JP2002264340A - Method of manufacturing ink jet recording head and ink jet recording head by the manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a first active energy ray-curable material, a nozzle forming member and a second active energy ray-curable material, in order to increase the definition of a printer in a conventionally used spin coating method. If the ink-repellent members are exposed to one another at the same time, if they are mutually soluble, they will be compatible with each other, such that the nozzle forming member becomes ink-repellent and the ink-repellent member decreases in ink-repellency. Not only cannot be exhibited, but also the film thickness distribution and the like are greatly disturbed. SOLUTION: After coating with a first active energy ray-curable material 10, before coating with a second active energy ray-curable material 11, compatibility between the first and second active energy ray-curable materials is prevented. A step of providing the intermediate layer 14 was provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an ink jet recording head for generating recording droplets used in an ink jet recording system and a method of manufacturing the same.

[0002]

2. Description of the Related Art Heretofore, in this type of ink jet recording head, an ink-repellent treatment is performed on an ejection port surface in order to prevent deflection or non-ejection of ink droplets due to accumulation of ink on the ejection port surface. In this regard, for example, Japanese Patent Laid-Open No. 5-124199
As disclosed in Japanese Unexamined Patent Publication, a method of forming an ink-repellent layer by photolithography has been proposed in which an ink-repellent member does not enter an ejection port and an ink-repellent surface can be accurately provided on the ejection port surface.

FIG. 10 is a schematic view (1) to (4) of a cut surface at a discharge port of a conventional ink jet recording head.
An example of the conventional example will be described with reference to FIG.

A surface of a nozzle forming member 1 having a discharge port 2 shown in FIG. 10A is coated with a photosensitive resin having ink repellency as shown in FIG. Form 3 Next, a photomask 4 having a predetermined shape that does not pass through the active energy rays is set,
An active energy ray is irradiated in the direction of the arrow in FIG. 10C to perform pattern exposure. Then, development processing is performed in accordance with a standard method, for example, by eluting an unpolymerized portion that has not been exposed with a solvent or the like, as shown in FIG.
A photosensitive resin layer portion 3a having ink repellency near the ejection port 2
Get.

[0005]

However, in recent printers, since higher image quality and higher definition are demanded, the discharge port 2 is made finer. If the ejection port of the member and the ejection port of the ink-repellent member are to be patterned to the same size, several hundreds of
m may occur. As a result, the ink repellent member becomes non-uniform in the vicinity of the ejection port 2, and there is a possibility that the print quality may deteriorate.

[0006] Therefore, it is necessary to collectively expose the nozzle forming member, which is the first active energy ray-curable material, and the ink-repellent member, which is the second active energy ray-curable material.

However, in the conventionally used spin coating method, when the nozzle forming member, which is the first active energy ray-curable material, and the ink repellent member, which is the second active energy ray-curable material, are mutually melted, the phase is reduced. In addition to dissolving, the nozzle forming member becomes ink-repellent, and the ink-repellent member has reduced ink repellency. There was a problem.

[0008] The present invention has been made in view of the above aspects, and has as its object to provide a manufacturing method for solving the above-mentioned problems.

[0009]

According to the present invention, there is provided a method for manufacturing an ink jet recording head according to any one of the following items (1) to (3), or an ink jet recording head according to the item (4). The purpose of the present invention is to achieve the above object.

(1) A substrate provided with a discharge pressure generating element and a solid layer portion occupying at least a portion serving as a liquid path is coated with a first active energy ray curable material as a nozzle forming member, Before the curing, further, a second active energy ray-curable material which is an ink-repellent member is coated, and the first and second active energy ray-curable materials are simultaneously exposed and developed to obtain a discharge port. In the method for manufacturing an ink jet recording head, after coating the first active energy ray-curable material, before coating the second active energy ray-curable material, the compatibility between the first and second active energy ray-curable materials is determined. A method for manufacturing an ink jet recording head, comprising a step of providing an intermediate layer for preventing the ink jet recording head.

(2) The method for manufacturing an ink jet recording head according to the above (1), wherein the intermediate layer is a water-soluble resin.

(3) The intermediate layer is formed to be thinner than the first and second active energy ray-curable materials, and the intermediate layer is appropriately compatible with the first and second active energy ray-curable materials. The method for manufacturing an ink jet recording head according to the above item (1), characterized in that:

(4) An ink jet recording head manufactured by the manufacturing method according to any one of the above items (1) to (3).

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail based on embodiments with reference to the drawings.

[0015]

(Embodiment 1) FIGS. 1 to 9 are schematic cross-sectional views showing manufacturing steps of Embodiment 1, and Embodiment 1 of the present invention will be described with reference to FIGS.

First, as shown in FIG.
A base 5 made of glass, ceramic, metal or the like is prepared.

In such a substrate 5, a desired number of discharge pressure generating elements 6 such as electrothermal transducers or piezoelectric elements are arranged. Further, the base 5 is provided with an ink supply port 7.

Next, as shown in FIG. 2, a solid layer 8 is formed so as to cover the discharge pressure generating element 6 of the base 5. Solid layer 8
The material of the positive resist O which is a photosensitive resin
DUR1010 (trade name, manufactured by Tokyo Ohka Co., Ltd.) was used.

Next, as shown in FIG.
Through the pattern exposure and development, a solid layer portion 8a having a desired shape including a liquid passage forming portion 81 and a liquid chamber forming portion 82 communicating therewith was provided as shown in FIG.

