JP2002286311A - Cryogenic refrigerator - Google Patents
Cryogenic refrigeratorInfo
- Publication number
- JP2002286311A JP2002286311A JP2001087128A JP2001087128A JP2002286311A JP 2002286311 A JP2002286311 A JP 2002286311A JP 2001087128 A JP2001087128 A JP 2001087128A JP 2001087128 A JP2001087128 A JP 2001087128A JP 2002286311 A JP2002286311 A JP 2002286311A
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant gas
- regenerator
- cylinder
- temperature
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】 (修正有)
【課題】蓄冷器の温度が極低温レベルに低下しても、蓋
部や区分け部材とシリンダとの間の隙間が増大しないよ
うにし、冷凍機の運転時に蓄冷器で冷媒ガスの偏流が生
じるのを抑制して、蓄冷材とガスとの熱交換効率を高
め、極低温冷凍機の冷却性能を向上させる。
【解決手段】極低温冷凍機における蓄冷器3が、シリン
ダ34と、その端部を閉じる蓋部35H,35Lと、シ
リンダ34の内部に層状に充填された3種類の粒状蓄冷
材36H〜36Lと、異種類の蓄冷材36H〜36Lの
境界部に配置された区分け部材37H,37Lとを有す
るものとし、蓄冷器3の蓋部35H,35L及び各区分
け部材37H,37Lを、温度に対して負の膨張率を持
つ材料で構成し、冷凍機の運転中は蓋部35H,35L
や区分け部材37H,37Lの外径をシリンダ34に対
し相対的に増大させる。
(57) [Summary] (Modifications) [Problem] To prevent a gap between a cylinder and a lid or a sorting member from increasing even when the temperature of a regenerator falls to a very low temperature level, and to prevent the refrigerator from operating during operation. The present invention suppresses the occurrence of drift of the refrigerant gas in the regenerator, increases the heat exchange efficiency between the regenerator material and the gas, and improves the cooling performance of the cryogenic refrigerator. A regenerator (3) in a cryogenic refrigerator includes a cylinder (34), lids (35H, 35L) for closing the ends thereof, and three types of granular cold storage materials (36H to 36L) filled in a layer inside the cylinder (34). And separating members 37H and 37L arranged at the boundary between the different types of cold storage materials 36H to 36L, and the lids 35H and 35L of the regenerator 3 and the respective separating members 37H and 37L are negative with respect to temperature. And a lid 35H, 35L during operation of the refrigerator.
The outer diameters of the partition members 37H and 37L are relatively increased with respect to the cylinder 34.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、冷媒ガスの圧縮及
び膨張を繰り返して冷熱(寒冷)を発生させる極低温冷
凍機に関し、特に、その蓄冷器(再生式熱交換器)の構
造に関する技術分野に属する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryogenic refrigerator that generates cold heat (cold) by repeatedly compressing and expanding a refrigerant gas, and more particularly, to a structure of a regenerator (regenerative heat exchanger). Belongs to.
【0002】[0002]
【従来の技術】従来より、この種の極低温冷凍機は一般
に知られており、例えばヘリウムガス等からなる冷媒ガ
スを圧縮する圧縮機と、この圧縮機からの高圧冷媒ガス
及び圧縮機に戻る低圧冷媒ガスを切り換える切換弁と、
この切換弁に接続され、上記冷媒ガスの膨張時の冷熱を
蓄冷する蓄冷器と、この蓄冷器に接続された1つ以上の
冷却ステージとを備え、この冷却ステージにおいて、切
換弁の切換えにより蓄冷器を通して加えられる冷媒ガス
の圧力波によりその圧縮及び膨張を繰り返して冷熱を発
生させるようにしている。2. Description of the Related Art A cryogenic refrigerator of this type has been generally known. For example, a compressor for compressing a refrigerant gas such as helium gas and a high-pressure refrigerant gas from the compressor and a compressor are returned. A switching valve for switching low-pressure refrigerant gas,
A regenerator connected to the switching valve for accumulating cold heat when the refrigerant gas expands, and one or more cooling stages connected to the regenerator; The compression wave and the expansion are repeated by the pressure wave of the refrigerant gas added through the vessel to generate cold heat.
【0003】上記蓄冷器としては、例えばシリンダ内に
粒状の蓄冷材を充填し、その充填後にシリンダの端部を
冷媒ガスの流通可能な蓋部により閉じたものが用いられ
る。そして、上記蓄冷器におけるシリンダの一端部は、
冷却対象を冷却するため等に極低温レベル(例えば4.
2K)に温度が下がる低温端部となり、他端部は上記低
温端部よりも高い温度(例えば50K)の高温端部とな
る。[0003] As the regenerator, for example, a regenerator is used in which a granular regenerative material is filled in a cylinder, and after filling, the end of the cylinder is closed by a lid through which refrigerant gas can flow. And one end of the cylinder in the regenerator is
A cryogenic level (e.g., 4.
The low-temperature end where the temperature falls to 2K), and the other end becomes a high-temperature end having a higher temperature (for example, 50K) than the low-temperature end.
【0004】これに対し、上記蓄冷材は、極低温レベル
での温度域で十分な熱容量を持つ特性の磁性蓄冷材が用
いられる。この磁性蓄冷材は、比熱が最大となる固有の
温度を有し、その比熱のピークとなる温度が蓄冷材の種
類毎に異なる。従って、蓄冷材として、上記蓄冷器にお
けるシリンダの例えば低温端部側(又は高温端部側)の
温度域で比熱が最大となる同じ1種類の蓄冷材を蓄冷器
全体に亘り充填すると、高温端部側(又は低温端部側)
の温度域では蓄冷材の比熱のピークとなる温度からずれ
ることとなり、蓄冷器の蓄冷効率が不十分となる。On the other hand, as the cold storage material, a magnetic cold storage material having a characteristic of having a sufficient heat capacity in a temperature range at an extremely low temperature level is used. This magnetic regenerator material has a specific temperature at which the specific heat is maximum, and the temperature at which the specific heat peaks differs for each type of regenerative material. Therefore, when the same type of cold storage material having the maximum specific heat in the temperature range of, for example, the low-temperature end (or high-temperature end) side of the cylinder in the regenerator is filled over the entire regenerator, the high-temperature end Part side (or low temperature end side)
In this temperature range, the temperature deviates from the peak temperature of the specific heat of the cold storage material, and the cold storage efficiency of the cold storage device becomes insufficient.
【0005】[0005]
【発明が解決しようとする課題】そこで、比熱のピーク
となる温度が各々で異なる複数種類の蓄冷材を用い、そ
の複数種類の蓄冷材を蓄冷器において異なる温度域に対
応するように層状に充填配置するとともに、これら異な
る種類の蓄冷材間の境界部に両種類の蓄冷材が互いに混
じり合わないように冷媒ガスの流通可能な区分け部材を
配置すれば、各種類の蓄冷材の持つ比熱を有効に利用し
て蓄冷器の蓄冷効率を高めることができる。Therefore, a plurality of types of cold storage materials, each having a different specific heat peak temperature, are used, and the plurality of types of cold storage materials are filled in layers in the regenerator to correspond to different temperature ranges. In addition to disposing them, at the boundary between these different types of cold storage materials, if a separating member capable of flowing refrigerant gas is arranged so that both types of cold storage materials do not mix with each other, the specific heat of each type of cold storage material is effective. To increase the cool storage efficiency of the cool storage device.
【0006】ところで、このような区分け部材を有する
蓄冷器、或いは区分け部材のない蓄冷器を製造すると
き、シリンダの一端部に一方の蓋部を嵌挿してからその
蓋部を底壁として蓄冷材を充填し、区分け部材を有する
ものについては、その区分け部材を嵌挿した後に他の種
類の蓄冷材を充填し、最後にシリンダの他端部に他方の
蓋部を嵌挿することで、蓄冷器が製造される。When manufacturing a regenerator having such a partitioning member or a regenerator without such a partitioning member, one of the lids is fitted into one end of the cylinder and then the lid is used as a bottom wall for the regenerator material. For those having a sorting member, after the fitting of the sorting member is filled with another type of cold storage material, and finally, the other end of the cylinder is fitted with the other lid, thereby storing the cold storage material. A vessel is manufactured.
【0007】その場合、蓋部又は区分け部材をシリンダ
に嵌挿するためにシリンダ内周面と蓋部又は区分け部材
の各外周部との間に生じる隙間は必要最小限に設定され
る。しかし、こうした常温での蓄冷器の製造時に、上記
シリンダ内周面と蓋部又は区分け部材の各外周部との間
の隙間を最小に設定したとしても、冷凍機の運転時に蓄
冷器が極低温レベルに温度降下すると、それに伴って上
記隙間が大きくなるのは避けられない。このため、本来
は蓋部や区分け部材を通って流通すべき冷媒ガスが上記
増大した隙間を通って流れるようになり、蓄冷器内部や
蓄冷器内外でのガスの流れに偏流が生じてガス流量の分
布が一様でなくなり(図5参照)、その結果、蓄冷材と
ガスとの熱交換効率が下がって冷凍機の冷却性能が低下
するという問題が生じる。In this case, the gap generated between the inner peripheral surface of the cylinder and each outer peripheral portion of the lid or the partitioning member for inserting the lid or the partitioning member into the cylinder is set to a minimum necessary. However, when manufacturing the regenerator at room temperature, even if the gap between the inner peripheral surface of the cylinder and the outer peripheral portion of the lid or the partitioning member is set to a minimum, the regenerator is operated at extremely low temperature during operation of the refrigerator. When the temperature drops to the level, it is inevitable that the above-mentioned gap increases accordingly. For this reason, the refrigerant gas, which should originally flow through the lid and the separating member, flows through the increased gap, and the gas flow inside the regenerator and inside and outside the regenerator becomes deviated and the gas flow rate increases. Is not uniform (see FIG. 5), and as a result, there arises a problem that the heat exchange efficiency between the cold storage material and the gas is reduced and the cooling performance of the refrigerator is reduced.
