JP2002267571A - Optical property inspection device - Google Patents

Abstract

[PROBLEMS] To inspect a plurality of optical characteristics efficiently without using a complicated mechanism. SOLUTION: A light source section 16 having a plurality of light source heads 16c for irradiating light to the device under test 100, and an inspection main body for inspecting optical characteristics of the device under test 100 by each light radiated by each light source head 16c. Part 11 and device under test 1
And a work transporting unit 15 for moving 00 to each of the inspection stages 11a to 11d. Multiple light source heads 16c
Irradiates multiple light with different optical conditions,
A plurality of optical characteristics can be efficiently inspected without using a complicated mechanism.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical characteristic inspecting apparatus for inspecting optical characteristics such as various defects on the surface of a display panel, a sheet or the like of a liquid crystal display device. The present invention relates to an optical characteristic inspection apparatus capable of inspecting a plurality of optical characteristics on a surface of a device under test by irradiating a plurality of lights having different optical conditions to the device under test.

[0002]

2. Description of the Related Art Various defects appearing on a surface of a device to be inspected having a uniform surface such as a display panel or a sheet can be detected by inspecting optical characteristics of the surface. Defects that appear on the surface include point defects and line defects that appear in relatively small parts, spot defects and unevenness defects that appear in relatively wide areas. When detecting these various defects, for example, a line defect can be detected by irradiating a small amount of light, and a point defect can be detected by irradiating a large amount of light. As described above, since the appropriate amount of light irradiation differs depending on the type of defect, when inspecting a plurality of defects in the device under test, the optical conditions of the light to be irradiated must be changed for each type of defect to be inspected. Need to change.

FIG. 8 is a schematic diagram showing a conventional optical characteristic inspection apparatus 1 for inspecting optical characteristics such as defects on the surface of an element to be inspected.

The optical characteristic inspection apparatus 1 includes a light source head 2 for irradiating a predetermined light on the surface of a device under test 100;
An inspection unit 3 is provided for placing the device under test 100 at a position irradiated with light from the light source head 2 and testing the optical characteristics of the device under test 100.

[0005] The light source head 2 inspects a plurality of types of defects such as point defects and line defects on the surface of the device 100 to be inspected.
The optical conditions are modified to be suitable for inspecting each defect. This optical condition is
For example, the size is changed by changing the size of the aperture of the irradiated light, the distance between the aperture and the imaging surface, and changing the amount of light emitted from the light source.

The inspection unit 3 is provided with detection means such as a sensor (not shown) for detecting each defect detected by light emitted from the light source head 2 under predetermined optical conditions. The inspection result detected by the above is displayed on the screen of the display device 4 connected to the inspection unit 3.

Hereinafter, the procedure will be described with reference to an example in which a defect on the surface of the device under test 100 is inspected using the optical characteristic inspection apparatus 1 having the above-described configuration.

First, the device under test 100 to be tested is placed at a predetermined position on the test section 3.

Next, the optical condition of light emitted from the light source head 2 is set to the type of defect to be inspected first, for example, an optical condition suitable for inspecting a point defect. Light is emitted from the light source unit 2 under the conditions, and the inspection result detected by the inspection means provided in the inspection unit 3 is transmitted to the display device 4 so that the first defect such as a point defect can be inspected. Determine the presence or absence.

Next, the optical condition of the light emitted from the light source head 2 is set to a type of defect to be inspected secondly, for example, an optical condition suitable for inspecting a line defect.
By the same operation as above, it is determined whether there is a second defect to be inspected such as a line defect.

By applying the above operation to the third and subsequent defect types to be inspected, a plurality of types of defects are inspected, and the presence or absence of various types of defects is determined from the inspection results.

Then, based on the results of the above-described determination of the presence / absence of defects, the quality of the device under test 100 is determined.

[0013]

When the optical characteristics such as a defect on the surface of the device under test 100 are inspected by using the optical characteristics inspection apparatus 1 described above, the following problems occur.

