JP2002140119A - Work temperature control device - Google Patents

Abstract

(57) [Summary] [Problem] Hunting phenomenon hardly occurs in the work temperature.
Provided is a work temperature control device that enhances stability of control for adjusting a work to a set temperature. SOLUTION: A brine supply device (work temperature control device) 10 controls a brine supply temperature P supplied to a work W.
A first temperature change curve L1 of the work when the heat load is changed while t1 is kept constant is obtained in advance, and the work is line-symmetric with respect to the first temperature change curve and the work set temperature SV (R). , A brine supply temperature change curve L3 that realizes the virtual second temperature change curve L2 is calculated. Then, the controller 30 controls the operations of the electric heater 51 and the electromagnetic valve 62 as the adjusting unit so that when the heat load by the external heat source 25 is changed, the brine supply temperature changes based on the supply temperature change curve L3. I do. A buffer tank 57 for removing uneven temperature of brine supplied to the work is disposed between the solenoid valve and the work.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of maintaining a temperature of a work as a constant temperature object to which a heat load applied from an external heat source is changed to a predetermined work set temperature by a heat medium adjusted to a predetermined temperature. To a work temperature control device.

[0002]

2. Description of the Related Art In a process for producing a semiconductor or a liquid crystal panel, temperature control is an essential condition. Therefore, a constant temperature state of a work is maintained by a work temperature control device. Some of the work temperature control devices use a brine supply device. This type of brine supply device uses a temperature-controlled heat medium, that is, a brine, in a load circuit in which a work as a constant temperature object such as a liquid crystal panel is arranged. To maintain the workpiece temperature at the set temperature.

In order to maintain the work temperature at the set temperature,
Conventionally, the temperature of the workpiece in the load circuit and the return temperature of the brine returning from the load circuit to the brine supply device are fed back, and the supply temperature of the brine supplied to the load circuit is set by feedback control such as PID control. The method of changing the value is widely adopted.

[0004]

In a process such as a semiconductor manufacturing apparatus, a large heat load is applied to a work in a short time from an external heat source provided on the process side, or the application of the heat load is stopped. . Even if the heat load applied from the external heat source is changed in this way,
There is a demand to maintain the work temperature at the set temperature.

In feedback control such as PID control, when the change in the heat load applied to the work is small, the change in the temperature of the work due to the change in the amount of heat is small.
The work temperature can be maintained at the set temperature with sufficient accuracy.

However, in feedback control,
If a large change in thermal load is made in a short time, the temperature change of the brine supply temperature cannot follow the temperature change of the work, and as a result, hunting occurs in the temperature of the work, and the work reaches the set temperature. There is a problem that the stability of the control to be adjusted is lacking.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a work temperature control apparatus in which a hunting phenomenon hardly occurs in the work temperature and the stability of control for adjusting the work to a set temperature is improved.

[0008]

The object of the present invention is achieved by the following means.

(1) A work temperature control device for maintaining the temperature of a work as a constant temperature object to which a heat load applied from an external heat source is changed to a predetermined work set temperature by a heat medium adjusted to a predetermined temperature. An acquisition unit that acquires in advance a first temperature change curve of the work when the heat load is changed while keeping a supply temperature of the heat medium supplied to the work constant; and a first temperature. A calculating section that calculates a supply temperature change curve of a heat medium that realizes a virtual second temperature change curve of a work that forms a line symmetry based on the change curve and the work set temperature, and calculates the supply temperature of the heat medium. An adjusting unit that adjusts, when the heat load applied to the workpiece from the external heat source is changed, the supply temperature of the heat medium changes based on the supply temperature change curve calculated by the calculation unit. To manner, workpiece temperature control apparatus characterized by comprising a control unit for controlling the adjustment part.

(2) The adjusting section includes a cooling section for cooling a heat medium, and a valve member for mixing a part of the heat medium cooled by the cooling section with the heat medium supplied to the work.
The said control part controls operation | movement of the said valve member, and changes the supply temperature of the said heat medium based on the said supply temperature change curve, The work temperature control apparatus of the said (1) characterized by the above-mentioned.

(3) The adjusting section includes a heating section for heating the heating medium, the control section controls the operation of the heating section, and controls the supply temperature of the heating medium based on the supply temperature change curve. The work temperature control device according to the above (1) or (2), wherein

(4) Between the valve member and the work,
The work temperature control device according to the above (2), wherein a buffer tank for removing temperature unevenness of the heat medium supplied to the work is arranged.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a configuration diagram showing an embodiment of a brine supply device to which the work temperature control device of the present invention is applied.

A brine supply device 10 as a work temperature control device is connected to a load circuit 20 in which a work W as a constant temperature object is arranged. The brine is supplied from the brine supply device 10 to the load circuit 20, and after adjusting the temperature of the work W, is returned to the brine supply device 10 again. The operation of the brine supply device 10 is controlled by the controller 3
Controlled by 0.

