、一部SF6ガス
を含む窒素ガス等のSF6ガスと分離した排ガスを電磁
弁14,9を通して排ガスタンク6に貯える。これはポ
ンプ7により排ガス出口2より加圧排出される。これは
図1の被回収容器26に戻される。
In this method, a gas from a container to be recovered such as a transformer is introduced from a gas inlet 1 to be recovered, and the solenoid valves 8 and 10 are opened to adsorb the SF6 gas into the adsorption cylinder 4 and a nitrogen gas partially containing the SF6 gas. Exhaust gas separated from SF6 gas and the like is stored in an exhaust gas tank 6 through solenoid valves 14 and 9. This is pressurized and discharged from the exhaust gas outlet 2 by the pump 7. This is returned to the collection container 26 of FIG.

【0032】被回収ガスを吸着筒4に導入して、吸着剤
がSF6ガスを吸着して満杯になる前に導入を止め、再
生工程の終了した吸着筒5との間に均圧化の工程を行な
う。即ち、電磁弁8,10,16,11,14を閉とし
て、吸着筒5の全ての電磁弁を閉とし、均圧用の電磁弁
17を開とし、吸着筒4内に浮遊する窒素ガスを吸着筒
5へ一部のSF6ガスと共に移動させる。その後電磁弁
17を閉とし、吸着筒4の吸着剤に吸着したSF6ガス
は電磁弁11,18を開として、濃縮したSF6ガスを
出口3よりポンプ7’により図1の貯留タンク30に送
り出す。この工程は吸着剤より吸着しているSF6ガス
を減圧して離脱させて、出口3より取り出すと共に吸着
剤の能力を再生させるので再生工程という。
The gas to be recovered is introduced into the adsorption column 4, the introduction is stopped before the adsorbent adsorbs the SF6 gas and becomes full, and a pressure equalization step is performed between the adsorbent and the adsorption column 5 after the regeneration process. Perform That is, the electromagnetic valves 8, 10, 16, 11, and 14 are closed, all the electromagnetic valves of the adsorption cylinder 5 are closed, the equalizing electromagnetic valve 17 is opened, and the nitrogen gas floating in the adsorption cylinder 4 is adsorbed. It is moved to the cylinder 5 together with a part of SF6 gas. Thereafter, the electromagnetic valve 17 is closed, the SF6 gas adsorbed on the adsorbent of the adsorption cylinder 4 opens the electromagnetic valves 11 and 18, and the concentrated SF6 gas is sent from the outlet 3 to the storage tank 30 of FIG. This step is called a regeneration step because the SF6 gas adsorbed from the adsorbent is decompressed and released from the adsorbent, taken out from the outlet 3 and the capacity of the adsorbent is regenerated.

【0033】吸着筒5は被回収ガスを電磁弁12より導
入し、SF6ガスを吸着剤に吸着させて電磁弁15,9
を開とし、窒素ガスを排ガスタンク6に送出し、ポンプ
7により排ガス出口2より図1の被回収容器26に送り
こむ。このように加圧吸着工程,均圧工程,再生工程を繰
り返し、ガスの分離を行なう。このようにガス分離を被
回収ガス入口1より原料ガスを取り込み、吸着剤にSF
6ガスを吸着させて分離して再生工程で取り出し、出口
3より送出する。一方、混合ガスである窒素ガスは、排
ガスタンク6に貯められてポンプ7により被回収容器2
6に戻される。むろん、被回収容器中の特定ガス濃度は
下がるがその濃度を検出し、ガス分離部のサイクルタイ
ム、あるいは導入、排出時のガス量等を濃度に応じて変
更し、適切に分離できるように制御する。
The adsorption cylinder 5 introduces the gas to be recovered from the electromagnetic valve 12, adsorbs the SF 6 gas to the adsorbent, and sets the electromagnetic valves 15, 9.
Is opened, and nitrogen gas is sent to the exhaust gas tank 6 and sent from the exhaust gas outlet 2 to the container 26 to be recovered in FIG. As described above, the pressure adsorption step, the pressure equalization step, and the regeneration step are repeated to separate the gas. In this way, the raw material gas is taken in from the to-be-collected gas inlet 1 by gas separation, and SF
The six gases are adsorbed and separated, taken out in the regeneration step, and sent out from the outlet 3. On the other hand, the nitrogen gas, which is a mixed gas, is stored in an exhaust gas tank 6 and is pumped by a pump 7.
Returned to 6. Of course, the specific gas concentration in the container to be recovered falls, but the concentration is detected, and the cycle time of the gas separation unit, or the amount of gas at the time of introduction and discharge is changed according to the concentration, and controlled so that it can be separated appropriately. I do.

