JP2002019113A - Ink jet recording head and method of manufacturing ink jet recording head - Google Patents

Abstract

(57) Abstract: The present invention relates to an ink jet recording head and an ink jet recording head having improved ink ejection performance by suppressing propagation of vibration of a pressurized liquid chamber by a diaphragm to an adjacent pressurized liquid chamber. A manufacturing method is provided. In the ink jet recording head, a side wall separating each pressurized liquid chamber has a hexagonal cross section, and the side wall has a predetermined depth and a predetermined width from a nozzle plate. An elastic body 7, for example, rubber, is provided so as to extend in a direction perpendicular to the paper surface of FIG. 1, and the elastic body 7 is formed to have a width of 45% or more and 80% or less of one side of the side wall 5. ing. Therefore, the pressure change of each pressurized liquid chamber 4 due to the displacement of the diaphragm film 9 during the multi-channel driving is reduced by the side wall 5 and the elastic body 7 formed on the side wall 5, and the mechanical crosstalk is greatly reduced. As a result, the ink droplet ejection performance is stabilized, and the image quality of the recorded image is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head and a method for manufacturing the ink jet recording head, and more particularly, to displacing a diaphragm using electrostatic attraction, and a pressurized liquid facing the diaphragm. The present invention relates to an ink jet recording head that compresses a chamber and discharges ink droplets, and a method of manufacturing the ink jet recording head.

[0002]

2. Description of the Related Art An ink jet recording head is a so-called ink-on-demand type in which the pressure in a pressurized liquid chamber is increased only when recording is necessary, and ink droplets are ejected from a nozzle communicating with the pressurized liquid chamber. Ink-on-demand type ink-jet recording heads are widely used.As such an ink-on-demand type ink-jet recording head, a vibrating plate is provided on a part of a wall of a pressurized liquid chamber filled with ink, and the vibrating plate is provided by a piezoelectric actuator or the like. By displacing and changing the volume of the pressurized liquid chamber to increase the pressure in the pressurized liquid chamber and ejecting ink from the nozzle, or by providing a heating element that generates heat by energization in the pressurized liquid chamber, A method in which the pressure in the pressurized liquid chamber is increased by bubbles generated by heat generation to discharge ink from the nozzles, and a method is provided between a vibrating plate partially disposed in the pressurized liquid chamber and the vibrating plate. An electrostatic method is widely known in which a diaphragm is deformed by a voltage applied between an electrode plate disposed across an edge plate to increase the pressure in a pressurized liquid chamber and eject ink from a nozzle. I have.

In recent years, the speed of inkjet printers has been increased,
As the image quality increases, the inkjet recording head is required to be smaller and have a higher density.

However, when the density of the ink jet recording head is increased, the distance between the pressurized liquid chambers is inevitably reduced. Therefore, pressure changes in a plurality of pressurized liquid chambers affect each other, and stable ink ejection is performed. The so-called crosstalk (mutual interference) that cannot be performed is a serious problem.

[0005] This crosstalk is caused by various causes. The main cause is, for example, that the partition between the pressurized liquid chambers is deformed due to an insufficient structure of the pressurized liquid chamber, and the ink is caused by ink. In some cases, a change in pressure generated in one pressurized liquid chamber due to discharge causes a change in pressure in the pressurized liquid chamber of an adjacent bit.

Therefore, conventionally, there is provided an ink jet printer head having a plurality of pressurizing chambers provided on one surface of a pressurizing chamber substrate, and a surface of the pressurizing chamber substrate opposite to the surface on which the pressurizing chambers are provided. A groove is formed at a position opposed to the pressurizing chamber, and a diaphragm film for pressurizing the ink in the pressurizing chamber, and a piezoelectric film is sandwiched between the upper and lower electrodes on the vibrating plate film in the groove. An ink jet printer head has been proposed, wherein at least a width of the upper electrode is formed to be smaller than a width of the pressurizing chamber. 181010).

Further, in this publication, the pressurizing chamber substrate is a silicon single crystal substrate having a plane orientation of (100), and a wall surface of a side wall partitioning between the plurality of pressurizing chambers is formed by the pressurizing chamber substrate. An ink jet printer head has been proposed in which an obtuse angle is formed with the bottom surface of the chamber, and the wall surface of the side wall is made of the (111) plane of the silicon single crystal substrate.

More specifically, as shown in FIG. 12, in this conventional ink jet printer head 100, a plurality of strip-shaped pressure chambers 102 are formed on a pressure chamber substrate 101, and each of the pressure chambers is formed. 102 are separated by a side wall 103. A nozzle unit 104 is attached to the pressurizing chamber substrate 101 so as to cover the pressurizing chamber 102, and the nozzle unit 104 is formed with a nozzle 105 communicating with each pressurizing chamber 102. Pressurizing chamber substrate 101
Is the plane orientation (100) in the initial stage before etching.
And a groove 106 is formed on one surface thereof (the surface opposite to the nozzle unit 104). The groove 106 is formed such that the wall surface of the side wall forms an obtuse angle with the bottom surface of the groove 106. The groove 106 has a thin film piezoelectric film composed of a diaphragm film 107, a lower electrode 108, a piezoelectric film 109, and an upper electrode 110. The body element is integrally formed by a thin film process. The side wall 103 has a hexagonal cross section.

That is, in the ink jet printer head 100, the piezoelectric film 109 sandwiched between the upper electrode 110 and the lower electrode 108 is deformed according to the voltage to vibrate the diaphragm 107, and the pressure of the pressure chamber 102 is increased. Fluctuating
The ink is ejected from the nozzle 105.

At this time, the pressure fluctuation of the pressurizing chamber 102 in which the vibration film 107 vibrates due to the deformation of the piezoelectric film 109 and the pressure fluctuates is transmitted to another pressurizing chamber 102, and crosstalk occurs. However, the conventional ink jet printer head 100 has a side wall 103 of the pressure chamber 102.
Is made to have a hexagonal cross section to reduce mechanical crosstalk.

[0011]

However, in such an ink jet recording head described in this publication,
In today's demand for multi-channel ink jet recording heads, there is still a need for further improvements in further reducing crosstalk and improving ink ejection performance.

That is, when the number of channels is increased, the vibration of the vibration plate of the adjacent pressurized liquid chamber easily propagates to the adjacent pressurized liquid chamber via the side wall of the pressurized liquid chamber or the vibration plate.
Experiments have shown that when the DPI is changed from 50 DPI to 180 DPI, crosstalk increases. In the case where the nozzle pitch is increased in density in this way, simply forming the side wall of the pressurized liquid chamber into a hexagon cannot sufficiently reduce the crosstalk, resulting in non-uniform ink droplet ejection characteristics. This may cause image quality to deteriorate.