(1) When changing the optical conditions of the light emitted from the light source head 2, the light emitted from the light source head 2 can be controlled by directly controlling the light source provided in the light source head 2. A light amount, a wavelength, etc. of the light source head 2, an optical filter is inserted between the light source and the device under test 100 to be imaged, and the light amount of the light from the light source head 2 is changed by switching the optical filter. There are a method of changing the wavelength and the like, and a method of changing the angle at which one or both of the light source head 2 and the device under test 100 are inclined to irradiate the surface of the device under test 100 with light emitted from the light source head 2.

However, in the method of changing the light emitted from the light source head 2 by directly controlling the light source of the light source head, it is necessary to control the light source with high accuracy and without hindering reproducibility. There is a problem that the system for the control becomes expensive. Further, if the amount of light emitted from the light source is frequently controlled, there is a problem that the life of the light source is significantly shortened.

An optical filter is inserted between the light source of the light source head 2 and the device under test 100 to be imaged.
In the method of changing the light emitted from the light source head 2 by switching the optical filters, the mechanism for switching the optical filters is complicated, and the time required for the inspection due to the time required for switching the optical filters. There is a problem that it takes a long time.

Further, the light source head 2 and the device under test 10
In the method of changing the angle at which light emitted from the light source head 2 irradiates the surface of the device under test 100 by tilting one or both of the light source head 2 and the device under test 10,
There is a problem that a mechanism for inclining 0 becomes complicated.

(2) As still another method for changing the optical conditions of the light emitted from the light source head 2, the size and position of the stop of the light emitted from the light source can be inspected with the light source head 2. Although there is a method of adjusting by an adjusting mechanism provided between the unit 3 and the unit 3, there is a problem that the mechanism for adjusting the size and position of the diaphragm becomes large-scale, and a problem that the time required for the inspection becomes long. There is.

The present invention has been made in view of the above problems, and has as its object to provide an optical characteristic inspection apparatus capable of efficiently inspecting a plurality of optical characteristics without using a complicated mechanism. And

[0020]

In order to solve the above-mentioned problems, an optical characteristic inspection apparatus according to the present invention comprises a plurality of light generating means each of which is irradiated with light, and a device to be inspected whose optical characteristics are inspected. Moving means for sequentially moving light from each light generating means to a position to be irradiated with light, and inspecting means for inspecting optical characteristics of the inspected element based on the light emitted from each light generating means to the inspected element. And characterized in that:

In the present invention, it is preferable that each of the plurality of light generating means irradiates light having different optical conditions.

In the above-mentioned present invention, it is preferable that the light emitted from each of the light generating means has at least one light quantity different from each other so that the optical conditions are different.

In the present invention, it is preferable that the light emitted from each of the light generating means has at least one wavelength different from each other so that the optical conditions are different.

In the above-mentioned present invention, the light emitted from each of the light generating means may have different optical conditions because at least one angle of the light emitted to the device under test is different. preferable.

In the above-mentioned present invention, the inspection means comprises:
It is preferable that the light generating means is provided for each of the light generating means.

In the above-mentioned present invention, it is preferable that the optical characteristics of the devices to be inspected are simultaneously inspected by the respective light generating means.

In the present invention, it is preferable that storage means for storing the optical characteristics of the device under test inspected by the inspection means is provided.

In the above invention, the moving means is
It is preferable that the device under test is moved so that light from the light generating unit is irradiated on the center of a light receiving portion of the device under test.

In the above invention, it is preferable that the devices to be inspected are classified by function rank of the devices to be inspected based on a result of the inspection by the inspection means.

In the present invention, it is preferable that the device under test is a liquid crystal display panel.

In the present invention, the device to be inspected is preferably a solid-state imaging device.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an optical characteristic inspection apparatus according to the present invention will be described with reference to the drawings.

The optical characteristic inspection apparatus of the present invention inspects optical characteristics, for example, a point defect or a spot defect in a uniform screen by using a liquid crystal display panel or the like as an element to be inspected by computer processing of an image signal. Used to

The devices to be inspected applied to this apparatus include, in addition to the liquid crystal display panel described above, various sheet materials,
The present invention can also be applied to inspect a solid-state imaging device such as a film material.

