JP2002100010A - Yoke type reproducing magnetic head, method of manufacturing the same, and magnetic disk drive - Google Patents

Abstract

[PROBLEMS] To reduce the size of a magnetic gap on a medium facing surface side as much as possible, and to enable a magnetoresistive element to be arranged close to a medium facing surface. . SOLUTION: A pair of magnetic yokes 4 opposed to each other across a magnetic gap 5 and at least one of which extends from the medium facing surface to a position retracted from the medium facing surface, and a convex shape facing the medium facing surface in the magnetic gap. It is characterized by comprising a magnetoresistive film 12 having a curved portion and magnetically connected to the magnetic yoke, and electrodes 17 and 18 electrically connected to the magnetoresistive film.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to a yoke type reproducing magnetic head for recording a signal on a magnetic recording medium and detecting the signal to be stored, a method for manufacturing the same, and a magnetic disk drive.

[0002]

2. Description of the Related Art In recent years, magnetic recording devices such as hard disk devices have been rapidly becoming smaller and higher in density.
It is expected that the density will be further increased in the future. In order to increase the recording density in magnetic recording, it is necessary to increase the recording density in the longitudinal direction, that is, to increase the recording density in the longitudinal direction, that is, to increase the recording density in the longitudinal direction.

However, the in-plane longitudinal recording method has a problem that as the recording density increases, the demagnetizing field increases, the reproduction output decreases, and stable recording cannot be performed. A perpendicular recording method has been proposed to improve these problems. In the perpendicular recording method, recording is performed by magnetizing in the direction perpendicular to the recording medium surface. Even if the recording density is increased with respect to the longitudinal recording, the influence of the demagnetizing field is small, and a decrease in reproduction output and the like are suppressed.

[0004] By the way, an inductive head has been used for reproducing a medium signal in both longitudinal recording and perpendicular recording.
Even if the recording track width becomes narrower and the magnitude of the recorded magnetization becomes smaller with the increase in density, the reproduction sensitivity using the anisotropic magnetoresistance effect (AMR) is high so that a sufficient reproduction signal output can be obtained. AMR heads have been developed and used as shielded read heads. In recent years, spin-valve GMR heads using the giant magnetoresistive effect (GMR) have been used with higher sensitivity, and the magnetic head using the tunnel magnetoresistive effect (TMR), which is expected to have higher reproduction sensitivity. Research for the development and commercialization of is under way. Magnetic heads with high read sensitivity have been developed in this way, and by using them,
It has become possible to reproduce a recording signal even with a very small recording bit size.

On the other hand, in order to increase the linear recording density, which is the longitudinal density of the recording track, it is necessary to narrow the gap of the magnetic head. However, in the conventional magnetic head using the above-described magnetoresistive effect, a magnetoresistive element is inserted in the head gap. For this reason, the size of the magnetoresistive effect element is required to be about 30 nm regardless of the size of the AMR head or the spin valve GMR head.
About 0 nm is required. For this reason, in a conventional type magnetic head, the head gap can be narrowed by about 100 nm. Therefore, there is a great restriction in increasing the linear recording density.

In a magnetic storage device such as a hard disk, as the recording density increases, the flying height, which is the distance between the magnetic head and the storage medium, gradually decreases. Such a decrease in the flying height means that the probability of the head colliding with a slight protrusion of the storage medium is increased, and the actual TA (Th
(ermal Asperity) Noise is a problem. Therefore, it is preferable to use a yoke type head that draws a magnetic flux into the magnetoresistive element via the yoke so that the magnetoresistive element is not directly exposed to the medium facing surface. Further, in the case of such a yoke type magnetic head, a structure in which the magnetoresistive element is provided on a plane parallel to the medium facing surface is more advantageous because the entire magnetoresistive element can be installed near the medium. .
As such a structure, there has been proposed a horizontal yoke type magnetic head which constitutes a yoke and a magnetoresistive element in parallel with the substrate surface.

[0007]

However, in the case of a horizontal yoke type magnetic head, it is necessary to make the size smaller as the recording density increases, and the magnetoresistive effect element is placed as close to the medium facing surface as possible. I have to do it. Despite the progress of photolithography technology, several tens of micrometer
Alignment accuracy of about 0 nm is required, and it has been very difficult to produce a head with such accuracy.

According to the present invention, a yoke-type reproducing device capable of reducing the size of a magnetic gap on the medium facing surface side as much as possible and disposing a magnetoresistive element close to the medium facing surface. It is an object to provide a magnetic head, a method of manufacturing the same, and a magnetic disk drive.

