JP2002160129A - Surface treating method of tool - Google Patents
Surface treating method of toolInfo
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- JP2002160129A JP2002160129A JP2000357450A JP2000357450A JP2002160129A JP 2002160129 A JP2002160129 A JP 2002160129A JP 2000357450 A JP2000357450 A JP 2000357450A JP 2000357450 A JP2000357450 A JP 2000357450A JP 2002160129 A JP2002160129 A JP 2002160129A
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- JP
- Japan
- Prior art keywords
- intermediate layer
- coating
- base material
- tool
- alcrn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、（歯切り）工具の
表面処理方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for treating a surface of a (gear cutting) tool.
【０００２】[0002]
【従来の技術】従来、金属製品の表面処理方法として、
広く実用化されているＴｉＮ，ＴｉＡｌＮよりも耐熱性
及び耐磨耗性に優れたＡｌＣｒＮ系硬質皮膜を金属製品
の表面に形成するものが公知である（特許第３０３９３
８１号公報参照）。2. Description of the Related Art Conventionally, as a surface treatment method for metal products,
It is known to form an AlCrN-based hard film having better heat resistance and abrasion resistance on the surface of a metal product than TiN and TiAlN widely used in practice (Japanese Patent No. 30393).
No. 81).
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、ＡｌＣ
ｒＮ系硬質皮膜を、工具として広く用いられているハイ
ス（高速度鋼）の表面に形成するだけでは、ＴｉＡｌＮ
を形成する場合以上の密着強度を得ることはできない。
これは、ＡｌＣｒＮ系硬質皮膜自体の耐熱性及び耐磨耗
性は優れているものの、コーティング時や切削加工時に
大きな温度変化が発生するので、ハイス（母材）とＡｌ
ＣｒＮ系硬質皮膜との間の熱膨張係数の違いにより、靭
性の低いＡｌＣｒＮ系硬質皮膜に残留応力が発生して剥
離しやすくなるためであると考えられる。SUMMARY OF THE INVENTION However, AlC
By simply forming an rN-based hard coating on the surface of high-speed steel (high-speed steel) widely used as a tool, TiAlN
Cannot be obtained in the case of the formation of
This is because although the AlCrN-based hard coating itself has excellent heat resistance and abrasion resistance, a large temperature change occurs during coating and cutting, so that high-speed steel (base material) and Al
It is considered that a difference in thermal expansion coefficient between the AlN and the CrN-based hard coating causes a residual stress to be generated in the AlCrN-based hard coating having low toughness and facilitates peeling.
【０００４】そこで、本発明は、工具にＡｌＣｒＮ系硬
質皮膜をコーティングする場合であっても、所望の耐熱
性及び耐磨耗性を得ることのできる工具の表面処理方法
を提供することを課題とする。Accordingly, an object of the present invention is to provide a tool surface treatment method capable of obtaining desired heat resistance and wear resistance even when the tool is coated with an AlCrN-based hard film. I do.
【０００５】[0005]
【課題を解決するための手段】本発明は、前記課題を解
決するための手段として、母材の表面にＴｉ系，Ｃｒ
系，Ｓｉ系、又はＡｌ皮膜をコーティングして中間層を
形成した後、該中間層の表面にＡｌＣｒＮ系硬質皮膜を
コーティングして表面層を形成することにより、工具の
表面処理を行うようにしたものである。According to the present invention, as a means for solving the above-mentioned problems, Ti-based, Cr-based
After forming an intermediate layer by coating an Al, Si or Al coating, the surface of the intermediate layer is coated with an AlCrN hard coating to form a surface layer, so that the surface treatment of the tool is performed. Things.