【0008】本発明は斯かる点に鑑みてなされたもの
で、その目的は、上記したように蓄冷器のシリンダに嵌
挿される蓋部や区分け部材の材料を特定することで、蓄
冷器の温度が極低温レベルに低下しても、蓋部や区分け
部材とシリンダとの間の隙間が増大しないようにし、冷
凍機の運転時に蓄冷器で冷媒ガスの偏流が生じるのを抑
制して、蓄冷材とガスとの熱交換効率を高め、極低温冷
凍機の冷却性能を向上させることにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to specify a material of a lid and a partition member to be inserted into a cylinder of a regenerator, as described above, to thereby determine the temperature of the regenerator. Even if the temperature drops to a cryogenic level, the gap between the lid and the sorting member and the cylinder is prevented from increasing, and the occurrence of drift of the refrigerant gas in the regenerator during operation of the refrigerator is suppressed. It is an object of the present invention to improve the efficiency of heat exchange between gas and gas and improve the cooling performance of a cryogenic refrigerator.
【0009】[0009]
【課題を解決するための手段】上記の目的を達成するた
めに、この発明では、蓄冷器における蓋部及び/又は区
分け部材を、温度が下がるほど膨張する負の膨張率の材
料で構成した。In order to achieve the above object, according to the present invention, the lid and / or the partition member of the regenerator are made of a material having a negative expansion coefficient which expands as the temperature decreases.
【0010】具体的には、請求項1の発明では、冷媒ガ
スの圧力波を発生させる圧力波発生手段(24)と、こ
の圧力波発生手段(24)による冷媒ガスの圧力波によ
って冷媒ガスの圧縮及び膨張を繰り返して冷熱を発生す
る少なくとも1つの冷却ステージ(9,11)と、上記
冷媒ガスの膨張時の冷熱を蓄冷する蓄冷器(2,3)と
を備えた極低温冷凍機を前提とする。Specifically, in the first aspect of the present invention, the pressure wave generating means (24) for generating a pressure wave of the refrigerant gas, and the pressure wave of the refrigerant gas by the pressure wave generating means (24) is used to generate the refrigerant gas. A cryogenic refrigerator having at least one cooling stage (9, 11) for generating cold heat by repeating compression and expansion, and a regenerator (2, 3) for storing cold heat during expansion of the refrigerant gas. And
【0011】そして、上記蓄冷器(3)は、シリンダ
(34)と、このシリンダ(34)の端部に嵌挿され、
冷媒ガスの流通可能な蓋部(35H,35L)と、この
蓋部(35H,35L)で閉じられたシリンダ(34)
の内部に充填された蓄冷材(36H〜36L)とを備
え、上記蓋部(35H,35L)は、温度に対して零又
は負の膨張率を持つ材料からなるものとする。The regenerator (3) is inserted into a cylinder (34) and an end of the cylinder (34).
A lid (35H, 35L) through which the refrigerant gas can flow, and a cylinder (34) closed by the lid (35H, 35L)
And a regenerator material (36H to 36L) filled in the inside of the container, and the lid (35H, 35L) is made of a material having a zero or negative expansion coefficient with respect to temperature.
【0012】請求項2の発明では、上記請求項1の発明
の前提と同様の極低温冷凍機において、その蓄冷器
(3)は、シリンダ(34)と、このシリンダ(34)
の端部に嵌挿され、冷媒ガスの流通可能な蓋部(35
H,35L)と、この蓋部(35H,35L)で閉じら
れたシリンダ(34)の内部に、該シリンダ(34)の
軸方向に層状に充填された少なくとも2種類の蓄冷材
(36H〜36L)と、上記シリンダ(34)内に上記
異なる種類の蓄冷材(36H〜36L)の境界部に位置
するように嵌挿され、冷媒ガスの流通可能な区分け部材
(37H,37L)とを備え、上記区分け部材(37
H,37L)は、温度に対して零又は負の膨張率を持つ
材料からなるものとする。According to a second aspect of the present invention, in the cryogenic refrigerator similar to the premise of the first aspect of the invention, the regenerator (3) includes a cylinder (34) and the cylinder (34).
The lid (35) is inserted into the end of the
H, 35L) and at least two kinds of cold storage materials (36H to 36L) filled in layers in the axial direction of the cylinder (34) inside the cylinder (34) closed by the lid (35H, 35L). ), And a partition member (37H, 37L) which is inserted into the cylinder (34) so as to be located at a boundary between the different types of cold storage materials (36H to 36L) and through which refrigerant gas can flow. The sorting member (37
H, 37L) is made of a material having a zero or negative expansion coefficient with respect to temperature.
【0013】請求項3の発明では、上記請求項2の発明
の極低温冷凍機において、その蓄冷器(3)の蓋部(3
5H,35L)は、温度に対して零又は負の膨張率を持
つ材料からなるものとする。According to a third aspect of the present invention, in the cryogenic refrigerator according to the second aspect, the lid (3) of the regenerator (3) is provided.
5H, 35L) is made of a material having a zero or negative expansion coefficient with respect to temperature.
【0014】これらの各発明の構成によると、蓄冷器
(3)の蓋部(35H,35L)及び/又は区分け部材
(37H,37L)が温度に対して零又は負の膨張率を
持つ材料からなるので、これら蓋部(35H,35L)
や区分け部材(37H,37L)は、その温度が冷凍機
の運転中に極低温レベルに低下したときに膨張して、そ
の外径がシリンダ(34)に対して相対的に増大する。
このため、蓄冷器(3)の常温での製造時に、蓋部(3
5H,35L)や区分け部材(37H,37L)の外径
を、シリンダ(34)の内部に嵌挿するために必要な隙
間を持つようにシリンダ(34)の内径よりも小さくし
ていても、冷凍機が運転状態になって、その蓋部(35
H,35L)や区分け部材(37H,37L)が温度降
下すると、上記蓋部(35H,35L)や区分け部材
(37H,37L)の膨張によりその外周面とシリンダ
(34)の内周面との間の隙間は十分小さくなるか零
(0)になる。その結果、蓄冷器(3)内外間又は内部
で冷媒ガスの偏流が発生せず、その冷媒ガスの流量分布
が一様となり、冷凍機の冷却性能を向上維持することが
できる。According to the constitution of each of these inventions, the lid (35H, 35L) and / or the partition member (37H, 37L) of the regenerator (3) are made of a material having a zero or negative expansion coefficient with respect to temperature. So these lids (35H, 35L)
The partition members (37H, 37L) expand when their temperature decreases to a cryogenic level during operation of the refrigerator, and their outer diameters increase relatively to the cylinder (34).
For this reason, when manufacturing the regenerator (3) at room temperature, the lid (3)
5H, 35L) and the outer diameter of the sorting members (37H, 37L) are smaller than the inner diameter of the cylinder (34) so as to have a clearance required for insertion into the cylinder (34). The refrigerator enters the operating state, and its lid (35)
H, 35L) and the partition members (37H, 37L) drop in temperature, the expansion of the lids (35H, 35L) and the partition members (37H, 37L) causes the outer peripheral surface and the inner peripheral surface of the cylinder (34) to move. The gap between them becomes sufficiently small or zero (0). As a result, no drift of the refrigerant gas occurs between the inside and the outside of the regenerator (3) or inside the regenerator, the flow distribution of the refrigerant gas becomes uniform, and the cooling performance of the refrigerator can be improved and maintained.
【0015】請求項4の発明では、請求項2の発明の極
低温冷凍機において、区分け部材(37H,37L)が
複数設けられている場合に、それら複数の区分け部材
(37H,37L)の温度に対する膨張率を蓄冷器
(3)の冷却温度位置に応じて異ならせる。According to a fourth aspect of the present invention, in the cryogenic refrigerator according to the second aspect of the present invention, when a plurality of sorting members (37H, 37L) are provided, the temperature of the plurality of sorting members (37H, 37L) is increased. Is made different depending on the cooling temperature position of the regenerator (3).
【0016】また、請求項5の発明では、請求項1又は
3の発明の極低温冷凍機において、シリンダ(34)の
両端部にそれぞれ位置する蓋部(35H,35L)の温
度に対する膨張率を互いに異ならせる。According to a fifth aspect of the present invention, in the cryogenic refrigerator according to the first or third aspect of the present invention, the expansion rates of the lids (35H, 35L) located at both ends of the cylinder (34) with respect to the temperature are determined. Make them different.
【0017】こうすれば、蓄冷器(3)での温度領域に
応じて蓋部(35H,35L)や区分け部材(37H,
37L)の膨張率を適正に対応させて、冷凍機の運転中
の蓋部(35H,35L)や区分け部材(37H,37
L)とシリンダ(34)との間の隙間を略一定に保つこ
とができる。In this case, the lid (35H, 35L) and the partitioning member (37H, 35H) can be selected according to the temperature range in the regenerator (3).
37L), the lid (35H, 35L) and the separating member (37H, 37L) during operation of the refrigerator.
L) and the gap between the cylinder (34) can be kept substantially constant.