As the brine, for example, fluorine-based brine, cold water, pure water, refrigerant, or the like is used, and a brine according to the work W is selected. The cooling unit 43 including the cooling source for cooling the brine, according to the set temperature of the workpiece W,
It is selected as appropriate. In the present embodiment, since the set temperature of the work W is relatively low (for example, 40 ° C. to 60 ° C.),
A refrigerant is used as a cooling source, and a refrigerator is used as a cooling unit 43. The controller 30 controls the operation of the compressor that discharges the refrigerant. When the set temperature of the work W is relatively high, the cooling unit 43 using cold water as a cooling source can be used. In this case, the controller 30
Controls the opening of the valve that regulates the supply of cold water.

The brine supply apparatus 10 shown in FIG.
A low-temperature brine circulating system 40 in which relatively low-temperature brine circulates, when viewed from the temperature zone of the brine generated within 0;
High temperature brine circulation system 5 in which relatively high temperature brine circulates
0 and two systems.

The low-temperature brine circulation system 40 exchanges heat between the brine supplied from the refrigerator 43 and the brine supplied to the brine tank 41 for storing the brine, the first pump 42 for circulating the brine, and the brine. , And a heat exchanger 44 for cooling the cooling water, and an on-off valve 45. These components are connected by a plurality of pipes 46a to 46d, and relatively low-temperature brine circulates. The brine tank 41 has a so-called semi-sealed structure, which is covered and does not allow air to flow, but is not restricted as a pressure vessel.

Since the first pump 42 only needs to circulate the brine in the low-temperature brine circulation system 40, the first pump 42 is located at the position of the brine tank 41 and the heat exchanger 44 as shown in the figure.
It is not limited to between. For example, it may be arranged in the pipe 46c on the outlet side of the heat exchanger 44.

The high-temperature brine circulation system 50 includes an electric heater (corresponding to a heating unit) 51 for heating the brine, a second pump 52 for circulating the brine, a supply port 53 for supplying the brine to the load circuit 20, and a load. A return port 54 to which the brine passed through the circuit 20 is returned. These components are connected by a plurality of pipes 55a to 55e, and relatively high temperature brine circulates. The high-temperature brine circulation system 50 includes a pipe 5 branching from a pipe 55e.
It is connected to the brine tank 41 via 5f.
Therefore, part of the brine circulating in the high-temperature brine circulation system 50 can be returned to the brine tank 41. The pipe 55f is provided with an on-off valve 56 for adjusting the amount of brine returned to the brine tank 41.

The heating section is not limited to the electric heater 51 and can be appropriately selected as long as it has a function of heating brine. In addition, since the second pump 52 only needs to circulate the brine in the high-temperature brine circulation system 50, the position of the second pump 52 is not limited to the position where the brine heated by the heater 51 is sent out as illustrated. For example, it may be arranged in the pipe 55a on the inlet side of the heater 51.

The brine supply device 10 is configured so as not to change the flow rate of the brine during its operation. For this reason, a pump capable of sending out a brine with a constant flow rate is used as the second pump 52. However, in order to meet various specifications required for the brine supply device 10, a pump capable of changing the set value of the brine flow rate may be used.

The low-temperature brine circulation system 40 and the high-temperature brine circulation system 50 are connected via a supply means 60.
The supply means 60 connects the pipe 46c and the pipe 55b,
The brine circulating through the low-temperature brine circulation system 40 is supplied to the heater 5.
1 is constituted by a pipe 61 leading to the outlet side, and a valve 62 (corresponding to a valve member) arranged on the way of the pipe 61. In the present embodiment, when lowering the temperature of the brine supplied to the work W, the brine circulating through the low-temperature brine circulating system 40 is supplied to the outlet of the heater 51 by the supply unit 60 by the amount of brine necessary for cooling. Guided to the side.

In the embodiment in which the brine of the low-temperature brine circulation system 40 is guided to the high-temperature brine circulation system 50 as necessary, it is not necessary to cool the entire amount of the brine contained in the brine supply device 10. Is not cooled more than necessary. Therefore, the heater 5
The energy loss at the time of reheating at 1 can be reduced as much as possible, and the brine supply device 10 can be operated efficiently.

The valve in the illustrated example is an electromagnetic valve 62 for turning on and off the communication between the low-temperature brine circulation system 40 and the high-temperature brine circulation system 50. However, a flow control valve whose opening can be freely adjusted is used. May be.

In this embodiment, a buffer tank 57 is further provided between the solenoid valve 62 and the work W. The buffer tank 57 is disposed immediately after the relatively low-temperature brine guided from the low-temperature brine circulating system 40 and the relatively high-temperature brine flowing out of the heater 51 merge, and promotes mixing of the low-temperature brine and the high-temperature brine. And a function of removing temperature unevenness of the brine supplied to the load circuit 20. The internal volume of the buffer tank 57 is set to a volume sufficient to exhibit the above function.

The pipe 55b and the pipe 61 are independently connected to the buffer tank 57 without being merged, and the low-temperature brine and the high-temperature brine are mixed in the buffer tank 57 to remove the temperature unevenness. Is also good. Further, a baffle plate may be provided in the buffer tank 57 to further promote the mixing of the low-temperature brine and the high-temperature brine.