[0009]

A yoke type reproducing magnetic head according to the present invention is a pair of magnetic yokes which are opposed to each other with a magnetic gap therebetween and at least one of which extends from the medium facing surface to a position retracted from the medium facing surface. And a curved portion having a convex shape facing the medium facing surface within the magnetic gap, a magnetoresistive film magnetically connected to the magnetic yoke, and an electrode electrically connected to the magnetoresistive film. It is characterized by having.

According to the yoke-type reproducing magnetic head of the present invention thus constituted, the magnetoresistive effect film is formed so as to have a convex curved portion facing the medium facing surface in the magnetic gap. With this configuration, the magnetoresistive effect element can be configured close to the medium facing surface and directly above the end of the magnetic gap, and the magnetic path can be extremely short, so that the reproduction efficiency can be increased. it can.

The magnetoresistive film may be configured to be electrically connected to the pair of magnetic yokes.

The electrode may be configured so that a part of the electrode is electrically connected to a surface of the magnetoresistive film opposite to a convex surface.

The electrode is composed of first and second electrode portions, and ends of the first and second electrode portions are electrically connected to ends of the magnetoresistive film in the magnetic gap. May be connected.

According to the method of manufacturing a yoke type reproducing magnetic head of the present invention, a step of forming a pair of magnetic yokes opposed to each other with a magnetic gap therebetween, and a step of forming a nonmagnetic film having a different etching rate from the magnetic yoke in the magnetic gap. A step of embedding, a step of forming a step in the magnetic gap portion using a difference in etching rate, and a step of embedding a magnetoresistive film in the step portion.

It is also possible to provide a process in which a step is left when the magnetoresistive film is buried, and a step for forming a part or all of the electrode lead is provided in the step. Also, a method of manufacturing a yoke-type reproducing magnetic head according to the present invention includes a step of forming a magnetic yoke, a surface of the magnetic yoke opposite to the medium facing surface, and a surface of the magnetic gap opposite to the medium facing surface. A step of forming a step between the surface and a step of embedding a magnetoresistive film in the step.

It is to be noted that a step may be left when embedding the magnetoresistive film, and a step may be provided for forming a part or all of the electrode lead for the step.

Further, according to the method of manufacturing a yoke type reproducing magnetic head of the present invention, a step of forming an electrode having a convex portion;
Forming a side wall made of an insulating film on the side surface of the convex portion, forming a magnetoresistive film so as to cover the convex portion and the side wall, and forming a magnetic yoke having a magnetic gap on the convex portion And a step of performing

Also, the magnetic disk drive according to the present invention
The yoke type reproducing magnetic head is used as a reproducing magnetic head.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 shows the structure of a first embodiment of a horizontal reproducing magnetic head according to the present invention. FIG. 1 is a cross-sectional view in the track longitudinal direction of a horizontal read magnetic head according to this embodiment.

The horizontal reproducing magnetic head according to the present embodiment has a pair of magnetic yokes 4 formed on the substrate 1 so as to face each other with a magnetic gap 5 interposed therebetween. A magnetoresistive film 12 formed in the magnetic gap 5 so as to be curved toward the medium facing surface;
An electrode lead 17 is provided on the surface of the magnetoresistive film 12, and an electrode 18 is provided for supplying electricity to the magnetoresistive film 12 via the lead 17. Note that the magnetoresistive film 12 is formed in the magnetic gap 5 so that its end is along the inner wall of the magnetic yoke 4 and its center is toward the medium facing surface. It is configured to be convex.
In this embodiment, an insulating film 9 is provided in the magnetic gap 5, and a step is formed in the magnetic gap 5 so as to be curved. The magnetoresistive film 12 is formed along the step. Is formed.

An electrode 18 is connected to the lead 17. The electrode 18 is electrically insulated from the magnetic yoke 4 and the insulating film 14. The insulating film 2 was provided between the medium facing surface of the magnetic yoke 4 and the portion of the magnetic yoke 4 not in contact with the medium facing surface, and the insulating film 6 was provided around the magnetic yoke 4. It has a configuration. In addition,
The substrate 1 is separated from the magnetic yoke 4 after the formation of the magnetic head.