FIG. 1 is a perspective view schematically showing an optical characteristic inspection apparatus 10 according to the present embodiment.

The optical characteristic inspection apparatus 10 includes four inspection stages 1 for detecting a plurality of different types of defects on the surface of an element 100 to be inspected such as a liquid crystal display panel.
Inspection body 11 having 1a, 11b, 11c, 11d
And a plurality of devices under test 100 before testing optical characteristics
Pre-inspection work set unit 1 that arranges and stores in a predetermined state
2 and a plurality of devices under test 1 after optical characteristics have been tested
00 and a post-inspection work set unit 13 for arranging and storing 00 in a predetermined state. The pre-inspection work set section 12 and the post-inspection work set section 13 are arranged with the inspection main body section 11 interposed therebetween.

Each of the inspection stages 11 a to 11 of the inspection main body 11
11d are arranged in a line at equal intervals in the order from the pre-inspection work set unit 12 to the post-inspection work set unit 13.

Pre-inspection work set section 12, inspection main body section 1
1. On the rear part of the post-inspection work set unit 13, the device under test 100 stored in the pre-inspection work set unit 12, and the device under test mounted on each of the inspection stages 11a to 11d of the inspection main body unit 11, respectively. 100 is provided over the length from the pre-inspection work set part 12 to the post-inspection work set part 13, each of which transports 100 in a fixed direction from the pre-inspection work set part 12 to the post-inspection work set part 13. ing.

In addition, a computer is built in the rear part of the inspection main body 11, and performs image processing based on the inspection result inspected by the inspection main body 11, to determine the optical characteristics of each device under test 100. A characteristic determination unit 14 is provided.

Further, a light source section 16 for irradiating each of the inspection stages 11a to 11d with light under predetermined optical conditions is provided above the inspection main body section 11.

In the inspection main body 11, a series of operations of the light source section 16 and the work transfer section 15 are controlled, and the inspection results of the inspection stages 11a to 11d are stored. In addition, a control unit 17 that stores the work after sorting into the work set unit 13 is built in.

Each of the inspection stages 11a to 11c of the inspection main body 11
Reference numerals 11d denote mounting plates 111a to 111d for mounting the device under test 100 and the mounting plates 111a to 111d, respectively.
Supports 112a to 11d for supporting 111d at a predetermined height
2d. These support portions 112a to 112d
Is adapted to change the height and angle of each of the mounting plates 111a to 111d from the inspection main body 11, whereby the optical conditions of the light emitted from the light source 16 are changed. .

On the inspection stages 11a to 11d, the device under test 100 is placed on each of the inspection stages 11a to 1d.
1d are fixed at a predetermined position, and a predetermined voltage is applied to the fixed display panel, which is the device under test 100, to drive the device under test 100 into a socket 113a-1.
13d is provided for each of the inspection stages 11a to 11d. In addition, the sockets 113a to 113a
Wiring (not shown) for applying a predetermined voltage to 13d
A wiring (not shown) for transmitting an electric signal obtained by irradiating light from the light source unit 16 is provided on each support unit 11.
It is drawn out to the lower surface of the inspection main body 11 through 2a to 112d.

The pre-inspection work set section 12 and the post-inspection work set section 13 have trays 12a and 12b for storing the element under test 100 on their upper surfaces, respectively. Device under test 100
Are arranged and stored in a predetermined order.

The pre-inspection work set section 12 and the post-inspection work set section 13 have trays 7a and 7b for storing the device under test 100, as described above, and sleep and carrier tapes. Then, the device under test 100 may be stored in this.

The light source section 16 has a light source storage section 16a having a length extending over the entire inspection stages 11a to 11d of the inspection main body section 11. FIG. 2 is an enlarged sectional view showing a schematic configuration of a part of one light source head 16c in the light source unit 16. As shown in FIG.
Inside a, one white light source 16b having a length extending over each of the inspection stages 11a to 11d (see FIG. 2).
Is provided. Further, a plurality of light source heads 16c for irradiating light with different optical conditions are provided to face the inspection stages 11a to 11d of the inspection main body 11, respectively.