【0034】図2(B)は、吸着剤に対象ガス(SF6ガ
ス)をほとんど吸着せず、混合ガスである窒素ガスの方
を吸着するゼオライトを用いる方式の分離部のフローシ
ートを示す。被回収ガス入口1より原料ガスを導入し、
電磁弁8,10を開として、吸着筒4に導き、吸着剤に
窒素ガス等を吸着させて、他端よりSF6ガスが濃縮し
て電磁弁14,18を通して出口3より図1のバッファ
タンク30に送りだされる。吸着筒4の吸着剤が窒素ガ
ス等の分離排ガスで満杯になる少し前に原料ガスの導入
を止め、再生工程の終了した吸着筒5との間に均圧化の
工程を行なう。
FIG. 2 (B) shows a flow sheet of a separation unit using a zeolite in which the adsorbent hardly adsorbs the target gas (SF6 gas) and adsorbs a mixed gas of nitrogen gas. Raw material gas is introduced from the recovered gas inlet 1,
The solenoid valves 8 and 10 are opened and guided to the adsorption cylinder 4 to adsorb nitrogen gas or the like to the adsorbent, SF6 gas is concentrated from the other end, and the buffer tank 30 of FIG. Sent out to. Shortly before the adsorbent of the adsorption cylinder 4 becomes full of the separated exhaust gas such as nitrogen gas, the introduction of the raw material gas is stopped, and a pressure equalization step is performed with the adsorption cylinder 5 after the regeneration step.

【0035】即ち、電磁弁8,18,11,13を閉と
し、電磁弁14,15及び10と12を開とし、吸着筒
4内に浮遊するSF6ガスを吸着筒5へ一部の窒素ガス
と共に移動させた後、電磁弁10,14,13を閉と
し、電磁弁11,9,8,12,15,18を開とし、
原料ガスを吸着筒5へ導入すると共に濃縮したSF6ガ
スは電磁弁15,18を通って出口3より導出される。
That is, the solenoid valves 8, 18, 11, and 13 are closed, the solenoid valves 14, 15, and 10 and 12 are opened, and SF6 gas floating in the adsorption cylinder 4 is supplied to the adsorption cylinder 5 with a part of nitrogen gas. And the solenoid valves 10, 14, and 13 are closed, and the solenoid valves 11, 9, 8, 12, 15, and 18 are opened,
The source gas is introduced into the adsorption column 5 and the concentrated SF 6 gas is discharged from the outlet 3 through the solenoid valves 15 and 18.

【0036】これにより、吸着筒5が吸着工程に入るこ
とになる。吸着筒4に吸着された分離排ガスは吸着剤に
吸着した窒素ガス等が離脱し、電磁弁11,9を通り排
ガスタンク6に貯えた後に、ポンプ7により排ガス出口
2より図2の被回収容器26へ送り出される。このよう
に、吸着工程,均圧工程,再生工程が繰り返されてガスが
分離される。被回収容器中の特定ガス濃度の低下は前記
の場合と同じであり、これも該濃度値によりガス分離部
の制御を同様に行う。
Thus, the adsorption cylinder 5 enters the adsorption step. The separated exhaust gas adsorbed by the adsorption column 4 is released from the exhaust gas outlet 2 by the pump 7 after the nitrogen gas or the like adsorbed by the adsorbent is released and stored in the exhaust gas tank 6 through the solenoid valves 11 and 9. 26. Thus, the adsorption step, the pressure equalization step, and the regeneration step are repeated to separate the gas. The decrease in the concentration of the specific gas in the container to be recovered is the same as in the case described above, and the control of the gas separation unit is similarly performed based on the concentration value.

【0037】なお、前記の図2(A)及び図2(B)のフロ
ーシートの説明における均圧工程はSF6ガスの加圧液
化の能力の関係で省くこともできる。
The pressure equalizing step in the description of the flow sheet shown in FIGS. 2A and 2B can be omitted because of the capability of pressurizing and liquefying SF6 gas.

