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JP2002105561A - Low thermal expansion alloy - Google Patents

Low thermal expansion alloy

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Publication number
JP2002105561A
JP2002105561A JP2000297550A JP2000297550A JP2002105561A JP 2002105561 A JP2002105561 A JP 2002105561A JP 2000297550 A JP2000297550 A JP 2000297550A JP 2000297550 A JP2000297550 A JP 2000297550A JP 2002105561 A JP2002105561 A JP 2002105561A
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JP
Japan
Prior art keywords
thermal expansion
low thermal
alloy
mass
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000297550A
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Japanese (ja)
Other versions
JP4984198B2 (en
Inventor
Kiyohito Ishida
清仁 石田
Ryosuke Kainuma
亮介 貝沼
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Abstract

PROBLEM TO BE SOLVED: To produce a low thermal expansion alloy having shape memorizing characteristics and superelasticity and exhibiting excellent low thermal expanding characteristics in a wide temperature range. SOLUTION: Strain is applied to a shape memory alloy in which thermoelastic type martensitic transformation occurs by cold working, and by the control of the total working ratio, the low thermal expansion alloy in which the average thermal expansion coefficient at -150 to 150 deg.C is variable in the range of -10×10-6 to 10×10-6/k can be produced.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、形状記憶特性及び
超弾性を有し、かつ広い温度領域において優れた低熱膨
張特性を示す低熱膨張合金に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low thermal expansion alloy having shape memory characteristics and superelasticity and exhibiting excellent low thermal expansion characteristics in a wide temperature range.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】低熱膨
張合金は、精密機器用構造材料、ヒートシンク材、リー
ドフレーム材等に利用されており、従来はFeNi合金、Fe
NiCo合金等の磁気変態に基づくインバー効果を利用した
ものであった。
2. Description of the Related Art Low thermal expansion alloys have been used for structural materials for precision equipment, heat sink materials, lead frame materials, and the like.
It used the Invar effect based on magnetic transformation of NiCo alloy and the like.

【0003】しかし、近年低熱膨張合金として形状記憶
合金をヒートシンク材へ利用することが特開平10-17959
号及び特開平10-92989号に提案されている。形状記憶合
金として、特開平10-17959号ではCuAlMn基系合金及びNi
Ti基系合金が、特開平10-92989号ではNiTi基系合金及び
CuZnAl基系合金がそれぞれ挙げられている。このヒート
シンク材は、良熱伝導材(銅系合金等)中に低熱膨張材
として繊維状あるいは粒子状の形状記憶合金を分散させ
たものである。その作用は良熱伝導材が放熱性を高め、
また超弾性特性が破壊しない程度に予歪みが付与された
形状記憶合金に圧縮応力が生じて複合材全体の熱膨張率
が低下するというものである。つまり、通常の形状記憶
効果による回復力で良熱伝導体に歪みを加えることによ
りコンポジット全体の膨張を少なくするという利用方法
であり、形状記憶合金の低熱膨張特性を利用するもので
はない。
However, it has recently been proposed to use a shape memory alloy as a low thermal expansion alloy for a heat sink material.
And JP-A-10-92989. As shape memory alloys, in JP-A-10-17959, CuAlMn-based alloy and Ni
Ti-based alloys are disclosed in JP-A-10-92989, NiTi-based alloys and
CuZnAl-based alloys are listed respectively. This heat sink material is obtained by dispersing a fibrous or particulate shape memory alloy as a low thermal expansion material in a good heat conductive material (copper alloy or the like). The effect is that the good heat conductive material enhances the heat dissipation,
Further, a compressive stress is generated in the shape memory alloy to which the pre-strain has been imparted to such an extent that the superelastic property is not destroyed, so that the thermal expansion coefficient of the entire composite material is reduced. In other words, this is a use method in which the expansion of the entire composite is reduced by applying a strain to the good thermal conductor with the recovery force due to the normal shape memory effect, and does not utilize the low thermal expansion characteristics of the shape memory alloy.

【0004】これは、CuAlMn基系合金、CuZnAl基系合
金、NiTi基系合金等の形状記憶合金は、熱弾性型マルテ
ンサイト変態の逆変態に付随して顕著な形状記憶効果を
示すものの、その熱膨張係数については変態に付随する
体積変化に起因した変化が生じるだけであり、-5×10
-6〜5×10-6/kといった低熱膨張係数を得ることができ
ないためである。
[0004] This is because shape memory alloys such as CuAlMn-based alloys, CuZnAl-based alloys, and NiTi-based alloys exhibit a remarkable shape memory effect accompanying the reverse transformation of thermoelastic martensitic transformation. As for the thermal expansion coefficient, only a change caused by a volume change accompanying the transformation occurs, and -5 × 10
This is because a low coefficient of thermal expansion such as −6 to 5 × 10 −6 / k cannot be obtained.

【0005】そこで上述の形状記憶合金について、より
広い低熱膨張温度幅(熱膨張係数が-5×10-6〜5×10
-6/kを示す上限温度と下限温度の差を指す。以下同様)
を示す特性を付加したり、あるいは広い温度領域(特定
の上限温度と下限温度により定められる温度領域を指
す。以下同様)において熱膨張係数が可変であるような
特性を付加することができれば、より優れた低熱膨張合
金として上記用途を始めとする様々な用途への利用が期
待できる(以下、上述の広い低熱膨張温度幅及び広い温
度領域において熱膨張係数が可変である特性をまとめて
低熱膨張特性という)。
Therefore, the above-mentioned shape memory alloy has a wider low thermal expansion temperature range (coefficient of thermal expansion is −5 × 10 −6 to 5 × 10 5).
It refers to the difference between the upper limit temperature and the lower limit temperature indicating -6 / k. Hereinafter the same)
Or a characteristic in which the coefficient of thermal expansion is variable in a wide temperature range (a temperature range defined by a specific upper limit temperature and a lower limit temperature; the same applies hereinafter). It can be expected to be used as an excellent low thermal expansion alloy in various applications including the above applications (hereinafter, the above-mentioned characteristics in which the thermal expansion coefficient is variable in a wide low thermal expansion temperature range and a wide temperature range are summarized as low thermal expansion characteristics. ).

【0006】従って、本発明の目的は、形状記憶特性及
び超弾性を有し、かつ広い温度領域において優れた低熱
膨張特性を示す低熱膨張合金を提供することである。
Accordingly, it is an object of the present invention to provide a low thermal expansion alloy having shape memory characteristics and superelasticity, and exhibiting excellent low thermal expansion characteristics in a wide temperature range.

【0007】[0007]

【課題を解決するための手段】上記課題に鑑み鋭意研究
の結果、本発明者らは、熱弾性型マルテンサイト変態を
生じる形状記憶合金に冷間加工による歪みを与えること
により、上記問題を解決できることを見出し、本発明に
想到した。
Means for Solving the Problems In view of the above-mentioned problems, as a result of intensive studies, the present inventors have solved the above-mentioned problems by imparting distortion due to cold working to a shape memory alloy that causes thermoelastic martensitic transformation. The present inventor has found out what can be done and arrived at the present invention.

【0008】すなわち、本発明の低熱膨張合金は、熱弾
性型マルテンサイト変態を生じる形状記憶合金の冷間加
工により得られ、加工率制御により-150〜150℃におけ
る平均熱膨張係数が-10×10-6〜10×10-6/kの間で可変
であることを特徴とする。
That is, the low thermal expansion alloy of the present invention is obtained by cold working of a shape memory alloy which generates a thermoelastic martensitic transformation, and has an average thermal expansion coefficient of -10 × at -150 to 150 ° C. by controlling the working ratio. It is characterized by being variable between 10 -6 and 10 × 10 -6 / k.

【0009】また、低熱膨張温度幅を50℃以上の幅で有
することができる。
[0009] Further, it can have a low thermal expansion temperature range of 50 ° C or more.

【0010】上述の冷間加工は、一方向のみに行っても
よいし、圧延等の場合は異なる複数の方向に行うことも
できる。
The above-described cold working may be performed in only one direction, or may be performed in a plurality of different directions in the case of rolling or the like.

【0011】上記低熱膨張合金は、マルテンサイト変態
開始温度とマルテンサイト変態終了温度の差が30℃以上
であることが好ましい。
In the low thermal expansion alloy, the difference between the martensitic transformation start temperature and the martensitic transformation end temperature is preferably 30 ° C. or more.

【0012】上記熱弾性型マルテンサイト変態を生じる
形状記憶合金は、CuAlMn基系合金、CuZnAl基系合金及び
NiTi基系合金の中から少なくとも一種選ばれるものであ
ることが好ましい。
The thermo-elastic martensitic transformation-induced shape memory alloys include CuAlMn-based alloys, CuZnAl-based alloys and
It is preferable that at least one selected from NiTi-based alloys is used.

【0013】また、CuAlMn基系合金及びCuZnAl基系合金
の場合は冷間加工による合計加工率(冷間加工を複数段
行った場合の合計の加工率)は0.05〜20%であることが
好ましく、NiTi基系合金の場合は0.05〜40%であること
が好ましい。
In the case of CuAlMn-based alloys and CuZnAl-based alloys, the total working rate by cold working (total working rate when a plurality of stages of cold working are performed) is preferably 0.05 to 20%. In the case of a NiTi-based alloy, the content is preferably 0.05 to 40%.

【0014】また、本発明の低熱膨張合金は、上記熱弾
性型マルテンサイト変態を生じる相を少なくとも15体積
%以上含む多相組織からなる合金であってもよい。
Further, the low thermal expansion alloy of the present invention may be an alloy having a multiphase structure containing at least 15% by volume or more of a phase which causes the thermoelastic martensitic transformation.

