JP2002218771A - Actuator and manufacturing method thereof - Google Patents

Abstract

(57) [Problem] To provide an actuator which is more resistant to disturbance and obtains a large displacement and a method of manufacturing the same. SOLUTION: A first electrode layer 11 is provided on both surfaces of a piezoelectric layer 12.
And the second electrode layer 13 are provided, and are configured to be curved on either surface side, so that the amount of displacement in the longitudinal direction can be further increased,
Further, since this direction is different from the direction in which the actuator is unstable with respect to disturbance, more stable displacement can be obtained even in the direction in which disturbance is applied.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator used for moving a head in a magnetic recording apparatus, opening and closing a shutter of an optical device, and a method of manufacturing the same.

[0002]

2. Description of the Related Art As a technique relating to a conventional actuator, Japanese Patent No. 2888261 is known.

FIG. 21 is a perspective view of a conventional actuator. Small displacement elements 351a, 351b, including piezoelectric elements, are provided on both surfaces of the beams 352a, 352b, respectively.
351c and 351d are adhered, and lead wires 354a, 354b, 354c and 35
4d (354b, 354d are not shown) is attached. The two beams 352a and 352b are connected at both ends, and the magnetic head 35 is connected at one connection portion.
3 is attached to the head arm 355 at the other joint.

When the micro displacement element is a piezoelectric element and electrodes are provided on both surfaces thereof, and when the beam is made of a conductive material, an electric field is applied between the lead wire and the beam. The piezoelectric element is deformed. At this time, the piezoelectric element undergoes a change in the longitudinal direction due to the piezoelectric transverse effect simultaneously with the deformation in the thickness direction. The length of the beam also changes with the deformation of the piezoelectric element, but if this change occurs in the opposite direction for each beam, that is, if one beam is elongated, the other is driven so that it shrinks. Is performed, a rotational displacement can be obtained at the position of the magnetic head.

[0005] Laminated actuators called bimorphs or unimorphs are generally widely known. FIG. 22 is a perspective view of a conventional unimorph-type actuator, in which a piezoelectric element 361 having electrodes formed on both sides,
It has a configuration in which the shim 362 is bonded. Shim 36
2 is generally a conductive flat plate such as stainless steel or copper. A wiring pattern 364 for shim is provided on the fixing member 365.
And the shim 362 are abutted and fixed, and a lead wire 363 is attached to an electrode on the surface of the piezoelectric element 361.

By applying an electric field between the shim wiring pattern and the lead wire, the piezoelectric element is deformed. At this time, the piezoelectric element produces a longitudinal displacement due to the piezoelectric transverse effect,
This displacement is converted into a bending displacement by bonding to the shim, so that a displacement is obtained at the free end of the unimorph type actuator in the direction perpendicular to the plane of the actuator. Strictly speaking, this displacement is a rotational displacement about the fixed end. However, since the vertical displacement is much larger than the influence of the rotation, it is generally regarded as almost vertical displacement.

[0007]

However, in the conventional actuator using displacement in the longitudinal direction, the displacement amount is generally accurate, but the displacement amount is extremely small. Alternatively, it was necessary to drive using a high voltage. In addition, the bonded actuator can obtain a relatively large displacement in a solid actuator using a piezoelectric element, but is vulnerable to external vibration. In particular, it is remarkable for a disturbance acting in a direction perpendicular to the surface of the actuator, that is, in the same direction as the displacement, and there has been a problem that a sudden acceleration makes driving difficult.

An object of the present invention is to provide an actuator capable of solving the above-mentioned problems, being more resistant to disturbances, and capable of obtaining a large displacement, and a method of manufacturing the same.

[0009]

To achieve this object, the present invention has the following arrangement.

According to a first aspect of the present invention, there is provided a bonded actuator having a piezoelectric layer and electrode layers on both surfaces of the piezoelectric actuator, the whole being curved to one side. As a result, the displacement direction can be obtained not only in the direction perpendicular to the surface but also in the longitudinal direction of the actuator, and the displacement direction, which is the weakest against disturbance, can be shifted from the direction perpendicular to the surface. Therefore, an operational effect of obtaining a larger displacement that is stable against disturbance can be obtained.

According to the second aspect of the present invention, since the vicinity of one end of the laminated portion of the piezoelectric layer and the two electrode layers is fixed, the vicinity of the free end of the laminated portion is in the same direction as the actuator surface of the fixed portion. Is obtained.

According to the third aspect of the present invention, since at least the piezoelectric layer and both electrode layers are formed by a thin film having a small thickness by, for example, a sputtering method, the size of the entire actuator can be reduced, and each layer is made of a thin material. Therefore, different stresses can be imparted to the inside of each thin film depending on the film forming conditions without destruction due to a large curvature, and the member can be bent or the piezoelectric layer can be added to the originally curved member. Thus, the operation and effect can be easily achieved without going through a complicated process such as forming.

According to a fourth aspect of the present invention, the first electrode layer and the second electrode layer are made of materials having different thermal expansion coefficients, so that the temperature difference between a film forming temperature and a normal temperature is caused. Since the shrinkage differs in each electrode layer, an operation and effect that a curved structure can be easily exhibited can be obtained.

According to the fifth aspect of the present invention, since the first electrode layer and the second electrode layer are made of the same material and have different internal stresses, the curved structure can be easily formed by the difference between the two stresses. In addition, since the electrodes sandwiching the piezoelectric layer are made of the same material, an operational effect is obtained in that the electrodes are stable with time without generating an unnecessary potential difference.

According to the present invention, since the thicknesses of the first electrode layer and the second electrode layer are made different from each other, even if the same material is used and the internal stress is the same, they are mutually different. Since an imbalance is generated in the force, an operation and effect that the curved structure can easily appear can be obtained.

According to the seventh aspect of the present invention, since the resin layer which changes in volume after curing is formed on the surface of the electrode layer, the curved structure can be easily formed by the change in volume without giving special consideration to the thin film. In addition, the effect of protecting the electrode surface can be obtained.

According to an eighth aspect of the present invention, the plate-like elastic member is bonded to the electrode layer by a resin layer. The plate-like elastic member not only increases the strength of the entire actuator, but also increases the strength of the plate-like elastic member. If it is a conductive material, it also functions as an electrode, so it is easy to handle and mount,
The operation and effect that the actuator can have a predetermined strength and resonance frequency can be obtained.

According to the ninth aspect of the present invention, the material of the resin layer is a material such as a photoresist which has a film-like shape at the time of application and has the same shape after the effect. A uniform resin layer is obtained, the actuator characteristics do not vary, and it is possible to adhere uniformly to the surface of the electrode layer, which is a thin film. Thus, a uniform curved structure can be obtained, and furthermore, it is possible to prevent locally different stress from being applied to the thin film, and thus it is possible to obtain the effect of preventing breakage such as cracking.

According to the tenth aspect of the present invention, since the coefficient of thermal expansion of the electrode layer and the coefficient of thermal expansion of the flat elastic member are made different, a curved structure can be easily obtained only by heating and bonding. If the same material is used for the electrode layer and the second electrode layer, an unnecessary potential difference can be prevented from being generated between the two, and an operational effect of being stable can be obtained.

[0020] According to an eleventh aspect of the present invention, the laminated portions composed of the piezoelectric layer and the electrode layer are arranged in parallel, one end is fixed to a fixing member, and the other end is connected. Is an actuator that drives so as to be displaced in the opposite direction. Having a plurality of laminated portions increases the driving force and vibration resistance of the entire actuator, and the connecting portion receives a force in the longitudinal direction of each laminated portion. , And this force acts in the opposite direction,
The displacement of the curved laminated portion is converted into a rotational displacement at the connecting portion, and the operation and effect can be obtained such that the displacement direction can be changed and the displacement amount is enlarged.

According to the twelfth aspect of the present invention, since the connecting portions are provided at the ends on the different sides of the side-by-side stacked portions and the connecting portions are provided across the other end portions, the respective stacked portions are the same. Since the driving is performed in the displacement in the direction, the driving method including the circuit is easy, and the effect of increasing the displacement can be enhanced by increasing the length of the connecting portion.

According to the thirteenth aspect of the present invention, by providing a cutout, a through hole, a groove, and the like between each of the laminated portions and the connecting portion, the rigidity of only this portion is reduced, and the rotational displacement is more easily performed. The effect of increasing the effect of displacement enlargement is obtained.

