JP2002275594A - Fe-Co ALLOY PLATE AND METHOD OF MANUFACTURING FOR THE SAME - Google Patents
Fe-Co ALLOY PLATE AND METHOD OF MANUFACTURING FOR THE SAMEInfo
- Publication number
- JP2002275594A JP2002275594A JP2001078797A JP2001078797A JP2002275594A JP 2002275594 A JP2002275594 A JP 2002275594A JP 2001078797 A JP2001078797 A JP 2001078797A JP 2001078797 A JP2001078797 A JP 2001078797A JP 2002275594 A JP2002275594 A JP 2002275594A
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- Japan
- Prior art keywords
- alloy
- layer
- metal plate
- plate
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 70
- 239000000956 alloy Substances 0.000 title claims abstract description 70
- 229910017061 Fe Co Inorganic materials 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 229910052742 iron Inorganic materials 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 12
- 238000009792 diffusion process Methods 0.000 claims abstract description 9
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 7
- 229910052796 boron Inorganic materials 0.000 claims abstract description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 7
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 7
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 21
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 238000007733 ion plating Methods 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 238000007613 slurry method Methods 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 37
- 239000010410 layer Substances 0.000 description 30
- 239000002344 surface layer Substances 0.000 description 10
- 230000004907 flux Effects 0.000 description 8
- 229910000531 Co alloy Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 229910020598 Co Fe Inorganic materials 0.000 description 3
- 229910002519 Co-Fe Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、Fe-Co合金板及びF
e-Co合金板の製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe--Co alloy
The present invention relates to a method for manufacturing an e-Co alloy plate.
【０００２】[0002]
【従来の技術】実質的にFeとCoでなる金属(以下Fe-Co系
合金と記す)は、あらゆる金属系磁性材料の中で最高の
飽和磁束密度を有する軟磁性材料として知られており、
ドットプリンタのヘッド等に使用されている他、さらに
高性能モータのコアや磁気ヨーク等への応用も期待され
ている。更に、最近では種々の電子機器が使われるよう
になり、その電磁環境が問題となってきている。卑近な
例では携帯電話の電波による医療機器の誤作動等が社会
問題となってきている。また、現在開発中であるリニア
モーターカーにおいても、車体を浮上させる際に必要な
強力な磁場を出来る限り、遮断することが求められてい
る。このように不要な電磁波の遮断を行うためのシール
ド材としてもFe-Co系合金は非常に期待されている。2. Description of the Related Art Metals substantially composed of Fe and Co (hereinafter referred to as Fe-Co alloys) are known as soft magnetic materials having the highest saturation magnetic flux density among all metallic magnetic materials.
In addition to being used in dot printer heads and the like, applications to cores and magnetic yokes of high-performance motors are also expected. Furthermore, recently, various electronic devices have been used, and their electromagnetic environment has become a problem. In common cases, malfunctions of medical equipment due to radio waves of mobile phones have become a social problem. Further, even in the linear motor car currently under development, it is required that the strong magnetic field necessary for levitating the vehicle body be cut off as much as possible. Fe-Co based alloys are also highly expected as a shielding material for blocking unnecessary electromagnetic waves.
【０００３】しかし、このFe-Co系合金は溶製法で製造
する場合、400〜800℃の間でFe,Coの規則化が進み、非
常に脆くなるといった欠点を有していることが知られて
いる。この冷間加工性改善のため、Fe-Co系合金は従来
からVを添加し熱間、冷間の加工性の改善を図ると共
に、さらに冷間加工性改善のため、規則化温度以上（73
0℃以上）の温度域、通常は900〜1000℃の間で保持し、
規則化した相を一旦、オーステナイト単相域に固溶さ
せ、その後規則化を生じさせない程度の急速冷却を施
し、冷間加工用素材を得ていた。このため十分な冷却速
度を得るための形状的制約、重量制限が加わり、生産性
が非常に悪いといった欠点があり、また、熱間加工後、
熱処理を施すまでは極めて脆い状態であることから材料
の取り扱いに制約が加わることが多く、品質安定性にも
問題が有った。[0003] However, it is known that this Fe-Co alloy has a drawback that when it is produced by a melting method, the ordering of Fe and Co progresses between 400 and 800 ° C, and the alloy becomes very brittle. ing. In order to improve the cold workability, Fe-Co based alloys have been conventionally added with V to improve the hot and cold workability, and to further improve the cold workability, the ordering temperature or higher (73
0 ° C or higher), usually kept between 900 and 1000 ° C,
The ordered phase was once dissolved in the austenite single phase region and then rapidly cooled to such an extent that no ordering occurred, thereby obtaining a material for cold working. For this reason, there is a drawback that the shape restriction and the weight limit to obtain a sufficient cooling rate are added, and the productivity is extremely poor.