When the driving method is not a driving method using a piezoelectric body but an electrostatic driving method using static electricity,
Since the smaller the crosstalk, the better
It is required to further reduce crosstalk.

Therefore, according to the first aspect of the present invention, a pressurized liquid chamber is provided on one surface of a pressurized liquid chamber substrate in a state of being separated by a side wall and communicating with each nozzle formed in a nozzle plate. A plurality of rows are formed in a row, and a part of the side wall defining the pressurized liquid chamber is formed of a predetermined elastic body, and the length of one side of the cross section of the hexagonal side wall in the nozzle row direction is set to the length of the elastic body. Of the diaphragm film facing the pressurized liquid chamber at the time of multi-channel driving by having a width of not less than 45% and not more than 80% of the width and forming a predetermined depth in the groove direction from the end of the side wall on the nozzle plate side. A part thereof is formed of an elastic body and vibration is prevented by a hexagonally formed side wall to suppress the propagation of vibration to an adjacent pressurized liquid chamber, thereby suppressing crosstalk and achieving stable ink droplets. Achieving ejection performance (ink drop ejection characteristics) and improving the image quality of recorded images And its object is to provide a wear ink jet recording head.

According to a second aspect of the present invention, the elastic body is formed by patterning the end of the side wall on the nozzle plate side with a photoresist or the like, and thereafter, by etching, the length of one side of the cross section of the hexagonal side wall in the nozzle row direction. A groove having a width of not less than 45% and not more than 80% of the height, and having a predetermined depth is formed in a surface direction opposite to the nozzle plate side end of the side wall, and an elastic material is deposited and filled in the groove. By being formed, the propagation of vibration to the adjacent pressurized liquid chamber is suppressed, crosstalk is suppressed, and stable ink droplet ejection performance (ink droplet ejection characteristics) is realized, and the recorded image is formed. It is an object of the present invention to provide an ink jet recording head which can improve the image quality of the ink jet recording head and has mass productivity.

According to a third aspect of the present invention, the end of the side wall of the hexagonal side wall in the nozzle row direction is formed by etching the elastic body by etching the end of the side wall on the nozzle plate side with a photoresist or the like, and thereafter performing etching. A groove having a width of not less than 45% and not more than 80% of the height, and a groove penetrating in the surface direction on the groove side is formed, and an auxiliary plate for closing the groove is arranged at an end of the groove on the nozzle plate side, and then elastically. Material of the body is deposited from the side of the auxiliary plate to the height of the elastic body, amorphous silicon of the same material as the side wall is deposited on the remaining portion of the groove where the elastic material is deposited, and the groove is filled, and the auxiliary plate is After being removed, the amorphous silicon is crystallized by heat treatment to be formed, so that the propagation of vibration to the adjacent pressurized liquid chamber is further suppressed, and the crosstalk is further suppressed, Even more stable ink drop ejection performance (ink drop To achieve output characteristics), the more it is possible to further improve the image quality of the recorded image,
It is an object of the present invention to provide an ink jet recording head having even higher productivity.

According to a fourth aspect of the present invention, there is provided a pressurized liquid chamber formed on one side of a pressurized liquid chamber substrate in a state of being separated by a side wall, and communicating with each nozzle formed on a nozzle plate. When forming a part of the side wall defining the pressurized liquid chamber with a predetermined elastic body, a step of patterning the elastic body with a nozzle or the like at the nozzle plate side end of the side wall; In the etching process, the width of one side of the cross section of the hexagonal side wall in the nozzle row direction is 45% or more and 80% or less, and the width of the side wall is from the nozzle plate side end to the surface direction opposite to the nozzle plate. A step of forming a groove having a predetermined depth and a step of depositing and filling a predetermined elastic material in the groove are sequentially performed to form a groove on the pressurized liquid chamber during multi-channel driving. Of the vibrating diaphragm membrane Vibration is prevented by the side walls formed in a rectangular shape, and the propagation of vibration to the adjacent pressurized liquid chamber is suppressed, crosstalk is suppressed, and stable ink droplet ejection performance (ink droplet ejection characteristics) is realized. It is another object of the present invention to provide a method of manufacturing an ink jet recording head which can easily manufacture an ink jet recording head capable of improving the image quality of a recorded image.

According to a fifth aspect of the present invention, there is provided a pressurized liquid chamber formed on one surface of a pressurized liquid chamber substrate in a state of being separated by a side wall and communicating with each nozzle formed on a nozzle plate. When forming a part of the side wall defining the pressurized liquid chamber with a predetermined elastic body, a step of patterning the elastic body with a nozzle or the like at the nozzle plate side end of the side wall; Forming a groove having a width of not less than 45% and not more than 80% of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction and penetrating in the surface direction opposite to the nozzle plate by etching; And a step of arranging an auxiliary plate for closing the groove at an end of the groove on the nozzle plate side, and then depositing an elastic material from the auxiliary plate side to a predetermined height, and a groove on which the elastic material is deposited. Amorphous silicon of the same material as the sidewall is deposited on the remaining part of Vibration process facing the pressurized liquid chamber at the time of multi-channel driving by sequentially performing a process process of removing the auxiliary plate and a process process of crystallizing the amorphous silicon by performing a heat treatment after removing the auxiliary plate. The displacement of the plate film is partly made of an elastic body and is damped by the hexagonal side wall, suppressing the propagation of vibration to the adjacent pressurized liquid chamber and suppressing the crosstalk. Provided is a method for manufacturing an ink jet recording head that can more easily manufacture an ink jet recording head capable of improving the image quality of a recorded image by realizing stable ink droplet ejection performance (ink droplet ejection characteristics). It is intended to be.

[0019]

According to the first aspect of the present invention, there is provided an ink jet recording head in which a plurality of pressurized liquid chambers are provided in a row on one surface of a pressurized liquid chamber substrate in a state of being separated by side walls. A nozzle plate having a nozzle communicating with each of the pressurized liquid chambers is provided on a surface of the pressurized liquid chamber plate on the side of the pressurized liquid chamber, and is opposite to the nozzle plate of the pressurized liquid chamber substrate. On the side surface,
A groove is formed at a position opposed to each of the pressurized liquid chambers, and a diaphragm film for pressurizing the ink in the pressurized liquid chamber is formed in the groove, and a piezoelectric film is sandwiched between the upper and lower electrodes on the diaphragm film. An ink jet recording head in which a piezoelectric thin film element is formed, at least the side wall is formed of single crystal silicon, and a cross-sectional shape of the side wall in a nozzle row direction is formed in a hexagonal shape; A part of the side wall that defines the chamber is formed of a predetermined elastic body, and the elastic body is 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction. The above-mentioned object is achieved by having a width from the end of the side wall on the nozzle plate side to a predetermined depth in the groove direction.