By forming the magnetoresistive film 12 so as to be convex toward the medium facing surface, the magnetoresistive element can be made closer to the medium facing surface, and the magnetic gap can be reduced. The magnetic path can be made very short, and the reproduction efficiency can be increased. Further, since the end of the magnetoresistive film 12 is formed along the inner wall of the magnetic yoke 4, the magnetic yoke 4 and the magnetoresistive film 12
The contact area can be increased, and the magnetoresistance can be reduced, so that the efficiency can be increased. In addition, it is possible to prevent the displacement of the portion of the magnetic gap 5 and the magnetoresistive film 12, so that accurate alignment is not required. Can be made smaller.

In the present embodiment, an element of a film surface perpendicular conduction type is used as the magnetoresistive effect element, and the magnetic yoke 4 has a structure also serving as an electrode.

The magnetoresistive film of the present embodiment may be an anisotropic magnetoresistive film or a giant magnetoresistive film such as a spin valve, and more preferably a film surface such as a tunnel magnetoresistive film having higher sensitivity. A perpendicular conduction type magnetoresistive film is desirable.

Since the insulating film 9 is a non-magnetic material, a curved step may be formed in the magnetic gap by forming another non-magnetic material thinner than the magnetic yoke 4.

(Second Embodiment) FIG. 2 shows the configuration of a second embodiment of the horizontal reproducing magnetic head according to the present invention. FIG. 2 is a cross-sectional view in the track longitudinal direction of the horizontal read magnetic head of the present embodiment. The horizontal reproducing magnetic head of this embodiment is formed by stacking the horizontal reproducing magnetic head of the first embodiment shown in FIG. 1 upside down.

The horizontal reproducing magnetic head of this embodiment has an electrode 20a formed on the substrate 1 so as to have a convex portion.
And a pair of magnetic yokes 29 formed so as to face each other with the magnetic gap 5 interposed therebetween, and are electrically connected to the protrusions of the electrode 20a, and the ends are along the inner wall of the magnetic yoke 29 and the center is And a magnetoresistive film 24 which is formed in the magnetic gap 5 so as to be curved toward the medium facing surface. Note that the magnetoresistive film 24 is formed in the magnetic gap 5 so that an end is along the inner wall of the magnetic yoke 29 and a center is toward the medium facing surface.
It is configured to be convex toward the medium facing surface. In this embodiment, insulating films 25 and 27 are provided in the magnetic gap 5, and a curved step is formed in the magnetic gap 5 by the insulating film 25. The magnetoresistive film 24 is formed along the step. Is formed. The electrode 20a is electrically insulated by the magnetic yoke 29 and the insulating film 22. An insulating film 32 is provided between the medium facing surface of the magnetic yoke 29 and a portion of the magnetic yoke 29 not in contact with the medium facing surface, and an insulating film 31 is provided around the magnetic yoke 29. I have.

Here, the magnetoresistive film 24 is formed to be curved along the electrode 20a and the insulating film 25 formed in a convex shape. By forming in this way, the magnetoresistive film 24 can be made closer to the medium facing surface, so that the efficiency is increased and the displacement between the portion of the magnetic gap 5 and the magnetoresistive film 24 can be prevented. Thereby, the size of the magnetic gap 5 on the medium facing surface side can be made as small as possible, and the magnetoresistive film 24 can be arranged close to the medium facing surface.

Here, an element of the film surface perpendicular conduction type is used as the magnetoresistive effect element, and the magnetic yoke 29 has a structure also serving as an electrode.

The magnetoresistive film of this embodiment may be an anisotropic magnetoresistive film or a giant magnetoresistive film such as a spin valve, and more preferably a film surface such as a tunnel magnetoresistive film having higher sensitivity. A perpendicular conduction type magnetoresistive film is desirable.

Since the insulating films 25 and 27 are non-magnetic materials, another non-magnetic material may be formed thinner than the magnetic yoke 29 to form a curved step in the magnetic gap.

(Third Embodiment) FIG. 3 shows the structure of a horizontal reproducing magnetic head according to a third embodiment of the present invention. FIG. 3 is a cross-sectional view in the track longitudinal direction of the horizontal reproducing magnetic head of the present embodiment.

The horizontal reproducing magnetic head of this embodiment has a pair of magnetic yokes 4 formed on the substrate 1 so as to be opposed to each other with a magnetic gap 5 therebetween, and has a center along an inner wall of the magnetic yoke 4 and an end. A magnetoresistive film 12 formed in the magnetic gap 5 so as to be curved toward the medium facing surface;
Electrodes 1 provided at both ends of the magnetoresistive film 12 in the longitudinal direction of the track for supplying electricity to the magnetoresistive film 12
9a and 19b. In this embodiment, an insulating film 9 is provided in the magnetic gap 5, a step is formed in the magnetic gap 5 by the insulating film 9, and a magnetoresistive film 12 is formed along the step. It has a configuration.