Until heat treatment is performed, the material is extremely brittle, so that handling of the material is often restricted, and there is also a problem in quality stability.
【０００４】また、このFe-Co系合金の製造方法には、
上述したように溶製材を圧延して帯材や板材とする方法
の他に、単純に合金化し、薄膜形成する方法として、例
えば特開平6-267722号に記載されるように、Feの蒸着層
と、Coの蒸着層をそれぞれ形成した後、拡散処理してFe
-Co合金を製造する方法も提案されている。[0004] Further, the method for producing this Fe-Co alloy includes the following:
In addition to the method of rolling the ingot material into a strip material or a plate material as described above, as a method of simply alloying and forming a thin film, for example, as described in JP-A-6-267722, a Fe vapor deposition layer After forming a Co vapor deposition layer, respectively, diffusion treatment
A method for producing a -Co alloy has also been proposed.
【０００５】[0005]
【発明が解決しようとする課題】上述のように溶製材を
圧延したFe-Co系合金の軟質磁性材料は、Fe,Coの規則化
により軟磁気特性の向上が図られる一方で、この規則化
が冷間加工性を阻害する要因となっている。また、特開
平6-267722号に記載されたFe-Coの合金は、純Feと純Co
の膜をスパッタリング法で二層膜を形成し、膜同士を熱
処理で相互拡散するもので、板材や、帯材の製造方法に
ついては、全く考慮されていないものである。本発明の
目的は、Fe-Co系合金の製造法において問題となってい
たFe,Coの規則化による脆化の問題を解決した安定生産
できる新規な製造方法によるFe-Co合金板とその製造方
法を提供することである。As described above, the soft magnetic material of the Fe-Co alloy obtained by rolling the ingot as described above can improve the soft magnetic characteristics by ordering Fe and Co. Is a factor that impairs cold workability. Further, an alloy of Fe-Co described in JP-A-6-267722 is pure Fe and pure Co.
Is formed into a two-layer film by a sputtering method, and the films are mutually diffused by a heat treatment. A method of manufacturing a plate material or a band material is not considered at all. An object of the present invention is to provide an Fe-Co alloy sheet by a novel production method capable of stably producing by solving the problem of embrittlement due to ordering of Fe and Co, which has been a problem in the production method of Fe-Co alloys, and its production. Is to provide a way.
【０００６】[0006]
【課題を解決するための手段】本発明者は、Fe-Co合金
の規則化に関する問題を検討し、表層に脆い規則化相と
中心部に靭性を有する相の二重構造を有する一体物の構
成を採用することで高磁束密度を有する大きな板の製造
を可能にすることを見いだし本発明に到達した。即ち本
発明は、実質的にFeでなる金属板の表裏面側の何れか片
側若しくは両方側に、CoとFeとの合金層が形成されてい
るFe-Co合金板である。Means for Solving the Problems The present inventor has studied the problems related to the ordering of Fe-Co alloys, and has found that a monolith having a double structure of a brittle ordered phase in the surface layer and a tough phase in the center is obtained. The present inventors have found that adoption of the configuration enables production of a large plate having a high magnetic flux density, and arrived at the present invention. That is, the present invention is an Fe—Co alloy plate in which an alloy layer of Co and Fe is formed on one or both of the front and back surfaces of a metal plate substantially made of Fe.