According to the above configuration, a plurality of pressurized liquid chambers are formed on one surface of the pressurized liquid chamber substrate in a state of being separated by a side wall and communicating with each nozzle formed on the nozzle plate. A part of the side wall that is formed and that defines the pressurized liquid chamber is formed of a predetermined elastic body, and the elastic body is moved in a direction of the nozzle row by 6 inches.
It has a width of 45% or more and 80% or less of the length of one side of the cross section of the rectangular side wall, and is formed to a predetermined depth in the groove direction from the end of the side wall on the side of the nozzle plate, so that the pressure during multi-channel driving is increased. The displacement of the diaphragm membrane facing the liquid chamber is partially damped by the side wall formed of an elastic body and formed in a hexagon to suppress the propagation of vibration to the adjacent pressurized liquid chamber. Thus, crosstalk can be suppressed, stable ink droplet ejection performance (ink droplet ejection characteristics) can be realized, and the image quality of a recorded image can be improved.

In this case, for example, as described in claim 2, in the elastic body, an end portion of the side wall on the nozzle plate side is patterned with a photoresist or the like, and thereafter, in the nozzle row direction by an etching process. A groove having a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall, and having a predetermined depth from the nozzle plate side end of the side wall toward the groove side is formed. According to the above configuration, the groove may be formed by depositing and filling the material of the elastic body, the elastic body is patterned with a photoresist or the like at the nozzle plate side end of the side wall, Thereafter, the etching process has a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction, and has a predetermined depth in the surface direction opposite to the nozzle plate side end of the side wall. Groove having a height is formed. Since the elastic material is formed by being deposited and filled, the propagation of vibration to the adjacent pressurized liquid chamber can be suppressed, the crosstalk can be suppressed, and the stable ink droplet ejection performance (ink Droplet ejection characteristics), the image quality of the recorded image can be improved, and the mass productivity can be improved.

Further, for example, in the elastic body, the end of the side wall of the elastic body on the side of the nozzle plate is patterned with a photoresist or the like, and thereafter the etching is performed in the direction of the nozzle row by an etching process. A groove having a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall is formed, and a groove penetrating in the surface direction on the groove side is formed at the end of the groove on the nozzle plate side. After the auxiliary plate for closing the elastic member is disposed, the material of the elastic body is deposited from the side of the auxiliary plate to the height of the elastic body, and the remaining material of the groove where the elastic material is deposited is formed of the same material as the side wall. After the amorphous silicon is deposited to fill the groove and the auxiliary plate is removed, the amorphous silicon may be crystallized by a heat treatment.

According to the above configuration, the elastic body is formed by patterning the end of the side wall on the nozzle plate side with a photoresist or the like, and then performing etching to reduce the length of one side of the cross section of the hexagonal side wall in the nozzle row direction. After a groove having a width of 45% or more and 80% or less and penetrating in the surface direction on the groove side is formed, and an auxiliary plate for closing the groove is arranged at an end of the groove on the nozzle plate side, the elastic body The material is deposited from the side of the auxiliary plate to the height of the elastic body, amorphous silicon of the same material as the side wall is deposited on the remaining portion of the groove where the elastic material is deposited, the groove is filled, and the auxiliary plate is removed. After that, since it is assumed that the amorphous silicon is crystallized and formed by heat treatment, the propagation of vibration to the adjacent pressurized liquid chamber can be further suppressed, and the crosstalk can be further suppressed, Even more stable ink droplet ejection performance To achieve click drop ejection characteristics), the more it is possible to further improve the image quality of the recorded image, it is possible to further improve the mass productivity.

According to a fourth aspect of the present invention, there is provided a method for manufacturing an ink jet recording head, wherein a plurality of pressurized liquid chambers are provided in a row on one surface of a pressurized liquid chamber substrate in a state of being separated by side walls. A nozzle plate having a nozzle communicating with each of the pressurized liquid chambers is provided on a surface of the pressurized liquid chamber plate on the side of the pressurized liquid chamber, and a surface of the pressurized liquid chamber substrate opposite to the nozzle plate. A groove is formed at a position facing each of the pressurized liquid chambers, and a diaphragm film for pressurizing the ink in the pressurized liquid chamber is formed in the groove, and a piezoelectric film is sandwiched between the upper and lower electrodes on the diaphragm plate film. At least the side wall is formed of single-crystal silicon, and the cross-sectional shape of the side wall in the nozzle row direction is formed in a hexagonal shape to define the pressurized liquid chamber. For manufacturing an ink jet recording head in which a part of the side wall is formed of a predetermined elastic body The step of patterning the elastic body with the nozzle plate side end of the side wall with a photoresist or the like, and the etching process, the length of one side of the cross section of the hexagonal side wall in the nozzle row direction. 45% or more 8
Forming a groove having a width of 0% or less and a predetermined depth from the nozzle plate side end of the side wall in a surface direction on the groove side, and depositing and filling a predetermined elastic material in the groove; The above-mentioned object is achieved by sequentially performing and forming a process.

According to the above configuration, a plurality of pressurized liquid chambers are formed in a row on one surface of the pressurized liquid chamber substrate in a state of being separated by a side wall and communicating with each nozzle formed on the nozzle plate. When forming a part of the side wall that defines the pressurized liquid chamber with a predetermined elastic body, a step of patterning the elastic body with a photoresist or the like at a nozzle plate side end of the side wall, and etching. The processing has a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction,
A step of forming a groove having a predetermined depth in the surface direction opposite to the nozzle plate from the nozzle plate side end of the side wall, and a step of depositing and filling a predetermined elastic material in the groove are sequentially performed. , So that the displacement of the diaphragm membrane facing the pressurized liquid chamber during multi-channel driving is partly formed of an elastic body and is prevented from vibration by the hexagonally formed side wall. To suppress the propagation of vibration to the pressurized liquid chamber, thereby suppressing crosstalk, realizing stable ink droplet ejection performance (ink droplet ejection characteristics), and improving the image quality of a recorded image. An ink jet recording head that can be manufactured can be easily manufactured.

