JP2002276760A - Two-axle drive device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a two-axle drive device capable of displacing and positioning in two-axle directions crossing across each other by a uniaxial driving motor, and having a simple structure and being inexpensive. SOLUTION: In this two-axle drive device 10, Y table 13 is placed on a base 11 to be movable in a reciprocating way, and X table 14 is placed on the Y table to be movable in a reciprocating way. An endless belt 23 is wound around a driving side pulley 18 rotated in conjunction with a servo motor 17, a driven side pulley 20, base end side pulleys 21a, 21b, and a leading side pulley 22. The endless belt 23 and the X table 14 are connected by a connecting member 24. On the base 11, either one of Y side lock device 15 capable of relatively fixing and opening the Y table 13 and X side lock device 16 capable of relatively fixing and opening the X table 14 on the Y table 13 is a fixed side, and the other side is an opening side, thereby performing position control of the Y table 13 and the X table 14 by the servo motor 17.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-axis driving device, and more particularly to a two-axis driving device which is suitably used for various devices such as a transport device, an inspection device, and a machine tool, and which can be moved or positioned in a linear direction crossing each other. The present invention relates to a two-axis driving device.

[0002]

2. Description of the Related Art In recent years, factory automation (FA) in the industrial world has been remarkable, and a driving device for moving or positioning to an arbitrary position can be cited as a basic technology supporting this FA. As this type of driving device, a two-axis driving device that moves or positions in two-axis directions orthogonal to each other is generally known, and moves an industrial robot to a predetermined position or incorporates it into a semiconductor manufacturing device. It is used in various forms, from relatively large ones to small ones, such as for positioning a substrate.

As such a two-axis driving device, there is, for example, an XY positioning device described in JP-A-9-239635. FIG. 14 shows this conventional XY
FIG. 15 is an external perspective view showing the positioning device, and its structure will be described with reference to FIG.

A pair of guide rails 102a, 102b are provided on an X-axis side base 101 of the XY positioning device 100.
Are fixed in parallel at predetermined intervals. On the guide rails 102a, 102b, there are sliders 103a,
An X table 104 is provided via 103b, and is slidable on guide rails 102a and 102b.
A ball screw 106 is rotatably supported between the guide rails 102a and 102b via bearings 105a and 105b provided on the X-axis base body 101, and a nut member attached to a lower portion of the X table 104. (Not shown). At one end of the ball screw 106,
An X-axis drive motor 107 is provided, and a ball screw 106 is provided.
By rotating the X table 104, the X table 104 can be reciprocated via a nut member.

[0005] On the upper surface of the X table 104, a Y-axis-side base body 108 which is long in the Y-axis direction orthogonal to the X-axis direction is provided. A pair of guide rails 109a and 109b are fixed on the Y-axis side base 108 in parallel at a predetermined interval. The Y table 1 is placed on the guide rails 109a and 109b via sliders 110a and 110b.
11 are provided, and are slidable on the guide rails 109a and 109b.

[0006] Between the guide rails 109a and 109b, bearings 112a and 1b provided on the Y-axis side base 108 are provided.
A ball screw 113 is rotatably supported via 12b, and is screwed to a nut member (not shown) attached to a lower portion of the Y table 111. Ball screw 113
At one end, a Y-axis drive motor 114 is provided. By rotating the ball screw 113, the Y table 111 can be reciprocated via a nut member.

With the above configuration, the X-axis drive motor 10
7. The Y-axis drive motor 114 is rotatably driven to move or position at any position in the X and Y directions orthogonal to each other.

For example, Japanese Patent Application Laid-Open No. 7-276269 discloses a single-axis robot configured to reciprocate in a single-axis direction and another single-axis robot in an axis direction orthogonal to the single-axis robot. A technique relating to an attached orthogonal robot is disclosed. FIG. 15 and FIG. 16 are a plan view and a cross-sectional view showing this conventional orthogonal robot, and the structure will be described with reference to these figures.

[0009] As shown in FIG.
0 is the X-axis single-axis robot 12 that moves in the X-axis direction
1 and the X-side movable portion 12 of the X-axis single-axis robot 121.
2 and a Y-axis-side single-axis robot 123 that moves in the Y-axis direction. The table 125 attached to the Y-side movable section 124 of the Y-axis-side single-axis robot 123 is two-dimensionally moved on an XY plane. It can be moved around.

As shown in FIG. 16, a pair of guide rails 127a and 127b (not shown) are provided on the X-axis base 126 of the X-axis single-axis robot 121 at predetermined intervals. They are fixed in parallel. A ball screw 128 is disposed between the guide rails 127a and 127b along the guide rails 127a and 127b, and both ends of the ball screws 128 are fixed to support members 129a and 129b fixed on the X-axis base 126. Have been.

On the guide rails 127a and 127b,
An X-side movable section 122 is provided via a slider (not shown), and is slidable on guide rails 127a and 127b. A nut member 130 is provided inside the X-side movable portion 122, and the nut member 130 is screwed into a ball screw 128. This nut member 130
Is connected to the X-side movable portion 122 via a bearing (not shown).
The driven pulley 131 is connected to the tip of the driven pulley 131.

An X-axis drive motor 132 is provided at the upper end of the X-side movable section 122.
A drive-side pulley 134 is connected to the second output shaft 133. A belt 135 is wound between the driving pulley 134 and the driven pulley 131 so that the rotational driving force of the X-axis driving motor 132 can be transmitted to the nut member 130. With this configuration, by rotating the X-axis drive motor 132, the nut member 130 relatively rotates in conjunction therewith, and the X-side movable portion 122
It can reciprocate in the axial direction.

On the other hand, the configuration of the Y-axis single-axis robot 123 is basically the same as that of the above-described X-axis single-axis robot 121, and rotates a Y-axis drive motor (not shown). This allows the Y-side movable section 124 to reciprocate in the Y-axis direction, and the table 125 described above is attached to the Y-side movable section 124.

With the above configuration, the X-axis drive motor 13
2. The Y-axis drive motor can be driven to rotate to move or position at any position in the X and Y directions orthogonal to each other.

[Problems to be solved by the invention]

However, in the conventional XY positioning device and orthogonal robot as disclosed in JP-A-9-239635 and JP-A-7-276269, a drive motor is provided for each drive shaft. Therefore, there is a problem that the device manufacturing cost is high. In addition, a component for mounting each drive motor, a control device for controlling each axis direction, and the like are required, and there has been a problem that the structure is complicated.

