JP2002181620A - Scanner characteristic evaluating device, scanner characteristic correction data forming method using scanner characteristic evaluating device scanner characteristic correction method based on scanner characteristic correction data formed by using scanner characteristic evaluating device, and scanner capable of characteristic correction - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scanner characteristic evaluating device capable of accurately evaluating the characteristic of a scanner. SOLUTION: This scanner characteristic evaluating device is characterized in that when receiving irradiation of a laser beam, a mask 62 of a chrome film is arranged on a color glass filter 61 having a property of emitting fluorescence, and a regular test pattern 63 for exposing the color glass filter is formed by an opening part of the mask.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for evaluating characteristics of a scanner, a method of generating data for correcting characteristics of a scanner using the device for evaluating characteristics of a scanner, and characteristics of a scanner generated using the device for evaluating characteristics of a scanner. The present invention relates to a scanner characteristic correction method based on correction data and a scanner capable of correcting characteristic correction, and more particularly to a scanner characteristic evaluation device capable of accurately evaluating a scanner characteristic, and a scanner characteristic evaluation device. Using the device, simply, a scanner characteristic correction data generation method that can generate the optimal scanner characteristic correction data, based on the scanner characteristic correction data generated using the scanner characteristic evaluation device, A scanner characteristic correction method and a scanner characteristic correction method capable of correcting the scanner characteristics as desired. Fine as desired, to a scanner which can correct the characteristics.

[0002]

2. Description of the Related Art When irradiated with radiation, the energy of the radiation is absorbed, stored, recorded, and then excited using electromagnetic waves in a specific wavelength range. A stimulable phosphor having a characteristic of emitting a stimulating amount of radiated light is used as a radiation detecting material, and a substance provided with a radioactive label is administered to an organism, and then the organism or a tissue of the organism is treated. Partly as a sample,
This sample is superimposed on a stimulable phosphor sheet provided with a stimulable phosphor layer for a certain period of time, whereby radiation energy is accumulated and recorded on the stimulable phosphor, and thereafter, the radiation energy is stimulated by electromagnetic waves. Scans the stimulable phosphor layer to excite the stimulable phosphor, photoelectrically detects the stimulable light emitted from the stimulable phosphor, generates a digital image signal, and performs image processing. An autoradiography detection system configured to reproduce an image on a display means such as chrome T or on a recording material such as a photographic film is known (for example, Japanese Patent Publication No. 1-60784, Japanese Patent Publication No. No. 1-60782, Japanese Patent Publication No. 4-3952, etc.).

An autoradiography detection system using a stimulable phosphor sheet as a material for detecting an image, unlike the case of using a photographic film, not only does not require a chemical treatment called a development process, but also obtains an obtained image. By performing image processing on image data, there is an advantage that an image can be reproduced or quantitative analysis can be performed by a computer as desired.

[0004] On the other hand, a fluorescence detection system using a fluorescent substance as a labeling substance instead of a radioactive labeling substance in an autoradiography system is known. According to this system, by reading a fluorescent image, gene sequence, gene expression level, separation and identification of protein, or evaluation of molecular weight and properties can be performed. After adding a fluorescent dye to the solution containing the fragments,
A plurality of DNA fragments are electrophoresed on a gel support, or a plurality of DNA fragments are placed on a gel support containing a fluorescent dye.
After the NA fragment is subjected to electrophoresis, or a plurality of DNA fragments are subjected to electrophoresis on a gel support, the gel support is immersed in a solution containing a fluorescent dye, etc. By labeling, exciting a fluorescent dye with excitation light, and detecting the generated fluorescence, an image is generated, and the distribution of DNA on the gel support is detected. After electrophoresis on a support, the DNA is denaturated, and then at least a part of the denatured DNA fragment is transferred onto a transfer support such as nitrocellulose by Southern blotting to obtain the desired DNA. A probe prepared by labeling DNA or RNA complementary to the DNA to be labeled with a fluorescent dye and a denatured DNA fragment is hybridized, and the probe DNA
Alternatively, only the DNA fragment complementary to the probe RNA is selectively labeled, and the excitation light excites the fluorescent dye,
By detecting the generated fluorescence, an image can be generated and the distribution of the target DNA on the transfer support can be detected. Further, a DNA probe complementary to the DNA containing the target gene labeled with the labeling substance is prepared, hybridized with the DNA on the transcription support, and the enzyme is reacted with the complementary DNA labeled with the labeling substance. After binding, it is brought into contact with a fluorescent substrate to convert the fluorescent substrate into a fluorescent substance that emits fluorescence, and the excitation light excites the generated fluorescent substance and detects the generated fluorescence to generate an image. However, the distribution of the target DNA on the transcription support can also be detected. This fluorescence detection system has an advantage that a gene sequence or the like can be easily detected without using a radioactive substance.

In recent years, hormones, tumor markers, enzymes, antibodies, antigens, abzymes,
Other proteins, nucleic acids, cDNA, DNA, RNA
Such as, a specific binding substance that can specifically bind to a substance derived from a living body, and has a known base sequence, base length, and composition, is dropped using a spotter apparatus, and a large number of independent binding substances are dropped. A spot is formed, and then, a hormone, a tumor marker, an enzyme, an antibody, an antigen, an abzyme, another protein, a nucleic acid, a cDNA, a DNA, an mRNA, or the like, is collected from a living body by extraction, isolation, or the like. Excitation light is applied to a microarray that is a substance derived from a living body that has been subjected to chemical treatment, chemical modification, etc., and that has been hybridized with a substance that is labeled with a labeling substance such as a fluorescent substance or dye. Substances, photoelectrically detect light such as fluorescence emitted from labeling substances such as dyes,
A microarray detection system for analyzing a substance derived from a living body has been developed. According to this microarray detection system, a large number of specific binding substance spots are formed at different positions on a carrier surface such as a slide glass plate or a membrane filter at a high density, and a biological substance labeled with a labeling substance is formed. Is advantageous in that a substance derived from a living body can be analyzed in a short time.

[0006] In both the fluorescence detection system and the microarray detection system, the sample is irradiated with excitation light to excite a labeling substance such as a fluorescent substance, and the fluorescence emitted from the fluorescent substance is photoelectrically detected to detect the label. It generates data for biochemical analysis such as image data and luminescence data of substances.The data generators used for these systems are those that use scanners and those that use two-dimensional sensors. Are roughly divided into

[0007] Compared to the case of using a two-dimensional sensor, the use of a scanner has the advantage that data can be generated with high resolution.

[0008]

In generating data for biochemical analysis such as image data and luminescence amount data of a labeling substance using a scanner, first, scanning in a main scanning direction and a sub-scanning direction in the scanner is performed. It is necessary to evaluate the speed variation and the resolution of the scanner.For this reason, conventionally, a device for evaluating the characteristics of a scanner that has a test pattern formed by depositing chromium on a slide glass plate and a test pattern are printed. The characteristics of the scanner have been evaluated by irradiating excited paper with excitation light, detecting reflected light, and forming an image.

However, since the conventional scanner characteristic evaluation method detects reflected light, the difference in contrast between the test pattern and the background is small, and it is difficult to accurately recognize an imaged pattern. In addition, in the case of a scanner evaluation device in which chromium is vapor-deposited on a slide glass plate and a test pattern is formed, light scattering is strong at an edge portion of the chromium vapor-deposited film. There is a problem that the line width becomes larger than the actual pattern line width, and it is not possible to accurately evaluate the characteristics of the scanner based on the imaged pattern.

Therefore, according to the present invention, an optimum scanner characteristic correction data can be easily generated using a scanner characteristic evaluation device capable of accurately evaluating the characteristics of a scanner, and a scanner characteristic evaluation device. Scanner characteristic correction data generation method and scanner characteristic correction that can correct scanner characteristics as desired based on scanner characteristic correction data generated using a scanner characteristic evaluation device It is an object to provide a method and a scanner whose characteristics can be corrected as desired.

[0011]

SUMMARY OF THE INVENTION The object of the present invention is as follows.
A mask of a metal film is provided over a support having a property of emitting fluorescence or photoluminescence when irradiated with a laser beam, and the support is exposed through openings of the mask of the metal film. This is achieved by a device for evaluating characteristics of a scanner, wherein a special test pattern is formed.

According to the present invention, a device for evaluating characteristics of a scanner is provided on a support having a property of emitting fluorescence or photoluminescence when irradiated with laser light.
Since a metal film mask is provided, and a regular test pattern that exposes the support is formed and configured by the openings of the metal film mask, the device for evaluating the characteristics of the scanner is irradiated with laser light. Scanning, exciting a support in an opening forming a test pattern with a laser beam, and photoelectrically detecting fluorescence or photoluminescence emitted from the support to generate an image of the test pattern. Thus, the characteristics of the scanner can be evaluated.Therefore, as in the case of the conventional scanner characteristic evaluation method in which the reflected light from the test pattern is photoelectrically detected and the characteristics of the scanner are evaluated, the test pattern and the The difference in contrast with the background is small,
It is unlikely that it will be difficult to accurately recognize the imaged pattern, and chromium is deposited on the slide glass plate, as in the case of a scanner evaluation device in which a test pattern is formed. At the edge of the film, it is possible to reliably prevent the line width of the image of the test pattern from being increased due to the strong scattering of light, and therefore, it is possible to improve the characteristics of the scanner as desired. It becomes possible to evaluate.

In a preferred embodiment of the present invention, the test pattern includes a pattern for evaluating an absolute position and a distance, a pattern for evaluating a resolution of a scanner in a main scanning direction, and a resolution of a scanner in a sub-scanning direction. It has one or more patterns selected from the group consisting of a pattern for evaluating, a pattern for adjusting the focus of the confocal optical system, and a pattern for evaluating jitter.

According to a preferred embodiment of the present invention, the test pattern includes a pattern for evaluating an absolute position and a distance, a pattern for evaluating a resolution of a scanner in a main scanning direction, and a resolution of a scanner in a sub-scanning direction. It has one or two or more patterns selected from the group consisting of a pattern for evaluating, a pattern for adjusting the focus of the confocal optical system, and a pattern for evaluating jitter. By scanning the characteristic evaluation device with laser light, various characteristics of the scanner can be evaluated, and it is not necessary to use a different evaluation device for each characteristic of the scanner.

In a further preferred aspect of the present invention, the support is made of a material which can be processed while maintaining optical flatness.

According to a further preferred embodiment of the present invention, the support is formed of a material which can be processed while maintaining optical flatness. Therefore, it is possible to accurately evaluate the characteristics of the scanner using the device for evaluating characteristics of the scanner.

In a further preferred aspect of the present invention, the support is made of a material that does not deteriorate even when irradiated with the laser beam.

According to a further preferred embodiment of the present invention, since the support is made of a material which does not deteriorate even when irradiated with laser light, the device for evaluating characteristics of the scanner is repeatedly used. It becomes possible to evaluate the characteristics of the scanner.

In a further preferred embodiment of the present invention, the support comprises a group IV element, a group II-VI compound,
It is formed of a material selected from the group consisting of III-V compounds and composites thereof.

According to a further preferred embodiment of the present invention, the material selected from the group consisting of a group IV element, a group II-VI compound, a group III-V compound and a complex thereof is irradiated with a laser beam. Not only has the property of emitting fluorescence or photoluminescence, but also can be processed while maintaining optical flatness, and does not deteriorate even when irradiated with laser light. The support is formed so as to maintain planarity, and a mask of a metal film is provided on the support, so that a large number of openings through which the support is exposed can be formed regularly. The light scans the support in a number of regularly formed openings and photoelectrically detects the fluorescence or photoluminescence emitted from the support in the number of openings to provide data. Together comprising a shading can be accurately evaluated, the device for evaluation characteristics of the scanner, with repeated use, it is possible to evaluate the characteristics of the scanner.

