JP2002131653A - microscope - Google Patents

Abstract

(57) [Summary] [Problem] To provide an inexpensive microscope in which an observation method can be easily changed. A slider (23) holding a polarizer (17) and an analyzer (18) has an elongated hole (23a). The portion where the elongated hole 23a of the slider 23 is formed projects outside the body of the microscope M, and the bearing 22b is fitted into the elongated hole 23a. Bearing 22
b is provided at one end of an arm 22a mounted on the rotating shaft of the motor 21.
a, the slider 23 is slid in the R1 direction by being transmitted to the slider 23 by the bearing 22b. As a result, the polarizer 7 and the analyzer 8 are inserted into and removed from the optical path by the motor 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope, such as an industrial microscope, capable of observing a sample by a plurality of observation methods by inserting and removing an optical element.

[0002]

2. Description of the Related Art In an industrial microscope used for LSI observation and the like, an optical element such as a polarizer or an analyzer is inserted into and removed from the optical path of the microscope, thereby obtaining a differential interference observation, a bright field observation method, a dark field observation method and the like. Sample observation can be performed by a plurality of observation methods. Conventionally, such microscopes include a motorized microscope for automatically inserting and removing optical elements, and a standard microscope for manually inserting and removing these optical elements. Motorized microscopes have the advantage that the switching operation of the observation method is labor-saving and that observation can be performed under stable observation conditions.

[0003]

However, the motor-operated microscope is disadvantageous in that it is more expensive than a manual microscope because the components related to the insertion and removal of the optical element are designed exclusively for motor operation. is there. Therefore, the number of generally used microscopes was overwhelmingly large for manual microscopes. On the other hand, the manual type microscope is inexpensive, but has a drawback that the operator has to insert and remove the optical element every time the observation method is switched, and if the user is not used to it, the switching operation is troublesome.

An object of the present invention is to provide an inexpensive microscope in which the observation method can be easily changed and which is inexpensive.

[0005]

An embodiment of the present invention will be described with reference to FIGS. 3, 4 and 8. FIG. (1) To be described with reference to FIGS. 3 and 4, the invention of claim 1 inserts the optical elements 17 and 18 into the optical path and retracts them outside the optical path according to the observation method at the time of sample observation. Is applied to the microscope. Then, the holding device 23 having the projecting portion B which is formed with the electric driving engaging portion 23a and protrudes from the microscope main body to the outside and which can be gripped, and the holding portion A where the optical elements 17 and 18 are held, is optically moved. Insertion position where the elements 17 and 18 are arranged in the optical path and the optical element 1
The above-mentioned object is achieved by providing the movable members 7 and 18 between the retracted positions provided outside the optical path. (2) In the microscope according to claim 1, in the microscope according to claim 1, the driving force of the electric driving device 21 is transmitted to the holding device 23 by engaging with the electric driving device 21 and the engaging portion 23a. Transmission means 22a and 22b for moving the holding device 23 to the insertion position and the retreat position are provided. (3) In the invention according to claim 3, in the invention according to claim 2, the electric drive device 21 is a motor,
a and the transmission means 22a and 22b constitute a conversion mechanism for converting the rotational movement of the motor 21 into a linear movement between the insertion position and the retracted position of the holding device 23. (4) Explaining in connection with FIG. 8, the invention according to claim 4 is the invention according to claim 2 or 3, wherein a plurality of holding devices 23 are provided, and the plurality of holding devices 23 are electrically driven by one. The device is driven by the device 21.

In the section of the means for solving the above problems, the drawings of the embodiments of the present invention are used to make the present invention easier to understand, but the present invention is not limited to the embodiments of the present invention. Not something.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a view showing an embodiment of a microscope according to the present invention.
FIG. 1 is a stage on which an observation sample such as a wafer is placed, 2 is an objective lens, and 3 is an eyepiece. The vertical movement of the stage 1 and the rotation of the revolver 4 on which the objective lens 2 is mounted are electrically driven. Reference numeral 5 denotes a fine movement handle for finely adjusting the vertical position of the stage 1, and reference numeral 6 denotes a lamp house in which a light source such as a halogen lamp is stored.