According to the present invention, the resonance frequency can be increased because the laminated portion has a shape whose width decreases from the fixed end to the displacement end.
In a portion having a small width, the influence of the bending in the width direction is reduced, and the bending in the longitudinal direction becomes more dominant. Therefore, an operational effect that a larger bending and displacement can be obtained in the longitudinal direction is obtained.

According to the fifteenth aspect of the present invention, only the vicinity of both ends of the same curved actuator is bonded, so that the driving force and rigidity are higher than that of a single actuator, and the entire surface is bonded. Although the rigidity is slightly reduced, the deformation amount can be increased because the deformation can be increased.In addition, if each actuator is deformed in the same direction, the displacement other than the longitudinal direction is regulated, and a linear displacement is obtained only in the longitudinal direction. The operation and effect are obtained.

The invention according to claim 16 is one in which the actuator with the connecting portion is formed by using the actuator, and the operation and effect of being able to form the actuator which is less susceptible to disturbance can be obtained.

According to the seventeenth aspect of the present invention, the actuator with the connecting portion is constituted by using the actuator, and the operation and effect that the actuator more resistant to disturbance can be constituted can be obtained.

The invention according to claim 18 is characterized in that a curved laminated portion is provided which is connected to two beams forming one acute angle with one end thereof being connected to each other, and the two laminated portions are displaced in the longitudinal direction. By changing the angle formed by the beams, it is possible to obtain the effect of increasing the amount of displacement in accordance with the length of both beams.

According to a nineteenth aspect of the present invention, while the multi-end side of two beams having one end joined to each other and forming an acute angle is fixed to another member, a laminated portion curved near the fixing portion is formed by each beam. By disposing the stacked parts so that they are not parallel to the longitudinal direction and displacing the laminated parts in opposite directions, each beam performs a rotational movement about the fixed part, thereby obtaining a rotational movement in which the displacement is enlarged at the joint part of the beams. The operation and effect of being obtained are obtained.

According to a twentieth aspect of the present invention, the rotational center line of the two joined beams is perpendicular to the longitudinal direction of the laminated portion, and the displacement of the laminated portion in the longitudinal direction is most efficiently performed. And an operation effect that a larger displacement amount can be obtained.

According to the twenty-first aspect of the present invention, since the operating end of the actuator having the curved laminated portion is pressed against another member, the position of the operating portion of the actuator can be specified, and the structure is close to a doubly supported beam. Therefore, the effect of increasing the resonance frequency can be obtained.

According to the twenty-second aspect of the present invention, only the vicinity of both ends of the curved laminated portion is bonded to another plate-like elastic member, so that the overall rigidity is increased, the resonance frequency is increased, and the vibration resistance is improved. As a result, it is easier to deform than to adhere to the entire surface, so that an effect of enabling a larger displacement can be obtained.

According to a twenty-third aspect of the present invention, the first electrode layer and the second electrode layer are made of the same material, and are formed under different sputtering conditions such as a gas pressure and a film formation rate. The device and target can be shared by each electrode layer, which is advantageous in terms of workability, and different internal stresses can be generated depending on the sputtering conditions. Can be obtained.

According to a twenty-fourth aspect of the present invention, as the material of the resin layer, a material which can be applied only on a conductive material by an electric field is used. As a result, not only can the product be applied only to a predetermined portion to improve the productivity, but also the effect of preventing excess resin from adhering to eliminate adverse effects such as variation in actuator characteristics and reduction in displacement can be obtained. Can be

According to a twenty-fifth aspect of the present invention, a masking material is provided on one surface of a conductive member, and a resin material is applied to only one surface by an electric field. There is no need to provide an electrode or the like for such a purpose, and this can be prevented by a masking material at locations where application is not required, and an effect that a large amount and easy application can be performed at once can be obtained.

According to a twenty-sixth aspect of the present invention, an electrode is provided only at a specific location on a non-conductive member, and a resin is applied only on the electrode by an electric field. The resin layer can be formed finely and finely, and the effect of applying and bonding a resin more suited to the shape of the actuator can be obtained.

According to a twenty-seventh aspect of the present invention, a plurality of deposition substrates are bonded to one flat elastic member on which a resin layer is formed, and only the deposition substrates are removed collectively as a whole. After leaving the laminated portion, patterning of the laminated portion,
It is easy to work because there is no need for positioning when bonding the film-forming substrate, and the patterning of the laminated part can be performed uniformly and with high precision by using photolithography and the like. Since it is a form attached to the member described above, the operation and effect that the thin film is not broken and the handling is easy can be obtained.

According to a twenty-eighth aspect of the present invention, a photosensitive resist or a material for a protective film is used as an adhesive, and bonding is performed after patterning by photolithography. In addition, it can be manufactured with high precision and can prevent the surplus resin from remaining on the actuator.The resist material or the material for the protective film can be easily obtained with a uniform film thickness by spin coating, etc. Since it can be formed, the laminated portion can be adhered by a uniform resin layer, and an effect that local unnecessary stress can be prevented and destruction can be prevented can be obtained.

According to a twenty-ninth aspect of the present invention, after a resin layer is formed on the entire surface of the film forming substrate on which the laminated portion is formed, patterning is performed, and the resin layer is left only at the bonding portion and is aligned with the flat elastic member. This prevents adhesion of unnecessary resin and prevents deterioration of the actuator characteristics due to protrusion and the like. In addition, a plurality of actuators formed on one film forming substrate are collectively Adhesion can be performed, and by adhering a plurality of film-forming substrates to a single flat elastic member, the following effect can be obtained.

According to a thirty-first aspect of the present invention, a resin layer is formed only at a portion to be bonded, for example, specifically near both ends of a laminated portion on a film forming substrate, and two film forming substrates are overlapped. This removes only the film-forming substrate after the resin is cured, preventing unnecessary adhesion of the resin and at the same time, since all the work up to superposition is with the film-forming substrate, handling and positioning are easy, After the removal of the film substrate, the laminated portion is naturally curved, and the operation and effect that the actuator can be easily configured can be obtained.

The invention according to claim 31 corresponds to an actuator on a film-forming substrate when a first electrode layer, a piezoelectric layer, and a second electrode layer are sequentially formed on the film-forming substrate. A part where only the first electrode layer is formed on a part of the part where the first electrode layer is formed, and a part where the first electrode layer is exposed on a part of the actuator after the film-forming substrate is removed. Can be formed, the subsequent electrode take-out is easy, and in addition, since the operations such as the patterning of the electrodes are performed with the film-forming substrate, the operation and effect of the easy operation can be obtained.

According to a thirty-second aspect of the present invention, after completely removing only one of the two stacked film-forming substrates, it is divided into individual pieces and mounted on another member, and the remaining film-forming substrates are removed. Therefore, there is obtained an operational effect that positioning and handling at the time of mounting are easy and breakage of the actuator can be prevented.

According to a thirty-third aspect of the present invention, a stepped portion between electrodes formed on the actuator is provided by providing a plastic conductive member at a position where the actuator is fixed and pressing the conductive member when the actuator is fixed. Can be absorbed by the conductive member, so that the effect of mounting and taking out the electrode is easy.

[0043]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) Hereinafter, the first embodiment of the present invention will be described in detail with reference to claims 1, 3 to 6 and 23.
Will be described.

FIG. 1 is a perspective view of an actuator according to Embodiment 1 of the present invention.

In FIG. 1, reference numeral 11 denotes a first electrode layer;
Is a piezoelectric layer, 13 is a second electrode layer, 14 is a laminated portion, 15
Denotes a first extraction line, and 16 denotes a second extraction line. The laminated portion 14 is formed by sandwiching the piezoelectric layer 12 between the first electrode layer 11 and the second electrode layer 13. Second electrode layer 1
3 is slightly larger than the laminated portion 14 and the laminated portions 14 are formed at both ends.
And bent near both ends depending on the application. A first lead line 15 and a second lead line 16 for applying an electric field are attached to the first electrode layer 11 and the second electrode layer 13, respectively. And the lamination part 14
Has a configuration curved toward the second electrode layer 13 side. As a method of manufacturing the curved structure, a method of bonding another member to an originally curved member or a method of bonding all members after bending them may be used. However, it is complicated to perform the bonding after bending the member once, and the piezoelectric ceramic or the like used as the piezoelectric layer 12 is usually a brittle material. It is not easy to make up. Therefore, in order to solve such a point, each layer is constituted by a thin film. Generally, the bending stress applied to a beam-shaped member is proportional to the material constant and the thickness when the radius of curvature is the same. Therefore, when the thickness is small, the stress applied to the material is small. When the stress is equal to or less than the elastic limit of each material, the material functions well as a component of the actuator without permanent deformation. In other words, if the thickness is small, the size can be reduced as a whole, and the film becomes more flexible against bending deformation, so that the curved structure as in the present embodiment is easy. For example, at a length of 5 mm, about 1 m
When trying to bend m, at a thickness of 2 μm,
If a similar shape is to be obtained when the thickness of the same material is 20 μm, a length of 50 mm is required.
Such a material having a small thickness can be easily formed by a thin film forming method such as a sputtering method.