The load circuit 20 is incorporated in a manufacturing device, an inspection device, a constant temperature device, or the like. For example, load circuit 2
0 is incorporated in a film forming apparatus for forming a thin film on a glass substrate for a liquid crystal panel. In this case, the glass substrate is
Is equivalent to

The load circuit 20 includes an inlet pipe 21 connected to the supply port 53 and a chamber 2 in which the workpiece W is stored.
2 and an outlet pipe 23 connected to the return port 54. The work W is mounted on the plate 24. The plate 24 is heated / cooled by the brine supplied to the chamber 22, and the work temperature is adjusted to the set temperature.

The load circuit 20 is provided with an external heat source 25 on the process side for applying a thermal load to the work W. The external heat source 25 includes, for example, an electric heater 26, and a predetermined current / voltage is applied from a power supply 27. The temperature of the work W increases due to the Joule heat generated by the electric heater 26. The “external heat source 25 on the process side” refers to the workpiece W when manufacturing or inspecting.
Is a general term for a device having a function of applying heat to the heater, and is not limited to the electric heater 26.

A supply temperature sensor 31 for detecting the current supply temperature Pt1 of the brine supplied to the load circuit 20 is provided in the pipe 55d. The load circuit 20 is provided with a work temperature sensor 32 for detecting the work temperature Pt2. The return pipe 55e is provided with a return temperature sensor 33 for detecting a return temperature Pt3 of the brine returned from the load circuit 20. Further, a flow rate sensor 34 for detecting the circulating flow rate F of the brine is also provided in the return pipe 55e. Each of the temperature sensors 31 to 33 includes a resistance temperature detector, a thermocouple, and the like. Since the temperature of the plate 24 is substantially equal to the work temperature Pt2, in the illustrated example, the work temperature P is measured by measuring the temperature of the plate 24.
t2 is detected. The flow sensor 34 includes a general flow meter using an orifice, a converter that converts a measured value into an electric signal and outputs the electric signal to the controller 30.

FIG. 2 is a block diagram showing a configuration of the controller 30 for controlling the operation of the brine supply device 10. As shown in FIG.

The supply temperature sensor 31, the work temperature sensor 32, the return temperature sensor 33, and the flow rate sensor 34 are connected to the CPU 39 to supply the brine supply temperature Pt1, the work temperature Pt2, the brine return temperature Pt3, and the brine circulation flow rate F. Each detection signal is input. From the CPU 39, control signals for controlling the operation of the refrigerator 43, the electric heater 51, and the electromagnetic valve 62 are output.

The CPU 39 further includes a setting unit 35 and R
The OM 36, the RAM 37, and the timer 38 are connected. The setting unit 35 includes, for example, an input device such as a numeric keypad, and sets a set temperature SV (R) of the work W.
In the ROM 36, in addition to a program for predictively setting the brine supply temperature, various parameters and programs necessary for controlling the operation of the brine supply device 10 are stored.

The power supply 27 on the process side is connected to the CPU 39, and an on / off signal corresponding to the power supply from the power supply 27 to the electric heater 26 and an output value signal of the power supplied to the electric heater 26 are input to the CPU 39. Is done. Based on these signals, the CPU 39 detects that the heat load applied from the electric heater 26 to the work W has been changed and the amount of heat actually applied to the work W.

The CPU 39 functions as an acquisition unit, a calculation unit, and a control unit of the present invention.

Prior to the description of the operation of the brine supply device 10 according to the embodiment, the basic operation principle of the work temperature control device according to the present invention will be described.

FIG. 3 is an explanatory diagram for explaining the basic operation principle of the work temperature control device according to the present invention.

The work temperature control device controls the temperature of the work W as a constant temperature object, to which the heat load applied from the external heat source 25 is changed, by a brine adjusted to a predetermined temperature.
A predetermined work set temperature SV (R) is maintained. First, when the heat load on the work W from the external heat source 25 is changed while the brine supply temperature supplied to the work W is kept constant. The first temperature change curve L1 of the workpiece W is obtained in advance.

As shown in FIG. 3, the "change of heat load" includes a heat load of a predetermined amount of heat from an off state (heat load 0%) where no heat load is applied to the work W at time t0. To the on state (100% heat load) with
Conversely, at time t1, the work W is changed from an on state (heat load of 100%) in which a heat load of a predetermined amount is applied to an off state (heat load of 0%) in which the application of the heat load is stopped. is there.

When the heat load is changed in the former case, the heat load is maintained in a state where the brine supply temperature, which has been adjusted to a predetermined temperature in order to maintain the work temperature at the work set temperature SV (R), is kept constant. In order to start the application, the first temperature change curve L1 indicates that the temperature increases with the elapse of time,
It exhibits a curve that is stable at a predetermined temperature.

When the heat load is changed in the latter case, the application of the heat load is stopped while the brine supply temperature is kept constant. Therefore, the first temperature change curve L1 indicates that the temperature decreases with time. In addition, a curve stabilizes at the work set temperature SV (R).

