JP2002286799A - Measuring device of electronic part and measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measuring device of an electronic part capable of changing a pressing force by a fixed stroke, and avoiding a large stress to be applied to the electronic part at an initial stage of the stroke. SOLUTION: This device for measuring the characteristic of the electronic part by applying the pressing force onto the electronic part is equipped with a base, a driven slider supported on the base movably in the vertical direction, and a pressure mechanism mounted on the slider, for applying the pressing force onto the electronic part. The pressure mechanism 6 comprises an elastic body 11 and an actuator 12 operated when the slider is moved to the lowering end, to thereby operate compressed air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring apparatus and a measuring method for an electronic component, and more particularly to a measuring apparatus and a measuring method suitable for measuring the resistance and other characteristics of an electronic component by bringing an electrode of the electronic component into contact with a measuring terminal. About the method.

[0002]

2. Description of the Related Art As a device for measuring electronic components, a plurality of component supply units provided at equal intervals on an outer periphery of a transport turntable (not shown) hold the electronic components, and the measuring unit applies the electronic components to measuring means. As a means for pressing the electronic component by the measuring unit, there is a device provided with a pressing mechanism 20 as shown in FIG. 5 in a sectional state. The pressing mechanism 20 includes a cylindrical guide 21 having an insulating property.
The probe 22 is formed so as to be movable so that the tip of the probe 22 is directed upward, and the probe 22 is biased upward by a coil spring 24 disposed in the hole of the cylindrical guide 21. I have. The cylindrical guide 21 is embedded in the substrate 25 a of the measurement plate 25, and the cylindrical body 23 is
Then, the elastic projection 23a bent inward of the cylindrical body 23 is brought into electrical contact with the probe 22.

When an electrode of an electronic component (not shown) is brought into contact with the tip of the probe 22, the cylindrical body 23 and the projection 23
An electric circuit is formed between a, the probe 22, and the substrate 25a of the electrode of the electronic component.

[0004]

When the characteristics of an electronic component are measured, a pressing force is applied to the electrode to bring the electrode of the electronic component into contact with the tip of the probe 22 at a predetermined contact pressure. Since the pressing force is determined by the urging force of the coil spring 24, that is, the biasing force, it is not possible to secure different pressing forces for the electronic components with the same stroke of the probe 22.

The biasing force of the coil spring 24 is proportional to the stroke, and the proportional constant in this case is given as the rigidity of the spring. Therefore, in order to secure a biasing force larger than the biasing force corresponding to this stroke at a fixed stroke, the rigidity of the spring must be increased. However, if the rigidity of the spring is increased, the biasing force at the beginning of the stroke becomes too large, and as a result of applying a large pressing force to the electronic component, a large stress is applied to the electronic component.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide an electronic device capable of changing a pressing force at a constant stroke and avoiding applying a large stress to an electronic component at an initial stroke. An object of the present invention is to provide a measuring device and a measuring method for a component.

[0007]