According to a fifth aspect of the invention, there is provided a method for manufacturing an ink jet recording head, wherein a plurality of pressurized liquid chambers are provided in a row on one surface of a pressurized liquid chamber substrate in a state of being separated by side walls. A nozzle plate having a nozzle communicating with each of the pressurized liquid chambers is provided on a surface of the pressurized liquid chamber plate on the side of the pressurized liquid chamber, and a surface of the pressurized liquid chamber substrate opposite to the nozzle plate. A groove is formed at a position facing each of the pressurized liquid chambers, and a diaphragm film for pressurizing the ink in the pressurized liquid chamber is formed in the groove, and a piezoelectric film is sandwiched between the upper and lower electrodes on the diaphragm plate film. At least the side wall is formed of single-crystal silicon, and the cross-sectional shape of the side wall in the nozzle row direction is formed in a hexagonal shape to define the pressurized liquid chamber. For manufacturing an ink jet recording head in which a part of the side wall is formed of a predetermined elastic body The step of patterning the elastic body with the nozzle plate side end of the side wall with a photoresist or the like, and the etching process, the length of one side of the cross section of the hexagonal side wall in the nozzle row direction. 45% or more 8
A step of forming a groove having a width of 0% or less and penetrating in the surface direction on the groove side, and arranging an auxiliary plate for closing the groove at an end of the groove on the nozzle plate side; A step of depositing the body material from the auxiliary plate side to a predetermined height, and a step of depositing amorphous silicon of the same material as the side wall in the remaining portion of the groove on which the elastic material is deposited to fill the groove. After the auxiliary plate is removed, a heat treatment is performed to crystallize the non-crystalline silicon.

According to the above arrangement, a plurality of pressurized liquid chambers are provided on one surface of the pressurized liquid chamber substrate in a state of being separated by a side wall and communicating with each nozzle formed on the nozzle plate. When forming a part of the side wall that defines the pressurized liquid chamber with a predetermined elastic body, a step of patterning the elastic body with a photoresist or the like at a nozzle plate side end of the side wall, and etching. The processing has a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction,
A step of forming a groove penetrating in the surface direction opposite to the nozzle plate, and arranging an auxiliary plate for closing the groove at an end of the groove on the nozzle plate side. After removing the auxiliary plate, after removing the auxiliary plate, the process of depositing to the height, the process of depositing amorphous silicon of the same material as the side wall on the remaining portion of the groove where the elastic material is deposited, and filling the groove
And a process of crystallizing the amorphous silicon by performing heat treatment, so that the displacement of the diaphragm film facing the pressurized liquid chamber at the time of multi-channel driving is partially caused by an elastic body. Vibration is prevented by the formed and hexagonally formed side walls, the propagation of vibration to the adjacent pressurized liquid chamber is suppressed, and crosstalk can be suppressed. Ink jet recording heads capable of realizing droplet ejection characteristics) and improving the image quality of a recorded image can be manufactured more easily.

[0028]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. It should be noted that the embodiments described below are preferred embodiments of the present invention, and therefore, various technically preferable limitations are added. However, the scope of the present invention is not limited to the following description. The embodiments are not limited to these embodiments unless otherwise specified.

FIGS. 1 to 6 are views showing an ink jet recording head and a method of manufacturing the ink jet recording head according to a first embodiment of the present invention. FIG. 1 is a diagram showing an ink jet recording head and an ink jet recording head of the present invention. FIG. 3 is a partial cross-sectional view in the long side direction of the inkjet recording head 1 to which the first embodiment of the manufacturing method is applied.

In FIG. 1, an ink jet recording head 1 has a nozzle plate 3 fixed to one surface of a pressurized liquid chamber substrate 2. 4
Are formed. Each pressurized liquid chamber 4 is separated by a side wall 5, and a nozzle plate 3 is formed in the nozzle plate 3 to communicate each pressurized liquid chamber 4 with the outside.

Each side wall 5 is formed of a predetermined member, for example, single crystal silicon, and the cross-sectional shape of the nozzle 6 in the row direction is formed as a hexagon. An elastic body 7 having a predetermined depth and a predetermined width from the nozzle plate 3, for example, rubber, is disposed on each side wall 5 so as to extend in a direction perpendicular to the paper surface of FIG. 1.
The elastic body 7 is formed to have a width of 45% or more and 80% or less of one side of the hexagonal side wall 5.

The pressurized liquid chamber substrate 2 is made of a predetermined member, for example,
A single-crystal silicon plate having a plane orientation of (100) is used, and a groove 8 is formed in one surface thereof (the surface opposite to the nozzle plate 3).
Are formed. In the groove 8, a diaphragm 9 is formed at a position facing each pressurized liquid chamber 4, and in FIG. A thin film piezoelectric element 13 composed of a piezoelectric film 11 and an upper electrode 12 is integrally formed by a thin film process.

The formation of the elastic body 7 on the side wall 5 is described with reference to FIGS.
It is manufactured by the manufacturing process shown in FIG.

That is, as shown in FIG. 2, on the side of the side wall 5 on which the nozzle plate 3 is to be formed, a portion for forming the elastic body 7 made of an etching resistant material such as photoresist or silicon dioxide is opened. In this state, a mask 20 is formed, and as shown in FIG. 3, etching is performed by an etching device to a predetermined depth for forming a predetermined elastic body 7 to form a groove 21.
To form Thereafter, as shown in FIG. 4, the material of the elastic body 7, for example, rubber or the like is deposited by sputtering or the like, and the elastic body 7 is deposited.
To form

Next, the operation of the present embodiment will be described. In the ink jet recording head 1 of the present embodiment, the cross talk in which the vibration of the diaphragm 9 of the other pressurized liquid chamber 4 propagates to the other pressurized liquid chamber 4 during the multi-channel drive is generated. 4 is prevented by an elastic body 7 formed on a hexagonal side wall 5 that partitions
The ink droplet ejection characteristics are made uniform and the image quality is improved.

That is, the ink jet recording head 1
A nozzle 6 is provided on one surface of the pressurized liquid chamber substrate 2 on which a plurality of pressurized liquid chambers 4 are formed to communicate each pressurized liquid chamber 4 with the outside.
Is fixed, and the pressurized liquid chamber substrate 2 has a groove 8 formed on the surface opposite to the nozzle plate 3. In the groove 8, a diaphragm film 9, a lower electrode 10, a piezoelectric film 11, and an upper electrode 12 are sequentially formed integrally from a nozzle plate 3 side by a thin film process. The cross-sectional shape in the column direction is formed as a hexagon.