Further, since such a thin film has various internal stresses depending on the conditions at the time of film formation and the like, if these are laminated, the film naturally curves, and a step of bending the member is not required. First electrode layer 11
When sputtering is performed using the same material as the first electrode layer 13 and the second electrode layer 13, if the conditions are changed, the respective internal stresses can be different, and a curved structure can be naturally obtained when the actuator is used. Conversely, if the first electrode 11 and the second electrode 13 are made of the same material, sputtering can be performed by the same apparatus, and the productivity is good.
Alternatively, generation of a potential difference due to a difference in material between the two electrodes can be prevented, and the electrode is stable over time. As a material of the thin film, PZT is used for the piezoelectric layer 12, and Pt, Ti, Cr, and the like are used as an electrode material.
In the case of (1), a different internal stress can be easily generated by changing the Ar pressure at the time of sputtering. At this time, if the internal stress on the side serving as the concave electrode layer on the curved side is closer to the direction of reduction in the plane than on the other side, a predetermined curved structure can be obtained by the difference between the two stresses. Here, the concave side means an inner peripheral side when the curved state is viewed as a part of a circle.

Alternatively, the same effect can be obtained by changing the thickness of the same material. That is, even if the first electrode 11 and the second electrode 13 have the same internal stress, if the thicknesses are different, the balance of the forces is lost,
One of them will bend. For example, when both have an internal stress in the direction of contraction in the plane, a predetermined curved structure can be obtained by increasing the thickness of the electrode layer on the concave side of the curve. The effect on productivity and stability in this case is the same as that when the internal stress is varied.

Also, the first electrode 11 and the second electrode 13
A curved structure can be easily exhibited even if the materials (1) and (2) have different thermal expansion coefficients. That is, in film formation such as sputtering, the substrate is heated in advance, or the substrate temperature rises during sputtering, but when the temperature is returned to room temperature, the shrinkage ratio of each material is different. Has a naturally curved structure.

An example of a method of manufacturing the actuator will be described in detail later. For example, after forming each layer in order on one substrate, the substrate is removed by etching. A curved structure is already obtained when the substrate is etched.

The bonded type actuator having such a curved structure can positively use not only the conventional displacement in the direction perpendicular to the actuator surface but also the displacement in the longitudinal direction. is there. That is, in the related art, the direction in which the displacement is obtained coincides with the direction in which the rigidity of the actuator is the lowest, so that it is very weak against external vibration in this direction, and it is difficult to always obtain a stable displacement. However, the actuator of the present embodiment avoids such a point in terms of shape, and is more stable against vibration in the same direction as the required displacement direction. For example, when a conventional unimorph actuator is used as an actuator for fine adjustment of rotational displacement on another rotating body,
Since the rotation direction matches the displacement direction of the actuator, and the plane of the actuator is orthogonal to the rotation direction, the displacement of the actuator is greatly affected by the movement of the rotating body. On the other hand, when the present actuator is used, the plane of the actuator can be substantially parallel to the rotation direction, so that the actuator can be hardly affected by the rotational displacement. In addition, since a displacement in a direction different from that in the related art can be obtained in this way, it is possible to provide a wider mechanical design of the peripheral portion.

In this embodiment, the piezoelectric layer 1
Although two and two electrode layers are mainly used, similar effects can be obtained by providing another member as needed.

In addition, although the present embodiment has been described as an actuator using a piezoelectric body, the deformation is similarly generated even if, for example, a magnetostrictive element or a material that contracts by light is used instead. A similar effect can be obtained if the element section has a curved configuration.

(Embodiment 2) Hereinafter, Embodiment 2 of the present invention will be described with reference to Embodiments 2 to 6 and 23.

FIG. 2 is a perspective view of an actuator according to Embodiment 2 of the present invention.

In FIG. 2, reference numeral 21 denotes a first electrode layer;
Is a piezoelectric layer, 23 is a second electrode layer, 24 is a laminated portion, 25
Is a take-out part, 26 is a fixing member, and 27 is a fixing part.
The configuration of the stacked unit 24 is the same as that of the first embodiment, except for the fixing unit 27. That is, one end is fixed by the fixing member 26, and only the fixing portion 27 and the first electrode layer 21 are thinly patterned in the width direction to form the extraction portion 25.

According to this configuration, when the fixing member 26 is made of a conductive material, an electric field can be applied from the fixing member 26 by contact with the second electrode layer 23. Also, the first electrode layer 2
1 applies an electric field from the extraction unit 25,
There is an effect that the reliability is improved by making the take-out portion 25 thin. That is, since the material used is a thin film, the thickness is extremely small. If a leak occurs at the edge of the thin film with another electrode layer due to dust or the like, driving cannot be performed. In addition, even in the case where there is a leak portion inside the piezoelectric layer 22, a situation in which driving is impossible occurs.
Therefore, by minimizing the area of the electrode except for the part that actually functions as an actuator, and retreating the end to provide a distance between other electrodes, stable driving and manufacturing can be performed. is there. By fixing one end, all displacements can be obtained on the free end side, and a larger displacement can be obtained. In this case, the amount of displacement in the longitudinal direction of the actuator or the same direction as the plane direction of the actuator in the fixed portion 27 is obtained by the curvature of the laminated portion 24.

(Embodiment 3) Hereinafter, a third embodiment of the present invention will be described with reference to Embodiment 3.

FIGS. 3 and 4 are side views of the actuator according to the third embodiment of the present invention.

In FIG. 3, reference numeral 31 denotes a first electrode layer;
Is a piezoelectric layer, 33 is a second electrode layer, 34 is a laminated portion, 35
Denotes a take-out portion, and 36 denotes a resin layer. A first electrode layer 31 is formed on one surface of the piezoelectric layer 32, and a second electrode layer 33 is formed on the other side of the piezoelectric layer 32, thereby forming a laminated portion 34. The take-out portion 35 is a take-out portion of the first electrode layer 31 such as a lead wire or a flexible substrate, and the second electrode layer 33 is provided with a wiring pattern on a member to be fixed, for example.
An electric field is applied by being brought into contact with this. A resin layer 36 is provided on at least a portion of the second electrode layer 33 corresponding to the laminated portion 34. The material of the resin layer 36 is
The volume shrinks after curing, so that the laminated portion 3
4 receives a compressive force on the second electrode layer side, and as a result, the laminated portion 34 is curved. According to this method, it is possible to easily and arbitrarily create a curve according to the material and thickness of the resin layer, and in addition, the resin layer adjusts the effect of protecting the surface of the electrode layer and the resonance characteristics of the actuator. It also plays a role. In other words, the actuator has various resonance frequencies, and unnecessary resonance may be excited in synchronization with the drive frequency. However, the formation of the resin layer shifts the resonance frequency itself or reduces the resonance energy. As a result, the influence on normal driving can be reduced.

In FIG. 4, reference numeral 41 denotes a first electrode layer;
42 is a piezoelectric layer, 43 is a second electrode layer, 44 is a laminated portion,
45 is a take-out part, 46 is a fixing member, and 47 is a resin layer. In this case, the actuator is actually fixed to the fixing member 46. First electrode layer 41, piezoelectric layer 4
2. A curved laminated portion 44 is formed by the second electrode layer 43, and the second electrode layer 43 is fixed to the fixing member 46 via the resin layer 47. The first electrode layer 41 on the fixed portion is patterned to be thin in the width direction, and
Is formed. The effect of making the take-out part 45 thinner is the same as in the second embodiment. Also in this case, the resin layer 47 is formed on the second electrode layer 43, and similarly to the case of FIG. 3, the effect of the appearance of the curved shape, the effect as the protective film, the effect of adjusting the resonance characteristics, and the like are similarly obtained. Have.

