JP2002022868A - Supporting structure of movable table of x-y stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize highly accurate high speed positioning control by positioning/supporting a movable table surely in the X direction and Y direction through a simple arrangement. SOLUTION: In the supporting structure of a table 2 movable in X-Y plane, an intermediate frame (intermediate member) 2 is disposed between a base (fixed base) 1 and an outer frame (movable table) 3, a first resilient hinge 5 allowing relative displacement in the X direction is disposed between the base 1 and the intermediate frame 2, and a second resilient hinge 6 allowing relative displacement in the Y direction is disposed between the intermediate frame 2 and the outer frame 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for supporting a movable table of an XY stage for supporting a movable table with respect to a fixed base in a predetermined XY plane such that the movable table can be slightly displaced.

[0002]

2. Description of the Related Art Conventionally, this type of XY stage apparatus has
It is widely used in many industrial fields such as electronic component mounting devices (chip mounters), machine tools, and control mechanisms for optical systems (such as lenses and mirrors).

FIG. 7 shows a conventional XY stage apparatus 900.
Is shown. This XY stage device 900 has a Y-axis guide mechanism 906 having a movable table 907 mounted on an X-axis table (not shown) in the X-axis guide mechanism 903. The X-axis guide mechanism 903 includes an X-axis ball screw 902 arranged in the X-axis direction,
And an X-axis servo motor 901 for driving the rotation of the motor 2. By appropriately controlling the X-axis servo motor 901, the entire Y-axis guide mechanism 906 is moved and positioned in the X direction. The Y-axis guide mechanism 906 includes a Y-axis ball screw 905 arranged in the Y-axis direction and the Y-axis ball screw 9.
And a Y-axis servomotor 904 for driving the rotary table 05. The movable table 907 is controlled by the Y-axis guide mechanism 90 by appropriately controlling the Y-axis servomotor 904.
6 is moved and positioned in the Y direction. Accordingly, by controlling the X-axis and Y-axis servomotors 901 and 904, the movable table 907 is positioned at any position in the X and Y directions.

[0004] X-axis and Y-axis servomotors 901, 904
In the control method, for example, the movement amount of the movable table 907 is predicted from the rotation amounts of the X-axis and Y-axis ball screws 902 and 905 measured by the encoder, and the X-axis and Y-axis servo motors 901 and 904 are predicted from the predicted values. Or a movable table 90
7 is directly measured by a linear gauge or the like, and a feedback control of the X-axis and Y-axis servomotors 901 and 904 is performed based on the measured value.

[0005]

In recent years, demands for “high-speed control”, “precision control”, and the like of the movable table 907 have been increasing with the advancement of technology. When high-speed control is to be achieved, the driving method using a shaft mechanism such as the ball screws 902 and 905 increases vibration at the time of switching between normal rotation and reverse rotation and at the time of rapid acceleration / deceleration. There were certain limits. In order to achieve precision control, the semi-closed loop control method does not consider bending of each of the ball screws 902 and 905, backlash, and the like, and as a result, it was difficult to precisely control the movable table 907.

Further, according to the full closed loop control method, more precise control is possible. However, when the control speed increases, the vibration of each of the ball screws 902 and 905 is transmitted to the movable table 907 to measure the position of the movable table 7. The signal became unstable. As a result, there has been a problem that the response of the feedback control cannot be improved due to the unstable signal.

[0007] These facts mean that the conventional movable table support structure has a limit in improving the driving response or positioning accuracy of the movable table by feedback control.

Further, the XY stage device 900 has a two-stage stacking structure in which the Y-axis guide mechanism 906 is installed on the X-axis guide mechanism 903. As a result, the overturning moment tends to be generated, and as a result, the movable table 7 tends to oscillate during sudden acceleration / deceleration control, and the positioning error tends to increase. In the case of such a two-stage stacking structure, for the X-axis guide mechanism 903 located at the lowest level, all of the Y-axis guide mechanisms 906 become moving loads (inertial loads).
Since the moving load of the shaft guide mechanism 906 is only the movable table 907, there is a difference in responsiveness between the control in the X direction and the control in the Y direction. When the movable table 907 is simultaneously driven in the X-axis and the Y-axis as in the case of a moving operation, there is a problem that accuracy is deteriorated.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide a structure for supporting a movable table of an XY stage which has a compact structure and can be controlled at high speed and with high accuracy. .