In a further preferred embodiment of the present invention, the support is made of a glass mainly containing a material selected from the group consisting of silica sand, soda ash and limestone, and CdS
It is formed by a colored glass filter formed by doping a solid solution of -CdSe.

According to a further preferred embodiment of the present invention, a colored glass formed by doping a solid solution of CdS-CdSe into a glass mainly composed of a material selected from the group consisting of silica sand, soda ash and limestone. The filter not only has a property of emitting fluorescence or photoluminescence when irradiated with laser light, but can also be processed while maintaining optical flatness, and can be processed by being irradiated with laser light. Also, since it does not deteriorate, a support is formed so as to maintain optical flatness, and a mask of a metal film is provided on the support, and a large number of openings where the support is exposed are regularly formed. Thus, the laser light scans the support in a number of regularly formed openings, and emits fluorescent or photoluminescent light emitted from the support in the number of openings. By detecting Nsu photoelectrically, it becomes possible to accurately evaluate the shading data, the device for evaluation characteristics of the scanner, and repeated use, makes it possible to evaluate the characteristics of the scanner.

In still another preferred embodiment of the present invention, the support is made of a glass mainly composed of a material selected from the group consisting of silica sand, soda ash, and limestone, and
It is formed by a colored glass filter formed by doping a solid solution of nS-CdS.

According to a further preferred embodiment of the present invention, a colored glass formed by doping a solid solution of ZnS-CdS into a glass mainly composed of a material selected from the group consisting of silica sand, soda ash and limestone. The filter not only has a property of emitting fluorescence or photoluminescence when irradiated with laser light, but can also be processed while maintaining optical flatness, and can be processed by being irradiated with laser light. Also, since it does not deteriorate, a support is formed so as to maintain optical flatness, and a mask of a metal film is provided on the support, and a large number of openings where the support is exposed are regularly formed. Thus, the laser light scans the support in a large number of regularly formed openings to emit fluorescent or photoluminescent light emitted from the support in the large number of openings. By detecting the scan photoelectrically, it becomes possible to accurately evaluate the shading data, the device for evaluation characteristics of the scanner, with repeated use, it is possible to evaluate the characteristics of the scanner.

In still another preferred embodiment of the present invention, the support comprises an InGaAsP layer and a GaAs layer.
A mask of the metal film, formed by a stack of layers,
It is provided on the InGaAsP layer.

According to a further preferred embodiment of the present invention, the laminate of the InGaAsP layer and the GaAs layer not only has a property of emitting fluorescence or photoluminescence when irradiated with laser light, but also has a property of emitting fluorescence or photoluminescence. Since it can be processed while maintaining optical flatness and does not deteriorate even when irradiated with laser light, a support is formed and a metal film mask is maintained so as to maintain optical flatness. Can be formed on the support, and a large number of openings from which the support is exposed can be formed regularly, so that the laser light scans the support in the regularly formed many openings. Then, by photoelectrically detecting the fluorescence or photoluminescence emitted from the support in the many openings, it becomes possible to accurately evaluate the shading of data. The device for evaluation characteristics of the scanner, with repeated use, it is possible to evaluate the characteristics of the scanner.

In a further preferred aspect of the present invention, the mask for the metal film is formed by a forming method selected from the group consisting of sputtering, CVD and vapor deposition.

In a further preferred aspect of the present invention, the metal film is formed by sputtering.

In a further preferred aspect of the present invention, the mask of the metal film is made of chromium, aluminum,
It is formed of a material selected from the group consisting of gold, nickel-chromium alloy and titanium-nickel-chromium.

In a further preferred aspect of the present invention, the mask of the metal film is formed of chromium.

According to a further preferred embodiment of the present invention, since the mask of the metal film is formed of chromium, it is possible to improve the mechanical strength of the device for evaluating characteristics of the scanner.

The object of the present invention is also to provide a metal film mask provided on a support having a property of emitting fluorescence or photoluminescence when irradiated with a laser beam, wherein an opening of the metal film mask is provided. By scanning a device for evaluating characteristics of a scanner on which a regular test pattern in which the support is exposed is scanned by a laser beam, and exciting the support through the opening, the support is Fluorescence or photoluminescence emitted from the device is photoelectrically detected through the opening and digitized to generate scanner characteristic correction data for correcting the scanner characteristics based on the generated scanner characteristic evaluation data. This is achieved by a method for generating characteristic correction data for a scanner.

According to the present invention, a mask of a metal film is provided on a support having a property of emitting fluorescence or photoluminescence when irradiated with a laser beam, and the support of the metal film is supported by an opening of the mask of the metal film. A device for characterization of a scanner on which a regular test pattern in which a body is exposed is formed is scanned by a laser beam to excite the support through an opening, and fluorescence or photo emitted from the support is emitted. Luminescence is photoelectrically detected through the opening, digitized, and an image of the test pattern is generated based on the generated scanner characteristic evaluation data, so that the characteristics of the scanner can be accurately evaluated. Therefore, based on the scanner characterization data,
Generates scanner characteristic correction data for correcting the scanner characteristics, uses the scanner characteristic correction data to perform correction on the sample digital data based on the scanner characteristics as desired, and converts the sample digital data. Can be generated.

In a preferred embodiment of the present invention, based on the digital data, a signal intensity generated by photoelectrically detecting fluorescence or photoluminescence emitted from the support is integrated according to the test pattern. Then, the scanner characteristic evaluation data is generated.

In a further preferred aspect of the present invention, a pixel pitch of the scanning by the laser light is set to be substantially equal to or smaller than a beam diameter of the laser light.

In a further preferred aspect of the present invention, the scanner characteristic correction data is generated for each wavelength of the laser light.

Although the characteristics of the scanner vary depending on the wavelength of the laser light, according to a further preferred embodiment of the present invention, the scanner characteristic correction data is generated for each laser light wavelength. When appropriately selecting laser light having a wavelength capable of exciting a labeling substance such as a fluorescent substance most efficiently, exciting the sample with the laser light, and photoelectrically detecting light emitted from the sample. In addition, it is possible to generate the sample digital data by performing the correction based on the scanner characteristics as desired on the sample digital data using the scanner characteristic correction data.

In a further preferred embodiment of the present invention, the scanner characteristic correction data is stored in a memory.

According to a further preferred embodiment of the present invention, since the scanner characteristic correction data is stored in the memory, the scanner characteristic correction data stored in the memory can be used as desired. Can be corrected to generate a digital sample.

In a further preferred aspect of the present invention, the test pattern includes a pattern for evaluating an absolute position and a distance, a pattern for evaluating a resolution of a scanner in a main scanning direction, and a resolution of a scanner in a sub-scanning direction. , One or two or more patterns selected from the group consisting of a pattern for adjusting the focus of the confocal optical system and a pattern for evaluating the jitter.

According to a further preferred embodiment of the present invention, the test pattern includes a pattern for evaluating the absolute position and the distance, a pattern for evaluating the resolution of the scanner in the main scanning direction, and the resolution of the scanner in the sub-scanning direction. It is configured to have one or two or more patterns selected from the group consisting of a pattern for evaluating the pattern, a pattern for adjusting the focus of the confocal optical system, and a pattern for evaluating the jitter, By scanning the characteristic evaluation device of one scanner with laser light, it is possible to evaluate various characteristics of the scanner, and it is not necessary to use a different evaluation device for each characteristic of the scanner.

In a further preferred aspect of the present invention, the support is made of a material which can be processed while maintaining optical flatness.

According to a further preferred embodiment of the present invention, the support is made of a material which can be processed while maintaining optical flatness. Therefore, it is possible to accurately evaluate the scanner characteristics and generate scanner characteristic correction data using the scanner characteristic evaluation device.

In a further preferred aspect of the present invention, the support is made of a material that does not deteriorate even when irradiated with the laser light.

According to a further preferred embodiment of the present invention, since the support is made of a material that does not deteriorate even when irradiated with laser light, the device for evaluating characteristics of a scanner is repeatedly used. It becomes possible to evaluate scanner characteristics and generate scanner characteristic correction data.

In a further preferred embodiment of the present invention, the support comprises a group IV element, a group II-VI compound,
It is formed of a material selected from the group consisting of III-V compounds and composites thereof.

According to a further preferred embodiment of the present invention, a material selected from the group consisting of a group IV element, a group II-VI compound, a group III-V compound and a complex thereof is irradiated with a laser beam. Not only has the property of emitting fluorescence or photoluminescence, but also can be processed while maintaining optical flatness, and does not deteriorate even when irradiated with laser light. The support is formed so as to maintain planarity, and a mask of a metal film is provided on the support, so that a large number of openings through which the support is exposed can be formed regularly. The light scans the support in a number of regularly formed openings and photoelectrically detects the fluorescence or photoluminescence emitted from the support in the number of openings to provide data. It is possible to evaluate scanner shading with high accuracy and generate scanner characteristic correction data, and to evaluate scanner characteristics by repeatedly using a scanner characteristic evaluation device to generate scanner characteristic correction data. Becomes possible.

In a further preferred embodiment of the present invention, the support is made of a glass mainly composed of a material selected from the group consisting of silica sand, soda ash and limestone, and CdS
It is formed by a colored glass filter formed by doping a solid solution of -CdSe.

According to a further preferred embodiment of the present invention, a colored glass formed by doping a solid solution of CdS-CdSe into a glass mainly composed of a material selected from the group consisting of silica sand, soda ash and limestone. The filter not only has a property of emitting fluorescence or photoluminescence when irradiated with laser light, but can also be processed while maintaining optical flatness, and can be processed by being irradiated with laser light. Also, since it does not deteriorate, a support is formed so as to maintain optical flatness, and a mask of a metal film is provided on the support, and a large number of openings where the support is exposed are regularly formed. Thus, the laser light scans the support in a number of regularly formed openings, and emits fluorescent or photoluminescent light emitted from the support in the number of openings. By photoelectrically detecting the impedance, it is possible to accurately evaluate data shading and generate scanner characteristic correction data, and to repeatedly use a scanner characteristic evaluation device to improve the characteristics of the scanner. It is possible to evaluate and generate scanner characteristic correction data.

In still another preferred embodiment of the present invention, the support is made of a glass mainly composed of a material selected from the group consisting of silica sand, soda ash and limestone, and Z
It is formed by a colored glass filter formed by doping a solid solution of nS-CdS.

According to a further preferred embodiment of the present invention, a colored glass formed by doping a solid solution of ZnS-CdS into a glass mainly composed of a material selected from the group consisting of silica sand, soda ash and limestone. The filter not only has a property of emitting fluorescence or photoluminescence when irradiated with laser light, but can also be processed while maintaining optical flatness, and can be processed by being irradiated with laser light. Also, since it does not deteriorate, a support is formed so as to maintain optical flatness, and a mask of a metal film is provided on the support, and a large number of openings where the support is exposed are regularly formed. Thus, the laser light scans the support in a large number of regularly formed openings to emit fluorescent or photoluminescent light emitted from the support in the large number of openings. By photoelectrically detecting the scanning characteristics, it is possible to accurately evaluate data shading and generate scanner characteristic correction data, and to repeatedly use a scanner characteristic evaluation device to improve the characteristics of the scanner. It is possible to evaluate and generate scanner characteristic correction data.