【０００６】これにより、母材の表面には靭性の高いＴ
ｉ系，Ｃｒ系，Ｓｉ系、又はＡｌ皮膜からなる中間層を
介してＡｌＣｒＮ系硬質皮膜からなる表面層が形成され
ることになり、中間層が母材と表面層との間の熱膨張係
数の違いによる変形量を吸収する緩衝材としての役割を
果たす。As a result, the surface of the base material has a high toughness T
A surface layer composed of an AlCrN-based hard film is formed via an intermediate layer composed of an i-based, Cr-based, Si-based, or Al film, and the intermediate layer has a thermal expansion coefficient between the base material and the surface layer. It plays a role as a cushioning material for absorbing the deformation amount due to the difference.
【０００７】前記母材の表面に、Ｔｉ系，Ｃｒ系，Ｓｉ
系、又はＡｌ皮膜をコーティングする前に、Ａｌを主成
分とする超微粒子を衝突させると、母材の表面を活性化
させることができ、母材とＴｉ系，Ｃｒ系，Ｓｉ系、又
はＡｌ皮膜との密着性を向上させることが可能となる点
で好ましい。[0007] Ti-based, Cr-based, Si
By impinging ultrafine particles mainly composed of Al before coating the Al-based or Al coating, the surface of the base material can be activated, and the base material can be activated by Ti-based, Cr-based, Si-based, or Al-based. This is preferable in that the adhesion to the film can be improved.
【０００８】[0008]
【発明の実施の形態】以下、本発明に係る実施形態を添
付図面に従って説明する。図１は、本発明に係る方法に
よりコーティングを施された歯切り工具の歯部１の断面
図を示す。この歯部１には、ハイス（高速度鋼）からな
る母材２の表面に、ＴｉＮ膜からなる中間層３、次いで
ＡｌＣｒＮ膜からなる表面層４が順次形成されている。
なお、前記母材２の材質としては、他に超硬合金等が挙
げられる。また、前記中間層３の材質としては、他にＴ
ｉ系であるＴｉ，ＴｉＣＮ，ＴｉＣ等や、Ｃｒ，Ｓｉ，
Ａｌの炭化物、窒化物、炭窒化物、酸化物等が挙げられ
る。Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows a sectional view of a tooth 1 of a gear cutting tool which has been coated by the method according to the invention. In the tooth portion 1, an intermediate layer 3 made of a TiN film and then a surface layer 4 made of an AlCrN film are sequentially formed on the surface of a base material 2 made of high-speed steel (high-speed steel).
In addition, as a material of the base material 2, a cemented carbide or the like may be used. The material of the intermediate layer 3 may be T
i-based Ti, TiCN, TiC, etc., Cr, Si,
Examples thereof include carbides, nitrides, carbonitrides, and oxides of Al.
【０００９】このような歯切り工具のコーティングは、
次のようにして形成する。まず、前記母材２の表面に、
Ａｌを主成分とする超微粒子（直径１０μｍ以下、＃８
００以上のもの）を圧縮空気と共にノズルより噴射させ
ることにより衝突させる。超微粒子にはＣ，Ａ系砥粒が
使用可能である。圧縮空気には、大気を除湿したドライ
エアのほか、Ｎ2ガス、Ｈｅガス、Ａｒガス等の不活性
ガスが使用可能である。また、供給圧力は、２００〜４
００ｋＰａとする。これにより、母材２の表面を活性化
し、中間層３との密着性を向上させる。[0009] The coating of such a gear cutting tool,
It is formed as follows. First, on the surface of the base material 2,
Ultra fine particles containing Al as a main component (diameter 10 μm or less, # 8
(00 or more) is injected from a nozzle together with compressed air. C, A type abrasive grains can be used as the ultrafine particles. As the compressed air, an inert gas such as N 2 gas, He gas, and Ar gas can be used in addition to dry air from which the atmosphere is dehumidified. The supply pressure is 200 to 4
00 kPa. Thereby, the surface of the base material 2 is activated, and the adhesion to the intermediate layer 3 is improved.