【0015】[0015]

【発明の実施の形態】[1] 熱弾性型マルテンサイト変態
を生じる形状記憶合金 本発明で用いられる熱弾性型マルテンサイト変態を生じ
る形状記憶合金は、高温のβ相(体心立方)が、低温で
マルテンサイト相(単斜晶)になる合金であり、形状記
憶特性及び超弾性を有するものである。このような合金
として、CuAlMn基系合金及びCuZnAl基系合金を始めとす
るCu基系合金、Ti基系合金、Fe基系合金、Au基系合金、
NiTi基系合金、NiAl基系合金等を挙げることができ、中
でもCuAlMn基系合金、CuZnAl基系合金、及びNiTi基系合
金が好ましい。
DESCRIPTION OF THE PREFERRED EMBODIMENTS [1] Shape memory alloy causing thermoelastic martensitic transformation The shape memory alloy causing thermoelastic martensitic transformation used in the present invention has a high-temperature β phase (body-centered cubic), An alloy that becomes a martensite phase (monoclinic) at low temperatures and has shape memory properties and superelasticity. As such alloys, Cu-based alloys including CuAlMn-based alloys and CuZnAl-based alloys, Ti-based alloys, Fe-based alloys, Au-based alloys,
Examples thereof include a NiTi-based alloy and a NiAl-based alloy. Among them, a CuAlMn-based alloy, a CuZnAl-based alloy, and a NiTi-based alloy are preferable.

【0016】(1) Cu基系合金 (a) CuAlMn基系合金 CuAlMn基系合金の好ましい組成として、5〜11質量%の
Al、及び5〜20質量%のMnを含有し、残部Cuと不可避的
不純物からなるものが挙げられる。
(1) Cu-based alloy (a) CuAlMn-based alloy The preferred composition of the CuAlMn-based alloy is 5 to 11% by mass.
Examples thereof include those containing Al and 5 to 20% by mass of Mn, with the balance being Cu and unavoidable impurities.

【0017】Al元素の含有率が5質量%未満ではCuAlMn
基系合金はβ単相を形成できず、また11質量%を超える
とCuAlMn基系合金は極めて脆くなる。Al元素のより好ま
しい含有率はMn元素の含有率により変化するが、7〜10
質量%である。
If the content of the Al element is less than 5% by mass, CuAlMn
The base alloy cannot form a β single phase, and if it exceeds 11% by mass, the CuAlMn base alloy becomes extremely brittle. The more preferable content of the Al element changes depending on the content of the Mn element.
% By mass.

【0018】Mn元素を含有することによりβ相が存在し
得る組成範囲が低Al側へ広がり、CuAlMn基系合金の冷間
加工性は著しく向上する。Mn元素の添加量が5質量%未
満では満足な冷間加工性が得られず、かつβ単相領域を
形成することができない。またMn元素の添加量が20質量
%を超えると、十分な形状回復特性が得られない。好ま
しいMnの含有率は8〜14質量%である。Mn含有率の増加
に従って、低熱膨張温度幅がより低い温度領域にシフト
する。
By containing the Mn element, the composition range in which the β phase can exist is widened toward the low Al side, and the cold workability of the CuAlMn-based alloy is remarkably improved. If the addition amount of the Mn element is less than 5% by mass, satisfactory cold workability cannot be obtained, and a β single phase region cannot be formed. If the amount of the Mn element exceeds 20% by mass, sufficient shape recovery characteristics cannot be obtained. The preferred Mn content is 8 to 14% by mass. As the Mn content increases, the low thermal expansion temperature range shifts to a lower temperature region.

【0019】上記組成のCuAlMn基系合金は熱間加工及び
冷間加工性に富み、冷間で90%以上の加工が可能であ
り、極細線等に容易に成形することができる。
The CuAlMn-based alloy having the above composition is excellent in hot workability and cold workability, can be worked at 90% or more in the cold state, and can be easily formed into a fine wire or the like.

【0020】(b) CuZnAl基系合金 CuZnAl基系合金の好ましい組成として、4〜10質量%の
Al、及び12〜30質量%のZnを含有し、残部Cuと不可避的
不純物からなるものが挙げられる。
(B) CuZnAl-based alloy The preferred composition of the CuZnAl-based alloy is 4 to 10% by mass.
Examples thereof include those containing Al and 12 to 30% by mass of Zn, with the balance being Cu and unavoidable impurities.

【0021】Al元素の含有率が4質量%未満ではCuZnAl
基系合金はβ単相を形成できず、また10質量%を超える
とCuZnAl基系合金は極めて脆くなる。Al元素のより好ま
しい含有率はZn元素の含有率により変化するが、6〜8
質量%である。
If the content of the Al element is less than 4% by mass, CuZnAl
The base alloy cannot form a β single phase, and if it exceeds 10% by mass, the CuZnAl base alloy becomes extremely brittle. The more preferable content of the Al element changes depending on the content of the Zn element.
% By mass.

【0022】Zn元素を含有することによりβ相が存在し
得る組成範囲が低Al側へ広がり、CuZnAl基系合金の冷間
加工性は著しく向上する。Zn元素の添加量が12質量%未
満では満足な冷間加工性が得られず、かつβ単相領域を
形成することができない。またZn元素の添加量が30質量
%を超えると、十分な形状回復特性が得られない。好ま
しいZnの含有率は18〜26質量%である。
By containing the Zn element, the composition range in which the β phase can be present expands to the low Al side, and the cold workability of the CuZnAl-based alloy is remarkably improved. If the amount of the Zn element is less than 12% by mass, satisfactory cold workability cannot be obtained, and a β single phase region cannot be formed. If the amount of the Zn element exceeds 30% by mass, sufficient shape recovery characteristics cannot be obtained. The preferred Zn content is 18 to 26% by mass.

【0023】(C) 基本組成以外の元素 上記基本組成の元素以外に、本発明のCu基系合金はさら
に、Ni、Co、Fe、Ti、V、Cr、Si、Nb、Mo、W、Sn、S
b、Mg、P、Be、Zr、B、C、Ag、Zn(CuAlMn基系合金に
おいて)、Mn(CuZnAl基系合金において)及びミッシュ
メタルからなる群から選ばれた1種又は2種以上を含有
することができる。その中でNi及び/又はCoが特に好ま
しい。これらの元素は冷間加工性を維持したまま固溶強
化してCu基系合金の強度を向上させる効果を発揮する。
これらの添加元素の含有率は合計で0.001 〜10質量%で
あるのが好ましく、特に0.001 〜5質量%が好ましい。
これらの元素の合計含有率が10質量%を超えるとマルテ
ンサイト変態温度が低下し、β単相組織が不安定にな
る。
(C) Elements other than the basic composition In addition to the elements of the above basic composition, the Cu-based alloy of the present invention further comprises Ni, Co, Fe, Ti, V, Cr, Si, Nb, Mo, W, Sn , S
b, Mg, P, Be, Zr, B, C, Ag, Zn (in CuAlMn-based alloy), Mn (in CuZnAl-based alloy) and one or more selected from the group consisting of misch metal Can be contained. Among them, Ni and / or Co are particularly preferred. These elements exert the effect of solid solution strengthening while maintaining the cold workability to improve the strength of the Cu-based alloy.
The content of these additional elements is preferably 0.001 to 10% by mass in total, and particularly preferably 0.001 to 5% by mass.
If the total content of these elements exceeds 10% by mass, the martensitic transformation temperature decreases, and the β single phase structure becomes unstable.

【0024】Ni、Co、Fe、Sn及びSbは基地組織の強化に
有効な元素である。Ni及びFeの好ましい含有率はそれぞ
れ0.001 〜3質量%である。CoはまたCoAlの形成により
析出強化するが、過剰になると合金の靭性を低下させ
る。Coの好ましい含有率は0.001 〜2質量%である。Sn
及びSbの好ましい含有率はそれぞれ0.001 〜1質量%で
ある。
Ni, Co, Fe, Sn and Sb are effective elements for strengthening the matrix structure. The preferred contents of Ni and Fe are each 0.001 to 3% by mass. Co also strengthens precipitation by forming CoAl, but when excessive, reduces the toughness of the alloy. The preferred content of Co is 0.001 to 2% by mass. Sn
And the preferable content of Sb is 0.001 to 1% by mass, respectively.

【0025】Tiは合金特性を阻害する元素であるN及びO
と結合して、酸化物及び窒化物を形成する。またBと複
合添加するとボライドを形成し、析出強化に寄与する。
Tiの好ましい含有率は0.001 〜2質量%である。
Ti is an element which inhibits alloy properties, N and O
Forms oxides and nitrides. When added in combination with B, boron is formed and contributes to precipitation strengthening.
The preferable content of Ti is 0.001 to 2% by mass.

【0026】W、V、Nb、Mo及びZrは硬さを向上させて耐
摩耗性を向上させる効果を有する。またこれらの元素は
ほとんど合金基地に固溶しないので、bcc 結晶として析
出し、析出強化に有効である。W、V、Nb、Mo及びZrの好
ましい含有率はそれぞれ0.001 〜1質量%である。
W, V, Nb, Mo and Zr have the effect of improving hardness and improving wear resistance. Further, since these elements hardly form a solid solution in the alloy matrix, they precipitate as bcc crystals and are effective for precipitation strengthening. The preferred contents of W, V, Nb, Mo and Zr are each 0.001 to 1% by mass.

【0027】Crは耐摩耗性及び耐食性を維持するのに有
効な元素である。Crの好ましい含有率は0.001 〜2質量
%である。
Cr is an element effective for maintaining abrasion resistance and corrosion resistance. The preferable Cr content is 0.001 to 2% by mass.

【0028】Siは耐食性を向上させる効果を有する。Si
の好ましい含有率は0.001 〜2質量%である。
Si has the effect of improving corrosion resistance. Si
Is preferably 0.001 to 2% by mass.

【0029】Mgは合金特性を阻害する元素であるN及びO
を除去するとともに、阻害元素であるSを硫化物として
固定し、熱間加工性や靭性の向上に効果があるが、多量
の添加は粒界偏析を招き、脆化の原因となる。Mgの好ま
しい含有率は0.001 〜0.5 質量%である。
Mg is an element that inhibits alloy properties, N and O
Is removed, and S, which is an inhibitory element, is fixed as a sulfide, which is effective in improving hot workability and toughness. However, a large amount of addition causes grain boundary segregation and causes embrittlement. The preferred content of Mg is 0.001 to 0.5% by mass.