The electrodes 19a and 19b are connected to the magnetic yoke 4
Is electrically insulated by the insulating film 14. Also,
An insulating film 2 is provided between the medium facing surface of the magnetic yoke 4 and a portion of the magnetic yoke 4 not in contact with the medium facing surface, and an insulating film 6 is provided around the magnetic yoke 4. The substrate 1 is separated from the magnetic yoke 4 after the formation of the magnetic head. The electrodes 19a and 19b are covered with an insulating film 37.

With this configuration, it is possible to bring the magnetoresistive film 12 closer to the medium facing surface, to increase the efficiency and to prevent the position of the magnetic gap 5 from being displaced from the magnetoresistive film 12. . Thus, the size of the magnetic gap 5 on the medium facing surface side can be made as small as possible, and the magnetoresistive element can be arranged close to the medium facing surface.

In the present embodiment, an in-plane conduction type element is used as the magnetoresistive element, and the electrodes 19a and 19b are also provided on the inner wall of the magnetic yoke 4 like the magnetoresistive film 12. 12 is formed. By forming such electrodes 19a and 19b, the displacement of the portion of the magnetic gap 5 and the electrodes 19a and 19b can be prevented, and the effective portion of the magnetoresistive film 12 can be utilized.

The magnetoresistive film of this embodiment may be an anisotropic magnetoresistive film or a giant magnetoresistive film such as a spin valve, and more preferably a film surface such as a tunnel magnetoresistive film having higher sensitivity. A perpendicular conduction type magnetoresistive film is desirable.

Since the insulating film 9 is a non-magnetic material, a curved step may be formed in the magnetic gap by forming another non-magnetic material thinner than the magnetic yoke 4.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described with reference to FIGS. This embodiment is a method for manufacturing the horizontal reproducing magnetic head of the first embodiment shown in FIG. 1, and the manufacturing process is shown in FIGS.
Shown in

First, as shown in FIG. 4A, an insulating film 2 made of, for example, SiO _{2 is} formed on a Si substrate 1, and an opening for forming a magnetic yoke is formed on the insulating film 2. A resist pattern 3 made of a photoresist having the same is formed. Then, using the resist pattern 3 as a mask, for example, RI
The insulating film 2 is etched by E (Reactive Ion Etching) to form a trench 2a in the insulating film 2 (FIG. 4B).
reference). Subsequently, after removing the resist pattern,
Magnetic film 4 made of, for example, CoZrNb to be a magnetic yoke
Is formed so as to fill the trench 2a (FIG. 4).
(C)).

Next, as shown in FIG.
Is planarized using, for example, CMP (Chemical Mechanical Polishing), and then the magnetic film 4 is patterned using photolithography. Then, an insulating film 6 made of, for example, SiO _{2 is} formed around the patterned magnetic film 4.
(See FIG. 4D). Subsequently, as shown in FIG. 4E, a trench 7 is formed in the magnetic film 4 by using ion milling. Further, a portion 8 serving as a front end of the magnetic gap is formed on the magnetic film 4 by FIB (Focused Ion Beam) (see FIG. 4F).

Next, as shown in FIG. 5A, the magnetic gap is filled with an insulating film 9 made of, for example, SiO ₂ , and then flattened by CMP. Subsequently, a resist pattern 10 having an opening 11 in a range slightly wider than the magnetic gap is formed (see FIG. 5B). Thereafter, the insulating film 9 in the magnetic gap is etched by RIE using the resist pattern 10 as a mask (see FIG. 5C). Etching gas is CHF ₃ , 50 SCCM
(Standard Cubic Centimeter per Minute) was performed under the condition of 1 Pa. In this case, since the selectivity between the insulating film 9 made of SiO ₂ and the magnetic film 4 is 200: 1 or more, as shown in the figure, the insulating film 9 is preferentially etched by the etching rate difference, and the portion of the magnetic film 4 is removed. Is hardly etched. Therefore, between the magnetic film 4 and the insulating film 9,
A step is formed in the magnetic gap so as to be curved (see FIG. 5C).

Next, after removing the resist pattern, as shown in FIG. 5D, a magnetoresistive element film (hereinafter, also referred to as an MR film) 12 is formed so as to be embedded in the step. Thereafter, the MR film 12 formed in a region other than the magnetic gap by the CMP of the hard pad is removed (see FIG. 5E). Then, after an insulating film 14 made of, for example, Al ₂ O _{3 is} formed on the entire surface, the insulating film 1 is formed by CMP.
4 is flattened (see FIG. 5F).