Furthermore, since the ball screw is used in the structure, there is a problem that the positioning speed is slow. In addition, when a long moving distance is required, it is necessary to lengthen the ball screw. The problem that it became more expensive also occurred.

An object of the present invention is to provide a two-axis drive device which can be moved or positioned in two-axis directions crossing each other by a one-axis drive motor, and has a simple structure and is inexpensive. Another object of the present invention is to provide a two-axis driving device.

[0018]

In order to solve this problem, a two-axis driving device according to the present invention comprises a first movable body provided on a base so as to be able to reciprocate in a linear direction, and the first movable body. A second moving body provided on the body so as to be able to reciprocate in a direction intersecting the moving direction of the first moving body, and a first locking means capable of relatively fixing and opening the first moving body to the base. ,
A second lock unit configured to relatively fix and release the second movable body to the first movable body; a drive motor disposed on the base; and a drive motor provided on a movement axis of the first movable body. A drive-side rotating body that can rotate in conjunction with the rotation drive of
A driven-side rotator rotatably provided on the moving axis of the first moving body at an interval with respect to the driving-side rotating body; and a base end portion in a direction intersecting the moving direction of the first moving body. A pair of base end rotators provided rotatably, a tip rotator provided rotatably at a tip portion in a direction intersecting the moving direction of the first moving body, and the driving rotator. Orbiting,
An endless flexible member that is circulated around the driven rotator, circulates around the distal rotator through one base rotator, and circulates around the drive rotator through the other base rotator; And a connecting member for connecting the endless flexible member and the second moving body, and one of the first locking means and the second locking means being a fixed side and the other being an open side; The gist of the invention is to include a position control means for controlling the positions of the first moving body and the second moving body by driving.

According to the two-axis driving device having the above configuration,
When the second locking means is set to the fixed side by the position control means, and the first locking means is set to the open side and the drive motor is driven to rotate, the second moving body is relatively fixed to the first moving body. Of the endless flexible members connected to the fixed second moving body via the connecting member, the endless flexible member orbits one base end rotating body, and orbits through the distal end rotating body to the other base end rotating body. The endless flexible member thus set becomes immobile.

On the other hand, the endless flexible member that goes around the other base end rotating body and goes around the one base end rotating body via the driving side rotating body and the driven side rotating body is in a movable state. So
When the driving motor is driven to rotate, the rotational driving force of the driving motor is transmitted to the first moving body via the movable endless flexible member, and the first moving body is moved in accordance with the rotation amount of the driving-side rotating body. It can be moved and positioned at any position.

When the first locking means is fixed on the fixed side by the position control means and the second locking means is on the open side and the drive motor is driven to rotate, the first moving body is relatively fixed to the base. Around the drive side rotating body, around the driven side rotating body, around the distal side rotating body via one proximal side rotating body, and around the driving side rotating body via the other proximal side rotating body. Since the endless flexible member wrapped around the body is in a movable state, when the drive motor is driven to rotate, the rotational driving force of the drive motor is moved through the connecting member connected to the endless flexible member. It is transmitted to the body, and the second moving body moves in accordance with the rotation amount of the driving-side rotating body, and can be positioned at an arbitrary position.

In this case, as described in claim 2, the position control means sets the second lock means to a fixed side, sets the first lock means to an open side, and rotates the drive motor. It is preferable to perform control so as to select an operation state and a second operation state in which the first locking means is fixed and the second locking means is opened and the driving motor is rotationally driven.

[0023] According to a third aspect of the present invention, the first type is provided.
The locking means is provided on the first moving body, and a pair of first plate-like members which are erected in parallel on the base at a predetermined interval along a moving axis of the first moving body, and a pair of first plate-like members. A first lock mechanism that can be clamped from the outside, wherein the second lock means is provided on the second movable body, and
A second lock mechanism is provided for holding a pair of second plate-like members, which are erected in parallel at a predetermined interval on the first moving body along a moving axis of the moving body from inside and outside. Is preferred.

When the first plate-like member erected on the base is held by the first lock mechanism of the first locking means, the first moving body is relatively fixed to the base, but is not held. In this case, the base and the first moving body are opened, so that the first moving body can move relative to the base.

In the case where the second plate-like member erected on the first moving body is clamped by the second locking mechanism of the second locking means, the second moving body is relatively opposed to the first moving body. On the other hand, when not fixed, the first mobile unit and the second mobile unit are opened, so that the second mobile unit can move relative to the first mobile unit.

In this case, the first lock mechanism of the first lock means and the second lock mechanism of the second lock means may each include a support member which is open in a vertical direction. A lock main body which is movable in the support body and has an insertion hole formed therein, a locking portion provided on an upper edge of the lock main body and locked by the support body, and a standing portion provided at a lower end of the lock main body. A pair of lock portions having inclined surfaces formed on the inside of the distal end portion, a cylinder fixed on the lock body, and one end fixed to a piston in the cylinder and the other end in the insertion hole. A connecting member provided, and a press-fitting member provided at the other end of the connecting member and having an inclined surface formed on a side surface along the inclined surface of the lock portion. The inclined surface of the lock portion and the inclined surface of the press-fitting member The first plate member is disposed between the first plate member and the second locking means, and the second plate member is disposed between the inclined surface of the lock portion and the inclined surface of the press-fitting member. Is preferred.

The first locking means and the second locking means having the above configuration
According to the locking means, when each locking means is on the fixed side, the piston is moved downward, so that the press-fitting member is press-fitted and the inclined surface of the side surface abuts against the inner side surface of each plate-shaped member. At the same time, the lock body and the pair of lock portions are pushed upward in the support, and the inclined surfaces of the lock portions are brought into contact with the outer surfaces of the respective plate members. Then, the respective plate-like members are fixed between the inclined surface of the press-fitting member and the inclined surface of the lock portion.

On the other hand, when each locking means is open from the fixed side, the inclined surface of the press-fitting member is separated from each plate-like member by moving the piston upward, and the locking body and The pair of locks are pushed down in the support, the inclined surfaces of the locks are separated from the respective plate members, and the locks of the lock body are locked to the support. Then, a gap is formed between the inclined surface of the press-fitting member, the inclined surface of the lock portion, and each plate member, and the plate-shaped member is opened.