[0010]

SUMMARY OF THE INVENTION The present invention relates to a movable table support structure of an XY stage for supporting a movable table with respect to a fixed base in a predetermined XY plane such that the movable table can be slightly displaced. A member that is flexible only in the X direction, has rigid characteristics in the Y and Z directions, and is connected to both ends of itself by being arranged along the Y direction in the XY plane. A first elastic hinge allowing only relative displacement in the X direction between the first elastic hinge and the first elastic hinge, which is flexible only in the Y direction, has rigidity in the X direction and the Z direction, and has an X direction in the XY plane. And a plurality of second elastic hinges that allow only relative displacement in the Y direction between members connected to both ends of the movable table, and the fixed base with respect to the movable table. When placed at a position that includes the XY plane An intermediate member is interposed in the XY plane between the fixed base and the movable table, and the movable table is capable of being slightly displaced with respect to the fixed base in the XY plane and in the Z direction. The above object is achieved by connecting the fixed base, the intermediate member, and the movable table by using the first and second elastic hinges in combination so as to be held in a predetermined position. Is what you do.

The inventor of the present invention has adopted a structure having an "elastic hinge" as a support structure of the movable table of the XY stage, which holds the movable table in a movable state in the XY plane.

The basic structure of the elastic hinge itself is well known and generally has the characteristic of being flexible only in one specific direction and being rigid in the other direction, and the flexible direction between members connected to both ends thereof. Has a function to allow only relative displacement in. Therefore, now, for example, only in the X direction,
It has rigid characteristics in the Y direction and the Z direction,
Considering a first elastic hinge which is arranged along a Y direction in a plane to allow only a relative displacement in the X direction between members connected to both ends of the first elastic hinge, an elastic deformation of the first elastic hinge is considered. Thereby, the movable member can be relatively moved in the X direction with respect to the fixed member. On the other hand, the first elastic hinge hardly allows relative movement in the Y direction. That is, the movable member can be "guided" in the X direction.

[0013] Similarly, only soft in the Y direction, X
It has rigidity in the direction and the Z direction, and is arranged along the X direction in the XY plane, so that only relative displacement in the Y direction between members connected to both ends of the device is allowed. Considering the second elastic hinge (the specific structure can be the same as that of the first elastic hinge, only the arrangement direction is different), the movable member is moved by the second elastic hinge.
You can "guide" in the direction.

However, if the fixed base and the movable table are simply connected via the first and second elastic hinges, the individual "guiding" functions are diminished, and the movable table is moved to a predetermined X position. In practice, it is very difficult to accurately determine the coordinates and the Y coordinate position. Therefore, the present inventor has proposed a structure in which an “intermediate member” is interposed between the fixed base and the movable table, and has solved this problem.

When an intermediate member is interposed between the fixed base on the XY plane and the movable table, and the three members are connected via first and second elastic hinges, the intermediate member becomes first and second elastic hinges. Since the fixed state is maintained in the rigid direction of the second elastic hinge, the movable table is linearly "guided" and moved in the X and Y directions with respect to the fixed base. And backlash, slip,
Since there is essentially no rolling or the like, extremely responsive and stable control becomes possible.

Conventionally, when micro-precision control is performed with a ball screw, a bearing or the like interposed, stress is repeatedly applied to a local portion (specific portion) of the ball screw or the like, causing local wear. Although there is a problem that the service life is shortened, the elastic hinge does not cause friction, rolling, or the like in its structure, so that stable control characteristics can be exhibited for a long time.