【0018】請求項6の発明では、上記圧力波発生手段
(24)は、冷媒ガスを圧縮する圧縮機(16)と、こ
の圧縮機(16)からの高圧冷媒ガス及び圧縮機(1
6)に戻る低圧冷媒ガスを切り換える切換弁(17)と
を備えてなるものとする。このことで、望ましい圧力波
発生手段(24)を具体化することができる。According to a sixth aspect of the present invention, the pressure wave generating means (24) includes a compressor (16) for compressing the refrigerant gas, a high-pressure refrigerant gas from the compressor (16) and the compressor (1).
And a switching valve (17) for switching the low-pressure refrigerant gas returning to 6). Thus, a desirable pressure wave generating means (24) can be embodied.
【0019】[0019]
【発明の実施の形態】図4は本発明の実施形態に係る極
低温冷凍機(R)の全体構成を示し、この冷凍機(R)
は、冷媒ガスとして例えばヘリウムガスを用いる2段の
パルス管冷凍機からなる。(1)は内部が真空断熱状態
に保たれる真空槽で、その内部には再生式熱交換器から
なる第1段及び第2段の蓄冷器(2,3)と、第1段及
び第2段のパルス管(5,6)とが収容され、これらは
真空槽(1)の上壁に断熱状態で吊下げ支持されてい
る。FIG. 4 shows an entire configuration of a cryogenic refrigerator (R) according to an embodiment of the present invention.
Comprises a two-stage pulse tube refrigerator using, for example, helium gas as a refrigerant gas. (1) is a vacuum chamber in which the inside is kept in a vacuum adiabatic state, in which a first and second stage regenerators (2, 3) composed of regenerative heat exchangers, and first and second stages are stored. Two-stage pulse tubes (5, 6) are accommodated, and these are suspended and supported on the upper wall of the vacuum chamber (1) in an insulated state.
【0020】上記各蓄冷器(2,3)は真空槽(1)の
略中央に配置され、第1段蓄冷器(2)の上端部は真空
槽(1)上壁の外側に位置していて高温端部(常温端
部)に形成されている。第1段蓄冷器(2)の外径(詳
しくは後述するシリンダ(34)の外径)は第2段蓄冷
器(3)よりも大径とされ、両蓄冷器(2,3)は互い
に冷媒ガスが流通可能に連通されている。Each of the regenerators (2, 3) is disposed substantially at the center of the vacuum tank (1), and the upper end of the first-stage regenerator (2) is located outside the upper wall of the vacuum tank (1). At the high temperature end (normal temperature end). The outer diameter of the first-stage regenerator (2) (the outer diameter of a cylinder (34) described later in detail) is larger than that of the second-stage regenerator (3), and both regenerators (2, 3) are mutually connected. The refrigerant gas is communicated so as to be able to flow.
【0021】そして、第1段蓄冷器(2)の下端部は、
上記第1段パルス管(5)内部の膨張空間での冷媒ガス
の膨張により極低温レベル(例えば50K以下)に温度
降下する第1段冷却ステージ(9)に、また第2段蓄冷
器(3)の下端部は、同様に上記第2段パルス管(6)
内部の膨張空間での冷媒ガスの膨張により第1段冷却ス
テージ(9)よりも低い温度レベル(例えば4.2K)
に温度降下する第2段冷却ステージ(11)にそれぞれ
接続され、その第1段冷却ステージ(9)には、第2段
冷却ステージ(11)の全体及び第2段蓄冷器(3)の
低温端部を周りから輻射シールドするためのシールド部
(14)が、また第2段冷却ステージ(11)には図外
の冷却対象がそれぞれ伝熱可能に接触している。The lower end of the first stage regenerator (2)
The first stage cooling stage (9), whose temperature drops to a cryogenic level (for example, 50K or less) due to the expansion of the refrigerant gas in the expansion space inside the first stage pulse tube (5), and the second stage regenerator (3) The lower end of the second stage pulse tube (6)
Due to the expansion of the refrigerant gas in the internal expansion space, a temperature level lower than that of the first cooling stage (9) (for example, 4.2K)
The first cooling stage (9) is connected to the entire second stage cooling stage (11) and the low temperature of the second stage regenerator (3). A shield part (14) for radiation shielding the end from the surroundings, and a cooling object (not shown) are in contact with the second cooling stage (11) so as to be able to conduct heat.
【0022】一方、上記第1段及び第2段のパルス管
(5,6)はそれぞれ真空槽(1)の異なる周辺位置に
配置され、各パルス管(5,6)の上端部は真空槽
(1)上壁の外側に位置していて高温端部となってい
る。これらのパルス管(5,6)は、後述の圧力波発生
手段(24)による冷媒ガスの圧力波により内部で冷媒
ガスの仮想ピストンを往復動させ、上記冷却ステージ
(9,11)で冷媒ガスの圧縮及び膨張を繰り返させて
冷熱(寒冷)を発生させるもので、第1段パルス管
(5)下端の低温端部と上記第1段蓄冷器(2)の下端
とは第1段連通管(12)により冷媒ガスの流通可能に
連通されている。また、第2段パルス管(6)下端の低
温端部と第2段蓄冷器(3)の下端とは第2段連通管
(13)により冷媒ガスの流通可能に連通されている。On the other hand, the first-stage and second-stage pulse tubes (5, 6) are respectively arranged at different peripheral positions of the vacuum chamber (1), and the upper end of each pulse tube (5, 6) is placed in a vacuum chamber. (1) It is located outside the upper wall and is a hot end. These pulse tubes (5, 6) reciprocate the virtual piston of the refrigerant gas inside by the pressure wave of the refrigerant gas by the pressure wave generating means (24) described later, and the refrigerant gas is cooled by the cooling stage (9, 11). The low-temperature end of the lower end of the first-stage pulse tube (5) and the lower end of the first-stage regenerator (2) are connected to the first-stage communication pipe by repeating the compression and expansion of By (12), the refrigerant gas is communicated so as to be able to flow. The low-temperature end of the lower end of the second-stage pulse tube (6) and the lower end of the second-stage regenerator (3) are connected by a second-stage communication tube (13) so that refrigerant gas can flow.
【0023】上記第1段蓄冷器(2)の高温端部にはガ
ス給排配管(15)の一端部(下端部)が接続され、こ
のガス給排配管(15)の他端部(上端部)は、例えば
ヘリウム等の冷媒ガスを圧縮して定常的に高圧冷媒ガス
を発生させる圧縮機(16)にロータリバルブ(17)
を介して接続されている。このロータリバルブ(17)
は互いに接する固定弁体(18)及び回転弁体(19)
からなり、固定弁体(18)の接触面には上記ガス給排
配管(15)(第1段蓄冷器(2)の高温端部)に常時
連通する給排ポート(20)と、圧縮機(16)の吸込
み部に常時連通する低圧ポート(21)とが、また回転
弁体(19)の接触面には圧縮機(16)の吐出部に常
時連通する高圧ポート(22)と、連通部(23)とが
それぞれ開口されており、回転弁体(19)を固定弁体
(18)に対し相対回転させて給排ポート(20)に圧
縮機(16)の吐出部又は吸込み部を切り換えて連通さ
せ、回転弁体(19)の高圧ポート(22)を固定弁体
(18)の給排ポート(20)に連通させたときには、
圧縮機(16)からの高圧冷媒ガスを高圧ポート(2
2)ないし給排ポート(20)を経て蓄冷器(2,3)
及びパルス管(5,6)に供給する一方、回転弁体(1
9)の回転によりその連通部(23)を給排ポート(2
0)に連通させたときには、パルス管(5,6)及び蓄
冷器(2,3)から冷媒ガスを給排ポート(20)、連
通部(23)及び低圧ポート(21)を介して圧縮機
(16)の吸込み部に戻すようになっている。よって、
上記圧縮機(16)とロータリバルブ(17)とにより
冷媒ガスの所定周期の圧力波を発生させる圧力波発生手
段(24)が構成されている。One end (lower end) of a gas supply / discharge pipe (15) is connected to the high temperature end of the first stage regenerator (2), and the other end (upper end) of the gas supply / discharge pipe (15). Part) is provided with a rotary valve (17) to a compressor (16) that compresses a refrigerant gas such as helium and constantly generates a high-pressure refrigerant gas.
Connected through. This rotary valve (17)
Are a fixed valve body (18) and a rotary valve body (19) which are in contact with each other.
A supply / discharge port (20) which is always in communication with the gas supply / discharge pipe (15) (the high-temperature end of the first-stage regenerator (2)) on a contact surface of the fixed valve body (18); A low pressure port (21) constantly communicating with the suction portion of (16), and a high pressure port (22) constantly communicating with the discharge portion of the compressor (16) on the contact surface of the rotary valve body (19). The rotary valve element (19) is relatively rotated with respect to the fixed valve element (18), and the discharge or suction part of the compressor (16) is connected to the supply / discharge port (20). When the high pressure port (22) of the rotary valve body (19) is connected to the supply / discharge port (20) of the fixed valve body (18) by switching and communicating with each other,
The high-pressure refrigerant gas from the compressor (16) is supplied to the high-pressure port (2
2) or regenerator (2, 3) via supply / discharge port (20)
And the pulse tubes (5, 6), while the rotary valve body (1
The communication part (23) is rotated by the rotation of 9) to supply and discharge the port (2).
0), the refrigerant gas is supplied from the pulse tubes (5, 6) and the regenerators (2, 3) to the compressor via the supply / discharge port (20), the communication part (23), and the low pressure port (21). It returns to the suction part of (16). Therefore,
The compressor (16) and the rotary valve (17) constitute a pressure wave generating means (24) for generating a pressure wave of the refrigerant gas in a predetermined cycle.