Next, as shown in FIG. 6A, a resist pattern 15 made of a photoresist having an opening in a magnetic gap region is formed, and using this resist pattern as a mask, an insulating film 14 is formed on the surface of the MR film 12. R until is exposed
Etching is performed by IE to form a trench 16 in the insulating film 14. Then, after removing the resist pattern, a lead 17 made of, for example, Cu is buried in the trench 16 formed in the insulating film 14 (see FIG. 6B). Subsequently, an electrode 18 made of Cu connected to the lead 17 is formed (see FIG. 6C). It should be noted that the process shown in FIG.
The step shown in (c) may be performed simultaneously.

By the steps described above, the first type shown in FIG.
The horizontal reproducing magnetic head of the embodiment can be manufactured. In addition, by forming as in the present embodiment, the magnetoresistive film 12 and the leads 17 can be automatically aligned with the magnetic gap portion, and a positioning accuracy that is impossible with ordinary lithography technology is required. Even if it is a size, it can be formed without any problem.

As a magnetic film serving as a magnetic yoke or a magnetic core, a crystalline magnetic film such as NiFe, FeTaN, or FeCo; an amorphous magnetic film such as CoZrNb;
-A granular magnetic film such as Al ₂ O ₃ can be used.

When forming a step in the magnetic gap,
A curved step may be formed in the magnetic gap by forming another non-magnetic material thinner than the magnetic yoke instead of the insulating film.

(Fifth Embodiment) Next, a fifth embodiment of the present invention will be described with reference to FIGS. This embodiment is a method for manufacturing the horizontal read magnetic head of the second embodiment shown in FIG. 2, and the manufacturing steps are shown in FIGS.

First, as shown in FIG.
Forming portions (not shown) such as bonding pads on 1
After that, an electrode film 20 made of, for example, Cu is formed,
A resist pattern made of a photoresist on the electrode film 20
, 21 are formed. Then, as shown in FIG.
The electrode film 20 is RIE or the like using the resist pattern 21 as a mask.
To form a convex electrode 20a. Continued
Then, after removing the resist pattern, FIG.
As shown in FIG.₂O ₃From
After the insulating film 22 is formed, the head portion of the convex electrode 20a is formed.
The insulating film 22 is flattened by CMP so as to make a difference.
(See FIG. 7D).

Next, as shown in FIG.
forming a resist pattern 23 made of a photoresist so that a portion wider than a portion where a is exposed is opened;
The insulating film 22 is etched by RIE. The etching gas at this time is CHF ₃ , 50 SCCM, 1 Pa
Was performed under the following conditions. Selectivity of this _Al 2 _{O 3} and Cu are 100: 1 or more certain since, _Al 2 O on the side wall of the protruding portion of the electrode 20a by selectively etching the _Al 2 _{O 3
3} remains, and a curved convex portion 22a made of the insulating film 22 is formed (see FIG. 7F).

Next, after removing the resist pattern, an MR film 24 is formed on the entire surface as shown in FIG. Then, after an insulating film 25 made of, for example, Al ₂ O ₃ is formed on the MR film 24, the insulating film 25 is flattened by etch back or the like (see FIG. 8B). Subsequently, FIG.
As shown in (c), a resist pattern 26 made of a photoresist covering the convex portion of the electrode 20a is formed on the insulating film 25. Then, using the resist pattern 26 as a mask, the insulating film 25 and the MR film 24 are etched by dry etching such as ion milling, and the MR film 24 and the insulating film 25 are left only in a region on the convex portion of the electrode 20a (FIG. 8). (D)). Thereafter, after removing the resist pattern, an insulating film 27 made of, for example, Al ₂ O _{3 is} formed on the entire surface as shown in FIG.
7, a resist pattern 28 is formed in a region on the convex portion of the electrode 20a by using electron beam lithography or the like.

Next, using the resist pattern 28 as a mask, the insulating film 27 is etched to form a portion to be the tip of the magnetic gap (see FIG. 9A). Then, after removing the resist pattern, as shown in FIG. 9B, a magnetic film 29 made of, for example, CoZrNb to be a magnetic yoke is formed on the entire surface. Subsequently, as shown in FIG. 9C, a resist pattern 30 made of a photoresist is formed so as to cover the convex portion of the electrode 20a. After patterning the magnetic film 29 using the resist pattern 30 as a mask, the periphery of the patterned magnetic film 29 is filled with an insulating film 31 made of, for example, SiO ₂ (see FIG. 9D).