An elastic body 7 having a predetermined depth and a predetermined width from the nozzle plate 3, for example, rubber is disposed on the side wall 5 so as to extend in a direction perpendicular to the paper surface of FIG. 1. The width is formed to be not less than 45% and not more than 80% of one side of the side wall 5.

Then, the ink jet recording head 1
Piezoelectric film 11 sandwiched between upper electrode 12 and lower electrode 10
Is deformed according to the voltage applied between the upper electrode 12 and the lower electrode 10, vibrates the diaphragm film 9, changes the pressure in the pressurized liquid chamber 4, and discharges ink from the nozzles 6. Let it.

At this time, the drive voltage is applied to the upper electrode 12 and the lower electrode 10, and the pressure change in the pressurized liquid chamber 4 which causes the vibration of the diaphragm film 9 is caused by the other pressurized liquid via the side wall 5. Propagation to the liquid chamber 4 may cause crosstalk, and the ink ejection performance may be reduced.

However, in the ink jet recording head 1 of the present embodiment, the side wall 5 for separating each pressurized liquid chamber 4 is formed in a hexagonal cross section as described above, and An elastic body 7 having a predetermined depth and a predetermined width from the nozzle plate 3, for example, rubber, is disposed so as to extend in the direction perpendicular to the plane of FIG. 1.
Is formed at 45% or more and 80% or less of one side.

Therefore, the pressure change in each pressurized liquid chamber 4 due to the displacement of the diaphragm film 9 during the multi-channel driving is reduced by the side wall 5 and the elastic body 7 formed on the side wall 5, and the mechanical crosstalk is reduced. It is greatly reduced.

As a result, stable ink droplet ejection performance can be realized, and the image quality of a recorded image can be improved.

When the present applicant conducted an experiment, the following results were obtained. First, rubber is used as the elastic body 7, and the height (h) of the elastic body 7 is set to 96 · the height of the side wall 5.
In the case of 5%, the width (w) of the elastic body 7 to be filled is
Vibration analysis by the finite element method was performed with the length of one side of the cross section of 80%. As a result of the vibration analysis, the mechanical crosstalk caused by the vibration of the diaphragm 9 of the adjacent pressurized liquid chamber 4 was reduced to 98% as compared with the case where the elastic body 7 was not filled.

In the case where the height (h) of the elastic body 7 is 96.5% of the height of the side wall 5,
Is set to 69% of the length of one side of the cross section of the side wall 5, vibration analysis is performed by the finite element method. As a result, mechanical crosstalk due to vibration of the diaphragm 9 of the adjacent pressurized liquid chamber 4 is obtained. Is 66% smaller than when the elastic body 7 is not filled.
%. Similarly, when the width (w) of the elastic body 7 to be filled was set to 60% of the length of one side of the cross section of the side wall 5, vibration analysis was performed by the finite element method. The mechanical crosstalk due to the vibration of 9 is reduced to 25% as compared with the case where the elastic body 7 is not filled, and the width (w) of the elastic body 7 to be filled is set to 50 times the length of one side of the cross section of the side wall 5. %, The mechanical crosstalk due to the vibration of the diaphragm 9 in the adjacent pressurized liquid chamber 4 was reduced to 34% as compared with the case where the elastic body 7 was not filled. Furthermore, when the width (w) of the elastic body 7 to be filled was set to 45% of the length of one side of the cross section of the side wall 5, vibration analysis was performed by the finite element method. Mechanical crosstalk due to the vibration of the elastic body 7 is reduced to 20% as compared with the case where the elastic body 7 is not filled, and the width (w) of the elastic body 7 to be filled is 40% of the length of one side of the cross section of the side wall 5. When a vibration analysis was performed by the finite element method, mechanical crosstalk due to vibration of the diaphragm 9 of the adjacent pressurized liquid chamber 4 was 119% as compared with a case where the elastic body 7 was not filled.
Became.

That is, if the height (h) of the elastic body 7 is 96.5% of the side wall 5, as shown in FIG.
Is not less than 45% and not more than 80%,
It has been found that crosstalk is reduced.

In the above experiment, the length of one side of the side wall 5 was 50 microns, the pitch of the nozzles 6 was 169 microns, and the thickness of the diaphragm film 9 was 3 microns. went.

When the width (w) of the elastic body 7 to be filled is set to 80% of the length of one side in the cross section of the side wall 5, the height (h) of the elastic body 7 is changed and the finite element method is used. As a result of the vibration analysis, the following results were obtained.

That is, when the width (w) of the elastic body 7 to be filled is 80% of the length of one side in the cross section of the side wall 5, the height (h) of the elastic body 7 is 89% of the height of the side wall 5. %, The mechanical crosstalk is reduced to 71% as compared with the case where the elastic body 7 is not filled, and similarly, the height (h) of the elastic body 7 is set to 70% of the height of the side wall 5. Then, the mechanical crosstalk was reduced to 62% as compared with the case where the elastic body 7 was not filled. When the height (h) of the elastic body 7 is 50% of the height of the side wall 5, the mechanical crosstalk is reduced to 36% as compared with the case where the elastic body 7 is not filled. Height (h) is 30% of the height of the side wall 5
Then, the mechanical crosstalk was reduced to 82% as compared with the case where the elastic body 7 was not filled. Furthermore, when the height (h) of the elastic body 7 is set to 10% of the height of the side wall 5, the mechanical crosstalk is reduced to 99% as compared with the case where the elastic body 7 is not filled.

That is, the width (w) of the elastic body 7 is
As shown in FIG. 6, it was found that the height (h) of the elastic body 7 can be reduced without any particular limitation when the length is 80% of the length of one side in the cross section of FIG. As can be seen from FIG. 6, when the height (h) of the elastic body 7 is about 50% of the height of the side wall 5, the mechanical crosstalk is reduced most.

In this experiment, the thickness of the side wall 5 was
The pitch of the nozzles 6 and the film thickness of the diaphragm film 9 were the same as in the above experiment, and rubber was used as the elastic body 7.

Further, in order to supplement the evaluation area, additional calculation evaluation was performed. When the width (w) of the elastic body 7 was 45% of the side wall 5 and the height (h) was 10%, mechanical The crosstalk is 100% when the elastic body 7 is not provided, the width (w) of the elastic body 7 is 45% of the side wall 5, and the height (h) is 50%.
%, The mechanical crosstalk is 49% when the elastic body 7 is not provided, and the width (w) of the elastic body 7 is
When the height (h) is 10% and the height (h) is 10%, the mechanical crosstalk is 96% when the elastic body 7 is not provided, and the width (w) of the elastic body 7 is 50% of the side wall 5 and the mechanical crosstalk is high. Sa (h) is 50
%, The mechanical crosstalk was 46% when the elastic body 7 was not provided.