The number and shape of the intermediate member and the first and second elastic hinges are not particularly limited. This may be appropriately arranged as needed. For example, the intermediate member is
The first elastic hinge is formed in a rectangular ring shape having two X-direction extending portions extending in the X direction and two Y-direction extending portions extending in the Y direction. Y is provided between the two X-direction extending portions of the intermediate member and the fixed base.
By disposing a plurality of fixing hinges in the X direction, the relative displacement of the fixed base and the intermediate member in the X direction is allowed. By arranging a plurality of movable members in the X direction between the movable table and the movable table, it is possible to adopt a configuration in which relative displacement in the Y direction between the intermediate member and the movable table is allowed (claim 2).

This structure is simple in design because of its simple structure, and is provided for each of the four extending portions (that is,
Since the elastic hinges are provided on each side of the ring), it is easy to arrange the elastic hinges line-symmetrically in the X direction and the Y direction, and as a result, the intermediate member itself is rotated around the Z direction. The occurrence of a rotating phenomenon can be suppressed.
Therefore, highly accurate positioning becomes possible.

Further, by forming the intermediate member in a ring shape as described above, the rigidity of the intermediate member itself is increased, and the elastic deformation of the intermediate member itself is suppressed, and the positioning accuracy is improved.

However, the configuration of the intermediate member is not particularly limited to the above configuration in the present invention. In addition to the above-described configuration in which the intermediate member is formed in a square ring shape, for example, the intermediate member is divided into a plurality of intermediate members including first and second intermediate members, and the fixed base and the first intermediate member are separated. The first elastic hinge is disposed between the first elastic hinge and a member;
By disposing the second elastic hinge between the first intermediate member and the movable table, relative displacement of the movable table with respect to the fixed base in the X-Y direction is allowed. The second elastic hinge is disposed between the movable member and the intermediate member, and the first elastic hinge is disposed between the second intermediate member and the movable table. The displacement in the direction may be allowed (claim 3).

In this case, the divided first and second
The intermediate member, including the first elastic hinge and the second elastic hinge connected to the first and second intermediate members, may be arranged so as to be point-symmetric with respect to the center of the movable table. 4).

As a specific example of this configuration, for example, considering the case where the above-mentioned ring-shaped structure is employed as the structure of the intermediate member, the inertial load in one direction is “movable table + ring-shaped intermediate member”. On the other hand, since the inertia load on the other direction is only the “movable table”, the X (although the influence is much smaller than the structure using the conventional guide mechanism)
It is inevitable that the inertial loads in the direction and the Y direction are slightly different.

However, for example, by dividing the intermediate member and arranging the first elastic hinge and the second elastic hinge so as to be point-symmetric with respect to the center of the movable table, inertial loads in the X and Y directions can be reduced. It is possible to make it uniform, and it is possible to perform bidirectionally balanced positioning control.

That is, in the configuration in which the intermediate member is divided,
When the movable table moves relative to the fixed base in the X direction, elastic deformation in the X direction of the first elastic hinge of each of the first and second intermediate members contributes, and the movable table moves to the fixed base. When moving relatively in the Y direction, the first and second
The elastic deformation in the Y direction of each second elastic hinge of the intermediate member contributes. Therefore, the inertial load when driving the movable table in the X direction (if the members placed on the table are ignored) is substantially “movable table + first intermediate member”, and
In addition, the inertial load when driving in the Y direction is substantially “movable table + second intermediate member”. As a result, for example, if the numbers of the first intermediate member and the second intermediate member are made equal or the mutual mass is made equal, the inertial loads in the X direction and the Y direction can be made uniform. This enables balanced positioning control.

This point-symmetric support cannot be realized with a structure having only one intermediate member. The intermediate member is divided into a plurality of intermediate members, and the first and the second members are fixed between the fixed base and the intermediate member. This can be realized for the first time as a configuration in which both the second elastic hinge is present and both the first and second elastic hinges are present between the intermediate member and the movable table.

[0026]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a plan view showing a support structure of a movable stage of an XY stage having two degrees of freedom which can be finely driven in X and Y directions orthogonal to each other. Here, for the sake of convenience, the left-right direction of the drawing is defined as an X direction, the up-down direction is defined as a Y direction, and the direction perpendicular to the drawing is defined as a Z direction.