Next, after removing the resist pattern, as shown in FIG. 10 (a), the entire surface, for example, SiO ₂
Is formed. Note that the step of filling with the insulating film 31 shown in FIG. 9D and the step of forming the insulating film 32 shown in FIG. 10A may be performed simultaneously. continue,
The insulating film 32 is flattened by etching back, CMP or the like until the tip of the magnetic gap is exposed (FIG. 10).
(B)). If necessary, add DLC (Diamond L
ike Carbon) A protective film is formed.

The horizontal reproduction magnetic head of the second embodiment shown in FIG. 2 can be manufactured by the above steps.

As a magnetic film serving as a magnetic yoke or a magnetic core, a crystalline magnetic film such as NiFe, FeTaN, or FeCo; an amorphous magnetic film such as CoZrNb;
-A granular magnetic film such as Al ₂ O ₃ can be used.

When forming a step of the magnetic gap,
A curved step may be formed in the magnetic gap by forming another non-magnetic material thinner than the magnetic yoke instead of the insulating film.

(Sixth Embodiment) Next, a sixth embodiment of the present invention will be described with reference to FIGS. This embodiment is a method for manufacturing the horizontal reproducing magnetic head of the third embodiment shown in FIG. 3, and the manufacturing steps are shown in FIGS.

First, as shown in FIG. 11A, an insulating film 2 made of SiO _{2 is} formed on a Si substrate 1, and a photo having an opening for forming a magnetic yoke is formed on the insulating film 2. A resist pattern 3 made of a resist is formed.
The insulating film 3 is etched by RIE using the resist pattern 3 as a mask to form a trench 2a in the insulating film 2 (see FIG. 11B). Subsequently, after removing the resist pattern, a magnetic film 4 made of, for example, CoZrNb to be a magnetic yoke is formed so as to fill the trench 2a (see FIG. 11C).

Next, as shown in FIG.
Is planarized using, for example, CMP, and then the magnetic film 4 is patterned. Then, the patterned magnetic film 4
Is filled with an insulating film 6 made of, for example, SiO ₂ (see FIG. 11D). Subsequently, as shown in FIG. 11E, a trench 7 is formed in the magnetic film 4 by using ion milling. Further, a portion 8 to be a tip of the magnetic gap is formed on the magnetic film 4 by FIB (see FIG. 11F).

Next, as shown in FIG.
The cap portion is made of, for example, SiO₂Filled with insulating film 9 made of
After that, it is flattened by CMP. Then, the magnetic gap
Resist opening having an opening 11 in a slightly wider area than the opening.
A turn 10 is formed (see FIG. 12B). afterwards,
Using this resist pattern 10 as a mask,
The insulating film 9 is etched by RIE (FIG. 12C).
reference). The etching gas is CHF_ThreeUsing 50 SCC
M and 1 Pa were performed. In this case, SiO ₂From
The selectivity between the insulating film 9 and the magnetic film 4 is 200: 1 or more.
Therefore, as shown in the figure,
The edge film 9 is preferentially etched, and the portion of the magnetic film 4 is almost etched.
Mostly not etched. Therefore, the magnetic film 4 and the insulating film
9 and there is a step that curves into the magnetic gap.
It is formed (see FIG. 12C).

Next, after removing the resist pattern, as shown in FIG. 12D, an MR film 12 is formed so as to be embedded in the step. Then, C on the hard pad
The MR film 12 formed in a region other than the magnetic gap by the MP is removed (see FIG. 12E). After an insulating film 14 made of, for example, Al ₂ O _{3 is} formed on the entire surface,
The insulating film 14 is planarized by MP (see FIG. 12F).

Next, a resist pattern (not shown) made of photoresist having an opening in a region including the magnetic gap is formed, and the surface of the MR film 12 is formed by RIE using the resist pattern as a mask. Etch until exposed (see 13 (a)). After removing the resist pattern, an electrode film 19 made of, for example, Cu is formed as shown in FIG.
Is flattened by CMP. Subsequently, as shown in FIG. 13C, a resist pattern 35 made of a photoresist having an opening on the magnetic gap is formed. next,
As shown in FIG. 13D, this resist pattern 35
Film 1 by dry etching such as RIE using
2 Remove the electrode film 14 on the central part. Thereby, MR
An opening 36 is provided in the center of the film 12, and the electrode film 19 is divided into two left and right electrodes 19a and 19b (FIG. 13).
(D)). Then, after removing the resist pattern 35, as shown in FIG. 13 (e), for example, Al ₂ O ₃
An insulating film 37 is formed, and the insulating film 37 is formed by CMP.
Is flattened.