Next, the work temperature control device obtains a virtual second temperature change curve L2 of the work W which is line-symmetric with respect to the first temperature change curve L1 and the work set temperature SV (R). Next, the work temperature control device calculates a brine supply temperature change curve L3 that realizes the obtained second temperature change curve L2.

The brine supply temperature change curve L3 is
Although conceptually shown in FIG. 3, the temperature is shown on a lower temperature side than the second temperature change curve L2, but may coincide with the second temperature change curve L2 depending on the temperature of the atmosphere or the set temperature,
It may shift to a higher temperature.

When detecting that the heat load applied to the work W from the external heat source 25 has been changed, the work temperature control device changes the brine supply temperature based on the calculated brine supply temperature change curve L3. Control the adjustment unit. This adjustment section is a general term for the means necessary for adjusting the brine supply temperature, and includes a refrigerator 43, an electric heater 5
1, various valve members such as an electromagnetic valve 62 for controlling the supply of brine, a flow control valve, and a pump are included.

When the application of the heat load is started by the control for predictively setting the brine supply temperature as described above, the amount of heat applied to the work W from the external heat source 25 and the amount of heat taken by the brine from the work W are determined. When the application of the heat load is stopped, the amount of heat dissipated from the work W and the amount of heat applied from the brine to the work W can be substantially matched. For this reason, even when a large change in heat load is made in a short time, the PID
Compared to feedback control such as control, a hunting phenomenon is less likely to occur in the work temperature, the temperature of the work W can be controlled to be constant, and the stability of the control for adjusting the work W to the work set temperature SV (R) increases.

The amount of heat of the heat load when obtaining the first temperature change curve L1 may be different from the amount of heat of the heat load when actually controlling the temperature of the work W. It is known that the influence of No. 1 on the temperature change curve L1 is proportional. Therefore, depending on the difference in the amount of heat, the first
The second temperature change curve L2 and the brine supply temperature change curve L3 are determined after the temperature change curve L1 is corrected, so that even when a large change in heat load is made in a short time, the work temperature can be hunted. The temperature of the workpiece W can be controlled to be constant without performing. Note that a plurality of first temperature change curves L1 are acquired for different heat quantities,
Based on the plurality of first temperature change curves L1, a first temperature change curve L1 that matches the amount of heat of the heat load when actually controlling the temperature of the work W may be obtained.

Next, the operation of the embodiment will be described with reference to the flowcharts shown in FIGS. FIG.
FIG. 11A is a diagram conceptually showing an example of changes in the work temperature and the brine supply temperature in the sampling mode, and FIG.
FIG. 5 is a diagram conceptually showing an example of a change in the work temperature Pt2 when the heat load on the work W from the external heat source 25 is changed while the brine supply temperature Pt1 supplied to the work W is kept constant. FIG. 11B is a view conceptually showing a change example of the work temperature Pt2 and the brine supply temperature Pt1 in the work temperature control mode.

The operation modes of the brine supply device 10 include:
There are a sampling mode for acquiring data necessary for predictively controlling the brine supply temperature and a work temperature control mode that is a normal operation. When the brine supply device 10 is installed, it is necessary to execute the sampling mode. In this sampling mode, the brine supply set temperature SV (S) when the process side heat load is 0%
[0] and the brine supply set temperature SV (S) [100] when the heat load on the process side is 100%. Further, a first temperature change curve L1 of the work W (FIG. 3)
) Is performed. Based on the first temperature change curve L1, a time constant T1 when decreasing the brine supply temperature and a time constant T2 when increasing the brine supply temperature are also determined.

The time constants T1 and T2 can be manually acquired by an input device such as a ten-key, which constitutes the setting unit 35, in addition to automatic acquisition, and can be rewritten. The time constants T1 and T2 are stored in the RAM 37. Also, process conditions (radiation, cooling, etc.)
Does not change, the time constant T1 matches the time constant T2.

As shown in FIG. 4, the controller 30
When the power supply of the brine supply device 10 is turned on (S10
0), it is determined whether or not to manually input the time constants T1 and T2 (S150). If manual input is to be performed (S150:
YES), input of the time constants T1 and T2 is accepted (S1).
51). The input time constants T1 and T2 are stored in the RAM 37. The controller 30 determines whether the sampling mode has been selected and whether the work temperature control mode has been selected (S200, S300). If the sampling mode has been selected, the process proceeds to step S200.
The process proceeds to step S201, and if the work temperature control mode is selected, the process proceeds to step S301.

(Sampling Mode) When the sampling mode is selected, the controller 30 accepts the input of the work set temperature SV (R) by the user, sets the work set temperature SV (R), and turns on the operation switch. (S201: YES), the first pump 42 and the second pump 52 are operated (S202). Further, the controller 30 operates the refrigerator 43 (S203), and
R (solid state relay) and other switching elements are turned on to turn on the operation of the electric heater 51 (S20).
4), proceed to step S211 in FIG. The electric heater 26 on the process side remains off, and the heat load on the work W is 0%.