【００１０】続いて、前記母材２の表面に中間層３をイ
オンプレーティングにより形成する。すなわち、図２に
示すように、１〜１０-3Ｐａに真空引きし、処理温度を
３００〜５００℃とした真空槽５内に、母材２のみで形
成された歯切り工具を収容する。真空槽５の下部に設け
たルツボ６には、Ｔｉを収容し、上部に設けたＨＣＤ
（熱陰極）７にＡｒをプラズマソースガスとして供給す
ることによりプラズマを発生させる。そして、プラズマ
中で、Ｔｉの蒸発粒子と、Ａｒガスと、真空槽５の下部
から供給したＮ2ガスとをイオン化して活性にする。そ
して、歯切り工具に負の電圧を印加し、この歯切り工具
にイオン化したものを加速させて反応生成物（ＴｉＮ）
を析出させることにより中間層３を形成する。この場
合、処理時間を調整して中間層３の厚みを１〜３μｍと
する。Subsequently, an intermediate layer 3 is formed on the surface of the base material 2 by ion plating. That is, as shown in FIG. 2, the gear cutting tool formed only of the base material 2 is housed in the vacuum chamber 5 in which the processing temperature is 300 to 500 ° C. by evacuating to 1 to 10 −3 Pa. The crucible 6 provided at the lower part of the vacuum chamber 5 contains Ti, and the HCD provided at the upper part
Plasma is generated by supplying Ar to the (hot cathode) 7 as a plasma source gas. Then, in the plasma, the evaporated particles of Ti, the Ar gas, and the N 2 gas supplied from the lower part of the vacuum chamber 5 are ionized and activated. Then, a negative voltage is applied to the gear cutting tool, and the ionized material is accelerated to the gear cutting tool to produce a reaction product (TiN).
To form the intermediate layer 3. In this case, the thickness of the intermediate layer 3 is adjusted to 1 to 3 μm by adjusting the processing time.
【００１１】その後、前記中間層３の表面に表面層４を
スパッタリングにより形成する。すなわち、図３に示す
ように、１〜１０-2Ｐａに真空引きし、Ａｒガス及びＮ
２ガスを封入すると共に、処理温度を２００〜３００℃
とした真空槽８内に、母材２の表面に中間層３を形成さ
れた歯切り工具を収容する。そして、放電によって発生
させたＡｒイオンをコーティング材料（ターゲット）９
に高速で衝突させる。コーティング材料９には、Ａｌ
（２５〜５０％），Ｃｒ（５０〜７５％）からなるもの
を使用する。これにより、コーティング材料９からたた
き出された各ターゲット原子を歯切り工具にコーティン
グして、ＡｌＣｒＮからなる表面層４を形成する。この
場合、処理時間を調整して表面層４の厚みを１〜３μｍ
とする。なお、コーティング材料９の近傍には磁石１０
を配設し、ターゲット原子に衝突させるＡｒイオンが効
率的に発生するようにしている。Thereafter, a surface layer 4 is formed on the surface of the intermediate layer 3 by sputtering. That is, as shown in FIG. 3, vacuum is drawn to 1 to 10 -2 Pa, and Ar gas and N
2 gas is sealed and the processing temperature is 200 ~ 300 ° C
The hobbing tool in which the intermediate layer 3 is formed on the surface of the base material 2 is accommodated in the vacuum chamber 8. Then, Ar ions generated by the discharge are applied to a coating material (target) 9.
Crash at high speed. The coating material 9 includes Al
(25-50%) and Cr (50-75%). As a result, each target atom that has been knocked out of the coating material 9 is coated on the gear cutting tool, and the surface layer 4 made of AlCrN is formed. In this case, the treatment time is adjusted so that the thickness of the surface layer 4 is 1 to 3 μm.
And The magnet 10 is located near the coating material 9.
Are arranged to efficiently generate Ar ions that collide with target atoms.
