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JP2002294230A - Aluminosilicate phosphor for vacuum ultraviolet excitation and vacuum ultraviolet excitation light emitting device using the phosphor - Google Patents

Aluminosilicate phosphor for vacuum ultraviolet excitation and vacuum ultraviolet excitation light emitting device using the phosphor

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Publication number
JP2002294230A
JP2002294230A JP2001098762A JP2001098762A JP2002294230A JP 2002294230 A JP2002294230 A JP 2002294230A JP 2001098762 A JP2001098762 A JP 2001098762A JP 2001098762 A JP2001098762 A JP 2001098762A JP 2002294230 A JP2002294230 A JP 2002294230A
Authority
JP
Japan
Prior art keywords
phosphor
alkaline earth
earth metal
vacuum ultraviolet
vuv
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001098762A
Other languages
Japanese (ja)
Inventor
Kohei Matsuda
康平 松田
Takayuki Hisamune
孝之 久宗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Kasei Optonix Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kasei Optonix Ltd filed Critical Kasei Optonix Ltd
Priority to JP2001098762A priority Critical patent/JP2002294230A/en
Publication of JP2002294230A publication Critical patent/JP2002294230A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 (修正有) 【課題】 波長200nm以下の真空紫外線(VUV)
励起により高効率に紫外線を放射するアルミノ珪酸塩蛍
光体、及びそれを用いた希ガスランプなどVUV励起発
光素子を提供する。 【解決手段】 Ba、Sr又はCaの1種以上のアルカ
リ土類金属元素とAl元素とSi元素とEu元素とをそ
れぞれ含有し、VUV励起下で350〜400nm域に
発光スペクトルのピークを有する紫外線発光を呈する下
記一般式のアルカリ土類金属アルミノ珪酸塩蛍光体、例
えばEu付活、(Ba0.9Eu0.1)AlSi
及びその蛍光体を用いた真空紫外線発光素子 (M1−XEu)O・aAl・bSiO (MはBa、Sr又はCaの1種以上を、x、a及びb
は0.005≦x≦0.2、0.9≦a≦1.1、及び
1.8≦b≦2.2を満たす数を表す。)
(57) [Summary] (Modified) [Problem] Vacuum ultraviolet ray (VUV) with a wavelength of 200 nm or less
Provided are an aluminosilicate phosphor that emits ultraviolet rays with high efficiency by excitation, and a VUV-excited light-emitting device such as a rare gas lamp using the same. SOLUTION: An ultraviolet ray containing at least one kind of alkaline earth metal element of Ba, Sr or Ca, an Al element, a Si element and an Eu element, and having an emission spectrum peak in a 350 to 400 nm region under VUV excitation. An alkaline earth metal aluminosilicate phosphor of the following general formula that emits light, for example, Eu activated, (Ba 0.9 Eu 0.1 ) Al 2 Si 2
O 8 and vacuum ultraviolet light emitting device using the phosphor (M 1-X Eu X) O · aAl 2 O 3 · bSiO 2 (M is Ba, or more one Sr or Ca, x, a and b
Represents a number satisfying 0.005 ≦ x ≦ 0.2, 0.9 ≦ a ≦ 1.1, and 1.8 ≦ b ≦ 2.2. )

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、波長200nm以
下の真空紫外線(以下、「VUV」という)によって励
起され、波長350〜400nmの波長域に発光スペク
トルのピークをもった紫外線を放射するアルカリ土類金
属のアルミノ珪酸塩蛍光体及びその蛍光体を用いた蛍光
膜を具備した真空紫外線励起発光素子(以下、「VUV
励起発光素子」という)に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alkaline earth which is excited by vacuum ultraviolet rays having a wavelength of 200 nm or less (hereinafter referred to as "VUV") and emits ultraviolet rays having an emission spectrum peak in a wavelength range of 350 to 400 nm. A VUV-excited light-emitting device (hereinafter referred to as “VUV”) comprising a class of aluminosilicate phosphors of a class of metals and a phosphor film using the phosphors
Excitation light emitting element ").

【0002】[0002]

【従来の技術】VUV励起発光素子は、ガラス等からな
る任意形状の外囲器内に蛍光体を含有する蛍光膜を設
け、この蛍光膜と共に内部に密封されたXe,Ne−X
e,He−Xe,He−Ne−Xe等の希ガスを放電さ
せ、その時に放射される波長が200nm以下のVUV
により蛍光膜を発光させるものである。本発明において
は、このように外囲器内に蛍光膜と希ガスとが密封さ
れ、該希ガスの放電により生ずるVUVによって外囲器
内の蛍光膜を励起して発光させる機能を有する装置を総
称してVUV励起発光素子ということにする。このVU
V励起発光素子の代表例としては、複数の蛍光膜をマト
リックス状に配置して複数の絵素を形成し、これら各絵
素からの発光を組み合わせてディスプレイとして利用す
るプラズマディスプレイ(PDP)や、蛍光膜を面状に
配置してその発光を利用するランプとしての照明や、光
源用に利用される希ガスランプなどがあり、その開発や
改良が近年盛んに行われている。
2. Description of the Related Art A VUV-excited light-emitting device is provided with a fluorescent film containing a fluorescent substance in an envelope of an arbitrary shape made of glass or the like, and is sealed with the fluorescent film in Xe, Ne-X.
e, a rare gas such as He-Xe, He-Ne-Xe, etc. is discharged, and the wavelength radiated at that time is VUV of 200 nm or less.
To cause the fluorescent film to emit light. In the present invention, an apparatus having a function of exciting the fluorescent film in the envelope by the VUV generated by the discharge of the rare gas and emitting light by sealing the fluorescent film and the rare gas in the envelope as described above is provided. Collectively, they will be referred to as VUV excitation light emitting elements. This VU
As a typical example of the V excitation light emitting element, a plurality of phosphor films are arranged in a matrix to form a plurality of picture elements, and a light emission from each of these picture elements is combined and used as a display, such as a plasma display (PDP), There are illumination as a lamp that uses a phosphor film arranged in a plane and uses the light emission, and a rare gas lamp that is used as a light source, and development and improvement thereof have been actively performed in recent years.