【0038】[0038]

【発明の効果】特定ガス、SF6ガスと他の混合ガス
(例えば窒素ガス)とをPSA法によるガス分離部で分離
する場合に、100%完璧に分離することは技術的に困
難であるが、そのような場合であっても、本発明を実施
することにより、希釈されたSF6ガスが混在する混合
ガスを大気中に放出することなく前記の被回収容器内の
SF6ガスの分離回収処理が可能となる。
EFFECT OF THE INVENTION Specific gas, SF6 gas and other mixed gas
(E.g., nitrogen gas) in a gas separation section by the PSA method, it is technically difficult to achieve 100% perfect separation, but even in such a case, the present invention should be practiced. Thereby, the separation and recovery processing of the SF6 gas in the container to be recovered can be performed without releasing the mixed gas containing the diluted SF6 gas into the atmosphere.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の、特定ガスを分離するためのガス分離
部をPSA法とした場合の全体的な構成を示すフローシ
ートである。
FIG. 1 is a flow sheet showing an overall configuration of a gas separation section for separating a specific gas according to the present invention when a PSA method is used.

【図2】ガス分離部21の詳細な説明用のフローシート
である。図(2A)は、吸着剤に分子篩炭を用いて主に特
定ガスをその吸着剤に吸着させる場合のフローシートで
あり、図(2B)は、吸着剤にゼオライトを用いて主に特
定ガス以外の窒素ガス等をその吸着剤に吸着させる場合
のフローシートである。
FIG. 2 is a flow sheet for detailed explanation of a gas separation unit 21; FIG. 2A is a flow sheet in the case where a specific gas is mainly adsorbed to the adsorbent using molecular sieve charcoal as the adsorbent, and FIG. 2B is a flow sheet mainly using the zeolite as the adsorbent except for the specific gas. 5 is a flow sheet when the nitrogen gas or the like is adsorbed by the adsorbent.

【符号の説明】[Explanation of symbols]

1 被回収ガス入口 2 排ガス出口 3 出口 4,5 吸着筒 6 排ガスタンク 7,7’ ポンプ 8〜19 電磁弁 20 排ガス入口 21 ガス分離部 22 加圧部 23 液化部 24 貯留タンク 25 ガス供給部 26 被回収容器 27 窒素ボンベ 28 減圧弁 30 バッファタンク 31 加圧ポンプ 32 減圧弁 33 冷却器 34,36,37 電磁弁 35 液化タンク Reference Signs List 1 recovered gas inlet 2 exhaust gas outlet 3 outlet 4, 5 adsorption tube 6 exhaust gas tank 7, 7 'pump 8 to 19 solenoid valve 20 exhaust gas inlet 21 gas separation unit 22 pressurization unit 23 liquefaction unit 24 storage tank 25 gas supply unit 26 Container to be recovered 27 Nitrogen cylinder 28 Pressure reducing valve 30 Buffer tank 31 Pressurizing pump 32 Pressure reducing valve 33 Cooler 34, 36, 37 Solenoid valve 35 Liquefaction tank