【0024】上記各パルス管(5,6)の高温端部に
は、その高温端部に対する冷媒ガス圧の位相を制御し
て、パルス管(5,6)内における冷媒ガスの仮想ピス
トンの往復動についてロータリバルブ(17)による高
圧又は低圧冷媒ガスの給排切換えに対し位相差を作るた
めの位相制御手段(26a,26b)が設けられてい
る。At the high-temperature end of each of the pulse tubes (5, 6), the phase of the refrigerant gas pressure with respect to the high-temperature end is controlled to reciprocate the virtual piston of the refrigerant gas in the pulse tubes (5, 6). Phase control means (26a, 26b) for producing a phase difference with respect to switching of supply / discharge of high-pressure or low-pressure refrigerant gas by the rotary valve (17) is provided.
【0025】この各位相制御手段(26a,26b)
は、各パルス管(5,6)の高温端部に配管(27a,
27b)を介して連通するバッファ空間(図示せず)が
内部に形成されたバッファタンク(28a,28b)を
備え、上記各配管(27a,27b)の途中には一定開
度を有する第1流量調整バルブ(29a,29b)が接
続されている。この流量調整バルブ(29a,29b)
と各パルス管(5,6)の高温端部との間の配管(27
a,27b)にはそれぞれ分岐配管(30a,30b)
の一端部が分岐接続され、この各分岐配管(30a,3
0b)の他端部は上記第1段蓄冷器(2)とロータリバ
ルブ(17)との間のガス給排配管(15)に接続さ
れ、この分岐配管(30a,30b)の途中には一定開
度を有する第2流量調整バルブ(31a,31b)が接
続されている。上記各流量調整バルブ(29a,29
b,31a,31b)は各配管(27a,27b,30
a,30b)内を流れる冷媒ガスに流動抵抗を与える機
能を有する。そして、ロータリバルブ(17)で発生し
た冷媒ガスの圧力波を第2流量調整バルブ(31a,3
1b)で流動抵抗を付与しながら各パルス管(5,6)
の高温端部に供給するとともに、その高温端部から冷媒
ガスを第1流量調整バルブ(29a,29b)で流動抵
抗を付与しながらバッファタンク(28a,28b)内
のバッファ空間に給排することで、パルス管(5,6)
の高温端部に対する冷媒ガス圧の位相を制御して、パル
ス管(5,6)内で冷媒ガスの仮想ピストンを往復動さ
せ、この仮想ピストンの往復動により冷却ステージ
(9,11)内の膨張空間で冷媒ガスを膨張させて、そ
の冷却ステージ(9,11)に極低温レベルの冷熱を発
生させるようにしている。尚、上記位相制御手段(26
a,26b)は上記バッファタンク(28a,28
b)、第1流量調整バルブ(29a,29b)及び第2
流量調整バルブ(31a,31b)により構成されてい
る。Each of the phase control means (26a, 26b)
Are connected to the high-temperature end of each pulse tube (5, 6) by a pipe (27a,
A buffer space (not shown) communicated via the buffer tank (28a, 28b) is provided inside the pipe (27a, 27b). Adjustment valves (29a, 29b) are connected. This flow control valve (29a, 29b)
(27) and the high-temperature end of each pulse tube (5, 6).
a, 27b) have branch pipes (30a, 30b) respectively.
Is branched and connected to each branch pipe (30a, 3a).
0b) is connected to a gas supply / discharge pipe (15) between the first-stage regenerator (2) and the rotary valve (17), and is fixed in the middle of the branch pipe (30a, 30b). A second flow control valve (31a, 31b) having an opening is connected. Each of the flow control valves (29a, 29)
b, 31a, 31b) are pipes (27a, 27b, 30).
a, 30b) has a function of giving a flow resistance to the refrigerant gas flowing in the inside. Then, the pressure wave of the refrigerant gas generated by the rotary valve (17) is transmitted to the second flow control valve (31a, 3a).
Each pulse tube (5, 6) while applying flow resistance in 1b)
And supplying and discharging the refrigerant gas from the high temperature end to the buffer space in the buffer tanks (28a, 28b) while imparting flow resistance by the first flow control valves (29a, 29b). And the pulse tube (5, 6)
The virtual piston of the refrigerant gas is reciprocated in the pulse tube (5, 6) by controlling the phase of the refrigerant gas pressure with respect to the high-temperature end of the cooling stage (9, 11). The refrigerant gas is expanded in the expansion space to generate cryogenic heat at an extremely low temperature in the cooling stage (9, 11). The phase control means (26
a, 26b) are buffer tanks (28a, 28a).
b), the first flow control valve (29a, 29b) and the second
It is constituted by a flow control valve (31a, 31b).
【0026】また、各蓄冷器(2,3)においては、ガ
ス給排配管(15)が圧縮機(16)の吸込み部(低圧
側)に連通するようにロータリバルブ(17)が切り換
えられて、対応する各パルス管(5,6)から冷媒ガス
が、対応する蓄冷器(2,3)及びガス給排配管(1
5)を介して圧縮機(16)の吸込み部に戻されるとき
に、冷却ステージ(9,11)内の膨張空間で発生した
冷媒ガスの冷熱を後述の蓄冷材に熱交換により蓄冷する
一方、逆に、ガス給排配管(15)が圧縮機(16)の
吐出部(高圧側)に連通するようにロータリバルブ(1
7)が切り換えられて、高圧の冷媒ガスがガス給排配管
(15)及び対応する蓄冷器(2,3)を介して各パル
ス管(5,6)に供給されるときに、その冷媒ガスに対
し上記蓄冷した冷熱を熱交換により与えるようになって
いる。In each regenerator (2, 3), the rotary valve (17) is switched so that the gas supply / discharge pipe (15) communicates with the suction part (low pressure side) of the compressor (16). , Refrigerant gas from each corresponding pulse tube (5, 6) is supplied to the corresponding regenerator (2, 3) and gas supply / discharge pipe (1).
When the refrigerant gas is returned to the suction section of the compressor (16) via 5), the cold heat of the refrigerant gas generated in the expansion space in the cooling stage (9, 11) is stored in a cold storage material described later by heat exchange, Conversely, the rotary valve (1) is connected so that the gas supply / discharge pipe (15) communicates with the discharge section (high pressure side) of the compressor (16).
7) is switched so that when the high-pressure refrigerant gas is supplied to each pulse tube (5, 6) via the gas supply / discharge pipe (15) and the corresponding regenerator (2, 3), the refrigerant gas In this case, the stored cold heat is given by heat exchange.
【0027】上記第1段蓄冷器(2)は、図示しない
が、例えばステンレス鋼からなる円筒状のシリンダの内
部に、銅合金或いはステンレス鋼製の金網を円形状に打
ち抜いた蓄冷材を多数枚積層して充填して構成される。Although not shown, the first-stage regenerator (2) includes a plurality of cold storage materials obtained by punching a copper alloy or stainless steel wire net into a circular shape inside a cylindrical cylinder made of, for example, stainless steel. It is configured by laminating and filling.
【0028】これに対し、第2段蓄冷器(3)は、図3
に示すように、例えばステンレス鋼からなる円筒状のシ
リンダ(34)と、このシリンダ(34)の両端開口部
に嵌挿されて係止され、この各開口部をそれぞれ閉じる
高温側及び低温側の各蓋部(35H,35L)とを備え
ている。図2に低温側蓋部(35L)について拡大して
例示するように(高温側蓋部(35H)も同様の構成で
ある)、この各蓋部(35H,35L)は底部(35
a)と、該底部(35a)の周縁から円筒状に延びる側
壁部(35b)とからなり、少なくとも底部(35a)
は多数の貫通状の円形の細孔(図示せず)が形成された
多孔板で構成され、この多孔板に銅合金製金網(図示せ
ず)が貼り付けられており、この細孔により蓋部(35
H,35L)は冷媒ガスをシリンダ(34)の内外で、
つまり低温側蓋部(35L)にあってはシリンダ(3
4)の内部と膨張空間との間で、また高温側蓋部(35
H)にあってはシリンダ(34)の内部と膨張空間又は
ガス給排配管(15)との間でそれぞれ流通可能とされ
ている。On the other hand, the second stage regenerator (3)
As shown in FIG. 7, a cylindrical cylinder (34) made of, for example, stainless steel is inserted into and locked at both ends of the cylinder (34), and the high-temperature side and the low-temperature side are closed respectively. Each lid (35H, 35L) is provided. As shown in FIG. 2 by enlarging the low-temperature side lid (35L) (the high-temperature side lid (35H) has the same configuration), each of the lids (35H, 35L) has a bottom (35L).
a) and a side wall (35b) extending cylindrically from the periphery of the bottom (35a), at least the bottom (35a).
Is composed of a perforated plate having a large number of penetrating circular pores (not shown) formed thereon, and a metal mesh (not shown) made of copper alloy is adhered to the perforated plate. Part (35
H, 35L) sends the refrigerant gas inside and outside the cylinder (34),
That is, in the low temperature side lid (35L), the cylinder (3
4) between the interior and the expansion space, and the high temperature side lid (35).
In the case of H), it is possible to flow between the inside of the cylinder (34) and the expansion space or the gas supply / discharge pipe (15).
【0029】また、上記両蓋部(35H,35L)で閉
じられたシリンダ(34)の内部には高温側、中温側及
び低温側の3種類の各蓄冷材(36H,36M,36
L)がシリンダ(34)の軸方向に層状に充填配置され
ている。この各蓄冷材(36H〜36L)は、例えば粒
径0.5mm程度の粒状の鉛合金或いは磁性蓄冷材から
なり、比熱のピークとなる温度が各々で異なっており、
高温側蓄冷材(36H)はその比熱のピーク温度が中温
側蓄冷材(36M)よりも高いものが、また該中温側蓄
冷材(36M)は比熱のピーク温度が低温側蓄冷材(3
6L)よりも高いものがそれぞれ用いられている。In the cylinder (34) closed by the lids (35H, 35L), three types of cold storage materials (36H, 36M, 36) of a high temperature side, a medium temperature side, and a low temperature side are provided.