【0003】ところで、照明や光源用としては従来可視
光を放射する蛍光ランプが主として使用されているが、
その外、特殊な用途として紫外線を放射する紫外線放射
ランプも実用化されている。この紫外線放射ランプとし
ては低圧水銀ランプが主として使用されている。
By the way, fluorescent lamps that emit visible light have been mainly used for illumination and light sources.
In addition, ultraviolet radiation lamps that emit ultraviolet light have also been put to practical use for special purposes. A low-pressure mercury lamp is mainly used as the ultraviolet radiation lamp.

【0004】この紫外線放射ランプの用途としては、
(i) 人工的に日焼けを起こして肌を小麦色にするのに使
用すること、(ii)ジアゾ感光紙を使用した複写機やプリ
ンターにおける色素定着用の光源として使用すること、
(iii) PUVA( psoralen +ultraviolet A)療法と
呼ばれる皮膚病治療法に使用すること、(4)Ti
2、ZnO等の光触媒を利用した抗菌、殺菌システム
における励起光源として使用すること、などが挙げられ
る。
[0004] Applications of this ultraviolet radiation lamp include:
(i) to be used to artificially tan the skin to make it brown, (ii) to be used as a light source for dye fixation in copiers and printers using diazo photosensitive paper,
(iii) to be used in a skin disease treatment called PUVA (psoralen + ultraviolet A) therapy; (4) Ti
Antibacterial utilizing a photocatalyst such as O 2 and ZnO, and use as an excitation light source in a sterilization system.

【0005】このランプは水銀放電により発生する波長
が254nmの水銀輝線発光によって、ランプ管内面の
塗布膜の蛍光体を励起し、波長300〜400nmの紫
外線を放出させるものである。波長254nmの水銀輝
線発光によって励起され、効率良く紫外線を放射する蛍
光体としては、BaSi2 5 :Pb2+、SrB4
7:Eu2+、CeMgAl1119等があり、これらの蛍
光体が紫外線放射ランプ用蛍光体として使用されてい
る。
This lamp excites a phosphor in a coating film on the inner surface of a lamp tube by emitting mercury emission line having a wavelength of 254 nm generated by mercury discharge, and emits ultraviolet rays having a wavelength of 300 to 400 nm. BaSi 2 O 5 : Pb 2+ , SrB 4 O are examples of phosphors that are excited by emission of mercury emission lines having a wavelength of 254 nm and efficiently emit ultraviolet rays.
7: Eu 2+ , CeMgAl 11 O 19 and the like, and these phosphors are used as phosphors for ultraviolet radiation lamps.

【0006】ところで、紫外線放射ランプとしては、上
記のように励起光源として波長254nmの水銀輝線発
光を利用した低圧水銀ランプが主として使用されてき
た。しかしながら、低圧水銀ランプの発光強度は周囲温
度によって大きく変化するという欠点がある上、近年、
水銀の環境への影響を懸念して、市場では水銀を使用し
ない紫外線放射ランプを望む傾向があり、そのような要
望を満たすものとして希ガスランプが注目されている。
As described above, low-pressure mercury lamps utilizing emission of a mercury emission line having a wavelength of 254 nm have been mainly used as the excitation light source as described above. However, in addition to the disadvantage that the luminous intensity of the low-pressure mercury lamp varies greatly depending on the ambient temperature, in recent years,
Due to concerns about the effect of mercury on the environment, the market tends to desire a mercury-free ultraviolet radiation lamp, and a rare gas lamp has been attracting attention to satisfy such a demand.

【0007】希ガスランプは、ランプ管内に充填された
Xe、Ne等の単体ガス若しくはこれらの混合ガス等の
希ガスの放電により発生する、波長200nm以下のV
UVによって蛍光体を励起し、所望の蛍光を得るもので
ある。しかし、希ガスランプは、蛍光体を励起するのに
波長200nm以下のVUV(例えばXeガスを放電さ
せた場合は波長147nmと172nmのVUV)を使
用するところから、従来の低圧水銀ランプ用の蛍光体を
希ガスランプに適用しても、必ずしも効率の良い紫外線
発光を得ることができなかった。そこで、紫外線放射希
ガスランプ用の蛍光体として、VUV励起により高効率
に紫外線を放射する蛍光体の開発が切に望まれてきた。
The rare gas lamp is a V.sub.V having a wavelength of 200 nm or less generated by discharge of a rare gas such as a single gas such as Xe or Ne or a mixed gas thereof filled in a lamp tube.
The phosphor is excited by UV to obtain desired fluorescence. However, rare gas lamps use VUV having a wavelength of 200 nm or less to excite the phosphor (eg, 147 nm and 172 nm VUV when Xe gas is discharged). Even if the body is applied to a rare gas lamp, efficient ultraviolet light emission cannot always be obtained. Therefore, development of a phosphor that emits ultraviolet rays with high efficiency by VUV excitation has been urgently required as a phosphor for an ultraviolet radiation rare gas lamp.

【0008】[0008]

【発明が解決しようとする課題】本発明は、上記の課題
を解決し、波長200nm以下のVUV励起により高効
率に紫外線を放射するアルミノ珪酸塩蛍光体及びその蛍
光体を用いた希ガスランプを初めとするVUV励起発光
素子を提供しようとするものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems and provides an aluminosilicate phosphor which emits ultraviolet rays with high efficiency by VUV excitation at a wavelength of 200 nm or less, and a rare gas lamp using the phosphor. The first object is to provide a VUV excitation light emitting device.