According to a fifth aspect of the present invention, it is preferable that a deceleration means for reducing the rotation speed of the drive motor is provided between the drive motor and the drive-side rotating body. It is preferable that the driving motor is a driving motor having a positioning control function. Furthermore, as described in claim 7,
Preferably, the intersecting directions are orthogonal directions.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is an external perspective view showing a two-axis driving device according to one embodiment of the present invention, FIG. 2 is a plan view of the two-axis driving device according to one embodiment of the present invention, and FIG. 2 is a side view seen from the direction of arrow A in FIG. 2, and FIG.
5, FIG. 5 is a side view as viewed from direction C in FIG. 2, FIG. 6 is a cross-sectional view showing section DD in FIG. 2, and FIG. FIG. 8 is an exploded perspective view showing the Y-side lock mechanism, FIG. 8 is a view showing the operation principle of the Y-side lock device, and FIG. 9 is a control block diagram of a two-axis drive device according to an embodiment of the present invention. . Hereinafter, the two-axis drive device according to the present invention will be described with reference to FIGS. 1 to 9.

As shown in FIG. 1, the two-axis driving device 10
A rectangular base 11 that is long in one axis direction (hereinafter referred to as “Y-axis direction”), and is provided on the base 11 so as to be reciprocally movable in the Y-axis direction, A Y table 13 having an extending portion 12 extending in the "X-axis direction"; an X table 14 provided on the extending portion 12 so as to be able to reciprocate in the X-axis direction; The Y table 11 can be fixed relative to the Y table 11 or the fixed state can be released.
Side lock device 15 and X table 14
An X-side lock device 16 that can relatively fix or release the fixed state, a servomotor 17 that is disposed at an end on the base 11 and that can be driven to rotate reversibly, and a servomotor 1.
7, a drive pulley 18 rotatable in conjunction with the rotation of the motor 7, a speed reduction mechanism 19 provided between the servo motor 17 and the drive pulley 18, and a base 11 opposite to the servo motor 17.
A driven pulley 20 rotatably provided at the upper end,
A pair of base-side pulleys 21a and 21b rotatably provided at the base end of the extension portion 12 of the Y table 13;
Around the distal pulley 22 rotatably provided at the distal end thereof, around the drive pulley 18, around the driven pulley 20, around the distal pulley 22 via the proximal pulley 21 a, and The endless belt 23 circulated around the driving pulley 18 via the pulley 21b, and either one of the Y-side locking device 15 or the X-side locking device 16 is fixed and the other is open, and the rotation of the servomotor 17 is performed. And a position control means (not shown) for controlling the positions of the Y table 13 and the X table 14 as a basic configuration.

First, the Y table 13 and the X table 14 will be described. A linear guide rail 25 is fixedly provided on the base 11 in the Y-axis direction. On the guide rail 25, a Y table 1 is provided via a slider 26.
3 are provided so as to be able to slide on the guide rail 25. The Y table 13 is provided with an extended portion 12 that is long in the X-axis direction.
2, a linear guide rail 27 is fixedly provided in the X-axis direction.

On this guide rail 27, a slider 2
8, an X table 14 is provided, and the guide rail 2
7 can be slid. Note that Y
The table 13 and the X table 14 may be provided movably on a plurality of guide rails via a plurality of sliders, and are not particularly limited.

Next, peripheral members of the servo motor 17 will be described. As shown in FIG. 2, a motor mount 29 is provided at an end on the base 11, and the motor mount 29 extends in the Y-axis direction formed at both edges along the Y-axis direction. Long plurality of grooves 30a, 30b, 30c, 30d
Is fixed to the base 11 via a fixing member such as a bolt (not shown) inserted through the base 11. These grooves 30a, 30
b, 30c, and 30d are for adjusting the position of the motor mount 29 in the Y-axis direction. By adjusting the position of the motor mount 29, the tension adjustment of the endless belt 42 of the reduction mechanism 19 described later is performed. Can be done.

As shown in FIG. 3, the motor mount 29
A motor support member 31 having a hollow inside is provided on the upper side. The interior of the motor support member 31 is divided into an upper chamber 33 and a lower chamber 34 via a partition 32,
The upper surface of the upper chamber 33 is opened, and the side and lower surfaces of the lower chamber 34 on the Y table 13 direction side are opened.

The servomotor 17 is supported and fixed to the upper edge of the motor support member 31 with the motor shaft 35 oriented perpendicular to the surface of the base 11. In the two-axis driving device 10 according to the present invention, in addition to the servomotor 17,
Various motors such as a stepping motor and other general-purpose motors can be used, and are not particularly limited. However, it is preferable that the output of the position, direction, and the like be set in advance when a position shift occurs due to an external force or the like. The servo motor (AC servo motor, DC servo motor, or the like) provided with a servo mechanism that can automatically follow such a value is preferable.

The lower shaft 34 of the motor support member 31 is provided with a rotating shaft 36 in alignment with the axis of the motor shaft 35. One end of the rotating shaft 36 is inserted through a hole (not shown) provided in the partition wall 32 and connected to the motor shaft 35 via a coupling member 37, and the other end is connected to the motor mount 29. It is supported and can rotate in conjunction with the motor shaft 35.

Next, the driving pulley 18 and the speed reduction mechanism 19
Will be described. Motor mount 29 and guide rail 2
5, a substantially U-shaped shaft fixing member 38 is fixed to the base 11 with its opening side facing the base 11. A drive-side fixed shaft 39 is arranged inside the shaft fixing member 38 in accordance with the axis of the guide rail 25, and both ends of the driving side fixed shaft 39 are fixed to the shaft fixing member 38 and the base 11. The drive-side pulley 18 is mounted on the drive-side fixed shaft 39.

Here, in the two-axis driving device 10 according to the present invention, a reduction mechanism 19 for reducing the rotation of the servo motor 17 is provided between the servo motor 17 and the driving pulley 18.

The speed reduction mechanism 19 is provided coaxially with the driving pulley 18 and is provided with a second driving pulley 40 having the same diameter as the driving pulley, and rotatable with the rotating shaft 36 simultaneously. And a motor-side pulley 41 having a smaller diameter than the second drive-side pulley, and an endless belt 4 wound between the second drive-side pulley 40 and the motor-side pulley 41.
2 is provided.

In this reduction mechanism 19, the motor-side pulley 41 is disposed so as to be flush with the second drive-side pulley 40, and the second drive-side pulley 40 and the drive-side pulley 18 are connected to a key member ( (Not shown), the rotational driving force of the servomotor is reduced by the speed reduction mechanism 1.
9 to the drive pulley 18.