Through the above steps, the horizontal reproducing magnetic head of the third embodiment shown in FIG. 3 can be manufactured.

As a magnetic film serving as a magnetic yoke or a magnetic core, a crystalline magnetic film such as NiFe, FeTaN, or FeCo; an amorphous magnetic film such as CoZrNb;
-A granular magnetic film such as Al ₂ O ₃ can be used.

When forming a step of the magnetic gap,
A curved step may be formed in the magnetic gap by forming another non-magnetic material thinner than the magnetic yoke instead of the insulating film.

(Seventh Embodiment) Next, a seventh embodiment of the present invention will be described with reference to FIGS.
This embodiment is a magnetic disk drive, and FIG. 14 shows a schematic configuration of the magnetic disk drive. That is,
The magnetic disk device 150 of the present embodiment is a device using a rotary actuator. 14, the magnetic disk 200 is mounted on a spindle 152 and is rotated in the direction of arrow A by a motor (not shown) responding to a control signal from a drive controller (not shown).
In the magnetic disk 200, a head slider 153 for recording and reproducing information stored in the magnetic disk 200 is attached to a tip of a thin-film suspension 154.
Here, the head slider 153 has, for example, the magnetic head according to any of the above-described embodiments mounted near the tip thereof.

When the magnetic disk 200 rotates, the medium facing surface (ABS) of the head slider 153 is held with a predetermined flying height from the surface of the magnetic disk 200.

The suspension 154 is connected to one end of an actuator arm 155 having a bobbin for holding a drive coil (not shown). The other end of the actuator arm 155 is provided with a voice coil motor 156, which is a type of linear motor. The voice coil motor 156 includes a drive coil (not shown) wound around a bobbin portion of the actuator arm 155, and a magnetic circuit including a permanent magnet and an opposing yoke, which are opposed to each other so as to sandwich the coil.

The actuator arm 155 has a fixed shaft 1
It is held by ball bearings (not shown) provided at two positions above and below 57, and can be freely rotated and slid by a voice coil motor 156.

FIG. 15 is an enlarged perspective view of the magnetic head assembly from the actuator arm 155 as viewed from the disk side. That is, the magnetic head assembly 1
Numeral 60 has an actuator arm 151 having a bobbin for holding a drive coil, for example. A suspension 154 is connected to one end of the actuator arm 155.

At the tip of the suspension 154, a head slider 153 having the magnetic head described in any of the above embodiments is attached. Note that a reproducing head and a recording head may be combined. The suspension 154 has lead wires 164 for writing and reading signals, and the lead wires 164 are electrically connected to the respective electrodes of the magnetic head incorporated in the head slider 153. Reference numeral 165 in FIG. 15 denotes an electrode pad of the magnetic head assembly 160.

Here, between the medium facing surface (ABS) of the head slider 153 and the surface of the magnetic disk 200,
A predetermined flying height is set.

The magnetic disk device may be one that performs only reproduction or one that performs recording and reproduction. The medium is not limited to a hard disk, but may be a flexible disk or a magnetic card. It is possible to use any magnetic recording medium such as. Further, the apparatus may be a so-called "removable" type apparatus in which the magnetic recording medium is detachable from the apparatus.

[0075]

As described above, according to the present invention, the size of the magnetic gap on the medium facing surface side can be reduced as much as possible, and the magnetoresistive effect element can be placed close to the medium facing surface. Can be arranged.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a first embodiment of the present invention.

FIG. 2 is a sectional view showing a configuration of a second embodiment of the present invention.

FIG. 3 is a sectional view showing a configuration of a third embodiment of the present invention.

FIG. 4 is a process sectional view showing a configuration of a fourth embodiment of the present invention.

FIG. 5 is a process cross-sectional view showing a configuration of a fourth embodiment of the present invention.

FIG. 6 is a process sectional view showing the configuration of the fourth embodiment of the present invention.

FIG. 7 is a process sectional view showing the configuration of the fifth embodiment of the present invention.

FIG. 8 is a process sectional view showing the configuration of the fifth embodiment of the present invention.

FIG. 9 is a process sectional view showing the configuration of the fifth embodiment of the present invention.