【0009】[0009]

【課題を解決するための手段】本発明者らは、主に酸素
酸塩系の種々の蛍光体を合成し、波長200nm以下の
VUVを照射して紫外線発光の有無とその発光強度に関
し鋭意検討を重ねた結果、アルカリ土類金属のアルミノ
珪酸塩を母体結晶とし、これにEu元素を付活すること
により、ピーク波長が360〜390nmである高効率
の紫外線発光の蛍光体を得ることができ、この蛍光体を
蛍光膜として用いることにより、VUV励起発光素子が
得られることを見出し本発明を完成した。
Means for Solving the Problems The present inventors have synthesized various phosphorates mainly based on oxyacid salts, and intensively examined the presence or absence of ultraviolet light emission and the light emission intensity by irradiating VUV having a wavelength of 200 nm or less with VUV. As a result, a phosphor of high efficiency ultraviolet emission having a peak wavelength of 360 to 390 nm can be obtained by using an alkaline earth metal aluminosilicate as a host crystal and activating Eu element thereto. The present inventors have found that a VUV-excited light-emitting device can be obtained by using this phosphor as a phosphor film, and have completed the present invention.

【0010】即ち、本発明は以下の構成からなる。 (1) Ba、Sr及びCaの群から選択される少なくとも
1種のアルカリ土類金属元素とAl元素とSi元素とE
u元素とをそれぞれ含有し、波長200nm以下の真空
紫外線による励起下で350〜400nmの波長域に発
光スペクトルのピークを有する紫外線発光を呈すること
を特徴とする真空紫外線励起用アルカリ土類金属のアル
ミノ珪酸塩蛍光体。
That is, the present invention has the following constitution. (1) At least one kind of alkaline earth metal element, Al element, Si element and E selected from the group consisting of Ba, Sr and Ca
and an aluminium alkaline earth metal for vacuum ultraviolet excitation characterized by exhibiting ultraviolet emission having an emission spectrum peak in a wavelength range of 350 to 400 nm when excited by vacuum ultraviolet light having a wavelength of 200 nm or less, respectively. Silicate phosphor.

【0011】(2) 前記アルカリ土類金属のアルミノ珪酸
塩蛍光体が、下記一般式で表されることを特徴とする前
記(1) 記載の真空紫外線励起用アルカリ土類金属のアル
ミノ珪酸塩蛍光体。 (M1-x Eux )O・aAl2 3 ・bSiO2 (式中、MはBa、Sr及びCaの群から選択される少
なくとも1種のアルカリ土類金属元素を表し、x、a及
びbはそれぞれ0.005≦x≦0.2、0.9≦a≦
1.1、及び1.8≦b≦2.2なる条件を満たす数を
表す。)
(2) The alkaline earth metal aluminosilicate phosphor according to the above (1), wherein the alkaline earth metal aluminosilicate phosphor is represented by the following general formula: body. (M 1-x Eu x) O · aAl 2 O 3 · bSiO 2 ( where, M represents at least one alkaline earth metal element selected from the group consisting of Ba, Sr and Ca, x, a and b is 0.005 ≦ x ≦ 0.2, 0.9 ≦ a ≦
1.1 and 1.8 ≦ b ≦ 2.2. )

【0012】(3) 前記一般式中のxが、0.01≦x≦
0.1なる条件を満たす数であることを特徴とする前記
(2) 記載の真空紫外線励起用アルカリ土類金属のアルミ
ノ珪酸塩蛍光体。 (4) 前記アルカリ土類金属のアルミノ珪酸塩蛍光体は、
その結晶系が六方晶構造である結晶を主相とすることを
特徴とする前記(1) 〜(3) のいずれか1つに記載の真空
紫外線励起用アルカリ土類金属のアルミノ珪酸塩蛍光
体。
(3) x in the above general formula is 0.01 ≦ x ≦
0.1, wherein the number satisfies the condition of 0.1.
(2) The alkaline earth metal aluminosilicate phosphor for excitation with vacuum ultraviolet light as described in (2). (4) the alkaline earth metal aluminosilicate phosphor,
The alkaline earth metal aluminosilicate phosphor for vacuum ultraviolet excitation according to any one of the above (1) to (3), wherein the crystal system has a crystal having a hexagonal structure as a main phase. .

【0013】(5) 外囲器内に蛍光膜を有し、該外囲器内
に封入された希ガスの放電によって励起して前記蛍光膜
を発光させる真空紫外線励起発光素子において、前記蛍
光膜が、前記(1) 〜(4) のいずれか1つに記載のアルカ
リ土類金属のアルミノ珪酸塩蛍光体を含有することを特
徴とする真空紫外線励起発光素子。
(5) A vacuum ultraviolet ray excited light emitting device having a fluorescent film in an envelope and emitting light by emitting the fluorescent film by the discharge of a rare gas sealed in the envelope. Contains the alkaline earth metal aluminosilicate phosphor according to any one of the above (1) to (4).

【0014】[0014]

【発明の実施の形態】本発明の蛍光体は、Ba、Sr及
びCaの群から選択される少なくとも1種のアルカリ土
類金属と、Al元素と、Si元素とを構成元素とするア
ルカリ土類金属のアルミノ珪酸塩を母体結晶とし、これ
に付活剤のEu元素を含むアルカリ土類金属のアルミノ
珪酸塩蛍光体であり、波長200nm以下のVUVを吸
収し、ピーク波長が360〜390nmの紫外線を高効
率に放射するものである。
BEST MODE FOR CARRYING OUT THE INVENTION The phosphor of the present invention comprises at least one alkaline earth metal selected from the group consisting of Ba, Sr and Ca, an alkaline earth element comprising Al and Si as constituent elements. Metal aluminosilicate is used as a host crystal, and is an alkaline earth metal aluminosilicate phosphor containing Eu as an activator, absorbing VUV having a wavelength of 200 nm or less and having a peak wavelength of 360 to 390 nm. Is radiated with high efficiency.