Means for Solving the Problems In order to solve the above problems, the present invention has the following constitution. The gist of the invention according to claim 1 is an apparatus for measuring characteristics of an electronic component by applying a pressing force to the electronic component, comprising: a base; a driven slider movably supported by the base in a vertical direction; ,
A pressure mechanism attached to the slider and applying a pressing force to the electronic component, the pressure mechanism comprising an elastic body and an actuator that operates when the slider moves to a descending point to exert fluid pressure. An electronic component measuring device characterized in that: The gist of the invention according to claim 2 is that the pressurizing mechanism is mounted such that the pressing force can be changed in the same direction as the moving direction of the slider. It exists in the equipment for measuring parts. According to a third aspect of the invention, there is provided the electronic component measuring device according to the first or second aspect, wherein the actuator can adjust a pressure. The gist of the invention according to claim 4 is characterized by comprising an adjusting means for adjusting a predetermined amount of deformation of the elastic body.
An electronic component measuring apparatus according to any one of claims 1 to 3. The gist of the invention according to claim 5 resides in an electronic component measuring apparatus according to any one of claims 1 to 4, wherein a sensor for detecting a moving end of the slider is provided. The gist of the invention according to claim 6 resides in the electronic component measuring device according to any one of claims 1 to 5, wherein the elastic body and the actuator are coaxially arranged. The gist of the invention according to claim 7 is a method for measuring the characteristics of an electronic component by applying a pressing force to an electronic component, wherein the elastic body is deformed while the slider having the elastic body is lowered to reduce the pressing force. Generating, applying this pressing force to the electronic component, generating a pressing force by applying fluid pressure when the slider reaches the descending point, and applying the pressing force by the elastic body and the pressing force by the fluid pressure to the electronic component. A method for measuring an electronic component, wherein the pressing force by an elastic body and the pressing force by a fluid pressure are measured while the electronic component is being applied.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, FIG. 1 showing a measuring device in a frontal state, FIG. 2 showing a main part of the measuring device in a sectional state, and FIG. 3 showing a contact portion of a pressing mechanism in a frontal state, An embodiment of the present invention will be described in detail with reference to FIG. 4 showing a modification of FIG.

An electronic component 16 is provided at equal intervals on an outer peripheral portion of a turntable (not shown). The electronic component 16 is suction-held by a component supply unit (not shown), and a pressing force is applied to the electronic component 16 by a measuring unit (not shown). The device for measuring the characteristics of the above includes a base 1, a slider 2 movably supported by the base 1, and a pressing mechanism 6 attached to the slider 2 and applying a pressing force to the electronic component 16.

In the illustrated embodiment, the base 1 is made of a plate, and an eccentric cam 4 is rotatably mounted on an upper portion of the plate. The eccentric cam 4 is rotated by a drive source (not shown) arranged on the back surface of the base 1.

The slider 2 is supported on the base 1 by a pair of tension springs 8 and has a roller 5 rotatably mounted at a position facing the eccentric cam 4. Slider 2
Is pulled toward the eccentric cam 4 by a pair of tension springs 8 and the roller 5 is always kept in contact with the eccentric cam 4, so that when the eccentric cam 4 rotates, the slider 2 moves up and down in the figure. .

The pressure mechanism 6 is mounted on the mounting plate 3. The mounting plate 3 is supported on the slider 2 by an adjusting screw 9 so that the position of the mounting plate 3 can be adjusted in the same direction as the moving direction of the slider 2. As a result, the amount of deformation of the elastic body 11 of the pressing mechanism 6, that is, the initial pressing force on the electronic component 16 is adjusted by changing the screwing amount of the adjusting screw 9.

The pressurizing mechanism 6 operates when the elastic body 11 and the elastic body 11 are deformed by a predetermined amount, that is, when the slider 2 reaches the lower end and the electronic component 16 comes into contact with the measuring terminal 15a to exert a fluid pressure. And an actuator 12. In the embodiment shown in FIG. 2, the elastic body 11 is a coil spring, and the actuator 12 is a cylinder device including a cylinder 13 attached to the attachment plate 3 and a piston 14 sliding in the cylinder 13. The elastic body 11 is disposed in the cylinder 13 and the piston 14 is displaced downward. On the other hand, the cylinder 13 is connected to a compressed air source (not shown) via a pressure regulating valve 13a. Rod 14a
Is connected to a piston 14 and is connected to a vacuum pump (not shown), and a vacuum coupling 7a for supplying a vacuum to the suction nozzle 7 is connected to the rod 14a. The suction nozzle 7 extends downward from the vacuum coupling 7a, and sucks the electronic component 16 at the tip as shown in FIG.