L) are arranged in layers in the axial direction of the cylinder (34). Each of the cold storage materials (36H to 36L) is made of, for example, a granular lead alloy or a magnetic cold storage material having a particle size of about 0.5 mm, and has a different specific heat peak temperature.
The high-temperature side regenerator (36H) has a peak specific heat higher than that of the medium-temperature regenerator (36M), and the medium-temperature side regenerator (36M) has a low specific heat peak temperature of the low-temperature side regenerator (3M).
6L).
【0030】さらに、上記シリンダ(34)内には高温
側及び低温側の2つの区分け部材(37H,37L)が
上記異なる3種類の蓄冷材(36H〜36L)の境界部
に位置するように配置されて嵌挿係止されている。この
各区分け部材(37H,37L)は、図1に低温側区分
け部材(37L)について拡大して例示するように(高
温側区分け部材(37H)も同様の構成である)、上記
各蓋部(35H,35L)と同様に、底部(37a)と
該底部(37a)の周縁から円筒状に延びる側壁部(3
7b)とからなり、その少なくとも底部(37a)は多
数の円形の細孔(図示せず)が貫通形成された多孔板で
構成され、この多孔板に銅合金製金網(図示せず)が貼
り付けられており、この細孔により区分け部材(37
H,37L)はその両側の空間内の冷媒ガスを流通可能
とされている。Further, in the cylinder (34), two dividing members (37H, 37L) on the high temperature side and the low temperature side are arranged so as to be located at the boundaries between the three different types of cold storage materials (36H to 36L). It is fitted and locked. Each of the partition members (37H, 37L) is illustrated as an enlarged example of the low-temperature partition member (37L) in FIG. 1 (the high-temperature partition member (37H) has the same configuration). 35H, 35L), the bottom (37a) and the side wall (3) extending cylindrically from the periphery of the bottom (37a).
7b), at least a bottom portion (37a) of which is constituted by a perforated plate having a large number of circular pores (not shown) formed therethrough. A copper alloy wire mesh (not shown) is attached to this perforated plate. The partitioning member (37
H, 37L) can flow the refrigerant gas in the spaces on both sides thereof.
【0031】上記第2段蓄冷器(2)を製造する場合に
は、シリンダ(34)内にその低温端部となる一端側か
ら、低温側蓋部(35L)を側壁部(35b)が他端側
(高温端部側)に向くように配置して嵌挿し、次いで、
シリンダ(34)内にその高温端部となる他端開口から
低温側蓄冷材(36L)を低温側蓋部(35L)上に積
層されるように充填した後、同じ高温端部となる他端開
口からシリンダ(34)内に低温側区分け部材(37
L)を上記低温側蓋部(35L)と同じ向きにしかつ低
温側蓄冷材(36L)に接するように嵌挿し、同様にし
て中温側蓄冷材(36M)の充填、高温側区分け部材
(37H)の嵌挿及び高温側蓄冷材(36H)の充填を
それぞれ順に行った後、シリンダ(34)の他端開口
に、高温側蓋部(35H)をその側壁部(35b)が一
端側(低温端部側)に向くように、つまり上記低温側蓋
部(35L)や区分け部材(37H,37L)とは逆の
向きに配置して嵌挿する。When the second stage regenerator (2) is manufactured, a low-temperature side lid (35L) is connected to a side wall (35b) of a cylinder (34) from one end which is a low-temperature end thereof. Place and insert so that it faces the end side (hot end side), then
After the low-temperature side cold storage material (36L) is filled into the cylinder (34) from the other end opening which is the high-temperature end so as to be stacked on the low-temperature side lid (35L), the other end which becomes the same high-temperature end From the opening into the cylinder (34), the low temperature side sorting member (37
L) is oriented in the same direction as the low-temperature side lid (35L) and is fitted so as to be in contact with the low-temperature side cold storage material (36L). Similarly, the medium-temperature side cold storage material (36M) is filled, and the high-temperature side sorting member (37H) After inserting the high temperature side cold storage material (36H) in order, the high temperature side lid (35H) is attached to the other end opening of the cylinder (34) by the side wall (35b) at one end side (low temperature end). ), That is, in the opposite direction to the low temperature side lid (35L) and the sorting members (37H, 37L).
【0032】そして、上記両蓋部(35H,35L)及
び両区分け部材(37H,37L)は、いずれも温度に
対して零(0)又は負の膨張率を持つ材料からなる。ま
た、2つの蓋部(35H,35L)及び区分け部材(3
7H,37L)の膨張率は蓄冷器(3)の冷却温度位置
に応じて異なっており、その蓄冷器(3)での膨張率の
大きさを並べると、低温側蓋部(35L)>低温側区分
け部材(37L)>高温側区分け部材(37H)>高温
側蓋部(35H)の順になっている。The lids (35H, 35L) and the dividing members (37H, 37L) are made of a material having zero (0) or a negative expansion coefficient with respect to temperature. Further, two lids (35H, 35L) and a separating member (3
7H, 37L) differs depending on the cooling temperature position of the regenerator (3). When the magnitudes of the expansion rates in the regenerator (3) are arranged, the low temperature side lid (35L)> low temperature In this order, the side partition member (37L)> the high temperature side partition member (37H)> the high temperature side lid (35H).
【0033】具体的には、上記蓋部(35H,35L)
及び区分け部材(37H,37L)の材料は、例えばダ
イニーマ繊維FRP((株)東洋紡の商品名)、アラミ
ド繊維FRP、カーボン繊維FRP等からなり、いずれ
も繊維の長さ方向に対して負の膨張率を有する。但し、
これらの繊維は、その長さ方向と直交する径方向に正の
膨張率を有するので、繊維を長さ方向が蓋部(35H,
35L)及び区分け部材(37H,37L)の径方向に
沿うように配列する必要がある。また、これらの繊維の
含有率を変えることで温度に対する膨張率が変更されて
おり、繊維の含有率が多いほど膨張率が大きくなる。Specifically, the lid (35H, 35L)
The material of the sorting members (37H, 37L) is, for example, Dyneema fiber FRP (trade name of Toyobo Co., Ltd.), aramid fiber FRP, carbon fiber FRP, or the like, all of which have negative expansion in the fiber length direction. Having a rate. However,
These fibers have a positive coefficient of expansion in the radial direction orthogonal to their length direction, so that the length direction of the fibers is changed to the lid (35H,
35L) and the sorting members (37H, 37L) need to be arranged along the radial direction. The expansion rate with respect to temperature is changed by changing the content of these fibers, and the expansion rate increases as the fiber content increases.
【0034】次に、上記実施形態の極低温冷凍機(R)
の作動について説明する。冷凍機(R)の運転中、ロー
タリバルブ(17)が回転切換えされ、このロータリバ
ルブ(17)の切換えにより、圧縮機(16)から吐出
された高圧冷媒ガスと、圧縮機(16)に戻る低圧冷媒
ガスとが交互に切り換えられて冷媒ガスの所定周期の圧
力波が生成され、この圧力波はガス給排配管(15)、
第1段及び第2段の蓄冷器(2,3)並びに連通管(1
2,13)を経て第1段及び第2段のパルス管(5,
6)の低温端部からその内部に伝達される。また、位相
制御手段(26)により各パルス管(5,6)の高温端
部に対する冷媒ガス圧の位相が制御されて、各パルス管
(5,6)内における冷媒ガスの仮想ピストンが所定の
周期で往復動する。この冷媒ガスの仮想ピストンの往復
動により冷媒ガスが各蓄冷器(2,3)下側における冷
却ステージ(9,11)内の膨張空間で膨張し、この冷
媒ガスの膨張により冷熱が生じて第1段冷却ステージ
(9)が極低温レベルに、また第2段冷却ステージ(1
1)が第1段冷却ステージ(9)よりも低い極低温レベ
ルにそれぞれ冷却され、その第2段冷却ステージ(1
1)に伝熱可能に配置された冷却対象が同じ極低温レベ
ルの設定温度に冷却保持される。Next, the cryogenic refrigerator (R) of the above embodiment is described.
The operation of will be described. During the operation of the refrigerator (R), the rotation of the rotary valve (17) is switched, and by the switching of the rotary valve (17), the high-pressure refrigerant gas discharged from the compressor (16) returns to the compressor (16). The low pressure refrigerant gas is alternately switched to generate a pressure wave of the refrigerant gas in a predetermined cycle, and the pressure wave is generated by the gas supply / discharge pipe (15),
The first and second stage regenerators (2, 3) and the communication pipe (1
2, 13), the first and second stage pulse tubes (5, 5)
6) is transmitted to the inside from the low temperature end. Further, the phase of the refrigerant gas pressure with respect to the high-temperature end of each pulse tube (5, 6) is controlled by the phase control means (26), and the virtual piston of the refrigerant gas in each pulse tube (5, 6) is set to a predetermined position. Reciprocates periodically. Due to the reciprocating motion of the virtual piston of the refrigerant gas, the refrigerant gas expands in the expansion space in the cooling stage (9, 11) below each regenerator (2, 3), and the expansion of the refrigerant gas generates cold heat. The first cooling stage (9) is at a cryogenic level, and the second cooling stage (1)
1) is cooled to a cryogenic level lower than that of the first cooling stage (9), and its second cooling stage (1) is cooled.