As a result of the above experimental results and evaluation calculation, a part of the side wall 5 is formed of the elastic body 7, and the width (w) of the elastic body 7 is set to 45% to 80% of one side of the side wall 5. It has been found that when the lower part of the nozzle 7 penetrates to the nozzle plate 3, mechanical crosstalk is reduced. In addition, in the calculation evaluation, the calculation was performed on the case where rubber was used as the elastic body 7. However, even if an epoxy-based filler or silicone oil is used as the elastic body 7, the mechanical crosstalk can be similarly reduced. it can.

As described above, the ink jet recording head 1 according to the present embodiment has a structure in which one side of the pressurized liquid chamber substrate 2 is divided into the nozzles 3 formed in the nozzle plate 3 by the side walls 5. A plurality of pressurized liquid chambers 4 communicating with each other are formed in a row, and a part of a side wall 5 defining the pressurized liquid chamber 4 is formed of a predetermined elastic body 7, and the elastic body 7 is formed by a nozzle. 6
45% of the length of one side of the cross section of the hexagonal side wall 5 in the column direction
It has a width of not less than 80% and is formed from the end of the side wall 5 on the nozzle plate 3 side to a predetermined depth in the groove 8 direction.

Therefore, the displacement of the diaphragm film 9 facing the pressurized liquid chamber 4 during the multi-channel driving is prevented from being vibrated by the side walls 5 which are partially formed by the elastic body 7 and formed in the hexagon. In addition, it is possible to suppress the propagation of vibration to the adjacent pressurized liquid chamber 4, suppress crosstalk, realize stable ink droplet ejection performance, and improve the image quality of a recorded image.

In the method of manufacturing the ink jet recording head 1 according to the present embodiment, the elastic body 7 is patterned at the end of the side wall 5 on the side of the nozzle plate 3 with photoresist or the like, and the nozzle 6 is formed by etching. Has a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall 5 in the row direction, and is predetermined from the end of the side wall 5 on the nozzle plate 3 side to the surface direction opposite to the nozzle plate 3. The step of forming the groove 21 having a depth and the step of depositing and filling a predetermined elastic material in the groove 21 are sequentially performed to form the groove 21.

Therefore, the displacement of the diaphragm film 9 facing the pressurized liquid chamber 4 during the multi-channel driving is prevented by the vibrating part 5 formed by the elastic body 7 and the hexagonal side wall 5. In addition, it is possible to suppress the propagation of vibrations to the adjacent pressurized liquid chamber 4 to suppress crosstalk, realize stable ink droplet ejection performance (ink droplet ejection characteristics), and improve the image quality of a recorded image. An ink jet recording head 1 that can be improved can be easily manufactured.

FIGS. 7 to 11 are views showing a manufacturing process of an ink jet recording head manufacturing method to which the second embodiment of the ink jet recording head and the ink jet recording head manufacturing method of the present invention is applied.

This embodiment is applied to the case where an ink jet recording head 30 similar to the ink jet recording head 1 of the first embodiment is manufactured. In the description of this embodiment, The same components as those in the first embodiment are described using the same reference numerals. This embodiment shows a manufacturing process when the elastic body 7 is formed on the side wall 5 of the ink jet recording head 30. The manufacturing processes of other parts are the same as those of the first embodiment. The same is true.

Elastic body 7 of ink jet recording head 30
In the manufacturing process, first, as shown in FIG.
A mask 31 is formed with an etching resistant material such as a photoresist or silicon dioxide on the upper side while a portion for forming the elastic body 7 is opened, and as shown in FIG. The groove 32 is formed until the process is completed.

Next, as shown in FIG.
That is, the auxiliary plate 33 is arranged on the surface on the nozzle plate 3 side,
One side of the groove 32 is sealed, and a predetermined elastic member 34 serving as the elastic body 7, for example, rubber or the like is deposited and filled in the groove 32.

Next, as shown in FIG. 10, the same material 5a as the side wall 5, for example, silicon is deposited in the upper gap where the elastic member 34 of the groove 32 is deposited to fill the groove 32.
After removing the auxiliary plate 33, as shown in FIG. 11, the amorphous silicon of the same material 5a as the side wall 5 deposited on the groove 32 is heat-treated to crystallize the amorphous silicon and And

As described above, the method of manufacturing the ink jet recording head 30 according to the present embodiment includes the step of patterning the elastic body 7 at the end of the side wall 5 on the side of the nozzle plate 3 with a photoresist or the like, and the step of etching. 45% or more and 80% of the length of one side of the cross section of the hexagonal side wall 5 in the row direction of the nozzles 6
A process for forming a groove 32 having the following width and penetrating in the surface direction opposite to the nozzle plate 3, and an auxiliary plate 33 for closing the groove 32 is disposed at an end of the groove 31 on the nozzle plate 3 side. After that, a process of depositing an elastic material (elastic member 34) from the auxiliary plate 33 side to a predetermined height;
The same material 5a as the side wall 5 is formed on the remaining portion of the groove 32 where
Are formed by sequentially performing a process of depositing amorphous silicon to fill the groove 32 and a process of crystallizing the amorphous silicon by performing a heat treatment after removing the auxiliary plate 33.

Accordingly, the displacement of the diaphragm film 9 facing the pressurized liquid chamber 4 during the multi-channel driving is prevented by the side walls 5 which are partially formed by the elastic body 7 and formed in the hexagonal shape. Ink jet capable of suppressing propagation of vibration to an adjacent pressurized liquid chamber 4, suppressing crosstalk, realizing stable ink droplet ejection performance, and improving image quality of a recorded image. The recording head 30 can be manufactured more easily.

Although the invention made by the inventor has been specifically described based on the preferred embodiments, the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the gist of the invention. It goes without saying that it is possible.