In the microscope M of the present embodiment, the sample can be observed by three observation methods: bright field observation, dark field observation, and differential interference observation. Reference numeral 7 denotes a polarizer electric unit in which a polarizer insertion / removal mechanism is accommodated. Reference numeral 8 denotes an analyzer electric unit in which an analyzer insertion / removal mechanism is accommodated. The polarizer 17 and the analyzer 18 described later in FIG. Is inserted into and removed from the optical path. An operation unit and a control unit for electrically operating the microscope are provided separately from the microscope main body shown in FIG. 1, but are not shown.

FIG. 2 is a diagram showing a schematic configuration of the optical system of the microscope M shown in FIG. Light from the light source 11 is incident on a polarizer 17 disposed in the relay lens system 13 via a relay lens system 13 disposed on the optical axis 12 of the illumination system. The light emitted from the light source 11 is unpolarized, but the light transmitted through the polarizer 17 is linearly polarized. The light transmitted through the polarizer 17 passes through the relay lens optical system 13, the half mirror 14, and the objective lens 2 to the stage 1.
The sample 15 placed on the sample 15 (see FIG. 1) is irradiated. Light from the sample 15 is observed as an image 20 via the objective lens 2, the half mirror 14, the analyzer 18, and the eyepiece 3.

The polarizer 17 and the analyzer 18 are:
Each of them is held by a holding device called a slider 23 (see FIG. 3), and is inserted into the optical path as shown in FIG. 2 when performing differential interference observation. On the other hand, when performing bright-field observation or dark-field observation, the sliders 23 are slid to retract the polarizer 17 and the analyzer 18 out of the optical path. Switching between bright-field observation and dark-field observation is performed by inserting and removing the half mirror 14.

Next, the polarizer 17 and the analyzer 1
8 will be described. FIG. 3 is a perspective view of the polarizer electric unit 7 and the analyzer electric unit 8 of FIG. 1. The casings of the units 7, 8 are partially broken so that the insertion / removal mechanism is easy to understand. The polarizer 17 and the analyzer 18 are held by a slider 23, and a part of the slider 23 projects outside through a notch 40 formed in the body of the microscope M. The slider 23 has a structure slidable in the R1 direction. As can be seen from FIG. 3, the polarizer 17 and the analyzer 18 have the same structure, except that the direction of the optical axis is different. Therefore, the mechanism for inserting and removing the polarizer 17 will be described below.

Reference numeral 21 denotes a motor, and brackets 24a,
24b, it is fixed to the body of the microscope M. 22
Is a transmission mechanism for transmitting the driving force of the motor 21 to the slider 23, and includes an arm 22a and a bearing 22b. FIG. 4 is a view for explaining the insertion / removal mechanism of the polarizer 17. One end of the arm 22 a is fixed to the rotating shaft 21 a of the motor 21. The polarizer 17 of the slider 23
The portion A on which is mounted is called a holding portion, and the notch portion 40 in FIG.
The part B projecting from the outside to the outside is called a projecting part. Arm 22
The bearing 22b described above is rotatably provided at the other end of the slider a, and the bearing 22b is inserted into an elongated hole 23a formed in the protrusion B of the slider 23. 23b
Is a groove used when positioning the polarizer 17 in the optical path.

FIGS. 5A and 5B are diagrams for explaining the insertion / removal operation of the polarizer 17, wherein FIG. 5A shows a state where the polarizer 17 is inserted into the optical path, and FIG. 5B shows a state where the polarizer 17 is retracted from the optical path. Is shown. In FIG. 5, 30, 31
Is a limit switch, and the rotation of the motor 21 is controlled based on these ON / OFF states. Reference numeral 32 denotes a click mechanism for positioning the polarizer 17 in the optical path. A spherical member 32 a such as a steel ball is urged by an urging member 32 b such as a spring so as to abut on the upper surface of the slider 23.