In still another preferred embodiment of the present invention, the support comprises an InGaAsP layer and a GaAs layer.
A mask of the metal film, formed by a stack of layers,
It is provided on the InGaAsP layer.

According to a further preferred embodiment of the present invention, the laminate of the InGaAsP layer and the GaAs layer not only has a property of emitting fluorescence or photoluminescence when irradiated with laser light, but also has a property of emitting fluorescence or photoluminescence. Since it can be processed while maintaining optical flatness and does not deteriorate even when irradiated with laser light, a support is formed and a metal film mask is maintained so as to maintain optical flatness. Can be formed on the support, and a large number of openings from which the support is exposed can be formed regularly, so that the laser light scans the support in the regularly formed many openings. Then, by photoelectrically detecting the fluorescence or photoluminescence emitted from the support in the many openings, the data shading can be accurately evaluated, and the scanner characteristic correction data can be obtained. It becomes possible to generate, a device for evaluation characteristics of the scanner, with repeated use, to evaluate the characteristics of the scanner, it is possible to generate a scanner characteristics correction data.

In a further preferred aspect of the present invention, the mask of the metal film is formed by a forming method selected from the group consisting of sputtering, CVD and vapor deposition.

In a further preferred aspect of the present invention, the metal film is formed by sputtering.

In a further preferred aspect of the present invention, the metal film mask is made of chromium, aluminum,
It is formed of a material selected from the group consisting of gold, nickel-chromium alloy and titanium-nickel-chromium.

In a further preferred aspect of the present invention, the mask of the metal film is formed of chromium.

According to a further preferred embodiment of the present invention, since the mask of the metal film is formed of chromium, it is possible to improve the mechanical strength of the device for evaluating characteristics of the scanner.

The object of the present invention is also to scan a sample with a laser beam, photoelectrically detect light emitted from the sample, generate analog data, digitize the analog data, A scanner which generates digital data of a sample, and corrects the digital data of the sample based on the scanner characteristic correction data generated by the above-described scanner characteristic correction data generating method and stored in the memory. This is achieved by the characteristic correction method described above.

According to the present invention, a mask of a metal film is provided on a support having a property of emitting fluorescence or photoluminescence when irradiated with a laser beam, and is supported by an opening of the mask of the metal film. A device for characterization of a scanner on which a regular test pattern in which a body is exposed is formed is scanned by a laser beam to excite the support through an opening, and fluorescence or photo emitted from the support is emitted. Luminescence is photoelectrically detected through the opening, digitized, and an image of the test pattern is generated based on the generated scanner characteristic evaluation data, so that the characteristics of the scanner can be accurately evaluated. Therefore, based on the scanner characterization data,
Scanner characteristic correction data for correcting the characteristics of the scanner is generated and stored in the memory, and the sample is scanned with laser light using the scanner characteristic correction data stored in the memory, and light emitted from the sample is scanned. Photoelectrically detecting, generating analog data, digitizing the analog data, subjecting the sampled digital data to correction as desired based on scanner characteristics, and converting the sampled digital data Can be generated.

The object of the present invention is also to provide at least one laser excitation light source for emitting a laser beam, a sample stage on which a sample is mounted, and a laser light emitted from the at least one laser excitation light source. Scanning means for moving the sample stage so that the sample placed on the sample stage can be scanned, a photodetector for photoelectrically detecting light, a memory, and a correction means for correcting digital data of the sample. Wherein the memory stores scanner characteristic correction data generated by the above-described scanner characteristic correction data generation method, and wherein the correction unit outputs the scanner characteristic correction data stored in the memory. Based on the digital data of the sample, It is achieved by that scanner.

According to the present invention, a mask of a metal film is provided on a support having a property of emitting fluorescence or photoluminescence when irradiated with a laser beam, and is supported by an opening of the mask of the metal film. A device for characterization of a scanner on which a regular test pattern in which a body is exposed is formed is scanned by a laser beam to excite the support through an opening, and fluorescence or photo emitted from the support is emitted. Luminescence is photoelectrically detected through the opening, digitized, and an image of the test pattern is generated based on the generated scanner characteristic evaluation data, so that the characteristics of the scanner can be accurately evaluated. Therefore, it is possible to generate scanner characteristic correction data for correcting the characteristics of the scanner. The mounted sample is to over-di, the laser beam emitted from at least one laser excitation light sources, scanned, the light emitted from the sample,
The photodetector photoelectrically detects and generates analog data, digitizes the analog data, and obtains the digital data of the sample based on the scanner characteristic correction data stored in the memory.
As desired, make corrections based on the characteristics of the scanner,
It becomes possible to generate digital data of samples.

In a preferred embodiment of the present invention, the scanning means sets the sample stage so as to have a pixel pitch substantially equal to or smaller than a beam diameter of laser light emitted from the at least one laser excitation light source. so,
It is configured to be moved.

In a further preferred aspect of the present invention, the memory is configured to store scanner characteristic correction data for each of the laser beams having two or more different wavelengths.

According to a further preferred embodiment of the present invention, the memory is configured to store the scanner characteristic correction data for each of two or more different wavelengths of laser light. The laser light having the wavelength that can be most efficiently excited is appropriately selected, the sample is excited, and the light emitted from the sample is photoelectrically detected. ,
As desired, the sample digital data can be corrected for scanner characteristics to generate the sample digital data.

[0066]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a schematic perspective view of a scanner whose characteristics are evaluated using a device for evaluating characteristics of a scanner according to a preferred embodiment of the present invention.

As shown in FIG. 1, the scanner has 64
A first laser excitation light source 1 that emits a laser beam 4 having a wavelength of 0 nm, a second laser excitation light source 2 that emits a laser beam 4 of a wavelength of 532 nm, and a third laser excitation that emits a laser beam 4 having a wavelength of 473 nm. And a light source 3. In the present embodiment, the first laser excitation light source is constituted by a semiconductor laser light source, and the second laser excitation light source 2 and the third laser excitation light source 3 are configured to generate a second harmonic (Second harmonic).
Harmonic Generation) elements.

The laser light 4 generated by the first laser excitation light source 1 is collimated by a collimator lens 5 and then reflected by a mirror 6. In the optical path of the laser light 4 emitted from the first laser excitation light source 1 and reflected by the mirror 6, the first dichroic mirrors 7 and 532nm transmitting the 640nm laser light 4 and reflecting the 532nm wavelength light are provided. A second dichroic mirror 8 that transmits light having the above wavelength and reflects light having a wavelength of 473 nm is provided. The laser light 4 generated by the first laser excitation light source 1 is used as a first dichroic mirror. The light passes through 7 and the second dichroic mirror 8 and enters the optical head 15.

On the other hand, the laser light 4 generated from the second laser excitation light source 2 is collimated by the collimator lens 9 and then reflected by the first dichroic mirror 7 to change its direction by 90 degrees. Then, the light passes through the second dichroic mirror 8 and enters the optical head 15.

The laser light 4 generated from the third laser excitation light source 3 is collimated by the collimator lens 10 and then reflected by the second dichroic mirror 8 to change its direction by 90 degrees. After that, the light enters the optical head 15.

The optical head 15 includes a mirror 16, a perforated mirror 18 having a hole 17 formed in the center thereof, and a lens 19. The laser beam 4 incident on the optical head 15 is Mirror 1
The sample carrier 2 set on the sample stage 20 through the hole 17 and the lens 19 formed in
1 Here, the sample stage 20 is configured to be movable in the X and Y directions in FIG. 1 by a scanning mechanism (not shown in FIG. 1).

The scanner shown in FIG. 1 uses a slide glass plate as a carrier, and uses a laser beam 4 to scan a microarray in which a number of spots of a sample selectively labeled with a fluorescent dye are formed on the slide glass plate. It is configured to scan and excite the fluorescent dye, photoelectrically detect the fluorescence emitted from the fluorescent dye, and generate data for biochemical analysis, and further selectively labeled with the fluorescent dye. A fluorescent sample using a transfer support containing denatured DNA as a carrier is scanned by a laser beam 4 to excite the fluorescent dye, and the fluorescence emitted from the fluorescent dye is photoelectrically detected to obtain data for biochemical analysis. And a carrier such as a membrane filter on which a number of spots of the sample selectively labeled with a radioactive labeling substance are formed. A stimulable phosphor in which the position information of a radiolabeled substance obtained by exposing the stimulable phosphor layer to light and being in close contact with the stimulable phosphor sheet on which the stimulable phosphor layer containing the luminescent material is formed is recorded. The stimulable phosphor layer of the sheet is
Scans to excite the stimulable phosphor, photoelectrically detects the stimulable light emitted from the stimulable phosphor, and generates data for biochemical analysis.

When the laser beam 4 is incident on the sample 22 from the optical head 15, if the sample 22 is a microarray or a fluorescent sample, the laser beam 4
The fluorescent substance is excited to emit fluorescence, and when the sample 22 is a stimulable phosphor sheet, the stimulable phosphor contained in the stimulable phosphor layer is excited to stimulate the stimulable phosphor. Is issued.

The fluorescence or stimulating light 25 emitted from the sample 22 is converted into parallel light by the lens 19 of the optical head 15 and reflected by the perforated mirror 17.
Any one of the filters 28a, 28a, 28b, 28c, 28d of the filter unit 27 having four filters 28a, 28b, 28c, 28d.
The light is incident on 28b, 28c, 28d.

The filter unit 27 is configured to be movable in the left-right direction in FIG. 1 by a motor (not shown), and predetermined filters 28a, 28b, 28c, 28d are provided depending on the type of laser excitation light source used. , Or in the optical path of the fluorescent or stimulating light 25.

Here, the filter 28a is a filter used when the first laser excitation light source 1 is used to excite the fluorescent substance contained in the sample 22 and read out the fluorescence, and has a wavelength of 640 nm. Cut the light, 640n
It has the property of transmitting light having a wavelength longer than m.

The filter 28b is a filter used when the second laser excitation light source 2 is used to excite the fluorescent dye contained in the sample 22 and read out the fluorescence. The filter 28b has a wavelength of 532 nm. 532nm
It has the property of transmitting light with a longer wavelength than that.

Further, the filter 28c is a filter used to excite the fluorescent dye contained in the sample 22 by using the third laser excitation light source 3 and read out the fluorescence, and the light having a wavelength of 473 nm is used. And cut 473n
It has the property of transmitting light having a wavelength longer than m.

When the sample 22 is a stimulable phosphor sheet, the filter 28d uses the first laser excitation light source 1 to excite the stimulable phosphor contained in the stimulable phosphor sheet. A filter used to read the stimulable light emitted from the stimulable phosphor, and transmits only light in the wavelength region of the stimulable light emitted from the stimulable phosphor;
It has the property of cutting light having a wavelength of 0 nm.

Accordingly, these filters 28a, 28a, and 28a may be used in accordance with the type of laser excitation light source to be used, that is, the type of sample and the type of fluorescent substance labeling the sample.
By selectively using 8b, 28c, 28d,
It becomes possible to cut off light in a wavelength region that becomes noise.

The filter 28a of the filter unit 27,
After passing through 28b and 28c and cutting light in a predetermined wavelength range, the fluorescence or stimulating light 25 enters a mirror 29, is reflected, and is condensed by a lens 30.

The lens 19 and the lens 30 constitute a confocal optical system. As described above, the confocal optical system is employed because, when the sample 22 is a microarray using a slide glass plate as a carrier, the fluorescence emitted from a minute spot-shaped sample formed on the slide glass plate is used. To
This is to enable reading at a high S / N ratio.