【0015】本発明のアルカリ土類金属のアルミノ珪酸
塩蛍光体を製造するには、Ba、Sr及びCaの群か
ら選択される少なくとも一種のアルカリ土類金属元素、
Al元素、Si元素、及びEu元素のそれぞれの
酸化物、炭酸塩、硝酸塩、蓚酸塩等を、前記各元素の化
合物を化学量論的に所望の化学組成となるように秤量
し、十分に混合して蛍光体原料を調製する。これをアル
ミナ坩堝等の耐熱容器に充填して、還元性の雰囲気中
で、1100〜1600℃の範囲の温度で1〜10時間
かけて1回以上焼成し、得られた焼成物を分散させ、水
洗し、乾燥し、篩分するなど、蛍光体の通常の製造方法
で得ることができる。なお、焼成の雰囲気は中性雰囲気
で行ってもよい。好ましい焼成条件は、還元性雰囲気の
もとで、1150〜1450℃で2〜5時間焼成するこ
とであり、複数回焼成する場合には少なくとも1回は還
元性雰囲気で行う必要がある。また、蛍光体原料中に、
反応促進剤であるフラックス、例えばNH4 Cl等を混
合して焼成すると、蛍光体の紫外線発光強度を増加させ
ることができるのでより好ましい。
To produce the alkaline earth metal aluminosilicate phosphor of the present invention, at least one alkaline earth metal element selected from the group consisting of Ba, Sr and Ca;
Oxides, carbonates, nitrates, oxalates, etc. of each of the Al element, Si element and Eu element are weighed so that the compound of each element has the desired chemical composition stoichiometrically and mixed well. To prepare a phosphor material. This is filled in a heat-resistant container such as an alumina crucible, and fired at least once in a reducing atmosphere at a temperature in the range of 1100 to 1600 ° C. for 1 to 10 hours to disperse the obtained fired product. It can be obtained by a usual method for producing a phosphor, such as washing with water, drying and sieving. The firing may be performed in a neutral atmosphere. Preferred firing conditions are firing in a reducing atmosphere at 1150 to 1450 ° C. for 2 to 5 hours. When firing multiple times, it is necessary to perform firing at least once in a reducing atmosphere. Also, in the phosphor raw material,
It is more preferable to mix and bake a flux as a reaction accelerator, for example, NH 4 Cl, since the ultraviolet emission intensity of the phosphor can be increased.

【0016】本発明のアルカリ土類金属のアルミノ珪酸
塩蛍光体は、組成式が下記式で表され、その結晶の大部
分の結晶系が六方晶構造であって、VUVで励起した際
の紫外線発光強度の強い蛍光体が得られる。 (M1-x Eux )O・aAl2 3 ・bSiO2 (式中、MはBa,Sr及びCaの群から選択される少
なくとも1種のアルカリ土類金属元素を表し、x、a及
びbはそれぞれ0.005≦x≦0.2、0.9≦a≦
1.1、及び、1.8≦b≦2.2なる条件を満たす数
を表す、以下、同様である。)
The alkaline earth metal aluminosilicate phosphor of the present invention has a composition formula represented by the following formula, and most of the crystals have a hexagonal structure, and the ultraviolet rays when excited by VUV are used. A phosphor having a high emission intensity can be obtained. (M 1-x Eu x) O · aAl 2 O 3 · bSiO 2 ( where, M represents at least one alkaline earth metal element selected from the group consisting of Ba, Sr and Ca, x, a and b is 0.005 ≦ x ≦ 0.2, 0.9 ≦ a ≦
1.1 and a number that satisfies the condition of 1.8 ≦ b ≦ 2.2. )

【0017】この組成において、例えばアルカリ土類金
属元素MがBaであり、a=1、b=2の場合、蛍光体
の母体は組成式がBaAl2 Si2 8 (=BaO・A
28 ・2SiO2 )で表され、この母体結晶のBa
位の一部を付活剤である2価のEuで置換することによ
り発光する。ただし、Eu置換量を増やしすぎると、紫
外線発光の強度は低下してしまう。また、Eu置換量が
少なすぎると、発光中心の量が不足して発光強度が低下
する。Eu置換量を変えて上記の蛍光体を製造して発光
強度を調べたところ、Eu置換量(x値)を0.005
≦x≦0.2の範囲に調整するときにVUVで励起して
高効率に紫外線を放出することを見いだした。なお、E
u置換量(x値)のより好ましい範囲は0.01≦x≦
0.1である。
In this composition, for example, when the alkaline earth metal element M is Ba and a = 1 and b = 2, the base material of the phosphor has a composition formula of BaAl 2 Si 2 O 8 (= BaO · A
is represented by l 2 O 8 · 2SiO 2) , Ba in the host crystal
Light is emitted by substituting a part of the position with divalent Eu as an activator. However, if the amount of Eu substitution is excessively increased, the intensity of ultraviolet light emission decreases. On the other hand, if the amount of Eu substitution is too small, the amount of luminescent centers is insufficient, and the luminous intensity is reduced. When the above phosphor was manufactured by changing the Eu substitution amount and the emission intensity was examined, the Eu substitution amount (x value) was 0.005.
It has been found that when adjusted to the range of ≦ x ≦ 0.2, it is excited with VUV and emits ultraviolet rays with high efficiency. Note that E
A more preferable range of the u substitution amount (x value) is 0.01 ≦ x ≦
0.1.