In the low-temperature brine circulation system 40, the brine sent from the brine tank 41 by the first pump 42 exchanges heat with the refrigerant in the heat exchanger 44 and is cooled. The temperature of the brine circulating through the pipe 46 (collectively referred to as 46 a to 46 d) becomes relatively low with the operation of the refrigerator 43.

On the other hand, in the high-temperature brine circulating system 50, the brine to which Joule heat has been
Pumped by the pump 52 and at a constant flow rate the load circuit 20
Flows through. The brine circulating through the pipes 55 a to 55 e and the load circuit 20 has a relatively high temperature with the operation of the heater 51. The controller 30 turns on or off the operation of the electric heater 51 based on the current supply temperature Pt1, the work temperature Pt2, and the work set temperature SV (R) of the brine.

As shown in FIG. 10, the brine supply temperature P
With the rise of t1, the work temperature Pt2 also rises.

Referring to FIG. 5, the supply temperature sensor 41 supplies the brine supply temperature Pt1 supplied to the load circuit 20.
And the work temperature sensor 32 detects the work temperature P
t2 is detected, the return temperature sensor 33 detects the return temperature Pt3 of the brine, and the flow rate sensor 34 detects the actual circulating flow rate F of the brine (S211).

The controller 30 sets the work set temperature SV
(R) and the deviation dt between the work temperature Pt2 and dt = SV (R)-
Pt2 is calculated (S212), and the brine supply set temperature S is calculated.
V (S) is calculated as SV (S) = Pt1 + dt = Pt1 + (S
V (R) -Pt2) (S213).

The controller 30 outputs a control output value based on the determined brine supply set temperature SV (S) to the electric heater 51, and controls the operation of the electric heater 51 on and off. When lowering the brine supply temperature Pt1,
The controller 30 opens and closes the solenoid valve 62 and supplies a necessary amount of brine through the pipe 61 to the low-temperature brine circulation system 4.
From 0, it is fed into the hot brine circulation system 50.

Next, the controller 30 determines whether or not the work temperature Pt2 has reached the work set temperature SV (R) (S214). Specifically, SV (R) -Pt
It is determined whether the absolute value of 2 is smaller than the allowable error α. The allowable error α is, for example, 0.1 to 0.2 ° C.

If not reached (S214: N
O), the process returns to step S211 and the controller 3
0 repeats the above control (S211 to S214:
NO).

The work temperature Pt2 is equal to the work set temperature SV.
If it is adjusted to (R) (S214: YE
S), the brine supply set temperature SV (S) at that time is
The brine supply set temperature SV (S) [0] when the process side heat load is 0% is determined (S215), and the RAM 3
7 is stored.

Next, the controller 30 sets the time constant T
1. It is determined whether or not T2 has been recognized (S21).
6). If the time constants T1 and T2 have already been manually input, it is determined that the time constants T1 and T2 have been recognized (S216: YES), and the process proceeds to step S218. On the other hand, when the time constants T1 and T2 are not manually input, it is determined that the time constants T1 and T2 have not been recognized (S216: NO), and the automatic recognition processing of the time constants T1 and T2 (S217) is performed. You. The automatic recognition processing of the time constants T1 and T2 (S217) will be described later.

As shown in FIG. 10, at time t0 after the brine supply set temperature SV (S) [0] is determined,
The process-side electric heater 26 is turned on to determine the brine supply set temperature SV (S) [100] when the process-side heat load is 100%.

The controller 30 detects that the thermal load has been applied by detecting the ON signal from the power supply 27 (S2).
18: YES), and proceeds to step S221 in FIG.

Referring to FIG. 6, steps S221 to S2
In 24, the same processing as in steps S211 to S214 is performed, and the work temperature Pt2 is changed to the work set temperature SV (R).
(S224: YES), the brine supply set temperature SV (S) at that time is set to the brine supply set temperature SV when the process side heat load is 100%.
(S) [100] is determined (S225), and the RAM 37 is determined.
Is stored.

Next, the controller 30 sets the SV (S)
The difference between [0] and SV (S) [100] is defined as ΔSV (S)
(S226) and stored in the RAM 37.

The process-side electric heater 26 is turned off (S
227: YES), the operation switch is turned off (S2
28: YES), the sampling mode operation ends, and the process returns to step S200 in FIG.

(Automatic recognition of time constants T1 and T2 (S2
17)) As shown in FIG. 7, the brine supply set temperature SV (S) [0] determined in step S215 is set to the brine supply set temperature SV (S) (S231), and the brine supply temperature Pt1 is kept constant. In this state, the process-side electric heater 26 is turned on (S232). After changing the heat load on the process side from off to on in this manner, the work temperature Pt2 is sampled at predetermined time intervals, and FIG.
The acquisition of the first temperature change curve L1 as shown in FIG. The work temperature Pt2 rises over time.

When it is determined that the amount of change in the work temperature Pt2 has become equal to or less than a predetermined value and the work temperature Pt2 has converged (S233: YES), the obtained first temperature change curve L is obtained.
1, a time constant T1 for lowering the brine supply temperature is calculated and determined (S234).