【0030】Pは脱酸剤として作用し、靭性向上の効果
を有する。Pの好ましい含有率は0.01〜0.5 質量%であ
る。
P acts as a deoxidizing agent and has an effect of improving toughness. The preferred content of P is 0.01 to 0.5% by mass.

【0031】Beは基地組織を強化する効果を有する。Be
の好ましい含有率は0.001 〜1質量%である。
Be has the effect of strengthening the base tissue. Be
Is preferably 0.001 to 1% by mass.

【0032】CuAlMn基系合金においてZnは形状記憶温度
を上昇させる効果を有する。Znの好ましい含有率は0.00
1 〜5質量%である。
In a CuAlMn-based alloy, Zn has the effect of increasing the shape memory temperature. The preferred content of Zn is 0.00
It is 1 to 5% by mass.

【0033】B及びCは粒界に偏析し、粒界を強化する効
果を有する。B及びCの好ましい含有率はそれぞれ0.001
〜0.5 質量%である。
B and C segregate at the grain boundaries and have the effect of strengthening the grain boundaries. The preferred content of B and C is 0.001 each.
0.5% by mass.

【0034】Agは冷間加工性を向上させる効果を有す
る。Agの好ましい含有率は0.001 〜2質量%である。
Ag has the effect of improving cold workability. The preferred content of Ag is 0.001 to 2% by mass.

【0035】ミッシュメタルは脱酸剤として作用し、靭
性向上の効果を有する。ミッシュメタルの好ましい含有
率は0.001 〜5質量%である。
The misch metal acts as a deoxidizing agent and has an effect of improving toughness. The preferred content of misch metal is 0.001 to 5% by mass.

【0036】(2) NiTi基系合金 NiTi基系合金の好ましい組成として、54.0〜57.1質量%
のNi、及び42.9〜46.0質量%のTiを含有し、その他不可
避的不純物からなるものが挙げられる。
(2) NiTi-based alloy The preferred composition of the NiTi-based alloy is 54.0 to 57.1% by mass.
And 42.9 to 46.0% by mass of Ti and other inevitable impurities.

【0037】Niの含有率が54.0質量%未満又は57.1質量
%超の場合は、形状記憶効果がない。好ましくは、Niの
含有率は、55.1〜56.1質量%にする。
When the Ni content is less than 54.0% by mass or more than 57.1% by mass, there is no shape memory effect. Preferably, the content of Ni is 55.1 to 56.1% by mass.

【0038】Ni及び/又はTiの一部をV、Cr、Fe、Co、C
u、Nbの何れか一種又は二種以上を0.01〜5.0質量%の範
囲で置換することにより、各種用途に応じて強度、耐食
性、加工性等を向上させることができる。しかし、0.01
質量%未満では、その効果が小さく、5.0質量%を超え
ると加工性が低下するとともに、NiTi基系合金の材料特
性を満足しなくなる。
Part of Ni and / or Ti is V, Cr, Fe, Co, C
By substituting one or more of u and Nb in the range of 0.01 to 5.0% by mass, strength, corrosion resistance, workability and the like can be improved according to various uses. But 0.01
If the amount is less than 5% by mass, the effect is small.

【0039】この場合の組成は、50.0〜57.0質量%のN
i、40.0〜50.0質量%のTi、及びV、Cr、Fe、Co、Cu、Nb
の何れか一種又は二種以上を0.01〜5.0質量%含むこと
が好ましい。
The composition in this case is 50.0 to 57.0 mass% of N
i, 40.0 to 50.0% by mass of Ti, and V, Cr, Fe, Co, Cu, Nb
It is preferable that one or more of the above are contained in an amount of 0.01 to 5.0% by mass.

【0040】[2] 製造方法 本発明の低熱膨張合金は、β相を15体積%以上含み、そ
の他α相、金属間化合物、ホイスラー相等からなる多相
組織からなる合金であればよいが、β相の含有率は50体
積%以上がより好ましい。特に好ましくは、実質的にβ
単相からなることである。
[2] Manufacturing Method The low thermal expansion alloy of the present invention may be an alloy containing 15% by volume or more of a β phase and an alloy having a multiphase structure including an α phase, an intermetallic compound, a Heusler phase, and the like. The content of the phase is more preferably 50% by volume or more. Particularly preferably, substantially β
It consists of a single phase.

【0041】(1) 合金の成形 [1]で述べた組成の合金を溶解鋳造し、熱間圧延、冷間
圧延、プレス等の成形加工法により所望の形状に成形す
る。
(1) Forming of Alloy An alloy having the composition described in [1] is melt-cast and formed into a desired shape by a forming method such as hot rolling, cold rolling, and pressing.

【0042】(2) 溶体化処理 次に、固溶体温度範囲で加熱し、結晶組織をβ単相に変
態させる。β単相域温度での保持時間は0.1 分以上であ
れば良いが、保持時間が60分を超えると酸化の影響が無
視できなくなるので、保持時間は0.1 〜60分であるのが
好ましい。β単相からなる合金を得たい場合は、加熱処
理後、50℃/秒以上の速度で急冷して、β単相状態を凍
結させることが好ましい。より好ましい冷却速度は200
℃/秒以上である。急冷は水等の冷媒に入れるか、強制
空冷によって行う。冷却速度を50℃/秒未満にするとα
相等の析出が生じ、多相組織からなる合金となる。
(2) Solution treatment Next, the solution is heated in the solid solution temperature range to transform the crystal structure into a β single phase. The holding time at the β single phase region temperature may be 0.1 minute or more, but if the holding time exceeds 60 minutes, the effect of oxidation cannot be ignored, so the holding time is preferably 0.1 to 60 minutes. When it is desired to obtain an alloy composed of a β single phase, it is preferable to freeze the β single phase state by rapidly cooling at a rate of 50 ° C./sec or more after the heat treatment. More preferred cooling rate is 200
C / sec or more. The quenching is carried out by putting into a coolant such as water or by forced air cooling. When the cooling rate is less than 50 ° C / sec, α
Precipitation of phases and the like occurs, resulting in an alloy having a multiphase structure.

【0043】Cu基系合金において、好ましい加熱温度は
600℃以上、より好ましくは700〜900℃である。
For a Cu-based alloy, the preferred heating temperature is
The temperature is at least 600 ° C, more preferably 700 to 900 ° C.

【0044】NiTi基系合金において、好ましい加熱温度
は400℃以上、より好ましくは500〜900℃である。
In the NiTi-based alloy, a preferable heating temperature is 400 ° C. or higher, more preferably 500 to 900 ° C.

【0045】但し、CuAlMn基系合金についてはAl元素が
8質量%以下の組成の場合に、またCuZnAl基系合金につ
いてはAl元素が5質量%以下の組成の場合に、加熱温度
を400℃以上700℃未満にすると、β相を15体積%以上含
み、その他α相、金属間化合物、ホイスラー相等の多相
組織からなる合金となる。
However, when the composition of the CuAlMn-based alloy is 8% by mass or less of the Al element, and when the composition of the CuZnAl-based alloy is 5% by mass or less of the Al element, the heating temperature is set to 400 ° C. or more. If the temperature is lower than 700 ° C., an alloy containing a β phase of 15% by volume or more and having a multiphase structure such as an α phase, an intermetallic compound, and a Heusler phase is obtained.

【0046】(3) 時効処理 次にCu基系合金については時効処理を行うことが好まし
い。β単相からなる合金を得たい場合は、時効処理温度
が低過ぎるとβ相は不安定であり、室温に放置しておく
とマルテンサイト変態温度が変化することがある。逆に
時効処理温度が高すぎると、α相の析出が起こり、形状
記憶特性及び超弾性が低下する傾向がある。
(3) Aging Treatment Next, it is preferable to perform aging treatment on the Cu-based alloy. When it is desired to obtain an alloy consisting of a β single phase, if the aging treatment temperature is too low, the β phase is unstable, and if left at room temperature, the martensitic transformation temperature may change. Conversely, if the aging temperature is too high, precipitation of the α phase occurs, and the shape memory properties and superelasticity tend to decrease.

【0047】β単相からなる合金を得るための好ましい
時効処理温度は250℃以下、より好ましくは100〜200℃
である。
The preferred aging temperature for obtaining an alloy consisting of β single phase is 250 ° C. or less, more preferably 100 to 200 ° C.
It is.

【0048】時効処理時間は合金の組成により異なる
が、1〜300 分が好ましく、5〜100分がより好まし
い。時効処理時間が1分未満では十分な時効効果が得ら
れず、また300 分を超えると、α相の析出が生じてしま
い、低熱膨張特性が低下してしまう。
The aging time varies depending on the composition of the alloy, but is preferably 1 to 300 minutes, more preferably 5 to 100 minutes. If the aging treatment time is less than 1 minute, a sufficient aging effect cannot be obtained. If the aging treatment time exceeds 300 minutes, precipitation of the α phase occurs, and the low thermal expansion characteristics are reduced.

【0049】β単相からなる合金は形状記憶特性かつ超
弾性を有する低剛性材料である。一方、α相その他の相
からなる多相合金は高剛性材料であるが、形状記憶特性
あるいは超弾性に劣る。しかし、α相の方が加工性が良
いため、高い冷間加工率が実現できる。
The alloy composed of the β single phase is a low rigid material having shape memory characteristics and superelasticity. On the other hand, a multi-phase alloy composed of the α phase and other phases is a highly rigid material, but is inferior in shape memory characteristics or superelasticity. However, since the α phase has better workability, a high cold working rate can be realized.