In this case, since one end is fixed, a displacement in the same direction as the plane of the actuator in the fixed portion, or a displacement in a substantially longitudinal direction is obtained on the free end side. If the thickness of the resin layer in the fixing portion is sufficiently small, the second electrode partially contacts the fixing member, so that an electric field can be applied from the fixing member.

(Embodiment 4) Hereinafter, a fourth embodiment of the present invention will be described in particular with reference to claims 8 to 11 and 13.

FIG. 5 is a perspective view of an actuator according to Embodiment 4 of the present invention.

In FIG. 5, 51a and 51b are first electrode layers, 52a and 52b are piezoelectric layers, 53a and 53b are second electrode layers, 54a and 54b are take-out portions, 55 is a fixing member, and 56a and 56b Is a flat elastic member, 57 is a connecting portion, and 58a and 58b are cutout portions.

FIG. 6 is a side view of the same. 61 is a first electrode layer, 62 is a piezoelectric layer, 63 is a second electrode layer, 64 is a laminated portion, 65 is a take-out portion, 66 is a fixing member, 67, a resin layer (not shown in FIG. 5); 68, a flat elastic member;
9 is a connection part.

The first electrode layers 51a and 51b are provided on one surface of the piezoelectric layers 52a and 52b, respectively, and the second electrode layers 53a and 53b are provided on the other surface. I have. A thin resin layer (not shown) is formed on the surfaces of the second electrode layers 53a and 53b, and is adhered to the conductive flat elastic members 56a and 56b. One ends of the plate-like elastic members 56a and 56b are integrated by a connecting portion 57 through notches 58a and 58b. Actually, the structures of the flat member, the cutout portion, and the connecting portion are integrally formed by etching one plate member. The actuator having these configurations is fixed by bringing the fixing member 55 into contact with the plate-like elastic members 56a and 56b. First electrode layers 51a, 51 on fixing member 55
b is formed to be thin in the width direction, and the take-out portions 54a, 54b
Is provided. An electric field can be applied by these extraction portions, the wiring pattern provided on the fixing member, and the flat elastic member. At this time, the voltage signal applied to the flat elastic member is common, and the voltage signal applied to the first electrode layer is +-
By reversing, both laminated portions are respectively displaced to the opposite sides. At this time, since the connecting portion receives the displacement in the longitudinal direction of the laminated portion in the opposite direction at both ends, a rotational displacement occurs. This rotational displacement becomes larger due to the presence of the notch portion having low rigidity. Also in this case,
The effect of large displacement in the longitudinal direction due to the curvature of the laminated portion is similarly utilized. Further, the effect of such a notch can be similarly obtained even when a through hole or a through groove is provided.

In this actuator with a connecting portion, the plate-like elastic member and the laminated portion 64 are adhered by the resin layer 67. This is because the rigidity of the laminated portion 64 is enhanced and the curving of the laminated portion 64 is simultaneously performed. Also contributes to out. That is, the coefficient of thermal expansion of the flat elastic member 68, the first and second
The electrodes 61 and 63 have different coefficients of thermal expansion,
When bonding is performed using a thermosetting resin layer 67, the laminated portion 64 is curved due to a difference in shrinkage after bonding. For example, if the coefficient of thermal expansion of the plate-like elastic member 68 is larger than that of each electrode material, when the plate-like elastic member 68 is returned to room temperature after bonding and curing, the plate-like elastic member 68 has a concave side. That is, according to this method, a curved shape can be obtained without using a special method for the material and forming conditions of the electrode, and the rigidity of the actuator can be enhanced.
In addition, after applying and curing the resin material layer at room temperature, a material having a film form, for example, a material such as a resist, is used, so that a thin film can be obtained uniformly, and a uniform adhesion can be obtained as a whole. This can prevent local force from being applied to the thin film material, thereby preventing cracking and the like. If the resin layer 67 is made thinner,
Electrical conduction can be established between the second electrode layer 63 and the flat elastic member 68, and application of an electric field is easy.

(Embodiment 5) Hereinafter, a fifth embodiment of the present invention will be described with reference to FIGS.

FIG. 7 is a plan view of an actuator according to Embodiment 5 of the present invention.

In FIG. 7, 71a and 71b are first electrode layers, 72a and 72b are piezoelectric layers, 73a and 73b are upper extraction portions, 74 is a fixing member, 75 is a connecting portion, 76
a and 76b are cutout portions, 77 is a lower take-out portion, 78
Denotes an operating unit. The first electrode layers 71a and 71b, the piezoelectric layers 72a and 72b, and the second electrode layer (not shown) form a laminated portion similarly to the fourth embodiment, and have a plate-like elastic member (not shown). Are bonded in the same manner as in the fourth embodiment. The upper take-out portions 73a and 73b are fixed members 7
4, the pad portions are provided after the widths of the first electrodes 71a and 71b are reduced. The configuration up to this point is almost the same as that of the fourth embodiment, but the present embodiment is different in that the fixing points of the respective laminated portions are on opposite sides in the longitudinal direction. The free end side of each laminated portion has a cutout portion 76a,
The connecting portion 75 is connected via a connecting portion 76b, and an operating portion 78 is attached to a central portion of the connecting portion 75. Here, the flat elastic member, the cutout portion and the connecting portion are made of the same conductive material. On the fixing member 74, a lower take-out portion 77 is provided as a wiring pattern, which is located under the flat elastic member, and is electrically connected to the second electrode. The point that a voltage signal is applied between the first and second electrodes is also the same as in the fourth embodiment. However, in the case of this configuration, the connecting portion 75 is displaced such that the laminated portions extend in the same direction, for example, both in the longitudinal direction. Can be given a rotational displacement, and the driving signals to the two laminated portions can be the same, so that the circuit and the like can be simplified. The effects of the notches 76a and 76b are the same as those of the fourth embodiment, but in the case of this configuration, the connecting portion is longer in shape, so that the effect of the displacement enlargement due to the rotational displacement is more remarkable.
In order to efficiently generate the displacement enlarging effect, it is preferable that the connecting portion 75 be a rigid body. However, when the connecting portion 75 is made to be a rigid body, deformation of the flat elastic member or the connecting portion due to the driving force of the actuator is not obtained, and as a result, No displacement can be obtained. Therefore, such a problem can be solved by providing a cutout portion at an appropriate location and partially creating a location with low rigidity.

(Embodiment 6) Hereinafter, a sixth embodiment of the present invention will be described with reference to FIG.

FIG. 8 is a perspective view of an actuator according to Embodiment 6 of the present invention.

In FIG. 8, reference numeral 81 denotes a first electrode layer;
Is a piezoelectric layer, 83 is a second electrode layer, 84 is a laminated portion, 85
Denotes an upper take-out portion, 86 denotes a fixing member, and 87 denotes a lower take-out portion. The structure of the laminated portion 84, the point that the width of the first electrode layer 81 is reduced to provide the upper extraction portion 85, and the like, and the attachment to the fixing member 86 are the same as in the example in the second embodiment. . The difference is that the lower take-out part 87
The second electrode 83 is exposed as a result of processing the piezoelectric layer 82 so as to remain along the upper extraction portion 85. In addition, the width dimension of the laminated portion is reduced as the distance from the fixed side increases. As a result, the resonance frequency of the actuator can be set higher, so that the responsiveness of the drive is improved.Also, in a portion where the dimension in the width direction is small, the bending deformation in the width direction can be reduced. As a result, the curvature in the longitudinal direction can be increased, and Since the amount of flexural deformation in the longitudinal direction of the laminated portion also increases, the effect of increasing the amount of displacement of the actuator in the longitudinal direction can be obtained. The shape of the actuator plane for this purpose may be a trapezoid or the like in addition to a triangle, or the width dimension may be changed in a hyperbolic manner. It can be easily realized by techniques such as etching and etching.

(Embodiment 7) Hereinafter, a seventh embodiment of the present invention will be described with reference to FIGS.

FIG. 9 is a side view of an actuator according to Embodiment 7 of the present invention.