The cooling object arranged so as to be able to conduct heat in 1) is cooled and held at the same cryogenic level set temperature.
【0035】この間、上記ガス給排配管(15)が圧縮
機(16)の吸込み部に連通するようにロータリバルブ
(17)が切り換えられて、各パルス管(5,6)から
冷媒ガスが蓄冷器(2,3)を通って圧縮機(16)の
吸込み部に戻されるときに、その冷媒ガスは各蓄冷器
(2,3)のシリンダ内部の蓄冷材に蓄冷される。具体
的に、第2段蓄冷器(3)にあっては、冷媒ガスは低温
側蓋部(35L)からシリンダ(34)内に入り、その
シリンダ(34)内の低温側蓄冷材(36L)間の空
間、低温側区分け部材(37L)、中温側蓄冷材(36
M)間の空間、高温側区分け部材(37H)及び高温側
蓄冷材(36H)間の空間を通過した後に高温側蓋部
(35H)からシリンダ(34)外に流出し、上記各蓄
冷材(36H〜36L)間の空間を通過する間に冷媒ガ
スの冷熱が熱交換により蓄冷材(36H〜36L)に蓄
冷される。During this time, the rotary valve (17) is switched so that the gas supply / discharge pipe (15) communicates with the suction section of the compressor (16), and the refrigerant gas is cooled and stored from each pulse pipe (5, 6). When the refrigerant gas is returned to the suction part of the compressor (16) through the coolers (2, 3), the refrigerant gas is stored in the cold storage material inside the cylinders of the regenerators (2, 3). Specifically, in the second stage regenerator (3), the refrigerant gas enters the cylinder (34) from the low temperature side lid (35L), and the low temperature side cold storage material (36L) in the cylinder (34). Between the low-temperature side partition member (37L) and the medium-temperature side cold storage material (36L).
M), and after passing through the space between the high-temperature side sorting member (37H) and the high-temperature side cold storage material (36H), it flows out of the cylinder (34) from the high-temperature side lid (35H), and the above-mentioned cold storage material ( While passing through the space between 36H-36L), the cold heat of the refrigerant gas is stored in the cold storage material (36H-36L) by heat exchange.
【0036】一方、逆にガス給排配管(15)が圧縮機
(16)の吐出部に連通するようにロータリバルブ(1
7)が切り換えられて、高圧の冷媒ガスが各パルス管
(5,6)に供給されるときに、上記蓄冷時とは逆に、
その冷媒ガスは各蓄冷器(2,3)で上記蓄冷した冷熱
が熱交換により与えられ、第2段蓄冷器(3)にあって
は、高温側蓋部(35H)からシリンダ(34)内に入
り、そのシリンダ(34)内の高温側蓄冷材(36H)
間の空間、高温側区分け部材(37H)、中温側蓄冷材
(36M)間の空間、低温側区分け部材(37L)及び
低温側蓄冷材(36L)間の空間を通過した後に低温側
蓋部(35L)からシリンダ(34)外に流出し、上記
各蓄冷材(36H〜36L)間の空間を通過する冷媒ガ
スに対し上記蓄冷した冷熱が熱交換により与えられる。On the other hand, on the other hand, the rotary valve (1) is connected so that the gas supply / discharge pipe (15) communicates with the discharge section of the compressor (16).
7) is switched, and when high-pressure refrigerant gas is supplied to each pulse tube (5, 6), contrary to the above cold storage,
The refrigerant gas is supplied with the cold stored in the regenerators (2, 3) by heat exchange, and in the second stage regenerator (3), the refrigerant gas is transferred from the high temperature side lid (35H) to the cylinder (34). And the high temperature side cold storage material (36H) in the cylinder (34)
After passing through the space between the high-temperature side partition member (37H) and the medium-temperature side cold storage material (36M), and the space between the low-temperature side partition member (37L) and the low-temperature side cold storage material (36L). 35L), flows out of the cylinder (34), and passes through the space between the cold storage materials (36H to 36L), whereby the stored cold heat is given by heat exchange.
【0037】そして、上記第2段蓄冷器(3)では、比
熱のピークとなる温度の異なる3種類の蓄冷材(36H
〜36L)が各々の比熱のピークとなる温度域に対応す
るようにシリンダ(34)内に層状に充填され、これら
異なる種類の蓄冷材(36H〜36L)間の境界部に両
種類の蓄冷材(36H〜36L)が互いに混じり合わな
いように冷媒ガスの流通可能な区分け部材(37H,3
7L)を配置されているので、各種類の蓄冷材(36H
〜36L)の持つ比熱を有効に利用して蓄冷器(3)の
蓄冷効率を高めることができる。In the second-stage regenerator (3), three types of regenerative materials (36H) having different temperatures at which specific heat peaks are obtained.
To 36L) are filled in a layered manner in the cylinder (34) so as to correspond to the temperature range where each specific heat peaks, and both types of cold storage materials are provided at the boundary between these different types of cold storage materials (36H to 36L). (36H-36L) so that the refrigerant gas can be prevented from being mixed with each other.
7L), each type of cold storage material (36H
To 36 L) can be used effectively to increase the cool storage efficiency of the cool storage device (3).
【0038】また、第2段蓄冷器(3)における蓋部
(35H,35L)及び区分け部材(37H,37L)
が温度に対して零又は負の膨張率を持つ材料からなるの
で、これら蓋部(35H,35L)や区分け部材(37
H,37L)の温度が冷凍機(R)の運転中に極低温レ
ベルに低下しても、各々の外径はシリンダ(34)に対
して相対的に増大する。このため、常温での蓄冷器
(3)の製造時に蓋部(35H,35L)や区分け部材
(37H,37L)をシリンダ(34)の内部に嵌挿可
能とする目的で、その側壁部(35b,37b)とシリ
ンダ(34)内壁面との間に嵌挿のために必要な隙間が
生じるように側壁部(35b,37b)の外径をシリン
ダ(34)の内径よりも小さ目に設定していても、冷凍
機(R)が運転状態になると、上記蓋部(35H,35
L)や区分け部材(37H,37L)の温度降下に伴う
膨張により側壁部(35b,37b)外周面とシリンダ
(34)の内周面との間の隙間は十分小さくなるか又は
零(0)になり、その側壁部(35b,37b)外周面
とシリンダ(34)内周面とが略密接する。その結果、
図5に示す如く、区分け部材(37H,37L)の側壁
部(35b)(又は蓋部(35H,35L)の側壁部
(37b))外周面とシリンダ(34)内周面との隙間
(d)が大きくなる場合のように、その隙間(d)を経
ての冷媒ガスの流通が抑制ないしは阻止され、冷媒ガス
は底部(35a)(又は(37a))の細孔のみを通る
ようになる。このことで、蓄冷器(3)内外間又は内部
で冷媒ガスの偏流が発生せず、その冷媒ガスの流量分布
が一様となり、冷凍機(R)の冷却性能を向上維持する
ことができる。The lid (35H, 35L) and the partitioning members (37H, 37L) in the second stage regenerator (3).
Are made of a material having a zero or negative expansion coefficient with respect to the temperature, so that these lids (35H, 35L) and the separating member (37
H, 37L), even when the temperature of the refrigerator (R) decreases to a cryogenic level during operation of the refrigerator (R), the respective outer diameters increase relatively to the cylinder (34). For this reason, at the time of manufacturing the regenerator (3) at room temperature, the lid (35H, 35L) and the partitioning members (37H, 37L) can be inserted into the cylinder (34) in order to enable the lid (35H, 35L) to be inserted into the cylinder (34). , 37b) and the inner wall surface of the cylinder (34), the outer diameter of the side wall portions (35b, 37b) is set smaller than the inner diameter of the cylinder (34) so that a gap necessary for insertion is created. However, when the refrigerator (R) is in the operating state, the lid (35H, 35H)
L) and the expansion of the partitioning members (37H, 37L) due to the temperature drop, the gap between the outer peripheral surface of the side wall (35b, 37b) and the inner peripheral surface of the cylinder (34) becomes sufficiently small or zero (0). The outer peripheral surface of the side wall (35b, 37b) and the inner peripheral surface of the cylinder (34) are substantially in close contact. as a result,
As shown in FIG. 5, the gap (d) between the outer peripheral surface of the side wall (35b) of the sorting member (37H, 37L) (or the side wall (37b) of the lid (35H, 35L)) and the inner peripheral surface of the cylinder (34). ) Becomes large, the flow of the refrigerant gas through the gap (d) is suppressed or prevented, and the refrigerant gas passes only through the pores at the bottom (35a) (or (37a)). Thereby, the drift of the refrigerant gas does not occur between and inside or inside the regenerator (3), the flow rate distribution of the refrigerant gas becomes uniform, and the cooling performance of the refrigerator (R) can be improved and maintained.
【0039】しかも、上記2つの蓋部(35H,35
L)及び区分け部材(37H,37L)の各膨張率が蓄
冷器(3)の冷却温度位置に応じて異なっており、蓄冷
器(3)の低温側にある蓋部(35L)及び区分け部材
(37L)の温度に対する膨張率がそれぞれ高温側の蓋
部(35H)及び区分け部材(37H)の温度に対する
膨張率よりも大きいので、蓄冷器(3)での温度領域に
応じて蓋部(35H,35L)や区分け部材(37H,
37L)の温度に対する膨張率を適正に対応させて、冷
凍機(R)の運転中の蓋部(35H,35L)や区分け
部材(37H,37L)とシリンダ(34)との間の隙
間を略一定に保つことができる。In addition, the two lids (35H, 35H)
L) and the partitioning members (37H, 37L) have different expansion rates depending on the cooling temperature position of the regenerator (3), and the lid (35L) and the separating member (37) on the low-temperature side of the regenerator (3). 37L) is higher than the expansion rates of the lid (35H) and the sorting member (37H) on the high-temperature side, respectively. 35L) and sorting members (37H,
37L), the gap between the cylinder (34) and the lid (35H, 35L) or the partitioning members (37H, 37L) during operation of the refrigerator (R) is made approximately corresponding to the expansion coefficient with respect to the temperature of the refrigerator (R). Can be kept constant.