Next, the driven pulley 20 and the base pulley 2
1a and 21b and the tip pulley 22 will be described.
As shown in FIG. 1, at the end of the base 11 opposite to the end of the base 11 on which the servomotor 17 is disposed, a substantially U-shaped shaft fixing member 44 having an extended mounting portion 43 is provided. The opening is provided in the X-axis direction.

The shaft fixing member 44 is attached to the side surface of the base 11 via fixing means such as bolts (not shown) inserted in a plurality of grooves 45a and 45b formed in the mounting portion 43 and extending in the Y-axis direction. Fixed. These grooves 45a, 45b
Is for adjusting the position of the shaft fixing member 44 in the Y-axis direction. By adjusting the position of the shaft fixing member 44, the tension of the endless belt 23 can be adjusted.

A driven-side fixed shaft 46 is disposed in the opening of the shaft fixing member 44 in alignment with the axis of the guide rail 25, and both ends of the shaft are fixed to the shaft fixing member 44. The driven side pulley 20 is mounted on the driven side fixed shaft 46.

A pair of base-side fixed shafts 47a and 47b are fixed to the lower surface of the Y table 13 on the base end side of the extending portion 12, and these base-side fixed shafts 47a and 47b
The proximal pulleys 21a and 21b are mounted on the shaft. Also,
A distal-side fixed shaft 48 is fixed to the lower surface of the Y table 13 on the distal side of the extending portion 12, and the distal-side pulley 22 is mounted on the distal-side fixed shaft 48.

Next, the endless belt 23 and the connecting member 24 will be described. The endless belt 23 is connected to the drive pulley 18.
, Around the driven pulley 20, around the distal pulley 22 via the proximal pulley 21 a, and around the driving pulley 18 via the proximal pulley 21 b, so that they are connected together. Has become.

As the endless belt 23, specifically, it is preferable to use a timing belt or the like.
In this case, it is preferable to use a toothed pulley as each of the pulleys.

The type, the belt width, and the type of the endless belt 23 (the same applies to the endless belt 42 of the speed reduction mechanism 19 described above).
The belt thickness and the like can be appropriately changed according to the use frequency, use environment, and the like of the biaxial drive device 10,
From the viewpoint of improving the positional accuracy, it is preferable to use a material having a small elongation. In addition, other than the endless belt, an endless wire or the like can be similarly wound and used, and is not particularly limited.

In the middle of the endless belt 23 wound around the extending portion 12 of the Y table 13, one end is fixed to the endless belt 23 and the other end is fixed to a side end of the X table 14. Connected member 24 is provided. The connecting member 24 is for moving the X table 14 along the guide rail 27 as the endless belt 23 moves.

Next, the Y-side lock device 15 and the X-side lock device 16 will be described. The Y-side locking device 15 is provided on the Y table 13 in the direction opposite to the extension portion 12 of the Y table
A Y-side plate member 49 formed by bending a metal plate or the like into a substantially U-shape and extending in the Y-axis direction is provided on the base 11 below the Y-side locking device 15. Are fixed with their openings facing upward.

The upstanding portions 50a and 50b of the Y-side plate-like member 49 facing each other are formed so as to be inclined outward gradually upward from the base 11 side. A Y-side lock mechanism 51 is provided which can hold the 50a and 50b from inside and outside.

As shown in FIG. 7, the Y-side lock mechanism 51 includes a Y-side support 52, a Y-side lock body 53, an air cylinder 54, and a piston (not shown) in the air cylinder 54. Y connected via piston rod 55
The side press-fitting member 56 is provided as a basic configuration thereof.

The Y-side support 52 which is opened in the vertical direction is for supporting the Y-side lock main body 53 inserted into the inner opening, and the outer side end is provided with the extending portion 12 of the Y table 13. It is fixed to the side end opposite to the side. The Y-side lock main body 53 having an insertion hole 57 formed therein is disposed within the opening of the Y-side support member 52 and is formed slightly smaller than the inside diameter of the opening, and can slide vertically within the opening. It has been.

Flange-shaped locking portions 58 for restricting the downward movement of the Y-side lock main body 53 are provided at both ends along the X-axis direction above the Y-side lock main body 53. A pair of Y-side lock portions 59a and 59b are provided upright at both ends along the Y-axis direction at the lower end of the Y-lock body 53, and a Y-side plate is provided inside the distal ends of the Y-side lock portions 59a and 59b. Inclined surfaces 60a, 60b are formed along the outer surfaces of the upright portions 50a, 50b of the shaped member 49.

An air cylinder 54 having a piston inside is fixedly mounted on the Y-side lock body 53. The other end of the piston rod 55 having one end connected to the piston in the air cylinder 54 is inserted into the insertion hole 5 of the Y-side lock body 53.
7, and a substantially square Y-side press-fitting element 56 is attached to the other end of the piston rod 55.

Both sides of the Y-side press-fitting member 56 along the Y-axis direction are gradually tapered downward and
Inclined surfaces 61a, 61b are formed along the inner surfaces of the upright portions 50a, 50b of the side plate-shaped member 49. Then, as shown in FIG. 4 (or FIG. 8 (a)), the inclined surfaces 60a, 60b of the distal ends 59a, 59b of the Y-side lock portion and the Y-side press-fit 5
6, between the inclined surfaces 61a and 61b.
Are provided in a state where a gap is formed.

Next, the X-side locking device 16 is provided at the end of the X-table 14 opposite to the connecting member 24 connected to the X-table 14.
The X-side plate-like member 62 formed by bending a metal plate or the like into a substantially U-shape and extending in the X-axis direction is formed on the extension portion 12 of the Y table 13 below It is fixed.

The upstanding portions 63a and 63b of the X-side plate-like member 62 facing each other are formed so as to be gradually inclined outward from the extending portion 12 toward the upper side. An X-side lock mechanism 64 is provided which can hold the portions 63a and 63b from inside and outside.