In FIG. 1, 1 is a rectangular (square) block-shaped base (fixed base), and 2 is a rectangular frame-shaped (square ring-shaped) intermediate frame (outside the rectangular block-shaped base 1). The intermediate member 3 is a rectangular frame-shaped (square ring-shaped) outer frame (movable table) arranged outside the intermediate frame 2. Here, the base 1 is fixed, and the outer frame 3 is configured as a movable stage (movable table) that can be finely driven. However, this is reversed, the outer frame is fixed, and the base is movable. It may be configured as a table.

The base 1, intermediate frame 2 and outer frame 3 formed in these rectangular shapes respectively have two opposing sides (extending portions in the X direction) 1x, 1x, 2x, 2x, 3x, 3x.
x is arranged in parallel to the X direction, the remaining two opposing sides (extending portions in the Y direction) 1y, 1y, 2y, 2y, 3y, 3y are arranged in parallel to the Y direction, and then nested in the XY plane. They are arranged in such a way that they do not interfere with each other.

The intermediate frame 2 is connected to the base 1 via a first elastic hinge 5 that can be bent and deformed only in the X direction.
The outer frame 3 is connected to the intermediate frame 2 via a second elastic hinge 6 that can be bent and deformed only in the Y direction.

First elastic hinge 5 allowing deformation in X direction
Is flexible only in the X direction, has rigid properties in the Y and Z directions, and is connected to both ends of itself by being arranged along the Y direction in the XY plane. X between members
Only relative displacement in the direction is allowed. The specific structure will be described later in detail. This first elastic hinge 5 is
A pair (a total of four) symmetrically with a space between the side 1x along the direction and the side 2x along the X direction of the intermediate frame 2
Arranged, the direction of length is orthogonal to the X direction (Y direction)
, The base 1 and the intermediate frame 2 are connected in a bridge shape.

Second elastic hinge 6 allowing deformation in the Y direction
Is flexible only in the Y direction, has rigidity in the X and Z directions, and is connected to both ends of itself by being arranged along the X direction in the XY plane. Only the relative displacement in the Y direction between the members is allowed. The second elastic hinge 6 is connected to a side 2y of the intermediate frame 2 along the Y direction.
And a side 3y along the Y direction of the outer frame 3 are arranged symmetrically at a distance (four in total), with the length direction oriented in the direction (X direction) orthogonal to the Y direction. , The intermediate frame 2 and the outer frame 3 are connected in a bridge shape.

The first and second elastic hinges 5 and 6 are basically all formed in the same structure, and differ only in the arrangement position and direction.

As shown in the perspective view of FIG. 2, each of the first and second elastic hinges 5, 6 is provided between two members (between the base 1 and the intermediate frame 2, or between the intermediate frame 2 and the outer frame 3). The notch 8 is formed on the outer peripheral surface of the bridge member 7 at two locations separated in the length direction of the bridge member 7 connecting the bridge member 7 with each other, thereby forming a thinned portion 9 which is easily elastically bent and deformed.
The bending deformation of the thinned portion 9 allows the relative displacement between the two members to be allowed.

In this case, the bridge member 7 having a rectangular cross section is
Forming a symmetrical semicircular notch 8 on two outer surfaces facing the direction in which bending deformation is to be performed (the X direction for the first elastic hinge 5 and the Y direction for the second elastic hinge 6). Thus, local thinning is achieved (that is, the thinned portion 9 is created), and the minimum cross-sectional area portion is set as a bending point so that bending can be easily performed.

FIG. 3 shows the sectional shape of the minimum sectional area of the elastic hinges 5 and 6.

In the cross section S of the minimum cross section, the dimension b in the horizontal direction (X direction or Y direction) is shorter than the dimension a in the vertical direction (Z direction) corresponding to the thickness of the bridge member 7. It has a rectangular cross section, so that the thinned portion 9 hardly bends in the vertical direction (Z direction), but in the horizontal direction (X
(Direction or Y direction).

The outer frame 3 is driven in the X-direction and / or the Y-direction by driving means (not shown) (for example, a linear motor or a piezoelectric element) appropriately selected according to the purpose. In the present invention, the driving unit is not particularly limited.