In FIG. 9, reference numerals 91a and 91b denote first electrode layers, 92a and 92b denote piezoelectric layers, 93a and 93b denote second electrode layers, 94a and 94b denote laminated portions, 95a and 95b.
Is an upper take-out portion, 96 is a fixing member, 97a and 97b are lower take-out portions, 98 is an upper pad portion, 99 is a lower pad portion, and 100 is a take-out line. The laminated portion 94a,
94b is a first electrode layer 91a, 91b, a piezoelectric layer 92
A point composed of a, 92b and second electrode layers 93a, 93b is the same as in the first embodiment. This laminated portion 94a,
The second electrode layers 93a and 93b are bonded in the vicinity of both ends and at a portion fixed to the fixing member 96, and the second electrode layers 94b are bonded in the opposite directions. 94a and 94b are not bonded to each other. On the fixing member 96, the second electrode layer 93a,
93b, piezoelectric layers 92a and 92b, first electrode 91a,
Patterning is performed in the order of 91b to form an electrode extraction portion, and the piezoelectric layers 92a and 92b are formed in the upper extraction portion 9
5a and 95b are insulated from the lower extraction portions 97a and 97b. A wiring pattern (not shown) is provided on the fixing member 96 at a position corresponding to each take-out portion, and the upper pad portion 9 is provided.
8, a lower pad portion 99 is provided, and an upper take-out portion 9
5b and the lower take-out part 97b are respectively abutted and fixed. The lower take-out portion 97a is electrically connected to the lower take-out portion 97b with a thin resin layer, so that the upper take-out portion 95a is electrically connected to the upper pad portion 98 and the upper take-out portion 95b by the take-out line 100. I have.

In this state, when an electric field is applied between the upper extraction portion 95a and the lower extraction portion 95b from the wiring pattern, distortion occurs in the laminated portions 94a and 94b, but the displacement on the free end side of the actuator is
In the direction perpendicular to the longitudinal direction of the actuator, displacement does not occur mutually and does not occur, so that movement occurs only in the longitudinal direction. In addition, even when variations in the curvature of the laminated portions 94a and 94b occur, such variations can be reduced by offsetting the two laminated portions 94a and 94b. Therefore, regarding the displacement and the curvature of the actuator,
This eliminates the need to pay attention to the direction perpendicular to the longitudinal direction, and makes it easier to use. In addition, since the two laminated portions 94a and 94b are opposed to each other, the rigidity of the actuator is high and the resistance to disturbance is excellent. Such an actuator can be easily realized by bending the laminated portion.

The configuration of the actuator according to the present embodiment is merely an example, and the laminated portions 94a and 94b
Is formed as a thin film, as described above, the curvature can be more easily formed.
Even when a plate-like elastic member is provided on the surface of the electrode 93b to enhance the rigidity of the actuator, or when a notch is provided near the fixed portion to increase the amount of displacement, the effect of the present actuator up to the point described above is obtained. Is not lost.

Further, the laminated portion of the actuator with the connecting portion according to the fourth and fifth embodiments can be replaced with the opposed type actuator of the present embodiment. In this case, when the connecting portion is attached to the free end of the opposed actuator or when the laminated portions 94a and 94b are bonded to face each other, the connecting portion is provided on the free end side and the conductive portion having the same thickness as the connecting portion is provided on the fixed end side. It can be easily realized by a method such as bonding through a conductive member. In this way, in addition to the effects of the fourth and fifth embodiments, the present embodiment has an effect, that is, the rigidity of the actuator is increased, so that the disturbance resistance is improved. Variations in warpage can be reduced, and positioning at the time of mounting is easy. In addition, since the driving force of the actuator increases, the connection portion having higher rigidity can be deformed, and in this respect, vibration resistance and the like are improved.

(Eighth Embodiment) Hereinafter, an eighth embodiment of the present invention will be described with reference to FIG.

FIG. 10 is a perspective view of an actuator according to Embodiment 8 of the present invention.

In FIG. 10, reference numeral 101 denotes a laminated portion;
Reference numerals a and 102b denote beam-shaped members, 103 denotes a coupling portion, 104 denotes a fixed member, 105 denotes an upper wiring pattern, 106 denotes a lower wiring pattern, 107 denotes a lead-out line, 108 denotes a flat elastic member, and 109 denotes a lead-out portion. .

FIG. 11 is a cross-sectional view taken along the line AA in FIG. 10, wherein 111 is a first electrode layer, 112 is a piezoelectric layer, 113 is a second electrode layer, 114 is a laminated portion, 11
5a and 115b are beam members, 116 is a flat elastic member,
117 is a take-out part, and 118 is a take-out line.

Each of the beam members 102a and 102b has a flat plate shape, and is connected at one end by a connecting portion 103. In the vicinity of the connecting portion 103, a flat elastic member 108 is provided.
2a and 102b are joined together in a bridging manner, and they are integrally formed from a single plate-like member. A laminated portion 101 is adhered to the flat elastic member 108 and a part of the beam-shaped member 102b, and a part of the laminated portion 101 constitutes a take-out portion 109 on the beam-shaped member 102b. The upper wiring pattern 10 is provided on the surface of the fixing member 104.
5. The lower wiring pattern 106 is formed, and the beam-like member 102b is fixed to the fixing member 104 while being electrically connected to the lower wiring pattern 106. Therefore, the lower wiring pattern 106, the beam-like member 102b, The second electrode layer 113 is electrically conductive. Also, take-out unit 10
9 is electrically connected to the first electrode layer 111 on the surface of the laminated portion 101 by the extraction portion 107.

When an electric field is applied between the upper wiring pattern and the lower wiring pattern, strain is generated in the laminated portion, and displacement occurs in the longitudinal direction of the laminated portion. Due to this displacement, the angle between the two beam members changes about the joint. Therefore, at the tip of the beam-shaped member, the displacement of the laminated portion is enlarged according to the length of the beam-shaped member. Further, in this case, the plane of the beam-shaped member is in a direction substantially equal to the plane of the laminated portion. Therefore, a stable drive can be obtained which is strong as a whole against disturbances such as vibrations in the same direction as the plane.

(Embodiment 9) Hereinafter, a ninth embodiment of the present invention will be described.

FIG. 12 is a perspective view of an actuator according to Embodiment 9 of the present invention.

In FIG. 12, 121a and 121b are laminated portions, 122a and 122b are beam-shaped members, 123 is a coupling portion, 124 is a fixed member, 125a and 125b are upper wiring patterns, 126a and 126b are lower wiring patterns, 127a and 127b are extraction lines, 128a and 12
8b is a flat elastic member, 129a and 129b are take-out parts.

Beam-shaped members 122a and 122 made of conductive material
2b is joined at one end by a joining portion 123, and the multi-end sides are fixed to fixing members 124, respectively.
4 has a notch in the vicinity. Also, the beam-shaped member 12
Reference numerals 2a and 122b denote flat elastic members 128a and 1
28b, and the plate-like elastic members 128a, 128
8b is the lower member wiring pattern 126
a, 126b. Lamination part 121
a, 121b and flat elastic members 128a, 128
Adhesion to 8b is the same as that described in the eighth embodiment, and a part of the laminated portions 121a and 121b constitute take-out portions 129a and 129b on the fixed portion. The extraction portions 129a and 129b and the upper wiring pattern 12
Embodiment 5 is also similar to Embodiment 8 in that 5a and 125b are electrically connected by extraction lines 127a and 127b.

In this state, an electric field is applied between the electrodes of the laminated portion, and each laminated portion is displaced in the opposite direction in the longitudinal direction, so that a rotational displacement is obtained about the fixed portion and the cutout portion of the beam-like member. Therefore, the displacement can be increased in accordance with the length of the beam-shaped member.

Here, by adopting a configuration in which the rotation center line of the two joined beams and the longitudinal direction of the laminated portion are orthogonal to each other, the displacement of the laminated portion in the longitudinal direction is most efficiently used as a drive for rotating the beam. As a result, a larger rotational displacement can be obtained. This configuration is well-balanced because both sides are symmetrical with respect to the rotation center line, does not easily generate unnecessary vibration such as twisting, and has a large driving force due to a plurality of laminated portions. In addition, effects similar to those described in the eighth embodiment can be obtained for the effect on disturbance.

(Embodiment 10) Hereinafter, Embodiment 10
The invention described in claim 21 will be described with reference to FIG.

FIG. 13 is a side view of an actuator according to Embodiment 10 of the present invention.

In FIG. 13, 131 is a first electrode layer,
132 is a piezoelectric layer, 133 is a second electrode layer, 134 is a laminated portion, 135 is a take-out portion, 136 is a flat elastic member,
137 is a fixing member, and 138 is a contact member.

The structure of this actuator is the same as that of the second embodiment.
However, a contact member 138 is provided between the fixing member 137 and the actuator, and the free end of the actuator is in contact with the contact member 138. 138 is fixed by being pressed.