Thereafter, the process-side electric heater 26 is turned off while the brine supply temperature Pt1 is kept constant (S235). Even after the process-side heat load is changed from ON to OFF, the work temperature Pt2 is continuously sampled at predetermined time intervals, and the acquisition of the first temperature change curve L1 as shown in FIG. 3 is continued. . Work temperature P
t2 falls with the passage of time.

The work temperature Pt2 is equal to the work set temperature SV.
(S236: YE)
S) Based on the acquired first temperature change curve L1, a time constant T2 for increasing the brine supply temperature is calculated and determined (S237).

The data on the acquired first temperature change curve L1 and the automatically acquired time constants T1 and T2 are stored in the RAM 37.
Is stored.

(Work Temperature Control Mode) Referring to FIG. 4, when the work temperature control mode is selected, controller 30 turns on the operation switch (S301:
YES), the first pump 42 and the second pump 52 are operated similarly to the processing of steps S202 to S204 (S
302), the refrigerator 43 is operated (S303), and the operation of the electric heater 51 is turned on (S304).

While the process-side electric heater 26 remains off, the controller 30 proceeds to steps S 211 to S 211 described above.
The same processing as in S214 is performed to adjust the work temperature Pt2 to the work set temperature SV (R). That is, the controller 30 sets the brine supply temperature SV (S) based on the brine supply temperature Pt1, the workpiece temperature Pt2, and the workpiece temperature SV (R) until the absolute value of SV (R) -Pt2 becomes smaller than the allowable error α. The work temperature Pt2 is adjusted to the work set temperature SV (R) by repeating the determination of the temperature, the ON / OFF control of the operation of the electric heater 51 based on the determined brine supply set temperature SV (S), and the opening / closing control of the solenoid valve 62. .

After shifting to the stable state, the controller 30 constantly monitors whether or not the heat load on the work W by the external heat source 25 has been changed.

When the process-side electric heater 26 is turned on at time t0 in FIG.
Detects that the application of the thermal load has started by detecting the ON signal from the power supply 27 (S311: YE in FIG. 8).
S).

When the application of the heat load to the work W is started, the heat storage in the work W starts. Therefore, it is necessary to lower the brine supply temperature accordingly. Therefore, the controller 30 determines whether SV (S) [0], SV (S) [10
0], time constant T1 when decreasing the brine supply temperature
Then, the brine supply set temperature SV (S) is calculated (S
312). Specifically, it is calculated by the following equation.

SV (S) = SV (R) −ΔSV (S) ×
{1-e ^{(-t / T1)} } Here, SV (R): work set temperature ΔSV (S): SV (S) [0] -SV (S) [10
0] t: time T1: time constant when decreasing the brine supply temperature.

The controller 30 is connected to the power supply 2 on the process side.
7, the amount of heat actually applied to the workpiece W is detected. Then, when the amount of heat of the heat load when acquiring the first temperature change curve L1 is different from the detected amount of heat, the controller 30 corrects the first temperature change curve L1 according to the difference in the amount of heat. And SV
(S) The above calculation is performed after correcting [100].

The calculated brine supply set temperature SV
(S) is a virtual second temperature change curve L2 of the work W that is line-symmetric with respect to the first temperature change curve L1 and the work set temperature SV (R), as described in the basic operation principle. The temperature is based on the brine supply temperature change curve L3 that realizes

Next, the controller 30 detects the brine supply temperature Pt1, the workpiece temperature Pt2, the brine return temperature Pt3, and the actual circulation flow rate F of the brine (S31).
3) It is determined whether or not the work temperature Pt2 has reached the work set temperature SV (R) (S314). In particular,
It is determined whether or not the absolute value of SV (R) -Pt2 is smaller than the allowable error α.

The work temperature Pt2 is equal to the work set temperature SV.
If it is adjusted to (R) (S314: YE
S), the brine supply set temperature SV (S) is not corrected,
The brine supply set temperature SV (S) at that time is continuously used (S315). The controller 30 operates until the process-side electric heater 26 is turned off (S319: YE
S), the above control is repeated (S312 to S315,
(S319: NO), the on / off control of the operation of the electric heater 51 and the opening / closing control of the electromagnetic valve 62 based on the brine supply set temperature SV (S) are continued.

If it has not reached (S314: N
O), the brine supply set temperature SV (S) is corrected.
That is, the controller 30 sets the work set temperature SV
(R) and the deviation dt between the work temperature Pt2 and dt = SV (R)-
Pt2 is calculated (S316), and SV (S) [100] +
dt is set to the new SV (S) [100] (S31
7), ΔSV (S) + dt is set to a new ΔSV (S) (S318).

The controller 30 sets a new Δ until the process-side electric heater 26 is turned off (S319: YES).
The above control is repeated while recalculating the brine supply set temperature SV (S) using the SV (S) (S312 to S3).
314: NO, S316 to S319: NO), the on / off control of the operation of the electric heater 51 based on the brine supply set temperature SV (S) and the open / close control of the solenoid valve 62 are continued.

When the process-side electric heater 26 is turned off at time t1 in FIG.
Detects that the application of the thermal load has been stopped by detecting the off signal from the power supply 27 (S319: YES). The process proceeds to step S321 in FIG.