Next, the operation will be described.

When the outer frame 3 is driven in the X direction by the driving means, the outer frame 3 and the intermediate frame 2 connected via the second elastic hinge 6 are integrally formed in the X direction.
Driven in the axial direction. That is, since the second elastic hinge 6 functions as a “rigid body” in the X direction, the movement of the outer frame 3 in the X direction is directly transmitted as the movement of the intermediate frame 3 as it is. This movement is absorbed by the elastic deformation of the thinned portion 9 of the first elastic hinge 5. That is, the first elastic hinge 5 allows the relative displacement of the intermediate frame 2 with respect to the base 1 in the X direction.

On the other hand, when the outer frame 3 is driven in the Y direction by the driving means, the second elastic hinge 6 allows relative displacement of the intermediate frame 2 in the Y direction. The intermediate frame 2 and the base 1 are in a state where relative displacement is not allowed in the Y direction (because they are connected via the first elastic hinge 5), and therefore, the outer frame 3 is moved in the Y direction. Even if driven, the intermediate frame 2 maintains a fixed state.

In any case, the first and second elastic hinges 5 and 6 move in the Z direction (the direction perpendicular to the XY plane) and θx
The (X-axis rotation) and θy (Y-axis rotation) directions function as “rigid bodies”. Accordingly, the intermediate frame 2 is supported by the base 1 in a cantilever state via the first elastic hinge 5,
In addition, since the outer frame 3 is supported by the intermediate frame 2 in a cantilever state via the second elastic hinge 6, the outer frame 3 can be mounted in the X-direction without any Z-direction support means.
It will be held in the Y plane. The first and second elastic hinges 5 and 6 are arranged in parallel with a certain interval. Therefore, θz (Z-axis rotation) can also function as a “rigid body”, and the outer frame 3
Can be moved only in the X-Y direction without rotating θz.

As a result, the intermediate frame 2 is supported by the first elastic hinge 5 so as to be displaceable in the X-axis direction with respect to the base 1, and the outer frame 3 is supported by the second elastic hinge 6. Is supported so as to be displaceable in the Y-axis direction with respect to the outer frame 3.
The base 1 can be displaced independently in both the X and Y directions (without interfering with each other).

Therefore, by providing appropriate driving means such as a linear motor for driving the outer frame 3 in the X and Y directions, the outer frame 3 can be minutely driven in an arbitrary direction on the XY plane. Can be.

In the first embodiment, the base 1,
Although the intermediate frame 2 is formed in a perfect square shape, in the actual XY stage device, the shape of the base 1, the intermediate frame 2, or the outer frame 3 is particularly changed in relation to the arrangement of the driving means. It may not be possible to form a perfect square shape. In that case, it is of course possible to appropriately change these shapes.

FIG. 4 shows a modification.

This modification (second embodiment) is similar to the base 1
01, or the basic configuration itself is the same as that of the first embodiment, except that the shape of the intermediate frame 102 is not a perfect square. Therefore, parts having the same or similar functions are denoted by the same reference numerals in the lower two digits as in the first embodiment, and redundant description is omitted.

Next, a third embodiment of the present invention will be described with reference to FIG.

In the third embodiment, the intermediate member is divided into a total of four first and second intermediate members, and the divided first and second intermediate members are separated by a first elastic member with respect to the center of the movable table. It is arranged so as to be point symmetrical including the hinge and the second elastic hinge.

In the third embodiment, the X on the paper is
The direction and the Y direction are deliberately set to be opposite to those of the previous embodiments. Thus, in the X direction, Y
The directions are merely relative, and may be defined in any direction in an actual device. Once defined in any direction, the relationship with other components is considered according to the defined direction. It is good to do.