【0050】(4) 冷間加工 時効処理後に冷間加工又は温間加工による強加工変形を
加え、マルテンサイト相と共に転位等の永久歪みを形成
させる。好ましくは、冷間加工である。加工率の制御に
より適度に導入された転位等の永久歪み(内部応力場)
を利用してオーステナイト逆変態及びマルテンサイト変
態の変態幅を30℃以上に広げることができる。これによ
り温度変化に伴う上述の変態は少しずつ起こり、温度変
化による膨張及び収縮は少しずつ打ち消されるため、広
い温度幅で低熱膨張特性が得られる。従って、加工率が
低すぎると変態幅が小さく、その結果低熱膨張特性が得
られる温度幅が狭くなり、逆に加工率が高過ぎるとマル
テンサイト変態が阻害されるため熱膨張率が大きくな
る。
(4) Cold working After the aging treatment, a strong working deformation by cold working or warm working is applied to form permanent deformation such as dislocation together with the martensite phase. Preferably, it is cold working. Permanent strains such as dislocations introduced appropriately by controlling the processing rate (internal stress field)
The transformation width of the austenite reverse transformation and the martensitic transformation can be extended to 30 ° C. or more by utilizing the above. Thereby, the above-mentioned transformation accompanying the temperature change occurs little by little, and the expansion and contraction due to the temperature change are canceled little by little, so that a low thermal expansion characteristic can be obtained in a wide temperature range. Therefore, if the working ratio is too low, the transformation width is small, and consequently the temperature range at which low thermal expansion characteristics can be obtained becomes narrow. Conversely, if the working ratio is too high, the martensitic transformation is hindered and the thermal expansion coefficient becomes large.

【0051】低熱膨張特性が得られる原理を図1及び図
2により説明する。図1に本発明の低熱膨張合金を加熱
・冷却した場合の熱膨張率変化の例を示す。図1中のM
s、Mf、As及びAfは、それぞれマルテンサイト変態開始
温度、マルテンサイト変態終了温度、オーステナイト逆
変態開始温度及びオーステナイト逆変態終了温度を示
す。この場合、マルテンサイト変態の変態幅(Ms−Mf)
又はオーステナイト逆変態の変態幅(Af−As)が30℃以
上になるように加工するのが好ましい。また、図2に同
一の低熱膨張合金を加熱・冷却した場合の熱膨張率と熱
膨張係数変化の例を示す。図2中のTs及びTfはそれぞれ
冷却過程における低熱膨張温度幅の上限温度及び下限温
度とし、またTs'及びTf'は加熱過程における低熱膨張温
度幅の下限温度及び上限温度とする。また、冷却・加熱
の各過程における低熱膨張温度幅をそれぞれ冷却低熱膨
張温度幅ΔT(=Ts−Tf)及び加熱低熱膨張温度幅ΔT'
(=Tf'−Ts')とする。このように上述の変態幅を適度
に広げることにより、広い低熱膨張温度幅ΔT及びΔT'
が得られる。
The principle by which low thermal expansion characteristics are obtained will be described with reference to FIGS. FIG. 1 shows an example of a change in the coefficient of thermal expansion when the low thermal expansion alloy of the present invention is heated and cooled. M in FIG.
s, Mf, As and Af indicate a martensitic transformation start temperature, a martensitic transformation end temperature, an austenite reverse transformation start temperature and an austenite reverse transformation end temperature, respectively. In this case, the transformation width of the martensitic transformation (Ms-Mf)
Alternatively, it is preferable to perform processing so that the transformation width (Af-As) of the austenite reverse transformation is 30 ° C. or more. FIG. 2 shows an example of the thermal expansion coefficient and the thermal expansion coefficient change when the same low thermal expansion alloy is heated and cooled. In FIG. 2, Ts and Tf are the upper limit temperature and the lower limit temperature of the low thermal expansion temperature range in the cooling process, respectively, and Ts 'and Tf' are the lower limit temperature and the upper limit temperature of the low thermal expansion temperature range in the heating process, respectively. Further, the low thermal expansion temperature width in each process of cooling and heating is defined as a cooling low thermal expansion temperature width ΔT (= Ts−Tf) and a heating low thermal expansion temperature width ΔT ′.
(= Tf′−Ts ′). As described above, by appropriately expanding the transformation width, a wide low thermal expansion temperature width ΔT and ΔT ′ can be obtained.
Is obtained.

【0052】但し、NiTi基系合金の場合は、Mf以下のマ
ルテンサイト相領域においても低熱膨張温度幅が得られ
る場合がある。この理由は定かではないが、Mf以下にお
いても残留しているオーステナイト相が少しずつ変態す
ることが考えられる。
However, in the case of a NiTi-based alloy, a low thermal expansion temperature range may be obtained even in a martensite phase region of Mf or less. The reason for this is not clear, but it is conceivable that the remaining austenite phase is transformed little by little even below Mf.

【0053】また、加工率を変化させることにより、変
態温度幅だけでなく温度変化−熱膨張率ヒステリシスの
形態が図3のように変化し、それに伴い温度変化−熱膨
張係数ヒステリシスの形態も変化するため、適宜合金組
成及び/又は加工率を選択することにより-150〜150℃
において-10×10-6〜10×10-6/kの間で任意の平均熱膨
張係数を選択的に得ることができる。
Further, by changing the working ratio, not only the transformation temperature range but also the form of the temperature change-thermal expansion coefficient hysteresis changes as shown in FIG. 3, and accordingly, the form of the temperature change-thermal expansion coefficient hysteresis also changes. -150 to 150 ° C by selecting the alloy composition and / or processing rate as appropriate
, An arbitrary average coefficient of thermal expansion can be selectively obtained between -10 × 10 −6 and 10 × 10 −6 / k.

【0054】冷間加工としては、冷間圧延、冷間伸線等
が好ましい。冷間加工は、一方向へのみ加工してもよい
し、又は異なる複数の方向に加工を繰り返してもよい。
一方向加工をした場合は、異方性を生じているため、加
工方向において特に優れた低熱膨張特性が得られる。一
方向のみにしか熱応力が掛からない使用形態に用いられ
る棒材のような部材に適している。低熱膨張特性の異方
性を少なくし、複数の方向に低熱膨張特性を得るために
は、少なくとも二方向以上に加工することが好ましい。
異なる複数の方向に加工する場合は、それぞれの方向に
おいて行った加工の加工率の合計が必要な合計加工率に
なるようにするのが好ましい。例えば、二方向にクロス
圧延して最大加工率10%のサンプルを作製する場合は、
一方向につき5%ずつの加工率で圧延する。
As the cold working, cold rolling, cold drawing and the like are preferable. The cold working may be performed in only one direction, or may be repeated in different directions.
When one-way processing is performed, since anisotropy occurs, particularly excellent low thermal expansion characteristics can be obtained in the processing direction. It is suitable for a member such as a bar used in a use form in which thermal stress is applied only in one direction. In order to reduce the anisotropy of the low thermal expansion characteristic and obtain the low thermal expansion characteristic in a plurality of directions, it is preferable to process in at least two directions.
In the case of processing in a plurality of different directions, it is preferable that the sum of the processing rates of the processing performed in each direction is a necessary total processing rate. For example, when making a sample with a maximum processing rate of 10% by cross rolling in two directions,
Roll at a processing rate of 5% per direction.

【0055】但し、冷間加工は一般に僅かの加工率でし
か実施することができないために、必要とされる加工が
1回の加工工程で終了しない場合には、複数段の冷間加
工を実施することが好ましい。1回の加工工程においてC
u基系合金では0.01〜3%、NiTi基系合金では0.01〜2
%の加工率が好ましい。
However, since cold working can generally be carried out only at a small working rate, the required working is difficult.
If the processing is not completed in one processing step, it is preferable to perform a plurality of stages of cold working. C in one processing step
0.01-3% for u-base alloy, 0.01-2% for NiTi-base alloy
% Is preferred.

【0056】優れた低熱膨張特性が得られる合計加工率
は、CuAlMn基系合金及びCuZnAl基系合金では0.05〜20%
が好ましく、より好ましくは2〜10%である。また、Ni
Ti基系合金では、0.05〜40%が好ましく、より好ましく
は1〜8%である。この範囲の加工率制御により-150〜
150℃においてが-10×10-6〜10×10-6/kの間で任意の平
均熱膨張係数及び50℃以上の広い低熱膨張温度幅が得ら
れる。
The total processing rate at which excellent low thermal expansion characteristics are obtained is 0.05 to 20% for CuAlMn-based alloy and CuZnAl-based alloy.
Is more preferable, and more preferably 2 to 10%. Also, Ni
For Ti-based alloys, the content is preferably 0.05 to 40%, more preferably 1 to 8%. -150 ~
At 150 ° C., an arbitrary average coefficient of thermal expansion and a wide low thermal expansion temperature range of 50 ° C. or more can be obtained between −10 × 10 −6 and 10 × 10 −6 / k.

【0057】冷間加工は、0〜80℃の温度範囲で行うこ
とが好ましい。
The cold working is preferably performed in a temperature range of 0 to 80 ° C.

【0058】また、冷間加工により、板材を始め線材、
棒材、パイプ等様々な形態に加工することができる。
Further, by cold working, a wire including a plate material,
It can be processed into various forms such as rods and pipes.

【0059】また、板材を作製する場合の冷間圧延を行
う場合は、圧延前のスラブの厚みが0.01〜10mmであるこ
とが好ましい。圧延前スラブの厚みが上述の範囲であれ
ば、同加工率において同程度の低熱膨張特性が得られ
る。
When cold rolling is performed in the production of a sheet material, the thickness of the slab before rolling is preferably 0.01 to 10 mm. If the thickness of the slab before rolling is in the above range, the same low thermal expansion characteristics can be obtained at the same processing rate.

【0060】[4] 特性 上述のように歪みが加えられた低熱膨張合金は、従来に
比べ、下記(1)〜(4)に述べるような優れた低熱膨張特性
を示す。
[4] Characteristics The low thermal expansion alloy strained as described above exhibits excellent low thermal expansion characteristics as described in the following (1) to (4) as compared with the conventional one.