FIG. 10 is a process sectional view showing the configuration of the fifth embodiment of the present invention.

FIG. 11 is a process sectional view showing the configuration of the sixth embodiment of the present invention.

FIG. 12 is a process sectional view showing the configuration of the sixth embodiment of the present invention.

FIG. 13 is a process sectional view showing the configuration of the sixth embodiment of the present invention.

FIG. 14 is an essential part perspective view showing a schematic configuration of a magnetic disk drive according to the present invention;

FIG. 15 is an enlarged perspective view of the magnetic head assembly ahead of the actuator arm as viewed from the disk side.

[Explanation of symbols]

Reference Signs List 1 substrate 2 insulating film (SiO ₂ film) 2a trench 3 resist pattern 4 magnetic film (magnetic yoke) 5 magnetic gap 6 insulating film (SiO ₂ film) 7 trench 8 tip of magnetic gap 9 insulating film (SiO ₂ film) 10 Resist pattern 11 Opening 12 Magnetoresistive film (MR film) 14 Insulating film (Al ₂ O ₃ ) 15 Resist pattern 16 Trench 17 Lead 18 Electrode 19a, 19b Electrode 20a Electrode 22 Insulating film (Al ₂ O ₃ ) 24 MR film Reference Signs List 25 insulating film (Al ₂ O ₃ ) 27 insulating film (Al ₂ O ₃ ) 28 resist pattern 29 magnetic film 30 resist pattern 31 insulating film (SiO ₂ film) 32 insulating film (SiO ₂ film) 34 insulating film (Al ₂ O) ₃ )

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Koichi Tateyama 1 Koga Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Prefecture Toshiba R & D Center Co., Ltd. Kuko Toshiba 1 Inside the Toshiba R & D Center (72) Inventor Hiroaki Yoda 1 Komukai Toshiba-cho 1 Koyuki-ku, Kawasaki-shi, Kanagawa F-term (Reference) 2G017 AA01 AC07 AD55 AD63 AD65 5D034 AA03 BA03 BA08 BA15 BA18 DA07

Claims (10)

[Claims] A pair of magnetic yokes opposed to each other across a magnetic gap, at least one of which extends from the medium facing surface to a position retracted from the medium facing surface, and a protrusion directed toward the medium facing surface within the magnetic gap. A yoke-type reproducing magnetic head, comprising: a curved portion having a shape; a magnetoresistive film magnetically connected to the magnetic yoke; and an electrode electrically connected to the magnetoresistive film. 2. The yoke type reproducing magnetic head according to claim 1, wherein said magnetoresistive effect film is electrically connected to said pair of magnetic yokes. 3. A yoke-type reproducing magnetic head according to claim 1, wherein said electrode is partially connected to a surface of said magnetoresistive film opposite to a convex surface of said magnetoresistive effect film. . 4. The electrode comprises first and second electrode portions, and ends of the first and second electrode portions are electrically connected to ends of the magnetoresistive film in the magnetic gap, respectively. 3. The yoke-type reproducing magnetic head according to claim 1, wherein the yoke type reproducing magnetic head is connected to a magnetic head. 5. A step of forming a pair of magnetic yokes facing each other across a magnetic gap, a step of embedding a nonmagnetic film having a different etching rate from that of the magnetic yoke in the magnetic gap, and utilizing a difference in etching rates. Forming a step in the magnetic gap portion, and embedding a magnetoresistive film in the step portion. 6. The yoke-type reproduction according to claim 5, further comprising the step of leaving a step when embedding the magnetoresistive effect film, and forming a part or all of an electrode extraction lead in the step. A method for manufacturing a magnetic head. 7. A step of forming a magnetic yoke, and a step of forming a step between a surface of the magnetic yoke opposite to the medium facing surface and a surface of the magnetic gap opposite to the medium facing surface. And a step of embedding a magnetoresistive effect film in the step portion. 8. The yoke-type reproduction according to claim 7, further comprising the step of leaving a step when embedding the magnetoresistive film and forming a part or all of a lead for taking out an electrode in the step. A method for manufacturing a magnetic head. 9. A step of forming an electrode having a protrusion, a step of forming a side wall made of an insulating film on a side surface of the protrusion, and forming a magnetoresistive film so as to cover the protrusion and the side wall. And a step of forming a magnetic yoke having a magnetic gap on the convex portion. 10. A magnetic disk drive using the yoke-type reproducing magnetic head according to claim 1 as a reproducing magnetic head.