The intermediate member 202 is divided into a pair of L-shaped first intermediate members 202A and 202B and second intermediate members 202C and 202D. Here, a first elastic hinge 205 allowing relative displacement in the X direction is provided between itself and a base (fixed base) 201, and a first elastic hinge 205 is provided between itself and an outer frame (movable table) 203 in the Y direction. An intermediate member having the second elastic hinge 206 allowing relative displacement is defined as a first intermediate member. In addition, a second elastic hinge 206 that allows relative displacement in the Y direction is provided between itself and the base (fixed base) 201, and the second elastic hinge 206 is disposed between itself and the outer frame (movable table) 203 in the X direction. An intermediate member having the first elastic hinge 205 that allows displacement is defined as a second intermediate member.

That is, between the base (fixed base) 201 and one side 202Ax, 202Bx of the first intermediate members 202A, 202B along the X direction of the L-shape, a first displacement allowing relative displacement in the X direction. A pair (plural) elastic hinges 205
And one side 202Ay, 202B of the first intermediate member 202A, 202B along the Y direction of the L-shape.
A pair (two or more) of second elastic hinges 206 that allow relative displacement in the Y direction are arranged between y and the outer frame 203. As a result, relative displacement of the outer frame 203 with respect to the base 201 in the XY direction is allowed.

On the other hand, the base 201 and the second intermediate member 202
C, 202D, one side 202C of the L-shape along the Y direction
A pair (a plurality) of second elastic hinges 206 that allow relative displacement in the Y direction are arranged between the pair of y and 202Dy.
One side 202Cx, 202Dx of the second intermediate member 202C, 202D along the X direction of the L-shape and the outer frame 20
By disposing a pair (plurality) of first elastic hinges 205 that allow relative displacement in the X direction between the outer frame 3 and the base frame 201, displacement in the XY direction with respect to the base 201 of the outer frame 203 is allowed.

The first intermediate members 202A, 202B and the second
Although the intermediate members 202C and 202D have the movable directions (X-Y) opposite to the base 201 and the outer frame 203, the hinge members are referred to as a whole with a plurality of first and second elastic hinges 205 and 206. HA
1 to HA4. That is, each of the hinge assemblies HA1 to HA4 is capable of displacing the outer frame 203 relative to the base 201 in both the X direction and the Y direction.

In the third embodiment, the first intermediate member 202
A, the number (2) of 202B, the second intermediate member 202C,
The numbers (two) of 202D are set to be equal, and their sizes are also set to be equal. Furthermore,
As is clear from the figure, the first and second intermediate members 202A to 202A
First and second elastic hinges 20 connected to 202D
5 and 206, each hinge assembly HA1 to HA
4 is arranged point-symmetrically with respect to the center O of the outer frame 203.

The other structure of the third embodiment is basically the same as that of the first embodiment. The structure and definition of each of the first and second elastic hinges 205 and 206 have already been described. It is the same as the second elastic hinges 5, 105 or 6, 106. Therefore, in the drawings, parts having the same or similar functions are denoted by the same reference numerals in the last two digits, and redundant description is omitted.

With these configurations, the following effects can be obtained in the third embodiment.

(1) When the outer frame 203 is driven in the X direction, the two first intermediate members 202A,
02B follows and moves parallel to the X direction. As a result,
The outer frame 203 can be smoothly translated in the X direction. At this time, the two second intermediate members 202C, 20C
2D does not move.

(2) When the outer frame 203 moves in the Y direction, the two second intermediate members 202C and 202D follow and move in parallel in the Y direction. As a result, the outer frame 203 can be smoothly translated in the Y direction. At this time, the two first intermediate members 202A and 202B do not move.

(3) The inertial load on the driving means when driving in the X direction can be calculated as “outer frame frame 203 + second elastic hinge 206 (four pieces), ignoring the mass of the member placed on outer frame 203. Minute) + first intermediate member 202A, 2
02B ". On the other hand, the inertial load on the driving unit when driving in the Y direction is “movable table 203 + first elastic hinge 205 (for four) + second intermediate member 202C,
02D ". Here, in this embodiment, the first intermediate members 202A, 202B, the second intermediate members 202C, 202
The number of D (two) and each size are equal,
The structure and size of each of the first and second elastic hinges 205 and 206 are also the same. Further, the first and second intermediate members 202A
To 202D and first and second elastic hinges 205 and 206.
(Hinge assemblies HA1 to HA4) are arranged point-symmetrically with respect to the center O of the outer frame 203. Therefore, the inertial loads in the X and Y directions are the same.