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 ガス分離部とポンプを有する特定ガス回
収装置において、被回収容器より特定ガスを含む被回収
ガスを該ガス分離部に導入し、特定ガスと他の混合ガス
とに分離せしめて特定ガスを回収すると共に、該混合ガ
スを該ポンプにて被回収容器に戻すように構成したこと
を特徴とする特定ガス回収装置。
In a specific gas recovery apparatus having a gas separation unit and a pump, a gas to be recovered containing a specific gas is introduced from a recovery container into the gas separation unit and separated into a specific gas and another mixed gas. A specific gas recovery apparatus, wherein the specific gas is recovered and the mixed gas is returned to the container to be recovered by the pump.
【請求項2】 ガス分離部とポンプを有する特定ガス回
収装置において、被回収容器より特定ガスを含む被回収
ガスを該ガス分離部に導入し、特定ガスと他の混合ガス
とに分離せしめて特定ガスを回収すると共に、該混合ガ
スを該ポンプにて被回収容器に戻すように構成し、当該
被回収ガス濃度を測定し該ガス分離部の制御を当該濃度
値により変更するようにしたことを特徴とする特定ガス
回収装置。
2. A specific gas recovery apparatus having a gas separation unit and a pump, wherein a gas to be recovered containing a specific gas is introduced from a recovery container into the gas separation unit and separated into a specific gas and another mixed gas. The specific gas is recovered, and the mixed gas is returned to the container to be recovered by the pump, the concentration of the recovered gas is measured, and the control of the gas separation unit is changed according to the concentration value. A specific gas recovery device characterized by the above-mentioned.
【請求項3】 ガス分離部とポンプとガス供給部を有す
る特定ガス回収装置において、被回収容器より特定ガス
を含む被回収ガスを該ガス分離部に導入し、特定ガスと
他の混合ガスとに分離せしめて特定ガスを回収し、更に
該混合ガスを該ポンプにて被回収容器に戻すと共に、前
記のガス分離部へ導入する被回収ガスの圧力が一定値の
圧力よりも低くなった場合には該ガス供給部内のガスを
該被回収容器に導入するように構成したことを特徴とす
る特定ガス回収装置。
3. A specific gas recovery device having a gas separation unit, a pump and a gas supply unit, wherein a gas to be recovered containing a specific gas is introduced into the gas separation unit from a container to be recovered, and the specific gas and another mixed gas are introduced. When the specific gas is recovered by separating the mixed gas, the mixed gas is returned to the container to be recovered by the pump, and the pressure of the gas to be recovered introduced into the gas separation unit becomes lower than a predetermined value. And a gas recovery unit configured to introduce the gas in the gas supply unit into the container to be recovered.
【請求項4】 ガス分離部と加圧部及び液化部を有する
特定ガス回収装置において、該ガス分離部で特定ガスと
他の混合ガスとに分離する過程、並びに該液化部で特定
ガスを液化する過程で生ずる希釈された特定ガスを被回
収容器に戻すように構成したことを特徴とする特定ガス
回収装置。
4. In a specific gas recovery device having a gas separation unit, a pressurizing unit and a liquefaction unit, a process of separating the specific gas and another mixed gas in the gas separation unit, and liquefying the specific gas in the liquefaction unit A specific gas recovery device configured to return the diluted specific gas generated in the process of performing the recovery to the container to be recovered.
JP2001164310A 2001-05-31 2001-05-31 Equipment for recovering specified gas Pending JP2002355518A (en)

Priority Applications (1)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001164310A JP2002355518A (en) 2001-05-31 2001-05-31 Equipment for recovering specified gas

Publications (1)

Publication Number Publication Date
JP2002355518A true JP2002355518A (en) 2002-12-10

Family

ID=19007153

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007261824A (en) * 2006-03-27 2007-10-11 Jfe Steel Kk Method for separating and recovering carbon monoxide in source gas
JP2012061465A (en) * 2011-10-28 2012-03-29 Hitachi-Ge Nuclear Energy Ltd Gas refining method
CN114082279A (en) * 2021-11-18 2022-02-25 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride recovery control method, control device, terminal and storage medium

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JP2001087617A (en) * 1999-07-16 2001-04-03 Sanyo Electric Industries Co Ltd Sf6 gas recovery apparatus
JP2001129344A (en) * 1999-08-23 2001-05-15 Sanyo Electric Industries Co Ltd Sf6 gas recovery apparatus

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JP2001087617A (en) * 1999-07-16 2001-04-03 Sanyo Electric Industries Co Ltd Sf6 gas recovery apparatus
JP2001129344A (en) * 1999-08-23 2001-05-15 Sanyo Electric Industries Co Ltd Sf6 gas recovery apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007261824A (en) * 2006-03-27 2007-10-11 Jfe Steel Kk Method for separating and recovering carbon monoxide in source gas
JP2012061465A (en) * 2011-10-28 2012-03-29 Hitachi-Ge Nuclear Energy Ltd Gas refining method
CN114082279A (en) * 2021-11-18 2022-02-25 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride recovery control method, control device, terminal and storage medium
CN114082279B (en) * 2021-11-18 2024-05-24 国网河北省电力有限公司电力科学研究院 Sulfur hexafluoride recovery control method, control device, terminal and storage medium

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