The X-side lock mechanism 64 is also the same as the Y-lock mechanism described above.
Similarly to the side lock mechanism 51, the X side support 65, the X side lock body 66, the air cylinder 67, and the X side connected to a piston (not shown) in the air cylinder 67 via a piston rod. The press-fitting element 69 is provided as its basic configuration, and details thereof are omitted because it is the same configuration as the Y-side lock mechanism 51 described above.
As shown in the figure, the side end of the X-side support 65 is
The inclined surface 71a, 71b at the tip of the X-side lock portion 70a, 70b and the inclined surface 72 of the X-side press-fitting element 69 are fixed to the end of the X-table 14 in the direction opposite to the side of the connecting member 24 connected to the side 4.
a, 72b between the X-side plate member 62
a and 63b are arranged in a state where a gap is formed.

In the above description, the angle between the upright portions 50a and 50b of the Y-side plate member 49 and the base 11, the upright portions 63a and 63b of the X-side plate member 62, and the extending portion 12 of the Y table 13 Is preferably in the range of 70 to 89 degrees, more preferably 75 to 85 degrees.
It is preferably in the range of degrees. In particular, an angle of 80 degrees is most preferable from the viewpoint of obtaining a high locking force.

Here, before describing the overall operation of the two-axis drive device 10 according to the present invention, the operation principle of the Y-side lock device 15 having the above-described configuration will be described. Note that the principle of operation of the X-side lock device 16 is as follows.
Since the operation principle is the same as that of No. 5, the description is omitted.

FIG. 8 is a diagram showing the operating principle of the Y-side lock device 15 (or the X-side lock device 16). FIG.
6A, the piston in the air cylinder 54 is located at the top dead center, and the inclined surfaces 61a and 61b of the Y-side press-fitting member 56 connected to the piston rod 55 and the upright portion 50a of the Y-side plate member 49. , 50b are formed with gaps. On the other hand, the Y-side lock main body 53 is supported by the Y-side support 52 by a locking portion 58 (not shown in FIG. 8), and the downward movement is restricted. At this time, the inclined surfaces 60a at the tips of the Y-side lock portions 59a and 59b,
A gap is formed between the outer surface of the upright portions 50a and 50b of the Y-side plate-shaped member 49. In this embodiment, this state is called that the Y-side lock device 15 is on the open side.

Then, as shown in FIG. 8B, when the piston in the air cylinder 54 is pushed downward, the Y-side press-fit 56 is pressed into the Y-side plate member 49 via the piston rod 55. , Inclined surface 61 of Y-side press-fit 56
a, 61b are the upright portions 50a, 50b of the Y-side plate member 49;
Abuts on the inner surface of the At this time, the piston has not yet reached the bottom dead center.

Then, the inclined surface 61a of the Y-side press-fitting member 56,
After the 61b is brought into contact with the inner surfaces of the upright portions 50a and 50b of the Y-side plate-shaped member 49, the Y-side lock main body 53 is slid upward in the Y-side support body 52. When the piston reaches the bottom dead center, as shown in FIG. 8C, the inclined surfaces 60a, 60b at the tips of the Y-side lock portions 59a, 59b of the Y-side lock main body 53 become the upright portions of the Y-side plate member 49. 50
a, 50b abutting against the outer side surfaces of the upright portions 50a, 50b
Is sandwiched between the inclined surfaces 61a, 61b of the Y-side press-fit 56 and the inclined surfaces 60a, 60b of the Y-side lock portions 59a, 59b. In the present embodiment, this state is referred to as Y
The side locking device is said to be on the fixed side.

As described above, when the Y-side lock device 15 is on the open side, the Y table 13 is relatively movable with respect to the base 11, and the Y-side lock device 15 is on the fixed side. In this case, the Y table 13 is relatively fixed to the base 11. Similarly, when the X-side lock device 16 is set to the open side, the X table 14 is relatively movable with respect to the Y table 13, and when the X-side lock device 16 is set to the fixed side, X table 14 is Y table 1
3 relative fixed.

Next, the two-axis driving device 10 having the above configuration
Will be described. FIG. 9 shows a control block diagram of the two-axis driving device. Control device 73
It includes a PU 74, a ROM 75, and a RAM 76, which are connected to each other via a bus 77 and also to an input / output interface 78.

Here, the ROM 75 is for storing various control programs.
One of the Y-side lock device 15 and the X-side lock device 16 is fixed, and the other is open.
7, the Y table 13 and the X table 14
An operation program as a position control means for performing the position control, an origin return program for returning the Y table 13 and the X table 14 to the origin, and various programs necessary for controlling the two-axis driving device 10 are stored.

The CPU 74 performs various calculations based on various programs stored in the ROM 75 and various processes based on input various signals.
The RAM 76 temporarily stores various types of data such as initial setting values on a program, position information of the Y table 13 and the X table 14, and calculation results calculated by the CPU 74.

Further, a Y-side solenoid valve 79 is connected to the CPU 74 through an input / output interface 78, and the Y-side lock device 15 is connected to the Y-side solenoid valve 79. An X-side solenoid valve 80 is connected to the CPU 74 via an input / output interface 78, and the X-side lock device 16 is connected to the X-side solenoid valve 80.

The CPU 74 opens and closes solenoid valves (not shown) of the Y-side solenoid valve 79 and the X-side solenoid valve 80. By opening and closing the solenoid valve, each air cylinder 5 of the Y-side lock device 15 and the X-side lock device 16
4 and 67, compressed air is supplied from a compressed air supply device (not shown) to the Y-side lock device 15 and the X-side lock device 1
6 can be switched to a fixed side or an open side.

Further, a position / speed control device 81 is connected to the CPU 74 via an input / output interface 78, and the servomotor 17 is connected to the position / speed control device 81 via an amplifier 82. . Here, the position / speed control device 81 is for converting a command from the CPU 74 into a pulse signal, and the amplifier 82 is for amplifying the pulse signal.

Further, a Y-side position sensor 83 and an X-side position sensor 84 are connected to the CPU 74 via an input / output interface 78. This Y side position sensor 83
Is for detecting the origin position of the Y table 13, and the X side position sensor 84 is for detecting the origin position of the X table 14.

Then, the CPU 74 operates the Y-side position sensor 8.
3. Calculate the moving amount to an arbitrary moving position based on each origin position information detected by the X-side position sensor 84, and
The servomotor 17 is controlled via the position / speed control device 81 and the amplifier 82 based on the program stored in the M75.
4 is performed.

Further, an operation switch 85 is connected to the CPU 74 via an input / output interface 78. The operation switch 85 includes an origin return switch 8
6. Various switches such as an operation start switch 87, a pause switch 88, and an operation switch 89 are provided.
The CPU 74 performs control by switching the operation state of the two-axis driving device 10 based on signals from these various switches.