At the focal point of the lens 30, a confocal switching member 31 is provided.

FIG. 2 is a schematic front view of the confocal switching member 31.

As shown in FIG. 2, the confocal switching member 31 has a plate shape and has three pinholes 3 having different diameters.
2a, 32b and 32c are formed.

The pinhole 32a having the smallest diameter is arranged in the optical path of the fluorescent light emitted from the microarray when the sample 22 is a microarray using a slide glass plate as a carrier. Reference numeral 32c denotes a sample arranged on the optical path of the fluorescence emitted from the transfer support when the sample 22 is a fluorescent sample using the transfer support as a carrier.

The pinhole 32b having an intermediate diameter
In the case where the sample 22 is a stimulable phosphor sheet, the sample 22 is arranged on the optical path of the stimulable light emitted from the stimulable phosphor layer.

As described above, at the position of the focal point of the lens 30,
By providing the confocal switching member 31, when the sample 22 is a microarray using a slide glass plate as a carrier,
The pinhole 32a having the smallest diameter is positioned in the optical path of the fluorescent light. When the sample 22 is a microarray using a slide glass plate as a carrier, the fluorescent dye is excited by the laser light 4 so that the fluorescent light is Since the light is emitted from the surface of the slide glass plate and the light emitting point is almost constant in the depth direction, it is necessary to form an image on the pinhole 32a having a small diameter using a confocal optical system in order to improve the S / N ratio. Is desirable.

On the other hand, when the sample 22 is a fluorescent sample using a transfer support as a carrier, the pinhole 32c having the largest diameter is located in the optical path of the fluorescent light.
When the sample 22 is a fluorescent sample using a transfer support as a carrier, when the fluorescent dye is excited by the laser beam 4, the fluorescent dye is distributed in the depth direction of the gel support, and Since the point fluctuates in the depth direction, the confocal optical system cannot form an image on a pinhole with a small diameter.Using a pinhole with a small diameter cuts the fluorescence emitted from the sample, This is because a sufficient signal intensity cannot be obtained when photoelectrically detected is used, and it is necessary to use the pinhole 32c having a large diameter.

On the other hand, when the sample 22 is a stimulable phosphor sheet, the pinhole 32b having an intermediate diameter is positioned in the optical path of the stimulable phosphor by the laser beam 4. When the stimulable phosphor contained in the layer is excited, the emission points of the stimulable phosphor are distributed in the depth direction of the stimulable phosphor layer, and the emission points fluctuate in the depth direction. Due to the optical system, it is not possible to form an image on a pinhole with a small diameter, and if a pinhole with a small diameter is used, the photostimulable light emitted from the sample is cut, and when the photostimulable light is detected photoelectrically. Although a sufficient signal intensity cannot be obtained, the distribution in the depth direction of the light-emitting points and the fluctuation in the depth direction of the light-emitting points are not as large as those of the microarray using the gel support as a carrier. This is because it is desirable to use the hole 32b.

The fluorescent light or stimulating light that has passed through the confocal switching member 31 is photoelectrically detected by the photomultiplier 33, and analog data is generated.

The analog data generated by the photomultiplier 33 is converted into digital data by the A / D converter 34 and sent to the data processing device 35.

FIG. 3 is a schematic perspective view showing details of the main scanning mechanism among the scanning mechanisms of the sample stage 20.

As shown in FIG. 3, a pair of guide rails 41 is placed on a movable substrate 40 movable in the sub-scanning direction indicated by arrow Y in FIG. 3 by a sub-scanning motor (not shown). , 41 are fixed, and the sample stage 20 includes three slide members 42, 42 slidably mounted on a pair of guide rails 41, 41.
(Only two are shown in FIG. 3).

As shown in FIG. 3, a main scanning motor 43 is fixed on the movable substrate 40, and a timing belt wound around a pulley 44 is mounted on an output shaft 43 a of the main scanning motor 43. 45 is wound, and a rotary encoder 46 is attached.

Therefore, by driving the main scanning motor 43, the sample stage 20 is reciprocated along the pair of guide rails 41, 41 in the main scanning direction indicated by the arrow X in FIG. By moving the movable substrate 40 in the sub-scanning direction by a sub-scanning motor (not shown), the sample stage 20 is two-dimensionally moved, and the entire surface of the sample 22 set on the sample stage 20 is subjected to laser irradiation. The light 4 makes it possible to scan.

In the present embodiment, the sample stage 20 is configured to be moved in the main scanning direction at a pixel pitch substantially equal to the beam diameter of the laser light 4.

Here, the position of the sample stage 20 is
The configuration is such that monitoring can be performed by the rotary encoder 46.

FIG. 4 is a block diagram showing the detection system, drive system, input system and control system of the scanner.

As shown in FIG. 4, the control system of the scanner includes a control unit 50, an EPROM 51,
The data processing device 35 is provided.

As shown in FIG. 4, the detection system of the scanner includes a rotary encoder 46 and a sample stage 2.
A carrier sensor 53 for detecting the type of carrier holding the sample 22 set to 0 is provided.

As shown in FIG. 4, the driving system of the scanner includes a filter unit motor 54 for moving the filter unit 27, a switching member motor 55 for moving the confocal switching member 31, and the sample stage 20 in the main scanning direction. And a sub-scanning motor 47 for moving the sample stage 20 in the sub-scanning direction.

As shown in FIG. 4, the input system of the scanner has a keyboard 57.

FIG. 5 is a schematic front view of a device for evaluating characteristics of a scanner according to a preferred embodiment of the present invention, and FIG. 6 is a schematic sectional view of a part of the device for evaluating characteristics of a scanner.

As shown in FIGS. 5 and 6, the device 60 for evaluating characteristics of the scanner according to the present embodiment includes a color glass filter 61 as a base, and the surface of the color glass filter 61 is coated with chromium. A film 62 is formed,
A color glass filter 61 is provided in the opening of the chromium deposition film 62.
Are formed.

In this embodiment, the color glass filter 61 has a substantially rectangular shape, and is formed by doping a solid solution of CdS-CdSe into glass mainly composed of silica sand, soda ash, limestone, and the like.

As shown in FIG. 5, the scanner characteristic evaluation device 60 includes a pattern 70 for evaluating the absolute position and the distance, a pattern 71 for evaluating the resolution in the main scanning direction, and a pattern 71 for evaluating the resolution in the main scanning direction. A pattern 72 for evaluating the resolution, a pattern 73 for adjusting the focus of the confocal optical system, and a pattern 74 for evaluating the jitter are formed.

Although the details are not shown in FIG. 5, a pattern 74 for evaluating the jitter is formed by forming a slit having a width of 100 μm on the chromium deposition film 62.
It is formed by forming at intervals of 00 microns.

When the characteristics of the scanner are evaluated by using the device 60 for evaluating characteristics of the scanner configured as described above, the characteristics evaluation of the scanner is performed so that the chromium deposition film 62 is positioned on the optical head 15 side. Device 60
Is placed on the sample stage 20.

Next, a characteristic evaluation signal is input to the keyboard 57 by the operator.

The characteristic evaluation signal is transmitted to the control unit 50.
When the control unit 50 receives the characteristic evaluation signal, it outputs a drive signal to the filter unit motor 54 to move the filter unit 27 and
The filter 28a having a property of cutting light having a wavelength of nm and transmitting light having a wavelength longer than 640 nm is positioned in the optical path, and a drive signal is output to the switching member motor 55 to switch the confocal switching member 31. Is moved so that the pinhole 32a having the smallest diameter is located in the optical path.

Next, the control unit 50 outputs a drive signal to the first laser excitation light source 1 to turn it on.

The laser light 4 emitted from the first laser excitation light source 1 is converted into parallel light by a collimator lens 5, then reflected by a mirror 6, and is reflected by a first dichroic mirror 7 and a second dichroic mirror. 8 and enter the optical head 15.

The laser beam 4 incident on the optical head 15 is
The light is reflected by the mirror 16, passes through a hole 17 formed in a perforated mirror 18, is condensed by a lens 19, and is incident on a device 60 for evaluating characteristics of a scanner set on a sample stage 20.

The sample stage 20 is moved by the main scanning motor 43 in the main scanning direction indicated by the arrow X in FIG. Motor 47
In FIG. 3, since the laser beam 4 is moved in the sub-scanning direction indicated by the arrow Y, the entire surface of the device for evaluating characteristics 60 of the scanner mounted on the sample stage 20 is scanned by the laser light 4 having a wavelength of 640 nm.

When the laser beam 4 is irradiated, the color glass filter 61 forming the test pattern 63 of the device 60 for evaluating characteristics of the scanner is excited to emit fluorescent light.

The fluorescent light 25 emitted from the color glass filter 61 is converted into parallel light by the lens 19, reflected by the perforated mirror 18, and enters the filter unit 27.

The filter unit 27 includes a filter 28a
Has been moved so as to be located in the optical path,
5 is a filter 2 having a property of cutting light having a wavelength of 640 nm and transmitting light having a wavelength longer than 640 nm.
8a.

Since the wavelength of the fluorescent light is longer than the wavelength of the laser light 4 as the excitation light, the laser light 4 is cut off, and only the fluorescent light 25 emitted from the color glass filter 61 passes through the filter 28a. .

The fluorescent light 25 transmitted through the filter 28a is reflected by the mirror 29, condensed by the lens 30 on the pinhole 32a having the smallest diameter, detected photoelectrically by the photomultiplier 33, and 63 analog data are generated.

The analog data of the test pattern 63 generated by the photomultiplier 33 is converted into digital data by the A / D converter 34 and sent to the data processing device 35.

The data processing device 35 integrates the input digital data according to the test pattern 63 to generate digital data of the test pattern 63.
An image of the test pattern 63 is displayed on the screen of the CRT 80 based on the digital data of the test pattern 63.

Thus, based on the image of the test pattern 63 displayed on the screen of the CRT 80, the operator
The characteristics of the scanner when exciting the sample can be evaluated using the laser light 4 having a wavelength of 640 nm. If necessary, the operator can use the keyboard 57 to correct the scanner characteristics for correcting the scanner characteristics. When the data is input, the control unit 50 causes 640
Scanner characteristic correction data when the laser beam 4 having a wavelength of nm is used is stored in the EPROM 51.

The light emitted from the first laser excitation light source 1
When the entire surface of the device 60 for evaluating characteristics of the scanner is scanned by the laser beam 4 having a wavelength of 40 nm to generate digital data of the test pattern 63, the control unit 50 turns off the first laser excitation light source 1, A drive signal is output to the filter unit motor 71 to move the filter unit 27, cut light having a wavelength of 532 nm, and position a filter 28b having a property of transmitting light having a wavelength longer than 532 nm in the optical path. Then, the second laser excitation light source 2 is activated.

The light emitted from the second laser excitation light source 2
The laser beam 4 having a wavelength of 32 nm is converted into parallel light by the collimator lens 9 and then enters the first dichroic mirror 7 and is reflected.

The laser beam 4 reflected by the first dichroic mirror 7 is applied to the second dichroic mirror 8
And enters the optical head 15.

The laser beam 4 incident on the optical head 15 is
The light is reflected by the mirror 16, passes through the hole 17 formed in the perforated mirror 18, is condensed by the lens 19, is mounted on the sample stage 20, and is incident on the set device 60 for evaluating the characteristics of the scanner. I do.