Each inspection stage 1 is attached to the light source head 16c.
A cylindrical light-shielding cover 16g for guiding the device under test 100 mounted on each of the devices 1a to 11d is provided.
Prevents light from entering g. 16g each shading cover
Inside the white light source 1 housed in the light source housing 16a.
A plurality of optical filters 16d for modulating the light emitted from 6b to a desired light amount or wavelength, a diaphragm 16e for controlling the incident angle of the light incident on the device under test 100, and the like are moved in the light irradiation direction by the holder 16f. It is supported in turn along. The holder 16f has a structure in which the optical filter 16d and the like can be easily replaced so that the optical conditions from the white light source 16b can be easily changed. As the optical filter 16d attached to the holder 16f, a color temperature filter, an infrared cut filter, a light-shielding filter, or the like for changing optical conditions such as a light amount and a wavelength of light to be irradiated on the device under test 100 is used.

By changing the optical filter 16d for each of the inspection stages 11a to 11d, a plurality of types of light having different optical conditions such as a light amount and a wavelength are applied to each of the inspection stages 11a to 11d.

Further, by adjusting the inclination state of the mounting plates 111a to 111d of the inspection stages 11a to 11d with respect to the light source head 16c for each of the inspection stages 11a to 11d, each mounting stage of each of the inspection stages 11a to 11d is adjusted. The optical condition of each of the inspection stages 11a to 11d can also be changed by adjusting the angle of the light applied to the device under test 100 mounted on the plates 111a to 111d.

When the device under test 100 is to be inspected under an optical condition in which the amount of light differs for each of the inspection stages 11a to 11d, at least one or more light-shielding filters having different degrees of light-shielding are connected to each of the inspection stages 11a to 11d. By attaching each light source, the amount of light emitted from each light source head 16c can be made at least one or more different. Further, when inspecting the device under inspection 100 under optical conditions having different wavelengths for each of the inspection stages 11a to 11d, at least one of a red filter, a blue filter, a green filter, and the like is different. By attaching to the holder 16f of each light source head 16c, the wavelength of the light emitted from each light source head 16c can be made at least one or more different. Furthermore, when the angle of the light applied to the device under test 100 is to be tested under at least one or more different optical conditions for each of the test stages 11a to 11d, each of the test stages 11a to 11d is to be tested. 11d mounting plate 111a-
The angle of the light emitted from each of the light source heads 16c is at least set by adjusting the angles of the light emitted from the light source heads 16c by adjusting the angles of the irradiated light to 10 degrees, 20 degrees, and 30 degrees with respect to the light receiving surface of the device under test 100. It can be one or more different.

Further, the optical filter 16d of the light source head 16c, the aperture 16e, and the inspection stages 11a to 11d
By adjusting each of the support portions 112a to 112d, the inspection may be performed under optical conditions that combine changes in the light amounts and wavelengths of the inspection stages 11a to 11d. The optical condition may be changed by combining the angle, the wavelength and the angle of each of the inspection stages 11a to 11d, and further, all the optical conditions of the light amount and the wavelength and the angle of each of the inspection stages 11a to 11d are different. Is also good.

In the optical characteristic inspection apparatus 10 of the present embodiment, a single white light source 1 is used as a light source for emitting irradiation light.
6b is housed in a light source housing section 16a of the light source section 16, and an optical filter 16 capable of changing the optical condition of light emitted from the white light source 16b for each of the inspection stages 11a to 11d.
d, etc., the optical conditions such as the amount of light and wavelength of light to be irradiated to the device under test 100 are changed. However, a plurality of light sources are stored according to the set optical conditions. It is good also as a structure stored in the part 16a. Also,
Each mounting plate 111a-1 of each inspection stage 11a-11d
In addition to the change of the inclination state of 11d, the light source head 16c
The light applied to each of the inspection stages 11a to 11d may be inclined.
Both 1d and the light source head 16c may be inclined.