【0061】(1) 熱膨張係数の調整 加工率及び加工方向の制御により、-150〜150℃の温度
範囲においてが-10×10 -6〜10×10-6/kの間で任意の平
均熱膨張係数に調整したり、負の熱膨張係数にしたりす
ることが可能である。
(1) Adjustment of thermal expansion coefficient By controlling the processing rate and the processing direction, the temperature of -150 to 150 ° C.
-10 × 10 in range -6~ 10 × 10-6any flat between / k
Adjust the thermal expansion coefficient or set a negative thermal expansion coefficient.
It is possible to

【0062】(2) 低熱膨張係数の温度幅 加工率及び合金組成の制御により、50℃以上にわたる温
度幅で-5×10-6〜5×1O-6/kの低い熱膨張係数が得ら
れる。合金におけるβ相の含有率が高いほど低熱膨張温
度幅が広くなる。
(2) Temperature range of low thermal expansion coefficient By controlling the working ratio and alloy composition, a low thermal expansion coefficient of -5 × 10 -6 to 5 × 10 -6 / k can be obtained in a temperature range of 50 ° C. or more. . The higher the content of the β phase in the alloy, the wider the low thermal expansion temperature range.

【0063】(3) 低熱膨張温度幅が設定できる温度領域 加工率及び合金組成の制御により、150℃以下の任意の
温度領域において50℃以上の低熱膨張温度幅を設定する
ことが可能である。
(3) Temperature range in which low thermal expansion temperature range can be set By controlling the processing rate and alloy composition, it is possible to set a low thermal expansion temperature range of 50 ° C. or more in an arbitrary temperature range of 150 ° C. or less.

【0064】(4) 繰り返し特性 少なくとも400回以上の加熱・冷却工程を繰り返して
も、低熱膨張特性を保持することができる。
(4) Repetitive Characteristics Even if the heating / cooling process is repeated at least 400 times or more, the low thermal expansion characteristics can be maintained.

【0065】[0065]

【実施例】本発明を以下の実施例によりさらに詳細に説
明するが、本発明はこの例に限定されるものではない。
The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples.

【0066】実施例1 (1) 板材の作製 Cu81.0質量%、Al8.7質量%、Mn10.3質量%の組成を有
するCuAlMn基系合金を溶解・鋳造し、平均50℃/分の冷
却速度で凝固して、直径20mmφのインゴットとした。こ
のインゴットを800℃で厚さ2mmまで熱間圧延した後切
削加工し、長手14mm×幅5mm×厚さ2mmの板材を得た。
得られた板材を850 ℃で15分間の溶体化処理した後、氷
水中へ投入して急冷し、次いで150 ℃で15分間の時効処
理を行い、実質的にβ単相からなる板材を得た。
Example 1 (1) Preparation of Plate Material A CuAlMn-based alloy having a composition of 81.0% by mass of Cu, 8.7% by mass of Al, and 10.3% by mass of Mn was melted and cast, and cooled at an average of 50 ° C./min. Solidified at a speed to form an ingot having a diameter of 20 mmφ. This ingot was hot-rolled at 800 ° C. to a thickness of 2 mm and then cut to obtain a plate material having a length of 14 mm × a width of 5 mm × a thickness of 2 mm.
The obtained plate was subjected to a solution treatment at 850 ° C. for 15 minutes, then rapidly cooled by being put into ice water, and then subjected to an aging treatment at 150 ° C. for 15 minutes to obtain a plate substantially consisting of β single phase. .

【0067】(2) 冷間圧延による試料の作製 得られた板材につき、25℃で合計加工率5%の冷間圧延
を行った後切削加工し、長手15mm×幅5mm×厚さ1.9mm
の試料を作製した。表1に圧延方向を示す。
(2) Preparation of Sample by Cold Rolling The obtained sheet material was subjected to cold rolling at 25 ° C. with a total working ratio of 5%, and then cut to obtain a 15 mm long × 5 mm wide × 1.9 mm thick.
Was prepared. Table 1 shows the rolling directions.

【0068】(3) 熱膨張係数の測定 熱膨張計(NETZSCH製Dilatometer DIL402C)を用い、-6
0〜60℃の温度範囲及び冷却速度3℃/minで測定し、冷
却過程における平均熱膨張係数を調べた。表1に熱膨張
係数の測定方向示す。また、その結果を図4に示す。
(3) Measurement of coefficient of thermal expansion Using a thermal dilatometer (Dilatometer DIL402C manufactured by NETZSCH),
The measurement was performed in a temperature range of 0 to 60 ° C and a cooling rate of 3 ° C / min, and the average coefficient of thermal expansion during the cooling process was examined. Table 1 shows the measurement directions of the thermal expansion coefficient. FIG. 4 shows the results.

【0069】表1 熱間圧延方向を基準にした冷間圧延
方向及び熱膨張係数測定方向
Table 1 Cold rolling direction and thermal expansion coefficient measuring direction based on hot rolling direction

【0070】図4から明らかなように、長手・幅クロス
圧延を行った場合はいずれの測定方向でも、また一方向
圧延の場合は圧延方向と測定方向が同じ場合に、-10×1
0-6〜10×10-6/kの低い熱膨張係数が得られる。一方向
圧延の場合は、異方性を生じているため、圧延方向と測
定方向が異なる場合は比較的大きな熱膨張係数が得られ
るが、一方向のみにしか熱応力が掛からない使用形態に
用いられる棒材のような部材に適していると言える。複
数の方向に低い熱膨張係数を得るためには、少なくとも
二つ以上の方向に圧延することが好ましい。
As is apparent from FIG. 4, when the longitudinal and width cross rolling was performed, the measurement direction was -10 × 1 in any measurement direction, and in the case of unidirectional rolling, the rolling direction and the measurement direction were the same.
A low thermal expansion coefficient of 0 -6 to 10 × 10 -6 / k is obtained. In the case of unidirectional rolling, since the anisotropy is generated, a relatively large coefficient of thermal expansion can be obtained when the rolling direction and the measurement direction are different, but it is used in a usage form in which thermal stress is applied only in one direction It can be said that it is suitable for a member such as a rod material. In order to obtain a low coefficient of thermal expansion in a plurality of directions, it is preferable to perform rolling in at least two or more directions.

【0071】実施例2 (1) 板材の作製 板材の作製は、実施例1と同様に行った。 Example 2 (1) Preparation of Plate Material The plate material was prepared in the same manner as in Example 1.

【0072】(2) 冷間圧延による試料の作製 得られた板材につき、1〜8%の間で合計加工率を変え
て長手方向に冷間圧延を行った以外は実施例1と同様に
試料を作製した。
(2) Preparation of Sample by Cold Rolling The obtained sheet material was subjected to cold rolling in the longitudinal direction while changing the total working ratio between 1% and 8% in the same manner as in Example 1 except that the sample was cold rolled. Was prepared.

【0073】(3) 熱膨張係数の測定 -100〜100℃の加熱・冷却過程の熱膨張係数を長手方向
のみに測定した以外は実施例1と同様に行った(加熱速
度及び冷却速度は共に3℃/min)。冷却低熱膨張温度幅
ΔT及び加熱低熱膨張温度幅ΔT'の結果を表2に示す
(試料No.1〜8)。
(3) Measurement of coefficient of thermal expansion The same procedure as in Example 1 was carried out except that the coefficient of thermal expansion in the heating / cooling process at -100 to 100 ° C. was measured only in the longitudinal direction. 3 ° C / min). Table 2 shows the results of the cooling low thermal expansion temperature width ΔT and the heating low thermal expansion temperature width ΔT ′ (Sample Nos. 1 to 8).

【0074】比較例1 冷間圧延を行わなかった以外は実施例2と同様に板材を
作製し、熱膨張係数を測定した。結果を表2に示す(試
料No.9)。
Comparative Example 1 A sheet material was prepared in the same manner as in Example 2 except that cold rolling was not performed, and the thermal expansion coefficient was measured. The results are shown in Table 2 (Sample No. 9).

【0075】 [0075]

【0076】表2から明らかなように、実施例2のCuAl
Mn基系合金(試料No.1〜8)では、合計加工率1〜8
%の範囲において、ΔTは100℃以上及びΔT'は90℃以上
になることがわかる。また、比較例1の冷間加工を施さ
ない試料No.9では、ΔTは25℃と狭い。
As is clear from Table 2, the CuAl of Example 2
For Mn-based alloys (Sample Nos. 1 to 8), the total processing rate was 1 to 8
In the range of%, ΔT is 100 ° C. or more and ΔT ′ is 90 ° C. or more. Further, in Sample No. 9 of Comparative Example 1 which was not subjected to cold working, ΔT was as narrow as 25 ° C.

【0077】実施例3 (1) 板材の作製 板材の作製は、実施例1と同様に行った。 Example 3 (1) Preparation of Plate Material The plate material was prepared in the same manner as in Example 1.

【0078】(2) 冷間圧延による試料の作製 得られた板材につき、合計加工率5%で長手方向に冷間
圧延を行った以外は実施例1と同様に試料を作製した。
(2) Preparation of Sample by Cold Rolling A sample was prepared in the same manner as in Example 1 except that the obtained plate was subjected to cold rolling in the longitudinal direction at a total processing rate of 5%.

【0079】(3) 熱膨張係数の測定 熱膨張係数の測定は、長手方向を0°として90°までの
所定の角度に変化させながら測定した以外は実施例1と
同様に行った。平均熱膨張係数の結果を表3に示す。
(3) Measurement of Thermal Expansion Coefficient The thermal expansion coefficient was measured in the same manner as in Example 1 except that the measurement was performed while changing the longitudinal direction to 0 ° and changing the angle to a predetermined angle up to 90 °. Table 3 shows the results of the average thermal expansion coefficient.