【0018】図1は組成式が(Ba0.95Eu0.05)Al
2 Si2 8 である本発明のバリウムアルミノ珪酸塩蛍
光体のCuKαの特性X線による粉末X線回折図形を例
示したものであり、この図形とJCPDSカード(12
−0726番)との回折図形の照合により、結晶組成が
上記組成式を有する六方晶系の結晶であることが確認さ
れた。
FIG. 1 shows that the composition formula is (Ba 0.95 Eu 0.05 ) Al
FIG. 3 illustrates a powder X-ray diffraction pattern of the barium aluminosilicate phosphor of the present invention, which is 2 Si 2 O 8 , by a characteristic X-ray of CuKα.
By comparing the diffraction pattern with that of No.-0726), it was confirmed that the crystal composition was a hexagonal crystal having the above composition formula.

【0019】図2は組成式が(Ba0.95Eu0.05)Al
2 Si2 8 である本発明のアルカリ土類金属アルミノ
珪酸塩蛍光体を波長146nmのVUVで励起した際の
発光スペクトルを例示する図である。図2から明らかな
ように上記の蛍光体は、波長146nmのVUVで励起
すると、ピーク波長がおよそ370nm付近にあり、非
常にシャープな発光スペクトル分布をもった紫外線発光
を示すことがわかる。なお、この蛍光体の発光スペクト
ルは波長が172nmのVUVで励起した場合にもほぼ
図2と同様のスペクトル分布を有する発光を示す。
FIG. 2 shows that the composition formula is (Ba 0.95 Eu 0.05 ) Al
FIG. 3 is a diagram illustrating an emission spectrum when the alkaline earth metal aluminosilicate phosphor of the present invention, which is 2 Si 2 O 8 , is excited by VUV having a wavelength of 146 nm. As is clear from FIG. 2, when the above-described phosphor is excited by VUV having a wavelength of 146 nm, the peak wavelength is around 370 nm, and the phosphor emits ultraviolet light having a very sharp emission spectrum distribution. The emission spectrum of this phosphor shows light emission having a spectrum distribution substantially similar to that of FIG. 2 even when excited by VUV having a wavelength of 172 nm.

【0020】図3は組成式が(Ba0.95Eu0.05)Al
2 Si2 8 である本発明のアルカリ土類金属アルミノ
珪酸塩蛍光体のVUV領域から紫外線領域にわたる励起
スペクトルを例示する図である。図3の横軸は、この蛍
光体に照射されたVUVないし紫外線の波長であり、縦
軸の相対量子効率は、この蛍光体に各波長のVUVない
し紫外線を照射した時の発光強度及びサリチル酸ナトリ
ウムの発光強度を測定し、波長120〜300nmの波
長範囲における一定の量子効率を持つサリチル酸ナトリ
ウムの発光の量子効率を100としたときの相対値とし
て示したものである。
FIG. 3 shows that the composition formula is (Ba 0.95 Eu 0.05 ) Al
FIG. 3 is a diagram illustrating an excitation spectrum of the alkaline earth metal aluminosilicate phosphor of the present invention, which is 2 Si 2 O 8 , from the VUV region to the ultraviolet region. The horizontal axis of FIG. 3 is the wavelength of VUV or ultraviolet light applied to the phosphor, and the relative quantum efficiency of the vertical axis is the emission intensity and sodium salicylate when the phosphor is irradiated with VUV or ultraviolet light of each wavelength. Is measured as a relative value when the quantum efficiency of light emission of sodium salicylate having a constant quantum efficiency in the wavelength range of 120 to 300 nm is set to 100.

【0021】図3から明らかなように、本発明の蛍光体
は、200〜300nmの紫外線波長域の外に、120
〜200nmのVUV波長域に渡って高い量子効率を維
持していることがわかる。なお、本発明のアルカリ土類
金属アルミノ珪酸塩蛍光体は、アルカリ土類金属MがB
a以外のSr又はCaであっても波長200nm以下の
VUVで励起するときの発光スペクトルは、図2とほぼ
同様のスペクトル分布を持った発光を示すことが確認さ
れた。
As is clear from FIG. 3, the phosphor of the present invention has a wavelength of 120 to 120 nm outside the ultraviolet wavelength range of 200 to 300 nm.
It can be seen that high quantum efficiency is maintained over the VUV wavelength range of 200 nm. In the alkaline earth metal aluminosilicate phosphor of the present invention, the alkaline earth metal M is B
Even when Sr or Ca other than a was used, it was confirmed that the emission spectrum when excited with VUV having a wavelength of 200 nm or less showed emission having a spectrum distribution substantially similar to that of FIG.