(4) First and second elastic hinges 205 and 20
6 functions as a rigid body in the Z, θx, and θy directions, so that the outer frame 2 can be provided without any special indicating means.
03 does not deviate from the XY plane. In addition, since it also functions as a rigid body in the θz direction, it does not rotate θz.

FIG. 6 shows a fourth embodiment of the present invention.

The fourth embodiment has the same basic configuration as the third embodiment, except that the first intermediate members 302A,
02B, second intermediate members 302C and 302D, first and second members
The definitions of the elastic hinges 305 and 306 are the same as in the third embodiment. However, the shapes or connection modes of each intermediate member and the elastic hinge are different.

That is, in the fourth embodiment, each of the intermediate members 302A to 302D is rectangular.
Further, each end 305s, 306s of the pair of the first elastic hinge 305 and the second elastic hinge 306 connected to each of the intermediate members 302A to 302D is
02A to 302D each of predetermined points P1 and P1
2, P3 and P4, P5 and P6, or P7 and P8
Are connected adjacent to each other.

Further, the position of each pair of first elastic hinges 305 on each intermediate member 302 is shifted in the Y direction, and the position of each pair of second elastic hinges 306 on each intermediate member 302 is shifted in the X direction. Has been staggered. Specifically, in this embodiment, each of the first and second
Lengths L3, L approximately equal to the intervals L1, L2 of the elastic hinges
4 and consequently each connection position P1, P2, P
3 and P4, P5 and P6, or P7 and P8 are set to be inclined at about 45 degrees with respect to the X direction or the Y direction.

As a result, in addition to the four functions obtained by the above-described fourth embodiment, the following functions are further obtained.

(5) Each end 305 s, 306 s of the pair of the first elastic hinge 305 and the second elastic hinge 306 connected to each of the intermediate members 302 A to 302 D is at a predetermined point on each of the intermediate members 302 A to 302 D. P1 and P2, P3 and P4, P5 and P6, or P7 and P
8, each elastic hinge 30
At 5306, the end to be maintained in the fixed state can be more directly and reliably fixed. Therefore, the members connected to both ends can be relatively displaced by an amount corresponding to the displacement to be allowed (absorbed) in the elastic hinge. As a result, the rotation of the intermediate members 302 and the outer frame 303 around the Z direction with respect to the base 301 is effectively prevented.

(6) The arrangement positions of the pair of first elastic hinges 305 on each intermediate member 302 are shifted in the Y direction (corresponding to about 45 degrees), and each intermediate member 30 is displaced.
2, the arrangement positions of the pair of second elastic hinges 306 are shifted in the X direction (corresponding to about 45 degrees), so that the rigidity of the entire intermediate member in the fixing direction is further increased, and the intermediate member 302 , And rotation (or sway) in the fixed direction is more reliably prevented.

Each of these functions functions as an element for further improving the positioning accuracy of the outer frame (movable table) 303 in the X and Y directions.

[0070]

According to the structure for supporting the movable table of the XY stage according to the present invention, high-speed and high-precision XY control can be realized with a simple structure.

[Brief description of the drawings]

FIG. 1 is a plan view showing a support structure of a movable table of an XY stage according to a first embodiment of the present invention.

FIG. 2 is an enlarged perspective view of an elastic hinge in the support structure.

FIG. 3 is a sectional view of a minimum sectional area of the elastic hinge.

FIG. 4 is a plan view showing a support structure of a movable table of an XY stage according to a second embodiment of the present invention.

FIG. 5 is a plan view showing a support structure of a movable table of an XY stage according to a third embodiment of the present invention.

FIG. 6 is a plan view showing a support structure of a movable table of an XY stage according to a fourth embodiment of the present invention.

FIG. 7 is a perspective view showing a conventional XY stage device.