【００１２】このようにして母材２の表面に中間層３及
び表面層４を形成することにより得た歯切り工具によれ
ば、母材２の表面が超微粒子を衝突させることにより活
性化して中間層３との密着性が良く、しかも中間層３自
体は靱性に優れたＴｉ系被膜で形成されているので、前
記各処理や切削加工時の発熱による温度変化によっても
剥離することがない。したがって、表面層４が本来備え
る耐熱性及び耐磨耗性を十分に発揮させることが可能と
なる。According to the gear cutting tool obtained by forming the intermediate layer 3 and the surface layer 4 on the surface of the base material 2 as described above, the surface of the base material 2 is activated by colliding with ultrafine particles. Since the intermediate layer 3 itself has good adhesion to the intermediate layer 3 and is formed of a Ti-based film having excellent toughness, the intermediate layer 3 does not peel off due to a temperature change due to heat generated during each of the above-described processes and cutting. Therefore, the heat resistance and abrasion resistance inherently provided in the surface layer 4 can be sufficiently exhibited.
【００１３】以下に、歯切り工具としてホブ盤に使用す
るものについて、母材２の表面にＡｌＣｒＮ膜からなる
表面層４のみを形成する場合と、ＴｉＮ膜からなる中間
層３をも形成する場合とで、切削試験を行った結果を示
す。[0013] The following describes a case where only a surface layer 4 made of an AlCrN film is formed on the surface of a base material 2 and a case where an intermediate layer 3 made of a TiN film is also formed. Shows the results of the cutting test.
【００１４】[0014]
【実施例】（切削条件） 切削油 なし 切削速度 １４４ｍ／ｍｉｎ 送り量 ２．５ｍｍ／ｒｅｖ 加工物 ＳＣＲ４２０ 加工数 １００個 （切削結果） 図１に示す歯の各部に於ける２番磨耗量 外周 側
面 （表面層のみ） ０．２０４ｍｍ ０．１０３ｍｍ （中間層あり） ０．０３１ｍｍ ０．０６０ｍｍ[Example] (Cutting conditions) Cutting oil None Cutting speed 144 m / min Feed amount 2.5 mm / rev Workpiece SCR420 Number of cuts 100 (cutting result) No. 2 wear amount at each tooth portion shown in FIG. (Surface layer only) 0.204mm 0.103mm (with intermediate layer) 0.031mm 0.060mm
【００１５】この結果によれば、本発明に係る表面処理
方法により表面層のみならず、中間層をも形成した工具
によれば、表面層のみを形成した工具に比べて耐磨耗性
に優れていることは明らかである。According to the results, according to the tool having not only the surface layer but also the intermediate layer formed by the surface treatment method according to the present invention, the wear resistance is superior to the tool having only the surface layer formed thereon. It is clear that.
【００１６】[0016]
【発明の効果】以上の説明から明らかなように、本発明
によれば、母材の表面に靭性の高いＴｉ系，Ｃｒ系，Ｓ
ｉ系、又はＡｌ系皮膜をコーティングして中間層を形成
するので、たとえ急激な温度変化により母材とＡｌＣｒ
Ｎ系硬質皮膜からなる表面層との間の変形量が大きくな
ったとしても、これを吸収して剥離を適切に防止するこ
とが可能となる。したがって、耐熱性及び耐磨耗性に優
れたＡｌＣｒＮ系硬質皮膜の特質を最大限に利用するこ
とができ、切削油なしでの切削を可能とすると共に、工
具の長寿命化を達成することができる。As is apparent from the above description, according to the present invention, the surface of the base material is made of Ti, Cr, S
Since the intermediate layer is formed by coating the i-based or Al-based coating, even if the base material and AlCr
Even if the amount of deformation between the N-type hard coating and the surface layer is large, it is possible to absorb the deformation and appropriately prevent peeling. Therefore, it is possible to make full use of the characteristics of the AlCrN-based hard coating having excellent heat resistance and wear resistance, to enable cutting without cutting oil, and to achieve a longer tool life. it can.
【００１７】特に、母材の表面に、Ｔｉ系，Ｃｒ系，Ｓ
ｉ系、又はＡｌ系皮膜をコーティングする前に、Ａｌを
主成分とする超微粒子を衝突させると、母材とＴｉ，Ｃ
ｒ系，Ｓｉ系、又はＡｌ系系皮膜との密着性をさらに向
上させて剥離しにくく構成することが可能となる。In particular, Ti, Cr, S
Before coating the i-based or Al-based coating, the base material and Ti, C
Adhesion with an r-based, Si-based, or Al-based coating can be further improved to make it difficult to peel off.