【0022】本発明のVUV励起発光素子は、その蛍光
膜として上述の本発明のアルカリ土類金属アルミノ珪酸
塩蛍光体を用いる以外は従来のVUV励起発光素子と全
く同様にして製造することができる。例えば、希ガスを
例に本発明のVUV励起発光素子についてその製造方法
を説明すると、上記のアルカリ土類金属アルミノ珪酸塩
蛍光体からなる蛍光膜をガラス細管の内部に形成したも
のであって、ランプの製造は従来法で製造することがで
きる。即ち、上記のアルカリ土類金属アルミノ珪酸塩蛍
光体とエチルセルロース、ニトロセルロース、ポリエチ
レンオキサイド、アクリル樹脂等のバインダー樹脂と、
水、酢酸ブチル、ブチルカルビトール、テルピネオール
等の溶媒とを混合して十分に混練して所定の粘度に調整
して得た蛍光体ペースト組成物をガラス細管の内壁に塗
布し乾燥した後、ベーキングしてガラス管の内壁に蛍光
膜を形成し、両端のガラス管を挟んでその内外又はガラ
ス管の外面に電極を形成し、ガラス管の一端を封じ、内
部を排気してからXe、Xe−Ne等の希ガスを封入し
た後、ガラス管を完全に封じて紫外線放射希ガスランプ
を得る。
The VUV-excited light-emitting device of the present invention can be manufactured in exactly the same manner as the conventional VUV-excited light-emitting device except that the above-mentioned alkaline earth metal aluminosilicate phosphor of the present invention is used as the fluorescent film. . For example, a method of manufacturing the VUV excitation light emitting device of the present invention using a rare gas as an example will be described. A fluorescent film made of the above alkaline earth metal aluminosilicate phosphor is formed inside a glass tube, The lamp can be manufactured in a conventional manner. That is, the above alkaline earth metal aluminosilicate phosphor and ethyl cellulose, nitrocellulose, polyethylene oxide, a binder resin such as an acrylic resin,
A phosphor paste composition obtained by mixing water, butyl acetate, butyl carbitol, a solvent such as terpineol and kneading well to adjust to a predetermined viscosity is applied to the inner wall of a glass tube, dried and baked. Then, a fluorescent film is formed on the inner wall of the glass tube, electrodes are formed on the inner and outer sides or on the outer surface of the glass tube with the glass tube at both ends sandwiched, one end of the glass tube is sealed, the inside is evacuated, and then Xe, Xe- After encapsulating a rare gas such as Ne, the glass tube is completely sealed to obtain an ultraviolet radiation rare gas lamp.

【0023】また、PDPとする場合は、上述の本発明
のアルカリ土類アルミノ珪酸塩蛍光体を結合剤樹脂を含
有する有機溶媒中に分散させて混練して蛍光体ペースト
組成物を調製し、これをPDPのセルの所定の場所にス
クリーン印刷法などの方法で印刷・塗布して蛍光膜を形
成する以外は、従来のPDPと同様にして紫外線を放射
するPDPを得る。この場合、本発明のアルカリ土類金
属アルミノ珪酸塩蛍光体の代わりに、例えば、本発明の
アルカリ土類金属アルミノ珪酸塩蛍光体と、この蛍光体
から放射される紫外線によって励起されて可視光を発光
し得る蛍光体との混合蛍光体を用いて同様にして蛍光膜
を形成しておくと可視光を放射するPDPとすることが
できる。
When PDP is used, the above-mentioned alkaline earth aluminosilicate phosphor of the present invention is dispersed in an organic solvent containing a binder resin and kneaded to prepare a phosphor paste composition. A PDP that emits ultraviolet rays is obtained in the same manner as a conventional PDP, except that a phosphor film is formed by printing and applying the resultant to a predetermined location of a cell of the PDP by a screen printing method or the like. In this case, for example, instead of the alkaline earth metal aluminosilicate phosphor of the present invention, for example, the alkaline earth metal aluminosilicate phosphor of the present invention and visible light excited by ultraviolet rays emitted from the phosphor are used. If a phosphor film is formed in the same manner using a phosphor mixed with a phosphor capable of emitting light, a PDP that emits visible light can be obtained.

【0024】[0024]

【実施例】次に実施例により本発明を説明する。 (実施例1) BaCO3 0.9 モル Eu2 3 0.05 モル Al2 3 1 モル SiO2 2 モル 上記の蛍光体原料を十分に混合した原料化合物をアルミ
ナ坩堝に充填し、還元雰囲気中で、最高温度1300℃
で2時間焼成した。この焼成物に分散、水洗、乾燥、篩
分の各処理を行い、粉末X線回折図からみて結晶系が六
方晶系であり、組成が(Ba0.9 Eu0.1 )Al2 Si
2 8 のEu付活アルミノ珪酸塩蛍光体を得た。この蛍
光体に波長146nmのVUVを照射したとき、発光ス
ペクトルのピーク波長が372nmである紫外線発光を
示した。
Next, the present invention will be described by way of examples. (Example 1) BaCO 3 0.9 mol Eu 2 O 3 0.05 mol Al 2 O 3 1 mol SiO 2 2 mol A raw material compound obtained by sufficiently mixing the above phosphor raw materials is filled in an alumina crucible, and a reducing atmosphere is used. Inside, maximum temperature 1300 ℃
For 2 hours. The calcined product is subjected to dispersion, washing, drying, and sieving, and the crystal system is hexagonal and the composition is (Ba 0.9 Eu 0.1 ) Al 2 Si as viewed from the powder X-ray diffraction diagram.
A Eu activated aluminosilicate phosphor of 2 O 8 was obtained. When this phosphor was irradiated with VUV having a wavelength of 146 nm, it emitted ultraviolet light having a peak wavelength of an emission spectrum of 372 nm.

【0025】(実施例2〜4)実施例1において、蛍光
体原料中のAl2 3 の1モルに対し、NH4 Clフラ
ックスを、それぞれ0.235モル、0.392モル及
び0.784モル添加して十分に混合した以外は実施例
1と同様にして、結晶系が六方晶系である実施例2〜4
のEu付活アルミノ珪酸塩蛍光体〔(Ba0.9
0.1 )Al2 Si28 〕を得た。実施例2〜4のE
u付活アルミノ珪酸塩蛍光体に対し、実施例1と同一条
件で146nmのVUVを照射したところ、発光スペク
トルのピーク波長がそれぞれ表1に示した波長の紫外線
発光を呈し、そのときの発光スペクトルのピーク波長に
おける強度を調べ、実施例1の蛍光体のピーク波長での
強度を100としたときの相対発光強度を表1に示し
た。
Examples 2 to 4 In Example 1, the NH 4 Cl flux was 0.235 mol, 0.392 mol and 0.784 mol, respectively, per mol of Al 2 O 3 in the phosphor raw material. Examples 2 to 4 in which the crystal system was a hexagonal system were the same as in Example 1 except that they were added by mole and mixed well.
Eu-activated aluminosilicate phosphor [(Ba 0.9 E
u 0.1 ) Al 2 Si 2 O 8 ] was obtained. E of Examples 2 to 4
When the u-activated aluminosilicate phosphor was irradiated with VUV of 146 nm under the same conditions as in Example 1, the peak wavelengths of the emission spectra exhibited ultraviolet light emission having the wavelengths shown in Table 1, respectively. The intensity at the peak wavelength of Example 1 was examined, and the relative emission intensity when the intensity at the peak wavelength of the phosphor of Example 1 was set to 100 is shown in Table 1.