The work transport section 15 has a guide groove 15a extending in the horizontal direction formed on the front side, and the guide groove 15a is provided in each of the inspection stages 11 of the inspection main body 11a.
a plurality of transfer hands 18 having a length reaching a to 11d
a to 18f are movably attached along the guide grooves 15a, respectively. A mounting tool (not shown) for detachably mounting the device under test 100 is mounted on the distal end portion of each of the transport hands 18a to 18f. Each transfer hand 1
In each of 8a to 18f, the moving distance is determined along the guide groove 15a.

The transport hand 18a can be moved from the pre-inspection work set section 12 to a position just before the inspection stage 11a of the inspection main body section 11, and the element to be inspected stored in the tray 12a of the pre-inspection work set section 12 can be moved. 100 is taken out and transported to the inspection main body 11. Transfer hand 1
8b denotes an inspection stage 11a reached by the transport hand 18a.
Can be moved from just before to the inspection stage 11a, the device under test 100 mounted on the transport hand 18a conveyed to the position before the inspection stage 11a is taken out, and the device 100 to be inspected is inserted into the socket 113a of the test stage 11a. Attach.

The transfer hand 18c is connected to the inspection stage 11a.
The device to be inspected 100 mounted on the socket 113a of the inspection stage 11a is taken out from the upper side to the inspection stage 11b.
The device 100 to be inspected is mounted on the socket 113b of the inspection stage 11b. The transfer hand 18d is movable from above the inspection stage 11b to above the inspection stage 11c.
The device under test 100 mounted on 3b is taken out, transported to the test stage 11c, and the device 100 under test is mounted on the socket 113c of the test stage 11c.

The transfer hand 18e is connected to the inspection stage 11c.
The device to be inspected 100 mounted on the socket 113c of the inspection stage 11c is taken out from the upper side to the inspection stage 11d.
The device 100 to be inspected is mounted on the socket 113d of the inspection stage 11d. The transfer hand 18f is movable from the inspection stage 11d to above the work set section 13 after inspection, takes out the device under test 100 mounted on the socket 113d of the inspection stage 11d, and
After the inspection, the device under test 100 is transported to the work set unit 13. The device under test 100 is placed at a predetermined position of the work set section 13 after inspection based on the inspection result.
Is stored.

Next, the optical characteristic inspection measure 10 having the above-described configuration.
The method for inspecting the optical characteristics of the device under test 100 using the method described above will be described by taking as an example a case where a defect appearing on the surface of the device under test 100 is tested.

Each of the inspection stages 11 a to 11 of the inspection main body 11
As described above, the optical characteristics of the optical filter 16 d of the light source head 16 c and the stop 16
e, mounting plates 111a to 111d of each of inspection stages 11a to 11d
By appropriately changing the angle of 111d, light with optical conditions suitable for inspecting various defects can be obtained. For example, the optical condition of light for the device under test 100 on the inspection stage 11a is an optical condition suitable for inspecting a point defect, and the optical condition of light for the device under test 100 on the inspection stage 11b is Optical conditions suitable for inspecting line defects are used. Further, the inspection stages 11c and 1
Similarly, the light for the element 100 to be inspected on 1d is set to an optical condition suitable for inspecting another defect.
Also, the tray 12a of the pre-inspection work set unit 12 includes:
The devices under test 100 before inspection are arranged and stored in a predetermined order.

FIGS. 4 and 5 schematically show the flow of transport of the device under test 100 transported by the workpiece transport unit 15, and show the tray 12a of the work setting unit 12 before inspection.
The inspection target 100 stored in the inspection main body 11 is moved from the inspection stage 11a to the inspection stages 11b, 11c, 1
The devices 100 to be inspected that have been sequentially transported to the inspection stages 1d and whose optical characteristics have been inspected at the inspection stages 11a to 11d are stored in the tray 13b of the work set unit 13 after inspection.