With the above configuration, the two-axis driving device 10 according to the present invention operates as follows. Hereinafter, a description will be given using a flowchart. In the following description, FIG.
As shown in FIG.
Endless belt 23 to endless belt a, driven pulley 2
The endless belt 23 from 0 to the proximal pulley 21a is an endless belt b, the endless belt 23 from the proximal pulley 21a to the distal pulley 22 is an endless belt c, and the distal pulley 22
Endless belt 23 from end pulley 21b to end pulley 21b, and endless belt 23 from base end pulley 21b to drive pulley 18 are endless belt e.

The guide rail on the servo motor 17 side
25 ends are the origin Y of the Y table 13 ₀, Y table 13
X-tape the end of the guide rail 27 on the base end side of the
Origin X of le 14₀And The rotation of the servo motor 17
For the rotation drive, move the motor shaft 35 of the servomotor 17 upward.
Rotate counterclockwise clockwise and clockwise clockwise
Invert.

First, a description will be given of an origin return operation for returning the Y table 13 and the X table 14 stopped at arbitrary positions except for the origins of the Y table 13 and the X table 14 to the respective origin positions. FIG. 11 is a flowchart showing an origin return operation for returning the Y table and the X table to the respective origin positions.

When the two-axis drive device 10 according to the present invention is started by operating the origin return switch 86, the Y-side lock device 15 is switched to the fixed side (S1), and a predetermined time until it is securely fixed. Is temporarily suspended (S2).
Note that this temporary pause can be omitted when it is possible to reliably detect the switching to the fixed side using a sensor or the like.

After a pause for a predetermined time (S2: YE
S), the X-side lock device 16 is switched to the open side (S3). In this state, the Y table 13 is fixed relative to the base 11 and the X table 1
Reference numeral 4 denotes a state in which it can move relative to the Y table 13. The endless belt 23 (endless belt a, endless belt b, endless belt c, endless belt d, and endless belt e) is in a movable state.

For this reason, in this state, when the servo motor 17 is turned on and the rotational drive is controlled in the reverse direction (S4),
The motor-side pulley 41 rotates clockwise with the rotation of the rotating shaft 36, and the second drive-side pulley 40 and the drive-side pulley 18 connected to the second drive-side pulley 40 via the endless belt 42 rotate clockwise. Is rotated. The endless belt 23 is circulated clockwise in accordance with the rotation amount of the driving pulley 18, and the rotational driving force is transmitted to the X table 14 connected to the circulated endless belt 23 via the connecting member 24. You. This movement to the origin _{X 0} direction X table 14 is initiated by (S5).

The origin X is detected by the X-side position sensor 84.
_The movement is continued until ₀ is detected (S6: N
O), with the origin _{X 0} is detected movement is completed to the origin _{X 0} (S6: YES) and with the servo motor 17 is stopped (S7), the origin position data of the X table 14 is recorded in RAM76 (S8).

Next, the X-side locking device 16 is switched to the fixed side (S9), temporarily suspended for a predetermined time until it is securely fixed (S10), and temporarily suspended for a predetermined time (S10: YES). , The Y-side lock device 15 is switched to the open side (S11). In this state, the X table 14 is relatively fixed to the Y table 13, and the Y table 13 is in a state capable of relatively moving with respect to the base 11. The endless belt c and the endless belt d are in an immobile state, but the endless belt a, the endless belt b, and the endless belt e are in a movable state.

For this reason, in this state, the servo motor 17 is turned on to control the rotational drive in the reverse direction (S12).
Then, the motor-side pulley 41 rotates clockwise with the rotation of the rotating shaft 36, and the second driving-side pulley 40 and the driving-side pulley 18 connected to the second driving-side pulley 40 via the endless belt 42. Rotated clockwise. Then, the endless belt a, the endless belt b, and the endless belt e are circulated clockwise in accordance with the rotation amount of the drive side pulley 18, whereby a rotational driving force is transmitted to the Y table 13, whereby the Y table 13 is rotated. movement to the origin _{Y 0} direction is started (S13).

The origin Y is detected by the Y-side position sensor 83.
_The movement is continued as it is until ₀ is detected (S14:
NO), the origin _{Y 0} is detected movement is completed to the origin _{Y 0} (S14: YES) and with the servo motor 17 is stopped (S15), the origin position data of the Y table 13 is recorded in the RAM 76 ( S16), and enters a standby state.
In the above description, the case where the origin is returned in the order of the X table 14 and the Y table 13 has been described. However, the origin may be returned in the order of the Y table 13 and the X table 14, and there is no particular limitation. Of course.

Next, the X table 14 is set to the origin P
₀(X₀, Y₀) From the standby state, position P shown in FIG.
₁(X₁, Y₁), Then position P₁From
Place P₂(X₂, Y ₂)
You. FIG. 13 shows that the X table has the origin P₀→ Position P₁→ Position
P₂5 is a flowchart showing an operation of moving to
You.

When the two-axis drive device 10 according to the present invention is started from the standby state by operating the operation start switch 87, the lock states of the Y-side lock device 15 and the X-side lock device 16 are confirmed (S17). ). That is, the Y-side lock device 15 and the X-side lock device 16 immediately before entering the standby state.
The lock state of is checked. In this case,
The X-side lock device 16 is set to the fixed side (S9 in FIG. 11), and the Y-side lock device 15 is set to the open side (S9 in FIG. 11).
11) is confirmed.

If there is no problem in the lock state of each lock device (S17: YES), the servo motor 17 is turned on and the rotational drive is controlled in the normal rotation direction (S18). If the lock state of each lock device is not normal (S17: N
O) Each lock device is adjusted so that the lock state becomes normal (in this case, the X-side lock device 1).
Adjustment is performed so that 6 is on the fixed side and Y-side lock device 15 is on the open side. ).

At this time, the X table 14 becomes the Y table 13
And the Y table 13 is mounted on the base 1
The endless belt c and the endless belt d are in a stationary state, while the endless belt a, the endless belt b, and the endless belt e are in a movable state.

Therefore, the motor-side pulley 41 rotates counterclockwise with the rotation of the servo motor 17, and the second drive-side pulley 40 and the second
The driving pulley 18 connected to the driving pulley 40 is rotated counterclockwise. The endless belt a, the endless belt b, and the endless belt e are circulated in a counterclockwise direction in accordance with the rotation amount of the driving pulley 18, whereby a rotational driving force is transmitted to the Y table 13. 1
The movement of the position _No. 3 in the direction Y1 is started (S19).