【0080】 [0080]

【0081】表3から明らかなように、圧延方向からの
角度が大きくなるほど平均熱膨張係数は大きくなり、異
方性を生じていることが分かる。一方向圧延は、一方向
のみにしか熱応力が掛からない使用形態に用いられる部
材の作製に適していると言える。
As is evident from Table 3, as the angle from the rolling direction increases, the average coefficient of thermal expansion increases and the anisotropy occurs. It can be said that the unidirectional rolling is suitable for producing a member used in a usage form in which thermal stress is applied only in one direction.

【0082】実施例4 (1) 板材の作製 長手15mm×幅5mm×厚さ0.92mm及び長手15mm×幅5mm×
厚さ3.42mmの板材を作製した以外は、実施例1と同様に
行った。
Example 4 (1) Preparation of Plate Material 15 mm long × 5 mm wide × 0.92 mm thick and 15 mm long × 5 mm wide ×
The procedure was performed in the same manner as in Example 1 except that a plate material having a thickness of 3.42 mm was produced.

【0083】(2) 冷間圧延による試料の作製 得られた各々の板材につき、長手方向に合計加工率5%
の冷間圧延を行った以外は実施例1と同様に試料を作製
した。
(2) Preparation of Sample by Cold Rolling For each of the obtained sheet materials, a total processing rate of 5% in the longitudinal direction was obtained.
A sample was prepared in the same manner as in Example 1 except that cold rolling was performed.

【0084】(3) 熱膨張係数の測定 熱膨張係数の測定は、長手方向のみに測定した以外は実
施例1と同様に行った。冷却低熱膨張温度幅の結果を表
4に示す。
(3) Measurement of Coefficient of Thermal Expansion The coefficient of thermal expansion was measured in the same manner as in Example 1 except that the measurement was performed only in the longitudinal direction. Table 4 shows the results of the cooling low thermal expansion temperature range.

【0085】 [0085]

【0086】表4から明らかなように、冷間圧延前の板
材の厚みに関わらず、両者の冷却低熱膨張温度幅は70℃
以上で得られ、圧延前の板材の厚みの影響は少ないこと
が分かる。
As is clear from Table 4, regardless of the thickness of the sheet material before the cold rolling, the cooling low thermal expansion temperature range of both was 70 ° C.
It can be seen that the influence of the thickness of the sheet material before rolling is small.

【0087】実施例5 (1) 板材の作製 板材の作製は、実施例1と同様に行った。 Example 5 (1) Preparation of Plate Material The plate material was prepared in the same manner as in Example 1.

【0088】(2) 冷間圧延による試料の作製 得られた板材につき、1〜20%の間で合計加工率を変え
て長手方向に冷間圧延を行った以外は実施例1と同様に
試料を作製した。
(2) Preparation of Sample by Cold Rolling The obtained plate was subjected to cold rolling in the longitudinal direction while changing the total working ratio between 1% and 20% in the same manner as in Example 1 except that the sample was cold rolled. Was prepared.

【0089】(3) 熱膨張係数の測定 熱膨張係数は、実施例1と同様に長手方向及び幅方向に
測定した。その結果を図5に示す。
(3) Measurement of Thermal Expansion Coefficient The thermal expansion coefficient was measured in the longitudinal direction and the width direction as in Example 1. The result is shown in FIG.

【0090】図5から明らかなように、冷間加工率制御
により-60〜60℃の平均熱膨張係数を-25×10-6〜15×10
-6/kの間で任意の値に制御することが可能であり、負の
平均熱膨張係数にすることもできる。
As is clear from FIG. 5, the average thermal expansion coefficient at -60 to 60 ° C. is controlled to -25 × 10 −6 to 15 × 10 by the cold working rate control.
It can be controlled to any value between -6 / k and can have a negative average coefficient of thermal expansion.

【0091】実施例6 (1) 板材の作製 Cu78.3〜82.3質量%、Al8.7 質量%、Mn9.0〜13.0質量
%の組成を有するCuAlMn基系合金を用いた以外は実施例
1と同様に行った。
Example 6 (1) Preparation of a plate material Example 1 was repeated except that a CuAlMn-based alloy having a composition of 78.3 to 82.3% by mass of Cu, 8.7% by mass of Al, and 9.0 to 13.0% by mass of Mn was used. Performed similarly.

【0092】(2) 冷間圧延による試料の作製 得られた各々の板材につき、長手方向に合計加工率8%
の冷間圧延を行った以外は実施例1と同様に試料を作製
した。
(2) Preparation of Sample by Cold Rolling For each of the obtained sheet materials, a total working ratio of 8% in the longitudinal direction was obtained.
A sample was prepared in the same manner as in Example 1 except that cold rolling was performed.

【0093】(3) 熱膨張係数の測定 熱膨張係数の測定は、長手方向のみに測定した以外は実
施例1と同様に行い、冷却低熱膨張開始温度Ts及び冷却
低熱膨張温度幅ΔTを各々調べた。結果を表5に示す。
(3) Measurement of Thermal Expansion Coefficient The thermal expansion coefficient was measured in the same manner as in Example 1 except that the measurement was performed only in the longitudinal direction, and the cooling low thermal expansion starting temperature Ts and the cooling low thermal expansion temperature width ΔT were examined. Was. Table 5 shows the results.

【0094】 [0094]

【0095】表5から明らかなように、Mnの含有率を変
化させることにより、冷却低熱膨張開始温度Tsを変える
ことができ、100℃以下において低熱膨張温度幅を様々
な温度領域に設定することができることがわかる。
As is clear from Table 5, by changing the Mn content, the cooling low thermal expansion start temperature Ts can be changed, and the low thermal expansion temperature range can be set to various temperature ranges at 100 ° C. or less. You can see that you can do it.

【0096】実施例7 (1) 板材の作製 Cu80.5質量%、Al8.7 質量%、Mn10.8 質量%の組成を
有するCuAlMn基系合金を用いた以外は実施例1と同様に
行った。
Example 7 (1) Preparation of a plate material The same operation as in Example 1 was performed except that a CuAlMn-based alloy having a composition of 80.5% by mass of Cu, 8.7% by mass of Al, and 10.8% by mass of Mn was used. .

【0097】(2) 冷間圧延による試料の作製 得られた板材につき、長手方向に合計加工率8%の冷間
圧延を行った以外は実施例1と同様に試料を作製した。
(2) Preparation of Sample by Cold Rolling A sample was prepared in the same manner as in Example 1 except that the obtained sheet material was subjected to cold rolling at a total working ratio of 8% in the longitudinal direction.

【0098】(3) 熱膨張係数の測定 得られた試料につき、-60〜60℃までの範囲で加熱・冷
却する操作を400回繰り返し、冷熱疲労安定性を調べ
た。熱膨張係数は、長手方向のみに測定した以外は実施
例1と同様に行った。結果を図6に示す。
(3) Measurement of Thermal Expansion Coefficient The operation of heating and cooling the obtained sample in the range of -60 to 60 ° C. was repeated 400 times, and the thermal fatigue stability was examined. The thermal expansion coefficient was measured in the same manner as in Example 1 except that the thermal expansion coefficient was measured only in the longitudinal direction. FIG. 6 shows the results.

【0099】図6から明らかなように、少なくとも400
回以上の加熱・冷却操作の間低い熱膨張係数を保持する
ことができる。
As is clear from FIG. 6, at least 400
A low coefficient of thermal expansion can be maintained during more than one heating / cooling operation.

【0100】実施例8 (1) 板材の作製 表6に示すそれぞれの組成を有するCuAlMn基系合金を用
いた以外は、実施例1と同様に行った。
Example 8 (1) Preparation of a plate material The same procedure as in Example 1 was carried out except that CuAlMn-based alloys having the respective compositions shown in Table 6 were used.

【0101】(2) 冷間圧延による試料の作製 得られた板材につき、各々表6に示す合計加工率で長手
方向に冷間圧延を行った以外は実施例1と同様に試料を
作製した。
(2) Preparation of sample by cold rolling A sample was prepared in the same manner as in Example 1 except that the obtained sheet material was subjected to cold rolling in the longitudinal direction at a total working ratio shown in Table 6.

【0102】(3) 熱膨張係数の測定 熱膨張係数の測定は、長手方向のみに測定した以外は実
施例1と同様に行い、冷却低熱膨張温度範囲ΔTを調べ
た。結果を図7に示す。
(3) Measurement of Coefficient of Thermal Expansion The coefficient of thermal expansion was measured in the same manner as in Example 1 except that it was measured only in the longitudinal direction, and the cooling low thermal expansion temperature range ΔT was examined. FIG. 7 shows the results.

【0103】 表6 組成及び合計加工率 組成(質量%) Cu Al Mn V 合計加工率(%) 81.50 8.70 9.80 − 4 81.25 8.70 10.05 − 6 80.95 8.70 10.30 0.05 7 81.00 8.70 10.30 − 8 81.00 8.20 10.80 − 8 80.50 8.70 10.80 − 8Table 6 Composition and total processing rate Composition (% by mass) Cu Al Mn V Total processing rate (%) 81.50 8.70 9.80 −4 81.25 8.70 10.05 −6 80.95 8.70 10.30 0.05 7 81.00 8.70 10.30 −8 81.00 8.20 10.80 −8 80.50 8.70 10.80 − 8

【0104】図7から明らかなように、組成及び合計加
工率を制御することにより、100℃以下の広い温度領域
において、少なくとも50℃以上の温度幅の低熱膨張特性
を設定することができる。
As is clear from FIG. 7, by controlling the composition and the total processing rate, it is possible to set a low thermal expansion characteristic having a temperature width of at least 50 ° C. in a wide temperature range of 100 ° C. or less.

【0105】実施例9 (1) 板材の作製 Cu71.0質量%、Zn22.0 質量%、Al7.0 質量%の組成を
有するCuZnAl基系合金を用い、700℃で30分間溶体化処
理をし、150℃で10分間時効処理をした以外は実施例1
と同様に行い、実質的にβ単相からなる板材を得た。
Example 9 (1) Preparation of Plate Material A CuZnAl-based alloy having a composition of 71.0% by mass of Cu, 22.0% by mass of Zn, and 7.0% by mass of Al was subjected to a solution treatment at 700 ° C. for 30 minutes. Example 1 except that aging treatment was performed at 150 ° C. for 10 minutes.
In the same manner as described above, a plate material substantially consisting of a β single phase was obtained.