【図１】 本実施形態に係るコーティングを歯切り工具
の表面に施した状態を示す歯部の断面図である。FIG. 1 is a sectional view of a tooth portion showing a state in which a coating according to an embodiment is applied to a surface of a gear cutting tool.
【図２】 図１の中間層をイオンプレーティングにより
形成するための装置の概略図である。FIG. 2 is a schematic view of an apparatus for forming the intermediate layer of FIG. 1 by ion plating.
【図３】 図１の表面層をスパッタリングにより形成す
るための装置の概略図である。FIG. 3 is a schematic view of an apparatus for forming the surface layer of FIG. 1 by sputtering.
１…歯部 ２…母材 ３…中間層 ４…表面層 DESCRIPTION OF SYMBOLS 1 ... Tooth part 2 ... Base material 3 ... Intermediate layer 4 ... Surface layer
───────────────────────────────────────────────────── フロントページの続き (72)発明者 西野 秀憲 広島県広島市南区宇品東５丁目３番38号 トーヨーエイテック株式会社内 (72)発明者 服部 幸司 山口県宇部市大字善和字石ヶ谷204−47 和興産業株式会社宇部工場内 (72)発明者 上田 誠 山口県宇部市大字善和字石ヶ谷204−47 和興産業株式会社宇部工場内 Ｆターム(参考） 4K029 AA02 BA03 BA07 BA17 BA35 BA58 BA60 BB02 BD05 CA03 CA05 FA01 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hidenori Nishino 5-38-3 Ujinahigashi, Minami-ku, Hiroshima-shi, Hiroshima Toyo A-Tech Co., Ltd. (72) Inventor Koji Hattori Large-sized Japanese character Ishiga 204-47 Tani Inside the Ube Plant of Wako Sangyo Co., Ltd. (72) Inventor Makoto Ueda 204-47 Ishigaya Ozawa, Ube City, Yamaguchi Prefecture F-term inside the Ube Plant of Wako Sangyo Co., Ltd. 4K029 AA02 BA03 BA07 BA17 BA35 BA58 BA60 BB02 BD05 CA03 CA05 FA01
Claims (2)
はＡｌ系皮膜をコーティングして中間層を形成した後、
該中間層の表面にＡｌＣｒＮ系硬質皮膜をコーティング
して表面層を形成することを特徴とする工具の表面処理
方法。After coating a surface of a base material with a Ti, Cr-based, Si-based or Al-based coating to form an intermediate layer,
A surface treatment method for a tool, comprising forming a surface layer by coating an AlCrN-based hard film on the surface of the intermediate layer.