[0091] Then, by the rotation drive control of the servo motor 17, Y table 13 is continued to move until it reaches the position _{Y 1} (S20: NO), reaches the position _{Y 1} (S
20: YES), the servomotor 17 is stopped (S
21), the position data of the Y table 13 is recorded in the RAM 76 (S22).

Next, the Y-side lock device 15 is switched to the fixed side (S23), temporarily suspended (S24) for a predetermined time until it is securely fixed, and after being temporarily suspended for a predetermined time (S24: YES). ), The X-side lock device 16 is switched to the open side (S25). In this state,
The Y table 13 is relatively fixed to the base 11, and the X table 14 is movable relative to the Y table 13. The endless belt 23 (endless belt a, endless belt b, endless belt Belt c, endless belt d
And the endless belt e) is movable.

For this reason, in this state, the servo motor 17 is turned on to control the rotation in the forward direction (S26).
, The motor-side pulley 41 rotates counterclockwise with the rotation of the rotating shaft 36, and the second driving-side pulley 40 via the endless belt 42 and the driving-side pulley 18 connected to the second driving-side pulley 40. Is rotated counterclockwise. And
The endless belt 23 is circulated counterclockwise in accordance with the rotation amount of the driving pulley 18, and the rotational driving force is transmitted to the X table 14 connected to the circulated endless belt 23 via the connecting member 24. Thus, movement to the position _{X 1} direction X table 14 is started (S27).

[0094] Then, similarly, by the rotation drive control of the servo motor 17, moves to the X table 14 reaches the position _{X 1} is continued (S28: NO), reaches the position _{X 1} (S28: YES) and Then, the servo motor 17 is stopped (S29), and the position data of the X table 14 is recorded in the RAM 76 (S30).

[0095] Then, the in to be rotational drive control in the forward direction (S31), the movement to the position _{X 2} direction X table 14 is started further ON servomotor 17 (S3
2), X table 14 is continued to move until it reaches the position _{X 2} (S33: NO), reaches the position _{X 2} (S3
3: YES), the servomotor 17 is stopped (S3).
4), the position data of the X table 14 is recorded in the RAM 76 (S35).

Next, the X-side lock device 16 is switched to the fixed side (S36), temporarily suspended (S37) for a predetermined time until it is securely fixed, and temporarily suspended for a predetermined time (S37: YES). ), The Y-side lock device 15 is switched to the open side (S38).

Then, similarly, the servo motor 17 is turned on.
When the rotation is controlled in the normal rotation direction (S39), Y
Movement to position _{Y 2} direction of the table 13 is started (S4
0), moved to the Y table 13 reaches the position _{Y 2} is continued (S41: NO), when it reaches the position _{Y 2} (S
41: YES), the servomotor 17 is stopped (S4).
Along with 2), the position data of the Y table 13 is recorded in the RAM 76 (S43), and the next operation is started.

As described above, the X table 14 has the origin P₀
(X₀, Y₀) To (X₀, Y₁), (X₀, Y₁) Or
R₁(X₁, Y₁), P₁(X₁, Y₁From)
(X₂, Y ₁), (X₂, Y₁) To P₂(X₂,
Y₂) And move continuously while drawing a trajectory.

As described above, according to the two-axis driving device according to the present invention, the two-axis driving device is arranged so that the two
It can be moved or positioned in the axial direction, and can be a simple and inexpensive two-axis drive device.

The operation state in which the Y-side lock device is fixed and the X-side lock device is open, the servomotor is rotationally driven, and the X-side lock device is fixed and the Y-side lock device is open. The control is performed so as to select the operation state in which the servo motor is rotationally driven,
It is possible to continuously move or position in two orthogonal axial directions, and further, it is possible to perform the operation at high speed by driving an endless belt.

Further, when the above-described Y-side locking device and X-side locking device are applied to the two-axis driving device according to the present invention, it is possible to securely fix or open the device with a smaller operation and structure. A strong lock fixing force can be obtained, and no displacement or the like after fixing occurs.

The present invention is not limited to the above-described embodiment at all, and it is needless to say that various modifications can be made without departing from the spirit of the present invention. For example, in the above embodiment, two movable or positionable XY orthogonal directions are provided.
Although the description has been given of the shaft driving device, other than the above, a two-axis driving device that can be moved or positioned in a linear direction intersecting with each other can be used, and is not particularly limited.

Further, in the above embodiment, the Y table is relatively fixed or opened on the base using the Y side lock device provided on the Y table, and the Y table is mounted on the X table using the X side lock device provided on the X table. Although the configuration in which the X table is relatively fixed or opened to the table has been described, for example, a mechanism for fixing or opening the guide rail to the Y table, the slider of the X table or the like may be provided, or the relative fixing or opening may be performed electromagnetically. Or something that you can go to.

That is, various types of locking means capable of applying a relative fixation of the Y table to the base or opening the fixed state thereof, and enabling a relative fixation of the X table to the Y table or opening this fixed state are applicable. And is not particularly limited.

Although a speed reduction mechanism for reducing the rotation of the servomotor is provided between the servomotor and the drive pulley, this drive mechanism is not provided, and the drive pulley is directly connected to the motor shaft of the servomotor. Is not particularly limited. Also, as for the speed reduction mechanism, various types of speed reduction means can be applied as long as the rotation of the servomotor can be decelerated to increase the torque.

The two-axis driving device according to the present invention is such that a robot hand is attached to the X table of the two-axis driving device to transfer a work or transfer to a pallet, or a CCD camera is mounted on the X table. It is expected to be widely applied to various devices such as an inspection device that is mounted and performs inspection at an arbitrary position, and is extremely useful.

[0107]

According to the two-axis drive device of the present invention,
It is possible to perform movement or positioning in two axes directions crossing each other by the shaft drive motor, and it is possible to obtain an inexpensive two-axis drive device with a simple structure. Furthermore, since it is driven by the endless flexible member, movement or positioning can be performed at high speed.

Further, according to the two-axis driving device of the present invention, since the position control is performed so as to select the first operation state and the second operation state, they intersect each other by the one-axis driving motor. Movement or positioning can be performed continuously in two axial directions.