Since the end on the free end side is pressed against the contact member, the position of the operating portion of the actuator can be specified, and the structure is close to a doubly supported beam, so that the resonance frequency can be increased and the resistance to disturbance is improved. . In addition, the surface area of the contact member is reduced so that the contact area is reduced so that the displacement is not significantly reduced by the pressing on the contact member, or the friction coefficient between the contact member and the actuator can be reduced. Such measures are effective.

Embodiment 11 Hereinafter, Embodiment 11 will be described.
The invention described in claim 22 will be described with reference to FIG.

FIG. 14 is a side view of an actuator according to Embodiment 11 of the present invention.

In FIG. 14, reference numeral 141 denotes a first electrode layer;
142 is a piezoelectric layer, 143 is a second electrode layer, 144 is a laminated portion, 145 is a takeout portion, 146 is a flat elastic member,
147 is a fixing member.

The structure of the actuator is substantially the same as that described in the second embodiment, except that a flat elastic member 146 is provided between the actuator and the fixing member 147, and the distal end of the actuator and the vicinity of the fixing portion are provided. Only the difference is that only the flat elastic member is adhered. Since only the vicinity of both ends of the curved laminated portion is bonded to the plate-like elastic member, the rigidity as a whole is increased, the resonance frequency is increased, the vibration resistance is improved, and the surface is more easily deformed than the entire surface is bonded. Therefore, an effect similar to that of the opposed actuator described in the seventh embodiment can be obtained in that a larger displacement is possible.

Embodiment 12 Hereinafter, Embodiment 12 will be described.
The invention described in claims 24, 25 and 27 will be described with reference to FIG.

FIG. 15 is a manufacturing step diagram of the actuator according to the twelfth embodiment of the present invention.

In FIG. 15, 151 is a flat elastic member, 152 is a through groove, 153 is a masking material, 154 is a resin layer, 155 is a laminated portion, and 156 is a film forming substrate.

The plate-like elastic member 151 has a plurality of through grooves 15.
The flat elastic member 151 is entirely made of a conductive material, and has an area to which a plurality of film forming substrates 156 described below can be bonded. A masking material 153 made of a tape, a substrate, or the like is temporarily attached to one surface. In this state, it is immersed in a container filled with resin, and this resin is a resin that deposits solid matter on the cathode or anode by an electric field, while immersing one electrode in the resin and the other electrode The above-described flat elastic member 151
Is immersed, and an electric field is applied to form a resin layer 154 over substantially the entire surface of one side of the flat elastic member 151. After that, the masking material 153 is removed, and the deposition substrate 156 on which the laminated portion 155 including the second electrode layer, the piezoelectric layer, and the first electrode layer is formed from the surface is bonded on the laminated portion 155 side. An example of the resin material at this time is a resin such as epoxy or acrylic used for anion electrodeposition or cation electrodeposition, and the film formation substrate 156 is made of, for example, Mg.
O. After the bonding, the whole is immersed in a phosphoric acid aqueous solution heated to several tens degrees to remove the film formation substrate 156. Then, patterning of the laminated portion is performed from the side of the first electrode layer. In this case, if a spray method or the like is used as a method of applying a resist or the like, workability is impaired due to the presence of the through groove 152. Never. Finally, the flat elastic member 1
51 is divided along the through groove 152. Here the through groove 1
52 has an effect of not only facilitating the last division, but also an escape route for volatile components at the time of curing the resin, thereby preventing adhesion failure.

When a resin that is precipitated by an electric field is used as the resin as in the present embodiment, a uniform resin layer can be easily obtained over the entire surface even in the case of a large-area plate-like elastic member. Can be suppressed. Then, since bonding can be performed at once and the subsequent steps can be performed, the productivity is very good. in addition,
Areas where the resin layer is not formed can be easily protected by masking, etc., so that the selectivity is good.In addition, since no external force such as a squeegee is required in forming the resin layer, a thin plate-like elastic member to which a thin film is adhered can be used. On the other hand, the resin layer can be efficiently formed without destruction or the like.

Embodiment 13 Hereinafter, Embodiment 13 will be described.
The invention described in claims 26 and 27 will be described with reference to FIGS.

FIG. 16 is a view showing a manufacturing process of an actuator according to Embodiment 13 of the present invention.

In FIG. 16, 161 is a flat elastic member, 162 is a through groove, 163 is a conductive material layer, 164 is a resin layer, 165 is a laminated portion, and 166 is a film forming substrate.

As in the twelfth embodiment, the flat elastic member has an area to which a plurality of film forming substrates 166 can adhere.
Although a plurality of through-grooves 162 are formed, the difference is that the material is non-conductive, and is made of, for example, a carbon material, Si, or the like. On the other hand, a conductive material layer 163 such as Ti or Cr is formed on almost the entire surface on one side by a method such as sputtering.
At this time, if the thickness of the conductive material layer 163 is small,
Since the amount of the film formed on the side wall 62 is very small, it does not affect the subsequent steps. Thereafter, a resin layer 164 is formed by an electric field in the same manner as in the twelfth embodiment.
After the film formation substrate 166 on which the film 5 is formed is bonded, the film formation substrate 166 is removed by etching,
5 is performed. And finally, it is divided into individual pieces along the through groove 162.

According to this method, in addition to the effects described in the twelfth embodiment, the productivity is good in that a masking material or the like is not required, and the location of the resin layer is defined in the form of a conductive material layer. Therefore, if the conductive material layer is molded using a method such as photolithography, a highly accurate resin layer can be formed in an arbitrary shape.

(Embodiment 14) Hereinafter, Embodiment 14 will be described.
The invention described in claims 28 and 29 will be described with reference to FIGS.

FIG. 17 is a manufacturing process diagram of the actuator according to the thirteenth embodiment of the present invention.

In FIG. 17, reference numeral 171 denotes a film forming substrate;
72 is a laminated portion, 173 is a resin layer, 174 is a flat elastic member, and 175 is a through groove.

On one surface of the film forming substrate 171,
2 is formed, and the laminated portion 172 is formed.
2 is formed with a pattern of the resin layer 173. The material of the resin layer 173 is a resist material having a photosensitivity and capable of patterning or a material for a protective film. First, the entire surface of the laminated portion 172 is applied by spin coating or the like, and then temporarily cured. A pattern is formed by development.
This resin pattern can be molded with high precision by using a photomask, and it is possible to prevent the surplus resin from remaining on the actuator after bonding. The resist material or the material for the protective film is mainly composed of, for example, polyimide or epoxy, and a uniform coating film is obtained by spin coating or the like, and a strong resin layer is formed after the main curing. Although the viscosity of the resin layer after the temporary curing is lower than that before the temporary curing, the resin layer is adhered by being superimposed on the adherend and heated to the temperature of the main curing while applying pressure, in which case the fluidity of the resin is small. The protrusion is small.
Therefore, strong adhesion can be achieved by a uniform film on the entire surface,
The laminated portion can be bonded by a uniform resin layer, thereby preventing unnecessary stress from being generated locally and preventing destruction. After the pattern formation of the resin layer 173, the flat elastic members 174 having the through-grooves 175 are superposed while being aligned, pressed, and thermally cured. Thereafter, as in the case of Embodiment 12, the film formation substrate 171 is removed, the laminated portion 172 is patterned, and completed by dividing into individual pieces.

According to this method, Embodiments 12 and 13 can be performed.
As described above, the effect of preventing the resin from protruding or being excessively attached is the same, and if the plate-like elastic member is made large, the productivity is also improved by the effect of batch processing.
In addition, since the substrate for film formation is removed after bonding, handling, positioning, mounting, and the like are easier than when a fine and brittle thin film is handled, and destruction can be prevented.

Embodiment 15 Hereinafter, Embodiment 15 will be described.
The present invention will be described in detail with reference to FIGS.

FIG. 18 is a manufacturing step diagram of the actuator according to the fifteenth embodiment of the present invention.

In FIG. 18, reference numeral 181 denotes a substrate for film formation;
82 is the first electrode layer, 183 is the piezoelectric layer, and 184 is the second electrode layer.
Electrode layer. FIG. 18 shows a step of forming one of the actuators on the film forming substrate 181 before forming the opposing actuator by bonding. First, the film forming substrate 1
After the first electrode layer 182 is formed on the entire surface of the substrate 81 by sputtering, the pattern is divided into individual actuators. Next, the piezoelectric layer 183 is formed on the entire surface in the same manner, and then molded into a predetermined pattern. At this time, the piezoelectric layer 183
Are larger than the first electrode layer 182, and are substantially the same in the width direction. In the drawing, there is a step in the thin film, but this step is actually very small because it is the thickness of the thin film. Thereafter, similarly, the second electrode layer 184 is formed and patterned. Since a part of the actuator is formed of only the second electrode layer in this manner, a part of the second electrode layer appears on the surface when the two actuators are attached to each other and the film formation substrate is removed. Thus, the electrode can be easily taken out on the fixed portion side.