【０００７】また本発明は、実質的にFeでなる金属板の
表裏面側の何れか片側若しくは両方側に、CoとFeとの合
金層が形成され、該合金層にはV、Si、Al、Zr、B、Mo、
Crの何れか一種または二種以上の元素を質量%で0.01%〜
5.0%含有するFe-Co合金板である。更に本発明は、実質
的にFeとCoとを主成分とする金属板の断面をエックス線
分析装置で分析した時、前記金属板の表面側と、金属板
のt/2部でCoの含有量が異なるFe-Co合金板であって、前
記金属板の表面側のCo含有量が、t/2部のCo含有量より
質量%で10%以上多いFe-Co合金板である。Further, according to the present invention, an alloy layer of Co and Fe is formed on one or both of the front and back surfaces of a metal plate substantially made of Fe, and the alloy layer includes V, Si, Al , Zr, B, Mo,
Any one or two or more elements of Cr by 0.01% by mass%
This is a Fe-Co alloy plate containing 5.0%. Further, according to the present invention, when a cross section of a metal plate substantially containing Fe and Co as a main component is analyzed by an X-ray analyzer, the content of Co on the surface side of the metal plate and at t / 2 part of the metal plate. Is a Fe-Co alloy plate, wherein the Co content on the surface side of the metal plate is 10% or more by mass% or more than the Co content of t / 2 part.
【０００８】また本発明は、実質的にFeでなる金属板の
表裏面側の何れか片側若しくは両方側に、物理蒸着法に
てCo層またはCoに(V、Si、Al、Zr、B、Mo、Cr)から選ばれる一
種以上の元素を質量%で0.01〜5.0%を含有するCoを主成
分とする層を形成した後、拡散処理を行いCoとFeの合金
層を形成するFe-Co合金板の製造方法である。好ましく
は、上述の物理蒸着法は、真空蒸着法、スパッタリング
法、イオンプレーティング、プラズマ蒸着法、メッキ
法、粉末塗布法及びスラリー法の何れかによるものであ
るFe-Co合金板の製造方法であり、上述の実質的にFeで
なる金属板は、圧延された帯材であるFe-Co合金板の製
造方法である。Further, the present invention provides a method of forming a Co layer or Co on one or both of the front and back surfaces of a metal plate substantially made of Fe by physical vapor deposition (V, Si, Al, Zr, B, After forming a layer containing Co as a main component containing 0.01 to 5.0% by mass of one or more elements selected from Mo and Cr), a diffusion process is performed to form an alloy layer of Co and Fe. This is a method for manufacturing an alloy plate. Preferably, the physical vapor deposition method described above is a method for producing an Fe-Co alloy plate, which is based on any one of a vacuum deposition method, a sputtering method, an ion plating, a plasma deposition method, a plating method, a powder coating method and a slurry method. The metal plate substantially made of Fe described above is a method for producing a rolled strip of Fe—Co alloy plate.
【０００９】[0009]
【発明の実施の形態】上述したように、本発明の重要な
特徴は金属材料中の表裏面側の片側若しくは両方側に高
磁束密度を有するFeとCoの合金化した層が存在すること
である。本発明のFe-Co合金板においては、金属材料中
の表層部に高磁束密度を有するFeとCoとが1:1の割合で
合金化した相が存在し、中心付近にはFeとCoの比率が表
層と同じか、若しくはCoの方の割合が低くなったFe-Co
合金となるか、若しくは実質的にFeの層が存在するよう
な構成を有することができる。このような構成をとるこ
とは、脆い規則化相の生成を避けてFe-Co合金板の製造
が可能となり、従来よりも表面積の大きな板を製造でき
る可能性がある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As described above, an important feature of the present invention is that an alloyed layer of Fe and Co having a high magnetic flux density exists on one or both sides of a metal material. is there. In the Fe-Co alloy plate of the present invention, a phase in which Fe and Co having a high magnetic flux density are alloyed at a ratio of 1: 1 exists in the surface layer portion of the metal material, and Fe and Co of Fe and Co exist near the center. Fe-Co with the same ratio as the surface layer or a lower ratio of Co
It can be alloyed or have a configuration such that there is a substantially Fe layer. With such a configuration, it is possible to manufacture a Fe—Co alloy plate while avoiding the formation of a brittle ordered phase, and it may be possible to manufacture a plate having a larger surface area than before.