The sample stage 20 is moved by the main scanning motor 43 in the main scanning direction indicated by the arrow X in FIG. Motor 47
In FIG. 3, since the laser beam 4 is moved in the sub-scanning direction indicated by the arrow Y, the entire surface of the device for evaluating characteristics 60 of the scanner mounted on the sample stage 20 is scanned by the laser beam 4 having a wavelength of 532 nm.

When the laser beam 4 is irradiated, the color glass filter 61 forming the test pattern 63 of the device 60 for evaluating characteristics of the scanner is excited to emit fluorescent light.

The fluorescent light 25 emitted from the color glass filter 61 is converted into parallel light by the lens 19, reflected by the perforated mirror 18, and enters the filter unit 27.

The filter unit 27 includes a filter 28b
Has been moved so as to be located in the optical path,
Reference numeral 5 denotes a filter 2 having a property of cutting light having a wavelength of 532 nm and transmitting light having a wavelength longer than 532 nm.
8b.

Here, since the wavelength of the fluorescent light is longer than the wavelength of the laser light 4 as the excitation light, the laser light 4 is cut and only the fluorescent light 25 emitted from the color glass filter 61 passes through the filter 28b. .

The fluorescent light 25 transmitted through the filter 28b is reflected by the mirror 29, is condensed by the lens 30 on the pinhole 32a having the smallest diameter, is photoelectrically detected by the photomultiplier 33, and is detected by the test pattern. 63 analog data are generated.

The analog data of the test pattern 63 generated by the photomultiplier 33 is converted into digital data by the A / D converter 34 and sent to the data processing device 35 to use the first laser excitation light source 1. The image of the test pattern 63 is displayed on the screen of the CRT 80 in the same manner as in the case where the image is displayed.

Thus, based on the image of the test pattern 63 displayed on the screen of the CRT 80, the operator
Using the laser beam 4 having a wavelength of 532 nm, the characteristics of the scanner when exciting the sample can be evaluated. If necessary, the operator can use the keyboard 57 to correct the scanner characteristics for correcting the scanner characteristics. When the data is input, the control unit 50 causes 532
Scanner characteristic correction data when the laser beam 4 having a wavelength of nm is used is stored in the EPROM 51.

The light emitted from the second laser excitation light source 2
When the entire surface of the device 60 for evaluating characteristics of the scanner is scanned by the laser light 4 having a wavelength of 32 nm and digital data of the test pattern 63 is generated, the control unit 50 turns off the second laser excitation light source 2 and A drive signal is output to the filter unit motor 71 to move the filter unit 27, cut light having a wavelength of 473 nm, and position a filter 28c having a property of transmitting light having a wavelength longer than 473 nm in the optical path. Then, the third laser excitation light source 3 is activated.

The light emitted from the third laser excitation light source 3
The laser beam 4 having a wavelength of 73 nm is transmitted through the collimator lens 10.
After being converted into parallel light, the light is reflected by the second dichroic mirror 8 and enters the optical head 15.

The laser beam 4 incident on the optical head 15 is
The light is reflected by the mirror 16, passes through the hole 17 formed in the perforated mirror 18, is condensed by the lens 19, is mounted on the sample stage 20, and is incident on the set device 60 for evaluating the characteristics of the scanner. I do.

The sample stage 20 is moved by the main scanning motor 43 in the main scanning direction indicated by an arrow X in FIG. Motor 47
In FIG. 3, since the laser beam 4 is moved in the sub-scanning direction indicated by the arrow Y, the entire surface of the device 60 for evaluating the characteristics of the scanner mounted on the sample stage 20 is scanned by the laser beam 4 having a wavelength of 473 nm.

When the laser beam 4 is irradiated, the color glass filter 61 forming the test pattern 63 of the device 60 for evaluating the characteristics of the scanner is excited, and the fluorescent light is emitted.

The fluorescent light 25 emitted from the color glass filter 61 is converted into parallel light by the lens 19, reflected by the perforated mirror 18, and enters the filter unit 27.

The filter unit 27 includes a filter 28c
Has been moved so as to be located in the optical path,
Reference numeral 5 denotes a filter 2 which cuts light having a wavelength of 473 nm and transmits light having a wavelength longer than 473 nm.
8c.

Since the wavelength of the fluorescent light is longer than the wavelength of the laser light 4 as the excitation light, the laser light 4 is cut, and only the fluorescent light 25 emitted from the color glass filter 61 passes through the filter 28c. .

The fluorescent light 25 transmitted through the filter 28c is reflected by the mirror 29, condensed on the pinhole 32a having the smallest diameter by the lens 30, and is photoelectrically detected by the photomultiplier 33, and the test pattern is obtained. 63 analog data are generated.

The analog data of the test pattern 63 generated by the photomultiplier 33 is converted into digital data by the A / D converter 34 and sent to the data processing device 35, where the first laser excitation light source 1 is used. The image of the test pattern 63 is displayed on the screen of the CRT 80 in the same manner as in the case where the image is displayed.

Thus, based on the image of the test pattern 63 displayed on the screen of the CRT 80, the operator
Using the laser beam 4 having a wavelength of 473 nm, the characteristics of the scanner when exciting the sample can be evaluated. If necessary, the operator can use the keyboard 57 to correct the scanner characteristics for correcting the scanner characteristics. When the data is input, the control unit 50 causes 473
Scanner characteristic correction data when the laser beam 4 having a wavelength of nm is used is stored in the EPROM 51.

As described above, the characteristics of the scanner were evaluated, and the scanner characteristic correction data when using the laser light 4 having a wavelength of 640 nm, the laser light 4 having a wavelength of 532 nm, and the laser light 4 having a wavelength of 473 nm were respectively obtained. , E
It is stored in the PROM 51.

The scanner configured as described above uses a slide glass plate as a carrier, and a number of spots of a sample selectively labeled with a fluorescent dye are formed on the slide glass plate as follows. The microarray is scanned by the laser light 4 to excite the fluorescent dye, photoelectrically detect the fluorescence emitted from the fluorescent dye,
Generate data for biochemical analysis.

First, when the sample carrier 21 holding the microarray as the sample 22 is set on the sample stage 20, the carrier sensor 53
The type of the sample carrier 21 is detected, and a carrier detection signal is output to the control unit 50.

Upon receiving the carrier detection signal from the carrier sensor 53, the control unit 50 outputs a drive signal to the switching member motor 55 based on the carrier detection signal, and causes the confocal switching member 31 to output the pinhole having the smallest diameter. 32a is moved so as to be located in the optical path.

Next, the user inputs the type of fluorescent substance as a labeling substance and the start signal to the keyboard 5.
7, an instruction signal is output from the keyboard 57 to the control unit 50.

For example, the type of fluorescent substance is Cy-
When 5 (registered trademark) is input, the control unit 50 outputs a drive signal to the filter unit motor 54 in accordance with the input instruction signal, moves the filter unit 27, and cuts light having a wavelength of 640 nm. In addition, a filter 28a having a property of transmitting light having a wavelength longer than 640 nm is located in the optical path,
The scanner characteristic correction data when the 640 nm laser beam 4 stored in the PROM 51 is used is output to the data processing device 35.

Next, the control unit 50 outputs a drive signal to the first laser excitation light source 1 to turn it on.

The laser light 4 emitted from the first laser excitation light source 1 is converted into parallel light by a collimator lens 5, then reflected by a mirror 6, and is reflected by a first dichroic mirror 7 and a second dichroic mirror. 8 and enter the optical head 15.

The laser beam 4 incident on the optical head 15 is
The sample 22 reflected by the mirror 16, passes through the hole 17 formed in the perforated mirror 18, is condensed by the lens 19, and is set on the sample stage 20.
Is incident on the microarray.

The sample stage 20 is moved by the main scanning motor 43 in the main scanning direction indicated by the arrow X in FIG. 3 at a pixel pitch substantially equal to the beam diameter of the laser light 4, and the sub-scanning motor 47, in the sub-scanning direction indicated by the arrow Y in FIG.
The entire surface of the microarray 22 that is the sample 22 set on the sample carrier 21 is scanned by the laser light 4.

When the laser beam 4 is irradiated, the probe D
A fluorescent dye that labels NA, for example, Cy-5 is excited, and fluorescence 25 is emitted. When a slide glass plate is used as a carrier for the microarray,
Since the fluorescent dye is distributed only on the surface of the slide glass plate, the fluorescence 25 is also emitted only from the surface of the slide glass plate.

The fluorescent light 25 emitted from the surface of the slide glass plate is converted into parallel light by the lens 19, reflected by the perforated mirror 18, and filtered by the filter unit 27.
Incident on.

The filter unit 27 includes a filter 28a
Has been moved so as to be located in the optical path,
5 enters the filter 28a, cuts light having a wavelength of 640 nm, and transmits only light having a wavelength longer than 640 nm.

The fluorescence 25 transmitted through the filter 28a is reflected by the mirror 29 and is imaged by the lens 30.

Prior to the irradiation of the laser beam 4, the confocal switching member 31 is moved so that the pinhole 32a having the smallest diameter is located in the optical path, so that the fluorescent light 25 forms an image on the pinhole 32a. Then, the data is photoelectrically detected by the photomultiplier 33 and analog data is generated.

As described above, using the confocal optical system, the fluorescence 25 emitted from the fluorescent dye on the surface of the slide glass plate was used.
Is guided to the photomultiplier 33 and photoelectrically detected, so that noise in data can be minimized.

The analog data generated by the photomultiplier 33 is converted into digital data by the A / D converter 34 and sent to the data processor 35.

When the digital data of the sample 22 is input, the data processor 35 corrects the digital data of the sample 22 according to the correction data when the 640 nm laser beam 4 input from the control unit 50 is used. The image of the sample 22 is displayed on the screen of the CRT 80 based on the corrected digital data of the sample 22.

On the other hand, a fluorescent sample using a transfer support containing denatured DNA selectively labeled with a fluorescent dye as a carrier was scanned by a laser beam 4 to excite the fluorescent dye and release the fluorescent dye. Fluorescence is detected photoelectrically,
When generating data for biochemical analysis, a sample carrier 21 holding a fluorescent sample 22 using a transfer support containing denatured DNA selectively labeled with a fluorescent dye as a carrier is placed on the sample stage 20. Set.

Thus, when the sample carrier 21 holding the fluorescent sample 22 is set on the sample stage 20, the type of the sample carrier 21 is detected by the carrier sensor 53, and a carrier detection signal is output to the control unit 50. You.

Upon receiving the carrier detection signal from the carrier sensor 53, the control unit 50 outputs a drive signal to the switching member motor 55 based on the carrier detection signal, and causes the confocal switching member 31 to rotate the pinhole having the largest diameter. 32c is moved so as to be located in the optical path.

Next, when the type of the fluorescent substance as the labeling substance and the start signal are input to the keyboard 57 by the operator, an instruction signal is output from the keyboard 57 to the control unit 50.

For example, when the sample is labeled with rhodamine, the control unit 50 selects the second laser excitation light source 2 because rhodamine can be most efficiently excited by a laser having a wavelength of 532 nm. At the same time, the filter 32b is selected, a drive signal is output to the filter unit motor 54, the filter unit 27 is moved, light having a wavelength of 532 nm is cut, and light having a wavelength longer than 532 nm is transmitted. The filter 28b is positioned in the optical path of the fluorescent light 25 and the 532 nm
The scanner characteristic correction data when the laser light 4 is used is output to the data processing device 35.

Next, the control unit 50 outputs a drive signal to the second laser excitation light source 2 to turn it on.