As in the illustrated embodiment, when the cylinder 13 is connected to a compressed air source via a pressure regulating valve 13a,
The pressure of the compressed air supplied to the cylinder 13 is adjusted by the pressure regulating valve 1
3a. As a result, the actuator 1
2, the magnitude of the pressing force applied to the electronic component 16 can be arbitrarily changed. When the amount of deformation of the elastic body 11 is constant, the pressing force applied to the electronic component 16 by the elastic body 11 is constant because the spring constant is constant. On the other hand, if a pressing force is applied to the electronic component 16 using the actuator 12 in addition to the elastic body 11, the magnitude of the pressing force can be easily adjusted.

In the embodiment shown in FIG. 1, a means 10 for detecting the position of the slider 2 is provided. This detecting means 10 is a sensor for detecting the end of movement of the slider 2 due to the rotation of the eccentric cam 4, and the operating plate 1 attached to the slider 2
Activated by 0a.

When the detecting means 10 detects the descending end of the slider 2, the adjusting screw 9 is turned to move the mounting plate 3 in accordance therewith, and the amount of deformation of the elastic body 11 can be determined. Is easy to set.

The measuring device operates as follows. Prior to use, when the slider 2 reaches the lower end,
The position of the mounting plate 3 with respect to the slider 2 is adjusted with the adjusting screw 9 so that the electrode 16a of the electronic component 16 sucked by the suction nozzle 7 and the measuring terminal 15a come into contact.

First, an eccentric cam 4 is provided by a component supply unit (not shown).
Is rotated, the slider 2 is set at the lower end, and the electronic component 16 is sucked by the suction nozzle 7. Next, after the eccentric cam 4 is rotated to raise the slider 2, the eccentric cam 4 is moved to a measurement unit (not shown) and lowered similarly.
Is stopped by the falling edge detection signal of the detecting means 10, and the electrode 16a on the lower surface of the electronic component 16 sucked by the suction nozzle 7 comes into contact with the measuring terminal 15a of the measuring plate 15, as shown in FIG. At this time, by the initial setting of the adjusting screw 9, the piston 14 of the actuator 12 moves upward against the spring force of the elastic body 11 and compresses the elastic body 11. Due to this compression, a pressing force is applied to the electronic component 16, and a contact pressure is generated between the electrode 16a of the electronic component 16 and the measuring terminal 15a. At the same time, the compressed air adjusted to a predetermined pressure by the pressure adjusting valve 13a is supplied to the cylinder 13 by the signal from the detecting means 10, and presses the piston 14 downward.

In the above-described embodiment, the eccentric cam 4, the roller 5, and the tension spring 8 are used as means for setting the moving range of the slider 2. Alternatively, the moving range may be set by a cylinder device or a link mechanism. In any case, the amount of deformation of the elastic body 11 can be easily fixed by setting the movement range of the slider 2.

In the embodiment shown in FIG. 2, the elastic body 11 of the pressurizing mechanism 6 is arranged in the cylinder 13 of the actuator 12. Instead, as shown in FIG.
Can be formed. The pressing mechanism 17 includes the elastic body 11
And the actuator 18, and the elastic body 11 is disposed below the actuator 18. The piston 19b in the cylinder 19a of the actuator 18 is in contact with the upper end of the cylinder 19a when the elastic body 11 is in a free state where it is not compressed.

In the pressing mechanisms 6 and 17 shown in FIGS. 2 and 4, the elastic body 11 and the actuator 12 or the actuator 18
And are arranged coaxially. Thereby, the electronic component 1
6 can be arranged coaxially with the pressing mechanisms 6 and 17, so that the pressing force exerted on the electronic component 16 can be made uniform and stable.

The method of measuring the characteristics of the electronic component 16 by applying a pressing force to the electronic component 16 according to the present invention will be described with reference to FIGS. 1 to 3 again. When the pressing force is applied to the electronic component 16, when the deformation of the elastic body 11 reaches a predetermined amount, a fluid pressure is applied to generate a pressing force, and the pressing force by the elastic body 11 and the pressing force by the fluid pressure are reduced by the electronic component 16 and measuring the pressing force by the elastic body 11 and the pressing force by the fluid pressure while the electronic component 16 is being applied.