[0065]

According to the ink jet recording head according to the first aspect of the present invention, the one side of the pressurized liquid chamber substrate communicates with the respective nozzles formed on the nozzle plate while being separated by the side wall. A plurality of pressurized liquid chambers are formed in a row, and a part of the side wall that defines the pressurized liquid chamber is formed of a predetermined elastic body, and the elastic body is formed of a hexagonal side wall in the nozzle row direction. Having a width of 45% or more and 80% or less of the length of one side of the cross section,
Since the side wall is formed from the end on the nozzle plate side to a predetermined depth in the groove direction, the displacement of the diaphragm film facing the pressurized liquid chamber during multi-channel driving is partially formed by an elastic body. Vibration is prevented by the side walls formed in a rectangular shape, and the propagation of vibration to the adjacent pressurized liquid chamber is suppressed, crosstalk can be suppressed, and stable ink droplet ejection performance (ink droplet ejection characteristics) can be achieved. As a result, the image quality of the recorded image can be improved.

According to the ink jet recording head of the second aspect, the elastic body is formed by patterning the end of the side wall on the nozzle plate side with a photoresist or the like, and thereafter performing etching to form a hexagonal side wall in the nozzle row direction. A groove having a width of not less than 45% and not more than 80% of the length of one side of the cross section of the cross section and having a predetermined depth in a surface direction opposite to the end portion of the side wall on the nozzle plate side is formed. Since it is assumed that the material is formed by being deposited and filled, the propagation of vibration to the adjacent pressurized liquid chamber can be suppressed, and the crosstalk can be suppressed.
It is possible to realize stable ink droplet ejection performance (ink droplet ejection characteristics), improve the image quality of a recorded image, and improve mass productivity.

According to the ink jet recording head of the third aspect of the present invention, the elastic body is formed by patterning the end of the side wall on the nozzle plate side with a photoresist or the like, and thereafter, by etching, the hexagonal side wall in the nozzle row direction. A groove having a width of 45% or more and 80% or less of the length of one side of the cross-section of the cross-section is formed, and an auxiliary plate for closing the groove is provided at a nozzle plate side end of the groove. After being disposed, a material of an elastic body is deposited from the side of the auxiliary plate to the height of the elastic body, and amorphous silicon of the same material as the side wall is deposited on the remaining portion of the groove where the elastic material is deposited, so that the groove is formed. After the filling and removal of the auxiliary plate, it is assumed that the amorphous silicon has been crystallized by heat treatment, so that the propagation of vibration to the adjacent pressurized liquid chamber is further suppressed, and crosstalk is reduced. Can be further suppressed, Ri more to achieve a stable ink droplet ejection performance (ink drop ejection characteristics), the more it is possible to further improve the image quality of the recorded image, it is possible to further improve the mass productivity.

According to the method of manufacturing an ink jet recording head according to the fourth aspect of the present invention, each of the nozzles formed on the nozzle plate is formed on one surface of the pressurized liquid chamber substrate in a state of being separated by a side wall. A plurality of pressurized liquid chambers communicating with each other are formed in a row, and when a part of a side wall that defines the pressurized liquid chamber is formed of a predetermined elastic body, the elastic body is moved to the end of the side wall on the nozzle plate side. A width of not less than 45% and not more than 80% of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction by a process process of patterning with a photoresist or the like and an etching process;
A step of forming a groove having a predetermined depth in the surface direction opposite to the nozzle plate from the nozzle plate side end of the side wall, and a step of depositing and filling a predetermined elastic material in the groove are sequentially performed. , So that the displacement of the diaphragm membrane facing the pressurized liquid chamber during multi-channel driving is partly formed of an elastic body and is prevented from vibration by the hexagonally formed side wall. To suppress the propagation of vibration to the pressurized liquid chamber, thereby suppressing crosstalk, realizing stable ink droplet ejection performance (ink droplet ejection characteristics), and improving the image quality of a recorded image. An ink jet recording head that can be manufactured can be easily manufactured.

According to the method of manufacturing an ink jet recording head according to the fifth aspect of the present invention, one side of the pressurized liquid chamber substrate is separated from the nozzles formed in the nozzle plate by the side walls. A plurality of pressurized liquid chambers communicating with each other are formed in a row, and when a part of a side wall that defines the pressurized liquid chamber is formed of a predetermined elastic body, the elastic body is moved to the end of the side wall on the nozzle plate side. A width of not less than 45% and not more than 80% of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction by a process process of patterning with a photoresist or the like and an etching process;
A step of forming a groove penetrating in the surface direction opposite to the nozzle plate, and arranging an auxiliary plate for closing the groove at an end of the groove on the nozzle plate side. After removing the auxiliary plate, after removing the auxiliary plate, the process of depositing to the height, the process of depositing amorphous silicon of the same material as the side wall on the remaining portion of the groove where the elastic material is deposited, and filling the groove
And a process of crystallizing the amorphous silicon by performing heat treatment, so that the displacement of the diaphragm film facing the pressurized liquid chamber at the time of multi-channel driving is partially caused by an elastic body. Vibration is prevented by the formed and hexagonally formed side walls, the propagation of vibration to the adjacent pressurized liquid chamber is suppressed, and crosstalk can be suppressed. Ink jet recording heads capable of realizing droplet ejection characteristics) and improving the image quality of a recorded image can be manufactured more easily.

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional view in the long side direction of an ink jet recording head to which a first embodiment of an ink jet recording head and a method of manufacturing the ink jet recording head according to the present invention is applied.

FIG. 2 is an enlarged side sectional view showing a process of manufacturing an elastic body on a side wall of the ink jet recording head of FIG. 1 in a state where a mask is applied to a nozzle plate side of the side wall.

FIG. 3 is an enlarged side sectional view showing a state where a groove is formed on a side wall of FIG. 2 by etching;

FIG. 4 is an enlarged side sectional view showing a state in which an elastic body is deposited in a groove formed in a side wall of FIG. 3;

5 shows a change in crosstalk when the width of the elastic body is changed when the height of the elastic body of the ink jet recording head of FIG. 1 is 96.5% of the height of the side wall, and when there is no elastic body. FIG.

FIG. 6 shows a change in crosstalk when the height of the elastic body is changed when the elastic body of the ink jet recording head in FIG. 1 has a width of 80% of the length of one side of the side wall, when there is no elastic body. FIG.

FIG. 7 is an enlarged cross-sectional side view showing a manufacturing process of an ink jet recording head to which the second embodiment of the ink jet recording head and the method of manufacturing the ink jet recording head of the present invention is applied, with a mask applied to one side of a side wall. .

FIG. 8 is an enlarged side cross-sectional view showing a state where a groove penetrating by etching is formed in the side wall of FIG. 7;

9 is an enlarged side cross-sectional view showing a state in which an auxiliary plate is applied to one side of a groove penetrating through a side wall of FIG. 8 to deposit an elastic material to a predetermined depth.

