JP2002283270A - Transfer device and carrying device having this transfer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To hold an article by a transfer means, and to reduce vibration generated at transfer time in a carrying device having at least a pair of gripping parts for forming recessed parts for supporting a gripping part formed in the article, and provided with the transfer means for sandwiching the gripping part of the article by the gripping parts by moving the mutual gripping parts in the narrowing direction. SOLUTION: Vibration control members 40, 40, etc., such as gel are embedded in a bottom surface in the recessed parts 32a, 32a, 32c and 32c of the transfer means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a transfer device of a transfer apparatus for transferring a cassette containing semiconductor wafers between stations in a semiconductor manufacturing plant. The present invention relates to a transfer means of a transfer device for holding and transferring an article.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing factory where the generation of dust is a problem, a cassette containing semiconductor wafers is used.
2. Description of the Related Art There is known a technology for automatically moving an automatic guided vehicle equipped with an articulated robot arm in order to transfer and transport a cassette. When this automatic guided vehicle is run, there is a risk that wafers may jump out of the cassette, and a means for preventing wafers from jumping out of the opening of the cassette may be provided, or
The cassette was mounted on an automatic guided vehicle with the opening of the cassette inclined obliquely upward.

Here, the latter technique will be described. Handles are provided at the open end and the upper end on both sides of the cassette, while a recess is formed on the guide inner surface of the transfer hand of the robot arm that grips the cassette, the recess being engaged with the handle. ing. Thus, the pair of transfer hands is sandwiched in the direction of narrowing the gap, the grip of the cassette mounted on the mounting table is gripped by the recess of the guide, and the opening of the cassette is tilted obliquely upward as it is. , And conversely, the cassette is placed on the cassette mounting table in such a state of being inclined at an angle.

[0004]

However, the width of the groove of the concave portion provided in the guide of the transfer hand is set to the width of the corresponding handle portion of the cassette so as to absorb the manufacturing error of the opposing transfer hand. When the cassette is gripped by the transfer hand, the cassette slightly moves up and down with respect to the guide due to the gap between the concave portion on the inner surface of the guide and the grips on both sides of the cassette. Will be done. As a result, the concave portion of the guide and the handle of the cassette collided, and the cassette was vibrated.

In particular, when the cassette is lifted from the mounting table or placed on the mounting table, both transfer hands are located on both sides of the center of gravity of the cassette and slightly away from the position where the weight balance of the cassette is balanced. , The cassette pivots up and down about the gripping portion of the cassette by the two transfer hands, whereby the concave portion of the guide collides with the handle portion of the cassette, and the cassette further moves. Large vibration was occurring.

In the above, the cassette and its transfer hand have been described as examples. However, in the present invention, at least one pair of gripping portions each having a concave portion is widely used to support a grip portion formed on an article. Then, when the transfer device is provided with a transfer device that is provided with a transfer device that sandwiches the grip portion of the article between the grip portions, the product is held by the transfer device, and is generated when the transfer is performed. It is an object to reduce vibration.

[0007]

The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described. That is, in order to support a handle formed on the article, at least one pair of grips having a concave portion and vibration isolating means disposed on the bottom surface of the concave portion are provided. It is a transfer device.

In order to support the grip formed on the article, the grip has at least one pair of grips formed with a concave portion, and is moved in a direction to narrow the gap between the grips. In a transfer device provided with a transfer means for sandwiching a handle portion of the article by the grip portion, a vibration isolating means is provided on a bottom surface of the concave portion.

According to a third aspect of the present invention, there are provided at least two pairs of grips having recesses at the front and upper parts for supporting the grips formed at the front and upper parts of the article.
In a transport device that is moved in a direction to narrow the gap between the gripping portions, and provided with transfer means for sandwiching the grip portion of the article with the gripping portion, the vibration isolating means is provided on the bottom surface of the concave portion formed in the front gripping portion. Provide.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the present invention will be described with reference to an example of an unmanned carrier 1 for transferring a cassette 5 containing semiconductor wafers together with a cassette 5 between stations in a semiconductor manufacturing plant. explain. 1 is a perspective view of the automatic guided vehicle 1 on which the transfer device 3 is mounted, FIG. 2 is a front view of the transfer hand 30, and FIG. 3A shows a state where the transfer hand 30 grips the cassette 5. FIG. 3B is a side view showing a state in which the cassette 5 is lifted by the transfer hand 30. FIG.
FIG. 4 is a graph showing the state of vibration when lifting the robot.
(B) is a graph showing a vibration state when the cassette 5 is lifted by the transfer hand 30 according to the present invention.

First, the overall configuration of the automatic guided vehicle 1 will be described. In the following description, the front, rear, left, and right positions of each structure will be described with the direction of arrow F in FIG. Also,
The front, rear, left and right positions of each structure in the other drawings are also in accordance with FIG.