【００１０】ここで本発明の具体的な限定用件を述べ
る。Fe-Coの規則相を層として形成することは、高磁束
密度を得るために必要であり、これを材料表面におおよ
そ１:１の割合で形成することが、最も磁束密度を高め
ることになるが、Feに対するCoの割合は表層付近で質量
%にて27%〜55%となるような合金層が形成されれば優れ
た高磁束密度を達成可能である。望ましくは50%であ
る。また、上述のFeに対するCoの割合が表層付近で質量
%にて27%〜55%となる部分(層)の厚みは、全板厚に対し
て1%以上あれば良い。Here, specific limiting requirements of the present invention will be described. Forming a Fe-Co ordered phase as a layer is necessary to obtain a high magnetic flux density, and forming it on the material surface at a ratio of about 1: 1 will increase the magnetic flux density the most. However, the ratio of Co to Fe is
If an alloy layer is formed in which the percentage is 27% to 55%, an excellent high magnetic flux density can be achieved. Desirably, it is 50%. In addition, the above-mentioned ratio of Co to Fe
The thickness of the portion (layer) that is 27% to 55% in% may be 1% or more with respect to the entire plate thickness.
【００１１】また、この合金層にV、Si、Al、Zr、B、Mo、Crの
一種以上の元素が質量%にて0.01%以上含有されることに
より、加工性の改善、及び電気抵抗の増加を図ることが
でき、これら元素は電気抵抗を増加させる作用があり、
中でもV,Mo,Crの元素は加工性をも向上させることがで
きる。なお、電気抵抗の増加は交流損失の低下につなが
り、モータのコア等として使用される場合に経済的に有
利になる。なお、過剰に含有すると磁気特性や加工性を
損なう場合があるので、その上限を質量%で5.0%とすれ
ば良い。本発明では、特に表層付近に高磁束密度を有す
るFe-Coの合金層を形成させることが出来たため、特に
高周波で駆動するモータ等での表面の損失が軽減され
る。The alloy layer contains at least 0.01% by mass of at least one element of V, Si, Al, Zr, B, Mo, and Cr to improve workability and improve electric resistance. These elements have the effect of increasing the electrical resistance,
Among them, V, Mo, and Cr elements can also improve workability. The increase in electric resistance leads to a reduction in AC loss, which is economically advantageous when used as a motor core or the like. If the content is excessive, the magnetic properties and workability may be impaired, so the upper limit may be set to 5.0% by mass%. In the present invention, the Fe-Co alloy layer having a high magnetic flux density can be formed particularly in the vicinity of the surface layer, so that the surface loss particularly in a motor driven at a high frequency can be reduced.
【００１２】次に、本発明では、上述したような金属材
料を得る方法として、先ず実質的にFeからなる金属板の
表裏面の何れか若しくは両方の面側に、例えばCoを物理
蒸着してCo層を形成した後、拡散処理する。本発明の物
理的蒸着法としては真空蒸着法、スパッタリング法、イ
オンプレーティング、プラズマ蒸着法、メッキ法、粉末
塗布法及びスラリー法のいずれでも良いが、近年の成膜
技術の高速化が著しい、真空蒸着法、スパッタリング
法、イオンプレーティング、プラズマ蒸着法を用いると
良い。Next, in the present invention, as a method for obtaining the above-described metal material, first, for example, Co is physically vapor-deposited on one or both of the front and back surfaces of a metal plate substantially made of Fe. After forming the Co layer, a diffusion process is performed. The physical vapor deposition method of the present invention may be any one of a vacuum vapor deposition method, a sputtering method, an ion plating, a plasma vapor deposition method, a plating method, a powder coating method and a slurry method. It is preferable to use a vacuum evaporation method, a sputtering method, an ion plating method, or a plasma evaporation method.