Next, FIG. 19 is a manufacturing process diagram for forming an opposing actuator by bonding two actuators together.

In FIG. 19, reference numeral 191 denotes a substrate for film formation;
92 is a first electrode layer, 193 is a piezoelectric layer, and 194 is a second electrode layer.
The electrode layers 195 are laminated portions, 196a and 196b are resin layers, 197 is a fixing member, and 198a and 198b are conductive material portions. A stacked portion 195 including a first electrode layer 192, a piezoelectric layer 193, and a second electrode layer 194 is formed on the deposition substrate 191 by the method described above.
On the other hand, resin layers 196a and 196b are formed at portions corresponding to both ends of the actuator, respectively. At this time, the resin layer 196b at the end on the fixed part side is formed over the end of the three-layer laminated part 195. Then, the actuators on the other substrate for film formation are aligned and opposed to each other, overlapped, pressed, heated, and bonded. In this superposition, the resin layers 196a and 196b
May be provided on only one or both of the film forming substrates. Subsequently, only one of the film-forming substrates is removed. For example, the method is such that the back surface of one of the film-forming substrates is protected with a tape and immersed in an etching solution, or the thickness of the film-forming substrate is originally reduced. For example, when one of them is removed, the etching is completed for the time being. After that, the film is divided into individual pieces using the pattern of the thin film as a mark. The actuator divided into the individual pieces is fixed to the fixing member 197. A wiring pattern (not shown) corresponding to each electrode layer is formed on the surface of the fixing member 197, and the conductive material portion 19 is formed thereon.
8a and 198b are provided.
98a and 198b are plastic materials that can be deformed by pressing or by heating and pressing. Therefore, when the actuator is aligned and fixed, it is molded according to the surface shape of the actuator by heating and pressing, so that mounting can be performed irrespective of irregularities on the actuator surface. Also, since the actuator is provided with the film-forming substrate, the actuator is not destroyed by the pressing, and good pressing can be performed. Then, after bonding is performed with the conductive material part or other resin in this state, if the remaining film-forming substrate is completely removed by etching, the opposing actuator is completed with it already mounted on the fixed member I do.

Subsequently, in order to make each electrode and the wiring pattern conductive, they are connected to each other by a lead wire.
That is, in this state, the electrode of the actuator that is not in contact with the fixing member is not in contact with the wiring pattern.

FIG. 20 is a side view showing an example of the vicinity of the fixing portion. 201a and 201b are first electrode layers, 202a,
202b is a piezoelectric layer; 203a and 203b are second electrode layers; 204 is a resin layer; 205 is a fixing member;
06b is a conductive material portion, 207a and 207b are wiring patterns, and 208a and 208b are extraction lines. The piezoelectric layers 202a and 202b are first electrode layers 201a and 201
b, and between the second electrode layers 203a and 203b,
Both are insulated. Second electrode layers 203a and 203b
Regarding the above, when the thickness of the resin layer 204 is small, there is a case where conduction can be obtained by partially contacting the resin layer 204. In this case, the driving can be performed without connecting the both by the extraction line 208b.
An extraction line 2 is provided between the first electrode layers 201a and 201b.
08a and are electrically conductive. With such a configuration, when an electric field is applied between the respective wiring patterns, a distortion occurs in the laminated portion, and a displacement can be obtained at the distal end portion of the actuator.

[0123]

As described above, the present invention is directed to a laminated portion composed of a piezoelectric layer and first and second electrodes located on both surfaces thereof, and a flat elastic member adhered to the laminated portion if necessary. By bending the laminated portion and the plate-like elastic member, an effect of increasing the amount of displacement in the direction connecting the two ends of the actuator, that is, in the longitudinal direction can be obtained. And the displacement direction of the conventional actuator is a direction perpendicular to the plane, and at the same time, it is most unstable against disturbance from the same direction, so it was difficult to obtain a stable displacement in the direction receiving the disturbance, The actuator of the present invention is different from the direction in which the displacement is weak to such a disturbance, and since the direction of the disturbance can be shifted from the plane of the actuator, the influence of the disturbance can be reduced, and more stable driving can be performed. It works.

[Brief description of the drawings]

FIG. 1 is a perspective view of an actuator according to a first embodiment of the present invention.

FIG. 2 is a perspective view of an actuator according to a second embodiment of the present invention.

FIG. 3 is a side view of an actuator according to a third embodiment of the present invention.

FIG. 4 is a side view of the same.

FIG. 5 is a perspective view of an actuator according to a fourth embodiment of the present invention.

FIG. 6 is a side view of the same.

FIG. 7 is a plan view of an actuator according to a fifth embodiment of the present invention.

FIG. 8 is a perspective view of an actuator according to a sixth embodiment of the present invention.

FIG. 9 is a side view of an actuator according to a seventh embodiment of the present invention.

FIG. 10 is a perspective view of an actuator according to an eighth embodiment of the present invention.

11 is a sectional view taken along line AA in FIG.

FIG. 12 is a perspective view of an actuator according to a ninth embodiment of the present invention.

FIG. 13 is a side view of an actuator according to a tenth embodiment of the present invention.

FIG. 14 is a side view of an actuator according to an eleventh embodiment of the present invention.

FIG. 15 is a manufacturing process diagram of an actuator according to a twelfth embodiment of the present invention.

FIG. 16 is a manufacturing process diagram of an actuator according to a thirteenth embodiment of the present invention.

FIG. 17 is a manufacturing process diagram of an actuator according to a fourteenth embodiment of the present invention.

FIG. 18 is a manufacturing process diagram of an actuator according to a fifteenth embodiment of the present invention.

FIG. 19 is a manufacturing process diagram of the actuator.

FIG. 20 is a side view of the actuator.

FIG. 21 is a perspective view of a conventional actuator.

FIG. 22 is a perspective view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 1st electrode layer 12 Piezoelectric layer 13 2nd electrode layer 14 Lamination part

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 41/22 H01L 41/08 J 41/22 Z (72) Inventor Masaya Nakatani Kadoma, Kadoma, Osaka 1006 Matsushita Electric Industrial Co., Ltd. F-term (reference) 2H081 BB18 5D042 LA01 MA15 5D059 AA01 BA01 CA18 DA19 DA26 DA31 EA08

Claims (33)