【0106】(2) 冷間圧延による試料の作製 得られた板材につき、長手方向に合計加工率7%の冷間
圧延を行った以外は実施例1と同様に試料を作製した。
(2) Preparation of Sample by Cold Rolling A sample was prepared in the same manner as in Example 1 except that the obtained plate was subjected to cold rolling at a total working ratio of 7% in the longitudinal direction.

【0107】(3) 熱膨張係数の測定 得られた試料につき、長手方向のみに測定した以外は実
施例1と同様に行った。結果を図8に示す。
(3) Measurement of coefficient of thermal expansion The same procedure as in Example 1 was carried out except that the obtained sample was measured only in the longitudinal direction. FIG. 8 shows the results.

【0108】図8から明らかなように、-30〜45℃にお
いて-5×10-6〜5×10-6/kの低熱膨張係数が得られ
た。
As apparent from FIG. 8, a low coefficient of thermal expansion of −5 × 10 −6 to 5 × 10 −6 / k was obtained at −30 to 45 ° C.

【0109】実施例10 (1) 板材の作製 Cu69.0質量%、Zn27.0 質量%、Al4.0 質量%の組成を
有するCuZnAl基系合金を用い、600℃で30分間溶体化処
理をした以外は実施例1と同様に行った。得られた試料
の組成はα相及びβ相が50体積%ずつであった。
Example 10 (1) Preparation of Plate Material Using a CuZnAl-based alloy having a composition of 69.0% by mass of Cu, 27.0% by mass of Zn, and 4.0% by mass of Al, a solution treatment was performed at 600 ° C. for 30 minutes. Other than that, it carried out similarly to Example 1. The composition of the obtained sample was such that the α phase and the β phase were each 50% by volume.

【0110】(2) 冷間圧延による試料の作製 得られた板材につき、長手方向に合計加工率7%の冷間
圧延を行った以外は実施例1と同様に試料を作製した。
(2) Preparation of Sample by Cold Rolling A sample was prepared in the same manner as in Example 1 except that the obtained sheet material was subjected to cold rolling at a total working ratio of 7% in the longitudinal direction.

【0111】(3) 熱膨張係数の測定 得られた試料につき、-100〜25℃の温度範囲において長
手方向のみに測定した以外は実施例1と同様に行った。
結果を図8に示す。
(3) Measurement of Coefficient of Thermal Expansion The obtained sample was measured in the same manner as in Example 1 except that it was measured only in the longitudinal direction in a temperature range of -100 to 25 ° C.
FIG. 8 shows the results.

【0112】図8から明らかなように、-85〜-53℃にお
いて-5×10-6〜5×10-6/kの低熱膨張係数が得られ
た。α相を50体積%含むCuZnAl基系合金においても低い
熱膨張係数が得られる。
As apparent from FIG. 8, a low coefficient of thermal expansion of −5 × 10 −6 to 5 × 10 −6 / k was obtained at −85 to −53 ° C. A low thermal expansion coefficient can be obtained even in a CuZnAl-based alloy containing 50% by volume of the α phase.

【0113】実施例11 (1) 板材の作製 表7に示すそれぞれの組成を有するNiTi基系合金をグラ
ファイト坩堝中にて溶解し、平均50 ℃/分の冷却速度
で凝固して、直径20mmφのインゴットとした。このイン
ゴットを800℃で熱間圧延した後切削加工し、長手14mm
×幅5mm×厚さ1.7mmの板材を得た。得られた板材を850
℃で60分間の溶体化処理した後、氷水中へ投入して急
冷し、実質的にβ単相からなる板材を得た。
Example 11 (1) Preparation of Plate Material NiTi-based alloys having the respective compositions shown in Table 7 were melted in a graphite crucible and solidified at an average cooling rate of 50 ° C./min to obtain a 20 mmφ diameter. Ingot. This ingot is hot-rolled at 800 ° C and then cut to a length of 14 mm.
A plate material having a width of 5 mm and a thickness of 1.7 mm was obtained. 850
After a solution treatment at 60 ° C. for 60 minutes, the mixture was put into ice water and rapidly cooled to obtain a plate material substantially consisting of β single phase.

【0114】(2) 冷間圧延による試料の作製 得られた板材につき、長手方向に冷間圧延を行った以外
は実施例1と同様に試料を作製した。合計加工率を表7
に示す。
(2) Preparation of sample by cold rolling A sample was prepared in the same manner as in Example 1 except that the obtained sheet material was subjected to cold rolling in the longitudinal direction. Table 7 shows the total processing rate
Shown in

【0115】(3) 熱膨張係数の測定 得られた試料につき、-120〜100℃の温度範囲において
長手方向のみに測定した以外は実施例1と同様に行っ
た。冷却低熱膨張温度幅ΔTの結果を図9に示す。
(3) Measurement of coefficient of thermal expansion The obtained sample was measured in the same manner as in Example 1 except that it was measured only in the longitudinal direction in a temperature range of -120 to 100 ° C. FIG. 9 shows the results of the cooling low thermal expansion temperature width ΔT.

【0116】 [0116]

【0117】図9から明らかなように、Fe又はVを含有
するNiTi基系合金についても60℃以上の冷却低熱膨張温
度幅ΔTが得られる。
As is clear from FIG. 9, the cooling low thermal expansion temperature width ΔT of 60 ° C. or more can be obtained also for the NiTi-based alloy containing Fe or V.

【0118】実施例12 (1) 板材の作製 各々Ni55.6質量%、Ti44.4質量%の組成及びNi54.9質量
%、Ti45.1質量%の組成を有するNiTi合金からなる板材
を実施例11と同様に作製した。
Example 12 (1) Preparation of sheet material A sheet material made of a NiTi alloy having a composition of 55.6% by mass of Ni and 44.4% by mass of Ti and a composition of 54.9% by mass of Ni and 45.1% by mass of Ti was used. Prepared in the same manner as 11.

【0119】(2) 冷間圧延による試料の作製 得られた板材につき、長手方向に合計加工率0.5〜40%
の間で合計加工率を変えて冷間圧延を行った以外は実施
例1と同様に試料を作製した。
(2) Preparation of Sample by Cold Rolling The obtained plate was subjected to a total working ratio of 0.5 to 40% in the longitudinal direction.
A sample was produced in the same manner as in Example 1 except that cold rolling was performed while changing the total working ratio between the steps.

【0120】(3) 熱膨張係数の測定 熱膨張係数の測定は、-100〜100℃の温度範囲において
長手方向のみに測定した以外は実施例1と同様に行っ
た。平均熱膨張係数の変化を図10に示す。図10から明ら
かなように上記組成のNiTi合金は加工率制御により-60
〜20℃における平均熱膨張係数を-10×10-6〜6×10-6/k
の間で任意の値に制御することが可能である。また、合
計加工率の制御により平均熱膨張係数をほぼ0にするこ
とができる。
(3) Measurement of coefficient of thermal expansion The coefficient of thermal expansion was measured in the same manner as in Example 1 except that it was measured only in the longitudinal direction in a temperature range of -100 to 100 ° C. FIG. 10 shows changes in the average thermal expansion coefficient. As is clear from FIG. 10, the NiTi alloy having the above composition was -60
Average coefficient of thermal expansion at ~ 20 ° C is -10 × 10 -6 to 6 × 10 -6 / k
It is possible to control to any value between. Further, by controlling the total processing rate, the average thermal expansion coefficient can be made substantially zero.

【0121】[0121]

【発明の効果】以上詳述したように、本発明の低熱膨張
合金は良好な低熱膨張特性を有している。更に、本発明
の低熱膨張合金は形状記憶特性及び超弾性をも有するた
め、ヒートシンク材、リードフレーム材等の電子精密部
品だけでなくLNG用容器等様々な用途への利用が可能で
ある。
As described in detail above, the low thermal expansion alloy of the present invention has good low thermal expansion characteristics. Furthermore, since the low thermal expansion alloy of the present invention also has shape memory properties and superelasticity, it can be used not only for precision electronic components such as heat sink materials and lead frame materials, but also for various uses such as LNG containers.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の低熱膨張合金の温度変化−熱膨張率
のヒステリシスモデル図におけるマルテンサイト変態開
始温度Ms、マルテンサイト変態終了温度Mf、オーステナ
イト逆変態開始温度As及びオーステナイト逆変態終了温
度Afの求め方を示す。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a graph showing a change in temperature between a martensitic transformation start temperature Ms, a martensitic transformation end temperature Mf, an austenite reverse transformation start temperature As and an austenite reverse transformation end temperature Af in a hysteresis model diagram of a temperature change-thermal expansion coefficient of the low thermal expansion alloy of the present invention. Show how to find.

【図2】 本発明の低熱膨張合金の温度変化−熱膨張係
数のヒステリシスモデル図における冷却低熱膨張開始温
度Ts、冷却低熱膨張終了温度Tf、加熱低熱膨張開始温度
Ts'及び加熱低熱膨張終了温度Tf'の求め方を示す。
FIG. 2 shows the temperature change of the low thermal expansion alloy of the present invention—the cooling low thermal expansion start temperature Ts, the cooling low thermal expansion end temperature Tf, and the heating low thermal expansion start temperature in a hysteresis model diagram of the thermal expansion coefficient.
How to determine Ts 'and the heating low thermal expansion end temperature Tf' will be described.

【図3】 本発明の低熱膨張合金において合計加工率が
異なる場合の温度変化−熱膨張率のヒステリシスモデル
図を示す。
FIG. 3 shows a hysteresis model diagram of temperature change-thermal expansion coefficient when the total working ratio is different in the low thermal expansion alloy of the present invention.