FIGS. 3A to 3D show the device under test 100.
FIG. 4 is a schematic diagram illustrating a procedure for inspecting optical characteristics of the optical disk.

First, one of the devices 100 to be inspected stored in the tray 12a of the pre-inspection work setting section 12 is transferred to the inspection main body 11 by the transport hand 18a of the workpiece transport section 15.
After the transfer, the transfer hand 18b sets it in the socket 113a of the inspection stage 11a as shown in FIG. A voltage is applied to the display panel, which is the device under test 100 set in the socket 113a, to bring the device under test 100 into a driving state, and the device under test 100 in this state is subjected to a first optical condition, for example, a point. Light optimized for inspecting defects is emitted from the light source head 16c toward the surface of the device under test 100. Socket 113a
The mounting plate 111a of the inspection stage 11a in which the device under test 100 is set is adjusted, for example, so that the irradiated light hits the central portion of the device under test 100. The test result of the device under test 100 set in the socket 113a of the test stage 11a is expressed as an image signal by the test main unit 11
Is transmitted to the control unit 17 incorporated in the device and the characteristic determination unit 14 installed at the rear of the inspection main unit 11, and the characteristic determination unit 14 determines whether there is a defect on the surface of the device under test 100. The control unit 17 stores the inspection result.

Next, as shown in FIG. 3 (b), the device under test 100 mounted on the inspection stage 11a is transported to the inspection stage 11b by the transport hand 18c, and set on the socket 113b of the inspection stage 11b. . A voltage is applied to the display panel, which is the device under test 100 set in the socket 113b, to bring the device under test 100 into a driving state, and the device under test 100 in this state is subjected to a second optical condition, for example, a line. Light suitable for inspecting a defect is emitted from the light source head 16c toward the surface of the device under test 100. The test result of the device under test 100 set in the socket 113b of the test stage 11b is transmitted as an image signal to the control unit 17 built in the test main unit 11 and the characteristic determination unit 14 installed at the rear of the test main unit 11. Then, the characteristic determination unit 14 determines whether there is a defect on the surface of the device under test 100.

Similarly, as shown in FIGS. 3C and 3D, the devices 100 to be inspected are sequentially transported to the inspection stages 11c and 11d by the transport hands 18d and 18e, respectively. And 1
At 1c, the third optical condition and the fourth optical condition, for example, spot defects, unevenness defects, and the like are determined by the respective light source heads 16c from the respective light source heads 16c in the same manner as the inspection at the inspection stages 11a and 11b. Inspection is carried out by irradiating light under the appropriate conditions.

According to the above procedure, one device under test 10
0, in each of the inspection stages 11a to 11d,
Various optical characteristics such as point defects and line defects can be inspected. On the basis of the results of the inspection performed at each of the inspection stages 11a to 11d, the control unit 17 built in the inspection main unit 11 controls the transport hand 18f to
0 is classified for each quality and stored in the tray 13b of the work set unit 13 after inspection.

FIG. 6 shows a flowchart for judging the quality of the device under test 100 based on the test results at the test stages 11a to 11d of the test main body 11.

In step 1, as a result of inspecting the optical characteristics at the inspection stage 11a, if it is determined that the element under inspection 100 is "defective", the inspection is performed regardless of the inspection result after the inspection stage 11b. The element 100 is determined to be “defective”. In this case, the inspection stages 11b-1
Since it is not necessary to perform the inspection of the optical characteristics in 1d,
Inspection time can be reduced. On the other hand, as a result of the inspection at the inspection stage 11a, when “no defect” is determined for the device to be inspected, whether the device to be inspected 100 is good or bad is determined as follows.
Good or bad is determined based on the inspection results after the inspection stages 11b to 11d.

Next, in step 2, the inspection stage 11
The optical characteristics at b are inspected, and when it is determined that the device under test 100 is “defective”, the device under test 100
It is determined as "defective". If it is determined that the device under test 100 is “no defect”, the inspection stages 11 c to 11 c
The good or bad of the device under test 100 is determined based on the test result of d.