The light emitted from the second laser excitation light source 2
The laser beam 4 having a wavelength of 32 nm is converted into parallel light by the collimator lens 9 and then enters the first dichroic mirror 7 and is reflected.

The laser light 4 reflected by the first dichroic mirror 7 is applied to the second dichroic mirror 8
And enters the optical head 15.

The laser beam 4 incident on the optical head 15 is
The light is reflected by the mirror 16, passes through the hole 17 formed in the perforated mirror 18, is condensed by the lens 19, and enters the fluorescent sample 22 set on the sample stage 20.

The sample stage 20 is moved by the main scanning motor 43 in the main scanning direction indicated by the arrow X in FIG. 3 at a pixel pitch substantially equal to the beam diameter of the laser beam 4, and the sub-scanning motor 47, in the sub-scanning direction indicated by the arrow Y in FIG.
The entire surface of the fluorescent sample 22 set on the sample carrier 21 is scanned by the laser light 4.

Upon irradiation with the laser beam 4, a fluorescent dye, for example, rhodamine, which labels the sample, is excited,
Fluorescence 25 is emitted. When a transfer support is used as the carrier of the fluorescent sample 22, the fluorescent dye is distributed in the depth direction of the transfer support, so from a predetermined range in the depth direction of the transfer support, The fluorescent light 25 is emitted, and the position of the light emitting point in the depth direction also changes.

Fluorescent Sample 22 Using Transfer Support as Carrier
The fluorescent light 25 emitted from is converted into parallel light by the lens 19, reflected by the perforated mirror 18, and enters the filter unit 27.

The filter unit 27 includes a filter 28b
Has been moved so as to be located in the optical path,
5 is incident on the filter 28b and cuts off light having a wavelength of 532 nm, and transmits only light having a wavelength longer than 532 nm.

The fluorescence transmitted through the filter 28b is reflected by the mirror 29 and collected by the lens 30, but the fluorescence 25 is emitted from a predetermined range in the depth direction of the transfer support. No image.

Prior to the irradiation of the laser beam 4, the confocal switching member 31 is moved so that the pinhole 32c having the largest diameter is located in the optical path. , And is photoelectrically detected by the photomultiplier 33 to generate analog data. Therefore, although a confocal optical system is used to detect the fluorescent light 25 emitted from the fluorescent dye on the surface of the microarray using the slide glass plate as a carrier at a high S / N ratio, the transfer support is performed. Fluorescence 25 emitted from a predetermined range in the depth direction of the body can also be detected with a high signal intensity.

The analog data generated by the photo multiplier 33 is converted into digital data by the A / D converter 34 and sent to the data processing device 35.

When the digital data of the sample 22 is input, the data processing device 35 corrects the digital data of the sample 22 according to the correction data when the 532 nm laser beam 4 input from the control unit 50 is used. The image of the sample 22 is displayed on the screen of the CRT 80 based on the corrected digital data of the sample 22.

On the other hand, a stimulable phosphor layer containing a stimulable phosphor is formed on a carrier such as a membrane filter on which a number of spots of a sample selectively labeled with a radioactive labeling substance are formed. The stimulable phosphor layer of the stimulable phosphor sheet on which the positional information of the radioactive labeling substance obtained by exposing the stimulable phosphor layer is brought into close contact with the stimulable phosphor sheet, Scans to excite the stimulable phosphor, photoelectrically detects the stimulable light emitted from the stimulable phosphor, and generates data for biochemical analysis. The sample carrier 21 holding the stimulable phosphor sheet on which the phosphor layer is formed is placed on the sample stage 2.
Set to 0.

When the sample carrier 21 holding the stimulable phosphor sheet on which the stimulable phosphor layer is formed is set on the sample stage 20, the type of the sample carrier 21 is detected by the carrier sensor 53, and the carrier is detected. The detection signal is output to the control unit 50.

Upon receiving the carrier detection signal from the carrier sensor 70, the control unit 50 outputs a drive signal to the switching member motor 72 based on the carrier detection signal, and causes the confocal switching member 31 to move the pin having an intermediate diameter. The hole 32b is moved so as to be located in the optical path.

Further, the control unit 50 outputs a drive signal to the filter unit motor 71 in accordance with the input instruction signal, moves the filter unit 27, and controls the stimulable phosphor emitted from the stimulable phosphor. A filter 28d having a property of transmitting only light in the wavelength range and cutting light having a wavelength of 640 nm is located in the optical path, and reading out scanner characteristic correction data in the case of using the 640 nm laser light 4 stored in the EPROM 52. And outputs it to the data processing device 35.

Next, the control unit 50 outputs a drive signal to the first laser excitation light source 1 to turn it on.

The laser light 4 emitted from the first laser excitation light source 1 is converted into parallel light by a collimator lens 5, then reflected by a mirror 6, and is reflected by a first dichroic mirror 7 and a second dichroic mirror. 8 and enter the optical head 15.

The laser beam 4 incident on the optical head 15 is
The sample 22 reflected by the mirror 16, passes through the hole 17 formed in the perforated mirror 18, is condensed by the lens 19, and is set on the sample stage 20.
Into the stimulable phosphor sheet.

The sample stage 20 is moved by the main scanning motor 43 in the main scanning direction indicated by the arrow X in FIG. 3 at a pixel pitch substantially equal to the beam diameter of the laser light 4, and 47, in the sub-scanning direction indicated by the arrow Y in FIG.
The entire surface of the stimulable phosphor layer of the stimulable phosphor sheet that is the sample 22 set on the sample carrier 21 is scanned by the laser light 4.

Upon irradiation with the laser beam 4, the stimulable phosphor contained in the stimulable phosphor layer is excited, and the stimulable phosphor 2 is irradiated.
5 is released. In the case of the stimulable phosphor sheet, the stimulable phosphor is contained in the stimulable phosphor layer and is distributed to some extent in the depth direction of the stimulable phosphor layer. The photostimulable light is emitted from a predetermined range in the depth direction of the luminescent phosphor layer, and the position of the light emitting point in the depth direction also changes. However, since the stimulable phosphor layer is thin, the light emitting points are not distributed in the depth direction as in the case of the transfer support.

Stimulation 25 released from the stimulable phosphor layer
Is converted into parallel light by the lens 19, reflected by the perforated mirror 18, and enters the filter unit 27.

The filter unit 27 includes a filter 28d
Is moved so as to be located in the optical path, the stimulating light 25 enters the filter 28d, the light having the wavelength of 640 nm is cut, and the stimulating light 25 in the wavelength region of the stimulating light emitted from the stimulable phosphor is emitted. Only light is transmitted.

The stimulating light 25 transmitted through the filter 28d is
The light is reflected by the mirror 29 and collected by the lens 30, but the stimulable light is emitted from a predetermined range in the depth direction of the stimulable phosphor layer formed on the stimulable phosphor sheet. No imaging.

Prior to the irradiation of the laser beam 4, the confocal switching member 31 is moved so that the pinhole 32b having an intermediate diameter is located in the optical path, so that the photostimulable light has an intermediate diameter. After passing through the pinhole 32b, it is photoelectrically detected by the photomultiplier 33 and analog data is generated. Therefore, although the confocal optical system is used to detect the fluorescence 25 emitted from the fluorescent dye on the surface of the microarray using the slide glass plate as the carrier at a high S / N ratio, the accumulation property is high. The photostimulable light 25 emitted from a predetermined range in the depth direction of the photostimulable phosphor layer formed on the phosphor sheet can be detected with a high signal intensity.

The analog data generated by the photo multiplier 33 is converted to digital data by the A / D converter 34 and sent to the data processing device 35.

When the digital data of the sample 22 is input, the data processing device 35 corrects the digital data of the sample 22 in accordance with the correction data when the 640 nm laser beam 4 input from the control unit 50 is used. The image of the sample 22 is displayed on the screen of the CRT 80 based on the corrected digital data of the sample 22.

In the present embodiment, the device 60 for evaluating the characteristics of the scanner includes the color glass filter 6 as a base.
1, a chromium deposition film 62 is formed on the surface of the color glass filter 61 so that the test pattern 63 of the color glass filter 61 is formed in the opening. Evaluation device 60
Is scanned by the laser light 4, the color glass filter 61 in the opening forming the test pattern is excited by the laser light 4, and the emitted fluorescence 25 is photoelectrically detected by the photomultiplier 33. Since the configuration is such that the image of the test pattern 63 is displayed on the screen of the CRT 80, the characteristics of the conventional scanner are evaluated by photoelectrically detecting the reflected light from the test pattern and evaluating the characteristics of the scanner. As in the case of the method, the difference in contrast between the test pattern and the background is small, and there is no risk that it will be difficult to accurately recognize the imaged pattern, and chrome is deposited on the slide glass plate. Then, as in the case of a scanner evaluation device with a test pattern, light is strongly Due to disturbed by it, it can also be reliably prevented that the line width of the test pattern image becomes thick, therefore, it is possible to evaluate the desired manner, the characteristics of the scanner.

Further, according to the present embodiment, as the substrate,
A color glass filter 61 is provided, and a test pattern 63 of the color glass filter 61 is provided on the surface of the color glass filter 61.
Is scanned by the laser beam 4 with the device 60 for evaluating the characteristics of the scanner on which the chromium vapor-deposited film 62 is formed so that the color glass filter 61 in the opening forming the test pattern is formed. Is excited by the laser light 4 to emit the fluorescent light 2 emitted from the color glass filter 61.
5 is photoelectrically detected by the photomultiplier 33, and the operator evaluates the characteristics of the scanner according to the image of the test pattern displayed on the screen of the CRT 80 based on the digital data of the generated test pattern. Then, the scanner characteristic correction data is input and stored in the EPROM 51, and the digital data of the sample 22 is configured to be corrected based on the scanner characteristic correction data stored in the EPROM 51. It becomes possible to correct the characteristics of the scanner.

Further, according to this embodiment, the pattern 60 for evaluating the absolute position and the distance, the pattern 71 for evaluating the resolution in the main scanning direction, the sub-scanning direction A pattern 72 for evaluating the resolution of the scanner, a pattern 73 for adjusting the focus of the confocal optical system, and a pattern 74 for evaluating the jitter are formed. By scanning with the laser beam 4, various characteristics of the scanner can be evaluated, and it is not necessary to use a different evaluation device for each characteristic of the scanner.

Further, according to the present embodiment, the scanner characteristic evaluation device 60 is formed by the colored glass filter 61 which does not deteriorate even when irradiated with the laser beam 4, so that the scanner characteristic Evaluation device 6
0 can be used repeatedly to evaluate the characteristics of the scanner.

FIG. 7 is a schematic sectional view of a part of a device for evaluating characteristics of a scanner according to another preferred embodiment of the present invention.

As shown in FIG. 7, a device 90 for evaluating characteristics of a scanner according to the present embodiment has an InGaAsP layer 91 as a base instead of the color glass filter 61.
And a GaAs layer 92 are laminated, and a chromium sputtering film 94 is formed on the surface of the InGaAsP layer 91 in place of the chromium deposition film 62, thereby forming an InGaAsP layer. 91 test patterns 95 are formed.

Also in this embodiment, similarly to the device 60 for evaluating the characteristics of the scanner shown in FIG. 5, the device 90 for evaluating the characteristics of the scanner has a pattern 70 for evaluating the absolute position and the distance, and a main scanning direction. 71, a pattern 72 for evaluating the resolution in the sub-scanning direction, a pattern 73 for adjusting the focus of the confocal optical system, and a pattern 74 for evaluating the jitter. .