[Explanation of symbols]

1, 101, 201, 301 ... fixed base 2, 102, 202, 302 ... intermediate frame (intermediate member) 3, 103, 203, 303 ... outer frame (movable table) 1x ... X direction extending part 1y ... Y Direction extending portion 5, 105, 205, 305, 405: first elastic hinge 6, 106, 206, 306, 406: second elastic hinge 202A, 202B, 302A, 302B: first intermediate member 202C, 202D, 302C, 302D: second intermediate member

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yasuhito Nakamori 2-1-1, Yatocho, Tanashi-shi, Tokyo Sumitomo Heavy Industries, Ltd. Inside Tanashi Works (72) Inventor Masanobu Suginamine 63-30 Yuyugaoka, Hiratsuka-shi, Kanagawa Prefecture No. Sumitomo Heavy Industries Machinery Co., Ltd. Hiratsuka Plant F-term (reference) 2F078 CA08 CB02 CB09 CB12 CC04 CC11 5F046 CC03 CC18

Claims (6)

[Claims] A movable table is fixed to a fixed base by a predetermined X.
-X- for supporting a small displacement in the Y-plane
In the support structure for the movable table of the Y stage, the movable table has a characteristic of being flexible only in the X direction, having rigid characteristics in the Y direction and the Z direction, and being arranged along the Y direction in the XY plane. X between members connected to both ends thereof
A first elastic hinge that allows only relative displacement in the direction, and is flexible only in the Y direction, has rigidity in the X and Z directions, and extends along the X direction in the XY plane. By being arranged, Y between members connected to both ends thereof is
A plurality of second elastic hinges each permitting only relative displacement in the direction, and the fixed base is arranged at a position including the XY plane with respect to the movable table, and the fixed base and the movable table are An intermediate member is interposed in the XY plane between the movable base and the movable table is slightly displaceable in the XY plane with respect to the fixed base, and is held at a predetermined position in the Z direction. Wherein the fixed base, the intermediate member, and the movable table are connected by using a combination of the first and second elastic hinges. 2. The rectangular ring according to claim 1, wherein the intermediate member has two X-direction extending portions extending in the X direction and two Y-direction extending portions extending in the Y direction. And the first elastic hinge is provided with two Xs in the intermediate member.
By being arranged in the Y direction between the direction extending portion and the fixed base, relative displacement in the X direction of the fixed base and the intermediate member is allowed, while the second elastic hinge is Two Y's in the intermediate member
XY is provided between the direction extending portion and the movable table in the X direction, whereby relative displacement of the intermediate member and the movable table in the Y direction is allowed. Support structure for the movable table of the stage. 3. The first elastic hinge according to claim 1, wherein the intermediate member is divided into a plurality of intermediate members including first and second intermediate members, and wherein the first elastic hinge is provided between the fixed base and the first intermediate member. Is disposed, and the second elastic hinge is disposed between the first intermediate member and the movable table, whereby relative displacement of the movable table with respect to the fixed base in the X-Y direction is allowed. The second elastic hinge is disposed between the fixed base and the second intermediate member, and the first elastic hinge is disposed between the second intermediate member and the movable table. 3. A support structure for a movable table of an XY stage, wherein a displacement in the XY directions with respect to the fixed base is allowed. 4. The apparatus according to claim 3, wherein the divided first and second intermediate members include the first elastic hinge and the second elastic hinge connected to the first and second intermediate members. A support structure for a movable table of an XY stage, which is arranged so as to be point-symmetric with respect to the center of the movable table. 5. The intermediate member according to claim 3, wherein one end of the first elastic hinge and one end of the second elastic hinge connected to each of the intermediate members are connected adjacent to a predetermined point of the intermediate member. X characterized by being performed
-A support structure for the movable table of the Y stage. 6. The first elastic hinge according to claim 3, wherein a pair of the first elastic hinges is provided for each intermediate member, and the arrangement positions of the pair of first elastic hinges in the Y direction are different from each other. A pair of the second elastic hinges is provided for each intermediate member, and the positions of the pair of second elastic hinges in the X direction are different from each other.
Support structure for the movable table of the stage.