【００１３】そして、実質的にFeからなる板、或いは圧
延された帯状の金属条にCo、或いはCoとV、Si、Al、Zr、B、M
o、Crの一種以上の元素を堆積、積層、或いは侵入させ
て、堆積層或いは合金層を形成させる。この時の板の大
きさは物理蒸着を行うための装置の大きさに支配され、
Fe-Co合金の加工性の悪さには左右されない。従って、
所望の大きさの物理蒸着装置を準備すれば従来の製造方
法では不可能であった幅の広い板やコイル材の製造が可
能となる。なお、本発明で用いる実質的にFeからなる金
属板は、化学組成的には不可避的不純物や、磁性を損な
わない程度の微量添加元素を含んでいてもよく、連続的
に物理蒸着を行うのであれば、圧延された帯材を用いる
ことによって、より生産性を向上できる。[0013] Then, Co, or Co and V, Si, Al, Zr, B, M are added to a plate substantially made of Fe or a rolled strip-shaped metal strip.
o, one or more elements of Cr are deposited, laminated or penetrated to form a deposited layer or an alloy layer. The size of the plate at this time is governed by the size of the device for performing physical vapor deposition,
It does not depend on the poor workability of the Fe-Co alloy. Therefore,
If a physical vapor deposition device having a desired size is prepared, it becomes possible to manufacture a wide plate or a coil material, which was impossible with the conventional manufacturing method. The metal plate substantially composed of Fe used in the present invention may contain unavoidable impurities in chemical composition or may contain a small amount of additional element that does not impair the magnetism, and the physical vapor deposition is performed continuously. If so, productivity can be further improved by using the rolled strip.
【００１４】物理蒸着後、実質的にFeでなる金属板の中
心付近までFe-Co合金層を形成させるために熱処理によ
りFeとCoの拡散処理を行う。拡散処理の温度は、500〜1
250℃であればよく、加熱は真空炉、還元雰囲気炉或い
は不活性ガス中焼鈍炉中で行うと、材料の酸化を防止で
きる。好ましくは900〜1100℃である。この時、板厚の
中心付近までCo或いはCo合金を十分拡散させれば板全体
が均一な組成を有するFe-Co合金、或いはFe-Co-X合金が
得られる。また、拡散処理をコントロールすればFe-Co
合金板の表層付近がFe:Co＝1:1でFe-Co合金板の中心付
近が実質の純Feに近い成分を有することも可能であり、
傾斜成分を有したFe-Co合金板が得られる。この傾斜成
分を有する合金板は、表層付近の加工性が非常に悪い高
Co-Fe合金層を、中心付近の低Co-Fe合金層、或いは事実
上の純Fe層が支える形となるため、圧延しても割れたり
することが無い。従って、従来の製造方法では不可能で
あった幅の広い、Fe-Co合金の圧延板を得ることが可能
である。この時に、この効果をより顕著にするには、表
面側のCoが中心付近(t/2部)のCoより、質量%で10%以上
高ければ良い。After the physical vapor deposition, a diffusion treatment of Fe and Co is performed by a heat treatment in order to form a Fe—Co alloy layer almost to the center of the metal plate substantially made of Fe. The temperature of the diffusion process is 500 ~ 1
The temperature may be 250 ° C. If the heating is performed in a vacuum furnace, a reducing atmosphere furnace or an annealing furnace in an inert gas, the oxidation of the material can be prevented. Preferably it is 900-1100 degreeC. At this time, if Co or a Co alloy is sufficiently diffused to the vicinity of the center of the plate thickness, a Fe-Co alloy or a Fe-Co-X alloy having a uniform composition over the entire plate can be obtained. Also, if the diffusion process is controlled, Fe-Co
It is also possible that the vicinity of the surface layer of the alloy plate is Fe: Co = 1: 1, and the vicinity of the center of the Fe-Co alloy plate has a component close to substantially pure Fe,
An Fe-Co alloy plate having a gradient component is obtained. The alloy plate having this gradient component has very poor workability near the surface layer.