Next, as shown in FIG. 5, a nozzle forming member having the composition shown in Table 1 below, that is, the first active energy ray curable material 10 is spin-coated to cover the solid layer portion 8a, and is heated to 90 ° C. on a hot plate. Bake for 3 minutes.

[0021]

[Table 1]

Next, the first active energy ray-curable material 1
The intermediate layer 14 (5% aqueous solution of PVA) is spin-coated on the upper surface of the substrate 0 and baked, and the ink-repellent member having the composition shown in Table 2 below, ie, the second active energy ray-curable material 11 is spin-coated on the upper surface. And baked.

[0023]

[Table 2]

At this time, as shown in FIG.
Is made thinner than the first active energy ray-curable material 10 and the second active energy ray-curable material 11.

As a result, the intermediate layer 14 is appropriately compatible with the first and second active energy ray-curable materials 10 and 11, but the first and second active energy ray-curable materials 1
0 and 11 are not compatible with each other. Then, the unexposed portion during development is removed.

Next, as shown in FIG.
Then, pattern exposure of 5 J / cm ² is performed through ² to perform development, and an ejection port 13 is obtained as shown in FIG.

Then, for example, a deep UV light is irradiated by a conventional method, and the ODUR1 is irradiated with MIBK.
010, the solid layer portion 8a was removed, and as shown in FIG. 9, a liquid passage 81a and a space 8A through which ink was provided having a liquid chamber 82a communicating therewith were formed, and the desired ink jet recording head was manufactured.

(Embodiment 2) Next, in Embodiment 2, the intermediate layer 1
4. Paogen PP-15 (trade name, Daiichi Kogyo Seiyaku Co., Ltd.)
Inkjet recording head was manufactured using the same method as in Example 1 using a 10% aqueous solution of the same method as in Example 1.

(Comparative Example) Next, as a comparative example, the intermediate layer 1
No. 4 was not performed, and otherwise the same method as in Example 1 was used to manufacture an ink jet recording head.

(Test Results) As a result of performing a printing test on each of the completed ink jet recording heads, in the comparative example, a printing failure due to unevenness of the ink-repellent member was found, but in the examples 1 and 2, it was not found. Was.

When the examples 1 and 2 and the comparative example were observed, the position of the meniscus of the ink was stably formed on the ejection port surface in the examples 1 and 2. However, in the comparative example, since the ink-repellent member and the nozzle forming member were compatible at the time of spin coating, the film thickness distribution of the ink-repellent member was varied, and the meniscus position of the ink was varied.

Here, the material of the intermediate layer 14 is PV
Although A (polyvinyl alcohol) and a paogen are mentioned, for example, FC-759 (trade name, manufactured by 3M) and the like can also be mentioned.

[0033]

As described above, according to the present invention,
By providing an intermediate layer between the first and second active energy ray curable materials, compatibility can be prevented and individual characteristics can be exhibited. If the first and second active energy ray-curable materials are simultaneously exposed and developed in this state, an ink-repellent material that can cope with the miniaturization of the discharge port can be formed.

In addition, since the ink-repellent member is uniformly formed on the ejection port surface, the printing quality is remarkably improved.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view showing a manufacturing process in Example 1.

FIG. 2 is a schematic cross-sectional view showing a manufacturing process in Example 1.

FIG. 3 is a schematic cross-sectional view showing a manufacturing process in Example 1.

FIG. 4 is a schematic cross-sectional view showing a manufacturing process in Example 1.

FIG. 5 is a schematic cross-sectional view showing a manufacturing process in Example 1.

FIG. 6 is a schematic cross-sectional view showing a manufacturing process in Example 1.

FIG. 7 is a schematic cross-sectional view showing a manufacturing process according to the first embodiment.

FIG. 8 is a schematic cross-sectional view showing a manufacturing process of the first embodiment.

FIG. 9 is a schematic cross-sectional view showing a manufacturing process according to the first embodiment.

FIG. 10 is a schematic view of a cut surface at a discharge port of a conventional inkjet recording head.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Nozzle formation member 2 Discharge port 3 Photosensitive resin layer 3a Photosensitive resin layer part 4 Photomask 5 Base 6 Discharge pressure generating element 7 Ink supply port 8 Solid layer 8a Solid layer part 8A Space 9 Photomask 10 First active energy Line curing material (nozzle forming member) 11 Second active energy ray curing material (ink-repellent member) 12 Photomask 13 Discharge port 14 Intermediate layer 81 Liquid path forming section 82 Liquid chamber forming section 81a Liquid path 82a Liquid chamber

Claims (4)

[Claims] A first active energy ray-curable material as a nozzle forming member is coated on a substrate provided with a discharge pressure generating element and a solid layer portion occupying at least a portion serving as a liquid path. Before curing, an ink jet is further obtained by coating a second active energy ray-curable material that is an ink-repellent member, and simultaneously exposing and developing the first and second active energy ray-curable materials to obtain a discharge port. In the method for manufacturing a recording head, after coating the first active energy ray-curable material, before coating the second active energy ray-curable material, the compatibility between the first and second active energy ray-curable materials is prevented. A method for manufacturing an ink jet recording head, comprising a step of providing an intermediate layer to be formed. 2. The method according to claim 1, wherein the intermediate layer is a water-soluble resin. 3. The intermediate layer is formed to be thinner than the first and second active energy ray-curable materials so that the intermediate layer is appropriately compatible with the first and second active energy ray-curable materials. The method for manufacturing an ink jet recording head according to claim 1, wherein: 4. An ink jet recording head manufactured by the manufacturing method according to claim 1.