【0026】[0026]

【表1】 [Table 1]

【0027】(実施例5〜8)原料化合物の配合比を表
2に示すように変更した以外は、実施例1と同様にし
て、結晶系が六方晶系である実施例5〜8のEu付活ア
ルミノ珪酸塩蛍光体を得た。なお、蛍光体組成は表3に
示した。実施例5〜8のEu付活アルミノ珪酸塩蛍光体
に対し、実施例1と同一条件で146nmのVUVを照
射したところ、発光スペクトルのピーク波長がそれぞれ
表3に示した波長の紫外線発光を呈し、そのときの発光
スペクトルのピーク波長における強度を調べ、実施例1
の蛍光体のピーク波長での強度を100としたときの相
対発光強度をピーク波長とともに表3に示した。
Examples 5 to 8 In the same manner as in Example 1 except that the compounding ratio of the starting compounds was changed as shown in Table 2, the Eu of Examples 5 to 8 in which the crystal system was a hexagonal system was used. An activated aluminosilicate phosphor was obtained. The phosphor composition is shown in Table 3. When the Eu-activated aluminosilicate phosphors of Examples 5 to 8 were irradiated with 146 nm VUV under the same conditions as in Example 1, the peak wavelengths of the emission spectra exhibited ultraviolet light emission having the wavelengths shown in Table 3 respectively. The intensity at the peak wavelength of the emission spectrum at that time was examined.
Table 3 shows the relative luminescence intensity together with the peak wavelength when the intensity of the phosphor at the peak wavelength was taken as 100.

【0028】[0028]

【表2】 [Table 2]

【0029】[0029]

【表3】 [Table 3]

【0030】(実施例9〜10)原料化合物の配合比を
表4に示すように変更した以外は実施例1と同様にし
て、結晶系が六方晶系である実施例9〜10のEu付活
アルミノ珪酸塩蛍光体を得た。なお、蛍光体組成は表5
に示した。実施例9〜10のEu付活アルミノ珪酸塩蛍
光体に対し、実施例1と同一条件で146nmのVUV
を照射したところ、発光スペクトルのピーク波長がそれ
ぞれ表5に示した波長の紫外線発光を呈し、そのときの
発光スペクトルのピーク波長における強度を調べ、実施
例1の蛍光体のピーク波長での強度を100としたとき
の相対発光強度をピーク波長とともに表5に示した。
Examples 9 to 10 In the same manner as in Example 1 except that the compounding ratios of the raw material compounds were changed as shown in Table 4, the Eu-added materials of Examples 9 to 10 in which the crystal system was hexagonal were used. An active aluminosilicate phosphor was obtained. Table 5 shows the phosphor composition.
It was shown to. The Eu-activated aluminosilicate phosphors of Examples 9 to 10 were compared with the VUV of 146 nm under the same conditions as in Example 1.
Was irradiated, the peak wavelength of the emission spectrum exhibited ultraviolet light emission having the wavelengths shown in Table 5, respectively. The intensity at the peak wavelength of the emission spectrum at that time was examined, and the intensity at the peak wavelength of the phosphor of Example 1 was measured. Table 5 shows the relative luminescence intensity with the peak wavelength at 100.

【0031】[0031]

【表4】 [Table 4]

【0032】[0032]

【表5】 [Table 5]

【0033】[0033]

【発明の効果】本発明は、上記の構成を採用することに
より、波長200nm以下のVUVで励起して波長30
0〜400nmの紫外線を放射する、優れた発光強度を
示すアルカリ土類アルミノ珪酸塩蛍光体を提供すること
ができ、特に、希ガスランプの蛍光膜に適用することに
よって優れた紫外線発光希ガスランプの提供を可能にし
た。
According to the present invention, by adopting the above-described structure, the excitation with VUV having a wavelength of 200 nm or less and the wavelength of 30
It is possible to provide an alkaline earth aluminosilicate phosphor that emits ultraviolet rays of 0 to 400 nm and has excellent emission intensity, and in particular, an excellent ultraviolet light emitting rare gas lamp when applied to a fluorescent film of a rare gas lamp. Made possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の(Ba0.95Eu0.05)Al2 Si2
8 蛍光体のX線回折図形を示したものてある。
FIG. 1 shows (Ba 0.95 Eu 0.05 ) Al 2 Si 2 O of the present invention
It shows the X-ray diffraction pattern of 8 phosphors.

【図2】本発明の(Ba0.95Eu0.05)Al2 Si2
8 蛍光体を146nmの真空紫外線で励起した時の発光
スペクトルである。
FIG. 2 shows (Ba 0.95 Eu 0.05 ) Al 2 Si 2 O of the present invention.
8 is an emission spectrum when 8 phosphors are excited by 146 nm vacuum ultraviolet light.