【図4】 実施例1のCuAlMn基系合金の板材を合計加工
率5%の圧延加工を行った場合の圧延方向と熱膨張係数
測定方向の組合せを変化させた場合の平均熱膨張係数を
示すグラフである。
FIG. 4 shows the average thermal expansion coefficient when the combination of the rolling direction and the thermal expansion coefficient measurement direction when the sheet material of the CuAlMn-based alloy of Example 1 is rolled at a total processing rate of 5% is changed. It is a graph.

【図5】 実施例5のCuAlMn基系合金の板材について長
手方向の合計加工率を変化させた場合の、幅方向及び長
手方向の平均熱膨張係数の変化を示すグラフである。
FIG. 5 is a graph showing changes in the average thermal expansion coefficient in the width direction and in the longitudinal direction when the total working ratio in the longitudinal direction of the plate material of the CuAlMn-based alloy of Example 5 is changed.

【図6】 実施例7のCuAlMn基系合金の板材について長
手方向に合計加工率8%の圧延加工を行った試料につい
て、-60〜60℃の加熱・冷却過程を繰り返した場合の平
均熱膨張係数の変化を示すグラフである。
FIG. 6 shows the average thermal expansion when the heating / cooling process at -60 to 60 ° C. is repeated for a sample obtained by subjecting the CuAlMn-based alloy plate material of Example 7 to rolling processing at a total processing rate of 8% in the longitudinal direction. It is a graph which shows the change of a coefficient.

【図7】 実施例8の各種組成のCuAlMn基系合金の各合
計加工率における低熱膨張温度範囲の変化を示すグラフ
である。
FIG. 7 is a graph showing a change in a low thermal expansion temperature range at each total working rate of CuAlMn-based alloys having various compositions in Example 8.

【図8】 実施例9及び10のCuZnAl基系合金の低熱膨張
温度幅を示すグラフである。
FIG. 8 is a graph showing the low thermal expansion temperature range of the CuZnAl-based alloys of Examples 9 and 10.

【図9】 実施例11の各種組成のNiTi基系合金の低熱膨
張温度幅を示すグラフである。
9 is a graph showing low thermal expansion temperature ranges of NiTi-based alloys having various compositions of Example 11. FIG.

【図10】 実施例12のNiTi合金の合計加工率変化に対す
る平均熱膨張係数変化を示すグラフである。
FIG. 10 is a graph showing a change in average thermal expansion coefficient with respect to a change in total working rate of the NiTi alloy of Example 12.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C22F 1/08 C22F 1/08 H 1/10 1/10 G // C22C 19/03 C22C 19/03 A C22F 1/00 630 C22F 1/00 630L 650 650E 685 685Z 694 694A C22K 1:00 C22K 1:00 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) C22F 1/08 C22F 1/08 H 1/10 1/10 G // C22C 19/03 C22C 19/03 A C22F 1/00 630 C22F 1/00 630L 650 650E 685 685Z 694 694A C22K 1:00 C22K 1:00

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】 熱弾性型マルテンサイト変態を生じる形
状記憶合金の冷間加工により得られ、合計加工率の制御
により-150〜150℃における平均熱膨張係数が-10×10-6
〜10×10-6/kの間で可変であることを特徴とする低熱膨
張合金。
1. An average thermal expansion coefficient at −150 to 150 ° C. of −10 × 10 −6 obtained by controlling cold working of a shape memory alloy that causes thermoelastic martensitic transformation.
A low thermal expansion alloy characterized by being variable between 10 × 10 −6 / k.
【請求項2】 請求項1に記載の低熱膨張合金におい
て、熱膨張係数が-5×10-6〜5×10-6/kである温度幅
が50℃以上であることを特徴とする低熱膨張合金。
2. The low thermal expansion alloy according to claim 1, wherein the temperature range in which the coefficient of thermal expansion is −5 × 10 −6 to 5 × 10 −6 / k is 50 ° C. or more. Expansion alloy.
【請求項3】 請求項1又は2に記載の低熱膨張合金に
おいて、前記冷間加工が一方向のみに加えられているこ
とを特徴とする低熱膨張合金。
3. The low thermal expansion alloy according to claim 1, wherein the cold working is performed only in one direction.
【請求項4】 請求項1〜3のいずれかに記載の低熱膨
張合金において、前記冷間加工が複数の異なる方向に加
えられていることを特徴とする低熱膨張合金。
4. The low thermal expansion alloy according to claim 1, wherein the cold working is performed in a plurality of different directions.
【請求項5】 請求項1〜4のいずれかに記載の低熱膨
張合金において、マルテンサイト変態開始温度とマルテ
ンサイト変態終了温度の差が30℃以上であることを特徴
とする低熱膨張合金。
5. The low thermal expansion alloy according to claim 1, wherein a difference between a martensitic transformation start temperature and a martensitic transformation end temperature is 30 ° C. or more.
【請求項6】 請求項1〜5のいずれかに記載の低熱膨
張合金において、前記熱弾性型マルテンサイト変態を生
じる形状記憶合金がCuAlMn基系合金であることを特徴と
する低熱膨張合金。
6. The low thermal expansion alloy according to claim 1, wherein the shape memory alloy that causes the thermoelastic martensitic transformation is a CuAlMn-based alloy.
【請求項7】 請求項1〜5のいずれかに記載の低熱膨
張合金において、前記熱弾性型マルテンサイト変態を生
じる形状記憶合金がCuZnAl基系合金であることを特徴と
する低熱膨張合金。
7. The low thermal expansion alloy according to claim 1, wherein the shape memory alloy that causes the thermoelastic martensitic transformation is a CuZnAl-based alloy.
【請求項8】 請求項1〜5のいずれかに記載の低熱膨
張合金において、前記熱弾性型マルテンサイト変態を生
じる形状記憶合金がNiTi基系合金であることを特徴とす
る低熱膨張合金。
8. The low thermal expansion alloy according to claim 1, wherein the shape memory alloy that causes the thermoelastic martensitic transformation is a NiTi-based alloy.
【請求項9】 請求項6又は7に記載の低熱膨張合金に
おいて、前記冷間加工による合計加工率が0.05〜20%で
あることを特徴とする低熱膨張合金。
9. The low thermal expansion alloy according to claim 6, wherein a total working ratio of the cold working is 0.05 to 20%.
【請求項10】 請求項8に記載の低熱膨張合金におい
て、前記冷間加工による合計加工率が0.05〜40%である
ことを特徴とする低熱膨張合金。
10. The low thermal expansion alloy according to claim 8, wherein a total working ratio by the cold working is 0.05 to 40%.
【請求項11】 請求項1〜10のいずれかに記載の低熱膨
張合金において、前記熱弾性型マルテンサイト変態を生
じる相を少なくとも15体積%以上含む多相組織からなる
低熱膨張合金。
11. The low thermal expansion alloy according to claim 1, wherein the low thermal expansion alloy comprises a multiphase structure containing at least 15% by volume or more of a phase that causes the thermoelastic martensitic transformation.
JP2000297550A 2000-09-28 2000-09-28 Low thermal expansion alloy Expired - Fee Related JP4984198B2 (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006144047A (en) * 2004-11-17 2006-06-08 Dowa Mining Co Ltd Cu-Ni-Ti copper alloy and heat sink
WO2012160956A1 (en) * 2011-05-26 2012-11-29 テルモ株式会社 Composite material for medical devices and method for producing same
US20160348203A1 (en) * 2013-06-14 2016-12-01 The Texas A&M Unversity System Controlled thermal coefficient product system and method
US10557182B2 (en) * 2013-06-14 2020-02-11 The Texas A&M University System Systems and methods for tailoring coefficients of thermal expansion between extreme positive and extreme negative values
KR20230145822A (en) * 2022-04-11 2023-10-18 경상국립대학교산학협력단 MANUFACTURING METHOD Cu-Al-Mn MEMORY SHAPE ALLOY WITH SPINODAL DECOMPOSITION

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JPH1017959A (en) * 1996-07-03 1998-01-20 Furukawa Electric Co Ltd:The Composite material and method for producing the same
JPH1092989A (en) * 1996-09-10 1998-04-10 Furukawa Electric Co Ltd:The Heat sink material and manufacturing method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1017959A (en) * 1996-07-03 1998-01-20 Furukawa Electric Co Ltd:The Composite material and method for producing the same
JPH1092989A (en) * 1996-09-10 1998-04-10 Furukawa Electric Co Ltd:The Heat sink material and manufacturing method thereof

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006144047A (en) * 2004-11-17 2006-06-08 Dowa Mining Co Ltd Cu-Ni-Ti copper alloy and heat sink
WO2012160956A1 (en) * 2011-05-26 2012-11-29 テルモ株式会社 Composite material for medical devices and method for producing same
JPWO2012160956A1 (en) * 2011-05-26 2014-07-31 テルモ株式会社 COMPOSITE MATERIAL FOR MEDICAL EQUIPMENT AND METHOD FOR PRODUCING THE SAME
US10363122B2 (en) 2011-05-26 2019-07-30 Terumo Kabushiki Kaisha Composite material for medical devices and method of manufacturing the same
US20160348203A1 (en) * 2013-06-14 2016-12-01 The Texas A&M Unversity System Controlled thermal coefficient product system and method
US10557182B2 (en) * 2013-06-14 2020-02-11 The Texas A&M University System Systems and methods for tailoring coefficients of thermal expansion between extreme positive and extreme negative values
US10822670B2 (en) * 2013-06-14 2020-11-03 The Texas A&M University System Controlled thermal coefficient product system and method
KR20230145822A (en) * 2022-04-11 2023-10-18 경상국립대학교산학협력단 MANUFACTURING METHOD Cu-Al-Mn MEMORY SHAPE ALLOY WITH SPINODAL DECOMPOSITION
KR102746814B1 (en) * 2022-04-11 2024-12-24 경상국립대학교산학협력단 MANUFACTURING METHOD Cu-Al-Mn MEMORY SHAPE ALLOY WITH SPINODAL DECOMPOSITION

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