Similarly, in steps 3 and 4, based on the inspection results of the inspection stages 11c and 11d,
If the device under test 100 is determined to be “defective”, the device under test 100 is determined to be “defective”. If the device under test is determined to be “no defect” based on the test result of the test stage 11d, the device under test 100
It is determined to be "good".

In this way, the test elements 100 determined as “defective” or “non-defective” are respectively controlled by the control unit 17, and are transferred to the post-inspection work set 13 by the transfer hand 18f. "And" non-defective "and stored.

The classification of the work set portion 13 after inspection of the device under test 100 into the tray 13a is not limited to the above two classifications of "non-defective" and "defective". Rank A, point defect was detected,
A function rank B indicates a function that does not cause any problem even if it is functional, a function rank C indicates a defect that can solve a functional problem if repaired, and a function rank D indicates a function that cannot be solved even if repaired. After setting each function rank as shown in FIG.
3 may be stored in the tray 13a.

When the optical characteristics of the device under test 100 are to be tested, as described above, the device under test 100 is sequentially moved by the work transfer section 15 to each of the test stages 11a to 11a.
In addition to determining whether the device under test 100 is defective or not one by one by transporting it to 1d for inspection, as shown in FIG.
A plurality of devices under test 100 are sequentially placed in each test stage 11a.
11d, the optical characteristics of the plurality of devices under test 100 may be tested at the same time. In this way, when the inspection main body 11 includes the four inspection stages 11a to 11d as described above, about 4
The inspection of the optical characteristics of the device under test 100 can be advanced at twice the speed.

Further, when the optical condition is changed by changing the light amount of light applied to the device under test 100 to inspect a defect on the surface of the device under test 100, the optical condition under which the light amount is large is It is known that the frequency of defects to be inspected is high. Therefore, when inspecting the defect of the device under test 100 by changing the light amount and changing the optical condition, if the inspection stage 11a for inspecting the defect first is set to the optical condition with a large light amount, The defect of the element 100 can be detected at an early stage, and the inspection time can be reduced.

In the optical characteristic inspection apparatus 10 of this embodiment, the inspection stages 11 a to 11
4 shows a case in which four devices d are installed.
The optimal number of inspection stages can be selected as appropriate according to the type of 0, the required number of inspections, and the like. Also,
In the inspection of the above optical characteristics, each of the inspection stages 11a to 11a
11d, the optical conditions are different from each other. However, the optical conditions of each of the inspection stages 11a to 11d are the same, and the inspection of the same optical characteristics is performed in each of the inspection stages 11a to 11d. 100 may perform the same inspection at the same time. Further, only one of the inspection stages 11a to 11d may be set to the same optical condition.

Further, the optical characteristic inspection apparatus 10 of the present embodiment includes the inspection stages 11 a to 11 of the inspection main body 11.
The inspection stages 11a to 1d are arranged in such a way that d is arranged in a straight line.
1d may be arranged on the circumference. By arranging the inspection stages 11a to 11d in this way, the overall size of the optical characteristic inspection device 10 can be reduced.

In the optical characteristic inspection apparatus 10,
In place of the configuration in which one light source section 16 is provided, a configuration in which light source sections having different optical conditions are provided for each of the inspection stages 11a to 11d may be used in the same manner as described above. Can be inspected.

In the above embodiment, the device under test 1
00, the display panel was inspected. However, a sheet, a film, etc. having a uniform surface may be inspected.
As 00, the optical properties of the surface can be inspected. In this case, the optical characteristics of the surface of the object to be inspected are inspected based on the reflected light of the light irradiated to the object to be inspected such as a sheet.

[0077]

According to the optical characteristic inspection apparatus of the present invention, a plurality of light generating means are provided.
By sequentially moving the device under test at each position where a plurality of light generating means emits light, the optical characteristics of the device under test can be inspected. To make the system cheaper,
The life of the light source can be extended. Also, since there is no need to switch the optical filter every time the optical conditions are changed, the inspection time of the optical characteristics can be shortened, and similarly, the size, position, etc. of the diaphragm are externally adjusted. Compared with the case where a mechanism is used, the mechanism can be simplified, and the time required for switching the aperture or the like can be reduced, so that the inspection time can be reduced.