When the polarizer 17 is inserted into the optical path as shown in FIG. 5 (a), the spherical member 32a engages with the groove 23b formed on the upper surface of the slider 23, and the polarizer 1
7 is positioned at a predetermined position in the optical path. In this state, the limit sensors 30 and 31 are on. From the state shown in FIG.
When 2a is rotated by 180 degrees as indicated by arrow R2, the polarizer 17 is in a retracted position state as shown in FIG. 5B. At this time, the contact of the limit switch 31 is in the groove 23b.
And the limit switch 31 is turned off. The rotation of the motor 21 is stopped by this off signal. The limit switch 30 is turned off when the contact is separated from the left end surface of the slider 23.

Further, from the state shown in FIG.
Is rotated 180 degrees as indicated by an arrow R3, the polarizer 17 is inserted into the optical path as shown in FIG. In the inserted state, the contact of the limit switch 30 comes into contact with the left end surface of the slider 23 and is turned on, and the rotation of the motor 21 is stopped by this ON signal. At this time, the spherical member 3
2a is engaged with the groove 23b, and the polarizer 17 is positioned at a predetermined position in the optical path.

As described above, in the example shown in FIG. 5, the motor 21 is rotated in one direction,
Although the structure in which the retreat is repeated is adopted, the structure shown in FIG. 6 may be used. In the case of FIG. 6, as in FIG. 5, (a) shows the inserted state, and (b) shows the retracted state. FIG.
In the figure, only a part (the motor 21 side) of the slider 23 is shown.

When the polarizer 17 is retracted from the optical path, the motor 21 is set to 180 degrees as indicated by R2 in FIG.
Rotate forward only by degrees. On the other hand, when the polarizer 17 is inserted, the motor 21 is turned 180 degrees as indicated by R4 in FIG.
Reverse only once. In the case of the structure in which the motor 21 shown in FIG.
The width of the slider 23 in the vertical direction in the figure can be reduced as compared with the case where the motor 21 is rotated in one direction to be inserted and removed. As a result, the electric units 7 and 8 in FIGS. 1 and 3 can be made smaller.

The above-mentioned microscope M has such a structure that the motorized polarizer unit 7 and the motorized analyzer unit 8 can be retrofitted to the microscope body. FIG. 7 shows a polarizer electric unit 7 and an analyzer electric unit 8.
1 shows the microscope M when no is mounted, in which the protrusion B of the slider 23 projects outside through the rectangular cutout 40 provided in the microscope body. Although not shown in FIG. 7, the body of the microscope M is provided with taps and the like for attaching the polarizer motor unit 7 and the analyzer motor unit 8.

FIG. 7 shows a case of performing differential interference observation, in which a polarizer 17 and an analyzer 18 are inserted in the optical path. On the other hand, when performing bright-field observation or dark-field observation, the long hole 23a of each slider 23 is gripped and slid so as to be pulled out of the microscope M, and the polarizer 17 and the analyzer 18 are retracted from the optical path.

As described above, the elongated hole 23a formed in the slider 23 functions as a knob when the slider 23 is manually slid, and when the motorized motor is driven, the rotation of the motor 21 is controlled by the polarizer 17. It constitutes a part of a conversion mechanism for converting into a sliding motion. The conversion mechanism referred to here includes the arm 22a, the bearing 22b, and the slider 2
It is composed of three long holes 23a. As a result, the slider 23 can be shared between the electric microscope and the manual microscope, and the electric microscope can be provided at a lower cost. Further, even if a user has purchased a manual type microscope, the polarizer 17 and the analyzer 18 can be easily and inexpensively motorized by retrofitting the polarizer motor unit 7 and the analyzer motor unit 8 after purchase. Can be.

In the above-described embodiment, the slide 23 has the elongated hole 23a formed therein, and the elongated hole 23a has the bearing 2a.
2b is inserted, but a vertical concave portion may be formed in the slide 23, and the bearing 22b may be inserted into the concave portion.

Next, a modified example of the above-mentioned microscope will be described. << Modification >> In the above-described embodiment, the polarizer 17 and the analyzer 18 are respectively inserted and removed by the individual motors 21. However, since these are always inserted and removed at the same timing, as shown in FIG. The insertion and removal may be performed by two motors 21. 8, the same members as those in FIG. 3 are denoted by the same reference numerals. In the insertion / removal unit 50,
Only one set of the motor 21, the arm 23a, the bearing 22b, and the brackets 24a, 24b is provided. These mechanisms correspond to the polarizer insertion / removal unit 7 shown in FIG.
This is the same as the mechanism provided in. That is, the slider 23 on which the polarizer 17 is mounted is mounted on the arm 22a.
Is rotationally driven by the motor 21 to be slid in the R1 direction.