【0040】尚、上記実施形態では、冷媒ガスを圧縮す
る圧縮機(16)と、この圧縮機(16)からの高圧冷
媒ガス及び圧縮機(16)に戻る低圧冷媒ガスを切り換
えるロータリバルブ(17)とで圧力波発生手段(2
4)を構成しているが、シリンダ内でピストンを往復動
させて冷媒ガスを周期的に圧縮する往復動ピストン型圧
縮機を用いることもできる。In the above embodiment, the compressor (16) for compressing the refrigerant gas and the rotary valve (17) for switching between the high-pressure refrigerant gas from the compressor (16) and the low-pressure refrigerant gas returning to the compressor (16). ) And pressure wave generating means (2)
Although 4) is configured, a reciprocating piston type compressor that periodically compresses refrigerant gas by reciprocating a piston in a cylinder may be used.
【0041】また、上記実施形態では、第2段蓄冷器
(3)の蓋部(35H,35L)及び区分け部材(37
H,37L)の全てを、温度に対し零又は負の膨張率を
持つ材料で構成しているが、これらのうちから選んだも
のを同材料で構成することもできる。その場合、寧ろ高
温側よりも低温側にある蓋部(35L)や区分け部材
(37L)を負の膨張率を持つ材料で構成するのが好ま
しい。In the above embodiment, the lids (35H, 35L) and the separating members (37) of the second stage regenerator (3) are used.
H, 37L) is made of a material having a zero or negative expansion coefficient with respect to temperature, but a material selected from these materials may be made of the same material. In this case, it is preferable that the lid (35L) and the partitioning member (37L) on the lower temperature side than on the higher temperature side are made of a material having a negative coefficient of expansion.
【0042】また、上記実施形態では、3種類の蓄冷材
(36H〜36L)を用いているが、2種類以下又は4
種類以上の蓄冷材を用いることもできる。但し、1種類
の蓄冷材を用いる場合、区分け部材は不要であるので、
蓋部(35H,35L)のみについて負の膨張率を持つ
材料で構成すればよい。In the above embodiment, three kinds of cold storage materials (36H to 36L) are used.
More than one kind of cold storage material can be used. However, when one kind of cold storage material is used, the sorting member is unnecessary,
Only the lid (35H, 35L) may be made of a material having a negative coefficient of expansion.
【0043】さらに、上記実施形態は、極低温冷凍機
(R)が2段のパルス管冷凍機からなるものであるが、
本発明は、1段又は3段以上のパルス管冷凍機からなる
極低温冷凍機に適用でき、さらにはシリンダ内でディス
プレーサを往復動させるディスプレーサ型膨張機を備え
たスターリング冷凍機や、ギフォード・マクマホンサイ
クルを有するGM冷凍機等の蓄冷器にも適用することが
できる。In the above embodiment, the cryogenic refrigerator (R) comprises a two-stage pulse tube refrigerator.
INDUSTRIAL APPLICABILITY The present invention is applicable to a cryogenic refrigerator including one or three or more stages of pulse tube refrigerators, and further includes a Stirling refrigerator including a displacer type expander that reciprocates a displacer in a cylinder, and a Gifford McMahon. The present invention can be applied to a regenerator such as a GM refrigerator having a cycle.
【0044】[0044]
【発明の効果】以上説明したように、請求項1の発明で
は、圧力波発生手段により冷媒ガスの圧力波を発生さ
せ、この冷媒ガスの圧力波によって冷媒ガスの圧縮及び
膨張を繰り返して冷熱を発生する少なくとも1つの冷却
ステージと、上記冷媒ガスの膨張時の冷熱を蓄冷する蓄
冷器とを備えた極低温冷凍機において、蓄冷器は、シリ
ンダの端部を冷媒ガスの流通可能に閉じる蓋部と、シリ
ンダの内部に充填された蓄冷材とを備え、その蓋部を、
温度に対して零又は負の膨張率を持つ材料で構成した。
また、請求項2の発明では、上記蓄冷器は、シリンダの
端部を冷媒ガスの流通可能に閉じる蓋部と、シリンダの
内部に、シリンダの軸方向に層状に充填された少なくと
も2種類の粒状蓄冷材と、上記シリンダ内に上記異なる
種類の蓄冷材の境界部に位置するように嵌挿され、冷媒
ガスの流通可能な区分け部材とを備え、その区分け部材
を、温度に対して零又は負の膨張率を持つ材料で構成し
た。さらに、請求項3の発明では、上記請求項2の発明
の極低温冷凍機における蓄冷器の蓋部を、温度に対して
零又は負の膨張率を持つ材料で構成した。これらの各発
明によると、蓄冷器の製造時に蓋部や区分け部材の外径
を、シリンダの内部に嵌挿するために必要な隙間を持つ
ように小さくしていても、冷凍機の運転中は蓋部や区分
け部材の外径がシリンダに対し相対的に増大して、蓋部
や区分け部材の外周面とシリンダ内周面との間の隙間は
十分小さくないしは零になり、蓄冷器内外間又は内部で
冷媒ガスの偏流の発生を抑制して冷凍機の冷却性能を向
上維持することができる。As described above, according to the first aspect of the present invention, the pressure wave of the refrigerant gas is generated by the pressure wave generating means, and the compression and expansion of the refrigerant gas are repeated by the pressure wave of the refrigerant gas to generate cold heat. In a cryogenic refrigerator including at least one cooling stage to be generated and a regenerator storing cold heat when the refrigerant gas expands, the regenerator is configured to close an end of a cylinder so that refrigerant gas can flow therethrough. And a cold storage material filled inside the cylinder, and the lid thereof is
It consisted of a material having a zero or negative expansion coefficient with respect to temperature.
According to the second aspect of the present invention, the regenerator has a lid that closes an end of the cylinder so that refrigerant gas can flow therethrough, and at least two types of granular material that are filled in a layer in the cylinder in the axial direction of the cylinder. A cold storage material, and a partition member that is inserted into the cylinder so as to be located at the boundary between the different types of cold storage material and that allows refrigerant gas to flow therethrough. Of a material having an expansion coefficient of. Further, in the invention of claim 3, the lid of the regenerator in the cryogenic refrigerator of the invention of claim 2 is made of a material having a zero or negative expansion coefficient with respect to temperature. According to each of these inventions, even during the operation of the refrigerator, even when the outer diameter of the lid portion and the sorting member is reduced so as to have a clearance necessary to be inserted into the cylinder during manufacture of the regenerator, The outer diameter of the lid and the partitioning member is relatively increased with respect to the cylinder, and the gap between the outer peripheral surface of the lid and the partitioning member and the inner peripheral surface of the cylinder becomes sufficiently small or zero. It is possible to suppress the occurrence of the drift of the refrigerant gas inside and improve and maintain the cooling performance of the refrigerator.
【0045】請求項4の発明では、複数の区分け部材の
温度に対する膨張率を蓄冷器の冷却温度位置に応じて異
ならせるようにした。また、請求項5の発明では、シリ
ンダの両端部にそれぞれ位置する蓋部の温度に対する膨
張率を互いに異ならせるようにした。従って、これらの
発明によれば、蓄冷器での温度領域に応じて蓋部や区分
け部材の膨張率を適正に対応させて、冷凍機の運転中の
蓋部や区分け部材とシリンダとの間の隙間を略一定に保
つことができる。According to the fourth aspect of the present invention, the expansion coefficients of the plurality of sorting members with respect to the temperature are made different depending on the cooling temperature position of the regenerator. Further, in the invention of claim 5, the lids located at both ends of the cylinder have different expansion rates with respect to the temperature. Therefore, according to these inventions, the expansion coefficient of the lid and the partitioning member appropriately corresponds to the temperature range in the regenerator, and the gap between the cylinder and the lid or the partitioning member during operation of the refrigerator. The gap can be kept substantially constant.
【0046】請求項6の発明によると、圧力波発生手段
は、冷媒ガスを圧縮する圧縮機と、この圧縮機からの高
圧冷媒ガス及び圧縮機に戻る低圧冷媒ガスを切り換える
切換弁とを備えてなるものとしたことにより、望ましい
圧力波発生手段を具体化することができる。According to the sixth aspect of the present invention, the pressure wave generating means includes a compressor for compressing the refrigerant gas, and a switching valve for switching between the high-pressure refrigerant gas from the compressor and the low-pressure refrigerant gas returning to the compressor. Thus, a desirable pressure wave generating means can be embodied.
【図1】本発明の実施形態において冷凍機の運転中に冷
媒ガスが蓄冷器の区分け部材を通過する状態を拡大して
示す断面図である。FIG. 1 is an enlarged sectional view showing a state in which a refrigerant gas passes through a separating member of a regenerator during operation of a refrigerator in an embodiment of the present invention.
【図2】冷凍機の運転中に冷媒ガスが蓄冷器の蓋部を通
過する状態を拡大して示す断面図である。FIG. 2 is an enlarged sectional view showing a state in which a refrigerant gas passes through a lid of a regenerator during operation of a refrigerator.
【図3】蓄冷器の断面図である。FIG. 3 is a sectional view of a regenerator.