【図3】本発明の(Ba0.95Eu0.05)Al2 Si2
8 蛍光体の真空紫外線波長域から紫外線波長域における
励起スペクトルである。
FIG. 3 shows (Ba 0.95 Eu 0.05 ) Al 2 Si 2 O of the present invention.
8 is an excitation spectrum of 8 phosphors in a vacuum ultraviolet wavelength range to an ultraviolet wavelength range.

【図4】本発明のアルカリ土類金属アルミノ珪酸塩蛍光
体における付活剤(Eu)の含有量(x)と発光スペク
トルのピーク強度との相関を示す図である。
FIG. 4 is a diagram showing a correlation between the activator (Eu) content (x) and the peak intensity of the emission spectrum in the alkaline earth metal aluminosilicate phosphor of the present invention.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4H001 CA02 CA04 CA07 XA08 XA20 XA38 XA56 YA63  ──────────────────────────────────────────────────続 き The continuation of the front page F term (reference) 4H001 CA02 CA04 CA07 XA08 XA20 XA38 XA56 YA63

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 Ba、Sr及びCaの群から選択される
少なくとも1種のアルカリ土類金属元素とAl元素とS
i元素とEu元素とをそれぞれ含有し、波長200nm
以下の真空紫外線による励起下で350〜400nmの
波長域に発光スペクトルのピークを有する紫外線発光を
呈することを特徴とする真空紫外線励起用アルカリ土類
金属のアルミノ珪酸塩蛍光体。
At least one kind of alkaline earth metal element, Al element and S selected from the group consisting of Ba, Sr and Ca
each containing an i element and an Eu element and having a wavelength of 200 nm
An alkaline earth metal aluminosilicate phosphor for excitation with vacuum ultraviolet light, which emits ultraviolet light having an emission spectrum peak in a wavelength range of 350 to 400 nm under the following excitation with vacuum ultraviolet light.
【請求項2】 前記アルカリ土類金属のアルミノ珪酸塩
蛍光体が、下記一般式で表されることを特徴とする請求
項1記載の真空紫外線励起用アルカリ土類金属のアルミ
ノ珪酸塩蛍光体。 (M1-x Eux )O・aAl2 3 ・bSiO2 (式中、MはBa、Sr及びCaの群から選択される少
なくとも1種のアルカリ土類金属元素を表し、x、a及
びbはそれぞれ0.005≦x≦0.2、0.9≦a≦
1.1、及び1.8≦b≦2.2なる条件を満たす数を
表す。)
2. The alkaline earth metal aluminosilicate phosphor for vacuum ultraviolet excitation according to claim 1, wherein the alkaline earth metal aluminosilicate phosphor is represented by the following general formula. (M 1-x Eu x) O · aAl 2 O 3 · bSiO 2 ( where, M represents at least one alkaline earth metal element selected from the group consisting of Ba, Sr and Ca, x, a and b is 0.005 ≦ x ≦ 0.2, 0.9 ≦ a ≦
1.1 and 1.8 ≦ b ≦ 2.2. )
【請求項3】 前記アルカリ土類金属のアルミノ珪酸塩
蛍光体は、その結晶系が六方晶構造である結晶を主相と
することを特徴とする請求項2記載の真空紫外線励起用
アルカリ土類金属のアルミノ珪酸塩蛍光体。
3. The alkaline earth metal for excitation with vacuum ultraviolet radiation according to claim 2, wherein the alkaline earth metal aluminosilicate phosphor has a crystal having a hexagonal crystal system as a main phase. Metal aluminosilicate phosphor.
【請求項4】 外囲器内に蛍光膜を有し、該外囲器内に
封入された希ガスの放電によって励起して前記蛍光膜を
発光させる真空紫外線発光素子において、前記蛍光膜
が、請求項1〜3のいずれか1項に記載のアルカリ土類
金属のアルミノ珪酸塩蛍光体を含有することを特徴とす
る真空紫外線励起発光素子。
4. A vacuum ultraviolet light emitting device having a fluorescent film in an envelope and emitting the fluorescent film by being excited by discharge of a rare gas sealed in the envelope, wherein the fluorescent film is A vacuum ultraviolet-excitation light-emitting device comprising the alkaline earth metal aluminosilicate phosphor according to claim 1.
JP2001098762A 2001-03-30 2001-03-30 Aluminosilicate phosphor for vacuum ultraviolet excitation and vacuum ultraviolet excitation light emitting device using the phosphor Pending JP2002294230A (en)

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* Cited by examiner, † Cited by third party
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CN100336886C (en) * 2005-04-08 2007-09-12 中国科学院上海硅酸盐研究所 Nitrogen oxide fluorescent material and preparation method thereof
CN100473710C (en) * 2006-11-20 2009-04-01 四川新力光源有限公司 Rare earth multielement coactivate long persistence luminescent material and preparation method thereof
CN103289686A (en) * 2012-02-28 2013-09-11 海洋王照明科技股份有限公司 Europium doped aluminosilicate luminescent material, luminescent film and film electroluminescent display device as well as preparation methods thereof
KR101419858B1 (en) * 2012-06-26 2014-07-17 성균관대학교산학협력단 Phosphor, and preparing method of the same

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* Cited by examiner, † Cited by third party
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CN100336886C (en) * 2005-04-08 2007-09-12 中国科学院上海硅酸盐研究所 Nitrogen oxide fluorescent material and preparation method thereof
CN100473710C (en) * 2006-11-20 2009-04-01 四川新力光源有限公司 Rare earth multielement coactivate long persistence luminescent material and preparation method thereof
CN103289686A (en) * 2012-02-28 2013-09-11 海洋王照明科技股份有限公司 Europium doped aluminosilicate luminescent material, luminescent film and film electroluminescent display device as well as preparation methods thereof
KR101419858B1 (en) * 2012-06-26 2014-07-17 성균관대학교산학협력단 Phosphor, and preparing method of the same

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