A connecting plate 51 connects the slider 23 on which the polarizer 17 is mounted and the slider 23 on which the analyzer 18 is mounted, and is fixed to each slider 23 by a screw 52. Therefore, the analyzer 18
Is driven to slide in the R1 direction in synchronization with the slider 23 on which the polarizer 17 is mounted. In the microscope of the first modification, the insertion / removal mechanism (21, 22a,
22b, 24a, and 24b), only one set is provided, so that the cost can be lower than that of the microscope shown in FIGS.

The present invention can be applied not only to the polarizer and the analyzer but also to a case where optical elements such as a filter and a prism are inserted into and removed from the optical axis. Also,
In the above-described embodiment, the optical element is linearly moved for insertion and removal into the optical path. However, the present invention is also applicable to a case where the optical element is moved in an arc shape for insertion and removal. it can.

In the correspondence between the embodiment described above and the elements of the claims, the polarizer 17 and the analyzer 18 are optical elements, the elongated hole 23a is an electric engaging portion,
The slider 23 constitutes a holding device, and the arm 22a and the bearing 22b constitute transmission means.

[0026]

As described above, according to the present invention,
Since the electric drive engaging portion is formed on the projecting portion of the holding device that holds the optical element, the electric drive can be easily performed using the electric drive engaging portion. Further, since the holding device has a structure in which the projecting portion can be gripped and a manual insertion / removal operation can be performed, the holding device can be used for both manual and motorized types of microscopes. Cost can be reduced. Therefore, Claim 2
In the microscope according to the fourth aspect of the present invention, power saving can be achieved by electrically driving the holding device by the electric driving device, and cost can be reduced by using common components.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of a microscope according to the present invention, and is an external view of the microscope.

FIG. 2 is a diagram showing a schematic configuration of an optical system of the microscope shown in FIG.

FIG. 3 is a perspective view of electric units 7 and 8;

FIG. 4 is a diagram illustrating an insertion / removal mechanism of a polarizer 17;

5A and 5B are diagrams illustrating the insertion / removal operation of the polarizer 17; FIG. 5A illustrates a state where the polarizer 17 is inserted on the optical axis 12; FIG. 5B illustrates a state where the polarizer 17 is separated from the optical axis 12; Is shown.

FIGS. 6A and 6B are diagrams showing an insertion / removal operation when the polarizer 17 is inserted / removed by reversing the direction of the motor 21; FIG. 6A shows a retreat operation;

FIG. 7 is a view showing the microscope M when the electric units 7, 8 are removed.

FIG. 8 is a diagram showing a modification.

[Explanation of symbols]

 Reference Signs List 1 Stage 2 Objective lens 3 Eyepiece 4 Revolver 7 Polarizer motor unit 8 Analyzer motor unit 17 Polarizer 18 Analyzer 21 Motor 22 Transmission mechanism 22a Arm 22b Bearing 23 Slider 23a Slot A Holder B Projection

Claims (4)

[Claims] 1. A microscope in which an optical element is inserted into an optical path and retracted out of the optical path in accordance with an observation method at the time of sample observation. An insertion position where the optical element is disposed in the optical path and the optical element is disposed outside the optical path. A microscope provided so as to be movable between a retracted position and a retracted position. 2. The microscope according to claim 1, wherein an electric driving device and a driving force of the electric driving device which are engaged with the engaging portion are transmitted to the holding device, and the holding device is inserted. A microscope provided with a position and a transmission means for moving to the retracted position. 3. The invention according to claim 2, wherein the electric drive device is a motor, and the engaging portion and the transmission means move the rotational motion of the motor between the insertion position of the holding device and the retreating position. A microscope, comprising a conversion mechanism for converting into a linear motion between a position and a position. 4. The microscope according to claim 2, wherein a plurality of the holding devices are provided, and the plurality of holding devices are driven by one electric drive device.