An automatic guided vehicle 1 shown in FIG. 1 is a transfer device that travels in a clean room by automatic control. A cassette mounting table 21 is provided on the upper surface of a vehicle body 2 at a front position thereof, and at a rear position thereof. The transfer device 3 is provided upright.

The transfer device 3 includes a transfer hand 30, an articulated robot arm, a turntable 39, and the like. A turntable 39 is rotatably provided on the upper surface of the vehicle body 2, and is mounted on the turntable 39. A base 38 of the robot arm is erected, and a lower end of a second arm 37 is attached to an upper end of the base so as to be rotatable back and forth. A rear end of a first arm 36 is attached to the upper end of the second arm 37 so as to be rotatable up and down, and a rotating body 35 whose rotation axis is directed to the left and right is attached to the front end of the first arm 36. Supported. Below the rotating body 35, a rotation base 34 whose rotation axis is directed vertically is pivotally supported, and the transfer hand 30 is suspended from the rotation base 34.

The operations of the transfer device 3, such as the turning of the turntable 39, the operation of the robot arm, and the operation of the transfer hand 30, are controlled by a control device (not shown). This control device is provided in the automatic guided vehicle 1.

On the left and right inner surfaces of the cassette 5 shown in FIG. 1, a plurality of shelves for holding the side edges of the wafers are provided vertically, and the wafers are stored horizontally in the cassette 5. is there. Further, handle portions 5a, 5a, 5b, 5b, 5 protruding outward are provided at the front end and the upper end of the cassette 5.
c.5c is formed.

As shown in FIG. 3A, the cassette 5
Cushion 22 provided on the upper surface of cassette mounting table 21
The wafer is ejected from the cassette 5 when the automatic guided vehicle 1 is set on 22.23.23 in a state of being inclined rearward, that is, with the opening thereof facing upward and forward. I try not to.

Next, the transfer hand 30 will be described. As shown in FIG. 1, the transfer hand 30 includes a pair of left and right grips 3.
The holding portions 32 are slidable left and right by a rack and a pinion mechanism (not shown).

As shown in FIG. 2 and FIG.
The recesses 32a, 32a, 32b, 32b, 32c, 32c which are engaged with the grips 5a, 5a, 5b, 5b, 5c, 5c of the cassette 5 at the front end and the upper end of the inner surface of the cassette 2
Are formed. As a result, the pair of gripping parts 32.3
2, the cassette 5 is sandwiched in a direction (inward direction) for reducing the distance between the cassettes 5, and the recesses 32 a, 32 a, 32 b
Handles 5a, 5a, 5b, and 5b of the cassette 5 mounted on the cassette mounting table 21 at 32b, 32c, and 32c
-Grasp 5c and lift the cassette as it is with the opening of the cassette tilted forward and upward.

The concave portion 3 of the grip portion 32 of the transfer hand 30
The width of the groove 2a (32b or 32c) is larger than the width of the corresponding handle 5a (5b or 5c) of the cassette 5 in order to absorb manufacturing errors and the like of the grippers 32 and 32 of the transfer hand 30 facing each other. When the cassette 5 is gripped by the transfer hand 30, the concave portion 32a (32b or 32c) on the inner surface of the guide 32 and the cassette 5
A gap is formed between the handle 5a (5b or 5c) and the cassette 5 slightly moves up and down with respect to the grip 32. As a result, the concave portion 32a (32c) of the grip portion 32 collides with the handle portion 5a (5c) of the cassette 5, and vibration occurs in the cassette 5.

In particular, when the cassette 5 is lifted from the cassette mounting table 21, the grips 5a, 5b, 5
Since c is located at a position away from the center of gravity, the cassette 5 tries to rotate counterclockwise. Therefore, first, handle part 5
c collides with the concave portion 32c of the grip portion 32, and the contact portion P
3B, the handle 5a and the recess 32a collide with each other in the counterclockwise direction when viewed from the side shown in FIG. 3B. Vibration is generated at the time of these collisions, and large vibration is generated particularly at the time of collision between the handle portion 5a and the concave portion 32a, which is a collision while the cassette 5 is rotating.

Therefore, in the present invention, the transfer hand 30
Are embedded in the bottom surfaces of the concave portions 32a, 32a, 32c, 32c of the grip portion 32.
4A and 4B show concave portions 32a and 3 of the grip portion 32.
These are experimental data when nothing is embedded in the bottom surfaces of 2a, 32c, and 32c, and when gel is embedded as an example of the vibration isolating members 40, 40. 3A and 3B are graphs in which the vertical axis indicates acceleration (gravitational acceleration) and the horizontal axis indicates time axis, and each of the times T1 and T2 is the handle 5
The moment when c c collided with the concave portion 32c of the grip portion 32, and the moment when the grip portion 5a collided with the concave portion 32a of the grip portion 32.