The pressing force by the fluid pressure can be obtained by the actuators 12 and 18. In the illustrated embodiment, the actuators 12 and 18 operate with compressed air, but use a liquid such as oil to make the actuator 1
2, 18 can also be activated.

In the above embodiment, the pressing mechanism 6 includes the mounting plate 3
, And the mounting plate 3 is movably mounted on the slider 2 by the adjusting screw 9 so that the position of the pressing mechanism 6 can be adjusted. Instead, the mounting plate 3 is fixedly attached to the slider 2, and the roller 5 of the slider 2 is formed so as to be movable along an elongated hole provided in the vertical direction so that the position of the pressing mechanism 6 can be adjusted. You can also. Although the elastic body 11 uses a coil spring, a leaf spring or rubber can be used instead.

[0025]

According to the present invention, the pressing force by the elastic body and the pressing force by the fluid pressure can be applied to the electronic component. As a result, the pressing force can be changed by deforming the elastic body with a constant stroke and then applying a fluid pressure, so that different contact pressures of electronic components can be secured with a constant stroke. This allows a measuring operation with a constant stroke. In addition, since the pressing force due to the fluid pressure is not related to the stroke, by initially applying a small pressing force by an elastic body to reduce the impact force, and then performing an operation to apply a large pressing force by the fluid pressure In addition, it is possible to avoid applying a large stress to the electronic component at the beginning of the measurement.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of an electronic component measuring device according to the present invention.

FIG. 2 is a cross-sectional view illustrating an embodiment of a pressing mechanism.

FIG. 3 is a front view showing an electronic component and a measurement terminal.

FIG. 4 is a sectional view showing another embodiment of the pressing mechanism.

FIG. 5 is a cross-sectional view showing a pressing mechanism used in a conventional electronic component measuring device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base 2 Slider 3 Mounting plate 4 Eccentric cam 5 Roller 6, 17 Pressure mechanism 7 Suction nozzle 7a Vacuum coupling 8 Tension spring 9 Adjusting screw 10 Detecting means 10a Working plate 11 Elastic body 12, 18, Actuator 13, 19a Cylinder 13a Pressure Adjusting valve 14, 19b Piston 14a Rod 15 Measuring plate 15a Measuring terminal 16 Electronic component 16a Electrode 20 Pressurizing mechanism 21 Cylindrical guide 22 Probe 23 Cylindrical body 23a Projection 24 Coil spring 25 Measuring plate 25a Substrate

Claims (7)

[Claims] 1. An apparatus for measuring characteristics of an electronic component by applying a pressing force to the electronic component, comprising: a base; a driven slider supported on the base so as to be movable in a vertical direction; A pressure mechanism for applying a pressing force to the electronic component, the pressure mechanism comprising: an elastic body; and an actuator that operates when the slider moves to a descending point to exert fluid pressure. A measuring device for electronic components. 2. The electronic component measuring device according to claim 1, wherein the pressing mechanism is mounted so as to be able to change the pressing force in the same direction as the moving direction of the slider. 3. The measuring device according to claim 1, wherein the actuator is capable of adjusting a pressure. 4. The electronic component measuring apparatus according to claim 1, further comprising an adjusting unit configured to adjust a predetermined amount of deformation of the elastic body. 5. The electronic component measuring apparatus according to claim 1, further comprising a sensor for detecting a moving end of the slider. 6. The electronic component measuring apparatus according to claim 1, wherein the elastic body and the actuator are coaxially arranged. 7. A method for measuring a characteristic of an electronic component by applying a pressing force to an electronic component, wherein the pressing device generates a pressing force by deforming the elastic member while the slider having the elastic member descends. Applying a force to the electronic component; applying a fluid pressure to the electronic component to generate a pressing force when the slider reaches the descending point; applying a pressing force by the elastic body and a pressing force by the fluid pressure to the electronic component; pressing by the elastic body A method for measuring an electronic component, comprising: measuring a force applied by a force and a fluid pressure while applying the force to the electronic component.