【図4】本発明の実施形態に係る極低温冷凍機の全体構
成を示す図である。FIG. 4 is a diagram illustrating an overall configuration of a cryogenic refrigerator according to an embodiment of the present invention.
【図5】冷凍機の運転中に蓄冷器の区分け部材とシリン
ダとの間の隙間が増大した状態での冷媒ガスの通過状態
を示す図1相当図である。FIG. 5 is a diagram corresponding to FIG. 1 showing a state of passage of the refrigerant gas in a state where the gap between the partitioning member of the regenerator and the cylinder is increased during operation of the refrigerator.
【符号の説明】 (R) 極低温冷凍機 (2,3) 蓄冷器 (5,6) パルス管 (9,11) 冷却ステージ (16) 圧縮機 (17) ロータリバルブ(切換弁) (24) 圧力波発生手段 (34) シリンダ (35H,35L) 蓋部 (36H〜36L) 蓄冷材 (37H,37L) 区分け部材[Description of Signs] (R) Cryogenic refrigerator (2, 3) Regenerator (5, 6) Pulse tube (9, 11) Cooling stage (16) Compressor (17) Rotary valve (switching valve) (24) Pressure wave generating means (34) Cylinder (35H, 35L) Lid (36H to 36L) Cold storage material (37H, 37L) Sorting member
Claims (6)
生手段(24)と、 上記圧力波発生手段(24)による冷媒ガスの圧力波に
よって冷媒ガスの圧縮及び膨張を繰り返して冷熱を発生
する少なくとも1つの冷却ステージ(9,11)と、 上記冷媒ガスの膨張時の冷熱を蓄冷する蓄冷器(2,
3)とを備えた極低温冷凍機において、 上記蓄冷器(3)は、シリンダ(34)と、 上記シリンダ(34)の端部に嵌挿され、冷媒ガスの流
通可能な蓋部(35H,35L)と、 上記蓋部(35H,35L)で閉じられたシリンダ(3
4)の内部に充填された蓄冷材(36H〜36L)とを
備え、 上記蓋部(35H,35L)は、温度に対して零又は負
の膨張率を持つ材料からなることを特徴とする極低温冷
凍機。1. A pressure wave generating means (24) for generating a pressure wave of a refrigerant gas, and the refrigerant gas is repeatedly compressed and expanded by pressure waves of the refrigerant gas by the pressure wave generating means (24) to generate cold heat. At least one cooling stage (9, 11); and a regenerator (2, 11) for accumulating cold energy when the refrigerant gas expands.
3), the regenerator (3) is inserted into a cylinder (34) and an end of the cylinder (34), and a lid (35H, 35H, 35L) and the cylinder (3) closed by the lid (35H, 35L).
4) a regenerator material (36H to 36L) filled in the interior of (4), wherein the lid (35H, 35L) is made of a material having a zero or negative expansion coefficient with respect to temperature. Low temperature refrigerator.
生手段(24)と、 上記圧力波発生手段(24)による冷媒ガスの圧力波に
よって冷媒ガスの圧縮及び膨張を繰り返して冷熱を発生
する少なくとも1つの冷却ステージ(9,11)と、 上記冷媒ガスの膨張時の冷熱を蓄冷する蓄冷器(2,
3)とを備えた極低温冷凍機において、 上記蓄冷器(3)は、シリンダ(34)と、 上記シリンダ(34)の端部に嵌挿され、冷媒ガスの流
通可能な蓋部(35H,35L)と、 上記蓋部(35H,35L)で閉じられたシリンダ(3
4)の内部に、該シリンダ(34)の軸方向に層状に充
填された少なくとも2種類の蓄冷材(36H〜36L)
と、 上記シリンダ(34)内に上記異なる種類の蓄冷材(3
6H〜36L)の境界部に位置するように嵌挿され、冷
媒ガスの流通可能な区分け部材(37H,37L)とを
備え、 上記区分け部材(37H,37L)は、温度に対して零
又は負の膨張率を持つ材料からなることを特徴とする極
低温冷凍機。2. A pressure wave generating means (24) for generating a pressure wave of the refrigerant gas, and the pressure wave of the refrigerant gas by the pressure wave generating means (24) repeats compression and expansion of the refrigerant gas to generate cold heat. At least one cooling stage (9, 11); and a regenerator (2, 11) for accumulating cold energy when the refrigerant gas expands.
3), the regenerator (3) is inserted into a cylinder (34) and an end of the cylinder (34), and a lid (35H, 35H, 35L) and the cylinder (3) closed by the lid (35H, 35L).
4) At least two kinds of cold storage materials (36H to 36L) filled in layers in the axial direction of the cylinder (34).
And the different types of cold storage material (3) in the cylinder (34).
6H to 36L), and a partition member (37H, 37L) through which the refrigerant gas can flow, wherein the partition member (37H, 37L) is zero or negative with respect to temperature. A cryogenic refrigerator characterized by being made of a material having an expansion coefficient of:
て零又は負の膨張率を持つ材料からなることを特徴とす
る極低温冷凍機。3. The cryogenic refrigerator according to claim 2, wherein the lid (35H, 35L) of the regenerator (3) is made of a material having a zero or negative expansion coefficient with respect to the temperature. Cryogenic refrigerator.
る膨張率が蓄冷器(3)の冷却温度位置に応じて異なっ
ていることを特徴とする極低温冷凍機。4. The cryogenic refrigerator according to claim 2, wherein a plurality of partitioning members (37H, 37L) are provided, and a coefficient of expansion of the plurality of partitioning members (37H, 37L) with respect to a temperature is a regenerator (3). A cryogenic refrigerator characterized by being different depending on a cooling temperature position of the cryogenic refrigerator.
て、 シリンダ(34)の両端部にそれぞれ位置する蓋部(3
5H,35L)の温度に対する膨張率が互いに異なって
いることを特徴とする極低温冷凍機。5. The cryogenic refrigerator according to claim 1, wherein the lids (3) located at both ends of the cylinder (34), respectively.
(5H, 35L) at different temperatures.
凍機において、 圧力波発生手段(24)は、冷媒ガスを圧縮する圧縮機
(16)と、 上記圧縮機(16)からの高圧冷媒ガスと圧縮機(1
6)に戻る低圧冷媒ガスとを切り換える切換弁(17)
とを備えてなることを特徴とする極低温冷凍機。6. The cryogenic refrigerator according to any one of claims 1 to 5, wherein the pressure wave generating means (24) comprises: a compressor (16) for compressing a refrigerant gas; High-pressure refrigerant gas and compressor (1
Switching valve (17) for switching between low-pressure refrigerant gas returning to 6)
And a cryogenic refrigerator comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001087128A JP2002286311A (en) | 2001-03-26 | 2001-03-26 | Cryogenic refrigerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001087128A JP2002286311A (en) | 2001-03-26 | 2001-03-26 | Cryogenic refrigerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002286311A true JP2002286311A (en) | 2002-10-03 |
Family
ID=18942411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001087128A Pending JP2002286311A (en) | 2001-03-26 | 2001-03-26 | Cryogenic refrigerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002286311A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004293924A (en) * | 2003-03-27 | 2004-10-21 | Sumitomo Heavy Ind Ltd | Cold energy storage unit |
| JP2008096040A (en) * | 2006-10-13 | 2008-04-24 | Iwatani Industrial Gases Corp | Cold storage for cryogenic refrigerating machine |
| JP2011117698A (en) * | 2009-12-07 | 2011-06-16 | Aisin Seiki Co Ltd | Regenerator |
| JPWO2014064923A1 (en) * | 2012-10-22 | 2016-09-08 | 株式会社東芝 | Cold head, superconducting magnet, inspection device, and cryopump |
| US20190324099A1 (en) * | 2018-04-20 | 2019-10-24 | Osaka University | NMR Sample Tube |
| JP2019196902A (en) * | 2012-10-09 | 2019-11-14 | 株式会社東芝 | Gm type refrigerator |
-
2001
- 2001-03-26 JP JP2001087128A patent/JP2002286311A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004293924A (en) * | 2003-03-27 | 2004-10-21 | Sumitomo Heavy Ind Ltd | Cold energy storage unit |
| JP2008096040A (en) * | 2006-10-13 | 2008-04-24 | Iwatani Industrial Gases Corp | Cold storage for cryogenic refrigerating machine |
| JP2011117698A (en) * | 2009-12-07 | 2011-06-16 | Aisin Seiki Co Ltd | Regenerator |
| JP2019196902A (en) * | 2012-10-09 | 2019-11-14 | 株式会社東芝 | Gm type refrigerator |
| JPWO2014064923A1 (en) * | 2012-10-22 | 2016-09-08 | 株式会社東芝 | Cold head, superconducting magnet, inspection device, and cryopump |
| JP2018128252A (en) * | 2012-10-22 | 2018-08-16 | 株式会社東芝 | Manufacturing method of cold head, manufacturing method of superconducting magnet, manufacturing method of examination apparatus, and manufacturing method of cryopump |
| US10753652B2 (en) | 2012-10-22 | 2020-08-25 | Kabushiki Kaisha Toshiba | Cold head, superconducting magnet, examination apparatus, and cryopump |
| US11530846B2 (en) | 2012-10-22 | 2022-12-20 | Kabushiki Kaisha Toshiba | Cold head, superconducting magnet, examination apparatus, and cryopump |
| US20190324099A1 (en) * | 2018-04-20 | 2019-10-24 | Osaka University | NMR Sample Tube |
| US10914799B2 (en) * | 2018-04-20 | 2021-02-09 | Jeol Ltd. | NMR sample tube |
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