Since the Co-Fe alloy layer is supported by a low Co-Fe alloy layer near the center or a virtually pure Fe layer, the Co-Fe alloy layer does not crack even when rolled. Therefore, it is possible to obtain a wide rolled Fe—Co alloy plate that cannot be obtained by the conventional manufacturing method. At this time, in order to make this effect more remarkable, it is only necessary that Co on the surface side is higher by 10% or more by mass% than Co near the center (t / 2 part).
【００１５】[0015]
【実施例】以下に実施例として、更に詳しく本発明を説
明する。いわゆる電磁軟鉄(電軟)の板(板厚0.2mm、幅50
0mm、長さ500mm)表面を清浄化するため脱脂等の洗浄を
行ったものを用意した。それをスパッタリング装置にセ
ットし、質量%で99.0％以上の純度を有するCo材ターゲ
ットを用いて、スパッタリングを行い、電軟片側の表面
に膜厚20μｍのCo層を形成した。その後、1000℃の真空
炉にて3時間の拡散処理を行い、Fe-Co合金板を得た。そ
のFe-Co合金板からエックス線分析用の試験片を採取
し、表層から中心(t/2部)までエッチングで合金層を除
去しながら、蛍光エックス線装置と電子線マイクロアナ
ライザーでFeとCoの割合を調査した。The present invention will be described below in more detail by way of examples. A so-called electromagnetic soft iron (electrosoft) plate (plate thickness 0.2 mm, width 50
(0 mm, length 500 mm) A thing which had been subjected to cleaning such as degreasing to clean the surface was prepared. This was set in a sputtering apparatus, and sputtering was performed using a Co material target having a purity of 99.0% or more by mass to form a Co layer having a thickness of 20 μm on the surface on the side of the electrode. Thereafter, diffusion treatment was performed in a vacuum furnace at 1000 ° C. for 3 hours to obtain an Fe—Co alloy plate. A test piece for X-ray analysis was taken from the Fe-Co alloy plate, and while removing the alloy layer by etching from the surface layer to the center (t / 2 part), the ratio of Fe and Co was measured with a fluorescent X-ray device and an electron beam microanalyzer. investigated.
【００１６】その結果、表層から約70μｍでは質量%でC
o:45〜49%のFe-Co合金層が認められ、中心(t/2部)ではC
oが質量%で5%、中心から約10μｍの範囲ではCoは質量%
で10%まで低下していた。この材料からJISの磁性リング
(φ45mm×φ33mm)を切出し、一次コイル、二次コイルを
巻いて磁気特性を測定した。その結果B800で2.2(T)、H
c:81A/mと従来製法材と同等の特性が得られた。As a result, at about 70 μm from the surface layer, C
o: 45-49% of Fe-Co alloy layer is observed, and C (t / 2 part)
o is 5% by mass%, Co is mass% in the range of about 10 μm from the center
At 10%. JIS magnetic ring from this material
(φ45mm × φ33mm) was cut out, and a primary coil and a secondary coil were wound thereon to measure magnetic properties. As a result, 2.2 (T), H at B800
c: 81 A / m, a characteristic equivalent to that of the conventional manufacturing method material was obtained.
【００１７】また、ターゲットとしてVを4%含有するCo
合金を使用して、上記条件と同様にFe-Co合金板を作成
した。この時には、軟磁性は上記のFe-Co合金時と同等
であったが、交流損失が鉄損(W15/60)2.8w/kgから1.9w/
kgと著しく低下することがわかった。これも抵抗値増大
に伴う効果である。このFe-Co合金板からエックス線分
析用の試験片を採取し、表層から中心(t/2部)までエッ
チングで合金層を除去しながら、蛍光Ｘ線装置と電子線
マイクロアナライザーでFeとCoの割合を調査した。その
結果、表層から約70μｍでは質量%でCo:45〜49%のFe-Co
合金層にVが2〜3%含有する合金層が認められ、中心(t/2
部)ではCoが質量%で5%、中心から約10μｍの範囲ではCo
は質量%で10%まで低下していた。Further, as a target, Co containing 4% of V is used.