When the application of the heat load to the work W is stopped, heat radiation from the work W starts, so that it is necessary to increase the brine supply temperature accordingly. Therefore, the controller 30 determines whether SV (S) [0], SV (S) [10
0], time constant T2 when increasing the brine supply temperature
Then, the brine supply set temperature SV (S) is calculated (S
321). Specifically, it is calculated by the following equation.

SV (S) = (SV (R) -ΔSV
(S)) + ΔSV (S) × {1-e ^{(−t / T2)} } where SV (R): work set temperature ΔSV (S): SV (S) [0] −SV (S) [10
0] t: time T2: time constant when increasing the brine supply temperature.

Calculated brine supply set temperature SV
(S) is a virtual second temperature change curve L2 of the work W that is line-symmetric with respect to the first temperature change curve L1 and the work set temperature SV (R), as described in the basic operation principle. The temperature is based on the brine supply temperature change curve L3 that realizes

Next, the controller 30 detects the brine supply temperature Pt1, the workpiece temperature Pt2, the brine return temperature Pt3, and the actual circulation flow rate F of the brine (S32).
2) It is determined whether or not the work temperature Pt2 has reached the work set temperature SV (R) (S323). In particular,
It is determined whether or not the absolute value of SV (R) -Pt2 is smaller than the allowable error α.

The work temperature Pt2 is equal to the work set temperature SV.
If it is adjusted to (R) (S323: YE
S), the brine supply set temperature SV (S) is not corrected,
The brine supply set temperature SV (S) at that time is continuously used (S324). While the operation is continued (S328: NO), the controller 30 keeps turning on the process-side electric heater 26 (S329: YES).
The above control is repeated (S321 to S324, S32
8: NO, S329: NO), brine supply set temperature S
On / off control of the operation of the electric heater 51 and opening / closing control of the solenoid valve 62 based on V (S) are continued.

If it has not reached (S323: N
O), the brine supply set temperature SV (S) is corrected.
That is, the controller 30 sets the work set temperature SV
(R) and the deviation dt between the work temperature Pt2 and dt = SV (R)-
Pt2 is calculated (S325), and SV (S) [0] + dt
Is set to a new SV (S) [0] (S326), and Δ
SV (S) + dt is set to a new ΔSV (S) (S327).

While the operation is being continued (S328: NO), the controller 30 operates the process-side electric heater 26.
Is turned on (S329: YES), a new ΔSV
The above control is repeated while recalculating the brine supply set temperature SV (S) using (S) (S321 to S32).
3: NO, S325 to S328: NO, S329: N
O), ON / OFF control of the operation of the electric heater 51 and opening / closing control of the electromagnetic valve 62 based on the brine supply set temperature SV (S) are continued.

While the operation is continued (S328: N
O), when the process-side electric heater 26 is turned on (S3)
29: YES), the process proceeds to step S312 in FIG. 8, and the above-described control when the application of the heat load to the work W is started.

When the operation switch is turned off (S3
28: YES), end the work temperature control mode operation,
The process returns to step S200 in FIG.

According to the brine supply apparatus 10 of the present embodiment, the temperature rise characteristic of the work W when the process-side electric heater 26 is turned on from off and the temperature rise characteristic when the process-side electric heater 26 is turned off from on with the brine supply temperature kept constant. Since the temperature lowering characteristic of the work W is stored, there is no delay in the timing at which the heat load applied from the process-side electric heater 26 to the work W is changed, that is, the start of the application of the heat load and the application of the heat load. At the same time, the brine supply set temperature SV (S) that matches the change in the heat load can be calculated. In this way, before the temperature change accompanying the change in the heat load applied to the work W appears on the work W, the brine supply set temperature SV (S) is set predictively, so that the work temperature Pt2 and the work set temperature SV are set.
The difference from (R) does not become as large as in feedback control such as PID control. As a result, even when a large change in heat load is made in a short time, the temperature of the work W can be controlled to be constant with a small amount of hunting as compared with the feedback control, and the work W is set at the work set temperature SV (R).
The stability of the control for adjusting the temperature is significantly increased.

Further, a small deviation between the work temperature Pt2 and the work set temperature SV (R) is fed back,
When the difference between the two temperatures is equal to or larger than the allowable error α, the brine supply set temperature SV (S) is corrected.
Temperature control can be performed with high accuracy.

Therefore, as shown in FIG. 11B, the brine supply device 10 of the present embodiment can realize a high-speed follow-up property to the temperature change of the work W to which the applied heat load is changed, and the work temperature Pt2 Can be further stabilized. For example, the temperature of the work W could be controlled with high accuracy of a temperature change of ± 0.5 ° C. The change of the heat load, that is, the on / off of the process-side electric heater 26 is switched, for example, every 5 minutes.
The heat amount of the heat load according to No. 6 is, for example, 500 W.