Further, according to the two-axis driving device of the third aspect, it is possible to easily fix or release the first moving body or the second moving body relative to each other.

According to the two-axis driving device of the fourth aspect, the first locking means and the second locking means can be operated with a smaller operation and structure, and a strong fixing force can be obtained. Therefore, there is no occurrence of displacement after fixing.

In the case where the speed reduction means is provided between the driving motor and the driving-side rotator, the two-axis driving device is driven by using a smaller driving motor. Can be done.

According to the two-axis driving device of the fifth aspect, since the driving motor having the positioning control function is used as the driving motor, the position detection by the driving motor itself, and the position deviation due to the external force or the like are reduced. When this occurs, feedback control or the like can be performed, and positioning accuracy can be improved. Further, the entire device can be downsized.

Further, according to the two-axis driving device of the sixth aspect, it is possible to move or position in the orthogonal direction by the one-axis driving motor.

[Brief description of the drawings]

FIG. 1 is an external perspective view showing a two-axis driving device according to an embodiment of the present invention.

FIG. 2 is a plan view showing a two-axis driving device according to one embodiment of the present invention.

FIG. 3 is a side view of the two-axis driving device according to the embodiment of the present invention, as viewed from the direction of arrow A in FIG. 2;

FIG. 4 is a side view of the two-axis driving device according to the embodiment of the present invention, as viewed from the direction of arrow B in FIG. 2;

FIG. 5 is a side view of the two-axis driving device according to the embodiment of the present invention as viewed from the direction of arrow C in FIG. 2;

FIG. 6 is a cross-sectional view showing a cross section DD in FIG. 2 in the two-axis driving device according to one embodiment of the present invention.

FIG. 7 is an exploded perspective view showing a Y-side lock mechanism inside the Y-side lock device.

FIG. 8 is a view showing the operation principle of the Y-side lock device.

FIG. 9 is a diagram showing a control block diagram of a two-axis driving device according to one embodiment of the present invention.

FIG. 10 is a schematic diagram illustrating a rotation direction of an endless belt and a servo motor of the two-axis driving device according to the embodiment of the present invention.

FIG. 11 is a flowchart showing an origin return operation for returning a Y table and an X table to respective origin positions.

FIG. 12 shows X indicating an origin P ₀ , a position P ₁ , and a position P ₂
This is the Y coordinate.

FIG. 13: X table is set at origin P ₀ → position P ₁ → position P
₉ is a flowchart illustrating an operation of moving the image to ₂ .

FIG. 14 is an external perspective view showing a conventional XY positioning device.

FIG. 15 is a plan view showing a conventional orthogonal robot.

16 is a cross-sectional view of the conventional orthogonal robot in FIG.

[Explanation of symbols]

 Reference Signs List 10 2-axis drive device 11 base 13 Y table 14 X table 15 Y side lock device 16 X side lock device 17 servo motor 18 drive side pulley 19 reduction mechanism 20 driven side pulley 21a base end pulley 21b base end pulley 22 tip Side pulley 23 Endless belt 24 Connecting member 49 Y-side plate-shaped member 51 Y-side lock mechanism 62 X-side plate-shaped member 64 X-side lock mechanism 73 Control device

Claims (7)

[Claims] A first movable body provided on the base so as to be capable of reciprocating in a linear direction; and a reciprocally movable body on the first movable body in a direction intersecting the moving direction of the first movable body. A second movable body provided; first locking means capable of relatively fixing and releasing the first movable body to the base; and second locking means capable of relatively fixing and releasing the second movable body to the first movable body. When,
A drive motor provided on the base, a drive-side rotator provided on a movement axis of the first moving body, and rotatable in conjunction with the rotational drive of the drive motor; And a driven-side rotator rotatably provided on the moving axis of the first moving body at an interval, and rotatably provided at a base end portion in a direction intersecting the moving direction of the first moving body. A pair of base-end rotating bodies, a tip-side rotating body rotatably provided at a leading end portion in a direction intersecting a moving direction of the first moving body, and a driven-side rotating body that circulates around the driving-side rotating body. An endless flexible member that circulates around the distal end rotator via one base end rotator, and circulates around the drive side rotator via the other base end rotator; and A connecting member for connecting a flexible member and the second moving body, and the first locking means or the second locking means; And a position control means for controlling the positions of the first moving body and the second moving body by rotationally driving the drive motor. Drive. 2. The method according to claim 1, wherein the position control unit sets the second lock unit to a fixed side, sets the first lock unit to an open side, and drives the drive motor to rotate. 2. The two-axis drive device according to claim 1, wherein control is performed such that the second lock unit is set to an open side on a fixed side, and a second operation state in which the drive motor is rotationally driven is selected. 3. 3. A pair of first locking means provided on the first moving body and standing upright at a constant interval on the base along a movement axis of the first moving body. A first locking mechanism capable of holding the first plate-like member from inside and outside; and the second locking means is provided on the second moving body and extends along a moving axis of the second moving body. 2. The apparatus according to claim 1, further comprising a second lock mechanism capable of holding a pair of second plate-like members erected in parallel at a predetermined interval on the first movable body from inside and outside. 3. The two-axis drive device according to 2. 4. A first lock mechanism of the first lock means and a second lock mechanism of the second lock means, respectively, a vertically open support member and a movable member inside the support member. A lock body having an insertion hole formed therein, a locking portion provided at an upper edge of the lock body and locked to the support, and an inclined surface formed upright at a lower end of the lock body and formed inside the distal end portion. A pair of lock portions, a cylinder fixedly mounted on the lock body, a connecting member fixed at one end to a piston in the cylinder and the other end disposed in the insertion hole. A press-fitting member provided at the other end of the member and having an inclined surface formed on a side surface along the inclined surface of the lock portion. In the first lock means, the inclined surface of the lock portion and the press-fit member are provided. The first plate-shaped member is disposed between the first plate-shaped member and an inclined surface. 4. The device according to claim 3, wherein in the second locking means, the second plate-shaped member is disposed between the inclined surface of the lock portion and the inclined surface of the press-fitting member. Shaft drive. 5. The device according to claim 1, wherein a speed reduction means for reducing a rotation speed of the drive motor is provided between the drive motor and the drive-side rotating body. Shaft drive. 6. The two-axis drive device according to claim 1, wherein the drive motor is a drive motor having a positioning control function. 7. The two-axis drive device according to claim 1, wherein the intersecting directions are orthogonal directions.