In this embodiment, the device 90 for evaluating the characteristics of the scanner is composed of the InGaAsP layer 9 as a base.
1 and a laminated body 93 in which a GaAs layer 92 is laminated. A chromium sputtered film 94 is formed on the surface of the InGaAsP layer 91 so as to be formed in the opening, and is irradiated with the laser beam 4. Then, a test pattern 95 of the InGaAsP layer 91 which is excited and emits fluorescence is formed, and the device 90 for evaluating characteristics of the scanner having such a configuration is scanned by the laser light 4 to form the test pattern 95. InGaAs in the opening
The sP layer 91 is excited by the laser beam 4, and the emitted fluorescence 25 is photoelectrically detected by the photomultiplier 33, and the image of the test pattern 95 is displayed on the CRT 80.
Since it is configured to be displayed on the screen of the test pattern, the reflected light from the test pattern is photoelectrically detected to evaluate the characteristics of the scanner. The difference in contrast between the image and the background is small, and there is no danger that it will be difficult to accurately recognize the imaged pattern.In addition, a scanner that forms a test pattern by depositing chromium on a slide glass plate As in the case of the evaluation device, at the edge portion of the chromium vapor-deposited film, it is possible to reliably prevent the line width of the image of the test pattern from being thickened due to strong scattering of light, Therefore, it becomes possible to evaluate the characteristics of the scanner as desired.

Further, according to the present embodiment, InGaAs
Since the laminated body 93 of the P layer 91 and the GaAs layer 92 does not deteriorate even when irradiated with the laser light 4, the scanner characteristic evaluation device 90 is repeatedly used to evaluate the scanner characteristics. It becomes possible to do.

The present invention is not limited to the above embodiments, and various modifications can be made within the scope of the invention described in the claims, and these are also included in the scope of the present invention. It goes without saying that it is a thing.

For example, in the above embodiment, the pattern 60 for evaluating the absolute position and the distance and the pattern for evaluating the resolution in the main scanning direction are provided in the device 60 for evaluating the characteristics of the scanner and the device 90 for evaluating the characteristics of the scanner. 5, a pattern 72 for evaluating the resolution in the sub-scanning direction, a pattern 73 for adjusting the focus of the confocal optical system, and a pattern 74 for evaluating the jitter are shown in FIG. The test pattern thus obtained is merely an example, and a test pattern different from that shown in FIG. 5 may be formed on the scanner characteristic evaluation device 60 and the scanner characteristic evaluation device 90.

In the embodiment shown in FIG. 5 and FIG. 6, the device 60 for evaluating the characteristics of the scanner has a structure in which CdS-CdSe is applied to glass having silica sand, soda ash, limestone or the like as a main component. A color glass filter 61 formed by doping a solid solution is provided. As a substrate, a color glass formed by doping a solid solution of CdS-CdSe into a glass mainly composed of silica sand, soda ash, limestone, or the like. In place of the filter 61, a glass mainly composed of silica sand, soda ash, limestone, or the like is added to ZnS-
A color glass filter formed by doping a solid solution of CdS may be used. Further, instead of the color glass filter, an InGaAsP layer 71 may be used as a base in the same manner as in the embodiment shown in FIG. , A stacked body 73 with a GaAs layer 72 can also be used.

Further, in the embodiment shown in FIG. 7, the device 90 for evaluating the characteristics of the scanner includes, as a base, a laminated body 93 in which an InGaAsP layer 91 and a GaAs layer 92 are laminated. As substrate, InG
Instead of the laminated body 93 in which the aAsP layer 91 and the GaAs layer 92 are laminated, similarly to the embodiment shown in FIGS. 5 and 6, CdS is added to glass mainly composed of silica sand, soda ash, and limestone. A colored glass filter 61 formed by doping a solid solution of -CdSe can be used. Further, a glass formed mainly of silica sand, soda ash, and limestone is doped with a solid solution of ZnS-CdS. A colored glass filter may be used.

In the embodiment shown in FIGS. 5 and 6, the scanner characteristic evaluation device 60 includes a color glass filter 61 as a base. In the embodiment shown in FIG. A device 90 for evaluating characteristics of an InGaAsP layer 91 and a GaAs
The s layer 92 and the stacked body 93 are stacked. The device 60 for evaluating the characteristics of the scanner and the device 90 for evaluating the characteristics of the scanner include, for example, a group IV element and II-VI.
Any material that emits fluorescence or photoluminescence when irradiated with the laser beam 4, such as a material selected from the group consisting of a group III compound, a group III-V compound and a complex thereof, may be used. , Color glass filter 61, InGaAsP layer 91 and GaAs layer 9
It is not always necessary to provide a base made of the laminated body 83 with the base material 2.

Further, in the embodiment shown in FIGS. 5 and 6, the device 60 for evaluating the characteristics of the scanner
The test pattern 63 of the color glass filter 61 is formed by the chromium vapor deposition film 62, and in the embodiment shown in FIG.
InGaAs by the chromium sputtering film 94
The test pattern 95 of the P layer 91 is formed, but the material of the metal film is not limited to chromium, and is selected from the group consisting of aluminum, gold, nickel-chromium alloy, and titanium-nickel-chromium. The color glass filter 6 is formed by the metal film formed of the material.
1 test pattern 63 or InGaAsP layer 91
Can be formed, and the method of forming the metal film is not limited to vapor deposition and sputtering, and the metal film may be formed by CVD.

In the above embodiment, the color glass filter 61 and the laminate 93 of the InGaAsP layer 91 and the GaAs layer 92 are each formed in a substantially rectangular shape.
The shape of the stacked body 93 of the P layer 91 and the GaAs layer 92 can be arbitrarily determined.

Further, in the above-described embodiment, the sample stage 20 is reciprocated at high speed by the main scanning motor 43 at a pixel pitch substantially equal to the beam diameter of the laser beam 4 in the main scanning direction. Although it is configured, it is not always necessary that the sample stage 20 is configured to be moved in the main scanning direction at a pixel pitch substantially equal to the beam diameter of the laser light 4. The sample stage 20 may be configured to be moved in the main scanning direction at a pixel pitch smaller than the diameter.

Further, in the above embodiment, the scanner includes the first laser excitation light source 1, the second laser excitation light source 2, and the third laser excitation light source 3, but includes three laser excitation light sources. Is not necessary.

In the above embodiment, the first laser excitation light source 1 is a laser beam 4 having a wavelength of 640 nm.
Using a semiconductor laser light source emitting 640 nm
He that emits laser light 4 having a wavelength of 633 nm instead of the semiconductor laser light source that emits laser light 4 of
A -Ne laser light source or a semiconductor laser light source that emits 635 nm laser light 4 may be used.

Further, in the above embodiment, a laser light source emitting 532 nm laser light is used as the second laser excitation light source 2, and a third laser excitation light source 3 is used as the second laser excitation light source 3.
Although a laser light source that emits 473 nm laser light is used, a laser light source that emits 530 to 540 nm laser light is used as the second laser excitation light source 2 depending on the type of the fluorescent substance to be excited. As the light source 3,
Laser light sources that emit laser light of 470 to 490 nm can also be used.

In the above embodiment, the confocal switching member 31 has three pinholes 32 having different diameters.
a, 32b, 32c are formed and a number of spots of the sample selectively labeled with a fluorescent dye are scanned by a laser beam 4 on a microarray formed on a slide glass plate to excite the fluorescent dye. When the fluorescence emitted from the fluorescent dye is photoelectrically detected to generate data for biochemical analysis, the pinhole 32a is provided with the position information of the radiolabeled substance obtained by exposing the stimulable phosphor layer. The stimulable phosphor layer of the stimulable phosphor sheet on which is recorded is scanned by the laser light 4 to excite the stimulable phosphor, and the stimulable phosphor emitted from the stimulable phosphor is photoelectrically irradiated. To generate data for biochemical analysis,
2b scans a fluorescent sample using a transfer support as a carrier with a laser beam 4, excites a fluorescent dye, photoelectrically detects fluorescence emitted from the fluorescent dye, and converts data for biochemical analysis. At the time of generation, the pinholes 32c are used respectively, but the confocal switching member 31 is used.
The laser beam 4 scans a microarray formed on a slide glass plate with a large number of spots of a sample which are formed only on the pinholes 32a and 32b and are selectively labeled with a fluorescent dye. Is excited, and the fluorescence emitted from the fluorescent dye is photoelectrically detected,
When generating data for biochemical analysis, the fluorescent light 25 is received through the pinhole 32a, and the photostimulable light 25 emitted from the photostimulable phosphor layer is photoelectrically detected. When the data of (1) is generated, the photostimulable light is received through the pinhole 32b, and the fluorescence 25 emitted from the fluorescent sample using the transfer support as the carrier is photoelectrically detected.
When generating data for biochemical analysis, the confocal switching member 31 can be retracted from the optical path of the fluorescent light 25 so that the amount of light received by the photomultiplier 33 can be increased. For the member 31,
A lot of spots of the sample, which form only the pinhole 32a and are selectively labeled with the fluorescent dye, scan the microarray formed on the slide glass plate with the laser light 4 to excite the fluorescent dye, Only when the fluorescence emitted from the fluorescent dye is photoelectrically detected and data for biochemical analysis is generated, the fluorescence 25 is received via the pinhole 32a and emitted from the stimulable phosphor layer. When the photostimulated photostimulation 25 is detected photoelectrically to generate data for biochemical analysis, and when the fluorescence 25 emitted from a fluorescent sample using a transfer support as a carrier is detected photoelectrically, biochemical analysis is performed. When generating the data for use, the confocal switching member 31 may be retracted from the optical path of the fluorescent light 25 so that the amount of light received by the photomultiplier 33 may be increased.

Further, in the above-mentioned embodiment, the scanner uses a laser array as a carrier, and a microarray in which a number of spots of a sample selectively labeled with a fluorescent dye are formed on the slide glass plate. It is configured to scan with light 4 to excite the fluorescent dye, photoelectrically detect the fluorescence emitted from the fluorescent dye, and generate image data for biochemical analysis. A fluorescent sample using a transfer support containing denatured DNA labeled as a carrier is scanned by a laser beam 4 to excite the fluorescent dye, and the fluorescence emitted from the fluorescent dye is detected photoelectrically, A membrane membrane configured to generate image data for analysis and formed with a number of spots of a sample selectively labeled with a radioactive labeling substance A carrier such as ruta is adhered to a stimulable phosphor sheet containing a stimulable phosphor layer containing a stimulable phosphor, and the position of the radiolabeled substance obtained by exposing the stimulable phosphor layer to light. The stimulable phosphor layer of the stimulable phosphor sheet on which the information is recorded is scanned by the laser beam 4 to excite the stimulable phosphor, and the stimulable phosphor emitted from the stimulable phosphor is photo-emitted. It is configured to be able to generate image data for biochemical analysis by detecting the spot on the slide glass plate, using a slide glass plate as a carrier and many spots of the sample selectively labeled with a fluorescent dye. Is scanned by the laser light 4 to excite the fluorescent dye, photoelectrically detect the fluorescence emitted from the fluorescent dye, and generate image data for biochemical analysis. And a fluorescent dye Scanning a fluorescent sample using a transfer support containing a selectively labeled denatured DNA as a carrier with a laser beam 4 to excite the fluorescent dye, and photoelectrically detect the fluorescence emitted from the fluorescent dye. A carrier such as a membrane filter on which a number of spots of a sample selectively labeled with a radioactive labeling substance are formed, and a photostimulable phosphor is included. The stimulable phosphor sheet in which the positional information of the radioactive labeling substance obtained by exposing the stimulable phosphor layer to the stimulable phosphor layer and being in close contact with the stimulable phosphor sheet is formed. The stimulable phosphor layer is scanned by the laser beam 4 to excite the stimulable phosphor, and the stimulable light emitted from the stimulable phosphor is photoelectrically detected, and image data for biochemical analysis is obtained. Is configured to be able to generate Not necessarily.