10 is an enlarged side sectional view showing a state in which the same material as that of the side wall is deposited on the upper portion of the groove of the side wall in FIG. 9 where the elastic material is deposited.

11 is an enlarged side sectional view of a state in which the same material as the side wall deposited on the elastic material on the side wall of FIG. 10 is heat-treated.

FIG. 12 is a partial cross-sectional view in the long side direction of a conventional inkjet recording head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Ink jet recording head 2 Pressurized liquid chamber substrate 3 Nozzle plate 4 Pressurized liquid chamber 5 Side wall 5a Material 6 Nozzle 7 Elastic body 8 Groove 9 Vibrating plate film 10 Lower electrode 11 Piezoelectric film 12 Upper electrode 13 Thin film piezoelectric element 20 Mask 21 groove 30 inkjet recording head 31 mask 32 groove 33 auxiliary plate 34 elastic member

Continued on the front page F term (reference) 2C057 AF40 AF93 AG16 AG32 AG42 AG52 AG55 AG99 AP02 AP31 AP52 AQ02 BA03 BA14

Claims (5)

[Claims] A pressurized liquid chamber is provided on one side of a pressurized liquid chamber substrate in a row with a plurality of pressurized liquid chambers separated by side walls, and a surface of the pressurized liquid chamber plate on the side of the pressurized liquid chamber. A nozzle plate formed with a nozzle communicating with each of the pressurized liquid chambers is provided, and a surface of the pressurized liquid chamber substrate opposite to the nozzle plate is provided at a position opposed to each of the pressurized liquid chambers. A groove is formed, and a diaphragm film that pressurizes the ink in the pressurized liquid chamber and a piezoelectric thin film element in which a piezoelectric film is sandwiched between upper and lower electrodes on the diaphragm plate are formed in the groove,
At least the side wall is formed of single crystal silicon;
An inkjet recording head in which a cross-sectional shape of the side wall in the nozzle row direction is formed in a hexagonal shape, wherein the side wall that defines the pressurized liquid chamber has a part formed of a predetermined elastic body. The elastic body has a width of 45% or more and 80% or less of the length of one side of the cross section of the hexagonal side wall in the nozzle row direction, and a predetermined depth in the groove direction from the nozzle plate side end of the side wall. An ink jet recording head formed so far. 2. The elastic body is characterized in that an end of the side wall on the nozzle plate side is patterned with a photoresist or the like, and thereafter, the length of one side of a cross section of the hexagonal side wall in the nozzle row direction by an etching process. A groove having a width of not less than 45% and not more than 80%, and having a predetermined depth in a surface direction on the groove side from the end of the side wall on the nozzle plate side, and the material of the elastic body is deposited in the groove. 2. The ink jet recording head according to claim 1, wherein the ink jet recording head is formed by filling. 3. The elastic body is characterized in that an end portion of the side wall on the nozzle plate side is patterned with a photoresist or the like, and thereafter, the length of one side of a cross section of the hexagonal side wall in the nozzle row direction by an etching process. A groove having a width of not less than 45% and not more than 80% of the groove, and a groove penetrating in a surface direction on the groove side is formed, and an auxiliary plate for closing the groove is arranged at an end of the groove on the nozzle plate side, The material of the elastic body is deposited from the side of the auxiliary plate to the height of the elastic body, and amorphous silicon of the same material as the side wall is deposited on the remaining portion of the groove where the elastic material is deposited to fill the groove. 2. The ink jet recording head according to claim 1, wherein the amorphous silicon is crystallized by heat treatment after the auxiliary plate is removed. 4. A pressurized liquid chamber plate is provided with a plurality of pressurized liquid chambers in a row on one surface of the substrate and separated by a side wall. A nozzle plate formed with a nozzle communicating with each of the pressurized liquid chambers is provided, and a surface of the pressurized liquid chamber substrate opposite to the nozzle plate is provided at a position opposed to each of the pressurized liquid chambers. A groove is formed, and a diaphragm film that pressurizes the ink in the pressurized liquid chamber and a piezoelectric thin film element in which a piezoelectric film is sandwiched between upper and lower electrodes on the diaphragm plate are formed in the groove,
At least the side wall is formed of single crystal silicon;
A method of manufacturing an ink jet recording head, wherein a cross-sectional shape of the side wall in a nozzle row direction is formed in a hexagonal shape, and a part of the side wall defining the pressurized liquid chamber is formed of a predetermined elastic body. Then, the elastic body is patterned in the nozzle row direction by a process of patterning the end of the side wall of the side wall on the nozzle plate side with a photoresist or the like, and an etching process.
Forming a groove having a width of not less than 45% and not more than 80% of the length of one side of the cross section of the rectangular side wall, and having a predetermined depth from the nozzle plate side end of the side wall toward the groove side; A method for manufacturing an ink jet recording head, comprising sequentially performing a process and a process of depositing and filling a predetermined elastic material in the groove. 5. A pressurized liquid chamber plate, wherein a plurality of pressurized liquid chambers are provided in a row on one surface of the substrate with the side walls separated, and a surface of the pressurized liquid chamber plate on the side of the pressurized liquid chamber. A nozzle plate formed with a nozzle communicating with each of the pressurized liquid chambers is provided, and a surface of the pressurized liquid chamber substrate opposite to the nozzle plate is provided at a position opposed to each of the pressurized liquid chambers. A groove is formed, and a diaphragm film that pressurizes the ink in the pressurized liquid chamber and a piezoelectric thin film element in which a piezoelectric film is sandwiched between upper and lower electrodes on the diaphragm plate are formed in the groove,
At least the side wall is formed of single crystal silicon;
A method of manufacturing an ink jet recording head, wherein a cross-sectional shape of the side wall in the nozzle row direction is formed in a hexagon, and a part of the side wall defining the pressurized liquid chamber is formed of a predetermined elastic body. A step of patterning the elastic body with a photoresist or the like at an end of the side wall of the side wall with a photoresist or the like;
A step of forming a groove having a width of 45% or more and 80% or less of the length of one side of the cross section of the rectangular side wall and penetrating in the surface direction on the groove side; After arranging the auxiliary plate for closing the groove, a process of depositing the elastic material from the auxiliary plate side to a predetermined height, and the same material as the side wall is formed on the remaining portion of the groove where the elastic material is deposited. A step of depositing amorphous silicon to fill the groove and a step of removing the auxiliary plate and then performing a heat treatment to crystallize the amorphous silicon are sequentially performed. A method for manufacturing an ink jet recording head.