[Modification] In the above-described embodiment, the work temperature Pt2 is detected by measuring the temperature of the plate 24 on which the work W is mounted by the work temperature sensor 32, but the current temperature of the work W is detected. Is not limited to this case. For example, the current temperature of the work W itself may be detected by bringing the work temperature sensor 32 into direct contact with the work W. Further, the current temperature of the workpiece W may be detected by measuring the temperature of the brine that contacts the workpiece W.

[0099]

As described above, according to the first to third aspects of the present invention, it is possible to predict the supply temperature of the heat medium before the temperature change accompanying the change of the heat load appears on the work. To adjust, the difference between the work temperature and the work set temperature is P
It does not increase as much as in feedback control such as ID control. As a result, even when a large heat load is changed in a short time, the temperature of the work can be controlled to be constant with a small hunting compared to the feedback control, and the stability of the control for adjusting the work to the set temperature is improved. It becomes possible.

According to the fourth aspect of the present invention, the unevenness in temperature of the heat medium supplied to the work is removed by the buffer tank, and the temperature of the work can be controlled to be more constant.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of a brine supply device to which a work temperature control device of the present invention is applied.

FIG. 2 is a block diagram illustrating a configuration of a controller that controls the operation of the brine supply device.

FIG. 3 is an explanatory diagram for explaining a basic operation principle of the work temperature control device according to the present invention.

FIG. 4 is a flowchart illustrating the operation of the embodiment.

FIG. 5 is a flowchart illustrating the operation of the embodiment.

FIG. 6 is a flowchart illustrating the operation of the embodiment.

FIG. 7 is a flowchart illustrating the operation of the embodiment.

FIG. 8 is a flowchart illustrating the operation of the embodiment.

FIG. 9 is a flowchart illustrating the operation of the embodiment.

FIG. 10 is a diagram conceptually showing a change example of a work temperature and a brine supply temperature in a sampling mode.

FIG. 11A is a conceptual diagram showing an example of a change in the temperature of a work when a heat load applied to the work from an external heat source is changed while a brine supply temperature supplied to the work is kept constant. FIG. 11B is a diagram conceptually showing a change example of the work temperature and the brine supply temperature in the work temperature control mode.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Blind supply apparatus (work temperature control apparatus) 20 ... Load circuit 25 ... Process side heat source (external heat source) 26 ... Process side electric heater 27 ... Power supply 30 ... Controller 31 ... Supply temperature sensor 32 ... Work temperature sensor 39 ... CPU (acquisition unit, calculation unit, control unit) 43 refrigerator (adjustment unit, cooling unit) 51 electric heater (adjustment unit, heating unit) 57 buffer tank 62 electromagnetic valve (adjustment unit, valve member) W ... Work as constant temperature target SV (R) Work set temperature Pt1 Brine supply temperature (supply temperature of heat medium) L1 First temperature change curve L2 Second temperature change curve L3 Brine supply temperature change curve ( Heat medium supply temperature change curve)

 ──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Masahiro Kawai 496-8 Higashi-Uchino, Kawaguchi City, Saitama F-term (Reference) 5F045 EC07 EJ03 EJ09 EJ10 EK07 EK21 GB05 GB17 5H323 AA05 BB04 CA06 CB02 CB23 CB35 CB45 DA04 DB13 DB15 EE02 FF01 HH02 JJ06 KK05 LL12 MM06 NN03

Claims (4)

[Claims] The temperature of a work (W) as a constant temperature object to which a heat load applied from an external heat source (25) is changed is set to a predetermined work set temperature (SV) by a heat medium adjusted to a predetermined temperature. (R)) the work (W) when the heat load is changed while keeping the supply temperature (Pt1) of the heat medium supplied to the work (W) constant. An acquisition unit (39) for acquiring the first temperature change curve (L1) in advance, and a work that is line-symmetric with respect to the first temperature change curve (L1) and the work set temperature (SV (R)). A calculation unit (39) that calculates a supply temperature change curve (L3) of the heat medium that realizes the virtual second temperature change curve (L2), and an adjustment that adjusts the supply temperature (Pt1) of the heat medium. (43, 51, 62) and the outside When the heat load applied from the source (25) to the work (W) is changed, the supply temperature (Pt1) of the heat medium is calculated based on the supply temperature change curve (L3) calculated by the calculation means. And a control unit (39) for controlling the adjusting unit so that the temperature of the workpiece changes. 2. The adjusting unit includes a cooling unit (43) for cooling a heat medium, and a valve for mixing a part of the heat medium cooled by the cooling unit with a heat medium supplied to the work (W). The control section (39) controls the operation of the valve member (62), and changes the supply temperature (Pt1) of the heat medium based on the supply temperature change curve (L3). The work temperature control device according to claim 1, wherein 3. The adjusting unit includes a heating unit (51) for heating a heating medium, the control unit (39) controls the operation of the heating unit (51), and controls the supply temperature change curve (L3). The work temperature control device according to claim 1 or 2, wherein the supply temperature (Pt1) of the heat medium is changed based on (3). 4. The valve member (62) and the work (W).
The work temperature control device according to claim 2, wherein a buffer tank (57) for removing temperature unevenness of the heat medium supplied to the work (W) is disposed between the work tank (W) and the work tank (W).