ｉ系、又はＡｌ皮膜をコーティングする前に、Ａｌを主
成分とする超微粒子を衝突させることを特徴とする請求
項１に記載の工具の表面処理方法。2. The method according to claim 1, wherein the base material has a Ti-based, Cr-based,
The tool surface treatment method according to claim 1, wherein before coating the i-type or Al film, ultrafine particles mainly containing Al are collided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000357450A JP2002160129A (en) | 2000-11-24 | 2000-11-24 | Surface treating method of tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000357450A JP2002160129A (en) | 2000-11-24 | 2000-11-24 | Surface treating method of tool |
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|---|---|
| JP2002160129A true JP2002160129A (en) | 2002-06-04 |
Family
ID=18829513
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|---|---|
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| US8003231B2 (en) * | 2007-11-15 | 2011-08-23 | Kobe Steel, Ltd. | Wear-resistant member with hard coating |
| JP2011255386A (en) * | 2010-06-04 | 2011-12-22 | Mitsubishi Heavy Ind Ltd | Shear cutting tool |
| JP2012101337A (en) * | 2010-11-12 | 2012-05-31 | Mitsubishi Materials Corp | Surface coated broach excellent in wear resistance and finishing surface accuracy |
| CN102791409A (en) * | 2009-11-12 | 2012-11-21 | Osg株式会社 | Hard coating and tool coated with hard coating |
| US8318328B2 (en) | 2004-07-15 | 2012-11-27 | Oerlikon Trading Ag, Trubbach | High oxidation resistant hard coating for cutting tools |
| JP2014185054A (en) * | 2013-03-22 | 2014-10-02 | Sumitomo Electric Ind Ltd | Ceramic crystal grain, ceramic sintered compact and method for producing them |
| CN108193181A (en) * | 2018-02-08 | 2018-06-22 | 南京航空航天大学 | The method that TA15 alloy surface reaction magnetocontrol sputterings prepare AlN/AlCrN films |
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| US7166155B2 (en) | 2002-11-19 | 2007-01-23 | Hitachi Tools Engineering Ltd. | Hard film and hard film-coated tool |
| JP2010275639A (en) * | 2003-04-28 | 2010-12-09 | Oerlikon Trading Ag Truebbach | PVD method |
| JP2006524748A (en) * | 2003-04-28 | 2006-11-02 | ユナキス・バルツェルス・アクチェンゲゼルシャフト | Workpiece having hard material layer containing AlCr and manufacturing method |
| US8318328B2 (en) | 2004-07-15 | 2012-11-27 | Oerlikon Trading Ag, Trubbach | High oxidation resistant hard coating for cutting tools |
| US8088501B2 (en) | 2005-02-10 | 2012-01-03 | Oerlikon Trading Ag, Trubbach | High wear resistant triplex coating for cutting tools |
| US7879443B2 (en) | 2005-02-10 | 2011-02-01 | Oc Oerlikon Trading Ag, Truebbach | High wear resistant triplex coating for cutting tools |
| WO2006084404A1 (en) * | 2005-02-10 | 2006-08-17 | Oerlikon Trading Ag, Trübbach | High wear resistant triplex coating for cutting tools |
| US7967275B2 (en) * | 2006-08-09 | 2011-06-28 | Kobe Steel, Ltd. | Hard film and hard film-coated material |
| JP2008150650A (en) * | 2006-12-15 | 2008-07-03 | Nippon Coating Center Kk | Steel-based composite surface treatment product and manufacturing method thereof |
| US8003231B2 (en) * | 2007-11-15 | 2011-08-23 | Kobe Steel, Ltd. | Wear-resistant member with hard coating |
| US20110111193A1 (en) * | 2008-07-09 | 2011-05-12 | Oerlikon Trading Ag, Truebbach | Coating system, coated workpiece and method for manufacturing the same |
| US8491989B2 (en) * | 2008-07-09 | 2013-07-23 | Oberlikon Trading AG, Truebbach | Coating system, coated workpiece and method for manufacturing the same |
| CN102791409B (en) * | 2009-11-12 | 2015-12-16 | Osg株式会社 | hard film and hard film coated tool |
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| JP2012101337A (en) * | 2010-11-12 | 2012-05-31 | Mitsubishi Materials Corp | Surface coated broach excellent in wear resistance and finishing surface accuracy |
| JP2014185054A (en) * | 2013-03-22 | 2014-10-02 | Sumitomo Electric Ind Ltd | Ceramic crystal grain, ceramic sintered compact and method for producing them |
| US10023499B2 (en) | 2014-08-08 | 2018-07-17 | Sumitomo Electric Industries, Ltd. | Hard material, sintered material, tool including sintered material, manufacturing method of hard material, and manufacturing method of sintered material |
| CN108193181A (en) * | 2018-02-08 | 2018-06-22 | 南京航空航天大学 | The method that TA15 alloy surface reaction magnetocontrol sputterings prepare AlN/AlCrN films |
| WO2026018875A1 (en) * | 2024-07-18 | 2026-01-22 | 京セラ株式会社 | Coated tool, cutting tool, and method for producing cut workpiece |
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