Using the alloy, a Fe—Co alloy plate was prepared in the same manner as described above. At this time, although soft was comparable during the above Fe-Co alloy, AC loss iron loss (W 15 1.9 W from /60)2.8W/kg /
It was found to be remarkably reduced to kg. This is also an effect accompanying the increase in the resistance value. A test piece for X-ray analysis was collected from this Fe-Co alloy plate, and while removing the alloy layer by etching from the surface layer to the center (t / 2 part), the X-ray fluorescence and electron beam microanalyzer were used to remove Fe and Co. The proportion was investigated. As a result, at about 70 μm from the surface layer, Co: 45-49% Fe-Co
An alloy layer containing 2 to 3% of V was observed in the alloy layer, and the center (t / 2
Part), Co is 5% by mass%, and Co
Was reduced to 10% by mass%.
【００１８】この二つの材料を冷間圧延して、トータル
0.1mmの厚さの板の製造を行った。その結果、これまで
は割れが多発し、また硬さも上昇して非常に圧延が困難
であった0.1mmへの圧延が容易に行えた。この圧延材
に、水素雰囲気中で850℃×3時間の磁性焼鈍を行った。
この厚さ0.1mm材料の磁性焼鈍後の磁気特性はBs:2.8
(T)、Hc:20(A/m)で、非常に良い値を示していた。これ
を表面の絶縁処理後積層させてモータのコアとして使用
した場合、従来の珪素鋼に比べて約１割の特性向上が期
待される。なお、今回の実施例ではスパッタリング装置
に挿入できる材料の大きさに制限があって、上述の板厚
0.2mm、幅500mm、長さ500mmの大きさが限界であった
が、実質的にFeでなる帯材がコイルとして挿入可能な物
理蒸着装置を用いれば、本実施例と同様に優れた磁気特
性を有するFe-Co合金板の製造が可能である。The two materials are cold-rolled to obtain a total
A plate having a thickness of 0.1 mm was manufactured. As a result, it was easy to roll to 0.1 mm, which had been very difficult to roll because cracks occurred frequently and the hardness increased. This rolled material was subjected to magnetic annealing at 850 ° C. for 3 hours in a hydrogen atmosphere.
The magnetic properties of this 0.1 mm thick material after magnetic annealing are Bs: 2.8
(T) and Hc: 20 (A / m) showed very good values. When this is used as a motor core by laminating it after insulating the surface, it is expected that the characteristics will be improved by about 10% as compared with conventional silicon steel. In this example, the size of the material that can be inserted into the sputtering apparatus is limited, and
Although the size of 0.2 mm, the width of 500 mm, and the length of 500 mm were the limits, if a physical vapor deposition device capable of inserting a strip material substantially made of Fe as a coil was used, excellent magnetic properties were obtained as in the present example. It is possible to manufacture an Fe-Co alloy plate having the following.
【００１９】[0019]
【発明の効果】本発明によればFe-Co系合金の製造法に
おいて問題となっていたFe,Coの規則化による脆化の問
題を解決可能であるため、Fe-Co合金板が安定生産でき
る。According to the present invention, the problem of embrittlement due to the regularization of Fe and Co, which has been a problem in the production method of Fe-Co alloys, can be solved. it can.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐々木 計 島根県安来市安来町2107番地２ 日立金属 株式会社冶金研究所内 Ｆターム(参考） 4K029 AA02 AA25 BA06 BA24 BA26 BC06 BD03 CA01 CA03 CA05 DC03 DC04 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor, Kei Sasaki 2107-2, Yasugi-cho, Yasugi-shi, Shimane Prefecture F-term in the Metallurgical Research Laboratory, Hitachi Metals, Ltd. (Reference) 4K029 AA02 AA25 BA06 BA24 BA26 BC06 BD03 CA01 CA03 CA05 DC03 DC04
Claims (6)
れか片側若しくは両方側に、CoとFeとの合金層が形成さ
れていることを特徴とするFe-Co合金板。1. An Fe—Co alloy plate, wherein an alloy layer of Co and Fe is formed on one or both of the front and back surfaces of a metal plate substantially made of Fe.