As described above, the gel is embedded in the recessed bottom surfaces of the concave portions 32a, 32a, 32c, and 32c of the grip portion 32 of the transfer hand 30, so that the grip portion 5a when the transfer hand 30 grips the cassette 5 is formed. · Closes inward gaps formed between the recesses 32a, 32a, 32c, 32c of the grip portion 32 and the handle portions 5a, 5c.
a.5c.5c can be elastically supported. Therefore, the collision between the handle portion 5c and the concave portion 32c and the handle portion 5a
In addition to suppressing the vibration caused by the collision between the robot arm and the recess 32a, the vibration generated when the robot arm is being transferred can be prevented from being transmitted to the cassette 5. As a result, it is possible to prevent the wafers aligned in the cassette 5 from being displaced.

The embodiment according to the present invention has been described with reference to the automatic guided vehicle 1 on which the transfer hand 30 is mounted.
Without being limited to this, the present invention can also be applied to a transport device that holds and transfers articles. Further, the present invention may be applied to a transfer device that transfers articles between an automatic warehouse and a transfer device, as well as a device mounted on the transfer device.

[0024]

As described above, the present invention has the following advantages. That is, in order to support the handle formed on the article, at least one pair of grips formed with a concave portion and vibration isolating means disposed on the bottom surface of the concave portion are provided. With the transfer device, the vibration isolating means on the bottom surface of the concave portion can prevent a gap from being generated between the grip portion and the grip portion, and reduce vibration when the grip portion and the grip portion come into contact with each other. In addition to absorbing the vibration, it is possible to suppress transmission of the vibration generated during the transfer to the article.

Further, in order to support the grip portion formed on the article, the grip portion has at least one pair of grip portions having concave portions, and is moved in a direction to narrow the gap between the grip portions. In a transfer device provided with a transfer unit that sandwiches the grip of the article by the grip unit, by providing an anti-vibration unit on the bottom surface of the concave portion, vibration of the article generated when the transfer unit transfers the article is provided. This is particularly effective when the article is formed in a box body and cracks or objects in which the positions are aligned are stored therein.

According to a third aspect of the present invention, there are provided at least two pairs of grips having recesses at the front and upper parts for supporting the grips formed at the front and upper parts of the article. In a transport device that is moved in a direction to narrow the gap between the gripping portions, and provided with transfer means for sandwiching the grip portion of the article with the gripping portion, the vibration isolating means is provided on the bottom surface of the concave portion formed in the front gripping portion. By providing, it is possible to reduce the vibration of the article generated when the article is transferred by the transfer means, and in particular, the article is configured in a box, in which the cracks and the position direction are aligned. This is effective when, for example, the information is stored.

[Brief description of the drawings]

FIG. 1 is a perspective view of an automatic guided vehicle 1 on which a transfer device 3 is mounted.

FIG. 2 is a front view of the transfer hand 30.

FIG. 3A is a side view illustrating a state where the cassette 5 is gripped by the transfer hand 30. FIG. 4B is a side view illustrating a state where the transfer hand 30 lifts the cassette 5.

FIG. 4A shows a conventional transfer hand 30 and a cassette 5;
The graph which shows the mode of the vibration when lifting up. (B) is a graph showing a vibration state when the cassette 5 is lifted by the transfer hand 30 according to the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 automatic guided vehicle 3 transfer device 5 cassette 5a handle 5b handle 5c handle 30 transfer hand 32 grip 32a recess 32b recess 32c recess 40 anti-vibration member

Continued on the front page (51) Int.Cl. ⁷ Identification code FI Theme coat II (reference) H01L 21/68 H01L 21/68 AVF term (reference) 3C007 AS24 BS10 CS08 DS01 ES03 ET08 EU04 EV07 EV14 EW20 NS11 WA16 5F031 CA02 DA01 FA03 FA07 FA09 GA19 GA32 GA35 GA45 GA47 GA48 GA58 NA02

Claims (3)

[Claims] 1. A method for supporting a handle formed on an article, comprising: at least one pair of grips formed with a concave portion; and vibration isolating means disposed on a bottom surface of the concave portion. Transfer equipment. 2. An article for supporting a handle formed on an article has at least one pair of grips formed with a concave portion, and is moved in a direction to narrow the gap between the grips. A transfer device provided with transfer means sandwiching a handle portion, wherein the transfer device is provided with a vibration isolating means on the bottom surface of the concave portion. 3. In order to support grips formed on the front part and the upper part of the article, at least two pairs of grip parts having recesses are formed on the front part and the upper part, and a direction for narrowing the gap between the grip parts. And a transfer device provided with transfer means for sandwiching the grip portion of the article by the grip portion, wherein a vibration isolating means is provided on the bottom surface of a concave portion formed in the front grip portion. A transfer device comprising the transfer device according to claim 2.