Further, if the light emitted from the plurality of light generating means has different optical conditions such as the quantity of light, the wavelength, and the angle of the light emitted to the device under test, various types of optical The optical characteristics of the device to be inspected can be inspected depending on the conditions.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an optical characteristic inspection apparatus of the present invention.

FIG. 2 is a cross-sectional view illustrating a schematic configuration of a light source head.

FIGS. 3A to 3D are schematic diagrams illustrating a procedure for inspecting optical characteristics by an optical characteristic inspection apparatus.

FIG. 4 is a schematic diagram illustrating the transport of a device to be inspected when inspecting optical characteristics.

FIG. 5 is an explanatory diagram for explaining transport of a device under test when an optical characteristic is tested.

FIG. 6 is a flowchart for judging the quality of an element to be inspected by an optical characteristic inspection apparatus.

FIG. 7 is a side view illustrating a case where a plurality of devices to be inspected are inspected simultaneously by the optical characteristic inspection device.

FIG. 8 is a schematic view showing a conventional optical characteristic inspection device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Optical characteristic inspection apparatus 11 Inspection main body part 11a-11d Inspection stage 111a-111d Mounting plate 112a-112d Support part 113a-113d Socket 12 Work set part before inspection 12a Tray 13 Work set part after inspection 13a Tray 14 Characteristic judgment part 15 Work transfer section 15a Guide groove 16 Light source section 17 Control section 18a to 18f Transfer hand

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasunori Dehara 3211-1 Satomi, Satosho-cho, Asakuchi-gun, Okayama F-term (reference) 2G014 AA02 AA03 AB21 AB51 AC11 2G036 AA25 AA27 BA33 BB09 BB12 2G086 EE01 EE10 2H088 FA11 FA16 FA17 FA30 HA28 MA20

Claims (12)

[Claims] 1. A plurality of light generating means to be irradiated with light from each of them; a moving means to sequentially move a device under test whose optical characteristics are to be inspected to a position to be irradiated with light from each light generating means; An inspection means for inspecting optical characteristics of the device under test based on light emitted from each light generating device to the device under test. 2. The optical characteristic inspection apparatus according to claim 1, wherein the plurality of light generating units irradiate light under different optical conditions. 3. The light emitted from each of the light generating means,
The optical characteristic inspection device according to claim 2, wherein the optical conditions are different when at least one of the light amounts is different. 4. The light emitted from each of said light generating means,
The optical characteristic inspection apparatus according to claim 2, wherein the optical conditions are different when at least one wavelength is different. 5. The light emitted from each of said light generating means,
The optical characteristic inspection device according to claim 2, wherein the optical conditions are different due to at least one or more angles of light applied to the device to be inspected. 6. The optical characteristic inspection apparatus according to claim 1, wherein said inspection means is provided for each of said light generating means. 7. The optical characteristic inspection apparatus according to claim 6, wherein the optical characteristics of each of the devices to be inspected are simultaneously inspected by the respective light generating means. 8. The optical characteristic inspection apparatus according to claim 6, further comprising storage means for storing optical characteristics of the device under test inspected by said inspection means. 9. The device according to claim 1, wherein the moving unit moves the device under test so that light from the light generating unit is applied to a center of a light receiving unit of the device under test. The optical characteristic inspection device according to 1. 10. The optical characteristic inspection apparatus according to claim 1, wherein the devices to be inspected are classified according to functional ranks of the devices to be inspected based on a result of the inspection by the inspection unit. 11. The optical characteristic inspection apparatus according to claim 1, wherein the element to be inspected is a liquid crystal display panel. 12. The optical characteristic inspection apparatus according to claim 1, wherein the device to be inspected is a solid-state imaging device.