れか片側若しくは両方側に、CoとFeとの合金層が形成さ
れ、該合金層にはV、Si、Al、Zr、B、Mo、Crの何れか一
種または二種以上の元素を質量%で0.01%〜5.0%含有する
ことを特徴とするFe-Co合金板。2. An alloy layer of Co and Fe is formed on one or both of the front and back sides of a metal plate substantially made of Fe, and the alloy layer includes V, Si, Al, Zr, A Fe-Co alloy sheet containing 0.01% to 5.0% by mass of one or more of B, Mo, and Cr.
の断面をエックス線分析装置で分析した時、前記金属板
の表面側と、金属板のt/2部でCoの含有量が異なるFe-Co
合金板であって、前記金属板の表面側のCo含有量が、t/
2部のCo含有量より質量%で10%以上多いことを特徴とす
るFe-Co合金板。3. When the cross section of a metal plate substantially containing Fe and Co as a main component is analyzed by an X-ray analyzer, the content of Co in the surface side of the metal plate and the t / 2 part of the metal plate is determined. But different Fe-Co
An alloy plate, wherein the Co content on the surface side of the metal plate is t /
An Fe-Co alloy sheet characterized in that the content by mass is 10% or more than the Co content of 2 parts.
れか片側若しくは両方側に、物理蒸着法にてCo層または
Coに(V、Si、Al、Zr、B、Mo、Cr)から選ばれる一種以上の元素
を質量%で0.01〜5.0%を含有するCoを主成分とする層を
形成した後、拡散処理を行いCoとFeとの合金層を形成す
ることを特徴とするFe-Co合金板の製造方法。4. A Co layer or a Co layer by physical vapor deposition on one or both of the front and back surfaces of a metal plate substantially made of Fe.
After forming a layer containing Co as a main component containing 0.01 to 5.0% by mass of one or more elements selected from (V, Si, Al, Zr, B, Mo, Cr) in Co, a diffusion process is performed. A method for producing an Fe-Co alloy sheet, comprising forming an alloy layer of Co and Fe.
ング法、イオンプレーティング、プラズマ蒸着法、メッ
キ法、粉末塗布法及びスラリー法の何れかによるもので
あることを特徴とする請求項４に記載のFe-Co合金板の
製造方法。5. The physical vapor deposition method according to claim 4, wherein the physical vapor deposition method is one of a vacuum deposition method, a sputtering method, an ion plating, a plasma deposition method, a plating method, a powder coating method, and a slurry method. The manufacturing method of the Fe-Co alloy plate described in the above.
帯材であることを特徴とする請求項４または５に記載の
Fe-Co合金板の製造方法。6. The metal plate substantially made of Fe is a rolled strip material according to claim 4.
Manufacturing method of Fe-Co alloy plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001078797A JP2002275594A (en) | 2001-03-19 | 2001-03-19 | Fe-Co ALLOY PLATE AND METHOD OF MANUFACTURING FOR THE SAME |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001078797A JP2002275594A (en) | 2001-03-19 | 2001-03-19 | Fe-Co ALLOY PLATE AND METHOD OF MANUFACTURING FOR THE SAME |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002275594A true JP2002275594A (en) | 2002-09-25 |
Family
ID=18935359
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001078797A Pending JP2002275594A (en) | 2001-03-19 | 2001-03-19 | Fe-Co ALLOY PLATE AND METHOD OF MANUFACTURING FOR THE SAME |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002275594A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7942985B2 (en) * | 2007-05-29 | 2011-05-17 | Sanyo Special Steel Co., Ltd. | Alloy for soft magnetic layer in perpendicular magnetic recording medium |
| CN110970189A (en) * | 2018-09-28 | 2020-04-07 | 苹果公司 | Soft Magnetic Alloys Optimized for Metal Injection Molding |
-
2001
- 2001-03-19 JP JP2001078797A patent/JP2002275594A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7942985B2 (en) * | 2007-05-29 | 2011-05-17 | Sanyo Special Steel Co., Ltd. | Alloy for soft magnetic layer in perpendicular magnetic recording medium |
| CN110970189A (en) * | 2018-09-28 | 2020-04-07 | 苹果公司 | Soft Magnetic Alloys Optimized for Metal Injection Molding |
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