[Claims] 1. A laminated portion of at least a first electrode layer provided on one surface of a piezoelectric layer, a second electrode layer provided on at least the other surface, and each of the layers is provided on one surface side. The piezoelectric layer is curved, and an electric field is applied between the first electrode layer and the second electrode layer to expand and contract the piezoelectric layer, thereby obtaining a displacement in the same direction as a direction connecting both ends of the laminated portion. Characteristic actuator. 2. A laminated portion of at least a first electrode layer provided on one surface of a piezoelectric layer, at least a second electrode layer provided on the other surface, and each of the layers is provided on one of the surfaces. It becomes curved, fixes one end of the laminated portion, applies an electric field between the first electrode layer and the second electrode layer to expand and contract the piezoelectric layer, and the other of the laminated portion At the side end,
An actuator for obtaining a displacement in the same direction as the surface direction of the fixed portion on the one side. 3. The actuator according to claim 1, wherein each of the first electrode, the piezoelectric layer, and the second electrode is formed of a thin film having a thickness that does not exceed its elastic limit due to bending. 4. The first electrode layer and the second electrode layer have different coefficients of thermal expansion, and the coefficient of thermal expansion of the electrode layer on the concave side of the curve is larger than that of the other electrode layer.
An actuator according to claim 1. 5. The first electrode layer and the second electrode layer have different internal stresses from each other, and the internal stress of the concave electrode layer on the concave side of the curve is smaller in the plane of the electrode layer than the other internal stress. 4. The actuator according to claim 3, which is closer to the direction in which the actuator moves. 6. The actuator according to claim 3, wherein the first electrode layer and the second electrode layer are made of the same material having different thicknesses. 7. The actuator according to claim 3, wherein a resin layer that changes in volume after curing is provided on at least one surface of the first electrode layer or the second electrode layer. 8. The actuator according to claim 7, wherein the laminated portion is bonded to the flat elastic member by a resin layer provided on a surface of the first electrode layer or the second electrode layer. 9. The actuator according to claim 8, wherein the resin layer is a material having a film form after being applied and cured at room temperature. 10. The resin layer is a thermosetting resin,
And the second electrode layer are made of the same material, and the coefficient of thermal expansion of the plate-like elastic member is different from that of the first and second electrode layers. 9. The actuator according to claim 8, wherein an expansion coefficient is larger than a thermal expansion coefficient of the other side. 11. Two curved laminated portions are arranged side by side on the same plane and fixed at the same end, and have a connecting portion at the other end, and each laminated portion is opposite to each other. The actuator according to claim 1, wherein the actuator is driven to expand and contract in the direction, and performs a rotational movement at the connection portion. 12. Two curved laminated portions are arranged side by side in the same plane and fixed at ends different from each other, and have a connecting portion at the other end, and extend and contract each electronic component. The actuator according to claim 1, wherein the actuator performs a rotational motion at the connecting portion. 13. A connecting part is provided in the vicinity of each laminated part.
The actuator with a connecting portion according to claim 11, wherein the actuator has a through hole, a through groove, or a cutout portion. 14. The actuator according to claim 2, wherein the plane of the laminated portion composed of the thin film has a shape whose width decreases from one side to the other side. 15. The actuator according to claim 1, wherein the concave curved surfaces of two identical actuators are opposed to each other in the vicinity of both ends of the actuator having the curved laminated portion, and only the projecting portions on both sides are adhered. 16. An actuator in which two actuators are arranged side by side on the same plane and fixed at the same end, and have a connecting portion at the other end, and each electronic component expands and contracts in opposite directions. 16. The actuator according to claim 15, wherein the actuator is driven in such a manner as to perform a pivoting movement at the connection part. 17. Two actuators are arranged side by side on the same plane and fixed at different ends.
The actuator according to claim 15, further comprising a connecting portion at an end on the other side, and rotating the connecting portion by expanding and contracting each electronic component. 18. The two beam-shaped members each have a joint at one end thereof, are positioned at an acute angle from each other in the longitudinal direction from the joint, and In between,
The actuator according to claim 1, wherein a curved laminated portion is provided, and both ends of the laminated portion are respectively connected to the beam-shaped members, and the angle formed by the two beam-shaped members is changed by expansion and contraction of the laminated portion. 19. The two beam-shaped members have joints at one end at one end, and are located at an acute angle to each other in the longitudinal direction from the joint, and the ends at the other end of each other are A fixed laminated portion is provided near the other end, and a direction connecting both ends of the laminated portion and a longitudinal direction of the beam-like member form an angle other than parallel, and each laminated portion is formed. 2. The actuator according to claim 1, wherein the actuators are driven such that displacement directions of the portions are opposite to each other. 20. A center line of an angle formed by the two beam members,
20. The actuator according to claim 19, wherein a direction connecting both ends of the laminated portion is a right angle. 21. An actuator having a curved laminated portion formed by a thin film and fixed near one end thereof,
3. The actuator according to claim 2, wherein the vicinity of the other end is pressed against the contact member. 22. The actuator according to claim 2, wherein only the vicinity of both ends of the actuator formed of a thin film and having a curved laminated portion is connected to another flat elastic member. 23. At least a first surface on one surface of the piezoelectric layer
And at least a second electrode layer on the other surface, and the laminated portion of each layer is curved toward one of the surfaces, and the first electrode layer and the second electrode layer A method for manufacturing an actuator, characterized in that the piezoelectric layer is expanded and contracted by applying an electric field between them, and a displacement is obtained in the same direction as a direction connecting both ends of the laminated portion. On the surface, a first electrode layer, a piezoelectric layer, and a second electrode layer are formed in this order by a sputtering method to form a laminated portion, and in this case, the first electrode layer and the second electrode layer are formed. Actuator that uses the same material and makes the sputtering conditions different between when sputtering the first electrode layer and when sputtering the second electrode layer, so that the first electrode layer and the second electrode layer have different internal stresses. Manufacturing method. 24. At least a first surface on one surface of the piezoelectric layer
The laminated portion is bonded to the plate-like elastic member by a resin layer provided on the surface of the first electrode layer or the second electrode layer, wherein at least the second electrode layer is provided on the other surface. The laminated portion of each layer and the plate-like elastic member are curved to one side, and the piezoelectric layer is expanded and contracted by applying an electric field between the first electrode layer and the second electrode layer. A method for manufacturing an actuator, wherein a displacement is obtained in the same direction as a direction connecting both ends of the laminated portion, wherein the material of the resin layer is a material capable of selectively forming a resin layer on a conductive material by an electric field. A method for manufacturing an actuator. 25. A flat elastic member made of a conductive material, one surface of which is temporarily bonded with a protective substrate or a masking tape, and a resin layer is formed on the other surface by an electric field. Adhere to the laminated part formed on the substrate,
25. The method of manufacturing an actuator according to claim 24, wherein the protection substrate, the masking tape, and the film formation substrate are removed thereafter. 26. The flat elastic member is made of a non-conductive material,
A conductive material layer is provided on the other side, a resin layer is formed by an electric field on the conductive material layer, and then bonded to a laminated portion formed on the film formation substrate, and then the film formation substrate is formed. The method for manufacturing an actuator according to claim 24, wherein the actuator is removed. 27. A method in which a plurality of laminated portions formed on substantially the entire surface on one side of a film-forming substrate are bonded to a plate-like elastic member having a larger area than the film-forming substrate, 25. The method for manufacturing an actuator according to claim 24, wherein the film forming substrate is removed and the stacked portion is patterned. 28. At least a first surface on one surface of the piezoelectric layer
The laminated portion is bonded to the plate-like elastic member by a resin layer provided on the surface of the first electrode layer or the second electrode layer, wherein at least the second electrode layer is provided on the other surface. The laminated portion of each layer and the plate-like elastic member are curved to one side, and the piezoelectric layer is expanded and contracted by applying an electric field between the first electrode layer and the second electrode layer. A method for producing an actuator, characterized in that a displacement is obtained in the same direction as a direction connecting both end portions of the laminated portion, wherein the material of the resin layer is a photosensitive and patternable resist material or a protective film. A method for manufacturing an actuator that is a material. 29. After forming a resin layer on the entire surface of the laminated portion formed on one surface of the film forming substrate, patterning is performed so that the resin layer remains only at the portion where bonding is performed. 29. The method for manufacturing an actuator according to claim 28, wherein the film-forming substrate is removed by performing positioning and bonding with the flat elastic member, and removing the film-forming substrate. 30. At least a first surface on one surface of the piezoelectric layer
And at least a second electrode layer on the other surface, and the laminated portion of each layer is curved toward one of the surfaces, and the first electrode layer and the second electrode layer The same actuator, characterized in that the piezoelectric layer is expanded and contracted by applying an electric field between the two ends of the laminated portion and the displacement is obtained in the same direction as the direction connecting the two ends of the laminated portion, the concave-shaped curved surface side is opposed to each other, In the method for manufacturing an opposed-type actuator in which only the protruding portion of the film is adhered, after processing a laminated portion made of a thin film provided on one surface of the film-forming substrate into a predetermined pattern in advance, the resin layer is formed only on the adhered portion. Forming
A method for manufacturing an actuator, wherein the two film-forming substrates are aligned and superposed, the resin layer is cured, and both film-forming substrates are removed. 31. A step of patterning a predetermined pattern after forming a first electrode layer over the entire surface of a film formation substrate;
By a step of patterning after forming the piezoelectric layer on the entire surface and a step of patterning after forming the second electrode layer on the entire surface, at least a part of the layer including only the second electrode layer was formed on the deposition substrate. 31. The method for manufacturing an actuator according to claim 30, wherein 32. Only one of the two film-forming substrates to be superposed is completely removed by etching after superposition, then divided into individual pieces, and positioned and fixed to a fixing member for fixing the actuator. 31. The method of manufacturing an actuator according to claim 30, further comprising the step of completely removing the remaining film-forming substrate by etching. 33. The method of manufacturing an actuator according to claim 32, wherein a conductive material portion that can be deformed by pressing or by heating and pressing is provided at a portion of the fixing member where the actuator is fixed.