[0220]

According to the present invention, a scanner characteristic evaluation device capable of accurately evaluating a scanner characteristic, and a scanner characteristic evaluation device can be easily used.
A scanner characteristic correction data generation method capable of generating optimum scanner characteristic correction data, and a scanner characteristic correction data as desired based on the scanner characteristic correction data generated using the scanner characteristic evaluation device. It is possible to provide a scanner characteristic correction method capable of correcting the characteristic and a scanner capable of correcting the characteristic as desired.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a scanner whose characteristics are evaluated using a device for evaluating characteristics of a scanner according to a preferred embodiment of the present invention.

FIG. 2 is a schematic front view of a confocal switching member.

FIG. 3 shows a scanning mechanism of a sample stage.
FIG. 3 is a schematic perspective view illustrating details of a main scanning mechanism.

FIG. 4 is a block diagram showing a detection system, a drive system, an input system, and a control system of the scanner.

FIG. 5 is a schematic front view of a device for evaluating characteristics of a scanner according to a preferred embodiment of the present invention.

FIG. 6 is a schematic cross-sectional view of a part of a device for evaluating characteristics of a scanner according to a preferred embodiment of the present invention.

FIG. 7 is a schematic sectional view of a part of a device for evaluating characteristics of a scanner according to another preferred embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 1st laser excitation light source 2 2nd laser excitation light source 3 3rd laser excitation light source 4 laser beam 5 collimator lens 6 mirror 7 1st dichroic mirror 8 2nd dichroic mirror 9 collimator lens 10 collimator lens 15 optical head Reference Signs List 16 mirror 17 hole 18 perforated mirror 19 lens 20 sample stage 21 sample carrier 22 sample 23 dripped cDNA 25 fluorescence or stimulating light 27 filter unit 28a, 28b, 28c, 28d filter 29 mirror 30 lens 31 confocal switching member 32a, 32b, 32c, 32d, 32e Pinhole 33 Photomultiplier 34 A / D converter 35 Data processing device 40 Movable board 41, 41 A pair of guide rails 42 Slide member 43 Main scanning module 43a Output shaft of main scanning motor 44 Pulley 45 Timing belt 46 Rotary encoder 47 Sub-scanning motor 50 Control unit 51 EPROM 53 Carrier sensor 54 Filter unit motor 55 Switching member motor 57 Keyboard 60 Scanner characteristic evaluation device 61 Color glass Filter 62 Evaporated film of chromium 63 Test pattern 70 Pattern for evaluating absolute position and distance 71 Pattern for evaluating resolution in main scanning direction 72 Pattern for evaluating resolution in sub-scanning direction 73 of confocal optical system Pattern for adjusting focus 74 Pattern for evaluating jitter 80 CRT 90 Device for evaluating characteristics of scanner 91 InGaAsP layer 92 GaAs layer 93 Laminated body 94 Chrome Deposited film 95 test pattern

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G054 AA06 AB07 CA22 CE02 EA03 FA19 FA32 GA05 GB02 GE07 JA08 2G065 AA18 AB04 AB09 AB11 BA18 BB23 BB26 BC28 BC33 BC35 DA01 DA05 DA08 DA10 4B029 AA07 AA23 BB15 BB20 CC02 CC08 CC08 CC08 5C062 AA05 AB05 AB42 AC55 BD04 (54) [Title of the Invention] Device for evaluating scanner characteristics, method for generating scanner characteristic correction data using device for evaluating scanner characteristics, generation using device for evaluating scanner characteristics Scanner characteristic correction method based on scanned scanner characteristic correction data and scanner capable of correcting characteristic correction

Claims (32)

[Claims] 1. A metal film mask is provided over a support having a property of emitting fluorescence or photoluminescence when irradiated with laser light, and the support is formed by an opening of the metal film mask. A device for evaluating characteristics of a scanner, wherein a regular test pattern to be exposed is formed. 2. A test pattern comprising: a pattern for evaluating an absolute position and a distance; a pattern for evaluating a resolution in a main scanning direction of a scanner; a pattern for evaluating a resolution in a sub-scanning direction of a scanner; 2. The scanner according to claim 1, further comprising one or more patterns selected from the group consisting of a pattern for adjusting the focus of the focusing optical system and a pattern for evaluating jitter. device. 3. The device for evaluating characteristics of a scanner according to claim 1, wherein the support is formed of a material that can be processed while maintaining optical flatness. 4. The support according to claim 1, wherein the support is formed of a material that does not deteriorate even when the support is irradiated with the laser light. Device for evaluating scanner characteristics. 5. The method according to claim 1, wherein the support is a group IV element, II-VI.
The device for evaluating characteristics of a scanner according to any one of claims 1 to 4, wherein the device is formed of a material selected from the group consisting of a group III compound, a group III-V compound, and a complex thereof. 6. The support is formed by a color glass filter formed by doping a solid solution of CdS-CdSe into a glass mainly containing a material selected from the group consisting of silica sand, soda ash and limestone. The device for evaluating characteristics of a scanner according to claim 5, wherein: 7. The support is formed by a colored glass filter formed by doping a solid solution of ZnS-CdS into glass mainly containing a material selected from the group consisting of silica sand, soda ash, and limestone. The device for evaluating characteristics of a scanner according to claim 5, wherein: 8. The method according to claim 1, wherein the support comprises: an InGaAsP layer;
6. The device for evaluating characteristics of a scanner according to claim 5, wherein the device is formed of a stacked body of an aAs layer, and the mask of the metal film is provided on the InGaAsP layer. 9. The method according to claim 1, wherein the mask of the metal film is formed by a forming method selected from the group consisting of sputtering, CVD and vapor deposition.
The device for evaluating characteristics of a scanner according to any one of the above items. 10. The device for evaluating characteristics of a scanner according to claim 9, wherein the mask of the metal film is formed by sputtering. 11. The method according to claim 1, wherein the mask of the metal film is formed of a material selected from the group consisting of chromium, aluminum, gold, a nickel-chromium alloy, and titanium-nickel-chromium. A device for evaluating characteristics of a scanner according to any one of the preceding claims. 12. The device for evaluating characteristics of a scanner according to claim 11, wherein the mask of the metal film is formed of chromium. 13. A metal film mask is provided over a support having a property of emitting fluorescence or photoluminescence when irradiated with laser light, and the support is formed by an opening of the metal film mask. The device for evaluating the characteristics of the scanner on which the regular test pattern to be exposed is formed is scanned by laser light, and the support is excited through the opening to emit fluorescence or fluorescence emitted from the support. Photoluminescence is photoelectrically detected and digitized through the opening, and scanner characteristic correction data for correcting the characteristics of the scanner is generated based on the generated scanner characteristic evaluation data. A method for generating scanner characteristic correction data. 14. The scanner characteristics evaluation by integrating a signal intensity generated by photoelectrically detecting fluorescence or photoluminescence emitted from the support based on the digital data according to the test pattern. 14. The method according to claim 13, wherein data is generated. 15. The scanner characteristic correction data according to claim 13, wherein a pixel pitch of the scanning by the laser light is substantially equal to or smaller than a beam diameter of the laser light. Generation method. 16. The apparatus according to claim 1, wherein the scanner characteristic correction data is generated for each wavelength of the laser light.
16. The method for generating characteristic correction data for a scanner according to any one of items 3 to 15. 17. The method according to claim 13, further comprising storing the scanner characteristic correction data in a memory. 18. The test pattern includes a pattern for evaluating an absolute position and a distance, a pattern for evaluating a resolution of a scanner in a main scanning direction, a pattern for evaluating a resolution of a scanner in a sub-scanning direction, and 1 selected from the group consisting of a pattern for adjusting the focus of the focusing optical system and a pattern for evaluating jitter.
18. The method for generating characteristic correction data for a scanner according to claim 13, wherein the method has two or more patterns. 19. The scanner characteristic correction data according to claim 13, wherein the support is formed of a material that can be processed while maintaining optical flatness. Generation method. 20. The scanner characteristic correction data according to claim 13, wherein the support is made of a material that does not deteriorate even when irradiated with the laser light. Generation method. 21. The method according to claim 20, wherein the support is a Group IV element, II-V.
The characteristic correction data generation of the scanner according to any one of claims 13 to 20, wherein the characteristic correction data is formed by a material selected from the group consisting of a group I compound, a group III-V compound, and a complex thereof. Method. 22. The support is formed by a colored glass filter formed by doping a solid solution of CdS—CdSe into a glass mainly containing a material selected from the group consisting of silica sand, soda ash, and limestone. 22. The method for generating characteristic correction data for a scanner according to claim 21, wherein: 23. The support is formed by a color glass filter formed by doping a solid solution of ZnS—CdS into a glass mainly containing a material selected from the group consisting of silica sand, soda ash, and limestone. 22. The method for generating characteristic correction data for a scanner according to claim 21, wherein: 24. The support, wherein the support comprises: an InGaAsP layer;
22. The method according to claim 21, wherein a mask of the metal film is formed on the InGaAsP layer and is formed of a stacked body of GaAs layers. 25. The scanner according to claim 13, wherein the mask of the metal film is formed by a forming method selected from the group consisting of sputtering, CVD, and vapor deposition. Correction data generation method. 26. The method according to claim 25, wherein the mask of the metal film is formed by sputtering. 27. The method according to claim 13, wherein the mask of the metal film is formed of a material selected from the group consisting of chromium, aluminum, gold, nickel-chromium alloy and titanium-nickel-chromium. A method for generating characteristic correction data for a scanner according to any one of the preceding claims. 28. The method according to claim 27, wherein the mask of the metal film is formed of chromium. 29. Scanning a sample with a laser beam, photoelectrically detecting light emitted from the sample, generating analog data, digitizing the analog data, and generating digital data of the sample. 18. The digital data of the sample,
29. A scanner characteristic correction method, wherein the correction is performed based on the scanner characteristic correction data generated by the scanner characteristic correction data generation method according to any one of claims 28 to 28 and stored in the memory. 30. At least one laser excitation light source for emitting laser light, a sample stage for mounting a sample, and the laser light emitted from the at least one laser excitation light source, wherein the laser light is emitted from the at least one laser excitation light source. A scanner comprising scanning means for moving the sample stage so as to scan a sample, a photodetector for photoelectrically detecting light, a memory, and correction means for correcting digital data of the sample. The memory stores the scanner characteristic correction data generated by the scanner characteristic correction data generation method according to any one of claims 13 to 28, and the correction unit stores the scanner characteristic correction data. The digital data of the sample is corrected based on the scanner characteristic correction data. A scanner characterized by being done. 31. The scanning unit is configured to move the sample stage at a pixel pitch substantially equal to or smaller than a beam diameter of laser light emitted from the at least one laser excitation light source. 31. The scanner according to claim 30, wherein the scanning is performed. 32. The scanner according to claim 30, wherein the memory stores scanner characteristic correction data for each of the laser beams having two or more different wavelengths.